Fan filter unit comprising pair of cross-flow fans

Abstract

A fan filter unit of the present invention has excellent air purifying efficiency by addressing an issue that air is concentrated in the vicinity of a filter, because a pair of cross-flow fans rotate in different directions. Also, the fan filter unit of the present invention is capable of effectively carrying out air conditioning by allowing air in a clean room to evenly flow throughout the entire filter surface.

Description

Fan filter unit comprising a pair of cross-flow fans

[0001] The present invention relates to a fan filter unit (FFU) including a pair of cross-flow fans, and more particularly, to a fan filter unit including a pair of cross-flow fans capable of controlling the direction of air discharged to the filter surface within the FFU while ensuring that discharged air of the FFU is discharged evenly across the entire filter surface.

[0002] Cleanroom technology, which creates clean spaces where contamination is controlled to a set level, is essential for preventing particle and chemical contamination in semiconductors, FPDs, and precision manufacturing. Cleanrooms are energy-intensive and consume large amounts of energy to maintain optimal operating conditions for manufacturing equipment, including temperature, humidity, pressure, and cleanliness. Therefore, they are classified as energy-intensive compared to general industrial facilities.

[0003] The development of domestic cleanroom systems for semiconductor manufacturing began in earnest in the 1990s, following the development and adoption of FFUs. Prior to this, cleanrooms were primarily based on system ceilings. To maintain internal cleanliness, open plenum systems utilized large axial fans to circulate clean air. Clean tunnel modules (CTMs) combined filters and fans in a single module, supplying clean air.

[0004] The FFU-type clean room has the advantage of being able to reduce construction costs by allowing the building's floor height to be relatively lowered, and maintaining high cleanliness by simply installing the FFU only in the necessary areas.

[0005] In addition, unlike the early FFUs that were operated at a single wind speed, recent introduction of various control concepts allows the wind speed to be freely changed according to changes in process, usage conditions, and layout even after the clean room is installed, and has the advantage of being able to operate with low noise and low vibration.

[0006] However, current FFUs utilizing axial fans suffer from the problem of air being concentrated toward the edges of the filter, with little or no flow to the center of the square filter. This leads to excessively shortened filter life and subsequent problems, such as reduced air purification efficiency.

[0007] The present invention aims to provide a fan filter unit including a pair of cross-flow fans capable of controlling the direction of air discharged to the filter surface within the FFU while ensuring that the discharged air of the FFU is discharged evenly over the entire filter surface.

[0008] In order to solve the above-described problem, the present invention provides a fan filter unit for air conditioning installed on the ceiling of a clean room, comprising: a main frame having a hexahedral shape with an open lower surface; a pair of fan housings formed to protrude from an upper surface of the main frame, and arranged in parallel and spaced apart from a center line of the upper surface of the main frame at a predetermined interval to form a structure symmetrical to each other; and a pair of cross-flow fans each independently installed within the pair of fan housings.

[0009] According to a preferred embodiment of the present invention, the discharge wind direction and wind speed of each of the pair of cross-flow fans can be independently controlled.

[0010] According to a preferred embodiment of the present invention, the pair of cross-flow fans may have discharge wind directions determined in opposite directions, and the discharge wind direction may be directed outward based on the center line of the upper surface of the main frame.

[0011] According to a preferred embodiment of the present invention, the present invention may further include a filter installed on the opening side of the main frame, but having a shape corresponding to the upper surface of the main frame.

[0012] According to a preferred embodiment of the present invention, the present invention may include a filter fixing member that is installed in a right angle shape at four corners of the outer surface of the main frame corresponding to the positions where the four corners of the filter meet, thereby fixing the filter to the main frame.

[0013] According to a preferred embodiment of the present invention, a pair of handle parts may be formed on the upper surface of the main frame, and are arranged in parallel and symmetrical with each other at a predetermined interval from the center line of the upper surface of the main frame, and are formed on the outer side of the pair of fan housings based on the center line of the upper surface of the main frame.

