Valve body structure and semiconductor process device

Abstract

A valve body structure and a semiconductor process device. The valve body structure comprises: a first transmission gear set (43A), comprising a first internal gear (431A) and a first external gear (432A), the first external gear being in one-way transmission connection with a first transmission member (2A) by means of the first internal gear; a second transmission gear set (43B), comprising a second internal gear (431B) and a second external gear (432B), the second external gear being in one-way transmission connection with a second transmission member (2B) by means of the second internal gear; a first moving member (42A), which is in transmission connection with the second external gear; and a second moving member (42b), which is in transmission connection with the first external gear. When the first transmission member rotates in a first rotation direction, the first transmission member drives the second transmission member to rotate in the same direction; and when the first transmission member rotates in a second rotation direction opposite to the first rotation direction, the first transmission member disengages from the transmission connection with the first external gear, such that two ends of a valve plate (5) can move synchronously, and single-end adjustment of the valve plate can be achieved.

Description

Valve body structure and semiconductor process equipment Technical Field

[0001] The present application relates to the field of semiconductor process equipment, and in particular, to a valve body structure and semiconductor process equipment. Background Art

[0002] As the requirements for etching process precision continue to increase, the requirements for the uniformity of the flow field inside the chamber of semiconductor etching equipment are also gradually increasing. Therefore, more and more semiconductor etching equipment uses vertical valves to control the internal air pressure of the chamber, thereby utilizing the vertical lifting characteristics of the valve plate of the vertical valve and its structural symmetry to improve the uniformity of the flow field inside the chamber.

[0003] In some related technologies, vertical valves often require motors located on both sides of the valve plate to synchronously drive the valve plate up and down. Therefore, vertical valves in related technologies usually adopt a dual-motor dual-drive independent control method, that is, a master controller communicates with the controllers of the two motors to control the synchronous rotation of the two motors, thereby driving the valve plate up or down. However, during the driving process, there may be errors and matching errors in the motor and the transmission device between the motor and the valve plate. As the number of lifting actions increases, the errors will also accumulate, which will cause the valve plate to be unable to achieve vertical lifting, causing the valve plate to tilt. The tilted valve plate will interfere with the internal flow field of the chamber of the semiconductor etching equipment, resulting in reduced uniformity of the internal flow field of the chamber. Summary of the Invention

[0004] The present application aims to at least solve the technical problem in the prior art of a vertical valve being driven asynchronously on both sides, which causes the valve plate to tilt, and proposes a valve body structure and semiconductor process equipment.

[0005] To achieve the purpose of the present application, a valve body structure is provided, comprising: a valve plate, a first transmission member and a second transmission member, wherein the first transmission member and the second transmission member are respectively connected to the valve plate in a transmission manner to drive the valve plate to move along the extension direction of a first straight line, and the valve body structure further comprises: a first transmission gear set, comprising a first internal gear and a first external gear, wherein the first external gear is connected to the first transmission member in a one-way transmission manner via the first internal gear; a second transmission gear set, comprising a second internal gear and a second external gear, wherein the second external gear is connected to the second transmission member in a one-way transmission manner via the second internal gear; a first moving member is connected to the second external gear in a transmission manner, and the first moving member is configured The second movable member is connected to or disconnected from the first external gear by moving; the second movable member is connected to or disconnected from the second external gear by moving; when the first transmission member rotates along the first rotation direction, the first transmission member, the first internal gear, the first external gear, the second movable member, the second external gear, and the second transmission member are sequentially connected to each other so that the first transmission member drives the second transmission member to rotate in the same direction; when the first transmission member rotates along the second rotation direction opposite to the first rotation direction, the first transmission member is disconnected from the first external gear.

[0006] In some embodiments, when the second transmission member rotates along the second rotation direction, the second transmission member, the second internal gear, the second external gear, the first moving member, the first external gear, and the first transmission member are sequentially connected in transmission so that the second transmission member drives the first transmission member to rotate in the same direction; when the second transmission member rotates along the first rotation direction, the second transmission member is disengaged from the second external gear.

[0007] In some embodiments, the first internal gear is fixedly connected to the first transmission member, the first internal gear is arranged inside the first external gear and is unidirectionally connected to the first external gear, so that the first internal gear drives the first external gear to rotate along the first rotation direction or the first external gear drives the first internal gear to rotate along the second rotation direction; and / or the second internal gear is fixedly connected to the second transmission member, the second internal gear is arranged inside the second external gear and is unidirectionally connected to the second external gear, so that the second internal gear drives the second external gear to rotate along the second rotation direction or the second external gear drives the second internal gear to rotate along the first rotation direction.

[0008] In some embodiments, the first internal gear is circumferentially movably connected to a plurality of ratchet teeth, each of the ratchet teeth having a limit position protruding from the outer peripheral wall of the first internal gear and a avoidance position at least partially retracted into the interior of the first internal gear, and the inner peripheral wall of the first external gear is provided with internal teeth; when the first transmission member rotates relative to the first external gear in the first rotation direction, all the ratchet teeth are in the limit position and mesh with the internal teeth; when the first transmission member rotates relative to the first external gear in the second rotation direction, all the ratchet teeth are in the avoidance position, so that the first transmission member and the first external gear are disengaged from the transmission. connection; and / or the second internal gear is circumferentially movably connected with a plurality of ratchet teeth, each of the ratchet teeth having a limit position protruding from the outer peripheral wall of the second internal gear and an avoidance position at least partially retracted into the interior of the second internal gear, and the inner peripheral wall of the second external gear is provided with internal teeth; when the second transmission member rotates relative to the second external gear along the second rotation direction, all the ratchet teeth are in the limit position and mesh with the internal teeth; when the second transmission member rotates relative to the second external gear along the first rotation direction, all the ratchet teeth are in the avoidance position, so that the second transmission member and the second external gear are disconnected from the transmission connection.

[0009] In some embodiments, the first transmission member is arranged along the extension direction of the first straight line; the first moving member is arranged on the first transmission member and is rotatable relative to the first transmission member; the first moving member approaches or moves away from the first external gear in the extension direction of the first straight line by rotating relative to the first transmission member, so that the first moving member is transmission-connected and disengaged with the first external gear; and / or the second transmission member is arranged along the extension direction of the first straight line; the second moving member is arranged on the second transmission member and is rotatable relative to the second transmission member; the second moving member approaches or moves away from the second external gear in the extension direction of the first straight line by rotating relative to the second transmission member, so that the second moving member is transmission-connected and disengaged with the second external gear.

[0010] In some embodiments, the first moving member includes: a first sliding gear, which is sleeved on the first transmission member and has a clearance fit with the first transmission member, and the first sliding gear is transmission-connected to the second external gear; a first slider, which is sleeved on the first transmission member and has a threaded engagement with the first transmission member, and the first sliding gear is connected to the first slider; when the first transmission member rotates along the first rotation direction relative to the first sliding gear, the first slider approaches the first external gear; when the first transmission member rotates along the second rotation direction relative to the first sliding gear, the first slider moves away from the first external gear; and / or the second moving member includes: a second sliding gear, which is sleeved on the second transmission member and has a clearance fit with the second transmission member, and the second sliding gear is transmission-connected to the first external gear; a second slider, which is sleeved on the second transmission member and has a threaded engagement with the second transmission member, and the second sliding gear is connected to the second slider; when the second transmission member rotates along the second rotation direction relative to the second sliding gear, the second slider approaches the second external gear; when the second transmission member rotates along the first rotation direction relative to the second sliding gear, the second slider moves away from the second external gear.

[0011] In some embodiments, the first sliding gear has a first matching portion on the side facing the first external gear, and the first external gear has a second matching portion matching the first matching portion; when the first moving member approaches the first external gear, the first matching portion and the second matching portion approach each other, so that the first sliding gear is transmission-connected to the first external gear; when the first sliding gear moves away from the first external gear, the first matching portion and the second matching portion are separated from each other; and / or the second sliding gear has a third matching portion on the side facing the second external gear, and the second external gear has a fourth matching portion matching the third matching portion; when the second moving member approaches the second external gear, the third matching portion and the fourth matching portion approach each other, so that the second sliding gear is transmission-connected to the second external gear; when the second sliding gear moves away from the second external gear, the third matching portion and the fourth matching portion are separated from each other.

[0012] In some embodiments, the first mating portion and the second mating portion are configured to be transmission connected when the first sliding gear rotates relative to the first external gear along the second rotation direction, and to disengage from the limiting mating when the first sliding gear rotates relative to the first external gear along the first rotation direction; and / or the third mating portion and the fourth mating portion are configured to be transmission connected when the second sliding gear rotates relative to the second external gear along the first rotation direction, and to disengage from the limiting mating when the second sliding gear rotates relative to the second external gear along the second rotation direction.

[0013] In some embodiments, the valve body structure also includes: a second transmission belt, which is transmission-connected between the first external gear and the second moving member, and the second transmission belt is one-way transmission-connected to the first external gear and / or the second moving member; when the second transmission belt is one-way transmission-connected to the first external gear, the first external gear drives the second transmission belt to rotate along the first rotation direction or the second transmission belt drives the first external gear to rotate along the second rotation direction; when the second transmission belt is one-way transmission-connected to the second moving member, the second moving member drives the second transmission belt to rotate along the second rotation direction or the second transmission belt drives the second moving member to rotate along the first rotation direction.

[0014] In some embodiments, the valve body structure also includes: a first transmission belt, which is transmission-connected between the second external gear and the first moving member, and a one-way transmission connection between the first transmission belt and the second external gear and / or the first moving member; when the first transmission belt is one-way transmission-connected to the second external gear, the second external gear drives the first transmission belt to rotate along the second rotation direction or the first transmission belt drives the second external gear to rotate along the first rotation direction; when the first transmission belt is one-way transmission-connected to the first moving member, the first moving member drives the first transmission belt to rotate along the first rotation direction or the first transmission belt drives the first moving member to rotate along the second rotation direction.

[0015] In some embodiments, the valve body structure also includes: a first driving source, which is driven and connected to the first transmission member; a third slider, which is driven and cooperated with the first transmission member; a first connecting rod, which is arranged along the extension direction of the first straight line, and the first connecting rod is connected to the first end of the valve plate in the extension direction of the third straight line, the extension direction of the third straight line intersects with the extension direction of the first straight line, and the first connecting rod is connected to the third slider; a second driving source, which is driven and connected to the second transmission member; a fourth slider, which is driven and cooperated with the second transmission member; a second connecting rod, which is arranged along the extension direction of the first straight line, and the second connecting rod is connected to the second end of the valve plate in the extension direction of the third straight line, and the second connecting rod is connected to the fourth slider.

[0016] In some embodiments, the valve body structure also includes: a detection device for detecting the stroke of the two first connecting rods and the second connecting rod in real time; a controller, which is communicated with the detection device, the first driving source, and the second driving source respectively, and the controller is used to control the rotation direction of the first driving source and the second driving source according to the stroke of the first connecting rod and the second connecting rod detected by the detection device, so that the stroke error of the two first connecting rods and the second connecting rod is within a preset range.

[0017] In some embodiments, the surfaces of the first connecting rod and the second connecting rod have multiple non-identification areas and multiple identification areas; the multiple non-identification areas and the multiple identification areas are alternately arranged and evenly distributed along the lifting direction; the detection device includes: a photoelectric sensor, which is used to detect the identification areas and record the number of the detected identification areas.

