Furnace tube and control method

Abstract

Disclosed are a furnace tube and a control method, comprising an outer furnace tube, an inner furnace tube, an upper furnace cover, a lower furnace door, a heating source and a rotation apparatus. The inner furnace tube is mounted inside the outer furnace tube, the upper furnace cover and the lower furnace door are installed at the upper and lower ends of the outer furnace tube and the inner furnace tube, respectively, the upper and lower ends of an accommodation space between the inner furnace tube and the outer furnace tube are sealed to form a sealed chamber, and a heating source used for heating the sealed chamber is provided on the inner furnace tube and the outer furnace tube. The rotation apparatus corresponds to the sealed chamber, and is provided with multiple carrier placement positions. When the rotation apparatus rotates, it drives carriers on the carrier placement positions to adjust their positions and angles within the sealed chamber. In the furnace tube of the present invention, the carriers are placed on rotatable boat-supporting bases, and when a reactive gas is introduced into the sealed chamber, or when there is a temperature differential during heating, adjusting the positions and angles of the carriers inside the furnace can cause the gas field and thermal field inside the sealed chamber to be more uniform, thereby improving the overall process yield.

Description

Furnace tube and control method TECHNICAL FIELD

[0001] The present application relates to the technical field of solar energy, in particular to a furnace tube and a control method. BACKGROUND

[0002] The current diffusion of the photovoltaic industry, oxidation, annealing, doping, PECVD, LPCVD and other processes have vertical furnace and horizontal furnace two types, the structure of the two types needs to put the silicon wafer in a specific carrier into the reaction cavity for process, through the specific reaction gas, so as to realize the specific coating of the silicon wafer, diffusion, oxidation and thin film deposition process. In the existing two-layer furnace tube design, the bottom and the top wall are used to seal the two ends of the double-layer furnace tube to form a straight-through cavity, the wafer to be processed is placed in the straight-through cavity, and the heating layer on the double-layer furnace tube is used to heat the straight-through cavity or the furnace body is set as an inner and outer furnace body, and the inner furnace cavity is in a closed form.

[0003] As in the prior art, the bearing structure of the carrier in the furnace tube is fixed and cannot be adjusted in position and angle. This fixed position carrier placement method will cause local non-uniformity of the gas field and the heat field when the reaction gas is introduced or the temperature difference is large, resulting in poor uniformity when the silicon wafer reacts at high temperature, large difference in uniformity of the carrier end and tail process, affecting the overall process yield, and causing the battery pieces made in the same batch to be uneven. SUMMARY

[0004] The present application proposes a furnace tube and a control method to solve the technical problem of poor uniformity in the reaction of the carrier position fixed in the existing inner furnace tube.

[0005] The technical scheme adopted by the present application is:

[0006] The present application proposes a furnace tube, which comprises an outer furnace tube, an inner furnace tube, a lower furnace door, a heating source and a rotating device; the inner furnace tube is installed in the outer furnace tube, the lower furnace door is installed at the lower end of the outer furnace tube and the inner furnace tube, the upper and lower ends of the containing space between the inner furnace tube and the outer furnace tube are sealed to form a sealed chamber, and the inner furnace tube and the outer furnace tube are provided with a heating source for heating the sealed chamber, and the rotating device is provided with a plurality of carrier placement positions corresponding to the sealed chamber, and the rotating device drives the carrier on the carrier placement position to adjust the position and angle in the sealed chamber when rotating.

[0007] Further, the upper and lower ends of the inner furnace tube are open, the upper end opening is provided with a connecting piece for hoisting connection, and the lower end opening is provided with a support table.

[0008] Further, the lower furnace door is provided with a central hole in the middle part, and a magnetic fluid assembly is arranged at the central hole.

[0009] Further, the rotating device comprises a boat support base provided in the sealed chamber of the furnace tube and provided with a plurality of carrier placing positions, and the boat support base is connected with the transmission shaft of the magnetic fluid sealing assembly.

[0010] Further, the plurality of carrier placing positions of the rotating device are arranged around the inner furnace tube, and are arranged in multiple layers in the height direction.

[0011] In the first embodiment, the boat support base comprises:

[0012] a rotating base arranged at the bottom of the sealed chamber;

[0013] a hanging plate arranged on the rotating base, and the hanging plate is provided with a plurality of carrier placing positions for hanging the carriers.

[0014] Further, the rotating base is provided with a heat insulation cover, the bottom of the hanging plate passes through the heat insulation cover and extends vertically upward, and a water cooling assembly is arranged in the heat insulation cover.

[0015] In the second embodiment, the boat support base comprises:

[0016] a rotating base provided with a plurality of carrier placing positions for passing or placing the carriers;

[0017] a plurality of pairs of supporting members, each pair of supporting members is arranged at the two side edges of a carrier placing position and is foldably arranged on the rotating base;

[0018] When the supporting members are switched to the folded state, the carriers can pass through the corresponding carrier placing positions of the supporting members from the bottom to the top, and when the supporting members are switched to the unfolded state, the carriers can be placed on the supporting members.

[0019] Further, the upper end of the furnace tube is provided with an upper furnace cover, the upper furnace cover is provided with a central hole in the middle part, and the central hole of the upper furnace cover can pass through the upper end of the inner furnace tube or a lifting member connected with the upper end of the inner furnace tube.

[0020] Further, the upper furnace cover is outwardly convex to form a spherical convex structure away from the outer end of the containing space, and a cavity is arranged inside the upper furnace cover around the central hole, and a plurality of reinforcing ribs are arranged between the upper and lower inner walls of the cavity.

[0021] Further, the lower furnace door is provided with a plurality of furnace openings penetrating the lower furnace door, the size and shape of the furnace openings are matched with the size and shape of the side surface of the carrier, each furnace opening is provided with a furnace cover, and the furnace cover is connected with a driving structure for driving the furnace cover to open or close relative to the furnace opening.

[0022] Preferably, the furnace cover and / or the lower furnace door are a downwardly convex spherical convex structure.

[0023] Further, the inner side of the inner furnace tube is provided with an inner heating source, and the outer side of the outer furnace tube is provided with an outer heating source, the inner heating source is divided into a plurality of independent heating sections, and the outer heating source is provided with a heat dissipation device corresponding to the periphery of the inner heating source.

[0024] Further, the heat dissipation device is a water-cooled heat dissipation device or an air-cooled heat dissipation device, and the outer furnace tube, the upper furnace cover and the lower furnace door are provided with a water-cooled joint connected to the water-cooled heat dissipation device.

[0025] The application also provides a furnace tube control method using the furnace tube, comprising the steps of:

[0026] opening the lower furnace door;

[0027] sending the carrier to the carrier placement position of the rotating device;

[0028] closing the lower furnace door to perform vacuumization and adjust the reaction environment of the sealed chamber;

[0029] controlling the rotating device to drive the carrier on the carrier placement position to adjust the position and angle in the sealed chamber.

