Vaporizer and vaporization system

Abstract

This vaporizer vaporizes a liquid material by heating a heating flow path through which the liquid material flows, and is characterized by including: a filter that is provided in the heating flow path and collects particles flowing through the heating flow path; a heat exchanger that is provided upstream of the filter in the heating flow path and performs heat exchange with the liquid material; and a pre-filter that is provided upstream of the filter in the heating flow path and collects the particles. The vaporizer is also characterized in that, in a cross-section taken orthogonal to the direction in which the fluid flows, a cross-section of the filter is provided so as to block the heating flow path, and a cross-section of the pre-filter does not block the heating flow path when compared to the cross-section of the filter.

Description

Vaporizers and Vaporization Systems

[0001] The present invention relates to a vaporizer and a vaporization system for heating and vaporizing a liquid material.

[0002] 2. Description of the Related Art Vaporizers have been developed to generate gases used in semiconductor manufacturing processes, such as film formation processes, by vaporizing liquid materials.

[0003] This type of vaporizer includes a vaporization chamber that vaporizes a liquid material, a gas path through which the vaporized gas flows, a gas filter that is provided in the gas path and that collects particles that are discharged from the vaporization chamber together with the vaporized gas, and a mist filter that is provided in the gas path between the vaporization chamber and the gas filter, as shown in Patent Document 1. In this type of vaporizer, the mist filter plays a supplementary role to the gas filter, and by being able to prevent the gas filter from clogging, the gas filter can be made maintenance-free or the filter replacement cycle for the gas filter can be extended.

[0004] JP 2014-127702 A

[0005] In the vaporizer of Patent Document 1, the mist filter includes a plurality of flat plates arranged along the direction of vaporized gas flow. The plurality of flat plates are arranged across the entire cross section of the gas path in a cross section perpendicular to the direction of vaporized gas flow, which results in a large pressure loss within the gas path.

[0006] Therefore, in conventional vaporizers, if a mist filter is installed upstream of the gas filter in order to reduce the frequency of gas filter replacement, the pressure loss in the gas path increases, making it difficult to reduce the pressure loss in the gas path while also reducing the frequency of gas filter replacement.

[0007] The present invention has been made in view of the above problems, and its main object is to reduce the frequency of filter replacement while reducing the pressure loss in the heating flow path within the vaporizer through which the liquid material flows.

[0008] That is, the vaporizer of the present invention is a vaporizer that vaporizes a liquid material by heating a heating flow path through which the liquid material flows, and is equipped with a filter that is provided in the heating flow path and collects particles flowing through the heating flow path, a heat exchanger that is provided upstream of the filter in the heating flow path and performs heat exchange with the liquid material, and a prefilter that is provided upstream of the filter in the heating flow path and collects the particles, and is characterized in that in a cross section perpendicular to the direction in which the liquid material flows, the cross section of the filter is arranged to block the heating flow path, and the cross section of the prefilter does not block the heating flow path compared to the cross section of the filter.

[0009] With this configuration, the pressure loss before and after the particle-containing fluid passes through the prefilter is smaller than the pressure loss before and after the particle-containing fluid passes through the filter, so the pressure loss upstream of the filter in the heating flow path can be reduced compared to when multiple filters are provided. In addition, because the prefilter is provided upstream of the filter in the heating flow path, the prefilter can capture particles before the filter, reducing the frequency of filter replacement. Therefore, the pressure loss in the heating flow path can be reduced while reducing the frequency of filter replacement.

[0010] Specifically, the pre-filter forms a spiral flow path between itself and the inner surface of the heating flow path.

[0011] With this configuration, the prefilter forms a spiral flow path between itself and the inner surface of the heating flow path, so that particles are more likely to hit the prefilter and the prefilter is more likely to capture the particles.

[0012] In a more specific embodiment of the prefilter, the prefilter is in the form of a plate twisted along the circumferential direction of the heating flow path.

[0013] It is preferable that a plurality of pores are formed on the surface of the prefilter that comes into contact with the particles.

[0014] With this configuration, pores are formed on the surface of the prefilter that comes into contact with the particles, making it easier to capture the particles. In particular, when the prefilter forms a spiral flow path between the prefilter and the inner surface of the heating flow path, particles are more likely to hit the surface of the prefilter, allowing the prefilter to efficiently capture particles.

[0015] The heat exchange body and the prefilter form a spiral flow path between themselves and the inner surface of the heating flow path, and it is preferable that the rotation direction of the spiral flow path formed between the heat exchange body and the inner surface of the heating flow path is opposite to the rotation direction of the spiral flow path formed between the prefilter and the inner surface of the heating flow path.