[0018] According to a second aspect of the present invention, a valve body structure is further disclosed, which includes: a valve plate, a connecting assembly, a driving assembly, a transmission assembly and a synchronous switching assembly; wherein the connecting assembly includes a first connecting rod and a second connecting rod, both of which are connected to the valve plate; the driving assembly is used to drive the transmission assembly to rotate, and includes a first driving source and a second driving source, both of which can output two rotational forces in opposite directions of rotation; the transmission assembly includes a first transmission member and a second transmission member, the first transmission member is respectively connected to the first driving source and the first connecting rod, and is used to convert the rotational force output by the first driving source into a linear force and transmit it to the first connecting rod; the second transmission member is respectively connected to the second driving source and the second connecting rod, and is used to convert the rotational force provided by the second driving source into a linear force and transmit it to the second connecting rod;

[0019] The synchronous switching assembly is connected to the first transmission member and the second transmission member respectively;

[0020] The synchronous switching component is used to switch to a first state when the first driving source outputs rotational power in a first rotational direction, and drive the first transmission member and the second transmission member to rotate synchronously along the first rotational direction; it is also used to switch to a second state when the second driving source outputs rotational power in the first rotational direction, and drive the second transmission member to rotate along the first rotational direction; it is also used to switch to a third state when the second driving source outputs rotational power in a second rotational direction opposite to the first rotational direction, and drive the first transmission member and the second transmission member to rotate synchronously along the second rotational direction; it is also used to switch to a fourth state when the first driving source outputs rotational power in the second rotational direction, and drive the first transmission member to rotate along the second rotational direction.

[0021] In some embodiments, the synchronous switching assembly includes a first transmission belt, a second transmission belt, a first moving member, a second moving member, a first fixed member, and a second fixed member; wherein the first fixed member is fixedly connected to the first transmission member, and the second fixed member is fixedly connected to the second transmission member; the first moving member is cooperatively connected to the first transmission member and can rotate therewith and move along a first straight line; the second moving member is cooperatively connected to the second transmission member and can rotate therewith and move along a second straight line; the first straight line is parallel to the second straight line; the first transmission belt is used to connect the first moving member and the second fixed member, and the second transmission belt is used to connect the second moving member and the first fixed member to transmit rotational power; in the first state, the first fixed member is used to drive the first fixed member to rotate The two moving members rotate along the first rotation direction, and the second moving member is connected and fixed to the second fixed member to drive the second fixed member to rotate synchronously along the first rotation direction; in the second state, the second moving member moves along the second straight line to be disconnected from the second fixed member; the transmission between the second fixed member and the first moving member is released; in the third state, the second fixed member is used to drive the first moving member to rotate along the second rotation direction, and the first moving member is connected and fixed to the first fixed member to drive the first fixed member to rotate synchronously along the second rotation direction; in the fourth state, the first moving member moves along the first straight line to be disconnected from the first fixed member; the transmission between the first fixed member and the second moving member is released.

[0022] In some embodiments, the first transmission member includes a first screw rod; the second transmission member includes a second screw rod; the first screw rod extends along the first straight line; the second screw rod extends along the second straight line; the first moving member is sleeved on the outer periphery of the first screw rod and threadedly engaged, and the thread structure is configured so that when the first moving member rotates along the second rotation direction, the first moving member moves in the first direction; the second moving member is sleeved on the outer periphery of the second screw rod and threadedly engaged, and the thread structure is configured so that when the second moving member rotates along the first rotation direction, the second moving member moves in the second direction; the second direction is opposite to the first direction; the first direction and the second direction are both parallel to the first straight line; the first fixed member is located on the side of the first moving member facing the first direction; the second fixed member is located on the side of the second moving member facing the second direction.

[0023] In some embodiments, a first one-way connection mechanism is formed on the surface opposite to the first fixed member of the first movable member; the first one-way connection mechanism is configured to connect the two when the first movable member moves along the first direction to the first fixed member, and to disconnect when the first movable member moves toward the second direction; a second one-way connection mechanism is formed on the surface opposite to the second movable member of the second fixed member; the second one-way connection mechanism is configured to connect the two when the second movable member moves along the second direction to the second fixed member, and to disconnect when the second movable member moves toward the first direction.

[0024] In some embodiments, the first fixing member includes a first internal gear and a first external gear; the second fixing member includes a second internal gear and a second external gear; the first internal gear is fixedly connected to the first screw rod; the outer periphery of the first external gear abuts the second transmission belt; a first through hole is opened at the central axis of the first external gear, which is sleeved on the outer periphery of the internal gear; the inner peripheral surface of the first through hole is a toothed surface that can be unidirectionally meshed with the first internal gear, and is configured to be meshed and connected with the first internal gear when the first internal gear rotates along the first rotation direction, and to be disengaged from the first internal gear when the first internal gear rotates along the second rotation direction; the second internal gear is fixedly connected to the second screw rod; the outer periphery of the second external gear abuts the first transmission belt; a second through hole is opened at the central axis of the second external gear, which is sleeved on the outer periphery of the internal gear; the inner peripheral surface of the second through hole is a toothed surface that can be unidirectionally meshed with the second internal gear, and is configured to be meshed and connected with the second internal gear when the second internal gear rotates along the second rotation direction, and to be disengaged from the second internal gear when the second internal gear rotates along the first rotation direction.

[0025] In some embodiments, the outer peripheries of the first external gear and the second external gear are both ratchet tooth structures; the ratchet tooth structure of the first external gear is configured to drive the second transmission belt to rotate when the first external gear rotates along the first rotation direction, and to rotate along with the second transmission belt when the second transmission belt moves along the second rotation direction; the ratchet tooth structure of the second external gear is configured to drive the first transmission belt to rotate when the second external gear rotates along the second rotation direction, and to rotate along with the first transmission belt when the first transmission belt moves along the first rotation direction.

[0026] In some embodiments, the first moving member includes a first sliding gear and a first slider; the second moving member includes a second sliding gear and a second slider; the first slider is coaxially arranged and fixedly connected to the first sliding gear; a third through hole is opened at the central axis of the first slider; the inner circumference of the third through hole has a threaded structure that can cooperate with the first screw thread; the second slider is coaxially arranged and fixedly connected to the second sliding gear; a fourth through hole is opened at the central axis of the second slider; the inner circumference of the fourth through hole has a threaded structure that can cooperate with the second screw thread; the outer periphery of the first sliding gear and the second sliding gear are both ratchet tooth structures; the ratchet tooth structure of the first sliding gear is configured to drive the first transmission belt to rotate when the first sliding gear rotates along the first rotation direction, and to rotate with the first transmission belt when the first transmission belt moves along the second rotation direction; the ratchet tooth structure of the second sliding gear is configured to drive the second transmission belt to rotate when the second sliding gear rotates along the second rotation direction, and to rotate with the second transmission belt when the second transmission belt moves along the first rotation direction.

[0027] In some embodiments, the connecting assembly also includes a third slider connected and fixed to the first connecting rod and a fourth slider connected and fixed to the second connecting rod; the third slider and the fourth slider are respectively threadedly engaged with the first connecting rod and the second connecting rod; the third slider and the fourth slider both move along the first direction when the corresponding screw rod rotates along the first rotation direction, and both move along the second direction when the corresponding screw rod rotates along the second rotation direction.

[0028] In some embodiments, it also includes a controller and two stroke detection devices; the two stroke detection devices are respectively used to detect the stroke of the first connecting rod and the second connecting rod in real time and send the detection results to the controller; the controller is used to calculate the stroke difference between the first connecting rod and the second connecting rod, and determine whether the stroke difference reaches a preset threshold; if so, the first driving source or the second driving source is controlled to switch the rotation direction so that the synchronous switching component switches to the second state or the fourth state.

[0029] In some embodiments, the controller is also used to calculate the stroke compensation amount based on the stroke difference when the synchronous switching component is in the second state or the fourth state, and control the second drive source or the first drive source to output a preset stroke compensation amount to reduce the stroke difference to 0; or, the controller is also used to continuously determine whether the stroke difference has dropped to 0 when the synchronous switching component is in the second state or the fourth state; if so, control both the second drive source and the first drive source to stop outputting rotational power.

[0030] In some embodiments, the surfaces of the first link and the second link each have multiple non-identification areas and multiple identification areas; the multiple non-identification areas and the multiple identification areas are alternately arranged and evenly distributed along the lifting direction; the two stroke detection devices include photoelectric sensors; the two photoelectric sensors are respectively fixed on the circumferential sides of the first link and the second link, and the detection ends of the two photoelectric sensors are both facing the surfaces of the first link and the second link; the photoelectric sensors are used to detect the identification areas and record the number of the detected identification areas.

[0031] As another technical solution, the present application also provides a semiconductor process equipment, which includes a process chamber and a valve body structure as described above; the valve body structure is installed at the air inlet of the process chamber to control the air intake volume of the process chamber.

[0032] This application has the following beneficial effects:

[0033] The valve body structure provided in the present application includes a valve plate and two sets of connecting rods, connecting members and driving sources for driving the movement of the valve plate, and also includes a synchronous switching assembly connected to the two connecting rods respectively. Among them, the synchronous switching assembly is capable of switching the transmission state of the two connecting rods when the two driving sources output rotational power in different rotation directions. Specifically, the synchronous switching assembly is capable of simultaneously driving the two transmission members to rotate together along the first rotation direction when the first driving source outputs a first rotation direction, and simultaneously driving the two transmission members to rotate together along the second rotation direction when the second driving source outputs a second rotation direction, thereby achieving the goal of driving the two ends of the valve plate to move together.

[0034] Moreover, the synchronous switching component can also drive only the first transmission member to rotate along the second rotation direction when the first driving source outputs the second rotation direction, and drive only the second transmission member to rotate along the first rotation direction when the second driving source outputs the first rotation direction, thereby realizing the independent movement of a single end of the driving valve plate. For example, in the process of driving the valve plate to rise and fall, when the valve plate tilts, the two ends of the valve plate can be leveled by driving one of the two ends of the valve plate to rise or fall. Compared with the existing maintenance scheme for manually leveling the valve body structure, the valve body structure provided by the present application does not require the operator to disassemble and repair the valve body structure, which can greatly reduce the workload of the operator, shorten the maintenance time, and reduce the errors that may occur during the manual leveling process. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] The following is a brief introduction to the drawings required for use in the embodiments or descriptions of the prior art in conjunction with the accompanying drawings. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0036] FIG1 is a simplified structural diagram of a valve body structure provided in an embodiment of the present application;

[0037] FIG2 is a simplified structural diagram of a transmission assembly and a synchronous switching assembly provided in an embodiment of the present application;

[0038] FIG3 is a schematic top view of the structure of a synchronous switching assembly provided in an embodiment of the present application;

[0039] FIG4 is a partial enlarged view of the helical gear structure between the fixed member and the movable member provided in an embodiment of the present application;

[0040] FIG5 is a cross-sectional view of a transmission assembly and a synchronous switching assembly provided in an embodiment of the present application;

[0041] FIG6 is a schematic top view of the first fixed member and the second movable member, and a schematic top view of the second fixed member and the first movable member, provided in an embodiment of the present application;

[0042] FIG7A is a schematic top view of the structure of the first internal gear and the first external gear provided in an embodiment of the present application;

[0043] FIG7B is a partial enlarged view of FIG7A ;

[0044] FIG8 is a transmission principle diagram of the valve body structure provided by an embodiment of the present application in the first state;

[0045] FIG9 is a transmission principle diagram of the valve body structure provided by an embodiment of the present application in the second state;

[0046] FIG10 is a transmission principle diagram of the valve body structure provided in an embodiment of the present application in the third state;

[0047] FIG11 is a transmission principle diagram of the valve body structure provided by an embodiment of the present application in the fourth state;

[0048] FIG12 is a simplified structural diagram of the semiconductor process equipment provided in an embodiment of the present application. DETAILED DESCRIPTION

[0049] In order to enable those skilled in the art to better understand the technical solution of the present application, the valve body structure and semiconductor process equipment provided by the present application are described in detail below with reference to the accompanying drawings.

