Imaging optical unit for projection lithography

Abstract

An imaging optical unit (10) for projection lithography serves to image an object field (5), in which a reticle to be imaged is arrangeable, into an image field (11), in which a substrate to be exposed is arrangeable. The imaging optical unit (10) has a plurality of mirrors (M1 to M8) for guiding imaging light (16) along an imaging beam path from the object field (5) to the image field (11). An image-side numerical aperture of the imaging optical unit (10) is greater than 0.75. An étendue of the imaging optical unit (10) is greater than 45 mm². This results in an imaging optical unit with improved usability for a projection exposure apparatus.

Description

[0001]Imaging optical unit for projection lithographyThe content of the German patent application DE 102024203605.6 is incorporated herein byreference. The invention relates to an imaging optical unit for projection lithography. Further, the invention relates to an optical system having such an imaging optical unit, a projection exposure apparatushaving such an optical system, a method for producing a micro- or nanostructured componentusing such a projection exposure apparatus, and a micro- or nanostructured component producedby said method. Imaging optical units or projection optical units of the type set forth at the outset are known fromDE 102021205775 A1, WO 2016 / 188934 A1, from DE 102016218996 A1,WO 2018 / 010960 A1, from DE 102015209827 A1, from DE 102012212753 A1, fromUS 2010 / 0149509 A1 and from US 4,964,706.The problem addressed by the present invention is that of developing an imaging optical unit of the type set forth at the outset, in such a way that the usability thereof is improved for a projec- tion exposure apparatus. According to a first aspect, the problem is solved according to the invention by an imaging opti- cal unit having the features specified in Claim 1.According to the invention, it was recognized that an imaging optical unit with a large image-side numerical aperture leads to the possibility of high resolution for structure imaging. This is useful, especially when using the imaging optical unit as imaging EUV optical unit with use be-ing made of EUV imaging light at a wavelength in the range between 5 nm and 30 nm. The im-age-side numerical aperture might be at least 0.8 and might even be greater than 0.8. The image- side numerical aperture might be 0.82, might be 0.83, might be 0.84, and might even be 0.85. The imaging optical unit may have good imaging error correction.The étendue of the imaging optical unit might be greater than 50 mm2, might be greater than55 mm2, might be greater than 60 mm2, might be greater than 65 mm2, might be greater than70 mm2, might be greater than 75 mm2, might be greater than 80 mm2 and might be greater still.The étendue is regularly less than 100 mm2.A distance value according to Claim 2 leads to a comparatively compact imaging optical unit, and so a projection exposure apparatus having such an imaging optical unit may be accommo- dated on exactly one floor of a typical industrial hall in particular. The distance between the ob-ject plane and the image plane might be no more than 2300 mm, for example 2271 mm or2159 mm.A mirror diameter according to Claim 3 reduces requirements in relation to the production of the last mirror in the imaging beam path. The diameter of the last mirror might be no more than1200 mm, might be 1175 mm, might be 1150 mm, might be 1146 mm and might even be1140 mm.A mirror area according to Claim 4 leads accordingly to an imaging optical unit with compara-tively low production effort. The overall mirror area might be less than 3.4 m2, might be lessthan 3.3 m2, might be 3.28 m2, might be less than 3.2 m2, might be less than 3.1 m2, might be3 m2, might be less than 3 m2, might be less than 2.9 m2, might be less than 2.8 m2 and might be2.77 m2.Mirror extents according to Claims 5 and 6 have proven to be advantageous for the realization of a comparatively compact imaging optical unit. A working distance according to Claim 7 avoids installation space conflicts between the penulti- mate mirror in the imaging beam path and image field-side components of the projection expo-sure apparatus. The working distance might be 78 mm, might be greater than 80 mm, might begreater than 90 mm and might be 100 mm.A linear pupil obscuration according to Claim 8 avoids throughput losses of the imaging optical unit. The pupil obscuration might be 22%, might be 20%, might be less than 20%, might be less than 19%, might be 18.7%, might be less than 18%, might be 17.7% or might be 17.6%. A defi- nition of the linear pupil obscuration can be found in US 6,894,834 B2. At least one GI mirror according to Claim 9 enables an imaging optical unit with high overall transmission. A minimum angle of incidence on at least one GI mirror might be greater than 70°. Should the imaging optical unit have more than one GI mirror, a minimum angle of incidence might be greater than 70° on every GI mirror. The angle of incidence on at least one GI mirror oron every GI mirror might be greater than 74°. The imaging optical unit may comprise four GImirrors, six GI mirrors or else seven GI mirrors. At least two GI mirrors according to Claim 10 may be arranged directly adjacent to one anotherin an imaging beam path of the imaging optical unit. A distance between reflection surfaces ofadjacent GI mirrors might be greater than 100 mm and might for example be 130 mm.An overall transmission according to Claim 11 leads to a high imaging optical unit throughput. The overall transmission might be greater than 5.0%, might be greater than 5.5%, might be greater than 6.0%, might be greater than 6.5% and might be greater than 7.0%. The overall trans- mission is regularly less than 10%. An object image offset according to Claim 12 enables a compact imaging optical unit. The objectimage offset might be 3600 mm, might be 3500 mm, might be less than 3500 mm, might be lessthan 3400 mm, might be less than 3300 mm, might be less than 3200 mm, might be less than3100 mm and might be 3080 mm.A maximum installation space dimension of the imaging optical unit, i.e. the dimension of a cu- boid within which the reflection surfaces of the imaging optical unit can be accommodated,might be 3800 mm.A distance according to Claim 13 avoids installation space conflicts between the first mirror in the beam path of the imaging optical unit and image-side components of the projection exposureapparatus. The distance might be 600 mm. The imaging EUV optical unit may comprise an accessible entrance pupil in a beam path of im-aging light upstream of the object field at a distance in the range between 1 m and 4 m in front ofthe object field. In any case, the pose of such an entrance pupil may be virtually the same in a meridional plane and in a sagittal plane perpendicular thereto. The imaging EUV optical unit may have a pupil plane in the beam path between the object field and the image field. The pupil plane or stop plane may be located on one of the mirrors in the imaging EUV optical unit, in particular on an NI mirror.The advantages of an optical system according to Claim 14, a projection exposure apparatus ac-cording to Claim 15, a production method according to Claim 16 and a micro- or nanostructuredcomponent according to Claim 17 correspond to those which have already been explained abovewith reference to the projection optical unit according to the invention. The EUV light source of the projection exposure apparatus may be designed so as to result in aused wavelength of no more than 13.5 nm, of less than 13.5 nm, of less than 10 nm, of less than8 nm, of less than 7 nm and of 6.7 nm or 6.9 nm, for example. A used wavelength of less than6.7 nm and in particular of the order of 6 nm is also possible.In particular, the projection exposure apparatus can be used to produce a semiconductor compo- nent, for example a memory chip. Below, the invention is explained in detail on the basis of exemplary embodiments, with refer- ence being made to the drawings, in which:Fig. 1 schematically shows a meridional section of a projection exposure apparatus forEUV projection lithography;Fig. 2 also shows a meridional section of an embodiment of an imaging optical unitused as a projection lens in the projection exposure apparatus according to Fig. 1, wherein an imaging beam path for chief rays, for an upper and a lower coma ray, and optionally for in each case intermediate individual rays of a plurality of selected field points is depicted;Figs 3 to 16 show in an illustration similar to Fig. 2 further embodiments of the imaging opti-cal unit. The essential component parts of a microlithographic projection exposure apparatus 1 are de-scribed in exemplary fashion below, initially with reference to Figure 1. The description of thebasic setup of the projection exposure apparatus 1 and its components should not be construed aslimiting here. One embodiment of an illumination system 2 of the projection exposure apparatus 1 has, in addi-tion to a light or radiation source 3, an illumination optical unit 4 for illuminating an object field5 in an object plane 6. In an alternative embodiment, the light source 3 may also be provided as a module separate from the rest of the illumination system. In this case, the illumination system does not comprise the light source 3. An object which is in the form of a lithography mask or reticle 7, arranged in the object field 5 and intended to be structured is exposed. The reticle 7 is held by a reticle holder 8. The reticle holder 8 is displaceable by way of a reticle displacement drive 9, in particular in a scanning di- rection.A Cartesian xyz-coordinate system is depicted in Figure 1 for explanation purposes. The x-direc-tion runs perpendicularly to the plane of the drawing into the latter. The y-direction runs horizon-tally, and the z-direction runs vertically. The scanning direction runs in the y-direction in Fig-ure 1. The z-direction runs perpendicularly to the object plane 6.The projection exposure apparatus 1 comprises a projection optical unit or imaging optical unit 10. The projection optical unit 10 serves for imaging the object field 5 into an image field 11 in an image plane 12. The image plane 12 extends parallel to the object plane 6. In an alternative, an angle that differs from 0° between the object plane 6 and the image plane 12 is also possible. Embodiments of the imaging optical unit 10 used in the projection exposure apparatus 1 will stillbe explained below on the basis of Figures 2 ff.A structure on the reticle 7 is imaged onto a light-sensitive layer of a wafer 13 arranged in theregion of the image field 11 in the image plane 12. The wafer 13 is held by a wafer holder 14. The wafer holder 14 is displaceable by way of a wafer displacement drive 15, in particular in the y-direction. This y-displacement direction is also referred to as scanning direction when the pro- jection exposure apparatus 1 is embodied as a scanner. The displacement on the one hand of the reticle 7 by way of the reticle displacement drive 9 and on the other hand of the wafer 13 by way of the wafer displacement drive 15 may be implemented synchronously with each other. A width, i.e. the x-dimension orthogonal to the scanning direction y, of the image field 11 isidentical to the maximum x-width of a contiguously exposable region on the wafer 13. Manyprojection exposure apparatuses, especially for EUV and DUV wavelengths, use a width of ap-proximately 26 mm.A maximum length, i.e. the y-dimension parallel to the scanning direction of the contiguously exposable region on the wafer 13, of a contiguously exposable region on the wafer 13, is inde- pendent of the y-length of the image field 11, and is instead linked to the maximum y-dimension of the reticle 7 in the scanning direction and / or the maximum y-displacement distance of the reti- cle displacement drive 9. In contrast with the width of the image field 13, the length thereof thus has no effect on the max- imum dimension of the contiguously exposable region on the wafer 13. Thus, the length of the image field 13 is an internal design parameter of the projection exposure apparatus 1. In the event of otherwise identical parameters, a point on the wafer 13 is exposed for longer as the length of the image field 13 increases. Any fluctuations in the projection exposure apparatus 1 are then averaged over a longer period of time, leading to a more stable exposure process and hence increasing the good yield of the structured wafers created. An advantageous embodiment of the projection optical unit 10 thus has a very long image field 13, i.e. an image field with a large y-extent. Such a greater length of the image field 13 leads to a more challenging optics design of the projection optical unit 10. The level of challenge can be described well by the étendue, also known as the throughput. For a rectangular field of dimen- sions h and w that emits light rays at a maximum angle of α vis-à-vis the normal, the étendue is given by LLW = π h w ( sin α )². At the image plane 12, h and w respectively correspond to the length and width of the image field 13, and sin α is the image-side numerical aperture NA of the radiation (α: maximum beam angle). The étendue is a conserved quantity and accordingly yields the same value at the object plane 6 if the dimensions of the object field 5 and the value there for the object-side numerical aperture or the maximum beam angle α are instead inserted into the equation. In addition, reference in this respect is made to US 6,198,793 B1. The radiation source 3 is an EUV radiation source. The radiation source 3 emits EUV radiation 16 in particular, which is also referred to below as used radiation, illumination radiation, imaging radiation, illumination light or imaging light. In particular, the used radiation has a wavelength inthe range of between 5 nm and 30 nm. The radiation source 3 may be a plasma source, for exam-ple a laser-produced plasma (LPP) source or a gas discharge-produced plasma (GDPP) source. It may also be a synchrotron-based radiation source. The radiation source 3 may be a free electron laser (FEL). The radiation source may be a tin-based or xenon-based EUV radiation source. The illumination radiation 16 emanating from the radiation source 3 is focused by a collector 17. The collector 17 may be a collector having one or more ellipsoidal and / or hyperboloidal reflec- tion surfaces. The illumination radiation 16 may be incident on the at least one reflection surface of the collector 17 with grazing incidence (GI), i.e. at angles of incidence of greater than 45°, or with normal incidence (NI), i.e. at angles of incidence of less than 45°. The collector 17 can be structured and / or coated firstly to optimize its reflectivity for the used radiation and secondly to suppress extraneous light.Downstream of the collector 17, the illumination radiation 16 propagates through an intermediatefocus in an intermediate focal plane 18. The intermediate focal plane 18 can represent a separa- tion between a radiation source module, comprising the radiation source 3 and the collector 17,and the illumination optical unit 4.The illumination optical unit 4 comprises a first facet mirror 19. If the first facet mirror 19 is ar- ranged in a plane of the illumination optical unit 4 which is optically conjugate to the object plane 6, then this facet mirror is also referred to as a field facet mirror. The first facet mirror 19 comprises a multiplicity of individual first facets 20, which are also referred to below as field facets. Only a few of these facets are illustrated in Figure 1 in exemplary fashion. The first facets 20 may take the form of macroscopic facets, in particular as rectangular facets or as facets with an arc-shaped or part-circular edge contour. The first facets 20 may take the formof plane facets or, in an alternative to that, convexly or concavely curved facets.As is known for example from DE 102008009600 A1, the first facets 20 themselves may each also be composed of a multiplicity of individual mirrors, in particular a multiplicity of micro- mirrors. The first facet mirror 19 may in particular take the form of a microelectromechanicalsystem (MEMS system). For details, reference is made to DE 102008009600 A1.A deflection mirror US, which may take the form of a plane mirror but may also have a beam- shaping effect in an alternative, is located in the beam path of the illumination optical unit 4, be- tween the intermediate focus in the intermediate focal plane 18 and the first facet mirror 19. In the beam path of the illumination optical unit 4, a second facet mirror 21 is disposed down- stream of the first facet mirror 19. Should the second facet mirror 21 be arranged in a pupil plane of the illumination optical unit 4, it is also referred to as a pupil facet mirror. The second facet mirror 21 may also be arranged at a distance from a pupil plane of the illumination optical unit 4. In this case, the combination of the first facet mirror 19 and the second facet mirror 21 is also re-ferred to as a specular reflector. Specular reflectors are known from US 2006 / 0132747 A1, EP 1614008 B1, and US 6,573,978. The second facet mirror 21 comprises a plurality of second facets 22. In the case of a pupil facet mirror, the second facets 22 are also referred to as pupil facets. The second facets 22 may likewise be macroscopic facets, which may for example have a round, rectangular or else hexagonal boundary, or alternatively may be facets composed of micro- mirrors. In this regard, reference is also made to DE 102008009600 A1.The second facets 22 may have plane reflection surfaces or, in an alternative to that, convexly orconcavely curved reflection surfaces. The illumination optical unit 4 thus forms a doubly faceted system. This fundamental principle is also referred to as a fly's eye condenser (fly's eye integrator). It may be advantageous to arrange the second facet mirror 21 not exactly in a plane that is opti- cally conjugate to a pupil plane of the projection optical unit 10. In particular, the pupil facet mirror 22 may be arranged so as to be tilted relative to a pupil plane of the projection optical unit 10, as described for example in DE 102017220586 A1. The individual first facets 20 are imaged into the object field 5 with the aid of the second facetmirror 21 and optionally with the aid of an imaging optical assembly in the form of a transfer op-tical unit, which is not depicted in Figure 1.The transfer optical unit may have exactly one mirror, or in an alternative to that have two or more mirrors, which are arranged one behind the other in the beam path of the illumination opti- cal unit 4. The transfer optical unit may in particular comprise one or two normal-incidence mir- rors (NI mirrors) and / or one or two grazing-incidence mirrors (GI mirrors). The illumination op-tical unit 4 has exactly three mirrors in the embodiment shown in Figure 1, that is to say down-stream of the collector 17, specifically the deflection mirror US, the first facet mirror 19, and the second facet mirror 21. To the extent that the transfer optical unit downstream of the second facet mirror 21 is dispensed with, the second facet mirror 21 is the last beam shaping mirror or else indeed the last mirror for the illumination radiation 16 in the beam path upstream of the object field 5. An example of anillumination optical unit 4 without a transfer optical unit is disclosed in Figure 2 of WO2019 / 096654 A1. The imaging of the first facets 20 into the object plane 6 by means of the second facets 22 or us- ing the second facets 22 and a transfer optical unit is often only approximate imaging. In each case one of the pupil facets 22 is assigned to exactly one of the field facets 20 for the purpose of forming a respective illumination channel for illuminating the object field 5. This may in particular result in illumination according to the Köhler principle. The far field is decom- posed into a multiplicity of object fields 5 with the aid of the field facets 20. The field facets 20 create a plurality of images of the intermediate focus on the pupil facets 22 in each case assigned thereto. The field facets 20 are each imaged by an assigned pupil facet 22 onto the reticle 7 in a manner overlaid on one another in order to illuminate the object field 5. The illumination of the object field 5 is in particular as homogeneous as possible. It preferably has a uniformity error of less than 2%. Field uniformity may be achieved by overlaying different illumination channels. The illumination of the entrance pupil of the projection optical unit 10 may be defined geometri-cally by way of an arrangement of the pupil facets. The intensity distribution in the entrance pu-pil of the projection optical unit 10 may be set by selecting the illumination channels, in particu- lar the subset of the pupil facets which guide light. This intensity distribution is also referred to as illumination setting or illumination pupil filling. A likewise preferred pupil uniformity in the region of sections of an illumination pupil of the il- lumination optical unit 4 that are illuminated in a defined manner may be achieved by a redistri- bution of the illumination channels. Further aspects and details of the illumination of the object field 5 and in particular of the en- trance pupil of the projection optical unit 10 are described below. The projection optical unit 10 may have a homocentric entrance pupil in particular. The latter may be accessible. In the x-direction, the projection optical unit 10 is approximately telecentric on the object side. Insaid x-direction, an entrance pupil has a distance of more than 7 m from the object plane 6. In they-direction, the entrance pupil EP is situated in the beam path approximately 750 mm upstreamof the object field 5.In one variant, the projection optical unit has an entrance pupil EP (cf. Fig. 1) which both in thex-direction and in the y-direction is located in the range between 1500 mm and 3500 mm up-stream of the object field 5 in the beam path, and is in particular located in the range between1800 mm and 2200 mm or else between 2000 mm and 3500 mm. An arrangement plane of thisentrance pupil is depicted at EP in Figure 1. Thus, if the pupil facet mirror 21 is arranged approx-imately 2 m upstream of the object field 5 in the beam path of the illumination or imaging light16, then the pupil facet mirror 21 satisfies the positional condition of "arrangement in the region of the entrance pupil of the projection optical unit". An arrangement plane of the pupil facet mirror 21 may be imaged into the entrance pupil with the aid of further components of the illumination optical unit 4 should the entrance pupil be inac- cessible. The entrance pupil of the projection optical unit 10 regularly cannot be exactly illuminated using the pupil facet mirror 21. The aperture rays often do not intersect at a single point in the event of imaging by the projection optical unit 10 that telecentrically images the centre of the pupil facet mirror 21 onto the wafer 13. However, it is possible to find an area in which the spacing of the aperture rays, which is determined in pairs, becomes minimal. This area represents the entrance pupil or an area in real space conjugate thereto. In particular, this area has a finite curvature. It may be the case that the projection optical unit 10 has different positions of the entrance pupil for the tangential beam path and for the sagittal beam path. In this case, an imaging element, in particular an optical structural element of the transfer optical unit, should be provided between the second facet mirror 21 and the reticle 7. With the aid of this optical element, the different poses of the tangential entrance pupil and sagittal entrance pupil can be taken into account.In the arrangement of the components of the illumination optical unit 4 illustrated in Figure 1,the pupil facet mirror 21 is arranged so as to be tilted with respect to the object plane 5. The sec-ond facet mirror 21 is furthermore arranged so as to be tilted with respect to an arrangement plane defined by the first facet mirror 19. With the aid of the projection exposure apparatus 1, at least one part of the reticle 7 in the object field 5 is imaged onto a region of a light-sensitive layer on the wafer 13 in the image field 11 forthe lithographic production of a micro- or nanostructured component, in particular of a semicon-ductor component, for example of a microchip. Depending on the embodiment of the projection exposure apparatus 1 as a scanner or as a stepper, the reticle 7 and the wafer 13 are moved in a temporally synchronized manner in the y-direction continuously in scanner operation or step by step in stepper operation. Depending on the embodiment, individual components or component assemblies described above, for example the EUV collector 17, the illumination optical unit 4 or the projection opticalunit 10, may also be components of a mask inspection apparatus or a mask metrology apparatus.In principle, a mask inspection system is known from US 10,042,248 B2, DE 10220815 A1 and WO 2012 / 101269 A1. The projection optical unit or imaging optical unit of such a mask inspection apparatus or mask metrology apparatus may be embodied in such a way that there is a magnifying projection or im- aging from the object field 5 into the image field 11. The projection optical unit 10 comprises a plurality of mirrors which are numbered in order in the beam path of the projection exposure apparatus 1 in the embodiments of the projection opti- cal unit depicted hereinafter in Figs 2 ff.In the example illustrated in Figure 2, the projection optical unit 10 comprises eight mirrors M1to M8. Alternatives with four, five, six or any other number of mirrors Mi are likewise possible, as will still become apparent, in particular, from the following description of further exemplary embodiments. The projection optical unit 10 is an obscured optical unit. The last mirror M8 in the imaging beam path of the projection optical unit 10 has a passage opening 23 for the illumination radia- tion 16 guided between the mirrors M6 and M7 in the imaging beam path. The projection optical unit 10 has an image-side numerical aperture of 0.75. Depending on the embodiment of the projection optical unit 10, the image-side numerical aperture may range for example between 0.55 and 0.9, in particular between 0.7 and 0.88. Depending on the embodi- ment, the image-side numerical aperture of the projection optical unit 10 may also adopt differ- ent values. Reflection surfaces of the mirrors Mi may be in the form of free-form surfaces without an axis of rotational symmetry. In an alternative to that, the reflection surfaces of the mirrors Mi may be designed as aspherical surfaces with exactly one axis of rotational symmetry of the reflection surface shape. Just like the mirrors of the illumination optical unit 4, the mirrors Mi may havehighly reflective coatings for the illumination radiation 16. These coatings can be designed asmultilayer coatings, e.g. with alternating layers of molybdenum and silicon. A ruthenium coating is also possible, in particular for coating mirrors for grazing incidence (GI mirrors). The projection optical unit 10 has an anamorphic design. It has different imaging scales βx, βy inthe x- and y-directions. The two imaging scales βx, βy of the projection optical unit 10 are(βx, βy) = (+ / -4, + / -8). The projection optical unit 10 according to Figure 2 has an imaging scale βx of +4.0 and an imaging scale βy of -8.0. Thus, there is imaging with a reduction in size by a factor of 4 in the x-direction, and imaging with a reduction in size by a factor of 8 in the y-direc- tion. The sign convention of the imaging scale β is such that there is no intermediate image, not even in the form of a caustic, in the case of a negative imaging scale between the object field 5 and the image field 11, whereas an intermediate image, optionally in the form of a caustic, is indeed pre- sent in the case of a positive imaging scale. In the case of an alternative design of the projection optical unit 10, the latter may lead to an im- age flip in for example the x-direction, i.e. in the direction perpendicular to the scanning direc- tion y. Thus, an imaging scale βx in the x-direction is -4.00 in that case. In the scanning direction y, this embodiment of the projection optical unit may then lead to a reduction in size of 4:1, but without an image flip in this case (βy= +4.00).Other imaging scales are likewise possible. Imaging scales with the same sign and / or the samemagnitude in the x- and y-directions are also possible.The image field 11 has an x-extent of 26 mm and a y-extent of 1.0 mm. An x / y-aspect ratio ofthe image field 11 is 26. Depending on the embodiment of the projection optical unit 10, this as- pect ratio may be in the range of e.g. between 2 and 50. The image field 11 may have a partial-ring-shaped embodiment. In an alternative, the image field 11 may also have a rectangular embodiment. Further details relating to the projection optical unit 10 are described hereinafter on the basis ofFig. 