[0016] With this configuration, the rotation direction of the spiral flow path formed between the heat exchange body and the inner surface of the heating flow path is opposite to the rotation direction of the spiral flow path formed between the prefilter and the inner surface of the heating flow path, so that particles that pass through the heat exchange body are more likely to hit the prefilter, making it even easier for the prefilter to capture particles.

[0017] In the heating flow path downstream of the heat exchange body, the liquid material is more vaporized than in the heating flow path upstream of the heat exchange body, so particles flowing downstream of the heat exchange body in the heating flow path contain more impurities. Therefore, it is desirable that the prefilter be provided downstream of the heat exchange body in the heating flow path.

[0018] With this configuration, by providing a prefilter downstream of the heat exchange element in the heating flow path, the prefilter can efficiently capture impurities.

[0019] The pre-filter preferably exchanges heat with the liquid material.

[0020] With this configuration, the prefilter also exchanges heat with the liquid material in addition to the heat exchange element, which further improves the vaporization performance. In particular, when the prefilter forms a spiral flow path with the inner surface of the heating flow path, the liquid material is more easily heat-exchanged, which further improves the vaporization performance.

[0021] The pre-filter is preferably in contact with the inner surface of the heating flow path.

[0022] With this configuration, the prefilter is in contact with the inner surface of the heating flow path, so that heat from the surroundings of the heating flow path is easily transferred to the prefilter, which further promotes heat exchange between the prefilter and the liquid material, thereby further improving the vaporization performance.

[0023] As a specific embodiment of the prefilter, the prefilter may be made of sintered metal.

[0024] The vaporization device according to the present invention is characterized by comprising a gas-liquid mixing section that mixes a liquid material with a carrier gas to generate a gas-liquid mixture, and the vaporizer into which the gas-liquid mixture is introduced.

[0025] With this configuration, it is possible to obtain the same effects as the above-mentioned vaporizer.

[0026] Here, if the filter and pre-filter are provided separately, it becomes difficult to replace the pre-filter because the pre-filter is provided upstream of the filter.

[0027] Therefore, another aspect of the vaporizer is a vaporizer that vaporizes a liquid material by heating a heating flow path through which a fluid containing the liquid material flows, and is characterized in that it comprises: a filter that is provided in the heating flow path and collects particles contained in the fluid after the liquid material has been vaporized; a heat exchanger that is provided upstream of the filter in the heating flow path and performs heat exchange with the liquid material; and a prefilter that is provided upstream of the filter in the heating flow path and collects the particles, wherein the prefilter contacts the inner surface of the heating flow path and forms a flow path between the prefilter and the heating flow path, and the filter and the prefilter are formed as a single unit and are removably fitted into the heating flow path.

[0028] With this configuration, the filter and prefilter are integrally formed and detachably fitted into the heating flow path, allowing the filter and prefilter to be replaced. Furthermore, because the filter and prefilter are integrally formed, the number of parts in the vaporizer can be reduced. Furthermore, because the prefilter contacts the inner surface of the heating flow path and forms a flow path with the inner surface of the heating flow path, heat exchange can occur between the liquid material and the prefilter, promoting the vaporization of the liquid material.

[0029] Another aspect for replacing a filter is a vaporizer that vaporizes a liquid material by heating a heating flow path through which a fluid containing the liquid material flows, and is characterized in that it comprises a filter that is provided in the heating flow path and collects particles contained in the fluid after the liquid material has been vaporized, and a heat exchanger that is provided upstream of the filter in the heating flow path and exchanges heat with the liquid material, and the filter contacts the inner surface of the heating flow path, forms a flow path between the filter and the inner surface of the heating flow path, and is removably fitted into the heating flow path.

[0030] With this configuration, the filter is detachably fitted in the heating flow path, making it possible to replace the filter. Furthermore, the filter is in contact with the inner surface of the heating flow path and forms a flow path between the filter and the inner surface of the heating flow path, allowing heat exchange between the liquid material and the filter and promoting evaporation of the liquid material.

[0031] According to the present invention, it is possible to reduce the frequency of filter replacement while reducing the pressure loss in the heating flow path in the vaporizer through which the liquid material flows.

[0032] 1 is a schematic diagram showing the configuration of a vaporization system according to a first embodiment of the present invention; 2 is a cross-sectional view showing the internal structure of a vaporizer in the same embodiment; 3 is a cross-sectional view of a pre-filter and a heat exchange element in a cross section perpendicular to the direction in which a liquid material flows in the same embodiment; 4 is a cross-sectional view showing the internal structure of a vaporizer in a second embodiment of the present invention; and 5 is a cross-sectional view showing the internal structure of a vaporizer in a third embodiment of the present invention.

