Furnace tube

Abstract

Disclosed in the present invention is a furnace tube, comprising an outer furnace tube, an inner furnace tube, an upper furnace cover and a lower furnace door, wherein the inner furnace tube is mounted in the outer furnace tube; both an upper end and a lower end of the inner furnace tube are open; a connecting member for hoisting connection is provided at an opening at the upper end of the inner furnace tube, and a support platform for mounting a support base is provided at an opening at the lower end of the inner furnace tube, such that the inner furnace tube can be hoisted downwards from the top of the outer furnace tube to be mounted inside the outer furnace tube, or inserted upwards from the bottom of the outer furnace tube to be mounted inside the outer furnace tube. In the present invention, the inner furnace tube is designed in a through manner, such that the inner furnace tube can be hoisted from the top and can also be inserted upwards for mounting from a bottom support, thus diversifying the mounting methods of the inner furnace tube. Moreover, carriers in the furnace tube are placed on a rotatable vessel support base, and the positions and angles of the carriers can be adjusted in the furnace, such that a gas field and a thermal field in a closed chamber are uniform, and the overall process yield is improved.

Description

A furnace tube TECHNICAL FIELD

[0001] The present application relates to the technical field of solar energy, in particular to a furnace tube. BACKGROUND

[0002] The current diffusion of the photovoltaic industry, oxidation, annealing, doping, PECVD, LPCVD and other processes produce two types of vertical furnace and horizontal furnace. The structure of these two types needs to load the silicon wafer into a specific carrier and transfer it into the reaction cavity for process. Through the specific reaction gas, the specific film coating, diffusion, oxidation and thin film deposition process of the silicon wafer are realized. In the existing two-layer furnace tube design, the bottom and top wall are used to seal the two ends of the double-layer furnace tube to form a straight-through cavity. The wafer to be processed is placed in the straight-through cavity, and the heating layer on the double-layer furnace tube is used to heat the straight-through cavity or the furnace body is set as an inner and outer furnace body, and the inner furnace cavity is in a closed form.

[0003] When installing the inner and outer furnace tubes in the prior art, due to the structural limitations of the inner furnace tube, for example, the existing patent CN116499251B has an open top and a closed bottom, and a heating element is installed. In order to avoid damaging the heating element, the inner furnace tube can only be hoisted from the top and inserted into the outer furnace tube. If the height space of the existing processing site is limited, the hoisting difficulty during the installation of the inner furnace tube is increased or the normal installation cannot be performed, which greatly increases the assembly difficulty. SUMMARY

[0004] The present application proposes a furnace tube to solve the technical problem of hoisting the inner furnace tube in the prior art.

[0005] The technical scheme adopted by the present application is:

[0006] The present application proposes a furnace tube, which comprises an outer furnace tube, an inner furnace tube and a lower furnace door.

[0007] The inner furnace tube is installed in the outer furnace tube. The upper and lower ends of the inner furnace tube are open. A connecting piece for hoisting connection is arranged at the upper end opening, and a support table is arranged at the lower end opening, so that the inner furnace tube can be hoisted downward from the top of the outer furnace tube and installed in the outer furnace tube, or inserted upward from the bottom of the outer furnace tube and installed in the outer furnace tube.

[0008] The lower furnace door is installed at the lower end of the outer furnace tube and the inner furnace tube. The upper and lower ends of the containing space between the inner furnace tube and the outer furnace tube are sealed to form a sealed chamber, and the inner furnace tube and the outer furnace tube are provided with a heating source for heating the sealed chamber.

[0009] Further, the inner wall of the upper end of the inner furnace tube is provided with a supporting flange, which is the connecting piece; the inner wall of the lower end of the inner furnace tube is provided with a ring-shaped step or a supporting flange to form the supporting platform.

[0010] In the first embodiment, the connecting piece of the upper end of the inner furnace tube is connected to a connector for hoisting.

[0011] In the second embodiment, the outer wall of the outer furnace tube is provided with a supporting flange near the upper end surface, which is used to install a top support, and the top support is connected to the connecting piece of the inner furnace tube to form a hanging seat.

[0012] Further, the rotating device is provided with a plurality of carrier placement positions corresponding to the sealed chamber, and the rotating device drives the carriers on the carrier placement positions to adjust the position and angle in the sealed chamber.

[0013] Further, the upper end of the furnace tube is provided with an upper furnace cover, and the center hole of the upper furnace cover can penetrate the upper end of the inner furnace tube or the hoisting piece connected to the upper end of the inner furnace tube; the center hole of the lower furnace door can penetrate the lower end of the inner furnace tube.

[0014] Further, the outer wall of the upper end of the outer furnace tube is provided with an outer sealing flange, and the inner wall of the inner furnace tube is provided with an inner sealing flange; the upper furnace cover covers the upper end surfaces of the outer furnace tube and the inner furnace tube, and the outer edge of the upper furnace cover is sealingly connected to the outer sealing flange, and the inner edge of the upper furnace cover is connected to the inner sealing flange.

[0015] Further, the outer end surface of the upper furnace cover away from the containing space is outwardly protruding to form a spherical protrusion.

[0016] Further, the inner part of the upper furnace cover around the center hole is provided with a cavity, and a plurality of reinforcing ribs are arranged between the upper and lower inner walls of the cavity.

[0017] Further, the lower layer plate, the outer side layer plate and the inner side layer plate of the cavity surrounded by the upper furnace cover and the outer end surface are hollow layer plates, and the hollow layer plates are used as water cooling channels or are provided with water cooling components.

[0018] Further, the supporting platform of the lower end of the inner furnace tube is connected to a ring-shaped heat insulation pad as a supporting base, the upper end surface of the ring-shaped heat insulation pad is sealingly connected to the supporting platform, and the lower end exceeds the lower end surface of the inner furnace tube.

[0019] Further, the center hole of the lower furnace door is sealingly connected with a magnetic fluid sealing assembly, and the rotating device comprises: a boat holder base provided in the sealed chamber of the furnace tube and provided with a plurality of carrier placing positions, and the boat holder base is connected with a transmission shaft of the magnetic fluid sealing assembly; and a rotating power source located outside the sealed chamber and connected with the transmission shaft to drive the boat holder base to rotate.

[0020] In the first embodiment, the boat holder base comprises:

[0021] a rotating base located at the bottom of the sealed chamber and connected with the transmission shaft;

[0022] a hanging plate vertically provided on the rotating base and provided with a plurality of carrier placing positions for hanging the carriers.

