Super-resolution imaging system and imaging method

Abstract

A super-resolution imaging system and a super-resolution imaging method. A microsphere lens assembly (2) is fixed on a sleeve (1). The microsphere lens assembly (2) comprises a glass sheet (21), a plano-convex lens (22) located at the central position of the glass sheet (21), and a microsphere (23) located at the top end of the plano-convex lens (22). A transparent polymer is arranged between the microsphere (23) and the plano-convex lens (22). The sleeve (1) is fixed on an objective lens (15) to form a super-resolution objective lens, and the super-resolution objective lens is combined with a conventional optical microscope to construct a super-resolution imaging method and system based on microsphere lens assistance, so that real-time, rapid and label-free imaging can be achieved for samples below a diffraction limit scale, the manufacturing process is simple, convenient and rapid and has low costs, and the microsphere lens assisted super-resolution imaging technology is expected to be pushed to further develop towards practical applications. In addition, the microsphere lens is integrated on the objective lens by means of the sleeve to perform super-resolution imaging, thereby constructing a super-resolution imaging method and system which have low complexity and good adjustability, can block the effect of an immersion liquid in a water / oil immersion objective on samples, and achieve controllable positioning of an imaging area.

Description

Super-resolution imaging system and imaging method Technical Field

[0001] The present application relates to the technical field of optical microscope objective lenses, and in particular to a super-resolution imaging system and imaging method. Background Art

[0002] Optical imaging technology plays a crucial role in enabling in-depth scientific research and discovery of the natural world. Optical microscopes have long been the most widely used and convenient imaging systems. However, limited by the diffraction limit of light, conventional optical microscopes can only achieve a resolution of approximately half the wavelength, making them unable to identify objects below the diffraction limit. With the advancement of science and technology and the continued advancement of micro- and nanoscale research, the scale of research objects has gradually evolved from micron-scale cells to nanoscale subcellular structures and structures within single biomacromolecules, placing higher demands on the resolution of microscopic imaging systems. Against this backdrop, technologies that can overcome the diffraction limit and achieve super-resolution imaging have become a hot topic of research. A range of super-resolution imaging techniques have been developed, including stimulated emission depletion (SED), structured light illumination, photosensitive localization microscopy, stochastic optical reconstruction, expansion microscopy, metamaterial perfect lenses, and microsphere-assisted microscopy. Microsphere-assisted microscopy is a label-free, easily integrated, low-cost, and simple super-resolution imaging method.

[0003] The implementation schemes most similar to the present invention are: (1) Patent: CN109643010A, an accessory for an objective lens, including an objective lens housing positioning cover, a support plate on the cover, an adhesive layer on the support plate, and a microball lens. The microball lens can be positioned between the objective lens and the sample to achieve super-resolution imaging. (ii) Gergely Huszka et al. from the Microsystems Laboratory of the Swiss Federal Institute of Technology in Lausanne used barium titanate microspheres fixed on a bracket to perform super-resolution imaging (G. Huszka, H. Yang, and MAMGijs, “Microsphere-based super-resolution scanning optical microscope,” Opt. Express 25, 15079-15092 (2017)); (iii) Sorin Laurentiu Stanescu et al. from LIG Nanowise Limited in the UK fixed microspheres directly to the front end of the objective lens using UV-curable glue and a glass disk and immersed them in water for super-resolution imaging (SLStanescu, S. Vilain, V. Galieni, G. Goh, K. Karpinska, I. Barbolana, A. Sheppard, S. Wright, W. Guo, and L. Li, “Imaging with the Super-resolution Microsphere Amplifying Optical Microscopes,” in English: (iii) Sorin Laurentiu Stanescu et al. from LIG Nanowise Limited in the UK fixed microspheres directly to the front end of the objective lens using UV-curable glue and a glass disk and performed super-resolution imaging by immersing them in water (SLStanescu, S. Vilain, V. Galieni, G. Goh, K. Karpinska, I. Barbolana, A. Sheppard, S. Wright, W. Guo, and L. Li, “Imaging with the Super-resolution Microsphere Amplifying Optical Microscopes,” in English: (iv) Lens(SMAL)Nanoscope”, J.Phys.Conf.Ser.902(1),012014,(2014)).(4) Zengbo Wang et al. from the School of Electronic Engineering at Bangor University, UK, used a plastic sleeve to integrate an objective lens and microspheres deposited in a polymer for super-resolution imaging. They also placed the microspheres on a glass plano-convex lens and fixed them with a polymer, and then integrated the plano-convex lens with the objective lens for super-resolution imaging (B. Yan, Z. Wang, A. L. Parker, Y. Lai, P. John Thomas, L. Yue, and J. N. Monks, “Superlensing microscope objective lens,” Appl. Opt. 56, 3142-3147 (2017); B. Yan, Y. Song, X. Yang, D. Xiong, and Z. Wang, “Unibody microscope objective tipped with a microsphere: design, fabrication, and application in subwavelength imaging,” Appl. Opt. 59, 2641-2648 (2020)).