2.The projection optical unit 10 has four NI mirrors (mirrors for normal incidence; normal inci- dence mirrors), namely the mirrors M1, M4, M7 and M8 in the imaging beam path of the projec- tion optical unit 10. The imaging light 16 is applied to these NI mirrors M1, M4, M7, M8 at an- gles of incidence of less than 45°. The maximum angle of incidence of the imaging light 16 inci- dent on the respective NI mirror, might be less than 40°, might be less than 35°, might be less than 30°, might be less than 25°, might be less than 20°, might be less than 15° and might also be less than 10°. The remaining mirrors M2, M3, M5 and M6 of the projection optical unit 10 are GI mirrors (mir- rors for grazing incidence, grazing incidence mirrors). For these mirrors M2, M3, M5 and M6, there are angles of incidence of the illumination light 16 on the mirrors of greater than 45° in each case. The minimum angle of incidence, which is incident on the respective GI mirror, might be greater than 50°, might be greater than 55°, might be greater than 60°, might be greater than 65°, might be greater than 70°, might be greater than 75° and might also be greater than 80°. The mirrors M2 and M3 on the one hand and M5 and M6 on the other hand in each case are pairs of GI mirrors arranged directly in succession. The GI mirrors M2, M3 add in terms of their de- flection effect. The GI mirrors M5 and M6 add in terms of their deflection effect. The deflection effects of the mirrors M2, M3 on the one hand and M5, M6 on the other hand are opposite to each other. Fewer or more than four GI mirrors may also be present, depending on the embodiment of the projection optical unit 10. Information concerning reflection off a GI mirror (grazing incidence mirror) can be found in WO 2012 / 126867 A. Further information concerning the reflectivity of NI mirrors (normal incidence mirrors) can be found in DE 10155711 A. None of the mirrors M1 to M7 has a passage opening and said mirrors are used in a reflective manner in a continuous region without gaps in each case. The last mirror M8, which specifies the image-side numerical aperture, in the imaging beam path of the projection optical unit 10 has the passage opening 23 for the imaging light 16 in the portion of the imaging beam path between the mirrors M6 and M7. The projection optical unit 10 thus is an obscured optical unit. The mirror M8 is used in a reflective manner around the passage opening 23.Figure 2 depicts the calculated reflection surfaces of the mirrors M1 to M8. The used reflectionsurfaces of the mirrors M1 to M8 are carried in a known manner by mirror bodies (not shown). The actual used mirror surfaces of the mirrors M1 to M8 comprise the reflection surfaces actu- ally used for reflecting the imaging light 16 and a polishing overrun edge. The projection optical unit 10 has an image-side numerical aperture of 0.75. The object plane 6 and the image plane 12 extend parallel to one another to a good approxima- tion.A distance between the object plane 6 and the image plane 12 is 2300 mm in the projection opti-cal unit 10. The last mirror M8 in the imaging beam path of the projection optical unit 10 has a diameter of1160 mm.An object-image shift dOIS is 1650 mm. The object-image shift dOIS is measured between a cen-tral field point of the object field 5 and a central field point of the image field 11 in a manner per- pendicular to a normal N of the object plane 6. The object-image shift dOISis smaller than the distance between the object plane 6 and the image plane 12. In the y-direction, an installation space, in which the projection optical unit 10 can be accommo-dated with all mirrors M1 to M8, has a length of 2934 mm.A maximum optical mirror diameter of the mirrors M1 to M8 is 1170 mm.An optically used overall mirror area of all mirrors M1 to M8 is 2.20 m2.A pupil obscuration present on account of the passage opening 23 and shaded by an obscurationstop of the projection optical unit 10 is 25.5%. This obscuration value represents a linear pupilobscuration, i.e. a ratio of the sine of a minimum angle of incidence of the imaging light 16 at the image field 11 to the image-side numerical aperture. This obscuration definition is in accordance with that from US 6,894,834 B2. A minimum angle of incidence of the imaging light 16 on the GI mirrors M2, M3, M5, M6 is 67.4°.A y-dimension of the image field 11 is 1.0 mm.For the image field, the projection optical unit 10 has an RMS value for the scan-integratedwavefront aberration of 8.75 mλ. The mean wavefront aberration RMS (scanned wavefront devi-ation) is a measure for the imaging quality of the projection optical unit 10. The mirrors M1 to M8 carry a coating that optimizes the reflectivity of the mirrors M1 to M8 for the imaging light 16. This may be a ruthenium coating, a molybdenum coating or a molybdenum coating with an uppermost layer of ruthenium. In the mirrors M2, M3, M5 and M6 for grazing incidence, use can be made of a coating with e.g. one ply of molybdenum or ruthenium. These highly reflecting layers, in particular of the mirrors M1, M4, M7 and M8 for normal incidence, may be embodied as multi-ply layers, wherein successive layers may be manufactured from dif- ferent materials. Alternating material layers may also be used. A typical multi-ply layer might have fifty bilayers in each case made of a layer of molybdenum and a layer of silicon. A multi- ply layer may be provided with an additional capping layer, for example made of ruthenium. In the projection optical unit 10, a first intermediate image plane is present in the beam path be- tween the mirrors M2 and M3. A further intermediate image plane is present in the beam path between the mirrors M5 and M6. There is no intermediate image plane in the region of the pas- sage opening 23 in the case of the projection optical unit 10. The number of intermediate image planes differs from the number of intermediate images in the meridional plane according to Fig. 2 from the number of intermediate images in the plane perpendicular thereto. Such projection op- tical units with different numbers of intermediate images in mutually perpendicular planes are known from WO 2016 / 166080 A1 and DE 102015226531 A1 as a matter of principle. The mirrors M1 to M8 are embodied as free-form surfaces which cannot be described by a rota- tionally symmetric function. Other embodiments of the projection optical unit 10, in which at least one of the mirrors M1 to M8 is embodied as a rotationally symmetric asphere, are also pos- sible. It is also possible for all mirrors M1 to M8 to be embodied as such aspheres. A free-form surface can be described by the following free-form surface equation (Equation 1): ^ ... (1)The following applies to the parameters of this Equation (1):Z is the sagittal height of the free-form surface at the point x, y, where x2+ y2= r2. Here, r is the distance from the reference axis of the free-form surface equation (x = 0; y = 0). In the free-form surface Equation (1), C1, C2, C3… denote the coefficients of the free-form sur- face series expansion in powers of x and y. In the case of a conical base area, cx, cy is a constant corresponding to the vertex curvature of a corresponding asphere. Thus, cx = 1 / Rx and cy = 1 / Ry applies. kx and ky each correspond to a con-ical constant of a corresponding asphere. Thus, Equation (1) describes a biconical free-form sur-face. An alternative possible free-form surface may be produced from a rotationally symmetric refer- ence surface. Such free-form surfaces for reflection surfaces of the mirrors of projection optical units of microlithographic projection exposure apparatuses are known fromUS 2007-0058269 A1.In an alternative to that, free-form surfaces may also be described with the aid of two-dimen- sional spline surfaces. Examples for this are Bezier curves or non-uniform rational basis splines (NURBS). For example, two-dimensional spline surfaces may be described by a grid of points in an xy-plane and associated z-values, or by these points and gradients associated therewith. De- pending on the respective type of the spline surface, the complete surface is obtained by interpo- lation between the grid points using e.g. polynomials or functions which have specific properties in respect of the continuity and the differentiability thereof. Examples for this are analytical functions. The optical design data of the reflection surfaces of the mirrors M1 to M8 (= M01 to M08) of the projection optical unit 10 can be gathered from the following tables. The first of these tables provides vertex point radii (Radiusx = Rx, Radiusy = Ry) and refractive power values (Powerx, Powery) for the optical surfaces of the optical components. Negative val- ues of radius mean curves which are concave toward the incident illumination light 16 in the sec- tion of the respective surface with the considered plane (xz, yz), which is spanned by a surfacenormal at the vertex point with the respective direction of curvature (x, y). The two radii Radi-usx, Radiusy may explicitly have different signs. The vertices at each optical surface are defined as points of incidence of a guide ray which trav- els from an object field centre to the image field 11 along a plane of symmetry x = 0, i.e. the plane of the drawing of Fig.2 (meridional plane). The refractive powers Powerx (Px), Powery (Py) at the vertices are defined as: Here, AOI denotes an angle of incidence of the guide ray with respect to the surface normal. The second table specifies the absolute value along which the respective mirror, proceeding from a reference surface, was decentred (Dy) in the y-direction, displaced (Dz) in the z-direction and tilted (αx, αy,αz). This corresponds to a parallel displacement and a tilt in the case of the free- form surface design method. Here, a displacement is carried out in mm in the y-direction and inthe z-direction, and tilting is carried out about the x-axis, about the y-axis and about the z-axis.In this case, the angle of rotation is specified in degrees. Decentring is carried out first, followed by tilting. The reference surface during decentring is in each case the first surface of the speci- fied optical design data. Decentring in the y-direction and in the z-direction is also specified for the object field 5 (reticle). In addition to values assigned to the individual mirrors M1 to M8, thistable also tabulates the object plane (reticle) as a first surface, the image plane (wafer) as an ulti-mate surface and a stop surface (denoted "stop") as an arrangement plane for an aperture or ob- scuration stop. The third table (Tables 3a to 3c) specifies the free-form surface coefficients Cn, respectively as- signed to the polynomials xk, yl, for the mirrors M1 to M8. Coefficients Cn not tabulated in the table each have the value of 0. The projection optical unit 10 has a stop in the imaging beam path of the projection optical unit 10 between the object field 5 and the image field 11. The stop is arranged in the region of a pupil plane of the projection optical unit 10. Like in the further exemplary embodiments below, the pupil plane of the projection optical unit 10 is situated between the penultimate mirror in the light path from the object field 5 to the im- age field 13 and the last mirror. In the exemplary embodiment according to Fig.2, the pupil plane is thus situated between the mirrors M7 and M8. A possible arrangement plane of the stop is illustrated both in Figure 2 and in the subsequent exemplary embodiments by a division line that extends parallel to the y-axis and crosses the chief ray of the central field point. Both in the exemplary embodiment according to Fig.2 and in the subsequent exemplary embodi- ments, the pupil plane of the projection optical unit 10 is situated in a region that is traversed multiple times. In the exemplary embodiment according to Fig.2, beams from the mirror M7 to the mirror M8 should during intended use be delimited in controlled fashion by the stop arranged in the region of the pupil plane. However, beams from the mirror M6 to the mirror M7, which should not be influenced by the stop during intended use, also pass through this region. These two requirements can be achieved by partial stops in sections, as described in DE 102015209 827 B4, for example. The stop serves both as an aperture stop for specifying an outer pupil edge and as an obscuration stop for specifying an inner pupil edge in the pupil plane of the projection optical unit 10. The fourth table specifies a boundary of the stop as a polygonal line in local coordinates xy. As described above, the stop is decentred and tilted. In this table, the coordinates are specified intwo columns. The first column (consisting of an x- and a y-coordinate) contains the coordinatesof the corners 1 to M / 2 of the polygon, and the second column contains the coordinates of thecorners N / 2+1 to N. Each row therefore contains four numbers, specifically xi, yi, xi+N / 2, yi+N / 2. Radii of the surfaces Radiusx [mm] Powerx [1 / mm] Radiusy [mm] Powery [1 / mm]M01 -4006.68038566 0.00049917 -1856.17549360 0.00107748M02 3618.16673054 -0.0000804712360.96046183 -0.00002356M03 -11219.57642763 0.00004700 -3348.49641474 0.00015748M04 -2928.24044534 0.00067213 -2154.83713784 0.00091336M05 -4577.72029877 0.00013923 -5018.67655742 0.00012700M06 -23057.99672533 0.0000243619160.58475887 -0.00002932M07 47040.46039551 -0.00004252 570.68814538 -0.00350454M08 -927.17467070 0.00215709 -773.73063386 0.00258488Table 1 for Fig. 2Decentring (location, angle) the surfaces Dx [mm] Dy [mm] Dz [mm]Reticle 0.000000000 0.000000000 0.000000000M01 0.000000000 -195.8148895492033.615382170M02 0.000000000 -670.373109961 809.918050357M03 0.000000000 -1341.532615292 319.107178270M04 0.000000000 -2920.111915340 346.331447688M05 0.000000000 -2214.835535687 595.970716857M06 0.000000000 -1948.835967540 913.731595688M07 -0.000000000 -1412.0862733062166.623949948Stop -0.000000000 -1425.3317810402135.706008967M08 0.000000000 -1649.9482717731611.401501851Wafer -0.000000000 -1649.9314994022300.142798936αx [°] αy [°] αz [°]Reticle 0.000000000 0.000000000 0.000000000M01 -7.848317186 0.000000000 0.000000000M02 52.490460591180.000000000 0.000000000M03 197.594763596 0.000000000 0.000000000M04 -80.748063893180.000000000 0.000000000M05 214.779497097 0.000000000 0.000000000M06 58.438195838180.000000000 0.000000000M07 -23.190701940 -0.000000000 -0.000000000Stop 0.920445862180.000000000 -0.000000000M08 -11.596048609180.000000000 -0.000000000Wafer -0.001395279 -0.000000000 0.000000000Table 2 for Fig. 2Free-form coefficients of the surfacesCoefficient Formula M01 M02 M03C7 x2 y 1.0653346508e-08 1.4461716190e-07 -1.1809180613e-07C9 y3 8.3689536427e-09 -5.1915916938e-07 4.8607313572e-08C10 x4 9.0960350955e-12 2.9902673183e-11 -5.3104938816e-11C12 x2 y2 4.2229152526e-12 -2.2103207766e-10 6.7773967044e-11C14 y4 -4.5670895684e-11 1.5779870279e-09 1.0274235356e-11C16 x4 y 1.5383904528e-14 1.2520206910e-13 2.3277989952e-14C18 x2 y3 3.3962274594e-14 1.2859911540e-13 -2.6872924395e-14C20 y5 -1.1011725767e-13 -5.0061062614e-12 -4.9868491435e-14C21 x6 9.7497329881e-18 3.0058664855e-17 -4.2117563196e-18C23 x4 y2 5.5032363315e-18 2.8265265435e-16 7.8699410921e-18C25 x2 y4 8.8002876136e-17 -6.0708065840e-16 -2.2383474271e-17C27 y6 -1.9792825961e-16 2.0141312299e-14 2.3246512666e-17C29 x6 y -1.3252955939e-21 9.1673193122e-20 3.0299968990e-20C31 x4 y3 1.7032221659e-20 -2.0176840978e-19 -1.5801943165e-20C33 x2 y5 -1.5062534986e-22 3.9936037539e-18 -2.4240344076e-19C35 y7 -9.0451625967e-19 -1.1465533212e-16 -1.0823445032e-18C36 x8 -6.5511100512e-25 -6.5050217596e-22 -1.3418607736e-24C38 x6 y2 5.5192917020e-23 1.2537921452e-21 -2.8925625216e-23C40 x4 y4 3.6867444261e-22 1.1535745562e-20 -1.5516483392e-22C42 x2 y6 7.0463939401e-22 3.4479758791e-20 1.7763153523e-22C44 y8 -6.0072553834e-21 5.2295515287e-19 3.7817026852e-21C46 x8 y -3.3078414482e-26 4.2146114767e-24 -8.9229775082e-26C48 x6 y3 -1.1105289730e-24 -7.3282404640e-24 2.3654903034e-25C50 x4 y5 -2.1001231166e-24 -4.9073144135e-23 2.5120514892e-24C52 x2 y7 1.2652013766e-23 2.0212134498e-22 2.0334825818e-23C54 y9 -1.7028159875e-23 7.1436864727e-21 4.6059184826e-23C55 x10 -1.1447451947e-28 3.2696666193e-27 6.4938321415e-28C57 x8 y2 -9.3819960427e-28 -8.1817384627e-27 2.1024623565e-28C59 x6 y4 -5.2205299688e-27 -5.9959152694e-26 2.4505594060e-27C61 x4 y6 -2.8772860651e-26 -1.5348263493e-24 1.1645869064e-26C63 x2 y8 6.9928643467e-26 -1.0224716813e-23 -9.2636084413e-26C65 y10 1.3070289284e-25 -8.6307205387e-23 -1.8163215698e-25C67 x10 y 6.0150973109e-31 9.8507572943e-30 -1.6339268994e-30C69 x8 y3 2.3498091459e-29 3.4343336070e-28 -4.7643515233e-30C71 x6 y5 1.3946537420e-28 1.9675622000e-27 -2.7322820956e-29C73 x4 y7 1.1724698585e-28 1.5061545167e-26 -2.9779300789e-28C75 x2 y9 -4.3538761247e-28 7.4826088128e-26 -1.6524006261e-27C77 y11 8.0112347611e-28 -3.3878847281e-25 -3.4925199902e-27C78 x12 1.6699611618e-33 1.2413276392e-32 -3.7448016123e-33C80 x10 y2 1.8459795980e-32 1.4690766573e-31 -1.2948404572e-33C82 x8 y4 8.2959685816e-32 9.1825568647e-31 -4.7702231116e-32C84 x6 y6 5.5137216781e-31 2.3731279421e-29 -4.4002421522e-31C86 x4 y8 1.6988708211e-30 2.4495273894e-28 -1.0686960606e-30C88 x2 y10 -4.8759407919e-30 6.0486974398e-28 5.1654298469e-30C90 y12 -5.1361410770e-30 9.0573525984e-27 9.4349203242e-30C92 x12 y -9.2162798520e-36 -3.9809339286e-34 1.6944993107e-35C94 x10 y3 -2.8043586182e-34 -5.3606286726e-33 5.8985138820e-35C96 x8 y5 -2.4886755154e-33 -4.4394893003e-32 2.1305062773e-34C98 x6 y7 -9.0044089527e-33 -2.0306519651e-31 1.7161539480e-33C100 x4 y9 -1.7484051684e-33 -3.2983873869e-30 1.7502864223e-32C102 x2 y11 1.8082260968e-32 -1.2245913695e-29 1.1369110826e-31C104 y13 -5.5516530550e-32 -2.6268472670e-29 1.6759180877e-31C105 x14 -1.3383186771e-38 -1.2133484208e-38 7.0795384965e-39C107 x12 y2 -2.1070060344e-37 -1.7644588958e-36 2.3510542095e-38C109 x10 y4 -1.1378511736e-36 -1.1364550348e-35 6.1222686783e-37C111 x8 y6 -5.5608051599e-36 -1.9704038574e-34 4.8967119502e-36C113 x6 y8 -3.1697169485e-35 -3.3546338188e-33 3.3631774094e-35C115 x4 y10 -4.9460265405e-35 -7.2874182071e-33 8.6158550940e-35C117 x2 y12 2.8967033984e-34 2.6563293748e-32 -9.3608616954e-35C119 y14 -3.5884593290e-35 -3.3540396614e-31 -1.4617705163e-34C121 x14 y 7.3315208272e-41 3.2274237130e-39 -6.7416810308e-41C123 x12 y3 1.9049619977e-39 5.3025296416e-38 -4.5906183161e-40C125 x10 y5 2.1445652161e-38 5.5223377731e-37 -1.5609316047e-39C127 x8 y7 1.2067622105e-37 3.0236751385e-36 -2.0042434452e-39C129 x6 y9 2.9687316746e-37 1.8091767266e-35 2.2067564225e-38C131 x4 y11 -1.7767920928e-37 3.0152057991e-34 -5.9026040368e-37C133 x2 y13 1.8330111563e-39 6.9830419269e-34 -4.3634939406e-36C135 y15 1.2764508327e-36 3.2618045683e-33 -4.5170862415e-36C136 x16 6.5543866274e-44 -8.8824123133e-43 -3.3378058692e-46C138 x14 y2 1.4031176344e-42 1.8564307268e-41 -2.1766390266e-43C140 x12 y4 1.0136095953e-41 1.4526391026e-40 -4.4839947481e-42C142 x10 y6 4.4195948139e-41 1.6799001666e-39 -3.5265561431e-41C144 x8 y8 2.3821595583e-40 1.9442874760e-38 -1.8892564816e-40C146 x6 y10 9.0241520708e-40 2.0021200870e-37 -1.3492507584e-39C148 x4 y12 1.0734453169e-40 -1.3057955527e-36 -3.2418662006e-39C150 x2 y14 -7.6539325729e-39 -5.3400516709e-36 -3.2017434143e-39C152 y16 4.6229922758e-39 -1.2253536019e-35 -3.0342552965e-39C154 x16 y -2.8092739635e-46 -1.1988614950e-44 1.3109864534e-46C156 x14 y3 -6.9237707704e-45 -2.7275983701e-43 1.8772051980e-45C158 x12 y5 -9.3297637522e-44 -3.3547854125e-42 7.3092396128e-45C160 x10 y7 -6.7212583658e-43 -2.6293784473e-41 -1.7825104861e-44C162 x8 y9 -2.6907944141e-42 -8.7921467062e-41 -3.8628317011e-43C164 x6 y11 -4.9491462853e-42 -1.1411298482e-39 -5.6239775556e-42C166 x4 y13 8.1828381843e-42 -6.0664235437e-39 1.2533199038e-41C168 x2 y15 -1.4444130729e-41 5.0486671950e-39 8.1179232184e-41C170 y17 -5.5617713217e-42 2.0509484730e-38 5.9580756555e-41C171 x18 -1.7923082169e-49 4.9696525193e-48 -1.5138455231e-50C173 x16 y2 -4.9870001466e-48 -1.0300623847e-46 8.4449993048e-49C175 x14 y4 -4.7290087934e-47 -1.0050348286e-45 1.6650242719e-47C177 x12 y6 -2.4794289271e-46 -1.0801236820e-44 1.4208393483e-46C179 x10 y8 -1.0450097720e-45 -9.1491154122e-44 5.8913128408e-46C181 x8 y10 -4.9098868371e-45 -8.3149988344e-43 2.7728553464e-45C183 x6 y12 -1.1992074465e-44 -3.4368184980e-42 1.5277416642e-44C185 x4 y14 2.5712778219e-44 7.4150651543e-41 6.0502538526e-44C187 x2 y16 7.4015484262e-44 6.8415890307e-41 1.4743837433e-43C189 y18 -6.5030612936e-44 -2.9410932492e-43 1.0844521379e-43C191 x18 y 4.1587282680e-52 2.0196469070e-50 -1.0034453891e-52C193 x16 y3 1.0362391528e-50 6.2210292864e-49 -3.0170639714e-51C195 x14 y5 1.6383660231e-49 8.6881992987e-48 -1.4500172505e-50C197 x12 y7 1.3826543122e-48 8.1963275814e-47 7.7535530629e-50C199 x10 y9 7.5258372129e-48 4.4366324123e-46 9.6576637540e-49C201 x8 y11 2.1634417067e-47 1.0169650227e-45 1.4024282434e-47C203 x6 y13 3.5548815852e-47 2.8068921810e-44 1.4790726622e-46C205 x4 y15 -1.1242609740e-46 -2.5065803394e-43 -1.7474035830e-46C207 x2 y17 2.5380472575e-46 -2.0555699957e-43 -4.8784753359e-46C209 y19 -1.3208848964e-46 -6.3460395662e-44 -2.4987538635e-46C210 x20 2.0824710975e-55 -8.0332735130e-54 1.2768925709e-56C212 x18 y2 7.2749220733e-54 2.4633949757e-52 -1.1853012787e-54C214 x16 y4 8.6955734686e-53 3.2129468152e-51 -2.4954214163e-53C216 x14 y6 5.7852342994e-52 3.5109905440e-50 -2.1855037888e-52C218 x12 y8 2.5855075103e-51 2.7537359142e-49 -8.3385986869e-52C220 x10 y10 1.0480306790e-50 1.4419082136e-48 -9.8258364942e-52C222 x8 y12 3.3883199838e-50 1.2254236066e-47 1.9732855800e-50C224 x6 y14 6.8282656224e-50 -3.7235098739e-47 2.6272610901e-49C226 x4 y16 -4.4761262658e-49 2.9295809908e-46 -7.1371885115e-49C228 x2 y18 1.5554922107e-49 8.1767399435e-47 -1.1506309074e-48C230 y20 -7.5847276723e-50 1.0294146950e-46 -6.1544699543e-49Table 3a for Fig. 2Coefficient Formula M04 M05 M06C7 x2 y 7.6859845336e-09 6.5896290795e-08 -5.3388914957e-08C9 y3 -4.1648300149e-07 1.0624129168e-07 -1.2523689114e-08C10 x4 3.9630957493e-14 2.9206745991e-11 1.6729376128e-10C12 x2 y2 -7.2483941669e-12 -5.4492380456e-11 -1.5903763335e-11C14 y4 -1.1137661386e-09 -1.6106352567e-10 -1.2682239053e-11C16 x4 y -3.0052018022e-15 -5.2241526899e-14 5.0615630807e-13C18 x2 y3 -5.1104507064e-13 -8.4538135717e-14 1.3369335133e-13C20 y5 -3.3456471054e-12 7.1032904880e-13 2.0181524891e-13C21 x6 2.2006848670e-19 -3.2854306087e-18 -5.0340170979e-16C23 x4 y2 -9.7653685836e-17 8.2860768637e-17 1.5571966210e-15C25 x2 y4 1.6646710128e-17 3.5400058054e-16 -1.7185228959e-15C27 y6 6.2895586347e-14 -2.7642442493e-15 7.7038311663e-16C29 x6 y -5.2257442562e-21 1.4873487765e-20 -4.5403683395e-18C31 x4 y3 -7.1304794768e-20 4.3086901965e-19 8.6966309794e-18C33 x2 y5 1.4618021953e-17 -2.2693961680e-18 -2.4529358276e-18C35 y7 -7.1819331360e-16 9.5347001704e-18 -3.2380214855e-17C36 x8 -3.5932654787e-26 -1.0778529585e-22 1.1101138417e-20C38 x6 y2 -8.1882623492e-23 1.0206915357e-22 5.0350882674e-21C40 x4 y4 -3.9973174511e-22 -1.2593907271e-21 6.7368301946e-20C42 x2 y6 -5.4246050717e-19 2.4365347307e-20 1.9821468104e-19C44 y8 -1.1028936764e-17 -6.1855116403e-21 2.0661970083e-19C46 x8 y -2.7713789281e-26 8.4665954431e-25 1.7768668413e-22 C115 x4 y10 -5.3254762890e-31 -7.1091532751e-34 3.5159230524e-32C117 x2 y12 5.9410853602e-29 -4.8191525921e-33 2.3427230871e-32C119 y14 2.1490711146e-27 -1.2271264773e-31 7.3575540218e-33C121 x14 y 2.1453006723e-42 -7.5856810876e-39 -5.4069323419e-35C123 x12 y3 2.3526576450e-40 5.8247152723e-38 4.5166091093e-34C125 x10 y5 -4.9945373539e-38 1.8005566464e-37 2.9045681704e-33C127 x8 y7 -2.7176352876e-36 9.7416370820e-37 8.1762300007e-33C129 x6 y9 3.7126138589e-34 1.2822271892e-35 7.6450194196e-33C131 x4 y11 2.9306290183e-32 1.1758126843e-34 6.3261927297e-34C133 x2 y13 4.8709524529e-31 2.9784291175e-34 -2.4614143114e-34C135 y15 1.3861413027e-29 -1.4822807161e-33 1.0613954644e-35C136 x16 1.1121022817e-46 -1.9665584144e-44 -1.6422755355e-38C138 x14 y2 -3.4241576294e-45 7.6029523103e-41 -5.0896736622e-37C140 x12 y4 8.2080752704e-42 9.1647687140e-40 3.3661664496e-36C142 x10 y6 3.2315929844e-39 7.1012516149e-39 1.5546391602e-35C144 x8 y8 4.4725796816e-37 1.9515712400e-38 1.5972835097e-35C146 x6 y10 2.2938507028e-35 7.0076600484e-39 -1.8482697063e-35C148 x4 y12 3.0908840698e-34 -2.7731758988e-37 -7.3975745864e-37C150 x2 y14 -5.4572269864e-33 -4.9076874314e-37 1.4982885666e-36C152 y16 -2.9611290259e-31 8.5101721615e-36 -8.7427845015e-38C154 x16 y -3.3219768914e-48 1.2170261338e-44 8.5707016242e-40C156 x14 y3 -1.0931940439e-45 -7.6074698927e-43 -1.1265275124e-38C158 x12 y5 2.4878228563e-43 -5.8926847962e-42 -8.5877947813e-38C160 x10 y7 5.8454349256e-41 -3.5631538189e-41 -3.4036182140e-37C162 x8 y9 4.7054324902e-39 -1.0139165721e-40 -5.0181457417e-37C164 x6 y11 1.1630827362e-37 -9.0429592281e-40 -1.8002325184e-37C166 x4 y13 -9.3866369101e-37 -3.6058982113e-39 -2.3991348626e-38C168 x2 y15 -6.9139082111e-35 -6.3574814308e-39 -5.6724526105e-39 C179 x10 y8 -3.8865742251e-43 -8.9486455243e-44 -3.4982513811e-40C181 x8 y10 -4.2392746655e-41 -1.1358926163e-43 1.4740113018e-39C183 x6 y12 -1.9241772675e-39 2.1669093839e-42 1.2269576924e-39C185 x4 y14 -3.0227573055e-38 1.8124779743e-41 1.3156966570e-40C187 x2 y16 1.1605433093e-37 8.7475098889e-42 1.2886820459e-41C189 y18 9.5704803271e-36 -3.3279671281e-40 2.5877448542e-43C191 x18 y 2.3765772963e-54 3.0756592566e-50 -5.3052979230e-45C193 x16 y3 2.0244979987e-51 2.8929374001e-48 1.0884225171e-43C195 x14 y5 -1.1571324074e-49 3.2305156757e-47 9.8199623684e-43C197 x12 y7 -8.4960270633e-47 2.4604739270e-46 5.3702667935e-42C199 x10 y9 -1.3078414926e-44 9.7911978844e-46 1.1874880882e-41C201 x8 y11 -8.6347408838e-43 2.8313331846e-45 1.4234132254e-42C203 x6 y13 -2.3367181824e-41 1.6765055235e-44 -2.8960461830e-42C205 x4 y15 -1.7024656426e-40 1.4099330170e-44 -2.7521747765e-43C207 x2 y17 3.4816249592e-39 3.1926969189e-45 -1.6005849804e-44C209 y19 3.1894297242e-37 -1.0773983299e-42 -7.9654877831e-46C210 x20 1.9853139623e-58 8.2497686422e-54 -3.8468765769e-48C212 x18 y2 6.7137836740e-56 -4.3214188061e-52 -3.3844273324e-47C214 x16 y4 1.9879934108e-53 -8.5336342265e-51 -1.2427260681e-46C216 x14 y6 -2.7762860778e-51 -7.9398046528e-50 -6.2945458787e-45C218 x12 y8 -5.3432670810e-49 -5.2413967948e-49 -6.5226946375e-45C220 x10 y10 -7.3309310973e-47 -1.7609238916e-48 -2.5908540015e-44C222 x8 y12 -3.2721739846e-45 -9.6795463127e-48 -7.2840005177e-45C224 x6 y14 -8.1902844841e-44 -4.5461561722e-47 2.5083512326e-45C226 x4 y16 -1.4360294538e-43 -2.4320659512e-46 2.1183410533e-46C228 x2 y18 6.6200536275e-42 5.4104079133e-46 8.3284657671e-48C230 y20 1.3004132104e-39 5.2571755413e-45 6.0950783830e-49Table 3b for Fig. 2Coefficient Formula M07 M08C7 x2 y 9.0760812980e-07 -1.9953220712e-08C9 y3 -5.0341194974e-07 2.7580060282e-08C10 x4 5.0678258772e-10 -1.7076205061e-11C12 x2 y2 1.5629791664e-09 -9.2873082744e-11C14 y4 4.2159891958e-09 -3.5842336781e-11C16 x4 y 1.7287652026e-12 -5.4897060825e-14C18 x2 y3 7.8757060986e-12 -9.6255063710e-15C20 y5 -9.3802938359e-12 2.7394429046e-14C21 x6 7.9980434295e-16 -4.4862993477e-17C23 x4 y2 9.8657359349e-15 -1.9563265014e-16C25 x2 y4 4.2517330988e-15 -2.4300415087e-16C27 y6 5.0378798893e-14 -7.0434584471e-17C29 x6 y 6.6551774106e-18 -5.9496990499e-20C31 x4 y3 2.7083378432e-17 -9.5529702306e-20C33 x2 y5 1.0108519953e-16 6.4987053875e-21C35 y7 -1.6759976132e-16 3.5833648943e-20C36 x8 2.7170336448e-21 -4.8302333976e-23C38 x6 y2 3.5717264978e-20 -3.6989413305e-22C40 x4 y4 1.7412363572e-19 -7.0973055635e-22C42 x2 y6 -1.1738182186e-19 -5.3807231028e-22C125 x10 y5 -2.8201915712e-36 2.4501031099e-41C127 x8 y7 -3.9032714017e-35 1.5699944410e-40C129 x6 y9 -3.0598497382e-34 2.9307409634e-40C131 x4 y11 -4.2985980887e-34 1.9982504581e-40 C195 x14 y5 4.4436940511e-46 -3.9810792385e-52C197 x12 y7 1.8411711783e-45 4.6514814819e-52C199 x10 y9 -8.6245560271e-45 5.1706100413e-51C201 x8 y11 -1.8921412057e-43 1.1279314218e-50C203 x6 y13 -9.9461490318e-43 1.0788327159e-50C205 x4 y15 -3.4841336858e-43 4.7195666280e-51C289 x10 y13 -1.9580456170e-54 3.3767644862e-62C291 x8 y15 -8.1394068093e-53 4.1424674366e-62C293 x6 y17 -1.2519914952e-52 2.6599896747e-62C295 x4 y19 -1.1290143637e-52 8.5758712213e-63C297 x2 y21 -3.7023375798e-52 1.1975952741e-63C299 y23 -8.6278782811e-53 -1.3895896328e-65C300 x24 2.0451287521e-63 -2.2531543148e-68C302 x22 y2 1.1545110014e-61 -7.2101665333e-67C304 x20 y4 3.1223664989e-60 -6.7158670516e-66C306 x18 y6 5.1530063062e-59 -3.4384095104e-65C308 x16 y8 2.7930229615e-58 -1.1448073825e-64C310 x14 y10 -2.5578576422e-58 -2.6254590915e-64C312 x12 y12 -1.6380259859e-56 -4.2441148924e-64C314 x10 y14 -1.4943418207e-55 -4.8134939080e-64C316 x8 y16 -4.0627989018e-55 -3.7464602037e-64C318 x6 y18 -4.4025270831e-55 -1.9535984570e-64C320 x4 y20 2.9135349164e-56 -6.0598105348e-65C322 x2 y22 7.9299686710e-55 -7.4895430974e-66C324 y24 2.3570408558e-55 2.5972070951e-67Table 3c for Fig. 2Coordinates of the stop edge xi [mm] yi [mm] xi+N / 2 [mm] yi+N / 2 [mm]-372.613091 -61.168088 373.272631 -72.712612-371.868632 -55.334746 373.186011 -78.414410-370.849694 -49.467260 372.821520 -84.063337-369.558379 -43.570773 372.179597 -89.655265-367.997266 -37.650564 371.261191 -95.186318-366.169395 -31.712029 370.067757 -100.652879-364.078242 -25.760645 368.601245 -106.051594-361.727703 -19.801952 366.864085 -111.379380-359.122062 -13.841520 364.859166 -116.633419-356.265978 -7.884923 362.589822 -121.811154-353.164449 -1.937717 360.059802 -126.910284-349.822795 3.994582 357.273246 -131.928750-346.246633 9.906517 354.234660 -136.864727-342.441851 15.792704 350.948882 -141.716605-338.414583 21.647849 347.421055 -146.482980-334.171186 27.466752 343.656594 -151.162631-329.718214 33.244322 339.661156 -155.754509-325.062393 38.975582 335.440608 -160.257715-320.210595 44.655679 331.000999 -164.671490-315.169808 50.279892 326.348528 -168.995190-309.947117 55.843640 321.489520 -173.228276-304.549671 61.342483 316.430393 -177.370296-298.984667 66.772127 311.177638 -181.420872-293.259320 72.128423 305.737795 -185.379685-287.380844 77.407363 300.117425 -189.246460-281.356431 82.605074 294.323094 -193.020962-275.193232 87.717808 288.361350 -196.702978-268.898334 92.741938 282.238703 -200.292310-262.478745 97.673950 275.961608 -203.788768-255.941369102.510439 269.536446 -207.192165-249.292992107.248106 262.969507 -210.502302-242.540264111.883757 256.266980 -213.718975-235.689676116.414307 249.434933 -216.841961-228.747548120.836778 242.479302 -219.871021-221.720014125.148292 235.405885 -222.805894-214.613006129.346074 228.220330 -225.646299-207.432243133.427433 220.928132 -228.391933-200.183218137.389757 213.534625 -231.042472-192.871192141.230490 206.044986 -233.597573-185.501179144.947126 198.464232 -236.056874-178.077943148.537187 190.797221 -238.419998-170.605990151.998217 183.048664 -240.686554-163.089562155.327774 175.223120 -242.856141-155.532639158.523431 167.325011 -244.928351-147.938933161.582776 159.358626 -246.902773-140.311898164.503421 151.328129 -248.778992-132.654730167.283008 143.237568 -250.556598-124.970380169.919221 135.090880 -252.235182-117.261561172.409787 126.891901 -253.814345-109.530766174.752487 118.644373 -255.293696-101.780279176.945159 110.351950 -256.672859-94.012191178.985698 102.018201 -257.951469-86.228421180.872063 93.646621 -259.129180-78.430732182.602277 85.240632 -260.205664-70.620746184.174439 76.803590 -261.180612-62.799970185.586731 68.338788 -262.053741-54.969807186.837438 59.849463 -262.824790-47.131577187.924961 51.338801 -263.493524-39.286533188.847845 42.809940 -264.059735-31.435877189.604803 34.265978 -264.523247-23.580770190.194737 25.709979 -264.883912-15.722347190.616768 17.144976 -265.141613-7.861723190.870249 8.573984 -265.2962680.000000190.954787 0.000000 -265.3478257.861723190.870249 -8.573984 -265.29626815.722347190.616768 -17.144976 -265.14161323.580770190.194737 -25.709979 -264.88391231.435877189.604803 -34.265978 -264.52324739.286533188.847845 -42.809940 -264.05973547.131577187.924961 -51.338801 -263.49352454.969807186.837438 -59.849463 -262.82479062.799970185.586731 -68.338788 -262.05374170.620746184.174439 -76.803590 -261.18061278.430732182.602277 -85.240632 -260.20566486.228421180.872063 -93.646621 -259.12918094.012191178.985698 -102.018201 -257.95146901.780279176.945159 -110.351950 -256.67285909.530766174.752487 -118.644373 -255.29369617.261561172.409787 -126.891901 -253.81434524.970380169.919221 -135.090880 -252.23518232.654730167.283008 -143.237568 -250.55659840.311898164.503421 -151.328129 -248.77899247.938933161.582776 -159.358626 -246.90277355.532639158.523431 -167.325011 -244.92835163.089562155.327774 -175.223120 -242.85614170.605990151.998217 -183.048664 -240.68655478.077943148.537187 -190.797221 -238.41999885.501179144.947126 -198.464232 -236.05687492.871192141.230490 -206.044986 -233.59757300.183218137.389757 -213.534625 -231.04247207.432243133.427433 -220.928132 -228.39193314.613006129.346074 -228.220330 -225.64629921.720014125.148292 -235.405885 -222.80589428.747548120.836778 -242.479302 -219.87102135.689676116.414307 -249.434933 -216.84196142.540264111.883757 -256.266980 -213.71897549.292992107.248106 -262.969507 -210.50230255.941369102.510439 -269.536446 -207.19216562.478745 97.673950 -275.961608 -203.78876868.898334 92.741938 -282.238703 -200.29231075.193232 87.717808 -288.361350 -196.702978281.356431 82.605074 -294.323094 -193.020962287.380844 77.407363 -300.117425 -189.246460293.259320 72.128423 -305.737795 -185.379685298.984667 66.772127 -311.177638 -181.420872304.549671 61.342483 -316.430393 -177.370296309.947117 55.843640 -321.489520 -173.228276315.169808 50.279892 -326.348528 -168.995190320.210595 44.655679 -331.000999 -164.671490325.062393 38.975582 -335.440608 -160.257715329.718214 33.244322 -339.661156 -155.754509334.171186 27.466752 -343.656594 -151.162631338.414583 21.647849 -347.421055 -146.482980342.441851 15.792704 -350.948882 -141.716605346.246633 9.906517 -354.234660 -136.864727349.822795 3.994582 -357.273246 -131.928750353.164449 -1.937717 -360.059802 -126.910284356.265978 -7.884923 -362.589822 -121.811154359.122062 -13.841520 -364.859166 -116.633419361.727703 -19.801952 -366.864085 -111.379380364.078242 -25.760645 -368.601245 -106.051594366.169395 -31.712029 -370.067757 -100.652879367.997266 -37.650564 -371.261191 -95.186318369.558379 -43.570773 -372.179597 -89.655265370.849694 -49.467260 -372.821520 -84.063337371.868632 -55.334746 -373.186011 -78.414410372.613091 -61.168088 -373.272631 -72.712612373.081459 -66.962308 -373.081459 -66.962308Table 4 for Fig. 2The mirrors M1, M3, M4, M5 and M8 have negative radius values, i.e. are concave mirrors as a matter of principle. The mirrors M2 and M7 have positive radius values, i.e. are convex mirrors as a matter of principle. The mirror M6 of the projection optical unit 10 according to Fig.2 has Rx, Ryradius values with different signs. This mirror M6 therefore has a saddle shape as a matter of principle. A boundary of a stop surface of the stop (cf. also Table 4 for Figure 2) emerges from intersection points on the stop surface of all rays of the illumination light 3 which, on the image side, propa- gate at the field centre point in the direction of the stop surface with a complete image-side tele- centric aperture. When the stop is embodied as an aperture stop, the boundary is an inner bound- ary. The stop may lie in a plane or else have a three-dimensional embodiment. The extent of the stop may be smaller in the scan direction (y) than in the cross-scan direction (x). The projection optical unit 10 is designed for a wavelength of the illumination light 16 of13.5 nm.The projection optical unit 10 is at least approximately telecentric on the image side. The following Table 5 summarizes further data for the projection optical unit 10. Numerical aperture = 0.75 1 / βx = 4.00 1 / βy = -8.00Track length = 2300 mmObject-image shift = 1650 mmWidth of the installation space = 2934 mmOptically used overall mirror area = 2.20 m²Linear pupil obscuration = 25.5% Minimum angle on grazing incident mirror = 67.4°Scan slot length on the wafer = 1.0 mmScan-integrated wavefront RMS = 8.75 mλTransmission = 6.31%Étendue = 45.9 mm²Mirror with maximum diameter = M4Maximum optical mirror diameter = 1153 mmMirror with maximum area = M8 Table 5 for Fig. 2The transmission is the overall transmission of the projection optical unit 10, i.e. the transmis- sions of all mirrors of the projection optical unit 10 multiplied together. The specified transmis- sion value applies to a compromise design of the respective highly reflective coatings on the mir- rors M1 to M8, the design also including transmission losses due to a protective layer ply and a compromise design of a broadband reflection layer on the penultimate mirror M7 as regards a high average reflectivity on the one hand and a small reflectivity variation on the other hand. Fig.3 shows a further embodiment of a projection optical unit or imaging optical unit 24, which can be used in the projection exposure apparatus 1 instead of the projection optical unit 10. Com- ponents and functions corresponding to those which have already been explained above with ref- erence to Figures 1 and 2 bear the same reference signs and will not be discussed in detail again. The projection optical unit 24 has an image-side numerical aperture of 0.75. The projection optical unit 24 has a total of nine mirrors M1 to M9. The mirrors M1, M8 and M9 are embodied as mirrors for normal incidence (NI mirrors). The mirrors M2 to M7 are embodied as mirrors for grazing incidence (GI mirrors) of the illumination light 16. The projection optical unit 24 has exactly six mirrors for grazing incidence. The mirrors M2 to M7, i.e. the six GI mirrors of the projection optical unit 24, reflect the imag- ing light 16 in such a way that the angles of reflection of the individual rays of the imaging light 16 add up at these GI mirrors M2 to M7, i.e. lead to an amplification of the deflection effect thereof.The projection optical unit 24 has a first intermediate image plane in the imaging beam path be-tween the mirrors M3 and M4 and a further intermediate image plane in the imaging beam path between the mirrors M5 and M6.An overall mirror area of all mirrors M1 to M9 in the projection optical unit 24 is less than 3 m2.All mirrors M1 to M9 have a maximum reflection surface dimension, perpendicular to the yz-meridional plane, of less than 1000 mm.A z- distance between the last mirror M8 in the imaging beam path of the projection optical unit24 and the image plane 12 is 78 mm. The projection optical unit 24 thus offers a good installa-tion space distance between the M8 mirror and the wafer 13 in the event of a typical substrate thickness of the mirror M8.A distance between the object plane 6 and the image plane 12 is 2159 mm in the projection opti-cal unit 24. The optical design data for the projection optical unit 24 emerge from following Tables 1 to 4, which, in turn, correspond in terms of the basic structure to Tables 1 to 4 relating to the embodi- ment according to Figure 2. Further data regarding the projection optical unit 24 are listed Table 5, which subsequently follows these. Radii of the surfaces Radiusx [mm] Powerx [1 / mm] Radiusy [mm] Powery [1 / mm]M01 -4634.77766718 0.00042337 -1386.68881802 0.00141503M02 9328.81860424 -0.00021439 1229.59941046 -0.00162655M03 -29467.30764354 0.00006775 -4739.81221594 0.00042121M04 -1811.38005671 0.00110413 -8953.60461035 0.00022337M05 -1486.25871578 0.00039344 -5349.51178236 0.00010931M06 -1098.18092569 0.00038871 2086.85172981 -0.00020455M07 -1987.49393855 0.00016660 -5120.20631821 0.00006467M08 2742.39683457 -0.00019247 295.99369237 -0.00178325M09 -711.37749119 0.00281145 -632.13871931 0.00316386Table 1 for Fig. 3Decentring (location, angle) the surfaces Dx [mm] Dy [mm] Dz [mm]Reticle 0.000000000 0.000000000 0.000000000M01 0.000000000 -224.5598495042043.061020347M02 0.000000000 -436.4617768301217.961574310M03 0.000000000 -823.967199813 831.132753464M04 0.000000000 -2151.536618668 380.780440020M05 0.000000000 -3593.757176478 300.574352419M06 0.000000000 -4095.991898630 444.009397094M07 0.000000000 -4529.890721916 816.012888877M08 0.000000000 -4865.2113053752035.915569173Stop 0.000000000 -4842.6759955721980.359926841M09 0.000000000 -4674.9900607411566.968679916Wafer 0.000000000 -4674.9900511742158.998958897 Reticle 0.000000000 0.000000000 0.000000000M01 -4.065507805 0.000000000 0.000000000M02 240.273261193 0.000000000 -0.000000000M03 211.844224942 -0.000000000 -0.000000000M04 190.960810242 -0.000000000 -0.000000000M05 173.622050622 -0.000000000 -0.000000000M06 151.726416790 -0.000000000 -0.000000000M07 122.380712044 -0.000000000 -0.000000000M08 18.724389580 0.000000000 -0.000000000Stop 180.480559009 -0.000000000 -0.000000000M09 191.039596433 -0.000000000 -0.000000000Wafer -0.000000926 0.000000000180.000000000Table 2 for Fig. 3Free-form coefficients of the surfacesCoefficient Formula M01 M02 M03C2 y 1.1867791045e-04 8.4764450090e-04 2.3678709483e-04C7 x2 y -2.5578346697e-08 -1.3773872562e-07 -8.6003718242e-08C9 y3 -5.1120168228e-08 6.4779863340e-08 1.7478993485e-08C10 x4 -1.6406060643e-11 9.5535103329e-11 -1.6014568839e-10C12 x2 y2 4.8027861497e-11 -1.9989472664e-10 -1.1634340940e-10C14 y4 -1.2160462403e-11 3.2419511658e-11 -6.0677665857e-12C16 x4 y 1.1712747724e-13 4.7518847656e-13 -1.5345920666e-13C18 x2 y3 7.2814412808e-14 1.6214380502e-12 2.7435036089e-13C20 y5 -8.6372590510e-14 -5.1659279354e-12 -3.1227190765e-14C21 x6 3.1183613809e-17 1.7730081913e-17 1.9730290244e-16C23 x4 y2 1.5326376626e-16 -6.1240277950e-16 6.3503420332e-16C25 x2 y4 -6.3818420178e-17 9.3432141380e-15 -7.1563000935e-16C27 y6 3.7575614219e-17 9.7680714143e-17 5.5145879854e-17C29 x6 y -1.0868468360e-19 -9.8777193821e-19 3.9671155005e-19C31 x4 y3 -1.6958768847e-19 -2.0765944861e-18 -1.6605215835e-18C33 x2 y5 -9.2060976534e-19 3.9924734736e-17 1.4993316150e-18C35 y7 4.8223087245e-19 -9.1291538394e-17 -1.3689234119e-19C36 x8 -1.0474930938e-22 1.1197040556e-21 4.4161834968e-23C38 x6 y2 -5.4962380379e-22 -2.6124966336e-21 -1.5145755283e-21C40 x4 y4 -2.9213820479e-21 -5.3927233693e-20 4.4450704892e-21C42 x2 y6 -2.0127158073e-21 3.1201835642e-19 -3.4541993225e-21C44 y8 -9.1966310367e-21 -3.4226365384e-19 1.8877030386e-21C46 x8 y 5.6609838226e-25 6.1471102111e-24 -3.8747889556e-25 C115 x4 y10 -2.6058348613e-33 -2.5863031311e-32 1.7985432692e-35C117 x2 y12 -6.2913244218e-33 -6.9531050150e-32 -8.4918947129e-37C201 x8 y11 8.2178084202e-45 0.0000000000e+00 0.0000000000e+00C203 x6 y13 2.6429138466e-44 0.0000000000e+00 0.0000000000e+00C205 x4 y15 4.6986066864e-44 0.0000000000e+00 0.0000000000e+00C207 x2 y17 3.8880744736e-44 0.0000000000e+00 0.0000000000e+00C209 y19 2.4670738299e-44 0.0000000000e+00 0.0000000000e+00C210 x20 5.8393735246e-53 0.0000000000e+00 0.0000000000e+00C212 x18 y2 8.6787062045e-52 0.0000000000e+00 0.0000000000e+00C214 x16 y4 -7.0715564622e-51 0.0000000000e+00 0.0000000000e+00C216 x14 y6 -2.9644257557e-49 0.0000000000e+00 0.0000000000e+00C218 x12 y8 -2.7146246030e-48 0.0000000000e+00 0.0000000000e+00C220 x10 y10 -8.9552232303e-48 0.0000000000e+00 0.0000000000e+00C222 x8 y12 6.8174874961e-48 0.0000000000e+00 0.0000000000e+00C224 x6 y14 1.2161242285e-46 0.0000000000e+00 0.0000000000e+00C226 x4 y16 2.9963062736e-46 0.0000000000e+00 0.0000000000e+00C228 x2 y18 2.0063639883e-46 0.0000000000e+00 0.0000000000e+00C230 y20 -1.1446847496e-46 0.0000000000e+00 0.0000000000e+00C232 x20 y 1.4647756268e-55 0.0000000000e+00 0.0000000000e+00C234 x18 y3 4.1095576957e-54 0.0000000000e+00 0.0000000000e+00C236 x16 y5 5.1684306734e-53 0.0000000000e+00 0.0000000000e+00C238 x14 y7 6.4719186616e-53 0.0000000000e+00 0.0000000000e+00C240 x12 y9 -3.3695146543e-51 0.0000000000e+00 0.0000000000e+00C242 x10 y11 -3.2995618479e-50 0.0000000000e+00 0.0000000000e+00C244 x8 y13 -1.5152826649e-49 0.0000000000e+00 0.0000000000e+00C246 x6 y15 -3.8482285461e-49 0.0000000000e+00 0.0000000000e+00C248 x4 y17 -5.8139130050e-49 0.0000000000e+00 0.0000000000e+00C250 x2 y19 -4.2629352150e-49 0.0000000000e+00 0.0000000000e+00C252 y21 -3.0987688940e-49 0.0000000000e+00 0.0000000000e+00C253 x22 -1.5936227687e-58 0.0000000000e+00 0.0000000000e+00C255 x20 y2 -3.0184142775e-57 0.0000000000e+00 0.0000000000e+00C257 x18 y4 8.5667531964e-58 0.0000000000e+00 0.0000000000e+00C259 x16 y6 7.2144103652e-55 0.0000000000e+00 0.0000000000e+00C261 x14 y8 9.3923082577e-54 0.0000000000e+00 0.0000000000e+00C263 x12 y10 4.8536263706e-53 0.0000000000e+00 0.0000000000e+00C265 x10 y12 6.5301387079e-53 0.0000000000e+00 0.0000000000e+00C267 x8 y14 -4.2785380608e-52 0.0000000000e+00 0.0000000000e+00C269 x6 y16 -2.1299204401e-51 0.0000000000e+00 0.0000000000e+00C271 x4 y18 -3.8905138963e-51 0.0000000000e+00 0.0000000000e+00C273 x2 y20 -2.1292398662e-51 0.0000000000e+00 0.0000000000e+00C275 y22 7.7022404006e-52 0.0000000000e+00 0.0000000000e+00C277 x22 y -1.4093164747e-61 0.0000000000e+00 0.0000000000e+00C279 x20 y3 -4.4667494524e-60 0.0000000000e+00 0.0000000000e+00C281 x18 y5 -7.5816555561e-59 0.0000000000e+00 0.0000000000e+00C283 x16 y7 -3.3145925578e-58 0.0000000000e+00 0.0000000000e+00C285 x14 y9 3.1300113595e-57 0.0000000000e+00 0.0000000000e+00C287 x12 y11 4.9624885561e-56 0.0000000000e+00 0.0000000000e+00C289 x10 y13 3.1072185337e-55 0.0000000000e+00 0.0000000000e+00C291 x8 y15 1.1033698340e-54 0.0000000000e+00 0.0000000000e+00C293 x6 y17 2.3180088640e-54 0.0000000000e+00 0.0000000000e+00C295 x4 y19 3.0715984219e-54 0.0000000000e+00 0.0000000000e+00C297 x2 y21 2.0366337217e-54 0.0000000000e+00 0.0000000000e+00C299 y23 1.6049466377e-54 0.0000000000e+00 0.0000000000e+00C300 x24 1.8838206678e-64 0.0000000000e+00 0.0000000000e+00C302 x22 y2 4.3300408947e-63 0.0000000000e+00 0.0000000000e+00C304 x20 y4 2.2708281005e-62 0.0000000000e+00 0.0000000000e+00C306 x18 y6 -6.3829006140e-61 0.0000000000e+00 0.0000000000e+00C308 x16 y8 -1.2595344945e-59 0.0000000000e+00 0.0000000000e+00C310 x14 y10 -9.1575689676e-59 0.0000000000e+00 0.0000000000e+00C312 x12 y12 -2.7661789069e-58 0.0000000000e+00 0.0000000000e+00C314 x10 y14 2.3072526788e-58 0.0000000000e+00 0.0000000000e+00C316 x8 y16 4.4896667266e-57 0.0000000000e+00 0.0000000000e+00C318 x6 y18 1.4152123858e-56 0.0000000000e+00 0.0000000000e+00C320 x4 y20 2.0871617988e-56 0.0000000000e+00 0.0000000000e+00C322 x2 y22 9.6826382911e-57 0.0000000000e+00 0.0000000000e+00C324 y24 -1.7719022601e-57 0.0000000000e+00 0.0000000000e+00Table 3a for Fig. 3Coefficient Formula M04 M05 M06C2 y -7.0582708665e-06 4.6208655496e-04 2.4228168451e-03C7 x2 y -3.1365416587e-08 -6.0891872457e-08 -2.4732459005e-07C9 y3 6.6362266621e-09 -4.8171539757e-08 8.7896656985e-08C10 x4 -4.6958346677e-11 4.7965165931e-12 1.6199600636e-11C12 x2 y2 1.2687868558e-11 -3.5646908876e-11 -2.5226635676e-10C14 y4 -7.3890289258e-12 -6.9285874454e-11 3.6871518693e-10C16 x4 y 3.9249923875e-14 2.0602281899e-15 1.6181926562e-13C18 x2 y3 -2.5831980923e-14 -7.2571277103e-14 -1.5737521879e-12C20 y5 3.9816930604e-15 -8.6521666914e-14 1.2980337296e-12C21 x6 1.1113829193e-16 8.5613839358e-18 -4.6739996888e-17C23 x4 y2 -5.4304413932e-17 -3.4038909173e-17 2.7230842796e-16C25 x2 y4 3.4431380507e-17 -1.0109132648e-16 2.8928626739e-15C27 y6 7.1837693103e-19 -1.3213846071e-16 -5.4303997967e-15C29 x6 y -6.7612599300e-20 -3.6015728024e-20 -6.1034607846e-20C31 x4 y3 9.5169846856e-20 -4.9397556534e-20 3.0321552924e-18C33 x2 y5 -5.0092882536e-20 -1.3618984942e-19 -2.0420776643e-17C35 y7 -6.0625250756e-21 -3.6827097970e-19 3.0639839902e-17C36 x8 -9.6979522667e-23 1.4876794074e-23 3.8737205765e-23C38 x6 y2 1.4403278719e-22 -2.7801583564e-23 -1.5040882009e-21C40 x4 y4 -2.7925406061e-22 -1.8261394888e-22 -1.6427144176e-21C42 x2 y6 -3.4187603703e-23 -5.3447522767e-22 3.3547265311e-19C44 y8 -6.7250727946e-24 -5.2132002665e-22 -4.2499584519e-19C46 x8 y 2.9172106825e-25 4.6518680765e-26 -1.6521403117e-25C48 x6 y3 -6.3511526076e-25 -6.3535216691e-25 1.2560756387e-23C50 x4 y5 -1.0385711243e-25 -4.0023586281e-24 -4.4906023216e-24C52 x2 y7 -3.7726357543e-26 -2.9603047261e-24 -2.7410239831e-21C54 y9 1.7724703373e-25 9.8193244650e-24 2.3443910155e-20C55 x10 2.8041594228e-28 -1.1937019344e-28 9.2103912473e-28C57 x8 y2 -6.6485352638e-28 -2.2710572649e-28 -5.0899146167e-27C59 x6 y4 4.0313151881e-28 -3.4111829156e-27 3.8073778300e-26C61 x4 y6 1.2566063580e-28 -9.8238721124e-27 -1.5041902458e-24C63 x2 y8 8.3962997281e-28 6.6817310129e-27 -6.0157352326e-24C65 y10 3.5117769929e-28 -6.1810681821e-28 -2.6562872514e-22C67 x10 y -4.7713066397e-31 8.0149819520e-31 1.0715353333e-29C69 x8 y3 2.1394823837e-30 5.0289004557e-30 -8.5747971353e-29C71 x6 y5 2.7584110555e-30 6.7841912410e-29 -1.0501395070e-28C73 x4 y7 5.0455370235e-30 2.2774109450e-28 1.2435400791e-26C75 x2 y9 1.0458082275e-30 4.1524563847e-31 2.3927143549e-25C77 y11 -9.9086515797e-31 -4.5534202716e-28 -1.3727199490e-24C78 x12 -1.3412839875e-33 1.6724311038e-33 -7.6790203084e-33C80 x10 y2 2.9545855788e-33 2.2022748501e-33 1.1754477907e-31C82 x8 y4 3.2818103854e-33 7.2960675644e-32 -7.6673478884e-31C84 x6 y6 1.2340014617e-32 5.4360700532e-31 -1.9097257134e-29C86 x4 y8 3.4442998061e-33 1.0949693241e-30 6.2247313541e-28C88 x2 y10 -2.4061241197e-33 -6.3026865191e-31 -4.2579183694e-27C90 y12 -4.6409002771e-33 -7.0019991957e-31 2.7151528874e-26C92 x12 y 3.7065907310e-36 -2.4851831483e-36 -6.5209689599e-35C94 x10 y3 -4.1033334540e-36 -1.1403512205e-35 7.2998172690e-34C96 x8 y5 -3.7655426731e-36 -2.4108288622e-34 7.5378036405e-33C98 x6 y7 -2.9744628023e-35 -2.1546429824e-33 5.1525486033e-32C100 x4 y9 -2.1873254057e-35 -5.3570439191e-33 -7.7270072621e-30C102 x2 y11 -1.0640150596e-35 1.6773223782e-33 -1.0120975182e-29C104 y13 1.8296915136e-36 8.9838647120e-33 1.9422892369e-28C105 x14 7.1637933021e-39 -7.0219454101e-39 3.7312283950e-38C107 x12 y2 -9.3939676581e-39 -4.3165671151e-39 -7.2997271846e-37C109 x10 y4 -1.8212599353e-38 -4.2916763750e-37 -9.5670789571e-38C111 x8 y6 -1.0970660002e-37 -6.2488804428e-36 2.9288949711e-34C113 x6 y8 -1.0171269511e-37 -2.5263588481e-35 -4.7347745374e-33 Table 3b for Fig. 3Coefficient Formula M07 M08 M09C2 y 1.4941450337e-03 9.9886759456e-03 2.0272481017e-03C7 x2 y -6.9799739698e-08 -2.3231992336e-06 -2.5611221389e-08C9 y3 8.1563290709e-08 -4.5526179935e-07 1.3468152540e-08C10 x4 -4.7830771838e-11 2.4912110104e-09 -4.0337786306e-11C12 x2 y2 -1.8238715975e-10 6.2939600379e-09 -1.1604563585e-10C14 y4 -9.7717447826e-11 3.9624032825e-09 -4.0155609186e-11C16 x4 y -1.8757068456e-13 -5.2278854982e-12 -6.1128247804e-14C18 x2 y3 1.4928841037e-13 -2.5407721501e-11 -4.9338648082e-14C20 y5 2.2384470694e-13 2.5263065981e-11 2.7853348380e-14C21 x6 2.4376450592e-16 1.4028355816e-15 -1.9437519176e-16C23 x4 y2 -7.6164759371e-16 4.3501928858e-14 -4.3373856883e-16C25 x2 y4 -8.0012067228e-16 7.1319038971e-14 -4.4491946814e-16C27 y6 -3.9399160623e-16 1.3456899553e-13 -1.1735451413e-16C29 x6 y 1.5469463525e-18 -5.4569768154e-17 -7.9322962471e-21 C242 x10 y11 0.0000000000e+00 -3.8095788409e-44 -1.2497329551e-54C244 x8 y13 0.0000000000e+00 -1.2634630583e-43 -1.8172426610e-54 Table 3c for Fig. 3 Coordinates of the stop edge xi [mm] yi [mm] xi+N / 2 [mm] yi+N / 2 [mm]-277.146351 -42.018727 277.409974 -52.506428-276.753767 -36.763967 277.280132 -57.731436-276.188014 -31.507147 276.975377 -62.938547-275.449661 -26.252099 276.495448 -68.123750-274.539322 -21.002581 275.840184 -73.283052-273.457659 -15.762267 275.009534 -78.412492-272.205384 -10.534744 274.003576 -83.508164-270.783271 -5.323503 272.822528 -88.566237-269.192163 -0.131940 271.466767 -93.582968-267.432982 5.036648 269.936838 -98.554720-265.506750 10.179065 268.233467 -103.477977-263.414594 15.292210 266.357567 -108.349353-261.157770 20.373080 264.310245 -113.165600-258.737670 25.418768 262.092804 -117.923616-256.155841 30.426455 259.706745 -122.620445-253.413996 35.393411 257.153764 -127.253282-250.514028 40.316985 254.435747 -131.819468-247.458016 45.194605 251.554768 -136.316492-244.248236 50.023766 248.513077 -140.741982-240.887167 54.802027 245.313096 -145.093705-237.377490 59.527000 241.957405 -149.369559-233.722090 64.196346 238.448738 -153.567570-229.924056 68.807760 234.789971 -157.685883-225.986670 73.358963 230.984109 -161.722759-221.913403 77.847693 227.034283 -165.676568-217.707900 82.271691 222.943733 -169.545779-213.373972 86.628689 218.715805 -173.328958-208.915576 90.916403 214.353939 -177.024762-204.336799 95.132514 209.861661 -180.631929-199.641842 99.274668 205.242574 -184.149271-194.834997103.340456 200.500349 -187.575675-189.920630107.327417 195.638720 -190.910089-184.903159111.233022 190.661472 -194.151522-179.787036115.054677 185.572436 -197.299036-174.576725118.789716 180.375483 -200.351743-169.276684122.435403 175.074511 -203.308803-163.891345125.988930 169.673444 -206.169414-158.425102129.447426 164.176222 -208.932815-152.882289132.807958 158.586795 -211.598280-147.267170136.067544 152.909115 -214.165115-141.583924139.223164 147.147131 -216.632658-135.836636142.271771 141.304783 -219.000273-130.029286145.210311 135.385994 -221.267351-124.165744148.035738 129.394666 -223.433305-118.249760150.745034 123.334677 -225.497574-112.284967153.335225 117.209869 -227.459616-106.274871155.803406 111.024050 -229.318909-100.222854158.146752 104.780990 -231.074953-94.132173160.362542 98.484413 -232.727266-88.005959162.448166 92.137998 -234.275385-81.847223164.401145 85.745376 -235.718867-75.658854166.219141 79.310127 -237.057291-69.443626167.899963 72.835782 -238.290255-63.204203169.441578 66.325821 -239.417380-56.943141170.842115 59.783673 -240.438312-50.662901172.099870 53.212720 -241.352720-44.365852173.213309 46.616294 -242.160302-38.054281174.181072 39.997688 -242.860785-31.730403175.001972 33.360149 -243.453927-25.396367175.675002 26.706894 -243.939517-19.054271176.199334 20.041103 -244.317384-12.706167176.574321 13.365935 -244.587387-6.354078176.799499 6.684526 -244.7494300.000000176.874589 0.000000 -244.8034506.354078176.799499 -6.684526 -244.74943012.706167176.574321 -13.365935 -244.58738719.054271176.199334 -20.041103 -244.31738425.396367175.675002 -26.706894 -243.93951731.730403175.001972 -33.360149 -243.45392738.054281174.181072 -39.997688 -242.86078544.365852173.213309 -46.616294 -242.16030250.662901172.099870 -53.212720 -241.35272056.943141170.842115 -59.783673 -240.43831263.204203169.441578 -66.325821 -239.41738069.443626167.899963 -72.835782 -238.29025575.658854166.219141 -79.310127 -237.05729181.847223164.401145 -85.745376 -235.71886788.005959162.448166 -92.137998 -234.27538594.132173160.362542 -98.484413 -232.727266100.222854158.146752 -104.780990 -231.074953106.274871155.803406 -111.024050 -229.318909112.284967153.335225 -117.209869 -227.459616451385054336295192898930952282560370874220276.188014 -31.507147 -276.975377 -62.938547276.753767 -36.763967 -277.280132 -57.731436277.146351 -42.018727 -277.409974 -52.506428277.365243 -47.267530 -277.365243 -47.267530Table 4 for Fig. 3Numerical aperture = 0.75 1 / βx = -4.20 1 / βy= -8.00Track length = 2159 mmObject-image shift = 4675 mmWidth of the installation space = 5170 mmOptically used overall mirror area = 2.87 m²Linear pupil obscuration = 29.0% Minimum angle on grazing incident mirror = 67.8°Scan slot length on the wafer = 1.2 mmScan-integrated wavefront RMS = 12.92 mλTransmission = 6.37%Étendue = 55.1 mm²Mirror with maximum diameter = M4Maximum optical mirror diameter = 1195 mmMirror with maximum area = M9 Table 5 for Fig. 3The "numerical aperture" parameter above in Table 5 is the image-side numerical aperture. In Table 5 above, "track length" refers to the distance between object plane 6 and image plane 12. "Object-image shift" is self-explanatory. The "width of the installation space" parameter denotes an extent of the installation space along the y-coordinate. The parameter "scan slot length on the wafer" denotes the y-extent of the image field 11.Fig. 4 shows a further embodiment of a projection optical unit or imaging optical unit 25, whichcan be used in the projection exposure apparatus 1 instead of the projection optical unit 10. Com- ponents and functions corresponding to those which have already been explained above with ref-erence to Figures 1 to 3 bear the same reference signs and will not be discussed in detail again.The basic structure of the projection optical unit 25 corresponds to that of the projection optical unit 24 according to Fig.3. The projection optical unit 25 has a linear pupil obscuration of 18.7%. All GI mirrors M2 to M7 of the projection optical unit 25 have angles of incidence of the illumi- nation light 16 which are greater than 70°.The largest mirror of the projection optical unit 25 has a diameter of 1150 mm.The optical design data for the projection optical unit 25 emerge from following Tables 1 to 5, which, in turn, correspond in terms of the basic structure to Tables 1 to 5 relating to the embodi- ment according to Figure 3. Radii of the surfaces Radiusx [mm] Powerx [1 / mm] Radiusy [mm] Powery [1 / mm]M01 -4226.53066775 0.00046590 -1668.36449294 0.00118029M02 5684.66517603 -0.00035182 1685.09807851 -0.00118687M03 34105.42898165 -0.00005860 -6053.95264909 0.00033014M04 -3385.09855491 0.00059082 -6083.06167694 0.00032878M05 -1718.41695543 0.00024749 -7094.69278879 0.00005995M06 -1080.69013042 0.00043870 -37866.40139886 0.00001252M07 -2041.58877019 0.00017760 -15527.95643553 0.00002335M08 6521.98694381 -0.00008516 319.33501551 -0.00173931M09 -854.12374733 0.00234158 -770.94100804 0.00259423Table 1 for Fig. 4 Decentring (location, angle) the surfaces Dx [mm] Dy [mm] Dz [mm]Reticle 0.000000000 0.000000000 0.000000000M01 0.000000000 -255.3501913572221.391725508M02 0.000000000 -561.9225723381254.437257053M03 0.000000000 -1145.422853514 763.929394449M04 0.000000000 -2552.620067132 315.613333003M05 0.000000000 -3387.359688643 332.888467759M06 0.000000000 -3850.571796150 520.834067450M07 0.000000000 -4175.742008290 900.287074778M08 0.000000000 -4498.9369118922327.607680288Stop 0.000000000 -4473.4442397392215.024790375M09 0.000000000 -4356.7605234671699.716316427Wafer 0.000000000 -4356.7605249432417.483280766 Reticle 0.000000000 0.000000000 0.000000000M01 -5.516894841 0.000000000 0.000000000M02 236.230113910 0.000000000 -0.000000000M03 208.861334489 -0.000000000 -0.000000000M04 188.242835547 -0.000000000 -0.000000000M05 168.364926593 -0.000000000 -0.000000000M06 144.255089994 -0.000000000 -0.000000000M07 116.676673305 -0.000000000 -0.000000000M08 12.758600337 0.000000000 -0.000000000Stop 179.149533580 -0.000000000 -0.000000000M09 186.379300227 -0.000000000 -0.000000000Wafer 0.000000118 0.000000000180.000000000Table 2 for Fig. 4Free-form coefficients of the surfacesCoefficient Formula M01 M02 M03C2 y 7.9433687134e-05 9.0342656777e-04 2.8238564730e-04C7 x2 y 5.6821921951e-09 -2.5623451782e-08 -6.1310329838e-08C9 y3 -2.8571335245e-08 1.1056961633e-07 1.4450561712e-08C10 x4 7.0837793021e-12 8.0181657446e-11 -1.8759321431e-11C12 x2 y2 4.9878823308e-11 -2.7071146269e-10 1.1854446602e-11C14 y4 -2.8102670585e-11 4.4865385050e-11 -1.4549829698e-11C16 x4 y 1.9827114446e-14 1.1244012028e-14 -4.7091483552e-14C18 x2 y3 4.5781108860e-14 -2.4165125078e-14 -1.3534221679e-14C20 y5 -1.1015825801e-13 -1.3804589949e-12 5.1672859476e-15C21 x6 3.1838730304e-18 3.8561675416e-17 1.4244555701e-17C23 x4 y2 1.4078889222e-17 -6.1417961739e-16 2.1770982901e-17C25 x2 y4 3.1373834480e-17 -2.2225317178e-15 -2.8193506955e-18C27 y6 -4.2933315114e-16 9.7171159155e-15 -6.9208262736e-18C29 x6 y -2.4432090018e-20 1.2440517769e-19 -2.0606288835e-20C31 x4 y3 1.3790453085e-20 -2.1588554610e-18 -7.0199292554e-20C33 x2 y5 -4.4626054313e-20 -9.4578817649e-19 -1.8811304191e-20C35 y7 -3.6247719370e-19 4.8042050280e-17 9.1801731460e-20C36 x8 -9.0865462028e-25 1.8107771766e-23 -4.8083583092e-23C38 x6 y2 4.6278574222e-23 1.7059372515e-21 -1.7756487625e-22C40 x4 y4 1.0169147173e-21 5.1868147909e-21 -1.2761529208e-23C42 x2 y6 4.1107501867e-21 9.3386801676e-20 3.0871085003e-22C44 y8 1.4816904775e-20 1.4173029550e-19 -2.1888590458e-22C46 x8 y 3.2422260390e-26 8.3356234216e-25 -1.7470251566e-25C48 x6 y3 -9.7408436134e-25 1.9475759165e-24 1.1684118880e-25C50 x4 y5 -7.3395545731e-24 -2.6629457318e-23 5.5619666520e-25C52 x2 y7 -1.1878509378e-23 9.4919569563e-23 -9.0478664553e-25C54 y9 2.7906561961e-23 6.9627362400e-22 -3.8106179023e-25C55 x10 1.1406414350e-28 -1.3055454746e-28 2.6832286927e-28C57 x8 y2 7.6683514315e-28 8.0610524372e-27 1.8350634380e-28C59 x6 y4 -8.8727030510e-27 -3.0105553964e-26 9.1135724417e-28C61 x4 y6 -7.5797700476e-26 -2.9536266667e-25 -1.3471970350e-27C63 x2 y8 -3.6464773639e-25 -1.1660287962e-23 -1.3269197711e-27C65 y10 -6.1135215858e-25 -2.3812344816e-23 1.6265733944e-27C67 x10 y -8.0582645947e-31 -1.3683600907e-29 5.3824764002e-31C69 x8 y3 1.8233596838e-29 -2.3327317582e-29 -2.3547122725e-32C71 x6 y5 2.7060087022e-28 -7.8164715339e-30 -3.1047501798e-30C73 x4 y7 9.5360850950e-28 4.5343065005e-27 -2.6443211126e-30C75 x2 y9 6.0220776516e-28 -1.7680299153e-26 9.1806653057e-30C77 y11 -1.9507380777e-27 -1.9770858584e-25 1.9353593313e-30C78 x12 -2.0034725742e-33 -5.4192286739e-34 -1.7240508356e-33C80 x10 y2 -2.7086122272e-32 -1.3736351574e-31 -3.4992058773e-34C82 x8 y4 3.7881005842e-32 -1.8665252138e-31 -3.7222832758e-33C84 x6 y6 9.4135903777e-31 -2.5187683344e-30 -5.6810289450e-33C86 x4 y8 5.6925702306e-30 3.8912380091e-29 2.0728332938e-32C88 x2 y10 2.2439611067e-29 7.7889410636e-28 8.3331744840e-34C90 y12 2.5928358897e-29 1.1647435964e-27 -1.1652082855e-32C92 x12 y 1.7654486983e-35 4.3626111027e-35 -4.9935808731e-36C94 x10 y3 -1.7867901597e-34 4.3092308386e-35 2.1154958144e-36C96 x8 y5 -5.5004938335e-33 6.5166680939e-34 4.3723562392e-36C98 x6 y7 -3.1703988015e-32 -3.2099099195e-32 3.8312679616e-35C100 x4 y9 -6.7385688662e-32 -2.1448594511e-31 -2.1787561182e-35C102 x2 y11 -2.0850729826e-32 