Assembly of a microlithographic projection system, a vacuum chamber and a wall element arranged in the vacuum chamber for thermal shielding

Abstract

The invention relates to an assembly comprising a projection system (22) for microlithography, a vacuum chamber (23) and a wall element (30) arranged in the vacuum chamber (23) for thermally shielding the projection system (22) from a heat source located outside the projection system. The projection system (22) has an object field that can be illuminated by an illumination system (10), and optical elements (M1-M6) for imaging the object field into an image plane (21). According to the invention, the projection system has a passive heat damping element (31) which is fastened to the wall element (30) and comprises damping layers (32) positioned one above the other, wherein cavities (33) are formed between the damping layers (32), said cavities extending at least partially along the wall element (30) and being fluidically connected to an interior of the vacuum chamber (23). By means of the passive heat damping element, the transfer of heat can be considerably slowed down, as a result of which the imaging quality is improved.

Description

Arrangement of a microlithographic project! - ion system, a vacuum chamber and a wall element arranged in the vacuum chamber for thermal shielding

[0001] This application claims priority from German patent application DE 10 2024 201 509.1, filed on February 20, 2024. The content of this DE application is incorporated by reference into the present application text.

[0002] The present invention relates to an arrangement comprising a projection system for microlithography, a vacuum chamber, and a wall element arranged in the vacuum chamber for thermally shielding the projection system from a heat source located outside the projection system. The projection system has an object field illuminable by an illumination system and optical elements for imaging the object field into an image plane.

[0003] Microlithographic projection exposure systems, which comprise an illumination system and a projection system, are used to manufacture microstructured components. Due to the progressive miniaturization of components, a transition in the wavelength during exposure to DUV radiation (e.g., UV radiation) has occurred in the past. 193 nm) to EUV radiation (e.g. 13.5 nm).

[0004] To achieve high image quality, not only the quality of the individual optical elements of the projection system is important, but also their relative position to each other. To ensure the latter during operation of a projection exposure system, it is known to mount the individual optical elements of the projection system on a to be attached to a common support frame. The support frame and the optical elements are regularly and actively temperature-controlled in order to reduce changes in the image quality of the projection system, for example due to thermal expansion of the optical elements or the support structure. For example, the support frame and / or optical elements can be traversed by channels for a thermal fluid. By passing thermal fluid with a predetermined volume flow and / or temperature through these channels, the temperature of the support frame and / or optical elements can be kept fairly constant. These measures are intended to minimize deformation of the support frame and / or the optical elements during operation as much as possible.

[0005] However, to account for deformations caused by minor temperature changes, particularly of the support frame, which cannot be completely ruled out, actuators are usually provided between the support frame and the individual optical elements. These actuators allow the position of the individual optical elements relative to the support frame to be readjusted. This allows for any changes in the position of the mirrors relative to each other that occur during operation to be compensated.

[0006] Despite the options for actively controlling the temperature of the optical elements or the support frame, as well as for readjusting the optical elements, image quality can deteriorate if the heat input into the projection system is too high. Increased heat input can originate, in particular, from the illumination system when exposure radiation with a very short wavelength is used, as this has a higher energy and, moreover, a larger proportion tends to be absorbed by the optical elements of the illumination system.

[0007] The object of the present invention is to provide an arrangement comprising a projection system for microlithography, a vacuum chamber and a wall element arranged in the vacuum chamber for thermally shielding the projection system, in which the disadvantages described above are avoided or at least occur to a reduced extent.

[0008] This object is achieved by an arrangement according to claim 1 and by a projection exposure system according to claim 13. Advantageous embodiments are described in the dependent claims.

[0009] Accordingly, the invention relates to an arrangement comprising a projection system for microlithography, a vacuum chamber and a wall element arranged in the vacuum chamber for thermally shielding the projection system from a heat source located outside the projection system, wherein the projection system has an object field that can be illuminated by an illumination system and optical elements for imaging the object field in an image plane. According to the invention, a passive heat-damping element is attached to the wall element. The heat-damping element comprises damping layers positioned one above the other, wherein cavities are formed between the damping layers, which extend at least partially along the wall element and are fluidly connected to an interior of the vacuum chamber.

[0010] First, some terms used in the context of the invention will be explained. The expression "superimposed damping layers" refers to the relative arrangement of the damping layers to the wall element. A damping layer arranged above an adjacent damping layer is thus at a greater distance from the wall element than the adjacent lower damping layer.