[0014] According to a preferred embodiment of the present invention, the fan housing may include: a rectangular perforation formed on the upper surface of the main frame; and a fan receiving portion formed by bending so as to receive a cross-flow fan by extending and protruding a frame from each of a pair of long sides of the perforation.

[0015] According to a preferred embodiment of the present invention, the vertical cross-section of the fan receiving portion has a hook shape, and each fan receiving portion included in the pair of fan housings can be formed in a shape that is mutually inverted left and right.

[0016] According to a preferred embodiment of the present invention, the fan housing may further include a fan controller that controls the motor of the cross-flow fan.

[0017] According to a preferred embodiment of the present invention, the average area of ​​the upper surface of the main frame is 600,000 to 700,000 mm 2 It could be.

[0018] By using the present invention, it is possible to implement a fan filter unit including a pair of cross-flow fans that can control the direction of air discharged to the filter surface within the FFU while ensuring that the discharged air of the FFU is discharged evenly over the entire filter surface.

[0019] In addition, by utilizing the present invention, there is an effect that a fan filter unit including a pair of cross-flow fans can be implemented that can improve the filter utilization efficiency by allowing the air inside the clean room to flow uniformly through the entire filter surface.

[0020] Figure 1 is a front perspective view of a fan filter unit according to a preferred embodiment of the present invention.

[0021] Figure 2 is a partially enlarged view of a fan housing according to a preferred embodiment of the present invention.

[0022] Figure 3 is a schematic diagram showing the usage state of a fan filter unit according to a preferred embodiment of the present invention.

[0023] Figure 4 is an exploded perspective view of a fan filter unit according to a preferred embodiment of the present invention.

[0024] Figure 5 is a schematic diagram showing the usage state of a fan filter unit according to a preferred embodiment of the present invention.

[0025] Figure 6 is an image showing the distance between the centers of the punching holes of the embodiments.

[0026] Figure 7 is an image showing the position 30 cm below the filter, which is the flow rate measurement position of the examples.

[0027] Figure 8 is a graph showing wind speed distribution values ​​obtained through simulation of examples.

[0028] Figure 9 is a graph showing the average wind speed (Vavg) values ​​obtained through simulation of examples.

[0029] Figure 10 is a graph showing the flow rate values ​​obtained through simulation of examples and comparative examples.

[0030] Figure 11 is a graph showing the airflow uniformity (RSD, relative standard deviation) results of examples and comparative examples.

[0031] Figure 12 is a graph showing the central flow velocity measurements of Examples 4 and 5.

[0032] Figure 13 is a graph showing the central flow velocity measurements of Examples 4 and 5.

[0033] Hereinafter, with reference to the attached drawings, embodiments of the present invention will be described in detail so that a person having ordinary knowledge in the technical field to which the present invention pertains can easily practice the present invention.

[0034] As described above, current FFUs utilizing axial fans suffer from the problem of air being concentrated toward the edges of the filter, with little or no flow to the center of the square filter. This leads to excessively shortened filter life and subsequent problems, such as reduced filter air purification efficiency.

[0035] Accordingly, the present invention seeks to solve the above limitations by providing a fan filter unit installed on the ceiling of a clean room for air conditioning, comprising: a main frame having a hexahedral shape with an open lower surface; a pair of fan housings formed to protrude from an upper surface of the main frame, and arranged in parallel and symmetrical with a predetermined interval from the center line of the upper surface of the main frame; and a pair of cross-flow fans each independently installed within the pair of fan housings.

[0036] Accordingly, a fan filter unit including a pair of cross-flow fans capable of controlling the direction of air discharged to the filter surface within the FFU while ensuring that the discharge air of the FFU is discharged evenly across the entire filter surface can be implemented.

[0037] In addition, a fan filter unit including a pair of cross-flow fans was implemented to improve filter utilization efficiency by allowing the air inside the clean room to flow uniformly over the entire filter surface.