[0023] In the second embodiment, the boat holder base comprises:

[0024] a rotating base provided with a plurality of carrier placing positions for the carriers to pass through or be placed on and connected with the transmission shaft;

[0025] a plurality of pairs of bearing members, each pair of bearing members being located at two side edges of a carrier placing position and foldably provided on the rotating base;

[0026] when the bearing members are switched to the folded state, the carriers can pass through the carrier placing positions corresponding to the bearing members from the bottom; and when the bearing members are switched to the unfolded state, the carriers can be placed on the bearing members.

[0027] Further, the magnetic fluid sealing assembly is annular, the middle part is also provided with a corresponding center hole, and is divided into an inner ring part, an outer ring part and a transmission shaft annularly located between the inner ring part and the outer ring part; the inner ring part is sealingly connected with the support base at the bottom of the inner furnace tube, the outer ring part is sealingly connected with the inner edge of the lower furnace door, and the inner ring part and the outer ring part are rotationally sealed with the transmission shaft.

[0028] Further, the outer edge of the lower furnace door is sealingly connected with the step at the bottom of the outer furnace tube, and the inner edge is sealingly connected with the magnetic fluid assembly.

[0029] Preferably, the outer wall surface of one end of the transmission shaft located outside the furnace tube is provided with a ring of gears or a belt pulley.

[0030] Further, the lower furnace door is provided with a plurality of furnace openings penetrating the lower furnace door, the size and shape of the furnace openings are matched with the size and shape of the side surface of the carriers, each of the furnace openings is provided with a furnace cover in correspondence, and the furnace cover is connected with a driving structure for driving the furnace cover to open or close relative to the furnace opening.

[0031] Further, the furnace cover and / or the lower furnace door is a downward convex spherical convex structure.

[0032] Further, the inner side of the inner furnace tube is provided with an inner heating source, the outer side of the outer furnace tube is provided with an outer heating source, the inner heating source is divided into multiple groups of independent heating sections, and the outer heating source is provided with a heat dissipation device corresponding to the periphery of the inner heating source.

[0033] Compared with the prior art, the present application has the following advantages:

[0034] 1. The inner furnace tube adopts a through design, which can be hoisted from the top or supported from the bottom and inserted upward for installation, so that the installation mode of the inner furnace tube is diversified.

[0035] 2. The carrier is placed on a rotatable boat support base, and when the reaction gas is introduced into the sealed chamber or the temperature difference is different, the carrier adjusts the position and angle in the furnace to make the gas field and heat field inside the sealed chamber uniform, thereby improving the overall process yield.

[0036] 3. The lower furnace door and the upper furnace cover are designed as outwardly convex drum surfaces, which have better pressure bearing capacity and are not easy to deform.

[0037] 4. The bottom is sealed by a magnetic fluid assembly, which can be external to the drive components of the boat support base, while ensuring that the sealed chamber through which the reaction gas passes remains sealed.

[0038] 5. The lower furnace door is provided with multiple small furnace doors, which can be opened individually when loading and unloading the carrier, thereby avoiding the loss of heat in the furnace and affecting the processing efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0040] Fig. 1 is a front view of the first embodiment of the present application;

[0041] Fig. 2 is an A-A sectional view of the first embodiment of the present application;

[0042] Fig. 3 is a first perspective view of the first embodiment of the present application;

[0043] Fig. 4 is a top view of the first embodiment of the present application;

[0044] Fig. 5 is a second perspective view of the first embodiment of the present application;

[0045] Fig. 6 is a front view of the second embodiment of the present application;

[0046] Fig. 7 is a cross-sectional view of the second embodiment of the present application;

[0047] Fig. 8 is a top view of the second embodiment of the present application;

[0048] Fig. 9 is a perspective view of the first embodiment of the present application;

[0049] Fig. 10 is a perspective view of the second embodiment of the present application;

[0050] Fig. 11 is a perspective view of the lower furnace door of the present application;

[0051] Fig. 12 is a structural view of the lower furnace door and the driving structure of the present application;

[0052] Fig. 13 is a perspective view of the driving structure cooperating with the furnace cover of the present application;

[0053] Fig. 14 is a structural view of the driving structure cooperating with the furnace cover of the present application;

[0054] Fig. 15 is a structural view of the driving structure cooperating with the furnace tube of the present application;

[0055] Fig. 16 is a front view of the first embodiment of the boat support base of the present application;

[0056] Fig. 17 is a structural view of the second embodiment of the boat support base of the present application;

[0057] Fig. 18 is a perspective view of the second embodiment of the boat support base of the present application;

[0058] Fig. 19 is a front view of the heating source and the heat dissipating device cooperating with the furnace tube of the present application;

[0059] Fig. 20 is a C view of Fig. 19;

[0060] 1, furnace tube;

[0061] 11, outer furnace tube; 111, support flange; 112, outer sealing flange; 12, inner furnace tube; 121, inner sealing flange; 122, annular step; 123, annular heat insulation pad; 13, closed chamber;

[0062] 2, upper furnace cover;

[0063] 21, reinforcing rib; 22, lower layer plate; 23, inner layer plate; 24, outer layer plate;

[0064] 3, lower furnace door;

[0065] 31, furnace opening; 311, first protrusion; 312, annular cavity;

[0066] 32, furnace cover; 321, second protrusion; 322, mounting plate; 323, first guide post; 324, weight-reducing hole;

[0067] 33, driving structure; 331, rotary driving device; 332, shaft coupling; 333, rotating shaft; 334, rotating plate; 335, push-pull driving device; 336, mounting area; 337, second guide post; 338, first electrical interface; 339, second electrical interface; 340, connecting plate; 341, first partition plate; 342, second partition plate; 343, third partition plate; 344, first containing space; 345, second containing space;

[0068] 41, connector; 42, hanging seat; 81, top support; 82, bottom support;

[0069] 5, boat holder base; 50, carrier; 591, gear;

[0070] 51, rotating base; 52, fixing ring; 53, hanging plate; 54, hook hole;

[0071] 501, carrier placement position; 55, carrier; 551, carrier fixed part; 552, carrier movable part; 553, rotating shaft;

[0072] 6, magnetic fluid assembly;

[0073] 61, outer ring part; 62, inner ring part; 59, transmission shaft;

[0074] 71, external heating source; 72, internal heating source; 73, heat dissipation device; 74, water cooling interface. DETAILED DESCRIPTION

[0075] In order to make the technical problems to be solved by the present application, technical solutions and beneficial effects more clearly understood, the present application will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the present application and do not limit the present application.

[0076] The principles and structures of the present application will be described in detail below in combination with the drawings and examples.