[0033] <First embodiment of the present invention> A vaporizer and a vaporization system according to a first embodiment of the present invention will be described below with reference to the drawings. Note that in all of the drawings shown below, some parts may be omitted or exaggerated as appropriate for ease of understanding. Identical components will be assigned the same reference numerals and descriptions thereof will be omitted as appropriate.

[0034] <System Configuration> The vaporization system 100 of this embodiment is incorporated into, for example, a semiconductor manufacturing line or the like to supply a predetermined flow rate of gas to a chamber or the like used in the semiconductor manufacturing process, and includes a gas-liquid mixing unit 10 that mixes a liquid material with a carrier gas to generate a gas-liquid mixture, and a vaporizer 20 that receives the gas-liquid mixture and vaporizes the liquid material contained in the gas-liquid mixture, as shown in Figure 1. Note that, hereinafter, the term "fluid" refers to the liquid material, the carrier gas, the gas-liquid mixture, or the vaporized gas generated by vaporizing the liquid material.

[0035] <Device Configuration> The gas-liquid mixing section 10 includes a carrier gas flow path L1 through which a carrier gas flows, a liquid material flow path L2 through which a liquid material flows, a gas-liquid mixing chamber 10s where the carrier gas flow path L1 and the liquid material flow path L2 join together, a gas-liquid mixture flow path L3 through which the gas-liquid mixture generated in the gas-liquid mixing chamber 10s flows, and a flow rate adjustment valve 11 that adjusts the flow rate of the gas-liquid mixture.

[0036] In this embodiment, the carrier gas flow path L1 and the liquid material flow path L2 are formed inside the block body 12, and outlets L1a and L2a of the carrier gas flow path L1 and the liquid material flow path L2, respectively, are opened to a valve seat surface 13 formed on one surface (here, the top surface) of the block body 12.

[0037] The flow rate control valve 11 is, for example, a normally closed type piezo valve, and the valve element 111 is arranged so as to face the above-mentioned valve seat surface 13. As a result, the space surrounded by the valve element 111, the valve seat surface 13, and the block body 12 is formed as the above-mentioned gas-liquid mixing chamber 10s. Note that Fig. 1 shows a state in which the valve element 111 is seated on the valve seat surface 13, and the supply of liquid to the gas-liquid mixing chamber 10s is stopped. In this state, carrier gas is supplied to the gas-liquid mixing chamber 10s from the carrier gas flow path.

[0038] The gas-liquid mixture flow path L3 has an inlet L3a formed on the valve seat surface 13 described above, through which the gas-liquid mixture generated in the gas-liquid mixing chamber 10s is introduced and which leads the gas-liquid mixture to the vaporizer 20.

[0039] With the above-described configuration, the valve body 111 can supply or stop the supply of the gas-liquid mixture to the vaporizer 20 by opening or closing each of the outlet L1a of the carrier gas flow path L1, the outlet L2a of the liquid material flow path L2, and the inlet L3a of the gas-liquid mixture flow path L3.

[0040] As shown in FIG. 2, the vaporizer 20 is generally cylindrical and includes a heating flow path L4 through which the liquid material flows, a heater H provided around the heating flow path L4 and heating the heating flow path L4, a filter 21 provided in the heating flow path L4 and collecting particles flowing through the heating flow path L4, a heat exchanger 22 provided upstream of the filter 21 in the heating flow path L4 and exchanging heat with the liquid material, and a pre-filter 23 provided upstream of the filter 21 in the heating flow path L4 and collecting particles flowing through the heating flow path L4.

[0041] In this embodiment, the heating flow path L4 has a generally straight pipe shape, and the heater H is provided along the outer circumferential surface of the heating flow path L4. The heater H heats the heating flow path L4, thereby heating and vaporizing the liquid material flowing through the heating flow path L4, generating a vaporized gas. Note that the heater H only needs to be provided around the heating flow path L4, and does not necessarily have to be provided along the entire outer circumferential surface of the heating flow path L4.

[0042] Furthermore, in this embodiment, particles refer to substances contained in the fluid flowing through the heating flow path L4 after the gas-liquid mixture has passed through the heat exchange body 22, such as impurities that are generated when the liquid material is vaporized, particles derived from pyrolysis products, or mist particles that remain when the liquid material is not completely vaporized.