[0038] Fig. 1 is a front perspective view of a fan filter unit according to a preferred embodiment of the present invention. Referring to Fig. 1, the fan filter unit (1) of the present invention includes a main frame (10) in a hexahedral shape with an open lower surface, a pair of fan housings (20) formed to protrude from the upper surface of the main frame (10), but arranged in parallel and spaced apart from the center line of the upper surface of the main frame (10) at a predetermined interval so as to be symmetrical to each other, and a pair of cross-flow fans (30) each independently installed within the pair of fan housings.

[0039] First, the main frame (10) has a hexahedral shape with an open lower surface.

[0040] The main frame (10) is a case for a fan filter unit (1), and a pair of cross-flow fans (30) are mounted on the main frame (10) to circulate the air inside the clean room.

[0041] A fan housing (20) is formed on the upper surface of the main frame (10), and the lower surface of the main frame (10) is opened to form an opening. Wind generated by a cross-flow fan (30) is discharged through the opening of the main frame (10) to circulate and purify the air inside the clean room.

[0042] The size of the main frame (10) can be formed to an appropriate size to facilitate movement and installation of the fan filter unit (1) while improving air purification efficiency.

[0043] Currently, FFUs are standardized as 600x600(mm) or 1200x600(mm).

[0044] The average area of ​​the upper surface of the main frame (10) is 600,000 to 700,000 mm 2It may be, and more preferably, the average horizontal length of the main frame (10) may be 1000 to 1200 mm, and the average vertical length may be 500 to 600 mm.

[0045] In addition, the height of the main frame (10) can be formed at a height that facilitates air purification by installing the fan filter unit (1) in the clean room, and preferably, the average height of the main frame (10) can be 150 to 200 mm.

[0046] Next, the fan housings (20) are formed in pairs.

[0047] The fan housing (20) is formed to protrude from the upper surface of the main frame (10), and is formed to be arranged in parallel and symmetrical with respect to the center line of the upper surface of the main frame (10) at a predetermined interval. That is, a pair of fan housings (20) are formed to be arranged in parallel and symmetrical with respect to the center line of the upper surface of the main frame (10) at an equal interval.

[0048] Referring to Fig. 1, a pair of fan housings (20A, 20B) are arranged in parallel and spaced apart at a predetermined interval on the upper surface of the main frame (10) to form a mutually symmetrical structure. At this time, the pair of fan housings (20A, 20B) may be formed in a mutually left-right symmetrical structure. Through this, the present invention can independently mount a pair of cross-flow fans (30), and further, can independently adjust the wind direction, wind speed, etc. of the pair of cross-flow fans (30).

[0049] According to a preferred embodiment of the present invention, the distance between the centers of a pair of fan housings (20) may be 180 to 280 mm. More preferably, it may be 200 to 250 mm. Even more preferably, it may be 220 to 240 mm. In this case, there is an advantage in that the ventilation amount is large and the RSD (Relative Standard Deviation) is excellent, enabling efficient air purification. In particular, the uniformity of the discharged flow rate over the entire filter surface and the maximum flow rate in a specific area can be improved.

[0050] If the distance between the centers of a pair of fan housings (20) is less than the above range, the distance between the cross-flow fans may become narrow, resulting in increased unevenness of the flow rate. In addition, if the distance between the centers of a pair of fan housings (20) exceeds the above range, the maximum flow rate in a specific area may decrease.

[0051] Fig. 2 is a partially enlarged view of a fan housing (20) according to a preferred embodiment of the present invention. In addition, Fig. 3 is a schematic diagram showing a state of use of a fan filter unit (1) according to a preferred embodiment of the present invention. Referring to Figs. 2 and 3, the fan housing (20) includes a rectangular perforation (210) formed on the upper surface of the main frame (10) and a fan receiving portion (220) formed by bending so that a frame can be accommodated by extending and protruding from a pair of long sides of the perforation portion (210) to receive a cross-flow fan (30).

[0052] The perforation portion (210) is formed by perforating a rectangular shape on the upper surface of the main frame (10), and can be formed to be arranged in parallel and spaced apart at equal intervals from an imaginary center line passing through the imaginary center of the upper surface of the main frame (10).