[0004] Existing super-resolution imaging technologies based on microspheres integrate microspheres with water / oil immersion objectives, but the addition of water / oil to the sample during use is unavoidable, affecting the sample. Methods using metal connecting rods and metal frames to integrate microspheres and the objective lens are highly complex, difficult to operate, and difficult to manufacture. Methods using glass discs and polymers to directly fix the microspheres to the front end of the objective lens make it impossible to adjust the relative distance between the microspheres and the objective lens after assembly. In addition, polymer films deposited with microspheres are directly bonded to plastic sleeves, and the sleeves are then sleeved onto the objective lens. This method requires the microspheres and polymer film as a whole to image the sample. Not only will the surface roughness of the film prevent the microsphere-film from being within the effective imaging range, but the system's resolution may also be limited by polymer films with lower refractive indices, and the fixed sleeve has poor flexibility in adjustment.

[0005] Summary of the Invention

[0006] The purpose of this application is to provide a super-resolution imaging system and a super-resolution imaging method that can realize real-time, rapid and label-free super-resolution imaging of sub-diffraction limit scale objects.

[0007] In a first aspect, an embodiment of the present application provides a super-resolution imaging system, comprising: a sleeve (1), a microball lens assembly (2), a stage (3), a lens holder (4), a lens arm (7), a charge-coupled device (8), a computer (9), an eyepiece (10), an observation head (11), a converter (12), and an objective lens (15); the microball lens assembly (2) is fixed on the sleeve (1), the microball lens assembly (2) comprises a glass sheet, a plano-convex lens located at the center of the glass sheet, and a microball located at the top of the plano-convex lens, a transparent polymer is provided between the microball and the plano-convex lens, and the lens holder (4) The mirror arm (7) is fixedly connected to the observation head (11), the observation head (11) is fixedly connected to the charge coupled device (8) and the eyepiece (10), the charge coupled device (8) is electrically connected to the computer (9), the mirror arm (7) is also connected to the converter (12), the converter (12) is fixed with a plurality of the objective lenses (15), the objective lenses (15) are fixed with the sleeve to form a super-resolution objective lens, the mirror arm (7) is also fixedly connected to the stage (3), and a sample (16) is installed above the stage (3).

[0008] Optionally, the sleeve (1) includes a fixed part and a rotating part, the fixed part is nested and fixed on the objective lens (15), the rotating part is sleeved on the fixed part and can rotate around the fixed part, the rotating part includes a hollow cylinder and a ring fixedly connected to the hollow cylinder, the inner wall of the hollow cylinder is provided with a thread, and the rotating part can be adjusted to move up and down along the fixed part by rotating the thread, and the glass piece of the microsphere lens assembly (2) is fixed to the ring.

[0009] Optionally, the rotating part further includes a support column, which is fixedly connected to the ring and the hollow cylinder.

[0010] Optionally, the sleeve may be made of 3D printable Teflon, resin, or nylon material, or machinable stainless steel or metal alloy material.

[0011] Optionally, the microspheres include hemispheres, spherical segments, spherical caps, and deformed microspheres, and the size of the microspheres is 5 microns to 35 microns.

[0012] Optionally, the microspheres are made of a material with a high refractive index, and the high refractive index material includes barium titanate glass, chalcogenide glass or tellurite glass.

[0013] Optionally, the transparent polymer includes polydimethylsiloxane or polymethyl methacrylate or UV curing glue.

[0014] Optionally, a coarse adjustment knob (5) and a fine adjustment knob (6) are further provided on the mirror arm (7).

[0015] Optionally, a longitudinal moving hand wheel (13) and a transverse moving hand wheel (14) are further provided below the loading platform (3).