[0050] An embodiment of the present application provides a valve body structure for use in semiconductor process equipment, which includes a valve plate, a connection component, a drive component, a transmission component, and a synchronous switching component 4.

[0051] The valve plate is, for example, disposed at an air inlet or an air outlet of a semiconductor process device, so that the air inlet and air outlet flow rates of the semiconductor process device can be controlled by adjusting the position of the valve plate.

[0052] As shown in Figure 1 , the connecting assembly includes a first connecting rod 3A and a second connecting rod 3B, both connected to the valve plate 5. In some specific embodiments, the first connecting rod 3A and the second connecting rod 3B are symmetrically arranged relative to the central axis of the valve plate 5.

[0053] The driving assembly includes a first driving source 1A and a second driving source 1B. The first driving source 1A and the second driving source 1B are both capable of outputting two rotational forces in opposite directions.

[0054] The transmission assembly is used to drive the transmission assembly to rotate. In other words, the drive assembly is drivingly connected to the transmission assembly to drive the transmission assembly to rotate.

[0055] The transmission assembly includes: a first transmission member 2A and a second transmission member 2B. The first transmission member 2A is respectively connected to the first drive source 1A and the first connecting rod 3A, and is used to convert the rotational power output by the first drive source 1A into linear power and transmit it to the first connecting rod 3A; the second transmission member 2B is respectively connected to the second drive source 1B and the second connecting rod 3B, and is used to convert the rotational power output by the second drive source 1B into linear power and transmit it to the second connecting rod 3B.

[0056] The synchronous switching component 4 is connected to the first transmission member 2A and the second transmission member 2B respectively. The synchronous switching component 4 has four working states. Specifically, the synchronous switching component 4 is used to drive the first transmission member 2A to rotate along the first rotation direction when the first driving source 1A outputs the rotational power in the first rotation direction. The synchronous switching component 4 switches to the first state. At this time, the first transmission member 2A drives the second transmission member 2B to rotate synchronously along the first rotation direction through the synchronous switching component 4; that is, when the first driving source 1A outputs the rotational power in the first rotation direction, it can serve as the main driving source to simultaneously drive the first connecting rod 3A and the second connecting rod 3B to move linearly synchronously, thereby simultaneously driving the two ends of the valve plate 5 to rise or fall synchronously.

[0057] When the second driving source 1B outputs rotational power in the first rotational direction, it drives the second transmission member 2B to rotate along the first rotational direction, and the synchronous switching component 4 switches to the second state. In the second state of the synchronous switching component 4, the second transmission member 2B rotates along the first rotational direction and disengages from the driving cooperation with the synchronous switching component 4. In other words, the second transmission member 2B will not drive the first transmission member 2A to rotate, thereby driving the second connecting rod 3B to rise or fall alone, thereby adjusting the distance between the end of the valve plate 5 connected to the second connecting rod 3B and the air inlet.

[0058] When the second drive source 1B outputs rotational power in a second rotational direction opposite to the first rotational direction, it drives the second transmission member 2B to rotate in the second rotational direction, and the synchronous switching assembly 4 switches to the third state. At this time, the second transmission member 2B drives the first transmission member 2A to rotate synchronously in the second rotational direction through the synchronous switching assembly 4. That is, when the second drive source 1B outputs rotational power in the second rotational direction, it can serve as the main driving source to simultaneously drive the first connecting rod 3A and the second connecting rod 3B to move linearly, thereby simultaneously driving the two ends of the valve plate 5 to descend or ascend synchronously. It should be noted that the movement direction of the valve plate 5 is opposite when the synchronous switching assembly 4 is in the third state and the first state.

[0059] The synchronous switching assembly 4 is also configured to switch to a fourth state when the first drive source 1A outputs rotational power in the second direction. In this fourth state, it drives the first transmission member 2A to rotate in the second direction without rotating the second transmission member 2B, thereby driving the first connecting rod 3A to descend or ascend independently, thereby independently adjusting the distance of the end of the valve plate 5 connected to the first connecting rod 3A relative to the air inlet. It should be noted that the fourth state and the second state of the synchronous switching assembly 4 differ in that the objects driven for rotation are different. Specifically, the fourth state drives only the first transmission member 2A, while the second state drives only the second transmission member 2B. For example, when the first drive source 1A outputs rotational power in the second direction, it drives the first transmission member 2A to rotate in the second direction, and the synchronous switching assembly 4 switches to the fourth state. In this state, the first transmission member is disengaged from the synchronous switching assembly 4 when rotating in the second direction. In other words, the first transmission member 2A does not rotate the second transmission member 2B.

[0060] As can be seen, by adopting the above-mentioned synchronous switching assembly 4, the valve body structure provided in this embodiment can achieve four operating states. Taking the valve body structure provided in this embodiment as an example, the vertical valve can achieve synchronous raising of the valve plate 5 at both ends, synchronous lowering of the valve plate 5 at both ends, raising of the valve plate 5 at one end, and lowering of the valve plate 5 at one end. In this way, the valve plate 5 can be driven to rise and fall synchronously at both ends, and the valve plate 5 can be leveled by adjusting the height of the valve plate 5 at one end. This eliminates the need for operators to disassemble and repair the valve body structure, greatly reducing the operator's workload, shortening maintenance time, and reducing errors that may occur during manual leveling.

[0061] Illustratively, the first driving source 1A and the second driving source 1B may be motors.

[0062] The valve body structure of the present application is further described below in conjunction with specific embodiments.

[0063] In the embodiment shown in FIG2 , the valve body structure includes: a valve plate 5 , a first transmission member 2A and a second transmission member 2B. The first transmission member 2A and the second transmission member 2B are respectively connected to the valve plate 5 to drive the valve plate 5 to move along the extension direction of the first straight line.

[0064] In some embodiments, as shown in FIG2 , the synchronous switching assembly 4 includes: a first transmission belt 41A, a second transmission belt 41B, a first movable member 42A, a second movable member 42B, a first fixed member, and a second fixed member. That is, after the synchronous switching assembly 4 is unfolded, the valve body structure includes, in addition to the valve plate 5 , the first transmission member 2A and the second transmission member 2B, the first transmission belt 41A, the second transmission belt 41B, the first movable member 42A, the second movable member 42B, the first fixed member, and the second fixed member.

[0065] Among them, the first fixed member is fixedly connected to the first transmission member 2A, and the second fixed member is fixedly connected to the second transmission member 2B; the first movable member 42A is cooperatively connected to the first transmission member 2A and can rotate therewith and move along the first straight line, and the second movable member 42B is cooperatively connected to the second transmission member 2B and can rotate therewith and move along the second straight line.

[0066] The first transmission belt 41A is used to connect the first movable member 42A and the second fixed member, and the second transmission belt 41B is used to connect the second movable member 42B and the first fixed member, respectively, to transmit rotational power. Furthermore, as shown in FIG3 , in some embodiments, a plurality of tensioning pulleys 411 are disposed around the valve plate 5 , and the plurality of tensioning pulleys 411 are fixed to the edges of the air inlet of the semiconductor processing equipment. The first transmission belt 41A and the second transmission belt 41B are also wound around the outer circumferences of the plurality of tensioning pulleys 411 to maintain belt tension.

[0067] Specifically, when the synchronous switching component 4 is in the first state, the first driving source 1A outputs rotational power in the first rotation direction to drive the first transmission member 2A to rotate along the first rotation direction, and the first fixed member also rotates along the first rotation direction; the first fixed member is used to drive the second movable member 42B to rotate along the first rotation direction through the second transmission belt 41B, so that the second movable member 42B moves along the second straight line, and the second movable member 42B is connected and fixed to the second fixed member, so that the first fixed member can drive the second fixed member to rotate synchronously along the first rotation direction through the second transmission belt 41B, thereby causing the first connecting rod 3A and the second connecting rod 3B to move in a straight line at the same time.

[0068] When the synchronous switching component 4 is in the second state, the second driving source 1B outputs rotational power in the first rotational direction to drive the second transmission member 2B to rotate along the first rotational direction; at this time, the second movable member 42B rotates along the second rotational direction relative to the second transmission member 2B. Therefore, under the drive of the second transmission member 2B, the second movable member 42B moves along the second straight line in the direction away from the second fixed member, so that the second movable member 42B is separated from the second fixed member and the drive cooperation is released, thereby not transmitting rotational power to the first fixed member; moreover, since the transmission cooperation between the second fixed member and the first movable member 42A is released, the second transmission member 2B rotates alone in the first rotational direction, and the first transmission member 2A does not rotate therewith, thereby driving the second connecting rod 3B to move along the second straight line alone.

[0069] When the synchronous switching component 4 is in the third state, the second driving source 1B outputs rotational power in the second rotation direction to drive the second transmission member 2B to rotate along the second rotation direction, and the second fixed member also rotates along the second rotation direction under the drive of the second transmission member 2B; the second fixed member is used to drive the first movable member 42A to rotate relative to the first transmission member 2A along the second rotation direction through the first transmission belt 41A, so that the first movable member 42A moves along the first straight line toward the direction close to the first fixed member, so that the first movable member 42A is driven to cooperate with the first fixed member, so that the second fixed member can drive the first fixed member to rotate synchronously along the second rotation direction through the first transmission belt 41A and the first movable member 42A, and then the first transmission member 2A and the second transmission member 2B rotate synchronously along the second rotation direction to drive the first connecting rod 3A and the second connecting rod 3B to move linearly at the same time.

[0070] When the synchronous switching component 4 is in the fourth state, the first driving source 1A outputs rotational power in the second rotational direction to drive the first transmission member 2A to rotate along the second rotational direction; at this time, the first movable member 42A rotates relative to the first transmission member 2A along the first rotational direction. Therefore, under the drive of the first transmission member 2A, the first movable member 42A moves along the first straight line in the direction away from the first fixed member, so that the first movable member 42A is separated from the first fixed member and the drive cooperation is released, thereby not transmitting rotational power to the second fixed member; moreover, since the transmission between the first fixed member and the second movable member 42B is released, the first transmission member 2A rotates alone in the second rotational direction, and the second transmission member 2B does not rotate therewith, thereby driving the first connecting rod 3A to move alone along the first straight line.

[0071] It can be seen that the synchronous switching component 4 provided in this embodiment can switch the connection state between the first fixed part and the first movable part 42A, and the connection state between the second fixed part and the second movable part 42B, so as to determine whether the first transmission part 2A and the second transmission part 2B rotate synchronously, thereby realizing switching between four action states: synchronous rising of both ends of the valve plate 5, synchronous falling of both ends of the valve plate 5, rising of one end of the valve plate 5 and falling of one end of the valve plate 5.