[0011] The thermal damping element is designed passively. This means that, due to its structural design, it dampens or delays heat transfer. In particular, no active temperature control means, such as fluid-flow cooling channels, are required to achieve the damping effect.

[0012] The damping layers have a layered shape. This means that an extension in a first and second dimension is significantly greater than an extension in the third dimension. A distance between adjacent damping layers is preferably significantly smaller than an extension of the cavities along the wall component. The distance can be 0.5 to 2 times, in particular 0.8 to 1.2 times, more particularly approximately 1 times the wall thickness of the damping layers. The number of damping layers positioned one above the other can be, for example, between 1 and 40, in particular between 5 and 30, and preferably more than 10. The damping layers can be made of a metal, for example stainless steel or aluminum.

[0013] The wall element is located inside the vacuum chamber. It is possible that the projection system is also located inside the vacuum chamber.

[0014] The thermal damping element serves to delay heat transfer from the heat source to the projection system. The cavities between the damping layers form a high thermal resistance, which slows down heat transfer into the projection system. This is especially true if the wall element is located in a vacuum chamber of the projection system and a low pressure of, for example, 1 to 15 Pa exists within the vacuum chamber. preferably 2 to 7 Pa, more preferably 3 to 5 Pa. In this case, the cavities between the damping layers are also evacuated, so that additional thermal resistance is created by the cavities. A large part of the additional thermal resistance arises from the transfer of heat between the damping layers and the low-pressure residual atmosphere within the vacuum chamber, which may, for example, contain or consist essentially of hydrogen.

[0015] The invention therefore takes advantage of the fact that projection exposure systems are operated in a vacuum or under very low pressure when using EUV radiation, since the EUV radiation would otherwise be absorbed in the atmosphere. Therefore, no additional structural effort is required to evacuate the cavities - apart from a possible extension of the pumping process due to the cavities; in particular, no additional vacuum system needs to be provided. Due to the significantly reduced diffusive heat transfer between the damping layers, the thermal energy of the heat source is only slowly transferred from layer to layer, so that the time constant of the heat transfer can be significantly increased.

[0016] The slowing down of heat transfer or the limitation of the rate of change of the heat flow introduced into the projection system enables a significant improvement in image quality. Within the scope of the invention, it was recognized that the options available in the projection system for active temperature control or for readjusting the positions of the optical elements are not sufficient to ensure a desired image quality if the heat flow into the projection system or its rate of change is too high. Due to the heat damping element according to the invention, a The time constant of the heat transfer, however, can be increased to such an extent that possible changes in the position of the optical elements can be sufficiently counteracted by the means for active temperature control or for readjusting the positions of the optical elements.

[0017] In one embodiment, the wall element is designed to thermally shield the projection system from the illumination system. In this case, the wall element can have an opening or a recess for a beam path generated to image the object field into the image plane. In this embodiment, the illumination system represents the heat source, with the wall element and the passive heat-damping element attached thereto serving to thermally shield it from the illumination system. The illumination system can have means for active temperature control. Since the heat generated in the illumination system is transferred to the projection system more slowly due to the passive heat-damping element, these means can work more efficiently and dissipate more heat. The heat-damping element can, if it covers a section of the wall element, be arranged on the side facing the illumination system.Alternatively, the heat-damping element can also be arranged on the side of the wall element facing the projection system. The wall element can be part of the lighting system or part of the projection system.

[0018] The effect of the thermal damping element to delay heat transfer can be improved by thermally decoupling a connection between the thermal damping element and the wall element. In particular, a fastening element can be used to fix the thermal damping element to the wall element, which fastening element consists of a material with low thermal conductivity and / or low thermal conductivity. The term low thermal conductivity in the context of the present disclosure refers to a conductivity of less than 3 watts per meter and Kelvin (W / mK). For example, the thermal conductivity can be less than 2 W / mK. A thermal conductivity can, for example, be less than 2 mm 2 / s, preferably less than 1 mm 2 / s . Alternatively or additionally, the fastening element for fixing the heat-damping element to the wall element can be designed such that it has a structural configuration which increases the thermal resistance, for example a section with a small cross-section .

[0019] The thermal damping element can cover at least a portion of the wall element. Alternatively or additionally, it is also possible for the wall element to have a recess and for the thermal damping element to cover the recess and / or be at least partially integrated into the recess. The latter can be particularly advantageous when there is limited installation space within or adjacent to the projection system.