[0077] The existing vertical furnace generally has inner and outer double-layer furnace pipes. When the inner and outer furnace pipes are installed, due to the structural limitation of the inner furnace pipe, for example, the existing patent CN116499251B has an open top and a closed bottom, and a heating element is installed at the bottom, so that the inner furnace pipe can only be hoisted at the top opening and inserted from the top of the outer furnace pipe. If the height space of the existing processing site is limited, the hoisting difficulty during the installation of the inner furnace pipe is increased or the normal installation cannot be performed, thereby increasing the assembly difficulty.

[0078] To this end, as shown in Figures 1, 2, the present application proposes a furnace tube 1, comprising an outer furnace tube 11, an inner furnace tube 12, an upper furnace cover 2, a lower furnace door 3 and a rotating device;

[0079] Both the inner and outer furnace tubes are in the shape of a circular tube, wherein the upper and lower ends of the outer furnace tube 11 are open, and the inner furnace tube 12 is installed inside, and after installation, a containing space is formed between the outer wall of the inner furnace tube 12 and the inner wall of the outer furnace tube;

[0080] The upper and lower ends of the inner furnace tube 12 are open, and the inner side of the inner furnace tube 12 is provided with an inner heating source 72, the upper end opening is provided with a connecting piece for hoisting connection, and the lower end opening is provided with a support table, which can be installed with a support base, so that the inner furnace tube 12 can be hoisted downward from the top of the outer furnace tube 11 and installed inside the outer furnace tube 11, or inserted upward from the bottom of the outer furnace tube 11 and installed inside the outer furnace tube 11;

[0081] The upper furnace cover 2 and the lower furnace door 3 are respectively installed at the upper and lower ends of the outer furnace tube 11 and the inner furnace tube 12, for sealing the upper and lower ends of the containing space between the inner furnace tube 12 and the outer furnace tube 11 to form a sealed chamber 13 (while needing to cooperate with a sealing assembly), to meet the process requirement of vacuumizing; and the inner side of the inner furnace tube 12 is provided with an inner heating source 72, and the outer side of the outer furnace tube 11 is provided with an outer heating source 71, and the inner and outer heating sources can heat the sealed chamber 13 of the furnace tube 1 through the tube walls of the inner and outer furnace tubes;

[0082] The rotating device is provided with a plurality of carrier placement positions corresponding to the sealed chamber, and when the rotating device rotates, the carriers on the carrier placement positions are adjusted in position and angle in the sealed chamber, so that the silicon wafers on the carriers are uniformly heated.

[0083] The present application is provided by setting a through-type inner furnace tube, the top end of the inner furnace tube is provided with a connecting piece, and the lower end is provided with a support table which can be installed with a support base, so that the installation of the inner furnace tube can be completed by hoisting from the top or inserting from the bottom of the vertical furnace, which is more convenient, and the carriers in the furnace tube are placed on the rotating device which can rotate, so that the carriers can be adjusted in position and angle in the furnace, and when the reaction gas is introduced into the sealed chamber or the temperature difference is large, the gas field and the heat field in the sealed chamber are uniform, and the overall process yield is improved.

[0084] In a specific embodiment, as shown in Figure 2, the inner wall of the upper end of the inner furnace tube 12 is provided with a circle of support flanges (which can be subsequent inner sealing flanges 121), and the support flanges are connecting pieces, and the inner furnace tube can adopt a plurality of hoisting fixing modes, of which two are exemplified;

[0085] The first embodiment, as shown in FIGS. 1-5, directly installs the connector 41 for hoisting on the support flange (i.e. the inner sealing flange 121) by screw connection, the connector 41 can be directly connected with the hoisting equipment, and the support portion of the upper end of the inner heating source 72 is also provided with a screw hole, the connecting leg of the connector 41 is screwed with a nut through the inner sealing flange 121, so that the inner sealing flange 121 can be hung on the connecting leg of the connector 14, and the connecting leg is also screwed with the support of the upper end of the inner heating source 72, so as to ensure that the whole inner furnace tube 12 is stably hung;

[0086] The second embodiment, as shown in FIGS. 6-10, the outer wall of the outer furnace tube 11 is provided with a support flange 111 near the upper end face, for installing the top support 81, the crossbeam of the top support 81 is suspended above the inner furnace tube 12, and the crossbeam is connected with the hanging seat 42 between the support flange (i.e. the inner sealing flange 121) of the inner furnace tube 12, so that the upper end of the inner furnace tube 12 is directly connected with the top support 81 of the furnace tube 1 through the hanging seat 42, that is, the inner furnace tube 12 is hung and supported by the flange of the furnace tube 1 itself.

[0087] Specifically, the outer wall of the outer furnace tube 11 is also provided with a support flange 111 near the lower end face, for installing the bottom support 82, which can be used to assist in fixing the peripheral components of the furnace tube, such as water cooling pipes, etc., and can also play a role in supporting the whole furnace tube.

[0088] In specific embodiments, the support table of the lower end of the inner furnace tube 12 also has various setting modes, and two specific embodiments are taken as examples;

[0089] The first embodiment, as shown in FIG. 2, the inner wall of the lower end of the inner furnace tube 12 protrudes a ring-shaped step 122, and the lower side of the ring-shaped step 122 can be used as a support table for installing or connecting a support base for stably placing the bottom of the inner furnace tube.

[0090] The second embodiment, a ring-shaped support flange (not shown in the figure) is installed on the inner wall of the inner furnace tube 12 near the lower end face, and the support base is connected through the support flange to support the bottom of the inner furnace tube.

[0091] In further embodiments of the above two embodiments, as shown in FIG. 2, the ring-shaped step or the support flange can be installed with a ring-shaped heat insulation pad 123, which can be used as a support base, and the lower end of the ring-shaped heat insulation pad 123 exceeds the lower end of the inner furnace tube 12, which can play a role in supporting and heat insulation.

[0092] Specifically, the ring-shaped heat insulation pad 123 is connected and fixed with the ring-shaped step or the support flange of the inner furnace tube 12 in a sealed connection mode, that is, the connection between the ring-shaped heat insulation pad 123 and the inner furnace tube is in a sealed state.

[0093] In a specific embodiment, as shown in Fig. 2, the central hole of the upper furnace cover 2 can pass through the upper end of the inner furnace tube 12 or pass through the hanging part (such as a connector and a hanging seat) connected to the upper end of the inner furnace tube; the central hole of the lower furnace door 3 can pass through the lower end of the inner furnace tube 12.

[0094] Specifically, as shown in Fig. 2, the structure and sealing connection of the upper furnace cover 2 are as follows:

[0095] The outer end of the upper furnace cover 2 away from the sealed chamber 13 is outwardly convex to form a spherical convex. Since the sealed chamber 13 needs to be vacuumized, the outer end of the upper furnace cover is set to be a spherical convex upwardly convex to withstand greater pressure and prevent the internal vacuumization from being deformed by being sucked in.