[0072] In some specific implementations, the transmission belt may be a belt or a chain.

[0073] Furthermore, in some embodiments, the first transmission member 2A includes a first screw rod 21A, the second transmission member 2B includes a second screw rod 21B, the first screw rod 21A extends along a first straight line, and the second screw rod 21B extends along a second straight line. Specifically, the first straight line and the second straight line are parallel.

[0074] The first moving member 42A is sleeved on the outer periphery of the first screw rod 21A and is threadedly engaged, and the thread structure between the two is configured so that when the first moving member 42A rotates along the second rotation direction, the first moving member 42A moves along the first screw rod 21A in the first direction close to the first fixed member. The second moving member 42B is sleeved on the outer periphery of the second screw rod 21B and is threadedly engaged, and the thread structure between the two is configured so that when the second moving member 42B rotates relative to the first rotation direction, the second moving member 42B moves along the second screw rod 21B in the second direction close to the second fixed member. Wherein, the second direction is opposite to the first direction; the first direction and the second direction are both parallel to the first straight line. Moreover, the first fixed member is located on the side of the first moving member 42A facing the first direction; and the second fixed member is located on the side of the second moving member 42B facing the second direction.

[0075] Taking the first direction as upward and the second direction as downward as an example, correspondingly, the first movable member 42A is located below the first fixed member, and the second movable member 42B is located above the second fixed member.

[0076] Thus, in the first state, the second moving member 42B is driven by the second transmission belt 41B to rotate along the first rotation direction so as to be able to descend linearly, thereby approaching the second fixed member and being connected and fixed thereto;

[0077] In the third state, the first moving member 42A is driven by the first transmission belt 41A to rotate along the second rotation direction so as to rise linearly, thereby approaching the first fixing member and being connected and fixed thereto.

[0078] Furthermore, in some embodiments, a first one-way connection mechanism is formed on a surface of the first movable member 42A opposite to the first fixed member; a second one-way connection mechanism is formed on a surface of the second movable member 42B opposite to the second fixed member.

[0079] Specifically, the first one-way connection mechanism is configured to connect the first movable member 42A to the first fixed member when the first movable member 42A moves to a position away from the first fixed member, and to disconnect the first movable member 42A when the first movable member 42A moves to a position away from the first fixed member. The second one-way connection mechanism is configured to connect the second movable member 42B to the second fixed member when the second movable member 42B moves to a position away from the second fixed member, and to disconnect the second movable member 42B when the second movable member 42B moves to a position away from the second fixed member.

[0080] In some specific embodiments, above-mentioned first one-way connecting mechanism comprises the helical tooth structure on two relative surfaces that is arranged on the first fixed member and the first moving member 42A.As shown in Figure 4, the helical tooth structure that is arranged on the first moving member 42A surface comprises a plurality of helical teeth, and a plurality of helical teeth all have an inclined surface and a vertical plane, and wherein the inclined surface is more and more higher in the direction of the second rotational direction, and the highest point of the inclined surface is connected with the vertical plane.Like this, when the first moving member 42A rotates along the second rotational direction, two relative vertical planes can offset each other, so that two helical tooth structures are meshed, thereby the first fixed member and the first moving member 42A are fixedly connected; and when the first moving member 42A rotates along the first rotational direction opposite to the second rotational direction, two relative inclined surfaces do not interfere with each other, so that two helical tooth structures can not mesh, thereby the first fixed member and the first moving member 42A are disconnected.

[0081] Above-mentioned second one-way connecting mechanism comprises the helical tooth structure on two relative surfaces that is arranged on the second fixed member and the second moving member 42B. Similar to above-mentioned helical tooth structure, the helical tooth structure that is arranged on the second moving member 42B surface also comprises a plurality of helical teeth; And a plurality of helical teeth all have an inclined surface and a vertical surface, wherein the inclined surface is increasingly higher in the direction of the first rotational direction, and the highest vertical surface of the inclined surface is connected. Like this, when the second moving member 42B rotates along the first rotational direction, two relative vertical surfaces can offset each other, so that the two helical tooth structures are meshed, thereby the second fixed member and the second moving member 42B are fixedly connected; And when the second moving member 42B rotates along the second rotational direction, two relative inclined surfaces do not interfere with each other, so that the two helical tooth structures can not mesh, thereby the second fixed member and the second moving member 42B are disconnected.

[0082] In some specific embodiments, as shown in FIG5 , the first movable member 42A includes a first sliding gear 421A and a first slider 422A; the second movable member 42B includes a second sliding gear 421B and a second slider 422B. The first slider 422A is coaxially disposed with the first sliding gear 421A and fixedly connected thereto to drive the first sliding gear 421A to move along the first screw rod 21A. A third through hole is defined at the center axis of the first slider 422A; the inner circumference of the third through hole has a threaded structure that is threadably engaged with the first screw rod 21A.

[0083] The second slider 422B is coaxially arranged and fixedly connected to the second sliding gear 421B to drive the second sliding gear 421B to move along the second screw rod 21B; a fourth through hole is opened at the center axis of the second slider 422B; the inner circumference of the fourth through hole has a threaded structure that can cooperate with the thread of the second screw rod 21B.

[0084] Furthermore, as shown in FIG6 , the outer peripheries of the first sliding gear 421A and the second sliding gear 421B are each configured with a ratchet tooth structure. The ratchet tooth structure of the first sliding gear 421A is configured to drive the first transmission belt 41A to rotate when the first sliding gear 421A rotates in the first rotational direction, and to rotate along with the first transmission belt 41A when the first transmission belt 41A moves in the second rotational direction. The ratchet tooth structure of the second sliding gear 421B is configured to drive the second transmission belt 41B to rotate when the second sliding gear 421B rotates in the second rotational direction, and to rotate along with the second transmission belt 41B when the second transmission belt 41B moves in the first rotational direction.

[0085] In some embodiments, the connecting assembly also includes a third slider fixedly connected to the first connecting rod 3A and a fourth slider fixedly connected to the second connecting rod 3B; the third slider and the fourth slider are respectively threadedly engaged with the first screw rod 21A and the second screw rod 21B, so that the first connecting rod 3A and the second connecting rod 3B are respectively transmission-connected to the first screw rod and the second screw rod.

[0086] The third slider and the fourth slider both rise linearly when the corresponding screw rod rotates along the first rotation direction, and both fall linearly when the corresponding screw rod rotates along the second rotation direction; in some embodiments, as shown in Figures 5 and 6, the first fixed member includes a first internal gear 431A and a first external gear 432A; the second fixed member includes a second internal gear 431B and a second external gear 432B.

[0087] Among them, the first internal gear 431A is fixedly connected to the first screw rod 21A; the outer periphery of the first external gear 432A is in contact with the transmission belt 41; a first through hole is opened at the center axis of the first external gear 432A, which is sleeved on the outer periphery of the first internal gear 431A. In other words, the first internal gear 431A is arranged inside the first external gear 432A; the inner peripheral surface of the first through hole is a toothed surface that can be unidirectionally engaged with the first internal gear 431A, and is configured to be engaged with the first internal gear 431A when it rotates along the first rotation direction, and to slide relative to the first internal gear 431A when it rotates along the second rotation direction to release the engagement.

[0088] As shown in Figures 5 and 6, the second internal gear 431B is fixedly connected to the second screw rod 21B; the outer periphery of the second external gear 432B abuts the second transmission belt 41B; a second through hole is defined at the center axis of the second external gear 432B and is sleeved around the outer periphery of the second internal gear 431B. In other words, the second internal gear 431B is disposed within the second external gear 432B; the inner periphery of the second through hole is a toothed surface capable of one-way meshing with the second internal gear 431B and is configured to mesh with the second internal gear 431B when the second internal gear 431B rotates in the second rotational direction, and to slide relative to the second internal gear 431B to release the meshing when the second internal gear 431B rotates in the first rotational direction. Specifically, in some embodiments, the outer peripheries of the first internal gear 431A and the second external gear 432B may be provided with ratchet teeth, and the inner peripheries of the first external gear 432A and the second external gear 432B may also be provided with ratchet teeth of corresponding shapes to achieve the above-mentioned one-way meshing.

[0089] In this way, in the first state, the first screw rod 21A rotates along the first rotation direction, and the first internal gear 431A also rotates along the first rotation direction, thereby driving the first external gear 432A to rotate along the first rotation direction; and in the fourth state, the first screw rod 21A rotates along the second rotation direction, and the first internal gear 431A also rotates along the second rotation direction, while the first external gear 432A does not rotate accordingly.

[0090] Similarly, in the third state, the second screw rod 21B rotates along the second rotation direction, and the second internal gear 431B also rotates along the second rotation direction, thereby driving the second external gear 432B to rotate along the second rotation direction; and in the second state, the second screw rod 21B rotates along the first rotation direction, and the second internal gear 431B also rotates along the first rotation direction, while the second external gear 432B does not rotate accordingly.

[0091] In some embodiments, as shown in FIG6 , the outer circumferences of the first external gear 432A and the second external gear 432B are both ratchet tooth structures. Specifically, the ratchet tooth structure of the first external gear 432A is configured to drive the second transmission belt 41B to rotate when the first external gear 432A rotates in a first rotational direction, and to rotate along with the second transmission belt 41B when the second transmission belt 41B moves in a second rotational direction. That is, the first external gear 432A serves as a driving wheel when rotating in the first rotational direction, and as a driven wheel when rotating in the second rotational direction.

[0092] On the contrary, the ratchet tooth structure of the second external gear 432B is configured to drive the first transmission belt 41A to rotate when the second external gear 432B rotates along the second rotation direction, and to rotate along with the first transmission belt 41A when the first transmission belt 41A moves along the first rotation direction, that is, the second external gear 432B serves as a driving wheel when rotating along the second rotation direction, and serves as a driven wheel when rotating along the first rotation direction.

[0093] In some preferred embodiments, the ratchet tooth structure can be composed of a flexible tooth plate and a retractable spring plate. Specifically, taking the ratchet tooth structure of the first inner gear 431A and the first outer gear 432A as an example, as shown in FIG7A , the ratchet tooth structure on the outer periphery of the first inner gear 431A can include a first tooth plate 4311 and a first spring plate 4312, while the ratchet tooth structure on the outer periphery of the first outer gear 432A can include a second tooth plate 4321 and a second spring plate 4322. Taking the first inner gear 431A as an example, as shown in FIG7B , the first tooth plate 4311 is tilted relative to the tooth root circumference of the first inner gear 431A, with one end of the first tooth plate 4311 connected to the first inner gear 431A and the other end connected to the end of the first spring plate 4312. The first spring plate 4312 extends perpendicular to the tooth root circumference, and the second spring plate 4312 is configured to elastically deform in a direction perpendicular to the tooth root circumference when subjected to an external force. Specifically, as shown in Figure 7B, the first tooth plate 4311, the first elastic plate 4312 and the root circumference of the gear can roughly form a triangle, and the right angle portion of the triangle can engage with the ratchet tooth structure 4323 at the inner circumference of the first outer gear 432A, while the acute angle cannot engage with the ratchet tooth structure 4323, but will slide relative to the ratchet tooth structure 4323. In this way, when the first internal gear 431A rotates along the first rotation direction, the elastic piece 4312 will not be deformed, and the end of the tooth piece 4311 will abut against the external ratchet tooth structure, that is, the right-angled portion of the above-mentioned triangle can engage with the ratchet tooth structure 4323 at the inner circumference of the first external gear 432A; and when the first internal gear 431A rotates along the second rotation direction, the ratchet tooth structure 4323 at the inner circumference of the first external gear 432A will push the first tooth piece 4311, and the first elastic piece 4312 will be compressed and deformed, so that the first tooth piece 4311 is close to the root circle of the first internal gear 431A, so that the first internal gear 431A cannot engage with the ratchet tooth structure 4323 at the inner circumference of the first external gear 432A, and then when the first internal gear 431A rotates along the second rotation direction, the transmission between the first internal gear 431A and the first external gear 432A is released, that is, the first external gear 432A will not rotate as the first internal gear 431A rotates.