[0030] Further, the adjustment of the reaction environment of the sealed chamber specifically comprises: turning on the heating source to heat the sealed chamber to a preset temperature, and introducing reaction gas into the sealed chamber when the sealed chamber reaches the preset temperature.

[0031] Further, the control of the rotating device to drive the carrier on the carrier placement position to adjust the position and angle in the sealed chamber specifically comprises:

[0032] driving the carrier on the carrier placement position to rotate around the inner furnace tube, and adjusting the rotation direction and the rotation time of each rotation direction according to the preset rotation logic.

[0033] Further, the opening of the lower furnace door is specifically opening a small furnace door on the lower furnace door.

[0034] Compared with the prior art, the present application has the following advantages:

[0035] 1. The carrier is placed on a rotatable boat support base. When the reaction gas is introduced into the sealed chamber or the temperature difference is different, the carrier adjusts the position and angle in the furnace to make the gas field and heat field inside the sealed chamber uniform, thereby improving the overall process yield.

[0036] 2. The inner furnace tube adopts a through design, which can be hoisted from the top or supported from the bottom and inserted upward for installation, making the installation method of the inner furnace tube diversified.

[0037] 3. The lower furnace door and the upper furnace cover are designed as outwardly convex drum surfaces, which have better pressure bearing capacity and are not easy to deform.

[0038] 4. The bottom is sealed by a magnetic fluid assembly, which can be external to the drive components of the boat support base, while ensuring that the sealed chamber through which the reaction gas passes remains sealed.

[0039] 5. The lower furnace door is provided with multiple small furnace doors, which can be opened individually when loading and unloading the carrier, avoiding the loss of heat in the furnace affecting the processing efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0040] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0041] Fig. 1 is a front view of the first embodiment of the present application;

[0042] Fig. 2 is an A-A sectional view of the first embodiment of the present application;

[0043] Fig. 3 is a first perspective view of the first embodiment of the present application;

[0044] Fig. 4 is a top view of the first embodiment of the present application;

[0045] Fig. 5 is a second perspective view of the first embodiment of the present application;

[0046] Fig. 6 is a front view of the second embodiment of the present application;

[0047] Fig. 7 is an A-A sectional view of the second embodiment of the present application;

[0048] Fig. 8 is a top view of the second embodiment of the present application;

[0049] Fig. 9 is a first perspective view of a second embodiment of the present application;

[0050] Fig. 10 is a second perspective view of the second embodiment of the present application;

[0051] Fig. 11 is a perspective view of a lower furnace door of an embodiment of the present application;

[0052] Fig. 12 is a structural view of the lower furnace door and a driving structure of an embodiment of the present application;

[0053] Fig. 13 is a perspective view of the driving structure cooperating with a furnace cover of an embodiment of the present application;

[0054] Fig. 14 is a structural view of the driving structure cooperating with the furnace cover of an embodiment of the present application;

[0055] Fig. 15 is a structural view of the driving structure cooperating with a furnace tube of an embodiment of the present application;

[0056] Fig. 16 is a front view of a first embodiment of a boat support base of the present application;

[0057] Fig. 17 is a structural view of a second embodiment of the boat support base of the present application;

[0058] Fig. 18 is a perspective view of the second embodiment of the boat support base of the present application;

[0059] Fig. 19 is a front view of a heating source and a heat dissipating device cooperating with a furnace tube of an embodiment of the present application;

[0060] Fig. 20 is a C-direction view of Fig. 19;

[0061] 1, furnace tube;

[0062] 11, outer furnace tube; 111, support flange; 112, outer sealing flange; 12, inner furnace tube; 121, inner sealing flange; 122, annular step; 123, annular heat insulation pad; 13, closed chamber;

[0063] 2, upper furnace cover;

[0064] 21, reinforcing rib; 22, lower layer plate; 23, inner layer plate; 24, outer layer plate;

[0065] 3, lower furnace door;

[0066] 31, furnace opening; 311, first protrusion; 312, annular cavity;

[0067] 32, furnace cover; 321, second protrusion; 322, mounting plate; 323, first guide column; 324, weight-reducing hole;

[0068] 33, driving structure; 331, rotating driving device; 332, coupling; 333, rotating shaft; 334, rotating plate; 335, push-pull driving device; 336, mounting area; 337, second guide column; 338, first electrical interface; 339, second electrical interface; 340, connecting plate; 341, first partition plate; 342, second partition plate; 343, third partition plate; 344, first containing space; 345, second containing space;

[0069] 41, connector; 42, hanging seat; 81, top support; 82, bottom support;

[0070] 5, boat base; 50, carrier; 59, transmission shaft; 591, gear;

[0071] 51, rotating base; 52, fixing ring; 53, hanging plate; 54, hook hole;

[0072] 501, carrier placement position; 55, carrier; 551, carrier fixed part; 552, carrier movable part; 553, rotating shaft;

[0073] 6, magnetic fluid assembly;

[0074] 61, outer ring part; 62, inner ring part;

[0075] 71, external heating source; 72, internal heating source; 73, heat dissipation device; 74, water cooling interface. DETAILED DESCRIPTION

[0076] In order to make the technical problems to be solved by the present application, technical solutions and beneficial effects more clearly understood, the present application will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application.

[0077] The principles and structures of the present application will be described in detail below in combination with the drawings and embodiments.

[0078] The existing vertical furnace generally has inner and outer double-layer furnace pipes, and the carrier bearing structure in the furnace pipe is fixed and cannot be adjusted in position and angle. This placement method can cause local non-uniformity of gas field and thermal field when the reaction gas is introduced or the temperature difference is increased, resulting in poor uniformity of the carrier end and tail in the decomposition and silicon wafer reaction under high temperature, affecting the overall process yield and causing uneven quality of the battery pieces made in the same batch.