[0096] The inner part of the upper furnace cover 2 is further provided with a lower layer plate 22, an outer layer plate 24 and an inner layer plate 23 cooperating with the inner side of the outer end to form a cavity, all of which are annular to form an annular cavity on the inner side of the outer end of the upper furnace cover 2. A plurality of reinforcing ribs 21 are arranged in the annular cavity, specifically between the upper and lower inner walls of the cavity. The reinforcing ribs 21 are annularly arranged in the annular cavity.

[0097] Preferably, the lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are hollow layer plates. The inner part of the hollow layer plate can be used as a water cooling channel or a water cooling assembly, such as a water cooling pipe, to avoid heat dissipation from the upper furnace cover affecting the processing.

[0098] As shown in Fig. 2, the sealing method of the top of the furnace tube is as follows:

[0099] The outer wall of the upper end of the outer furnace tube 11 is provided with an outer sealing flange 112 (the outer sealing flange is located above the support flange), and the inner wall of the inner furnace tube 12 is provided with an inner sealing flange 121 (the inner sealing flange can also be used as a connecting part, that is, it is used for sealing and connecting the upper furnace cover and hanging connection); the upper furnace cover 2 covers the upper end surface of the outer furnace tube and the inner furnace tube, and the central hole of the upper furnace cover 2 is annular, the outer edge of the upper furnace cover 2 is buckled to the upper end surface of the outer furnace tube 11 and is sealingly connected with the outer sealing flange 112 of the outer furnace tube 11, and the inner edge is buckled to the upper end of the inner furnace tube 12 and is sealingly connected with the inner sealing flange 121 of the inner furnace tube 12.

[0100] It should be noted that the inner sealing flange is also used as a support flange, that is, the inner sealing flange is a connecting part, the part of the inner sealing flange close to the inner furnace tube wall is sealingly connected with the upper furnace cover, and the part of the inner sealing flange close to the center of the inner furnace tube can pass through the connecting foot of the connector or the hanging seat.

[0101] The sealing connection mode between the specific inner and outer sealing flanges and the furnace cover is a conventional sealing means in the prior art, for example, screws, gaskets, sealing rings and the like are needed, and a person skilled in the art can completely reproduce the same, and the present application will not be repeated.

[0102] Specifically, as shown in FIGS. 11 to 15, the lower furnace door structure is specifically implemented as follows:

[0103] In the first embodiment, the lower furnace door 3 is an integral whole, and a central hole is arranged in the middle part, and the whole lower furnace door is directly opened when opened.

[0104] Further, the lower furnace door 3 is protruded downward to form a drum surface, that is, a spherical protruding structure is arranged. Like the effect of the furnace cover, a greater pressure can be borne.

[0105] In the second embodiment, a central hole is arranged in the middle part of the lower furnace door 3, and a plurality of small furnace doors, that is, furnace openings 31, and furnace covers 32 corresponding to each small furnace door are arranged on the lower furnace door. The size and shape of the furnace opening 31 are matched with the size and shape of the side of the carrier, and specifically, the shape of the furnace opening 31 can be consistent with the shape of the side of the carrier, and the size is slightly larger than the size of the side of the carrier, so that the carrier can just pass through the furnace opening 31. The furnace cover 32 is connected with a driving structure 33, and the driving structure 33 is used to drive the furnace cover 32 to open or close relative to the furnace opening 31, so that the small furnace door can be opened individually, and the heat loss in the furnace tube is reduced.

[0106] In the present embodiment, the lower furnace door 3 and the furnace cover 32 are preferably spherical protruding structures protruded downward. The lower furnace door and the furnace cover can bear a greater pressure, so that the lower furnace door and the furnace cover are prevented from being sucked flat when the sealed space in the furnace tube is vacuumized, and the lower furnace door is prevented from being damaged.

[0107] In order to make the furnace cover 32 better tightly fit with the corresponding furnace opening 31, improve the sealing performance, and reduce the heat loss in the furnace tube, a first protruding block 311 is arranged on the side of the furnace opening 31 facing the furnace cover 32, the first protruding block 311 forms an annular cavity 312 around the circumference of the furnace opening 31, and the furnace opening 31 is completely located in the annular cavity 312.

[0108] The furnace cover 32 matched with the furnace opening 31 is provided with a second protruding block 321 on the side facing the furnace opening 31, and the second protruding block 321 can be matched and inserted into the annular cavity 312. In order to further improve the sealing performance between the furnace cover 132 and the corresponding furnace opening 31, a high-temperature-resistant sealing strip can be further arranged around the second protruding block 321.

[0109] Specifically, the driving structure 33 includes a rotating driving device 331, a shaft coupling 332, a rotating shaft 333, a rotating plate 334, a push-pull driving device 335 and a connecting plate 340.

[0110] The rotating driving device 331 is preferably a rotating motor, and the push-pull driving device 335 is preferably a push-pull motor.

[0111] The lower furnace door 3 is provided with a rotating driving device 331 corresponding to each of the furnace openings 31. The rotating end of the rotating driving device 331 is connected to the rotating shaft 333 through the coupling 332. The end of the rotating shaft 333 is connected to a rotatable rotating plate 334, which is located in front of the furnace opening 31. The coupling 332 can firmly connect the rotating end of the rotating driving device 331 and the rotating shaft 333, so that they rotate together and transmit torque and motion. This ensures that the relative position between the rotating end of the rotating driving device 331 and the rotating shaft 333 remains unchanged during the transmission of motion and power, achieving reliable transmission. The coupling 332 can also compensate for the deviation between the rotating end of the rotating driving device 331 and the rotating shaft 333, ensuring the continuity and stability of the transmission. In addition, the coupling 332 can also absorb shocks and vibrations, reducing the wear and failure risk of the rotating end of the rotating driving device 331 and the rotating shaft 333, and improving the stability and reliability of the driving structure 33.

[0112] The middle part of the rotating plate 334 is bolted with a push-pull driving device 335. The push-pull end of the push-pull driving device 335 penetrates the rotating plate 334 and is connected to the furnace cover 32.