[0020] A planar intermediate space can be formed between a damping layer adjacent to the wall element and the wall element. The term "planar" means that the intermediate space has an extension in at least two spatial directions along the wall element, which is in each case greater than an extension in the third spatial direction. The planar intermediate space can extend over an area that is more than 50%, preferably more than 70% of an area of ​​the damping layers. A distance between the wall element and a damping layer adjacent to the wall element (i.e. located below) can be significantly smaller than an extension of the damping layer along the wall element. For example, the distance can be less than 20%, preferably less than less than 10%, more preferably less than 5% of the extension of the damping layer along the wall element. If the damping layer has a different extension along the wall element in different directions, the above values ​​can refer to an average extension of the damping layer along the wall element.

[0021] The cavities formed between the damping layers can form intermediate spaces extending flatly along the wall element. It is not necessary for the damping layers to be formed by flat surfaces. For example, it is possible for the damping surfaces to have a curvature that can be modeled on the shape of the wall element. The flat intermediate spaces formed between the damping layers can also be modeled on the shape of the wall element or have a shape corresponding thereto. A flat intermediate space can have an area that is more than 50%, preferably more than 70% of the area of ​​the adjacent damping layers. A distance between adjacent damping layers can be significantly smaller than an extension of the damping layer along the wall element.For example, the distance may be less than 20%, preferably less than 10%, more preferably less than 5% of the extension of the damping layer along the wall element. If the damping layer has a different extension along the wall element in different directions, the above values ​​may refer to an average extension of the damping layer along the wall element.

[0022] In an alternative embodiment, adjacent damping layers are in contact with each other at contact points or along contact lines in such a way that the cavities are form channels running along the length of the wall element. The damping layers can have deviations from their layered structure in a direction perpendicular to the layered structure. These deviations can be regular, for example like corrugated or trapezoidal sheeting, or irregular. It is possible, but not necessary, for the contact lines to be straight. It has been shown that such damping layers can be used to easily produce structurally stable thermal damping elements which have sufficient thermal resistance to delay heat transfer to the desired extent.

[0023] In a preferred embodiment, the damping layers are formed from separate surface elements, in particular from sheet metal elements. The surface elements can be made from a metal, in particular from stainless steel or aluminum. The surface elements can also have a flat geometry or be curved. Preferably, adjacent surface elements each have a fastening region in which they are connected to one another. The connection is further preferably thermally decoupled. In particular, the fastening regions can have through holes positioned in alignment with one another, through which a fastening element is passed. The fastening element can comprise or be formed from a material with low conductivity. For example, the thermal conductivity can be less than 3 W / mK, preferably less than 2 W / mK.

[0024] In one embodiment, the heat damping element can have an outer end part connected to the wall element, which is designed to fix a plurality of damping elements located between the end part and the wall element to the wall element by means of a positive connection. In this way, an economical Attaching the damping element to the wall element can be achieved.

[0025] Adjacent damping layers can be positioned at a distance relative to one another by spacers, wherein the spacers are preferably designed for thermal decoupling of the adjacent surface elements. With the aid of the spacers, the damping layers can be positioned at regular intervals from one another in a simple and reliable manner. The spacer can comprise or be formed from a material with low conductivity. For example, the thermal conductivity can be less than 3 W / mK, preferably less than 2 W / mK.

[0026] In a further embodiment, the thermal damping element can be manufactured as an integral component using an additive manufacturing process. With the aid of additive manufacturing processes, a desired geometry of the thermal damping element can be realized in a particularly flexible manner.

[0027] The present invention further relates to a projection exposure system for microlithography, comprising an arrangement according to the invention and an illumination system with an exposure beam source and optical elements for illuminating the object field. The vacuum chamber can be a common vacuum chamber of the projection exposure system. The wall element is preferably designed to thermally shield the projection system from the illumination system. The wall element can also have an opening or a recess for a beam path generated to image the object field in the image plane. The projection exposure system can be developed further by further features which have already been described above in connection with the projection system.