[0043] The filter 21 is, for example, mesh-shaped and has a flat plate shape when provided in the heating flow path L4. In this embodiment, the filter 21 is provided across the entire cross section of the heating flow path L4 in a cross section perpendicular to the flow direction of the gas-liquid mixture (hereinafter also referred to as the flow direction). Furthermore, the mesh holes formed by the entanglement of the mesh trap particles and form part of the heating flow path L4 through which the vaporized gas passes. In other words, as the fluid containing particles and the vaporized gas passes through the inside of the filter 21, the particles are captured by the filter 21, and the vaporized gas flows downstream of the filter 21.

[0044] The heat exchange element 22 forms a spiral flow path with the inner surface of the heating flow path L4, and improves vaporization performance by exchanging heat with the liquid material while mixing the liquid material. Specifically, as shown in Figures 2 and 3(f) to 3(j), the heat exchange element 22 is a plate-shaped element twisted along the circumferential direction of the heating flow path L4, such as a static mixer. In this embodiment, the heat exchange element 22 is twisted 180 degrees along the circumferential direction of the heating flow path L4 from the upstream end of the heat exchange element 22 to the downstream end of the heat exchange element 22, but the twist angle is not limited to this.

[0045] In this embodiment, the heat exchange element 22 is in contact with the inner surface of the heating flow path L4 to facilitate the transfer of heat from the heater H to the liquid material. Specifically, as shown in Figures 2 and 3(f) to 3(j), the side surface 22b of the heat exchange element 22 is in contact with the inner surface of the heating flow path L4, and heat from the heater H is transferred to the heat exchange element 22 via the side surface 22b. Heat exchange occurs between the heat exchange element 22 and the liquid material as the liquid material comes into contact with the surface 22a of the heat exchange element 22. Note that the surface 22a of the heat exchange element 22 referred to here is the surface that forms a flow path through which the liquid material flows between the heat exchange element 22 and the inner surface of the heating flow path L4.

[0046] The prefilter 23 is provided separately from the heat exchange element 22 and has a rougher surface than the heat exchange element 22. The prefilter 23 is configured so that the pressure loss before and after the particle-containing fluid passes through the prefilter 23 is smaller than the pressure loss before and after the particle-containing fluid passes through the filter 21. In this embodiment, the prefilter 23 assists the filter 21 in capturing particles, and the particle capture efficiency of the prefilter 23 is configured to be equal to or smaller than the particle capture efficiency of the filter 21. The capture of particles here refers to particles adhering to the rough surface or pores of the prefilter 23, or particles adhering to the mesh holes of the filter 21.

[0047] Specifically, in a cross section perpendicular to the flow direction, the cross section of the filter 21 is disposed so as to block the heating flow path L4, and the cross section of the prefilter 23 does not block the heating flow path L4 as much as the cross section of the filter 21. More specifically, as shown in Figures 3(a) to 3(e), in a cross section perpendicular to the flow direction, the cross-sectional area of ​​the heating flow path L4 formed between the inner surface of the heating flow path L4 and the surface 23a of the prefilter 23 is sufficiently larger than the cross-sectional area of ​​the mesh holes of the filter 21. In other words, the proportion of the cross-sectional area of ​​the prefilter 23 in the cross section perpendicular to the flow direction is smaller than the proportion of the cross-sectional area of ​​the filter 21 in the cross section perpendicular to the flow direction.

[0048] In this embodiment, the prefilter 23 has a shape that, when viewed from the flow direction, makes it appear as if the surface of the prefilter 23 is blocking the heating flow path L4. In other words, the prefilter 23 is shaped so that the filter 21 is invisible when viewed from the upstream side of the prefilter 23, and a flow path through which a fluid containing particles flows is formed between the inner surface of the heating flow path and the surface of the prefilter 23. Specifically, the prefilter 23 forms a spiral flow path between itself and the inner surface of the heating flow path L4. In this embodiment, the space between the surface 23a of the prefilter 23 and the heating flow path L4 forms the spiral flow path. Furthermore, the spiral flow path penetrates from the upstream side to the downstream side of the prefilter 23 without branching. Furthermore, the prefilter 23 has a plate shape that is twisted along the circumferential direction of the heating flow path L4. Note that, from the upstream end of the prefilter 23 to the downstream end of the prefilter 23, the prefilter 23 is twisted 180 degrees along the circumferential direction of the heating flow path L4, but the twist angle is not limited to this.