[0113] Specifically, the driving structure 33 further comprises a first partition plate 341 and a second partition plate 342 arranged at one end of a connecting plate 340, and a third partition plate 343 arranged at the other end of the connecting plate 340; a first accommodating space 344 is formed between the first partition plate 341, the second partition plate 342 and the corresponding part of the connecting plate 340; a second accommodating space 345 is formed between the second partition plate 342, the third partition plate 343 and the corresponding part of the connecting plate 340; and a through hole (not shown, the same below) is arranged at the same position of the first partition plate 341, the second partition plate 342 and the third partition plate 343. The rotating driving device 331 is fixed on the side of the third partition plate 343 away from the second partition plate 342, and then the rotating end of the rotating driving device 331 is connected with the coupling 332 through the through hole of the third partition plate 343, and the coupling 332 is located in the second accommodating space 345; one end of the rotating shaft 333 is rotatably connected in the through hole of the first partition plate 341, and the other end of the rotating shaft 333 is connected with the coupling 332 through the through hole of the second partition plate 342, and the rotating plate 334 is sleeved on the rotating shaft 333 located in the first accommodating space 344. In this way, the first accommodating space 344 and the second accommodating space 345 can effectively isolate the space between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, can prevent accidental contact due to mechanical failure or improper operation, reduce the potential risk of injury, and protect the safety of workers and equipment; and the first accommodating space 344 and the second accommodating space 345 can reduce the mutual influence between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, prevent the vibration and force generated when the rotating driving device 331 works from being transmitted between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, and improve the stability of the entire driving structure 33.

[0114] The lower furnace door further comprises a control unit, the rotating driving device 331 is provided with a first electrical interface 338, the push-pull driving device 335 is provided with a second electrical interface 139, and the first electrical interface 338 and the second electrical interface 339 are both used for electrically connecting with the control unit for controlling the furnace door structure.

[0115] In this way, when the furnace cover 32 needs to be opened relative to the furnace port 31, the worker clicks start on the operation panel corresponding to the control unit, and when the control unit receives the opening signal sent by the operation panel, the push-pull driving device 335 is first started to control the furnace cover 32 to move away from the corresponding furnace port 31, and when the furnace cover 32 is not in contact with the corresponding furnace port 31, the control center closes the push-pull driving device 335, and at the same time, the rotating driving device 331 is started, at this time, the rotating driving device 331 controls the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move to the outside away from the center of the furnace cover 32, so that the corresponding furnace port 31 is completely exposed, the control unit closes the rotating driving device 331, and then the worker places the carrier with the wafer to be processed into the furnace port 31 and then places it in the furnace tube 1, and then the process is performed, that is, the specific reaction gas is introduced into the furnace tube 1, so as to realize the specific film coating, diffusion, oxidation and thin film deposition process on the wafer to be processed.

[0116] When the furnace cover 32 needs to be closed relative to the furnace port 31, the worker clicks close on the operation panel corresponding to the control unit, and when the control unit receives the closing signal sent by the operation panel, the control unit first starts the rotating driving device 331 to control the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move to the inside away from the center of the furnace cover 32 for resetting, and then the control center closes the rotating driving device 331, and at the same time, the push-pull driving device 335 is started to control the furnace cover 32 to move close to the corresponding furnace port 31, until the second protrusion 321 of the furnace cover 32 matches the insertion into the annular cavity 312 of the corresponding furnace port 31, so that the furnace cover 32 completely covers the corresponding furnace port 31, and then the control unit closes the push-pull driving device 335.

[0117] The side of the furnace cover 32 facing the rotating plate 334 is further provided with a rectangular mounting plate 322, the push-pull end of the push-pull driving device 335 is connected with the middle part of the mounting plate 322, and the mounting plate 322 is connected with the furnace cover 32 through the first guide column 323 around. The mounting plate 322 can share part of the weight and load between the furnace cover 32 and the push-pull driving device 335, enhance the stability and reliability of the overall structure; and the mounting plate 322 can also absorb the vibration and impact force generated when the furnace cover 32 rotates, so as to reduce the damage to the furnace cover 32 and the push-pull driving device 335, and prolong the service life thereof; and the mounting plate 322 can be connected with the furnace cover 32 through the first guide column 323, so that the relative position between the furnace cover 32 and the push-pull driving device 335 can be better adjusted, and the accuracy and stability of the rotation of the furnace cover 32 can be ensured.

[0118] And the mounting plate 322 is also provided with a plurality of lightening holes 324, which can reduce the weight of the mounting plate 322 and make the rotary drive device 331 and the push-pull drive device 335 better control the movement of the furnace cover 32.

[0119] The middle part of the rotating plate 334 is provided with a rectangular mounting area 336, and the middle part of the mounting area 336 is provided with a push-pull drive device 335. The mounting area 336 is connected with the mounting plate 322 through a second guide column 337 around the mounting area 336.

[0120] The second guide column 337 in the embodiment is mounted at the four corners of the mounting area 336.

[0121] The second guide column 337 can ensure that the relative position between the mounting plate 322 and the furnace cover 32 is accurately aligned. Thus, during the rotation of the furnace cover 32, the second guide column 337 can guide the mounting plate 322 and the furnace cover 32 to move along the predetermined path, preventing them from deviating from the correct position or being offset, which helps to maintain the stability and accuracy of the rotation of the furnace cover 32.

[0122] As shown in FIGS. 2 and 16, in a specific embodiment, a magnetic fluid sealing assembly is sealingly connected to the central hole of the lower furnace door for rotation sealing of the rotating device.

[0123] Further, the rotating sealing rotating device specifically comprises a boat holder base and a rotating power source. The boat holder base is arranged in the closed chamber of the furnace tube and is provided with a plurality of carrier placement positions. The inner edge of the bottom of the boat holder base is protruded downward and is connected with the transmission shaft of the magnetic fluid sealing assembly, so that the boat holder base is rotated when the rotating shaft is rotated. The rotating power source is directly connected with the lower end of the transmission shaft of the magnetic fluid sealing assembly outside the closed chamber of the furnace tube. The rotating power source is provided outside the furnace tube to avoid the influence of high temperature in the furnace on the normal operation of the rotating power source. That is, because the temperature in the furnace tube is about 500° or above, the motor as the rotating power source cannot work normally at this temperature. The external rotating power source can ensure the normal operation of the rotating device.

[0124] By arranging the rotatable boat holder base 5, the position and angle of the carrier can be adjusted, so that the gas field and the heat field in the closed chamber are uniform when the reaction gas is introduced into the closed chamber or the temperature difference is large, and the overall process yield is improved.