2.2889883923e-30 -5.0991379501e-35 C109 x10 y4 1.0579039451e-36 1.3079582391e-36 6.3629611732e-40C111 x8 y6 -7.6504671262e-36 5.7221663533e-36 5.5416297773e-38C113 x6 y8 -5.0569443535e-35 1.3368525270e-34 -2.8645594554e-38C115 x4 y10 -2.6530457778e-34 -2.8859435187e-33 -8.6156386966e-38C117 x2 y12 -9.3500904076e-34 -2.5425768488e-32 3.8504624167e-38C119 y14 -8.5560609380e-34 -1.5967087767e-32 4.0465779440e-38C121 x14 y -2.0250394071e-40 6.7864611284e-41 2.8679004285e-41C123 x12 y3 5.6518160048e-40 -1.3539826650e-40 -1.4874864146e-41C125 x10 y5 6.3257898395e-38 -8.6012543936e-39 1.6983757485e-41C127 x8 y7 5.6116712669e-37 4.5612037142e-38 -1.2103645482e-40C129 x6 y9 1.9728050318e-36 1.7268405081e-36 -8.2576375185e-41 C144 x8 y8 3.5179478620e-40 -3.0265585870e-40 -8.4721386111e-44C146 x6 y10 1.4845685213e-39 -3.7284840317e-40 1.4886809231e-43C148 x4 y12 7.8796071151e-39 6.1497212638e-38 1.0141921581e-43C150 x2 y14 2.5388252484e-38 2.8058153573e-37 -1.1999359604e-43C152 y16 1.9947087795e-38 3.3533478222e-39 -5.7894438099e-44C154 x16 y 1.3729151893e-45 -3.8188536732e-46 -4.6395383840e-47C156 x14 y3 4.1505192755e-45 1.2183654615e-45 6.1519764099e-47C158 x12 y5 -4.1619848303e-43 2.8865868608e-44 -2.4918206242e-47C160 x10 y7 -5.4481801306e-42 1.2271205006e-43 1.1725098717e-46C162 x8 y9 -2.8154368939e-41 -2.9474259429e-42 2.2222488489e-46C164 x6 y11 -7.1294875007e-41 -1.7845190678e-41 -8.8687794732e-47C166 x4 y13 -8.2686499093e-41 1.9309583110e-40 -2.9987299266e-46C168 x2 y15 -8.2485742251e-43 1.2567028129e-39 -5.3428089352e-48 C181 x8 y10 -6.5641504252e-45 0.0000000000e+00 0.0000000000e+00C183 x6 y12 -2.3567998426e-44 0.0000000000e+00 0.0000000000e+00C185 x4 y14 -1.4415906903e-43 0.0000000000e+00 0.0000000000e+00C187 x2 y16 -4.2644970988e-43 0.0000000000e+00 0.0000000000e+00C189 y18 -3.0024314778e-43 0.0000000000e+00 0.0000000000e+00C191 x18 y -5.5936575644e-51 0.0000000000e+00 0.0000000000e+00C193 x16 y3 -4.5220835542e-50 0.0000000000e+00 0.0000000000e+00C195 x14 y5 1.5460333385e-48 0.0000000000e+00 0.0000000000e+00C197 x12 y7 2.9088358196e-47 0.0000000000e+00 0.0000000000e+00C199 x10 y9 2.0638574504e-46 0.0000000000e+00 0.0000000000e+00C201 x8 y11 7.5622659464e-46 0.0000000000e+00 0.0000000000e+00C203 x6 y13 1.5062657124e-45 0.0000000000e+00 0.0000000000e+00C205 x4 y15 1.4349319701e-45 0.0000000000e+00 0.0000000000e+00C207 x2 y17 -6.4447109247e-47 0.0000000000e+00 0.0000000000e+00C209 y19 -5.4278617991e-46 0.0000000000e+00 0.0000000000e+00C210 x20 -9.6710244826e-55 0.0000000000e+00 0.0000000000e+00C212 x18 y2 -3.8591272070e-53 0.0000000000e+00 0.0000000000e+00C214 x16 y4 -4.7988096627e-52 0.0000000000e+00 0.0000000000e+00C216 x14 y6 -2.5078378807e-51 0.0000000000e+00 0.0000000000e+00C218 x12 y8 -4.1535714524e-51 0.0000000000e+00 0.0000000000e+00C220 x10 y10 9.7059191266e-51 0.0000000000e+00 0.0000000000e+00C222 x8 y12 3.8295396569e-50 0.0000000000e+00 0.0000000000e+00C224 x6 y14 1.7305662554e-49 0.0000000000e+00 0.0000000000e+00C226 x4 y16 1.4676647598e-48 0.0000000000e+00 0.0000000000e+00C228 x2 y18 4.0176082839e-48 0.0000000000e+00 0.0000000000e+00C230 y20 2.5896774582e-48 0.0000000000e+00 0.0000000000e+00C232 x20 y 1.2714204873e-56 0.0000000000e+00 0.0000000000e+00C234 x18 y3 1.5807861627e-55 0.0000000000e+00 0.0000000000e+00C236 x16 y5 -2.9989785331e-54 0.0000000000e+00 0.0000000000e+00C238 x14 y7 -8.0917450732e-53 0.0000000000e+00 0.0000000000e+00C240 x12 y9 -7.4569995805e-52 0.0000000000e+00 0.0000000000e+00C242 x10 y11 -3.6621029205e-51 0.0000000000e+00 0.0000000000e+00C244 x8 y13 -1.0456581668e-50 0.0000000000e+00 0.0000000000e+00C246 x6 y15 -1.7287462285e-50 0.0000000000e+00 0.0000000000e+00C248 x4 y17 -1.4026765354e-50 0.0000000000e+00 0.0000000000e+00C250 x2 y19 1.1422098029e-51 0.0000000000e+00 0.0000000000e+00C252 y21 3.5735354910e-51 0.0000000000e+00 0.0000000000e+00C253 x22 9.0214942309e-61 0.0000000000e+00 0.0000000000e+00C255 x20 y2 4.1954546147e-59 0.0000000000e+00 0.0000000000e+00C257 x18 y4 6.4284038790e-58 0.0000000000e+00 0.0000000000e+00C259 x16 y6 4.6250694497e-57 0.0000000000e+00 0.0000000000e+00C261 x14 y8 1.6755448887e-56 0.0000000000e+00 0.0000000000e+00C263 x12 y10 2.5396955676e-56 0.0000000000e+00 0.0000000000e+00C265 x10 y12 1.4105439494e-56 0.0000000000e+00 0.0000000000e+00C267 x8 y14 1.3511824189e-55 0.0000000000e+00 0.0000000000e+00C269 x6 y16 -2.9629909138e-55 0.0000000000e+00 0.0000000000e+00C271 x4 y18 -6.3131764939e-54 0.0000000000e+00 0.0000000000e+00C273 x2 y20 -1.6223394864e-53 0.0000000000e+00 0.0000000000e+00C275 y22 -9.6868689766e-54 0.0000000000e+00 0.0000000000e+00C277 x22 y -1.2411177718e-62 0.0000000000e+00 0.0000000000e+00C279 x20 y3 -1.9895404515e-61 0.0000000000e+00 0.0000000000e+00C281 x18 y5 2.3412146766e-60 0.0000000000e+00 0.0000000000e+00C283 x16 y7 9.2322628065e-59 0.0000000000e+00 0.0000000000e+00C285 x14 y9 1.0620309986e-57 0.0000000000e+00 0.0000000000e+00C287 x12 y11 6.5794640418e-57 0.0000000000e+00 0.0000000000e+00C289 x10 y13 2.4913882504e-56 0.0000000000e+00 0.0000000000e+00C291 x8 y15 5.8536170911e-56 0.0000000000e+00 0.0000000000e+00C293 x6 y17 8.3175149014e-56 0.0000000000e+00 0.0000000000e+00C295 x4 y19 5.8611128334e-56 0.0000000000e+00 0.0000000000e+00C297 x2 y21 -6.8440948530e-57 0.0000000000e+00 0.0000000000e+00C299 y23 -1.0608264817e-56 0.0000000000e+00 0.0000000000e+00Table 3a for Fig. 4Coefficient Formula M04 M05 M06C2 y 2.6065739088e-04 4.8929789376e-06 -5.0848899939e-04C7 x2 y -5.7325742060e-08 -3.6686923237e-08 -1.5304159684e-07C9 y3 -1.0001462614e-08 5.2173813058e-08 9.9555116750e-08C10 x4 -1.3964836049e-11 -5.3971413575e-11 1.3262093260e-12C12 x2 y2 -5.6112102729e-12 6.2162013450e-11 -8.1410088341e-11C14 y4 -1.7362647379e-11 -6.2504241333e-12 -2.9916878200e-11C16 x4 y 3.7737605998e-15 4.2557347392e-16 -7.3184186073e-14C18 x2 y3 -2.7509627479e-14 3.6568891036e-14 -2.6888960374e-13C20 y5 -7.2060666454e-15 1.0397475635e-13 5.3748642790e-13C21 x6 1.7106119333e-17 3.8546214471e-18 2.3635269305e-18C23 x4 y2 -3.8160281115e-17 1.3743275520e-16 -1.0028287507e-16C25 x2 y4 2.9939049097e-17 2.9576375233e-16 -1.7953820886e-16C27 y6 2.0764798670e-17 3.1788200471e-16 3.6738493527e-15C29 x6 y -6.9486378247e-20 4.6740131349e-20 -1.7695706376e-19C31 x4 y3 8.6072308719e-20 2.6319241295e-19 6.0703418537e-19C33 x2 y5 4.8032905177e-20 1.3202809513e-18 5.5917811903e-18C35 y7 7.0805568089e-20 6.6262092993e-18 2.0237899997e-17C36 x8 -1.2279211977e-22 7.3852669489e-24 7.3995871676e-24C38 x6 y2 1.1629102483e-22 5.1238130484e-23 -5.6855208783e-22C40 x4 y4 -1.0284023758e-22 1.5070938314e-21 6.6622244716e-21C42 x2 y6 -3.6672183264e-23 1.6319115369e-20 -1.2012296324e-20C44 y8 -1.3226660057e-22 1.3269445441e-20 -6.2447171641e-19C46 x8 y 2.8463401005e-25 2.1817641098e-25 2.0947798347e-25C48 x6 y3 -1.1805369568e-25 1.1158324316e-24 -3.5050989707e-24C50 x4 y5 -4.1457115343e-26 1.6490567524e-23 -5.3867512803e-23C52 x2 y7 -7.6050369619e-25 -1.4042800864e-23 -1.6855357452e-21C54 y9 -1.1797928467e-25 -2.0244965395e-22 -7.8803540456e-22C55 x10 4.7696905303e-28 -1.6198259397e-28 3.0316057898e-29C57 x8 y2 2.1922306156e-28 8.0244277990e-28 3.8377961534e-27C59 x6 y4 1.9673834990e-27 1.5542893485e-26 -5.5479492296e-26C61 x4 y6 2.1068615299e-27 1.1698891768e-26 -1.7193213286e-24C63 x2 y8 3.1317941049e-27 -5.3627671250e-25 4.6455619372e-24C65 y10 1.6112090267e-27 -9.5709625035e-25 8.2337298810e-23C67 x10 y -7.5769222704e-31 -1.0014353570e-30 -1.2909670754e-30C69 x8 y3 1.5408221294e-30 7.0002963455e-30 4.7985605707e-29C71 x6 y5 2.8822942268e-30 6.4586337836e-29 -5.0579110936e-28C73 x4 y7 9.9974351042e-30 -1.2244924159e-28 1.2680001779e-26C75 x2 y9 1.4017180570e-29 1.0767556766e-27 2.0716076268e-25C77 y11 3.5162879785e-31 4.3531712302e-27 9.9461840417e-26C78 x12 -1.4183025509e-33 4.9232630968e-34 -1.8540075354e-34C80 x10 y2 -1.3965548829e-33 -1.6970901919e-33 -2.6298212403e-32C82 x8 y4 -1.3201622881e-32 2.2167824536e-32 2.1080747420e-31C84 x6 y6 -2.5122234640e-32 -1.2828448950e-31 1.5127631851e-29C86 x4 y8 -1.3129841643e-32 3.4397390513e-30 2.4496325298e-28C88 x2 y10 -1.8390681022e-32 2.5512116121e-29 -3.6640878883e-28C90 y12 -1.3794382760e-32 4.5750752617e-29 -7.7597010159e-27C92 x12 y 9.6428647015e-37 3.2120019859e-36 2.6882645418e-36C94 x10 y3 -1.1439786767e-35 7.1096230710e-36 -4.7615381388e-34C96 x8 y5 -4.7816054318e-35 -2.7381613770e-34 3.9118223838e-33C98 x6 y7 -7.8880672250e-35 1.3096275690e-34 1.6898579733e-31C100 x4 y9 -1.0305737368e-34 1.5113616431e-32 -1.0019898386e-30C102 x2 y11 -1.1831275732e-34 5.5123977164e-32 -1.5657019647e-29C104 y13 -2.1273600818e-35 6.9633223124e-32 -8.1411377253e-30C105 x14 2.2555155987e-39 -7.9742997253e-40 6.2945925859e-40C107 x12 y2 3.3135035082e-39 1.8413627555e-38 6.4335580463e-38C109 x10 y4 2.9732703389e-38 -2.6454997859e-39 -2.9307770432e-36C111 x8 y6 1.1728486647e-37 -2.7220029294e-37 1.6442694123e-35C113 x6 y8 1.8961575224e-37 -1.4357385833e-36 -1.1370583514e-33C115 x4 y10 5.7267639032e-38 -7.6258029556e-35 -1.5746421742e-32C117 x2 y12 -6.7319526858e-39 -3.6181545261e-34 -6.1559919612e-33C119 y14 2.7680743051e-38 -5.9384972080e-34 4.1098718059e-31C121 x14 y 1.4007906356e-42 -3.2602271064e-42 -9.1771797205e-43C123 x12 y3 4.2050935666e-41 6.3448565850e-41 1.4953942957e-39C125 x10 y5 2.9907763806e-40 6.0666078781e-40 -3.9539481088e-39C127 x8 y7 8.9885102350e-40 5.6893047991e-39 -9.1356478325e-37C129 x6 y9 1.1914871083e-39 -5.8532933939e-38 -1.3174610232e-35C131 x4 y11 9.0249748575e-40 -6.2237716541e-37 1.5525719073e-35C133 x2 y13 5.4836149901e-40 -2.3592520034e-36 6.0027397413e-34C135 y15 1.2103690119e-40 -3.0802122093e-36 4.6699794189e-34C136 x16 -1.3806837219e-45 8.1129109923e-46 -5.8708204628e-46C138 x14 y2 4.3642017272e-45 -1.0112435848e-44 -1.1738655727e-44C140 x12 y4 1.1475522671e-43 1.3767256599e-43 1.5803362542e-41C142 x10 y6 7.0960627824e-43 5.1640007010e-42 -1.5953835404e-40C144 x8 y8 1.6533875815e-42 5.2427582119e-42 -7.0747913689e-39C146 x6 y10 1.9405817073e-42 -2.0245611242e-40 -1.2756275949e-38C148 x4 y12 1.5713669689e-42 -1.5197639855e-39 4.9419629992e-37C150 x2 y14 8.9754096768e-43 -5.3466051810e-39 1.1399314927e-36C152 y16 1.5177504927e-43 -5.4603162822e-39 -9.2524015650e-36C154 x16 y -1.8743620317e-48 4.2716144726e-48 9.2488292077e-49C156 x14 y3 2.3452774940e-48 -7.5971472412e-47 -1.7287944647e-46C158 x12 y5 1.1758355175e-46 9.2312307079e-46 6.3999106711e-44C160 x10 y7 5.4452493004e-46 4.8018814326e-45 -1.4482539721e-42C162 x8 y9 9.9762759854e-46 -3.6007509052e-45 -2.2438807744e-42C164 x6 y11 1.0894575376e-45 -2.1688005833e-43 -2.4743642458e-41C166 x4 y13 8.7011082546e-46 -1.3140651331e-42 1.7987990013e-39C168 x2 y15 4.5900970596e-46 -4.5638004783e-42 -7.1449785955e-39C170 y17 7.2415615545e-47 -3.0926040203e-42 -1.2597347629e-38Table 3b for Fig. 4Coefficient Formula M07 M08 M09C2 y 2.7359323847e-02 3.1113196983e-01 6.4584512410e-02C7 x2 y -1.3367734509e-07 -8.8556170803e-07 4.8980125771e-08C9 y3 1.6357610736e-08 3.7846342248e-06 5.7456410227e-08C10 x4 1.1926875339e-10 7.2441618954e-10 -1.2124430553e-11C12 x2 y2 -9.3834684601e-11 8.8193866835e-10 -5.4772159181e-11C14 y4 -4.1790762693e-11 2.4750506414e-08 -3.4201302006e-11C16 x4 y 9.8047572377e-14 7.4670565042e-13 4.8534015108e-14C18 x2 y3 1.0815316302e-13 -7.3674104226e-12 1.2384815018e-13C20 y5 1.2221148482e-13 1.9402768996e-10 6.9766638184e-14C21 x6 7.2757535677e-17 2.1602184227e-16 -3.0068584586e-17C23 x4 y2 -3.5267799928e-16 1.1697864289e-14 -1.2828588717e-16C25 x2 y4 -7.3373646511e-16 -5.8129234240e-14 -1.7983707029e-16C27 y6 -3.5167471692e-16 1.6683096173e-12 -7.7688692839e-17C29 x6 y 9.1035419477e-19 -4.8222580981e-18 5.8368528395e-20C31 x4 y3 2.2095615249e-18 1.3059753078e-16 2.2203427506e-19C33 x2 y5 2.2003405462e-18 -7.4887074902e-16 2.7489305457e-19C35 y7 8.3991626921e-19 1.3694356821e-14 1.1500909026e-19C36 x8 -1.0090634993e-21 7.1285361033e-22 -4.2737649843e-23C38 x6 y2 -3.3397759432e-21 2.7910601521e-20 -2.5942703946e-22C40 x4 y4 -5.8711914635e-21 3.1315537764e-18 -5.0600950119e-22C42 x2 y6 -3.3751042713e-21 8.7977976282e-18 -4.6260683259e-22C44 y8 -1.7796111398e-21 8.8070286561e-17 -1.0663416702e-22C46 x8 y 2.5147434583e-24 -6.6980454854e-23 7.7033504069e-26C48 x6 y3 7.6371975639e-24 -2.4651201950e-21 4.9724326575e-25C50 x4 y5 -8.3135030697e-24 1.7055198835e-20 8.7718173713e-25C52 x2 y7 7.2954886861e-24 3.8791001738e-19 7.4232811211e-25C54 y9 6.3242317607e-24 3.9719423706e-19 2.2308370431e-25C55 x10 1.1178967874e-27 3.4228874531e-25 -9.9449402639e-29C57 x8 y2 -1.4299968064e-26 1.6186042828e-24 -5.1349357215e-28C59 x6 y4 9.6331725432e-26 -5.0030646168e-23 -1.3562189013e-27C61 x4 y6 -2.9501634165e-26 -6.1739643720e-22 -1.6875770199e-27C63 x2 y8 -8.5972608608e-26 5.3093287436e-21 -8.1936862639e-28C65 y10 -3.0989851171e-26 1.0432784129e-21 -1.4079210619e-28C67 x10 y 7.7825692078e-30 5.7612004717e-27 -1.2592043001e-31C69 x8 y3 -4.6745379515e-28 5.8071122052e-26 -5.1919315998e-31C71 x6 y5 2.1214530367e-28 -4.4785151724e-26 -1.1678181395e-30C73 x4 y7 6.7769307238e-28 -1.5525337154e-23 -1.1672636493e-30C75 x2 y9 4.4245962887e-28 3.6315376682e-23 -3.8345399929e-31C77 y11 1.0676052740e-28 -6.6140949425e-25 -1.9381080728e-31C78 x12 3.5960938823e-32 -8.3274994596e-30 1.1191278067e-34C80 x10 y2 1.2934384417e-30 -2.3639087137e-29 1.1189554205e-34C82 x8 y4 -1.3077346365e-30 5.2782074873e-28 -1.0355606598e-33C84 x6 y6 -3.1663044587e-30 1.3445931387e-26 -2.3813477095e-33C86 x4 y8 -2.2543623034e-30 -1.6292030242e-25 -3.0426143690e-33C88 x2 y10 -9.6541531520e-31 1.1744632878e-25 -2.9767111005e-33C90 y12 -2.2325327349e-31 -1.8781616694e-26 -1.4367189190e-33C92 x12 y -1.1016353080e-33 -1.7114978665e-31 2.1889808038e-36C94 x10 y3 7.7571603193e-33 -1.0101438984e-30 1.3842454812e-35C96 x8 y5 1.1253933933e-32 -3.9298038796e-30 4.0847384282e-35C98 x6 y7 5.5464146717e-33 2.3698404826e-28 6.4082024124e-35C100 x4 y9 1.4190131650e-33 -9.0712286227e-28 5.4634901983e-35C102 x2 y11 5.2467876972e-34 4.7118328170e-29 2.1938072838e-35C104 y13 2.6635591200e-34 -7.7389224359e-29 4.1076269499e-36C105 x14 -3.7580911797e-37 1.0989377931e-34 -1.6132468754e-39C107 x12 y2 -1.9492301685e-35 -5.6434209716e-35 -1.0261992722e-38C109 x10 y4 -2.3361916460e-35 -1.0860351856e-34 -2.5236979174e-38C111 x8 y6 -3.1306859571e-36 -1.3860899274e-31 -4.7471660096e-38C113 x6 y8 9.2013937816e-36 1.8416650649e-30 -5.5991812736e-38C115 x4 y10 4.5439252228e-36 -2.6762095244e-30 -2.9978106627e-38C117 x2 y12 1.3800375084e-36 -4.2749574299e-31 -2.5360960990e-39C119 y14 -1.4632625636e-37 -1.9611787867e-31 4.6799330693e-39C121 x14 y 1.4359563383e-38 2.7870734798e-36 -1.0608322032e-41C123 x12 y3 -1.3097453192e-38 1.2726882957e-35 -7.7376363928e-41C125 x10 y5 -6.8832908778e-38 1.7367955993e-34 -2.7100501927e-40C127 x8 y7 -6.8210002723e-38 -1.3315624006e-33 -5.1310535842e-40C129 x6 y9 -3.3381334450e-38 6.2493516547e-33 -5.7808648969e-40C131 x4 y11 -3.0711785174e-39 -5.0899964612e-33 -3.8586838830e-40C133 x2 y13 -2.1267616037e-39 1.5428139992e-33 -1.2651585993e-40C135 y15 -5.5832565763e-42 -3.4353116934e-34 -1.7316392703e-41C136 x16 1.2478358393e-42 -8.2260571793e-40 6.5826003637e-45C138 x14 y2 8.6907304238e-41 5.4594204895e-39 4.9221093553e-44C140 x12 y4 2.3830220344e-40 -4.4977722304e-38 1.4265989106e-43C142 x10 y6 2.6819162260e-40 1.8702240170e-36 3.0433522277e-43C144 x8 y8 1.1852075398e-40 -4.1617060244e-36 4.7682509094e-43C146 x6 y10 1.4380445954e-41 5.0822292406e-36 4.4335909295e-43C148 x4 y12 -1.2563300828e-41 -1.3698711801e-35 1.9278772325e-43C150 x2 y14 3.0923047051e-43 6.7981388463e-36 2.2207717156e-44C152 y16 2.8180259096e-44 3.7332289683e-37 -1.6044854396e-44C154 x16 y -5.7575200869e-44 -2.9735550646e-41 3.6153677332e-47C156 x14 y3 -1.9445312565e-43 -1.2777919979e-40 3.1270101702e-46C158 x12 y5 -2.8671957092e-43 -2.2673955497e-39 1.2828412643e-45C160 x10 y7 -2.3711158442e-43 3.2221875213e-39 2.9075008910e-45C162 x8 y9 -2.8056468335e-44 1.1645351469e-38 4.0268265886e-45C164 x6 y11 1.5863862872e-44 1.6222019242e-38 3.5571044913e-45C166 x4 y13 1.3814938279e-44 8.8417089416e-39 1.9728316280e-45C168 x2 y15 6.3881220893e-46 -9.8568576178e-39 5.7315398817e-46C170 y17 2.3666963006e-48 1.7384324439e-39 6.8930587499e-47C171 x18 0.0000000000e+00 2.5565996505e-45 -2.0034526320e-50C173 x16 y2 0.0000000000e+00 -9.1237604095e-44 -1.8455427277e-49C175 x14 y4 0.0000000000e+00 5.6409953203e-43 -7.0839085424e-49C177 x12 y6 0.0000000000e+00 -1.9028270860e-41 -1.8150420280e-48C179 x10 y8 0.0000000000e+00 -6.4025080891e-41 -3.4084687827e-48C181 x8 y10 0.0000000000e+00 3.8533671551e-41 -4.3189508319e-48C183 x6 y12 0.0000000000e+00 1.3455739820e-40 -3.3754144684e-48C185 x4 y14 0.0000000000e+00 2.1350143238e-40 -1.4633734213e-48C187 x2 y16 0.0000000000e+00 1.2897858646e-41 -3.1412934740e-49C189 y18 0.0000000000e+00 1.3218608956e-42 5.3653090942e-51C191 x18 y 0.0000000000e+00 2.0171760632e-46 -7.1829787316e-53C193 x16 y3 0.0000000000e+00 1.1471610114e-45 -6.9444999225e-52C195 x14 y5 0.0000000000e+00 1.2465129382e-44 -3.2737483988e-51C197 x12 y7 0.0000000000e+00 -3.8742855023e-44 -8.6388674060e-51C199 x10 y9 0.0000000000e+00 -3.0639027419e-43 -1.4105993135e-50C201 x8 y11 0.0000000000e+00 -3.4149984491e-43 -1.5105931000e-50C203 x6 y13 0.0000000000e+00 -3.6909372195e-43 -1.0857263315e-50C205 x4 y15 0.0000000000e+00 -3.2789618887e-43 -5.1133230107e-51C207 x2 y17 0.0000000000e+00 1.6044511558e-43 -1.3077106477e-51C209 y19 0.0000000000e+00 2.9533362095e-44 -1.4425065556e-52C210 x20 0.0000000000e+00 1.0021610185e-50 3.2291262760e-56C212 x18 y2 0.0000000000e+00 1.0095408789e-48 3.5026858904e-55C214 x16 y4 0.0000000000e+00 -3.8802979042e-48 1.6259841015e-54C216 x14 y6 0.0000000000e+00 3.6853624321e-47 4.8539359614e-54C218 x12 y8 0.0000000000e+00 2.5437489544e-46 1.0588541990e-53C220 x10 y10 0.0000000000e+00 5.9569026334e-46 1.6335535688e-53C222 x8 y12 0.0000000000e+00 3.3045373275e-46 1.6994023851e-53C224 x6 y14 0.0000000000e+00 -1.1301898396e-46 1.1442668979e-53C226 x4 y16 0.0000000000e+00 -8.5463127733e-46 4.6216880882e-54C228 x2 y18 0.0000000000e+00 8.3161888735e-47 1.0374978103e-54C230 y20 0.0000000000e+00 -1.0490557395e-47 5.7703058267e-56C232 x20 y 0.0000000000e+00 -6.5092877053e-52 7.8641616107e-59C234 x18 y3 0.0000000000e+00 -6.4858843267e-51 8.2296222046e-58C236 x16 y5 0.0000000000e+00 -8.0851520445e-50 4.4102483557e-57C238 x14 y7 0.0000000000e+00 -2.1139860098e-49 1.3320210573e-56C240 x12 y9 0.0000000000e+00 -6.1917684413e-49 2.4816930748e-56C242 x10 y11 0.0000000000e+00 1.1475619323e-48 3.0687295219e-56C244 x8 y13 0.0000000000e+00 3.9138365548e-48 2.6245241996e-56C246 x6 y15 0.0000000000e+00 5.8995901833e-48 1.5647051244e-56C248 x4 y17 0.0000000000e+00 1.0334358735e-47 6.3522309228e-57C250 x2 y19 0.0000000000e+00 2.5017278554e-48 1.4205843033e-57C252 y21 0.0000000000e+00 -1.5977674955e-49 1.4868941428e-58C253 x22 0.0000000000e+00 -8.5257057536e-56 -2.5592645923e-62C255 x20 y2 0.0000000000e+00 -5.7607781183e-54 -3.2122214967e-61C257 x18 y4 0.0000000000e+00 -2.4745093052e-53 -1.7904466735e-60C259 x16 y6 0.0000000000e+00 -1.6962973086e-52 -6.3078897303e-60C261 x14 y8 0.0000000000e+00 -2.7654593759e-51 -1.5848819714e-59C263 x12 y10 0.0000000000e+00 -1.8524563477e-50 -2.8590285497e-59C265 x10 y12 0.0000000000e+00 -3.8756844952e-50 -3.6273320490e-59C267 x8 y14 0.0000000000e+00 -5.5059582223e-50 -3.2139298276e-59C269 x6 y16 0.0000000000e+00 -7.5444511222e-50 -1.9245773714e-59C271 x4 y18 0.0000000000e+00 -2.5645450512e-50 -7.3164726820e-60C273 x2 y20 0.0000000000e+00 -1.1223809716e-51 -1.6276267117e-60C275 y22 0.0000000000e+00 9.4849406164e-52 -1.3481222765e-61C277 x22 y 0.0000000000e+00 -1.3714011560e-58 -2.9677316243e-65C279 x20 y3 0.0000000000e+00 -9.0817566213e-57 -3.0362182084e-64C281 x18 y5 0.0000000000e+00 6.0122197882e-56 -1.7716187487e-63C283 x16 y7 0.0000000000e+00 -9.0875847699e-56 -5.6939282856e-63C285 x14 y9 0.0000000000e+00 -8.8878233379e-54 -1.0669065299e-62C287 x12 y11 0.0000000000e+00 -5.3555876304e-53 -1.2044816487e-62C289 x10 y13 0.0000000000e+00 -1.2376944466e-52 -8.3223547321e-63C291 x8 y15 0.0000000000e+00 -2.0814828518e-52 -2.8475892176e-63C293 x6 y17 0.0000000000e+00 -2.9015078128e-52 7.7139805307e-65C295 x4 y19 0.0000000000e+00 -1.7401691373e-52 3.9227854548e-64C297 x2 y21 0.0000000000e+00 -3.5717561820e-53 2.1720802320e-64C299 y23 0.0000000000e+00 8.5710920951e-55 2.1703072249e-65Table 3c for Fig. 4Coordinates of the stop edge xi [mm] yi [mm] xi+N / 2 [mm] yi+N / 2 [mm]-337.985123 29.122461 337.951018 16.078002-337.656361 35.641528 337.588376 9.563728-337.097445 42.150900 336.996044 3.061989-336.309052 48.644769 336.174967 -3.421929-335.292153 55.117245 335.126422 -9.882852-334.047997 61.562374 333.852012 -16.315720-332.578087 67.974158 332.353654 -22.715588-330.884173 74.346584 330.633563 -29.077624-328.968227 80.673652 328.694241 -35.397122-326.832432 86.949413 326.538451 -41.669498-324.479169 93.167998 324.169201 -47.890299-321.911009 99.323663 321.589718 -54.055207-319.130703105.410818 318.803428 -60.160045-316.141181111.424063 315.813933 -66.200781-312.945545117.358218 312.624987 -72.173532-309.547075123.208349 309.240479 -78.074565-305.949226128.969787 305.664409 -83.900303-302.155629134.638142 301.900873 -89.647320-298.170101140.209318 297.954045 -95.312342-293.996638145.679514 293.828164 -100.892245-289.639421151.045228 289.527522 -106.384050-285.102818156.303257 285.056451 -111.784920-280.391379161.450687 280.419314 -117.092152-275.509833166.484892 275.620500 -122.303175-270.463084171.403518 270.664416 -127.415539-265.256200176.204479 265.555476 -132.426912-259.894400180.885937 260.298104 -137.335071-254.383042185.446291 254.896724 -142.137896-248.727601189.884161 249.355756 -146.833363-242.933655194.198371 243.679613 -151.419536-237.006856198.387931 237.872697 -155.894561-230.952911202.452019 231.939394 -160.256660-224.777554206.389969 225.884072 -164.504124-218.486526210.201249 219.711077 -168.635306-212.085546213.885450 213.424730 -172.648616-205.580288217.442271 207.029325 -176.542516-198.976361220.871506 200.529125 -180.315514-192.279285224.173038 193.928360 -183.966160-185.494477227.346824 187.231230 -187.493040-178.627229230.392890 180.441898 -190.894776-171.682695233.311323 173.564489 -194.170019-164.665880236.102267 166.603096 -197.317451-157.581628238.765910 159.561770 -200.335780-150.434615241.302487 152.444528 -203.223739-143.229343243.712266 145.255347 -205.980088-135.970133245.995548 137.998167 -208.603615-128.661129248.152658 130.676887 -211.093135-121.306291250.183940 123.295369 -213.447491-113.909400252.089752 115.857434 -215.665561-106.474060253.870460 108.366865 -217.746257-99.003705255.526432 100.827405 -219.688529-91.501600257.058031 93.242754 -221.491372-83.970851258.465615 85.616578 -223.153828-76.414415259.749525 77.952499 -224.674990-68.835103260.910090 70.254105 -226.054010-61.235597261.947614 62.524946 -227.290099-53.618457262.862379 54.768537 -228.382538-45.986133263.654640 46.988361 -229.330678-38.340980264.324622 39.187872 -230.133947-30.685266264.872518 31.370498 -230.791852-23.021191265.298490 23.539644 -231.303986-15.350894265.602665 15.698696 -231.670027-7.676474265.785133 7.851027 -231.8897440.000000265.845949 0.000000 -231.962999476278890082971155890196004666401636129520289.639421151.045228 -289.527522 -106.384050293.996638145.679514 -293.828164 -100.892245298.170101140.209318 -297.954045 -95.312342302.155629134.638142 -301.900873 -89.647320305.949226128.969787 -305.664409 -83.900303309.547075123.208349 -309.240479 -78.074565312.945545117.358218 -312.624987 -72.173532316.141181111.424063 -315.813933 -66.200781319.130703105.410818 -318.803428 -60.160045321.911009 99.323663 -321.589718 -54.055207324.479169 93.167998 -324.169201 -47.890299326.832432 86.949413 -326.538451 -41.669498328.968227 80.673652 -328.694241 -35.397122330.884173 74.346584 -330.633563 -29.077624332.578087 67.974158 -332.353654 -22.715588334.047997 61.562374 -333.852012 -16.315720335.292153 55.117245 -335.126422 -9.882852336.309052 48.644769 -336.174967 -3.421929337.097445 42.150900 -336.996044 3.061989337.656361 35.641528 -337.588376 9.563728337.985123 29.122461 -337.951018 16.078002338.083359 22.599415 -338.083359 22.599415Table 4 for Fig. 4Numerical aperture = 0.75 1 / βx= -4.20 1 / βy = -8.00Track length = 2417 mmObject-image shift = 4357 mmWidth of the installation space = 4944 mmOptically used overall mirror area = 3.67 m²Linear pupil obscuration = 18.7% Minimum angle on grazing incident mirror = 69.8°Scan slot length on the wafer = 1.2 mmScan-integrated wavefront RMS = 7.97 mλTransmission = 6.73%Étendue = 55.1 mm²Mirror with maximum diameter = M9Maximum optical mirror diameter = 1152 mmMirror with maximum area = M9 Table 5 for Fig. 4Fig. 5 shows a further embodiment of a projection optical unit or imaging optical unit 26, whichcan be used in the projection exposure apparatus 1 instead of the projection optical unit 10. Com- ponents and functions corresponding to those which have already been explained above with ref-erence to Figures 1 to 4 bear the same reference signs and will not be discussed in detail again.The basic structure of the projection optical unit 26 corresponds to that of the projection optical unit 24 according to Fig.3. A distance between the used reflection surface of the mirror M8 and the image plane 12 isgreater than 100 mm in the projection optical unit 26.The projection optical unit 26 has a high overall transmission.A maximum mirror diameter in the projection optical unit 26 is 1150 mm. The mirror M9 situ-ated last in the imaging beam path of the projection optical unit 26 and determining the image- side numerical aperture has this maximum mirror diameter. The optical design data for the projection optical unit 26 emerge from following Tables 1 to 5, which, in turn, correspond in terms of the basic structure to Tables 1 to 5 relating to the embodi- ment according to Figure 4. Radii of the surfaces Radiusx [mm] Powerx [1 / mm] Radiusy [mm] Powery [1 / mm]M01 -5345.30848113 0.00036602 -1656.27779013 0.00118126M02 11556.14478814 -0.00017307 1632.46171126 -0.00122514M03 -47043.26535051 0.00004240 -6464.15502859 0.00030854M04 -2223.52318662 0.00089947 -9524.79357108 0.00020998M05 -1728.48560689 0.00036576 -5695.03966950 0.00011101M06 -1262.65586581 0.00031725 2459.80129155 -0.00016285M07 -2269.33930237 0.00014309 -5713.85666020 0.00005683M08 3341.27588865 -0.00014654 356.14762535 -0.00137475M09 -859.04699076 0.00232816 -767.33746231 0.00260642Table 1 for Fig. 5 Decentring (location, angle) the surfaces Dx [mm] Dy [mm] Dz [mm]Reticle 0.000000000 0.000000000 0.000000000M01 0.000000000 -260.7216092222366.468715230M02 0.000000000 -584.4529177871401.941006633M03 0.000000000 -1071.716520466 946.749900156M04 0.000000000 -2544.974539849 409.027132009M05 0.000000000 -4056.110040595 302.416336414M06 0.000000000 -4584.073779485 441.185167104M07 0.000000000 -5149.691035722 880.717871156M08 0.000000000 -5546.6065604772334.632222506Stop 0.000000000 -5518.9449852252271.645932577M09 0.000000000 -5300.4747850471774.182312218Wafer 0.000000000 -5300.4748269222491.924867842 Reticle 0.000000000 0.000000000 0.000000000M01 -6.133278456 0.000000000 0.000000000M02 237.248632987 0.000000000 -0.000000000M03 211.551224728 -0.000000000 -0.000000000M04 192.043528394 -0.000000000 -0.000000000M05 174.654564112 -0.000000000 -0.000000000M06 153.711672940 -0.000000000 -0.000000000M07 123.709651999 -0.000000000 -0.000000000M08 19.489551050 0.000000000 -0.000000000Stop 180.507708599 -0.000000000 -0.000000000M09 191.854778437 -0.000000000 -0.000000000Wafer 0.000003343 0.000000000180.000000000Table 2 for Fig. 5Free-form coefficients of the surfacesCoefficient Formula M01 M02 M03C2 y 1.0217955020e-04 7.5782594674e-04 1.9496717281e-04C7 x2 y -1.9817970405e-08 -1.0546559515e-07 -5.6608365958e-08C9 y3 -3.4724846611e-08 9.4474529108e-08 7.6200623601e-09C10 x4 -9.4274870260e-12 5.8552631689e-11 -1.0531327765e-10C12 x2 y2 3.1525554379e-11 -1.7174872336e-10 -6.8598958494e-11C14 y4 -1.3486687791e-11 -1.2814883407e-11 -5.5012364187e-12C16 x4 y 6.6157183413e-14 2.4951831291e-13 -8.3108393271e-14C18 x2 y3 4.3832893078e-14 6.1650984775e-13 1.0506710142e-13C20 y5 -5.7173265788e-14 -1.5881072764e-12 -7.2109287929e-16C21 x6 1.3952134737e-17 2.7432259304e-18 6.7593777552e-17C23 x4 y2 7.3188992047e-17 -1.2690155017e-16 2.2765502476e-16C25 x2 y4 -1.5239395544e-17 2.7105873762e-15 -1.7876358164e-16C27 y6 2.4030109967e-17 1.2020384415e-15 -7.9849038430e-18C29 x6 y -5.5580981691e-20 -2.9777119706e-19 1.5051848018e-19C31 x4 y3 -1.4705833777e-19 -3.8188364936e-19 -3.5789244176e-19C33 x2 y5 -2.4717273686e-19 9.4018478399e-18 2.2597784675e-19C35 y7 8.1911405476e-19 -2.0327047368e-17 -2.3077803944e-20C36 x8 -4.2217664589e-23 4.2633660608e-22 2.3523621954e-22C38 x6 y2 -4.0049670167e-22 -7.0171964139e-22 -2.4836350684e-22C40 x4 y4 -2.3951660459e-21 -1.3454084027e-20 6.2629518227e-22C42 x2 y6 -3.6739644932e-21 6.3661156000e-20 -6.3578192990e-22C44 y8 -3.6534930107e-21 -1.3004825024e-19 1.3467416670e-22C46 x8 y 5.7662831135e-25 8.9232368910e-25 -2.2569026279e-25C48 x6 y3 4.8179988256e-24 1.8476399156e-24 6.0068720092e-25C50 x4 y5 -7.8920288232e-24 -9.9885325345e-23 -2.2896528317e-24C52 x2 y7 -8.9084019630e-23 4.4693590112e-22 2.6503659488e-24C54 y9 -3.7409452003e-23 6.0292382089e-22 4.6037460362e-25C55 x10 2.7444274975e-28 6.3635340358e-28 -6.1922656390e-29C57 x8 y2 8.1923605013e-27 7.5137156943e-27 -1.2047361391e-28C59 x6 y4 8.8048716386e-26 9.9458787025e-26 -5.0812303793e-27C61 x4 y6 3.3306178393e-25 -5.1301909690e-25 9.5317170855e-27C63 x2 y8 3.6331050635e-25 -2.4251903253e-25 1.8818358274e-27C65 y10 2.1823147478e-25 4.1974962732e-24 7.4625032814e-28C67 x10 y -1.1067135000e-29 -2.6250075964e-33 -3.1860798055e-31C69 x8 y3 -1.3712544889e-28 -1.6033100195e-29 -5.4489110267e-30C71 x6 y5 -1.9834661820e-28 6.8600644518e-28 1.9238990163e-29C73 x4 y7 3.0197838372e-27 2.1455710589e-28 -5.0287564970e-30C75 x2 y9 8.3769530523e-27 -1.7064630973e-26 -1.3211103154e-29C77 y11 1.4358608557e-27 -3.6242943055e-26 -7.1598846554e-30C78 x12 -2.9207333238e-33 -6.3728960271e-33 -1.1277733918e-33C80 x10 y2 -1.1104040312e-31 -1.5547251491e-32 -3.5637538968e-34C82 x8 y4 -1.6307740743e-30 -4.8508486055e-31 2.9691272738e-32C84 x6 y6 -1.0324437829e-29 9.1672207713e-31 -1.3067373209e-32C86 x4 y8 -2.5959132164e-29 1.6452047295e-29 -6.7430273552e-32C88 x2 y10 -2.0350235350e-29 -1.1888503911e-29 -7.7524615964e-32C90 y12 -1.0277194404e-29 -1.2835940603e-28 -1.4817071470e-32C92 x12 y 1.3351964513e-34 -1.5695652559e-35 2.3017025436e-36C94 