[0049] Here, the rotation direction of the spiral flow path formed between the heat exchange element 22 and the inner surface of the heating flow path L4 is opposite to the rotation direction of the spiral flow path formed between the prefilter 23 and the inner surface of the heating flow path L4. Specifically, as shown in Fig. 3, when the heat exchange element 22 and the prefilter 23 are each divided into five sections at approximately equal intervals from the upstream side to the downstream side, the cross section of the heat exchange element 22 rotates clockwise from the upstream side to the downstream side, whereas the cross section of the prefilter 23 rotates counterclockwise from the upstream side to the downstream side.

[0050] 2, the prefilter 23 is provided downstream of the heat exchange element 22 in the heating flow path L4. In this embodiment, the prefilter 23 is attached to the downstream end of the heat exchange element 22. As shown in FIG. 3, the longitudinal component of the cross section at the downstream end of the heat exchange element 22 and the longitudinal component of the cross section at the upstream end of the prefilter 23 intersect with each other. Specifically, the longitudinal component of the cross section at the downstream end of the heat exchange element 22 is aligned in a direction perpendicular to the flow direction, and the longitudinal component of the cross section at the upstream end of the prefilter 23 is aligned in a direction perpendicular to the longitudinal direction of the cross section at the downstream end of the heat exchange element 22.

[0051] Furthermore, a plurality of pores are formed on the surface 23 a of the prefilter 23 that comes into contact with the particles. Specifically, the prefilter 23 is made of a porous material such as sintered metal, and countless pores are formed across the entire surface 23 a of the prefilter 23.

[0052] Additionally, in this embodiment, the prefilter 23 functions as a heat exchanger that exchanges heat with the liquid material. Specifically, the prefilter 23 exchanges heat with the liquid material while mixing the liquid material, thereby improving the vaporization performance.

[0053] More specifically, the prefilter 23 is in contact with the inner surface of the heating flow path L4 so as to facilitate the transfer of heat from the heater H. Specifically, as shown in Figure 2 and Figures 3(a) to (e), the side surface 23b of the prefilter 23 is in contact with the inner surface of the heating flow path L4, and the heat of the heater H is transferred to the prefilter 23 via this side surface 23b. Then, when the liquid material comes into contact with the surface 23a of the prefilter 23, heat exchange occurs between the prefilter 23 and the liquid material.

[0054] Effects of First Embodiment According to the vaporizer 20 of the first embodiment, in a cross section perpendicular to the flow direction, the cross-sectional area of ​​the heating flow path L4 at the cross section of the prefilter 23 is larger than the cross-sectional area of ​​the heating flow path L4 at the cross section of the filter 21. This prevents the heating flow path L4 from being blocked, and reduces pressure loss in the heating flow path L4 compared to when multiple filters are provided. In addition, because the prefilter 23 is provided upstream of the filter 21 in the heating flow path L4, the prefilter 23 can capture particles before the filter 21 does, reducing the frequency with which the filter 21 needs to be replaced. This reduces the pressure loss in the heating flow path L4 while reducing the frequency with which the filter 21 needs to be replaced.

[0055] Specifically, the pre-filter 23 does not block the heating flow path L4 compared to the filter 21, and the filter 21 is arranged to block the heating flow path L4, so the filter 21 can better capture particles that were not captured by the pre-filter 23.

[0056] Furthermore, the prefilter 23 forms a spiral flow path between itself and the inner surface of the heating flow path L4, which makes it easier for particles to hit the prefilter 23 and for the prefilter 23 to capture the particles. In addition, a plurality of pores are formed on the surface 23a of the prefilter 23 that comes into contact with the particles, and therefore the spiral flow path formed between itself and the inner surface of the heating flow path L4 makes it easier for particles to hit the surface 23a of the prefilter 23, allowing the prefilter 23 to efficiently capture the particles. Furthermore, because the prefilter 23 exchanges heat with the liquid material, the spiral flow path formed between itself and the inner surface of the heating flow path L4 further promotes heat exchange between the prefilter 23 and the liquid material, thereby further improving vaporization performance.

[0057] Furthermore, since the rotation direction of the spiral flow path formed between the heat exchange body 22 and the inner surface of the heating flow path L4 is opposite to the rotation direction of the spiral flow path formed between the prefilter 23 and the inner surface of the heating flow path L4, particles that pass through the heat exchange body 22 are more likely to hit the prefilter 23, making it even easier for the prefilter 23 to capture particles.

[0058] Furthermore, since the pre-filter 23 is provided downstream of the heat exchange element 22 in the heating flow path L4, the pre-filter 23 can efficiently collect particles.

[0059] Furthermore, since the prefilter 23 is in contact with the inner surface of the heating flow path L4, heat from the surroundings of the heating flow path L4 is easily transferred to the prefilter 23. As a result, heat exchange between the prefilter 23 and the liquid material is further promoted, thereby further improving the vaporization performance.