[0125] Specifically, as shown in FIG. 2, the magnetic fluid assembly 6 is located at the bottom of the furnace tube 1, and specifically includes an outer ring portion 61, an inner ring portion 62, and a transmission shaft 59. The top surface of the outer ring portion 61 is sealingly connected with the edge of the central hole of the lower furnace door 3, and a first sealing ring 611 can be seen in the figure. The top surface of the inner ring portion 62 is sealingly connected with the lower end surface of the annular heat insulation pad 123 at the bottom of the inner furnace tube 12, and a second sealing ring 621 can be seen in the figure. The gap between the inner ring portion 62 and the outer ring portion 61 of the magnetic fluid assembly 6 is a rotating sealing space in the form of a ring, and the transmission shaft 59 penetrates through the rotating sealing space of the magnetic fluid assembly 6.

[0126] The inner side of the boat support base 5 surrounds the inner furnace tube 12 and has a plurality of carrier placement positions 501. The rotating base 51 at the bottom is in the form of a ring and penetrates through the central hole of the lower furnace door. The lower side of the rotating base 51 is connected with the annular transmission shaft 59. The upper end of the transmission shaft 59 is connected with the bottom of the rotating base 51 and penetrates through the rotating sealing space of the magnetic fluid assembly 6. The lower end of the transmission shaft 59 is located outside the furnace tube and is provided with a gear or a belt wheel to be rotationally connected with a rotating power source. Thus, the rotating power source drives the entire boat support base 5 to rotate around the inner furnace tube 12 through the transmission shaft 59.

[0127] The gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring portion 62 of the magnetic fluid assembly is provided with magnetic fluid (not shown in the figure). Specifically, a plurality of annular grooves can be provided on the inner wall surface of the transmission shaft 59 or a plurality of annular grooves can be provided on the outer wall surface of the inner ring portion of the magnetic fluid assembly to place the magnetic fluid, thereby forming a plurality of sealing rings located in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring portion 62 of the magnetic fluid assembly 6.

[0128] The outer wall surface of the rotating shaft and the inner wall surface of the outer ring portion of the magnetic fluid assembly are also provided with magnetic fluid in the same way. The inner portions of the outer ring portion 61 and the inner ring portion 62 are provided with permanent magnets, and the magnetic poles serve as the inner wall of the rotating sealing space, so that the magnetic fluid can surround the transmission shaft 59, thereby making the magnetic fluid form a plurality of sealing rings located in the gap between the outer wall surface of the transmission shaft and the inner wall surface of the outer ring portion of the magnetic fluid assembly.

[0129] Specifically, the outer edge of the lower furnace door 3 is connected with the step at the bottom of the outer furnace tube 11, and the inner edge of the lower furnace door 3 is sealingly connected with the outer ring portion 61 of the magnetic fluid assembly 6. That is, the annular heat insulation pad (support base) at the bottom of the inner furnace tube, the inner edge of the lower furnace door, and the transmission shaft (in the form of a tube and also called a transmission pipe) penetrating through the magnetic fluid assembly are directly sealingly connected to seal the lower end of the sealed chamber 13 in the furnace tube 1.

[0130] In a specific embodiment, the outer wall surface of the transmission shaft 59 penetrating through the rotating sealing space of the magnetic fluid assembly 6 is provided with a ring of gears 591. The rotating power source drives the internal boat support base to rotate in the form of external motor gear transmission.

[0131] In other embodiments, the belt pulley can also be sleeved on the outer wall surface of the rotating sealing space of the magnetic fluid assembly through which the transmission shaft penetrates, and the rotating power source drives the transmission shaft through the belt pulley.

[0132] As shown in FIG. 16, the first embodiment of the boat support base is:

[0133] The boat support base comprises a rotating base 51, a fixed ring 52, and a hanging plate 53.

[0134] The rotating base 51 is disc-shaped, and a plurality of hanging plates are vertically and spacedly arranged along the annular edge of the upper surface of the base. The fixed ring 52 is connected to the top of the hanging plate 53 to fix the top of the hanging plate 53, so that the hanging plate 53 is in a stable vertical state. The outer side of the hanging plate 53 is spacedly provided with a plurality of hanging positions (i.e., carrier placing positions) along the length direction for suspending the carriers, i.e., the hanging plate 53 can hang a plurality of carriers 50 along the height direction. Specifically, the carriers can be hung at different heights of the boat support base, so that the carriers can be hung in multiple layers along the height direction of the boat support base.

[0135] The annular transmission shaft 59 is connected to a circle along the inner edge of the rotating base 51, which can support the rotating base 51 and drive the rotating base 51 to rotate around the central axis. When the rotating base 51 rotates, the carriers 50 located on the outer side of the hanging plate 53 rotate around the central axis of the base center, so that the position and angle of the carriers can be changed during the processing.

[0136] In specific embodiments, the hanging positions of the hanging plate 53 are provided with hook holes 54 for hanging the carriers. The upper part of the hook hole 54 is wider, and the lower part is narrower, which facilitates the hanging of the carriers.

[0137] The carrier 50 is a vertical quartz boat, which is provided with a hook that can be downwardly clamped into the hook hole. The hook of the vertical quartz boat is clamped into the hook hole, so that the vertical quartz boat is hung in the hanging position.

[0138] Specifically, the side of each vertical quartz boat is provided with two hooks along the height direction, and each two hook holes on the hanging plate correspond to one vertical quartz boat. In specific embodiments, each hanging plate 53 can hang two vertical quartz boats along the height direction, so that the quartz boats can be arranged in two circles around the boat support base, thereby allowing multiple vertical quartz boats hung on the boat support base to be subjected to various heating forms such as layered heating, local heating, and overall heating.

[0139] Specifically, the rotating base 51 can further be provided with a heat insulation cover (not shown in the figure), the heat insulation cover is provided with a plurality of through holes for passing through the hanging plate, and the heat insulation cover is internally provided with a water cooling assembly (the specific water cooling source can be provided through a water cooling joint of the lower furnace cover). The heat insulation cover does not affect the rotation of the rotating base 51 and the hanging of the carrier, and can prevent the temperature of the rotating base from being too high to affect the stability.

[0140] As shown in FIGS. 17 and 18, the second embodiment of the boat support base is:

[0141] The boat support base comprises a rotating base 51 and a plurality of pairs of bearing members 55, the rotating base 51 has a plurality of carrier placement positions 501 for passing or placing carriers, and each pair of bearing members 55 is located at the two side edges of a carrier placement position 501 and is foldably arranged on the rotating base 51. Meanwhile, each pair of bearing members 55 has a folded state and an unfolded state. If a carrier 50 is to be placed, each pair of bearing members 55 is switched to the folded state, so that the carrier 50 can pass through the carrier placement position 501 from the bottom upwards. When the bottom of the carrier 50 moves above the horizontal plane of the carrier placement position 501, each pair of bearing members 55 is switched to the unfolded state, so that the carrier 50 is placed on the bearing members. Subsequently, if the carrier 50 is to be taken out, each pair of bearing members 55 is switched to the folded state, so that the carrier 50 can pass through the carrier placement position 501 downwards from the furnace door, thereby realizing the taking and placing of the carrier boat.