[0053] A frame may be extended from each of a pair of long sides of the four sides of the rectangular perforation (210) and protrude toward the upper side of the upper surface of the main frame (10), and a fan receiving portion (220) may be formed so that the protruding frame can be bent to accommodate a cross-flow fan (30) in the bent portion.

[0054] At this time, the fan receiving portion (220) can have a bent shape by the above-described bending, and preferably, the vertical cross-section of the fan receiving portion (220) can have a hook shape. In addition, each fan receiving portion (220) included in a pair of fan housings (20A, 20B) can be formed in a shape that is mutually inverted left and right.

[0055] In this regard, referring to FIG. 1, it can be seen that a pair of fan housings (20A, 20B) are formed in a shape in which the frames extend and protrude above the upper surface of the main frame (10). In addition, the protruding frame is bent to form a fan receiving portion (220) in a hook shape, and each fan receiving portion (220) included in the pair of fan housings (220A, 220B) can be formed in a shape that is inverted left and right. Accordingly, as described below, the discharge wind direction of the pair of cross-flow fans (30) can be determined in opposite directions, and the problem of air being concentrated toward the periphery of the filter due to the pair of cross-flow fans rotating in different directions can be solved, thereby improving the air purification efficiency.

[0056] In addition, the fan housing (20) may further include a fan controller that controls the motor of the cross-flow fan (30). At this time, the fan controller may be independently installed in each of the pair of fan housings (20A, 20B), so that each of the pair of cross-flow fans (30A, 30B) can be independently controlled. Specifically, the wind speed, wind volume, wind direction, etc. of the wind discharged by each of the pair of cross-flow fans (30A, 30B) can be independently controlled.

[0057] Next, the cross-flow fans (30) are each independently installed in a pair of fan housings (20).

[0058] That is, one cross-flow fan (30A, 30B) can be mounted in each of the fan receiving portions (220A, 220B) formed in a pair of fan housings (20A, 20B). Accordingly, the discharge wind direction and wind speed of each of the pair of cross-flow fans can be independently controlled, thereby enabling the air within the clean room to be circulated evenly.

[0059] According to a preferred embodiment of the present invention, the discharge wind direction of a pair of cross-flow fans (30A, 30B) can be determined in opposite directions. In addition, the discharge wind direction of the pair of cross-flow fans (30A, 30B) is preferably directed outward with respect to the center line of the upper surface of the main frame (10).

[0060] In this regard, referring to FIG. 3, a pair of cross-flow fans (30A, 30B) can rotate in different directions to evenly discharge wind. Specifically, wind can be discharged (W1) in various directions from the cross-flow fans (30A, 30B), and the wind is evenly delivered downward (W2) while passing through the filter (40) surface, so that the air inside the clean room flows evenly. Accordingly, the problem of air being concentrated in the periphery can be solved, thereby improving air purification efficiency.

[0061] That is, in the case of existing fan filter units, there was a problem that the FFU air could not be circulated evenly by using a centrifugal fan or an axial fan, so that the air was concentrated toward the periphery of the FFU. In order to improve this problem, the present invention independently adjusts a pair of cross-flow fans, but sets the discharge wind direction in opposite directions so that the air inside the FFU flows evenly, thereby improving the air purification efficiency.

[0062] The cross-flow fan (30) can be of various types commonly used in the relevant technical field, but preferably, one having an average length of 350 to 600 mm can be used. In addition, the average weight of the cross-flow fan (30) is preferably 5 kg or less. In this case, the size and weight of the fan filter unit (1) make it easy to install and transport, so that it can be usefully utilized in various clean rooms.

[0063] Meanwhile, a drive system can be connected to the rotation axis of the cross-flow fan (30). The drive system can be of various types available in the relevant technical field, and is omitted in the drawing.

[0064] In addition, the present invention may further include a filter installed on the opening side of the main frame (10) and having a shape corresponding to the upper surface of the main frame (10).