[0016] In a second aspect, the embodiments of the present application further provide an imaging method of a super-resolution imaging system, comprising the following steps:

[0017] The microball lens assembly (2) is fixed on the sleeve (1), wherein the microball lens assembly (2) comprises a glass sheet, a plano-convex lens located at the center of the glass sheet, and a microball located at the top of the plano-convex lens, wherein a transparent polymer is provided between the microball and the plano-convex lens, and the sleeve (1) is fixed on the objective lens (15) to form a super-resolution objective lens;

[0018] Fixing the sample on the stage (3), adjusting the relative position between the microsphere and the sample by adjusting the stage (3), and observing the area of ​​interest through the eyepiece (10);

[0019] By adjusting the sizes of the sleeve (1) and the glass sheet, the microsphere lens assembly can be integrated with an objective lens (15) of any magnification, and the super-resolution microscope objective lens can be used to achieve super-resolution imaging of the sample on the stage (3), and the imaging can be transmitted to a computer (9) through a charge-coupled device (8).

[0020] Optionally, the sample is an object with a characteristic size below the diffraction limit, and the sample includes a Blu-ray disc or porous alumina.

[0021] The present invention provides a super-resolution imaging system and a super-resolution imaging method, wherein the microball lens assembly (2) is fixed on the sleeve (1), wherein the microball lens assembly (2) comprises a glass sheet, a plano-convex lens located at the center of the glass sheet, and a microball located at the top of the plano-convex lens, wherein a transparent polymer is provided between the microball and the plano-convex lens, and the sleeve (1) is fixed on the objective lens (15) to form a super-resolution objective lens. In combination with a conventional optical microscope objective lens, a super-resolution imaging method and system based on the assistance of microball lenses are constructed, which can realize real-time, rapid, and label-free imaging of samples below the diffraction limit scale. The manufacturing process is simple, rapid, and low-cost, and is expected to promote the development of super-resolution imaging technology assisted by microball lenses further towards practical applications. In addition, the present invention integrates the microball lens on the objective lens through the sleeve for super-resolution imaging, which has low complexity, good controllability, can block the influence of the immersion liquid in the water / oil lens on the sample, and has a controllable positioning of the imaging area. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0023] FIG1 is a schematic structural diagram of a super-resolution imaging system provided by an embodiment of the present invention;

[0024] FIG2 is a schematic structural diagram of a microsphere lens assembly provided in one embodiment of the present application;

[0025] FIG3 is a schematic structural diagram of a sleeve provided in one embodiment of the present application;

[0026] FIG4 is a flowchart of the steps of an imaging method of a super-resolution imaging system provided by an embodiment of the present application;

[0027] FIG5 is a schematic diagram showing a comparison of light field focusing intensities according to an embodiment of the present application;

[0028] FIG6 is a simulation calculation of the light field focusing intensity after adding a glass sheet (left) and UV-curing adhesive (right) according to an embodiment of the present application;

[0029] FIG. 7 is a side view (left) of a composite micro-sphere lens used in an experiment according to an embodiment of the present application and a schematic diagram of a Blu-ray disc grating structure (right).

[0030] FIG8 is a fringe pattern of a Blu-ray disc observed using a microsphere-assisted super-resolution microscope objective lens according to an embodiment of the present application. DETAILED DESCRIPTION

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0032] Please refer to Figure 1, which is a schematic structural diagram of a super-resolution imaging system provided in an embodiment of the present application, comprising: a sleeve 1, a microsphere lens assembly 2, an objective stage 3, a mirror base 4, a mirror arm 7, a charge-coupled device 8, a computer 9, an eyepiece 10, an observation head 11, a converter 12, and an objective lens 15. The microsphere lens assembly 2 is fixed to the sleeve 1, the mirror base 4 is fixedly connected to the mirror arm 7, the mirror arm 7 is fixedly connected to the observation head 11, the observation head 11 is fixedly connected to the charge-coupled device 8 and the eyepiece 10, the charge-coupled device 8 is electrically connected to the computer 9, the mirror arm 7 is further connected to the converter 12, the converter 12 is fixed to a plurality of objective lenses 15, and the objective lenses 15 are fixed to the sleeve 1 to form a super-resolution objective lens, the mirror arm 7 is further fixedly connected to the objective stage 3, and a sample 16 is mounted above the objective stage 3. The specific implementation of each component is described in detail below.

[0033] 2 , the microsphere lens assembly 2 includes a glass sheet 21 , a plano-convex lens 22 located at the center of the glass sheet 21 , and microspheres 23 located at the top of the plano-convex lens 22 . Transparent polymer is placed between the microspheres 23 and the plano-convex lens 22 .