[0060] Second Embodiment of the Invention A vaporizer and a vaporization system according to a second embodiment of the present invention will be described below with reference to the drawings. Note that, in the following, only parts different from the first embodiment will be described, and the same components will be denoted by the same reference numerals.

[0061] The vaporizer 30 of the second embodiment differs from the vaporizer 20 of the first embodiment (in which the filter 21 and pre-filter 23 are provided separately) in that the filter 21 and pre-filter 23 are formed integrally and are removably fitted into the heating flow path L4.

[0062] A vaporizer 30 according to a second embodiment will be described with reference to FIG.

[0063] In the second embodiment, the filter 31 has a generally hollow cylindrical shape, and the prefilter 23 forms a spiral flow path between itself and the inner surface of the heating flow path L4. The upstream end of the filter 31 and the downstream end of the prefilter 23 are connected to each other. A joint T and a gasket 34 for the joint T are provided downstream of the filter 31, and the downstream end of the filter 31 is connected to the gasket 34. A hole communicating with the internal space of the filter 31 is formed in the center of the gasket 34.

[0064] The configuration in which the prefilter 23 forms a spiral flow path with the inner surface of the heating flow path L4 is the same as in the first embodiment. Also, as in the first embodiment, when the prefilter 23 is housed in the heating flow path L4, the prefilter 23 contacts the inner surface of the heating flow path L4, specifically, the side surface of the prefilter 23 contacts the inner surface of the heating flow path L4.

[0065] In the second embodiment, an operator can fit the filter 31 and the pre-filter 23 into the heating flow path L4 and remove the filter 31 and the pre-filter 23 from the heating flow path L4.

[0066] Specifically, an operator inserts the filter 31 and the prefilter 23 into the heating flow path L4 from the downstream opening of the heating flow path L4. Note that in Fig. 4, when the filter 31 and the prefilter 23 are fitted into the heating flow path L4, the prefilter 23 is provided at a predetermined distance from the heat exchange element 22, but the operator may insert the prefilter 23 into the heating flow path L4 until the prefilter 23 comes into contact with the heat exchange element 22.

[0067] Furthermore, when it becomes necessary to replace the pre-filter 23, for example, when it is time to replace the pre-filter 23, an operator grasps the gasket 34 and removes the filter 31 and the pre-filter 23 from the opening on the downstream side of the heating flow path L4.

[0068] Effect of the Second Embodiment According to the vaporizer 30 of the second embodiment, the filter 31 and the prefilter 23 are integrally formed and detachably fitted into the heating flow path L4, allowing the filter 31 and the prefilter 23 to be replaced. Furthermore, because the filter 31, the prefilter 23, and the gasket 34 are integrally formed, the number of parts of the vaporizer 30 can be reduced. Furthermore, the prefilter 23 contacts the inner surface of the heating flow path L4 and forms a flow path with the inner surface of the heating flow path L4. This allows heat exchange between the liquid material and the prefilter 23, thereby promoting the vaporization of the liquid material. Specifically, because the filter 31 and the prefilter 23 are integrally formed and the prefilter 23 contacts the inner surface of the heating flow path L4, heat from the heater H is transferred to the entire filter 31 via the prefilter 23. As a result, the entire filter 31 and the prefilter 23 are heated, allowing particles that were not completely vaporized from the liquid material, such as mist particles, to be vaporized, improving the vaporization performance of the vaporizer 30.

[0069] Third Embodiment of the Present Invention A vaporizer and a vaporization system according to a third embodiment of the present invention will be described below with reference to the drawings. Note that, in the following, only parts different from the first embodiment will be described, and the same components will be denoted by the same reference numerals.

[0070] Unlike the vaporizer 20 of the first embodiment (in which the filter 21 and the pre-filter 23 are provided separately) and the vaporizer 30 of the second embodiment (in which the filter 31 and the pre-filter 23 are integrally formed and the pre-filter 23 is provided upstream of the filter 31), the vaporizer 40 of the third embodiment does not include a pre-filter and includes only a filter. That is, in the vaporizer 40 of the third embodiment, the filter 41 contacts the inner surface of the heating flow path L4, forms a flow path between the filter 41 and the inner surface of the heating flow path L4, and is detachably fitted into the heating flow path L4.

[0071] A configuration of a filter 41 according to a third embodiment will be described with reference to FIG.