[0094] When the valve body structure is placed vertically, the driven wheel may slip due to its own gravity and other external resistance. That is, relative sliding occurs between the driven wheel and the transmission belt, resulting in a large travel difference between the driven wheel and the driving wheel, and even causing transmission failure. Therefore, to avoid this problem, as shown in Figure 6, the diameter of the first external gear 432A can be designed to be slightly smaller than the diameter of the second sliding gear 421B; the diameter of the second external gear 432B can be designed to be slightly smaller than the diameter of the first sliding gear 421A, thereby increasing the gear ratio between the driven side and the driving side, thereby increasing the contact area between the driven wheel and the second transmission belt 41B and the first transmission belt 41A, and avoiding the occurrence of tooth slip. Specifically, the diameter difference between the first external gear 432A and the second sliding gear 421B, and the second external gear 432B and the first sliding gear 421A can be designed based on multiple parameters such as the actual screw stroke and the motor reduction ratio, so as to avoid the occurrence of tooth slip.

[0095] However, this will cause the rotation of the driven side to lag behind that of the active side in structure. Specifically, it may cause the rotation speed of the second sliding gear 421B to be slightly lower than that of the first external gear 432A when the first external gear 432A drives the second sliding gear 421B to rotate synchronously along the first rotation direction, thereby causing the rising action of the second connecting rod 3B to lag behind the rising action of the first connecting rod 3A; it may also cause the rotation speed of the first sliding gear 421A to be slightly lower than that of the second external gear 432B when the second external gear 432B drives the first sliding gear 421A to rotate synchronously along the second rotation direction, thereby causing the descending action of the first connecting rod 3A to lag behind the descending action of the second connecting rod 3B. Therefore, if the rising action of the second connecting rod 3B lags behind the rising action of the first connecting rod 3A during the rising stage of the valve plate 5, the first driving source 1A can be controlled to be closed and the second driving source 1B can be controlled to output the first rotational direction driving force to drive the second connecting rod 3B to rise alone; and if the descending action of the first connecting rod 3A lags behind the descending action of the second connecting rod 3B during the descending stage of the valve plate 5, the second driving source 1B can be controlled to be closed and the first driving source 1A can be controlled to output the second rotational direction driving force to drive the first connecting rod 3A to descend alone.

[0096] Taking the valve body structure shown in Figures 8-11 as an example, this embodiment also provides a specific transmission process for the valve body structure. The first rotation direction is, for example, clockwise, and the second rotation direction is, for example, counterclockwise. The first screw rod 21A and the second screw rod 21B extend in a vertical direction.

[0097] As shown in FIG8 , in the first state, the first driving source 1A rotates clockwise, driving the first screw rod 21A to rotate clockwise, which in turn drives the first internal gear 431A to rotate clockwise, which in turn drives the first external gear 432A to rotate clockwise, which in turn drives the transmission belt 41 to move in a clockwise direction, which in turn drives the second sliding gear 421B to rotate clockwise, causing the second sliding gear 421B to descend. When the second sliding gear 421B reaches the second external gear 432B, it engages with the second external gear 432B, which in turn drives the second internal gear 431B to rotate clockwise, which in turn drives the second screw rod 21B to rotate clockwise. In this way, the first screw rod 21A and the second screw rod 21B rotate synchronously, causing the first connecting rod 3A and the second connecting rod 3B to rise synchronously.

[0098] As shown in FIG9 , in the second state, the second driving source 1B rotates clockwise, driving the second screw rod 21B to rotate clockwise, which in turn drives the second internal gear 431B to rotate clockwise, and drives the second slider 422B to rise to a position away from the second external gear 432B, thereby driving the second sliding gear 421B to separate from the second external gear 432B, thereby releasing the connection. In this way, the second connecting rod 3B can be raised independently.

[0099] As shown in FIG10 , in the third state, the second driving source 1B rotates counterclockwise, driving the second screw rod 21B to rotate counterclockwise, thereby driving the second internal gear 431B to rotate counterclockwise, thereby driving the second external gear 432B to rotate counterclockwise, thereby driving the transmission belt 41 to move counterclockwise, thereby driving the first sliding gear 421A to rotate counterclockwise, causing the first sliding gear 421A to descend. When the first sliding gear 421A reaches the first external gear 432A, it engages with the first external gear 432A, thereby driving the first external gear 432A to rotate counterclockwise, thereby driving the first internal gear 431A to rotate counterclockwise, thereby driving the first screw rod 21A to rotate counterclockwise. In this way, the first screw rod 21A and the second screw rod 21B rotate synchronously, thereby causing the second connecting rod 3B and the first connecting rod 3A to descend synchronously.

[0100] As shown in Figure 11, in the fourth state, the first drive source 1A rotates counterclockwise, driving the first screw rod 21A to rotate counterclockwise, which in turn drives the first internal gear 431A to rotate counterclockwise, and drives the first slider 422A to rise to a position away from the first external gear 432A, thereby separating the first sliding gear 421A from the first external gear 432A and releasing the connection. In this way, the first connecting rod 3A can be lowered independently.

[0101] The following takes the example where the first fixing member is the first transmission gear set 43A and the second fixing member is the second transmission gear set 43B to further illustrate the specific structure and working principle of the valve body structure of the present application.

[0102] In this embodiment, the first driving source 1A is driven and connected to the first transmission member 2A, and the third slider is driven and cooperated with the first transmission member 2A; the first connecting rod 3A is arranged along the extension direction of the first straight line, and the first connecting rod 3A is connected to the first end of the valve plate 5 in the extension direction of the third straight line. The extension direction of the third straight line intersects with the extension direction of the first straight line, and the first connecting rod 3A is connected to the third slider.

[0103] In this embodiment, the second driving source 1B is driven and connected to the second transmission member 2B; the fourth slider is driven and cooperated with the second transmission member 2B; the second connecting rod 3B is arranged along the extension direction of the first straight line, and the second connecting rod 3B is connected to the second end of the valve plate 5 in the extension direction of the third straight line, and the second connecting rod 3B is connected to the fourth slider.

[0104] It is understood that the first transmission member 2A includes a first screw rod 21A arranged along the direction in which the first straight line extends, and the third slider is threadedly connected to the first screw rod 21A to achieve driving cooperation, so that the first screw rod 21A drives the first connecting rod 3A to move by rotation. The second transmission member 2B includes a second screw rod 21B arranged along the direction in which the second straight line extends, and the fourth slider is threadedly connected to the second screw rod 21B to achieve driving cooperation, so that the second screw rod 21B drives the second connecting rod 3B to move by rotation, thereby driving the two ends of the valve plate 5 to move along the direction in which the first straight line extends, wherein the direction in which the first straight line extends is the same as the direction in which the second straight line extends.

[0105] As shown in Figure 2, the first transmission gear set 43A is fixedly connected to the first transmission member 2A. It should be noted that the first transmission gear set 43A includes a first internal gear 431A and a first external gear 432A. The fixed connection between the first transmission gear set 43A and the first transmission member 2A means that the first internal gear 431A of the first transmission gear set 43A is fixedly connected to the first transmission member 2A, while the first external gear 432A is in a one-way transmission connection with the first transmission member 2A via the first internal gear 431A.

[0106] The second transmission gear set 43B is fixedly connected to the second transmission member 2B. It should also be noted here that the second transmission gear set 43B includes: a second internal gear 431B and a second external gear 432B, and the second transmission gear set 43B is fixedly connected to the second transmission member 2B means: the second internal gear 431B is fixedly connected to the second transmission member 2B, and the second external gear 432B is connected to the second transmission member 2B in one-way transmission through the second internal gear 431B.

[0107] The first movable member 42A is in transmission connection with the second external gear 432B, and the first movable member 42A is configured to be in transmission connection with or disengaged from the first external gear 432A by movement. The second movable member 42B is in transmission connection with the first external gear 432A, and the second movable member 42B is configured to be in transmission connection with or disengaged from the second external gear 432B by movement.

[0108] When the first transmission member 2A rotates in the first rotational direction, the first transmission member 2A, the first internal gear 431A, the first external gear 432A, the second moving member 42B, the second external gear 432B, and the second transmission member 2B are sequentially connected in transmission mode, so that the first transmission member 2A drives the second transmission member 2B to rotate in the same direction. That is, when the synchronous switching assembly 4 is in the first state, the first drive source 1A outputs rotational power in the first rotational direction to drive the first transmission member 2A to rotate in the first rotational direction. When the first transmission member 2A rotates in the first rotational direction, the first transmission member 2A, the first internal gear 431A, the first external gear 432A, the second moving member 42B, the second external gear 432B, and the second transmission member 2B are sequentially connected in transmission mode. As a result, the first transmission member 2A drives the second transmission member 2B to rotate in the same direction, thereby causing the first connecting rod 3A and the second connecting rod 3B to move linearly simultaneously.

[0109] When the first transmission member 2A rotates in a second rotational direction opposite to the first rotational direction, the first transmission member 2A is disengaged from the first external gear 432A. That is, when the synchronous switching assembly 4 is in the fourth state, the first drive source 1A outputs rotational power in the second rotational direction, causing the first transmission member 2A to rotate in the second rotational direction. At this point, the first transmission member 2A is disengaged from the first external gear 432A. Consequently, the first transmission member 2A rotates independently in the second rotational direction, while the second transmission member 2B does not rotate therewith, thereby driving the first connecting rod 3A to move independently along the first straight line.

[0110] The valve body structure provided by the present application can switch the state of the rotation direction of the first transmission member 2A by setting the first transmission gear group 43A and the second transmission gear group 43B, so that when the first transmission member 2A rotates along the first rotation direction, the second transmission member 2B can be driven to rotate together along the first rotation direction, and can rotate independently when the first transmission member 2A rotates along the second rotation direction. While moving both ends of the valve plate together, it is also possible to achieve independent movement of a single end of the valve plate to level the two ends of the valve plate. Compared with the existing maintenance scheme for manually leveling the valve body structure, the valve body structure provided by the present application does not require the operator to disassemble and repair the valve body structure, which can greatly reduce the workload of the operator, shorten the maintenance time, and reduce the errors that may occur during the manual leveling process.