[0028] The invention further relates to the use of a passive thermal damping element for thermally shielding a projection system located in a vacuum chamber from an illumination system. According to the use according to the invention, the passive thermal damping element is fastened to a wall element which thermally shields the projection system from the illumination system, wherein the passive thermal damping element has damping layers positioned one above the other and wherein cavities are formed between the damping layers, which extend at least partially along the wall element and which are fluidically connected to an interior of the vacuum chamber, wherein the vacuum chamber is evacuated. The evacuation can take place until a pressure between 1 Pa and 15 Pa, preferably between 2 Pa and 7 Pa, more preferably between 3 Pa and 5 Pa is reached.It can be provided that a residual atmosphere in the vacuum chamber after pumping contains hydrogen or consists essentially of hydrogen. The use according to the invention can be further developed by further features that have already been described above in connection with the projection system.

[0029] The invention is described below by way of example with reference to the accompanying drawings using advantageous embodiments. They show: Fig. 1: an embodiment of a projection exposure system according to the invention; Fig. 2: an enlarged section of Figure 1; Fig. 3 : a schematic side view of the wall element 30 of the projection exposure system according to the invention with a passive heat damping element attached thereto; Fig. 4: a schematic cross-sectional view along the line AA shown in Figure 3; Fig. 5: an alternative embodiment of a heat damping element used in the invention in a cross-sectional view; Fig. 6: another alternative embodiment of a A cross-sectional view of a heat-damping element used in the invention; Fig. 7: another alternative embodiment of a A cross-sectional view of a heat-damping element used in the invention; Fig. 8: a graphical representation of results of theoretical calculations to illustrate advantages of the invention.

[0030] Fig. 1 schematically illustrates a microlithographic EUV projection exposure system. The projection exposure system comprises an exposure beam source 14, an illumination system 10, and a projection system 22, which are operated together in a vacuum chamber 23.

[0031] The exposure beam source 14 generates electromagnetic radiation in the EUV range, i.e., in particular, with a wavelength between 5 nm and 30 nm. The exposure beam emanating from the exposure beam source 14 is focused into an intermediate focal plane 16 by a collector 15. Exposure beam emanating from the intermediate focal plane 16 is guided into an object plane 12 by the illumination system 10, so that an object field in the object plane 12 is illuminated with uniform radiation intensity.

[0032] The illumination system 10 comprises a deflecting mirror 17, with which the exposure radiation is deflected onto a first facet mirror 18. A second facet mirror 19 is arranged downstream of the first facet mirror 18. The second facet mirror 19 images the facets of the first facet mirror 18 onto the object plane 12.

[0033] A photomask 13 is arranged in the object plane 12 and is imaged into an image plane 21 via a plurality of mirrors M1-M6 of the projection system 22. A structure formed on the photomask 13 is transferred to a radiation-sensitive layer of a wafer 20 arranged in the image plane 21. The photomask 13 is suspended from a first scanning device 24, and the wafer 20 rests on a second scanning device 25, so that the wafer 20 can be exposed in a scanning process in which the photomask 13 and the wafer 20 are moved synchronously with one another.

[0034] The various mirrors of the projection exposure system, at which the exposure radiation is reflected, are designed as EUV mirrors. The EUV mirrors are provided with highly reflective coatings. These can be multilayer coatings, in particular multilayer coatings with alternating layers of molybdenum and silicon. Despite the highly reflective coatings, a considerable proportion (for example 30%) of the exposure radiation is absorbed by the mirrors and converted into heat. This leads in particular to a high heat input into the mirrors 17, 18 and 19 of the illumination system. To prevent this heat from passing unhindered into the projection system 22, a wall element 30, indicated only schematically in Figure 1 by a dashed line, is provided between the illumination system 10 and the projection system 22, which wall element serves for thermal shielding.

[0035] Figure 2 shows an enlarged section of Figure 1, wherein the wall element 30 is shown in a schematic cross-section and in greater detail. The wall element 30 is positioned between the mirrors 18, 19 of the illumination system 10 and the mirrors M1, M2 of the projection system 22 and has an opening 40 through which the exposure radiation originating from the illumination system and the imaging beam path emanating from the photomask 13 can pass. A passive heat-damping element 31 according to the invention is fastened on the side of the wall element 30 facing the projection system.

[0036] Figure 3 shows a schematic side view of the wall element 30, showing the side facing the projection system 22. The figure shows the wall element 30 with the opening 40 through which the beam path leading to the photomask 13 or emanating from the photomask 13 passes. Furthermore, it can be seen that the heat-damping element 31 is fixed to the wall element by means of six fastening elements 34.