x10 y3 2.2369569175e-33 3.9383082474e-35 2.6925704650e-35C96 x8 y5 1.0834356217e-32 -1.8881534411e-33 -2.1690095645e-35C98 x6 y7 -2.8735585366e-32 -2.0431529247e-32 -8.2575956054e-35C100 x4 y9 -2.9045288093e-31 6.4732358017e-32 -9.4508261650e-35C102 x2 y11 -4.6907620277e-31 5.5441679818e-31 1.1907969575e-34C104 y13 -4.4167634906e-32 1.0653979546e-30 -1.1415862149e-35C105 x14 2.2299370784e-38 1.5992272988e-38 3.3258478416e-39C107 x12 y2 9.9717617411e-37 9.5640556183e-40 -1.7413990249e-39C109 x10 y4 1.7807947960e-35 1.3298891995e-36 -3.1604224133e-38C111 x8 y6 1.5454891328e-34 6.2223093903e-36 -1.1299219647e-37C113 x6 y8 6.4734276744e-34 -7.6099129313e-35 -3.8170882377e-38C115 x4 y10 1.1713553711e-33 -1.5216626604e-34 8.2141760179e-37C117 x2 y12 7.4614196487e-34 6.8642198475e-34 2.6897305970e-37C119 y14 3.4604293724e-34 7.1206725239e-34 2.1721080684e-37C121 x14 y -1.0521935070e-39 5.3218644903e-41 -7.9272538475e-42C123 x12 y3 -2.1787376452e-38 5.8985064908e-41 -4.4518475351e-41C125 x10 y5 -1.7540238317e-37 -1.0264559166e-40 -7.8239987469e-41C127 x8 y7 -1.8529140380e-37 9.7198827039e-38 -1.8060829601e-40C129 x6 y9 3.5536244262e-36 2.0549114042e-37 1.0868339451e-39C131 x4 y11 1.4657871010e-35 -1.4816556545e-36 -5.9758147612e-41C133 x2 y13 1.6573235789e-35 -1.0339977276e-35 5.9693291709e-40C135 y15 8.7104896066e-37 -2.5136854823e-35 1.9265499146e-40C136 x16 -1.1488855071e-43 -7.1940938578e-45 -1.6299756002e-46C138 x14 y2 -5.8908111731e-42 4.3000213646e-44 1.7550426087e-44C140 x12 y4 -1.1964330692e-40 -1.2415943585e-42 -7.0969726257e-44C142 x10 y6 -1.2839203608e-39 -2.0783335008e-41 -1.3866583506e-43C144 x8 y8 -7.5226091131e-39 1.0514114904e-40 9.6280413033e-43C146 x6 y10 -2.2849374738e-38 5.8645708505e-40 -1.4623580047e-42C148 x4 y12 -3.2150634310e-38 2.1809331691e-39 -1.0569615310e-42C150 x2 y14 -1.8349268442e-38 -1.1929916874e-38 -1.1977620316e-42C152 y16 -8.7617791255e-39 1.3836827022e-38 -5.8767832256e-43C154 x16 y 5.4356068350e-45 -7.6456952518e-47 8.5843639475e-48C156 x14 y3 1.3084321691e-43 -5.6330915194e-46 3.9600501486e-47C158 x12 y5 1.4482543362e-42 7.1426880689e-45 -2.2817533130e-46C160 x10 y7 5.3791960518e-42 -1.0524725367e-43 7.2515659406e-46C162 x8 y9 -1.4497654525e-41 -1.0230643436e-42 -7.8704170735e-46C164 x6 y11 -1.6353999665e-40 -1.3891227485e-42 -1.3067027595e-45C166 x4 y13 -4.2863688166e-40 2.1093361012e-41 -1.9755548350e-45C168 x2 y15 -3.7328833643e-40 6.2871971591e-41 -2.3686152642e-45C170 y17 -1.3444626767e-41 2.7631310600e-40 -8.4528389493e-46C171 x18 3.8322315003e-49 0.0000000000e+00 0.0000000000e+00C173 x16 y2 2.1949904302e-47 0.0000000000e+00 0.0000000000e+00C175 x14 y4 4.9005260583e-46 0.0000000000e+00 0.0000000000e+00C177 x12 y6 6.1137712340e-45 0.0000000000e+00 0.0000000000e+00C179 x10 y8 4.5379309052e-44 0.0000000000e+00 0.0000000000e+00C181 x8 y10 1.9523574783e-43 0.0000000000e+00 0.0000000000e+00C183 x6 y12 4.5884978674e-43 0.0000000000e+00 0.0000000000e+00C185 x4 y14 5.3202550872e-43 0.0000000000e+00 0.0000000000e+00C187 x2 y16 2.9128959170e-43 0.0000000000e+00 0.0000000000e+00C189 y18 1.4995356730e-43 0.0000000000e+00 0.0000000000e+00C191 x18 y -1.7774191922e-50 0.0000000000e+00 0.0000000000e+00C193 x16 y3 -4.7631265030e-49 0.0000000000e+00 0.0000000000e+00C195 x14 y5 -6.6204874851e-48 0.0000000000e+00 0.0000000000e+00C197 x12 y7 -3.9979269008e-47 0.0000000000e+00 0.0000000000e+00C199 x10 y9 -3.3165193780e-47 0.0000000000e+00 0.0000000000e+00C201 x8 y11 7.5836729036e-46 0.0000000000e+00 0.0000000000e+00C203 x6 y13 3.7959014762e-45 0.0000000000e+00 0.0000000000e+00C205 x4 y15 7.3232449953e-45 0.0000000000e+00 0.0000000000e+00C207 x2 y17 5.2191413716e-45 0.0000000000e+00 0.0000000000e+00C209 y19 1.9882477003e-46 0.0000000000e+00 0.0000000000e+00C210 x20 -7.4676443319e-55 0.0000000000e+00 0.0000000000e+00C212 x18 y2 -4.6748457311e-53 0.0000000000e+00 0.0000000000e+00 C263 x12 y10 1.1487609583e-54 0.0000000000e+00 0.0000000000e+00C265 x10 y12 4.9747780082e-54 0.0000000000e+00 0.0000000000e+00C267 x8 y14 1.3513034080e-53 0.0000000000e+00 0.0000000000e+00C269 x6 y16 2.1609599871e-53 0.0000000000e+00 0.0000000000e+00C271 x4 y18 1.9315537175e-53 0.0000000000e+00 0.0000000000e+00C273 x2 y20 1.0886710850e-53 0.0000000000e+00 0.0000000000e+00C275 y22 6.1640252542e-54 0.0000000000e+00 0.0000000000e+00C277 x22 y -2.7386919505e-62 0.0000000000e+00 0.0000000000e+00C279 x20 y3 -8.3607564373e-61 0.0000000000e+00 0.0000000000e+00C281 x18 y5 -1.5839473937e-59 0.0000000000e+00 0.0000000000e+00C283 x16 y7 -1.6391577221e-58 0.0000000000e+00 0.0000000000e+00C285 x14 y9 -8.0030089863e-58 0.0000000000e+00 0.0000000000e+00C287 x12 y11 -4.7652453001e-58 0.0000000000e+00 0.0000000000e+00C289 x10 y13 1.4995441731e-56 0.0000000000e+00 0.0000000000e+00C291 x8 y15 8.2888054314e-56 0.0000000000e+00 0.0000000000e+00C293 x6 y17 2.0821753828e-55 0.0000000000e+00 0.0000000000e+00C295 x4 y19 2.6544057789e-55 0.0000000000e+00 0.0000000000e+00C297 x2 y21 1.4296564540e-55 0.0000000000e+00 0.0000000000e+00C299 y23 1.0904879827e-56 0.0000000000e+00 0.0000000000e+00Table 3a for Fig. 5Coefficient Formula M04 M05 M06C2 y 1.9060940925e-05 4.6467008227e-04 2.5425189408e-03C7 x2 y -3.2603252167e-08 -5.4996051458e-08 -1.7094778431e-07C9 y3 4.7598742958e-09 -4.4678052527e-08 2.5045241070e-08C10 x4 -3.7233744410e-11 1.6138928295e-12 7.2024952246e-12C12 x2 y2 9.9729053646e-12 -2.9553971088e-11 -1.3381464667e-10C14 y4 -5.0125579916e-12 -6.0784864571e-11 2.0670655532e-10C16 x4 y 2.3736273322e-14 -2.2831736605e-16 8.0994765148e-14C18 x2 y3 -1.3385101323e-14 -5.8369787545e-14 -7.7087175508e-13C20 y5 1.5513857083e-15 -7.2677119146e-14 6.5766453613e-13C21 x6 4.8431201782e-17 3.7015755447e-18 -2.1567590359e-17C23 x4 y2 -2.4777116680e-17 -2.5193040863e-17 1.1218336007e-17C25 x2 y4 1.7214167265e-17 -8.5531562749e-17 1.8950368641e-15C27 y6 -6.6625398035e-19 -1.1837229437e-16 -2.5797517941e-15C29 x6 y -1.7508955646e-20 -2.0851215399e-20 -1.2853536716e-20C31 x4 y3 4.0043768540e-20 -5.3342467387e-20 1.1163167033e-18C33 x2 y5 -3.2793367941e-20 -1.7531776748e-19 -9.8771084375e-18C35 y7 -7.4843915881e-22 -2.7350452254e-19 -1.4272990525e-17C36 x8 5.9021795458e-24 -1.8966157949e-23 3.7353865479e-23C38 x6 y2 4.1407038908e-23 -2.8412845765e-23 -4.7134847967e-22C40 x4 y4 -1.5731137038e-22 -1.6555326286e-22 7.1691650249e-22C42 x2 y6 -3.3866767674e-23 -3.2705635036e-22 1.4647226204e-19C44 y8 2.9156331174e-23 -7.4685373060e-26 -5.3850883044e-20C46 x8 y 1.3763234757e-26 4.2547787224e-26 1.3722581126e-25C48 x6 y3 -2.7969225731e-25 -1.5421688440e-25 2.9659196589e-24C50 x4 y5 -4.6808056470e-26 -5.0152310604e-25 5.7019301428e-24C52 x2 y7 1.1140517110e-25 8.7797952270e-25 -8.5737764337e-22C54 y9 3.2688031986e-26 2.5180864840e-24 1.3480805718e-20C55 x10 -1.6538110353e-28 1.0884912117e-28 7.1098587444e-29C57 x8 y2 -1.7880915173e-28 -1.2990863914e-29 1.6951019566e-28C59 x6 y4 2.5535359309e-28 -3.4358551147e-28 -3.8174727009e-26C61 x4 y6 5.1546416223e-28 4.2377587380e-28 -9.0502999471e-25C63 x2 y8 3.9830095411e-28 -4.1830071170e-27 -5.6946361462e-24C65 y10 -2.0222071260e-28 -1.7741743789e-26 -1.3564194382e-22C67 x10 y 3.1752218586e-31 2.4511978871e-31 1.5654010375e-30C69 x8 y3 6.9559578857e-31 6.4425772847e-31 1.0551779622e-29C71 x6 y5 1.0198652360e-30 3.4765566764e-30 1.3964128803e-28C73 x4 y7 1.5594549960e-30 1.4833877123e-30 3.0505471590e-27C75 x2 y9 -3.8589543235e-31 -9.9861656946e-29 5.0769975454e-26C77 y11 -1.7366364839e-31 -1.0630650697e-28 -8.9707944529e-25C78 x12 6.3541922711e-34 -8.6288781223e-35 -6.6080171165e-34 C111 x8 y6 -8.4048846649e-39 -7.9781385266e-38 -1.4832113793e-35C113 x6 y8 -1.3821937147e-38 -2.2589629838e-37 -5.5823736983e-34C115 x4 y10 -1.2061260712e-39 8.0514032828e-37 -1.3076587678e-32C117 x2 y12 3.3730031169e-39 4.7116257702e-36 1.6942447612e-31C119 y14 4.3983312905e-40 5.6502157622e-37 -1.8549028592e-30C121 x14 y -1.1556861647e-42 1.4668003060e-42 2.6026062511e-41C123 x12 y3 -1.8688640000e-42 -9.9445779542e-43 4.3068388430e-40C125 x10 y5 -5.5293524594e-42 -7.3686026037e-41 8.7021993889e-40C127 x8 y7 -9.9639576569e-42 -3.3393187408e-40 1.8509309012e-37C129 x6 y9 2.8786652881e-42 -4.2321181454e-40 -5.2025102799e-37C131 x4 y11 1.5795209466e-41 -5.6884138608e-39 1.9465976408e-34C133 x2 y13 -1.1075479606e-42 -3.0234597649e-38 -1.4177149904e-33C135 y15 -2.8569926199e-42 -1.1496554290e-38 8.7605316348e-33C136 x16 4.9037017520e-46 2.8998395960e-46 -2.9770577570e-45C138 x14 y2 8.3832611383e-46 4.7150982031e-45 -3.3152647154e-45C140 x12 y4 -8.0304103090e-46 1.8927785361e-44 5.3460875390e-43C142 x10 y6 -4.0690109811e-45 -2.3019637674e-43 2.0257974186e-41C144 x8 y8 1.4259802414e-45 2.4405070042e-44 1.2202413498e-39C146 x6 y10 2.5189435323e-44 -2.0243796105e-42 5.2084020647e-38C148 x4 y12 1.3284197535e-44 -2.9584266541e-41 -1.1495992546e-36C150 x2 y14 -2.1344149059e-45 -1.1255547644e-40 7.7398723203e-36C152 y16 -3.6702203827e-45 -2.4331855892e-41 -7.1937749172e-36C154 x16 y 1.1026514113e-48 -6.1301150429e-49 -2.8325721203e-47C156 x14 y3 1.2978684512e-48 1.3367140389e-47 -6.1350465988e-46C158 x12 y5 4.6303590316e-49 -2.2221146525e-48 -1.6637234126e-45C160 x10 y7 -2.7398590838e-48 -1.7591918289e-46 -3.3837826548e-43C162 x8 y9 1.0603093682e-47 7.3219213833e-46 -9.7361705839e-42C164 x6 y11 1.0205934504e-47 -4.5592762838e-45 -1.9266239558e-40C166 x4 y13 4.5750185644e-48 -3.6666128226e-44 2.6525575053e-39C168 x2 y15 -1.7747089928e-49 -1.0741394954e-43 -1.7813738799e-38C170 y17 -1.6406680687e-48 -1.5820422830e-44 -2.7978930074e-38Table 3a for Fig. 5Coefficient Formula M07 M08 M09C2 y 1.5067235978e-03 1.0121508409e-02 2.0370223685e-03C7 x2 y -4.8278815482e-08 -1.7064577846e-06 -1.8652369329e-08C9 y3 5.9528419998e-08 -3.8917077804e-07 9.2901327587e-09C10 x4 -3.1091290797e-11 1.4354315864e-09 -2.2290485357e-11C12 x2 y2 -1.0549389196e-10 3.7184282066e-09 -6.6932221514e-11C14 y4 -5.7898971551e-11 1.6639672722e-09 -2.2427714492e-11C16 x4 y -1.0821351100e-13 -2.6125520346e-12 -2.9518068685e-14C18 x2 y3 8.9239200738e-14 -1.1435605245e-11 -2.4482979595e-14C20 y5 1.1978180374e-13 1.3878575657e-11 1.4726044069e-14C21 x6 1.1069705622e-16 7.5284711181e-16 -6.9546714654e-17C23 x4 y2 -3.7580997820e-16 1.6858906960e-14 -1.7022658551e-16C25 x2 y4 -3.7681002078e-16 1.8841116063e-14 -1.7238010691e-16C27 y6 -1.6886186843e-16 4.4725162980e-14 -4.5044842204e-17C29 x6 y 6.0058860535e-19 -1.9788400983e-17 -1.6589467201e-20C31 x4 y3 2.6918392677e-19 -1.3900584523e-16 -9.9256095143e-20C33 x2 y5 5.4854174435e-19 -2.6380794421e-16 -3.6811977074e-20C35 y7 3.0036980272e-19 9.7230721357e-17 1.6109636260e-20C36 x8 -3.0778823153e-22 1.9613473231e-20 -9.1967869461e-23C38 x6 y2 4.4956332328e-22 3.3661920750e-19 -3.8675391375e-22C40 x4 y4 -1.1677385765e-21 1.2981995582e-18 -6.1344743667e-22C42 x2 y6 -9.3116854378e-22 4.4178853183e-19 -3.9931262597e-22C44 y8 -4.2196890205e-22 1.1633405620e-18 -7.1361021406e-23C46 x8 y -1.9520771907e-24 -1.7825012828e-22 7.4590424118e-26C48 x6 y3 2.0218120153e-24 2.0893388839e-22 3.6584467598e-25C50 x4 y5 7.6365313547e-25 4.4822858313e-21 6.5906705575e-25C52 x2 y7 2.0155468863e-24 -1.4151678335e-20 4.6056193811e-25C54 y9 9.2426382813e-25 1.0779036906e-21 8.9825228753e-26C55 x10 -2.7049939586e-27 -5.3764702687e-26 -1.5313771087e-28C57 x8 y2 -8.5303185764e-27 -4.4288047856e-24 -7.7520094408e-28C59 x6 y4 4.0520921299e-27 -5.1375524937e-23 -7.6962326717e-28C61 x4 y6 -1.0342008348e-26 -1.2018619470e-22 -3.2611950742e-28C63 x2 y8 -9.6390431531e-27 -1.5279932963e-22 -3.4407069091e-28C65 y10 -2.6644281117e-27 -1.6650218259e-22 -1.5426143644e-28C67 x10 y 4.1656104566e-30 -2.2542864844e-27 -1.5421947751e-30C69 x8 y3 1.2952132949e-30 -6.4309360734e-26 -8.7178427539e-30C71 x6 y5 5.2610673105e-29 -4.5272975934e-25 -1.9542383721e-29C73 x4 y7 1.5568185549e-29 3.0568911454e-25 -1.8434300613e-29C75 x2 y9 6.9222449483e-30 3.7965745503e-24 -7.6354708197e-30C77 y11 5.2508044423e-30 7.5148174754e-25 -5.8388115829e-31C78 x12 2.9352273224e-32 4.4761939456e-30 2.7504860531e-34C80 x10 y2 3.1224922536e-32 1.7719114056e-28 8.8489176063e-34C82 x8 y4 -1.2282280298e-31 3.0742023021e-27 -7.7187174363e-33C84 x6 y6 6.2390280114e-32 1.6241942268e-26 -2.4657046096e-32C86 x4 y8 1.6567771074e-31 3.0374893222e-26 -2.2468651675e-32C88 x2 y10 6.7270469882e-32 1.9062685198e-26 -5.4747433574e-33C90 y12 5.5787651906e-33 2.2566801163e-26 1.9970931608e-34C92 x12 y 1.7348060890e-35 8.6693713054e-32 1.1017525350e-35C94 x10 y3 -2.6366544282e-34 1.5615884257e-30 7.9927980214e-35C96 x8 y5 -1.2207940220e-33 1.4259209585e-29 2.3981919464e-34C98 x6 y7 -9.3974748282e-34 2.4161770833e-29 3.3509827999e-34C100 x4 y9 -1.8411539987e-34 -1.6385198146e-28 2.3615066273e-34C102 x2 y11 -9.7222096667e-35 -5.6341243616e-28 8.0158320228e-35C104 y13 -3.5870011445e-35 -8.2203091713e-29 5.0782947011e-36C105 x14 -1.5426026352e-37 -7.7297348461e-35 -3.9395069640e-39C107 x12 y2 3.5007315335e-39 -3.7379360949e-33 -2.3710498651e-38C109 x10 y4 1.0558682151e-36 -9.8015086869e-32 -1.3889321093e-38C111 x8 y6 6.1082628186e-37 -8.5240470587e-31 1.1708038179e-37C113 x6 y8 -1.1205837622e-36 -2.9482855794e-30 2.4846033343e-37C115 x4 y10 -1.4890232920e-36 -3.8533621955e-30 1.5658032913e-37C117 x2 y12 -4.9830357620e-37 -1.5074954766e-30 2.2870870771e-38C119 y14 -2.7213260601e-38 -1.7329629497e-30 -3.9921776276e-39C121 x14 y -8.1476974499e-41 -2.1150870554e-36 -5.8674151561e-41C123 x12 y3 2.0456504641e-39 -2.6199415738e-35 -4.9595739469e-40C125 x10 y5 8.9333933470e-39 -1.9116480721e-34 -1.8236657103e-39C127 x8 y7 1.3444054468e-38 -1.1146825055e-34 -3.3908689103e-39C129 x6 y9 8.2466098711e-39 4.6539945763e-33 -3.4321018173e-39C131 x4 y11 2.7095390109e-39 2.4986360769e-32 -1.9187636131e-39C133 x2 y13 1.5069384831e-39 5.3055668081e-32 -5.3192575005e-40C135 y15 3.5637507742e-40 3.7845435724e-33 -2.6145249354e-41C136 x16 3.5158023232e-43 9.3236103276e-40 1.6515385884e-44C138 x14 y2 -1.7450321469e-43 5.6739877530e-38 1.2323497854e-43C140 x12 y4 -2.6126752517e-42 1.9625321264e-36 2.2201909311e-43C142 x10 y6 -6.2462285576e-42 2.3359621760e-35 -2.8548992690e-43C144 x8 y8 -7.9940766754e-42 1.2221370578e-34 -1.4995593212e-42C146 x6 y10 2.1533873281e-42 2.9353192718e-34 -1.8687263302e-42C148 x4 y12 1.3730283125e-42 2.8555786688e-34 -8.6809180339e-43C150 x2 y14 -1.0684879253e-42 1.1686355196e-34 -1.0274843283e-43C152 y16 -6.7746188483e-43 7.4734025810e-35 1.8617648225e-44C154 x16 y -1.9828463282e-46 2.8469424824e-41 2.0451303321e-46C156 x14 y3 -5.5981475188e-45 1.6695454238e-40 1.9469647070e-45C158 x12 y5 -1.8909213651e-44 -1.5943282827e-39 8.4288373877e-45C160 x10 y7 -5.0373860919e-44 -3.9220636797e-38 1.9588163308e-44C162 x8 y9 -6.3521773551e-44 -2.6803832743e-37 2.6327904030e-44C164 x6 y11 -2.0961108882e-44 -9.1013827466e-37 2.1022781206e-44C166 x4 y13 -3.5163110953e-45 -2.0284220614e-36 9.7656417454e-45C168 x2 y15 -2.2243641826e-46 -3.0171727684e-36 2.2682342903e-45C170 y17 4.3280628309e-46 -9.9206814802e-38 8.9746286202e-47C171 x18 0.0000000000e+00 -6.2930814489e-45 -4.8992501416e-50C173 x16 y2 0.0000000000e+00 -4.9887587958e-43 -4.3915214465e-49C175 x14 y4 0.0000000000e+00 -2.3029303330e-41 -1.3344327557e-48C177 x12 y6 0.0000000000e+00 -3.5594705340e-40 -1.1267215587e-48C179 x10 y8 0.0000000000e+00 -2.4965121543e-39 2.7520332958e-48C181 x8 y10 0.0000000000e+00 -8.9561075702e-39 7.4752222562e-48C183 x6 y12 0.0000000000e+00 -1.6171561720e-38 6.8170018548e-48C185 x4 y14 0.0000000000e+00 -1.2994326425e-38 2.4380074969e-48C187 x2 y16 0.0000000000e+00 -7.7400256939e-39 1.7795048959e-49C189 y18 0.0000000000e+00 -1.7600166019e-39 -6.3719831195e-50C191 x18 y 0.0000000000e+00 -2.5992904744e-46 -4.5859645116e-52C193 x16 y3 0.0000000000e+00 3.4573508913e-46 -4.8164629695e-51C195 x14 y5 0.0000000000e+00 7.9241980785e-44 -2.3731827253e-50C197 x12 y7 0.0000000000e+00 1.2287647161e-42 -6.5678491373e-50C199 x10 y9 0.0000000000e+00 8.4795744630e-42 -1.1022032459e-49C201 x8 y11 0.0000000000e+00 3.0809445970e-41 -1.1597625678e-49C203 x6 y13 0.0000000000e+00 6.3569815748e-41 -7.6632896118e-50C205 x4 y15 0.0000000000e+00 8.9396802166e-41 -3.0328621291e-50C207 x2 y17 0.0000000000e+00 9.4695568572e-41 -5.9896666651e-51C209 y19 0.0000000000e+00 3.2308810889e-42 -1.8932767516e-52C210 x20 0.0000000000e+00 2.1671508129e-50 7.8323225982e-56C212 x18 y2 0.0000000000e+00 2.2975335032e-48 8.0853469710e-55C214 x16 y4 0.0000000000e+00 1.4580063404e-46 3.2262437347e-54C216 x14 y6 0.0000000000e+00 2.8639017455e-45 5.8827375916e-54C218 x12 y8 0.0000000000e+00 2.5445177236e-44 2.1266865448e-54C220 x10 y10 0.0000000000e+00 1.2095853772e-43 -1.0077709971e-53C222 x8 y12 0.0000000000e+00 3.2381344647e-43 -1.8240558216e-53C224 x6 y14 0.0000000000e+00 4.7021219181e-43 -1.2904497171e-53C226 x4 y16 0.0000000000e+00 3.4984770474e-43 -3.5811377233e-54C228 x2 y18 0.0000000000e+00 3.1356586790e-43 -7.4293549944e-56C230 y20 0.0000000000e+00 3.2943592724e-44 1.1790304250e-55C232 x20 y 0.0000000000e+00 1.4414031700e-51 5.9409911706e-58C234 x18 y3 0.0000000000e+00 -1.0643381854e-50 6.7947991979e-57C236 x16 y5 0.0000000000e+00 -8.9204299408e-49 3.7254847103e-56C238 x14 y7 0.0000000000e+00 -1.4978917696e-47 1.1880266395e-55C240 x12 y9 0.0000000000e+00 -1.1841257102e-46 2.3834820144e-55C242 x10 y11 0.0000000000e+00 -5.2557944916e-46 3.1239808026e-55C244 x8 y13 0.0000000000e+00 -1.3509419513e-45 2.7066471696e-55C246 x6 y15 0.0000000000e+00 -2.0112465690e-45 1.5266584003e-55C248 x4 y17 0.0000000000e+00 -1.9405075818e-45 5.2437648137e-56C250 x2 y19 0.0000000000e+00 -1.2259965970e-45 8.9467218336e-57C252 y21 0.0000000000e+00 -5.7328262724e-47 2.2697509879e-58C253 x22 0.0000000000e+00 4.5015323763e-58 -6.0560676282e-62C255 x20 y2 0.0000000000e+00 -2.4199860585e-54 -7.0533923659e-61C257 x18 y4 0.0000000000e+00 -3.5458011772e-52 -3.4666159353e-60C259 x16 y6 0.0000000000e+00 -9.2526560914e-51 -9.2029229805e-60C261 x14 y8 0.0000000000e+00 -1.0279654878e-49 -1.3148362910e-59C263 x12 y10 0.0000000000e+00 -6.1209672949e-49 -7.2696240632e-60C265 x10 y12 0.0000000000e+00 -2.1608733468e-48 5.7969467865e-60C267 x8 y14 0.0000000000e+00 -4.5864821084e-48 1.1878437505e-59C269 x6 y16 0.0000000000e+00 -5.6893963826e-48 6.9452241910e-60C271 x4 y18 0.0000000000e+00 -4.3582604738e-48 1.0448712686e-60C273 x2 y20 0.0000000000e+00 -5.4321276683e-48 -3.2562600201e-61C275 y22 0.0000000000e+00 -6.2130713063e-49 -1.1189874791e-61C277 x22 y 0.0000000000e+00 -4.3081190619e-57 -3.4608506543e-64C279 x20 y3 0.0000000000e+00 1.8640482630e-56 -4.2637434630e-63C281 x18 y5 0.0000000000e+00 3.1715045989e-54 -2.5501376380e-62C283 x16 y7 0.0000000000e+00 6.5122094037e-53 -9.1202623313e-62C285 x14 y9 0.0000000000e+00 6.0831985979e-52 -2.1135190718e-61C287 x12 y11 0.0000000000e+00 3.2503601602e-51 -3.3056384734e-61C289 x10 y13 0.0000000000e+00 1.0614857134e-50 -3.5494088311e-61C291 x8 y15 0.0000000000e+00 2.0982404919e-50 -2.6119584123e-61C293 x6 y17 0.0000000000e+00 2.3617274562e-50 -1.2815064075e-61C295 x4 y19 0.0000000000e+00 1.4570870731e-50 -3.8628330641e-62C297 x2 y21 0.0000000000e+00 -2.5190337058e-51 -5.7444098361e-63C299 y23 0.0000000000e+00 -1.0049849611e-51 -1.1270259404e-64Table 3c for Fig. 5Coordinates of the stop edge xi [mm] yi [mm] xi+N / 2 [mm] yi+N / 2 [mm]-335.832321 -55.944109 336.173870 -68.691330-335.338633 -49.555984 336.020660 -75.040876-334.630589 -43.164458 335.650972 -81.367957-333.709018 -36.774142 335.064634 -87.667748-332.574854 -30.389557 334.261639 -93.935443-331.229131 -24.015125 333.242166 -100.166277-329.672986 -17.655155 332.006593 -106.355550-327.907660 -11.313844 330.555507 -112.498647-325.934503 -4.995268 328.889716 -118.591059-323.754981 1.296619 327.010259 -124.628400-321.370688 7.557987 324.918410 -130.606424-318.783355 13.785130 322.615682 -136.521035-315.994865 19.974466 320.103828 -142.368300-313.007264 26.122536 317.384838 -148.144457-309.822778 32.226005 314.460934 -153.845918-306.443824 38.281650 311.334562 -159.469274-302.873024 44.286363 308.008386 -165.011295-299.113217 50.237141 304.485270 -170.468930-295.167469 56.131077 300.768272 -175.839298-291.039079 61.965351 296.860628 -181.119694-286.731585 67.737218 292.765739 -186.307572-282.248763 73.443995 288.487156 -191.400547-277.594628 79.083045 284.028570 -196.396384-272.773425 84.651764 279.393794 -201.292991-267.789624 90.147567 274.586757 -206.088410-262.647903 95.567867 269.611488 -210.780811-257.353137100.910064 264.472112 -215.368483-251.910378106.171526 259.172833 -219.849828-246.324831111.349574 253.717936 -224.223349-240.601837116.441469 248.111771 -228.487648-234.746843121.444393 242.358753 -232.641414-228.765376126.355442 236.463352 -236.683421-222.663017131.171604 230.430089 -240.612515-216.445374135.889755 224.263530 -244.427614-210.118049140.506647 217.968280 -248.127696-203.686618145.018900 211.548978 -251.711797-197.156600149.423001 205.010290 -255.179003-190.533437153.715302 198.356900 -258.528444-183.822469157.892026 191.593508 -261.759293-177.028918161.949276 184.724819 -264.870755-170.157869165.883046 177.755537 -267.862070-163.214258169.689247 170.690355 -270.732501-156.202864173.363719 163.533950 -273.481337-149.128295176.902266 156.290975 -276.107887-141.994988180.300676 148.966053 -278.611478-134.807200183.554756 141.563765 -280.991455-127.569016186.660357 134.088650 -283.247176-120.284338189.613402 126.545199 -285.378014-112.956898192.409912 118.937846 -287.383356-105.590257195.046032 111.270971 -289.262606-98.187810197.518051 103.548892 -291.015183-90.752798199.822420 95.775869 -292.640524-83.288309201.955773 87.956098 -294.138089-75.797295203.914940 80.093717 -295.507358-68.282576205.696961 72.192807 -296.747843-60.746857207.299104 64.257393 -297.859084-53.192734208.718875 56.291446 -298.840656-45.622709209.954032 48.298893 -299.692174-38.039204211.002601 40.283616 -300.413294-30.444570211.862884 32.249461 -301.003720-22.841100212.533474 24.200243 -301.463203-15.231042213.013265 16.139749 -301.791547-7.616612213.301461 8.071749 -301.988610807304464389436646587710534376451489831014282.248763 73.443995 -288.487156 -191.400547286.731585 67.737218 -292.765739 -186.307572291.039079 61.965351 -296.860628 -181.119694295.167469 56.131077 -300.768272 -175.839298299.113217 50.237141 -304.485270 -170.468930302.873024 44.286363 -308.008386 -165.011295306.443824 38.281650 -311.334562 -159.469274309.822778 32.226005 -314.460934 -153.845918313.007264 26.122536 -317.384838 -148.144457315.994865 19.974466 -320.103828 -142.368300318.783355 13.785130 -322.615682 -136.521035321.370688 7.557987 -324.918410 -130.606424323.754981 1.296619 -327.010259 -124.628400325.934503 -4.995268 -328.889716 -118.591059327.907660 -11.313844 -330.555507 -112.498647329.672986 -17.655155 -332.006593 -106.355550331.229131 -24.015125 -333.242166 -100.166277332.574854 -30.389557 -334.261639 -93.935443333.709018 -36.774142 -335.064634 -87.667748334.630589 -43.164458 -335.650972 -81.367957335.338633 -49.555984 -336.020660 -75.040876335.832321 -55.944109 -336.173870 -68.691330336.110933 -62.324142 -336.110933 -62.324142Table 4 for Fig. 5Numerical aperture = 0.75 1 / βx= -4.20 1 / βy= -8.00Track length = 2492 mmObject-image shift = 5300 mmWidth of the installation space = 5907 mmOptically used overall mirror area = 3.84 m²Linear pupil obscuration = 28.9% Minimum angle on grazing incident mirror = 66.4°Scan slot length on the wafer = 1.2 mmScan-integrated wavefront RMS = 10.58 mλTransmission = 7.03%Étendue = 55.1 mm²Mirror with maximum diameter = M4Maximum optical mirror diameter = 1338 mmMirror with maximum area = M9 Table 5 for Fig. 5 Fig.6 shows a further embodiment of a projection optical unit or imaging optical unit 27, which can be used in the projection exposure apparatus 1 instead of the projection optical unit 10. Com- ponents and functions corresponding to those which have already been explained above with ref-erence to Figures 1 to 5 bear the same reference signs and will not be discussed in detail again.The projection optical unit 27 has a total of eleven mirrors M1 to M11 in the imaging beam path between the object field 5 and the image field 11. The mirrors M1, M10 and M11 are embodied as mirrors for normal incidence (NI mirrors). The mirrors M2 to M9 are embodied as mirrors for grazing incidence (GI mirrors) of the illumination light 16. The projection optical unit 27 has ex- actly eight mirrors for grazing incidence. The mirrors M2 to M8, i.e. seven of the eight GI mirrors of the projection optical unit 27, reflect the imaging light 16 in such a way that the angles of reflection of the individual rays at the re- spective mirrors M2 to M8 add up, i.e. lead to an amplification of the deflection effect thereof. The subsequent GI mirror M9 is what is known as counter mirror and reflects the imaging light 16 in such a way that this yields a deflection effect directed against the deflection effect of the mirrors M2 to M8, i.e. this has a subtractive effect on the deflection effect of the GI mirrors M2 to M8. In accordance with the rules for the surrounding effects of the mirrors, which are speci- fied in the context of the explanations regarding the projection optical unit in DE 102019219 209 A1, the projection optical unit 27 has the following sequence of deflecting effects for the mirrors M1 to M11: LRRRRRRRL0R. A first intermediate image plane of the projection optical unit 27 according to Fig.6 is located in the region of a reflection off the mirror M5. A further intermediate image plane of the projection optical unit 27 is located in the region of a reflection off the mirror M7. The projection optical unit 27 has a good imaging error correction. The RMS value for the scan-integrated wavefront error is less than 10 mλ, less than 8 mλ, and in particular less than 6 mλ,and has a value of 5.13 mλ for the projection optical unit 27. The scan-integrated distortion ofthe projection optical unit 27 is no more than 0.03 nm and changes by no more than 0.04 nmover the scan, i.e. over the y coordinate in the image field 13.A distance between the object plane 6 and the image plane 12 is less than 2300 mm and is2272 mm in the projection optical unit 27.A dimension of the used reflection surfaces of the mirrors M1 to M10 perpendicular to the me-ridional plane, i.e. in the x-direction, is less than 1000 mm for each of these mirrors M1 to M10.Respective neighbouring GI mirrors M2 to M9 have reflection surfaces that are spaced apartfrom one another by more than 130 mm.A linear pupil obscuration of the projection optical unit 27 is less than 20 %.On the GI mirrors M2 to M8, the angles of incidence of all individual rays of the imaging light 16 are each greater than 70°. The optical design data for the projection optical unit 27 emerge from following Tables 1 to 5,which, in turn, correspond in terms of the basic structure to Tables 1 to 5 relating to the embodi-ment according to Figure 5. Radii of the surfaces Radiusx [mm] Powerx [1 / mm] Radiusy [mm] Powery [1 / mm]M01 -4507.51708439 0.00043515 -1865.37641692 0.00105151M02 37342.30943113 -0.00005356 4617.94469459 -0.00043308M03 -24103.87608748 0.00008297333965.51387576 -0.00000599M04 -4960.73813282 0.00010435 -22194.00123694 0.00002332M05 -1417.81975934 0.00029505 -4608.20990724 0.00009078M06 -997.10084440 0.00053783 -1665.86665776 0.00032192M07 -2689.79515426 0.00018613 -7484.36301874 0.00006689M08 3251.21140951 -0.00012276 -3929.10208845 0.00010158M09 -4624.86089426 0.00006163 1972.61016680 -0.00014450M10 8735.63328801 -0.00022895 429.91045160 -0.00465213M11 -932.38191368 0.00214504 -790.24921918 0.00253085Table 1 for Fig. 6Decentring (location, angle) the surfacesDx [mm] Dy [mm] Dz [mm]Reticle 0.000000000 0.000000000 0.000000000M01 0.000000000 209.0057657832170.607869694M02 0.000000000 667.8844133641142.823826641M03 0.0000000001187.762707847 710.920036550M04 0.0000000001928.111948692 362.058449293M05 0.0000000002464.660547334 278.586246631M06 0.0000000003033.110725840 422.211098607M07 0.0000000003337.077895833 707.381367772M08 0.0000000003414.854620482 983.699514877M09 0.0000000003379.1449517351224.759649723obs11 0.0000000003504.6689827951542.222579899M10 0.0000000003745.3783727882151.000896075Stop 0.0000000003713.1772470972073.314390972M11 -0.0000000003495.9702192761549.293739103Wafer 0.0000000003495.7361133772272.324752666 Reticle 0.000000000 0.000000000 0.000000000M01 9.279755098 0.000000000 0.000000000M02 -52.829784319180.000000000 0.000000000M03 147.525268080 0.000000000 0.000000000M04 -17.036573517180.000000000 0.000000000M05 182.668427434 0.000000000 0.000000000M06 28.676084597180.000000000 0.000000000M07 238.725977178 0.000000000 0.000000000M08 86.352843205180.000000000 0.000000000M09 83.426284352 0.000000000 0.000000000obs11 -10.307414695 0.000000000180.000000000M10 -22.043883048 0.000000000180.000000000Stop 178.120254750 -0.000000000 0.000000000M11 168.752250505 -0.000000000 0.000000000Wafer 0.018551458 0.000000000180.000000000Table 2 for Fig. 6Free-form coefficients of the surfacesCoefficient Formula M01 M02 M03C7 x2 y -5.4906812436e-09 -2.8620470805e-08 2.1399292790e-08C9 y3 1.3515772659e-08 9.7408417811e-08 4.2134847040e-09C10 x4 8.5832741308e-12 1.1382434098e-10 3.1868214659e-11C12 x2 y2 3.8846342406e-11 -1.1286287878e-10 1.2875254621e-11C14 y4 -2.3288421745e-11 1.2181731930e-10 -1.0408558423e-11C16 x4 y -4.2578558800e-14 4.8217160759e-14 -1.3156399247e-14C18 x2 y3 -5.6154733601e-14 1.7579836395e-15 -7.9374917410e-15C20 y5 2.4188798489e-14 1.3098445650e-13 9.3504641593e-15C21 x6 6.5221351674e-18 9.9526909267e-17 -5.1542336125e-18C23 x4 y2 3.3917787671e-17 2.1792423811e-16 1.6985444505e-18C25 x2 y4 -1.3877435675e-17 3.2135349041e-16 6.7810870544e-19C27 y6 -5.4629022535e-18 3.2783102592e-16 -2.7103796232e-17C29 x6 y 1.6398973683e-20 -2.1469936571e-20 -1.2219909236e-20C31 x4 y3 1.0851215578e-19 5.1850765366e-19 7.9818617495e-20C33 x2 y5 2.4552254958e-19 1.0375203339e-18 -2.1287727038e-20C35 y7 6.1951307890e-19 1.9673311893e-18 2.5723099281e-20C36 x8 -7.1180314575e-26 -3.4265825372e-22 -5.2465267780e-22C38 x6 y2 -1.2505839204e-22 8.2001061336e-22 -4.6178708402e-23C40 x4 y4 -1.1045941837e-21 1.6480448224e-21 1.8409300083e-23C42 x2 y6 -1.6707831309e-21 5.2055476241e-21 9.6012578645e-23C44 y8 6.8720495098e-21 6.5496817560e-21 9.5664112911e-23C46 x8 y -3.4485999339e-25 7.4735768965e-25 -1.3969259037e-25C48 x6 y3 -3.5590012345e-24 2.7222674971e-24 1.9212255166e-25C50 x4 y5 -1.1964431875e-23 2.6509013254e-24 3.2264728583e-25C52 x2 y7 -1.1864950377e-23 5.8140174270e-24 5.2997978493e-25C54 y9 -6.1343748832e-23 -2.7465362337e-23 -3.2793594623e-25C55 x10 -2.3572190309e-29 4.4279155640e-27 3.1833870112e-27C57 x8 y2 5.2626425609e-28 -5.8739679233e-27 1.4081206658e-27C59 x6 y4 5.2905978674e-26 -4.6263891202e-26 2.4371136042e-27C61 x4 y6 2.4634264552e-25 -1.0122435573e-25 2.4420903773e-27C63 x2 y8 1.5111180083e-25 -1.2724383857e-25 -2.0806642323e-27C65 y10 -5.5190527895e-25 -2.3052034852e-25 -1.7724357130e-27C67 x10 y 7.0945332351e-30 -8.9396070288e-30 2.2590652222e-30C69 x8 y3 9.9230609305e-29 -1.8107288300e-29 1.9464341437e-30C71 x6 y5 5.4140338944e-28 -1.3568978456e-28 1.0471762598e-29C73 x4 y7 1.3050576253e-27 -3.6718829446e-28 1.7669473873e-30C75 x2 y9 1.1859478644e-27 -2.0862229060e-28 -6.3364674811e-30C77 y11 3.5672950899e-27 8.6974549513e-28 4.8681496307e-30C78 x12 7.7376968241e-34 -2.9543165556e-32 -1.5171457922e-32C80 x10 y2 1.4723485209e-32 7.9692044224e-32 -1.1518512174e-32C82 x8 y4 -1.0223672266e-30 9.1460919482e-31 -3.7955042070e-32C84 x6 y6 -9.2432542733e-30 2.4620100526e-30 -6.4860668867e-32C86 x4 y8 -2.2267738121e-29 3.2869088458e-30 -4.9891315399e-32C88 x2 y10 -7.2146278339e-30 4.8321514593e-30 1.4638654774e-32C90 y12 2.7888278565e-29 1.1607608365e-29 1.1501380308e-32C92 x12 y -8.4652583941e-35 1.3011495885e-34 -2.0404876730e-35C115 x4 y10 1.1481033831e-33 -5.0286613336e-35 5.8111924001e-37C117 x2 y12 1.8532966500e-34 -8.1808861239e-35 -3.3711327311e-39C119 y14 -9.7330563416e-34 -2.1930910136e-34 -2.5247001288e-38C121 x14 y 6.3424629263e-40 -8.4511338381e-40 1.3989202381e-40C123 x12 y3 1.4545660049e-38 -4.0787779477e-39 5.2669362921e-40C125 x10 y5 1.4750802930e-37 -2.3803866364e-38 2.0176919527e-39C127 x8 y7 7.2530588200e-37 -1.2581106748e-37 5.0164592391e-39C129 x6 y9 1.9994745054e-36 -2.8228490342e-37 3.7552756406e-39C131 x4 y11 3.5096780198e-36 -3.8715473695e-37 -2.9073591148e-40C133 x2 y13 1.9885465434e-36 -5.5768628431e-37 -4.8596341842e-40 C173 x16 y2 -2.1093608431e-47 1.4657857102e-47 -1.2627110885e-48C175 x14 y4 1.2200467162e-46 -7.7005948906e-47 -1.3237813359e-48C177 x12 y6 7.7012869492e-45 -5.6039242406e-46 -7.9622706898e-48C179 x10 y8 7.5606063431e-44 -8.7726817442e-46 -2.6729292899e-47C181 x8 y10 3.2251049282e-43 3.5177394268e-46 -1.6158966473e-47C183 x6 y12 6.8153191653e-43 3.5727287524e-45 1.4978630205e-47C185 x4 y14 6.6791894859e-43 9.9522798676e-45 1.9010192970e-47C187 x2 y16 -3.5419929268e-44 1.9777550715e-44 1.0367070681e-47 C257 x18 y4 -3.8870483440e-58 0.0000000000e+00 0.0000000000e+00C259 x16 y6 2.0600165487e-56 0.0000000000e+00 0.0000000000e+00C261 x14 y8 3.7683141349e-55 0.0000000000e+00 0.0000000000e+00C263 x12 y10 2.9204322438e-54 0.0000000000e+00 0.0000000000e+00C265 x10 y12 1.2224358925e-53 0.0000000000e+00 0.0000000000e+00C267 x8 y14 2.9643474864e-53 0.0000000000e+00 0.0000000000e+00C269 x6 y16 4.2620669932e-53 0.0000000000e+00 0.0000000000e+00C271 x4 y18 3.0684582460e-53 0.0000000000e+00 0.0000000000e+00C273 x2 y20 -6.1587664428e-54 0.0000000000e+00 0.0000000000e+00C275 y22 -1.4041159479e-53 0.0000000000e+00 0.0000000000e+00Table 3a for Fig. 6Coefficient Formula M04 M05 M06C7 x2 y -2.9743212410e-08 1.1669526010e-07 -9.9566541665e-08C9 y3 -1.1790460879e-08 1.5012282786e-07 2.0365341565e-07C10 x4 -5.7761645674e-11 -9.3038156313e-11 1.1580183909e-11C12 x2 y2 -9.1085834899e-12 -2.3865527927e-10 3.2804469821e-10C14 y4 -7.6428644817e-12 -5.7593484308e-11 2.2874520939e-10C16 x4 y 5.3104708410e-15 1.2218639414e-13 -1.1173480940e-13C18 x2 y3 -1.6663624783e-14 6.4436694851e-15 -2.1908686826e-13C20 y5 -4.4872430791e-14 2.0563869090e-13 7.7863286308e-13C21 x6 -5.5965290088e-17 4.2737060074e-18 -1.9103930590e-17C23 x4 y2 -4.0258942654e-17 6.7085608237e-17 -2.8042494650e-16C25 x2 y4 -1.6182986253e-16 -5.2156569699e-16 -2.6963555052e-15C27 y6 -5.4317969200e-17 7.4780265610e-16 1.8518275094e-14C29 x6 y -2.4297626819e-20 -7.3918089927e-21 -4.1100461542e-19C31 x4 y3 -3.2243466425e-19 6.4869125987e-19 -5.0796007532e-19C33 x2 y5 -4.2100782546e-19 -2.7219117168e-18 -1.8416989442e-17C35 y7 -2.6921487409e-19 -9.6298260970e-19 6.1712077395e-17C36 x8 -1.4805222159e-22 1.3881181131e-22 -2.6077830893e-22C38 x6 y2 -3.3061851102e-22 -5.5722925801e-22 -1.1478262672e-21C40 x4 y4 -1.2071131557e-21 3.7344917406e-21 1.0903814609e-20C42 x2 y6 -1.5919684503e-21 -2.5935609685e-21 -3.5306248157e-19C44 y8 -3.6334959123e-22 4.8163145020e-20 -2.3430530914e-18C46 x8 y -2.8724265419e-25 5.2127642374e-25 -2.0090514023e-24C48 x6 y3 -1.3807819542e-24 -2.8855983174e-24 6.2470357967e-24C50 x4 y5 -1.5920167278e-24 -3.5522871182e-24 2.9367411513e-22C52 x2 y7 2.7824631143e-24 -4.1286300319e-23 9.9789198932e-22C54 y9 6.5716292975e-25 4.4620713577e-22 -2.4334788059e-20C55 x10 1.1793152250e-27 -1.6603894342e-27 2.9910320778e-27C57 x8 y2 -1.8745740320e-27 2.4770352644e-27 2.1874128864e-27C59 x6 y4 3.8921124360e-27 1.0271603152e-26 5.5659509955e-26C61 x4 y6 2.5896495845e-26 3.4546938966e-26 4.0407638210e-24C63 x2 y8 2.7541505502e-26 -7.4895050830e-25 6.0730415119e-23C65 y10 4.6486642726e-27 -2.0234395665e-23 4.7393252957e-22C67 x10 y -1.2671624695e-30 -3.3603146563e-30 3.3946075712e-29C69 x8 y3 3.6551256712e-30 1.2741478749e-31 -1.2183951246e-28C71 x6 y5 4.0105186971e-29 1.4348440310e-28 -3.8214097655e-27C73 x4 y7 -2.1320046540e-29 2.4530639143e-27 -5.1910452835e-26C75 x2 y9 -1.7012583588e-28 -2.5912399575e-27 -2.7181368303e-25C77 y11 -2.1661184209e-29 1.5788042638e-26 3.1308943279e-24C78 x12 -3.8794948602e-33 7.9732476824e-33 -2.4491864286e-32C80 x10 y2 1.4236436724e-32 -1.9536542596e-32 5.0729416317e-32C82 x8 y4 -8.5278174028e-34 -2.5943990180e-31 -1.4638609904e-30C84 x6 y6 -4.7639205340e-31 -2.5140290628e-30 -4.0024422982e-29C86 x4 y8 -1.5824794963e-30 2.5127992990e-29 -6.9438429070e-28C88 x2 y10 -1.4920733060e-30 1.0609093062e-28 -9.3430386273e-27C90 y12 -2.6197064063e-31 3.4435745585e-27 -7.5977211512e-26C92 x12 y 1.9958533177e-35 2.0371471987e-35 -2.8544801140e-34C94 x10 y3 6.9839029681e-35 8.2256749663e-35 1.3326476307e-33C96 x8 y5 -9.8724683568e-34 -4.9875487853e-34 4.0602905710e-32C98 x6 y7 -3.8550538797e-33 -4.3006861496e-32 7.2086227775e-31C100 x4 y9 -3.8760570445e-33 -1.0875202483e-31 1.0533526459e-29C102 x2 y11 -1.0933947654e-34 -8.2170757362e-32 6.5505210697e-29C104 y13 -1.1108911231e-33 -2.3951842627e-29 -1.6372595460e-28C105 x14 1.5023683821e-38 -2.8837447732e-38 1.1654750762e-37C107 x12 y2 1.5339290412e-38 1.2214596522e-37 -5.9407222047e-37C109 x10 y4 -7.2556981322e-37 2.2051838875e-36 1.4581808004e-35C111 x8 y6 -3.1428080411e-36 4.0656954549e-35 3.7400650213e-34C113 x6 y8 3.6746626925e-36 -1.4514714201e-34 5.3186350290e-33C115 x4 y10 2.6602955455e-35 -1.1430107941e-33 7.6957134709e-32C117 x2 y12 2.6455146133e-35 -1.0341222950e-32 8.9765313229e-31C119 y14 1.7171842631e-36 -1.9852265747e-31 8.1046540698e-30C121 x14 y -9.5454501493e-41 -9.1004149722e-41 1.8669447938e-39C123 x12 y3 -1.3111613876e-39 -9.7180633844e-40 -6.4656490397e-39C125 x10 y5 -3.2492178895e-40 -8.0446588250e-39 -2.8401847250e-37C127 x8 y7 2.5778585468e-38 2.3074223659e-37 -5.6787489490e-36C129 x6 y9 9.6862180917e-38 1.7122924558e-36 -9.6964248746e-35C131 x4 y11 1.4198795257e-37 8.7165228781e-36 -1.3731821621e-33C133 x2 y13 7.9033616571e-38 8.6444703416e-35 -8.8267936933e-33C135 y15 3.2159406333e-38 3.0301440246e-33 -1.2836859040e-32C136 x16 -4.1799757307e-44 5.5470501457e-44 -2.4327713922e-43C138 x14 y2 -9.9293913954e-43 -3.5055738352e-43 5.6795738109e-42C140 x12 y4 -2.6088118082e-42 -9.0011339751e-42 -7.8041185433e-41C142 x10 y6 3.6558718605e-41 -2.1975490647e-40 -2.5907106256e-39C144 x8 y8 1.6307453081e-40 -3.0354043988e-40 -3.4492383421e-38C146 x6 y10 2.4121241652e-40 -1.0822530237e-39 -3.7052356167e-37C148 x4 y12 7.5832151280e-41 5.1655238719e-38 -3.3668494381e-36C150 x2 y14 -4.7712208927e-41 -2.9808785016e-37 -4.1363215279e-35C152 y16 8.1898379387e-41 -5.4224204392e-36 -4.6614104106e-34C154 x16 y -1.7914463671e-47 2.6219246633e-46 -6.7406154625e-45C156 x14 y3 1.0745318060e-45 4.9483843686e-45 1.3849571217e-44C158 x12 y5 2.3672435687e-44 6.5950866356e-44 1.0507358382e-42C160 x10 y7 1.3982432669e-43 -1.6454478847e-44 2.4422757510e-41C162 x8 y9 2.6207616947e-43 -6.8749824020e-42 4.3573254069e-40C164 x6 y11 -2.2355380277e-43 -4.4243194354e-41 7.1938790763e-39C166 x4 y13 -1.0368134641e-42 -3.9448944413e-40 1.0148934213e-37C168 x2 y15 -7.6783452477e-43 -4.3475300868e-39 6.2209814134e-37C170 y17 -1.4289565589e-43 -9.6679301947e-38 2.1799617249e-36C171 x18 4.2172877123e-50 -4.5999961053e-50 -8.4918585026e-50C173 x16 y2 2.7632292455e-48 8.7646418103e-50 -2.6660270257e-47C175 x14 y4 2.9615958122e-47 1.4095824660e-47 2.1303141272e-46C177 x12 y6 6.9533736552e-47 2.5960843498e-46 1.0083670376e-44C179 x10 y8 1.2580608026e-46 4.0258994551e-45 1.5121267402e-43C181 x8 y10 -1.4499661590e-46 -2.1913257520e-45 1.4987175240e-42C183 x6 y12 -1.9968423374e-45 5.0870429755e-43 3.8494428986e-42C185 x4 y14 -3.1618141043e-45 -2.8637217241e-42 -1.1244621519e-40C187 x2 y16 -1.9306947554e-45 7.2417391616e-41 -6.7248071772e-41C189 y18 -1.0973515672e-45 6.2867454061e-40 8.8178608872e-39C191 x18 y 6.5396283418e-52 -3.7227476638e-52 1.0552257331e-50C193 x16 y3 1.6418735069e-50 -9.7840216332e-51 -5.5226791191e-51C195 x14 y5 6.3541612661e-50 -1.4086384587e-49 -1.5737677567e-48C197 x12 y7 -2.9488771309e-51 -2.0819014149e-48 -4.2297440300e-47C199 x10 y9 -6.6384533886e-50 1.7117795430e-47 -8.4108204360e-46C201 x8 y11 -8.7340769288e-49 -2.3536950753e-46 -1.3161083760e-44C203 x6 y13 -3.3794979372e-48 1.6585896223e-45 -2.4077286939e-43C205 x4 y15 -3.7739974962e-48 -2.2730128523e-45 -3.1376510905e-42C207 x2 y17 -2.2621793666e-48 -2.6033476490e-43 -1.7739511987e-41C209 y19 -2.0504906586e-48 -1.5043068131e-42 -8.2324014343e-41C210 x20 2.9729027928e-56 6.5392523495e-57 1.0400911778e-54C212 x18 y2 2.5665265344e-54 1.2914326528e-54 5.0688635446e-53C214 x16 y4 1.8305533014e-53 5.9048056185e-54 -2.3334066894e-52C216 x14 y6 2.6949792440e-53 6.4827067278e-52 -1.5871998639e-50C218 x12 y8 -7.9412087474e-53 -6.2093963098e-51 -3.0019143464e-49C220 x10 y10 -7.4635451348e-53 5.8917062884e-50 -2.9663927702e-48C222 x8 y12 -7.8992068765e-52 -3.9920713110e-49 -1.6751448770e-47C224 x6 y14 -1.8932192889e-51 -9.7725220791e-49 6.2830370114e-46C226 x4 y16 -1.6926026743e-51 1.4551817943e-47 1.1044715202e-44C228 x2 y18 -1.1080519579e-51 2.9706261427e-46 5.1777437080e-44C230 y20 -1.3290009055e-51 1.3213567197e-45 1.5639696981e-43Table 3b for Fig. 6Coefficient Formula M07 M08 M09C7 x2 y -2.2583427273e-07 3.2603536654e-07 -1.7809062944e-07C9 y3 -2.4937890146e-07 1.2075191284e-07 -5.5449409275e-07C10 x4 -2.7604245893e-10 -9.9059231472e-12 1.8340855307e-10C12 x2 y2 7.5029657395e-10 1.3006241223e-10 -1.8776631637e-10C14 y4 2.0411734490e-09 -4.2578668008e-10 3.1695339636e-09C16 x4 y 2.7089336126e-12 7.7963418655e-13 9.1924443256e-13C18 x2 y3 2.9604914321e-12 2.2806657290e-12 -8.4062295181e-12C20 y5 -1.0538908242e-11 1.1780365674e-12 -1.5497481901e-11C21 x6 1.5079039672e-15 1.3731594322e-15 5.1375745348e-16C23 x4 y2 -3.8268989722e-15 -5.6596891033e-16 3.0044111688e-15C25 x2 y4 -1.5925460444e-14 -4.7357074162e-15 2.7786610353e-14C27 y6 5.7443303797e-14 -5.0192551505e-15 1.0320491988e-13C29 x6 y -6.4907264647e-18 2.5815613732e-18 -1.2537950454e-16C31 x4 y3 1.7721139035e-17 8.1088372807e-18 1.5152992482e-17C33 x2 y5 1.0516696556e-17 2.4335919192e-17 -2.4994477780e-16C35 y7 -4.2367818599e-16 1.8742493029e-17 -6.4626231672e-16C36 x8 -1.9790651519e-21 -3.7297103437e-22 -1.9937685216e-20C38 x6 y2 4.4671851217e-20 4.4416525080e-21 1.2808675600e-18C40 x4 y4 -3.5783540320e-19 -2.3074518274e-20 1.1868123407e-18C42 x2 y6 -3.6810994877e-19 -8.0317937642e-20 2.2223523144e-18C44 y8 -1.6120907041e-18 -7.4294521176e-20 4.4634439564e-18C46 x8 y -5.8952745126e-24 -2.5643127892e-22 1.3626516363e-19C48 x6 y3 -6.2677765086e-22 -4.5472742168e-22 9.5275948210e-20C50 x4 y5 5.2729738680e-21 -1.2667389413e-22 -2.1349837174e-20C52 x2 y7 -5.3146553748e-21 1.7321854182e-22 -3.4009727950e-20C54 y9 -7.7543304773e-20 4.4329147910e-22 -3.7761969738e-20C55 x10 -2.0220949220e-26 -8.2430405929e-25 -8.2696838067e-23C57 x8 y2 -9.9476709059e-25 7.9550764118e-25 -8.3801447293e-22C59 x6 y4 -2.9732066369e-25 -1.4165507036e-24 -6.1293175573e-22C61 x4 y6 -9.6192974055e-23 -5.0357207821e-24 -3.3986000622e-22C63 x2 y8 -4.7801748744e-22 -3.6143725729e-24 1.1143051844e-22C65 y10 3.8488098249e-21 -2.6636248396e-24 2.5637188152e-22C67 x10 y 1.1633077144e-27 2.0553778352e-26 -7.2993111092e-23C69 x8 y3 5.3130487964e-28 7.8092197405e-26 -9.7463020183e-23C71 x6 y5 -3.7950237003e-25 6.9649735804e-26 -1.8028641070e-23C73 x4 y7 -3.1970284862e-24 4.4985879891e-26 1.2100152852e-23C75 x2 y9 1.9744203576e-23 7.4877000695e-26 3.7846278667e-24C77 y11 8.0529486335e-24 -3.8570691968e-27 3.7021518228e-25C78 x12 1.1917501879e-30 -9.8752514860e-30 4.2992035129e-26C80 x10 y2 3.8104209071e-29 -8.7324378606e-29 1.9698140459e-25C82 x8 y4 6.5870610060e-29 1.1072079650e-28 6.1248408303e-26C84 x6 y6 -2.5668882606e-27 4.4898404363e-28 1.4260194168e-25C86 x4 y8 5.0451106137e-26 3.0231520136e-28 5.5209855977e-26C88 x2 y10 3.7210706409e-26 -2.8291958354e-28 -7.6694768789e-27C90 y12 -1.4985393954e-24 1.1799079069e-28 -5.4267512901e-27C92 x12 y -3.4360790309e-32 -1.9579754596e-30 2.3489611165e-26C94 x10 y3 -1.2519494177e-31 -6.4993540167e-30 4.5655337160e-26C96 x8 y5 5.8368416973e-30 -8.6344719593e-30 2.0766631374e-26C98 x6 y7 2.0355894366e-28 -3.2871797707e-30 -4.8231081572e-28C100 x4 y9 7.2410692567e-28 -5.8789687504e-30 -3.0896219799e-27C102 x2 y11 -1.0511088659e-26 -5.7778528810e-30 -8.0614338926e-28C104 y13 3.0292650627e-27 6.5687956675e-31 -4.2288869819e-28C105 x14 -2.3752290315e-35 4.4117399744e-34 -1.3925769921e-30C107 x12 y2 -1.3865738299e-33 -4.0642441567e-33 4.2938174170e-29C109 x10 y4 -1.1031027525e-32 -1.4972667663e-32 1.0974830981e-28C111 x8 y6 1.9901597007e-31 -3.1479666481e-32 2.7365432035e-29C113 x6 y8 2.1359875696e-30 -4.3813517717e-32 -1.9980314610e-29C115 x4 y10 -2.6347434362e-29 2.1987266229e-32 1.5358324849e-30C117 x2 y12 2.5362014369e-29 4.7894869577e-32 5.7414864141e-30C119 y14 2.8724504885e-28 -1.1043121970e-32 5.0298631861e-30C121 x14 y 3.7109464306e-37 7.8609300320e-35 -4.3585419843e-30C123 x12 y3 -7.1835760919e-36 2.6352918694e-34 -1.1157189511e-29C125 x10 y5 -8.9265460486e-35 5.5122228336e-34 -7.6537882973e-30C127 x8 y7 -4.2727281659e-34 3.1077514111e-34 -1.6916986850e-30C129 x6 y9 -7.7493125572e-32 2.0025162379e-34 5.0781248592e-31C131 x4 y11 1.3598770977e-31 3.4105108224e-34 3.8266216097e-31C133 x2 y13 1.9868959635e-30 1.9929808506e-34 5.1120636337e-32C135 y15 -5.7255501104e-31 -5.7540968126e-36 1.7689442883e-32C136 x16 2.3246815032e-40 1.0110462801e-38 -1.7971119701e-33C138 x14 y2 2.2137070948e-38 4.1245751594e-37 -2.8546060197e-32C140 x12 y4 2.6295502198e-37 9.7445831762e-37 -5.3567168422e-32C142 x10 y6 -5.7486188917e-37 1.8227251188e-36 -3.1307656696e-32C144 x8 y8 -1.4833510285e-34 2.1790538480e-36 -3.0897401190e-33C146 x6 y10 8.0108216738e-35 1.0174531698e-36 1.8356912931e-34C175 x14 y4 -1.1973827387e-43 -2.6297001948e-41 9.6683129831e-36C177 x12 y6 -4.8610130990e-41 -7.1698224547e-41 7.3249206985e-36C179 x10 y8 1.3729073927e-39 -5.4630511310e-41 2.3284408806e-36C181 x8 y10 1.3078608494e-38 -9.0568912989e-41 2.4415702694e-37C183 x6 y12 -3.0322931666e-38 7.0570533339e-41 1.7850077411e-37C185 x4 y14 -3.7447495950e-37 8.6165432601e-41 1.0461974863e-37C187 x2 y16 -9.6746884169e-37 7.9015618161e-41 3.8734365192e-38C189 y18 2.2206700197e-36 -1.6674601491e-41 3.1155838405e-38C191 x18 y -3.2622843319e-48 1.0390977991e-44 -1.7574842150e-38C193 x16 y3 -2.6966951427e-45 3.1703815542e-44 -6.8297594733e-38C195 x14 y5 -7.6390888727e-44 2.0023067787e-43 -7.6331296851e-38C197 x12 y7 9.6000238233e-43 3.4608029275e-43 -4.1316687972e-38C199 x10 y9 1.3773971949e-41 3.0116057249e-46 -1.0793118376e-38C201 x8 y11 9.3233731621e-42 2.4307616317e-43 1.0991194106e-39C203 x6 y13 -3.4603293884e-40 -2.2210807820e-43 1.9677360507e-39C205 x4 y15 -1.4837854866e-39 -4.3630944226e-43 5.6552874711e-40 C224 x6 y14 -8.2127021386e-43 1.9456364581e-46 -9.3462088321e-42C226 x4 y16 -1.3835338680e-42 6.0740788357e-46 -3.0409955259e-42C228 x2 y18 -3.7831067355e-42 5.5657775813e-46 4.5984698294e-43C230 y20 3.8013209610e-41 -9.6790526056e-47 3.9852995147e-43Table 3c for Fig. 6Coefficient Formula M10 M11 C61 x4 y6 7.7433840460e-24 -1.7539250411e-27C63 x2 y8 -8.3577512834e-24 -6.9744889975e-28C65 y10 2.2566180112e-22 -2.2089551776e-29C67 x10 y -4.2064108554e-28 -8.0241974113e-32C69 x8 y3 -6.6803576081e-27 3.2660218169e-31C71 x6 y5 -2.2749776172e-26 4.5628959880e-31C73 x4 y7 8.8965636655e-26 2.3133659960e-31C75 x2 y9 -4.5582445095e-25 -4.5561777103e-32C77 y11 1.8548502745e-24 -1.1670677450e-31C78 x12 2.3688875544e-31 2.6819538008e-34C80 x10 y2 -2.4454727226e-30 1.8052734441e-33C82 x8 y4 -3.7155312734e-29 7.5973025161e-33C84 x6 y6 -3.2293275103e-28 1.2092335860e-32C86 x4 y8 9.1583036091e-28 8.3529659221e-33C88 x2 y10 -5.3137423478e-27 1.7993697631e-33C90 y12 -5.1468113258e-27 -4.8132455089e-34C92 x12 y 7.0963863682e-33 5.2491295166e-37C94 x10 y3 1.7361742823e-31 -3.3894464652e-37C96 x8 y5 1.3062557351e-30 -2.8650551548e-36C98 x6 y7 -6.7018505909e-31 -7.2534734365e-36C100 x4 y9 -2.5436705841e-30 -9.0216355844e-36C102 x2 y11 8.3285503620e-30 -5.0538260442e-36C104 y13 -1.2592851188e-28 -5.4206953873e-37C105 x14 -3.1206900324e-36 -1.5957934986e-39C107 x12 y2 3.5243981171e-35 -1.7331594633e-38C109 x10 y4 3.9448954347e-34 -7.9922496326e-38C111 x8 y6 6.8860094541e-33 -1.6752453704e-37C113 x6 y8 1.4883044645e-32 -1.8076801014e-37C115 x4 y10 -8.8311043098e-32 -9.3652125583e-38C117 x2 y12 4.3487838732e-31 -1.8452524972e-38C119 y14 -1.0511007278e-31 2.0107483976e-39C121 x14 y -1.0116134017e-37 -1.7241625915e-42C123 x12 y3 -3.1985842602e-36 -2.8253941961e-43C125 x10 y5 -3.2530405836e-35 1.2954989727e-41C127 x8 y7 -1.0019505170e-34 4.9246187054e-41C129 x6 y9 1.9655905241e-34 7.4333406142e-41C131 x4 y11 -6.1879954497e-35 6.6621563915e-41C133 x2 y13 1.2453884636e-33 2.8712834032e-41C135 y15 6.2237241065e-33 2.1507254885e-42C136 x16 3.3964441413e-41 4.7191649614e-45C138 x14 y2 1.7837698030e-40 6.6487018084e-44C140 x12 y4 4.0201349554e-39 3.6759726491e-43C142 x10 y6 -7.5445481115e-39 9.7257705538e-43C144 x8 y8 -4.8628439976e-37 1.4191399375e-42C146 x6 y10 2.6287688771e-37 1.1385788171e-42C148 x4 y12 4.9737527285e-36 4.5236826787e-43C150 x2 y14 -2.0856584651e-35 7.1064157436e-44C152 y16 3.9325544255e-35 -6.8146080703e-45C154 x16 y 7.3352652528e-43 4.5125051143e-48C156 x14 y3 3.2439264265e-41 1.3732203846e-47C158 x12 y5 4.0836787576e-40 1.5375388648e-48C160 x10 y7 2.3223664334e-39 -1.4933280612e-46C162 x8 y9 2.8042704606e-39 -3.7572456538e-46C164 x6 y11 -1.3255325572e-38 -4.5798586100e-46C166 x4 y13 2.5185855681e-38 -3.4076999203e-46C168 x2 y15 -1.9045109409e-37 -1.2946229008e-46C170 y17 7.6029009786e-38 -1.2222462256e-47C171 x18 -2.0704956351e-46 -1.0967976377e-50C173 x16 y2 -5.2169444483e-45 -1.7841338343e-49C175 x14 y4 -1.2323600021e-43 -1.1129303033e-48C177 x12 y6 -1.0947949724e-42 -3.5186127588e-48C179 x10 y8 -1.9815977702e-44 -6.4775501822e-48C181 x8 y10 1.4050403150e-41 -7.1246904750e-48C183 x6 y12 -6.1844165467e-41 -4.5310039281e-48C185 x4 y14 2.2578223229e-42 -1.4894591947e-48C187 x2 y16 -4.7953641342e-40 -2.1493587869e-49C189 y18 3.4799844112e-41 9.0135520499e-51C191 x18 y -2.8990201621e-48 -6.7147900621e-54C193 x16 y3 -1.7684270375e-46 -4.1175485404e-53C195 x14 y5 -2.6671432883e-45 -8.7451738201e-53C197 x12 y7 -2.0346222488e-44 1.4785581741e-52C199 x10 y9 -6.2642776827e-44 8.2476050887e-52C201 x8 y11 -3.2960156918e-44 1.4294244181e-51C203 x6 y13 3.4201487702e-43 1.3956844206e-51C205 x4 y15 -2.7921356322e-43 8.6254028456e-52C207 x2 y17 1.2899359982e-42 2.8776468609e-52C209 y19 1.1944173727e-42 2.7982291339e-53C210 x20 6.9287069722e-52 1.4628867474e-56C212 x18 y2 3.9092871496e-50 2.6085741899e-55C214 x16 y4 1.0783063919e-48 1.8092766513e-54C216 x14 y6 1.2967548923e-47 6.6487024755e-54C218 x12 y8 4.5178145236e-47 1.4760862198e-53C220 x10 y10 9.6157180065e-47 2.0613251582e-53C222 x8 y12 -5.1533616342e-46 1.8098694013e-53C224 x6 y14 2.9412504221e-45 9.5224021448e-54C226 x4 y16 -1.1832593758e-45 2.6956946932e-54C228 x2 y18 1.0838296353e-44 3.6856687763e-55C230 y20 8.6594868786e-45 -2.1210617611e-57C232 x20 y 3.2424636652e-54 5.6193627791e-60C234 x18 y3 3.6157196861e-52 5.1914881452e-59C236 x16 y5 6.7676157900e-51 1.7980474203e-58C238 x14 y7 6.8533658296e-50 1.5017294298e-58C240 x12 y9 2.4340249420e-49 -4.8300192670e-58Table 3d for Fig. 6Coordinates of the stop edge xi [mm] yi [mm] xi+N / 2 [mm] yi+N / 2 [mm]-380.264672 69.074627 380.580536 56.800471-379.702380 75.121006 380.331396 50.578417-378.873054 81.103287 379.809854 44.303716-377.779110 87.018877 379.015760 37.979514-376.423333 92.865284 377.949476 31.609073-374.808848 98.640113 376.611884 25.195766-372.939088104.341060 375.004384 18.743074-370.817763109.965916 373.128897 12.254575-368.448833115.512561 370.987849 5.733942-365.836479120.978965 368.584159 -0.815071-362.985084126.363192 365.921220 -7.388639-359.899204131.663396 363.002873 -13.982875-356.583552136.877826 359.833382 -20.593843-353.042982142.004826 356.417400 -27.217566-349.282471147.042839 352.759936 -33.850034-345.307104151.990403 348.866322 -40.487209-341.122061156.846157 344.742177 -47.125033-336.732603161.608834 340.393370 -53.759422-332.144060166.277265 335.825981 -60.386275-327.361815170.850372 331.046270 -67.001463-322.391294175.327168 326.060638 -73.600826-317.237947179.706753 320.875597 -80.180169-311.907240183.988305 315.497736 -86.735247-306.404633188.171080 309.933690 -93.261761-300.735570192.254405 304.190114 -99.755343-294.905467196.237671 298.273656 -106.211543-288.919692200.120328 292.190932 -112.625819-282.783559203.901885 285.948506 -118.993518-276.502313207.581895 279.552869 -125.309864-270.081122211.159963 273.010421 -131.569940-263.525068214.635731 266.327457 -137.768673-256.839144218.008882 259.510157 -143.900816-250.028245221.279133 252.564568 -149.960934-243.097170224.446235 245.496603 -155.943383-236.050620227.509970 238.312028 -161.842304-228.893197230.470147 231.016459 -167.651604-221.629409233.326604 223.615360 -173.364945-214.263673236.079205 216.114035 -178.975741-206.800317238.727836 208.517633 -184.477148-199.243590241.272408 200.831146 -189.862058-191.597661243.712852 193.059408 -195.123102-183.866633246.049118 185.207100 -200.252649-176.054540248.281177 177.278754 -205.242811-168.165362250.409014 169.278756 -210.085448-160.203023252.432630 161.211353 -214.772183-152.171403254.352040 153.080657 -219.294418-144.074339256.167269 144.890652 -223.643356-135.915629257.878353 136.645204 -227.810036-127.699042259.485336 128.348067 -231.785369-119.428315260.988269 120.002890 -235.560188-111.107161262.387206 111.613230 -239.125308-102.739270263.682207 103.182557 -242.471594-94.328312264.873330 94.714264 -245.590038-85.877937265.960637 86.211679 -248.471843-77.391783266.944186 77.678070 -251.108518-68.873469267.824034 69.116657 -253.491975-60.326603268.600234 60.530619 -255.614625-51.754781269.272835 51.923099 -257.469482-43.161589269.841881 43.297213 -259.050255-34.550603270.307411 34.656054 -260.351447-25.925391270.669456 26.002697 -261.368432-17.289516270.928041 17.340202 -262.097531-8.646534271.083185 8.671622 -262.5360720.000000271.134898 0.000000 -262.6824348.646534271.083185 -8.671622 -262.53607217.289516270.928041 -17.340202 -262.09753125.925391270.669456 -26.002697 -261.36843234.550603270.307411 -34.656054 -260.35144743.161589269.841881 -43.297213 -259.05025551.754781269.272835 -51.923099 -257.46948260.326603268.600234 -60.530619 -255.61462568.873469267.824034 -69.116657 -253.49197577.391783266.944186 -77.678070 -251.10851885.877937265.960637 -86.211679 -248.47184394.328312264.873330 -94.714264 -245.59003802.739270263.682207 -103.182557 -242.47159411.107161262.387206 -111.613230 -239.12530819.428315260.988269 -120.002890 -235.56018827.699042259.485336 -128.348067 -231.78536935.915629257.878353 -136.645204 -227.81003644.074339256.167269 -144.890652 -223.64335652.171403254.352040 -153.080657 -219.29441860.203023252.432630 -161.211353 -214.77218368.165362250.409014 -169.278756 -210.08544876.054540248.281177 -177.278754 -205.24281183.866633246.049118 -185.207100 -200.25264991.597661243.712852 -193.059408 -195.12310299.243590241.272408 -200.831146 -189.86205806.800317238.727836 -208.517633 -184.47714814.263673236.079205 -216.114035 -178.97574121.629409233.326604 -223.615360 -173.36494528.893197230.470147 -231.016459 -167.65160436.050620227.509970 -238.312028 -161.84230443.097170224.446235 -245.496603 -155.94338350.028245221.279133 -252.564568 -149.96093456.839144218.008882 -259.510157 -143.90081663.525068214.635731 -266.327457 -137.76867370.081122211.159963 -273.010421 -131.56994076.502313207.581895 -279.552869 -125.30986482.783559203.901885 -285.948506 -118.99351888.919692200.120328 -292.190932 -112.62581994.905467196.237671 -298.273656 -106.21154300.735570192.254405 -304.190114 -99.755343306.404633188.171080 -309.933690 -93.261761311.907240183.988305 -315.497736 -86.735247317.237947179.706753 -320.875597 -80.180169322.391294175.327168 -326.060638 -73.600826327.361815170.850372 -331.046270 -67.001463332.144060166.277265 -335.825981 -60.386275336.732603161.608834 -340.393370 -53.759422341.122061156.846157 -344.742177 -47.125033345.307104151.990403 -348.866322 -40.487209349.282471147.042839 -352.759936 -33.850034353.042982142.004826 -356.417400 -27.217566356.583552136.877826 -359.833382 -20.593843359.899204131.663396 -363.002873 -13.982875362.985084126.363192 -365.921220 -7.388639365.836479120.978965 -368.584159 -0.815071368.448833115.512561 -370.987849 5.733942370.817763109.965916 -373.128897 12.254575372.939088104.341060 -375.004384 18.743074374.808848 98.640113 -376.611884 25.195766376.423333 92.865284 -377.949476 31.609073377.779110 87.018877 -379.015760 37.979514378.873054 81.103287 -379.809854 44.303716379.702380 75.121006 -380.331396 50.578417380.264672 69.074627 -380.580536 56.800471380.557919 62.966847 -380.557919 62.966847Table 4 for Fig. 6Numerical aperture = 0.75 1 / βx = -4.30 1 / βy= -8.00Track length = 2272 mmObject-image shift = 3496 mmWidth of the installation space = 4144 mmOptically used overall mirror area = 3.22 m²Linear pupil obscuration = 20.0% Minimum angle on grazing incident mirror = 68.8°Scan slot length on the wafer = 1.0 mmScan-integrated wavefront RMS = 5.13 mλTransmission = 4.97%Étendue = 45.9 mm²Mirror with maximum diameter = M11Maximum optical mirror diameter = 1185 mmMirror with maximum area = M11 Table 5 for Fig. 6 Fig.7 shows a further embodiment of a projection optical unit or imaging optical unit 28, which can be used in the projection exposure apparatus 1 instead of the projection optical unit 10. Com- ponents and functions corresponding to those which have already been explained above with ref-erence to Figures 1 to 6 bear the same reference signs and will not be discussed in detail again.In terms of its basic structure, especially as regards the sequence of NI and GI mirrors, the pro- jection optical unit 28 corresponds to the projection optical units 24 to 26 according to Figures 3 to 5.The projection optical unit 28 has a small object-image shift of 3078 mm. In the y-direction, theprojection optical unit 28 has an installation space extent of approximately 3800 mm.A linear pupil obscuration of the projection optical unit 28 is 17.7 %.Apart from mirror M9, which has a diameter of 1340 mm, all other mirrors M1 to M8 have amaximum diameter of 1090 mm, i.e. a maximum diameter less than 1100 mm.The optical design data for the projection optical unit 28 emerge from following Tables 1 to 5, which, in turn, correspond in terms of the basic structure to Tables 1 to 5 relating to the embodi- ment according to Figure 6. Radii of the surfaces Radiusx [mm] Powerx [1 / mm] Radiusy [mm] Powery [1 / mm]M01 -3802.68230960 0.00051971 -1676.54434446 0.00117879M02 5483.71632352 -0.00036472 2835.91067088 -0.00070524M03 18684.94740962 -0.00010699 -2989.83379619 0.00066861M04 -3383.14936701 0.00059117 -4060.55173454 0.00049254M05 -1427.80044793 0.00027721 -12631.86931315 0.00003133M06 -1083.21726466 0.00054773 -12409.93913990 0.00004781M07 -3364.79779869 0.00010658 -24172.36375964 0.00001484M08 5654.07862778 -0.00008764 356.62812090 -0.00138952M09 -940.33464178 0.00212690 -845.48130591 0.00236552Table 1 for Fig. 7Decentring (location, angle) the surfaces Dx [mm] Dy [mm] Dz [mm]Reticle 0.000000000 0.000000000 0.000000000M01 0.000000000 -211.7685884952043.850270272M02 0.000000000 -453.2734348521033.239965232M03 0.000000000 -824.655034184 625.644321190M04 0.000000000 -1657.202547503 324.949427783M05 0.000000000 -2388.917736285 299.442295454M06 0.000000000 -2659.117881455 389.495249706M07 0.000000000 -2927.383260251 742.919549874M08 0.000000000 -3211.9891988092202.749671139Stop 0.000000000 -3190.8323814762094.229942531M09 0.000000000 -3077.8292643561514.602704235Wafer 0.000000000 -3077.8292746962293.565169279 Reticle 0.000000000 0.000000000 0.000000000M01 -3.762213679 0.000000000 0.000000000M02 242.110918707 0.000000000 -0.000000000M03 213.760072293 -0.000000000 -0.000000000M04 190.927455698 -0.000000000 -0.000000000M05 171.782081940 -0.000000000 -0.000000000M06 144.383927868 -0.000000000 -0.000000000M07 114.116041672 -0.000000000 -0.000000000M08 11.031904999 0.000000000 -0.000000000Stop 180.025296781 -0.000000000 -0.000000000M09 185.515952880 -0.000000000 -0.000000000Wafer 0.000000761 0.000000000180.000000000Table 2 for Fig. 7Free-form coefficients of the surfacesCoefficient Formula M01 M02 M03C2 y 9.5417099532e-06 6.5515825209e-05 1.3627140482e-03C7 x2 y -2.0298418785e-09 6.0537765927e-08 -1.0336865576e-07C9 y3 -6.3369275900e-08 -1.5335707358e-07 4.0924749314e-08C10 x4 5.4770030422e-12 1.5218484183e-10 6.9609966853e-11C12 x2 y2 4.7374095242e-11 -1.1012810328e-10 3.4753920982e-11C14 y4 -7.0084802009e-11 1.0390020126e-09 1.7948304117e-11C16 x4 y 4.4871335983e-14 1.3486786517e-14 -7.6431485379e-14C18 x2 y3 -3.7418640834e-14 -2.7558457279e-13 5.7309716683e-14C20 y5 2.5122502544e-13 -1.6022786070e-12 -1.6594984255e-13C21 x6 1.3486716692e-17 3.0992318862e-16 1.3204895377e-16C23 x4 y2 6.4181864949e-17 5.6105304127e-16 1.4974107576e-17C25 x2 y4 -1.7896395315e-17 -1.4186829797e-15 -3.0645038225e-16C27 y6 1.3951251031e-16 -1.6756783349e-14 2.5169959529e-17C29 x6 y -3.3901576563e-21 5.5598896526e-21 -3.0809774216e-19C31 x4 y3 1.9533575220e-19 1.1318488414e-18 -3.9538690912e-20C33 x2 y5 -2.6142703533e-19 3.6013493960e-18 -8.1981637023e-19C35 y7 -1.0305564352e-17 