[0111] When the second transmission member 2B rotates in the second rotational direction, the second transmission member 2B, the second internal gear 431B, the second external gear 432B, the first moving member 42A, the first external gear 432A, and the first transmission member 2A are sequentially connected in transmission mode, so that the second transmission member 2B drives the first transmission member 2A to rotate in the same direction. That is, when the synchronous switching assembly 4 is in the third state, the second drive source 1B outputs rotational power in the second rotational direction to drive the second transmission member 2B to rotate in the second rotational direction. When the second transmission member 2B rotates in the second rotational direction, the second transmission member 2B, the second internal gear 431B, the second external gear 432B, the first moving member 42A, the first external gear 432A, and the first transmission member 2A are sequentially connected in transmission mode, so that the second transmission member 2B drives the first transmission member 2A to rotate in the same direction, thereby causing the first connecting rod 3A and the second connecting rod 3B to move linearly simultaneously.

[0112] When the second transmission member 2B rotates in the first rotational direction, the second transmission member 2B is disengaged from the second external gear 432B. That is, when the synchronous switching assembly 4 is in the second state, the second drive source 1B outputs rotational power in the first rotational direction to drive the second transmission member 2B to rotate in the first rotational direction. When the second transmission member 2B rotates in the first rotational direction, the second transmission member 2B is disengaged from the second external gear 432B. Consequently, the second transmission member 2B rotates independently in the first rotational direction without the first transmission member 2A rotating therewith, thereby independently driving the second connecting rod 3B to move along the second straight line.

[0113] The valve body structure provided by the present application, by providing a first transmission gear set 43A and a second transmission gear set 43B, can not only achieve the simultaneous rise or fall of both ends of the valve plate, but also achieve the independent movement of a single end of the driven valve plate. For example, in the process of driving the valve plate to rise and fall, when the valve plate tilts, the two ends of the valve plate can be leveled by driving one of the two ends of the valve plate to rise or fall. Compared with the existing maintenance scheme for manually leveling the valve body structure, the valve body structure provided by the present application does not require the operator to disassemble and repair the valve body structure, which can greatly reduce the workload of the operator, shorten the maintenance time, and reduce the errors that may occur during the manual leveling process.

[0114] As shown in Figure 5, the first internal gear 431A is fixedly connected to the first transmission member 2A. The first internal gear 431A is disposed within the first external gear 432A and is in unidirectional transmission connection with the first external gear 432A, enabling the first internal gear 431A to drive the first external gear 432A to rotate in a first direction or in a second direction. The first internal gear 431A is circumferentially movably coupled to a plurality of ratchet teeth. Each ratchet tooth has a retaining position protruding from the outer circumference of the first internal gear 431A and a retracted position where it at least partially retracts into the interior of the first internal gear 431A. Internal teeth are provided on the inner circumferential wall of the first external gear 432A. In other words, a first through-hole is defined at the central axis of the first external gear 432A and is sleeved onto the outer circumference of the first internal gear 431A. The inner circumferential surface of the first through-hole forms a toothed surface that can unidirectionally mesh with the ratchet teeth of the first internal gear 431A, thereby forming the internal teeth of the first external gear 432A.

[0115] When the first transmission member 2A rotates relative to the first external gear 432A along the first rotation direction, all ratchets are in the limit position and engage with the internal teeth; when the first transmission member 2A rotates relative to the first external gear 432A along the second rotation direction, all ratchets are in the avoidance position, and the first transmission member 2A and the first external gear 432A slide relative to each other to release the engagement, thereby disengaging the first transmission member 2A and the first external gear 432A from the transmission connection.

[0116] As also shown in Figure 5, the second internal gear 431B is fixedly connected to the second transmission member 2B. The second internal gear 431B is disposed within the interior of the second external gear 432B and is in unidirectional transmission connection with the second external gear 432B, enabling the second internal gear 431B to drive the second external gear 432B to rotate in the second rotational direction or in the first rotational direction. The second internal gear 431B is circumferentially movably coupled to a plurality of ratchet teeth. Each ratchet tooth has a retaining position protruding from the outer circumferential wall of the second internal gear 431B and a retracted position in which it is at least partially retracted into the interior of the second internal gear 431B. Internal teeth are provided on the inner circumferential wall of the second external gear 432B. In other words, a second through-hole is defined at the central axis of the second external gear 432B and is sleeved onto the outer circumference of the second internal gear 431B. The inner circumferential surface of the second through-hole forms a toothed surface that can unidirectionally mesh with the ratchet teeth of the second internal gear 431B, thereby forming the internal teeth of the second external gear 432B.

[0117] When the second transmission member 2B rotates relative to the second external gear 432B along the second rotation direction, all the ratchets are in the limit position and mesh with the internal teeth; when the second transmission member 2B rotates relative to the second external gear 432B along the first rotation direction, all the ratchets are in the avoidance position, and the second transmission member 2B and the second external gear 432B slide relative to each other to release the meshing, thereby disengaging the second transmission member 2B and the second external gear 432B from the transmission connection.

[0118] In some embodiments, the first screw rod 21A of the first transmission member 2A is arranged along the extension direction of the first straight line; the first moving member 42A is arranged on the first screw rod 21A and is rotatable relative to the first screw rod 21A; the first moving member 42A approaches or moves away from the first external gear 432A in the extension direction of the first straight line by rotating relative to the first screw rod 21A, so that the first moving member 42A is transmission-connected and transmission-disconnected with the first external gear 432A.

[0119] The first moving member 42A includes a first sliding gear 421A and a first slider 422A. The first sliding gear 421A is sleeved on the first screw rod 21A and has a clearance fit with the first screw rod 21A. The first sliding gear 421A is in transmission connection with the second external gear 432B. The first slider 422A is sleeved on the first screw rod 21A and has a threaded fit with the first transmission member 2A. The first sliding gear 421A is connected to the first slider 422A.

[0120] When the first screw rod 21A rotates relative to the first sliding gear 421A in the first rotation direction, the first slider 422A approaches the first outer gear 432A; when the first transmission member 2A rotates relative to the first sliding gear 421A in the second rotation direction, the first slider 422A moves away from the first outer gear 432A.

[0121] The second screw rod 21B of the second transmission member 2B is arranged along the extension direction of the first straight line; the second moving member 42B is arranged on the second screw rod 21B and is rotatable relative to the second screw rod 21B; the second moving member 42B approaches or moves away from the second external gear 432B in the extension direction of the first straight line by rotating relative to the second screw rod 21B, so that the second moving member 42B is transmission-connected and disengaged from the second external gear 432B.

[0122] The second moving member 42B includes a second sliding gear 421B, which is sleeved on the second screw rod 21B and has a clearance fit with the second screw rod 21B, and is in transmission connection with the first external gear 432A; and a second sliding block 422B, which is sleeved on the second screw rod 21B and has a threaded fit with the second screw rod 21B, and is connected to the second sliding gear 421B and the second sliding block 422B.

[0123] When the second screw rod 21B rotates relative to the second sliding gear 421B along the second rotation direction, the second slider 422B approaches the second external gear 432B; when the second screw rod 21B rotates relative to the second sliding gear 421B along the first rotation direction, the second slider 422B moves away from the second external gear 432B.

[0124] The first sliding gear 421A has a first matching portion on the side facing the first external gear 432A, and the first external gear 432A has a second matching portion matching the first matching portion; when the first moving member 42A and the first external gear 432A approach, the first matching portion and the second matching portion approach each other, so that the first sliding gear 421A and the first external gear 432A are transmission-connected; when the first sliding gear 421A and the first external gear 432A move away from each other, the first matching portion and the second matching portion separate from each other.

[0125] In this embodiment, the first and second mating portions are configured to be in driving connection when the first sliding gear 421A rotates relative to the first external gear 432A in the second rotational direction, and to disengage from the restricted engagement when the first sliding gear 421A rotates relative to the first external gear 432A in the first rotational direction. Exemplarily, the first and second mating portions comprise a mutually mating helical tooth structure. The helical tooth structure includes a plurality of helical teeth, each of which has an inclined surface and a vertical surface, wherein the inclined surface increases in height in the second rotational direction, and the highest point of the inclined surface is connected to the vertical surface. In this way, when the first sliding gear 421A of the first movable member 42A rotates along the second rotation direction, the two relative vertical surfaces can offset each other so that the two helical tooth structures engage with each other, thereby driving the first external gear 432A of the first fixed member and the first sliding gear 421A to be connected; and when the first sliding gear 421A rotates along the first rotation direction, the two relative inclined surfaces do not interfere with each other, so that the two helical tooth structures do not engage with each other, thereby disconnecting the first external gear 432A of the first fixed member and the first sliding gear 421A of the first movable member 42A.

[0126] The second sliding gear 421B has a third matching portion on the side facing the second external gear 432B, and the second external gear 432B has a fourth matching portion matching the third matching portion; when the second moving member 42B and the second external gear 432B approach each other, the third matching portion and the fourth matching portion approach each other, so that the second sliding gear 421B and the second external gear 432B are transmission-connected; when the second sliding gear 421B and the second external gear 432B move away from each other, the third matching portion and the fourth matching portion separate from each other.

[0127] In the present embodiment, the third matching portion and the fourth matching portion are configured to: when the second sliding gear 421B rotates along the first rotation direction relative to the second external gear 432B, the second sliding gear 421B disengages from the limit match when the second sliding gear 421B rotates along the second rotation direction relative to the second external gear 432B. Exemplary, the third matching portion and the fourth matching portion are mutually coordinated helical tooth structures, wherein the inclined surface is increasingly higher in the first rotation direction, and the highest of the inclined surface is connected at the vertical plane. Like this, when the second sliding gear 421B of the second mobile member 42B rotates along the first rotation direction, two relative vertical planes can offset each other, so that the two helical tooth structures are engaged, thereby the second external gear 432B of the second fixed member and the second sliding gear 421B of the second mobile member 42B are driven to be connected; and when the second sliding gear 421B of the second mobile member 42B rotates along the second rotation direction, the two relative inclined surfaces do not interfere with each other, so that the two helical tooth structures can not be engaged, thereby the second external gear 432B of the second fixed member and the second sliding gear 421B of the second mobile member 42B are disconnected.

[0128] As shown in Figure 6, the valve body structure further includes a first transmission belt 41A and a second transmission belt 41B. The first transmission belt 41A is transmission-connected between the second outer gear 432B and the first sliding gear 421A of the first movable member 42A, and the first transmission belt 41A is in a one-way transmission connection with the second outer gear 432B and / or the first movable member 42A.

[0129] As shown in Figure 6, when the first transmission belt 41A is connected to the second external gear 432B in a one-way transmission manner, the second external gear 432B drives the first transmission belt 41A to rotate along the second rotational direction, or the first transmission belt 41A drives the second external gear 432B to rotate along the first rotational direction. When the first transmission belt 41A is connected to the first sliding gear 421A of the first moving member 42A in a one-way transmission manner, the first sliding gear 421A of the first moving member 42A drives the first transmission belt 41A to rotate along the first rotational direction, or the first transmission belt 41A drives the first sliding gear 421A of the first moving member 42A to rotate along the second rotational direction.

[0130] As shown in FIG6 , the second transmission belt 41B is connected between the first outer gear 432A and the second sliding gear 421B of the second moving member 42B, and the second transmission belt 41B is connected to the first outer gear 432A and / or the second sliding gear 421B of the second moving member 42B in a one-way manner.