[0034] Furthermore, the microspheres 23 include hemispheres, spherical segments, spherical caps, and deformed microspheres, and the size of the microspheres ranges from 5 microns to 35 microns. The microspheres 23 are made of a high refractive index material, such as barium titanate glass, chalcogenide glass, or tellurite glass.

[0035] Furthermore, the transparent polymer includes polydimethylsiloxane or polymethyl methacrylate or UV curing glue.

[0036] This embodiment uses a controllable preparation method to make a plano-convex lens on a glass sheet, and then uses precise micro-manipulation and heat / light curing to controllably position and fix the microspheres on the upper surface of the center position of the plano-convex lens, and integrate them with the sleeve and assemble them on the objective lens to form a microsphere-assisted super-resolution microscope objective lens. The super-resolution microscope objective lens provided by this embodiment does not contact the sample by adding water or oil above the glass sheet, and there is no potential contamination or impact. Compared with other methods of directly placing microspheres on a plane or flat plate, the present application places the microspheres on the plano-convex lens, which can effectively avoid the problem that other parts of the objective lens first contact the sample during microsphere-assisted imaging, causing the microspheres to be unable to achieve imaging. At the same time, the plano-convex lens can be adjusted as needed, and the plano-convex lens has a certain enhancing effect on the imaging effect of the microspheres.

[0037] Please refer to FIG3 . The sleeve 1 includes a fixed portion 101 and a rotating portion 102. The fixed portion 101 is nested and fixed on the objective lens 15. The rotating portion 102 is sleeved on the fixed portion 101 and can rotate around the fixed portion 101. The rotating portion 102 includes a hollow cylinder 103 and a ring 104 fixedly connected to the hollow cylinder 103. The inner wall of the hollow cylinder 103 is provided with a thread. By rotating the thread, the rotating portion 102 can be adjusted to move up and down along the fixed portion 101. The glass sheet 21 of the microsphere lens assembly (2) is fixed to the ring 104.

[0038] Furthermore, the rotating part 102 further includes a support column 105 , and the support column 105 is fixedly connected to the ring 104 and the hollow cylinder 103 .

[0039] Furthermore, the sleeve may be made of 3D printable Teflon, resin, or nylon material, or machinable stainless steel or metal alloy material.

[0040] Furthermore, the mirror arm 7 is also provided with a coarse adjustment knob 5 and a fine adjustment knob 6. When adjusting the stage 3, coarse adjustment and fine adjustment can be selected, and the sample can be accurately adjusted to the best observation position.

[0041] Furthermore, a longitudinal moving hand wheel 13 and a transverse moving hand wheel 14 are provided below the stage 3 to further adjust the observation position of the sample.

[0042] Referring to FIG. 4 , the imaging method of the super-resolution imaging system provided in the above embodiment of the present application is as follows:

[0043] Step S110: Fix the microball lens assembly 2 on the sleeve 1. The microball lens assembly 2 includes a glass sheet, a plano-convex lens located at the center of the glass sheet, and a microball located at the top of the plano-convex lens. A transparent polymer is placed between the microball and the plano-convex lens. Fix the sleeve 1 on the objective lens 15 to form a super-resolution objective lens.

[0044] Step S120 : Fix the sample on the stage 3 , adjust the relative position between the microsphere and the sample by adjusting the stage 3 , and observe the region of interest through the eyepiece 10 .

[0045] As will be understood, the imaging system comprises an observation head for directly observing the sample through an eyepiece 10 and a charge-coupled device 8 (CCD image sensor) mounted on the lens barrel. The image is transmitted via the CCD to a computer as a digital image. The stage 3 controls the position of the sample along the x, y, and z coordinate axes. Coarse and fine adjustments are available for stage 3, allowing the sample to be accurately positioned for optimal observation.

[0046] Furthermore, the sample is an object with a characteristic size below the diffraction limit, such as a Blu-ray disc and porous alumina.

[0047] Step S130: By adjusting the size of the sleeve 1 and the glass sheet, the microsphere lens assembly can be integrated with the objective lens 15 of any magnification. The super-resolution microscope objective lens can be used to achieve super-resolution imaging of the sample on the stage 3, and the image can be transmitted to the computer 9 through the charge-coupled device 8.

[0048] It can be understood that by adjusting the size of the sleeve 1 and the glass sheet, the microsphere lens assembly can be integrated with an objective lens of any magnification. The assembled microsphere-assisted super-resolution microscope objective lens can be used to achieve super-resolution imaging of sub-diffraction limit scale samples on the translation stage. The sample to be observed is adjusted under the microsphere and adjusted to the appropriate position to obtain a digital format image received by the CCD and transmitted to the computer.