[0065] Referring to Fig. 1, it can be seen that a filter (40) is installed to be connected to the opening side of the main frame (10).

[0066] Fig. 4 is an exploded perspective view of a fan filter unit (1) according to a preferred embodiment of the present invention. Referring to Fig. 4, it can be seen that a filter (40) is installed in a shape corresponding to the upper surface of the main frame (10) at a position corresponding to the opening side, i.e., the lower surface, of the main frame (10).

[0067] Preferably, the filter (40) can be installed with the same size and shape as the upper surface of the main frame (10).

[0068] In addition, referring to FIG. 4, a filter fixing member (410) may be further included that is installed in a right angle shape at the four corners of the outer surface of the main frame (10) corresponding to the positions where the four corners of the filter (40) meet, thereby fixing the filter (40) to the main frame (10). Through this, the filter (40) can be firmly fixed to the lower portion of the main frame (10), i.e., the opening side.

[0069] In this regard, referring to FIG. 2, the present invention can be installed so that the filter (40) forms the lower surface of the main frame (10).

[0070] In this case, the wind generated from the cross-flow fan (30) is discharged into the clean room through the entire surface of the filter (40), thereby allowing the air inside the clean room to flow evenly, thereby effectively performing air conditioning.

[0071] The direction of the pleats of the filter (40) used in the present invention may be arranged parallel so that the direction of the discharged air is parallel to the filter grooves on the side in contact with the filter, or may be arranged vertically so that the direction of the discharged air is perpendicular to the filter grooves on the side in contact with the filter.

[0072] Preferably, the filter (40) used in the present invention can be installed in a parallel arrangement so that the pleats are arranged in a direction parallel to the wind direction discharged from the cross-flow fan (30). In this case, the air discharged from the cross-flow fan (30) can be induced to flow along the grooves of the filter (40), and thus the discharged air can be more smoothly propagated across the entire filter surface.

[0073] In this regard, Fig. 5 is a schematic diagram showing a state of use of a fan filter unit according to a preferred embodiment of the present invention. Referring to Fig. 5, a filter (40) may be used in which a plurality of pleats are formed in a direction parallel to the wind direction discharged from a cross-flow fan (30), and accordingly, the wind direction is induced (W) so that the air discharged from the cross-flow fan (30) flows from the center to the two peripheral parts along the pleats of the filter (40). L , W R ) can be.

[0074] That is, the present invention can effectively perform air conditioning by allowing the wind generated from the cross-flow fan (30) to be discharged into the clean room through the entire surface of the filter (40) and at the same time forming the direction of the pleats of the filter (40) to be parallel to the wind direction discharged from the cross-flow fan (30), thereby allowing the air inside the clean room to flow uniformly.

[0075] Specifically, in the case of existing fan filter units, there was a difficulty in that the air conditioning performance was reduced because the flow passing through the fan was discharged in the direction of rotation and passed through the filter in a direction not aligned with the filter folds. Therefore, the present invention effectively transmits the discharged wind from the center to the periphery through the entire surface of the filter (40) and flows into the clean room, thereby uniformly circulating the air inside the clean room, thereby improving the air conditioning performance.

[0076]

[0077] Hereinafter, the present invention will be described in more detail based on examples.

[0078]

[0079] Example 1

[0080] A fan filter unit (600x1200 (mm) fan filter unit specification) was manufactured by setting the distance (l, see Fig. 6) between the centers of each punching hole (210) of a pair of fan housings (20) to 180 mm. In addition, the filter direction was vertically arranged, and the fan rotation speed was set symmetrically.

[0081]

[0082] Example 2

[0083] After manufacturing the same fan filter unit as Example 1, the filter direction was arranged in parallel and the fan rotation speed was set symmetrically.

[0084]

[0085] Example 3

[0086] A fan filter unit (600x1200 (mm) fan filter unit specification) was manufactured by setting the distance (l, see Fig. 9) between the centers of each punching portion (210) of a pair of fan housings (20) to 230 mm. In addition, the filter direction was vertically arranged, and the fan rotation speed was set symmetrically.