[0131] When the second transmission belt 41B is connected to the first external gear 432A in a one-way transmission manner, the first external gear 432A drives the second transmission belt 41B to rotate in the first rotational direction, or the second transmission belt 41B drives the first external gear 432A to rotate in the second rotational direction. When the second transmission belt 41B is connected to the second sliding gear 421B of the second moving member 42B in a one-way transmission manner, the second sliding gear 421B of the second moving member 42B drives the second transmission belt 41B to rotate in the second rotational direction, or the second transmission belt 41B drives the second sliding gear 421B of the second moving member 42B to rotate in the first rotational direction.

[0132] In some embodiments, the valve body structure further includes a controller and two stroke detection devices. The two stroke detection devices are respectively configured to detect the strokes of the first connecting rod 3A and the second connecting rod 3B in real time and transmit the detection results to the controller. Specifically, as shown in FIG1 , the two stroke detection devices include, for example, a first stroke detection device 6A corresponding to the first connecting rod 3A and a second stroke detection device 6B corresponding to the second connecting rod 3B.

[0133] The controller calculates the stroke difference between the two connecting rods and determines whether it reaches a preset threshold. If so, it controls the first drive source 1A or the second drive source 1B to switch its rotational direction, thereby switching the synchronous switching assembly 4 to the second or fourth state. This allows for timely detection of any tilting of the valve plate 5 and prompt control of the upward or downward movement of one end of the drive plate 5, thereby achieving automatic leveling of the valve plate 5.

[0134] Furthermore, the controller is also used to calculate the stroke compensation amount based on the stroke difference when the synchronous switching component 4 is in the second state or the fourth state, and control the second drive source 1B or the first drive source 1A to output a preset stroke compensation amount to reduce the stroke difference to 0, thereby leveling the valve plate 5.

[0135] Alternatively, the controller can also be used to continuously determine whether the stroke difference has dropped to 0 when the synchronous switching component 4 is in the second state or the fourth state; if so, it indicates that the valve plate 5 has been leveled, and at this time the first drive source 1A and the second drive source 1B can be controlled to stop outputting rotational power.

[0136] Based on the above controller, this embodiment further provides a specific control process of the valve body structure. In which, the first rotation direction is, for example, clockwise, and the second rotation direction is, for example, counterclockwise. The first screw rod 21A and the second screw rod 21B extend in a vertical direction.

[0137] The control method includes:

[0138] S1: Obtain the lifting requirement of the valve plate. If the valve plate needs to be raised, proceed to the following step S2; if the valve plate needs to be lowered, proceed to the following step S3.

[0139] Step S2 includes:

[0140] S21: Control the first driving source 1A to rotate clockwise, so that the synchronous switching component switches to the first state, thereby driving the first screw rod 21A and the second screw rod 21B to rotate synchronously clockwise, thereby driving the first connecting rod 3A and the second connecting rod 3B to rise synchronously;

[0141] S22: Continuously detecting the strokes of the first connecting rod 3A and the second connecting rod 3B respectively, and calculating the stroke difference between the two connecting rods;

[0142] S23: Determine whether the stroke reaches a preset threshold; if so, it indicates that the second connecting rod 3B lags behind the first connecting rod 3A, and proceed to the following step S24; if not, return to the above step S22 to continue determining the stroke difference;

[0143] S24: Control the second driving source 1B to rotate clockwise to switch the synchronous switching assembly to the second state, thereby driving the second screw rod 21B to rotate clockwise alone, thereby driving the second connecting rod 3B to rise alone; at the same time, continuously detect the strokes of the first connecting rod 3A and the second connecting rod 3B respectively, and calculate the stroke difference between the two connecting rods. When the stroke difference drops to 0, indicating that the valve plate has been leveled, the second driving source 1B is controlled to stop rotating;

[0144] S25: Determine whether the valve plate has reached the target position. If not, return to the above step S21 to drive the first connecting rod 3A and the second connecting rod 3B to continue to rise synchronously; if so, the process of controlling the valve plate to rise is completed.

[0145] Step S3 includes:

[0146] S31: Control the second driving source 1B to rotate counterclockwise, so that the synchronous switching component switches to the third state, thereby driving the first screw rod 21A and the second screw rod 21B to rotate counterclockwise synchronously, thereby driving the first connecting rod 3A and the second connecting rod 3B to descend synchronously;

[0147] S32: Continuously detecting the strokes of the first connecting rod 3A and the second connecting rod 3B respectively, and calculating the stroke difference between the two connecting rods;

[0148] S33: Determine whether the stroke reaches a preset threshold; if so, it indicates that the first connecting rod 3A lags behind the second connecting rod 3B, and proceed to the following step S34; if not, return to the above step S32 to continue determining the stroke difference;

[0149] S34: Control the first drive source 1A to rotate counterclockwise to switch the synchronous switching assembly to the fourth state, thereby driving the first screw rod 21A to rotate counterclockwise alone, thereby driving the first connecting rod 3A to descend alone; at the same time, continuously detect the strokes of the first connecting rod 3A and the second connecting rod 3B, and calculate the stroke difference between the two connecting rods. When the stroke difference drops to 0, indicating that the valve plate has been leveled, the first drive source 1A is controlled to stop rotating;

[0150] S35: Determine whether the valve plate has reached the target position. If not, return to the above step S31 to drive the first connecting rod 3A and the second connecting rod 3B to continue to descend synchronously; if so, the process of controlling the valve plate to descend is completed.

[0151] It should be noted that the “target position” of the valve plate in the above steps S25 and S35 determines the opening of the valve body structure, and therefore depends on the gas flow value required by the actual process.

[0152] In some embodiments, the surfaces of both the first connecting rod 3A and the second connecting rod 3B have multiple non-recognition areas and multiple recognition areas, which are alternately arranged and evenly distributed along the lifting direction. The two travel detection devices include photoelectric sensors, which are respectively fixed to the circumference of the first connecting rod 3A and the second connecting rod 3B, with their detection ends facing the surfaces of the first connecting rod 3A and the second connecting rod 3B. The photoelectric sensors are used to detect the recognition areas and record the number of detected recognition areas to indicate the corresponding link's lifting or lowering travel.

[0153] As another technical solution, as shown in FIG12 , this embodiment further provides a semiconductor process apparatus, comprising a process chamber 02 and the aforementioned valve structure 01. Specifically, valve structure 01 is installed at the air inlet of process chamber 02 to control the air flow into process chamber 02. The process chamber is, for example, an etching chamber, and the air inlet is located at the bottom of the process chamber.

[0154] The semiconductor process equipment further includes a molecular pump 03 for driving an air flow, which is disposed on the air inlet side of the valve body structure 01 and communicated with the valve body structure 01 .

[0155] In some embodiments, the controller may also calculate the movement direction and travel distance of the valve plate according to the process chamber pressure and the desired pressure before driving the valve plate to move, and control the first driving source and the second driving source according to the calculation results.

[0156] As described above, the valve body structure and semiconductor process equipment provided in this embodiment can realize the synchronous rising and falling of both ends of the valve plate and the independent lifting and lowering of a single end of the valve plate by controlling the two driving sources to output rotational power in different rotation directions asynchronously, thereby eliminating the need for operators to disassemble and repair the valve body structure, greatly reducing the workload of operators, shortening the maintenance time, and reducing possible errors that may occur during manual leveling.

[0157] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present application, and the present application is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present application, and such modifications and improvements are also considered to be within the scope of protection of the present application.

Claims

1. A valve body structure, comprising: The valve plate, the first transmission member and the second transmission member are respectively connected to the valve plate in a transmission manner to drive the valve plate to move along the extension direction of the first straight line, wherein the valve body structure further comprises: a first transmission gear set, comprising a first internal gear and a first external gear, wherein the first external gear is in one-way transmission connection with the first transmission member via the first internal gear; a second transmission gear set, comprising a second internal gear and a second external gear, wherein the second external gear is in one-way transmission connection with the second transmission member via the second internal gear; a first moving member, which is in transmission connection with the second external gear, and the first moving member is configured to be in transmission connection with or out of transmission connection with the first external gear by moving; a second moving member, which is in transmission connection with the first external gear, and the second moving member is configured to be in transmission connection with or out of transmission connection with the second external gear by moving; When the first transmission member rotates along the first rotation direction, the first transmission member, the first internal gear, the first external gear, the second moving member, the second external gear, and the second transmission member are sequentially connected in transmission, so that the first transmission member drives the second transmission member to rotate in the same direction; When the first transmission member rotates in a second rotation direction opposite to the first rotation direction, the first transmission member is disconnected from the first external gear.

2. The valve body structure according to claim 1, characterized in that: When the second transmission member rotates along the second rotation direction, the second transmission member, the second internal gear, the second external gear, the first moving member, the first external gear, and the first transmission member are sequentially connected in transmission, so that the second transmission member drives the first transmission member to rotate in the same direction; When the second transmission member rotates along the first rotation direction, the second transmission member is disconnected from the second external gear.

3. The valve body structure according to claim 2, characterized in that: The first internal gear is fixedly connected to the first transmission member, and the first internal gear is disposed inside the first external gear and is in one-way transmission connection with the first external gear, so that the first internal gear drives the first external gear to rotate in the first rotation direction or the first external gear drives the first internal gear to rotate in the second rotation direction; and / or The second internal gear is fixedly connected to the second transmission member. The second internal gear is arranged inside the second external gear and is unidirectionally connected to the second external gear, so that the second internal gear drives the second external gear to rotate along the second rotation direction or the second external gear drives the second internal gear to rotate along the first rotation direction.

4. The valve body structure according to claim 3, characterized in that: The first internal gear is circumferentially movably connected to a plurality of ratchet teeth, each of the ratchet teeth having a limit position protruding from the outer peripheral wall of the first internal gear and a avoidance position at least partially retracted into the interior of the first internal gear, and the inner peripheral wall of the first external gear is provided with internal teeth; When the first transmission member rotates relative to the first external gear along the first rotation direction, all the ratchet teeth are in a limited position and mesh with the internal teeth; When the first transmission member rotates relative to the first external gear along the second rotation direction, all the ratchet teeth are in the avoidance position, so that the first transmission member and the first external gear are disconnected from each other; and / or The second internal gear is circumferentially movably connected to a plurality of ratchet teeth, each of the ratchet teeth having a limit position protruding from the outer peripheral wall of the second internal gear and a avoidance position at least partially retracted into the interior of the second internal gear, and the inner peripheral wall of the second external gear is provided with internal teeth; When the second transmission member rotates relative to the second external gear along the second rotation direction, all the ratchet teeth are in a limited position and mesh with the internal teeth; When the second transmission member rotates relative to the second external gear along the first rotation direction, all the ratchets are in the avoidance position, so that the second transmission member is disconnected from the second external gear.

5. The valve body structure according to claim 3, characterized in that: The first transmission member is arranged along the extending direction of the first straight line; The first moving member is disposed on the first transmission member and is rotatable relative to the first transmission member; The first moving member rotates relative to the first transmission member to move closer to or farther from the first external gear in the extending direction of the first straight line, so that the first moving member is in transmission connection with or out of transmission connection with the first external gear; and / or The second transmission member is arranged along the extension direction of the first straight line; The second moving member is disposed on the second transmission member and is rotatable relative to the second transmission member; The second moving member rotates relative to the second transmission member to move closer to or farther from the second external gear in the extending direction of the first straight line, so that the second moving member is in transmission connection with or out of transmission connection with the second external gear.