[0049] Please refer to Figure 5, which compares the light field focusing intensity of a 2D equivalent model of a microsphere lens (left) simulated using finite element method (FEM) in an embodiment of this application and a microsphere lens placed on a plano-convex lens (right). The configurations are identical except for the addition of a polydimethylsiloxane plano-convex lens in the right figure. The simulation results show that the photon nanojet intensity of the microsphere lens with a radius of 30 μm is approximately 5.42706, while the photon nanojet intensity of the microsphere lens with the same radius placed on a plano-convex lens is approximately 6.58539.

[0050] Please refer to Figure 6, which provides a simulation calculation of the light field focusing intensity after adding a glass sheet (left) and UV-curing glue (right) for the application embodiment. This embodiment takes into account the possible impact of the glass sheet and UV-curing glue on the microsphere lens, and also simulates and calculates the light field focusing intensity after adding a glass sheet (left) and UV-curing glue (right). The simulation results show that the intensity of the photon nanojet is 8.32152 after adding the glass sheet, which is significantly enhanced. When UV-curing glue is added on top of the glass sheet, the intensity of the photon nanojet is reduced, but its length is significantly increased.

[0051] 7 , which shows a side view of a composite micro-sphere lens (left) and a schematic diagram of a Blu-ray Disc grating structure (right) used in the experiments of the present invention, wherein the line width h=200nm and the groove width g=100nm.

[0052] Please refer to Figure 8, which shows a Blu-ray disc fringe pattern observed using a microsphere-assisted super-resolution microscope provided by an embodiment of the present application. Conventional optical microscopes cannot observe the grating fringe structure of a Blu-ray disc. However, the microsphere-assisted super-resolution microscope, as shown below, clearly shows the grating fringe structure. The radius of the microsphere is approximately 15 μm.

[0053] The super-resolution imaging system and super-resolution imaging method provided in the above embodiments of the present application fix the microball lens assembly 2 on the sleeve 1. The microball lens assembly 2 includes a glass sheet, a plano-convex lens located at the center of the glass sheet, and a microball located at the top of the plano-convex lens. A transparent polymer is formed between the microball and the plano-convex lens. The sleeve 1 is fixed on the objective lens 15 to form a super-resolution objective lens. Combined with a conventional optical microscope objective lens, a super-resolution imaging method and system assisted by a microball lens are constructed, which can achieve real-time, rapid, and label-free imaging of samples below the diffraction limit scale. The production process is simple, rapid, and low-cost, and is expected to promote the development of microball lens-assisted super-resolution imaging technology further towards practical applications. In addition, the present application integrates the microball lens on the objective lens through a sleeve for super-resolution imaging, which has low complexity, good controllability, can block the influence of the immersion liquid in the water / oil mirror on the sample, and has a controllable positioning of the imaging area. Super-resolution imaging method and system.

[0054] It can be understood that the various technical features of the above-described embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the various technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0055] The above are merely preferred embodiments of the present application and only specifically describe the technical principles of the present application. These descriptions are intended only to explain the principles of the present application and should not be construed in any way as limiting the scope of protection of the present application. Based on the explanations herein, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present application, as well as other specific implementations of the present application that can be conceived by those skilled in the art without inventive effort, shall be included within the scope of protection of the present application.

[0056] In the description provided herein, numerous specific details are set forth. However, it is understood that embodiments of the present invention may be practiced without these specific details. Similarly, in order to streamline the present invention and aid in understanding one or more of the various inventive aspects, in the above description of exemplary embodiments of the present invention, various features of embodiments of the present invention are sometimes grouped together into a single embodiment, figure, or description thereof. The claims that follow the detailed description are hereby expressly incorporated into that detailed description, with each claim itself serving as a separate embodiment of the present invention.

[0057] Those skilled in the art will appreciate that the modules in the devices of the embodiments can be adaptively changed and installed in one or more devices different from the embodiments. The modules, units, or components in the embodiments can be combined into one module, unit, or component, and furthermore, they can be divided into multiple submodules, subunits, or subcomponents. Except that at least some of such features and / or processes or units are mutually exclusive.