1.6370228946e-16 1.5275620766e-18C36 x8 -6.9774455104e-23 -6.1409494865e-22 2.1994260238e-22C38 x6 y2 -1.3209138162e-24 -4.9756496816e-21 4.6205695735e-22C40 x4 y4 4.9388480250e-22 -2.9003648609e-21 -2.4016454256e-21C42 x2 y6 4.2207028861e-21 -2.0739241881e-20 8.0903923838e-21C44 y8 -4.7119907239e-21 -6.0736448311e-20 -2.0021739798e-22C46 x8 y -1.4224326099e-25 -3.8867135911e-24 6.4253536051e-25C48 x6 y3 2.0496082385e-24 4.3647471232e-23 -7.1767000513e-25C50 x4 y5 2.9149154798e-23 4.4617738601e-24 1.4064089107e-23C52 x2 y7 2.3326250338e-22 -2.1519176397e-22 -2.5490959217e-24C54 y9 6.3340375869e-22 -6.3032963173e-21 -3.1909151375e-23C55 x10 1.6412835344e-27 2.3655656576e-26 -4.6330471202e-27C57 x8 y2 6.2199641829e-27 6.3125283437e-26 -6.0401479582e-27C59 x6 y4 -1.5284239944e-26 4.6329645955e-25 -1.8619839817e-26C61 x4 y6 -1.1774911038e-25 -5.6118685473e-25 5.5100786685e-27C63 x2 y8 -8.2095364062e-26 -2.0979319362e-24 -1.3550146566e-25C65 y10 1.1786446772e-24 1.4543640188e-23 6.2368116810e-26C67 x10 y 2.3042617805e-30 1.1060736124e-28 -1.8603010522e-29C69 x8 y3 -1.2690709309e-28 -7.1752951091e-28 -7.8356822268e-29C71 x6 y5 -1.2304806553e-27 -3.0830735729e-27 1.4257059468e-28C73 x4 y7 -6.4646886429e-27 -2.5558657972e-27 -2.3266662206e-28C75 x2 y9 -2.7913031664e-26 1.3406738181e-27 2.6651275626e-28C77 y11 -4.7322941952e-26 1.5692879871e-25 3.8758860884e-28C78 x12 -3.0259838305e-32 -2.6240770911e-31 3.3669772270e-32C80 x10 y2 -2.3215184671e-31 -1.3002546389e-30 4.5427428194e-32C82 x8 y4 -2.0968186451e-31 -4.7116799621e-30 6.3715396971e-31C84 x6 y6 5.6152373773e-30 -1.3506071588e-29 -1.3370748853e-31C86 x4 y8 1.9585526407e-29 4.1338991245e-29 1.5447308244e-31C88 x2 y10 -1.6417647672e-29 1.3598758369e-28 1.7715149238e-30C90 y12 -1.3096266250e-28 -4.9511702069e-28 -1.4222272578e-30C92 x12 y -4.6961878571e-35 -8.5562843876e-34 2.4561205080e-34C94 x10 y3 3.0010189295e-33 2.6041370579e-33 1.0497230108e-33C96 x8 y5 3.8643490830e-32 5.3214868361e-32 -8.4084668790e-34C98 x6 y7 1.9181088269e-31 1.8579412442e-31 -1.4113743413e-33C100 x4 y9 7.3820796829e-31 -2.1302414198e-32 3.8110108259e-33C102 x2 y11 2.2346898309e-30 -1.1389814452e-32 -7.1793087240e-33C104 y13 2.9313621726e-30 -2.9790910004e-30 -2.3327973364e-33C105 x14 4.0363794382e-37 1.7384783976e-36 -2.2327505550e-37C107 x12 y2 4.8699251551e-36 1.5006706086e-35 -6.9769314109e-37C109 x10 y4 1.8615060227e-35 3.9064324716e-35 -3.2524124598e-36C111 x8 y6 -5.9858669253e-35 9.8351430558e-35 -6.2929976375e-36C113 x6 y8 -9.0033463110e-34 6.1161793104e-34 4.2340176639e-36C115 x4 y10 -2.0257697341e-33 -1.8560509345e-33 -1.1639717854e-35C117 x2 y12 1.3919620359e-33 -4.0997357132e-33 -7.7524139767e-36C119 y14 7.5536790067e-33 9.8092879552e-33 1.5669344721e-35C121 x14 y 8.6585331053e-40 3.8147566092e-39 -2.2113299928e-39C123 x12 y3 -3.9802623291e-38 -2.7635922074e-39 -4.7319376700e-39C125 x10 y5 -7.0573650593e-37 -3.0732882372e-37 -3.2369999666e-39C127 x8 y7 -4.3632468652e-36 -2.5962442810e-36 4.8927258227e-39C129 x6 y9 -1.6339904111e-35 -3.6688103143e-36 -4.3677257194e-40C131 x4 y11 -5.1906394048e-35 2.7405708502e-36 -1.4552973720e-38C133 x2 y13 -1.2437333344e-34 -1.4944526402e-37 7.3279384866e-38C135 y15 -1.3387394143e-34 4.9758846189e-35 -7.1904906076e-41C136 x16 -3.9222810546e-42 -6.2099817158e-42 8.8479263127e-43C138 x14 y2 -6.6787042738e-41 -7.6469251336e-41 7.0447073770e-42C140 x12 y4 -4.1890103739e-40 -2.7401057466e-40 3.0471760946e-42C142 x10 y6 -7.1879381682e-40 -2.6511844131e-40 2.0516724232e-41C144 x8 y8 1.2481451256e-38 -3.6738257703e-39 6.3657552814e-41C146 x6 y10 8.2226128660e-38 -1.0310194253e-38 -3.4835759574e-41C148 x4 y12 1.3834344058e-37 4.8688271026e-38 1.2979931070e-40C150 x2 y14 -4.4784190497e-38 4.5265576741e-38 -4.0013226600e-41C152 y16 -2.7136171024e-37 -1.1197700703e-37 -8.6704077851e-41C154 x16 y -1.0589637012e-44 -7.5362593426e-45 1.1550357168e-44C156 x14 y3 3.1872127367e-43 6.1623608924e-44 1.3204179494e-44C158 x12 y5 7.8524400426e-42 8.8926314701e-43 -7.8780066834e-45C160 x10 y7 6.2563270900e-41 1.1243372693e-41 1.1446308319e-43C162 x8 y9 2.7160222248e-40 4.3303417060e-41 -4.9891565536e-44C164 x6 y11 8.6326416756e-40 2.6979724938e-41 7.6917703919e-44C166 x4 y13 2.3662007049e-39 1.2073602563e-42 -1.3914613211e-43C168 x2 y15 4.7486588888e-39 -3.5844082430e-41 -2.6887447089e-43C170 y17 4.3217036991e-39 -5.9780970285e-40 7.1061716168e-44C171 x18 2.7623589434e-47 9.1915197278e-48 -1.5871119630e-48C173 x16 y2 6.2423465049e-46 1.5072043399e-46 -2.2670885739e-47C175 x14 y4 5.1532665633e-45 8.4648187549e-46 -2.6213347097e-48C177 x12 y6 2.4435336759e-44 1.4841662763e-45 6.2825779178e-47C179 x10 y8 -4.4130287717e-44 3.3543085069e-45 -2.5973986371e-46C181 x8 y10 -1.0726150609e-42 4.0133070749e-44 -1.5207555306e-46C183 x6 y12 -4.5504957441e-42 1.6962778827e-44 4.8416135090e-47C185 x4 y14 -6.3003864371e-42 -4.3467299427e-43 -3.6046988188e-46C187 x2 y16 1.1708474623e-43 -7.6194890532e-44 2.9117024598e-46C189 y18 6.3603352114e-42 4.9814134123e-43 2.0282905753e-46C191 x18 y 8.0933777208e-50 1.2843748784e-51 -2.4090983449e-50C193 x16 y3 -1.5049200541e-48 -3.1633585014e-49 -4.1656167504e-50C195 x14 y5 -5.4168428400e-47 -1.8601824261e-48 1.1420770169e-49C197 x12 y7 -5.4709338706e-46 -1.8129707326e-47 -2.4698262992e-49C199 x10 y9 -2.9217930812e-45 -9.9253733005e-47 -4.1154667764e-49C201 x8 y11 -1.0249512568e-44 -2.4853712494e-46 1.6454246930e-49C203 x6 y13 -2.9051940083e-44 -1.3917513900e-46 -1.8011644755e-49C205 x4 y15 -7.0038929246e-44 -4.2988589016e-46 6.9139162754e-49C207 x2 y17 -1.2103492360e-43 8.6049268773e-46 1.6340455645e-49C209 y19 -9.5116874022e-44 3.0753858722e-45 -2.7199327519e-49C210 x20 -1.3710634246e-52 0.0000000000e+00 0.0000000000e+00C212 x18 y2 -3.9477017457e-51 0.0000000000e+00 0.0000000000e+00C214 x16 y4 -3.9016260711e-50 0.0000000000e+00 0.0000000000e+00C216 x14 y6 -2.7427111270e-49 0.0000000000e+00 0.0000000000e+00C218 x12 y8 -5.6155946653e-49 0.0000000000e+00 0.0000000000e+00C220 x10 y10 5.7263332623e-48 0.0000000000e+00 0.0000000000e+00C222 x8 y12 4.9758847478e-47 0.0000000000e+00 0.0000000000e+00C224 x6 y14 1.5620742661e-46 0.0000000000e+00 0.0000000000e+00C226 x4 y16 1.8845540945e-46 0.0000000000e+00 0.0000000000e+00C228 x2 y18 3.6261261208e-47 0.0000000000e+00 0.0000000000e+00C230 y20 -9.5434607481e-47 0.0000000000e+00 0.0000000000e+00C232 x20 y -3.7378527256e-55 0.0000000000e+00 0.0000000000e+00C234 x18 y3 3.6531867271e-54 0.0000000000e+00 0.0000000000e+00C236 x16 y5 2.2489109861e-52 0.0000000000e+00 0.0000000000e+00C238 x14 y7 2.8271813895e-51 0.0000000000e+00 0.0000000000e+00C240 x12 y9 1.8630437565e-50 0.0000000000e+00 0.0000000000e+00C242 x10 y11 7.6811831759e-50 0.0000000000e+00 0.0000000000e+00C244 x8 y13 2.3494028499e-49 0.0000000000e+00 0.0000000000e+00C246 x6 y15 6.0538700319e-49 0.0000000000e+00 0.0000000000e+00C248 x4 y17 1.2975985717e-48 0.0000000000e+00 0.0000000000e+00C250 x2 y19 1.9609888971e-48 0.0000000000e+00 0.0000000000e+00C252 y21 1.3515695784e-48 0.0000000000e+00 0.0000000000e+00C253 x22 4.5307266574e-58 0.0000000000e+00 0.0000000000e+00C255 x20 y2 1.6126361396e-56 0.0000000000e+00 0.0000000000e+00C287 x12 y11 -3.1330516751e-55 0.0000000000e+00 0.0000000000e+00C289 x10 y13 -1.0848390661e-54 0.0000000000e+00 0.0000000000e+00C291 x8 y15 -3.0135746513e-54 0.0000000000e+00 0.0000000000e+00C293 x6 y17 -7.1067628931e-54 0.0000000000e+00 0.0000000000e+00C295 x4 y19 -1.3652266995e-53 0.0000000000e+00 0.0000000000e+00C297 x2 y21 -1.8230274021e-53 0.0000000000e+00 0.0000000000e+00C299 y23 -1.1152516062e-53 0.0000000000e+00 0.0000000000e+00C300 x24 -8.9089126736e-64 0.0000000000e+00 0.0000000000e+00C302 x22 y2 -3.8285250311e-62 0.0000000000e+00 0.0000000000e+00C304 x20 y4 -4.8241201929e-61 0.0000000000e+00 0.0000000000e+00C306 x18 y6 -5.0562011601e-60 0.0000000000e+00 0.0000000000e+00C308 x16 y8 -3.0485598116e-59 0.0000000000e+00 0.0000000000e+00C310 x14 y10 -6.7215647348e-59 0.0000000000e+00 0.0000000000e+00C312 x12 y12 4.1740006315e-58 0.0000000000e+00 0.0000000000e+00C314 x10 y14 4.4214006311e-57 0.0000000000e+00 0.0000000000e+00C316 x8 y16 1.8044962932e-56 0.0000000000e+00 0.0000000000e+00C318 x6 y18 3.7531323771e-56 0.0000000000e+00 0.0000000000e+00C320 x4 y20 3.7416853717e-56 0.0000000000e+00 0.0000000000e+00C322 x2 y22 1.5159558804e-56 0.0000000000e+00 0.0000000000e+00C324 y24 -3.5463069485e-57 0.0000000000e+00 0.0000000000e+00C326 x24 y -1.0384225029e-66 0.0000000000e+00 0.0000000000e+00C328 x22 y3 -4.1767650791e-66 0.0000000000e+00 0.0000000000e+00C330 x20 y5 4.7999573834e-64 0.0000000000e+00 0.0000000000e+00C332 x18 y7 9.1715045882e-63 0.0000000000e+00 0.0000000000e+00C334 x16 y9 8.8320196169e-62 0.0000000000e+00 0.0000000000e+00C336 x14 y11 5.2217447998e-61 0.0000000000e+00 0.0000000000e+00C338 x12 y13 2.0968830928e-60 0.0000000000e+00 0.0000000000e+00C340 x10 y15 6.4426127361e-60 0.0000000000e+00 0.0000000000e+00C342 x8 y17 1.6575222605e-59 0.0000000000e+00 0.0000000000e+00C344 x6 y19 3.5858101128e-59 0.0000000000e+00 0.0000000000e+00C346 x4 y21 6.2165111577e-59 0.0000000000e+00 0.0000000000e+00C348 x2 y23 7.3946214879e-59 0.0000000000e+00 0.0000000000e+00C350 y25 4.0550130917e-59 0.0000000000e+00 0.0000000000e+00C351 x26 7.8556754080e-70 0.0000000000e+00 0.0000000000e+00C353 x24 y2 3.9996051710e-68 0.0000000000e+00 0.0000000000e+00C355 x22 y4 5.5653675279e-67 0.0000000000e+00 0.0000000000e+00C357 x20 y6 6.5717742604e-66 0.0000000000e+00 0.0000000000e+00C359 x18 y8 4.9419909964e-65 0.0000000000e+00 0.0000000000e+00C361 x16 y10 1.9417811152e-64 0.0000000000e+00 0.0000000000e+00C363 x14 y12 1.5325673338e-65 0.0000000000e+00 0.0000000000e+00C365 x12 y14 -4.8990238138e-63 0.0000000000e+00 0.0000000000e+00C367 x10 y16 -3.1795036533e-62 0.0000000000e+00 0.0000000000e+00C369 x8 y18 -1.0313503272e-61 0.0000000000e+00 0.0000000000e+00C371 x6 y20 -1.8425289055e-61 0.0000000000e+00 0.0000000000e+00C373 x4 y22 -1.7080633894e-61 0.0000000000e+00 0.0000000000e+00C375 x2 y24 -7.6902662432e-62 0.0000000000e+00 0.0000000000e+00C377 y26 2.6897625673e-63 0.0000000000e+00 0.0000000000e+00Table 3a for Fig. 7Coefficient Formula M04 M05 M06C2 y -2.9534119456e-04 -3.8857999176e-04 -2.9282602121e-03C7 x2 y -9.0599785255e-08 -1.2871101984e-09 -1.4769778439e-07C9 y3 -1.4042273278e-08 1.0264792387e-07 1.1008481774e-07C10 x4 -4.4184351095e-11 -4.3658352020e-11 2.0206049336e-11C12 x2 y2 -1.2137210395e-11 1.6287922044e-10 -1.5844980531e-10C14 y4 -8.2725342585e-11 -1.7486286109e-10 1.5973179751e-10C16 x4 y -2.5174978730e-14 9.4788286118e-14 -4.9499160802e-14C18 x2 y3 -2.0596601911e-13 -7.0338342092e-13 -9.0643785983e-13C20 y5 -1.0139411511e-13 5.1385130329e-14 1.0133815773e-14C21 x6 -4.1575789169e-17 1.4220999425e-17 8.2233419176e-18C23 x4 y2 -2.4170270984e-16 -8.8168649745e-16 1.5506544195e-16C25 x2 y4 -3.9936271705e-16 -3.2398629382e-16 -3.2885912245e-16C27 y6 8.9053536245e-17 -1.4757302547e-15 2.0280127672e-14C29 x6 y -1.2524695953e-19 -4.3308422263e-19 -4.9895259411e-20C31 x4 y3 -8.1955185357e-19 -1.2905250581e-18 1.9025240618e-18C33 x2 y5 1.1720210823e-19 -4.9369344803e-18 -2.1237184931e-17C35 y7 5.8296067863e-19 -7.2550189907e-18 5.5115389725e-17C36 x8 -8.0450629138e-23 -1.3038942571e-22 4.4226786733e-23C38 x6 y2 -8.8507643760e-22 -2.2081866484e-21 5.5216029445e-22C40 x4 y4 -4.5010099980e-22 -1.8891988109e-20 1.1171961305e-20C42 x2 y6 1.7719840628e-21 -7.8498208610e-20 -2.9689365790e-19C44 y8 2.6285817625e-22 -5.7912969972e-19 -2.6454293354e-18C46 x8 y -1.2532662119e-25 -1.2993626791e-24 5.5279899104e-26C48 x6 y3 -4.0606190914e-25 -1.8233663644e-23 -1.5280429007e-24C50 x4 y5 3.6040841126e-24 -2.5781494230e-22 1.5488227673e-22C52 x2 y7 2.5377311330e-24 -3.1407500412e-21 7.0047896023e-21C54 y9 -3.0106765136e-24 -4.0230985473e-21 -7.9955008624e-20C55 x10 2.6169542295e-28 1.2271473759e-28 -2.5307031440e-28C57 x8 y2 3.9889688325e-28 -1.2947134411e-27 -1.8403445725e-27C59 x6 y4 6.4549050450e-27 2.7533557560e-26 -5.6314283110e-26C61 x4 y6 1.0842537957e-26 -3.7419511053e-24 -1.1017805116e-24C63 x2 y8 -4.0327201058e-27 -1.8757086717e-23 7.8491804913e-23C65 y10 -5.8901796476e-27 6.9390429166e-23 1.6437439713e-21C67 x10 y -3.1869737023e-30 -3.8537944556e-31 -3.9771525687e-30C69 x8 y3 -4.6396951402e-30 2.5506026285e-28 -1.4212954411e-29C71 x6 y5 -4.8822772361e-30 2.4319884245e-27 3.1069703802e-29C73 x4 y7 -3.6036490720e-30 2.3847465410e-26 -9.8646201430e-26C75 x2 y9 -2.4803614737e-29 3.0302253203e-25 -3.6435965700e-24C77 y11 3.6117924080e-30 9.7898534343e-25 2.5924976825e-23C78 x12 -4.3727349750e-34 -4.4697093549e-33 1.5381438742e-33C80 x10 y2 -1.9432492387e-32 1.1842712459e-31 -1.7256983880e-32C82 x8 y4 -8.7759185864e-32 2.5633022647e-30 -1.3352869498e-32C84 x6 y6 -3.7746815309e-32 9.1608299721e-29 3.6463323710e-29C86 x4 y8 -8.8873419493e-32 9.9393881360e-28 1.0862663590e-27C88 x2 y10 -4.8808568388e-32 5.3268427786e-27 2.6895665468e-27C90 y12 2.0644750917e-32 6.2970994427e-28 -5.9721066834e-25C92 x12 y 8.5740181205e-36 3.1242298042e-35 3.0786859825e-35C94 x10 y3 -5.1463157199e-35 -3.2909907400e-34 1.2018101966e-34C96 x8 y5 1.0176958331e-34 4.7116126193e-32 -1.0818011170e-32C98 x6 y7 1.3935288192e-34 1.0547347637e-30 7.1729744748e-32C100 x4 y9 -1.6448906509e-34 1.1743459521e-29 3.5679627955e-29C102 x2 y11 -2.1799522429e-35 2.7074190575e-29 7.3311920963e-28C104 y13 4.9783505943e-36 -5.1715969793e-29 -3.4749135650e-27C105 x14 -7.3168410771e-39 2.9161470131e-38 -4.6875639474e-39C107 x12 y2 6.9456101613e-38 -5.7522855855e-37 1.4828452993e-37C109 x10 y4 7.8226614225e-37 6.4451690793e-36 2.7169529652e-36C111 x8 y6 1.4079901241e-36 1.1525201575e-34 -1.6840361738e-34C113 x6 y8 4.5043347038e-37 9.2122669456e-33 -1.3921260243e-32C115 x4 y10 1.5134275109e-37 5.8469317028e-32 -4.1792778162e-31C117 x2 y12 1.0537079640e-37 2.8927027717e-32 -4.1406360464e-30C119 y14 -5.4841414940e-38 -3.6472165563e-31 1.1274137340e-28C121 x14 y -1.8366881863e-41 -1.3495584392e-40 -1.2199011707e-40C123 x12 y3 6.7303135729e-40 2.1463906420e-39 -1.2013682017e-39C125 x10 y5 2.2181596629e-39 -1.8631410820e-37 6.7727369760e-38C127 x8 y7 9.7654202746e-40 9.3869618915e-37 2.4166590641e-36C129 x6 y9 -8.2224093046e-40 4.0531674680e-35 -2.6049810925e-35C131 x4 y11 3.9400129995e-40 9.8567944975e-35 -4.7760004167e-33C133 x2 y13 1.7314406081e-40 -1.0817676429e-34 -6.1166356923e-32C135 y15 -9.8360613364e-41 -1.0791670203e-33 1.0017261654e-31C136 x16 3.4230456263e-44 -1.0087157115e-43 5.3499827857e-45C138 x14 y2 -3.4420564501e-44 1.8106167311e-42 -4.4931448058e-43C140 x12 y4 -6.2206132608e-43 -8.5424738277e-41 -1.4797312597e-41C142 x10 y6 -3.5300245156e-42 -9.8819770922e-40 2.1472529247e-40C144 x8 y8 -8.7486124987e-42 5.7509371652e-39 4.4767844007e-38C146 x6 y10 -6.0191344027e-42 3.9470119201e-38 2.4316644896e-36C148 x4 y12 -1.7835752408e-42 -4.0815099597e-38 7.3205011190e-35C150 x2 y14 -3.4533499445e-43 -3.2498035119e-39 5.9505364835e-34C152 y16 -5.2477880650e-44 -9.8778103528e-37 -1.1376873494e-32C154 x16 y 2.5854732016e-47 1.7789123091e-46 2.4136345640e-46C156 x14 y3 -1.4363880423e-45 -1.4208448756e-44 5.2982627049e-45C158 x12 y5 -8.7170532473e-45 -5.1458991402e-43 -1.3537449432e-43C160 x10 y7 -2.2807958911e-44 4.4731428671e-43 -9.8547604739e-42C162 x8 y9 -2.2529588051e-44 -1.6262025442e-41 -3.2446275174e-40C164 x6 y11 -1.2533542774e-44 -1.5007306610e-40 -3.3456703393e-39C166 x4 y13 -6.4945111547e-45 9.3512738737e-41 1.0621200418e-37C168 x2 y15 -1.4934732070e-45 8.8769527828e-40 8.0585906120e-37C170 y17 1.3685265004e-46 3.6975124273e-39 2.6818436119e-35C171 x18 -4.7956025239e-50 1.6993895976e-49 -4.9378979474e-52C173 x16 y2 -1.1226737713e-49 -1.7352001098e-48 4.9842776830e-49C175 x14 y4 -2.8779600416e-48 -1.2228073252e-46 2.4453586970e-47C177 x12 y6 -1.9777399028e-47 4.9311738611e-47 2.6469500732e-46C179 x10 y8 -3.1648314989e-47 -1.4726159369e-45 -5.0330868411e-44C181 x8 y10 -2.0833066494e-47 -9.5162577513e-44 -3.3882684302e-42C183 x6 y12 -1.2569292619e-47 -3.2517651591e-43 -1.7428473609e-40C185 x4 y14 -8.0204318231e-48 1.4732622594e-42 -4.6704854208e-39C187 x2 y16 -1.8153272054e-48 -3.4034332044e-43 -2.3205877159e-38C189 y18 3.1497128109e-49 1.4959601226e-41 4.8271885133e-37C191 x18 y -5.2860356641e-53 8.6337296326e-52 -1.8710685365e-52C193 x16 y3 5.0115730375e-52 -2.5994019541e-50 -7.8805138899e-51C195 x14 y5 -3.2619218112e-51 1.3748043773e-49 2.3653326099e-50C197 x12 y7 -1.3427000480e-50 -1.2163506453e-48 1.0393205209e-47C199 x10 y9 -1.3319802084e-50 5.1725934702e-48 6.7283024724e-46C201 x8 y11 -7.0677970395e-51 -1.7679141888e-46 2.3929661997e-44C203 x6 y13 -5.1876238023e-51 2.4900269083e-46 8.3181351362e-43C205 x4 y15 -3.6362306070e-51 8.9826502979e-46 1.6459409628e-41C207 x2 y17 -7.4443472634e-52 -1.6118314438e-45 6.3124149738e-41C209 y19 1.9422227272e-52 1.6585611737e-44 -2.2634333365e-39Table 3b for Fig. 7Coefficient Formula M07 M08 M09C2 y 2.4701302740e-02 2.6953397215e-01 5.7893744866e-02C7 x2 y -6.2642768447e-08 -6.7143054673e-07 3.4831550564e-08C9 y3 1.5714983903e-08 3.6212612160e-06 4.5572076693e-08C10 x4 3.5374517758e-11 6.9774529896e-10 -2.1526344394e-11C12 x2 y2 -4.2970525427e-11 1.6680628750e-10 -4.5275581774e-11C14 y4 -2.7420907311e-11 1.8029946489e-08 -3.6235996484e-11C16 x4 y -9.3925365240e-14 8.9057842165e-13 3.1998327334e-14C18 x2 y3 7.0955802173e-15 -4.4566371528e-12 8.0376065687e-14C20 y5 8.5342978489e-14 1.1546341390e-10 4.7034395516e-14C21 x6 2.0663617922e-16 6.8885393097e-16 -3.4136951047e-17C23 x4 y2 5.2959818755e-17 1.4415984924e-14 -9.7670432261e-17C25 x2 y4 -3.8255483138e-16 1.3480254192e-14 -1.3183384171e-16C27 y6 -3.7470014765e-16 1.1204689658e-12 -4.4894408520e-17C29 x6 y 3.1014750668e-19 -5.5201818884e-18 3.8206710241e-20C31 x4 y3 1.1812099017e-18 7.9968963171e-17 1.3263451267e-19C33 x2 y5 3.1764146119e-18 -3.9316666391e-16 1.4727249617e-19C35 y7 1.4838498221e-18 9.5444954567e-15 1.0633641339e-19C36 x8 -6.2607848769e-22 8.7358619957e-21 -3.9953848754e-23C38 x6 y2 -3.0589173229e-21 -5.8287095706e-20 -1.6195378011e-22C40 x4 y4 -1.4540989337e-20 8.6492251947e-19 -3.1529370416e-22C42 x2 y6 -1.3308570527e-20 -2.3032401984e-18 -2.1916647469e-22C44 y8 -3.6424405565e-21 4.2418110358e-17 -2.0241430934e-23C46 x8 y 3.2765070846e-24 6.5846655150e-23 2.6825680750e-26C48 x6 y3 3.2776888043e-23 -1.3164959476e-21 2.1145250437e-25C50 x4 y5 3.4584952849e-23 -2.4686006016e-21 3.6508169295e-25C52 x2 y7 1.8951155370e-23 8.4828648644e-20 4.0705992477e-25C54 y9 1.5401726557e-24 -6.0530709881e-20 -1.3091646793e-25C55 x10 8.0772987118e-27 -1.1087937124e-25 -6.4645624383e-29C57 x8 y2 -3.1369671084e-26 2.3321840121e-24 -3.2074959371e-28C59 x6 y4 5.7214191654e-26 -4.0522629033e-24 -8.7161971599e-28C61 x4 y6 8.6307540244e-26 -1.9123564758e-22 -7.8692791804e-28C63 x2 y8 9.3046029078e-26 1.4457804765e-21 -3.5725274581e-28C65 y10 2.1389482489e-26 -1.8732928620e-21 -3.2064411305e-28C67 x10 y 2.9853375770e-29 -7.1606798176e-28 1.0416816482e-31C69 x8 y3 -4.3218530354e-28 3.4608097529e-26 -1.3161784716e-31C71 x6 y5 -4.6530965469e-28 3.4457114928e-25 -3.4508825473e-31C73 x4 y7 -6.0415943015e-28 -1.3698557145e-24 -2.0389588631e-31 C152 y16 -8.6772611100e-42 -6.6090965842e-36 -2.2106728339e-44C154 x16 y -6.6880534579e-44 -8.4041975174e-42 1.4715045471e-47C156 x14 y3 -8.7347825417e-43 -3.3493398300e-41 1.6173262421e-46C158 x12 y5 1.9327102901e-42 9.9300873961e-40 7.0552049958e-46C160 x10 y7 6.6868802624e-42 -4.2142548335e-39 1.8085770083e-45C162 x8 y9 6.9169106330e-42 1.5006506939e-38 2.7731226373e-45C164 x6 y11 3.2930712794e-42 1.2388999930e-39 2.4636353757e-45C166 x4 y13 8.5228307154e-43 7.4710835771e-38 1.1741769364e-45C168 x2 y15 9.1918718612e-44 -2.8734149634e-38 2.2623705684e-46C170 y17 7.2845120681e-45 -5.1973967229e-38 -1.5713623105e-47C171 x18 7.0528391746e-47 -4.0549727735e-45 -2.3790142727e-50C173 x16 y2 -7.5237890409e-46 2.6306548301e-43 -2.3412647922e-49C175 x14 y4 -8.8140417711e-45 2.3997510166e-42 -1.1876921895e-48C177 x12 y6 -1.8014844033e-44 2.8991830598e-41 -3.2135270791e-48C179 x10 y8 -1.9132185426e-44 9.8067952361e-41 -5.1688981634e-48C181 x8 y10 -1.2799622406e-44 1.3113087496e-40 -4.8884768714e-48C183 x6 y12 -4.4910856611e-45 -2.0482930115e-40 -2.4579268661e-48C185 x4 y14 -9.4577712964e-46 4.3235819757e-40 -3.1124129310e-49C187 x2 y16 -8.0552439624e-47 -1.2030185168e-40 3.2488011732e-49C189 y18 -3.8408681882e-48 -1.2441106435e-40 8.8139291671e-50C191 x18 y -1.0155848241e-50 1.4804381506e-46 -4.2423646452e-53C193 x16 y3 6.3208307104e-48 1.1421612798e-45 -4.8870060799e-52C195 x14 y5 1.6948322707e-47 -6.7418182427e-45 -2.3957483807e-51C197 x12 y7 1.8312559066e-47 1.4417863084e-43 -7.0795185332e-51C199 x10 y9 1.3580582074e-47 1.1579996941e-42 -1.3458723604e-50C201 x8 y11 7.7546041734e-48 6.7926638690e-43 -1.6017904274e-50C203 x6 y13 2.1668169077e-48 -1.3415405095e-42 -1.1543199930e-50C205 x4 y15 4.1076538918e-49 5.8539532574e-43 -4.7721824051e-51C207 x2 y17 3.1334182235e-50 -8.8539752673e-43 -8.8643675658e-52C209 y19 9.5811188824e-52 2.2871762688e-43 -7.3571560559e-54C210 x20 0.0000000000e+00 1.1437711607e-50 5.8956670172e-56C212 x18 y2 0.0000000000e+00 -2.5420043913e-48 6.5044023030e-55C214 x16 y4 0.0000000000e+00 -3.2425836639e-47 3.6298403210e-54C216 x14 y6 0.0000000000e+00 -3.3376451877e-46 1.1390850544e-53C218 x12 y8 0.0000000000e+00 -1.3338845167e-45 2.2470181761e-53C220 x10 y10 0.0000000000e+00 3.0875725619e-45 2.8594779967e-53C222 x8 y12 0.0000000000e+00 -3.0927123498e-45 2.2660648943e-53C224 x6 y14 0.0000000000e+00 6.7062299171e-46 1.0235683518e-53C226 x4 y16 0.0000000000e+00 4.6694596439e-45 1.6130568071e-54C228 x2 y18 0.0000000000e+00 -2.1394733829e-45 -7.1723369176e-55C230 y20 0.0000000000e+00 1.9893725576e-45 -2.0966844836e-55C232 x20 y 0.0000000000e+00 -1.6875910524e-51 7.5276373088e-59C234 x18 y3 0.0000000000e+00 -2.3639966377e-50 9.4896528527e-58C236 x16 y5 0.0000000000e+00 -7.1364819483e-50 5.1899785123e-57C238 x14 y7 0.0000000000e+00 -2.3619284158e-48 1.7266458720e-56C240 x12 y9 0.0000000000e+00 -2.0852557681e-47 3.8276809408e-56C242 x10 y11 0.0000000000e+00 -5.0788148791e-48 5.7193932228e-56C244 x8 y13 0.0000000000e+00 -3.5369667819e-47 5.5431792503e-56C246 x6 y15 0.0000000000e+00 -8.4872090884e-49 3.4012248262e-56C248 x4 y17 0.0000000000e+00 1.6753978277e-47 1.2646787257e-56C250 x2 y19 0.0000000000e+00 8.7119719776e-49 2.3341370446e-57C252 y21 0.0000000000e+00 3.9097779365e-48 1.1307265769e-58C253 x22 0.0000000000e+00 9.7765793007e-58 -9.5285398887e-62C255 x20 y2 0.0000000000e+00 1.2037403610e-53 -1.1665808146e-60C257 x18 y4 0.0000000000e+00 2.2031013312e-52 -7.1323573016e-60C259 x16 y6 0.0000000000e+00 1.5920149454e-51 -2.5417934061e-59C261 x14 y8 0.0000000000e+00 -4.7734885741e-51 -5.8819472033e-59C263 x12 y10 0.0000000000e+00 -9.7231087156e-50 -9.2892211570e-59C265 x10 y12 0.0000000000e+00 4.5586879327e-50 -9.9664885055e-59C267 x8 y14 0.0000000000e+00 -2.5902675069e-50 -6.9818626088e-59C269 x6 y16 0.0000000000e+00 -1.7600454490e-49 -3.0020435786e-59C271 x4 y18 0.0000000000e+00 -1.0903432360e-49 -6.0907935433e-60C273 x2 y20 0.0000000000e+00 -1.3731453507e-51 5.4592451499e-61C275 y22 0.0000000000e+00 2.7292950391e-51 2.6567681579e-61C277 x22 y 0.0000000000e+00 1.0913284181e-56 -7.6839847671e-65C279 x20 y3 0.0000000000e+00 2.2841324819e-55 -1.0683333924e-63C281 x18 y5 0.0000000000e+00 1.3050291709e-54 -6.4451701957e-63C283 x16 y7 0.0000000000e+00 1.0844881531e-53 -2.3792211660e-62C285 x14 y9 0.0000000000e+00 5.9847690597e-53 -5.9633238131e-62C287 x12 y11 0.0000000000e+00 -9.6809747862e-53 -1.0521039004e-61C289 x10 y13 0.0000000000e+00 5.6157678001e-52 -1.2845139635e-61C291 x8 y15 0.0000000000e+00 5.0065329214e-52 -1.0527133043e-61C293 x6 y17 0.0000000000e+00 -4.0768222077e-52 -5.6853188416e-62C295 x4 y19 0.0000000000e+00 -3.7347489288e-52 -1.9405307246e-62C297 x2 y21 0.0000000000e+00 -4.9272356326e-53 -3.5346331852e-63C299 y23 0.0000000000e+00 1.5932048348e-54 -2.3509954770e-64C300 x24 0.0000000000e+00 1.5449216673e-61 9.0040141893e-68C302 x22 y2 0.0000000000e+00 4.9179830919e-60 1.2151533724e-66C304 x20 y4 0.0000000000e+00 -3.7086497492e-58 8.0974508054e-66C306 x18 y6 0.0000000000e+00 -2.5134127766e-57 3.2239557449e-65C308 x16 y8 0.0000000000e+00 6.2927244653e-56 8.5164888506e-65C310 x14 y10 0.0000000000e+00 5.6839753442e-55 1.5851561282e-64C312 x12 y12 0.0000000000e+00 4.4924591104e-55 2.1168138841e-64C314 x10 y14 0.0000000000e+00 5.9621928581e-55 1.9845581185e-64C316 x8 y16 0.0000000000e+00 1.1622587417e-54 1.2655178501e-64C318 x6 y18 0.0000000000e+00 2.7019547671e-54 5.2632360799e-65C320 x4 y20 0.0000000000e+00 1.8643111642e-54 1.2294585770e-65C322 x2 y22 0.0000000000e+00 -1.1722738022e-56 6.6017433743e-67C324 y24 0.0000000000e+00 -1.1883264316e-56 -1.2827070116e-67C326 x24 y 0.0000000000e+00 -3.0110885554e-62 3.6457833139e-71C328 x22 y3 0.0000000000e+00 -8.6475037785e-61 5.5575844305e-70C330 x20 y5 0.0000000000e+00 -6.7703223283e-60 3.6617071445e-69C332 x18 y7 0.0000000000e+00 -7.1441787908e-60 1.4844983377e-68C334 x16 y9 0.0000000000e+00 3.0105505148e-58 4.1109283990e-68C336 x14 y11 0.0000000000e+00 1.8728802069e-57 8.2848268423e-68C338 x12 y13 0.0000000000e+00 6.1547358791e-58 1.1997629028e-67C340 x10 y15 0.0000000000e+00 -5.0818891408e-57 1.2356918578e-67C342 x8 y17 0.0000000000e+00 -1.5087485960e-57 8.8310347653e-68C344 x6 y19 0.0000000000e+00 1.2815347387e-56 4.3103766925e-68C346 x4 y21 0.0000000000e+00 9.4623738998e-57 1.3742071414e-68C348 x2 y23 0.0000000000e+00 3.8601823085e-58 2.4704510722e-69C350 y25 0.0000000000e+00 -5.3789846246e-59 1.8612299329e-70C351 x26 0.0000000000e+00 -1.3063422408e-66 -3.9289769091e-74C353 x24 y2 0.0000000000e+00 -1.9878591206e-64 -5.8222810874e-73C355 x22 y4 0.0000000000e+00 -2.5871931138e-63 -4.2105529490e-72C357 x20 y6 0.0000000000e+00 -9.4080711163e-63 -1.8496623898e-71C359 x18 y8 0.0000000000e+00 3.0814315884e-62 -5.4846819873e-71C361 x16 y10 0.0000000000e+00 5.4175675967e-61 -1.1671424890e-70C363 x14 y12 0.0000000000e+00 2.1361557291e-60 -1.8465183243e-70C365 x12 y14 0.0000000000e+00 -1.1236953007e-60 -2.1488859106e-70C367 x10 y16 0.0000000000e+00 -1.1161040854e-59 -1.8071564461e-70C369 x8 y18 0.0000000000e+00 -5.0571710485e-60 -1.0726218266e-70C371 x6 y20 0.0000000000e+00 1.5213748460e-59 -4.3606995886e-71C373 x4 y22 0.0000000000e+00 1.1070302982e-59 -1.1058638363e-71C375 x2 y24 0.0000000000e+00 5.3439478970e-61 -1.3249665254e-72C377 y26 0.0000000000e+00 -4.7094334674e-62 -4.3041079635e-74Table 3c for Fig. 7Coordinates of the stop edge xi [mm] yi [mm] xi+N / 2 [mm] yi+N / 2 [mm]-389.831242 23.813786 389.863249 8.261325-389.445903 31.597566 389.508841 0.509323-388.815364 39.374882 388.907127 -7.215854-387.940582 47.136917 388.058133 -14.906571-386.822630 54.874791 386.962136 -22.555507-385.462675 62.579664 385.619678 -30.155663-383.861953 70.242855 384.031572 -37.700380-382.021756 77.855948 382.198905 -45.183350-379.943432 85.410912 380.123037 -52.598623-377.628377 92.900182 377.805598 -59.940620-375.078054100.316727 375.248484 -67.204124-372.293996107.654081 372.453841 -74.384275-369.277831114.906349 369.424057 -81.476551-366.031293122.068181 366.161744 -88.476742-362.556246129.134735 362.669720 -95.380924-358.854699136.101627 358.950997 -102.185425-354.928829142.964883 355.008760 -108.886796-350.781001149.720890 350.846361 -115.481791-346.413794156.366364 346.467305 -121.967344-341.830024162.898320 341.875250 -128.340556-337.032773169.314052 337.074000 -134.598682-332.025404175.611115 332.067508 -140.739135-326.811585181.787313 326.859875 -146.759471-321.395294187.840676 321.455354 -152.657395-315.780823193.769444 315.858345 -158.430754-309.972763199.572038 310.073393 -164.077534-303.975990205.247042 304.105181 -169.595853-297.795636210.793167 297.958522 -174.983953-291.437060216.209231 291.638340 -180.240189-284.905810221.494131 285.149661 -185.363021-278.207589226.646820 278.497588 -190.351003-271.348223231.666286 271.687283 -195.202768-264.333623236.551535 264.723947 -199.917021-257.169757241.301573 257.612798 -204.492528-249.862617245.915391 250.359052 -208.928109-242.418196250.391953 242.967904 -213.222631-234.842465254.730187 235.444514 -217.375002-227.141344258.928973 227.793996 -221.384174-219.320692262.987138 220.021406 -225.249137-211.386286266.903452 212.131741 -228.968922-203.343810270.676627 204.129934 -232.542606-195.198845274.305317 196.020858 -235.969310-186.956863277.788119 187.809331 -239.248208-178.623219281.123578 179.500120 -242.378528-170.203153284.310194 171.097952 -245.359553-161.701783287.346429 162.607523 -248.190627-153.124108290.230710 154.033506 -250.871154-144.475012292.961445 145.380561 -253.400600-135.759265295.537030 136.653340 -255.778490-126.981528297.955858 127.856493 -258.004405-118.146359300.216332 118.994677 -260.077981-109.258223302.316879 110.072551 -261.998906-100.321499304.255961 101.094779 -263.766913-91.340483306.032091 92.066032 -265.381773-82.319407307.643845 82.990982 -266.843299-73.262436309.089881 73.874299 -268.151332-64.173683310.368951 64.720651 -269.305741-55.057216311.479916 55.534695 -270.306420-45.917062312.421759 46.321082 -271.153280-36.757215313.193599 37.084447 -271.846254-27.581644313.794700 27.829414 -272.385287-18.394297314.224479 18.560595 -272.770339-9.199108314.482516 9.282593 -273.0013800.000000314.568556 0.000000 -273.0783969.199108314.482516 -9.282593 -273.00138018.394297314.224479 -18.560595 -272.77033927.581644313.794700 -27.829414 -272.38528736.757215313.193599 -37.084447 -271.84625445.917062312.421759 -46.321082 -271.15328055.057216311.479916 -55.534695 -270.30642064.173683310.368951 -64.720651 -269.30574173.262436309.089881 -73.874299 -268.15133282.319407307.643845 -82.990982 -266.84329991.340483306.032091 -92.066032 -265.381773100.321499304.255961 -101.094779 -263.766913109.258223302.316879 -110.072551 -261.998906118.146359300.216332 -118.994677 -260.077981126.981528297.955858 -127.856493 -258.004405135.759265295.537030 -136.653340 -255.778490144.475012292.961445 -145.380561 -253.400600153.124108290.230710 -154.033506 -250.871154161.701783287.346429 -162.607523 -248.190627170.203153284.310194 -171.097952 -245.359553178.623219281.123578 -179.500120 -242.378528186.956863277.788119 -187.809331 -239.248208195.198845274.305317 -196.020858 -235.969310203.343810270.676627 -204.129934 -232.542606211.386286266.903452 -212.131741 -228.968922219.320692262.987138 -220.021406 -225.249137421981831933445152641654215403003714357Table 4 for Fig. 7 Numerical aperture = 0.80 1 / βx= -4.20 1 / βy= -8.00Track length = 2294 mmObject-image shift = 3078 mmWidth of the installation space = 3801 mmOptically