[0142] In each pair of bearing members 55, each bearing member 55 comprises a bearing fixed part 551 and a bearing movable part 552, the bearing fixed part 551 is fixedly arranged on the rotating base 51, and the bearing movable part 552 is rotatably arranged on the bearing fixed part 551. In each bearing member 55, the bearing fixed part is provided with a rotating shaft 553, the bearing movable part 552 comprises two opposite first bearing rods and a second bearing rod connected with the two first bearing rods, and the two bearing rods are sleeved on the two ends of the rotating shaft away from the second bearing rod. It can be understood that the rotating base further comprises a driving member (not shown in the figure), the driving member is used for driving the rotating shaft to rotate, and the driving member can be a motor. And a self-locking support structure, for example, a motor self-locking (not shown in the figure), the self-locking support structure is used for limiting the rotation angle of the bearing movable part.

[0143] In the folded state of each pair of bearing members 55, the bearing movable part 552 in each bearing member 55 is arranged away from the carrier placement position 501. In the unfolded state of each pair of bearing members 55, the bearing movable part 552 in each bearing member 55 is arranged towards the carrier placement position and abuts against the carrier.

[0144] In the case that the rotation angle of the bearing movable part in each bearing part 55 is 90 degrees, each pair of bearing parts 55 is in the folded state, and the bearing movable part 552 in each bearing part 55 is in the vertical state. At this time, the bearing movable part 552 in each bearing part 55 does not interfere with the placement of the carrier boat in the carrier placement position 501 of the rotating base 51, and thus does not interfere with the up-and-down movement of the carrier boat. When each pair of bearing parts is in the unfolded state, and the bearing movable part in each bearing part is in the horizontal state, the bearing movable part in each bearing part extends into the carrier placement position of the rotating base, and thus can bear the carrier boat.

[0145] In the embodiment, in any two adjacent pairs of bearing parts, one bearing fixed part belonging to one pair of bearing parts is connected to one bearing fixed part belonging to another pair of bearing parts. In actual application, in any two adjacent pairs of bearing parts, the two bearing fixed parts connected to each other can be integrally formed. This design can reduce the number of parts and save installation time.

[0146] In the embodiment, the carrier placement position 501 is a notch provided on the rotating base 51. The shape and size of the carrier placement position 501 are matched with the shape and size of the carrier boat, so that the carrier boat can smoothly pass through the carrier placement position. It can be understood that in other embodiments, the carrier placement position can be a through hole provided on the rotating base.

[0147] As shown in FIG. 18, the carriers can be stacked in the height direction, that is, a plurality of carriers can be placed in one carrier placement position. In order to avoid the carriers from falling, a vertical guard rail can be arranged along the outer edge of the rotating base. Since the inner edge of the rotating base is close to the outer wall of the inner furnace tube, the outer wall of the inner furnace tube and the guard rail can ensure that the stacked carriers do not fall.

[0148] In specific embodiments, the outer heating source and the inner heating source are an integral whole, that is, the electric heating wire is directly wound on the inner and outer furnace tubes to directly heat the closed cavity.

[0149] As shown in FIGS. 19 and 20, in a preferred embodiment, the outer heating source 71 and the inner heating source 72 are both arranged in a ring shape and are arranged along the height direction of the inner and outer furnace tubes. Specifically, the outer heating source 71 and the inner heating source 72 can be divided into a plurality of independent heating sections along the height direction of the furnace tubes, and the boat support base can also be correspondingly layered to hang and place the carriers along the height direction, so as to achieve layered and corresponding heating and improve the overall heating efficiency.

[0150] Alternatively, the outer heating source and the inner heating source are divided into a plurality of independent heating sections, and the plurality of heating sections are arranged in a ring shape around the inner and outer furnace tubes.

[0151] The inner and outer heating sources can specifically adopt resistance wire heating furnace tubes, infrared heating, electromagnetic induction heating, etc.

[0152] In further embodiments, heat dissipating devices 73 are arranged around the periphery of the external heating source and the internal heating source to quickly and stably regulate the temperature of the reaction furnace tube. The heat dissipating devices can be independent or integrated with the heating devices. The heat dissipating devices can be manually controlled or automatically controlled by collecting temperature signals, pressure signals, etc. Any automatic control method is included in the scope.

[0153] Specifically, in FIG. 2, the end surface positions of the external furnace tube 11 and the upper furnace cover 2 and the lower furnace door 3 are provided with water cooling joints 74 for supplying water to the heat dissipating devices arranged inside.

[0154] As shown, the bottom of the furnace tube is provided with a water sliding ring at a position inside the bottom support for supplying water to the water cooling pipeline (not shown in the figure).

[0155] In specific embodiments, the internal and external furnace tubes are quartz tubes or silicon nitride tubes. The furnace tube proposed in the present application adopts a through design for the internal furnace tube, which can be hoisted from the top or supported from the bottom and inserted upward for installation, so that the installation mode of the internal furnace tube is diversified.

[0156] The carrier in the furnace tube is placed on a rotatable boat support base, so that the carrier can be adjusted in position and angle in the furnace, so that the gas field and thermal field inside the sealed chamber are uniform when the reaction gas is introduced or the temperature difference is raised, and the overall process yield is improved.

[0157] The lower furnace door and the upper furnace cover are designed to have outwardly convex drum surfaces, which have better pressure bearing capacity and are less likely to be deformed.

[0158] The bottom is sealed by a magnetic fluid assembly, which can be external to the drive components of the boat support base while ensuring that the sealed chamber through which the reaction gas passes remains sealed.

[0159] The lower furnace door is provided with a plurality of small furnace doors, which can be opened individually when the carrier is loaded or unloaded, so as to avoid the loss of heat in the furnace affecting the processing efficiency.

[0160] It should be noted that the terms used above are only for describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form unless the context clearly indicates otherwise, and it should be understood that when the terms "comprise" and / or "include" are used in the specification, there is a presence of the features, steps, operations, devices, components and / or combinations thereof.