6. The valve body structure according to claim 5, characterized in that: The first moving member comprises: a first sliding gear, sleeved on the first transmission member and loosely fitted with the first transmission member, the first sliding gear being in transmission connection with the second external gear; a first slider, sleeved on the first transmission member and threadably engaged with the first transmission member, and the first sliding gear is connected to the first slider; When the first transmission member rotates relative to the first sliding gear along the first rotation direction, the first sliding block approaches the first external gear; When the first transmission member rotates relative to the first sliding gear along the second rotation direction, the first sliding block moves away from the first external gear; and / or The second moving member comprises: a second sliding gear, sleeved on the second transmission member and loosely fitted with the second transmission member, the second sliding gear being in transmission connection with the first external gear; a second slider, sleeved on the second transmission member and threadedly engaged with the second transmission member, and the second sliding gear is connected to the second slider; When the second transmission member rotates relative to the second sliding gear along the second rotation direction, the second sliding block approaches the second external gear; When the second transmission member rotates relative to the second sliding gear along the first rotation direction, the second sliding block moves away from the second external gear.

7. The valve body structure according to claim 6, characterized in that: The first sliding gear has a first matching portion on a side facing the first external gear, and the first external gear has a second matching portion matching the first matching portion; When the first moving member approaches the first external gear, the first matching portion and the second matching portion approach each other, so that the first sliding gear is in transmission connection with the first external gear; When the first sliding gear and the first external gear are separated from each other, the first matching portion and the second matching portion are separated from each other; and / or The second sliding gear has a third matching portion on a side facing the second external gear, and the second external gear has a fourth matching portion matching the third matching portion; When the second moving member approaches the second external gear, the third matching portion and the fourth matching portion approach each other, so that the second sliding gear is in transmission connection with the second external gear; When the second sliding gear and the second external gear move away from each other, the third matching portion and the fourth matching portion are separated from each other.

8. The valve body structure according to claim 7, characterized in that: The first mating portion and the second mating portion are configured to be in transmission connection when the first sliding gear rotates relative to the first external gear along the second rotation direction, and to be disengaged from the limiting mating when the first sliding gear rotates relative to the first external gear along the first rotation direction; and / or The third matching portion and the fourth matching portion are configured to be transmission-connected when the second sliding gear rotates relative to the second external gear along the first rotation direction, and to be disengaged from the limiting matching when the second sliding gear rotates relative to the second external gear along the second rotation direction.

9. The valve body structure according to claim 1, characterized in that: The valve body structure further includes: a second transmission belt, which is in transmission connection between the first external gear and the second movable member, and the second transmission belt is in one-way transmission connection with the first external gear and / or the second movable member; When the second transmission belt is in one-way transmission connection with the first external gear, the first external gear drives the second transmission belt to rotate along the first rotation direction, or the second transmission belt drives the first external gear to rotate along the second rotation direction; When the second transmission belt is connected to the second moving member in a one-way transmission manner, the second moving member drives the second transmission belt to rotate along the second rotation direction or the second transmission belt drives the second moving member to rotate along the first rotation direction.

10. The valve body structure according to claim 1, characterized in that: The valve body structure further includes: a first transmission belt, which is in transmission connection between the second external gear and the first moving member, and the first transmission belt is in one-way transmission connection with the second external gear and / or the first moving member; When the first transmission belt is in one-way transmission connection with the second external gear, the second external gear drives the first transmission belt to rotate along the second rotation direction, or the first transmission belt drives the second external gear to rotate along the first rotation direction; When the first transmission belt is connected to the first moving member in a one-way transmission manner, the first moving member drives the first transmission belt to rotate along the first rotation direction or the first transmission belt drives the first moving member to rotate along the second rotation direction.

11. The valve body structure according to claim 1, characterized in that: The valve body structure further includes: a first driving source, drivingly connected to the first transmission member; a third slider, drivingly engaged with the first transmission member; a first connecting rod, arranged along an extending direction of the first straight line, connected to a first end of the valve plate in an extending direction of a third straight line, the extending direction of the third straight line intersecting with the extending direction of the first straight line, and connected to the third slider; a second driving source, drivingly connected to the second transmission member; a fourth slider, drivingly engaged with the second transmission member; The second connecting rod is provided along the extending direction of the first straight line, the second connecting rod is connected to the second end of the valve plate in the extending direction of the third straight line, and the second connecting rod is connected to the fourth slider.

12. The valve body structure according to claim 11, characterized in that: The valve body structure further includes: A detection device, used for respectively detecting the strokes of the first connecting rod and the second connecting rod in real time; A controller is communicatively connected to the detection device, the first drive source, and the second drive source, respectively. The controller is used to control the rotation direction of the first drive source and the second drive source according to the stroke of the first connecting rod and the second connecting rod detected by the detection device, so that the stroke error of the two first connecting rods and the second connecting rod is within a preset range.

13. The valve body structure according to claim 12, characterized in that: The surfaces of the first link and the second link have a plurality of non-recognition areas and a plurality of recognition areas; The plurality of non-identification areas and the plurality of identification areas are alternately arranged and evenly distributed along the lifting direction; The detection device includes a photoelectric sensor, which is used to detect the recognition areas and record the number of the detected recognition areas.

14. A valve body structure, applied to semiconductor process equipment, characterized in that: include: A valve plate, a connecting assembly, a driving assembly, a transmission assembly and a synchronous switching assembly; wherein the connecting assembly includes a first connecting rod and a second connecting rod both connected to the valve plate; The driving assembly is used to drive the transmission assembly to rotate, and includes a first driving source and a second driving source, both of which can output two rotating forces with opposite rotation directions; The transmission assembly includes a first transmission member and a second transmission member, the first transmission member being connected to the first drive source and the first connecting rod respectively, for converting the rotational power output by the first drive source into linear power and transmitting the power to the first connecting rod; the second transmission member being connected to the second drive source and the second connecting rod respectively, for converting the rotational power provided by the second drive source into linear power and transmitting the power to the second connecting rod; The synchronous switching assembly is connected to the first transmission member and the second transmission member respectively; The synchronous switching assembly is used to switch to a first state when the first driving source outputs a rotational power in a first rotational direction, and drive the first transmission member and the second transmission member to rotate synchronously along the first rotational direction; and further configured to switch to a second state when the second driving source outputs the rotational power in the first rotational direction, and drive the second transmission member to rotate along the first rotational direction; and further configured to switch to a third state when the second driving source outputs a rotational power in a second rotational direction opposite to the first rotational direction, and drive the first transmission member and the second transmission member to rotate synchronously along the second rotational direction; It is also used to switch to the fourth state when the first driving source outputs the rotational power of the second rotation direction, and drive the first transmission member to rotate along the second rotation direction.

15. The valve body structure according to claim 14, characterized in that: The synchronous switching assembly includes a first transmission belt, a second transmission belt, a first moving member, a second moving member, a first fixed member and a second fixed member; wherein, The first fixed member is fixedly connected to the first transmission member, and the second fixed member is fixedly connected to the second transmission member; the first movable member is cooperatively connected to the first transmission member and can rotate therewith and move along a first straight line; the second movable member is cooperatively connected to the second transmission member and can rotate therewith and move along a second straight line; the first straight line is parallel to the second straight line; The first transmission belt is used to connect the first movable member and the second fixed member, and the second transmission belt is used to connect the second movable member and the first fixed member to transmit rotational power; In the first state, the first fixing member is used to drive the second movable member to rotate along the first rotation direction, and the second movable member is connected and fixed to the second fixing member to drive the second fixing member to rotate synchronously along the first rotation direction; In the second state, the second moving member moves along the second straight line to be disconnected from the second fixed member; the transmission between the second fixed member and the first moving member is released; In the third state, the second fixing member is used to drive the first movable member to rotate along the second rotation direction, and the first movable member is connected and fixed to the first fixing member to drive the first fixing member to rotate synchronously along the second rotation direction; In the fourth state, the first moving member moves along the first straight line to be disconnected from the first fixed member; and the transmission between the first fixed member and the second moving member is released.

16. The valve body structure according to claim 15, characterized in that: The first transmission member includes a first screw rod; the second transmission member includes a second screw rod; the first screw rod extends along the first straight line; the second screw rod extends along the second straight line; The first moving member is sleeved on the outer circumference of the first screw rod and is threadedly engaged, and the thread structure is configured so that when the first moving member rotates along the second rotation direction, the first moving member moves in the first direction; The second moving member is sleeved on the outer circumference of the second screw rod and is threadedly engaged, and the thread structure is configured so that when the second moving member rotates along the first rotation direction, the second moving member moves in a second direction; the second direction is opposite to the first direction; and the first direction and the second direction are both parallel to the first straight line; The first fixing member is located on a side of the first moving member facing the first direction; the second fixing member is located on a side of the second moving member facing the second direction.

17. The valve body structure according to claim 16, characterized in that: A first one-way connection mechanism is formed on the surface of the first movable member opposite to the first fixed member; the first one-way connection mechanism is configured to connect the first movable member and the first fixed member when the first movable member moves along the first direction and to disconnect the first movable member when the first movable member moves in the second direction; A second one-way connection mechanism is formed on the surface opposite to the second fixed member of the second movable member; the second one-way connection mechanism is configured to connect the two when the second movable member moves along the second direction to the second fixed member, and to disconnect when the second movable member moves toward the first direction.

18. The valve body structure according to claim 16, characterized in that: The first fixing member includes a first internal gear and a first external gear; the second fixing member includes a second internal gear and a second external gear; The first internal gear is fixedly connected to the first screw rod; the outer periphery of the first external gear is in contact with the second transmission belt; A first through hole is formed at the central axis of the first external gear and is sleeved on the outer circumference of the internal gear; an inner circumferential surface of the first through hole is a toothed surface capable of unidirectionally meshing with the first internal gear, and is configured to mesh with the first internal gear when the first internal gear rotates in the first rotational direction, and to disengage from the first internal gear when the first internal gear rotates in the second rotational direction; The second internal gear is fixedly connected to the second screw rod; the outer periphery of the second external gear abuts against the first transmission belt; A second through hole is provided at the central axis of the second external gear and is sleeved on the outer circumference of the internal gear; the inner circumferential surface of the second through hole is a toothed surface that can be unidirectionally meshed with the second internal gear, and is configured to be meshed and connected with the second internal gear when the second internal gear rotates along the second rotation direction, and to be disengaged with the second internal gear when the second internal gear rotates along the first rotation direction.

19. The valve body structure according to claim 18, characterized in that: The outer circumferences of the first external gear and the second external gear are both ratchet tooth structures; the ratchet tooth structure of the first external gear is configured to drive the second transmission belt to rotate when the first external gear rotates in the first rotation direction, and to rotate along with the second transmission belt when the second transmission belt moves in the second rotation direction; The ratchet tooth structure of the second external gear is configured to drive the first transmission belt to rotate when the second external gear rotates along the second rotation direction, and to rotate along with the first transmission belt when the first transmission belt moves along the first rotation direction.

20. A semiconductor process equipment, characterized in that: It comprises a process chamber and a valve body structure as described in any one of claims 1 to 19; the valve body structure is installed at the air inlet of the process chamber to control the air intake volume of the process chamber.

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