[0079] To this end, as shown in FIGS. 1 and 2, the present application proposes a furnace pipe 1, which includes an outer furnace pipe 11, an inner furnace pipe 12, an upper furnace cover 2, a lower furnace door 3, and a rotating device;

[0080] The inner furnace tube and the outer furnace tube are in a circular tube shape, the upper and lower ends of the outer furnace tube 11 are open, the inner furnace tube 12 is installed inside, and a containing space is formed between the outer wall of the inner furnace tube 12 and the inner wall of the outer furnace tube after installation;

[0081] The upper and lower ends of the inner furnace tube 12 are open, the inner side of the inner furnace tube 12 is provided with an inner heating source 72, a connecting piece for hoisting connection is arranged at the open upper end, and a support table is arranged at the open lower end, and the support table can be installed on a support base, so that the inner furnace tube 12 can be hoisted downward from the top of the outer furnace tube 11 and installed in the outer furnace tube 11, or inserted upward from the bottom of the outer furnace tube 11 and installed in the outer furnace tube 11;

[0082] The upper furnace cover 2 and the lower furnace door 3 are respectively installed at the upper end and the lower end of the outer furnace tube 11 and the inner furnace tube 12, and are used to seal the upper end and the lower end of the containing space between the inner furnace tube 12 and the outer furnace tube 11 to form a sealed chamber 13 (a sealing assembly is also needed), so as to meet the requirement of process vacuumizing; the inner side of the inner furnace tube 12 is provided with an inner heating source 72, and the outer side of the outer furnace tube 11 is provided with an outer heating source 71, and the inner and outer heating sources can heat the sealed chamber 13 of the furnace tube 1 through the tube walls of the inner and outer furnace tubes;

[0083] The rotating device is provided with a plurality of carrier placing positions corresponding to the sealed chamber, and the rotating device drives the carriers on the carrier placing positions to adjust the positions and angles in the sealed chamber when the rotating device rotates, so that the silicon wafers on the carriers are uniformly heated.

[0084] The inner furnace tube is provided in a penetrating manner, the top end of the inner furnace tube is provided with a connecting piece, and the lower end is provided with a support table which can be installed on a support base, so that the installation of the inner furnace tube can be completed by hoisting from the top or inserting from the bottom of the vertical furnace, which is more convenient, and the carriers in the furnace tube are placed on the rotating device which can rotate, so that the carriers can adjust the positions and angles in the furnace, the gas field and the heat field in the sealed chamber are uniform when the reaction gas is introduced or the temperature difference is large, and the overall process yield is improved.

[0085] In specific embodiments, as shown in FIG. 2, the inner wall of the upper end of the inner furnace tube 12 is provided with a support flange (which can be a subsequent inner sealing flange 121), the support flange is a connecting piece, and the inner furnace tube can adopt various hoisting and fixing modes, and two modes are exemplified as follows;

[0086] The first embodiment, as shown in FIGS. 1-5, directly installs the connector 41 for hoisting on the support flange (i.e. the inner sealing flange 121) by screw connection, the connector 41 can be directly connected with the hoisting equipment, and the support portion of the upper end of the inner heating source 72 is also provided with a screw hole, the connecting leg of the connector 41 is screwed with a nut through the inner sealing flange 121, so that the inner sealing flange 121 can be hung on the connecting leg of the connector 14, and the connecting leg is also screwed with the support of the upper end of the inner heating source 72, so as to ensure that the whole inner furnace tube 12 is stably hung;

[0087] The second embodiment, as shown in FIGS. 6-10, the outer wall of the outer furnace tube 11 is provided with a support flange 111 near the upper end face, for installing the top support 81, the crossbeam of the top support 81 is suspended above the inner furnace tube 12, and the crossbeam is connected with the hanging seat 42 between the support flange (i.e. the inner sealing flange 121) of the inner furnace tube 12, so that the upper end of the inner furnace tube 12 is directly connected with the top support 81 of the furnace tube 1 through the hanging seat 42, that is, the inner furnace tube 12 is hung and supported by the flange of the furnace tube 1 itself.

[0088] Specifically, the outer wall of the outer furnace tube 11 is also provided with a support flange 111 near the lower end face, for installing the bottom support 82, which can be used to assist in fixing the peripheral components of the furnace tube, such as water cooling pipes, etc., and can also play a role in supporting the whole furnace tube.

[0089] In specific embodiments, the support table of the lower end of the inner furnace tube 12 also has various setting modes, and two specific embodiments are taken as examples;

[0090] The first embodiment, as shown in FIG. 2, the inner wall of the lower end of the inner furnace tube 12 protrudes a ring-shaped step 122, and the lower side of the ring-shaped step 122 can be used as a support table for installing or connecting a support base for stably placing the bottom of the inner furnace tube.

[0091] The second embodiment, a ring-shaped support flange (not shown in the figure) is installed on the inner wall of the inner furnace tube 12 near the lower end face, and the support base is connected through the support flange to support the bottom of the inner furnace tube.

[0092] In further embodiments of the above two embodiments, as shown in FIG. 2, the ring-shaped step or the support flange can be installed with a ring-shaped heat insulation pad 123, which can be used as a support base, and the lower end of the ring-shaped heat insulation pad 123 exceeds the lower end of the inner furnace tube 12, which can play a role in supporting and heat insulation.

[0093] Specifically, the ring-shaped heat insulation pad 123 is connected and fixed with the ring-shaped step or the support flange of the inner furnace tube 12 in a sealed connection mode, that is, the connection between the ring-shaped heat insulation pad 123 and the inner furnace tube is in a sealed state.

[0094] In a specific embodiment, as shown in Fig. 2, the central hole of the upper furnace cover 2 can pass through the upper end of the inner furnace tube 12 or pass through the hanging part (such as a connector and a hanging seat) connected to the upper end of the inner furnace tube; the central hole of the lower furnace door 3 can pass through the lower end of the inner furnace tube 12.

[0095] Specifically, as shown in Fig. 2, the structure and sealing connection of the upper furnace cover 2 are as follows:

[0096] The outer end of the upper furnace cover 2 away from the sealed chamber 13 is outwardly convex to form a spherical protrusion. Since the sealed chamber 13 needs to be vacuumized, the outwardly convex spherical protrusion of the outer end of the upper furnace cover can withstand greater pressure and prevent the internal vacuumization from being deformed by being sucked in.

[0097] The inner part of the upper furnace cover 2 is further provided with a lower layer plate 22, an outer layer plate 24 and an inner layer plate 23 which cooperate with the inner side of the outer end to form a cavity. The lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are annular and form an annular cavity on the inner side of the outer end of the upper furnace cover 2. A plurality of reinforcing ribs 21 are arranged in the annular cavity, specifically between the upper and lower inner walls of the cavity. The reinforcing ribs 21 are annular and arranged in the annular cavity in a spaced manner.

[0098] Preferably, the lower layer plate 22, the outer layer plate 24 and the inner layer plate 23 are hollow layer plates. The inner part of the hollow layer plate can be used as a water cooling channel or a water cooling assembly, such as a water cooling pipe, to avoid heat dissipation from the upper furnace cover affecting the processing.