[0072] In the third embodiment, the filter 41 includes a cylindrical filter portion 41a having a generally hollow cylindrical shape and a spiral filter portion 41b that contacts the heating flow path L4 and forms a spiral flow path between the cylindrical filter portion 41a and the inner surface of the heating flow path L4. The spiral filter portion 41b is provided on the outer circumferential surface of the cylindrical filter portion 41a. Specifically, the spiral filter portion 41b is provided on the outer circumferential surface of the cylindrical filter portion 41a between the upstream end and the downstream end. The cylindrical filter portion 41a and the spiral filter portion 41b may be formed integrally or separately.

[0073] Additionally, a joint T and a gasket 42 for the joint T are provided downstream of the filter 41, and the downstream end of the cylindrical filter portion 41a is connected to the gasket 42. A hole communicating with the internal space of the cylindrical filter portion 41a is formed in the center of the gasket 42.

[0074] In the third embodiment, similarly to the second embodiment, an operator can fit the filter 41 into the heating flow path L4 and remove the filter 41 from the heating flow path L4.

[0075] Specifically, an operator inserts the filter 41 into the heating flow path L4 from the downstream opening of the heating flow path L4. Note that in Fig. 5, when the filter 41 is fitted into the heating flow path L4, the filter 41 is provided at a predetermined distance from the heat exchange element 22, but the operator may insert the filter 41 into the heating flow path L4 until the filter 41 comes into contact with the heat exchange element 22.

[0076] Furthermore, when it becomes necessary to replace the filter 41, an operator grasps the gasket 42 and removes the filter 41 from the opening on the downstream side of the heating flow path L4.

[0077] Effect of the Third Embodiment According to the vaporizer 40 of the third embodiment, as in the second embodiment, the filter 41 is detachably fitted in the heating flow path L4, allowing for replacement of the filter 41. Furthermore, the spiral filter portion 41b contacts the inner surface of the heating flow path L4 and forms a flow path with the inner surface of the heating flow path L4. This allows heat exchange between the liquid material and the spiral filter portion 41b, thereby promoting vaporization of the liquid material. Specifically, the spiral filter portion 41b is provided on the outer circumferential surface of the cylindrical filter portion 41a and contacts the inner surface of the heating flow path L4. Therefore, heat from the heater H is transferred to the entire filter 41 via the spiral filter portion 41b. As a result, the entire filter 41 is warmed, allowing particles, such as mist particles, that were not completely vaporized from the liquid material to be vaporized, thereby improving the vaporization performance of the vaporizer 40.

[0078] Other Embodiments The present invention is not limited to the above-described embodiments.

[0079] In the first and second embodiments, the prefilter 23 forms a spiral flow path between itself and the inner surface of the heating flow path L4, but the shape of the prefilter 23 is not limited to this. The cross section of the prefilter 23 may be any shape that does not block the heating flow path L4 compared to the cross section of the filter 21, and may be, for example, a baffle plate or an orifice.

[0080] In the first and second embodiments, the pre-filter 23 is plate-shaped, but the shape of the pre-filter 23 is not limited to this. For example, the pre-filter 23 may have a cross-shaped cross section or another shape.

[0081] In the first and second embodiments, a plurality of holes are formed on the surface of the pre-filter 23, but the configuration of the pre-filter 23 for capturing particles is not limited to this.

[0082] In the first and second embodiments, the rotation direction of the spiral flow path formed between the heat exchange body 22 and the inner surface of the heating flow path L4 and the rotation direction of the spiral flow path formed between the prefilter 23 and the inner surface of the heating flow path L4 were opposite to each other, but they may also be in the same direction.

[0083] In the first embodiment, the pre-filter 23 is provided downstream of the heat exchange element 22 in the heating flow path L4, but may be provided upstream.

[0084] In the first and second embodiments, the prefilter 23 exchanges heat with the liquid material, but the prefilter 23 need only have the function of capturing particles, and does not necessarily have to have the function of exchanging heat.

[0085] In the first embodiment, the pre-filter 23 is in contact with the inner surface of the heating flow path L4, but the pre-filter 23 does not have to be in contact with the inner surface of the heating flow path L4.

[0086] In the first and second embodiments, the pre-filter 23 is made of sintered metal, but may be made of other porous materials. Also, the pre-filter 23 and the filters 21 and 31 may be made of the same material or different materials.

[0087] In the first embodiment, the prefilter 23 is provided separately from the heat exchange element 22. However, the prefilter 23 may be provided integrally with the heat exchange element 22. That is, a part of the heat exchange element 22 may function as the prefilter 23, or the entire heat exchange element 22 may function as the prefilter 23.