[0161] The foregoing is a summary and thus contains only the most basic embodiment of the application. The application can be practiced with modification and alteration and can be used in conjunction with other embodiments and each of the various embodiments "stand on its own" as an embodiment of the application. Accordingly this summary should not limit the scope of the application to only the described embodiments, but is intended to embrace by reference all coverage equivalents to the claimed subject matter. It will be apparent to those having ordinary skill in the art that various changes and modifications can be made thereto without departing from the spirit and scope of the application. It is thus contemplated to cover any and all such changes and modifications that fall within the true scope of the application. In compliance with the statute, the application has been described in language more or less specific to structural or methodical features. The material contained herein is intended to be illustrative only and not intended to limit the scope of the application. Therefore, it is not intended that the application be limited to the specific illustrative embodiments disclosed, but that the application is adequately disclosed by the above description along with the affiliated claims in language to be construed by those having ordinary skill in the art.

Claims

1. A furnace tube characterized by, The outer furnace tube, the inner furnace tube and the lower furnace door are included. The inner furnace tube is installed in the outer furnace tube; the upper and lower ends of the inner furnace tube are open, the upper end is provided with a connecting piece for hoisting connection, and the lower end is provided with a support table to enable the inner furnace tube to be hoisted downward from the top of the outer furnace tube and installed in the outer furnace tube or inserted upward from the bottom of the outer furnace tube and installed in the outer furnace tube. The lower furnace door is installed at the lower end of the inner furnace tube and the outer furnace tube, the upper and lower ends of the containing space between the inner furnace tube and the outer furnace tube are sealed to form a sealed chamber, and the inner furnace tube and the outer furnace tube are provided with a heating source for heating the sealed chamber.

2. The furnace tube of claim 1, wherein The inner wall of the upper end of the inner furnace tube is provided with a supporting flange, and the supporting flange is the connecting piece; the inner wall of the lower end of the inner furnace tube is provided with a ring-shaped step or a supporting flange to form the supporting table.

3. The furnace tube of claim 1 wherein, The connecting piece at the upper end of the inner furnace tube is connected to a connector for hoisting.

4. The furnace tube of claim 1 wherein, The outer wall of the outer furnace tube is further provided with a support flange near the upper end surface, which is used to install a top support, and the top support is connected to a hanging seat between the connecting piece of the inner furnace tube.

5. The furnace tube of claim 1 wherein, A rotating device is further included, which is provided with a plurality of carrier placement positions corresponding to the sealed chamber, and the rotating device drives the carriers on the carrier placement positions to adjust the position and angle in the sealed chamber when rotating.

6. The furnace tube of claim 5 wherein, An upper furnace cover is installed at the upper end of the furnace tube, the center hole of the upper furnace cover can penetrate the upper end of the inner furnace tube or the hoisting piece connected to the upper end of the inner furnace tube, and the center hole of the lower furnace door can penetrate the lower end of the inner furnace tube.

7. The furnace tube of claim 6 wherein, An outer sealing flange is arranged on the outer wall of the upper end of the outer furnace tube, and an inner sealing flange is arranged on the inner wall of the inner furnace tube; the upper furnace cover covers the upper end surfaces of the outer furnace tube and the inner furnace tube, the outer edge thereof is sealingly connected to the outer sealing flange, and the inner edge thereof is connected to the inner sealing flange.

8. The furnace tube of claim 6 wherein, The outer end surface of the upper furnace cover away from the containing space is outwardly protruded to form a spherical protrusion, a cavity is arranged inside the upper furnace cover around the center hole, and a plurality of reinforcing ribs are arranged in the cavity and connected between the upper and lower inner walls of the cavity.

9. The furnace tube of claim 8 wherein, The lower plate, the outer side plate and the inner side plate surrounding the cavity of the upper furnace cover are hollow plates, and the hollow plates are used as water cooling channels or are provided with water cooling components.

10. The furnace tube of claim 6 wherein, A ring-shaped heat insulation pad is connected to the support table at the lower end of the inner furnace tube as a support base, the upper end surface of the ring-shaped heat insulation pad is sealingly connected to the support table, and the lower end exceeds the lower end surface of the inner furnace tube.

11. The furnace tube of claim 6 wherein, A magnetohydrodynamic sealing assembly is sealingly connected to the center hole of the lower furnace door, and the rotating device includes a boat support base provided in the sealed chamber and provided with a plurality of carrier placement positions, a transmission shaft of the magnetohydrodynamic sealing assembly is connected to the boat support base, and a rotating power source is connected to the transmission shaft outside the sealed chamber to drive the boat support base to rotate.

12. The furnace tube of claim 11 wherein, The boat support base includes: A rotating base is arranged at the bottom of the sealed chamber and is connected to the transmission shaft; A hanging plate is vertically arranged on the rotating base, and a plurality of carrier placement positions for hanging the carriers are arranged on the hanging plate.

13. The furnace tube of claim 11 wherein, The boat support base includes: A rotating base with a plurality of carrier placement positions for carriers to pass through or be placed on, and connected with the transmission shaft; A plurality of pairs of supporting members, each pair of supporting members is located at the two side edges of a carrier placement position and is foldably arranged on the rotating base; When the supporting members are switched to the folded state, the carriers can pass through the corresponding carrier placement positions from the bottom to the top; when the supporting members are switched to the unfolded state, the carriers can be placed on the supporting members.

14. The furnace tube of claim 11 wherein, The magnetic fluid sealing assembly is annular, has a corresponding central hole in the middle part, and is divided into an inner ring part, an outer ring part, and a transmission shaft in the form of a ring between the inner ring part and the outer ring part; the inner ring part is sealingly connected with the supporting base at the bottom of the inner furnace tube, the outer ring part is sealingly connected with the inner edge of the lower furnace door, and the inner ring part and the outer ring part are rotationally sealed with the transmission shaft.

15. The furnace tube of claim 11 wherein, The outer edge of the lower furnace door is sealingly connected with the step of the outer furnace tube bottom, and the inner edge is sealingly connected with the magnetic fluid assembly.

16. The furnace tube of claim 11 wherein, The outer wall surface of the end of the transmission shaft outside the furnace tube is provided with a ring of gears or a belt pulley.

17. The fire tube as claimed in claim 1, wherein, The lower furnace door is provided with a plurality of furnace openings penetrating the lower furnace door, the size and shape of the furnace openings match the size and shape of the side surface of the carrier, each furnace opening is provided with a furnace cover corresponding thereto, the furnace cover is connected with a driving structure, and the driving structure is used to drive the furnace cover to open or close relative to the furnace opening.

18. The fire tube as claimed in claim 17, wherein, The furnace cover and / or the lower furnace door are downwardly convex spherical convex structures.

19. The fire tube as claimed in claim 1, wherein, The inner side of the inner furnace tube is provided with an inner heating source, the outer side of the outer furnace tube is provided with an outer heating source, the inner heating source is divided into a plurality of independent heating sections, and the outer heating source and the periphery of the inner heating source are provided with heat dissipation devices corresponding thereto.

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