[0099] As shown in Fig. 2, the sealing method of the top of the furnace tube is as follows:

[0100] The outer wall of the upper end of the outer furnace tube 11 is provided with an outer sealing flange 112 (the outer sealing flange is located above the support flange), and the inner wall of the inner furnace tube 12 is provided with an inner sealing flange 121 (the inner sealing flange can also be used as a connecting part, that is, it is used for sealing and connecting the upper furnace cover and also used for hanging connection); the upper end of the outer furnace tube and the inner furnace tube is covered by the upper furnace cover 2, the central hole of the upper furnace cover 2 is annular, the outer edge of the upper furnace cover 2 is buckled to the upper end of the outer furnace tube 11 and is sealingly connected with the outer sealing flange 112 of the outer furnace tube 11, and the inner edge of the upper furnace cover 2 is buckled to the upper end of the inner furnace tube 12 and is sealingly connected with the inner sealing flange 121 of the inner furnace tube 12.

[0101] It should be noted that the inner sealing flange is also used as a support flange, that is, the inner sealing flange is a connecting part. The part of the inner sealing flange close to the inner furnace tube wall is sealingly connected with the upper furnace cover, and the part of the inner sealing flange close to the center of the inner furnace tube can pass through the connecting foot of the connector or the hanging seat.

[0102] The sealing connection mode between the specific inner and outer sealing flanges and the furnace cover is a conventional sealing means in the prior art, for example, screws, gaskets, sealing rings and the like are needed, and a person skilled in the art can completely reproduce the same, and the present application will not be repeated.

[0103] Specifically, as shown in FIGS. 11 to 15, the lower furnace door structure is specifically implemented as follows:

[0104] In the first embodiment, the lower furnace door 3 is an integral whole, and a central hole is arranged in the middle part, and the whole lower furnace door is directly opened when opened.

[0105] Further, the lower furnace door 3 is protruded downward to form a drum surface, that is, a spherical protruding structure is arranged. Like the effect of the furnace cover, a greater pressure can be borne.

[0106] In the second embodiment, a central hole is arranged in the middle part of the lower furnace door 3, and a plurality of small furnace doors, that is, furnace openings 31, and furnace covers 32 corresponding to each small furnace door are arranged on the lower furnace door. The size and shape of the furnace opening 31 are matched with the size and shape of the side of the carrier, and specifically, the shape of the furnace opening 31 can be consistent with the shape of the side of the carrier, and the size is slightly larger than the size of the side of the carrier, so that the carrier can just pass through the furnace opening 31. The furnace cover 32 is connected with a driving structure 33, and the driving structure 33 is used to drive the furnace cover 32 to open or close relative to the furnace opening 31, so that the small furnace door can be opened individually, and the heat loss in the furnace tube is reduced.

[0107] In the present embodiment, the lower furnace door 3 and the furnace cover 32 are preferably spherical protruding structures protruded downward. The lower furnace door and the furnace cover can bear a greater pressure, so that the lower furnace door and the furnace cover are prevented from being sucked flat when the sealed space in the furnace tube is vacuumized, and the lower furnace door is prevented from being damaged.

[0108] In order to make the furnace cover 32 better fit the corresponding furnace opening 31, improve the sealing performance, and reduce the heat loss in the furnace tube, a first protruding block 311 is arranged on the side of the furnace opening 31 facing the furnace cover 32, the first protruding block 311 forms an annular cavity 312 around the circumference of the furnace opening 31, and the furnace opening 31 is completely located in the annular cavity 312.

[0109] The furnace cover 32 matched with the furnace opening 31 is provided with a second protruding block 321 on the side facing the furnace opening 31, and the second protruding block 321 can be matched and inserted into the annular cavity 312. In order to further improve the sealing performance between the furnace cover 132 and the corresponding furnace opening 31, a high-temperature-resistant sealing strip can be further arranged around the second protruding block 321.

[0110] Specifically, the driving structure 33 includes a rotating driving device 331, a shaft coupling 332, a rotating shaft 333, a rotating plate 334, a push-pull driving device 335 and a connecting plate 340.

[0111] The rotating driving device 331 is preferably a rotating motor, and the push-pull driving device 335 is preferably a push-pull motor.

[0112] The lower furnace door 3 is provided with a rotating driving device 331 corresponding to each of the furnace openings 31. The rotating end of the rotating driving device 331 is connected to the rotating shaft 333 through the coupling 332. The end of the rotating shaft 333 is connected to a rotatable rotating plate 334, which is located in front of the furnace opening 31. The coupling 332 can firmly connect the rotating end of the rotating driving device 331 and the rotating shaft 333, so that they rotate together and transmit torque and motion. This ensures that the relative position between the rotating end of the rotating driving device 331 and the rotating shaft 333 remains unchanged during the transmission of motion and power, achieving reliable transmission. The coupling 332 can also compensate for the deviation between the rotating end of the rotating driving device 331 and the rotating shaft 333, ensuring the continuity and stability of the transmission. In addition, the coupling 332 can also absorb shocks and vibrations, reducing the wear and failure risk of the rotating end of the rotating driving device 331 and the rotating shaft 333, and improving the stability and reliability of the driving structure 33.

[0113] The middle part of the rotating plate 334 is bolted with a push-pull driving device 335. The push-pull end of the push-pull driving device 335 penetrates the rotating plate 334 and is connected to the furnace cover 32.

[0114] Specifically, the driving structure 33 further comprises a first partition plate 341 and a second partition plate 342 arranged at one end of a connecting plate 340, and a third partition plate 343 arranged at the other end of the connecting plate 340; a first accommodating space 344 is formed between the first partition plate 341, the second partition plate 342 and the corresponding part of the connecting plate 340; a second accommodating space 345 is formed between the second partition plate 342, the third partition plate 343 and the corresponding part of the connecting plate 340; and a through hole (not shown, the same below) is arranged at the same position of the first partition plate 341, the second partition plate 342 and the third partition plate 343. The rotating driving device 331 is fixed on the side of the third partition plate 343 away from the second partition plate 342, and then the rotating end of the rotating driving device 331 is connected with the coupling 332 through the through hole of the third partition plate 343, and the coupling 332 is located in the second accommodating space 345; one end of the rotating shaft 333 is rotatably connected in the through hole of the first partition plate 341, and the other end of the rotating shaft 333 is connected with the coupling 332 through the through hole of the second partition plate 342, and the rotating plate 334 is sleeved on the rotating shaft 333 located in the first accommodating space 344. In this way, the first accommodating space 344 and the second accommodating space 345 can effectively isolate the space between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, can prevent accidental contact due to mechanical failure or improper operation, reduce the potential risk of injury, and protect the safety of workers and equipment; and the first accommodating space 344 and the second accommodating space 345 can reduce the mutual influence between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, prevent the vibration and force generated when the rotating driving device 331 works from being transmitted between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, and improve the stability of the entire driving structure 33.