[0087]

[0088] Example 4

[0089] After manufacturing the same fan filter unit as Example 3, the filter direction was arranged in parallel and the fan rotation speed was set symmetrically.

[0090]

[0091] Example 5

[0092] After manufacturing the same fan filter unit as Example 3, the filter direction was arranged in parallel, and the fan rotation speed was set asymmetrically to a fan rotation ratio = 1:1.23 (2600 RPM: 3200 RPM).

[0093]

[0094] Example 6

[0095] A fan filter unit (600x1200 (mm) fan filter unit specification) was manufactured by setting the distance (l, see Fig. 9) between the centers of each punching portion (210) of a pair of fan housings (20) to 280 mm. In addition, the filter direction was arranged in parallel, and the fan rotation speed was set symmetrically.

[0096]

[0097] Comparative Example 1

[0098] An FFU was prepared using a centrifugal fan and a filter identical to that used in Example 4.

[0099]

[0100]

[0101] Experimental Example 1. Simulation of average wind speed (Vavg) and airflow uniformity (RSD, relative standard deviation)

[0102] First, the velocity at a position 30 cm below the filter of Examples 2, 4, and 6 was derived through simulation to derive the flow velocity and average wind speed (Vavg). The performance evaluation was conducted in compliance with the method of the Korean Air Cleaning Association's group standard SPS-KACA-010-140 "Fan Filter Unit Performance Evaluation."

[0103] In this regard, Fig. 7 is an image showing the position 30 cm below the filter, which is the velocity measurement position of the examples. In addition, Fig. 8 is a graph showing the wind speed distribution values ​​by simulation of the examples, and Fig. 9 is a graph showing the average wind speed (Vavg) values ​​by simulation of the examples. Thereafter, based on the average wind speed (Vavg) measurement value, the airflow uniformity (RSD, Relative standard deviation) was calculated according to the following mathematical formula 1, and the result was shown in the graph of Fig. 10.

[0104]

[0105] (Vavg: average wind speed [m / s], Vi: wind speed at each point [m / s])

[0106] Referring to FIGS. 8, 9, and 10, it can be seen that Example 6 has the smallest RSD value, showing a uniform flow pattern, but the flow rate is small, which reduces the ventilation effect. On the other hand, Example 4 (width is 230 mm, filters are arranged in parallel) has the largest ventilation amount and excellent RSD, which is advantageous for efficient air purification.

[0107]

[0108] Experimental Example 2. Performance Evaluation

[0109] The performance of the fan filter units of Examples 1 to 5 and Comparative Example 1 was evaluated. The performance evaluation was conducted in compliance with the method of the Korean Air Cleaning Association's group standard SPS-KACA-010-140 "Fan Filter Unit Performance Evaluation." The experiment was performed three times under the same settings to ensure reproducibility and the average was taken. In addition, the wind speed was measured at the center of a total of 18 points, 3 points in the width direction and 6 points in the length direction based on the filter, and the wind speed distribution is shown in Table 1 below.

[0110]

[0111] Left Center Right AveMaxMinRSD [%] Example 110.4730.4890.4650.4620.5200.4137.420.4880.4520.41330.4360.5150.41540.4400.5200.41650.4900.4540.41660.4750.4910.468 Example 210.4780.4930.4430.4530.5230.4018.820.4010.4680.40430.4330.5220.42740.4360.5230.42950.4010.4720.40660.4820.4930.444 Example 310.4650.4840.4550.4530.4940.4105.720.4930.4630.42930.4330.4400.41040.4360.4410.41350.4940.4650.43160.4660.4840.455 Example 410.4570.4800.4500.4490.4830.4145.320.4780.4630.41430.4300.4440.41840.4330.4470.41850.4830.4650.41660.4600.4820.451Example 510.4370.4590.4240.4590.6660.39117.320.4140.4220.39130.4240.4360.40340.4390.4330.40250.6120.6660.59960.4250.4440.429Comparative Example 110.3490.4250.3900.3510.4250.29110.720.2940.3540.33530.3600.3980.36940.2910.3430.35150.3490.3670.29560.3230.3980.325

[0112] Based on the results in Table 1 above, the graph in Fig. 11 was created. In this regard, Fig. 11 is a graph showing the flow rate measurements of the examples and comparative examples. In addition, Fig. 12 is a graph showing the airflow uniformity (RSD, relative standard deviation) values ​​of the examples and comparative examples.