[0088] In the first and second embodiments, the number of the heat exchange element 22 and the prefilter 23 is one, but the number of the heat exchange element 22 and the prefilter 23 may be two or more. Furthermore, in the first and second embodiments, the heat exchange element 22 and the prefilter 23 are each a single stage twisted 180 degrees along the circumferential direction of the heating flow path L4, but each may be a multi-stage stage.

[0089] In the third embodiment, the spiral filter portion 41b forms a spiral flow path between itself and the inner surface of the heating flow path L4. However, the spiral filter portion 41b may be any filter that comes into contact with the inner surface of the heating flow path L4 to form a flow path, and may be, for example, a baffle plate or an orifice.

[0090] In the third embodiment, the spiral filter portion 41b has a spiral flow path formed between the heat exchange element 22 and the inner surface of the heating flow path L4, and a spiral flow path formed between the spiral filter portion 41b and the inner surface of the heating flow path L4, but the spiral filter portions 41b may have the same rotation direction.

[0091] In addition, the present invention can be modified in various ways without departing from the spirit of the invention.

[0092] According to the present invention, it is possible to reduce the frequency of filter replacement while reducing the pressure loss in the heating flow path in the vaporizer through which the liquid material flows.

[0093] REFERENCE SIGNS LIST 100 Vaporization system 10 Gas-liquid mixing section 20 Vaporizer 21 Filter 22 Heat exchanger 23 Pre-filter L4 Heating flow path

Claims

1. A vaporizer that vaporizes a liquid material by heating a heating flow path through which a fluid containing the liquid material flows, comprising: a filter that is provided in the heating flow path and collects particles contained in the fluid; a heat exchanger that is provided in the heating flow path upstream of the filter and performs heat exchange with the liquid material; and a prefilter that is provided in the heating flow path upstream of the filter and collects the particles, wherein, in a cross section perpendicular to the direction in which the fluid flows, the cross section of the filter is arranged to block the heating flow path, and the cross section of the prefilter does not block the heating flow path compared to the cross section of the filter.

2. The vaporizer of claim 1, wherein the prefilter forms a spiral flow path between the prefilter and the inner surface of the heating flow path.

3. The vaporizer according to claim 2, wherein the pre-filter is a plate-like member twisted along the circumferential direction of the heating flow path.

4. A vaporizer according to any one of claims 1 to 3, wherein a plurality of pores are formed on the surface of the prefilter that comes into contact with the particles.

5. A vaporizer as described in any one of claims 1 to 4, wherein the heat exchange body and the pre-filter form a spiral flow path between themselves and the inner surface of the heating flow path, and the rotation direction of the spiral flow path formed between the heat exchange body and the inner surface of the heating flow path is opposite to the rotation direction of the spiral flow path formed between the pre-filter and the inner surface of the heating flow path.

6. A vaporizer according to any one of claims 1 to 5, wherein the pre-filter is provided downstream of the heat exchange body in the heating flow path.

7. A vaporizer according to any one of claims 1 to 6, wherein the pre-filter exchanges heat with the liquid material.

8. The vaporizer of claim 7, wherein the prefilter contacts the inner surface of the heating channel.

9. A vaporizer according to any one of claims 1 to 8, wherein the pre-filter is made of sintered metal.

10. A vaporization system comprising: a gas-liquid mixing section that mixes a liquid material with a carrier gas to generate a gas-liquid mixture; and a vaporizer according to any one of claims 1 to 9 into which the gas-liquid mixture is introduced.

11. A vaporizer that vaporizes a liquid material by heating a heating flow path through which a fluid containing the liquid material flows, comprising: a filter that is provided in the heating flow path and collects particles contained in the fluid after the liquid material has been vaporized; a heat exchanger that is provided in the heating flow path upstream of the filter and performs heat exchange with the liquid material; and a prefilter that is provided in the heating flow path upstream of the filter and collects the particles, wherein the prefilter contacts the inner surface of the heating flow path and forms a flow path between the prefilter and the inner surface of the heating flow path, and the filter and the prefilter are formed as a single unit and are removably fitted into the heating flow path.

12. A vaporizer that vaporizes a liquid material by heating a heating flow path through which a fluid containing the liquid material flows, comprising: a filter that is provided in the heating flow path and that collects particles contained in the fluid after the liquid material has been vaporized; and a heat exchanger that is provided in the heating flow path upstream of the filter and that exchanges heat with the liquid material, wherein the filter contacts the inner surface of the heating flow path, forms a flow path between the filter and the inner surface of the heating flow path, and is removably fitted into the heating flow path.

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