[0115] The lower furnace door further comprises a control unit, the rotating driving device 331 is provided with a first electrical interface 338, the push-pull driving device 335 is provided with a second electrical interface 139, and the first electrical interface 338 and the second electrical interface 339 are both used for electrically connecting with the control unit for controlling the furnace door structure.

[0116] In this way, when the furnace cover 32 needs to be opened relative to the furnace port 31, the worker clicks start on the operation panel corresponding to the control unit, and when the control unit receives the opening signal sent by the operation panel, the push-pull driving device 335 is first started to control the furnace cover 32 to move away from the corresponding furnace port 31, and when the furnace cover 32 is not in contact with the corresponding furnace port 31, the control center closes the push-pull driving device 335, and at the same time, the rotating driving device 331 is started, at this time, the rotating driving device 331 controls the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move to the outside away from the center of the furnace cover 32, so that the corresponding furnace port 31 is completely exposed, the control unit closes the rotating driving device 331, and then the worker places the carrier with the wafer to be processed into the furnace port 31 and then places it in the furnace tube 1, and then the process is performed, that is, the specific reaction gas is introduced into the furnace tube 1, so as to realize the specific film coating, diffusion, oxidation and thin film deposition process on the wafer to be processed.

[0117] When the furnace cover 32 needs to be closed relative to the furnace port 31, the worker clicks close on the operation panel corresponding to the control unit, and when the control unit receives the closing signal sent by the operation panel, the control unit first starts the rotating driving device 331 to control the rotating plate 334 and the furnace cover 32 located on the rotating plate 334 to move to the inside away from the center of the furnace cover 32 for resetting, and then the control center closes the rotating driving device 331, and at the same time, the push-pull driving device 335 is started to control the furnace cover 32 to move close to the corresponding furnace port 31, until the second protrusion 321 of the furnace cover 32 matches the insertion into the annular cavity 312 of the corresponding furnace port 31, so that the furnace cover 32 completely covers the corresponding furnace port 31, and then the control unit closes the push-pull driving device 335.

[0118] The side of the furnace cover 32 facing the rotating plate 334 is further provided with a rectangular mounting plate 322, the push-pull end of the push-pull driving device 335 is connected with the middle part of the mounting plate 322, and the mounting plate 322 is connected with the furnace cover 32 through the first guide column 323 around. The mounting plate 322 can share part of the weight and load between the furnace cover 32 and the push-pull driving device 335, enhance the stability and reliability of the overall structure; and the mounting plate 322 can also absorb the vibration and impact force generated when the furnace cover 32 rotates, so as to reduce the damage to the furnace cover 32 and the push-pull driving device 335, and prolong the service life thereof; and the mounting plate 322 can be connected with the furnace cover 32 through the first guide column 323, so that the relative position between the furnace cover 32 and the push-pull driving device 335 can be better adjusted, and the accuracy and stability of the rotation of the furnace cover 32 can be ensured.

[0119] And the mounting plate 322 is also provided with a plurality of lightening holes 324, which can reduce the weight of the mounting plate 322 and make the rotary drive device 331 and the push-pull drive device 335 better control the movement of the furnace cover 32.

[0120] The middle part of the rotating plate 334 is provided with a rectangular mounting area 336, and the middle part of the mounting area 336 is provided with a push-pull drive device 335. The mounting area 336 is connected with the mounting plate 322 through a second guide column 337 around the mounting area 336.

[0121] The second guide column 337 in the embodiment is mounted at the four corners of the mounting area 336.

[0122] The second guide column 337 can ensure that the relative position between the mounting plate 322 and the furnace cover 32 is accurately aligned. Thus, during the rotation of the furnace cover 32, the second guide column 337 can guide the mounting plate 322 and the furnace cover 32 to move along the predetermined path, preventing them from deviating from the correct position or being offset, which helps to maintain the stability and accuracy of the rotation of the furnace cover 32.

[0123] As shown in FIGS. 2 and 16, in a specific embodiment, a magnetic fluid sealing assembly is sealingly connected to the central hole of the lower furnace door for rotation sealing of the rotating device.

[0124] Further, the rotating sealing rotating device specifically comprises a boat support base and a rotating power source. The boat support base is arranged in the closed chamber of the furnace tube and is provided with a plurality of carrier placement positions. The inner edge of the bottom of the boat support base is protruded downward and connected with the transmission shaft of the magnetic fluid sealing assembly, so that the boat support base is rotated with the rotating shaft. The rotating power source is directly connected with the transmission shaft of the magnetic fluid sealing assembly at the lower end outside the closed chamber of the furnace tube. The rotating power source is provided outside the furnace tube to avoid the influence of high temperature in the furnace on the normal operation of the rotating power source. That is, because the temperature in the furnace tube is about 500° or above, the motor as the rotating power source cannot work normally at this temperature. The external rotating power source can ensure the normal operation of the rotating device.

[0125] By arranging the rotatable boat support base 5, the position and angle of the carrier can be adjusted, so that the gas field and heat field inside the closed chamber are uniform when the reaction gas is introduced or the temperature difference is large, and the overall process yield is improved.

[0126] Specifically, as shown in FIG. 2, the magnetic fluid assembly 6 is located at the bottom of the furnace tube 1, and specifically includes an outer ring portion 61, an inner ring portion 62, and a transmission shaft 59. The top surface of the outer ring portion 61 is sealingly connected with the edge of the central hole of the lower furnace door 3, and a first sealing ring 611 can be seen in the figure. The top surface of the inner ring portion 62 is sealingly connected with the lower end surface of the annular heat insulation pad 123 at the bottom of the inner furnace tube 12, and a second sealing ring 621 can be seen in the figure. The gap between the inner ring portion 62 and the outer ring portion 61 of the magnetic fluid assembly 6 is a rotating sealing space in the form of a ring, and the transmission shaft 59 penetrates the rotating sealing space of the magnetic fluid assembly 6.

[0127] The inner side of the boat support base 5 surrounds the inner furnace tube 12 and has a plurality of carrier placement positions 501. The rotating base 51 at the bottom is in the form of a ring and penetrates the central hole of the lower furnace door. The lower side of the rotating base 51 is connected with the annular transmission shaft 59. The upper end of the transmission shaft 59 is connected with the bottom of the rotating base 51 and penetrates the rotating sealing space of the magnetic fluid assembly 6. The lower end of the transmission shaft 59 is located outside the furnace tube, and the lower end is provided with a gear or a belt wheel and is rotationally connected with the rotating power source. Therefore, the rotating power source drives the entire boat support base 5 to rotate around the inner furnace tube 12 through the transmission shaft 59.

[0128] The gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring portion 62 of the magnetic fluid assembly is provided with magnetic fluid (not shown in the figure). Specifically, a plurality of annular grooves can be provided on the inner wall surface of the transmission shaft 59 or a plurality of annular grooves can be provided on the outer wall surface of the inner ring portion of the magnetic fluid assembly to place the magnetic fluid, thereby forming a plurality of sealing rings located in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring portion 62 of the magnetic fluid assembly 6.