[0037] Figure 4 shows a schematic cross-sectional view along the line AA shown in Figure 3. In this view, it can be seen that the wall element 30 has a curved shape. The thermal damping element 31 comprises three damping layers 32, which also have a curvature modeled on the shape of the wall element. Between the damping layers are flat intermediate spaces 33, the extent of which along the direction AA shown is significantly greater than an extent perpendicular to the damping layers (or as a distance between the damping elements 32).

[0038] The damping layers 32 are fixed to the wall element 30 by means of fastening elements 34. For this purpose, the Damping layers 32 each have a fastening area 36 with a through-hole on their opposite edges. The through-holes of the damping layers 32 are positioned flush one above the other and in alignment with a blind hole in the wall element 30, so that a single fastening element 34 is used to jointly fix the damping layers 32 to the wall element 30. Spacers 35 are located between adjacent damping layers 32 and between the lower damping layer 32 and the wall element, with the aid of which spacers the damping layers 32 are positioned at uniform distances from one another or relative to the wall element. The spacers 35 have through-holes through which a corresponding fastening element 34 is passed. Both the fastening elements 34 and the spacers 35 have a low thermal conductivity of 1 W / mK.

[0039] Figure 5 shows an alternative embodiment of a heat damping element 31 used within the scope of the invention in a cross-sectional view. The heat damping element 31 is constructed essentially identically to the heat damping element 31 shown in Figure 4, wherein in the present embodiment alternative spacers 35 are used both between adjacent damping layers 32 and between the lower damping layer and the wall element 30. The spacers 35 in this embodiment are formed by wave-shaped strips, the wave crests and wave troughs of which bear against adjacent damping layers 32 and against the wall element 30 respectively along the cross section shown.

[0040] Figure 6 shows an alternative embodiment of a heat damping element 31 used in the invention in a cross-sectional view. The heat damping element 31 of this embodiment is produced using an additive manufacturing process. process as an integral component. The thermal insulation layers 32 are integrally connected to one another in a common wall section 37. The thermal insulation element 31 can be inserted into a recess of a wall element (not shown here) in order to partially replace the wall element in the area of ​​the recess. In this case, the wall section 37 serves to establish a connection to the wall element.

[0041] Figure 7 shows a further alternative embodiment of a heat damping element 31 that can be used within the scope of the invention in a cross-sectional view. The heat damping element 31 is fastened to the wall element 30 and covers a section of the wall element 30. The heat damping element 31 comprises three damping layers 32 that are stacked on top of one another and rest against one another along contact lines that run essentially perpendicular to the plane of the drawing in Figure 7. The damping layers 32 have irregular deviations in a direction perpendicular to the layer-like extension, which in this case form an irregular wave pattern. The cavities 33 formed between the damping layers 32 can therefore be regarded as channels that extend along the wall element.

[0042] In this embodiment, the thermal damping element 31 also comprises a closing part 38, which is fixed to the wall element 30 by means of fastening elements 39. The closing part 38 surrounds an outer circumference of the stack of damping layers 32 and thus forms a positive connection with which the damping layers are fastened to the wall element. Between the closing part 38 and the wall element 30 there is also a buffer element 41, which is designed to thermally decouple the closing part 38 from the wall element. The buffer element 41 is made of a material with low thermal conductivity, which in this case is 1 W / mK.

[0043] Within the scope of the invention, theoretical calculations were carried out using a FEM simulation to illustrate the effects of a passive thermal damping element according to the invention. Figure 8 shows the results of these calculations. In particular, the normalized heat flow Q = which, in an exemplary projection system, is transferred from a heat source located outside the projection system to an optical element of the projection system, is shown over time, with the time axis also being standardized. A warm-up phase that is not relevant for the present consideration is not shown. Graph 42 illustrates the heat flow that results when the optical element of the projection system is shielded from the heat source only by a wall element without a passive heat damping element. Graph 43 shows the heat flow that results when a passive heat damping element according to the invention is used. For comparison, graph 44 shows the heat flow that results when the wall element is provided with active cooling.The normalization factor used corresponds to the maximum heat flow achieved when neither active cooling nor a passive heat damping element is used ( Graph 42 ).

[0044] The course of the graph 42 initially shows a steep increase of the heat flow ( see line 46 ) , until it finally comes to an asymptotic approach to the maximum heat flow .

[0045] In the presence of active cooling (graph 44), the heat flow follows a fundamentally similar time course, whereby both the heat flow achieved after the initial warm-up phase and the maximum heat flow are significantly lower than in graph 42. The maximum rate of change of the heat flow (see dashed line 47) is therefore significantly lower.