[0113] Referring to Table 1, Figures 11 and 12, it can be seen that the examples have superior flow uniformity and average flow velocity compared to Comparative Example 1. In particular, it can be seen that the flow uniformity of Example 4 is significantly superior.

[0114] Specifically, Examples 2, 4, and 6 all have filters arranged in parallel, and the spacing between a pair of cross-flow fans is different. In the case of Example 2, it can be seen that the non-uniformity of the flow rate increases because the spacing between the cross-flow fans is narrow, while the maximum flow rate in a specific area is improved. In the case of Example 6, it can be seen that the maximum flow rate in a specific area decreases, while the uniformity of the flow rate discharged over the entire filter surface is improved because the spacing between the cross-flow fans is wide. On the other hand, in the case of Example 4, it can be seen that both the uniformity of the flow rate and the maximum flow rate in a specific area are improved.

[0115]

[0116] Experimental Example 3. Measurement of flow velocity at the center of the fan filter unit

[0117] The central flow velocity of Examples 4 and 5 was measured and shown in Fig. 13. Referring to this, it can be seen that the flow direction can be controlled left and right by asymmetrically adjusting the rotational speed of a pair of cross-flow fans to form a dominant flow velocity on one side.

[0118] [Explanation of symbols]

[0119] 1 fan filter unit

[0120] 10 mainframes

[0121] 20 fan housing

[0122] 30 cross-flow fan

Claims

1. In a fan filter unit installed on the ceiling of a clean room to condition the air, Main frame in the shape of a hexahedron with an open lower surface; A pair of fan housings formed to protrude from the upper surface of the main frame, arranged in parallel and spaced apart from the center line of the upper surface of the main frame at a predetermined interval and formed in a structure symmetrical to each other; and A fan filter unit comprising a pair of cross-flow fans each independently mounted within the pair of fan housings.

2. In paragraph 1, The above pair of cross-flow fans are fan filter units in which the discharge wind direction and wind speed are independently controlled.

3. In paragraph 2, The above pair of cross-flow fans have their discharge wind direction determined in opposite directions, The above exhaust wind direction is a fan filter unit that faces outward based on the center line of the upper surface of the main frame.

4. In paragraph 1, A fan filter unit further comprising a filter installed on the opening side of the main frame, the filter being installed in a shape corresponding to the upper surface of the main frame.

5. In paragraph 4, A fan filter unit including a filter fixing member installed in a right angle shape at four corners of the outer surface of the main frame corresponding to the positions where the four corners of the filter meet, thereby fixing the filter to the main frame.

6. In paragraph 1, A fan filter unit further comprising a pair of handle parts formed on the upper surface of the main frame, arranged in parallel and symmetrical with a predetermined interval from the center line of the upper surface of the main frame, and formed on the outer side of the pair of fan housings based on the center line of the upper surface of the main frame.

7. In paragraph 1, The above fan housing, A rectangular perforation formed on the upper surface of the main frame; and A fan filter unit including a fan receiving portion formed by bending so as to accommodate a cross-flow fan by extending and protruding a frame from each of a pair of long sides of the above-mentioned perforation portion.

8. In paragraph 7, The vertical cross section of the above fan receiving portion is hook-shaped, A fan filter unit in which each fan receiving portion included in the above pair of fan housings is formed in a shape that is mutually inverted left and right.

9. In paragraph 1, The above fan housing, A fan filter unit further comprising a fan controller for controlling the motor of the cross-flow fan.

10. In paragraph 1, The average area of ​​the upper surface of the above main frame is 600,000 to 700,000 mm 2 In fan filter unit.

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