[0129] The outer wall surface of the rotating shaft and the inner wall surface of the outer ring portion of the magnetic fluid assembly are also provided with magnetic fluid in the same way. The inner portions of the outer ring portion 61 and the inner ring portion 62 are provided with permanent magnets, and the magnetic poles serve as the inner wall of the rotating sealing space, so that the magnetic fluid can surround the transmission shaft 59, thereby causing the magnetic fluid to form a plurality of sealing rings located in the gap between the outer wall surface of the transmission shaft and the inner wall surface of the outer ring portion of the magnetic fluid assembly.

[0130] Specifically, the outer edge of the lower furnace door 3 is connected with the step at the bottom of the outer furnace tube 11, and the inner edge of the lower furnace door 3 is sealingly connected with the outer ring portion 61 of the magnetic fluid assembly 6, that is, the annular heat insulation pad (support base) at the bottom of the inner furnace tube, the inner edge of the lower furnace door, and the transmission shaft (in the form of a tube and can also be called a transmission pipe) penetrating the magnetic fluid assembly are directly sealingly connected to seal the lower end of the closed chamber 13 in the furnace tube 1.

[0131] In a specific embodiment, the outer wall surface of the transmission shaft 59 penetrating the rotating sealing space of the magnetic fluid assembly 6 is provided with a ring of gears 591, and the rotating power source drives the internal boat support base to rotate in the form of external motor gear transmission.

[0132] In other embodiments, a belt pulley can also be sleeved on the outer wall surface of the rotating sealing space of the magnetic fluid assembly through which the transmission shaft passes, and the rotating power source drives the transmission shaft through the belt pulley.

[0133] As shown in FIG. 16, the first embodiment of the boat support base is:

[0134] The boat support base comprises a rotating base 51, a fixed ring 52, and a hanging plate 53.

[0135] The rotating base 51 is disc-shaped, and a plurality of hanging plates are vertically and spacedly arranged along the annular edge of the upper surface of the base. The fixed ring 52 is connected to the top of the hanging plate 53 to fix the top of the hanging plate 53, so that the hanging plate 53 is in a stable vertical state. The outer side of the hanging plate 53 is spacedly provided with a plurality of hanging positions (i.e., carrier placing positions) along the length direction for suspending carriers, i.e., the hanging plate 53 can hang a plurality of carriers 50 along the height direction. Specifically, the carriers can be hung at different heights of the boat support base, so that the carriers can be hung in multiple layers along the height direction of the boat support base.

[0136] An annular transmission shaft 59 is connected to a circle along the inner edge of the rotating base 51, which can support the rotating base 51 and drive the rotating base 51 to rotate around the central axis. When the rotating base 51 rotates, the carriers 50 located on the outer side of the hanging plate 53 rotate around the central axis of the base center, so that the position and angle of the carriers can be changed during the processing.

[0137] In specific embodiments, the hanging positions of the hanging plate 53 are provided with hook holes 54 for hanging carriers. The upper part of the hook hole 54 is wider, and the lower part is narrower, which facilitates the hanging of the carriers.

[0138] The carrier 50 is a vertical quartz boat, which is provided with a hook that can be downwardly clamped into the hook hole. The hook of the vertical quartz boat is clamped into the hook hole, so that the vertical quartz boat is hung in the hanging position.

[0139] Specifically, the side of each vertical quartz boat is provided with two hooks along the height direction, and each two hook holes on the hanging plate correspond to one vertical quartz boat. In specific embodiments, each hanging plate 53 can hang two vertical quartz boats along the height direction, so that the quartz boats can be arranged in two circles around the boat support base, thereby allowing multiple vertical quartz boats hung on the boat support base to be subjected to various heating forms such as layered heating, local heating, and overall heating.

[0140] Specifically, the rotating base 51 can further be provided with a heat insulation cover (not shown in the figure), the heat insulation cover is provided with a plurality of through holes for passing through the hanging plate, and the heat insulation cover is internally provided with a water cooling assembly (the specific water cooling source can be provided through a water cooling joint of the lower furnace cover). The heat insulation cover does not affect the rotation of the rotating base 51 and the hanging of the carrier, and can prevent the temperature of the rotating base from being too high to affect the stability.

[0141] As shown in FIGS. 17 and 18, the second embodiment of the boat support base is:

[0142] The boat support base comprises a rotating base 51 and a plurality of pairs of bearing members 55. The rotating base 51 has a plurality of carrier placement positions 501 for passing or placing carriers. Each pair of bearing members 55 is located at the two side edges of a carrier placement position 501 and is foldably arranged on the rotating base 51. Meanwhile, each pair of bearing members 55 has a folded state and an unfolded state. To place a carrier 50, each pair of bearing members 55 is switched to the folded state, so that the carrier 50 can pass through the carrier placement position 501 from the bottom upwards. When the bottom of the carrier 50 moves above the horizontal plane of the carrier placement position 501, each pair of bearing members 55 is switched to the unfolded state, so that the carrier 50 is placed on the bearing members. Subsequently, to take out the carrier 50, each pair of bearing members 55 is switched to the folded state, so that the carrier 50 can pass through the carrier placement position 501 and be taken out from the furnace door, thereby realizing the taking and placing of the carrier boat.

[0143] In each pair of bearing members 55, each bearing member 55 comprises a bearing fixed part 551 and a bearing movable part 552. The bearing fixed part 551 is fixedly arranged on the rotating base 51, and the bearing movable part 552 is rotatably arranged on the bearing fixed part 551. In each bearing member 55, the bearing fixed part is provided with a rotating shaft 553, and the bearing movable part 552 comprises two opposite first bearing rods and a second bearing rod connected with the two first bearing rods. The two bearing rods are sleeved on the two ends of the rotating shaft away from the second bearing rod. It can be understood that the rotating base further comprises a driving member (not shown in the figure), which is used to drive the rotating shaft to rotate. The driving member can be a motor. The rotating base further comprises a self-locking support structure, such as a motor self-locking (not shown in the figure), which is used to limit the rotation angle of the bearing movable part.

[0144] When each pair of bearing members 55 is in the folded state, the bearing movable part 552 in each bearing member 55 is arranged away from the carrier placement position 501. When each pair of bearing members 55 is in the unfolded state, the bearing movable part 552 in each bearing member 55 is arranged towards the carrier placement position and abuts against the carrier.