[0046] The passive heat damping element according to the invention, which in this case is positioned between the heat source and the wall element, results in a significantly slower increase in the heat flow. Only after a relative time of approximately 0.44 has elapsed does the heat flow exceed that which occurs when active cooling is used. The maximum rate of change of the heat flow (illustrated by line 48) is even lower than that achieved when active cooling is used. If there are additional means for active temperature control in the area of ​​the heat source (for example within a lighting system), the maximum heat flow can also be reduced by the passive heat damping element (not shown in Figure 8), since the means for active temperature control operate more efficiently and can dissipate more heat.

[0047] It is thus demonstrated that the passive heat-damping element can effectively limit the rate of change of the heat flow and, if necessary, reduce the maximum heat flow. By limiting the heat input, possible changes in the position of the optical elements in the projection system can be adequately counteracted using the available means for active temperature control or for readjusting the positions of the optical elements.

Claims

Patent claims 1. An arrangement comprising a projection system (22) for microlithography, a vacuum chamber (23), and a wall element (30) arranged in the vacuum chamber (23) for thermally shielding the projection system (22) from a heat source located outside the projection system, wherein the projection system (22) has an object field that can be illuminated by an illumination system (10), and optical elements (M1 - M6) for imaging the object field into an image plane (21), characterized in that a passive thermal damping element (31) is attached to the wall element (30), which comprises damping layers (32) positioned one above the other, wherein cavities (33) are formed between the damping layers (32), which extend at least partially along the wall element (30) and are fluidically connected to an interior of the vacuum chamber (23), wherein the wall element (30) for thermally shielding the projection system (22) from the illumination system (10) is formed.

2. Arrangement according to claim 1, characterized in that a connection between the heat damping element (31) and the wall element (30) is thermally decoupled.

3. Arrangement according to one of claims 1 or 2, characterized in that the heat-damping element (31) covers at least a portion of the wall element (30) and / or covers a recess formed in the wall element (30) and / or is at least partially integrated into the recess.

4. Arrangement according to one of claims 1 to 3, characterized in that a flat intermediate space is formed between a damping layer (32) adjacent to the wall element (30) and the wall element (30).

5. Arrangement according to one of claims 1 to 4, characterized in that the cavities (33) form intermediate spaces extending flatly along the wall element (30).

6. Arrangement according to one of claims 1 to 4, characterized in that adjacent damping layers (32) abut one another at contact points or along contact lines in such a way that the cavities (33) form channels running along the wall element (30).

7. Arrangement according to one of claims 1 to 6, characterized in that the damping layers (32) are formed from separate surface elements, in particular from sheet metal elements.

8. Arrangement according to claim 7, characterized in that adjacent surface elements each have a fastening region (36) in which they are connected to one another by a preferably thermally decoupled connection.

9. Arrangement according to claim 8, characterized in that the fastening areas (36) have through holes positioned in alignment with one another, through which a fastening element is passed.

10. Arrangement according to one of claims 1 to 9, characterized in that the heat damping element (31) is a Wall element (30) connected outer end part (38) which is designed to have a plurality of intermediate see the damping elements located on the end part (38) and the wall element (30) to be fixed to the wall element (30) by means of a positive fit.

11. Arrangement according to one of claims 1 to 10, characterized in that adjacent damping layers (32) are positioned at a distance relative to one another by spacers (35), wherein the spacers (35) are preferably designed for thermal decoupling of the adjacent surface elements.

12. Arrangement according to one of claims 1 to 6, characterized in that the heat damping element (31) is manufactured as an integral component by an additive manufacturing process.

13. Projection exposure system for microlithography, comprising an arrangement according to one of claims 1 to 12 and an illumination system (10) with an exposure beam source (14) and optical elements for illuminating the object field.

14. Use of a passive heat damping element (31) for thermally shielding a projection system (22) located in a vacuum chamber (23) from a lighting system (10), characterized in that the passive heat damping element (31) is attached to a wall element (30) shielding the projection system (22) from the lighting system (10), wherein the passive heat damping element (31) has damping layers (32) positioned one above the other, and wherein cavities (33) are formed between the damping layers (32), which extend at least partially along the wall element (30) and which are fluidly connected to an interior of the vacuum chamber (23), wherein the vacuum chamber (23) is evacuated.

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