[0058] It should be noted that the above embodiments illustrate rather than limit the invention, and that alternative embodiments may be devised by a person skilled in the art without departing from the scope of the appended claims. In the claims, any reference signs placed between brackets should not be construed as limiting the claims. The word "" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The present invention may be implemented by means of hardware comprising several different elements and by means of appropriately programmed computers. In a unit claim enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third etc. does not indicate any order. These words may be interpreted as names. The steps in the above embodiments should not be understood as limiting the order of execution unless otherwise specified.

Claims

1. A super-resolution imaging system, characterized in that: include: A sleeve (1), a microball lens assembly (2), a stage (3), a lens holder (4), a lens arm (7), a charge coupled device (8), a computer (9), an eyepiece (10), an observation head (11), a converter (12) and an objective lens (15); the microball lens assembly (2) is fixed on the sleeve (1), the microball lens assembly (2) comprises a glass sheet, a plano-convex lens located at the center of the glass sheet and a microball located at the top of the plano-convex lens, a transparent polymer is between the microball and the plano-convex lens, the lens holder (4) is fixedly connected to the lens arm (7), The observation head (11) is fixedly connected to the mirror arm (7), the charge coupled device (8) and the eyepiece (10) are fixedly connected to the observation head (11), the charge coupled device (8) is electrically connected to the computer (9), the mirror arm (7) is also connected to the converter (12), the converter (12) is fixed with a plurality of objective lenses (15), the objective lenses (15) are fixed with the sleeve to form a super-resolution objective lens, the mirror arm (7) is also fixedly connected to the stage (3), and a sample (16) is installed above the stage (3).

2. The super-resolution imaging system according to claim 1, characterized in that: The sleeve (1) comprises a fixed part and a rotating part, wherein the fixed part is nested and fixed on the objective lens (15), and the rotating part is sleeved on the fixed part and can rotate around the fixed part. The rotating part comprises a hollow cylinder and a ring fixedly connected to the hollow cylinder, and the inner wall of the hollow cylinder is provided with a thread. By rotating the thread, the rotating part can be adjusted to move up and down along the fixed part, and the glass sheet of the microsphere lens assembly (2) is fixed to the ring.

3. The super-resolution imaging system according to claim 2, characterized in that: The rotating part also includes a supporting column, and the supporting column is fixedly connected to the ring and the hollow cylinder.

4. The super-resolution imaging system according to claim 2, characterized in that: The sleeve may be made of 3D printable Teflon, resin or nylon material, or machinable stainless steel or metal alloy material.

5. The super-resolution imaging system according to claim 1, characterized in that: The microspheres include hemispheres, spherical segments, spherical caps, and deformed microspheres, and the size of the microspheres is 5 micrometers to 35 micrometers.

6. The super-resolution imaging system according to claim 4, characterized in that: The material of the microsphere is a material with a high refractive index, and the material with a high refractive index includes barium titanate glass, chalcogenide glass or tellurite glass.

7. The super-resolution imaging system according to claim 1, characterized in that: The transparent polymer includes polydimethylsiloxane or polymethyl methacrylate or ultraviolet curing glue.

8. The super-resolution imaging system according to claim 1, characterized in that: The mirror arm (7) is also provided with a coarse adjustment knob (5) and a fine adjustment knob (6).

9. The super-resolution imaging system according to claim 1, characterized in that: A longitudinal moving hand wheel (13) and a transverse moving hand wheel (14) are also provided below the loading platform (3).

10. An imaging method of a super-resolution imaging system, characterized in that: In the super-resolution imaging system according to claim 1, the method comprises the following steps: The microball lens assembly (2) is fixed on the sleeve (1), wherein the microball lens assembly (2) comprises a glass sheet, a plano-convex lens located at the center of the glass sheet, and a microball located at the top of the plano-convex lens, wherein a transparent polymer is provided between the microball and the plano-convex lens, and the sleeve (1) is fixed on an objective lens (15) to form a super-resolution objective lens; Fixing the sample on the stage (3), adjusting the relative position between the microsphere and the sample by adjusting the stage (3), and observing the area of ​​interest through the eyepiece (10); By adjusting the size of the sleeve (1) and the glass sheet, the microsphere lens assembly can be integrated with an objective lens (15) of any magnification, and the super-resolution microscope objective lens can be used to achieve super-resolution imaging of the sample on the stage (3), and the imaging can be transmitted to a computer (9) through a charge-coupled device (8).

11. The imaging method of the super-resolution imaging system according to claim 10, characterized in that: The sample is an object with a characteristic size below the diffraction limit, and the sample includes a blue-ray disc or porous alumina.

Images