[0145] In the case that the rotation angle of the bearing movable part in each bearing part 55 is 90 degrees, each pair of bearing parts 55 is in the folded state, and the bearing movable part 552 in each bearing part 55 is in the vertical state. At this time, the bearing movable part 552 in each bearing part 55 does not interfere with the carrier placement position 501 of the rotating base 51, and thus does not interfere with the up-and-down movement of the carrier boat. When each pair of bearing parts is in the unfolded state, and the bearing movable part in each bearing part is in the horizontal state, the bearing movable part in each bearing part extends into the carrier placement position of the rotating base, and thus can bear the carrier boat.

[0146] In the embodiment, in any two adjacent pairs of bearing parts, one bearing fixed part belonging to one pair of bearing parts is connected to one bearing fixed part belonging to another pair of bearing parts. In actual application, in any two adjacent pairs of bearing parts, the two bearing fixed parts connected to each other can be integrally formed. This design can reduce the number of parts and save installation time.

[0147] In the embodiment, the carrier placement position 501 is a notch provided on the rotating base 51. The shape and size of the carrier placement position 501 are matched with the shape and size of the carrier boat, so that the carrier boat can smoothly pass through the carrier placement position. It can be understood that in other embodiments, the carrier placement position can be a through hole provided on the rotating base.

[0148] As shown in FIG. 18, the carriers can be stacked in the height direction, that is, a plurality of carriers can be placed on one carrier placement position. In order to avoid the carriers from falling, a vertical guard rail can be arranged along the outer edge of the rotating base. Since the inner edge of the rotating base is close to the outer wall of the inner furnace tube, the outer wall of the inner furnace tube and the guard rail can ensure that the stacked carriers do not fall.

[0149] In specific embodiments, the outer heating source and the inner heating source are an integral whole, that is, the electric heating wire is directly wound on the inner and outer furnace tubes to directly heat the closed cavity.

[0150] As shown in FIGS. 19 and 20, in a preferred embodiment, the outer heating source 71 and the inner heating source 72 are both arranged in a ring shape and are arranged along the height direction of the inner and outer furnace tubes. Specifically, the outer heating source 71 and the inner heating source 72 can be divided into a plurality of independent heating sections along the height direction of the furnace tubes, and the boat support base can also be correspondingly layered to hang and place carriers along the height direction, so as to achieve layered and corresponding heating and improve the overall heating efficiency.

[0151] Alternatively, the outer heating source and the inner heating source are divided into a plurality of independent heating sections, and the plurality of heating sections are arranged in a ring shape around the inner furnace tube and the outer furnace tube.

[0152] The inner and outer heating sources can specifically adopt resistance wire heating furnace tubes, infrared heating, electromagnetic induction heating, and the like.

[0153] In further embodiments, heat dissipating devices 73 are arranged around the periphery of the external heating source and the internal heating source to quickly and stably regulate the temperature of the reaction furnace tube. The heat dissipating devices can be independent or integrated with the heating devices. The heat dissipating devices can be manually controlled or automatically controlled by collecting temperature signals, pressure signals, etc. Any automatic control method is included in the scope of the present application. The heat dissipating devices 73 can adopt air cooling structure or water cooling structure. However, the present application is not limited to the above structures, and any mechanism with heat exchange and heat dissipation functions is included in the scope of the present application.

[0154] Specifically, in FIG. 2, the end surface positions of the external furnace tube 11 and the upper furnace cover 2 and the lower furnace door 3 are provided with water cooling joints 74 for supplying water to the heat dissipating devices arranged inside.

[0155] As shown in the drawings, the position of the bottom of the furnace tube in the bottom support is provided with a water sliding ring for supplying water to the water cooling pipeline (not shown in the drawings).

[0156] In specific embodiments, the internal and external furnace tubes are quartz tubes or silicon nitride tubes. The furnace tube proposed in the present application adopts a through design, which can be hoisted from the top or supported from the bottom and inserted upward for installation, so that the installation mode of the internal furnace tube is diversified.

[0157] The carrier in the furnace tube is placed on a rotatable boat support base, so that the carrier can be adjusted in position and angle in the furnace, so that the gas field and thermal field in the sealed chamber are uniform when the reaction gas is introduced or the temperature difference is raised, and the overall process yield is improved.

[0158] The lower furnace door and the upper furnace cover are designed to have outwardly convex drum surfaces, which have better pressure bearing capacity and are less likely to be deformed.

[0159] The bottom is sealed by a magnetic fluid assembly, which can be external to the drive components of the boat support base, while ensuring that the sealed chamber through which the reaction gas passes remains sealed.

[0160] The lower furnace door is provided with a plurality of small furnace doors, and a single small furnace door can be opened when the carrier is loaded or unloaded, so as to avoid the loss of heat in the furnace affecting the processing efficiency.

[0161] The present application also proposes a furnace tube control method using the above-mentioned furnace tube, which specifically includes the following steps:

[0162] Opening the lower furnace door;

[0163] Sending the carrier to the carrier placement position of the rotating device;

[0164] Closing the lower furnace door to perform vacuum pumping and adjusting the reaction environment of the sealed chamber;

[0165] The control rotating device drives the carrier on the carrier placement position to adjust the position and angle in the closed chamber.

[0166] By controlling the rotation of the rotating device, the carrier can rotate in the closed chamber, so that the gas field and the heat field in the closed chamber are uniform when the reaction gas is introduced or the temperature difference is raised, thereby improving the overall process yield.

[0167] Specifically, adjusting the reaction environment of the closed chamber includes: turning on the heating source to heat the closed chamber to a preset temperature, and introducing the reaction gas into the closed chamber after the closed chamber reaches the preset temperature.

[0168] The control rotating device drives the carrier on the carrier placement position to adjust the position and angle in the closed chamber.

[0169] The control rotating device drives the carrier on the carrier placement position to adjust the position and angle in the closed chamber.

[0170] Specifically, the rotation has various embodiments, which are 360° circumferential motion, clockwise or counterclockwise, reciprocating motion, clockwise rotation by a certain angle, and then counterclockwise rotation by a certain angle.

[0171] Opening the lower furnace door specifically means opening the small furnace door on the lower furnace door to avoid temperature loss in the furnace.

[0172] When the boat support base of the rotating device is the first embodiment, the carrier is sent into the closed chamber from the small furnace door by the automatic device (such as a mechanical arm or a special mechanical hand), and then hung on the boat support base, and then hung on all the carriers in turn.

[0173] When the boat support base of the rotating device is the second embodiment, the carrier is sent into the closed chamber from the small furnace door by the automatic device (such as a mechanical arm or a special mechanical hand), and the carrier is supported by the supporting block in the unfolded state when the automatic device exits the closed chamber.

[0174] It should be noted that the terms used above are only for describing specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form unless the context clearly indicates otherwise, and it should be understood that when the terms "comprise" and / or "include" are used in the specification, there is a feature, step, operation, device, component and / or combination thereof.

[0175] The foregoing is considered as illustrative only of the principles of the application. Further, since numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the application to the exact construction and operation described. Accordingly, all such variations are intended to be included within the scope of the present application as defined in the claims. The application is also not limited to the details of the foregoing embodiment.

[0176] In the description of the present application, it is to be understood that the orientation or positional relationships indicated by terms such as "front", "back", "up", "down", "left", "right", "lateral", "vertical", "horizontal", "top", "bottom", and the like are generally based on the orientation or positional relationships shown in the drawings, and are merely intended to facilitate the description of the present application and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore should not be construed as limiting the scope of protection of the present application. The orientation terms "inner", "outer" refer to the inner and outer relative to the contour of the components themselves.

[0177] For the convenience of description, spatial relative terms such as "over", "above", "upper surface", "upper", and the like can be used herein to describe the spatial positional relationship of one device or feature with respect to other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the drawings. For example, if the device in the drawings is inverted, the device described as "above" or "over" other devices or structures will be positioned "below" or "under" the other devices or structures. Thus, the exemplary term "above" can include both "above" and "below" orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0178] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.

Claims

1. A furnace tube characterized by, The application relates to a rotary furnace, which comprises an outer furnace tube, an inner furnace tube, a lower furnace door, a heating source and a rotating device; the inner furnace tube is arranged in the outer furnace tube, the lower furnace door is arranged at the lower end of the outer furnace tube and the inner furnace tube, the upper and lower ends of the containing space between the inner furnace tube and the outer furnace tube are tightly arranged to form a closed chamber, the inner furnace tube and the outer furnace tube are provided with the heating source for heating the closed chamber, the rotating device is provided with a plurality of carrier placing positions corresponding to the closed chamber, and the rotating device drives the carrier on the carrier placing position to adjust the position and angle in the closed chamber when the rotating device rotates.

2. The furnace tube of claim 1, wherein The upper and lower ends of the inner furnace tube are open, the upper end opening is provided with a connecting piece for hoisting connection, and the lower end opening is provided with a support table.

3. The furnace tube of claim 1, wherein The lower furnace door is provided with a central hole in the middle, and the lower furnace door is further provided with a magnetic fluid assembly at the central hole; the magnetic fluid assembly is respectively sealedly connected with the inner edge of the lower furnace door and the support base at the bottom of the inner furnace tube, and the magnetic fluid assembly is provided with a transmission shaft connected with the rotating device at the position between the sealed connection of the lower furnace door and the support base at the bottom of the inner furnace tube.

4. The furnace tube of claim 3 wherein, The rotating device comprises a boat support base provided with a plurality of carrier placing positions in the closed chamber of the furnace tube, and the boat support base is connected with the transmission shaft of the magnetic fluid sealing assembly; a rotating power source is arranged outside the closed chamber and connected with the transmission shaft to drive the boat support base to rotate.

5. The furnace tube of claim 1 wherein, The plurality of carrier placing positions of the rotating device are arranged around the inner furnace tube and arranged in multiple layers in the height direction.

6. The furnace tube of claim 4 wherein, The boat support base comprises: a rotating base arranged at the bottom of the closed chamber; a hanging plate arranged on the rotating base and provided with a plurality of carrier placing positions for hanging the carriers.

7. The furnace tube of claim 6 wherein, A heat insulation cover is arranged on the rotating base, the bottom of the hanging plate penetrates through the heat insulation cover and vertically extends upwards, and a water cooling assembly is arranged in the heat insulation cover.

8. The furnace tube of claim 4 wherein, The boat support base comprises: a rotating base provided with a plurality of carrier placing positions for the carriers to penetrate through or be placed on; a plurality of pairs of bearing members, each pair of bearing members is arranged at the two side edges of a carrier placing position and is foldably arranged on the rotating base; when the bearing members are switched to the folded state, the carriers can penetrate through the corresponding carrier placing positions of the bearing members from the bottom upwards; and when the bearing members are switched to the unfolded state, the carriers can be placed on the bearing members.

9. The fire tube as claimed in claim 2 wherein, An upper furnace cover is arranged at the upper end of the furnace tube, the upper furnace cover is provided with a central hole in the middle, and the central hole of the upper furnace cover can penetrate through the upper end of the inner furnace tube or penetrate through the hoisting piece connected with the upper end of the inner furnace tube.

10. The furnace tube of claim 9, wherein The outer end of the upper furnace cover away from the containing space is outwardly protruded to form a spherical protrusion, an inner cavity is arranged around the central hole of the upper furnace cover, and a plurality of reinforcing ribs are arranged in the inner cavity and connected between the upper and lower inner walls of the inner cavity.

11. The fire tube as claimed in claim 1, wherein, The lower furnace door is provided with a plurality of furnace openings penetrating through the lower furnace door, the size and shape of the furnace openings are matched with the size and shape of the side surface of the carrier, each furnace opening is provided with a furnace cover, the furnace cover is connected with a driving structure, and the driving structure is used for driving the furnace cover to open or close relative to the furnace opening.

12. The furnace tube of claim 11 wherein, The furnace cover and / or the lower furnace door is a downward convex spherical convex structure.

13. The fire tube as claimed in claim 1, wherein, The inner side of the inner furnace tube is provided with an inner heating source, the outer side of the outer furnace tube is provided with an outer heating source, the inner heating source is divided into multiple groups of independent heating sections, and the outer heating source is provided with a heat dissipation device corresponding to the periphery of the inner heating source.

14. The furnace tube of claim 13, wherein The heat dissipation device is a water-cooled heat dissipation device or an air-cooled heat dissipation device, and the outer furnace tube, the upper furnace cover and the lower furnace door are provided with water-cooled joints connected to the water-cooled heat dissipation device.

15. A method of controlling a furnace tube, characterized by, The furnace tube according to any one of claims 1 to 14, comprising the steps of: opening the lower furnace door; sending a carrier to a carrier placement position of the rotating device; closing the lower furnace door to perform vacuumization and adjust the reaction environment of the closed chamber; controlling the rotating device to adjust the position and angle of the carrier on the carrier placement position in the closed chamber.

16. The furnace tube of claim 15, wherein The adjustment of the reaction environment of the closed chamber specifically comprises: turning on the heating source to heat the closed chamber to a preset temperature, and introducing a reaction gas into the closed chamber when the closed chamber reaches the preset temperature.

17. The furnace tube of claim 15 wherein, The adjustment of the position and angle of the carrier on the carrier placement position in the closed chamber specifically comprises: driving the carrier on the carrier placement position to rotate around the inner furnace tube, and adjusting the rotation direction and the rotation time of each rotation direction according to a preset rotation logic.

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