used overall mirror area = 3.74 m²Linear pupil obscuration = 17.7% Minimum angle on grazing incident mirror = 67.4°Scan slot length on the wafer = 0.9 mmScan-integrated wavefront RMS = 10.46 mλTransmission = 6.40%Étendue = 47.0 mm²Mirror with maximum diameter = M9Maximum optical mirror diameter = 1340 mmMirror with maximum area = M9 Table 5 for Fig. 7Fig.8 shows a further embodiment of a projection optical unit or imaging optical unit 29, which can be used in the projection exposure apparatus 1 instead of the projection optical unit 10. Com- ponents and functions corresponding to those which have already been explained above with ref-erence to Figures 1 to 7 bear the same reference signs and will not be discussed in detail again.In terms of its basic structure, especially as regards the sequence of NI and GI mirrors, the pro- jection optical unit 29 corresponds to the projection optical units 24 to 26 according to Figures 3 to 5.The projection optical unit 29 has an overall mirror area of 2.77 m2.The diameter of the last mirror M9 situated in the imaging beam path and determining the im-age-side numerical aperture is 1146 mm. Only two other mirrors of the projection optical unit 29have a diameter of greater than 1000 mm, namely the mirrors M4 and M5.The projection optical unit 29 has an object-image shift of 3600 mm. A y-extent of an installa-tion space of the projection optical unit 29 is 4200 mm.On all GI mirrors M2 to M7, the angles of incidence of the individual rays of the imaging light 16 are greater than 70°. The optical design data for the projection optical unit 29 emerge from following Tables 1 to 5, which, in turn, correspond in terms of the basic structure to Tables 1 to 5 relating to the embodi- ment according to Figure 7. Radii of the surfaces Radiusx [mm] Powerx [1 / mm] Radiusy [mm] Powery [1 / mm]M01 -4018.93718160 0.00048759 -1483.14951034 0.00132125M02 4392.36391162 -0.00045534 1908.21678507 -0.00104810M03 9349.33638963 -0.00021329 -4068.64378630 0.00049012M04 -2070.48775843 0.00096596 -4573.28568756 0.00043732M05 -1261.77429648 0.00029291 -2914.54382730 0.00012681M06 -1155.11088823 0.00039443 2412.89280351 -0.00018883M07 -4464.82758393 0.00010402 -16139.20544391 0.00002878M08 6657.52101562 -0.00007720 322.16705959 -0.00159534M09 -822.10422715 0.00243278 -703.27115037 0.00284385Table 1 for Fig. 8Decentring (location, angle) the surfaces Dx [mm] Dy [mm] Dz [mm]Reticle 0.000000000 0.000000000 0.000000000M01 0.000000000 -210.9361171941927.930586909M02 0.000000000 -421.6058723351022.518166353M03 0.000000000 -745.673214010 673.798191117M04 0.000000000 -1672.598187409 309.653366139M05 0.000000000 -2984.337922753 338.668612351M06 0.000000000 -3182.494801988 443.691728685M07 0.000000000 -3499.530534171 886.114402300M08 0.000000000 -3825.9730948472179.871997638Stop 0.000000000 -3807.0746366062134.970969879M09 0.000000000 -3601.2120739051645.860137428Wafer 0.000000000 -3601.2120728082299.941072097 Reticle 0.000000000 0.000000000 0.000000000M01 -3.427244059 0.000000000 0.000000000M02 242.000051760 0.000000000 -0.000000000M03 214.273015689 -0.000000000 -0.000000000M04 190.090175327 -0.000000000 -0.000000000M05 165.404630026 -0.000000000 -0.000000000M06 138.850713955 -0.000000000 -0.000000000M07 114.893180710 -0.000000000 -0.000000000M08 18.493579701 0.000000000 -0.000000000Stop 178.392357391 -0.000000000 -0.000000000M09 191.412904408 -0.000000000 0.000000000Wafer -0.000000096 0.000000000180.000000000Table 2 for Fig. 8Free-form coefficients of the surfacesCoefficient Formula M01 M02 M03C2 y -4.5154134727e-04 -2.3469483077e-03 -2.0517212509e-04C7 x2 y 1.3799774994e-08 -8.6646855164e-08 -1.2670029300e-07C9 y3 -2.7053994266e-08 2.3051319318e-07 2.6085601027e-08C10 x4 3.4864210899e-12 1.1895711425e-10 -1.2916232569e-10C12 x2 y2 4.7883241701e-11 -2.5356593270e-10 -3.5381053438e-11C14 y4 -6.7915028103e-11 6.7159835354e-10 -7.0549970600e-11C16 x4 y 6.9115599495e-14 7.9344223191e-14 -1.3002988682e-13C18 x2 y3 1.3046201408e-13 -2.6814135759e-13 -3.3344176195e-14C20 y5 -8.5742004487e-14 2.5393652799e-12 1.5047796689e-13C21 x6 1.8132824966e-17 1.0326578231e-16 -1.6088728412e-18 C57 x8 y2 4.4418062811e-26 1.8709899561e-26 -1.8371917108e-27C59 x6 y4 5.8685515301e-25 6.2900830010e-25 -5.5260010670e-26C61 x4 y6 4.0428534022e-24 2.3053720330e-24 -2.2995862268e-25C63 x2 y8 7.2544337327e-24 5.1001001105e-24 -2.2396073762e-25C65 y10 -1.8627915935e-24 -3.7869777421e-24 4.1664402724e-26C67 x10 y 1.8773818200e-30 1.7391154527e-28 2.5785302743e-29C69 x8 y3 2.3664739984e-29 1.6386264310e-27 -2.1916350994e-29C71 x6 y5 -8.8120761885e-27 7.5752956568e-27 -1.5087100647e-28C73 x4 y7 -4.8679785197e-26 1.4908714782e-26 1.5873753241e-28C75 x2 y9 -2.9171839688e-26 -1.8435472857e-27 4.6788110125e-28C77 y11 -9.2475208576e-26 9.8273816659e-26 -6.3578099177e-28C78 x12 -1.2372291850e-32 -8.2359337452e-33 1.8651475329e-31C80 x10 y2 -1.1349741084e-30 -4.8976301122e-31 5.5536573728e-33C82 x8 y4 -1.7258577477e-29 -1.1150322577e-29 -1.1029859146e-31C84 x6 y6 -1.2661568381e-28 -8.4521337470e-29 4.5103399103e-30C86 x4 y8 -7.5034565698e-28 -2.3831680101e-28 1.5366592509e-29C88 x2 y10 -1.0340844133e-27 -4.7622094845e-28 1.2284358322e-29C90 y12 -2.0711994021e-28 1.2805534825e-27 -4.7087349456e-30C92 x12 y 1.5687591768e-34 -1.7721008970e-33 -3.1014481427e-34C94 x10 y3 -6.2373594174e-33 -2.8027312327e-32 -6.2423527903e-34C96 x8 y5 1.5483516540e-31 -1.3893530503e-31 4.0249104721e-33C98 x6 y7 2.3523600236e-30 -3.9341975697e-31 2.1517518330e-32C100 x4 y9 5.7277253825e-30 -3.1159814075e-31 3.0668422509e-32C102 x2 y11 -4.7309825709e-31 1.5725925616e-31 1.9527201823e-33C104 y13 5.3190075400e-30 -1.8840450731e-30 4.0082910652e-32C105 x14 1.9999736498e-37 3.6612781106e-37 -1.2852734940e-36C107 x12 y2 1.8625065766e-35 1.0150131665e-35 -8.8679050045e-37C109 x10 y4 4.0937009939e-34 1.4189577916e-34 6.5452261837e-36C111 x8 y6 2.1871934343e-33 1.2770851818e-33 -3.8293179886e-36C113 x6 y8 1.8064545086e-32 5.8308887473e-33 -1.9671024643e-34C115 x4 y10 8.9040089711e-32 1.3483783948e-32 -4.8047721636e-34C117 x2 y12 9.5163646874e-32 1.7148071746e-32 -2.7453578580e-34C119 y14 3.9968719391e-32 -9.1474038555e-32 2.3947395233e-34C121 x14 y -5.9197200312e-39 1.1915406151e-38 2.0056509685e-39C123 x12 y3 1.3429656686e-37 2.6144742161e-37 9.3549274564e-39C125 x10 y5 -7.9705609220e-37 1.6688850966e-36 1.2119934597e-38C127 x8 y7 -4.7566543099e-35 5.3133977993e-36 -2.8202153147e-37C129 x6 y9 -2.9555134258e-34 9.8942588241e-36 -1.1419136156e-36C131 x4 y11 -3.4115619053e-34 -5.8041940576e-37 -1.5920991332e-36C133 x2 y13 3.0043864473e-34 -5.9654071052e-35 -3.1450336120e-37C135 y15 -1.4518077739e-34 -2.0060330152e-34 -1.5542664154e-36C136 x16 -2.2669872640e-42 -3.7050190697e-42 5.8190714164e-42C138 x14 y2 -1.7604699425e-40 -9.6139015944e-41 9.7778660978e-42C181 x8 y10 8.4635302131e-42 1.7451010915e-42 5.5989178952e-45C183 x6 y12 1.3008438782e-40 3.9956286109e-42 -1.8668593680e-45C185 x4 y14 3.4028882084e-40 7.3447358472e-42 -1.6472784172e-44C187 x2 y16 2.3236216152e-40 1.3012202770e-41 -8.3157473018e-47C189 y18 1.3342999924e-40 -2.7367735747e-41 1.3378413703e-43C191 x18 y -1.0207202058e-48 8.4749678547e-50 1.2808955905e-50C193 x16 y3 5.8077680477e-48 2.4101412238e-48 5.5795993561e-50C195 x14 y5 1.9155758700e-46 2.4251454729e-47 1.1487709689e-48C197 x12 y7 -2.0420828220e-45 1.2461833243e-46 4.4118258771e-48C199 x10 y9 -5.8801944247e-44 3.5131542076e-46 -8.8416684954e-48C201 x8 y11 -3.8379088742e-43 7.8783477627e-46 -8.7496893784e-47C203 x6 y13 -8.0725480204e-43 -1.3005265727e-46 -2.2112175396e-46C205 x4 y15 2.2777626941e-43 -1.8809431649e-44 -2.0879933535e-46 C222 x8 y12 -5.9183419941e-46 -1.5900750273e-47 -1.6800284579e-49C224 x6 y14 -5.8759436827e-45 -3.3626901490e-47 -3.1755042674e-49C226 x4 y16 -1.0895814535e-44 -9.9999102701e-47 -2.3720083394e-49C228 x2 y18 -6.0420159409e-45 -1.5463043169e-46 -2.0409526731e-50C230 y20 -3.6271336805e-45 -5.2901357673e-46 -1.0699850711e-48C232 x20 y 6.5066144727e-54 0.0000000000e+00 0.0000000000e+00C234 x18 y3 3.5883572600e-54 0.0000000000e+00 0.0000000000e+00C236 x16 y5 -1.2554272984e-51 0.0000000000e+00 0.0000000000e+00C238 x14 y7 -3.9291622735e-52 0.0000000000e+00 0.0000000000e+00C240 x12 y9 3.0920865759e-49 0.0000000000e+00 0.0000000000e+00C242 x10 y11 3.4037415320e-48 0.0000000000e+00 0.0000000000e+00C244 x8 y13 1.4036590829e-47 0.0000000000e+00 0.0000000000e+00C246 x6 y15 1.7882262548e-47 0.0000000000e+00 0.0000000000e+00C248 x4 y17 -2.0224831315e-47 0.0000000000e+00 0.0000000000e+00C250 x2 y19 -4.0657554547e-47 0.0000000000e+00 0.0000000000e+00C252 y21 -1.1993464324e-47 0.0000000000e+00 0.0000000000e+00C253 x22 3.4476847868e-58 0.0000000000e+00 0.0000000000e+00C255 x20 y2 -8.9164135874e-56 0.0000000000e+00 0.0000000000e+00C257 x18 y4 3.0095733910e-54 0.0000000000e+00 0.0000000000e+00C259 x16 y6 5.6043605073e-53 0.0000000000e+00 0.0000000000e+00C261 x14 y8 1.0577796520e-52 0.0000000000e+00 0.0000000000e+00C263 x12 y10 -1.8565828245e-51 0.0000000000e+00 0.0000000000e+00C265 x10 y12 -6.3851909502e-51 0.0000000000e+00 0.0000000000e+00C267 x8 y14 2.8646801344e-50 0.0000000000e+00 0.0000000000e+00C269 x6 y16 1.6496731045e-49 0.0000000000e+00 0.0000000000e+00C271 x4 y18 2.1651564380e-49 0.0000000000e+00 0.0000000000e+00C273 x2 y20 9.5216640304e-50 0.0000000000e+00 0.0000000000e+00C275 y22 5.9365092137e-50 0.0000000000e+00 0.0000000000e+00C277 x22 y -2.5763539154e-59 0.0000000000e+00 0.0000000000e+00C279 x20 y3 -1.5185069914e-58 0.0000000000e+00 0.0000000000e+00C281 x18 y5 3.9021323419e-57 0.0000000000e+00 0.0000000000e+00C283 x16 y7 3.8261381227e-56 0.0000000000e+00 0.0000000000e+00C285 x14 y9 -8.0340059088e-55 0.0000000000e+00 0.0000000000e+00C287 x12 y11 -1.5482417739e-53 0.0000000000e+00 0.0000000000e+00C289 x10 y13 -1.0178422530e-52 0.0000000000e+00 0.0000000000e+00C291 x8 y15 -2.8792653271e-52 0.0000000000e+00 0.0000000000e+00C293 x6 y17 -1.8724587024e-52 0.0000000000e+00 0.0000000000e+00C295 x4 y19 5.7103061156e-52 0.0000000000e+00 0.0000000000e+00C297 x2 y21 7.3740209529e-52 0.0000000000e+00 0.0000000000e+00C299 y23 2.4116787617e-52 0.0000000000e+00 0.0000000000e+00C300 x24 -7.1069443833e-64 0.0000000000e+00 0.0000000000e+00C302 x22 y2 4.9639600645e-61 0.0000000000e+00 0.0000000000e+00C304 x20 y4 -7.6110938928e-60 0.0000000000e+00 0.0000000000e+00C306 x18 y6 -2.5022667861e-58 0.0000000000e+00 0.0000000000e+00C308 x16 y8 -1.1784885084e-57 0.0000000000e+00 0.0000000000e+00C310 x14 y10 7.8314032807e-57 0.0000000000e+00 0.0000000000e+00C312 x12 y12 7.7623584646e-56 0.0000000000e+00 0.0000000000e+00C314 x10 y14 1.0658888608e-55 0.0000000000e+00 0.0000000000e+00C316 x8 y16 -7.6428928500e-55 0.0000000000e+00 0.0000000000e+00C318 x6 y18 -2.7284845949e-54 0.0000000000e+00 0.0000000000e+00C320 x4 y20 -2.4424763355e-54 0.0000000000e+00 0.0000000000e+00C322 x2 y22 -7.5066454477e-55 0.0000000000e+00 0.0000000000e+00C324 y24 -5.1246575146e-55 0.0000000000e+00 0.0000000000e+00C326 x24 y 5.8107327830e-65 0.0000000000e+00 0.0000000000e+00C328 x22 y3 6.0959498572e-64 0.0000000000e+00 0.0000000000e+00C330 x20 y5 -4.6833484115e-63 0.0000000000e+00 0.0000000000e+00C332 x18 y7 -1.2983671045e-61 0.0000000000e+00 0.0000000000e+00C334 x16 y9 7.1880048060e-61 0.0000000000e+00 0.0000000000e+00C336 x14 y11 3.4303365375e-59 0.0000000000e+00 0.0000000000e+00C338 x12 y13 3.3571591288e-58 0.0000000000e+00 0.0000000000e+00C340 x10 y15 1.5192414730e-57 0.0000000000e+00 0.0000000000e+00C342 x8 y17 3.0343985814e-57 0.0000000000e+00 0.0000000000e+00C344 x6 y19 2.1370223353e-58 0.0000000000e+00 0.0000000000e+00C346 x4 y21 -7.6464399281e-57 0.0000000000e+00 0.0000000000e+00C348 x2 y23 -7.5201061503e-57 0.0000000000e+00 0.0000000000e+00C350 y25 -2.5835841988e-57 0.0000000000e+00 0.0000000000e+00C351 x26 6.0637782145e-70 0.0000000000e+00 0.0000000000e+00C353 x24 y2 -1.3747103076e-66 0.0000000000e+00 0.0000000000e+00C355 x22 y4 7.2025340331e-66 0.0000000000e+00 0.0000000000e+00C357 x20 y6 5.9647982484e-64 0.0000000000e+00 0.0000000000e+00C359 x18 y8 4.8249154241e-63 0.0000000000e+00 0.0000000000e+00C361 x16 y10 -8.7584385526e-63 0.0000000000e+00 0.0000000000e+00C363 x14 y12 -2.8226291808e-61 0.0000000000e+00 0.0000000000e+00C365 x12 y14 -1.2305362519e-60 0.0000000000e+00 0.0000000000e+00C367 x10 y16 -3.8988486807e-61 0.0000000000e+00 0.0000000000e+00C369 x8 y18 1.0162984824e-59 0.0000000000e+00 0.0000000000e+00C371 x6 y20 2.3680206828e-59 0.0000000000e+00 0.0000000000e+00C373 x4 y22 1.2282521797e-59 0.0000000000e+00 0.0000000000e+00C375 x2 y24 6.1611410663e-61 0.0000000000e+00 0.0000000000e+00C377 y26 1.2658364107e-60 0.0000000000e+00 0.0000000000e+00C379 x26 y -5.7201009365e-71 0.0000000000e+00 0.0000000000e+00C381 x24 y3 -8.2625784483e-70 0.0000000000e+00 0.0000000000e+00C383 x22 y5 -4.5887069813e-70 0.0000000000e+00 0.0000000000e+00C385 x20 y7 1.3306419668e-67 0.0000000000e+00 0.0000000000e+00C387 x18 y9 2.9324996422e-67 0.0000000000e+00 0.0000000000e+00C389 x16 y11 -2.8385929552e-65 0.0000000000e+00 0.0000000000e+00C391 x14 y13 -4.1338207879e-64 0.0000000000e+00 0.0000000000e+00C393 x12 y15 -2.6736760792e-63 0.0000000000e+00 0.0000000000e+00C395 x10 y17 -8.9047152593e-63 0.0000000000e+00 0.0000000000e+00C397 x8 y19 -1.2351120995e-62 0.0000000000e+00 0.0000000000e+00C399 x6 y21 7.7999022257e-63 0.0000000000e+00 0.0000000000e+00C401 x4 y23 4.0860495486e-62 0.0000000000e+00 0.0000000000e+00C403 x2 y25 3.3178993608e-62 0.0000000000e+00 0.0000000000e+00C405 y27 1.1677550723e-62 0.0000000000e+00 0.0000000000e+00C406 x28 1.2453494173e-76 0.0000000000e+00 0.0000000000e+00C408 x26 y2 1.5609993322e-72 0.0000000000e+00 0.0000000000e+00C410 x24 y4 3.1122667885e-72 0.0000000000e+00 0.0000000000e+00C412 x22 y6 -5.8011652470e-70 0.0000000000e+00 0.0000000000e+00C414 x20 y8 -7.0824132561e-69 0.0000000000e+00 0.0000000000e+00C416 x18 y10 -1.1254699133e-68 0.0000000000e+00 0.0000000000e+00C418 x16 y12 3.2633527254e-67 0.0000000000e+00 0.0000000000e+00C420 x14 y14 2.5612614653e-66 0.0000000000e+00 0.0000000000e+00C422 x12 y16 6.6634237406e-66 0.0000000000e+00 0.0000000000e+00C424 x10 y18 -3.8400709011e-66 0.0000000000e+00 0.0000000000e+00C426 x8 y20 -5.2153302111e-65 0.0000000000e+00 0.0000000000e+00C428 x6 y22 -7.8849489341e-65 0.0000000000e+00 0.0000000000e+00C430 x4 y24 -5.4941824088e-66 0.0000000000e+00 0.0000000000e+00C432 x2 y26 2.0847434248e-65 0.0000000000e+00 0.0000000000e+00C434 y28 7.0058902235e-66 0.0000000000e+00 0.0000000000e+00Table 3a for Fig. 8Coefficient Formula M04 M05 M06C2 y 3.3342734949e-04 -1.4300215533e-03 -3.3141153777e-03C7 x2 y -1.2150552330e-07 -1.0590271102e-07 -3.7054460593e-07C9 y3 2.3546314605e-08 -2.4004734646e-07 -4.0382026962e-07C10 x4 -5.8594548203e-11 -8.9108819868e-12 3.1773742429e-11C12 x2 y2 1.0935025539e-10 -4.8298224270e-11 -3.2991959042e-10C14 y4 -8.5249076693e-12 -8.8445022979e-10 2.6189340551e-09C16 x4 y 1.7601446843e-13 -5.1279800635e-14 8.9716634646e-14C18 x2 y3 -5.7298874842e-14 -3.3365483706e-13 -1.9121476144e-12C20 y5 1.0311990171e-14 -3.8044770422e-12 -1.0246741400e-11C21 x6 8.3515544940e-17 1.6185356352e-17 -3.1024859695e-17C23 x4 y2 -2.7684504209e-16 -1.3802376820e-16 1.3732655260e-15C25 x2 y4 7.2467279606e-17 -1.7181365469e-15 5.7854292852e-15C27 y6 -4.4870054015e-17 -1.8567453656e-14 3.6035292936e-13C29 x6 y -3.8547589848e-19 -3.5705213085e-20 -6.2207764443e-19C31 x4 y3 2.0817419228e-19 -6.5158510196e-19 2.8900383919e-18C33 x2 y5 -4.3517980447e-19 -1.0823360407e-17 -2.9858298429e-16C35 y7 1.9749666475e-19 -1.0723233352e-16 -2.1256861911e-14C36 x8 -1.7624753871e-22 -5.9702045148e-23 1.3424236435e-22C38 x6 y2 3.9049422684e-22 -5.4800513511e-23 -4.4927579359e-21C40 x4 y4 -1.9614346222e-21 -4.3172458868e-21 3.7061587886e-20C42 x2 y6 6.7450632264e-22 -8.6798900281e-20 1.0217128248e-18C44 y8 4.3328961421e-22 -7.6629703078e-19 -2.0755678641e-16C46 x8 y 7.6235749834e-25 2.0303596931e-25 2.3637755854e-24C48 x6 y3 -2.0592826830e-24 -4.0616828457e-25 -1.0876482074e-23C50 x4 y5 8.5097149569e-24 -2.5035532002e-23 4.5928683595e-21C52 x2 y7 8.8816963593e-24 -3.5705782419e-22 6.3680653494e-19C54 y9 -4.6913115811e-24 -2.9439288211e-21 4.9578102013e-17C55 x10 4.9504563929e-28 5.4207434896e-28 -1.1623004209e-27C57 x8 y2 -2.9835765997e-29 -5.5618744927e-28 5.8471800735e-28C59 x6 y4 3.7913886784e-26 -1.0470217238e-26 -1.8844294345e-24C61 x4 y6 7.7158179997e-26 2.7878024994e-25 -1.7718856906e-22C63 x2 y8 2.7282087201e-26 4.5437490674e-24 -2.2223398688e-20C65 y10 6.8099296982e-27 3.4651656651e-23 -9.0060825672e-19C67 x10 y -8.4980126807e-31 -3.0114053656e-30 -2.0176735123e-29C69 x8 y3 4.2525175573e-29 -1.4035926300e-29 1.0014632579e-27C71 x6 y5 1.0907717048e-28 -2.2878209832e-29 -1.4560300888e-26C73 x4 y7 9.0617191589e-30 2.5816268845e-27 1.1307660347e-24C75 x2 y9 5.0984157774e-29 3.3254551263e-26 -3.9288625152e-22C77 y11 1.6835017559e-28 3.1769055503e-25 -4.1452386009e-20C78 x12 -1.7142674863e-33 -5.0934353218e-33 1.2793491894e-32C80 x10 y2 8.5560233548e-33 1.7146617156e-33 -1.2925348600e-32C82 x8 y4 -1.2769241316e-31 1.1645476915e-31 1.8429975367e-29C84 x6 y6 -9.9870248624e-31 -1.5777263018e-30 1.1442041799e-27C86 x4 y8 -1.4558691619e-30 -8.2752854355e-29 2.6406902335e-25C88 x2 y10 -4.7898234306e-31 -7.9320566459e-28 3.7147289021e-23C90 y12 -2.4706786683e-32 -4.7360702337e-27 1.9936626458e-21C92 x12 y -7.1399327274e-36 1.8301979691e-35 2.0350934284e-34C94 x10 y3 -2.0784167236e-34 1.7082908753e-34 -1.9239614114e-32C96 x8 y5 -1.9959919576e-33 2.6785498147e-33 -6.3234380974e-31C98 x6 y7 -4.2539634926e-33 -4.7122365884e-32 -6.8261626680e-29C100 x4 y9 -4.7826680445e-33 -1.1630523582e-30 -1.0015248795e-26C102 x2 y11 -4.2989247292e-33 -1.2752956759e-29 -6.2112533521e-25C104 y13 -3.3767496104e-33 -8.9228935830e-29 -1.8085670744e-23C105 x14 5.5478309259e-39 2.9387593844e-38 -9.4479440994e-38C107 x12 y2 1.5665659084e-38 1.5110311786e-38 7.2799322779e-37C109 x10 y4 -6.3148295643e-37 2.4994581911e-37 4.4656294701e-34C111 x8 y6 1.1599656428e-36 -5.2164175783e-36 4.4128098453e-33C113 x6 y8 7.5611315192e-36 1.3132183251e-35 2.8278453262e-30C115 x4 y10 6.8485001840e-36 -7.5916510327e-34 7.2370270647e-29C117 x2 y12 -4.9650042078e-36 -4.7637977607e-32 -1.0430705005e-26C119 y14 -5.2589232386e-36 -3.9841165595e-31 -8.1724024666e-25C121 x14 y 1.3933376912e-40 -5.6666699159e-41 -1.2719944103e-39C123 x12 y3 3.9404859569e-40 -8.1854446387e-40 3.2337159305e-38C125 x10 y5 8.8931726137e-39 -3.0555816427e-38 6.2518327118e-36C127 x8 y7 4.1046975181e-38 -1.0787086322e-37 -7.2117183934e-34C129 x6 y9 7.5658253925e-38 6.6932317311e-36 -3.1980590853e-32C131 x4 y11 8.7629947183e-38 7.4092477615e-35 3.0763625059e-30C133 x2 y13 4.8076369344e-38 4.6622888468e-34 6.4654649227e-28C135 y15 3.1756611875e-38 2.6392739424e-33 3.1266055964e-26C136 x16 -3.1848576853e-45 -9.8137715008e-44 4.4421648578e-43C138 x14 y2 -2.5707674083e-43 -1.3672800592e-43 1.9054861846e-41C140 x12 y4 4.3391133009e-42 -9.7835477497e-42 -6.9527047672e-39C142 x10 y6 3.3954951213e-41 -1.9584791228e-40 5.3191797466e-38C144 x8 y8 6.8196494358e-41 6.3624727979e-40 1.0222861469e-35C146 x6 y10 1.3062450522e-40 4.1773171953e-38 -4.0954011431e-35C148 x4 y12 1.4432622357e-40 5.7823950465e-37 -9.7788166375e-32C150 x2 y14 1.9509394675e-40 6.6401228986e-36 -1.3301953177e-29C152 y16 9.3284670172e-41 4.3386210089e-35 -5.3070977889e-28C154 x16 y -7.2132606533e-46 8.4304169416e-47 9.3582907432e-46C156 x14 y3 -1.2207925356e-45 7.7158186260e-46 8.1962737957e-43C158 x12 y5 -2.7505256963e-46 4.3886458589e-44 5.2052298267e-41C160 x10 y7 -7.5635508213e-44 9.1347036870e-43 -6.4479343435e-40C162 x8 y9 -1.9857464222e-43 -2.8184593326e-42 -3.7299108568e-38C164 x6 y11 -3.9982102062e-43 -8.0619766145e-41 3.2546939510e-36C166 x4 y13 -2.9170921030e-43 1.8973212394e-39 1.4099772979e-33C168 x2 y15 2.0177900171e-44 3.7736713536e-38 1.5341286379e-31C170 y17 -6.5072921667e-44 2.5510931891e-37 5.3122174097e-30C171 x18 -4.8439890417e-50 1.7859745727e-49 -1.0892726921e-48C173 x16 y2 -4.1296857924e-49 2.7721267466e-49 -2.0399239504e-46C175 x14 y4 -2.8926075886e-48 2.9190632302e-47 6.2031294716e-45C177 x12 y6 -1.1853223947e-46 1.1597657918e-45 -2.4459406302e-43C179 x10 y8 -4.2648911106e-46 1.0142364574e-44 -2.9753883927e-41C181 x8 y10 -1.1610608229e-45 -1.1840043709e-43 1.0172033138e-39C183 x6 y12 -1.7186164398e-45 -1.5498045673e-42 -5.2560104847e-38C185 x4 y14 -1.6471131747e-45 2.5410939396e-42 -1.1302024502e-35C187 x2 y16 -1.2158988465e-45 1.1859965217e-40 -1.0524802385e-33C189 y18 -5.0217423597e-46 8.1592924784e-40 -3.2329020279e-32C191 x18 y 1.2288617120e-51 -4.6264602843e-53 2.1407888705e-50C193 x16 y3 5.0334928946e-51 1.9998031948e-51 7.6302498117e-49C195 x14 y5 -4.6997592654e-50 2.2255128775e-49 -2.4018902657e-46C197 x12 y7 -2.1971698426e-49 5.5474120142e-48 1.2758259333e-44C199 x10 y9 -8.2391554071e-49 2.0318514579e-47 -4.3068240801e-44C201 x8 y11 -1.8257350105e-48 -5.9685159296e-46 -5.7577720982e-42C203 x6 y13 -2.4365858320e-48 -5.1856783575e-45 3.6784136464e-40C205 x4 y15 -2.7369829486e-48 -4.1144149756e-46 4.8450144377e-38C207 x2 y17 -2.5404559834e-48 2.0321074594e-43 4.0342555863e-36C209 y19 -5.2826409583e-49 1.4136219035e-42 1.1127823412e-34C210 x20 1.1457078648e-55 -1.3775606428e-55 4.1977872214e-55C212 x18 y2 3.6623171237e-54 -6.6350126065e-56 -1.5471614648e-52C214 x16 y4 -6.7555046215e-54 7.6549367131e-54 1.5127891858e-50C216 x14 y6 -2.9761127727e-53 4.9877315516e-52 2.1438916949e-49C218 x12 y8 -1.7452051121e-52 7.8757492887e-51 -4.9171997480e-47C220 x10 y10 -5.1666234212e-52 -2.5046927863e-51 1.1828839448e-45C222 x8 y12 -1.0279475980e-51 -8.8996099119e-49 -5.8753858799e-45C224 x6 y14 -1.2651253523e-51 -5.6727684046e-48 -7.3925906840e-43C226 x4 y16 -1.6982946723e-51 -3.2276311073e-48 -8.8685875480e-41C228 x2 y18 -1.6456494469e-51 1.4961319558e-46 -6.6808670220e-39C230 y20 -7.3521256768e-53 1.0458018443e-45 -1.6694870846e-37Table 3b for Fig. 8Coefficient Formula M07 M08 M09C2 y 6.8782912594e-04 1.0981823357e-02 2.1219987449e-03C7 x2 y -4.9613143129e-08 -1.3227409368e-06 1.2752444162e-08C9 y3 2.8611791484e-08 -1.1240382398e-06 6.4574907089e-09C10 x4 1.0833632980e-10 9.4246110028e-10 -2.6195031618e-11C12 x2 y2 -9.0889256414e-11 3.9064844804e-09 -8.7717046328e-11C14 y4 -3.5475925343e-11 8.7585428227e-09 -3.6490433904e-11C16 x4 y 3.1386699742e-13 -1.6528193481e-12 4.0987058425e-15C18 x2 y3 7.8990795121e-14 -1.9540405066e-11 1.3055567273e-14C20 y5 7.6271494548e-14 -6.0858589272e-12 7.1512833647e-15C21 x6 -5.7680823298e-16 1.0274068454e-15 -7.2093629191e-17C23 x4 y2 8.1158854117e-17 2.0345220555e-14 -2.3332746163e-16C25 x2 y4 -3.6148410896e-16 6.0579239488e-14 -2.6864116058e-16C27 y6 -1.3421898465e-16 1.6023851868e-13 -8.1902460892e-17C29 x6 y -1.1650653654e-18 -1.4021777049e-17 1.3880200577e-20C31 x4 y3 1.3641774012e-18 -1.1378704645e-16 -2.5533776538e-20C33 x2 y5 8.6409267783e-19 -5.7346375131e-16 -1.4583138334e-20C35 y7 1.9776039000e-19 -1.5745880621e-15 -1.2186185953e-20C36 x8 4.5234433173e-22 9.9696458825e-21 -1.5110665386e-22C38 x6 y2 -1.5430407779e-21 1.9935372363e-19 -6.3585714002e-22C40 x4 y4 1.8049066477e-21 3.1292117983e-18 -1.1737716160e-21C42 x2 y6 8.3964161854e-22 1.7255464519e-17 -9.2043006587e-22C44 y8 -7.0656818602e-22 4.2496390815e-18 -1.4245666764e-22C46 x8 y -2.9435022134e-23 -8.0659225184e-23 6.3537154276e-26C48 x6 y3 -5.7723497451e-23 -3.2887522859e-21 6.5746098802e-25C50 x4 y5 -7.0930397596e-23 -1.5236940983e-20 1.9020834472e-24C52 x2 y7 -6.4468171409e-24 8.5576285782e-21 1.5539360536e-24 C111 x8 y6 7.5939365547e-34 -4.7093664342e-30 2.6980438672e-36C113 x6 y8 6.8024156950e-34 -6.8673213741e-29 4.7944099516e-36C115 x4 y10 2.1277046205e-34 -4.4425248589e-28 4.7245444665e-36C117 x2 y12 -3.0064671485e-36 -1.0842858517e-27 1.6698577625e-36C119 y14 -7.4974411979e-36 -9.3215402766e-29 6.4371909904e-39C121 x14 y 5.7975690296e-37 1.9422880844e-36 -1.5249973542e-40C123 x12 y3 1.2954274931e-36 2.4398578571e-34 -1.7099909575e-39C125 x10 y5 2.2797334943e-36 5.8238244071e-33 -8.7567131643e-39C127 x8 y7 7.3065260974e-36 7.1013664034e-32 -2.2382027574e-38C129 x6 y9 6.5013918159e-36 6.1772281633e-31 -3.0839545261e-38C131 x4 y11 1.9436707907e-36 3.0828060426e-30 -2.1339554741e-38C133 x2 y13 2.7992321494e-37 5.1704817644e-30 -6.5042625387e-39C135 y15 2.5432243560e-38 -5.4351250305e-30 -7.5538788850e-40C136 x16 5.8867359711e-40 -1.7087094579e-39 3.0541610562e-44 C175 x14 y4 -6.9018054379e-44 4.6209240851e-41 3.0429991390e-47C177 x12 y6 1.2301344492e-43 -7.0591395805e-40 1.3818626276e-46C179 x10 y8 4.8339366326e-43 -3.3280488886e-38 3.2181330847e-46C181 x8 y10 4.9585976613e-43 -4.6665250509e-37 5.1059189616e-46C183 x6 y12 2.4357931580e-43 -3.3301524484e-36 5.4819297433e-46C185 x4 y14 4.3805643063e-44 -1.2381875571e-35 3.2740704636e-46C187 x2 y16 4.8541644288e-45 -1.9671436529e-35 7.4654085774e-47C189 y18 4.1104776209e-46 -1.0525189919e-36 8.4621696696e-49C191 x18 y 1.8462385187e-47 8.0069283559e-47 -3.2540588947e-51C193 x16 y3 7.3716296582e-47 4.9932439407e-44 -5.2305683616e-50C195 x14 y5 -3.0194296212e-46 1.9109232761e-42 -3.4210185909e-49C197 x12 y7 -6.0889885143e-46 3.7098839153e-41 -1.1312123451e-48C199 x10 y9 -6.2516287100e-46 4.9388718951e-40 -2.3064529191e-48C201 x8 y11 -6.0641866846e-46 4.8902383488e-39 -3.0572100935e-48C203 x6 y13 -3.8169287469e-46 3.0523268742e-38 -2.5423489287e-48C205 x4 y15 -7.0596788286e-47 9.9722592803e-38 -1.1990795410e-48C207 x2 y17 -6.6024909098e-48 1.3230594120e-37 -2.7407374272e-49C209 y19 -4.2912681932e-49 1.2193313534e-38 -2.0923661929e-50C210 x20 2.0108232649e-50 -3.1196307523e-49 8.9781250804e-55C212 x18 y2 -9.8006695899e-50 -2.8831608208e-47 -1.7664439022e-54C214 x16 y4 4.9312605520e-49 -1.1525137578e-45 -8.7483719501e-53C216 x14 y6 9.0940739071e-49 -5.7309081840e-45 -5.2825640325e-52C218 x12 y8 -3.5938825168e-50 2.9008400991e-43 -1.4540837192e-51C220 x10 y10 -4.5620484109e-49 6.4261369694e-42 -2.6082492823e-51C222 x8 y12 4.4438913143e-51 6.2869972182e-41 -3.3609324095e-51C224 x6 y14 1.8685317532e-49 3.4611987061e-40 -2.9237548273e-51C226 x4 y16 3.7363644631e-50 1.0529620417e-39 -1.4290907873e-51C228 x2 y18 3.1587157351e-51 1.4305818158e-39 -2.7317188582e-52C230 y20 1.7462516097e-52 7.1212396223e-41 -3.4270300799e-54C232 x20 y 0.0000000000e+00 1.5384924171e-51 8.6012013373e-57C234 x18 y3 0.0000000000e+00 -2.9816755670e-49 1.5938510388e-55C236 x16 y5 0.0000000000e+00 -1.4210641306e-47 1.1891381409e-54C238 x14 y7 0.0000000000e+00 -3.7729720437e-46 4.4241410287e-54C240 x12 y9 0.0000000000e+00 -6.3918307188e-45 1.0210232347e-53C242 x10 y11 0.0000000000e+00 -7.8885115917e-44 1.5961218413e-53C244 x8 y13 0.0000000000e+00 -6.6215245232e-43 1.7170923215e-53C246 x6 y15 0.0000000000e+00 -3.3379373476e-42 1.2046117555e-53C248 x4 y17 0.0000000000e+00 -8.9843262469e-42 4.9614175383e-54C250 x2 y19 0.0000000000e+00 -1.0610463875e-41 1.0195455407e-54C252 y21 0.0000000000e+00 -2.7651324176e-42 6.8062448732e-56C253 x22 0.0000000000e+00 2.3727786637e-54 -2.0458733952e-60C255 x20 y2 0.0000000000e+00 2.6026605756e-52 -1.4450620665e-60C257 x18 y4 0.0000000000e+00 1.3675098812e-50 1.3973646510e-58C259 x16 y6 0.0000000000e+00 1.7947065968e-49 1.2316279398e-57C261 x14 y8 0.0000000000e+00 -6.0374640275e-49 4.1340775389e-57C263 x12 y10 0.0000000000e+00 -4.7679050631e-47 8.5594375232e-57C265 x10 y12 0.0000000000e+00 -6.4769520354e-46 1.2599305082e-56C267 x8 y14 0.0000000000e+00 -4.7298961220e-45 1.3352263945e-56C269 x6 y16 0.0000000000e+00 -2.1116684044e-44 9.5772988440e-57C271 x4 y18 0.0000000000e+00 -5.4976855585e-44 3.9148613258e-57C273 x2 y20 0.0000000000e+00 -6.6388159353e-44 6.3497133809e-58C275 y22 0.0000000000e+00 -4.2583543721e-45 8.2834141846e-60C277 x22 y 0.0000000000e+00 -2.4273859856e-56 -1.4876240213e-62C279 x20 y3 0.0000000000e+00 3.8898396793e-55 -3.0936655468e-61C281 x18 y5 0.0000000000e+00 2.6908213874e-53 -2.6296535747e-60C283 x16 y7 0.0000000000e+00 1.7240764085e-51 -1.1012391897e-59C285 x14 y9 0.0000000000e+00 4.4625321100e-50 -2.8512946413e-59C287 x12 y11 0.0000000000e+00 7.1954454866e-49 -5.0551025048e-59C289 x10 y13 0.0000000000e+00 7.7274371224e-48 -6.4500744148e-59C291 x8 y15 0.0000000000e+00 5.3113079042e-47 -5.8829261263e-59C293 x6 y17 0.0000000000e+00 2.1878784173e-46 -3.5875691447e-59C295 x4 y19 0.0000000000e+00 4.9593485384e-46 -1.3162644849e-59C297 x2 y21 0.0000000000e+00 5.2818253676e-46 -2.4635550544e-60C299 y23 0.0000000000e+00 1.7969003065e-46 -1.4892339435e-61C300 x24 0.0000000000e+00 -1.1348850740e-59 2.6177592400e-66C302 x22 y2 0.0000000000e+00 -1.3566627790e-57 4.0174881968e-66C304 x20 y4 0.0000000000e+00 -8.5648169864e-56 -9.1155272836e-65C306 x18 y6 0.0000000000e+00 -1.4920324966e-54 -1.5847282085e-63C308 x16 y8 0.0000000000e+00 -8.2648107796e-54 -6.7304201931e-63C310 x14 y10 0.0000000000e+00 1.5066211116e-52 -1.6526720552e-62C312 x12 y12 0.0000000000e+00 3.3123745716e-51 -2.8355480427e-62C314 x10 y14 0.0000000000e+00 3.0559667322e-50 -3.4568067010e-62C316 x8 y16 0.0000000000e+00 1.7443694018e-49 -2.9983154862e-62C318 x6 y18 0.0000000000e+00 6.6793679453e-49 -1.7846109327e-62C320 x4 y20 0.0000000000e+00 1.5840289040e-48 -6.1559835136e-63C322 x2 y22 0.0000000000e+00 1.8075229449e-48 -8.3951150596e-64C324 y24 0.0000000000e+00 1.9543689825e-49 -1.1136020815e-65C326 x24 y 0.0000000000e+00 1.4459226932e-61 1.5186885329e-68C328 x22 y3 0.0000000000e+00 5.1403601414e-60 3.4601260694e-67C330 x20 y5 0.0000000000e+00 3.0550712609e-58 3.3345232664e-66C332 x18 y7 0.0000000000e+00 1.1341925356e-57 1.5683483086e-65C334 x16 y9 0.0000000000e+00 -1.1875450302e-55 4.5445183019e-65C336 x14 y11 0.0000000000e+00 -3.2261327881e-54 9.0150139316e-65C338 x12 y13 0.0000000000e+00 -4.5830056946e-53 1.3044593497e-64C340 x10 y15 0.0000000000e+00 -4.0682769561e-52 1.4179437444e-64C342 x8 y17 0.0000000000e+00 -2.2896913188e-51 1.1287283555e-64C344 x6 y19 0.0000000000e+00 -7.8625716242e-51 6.1023360945e-65C346 x4 y21 0.0000000000e+00 -1.5312476273e-50 2.0208088862e-65C348 x2 y23 0.0000000000e+00 -1.4919045503e-50 3.4752253123e-66C350 y25 0.0000000000e+00 -5.4526477262e-51 1.9479240572e-67C351 x26 0.0000000000e+00 2.9719934281e-65 -1.4648736005e-72C353 x24 y2 0.0000000000e+00 3.5352626139e-63 4.1935125366e-72C355 x22 y4 0.0000000000e+00 2.4751127807e-61 -2.3714730433e-71C357 x20 y6 0.0000000000e+00 4.1174384436e-60 8.5867661472e-70C359 x18 y8 0.0000000000e+00 3.8216478851e-59 5.1296494495e-69C361 x16 y10 0.0000000000e+00 -1.1169873251e-58 1.5467580892e-68C363 x14 y12 0.0000000000e+00 -6.1439510606e-57 3.2608018792e-68C365 x12 y14 0.0000000000e+00 -6.3425191163e-56 4.7497213095e-68C367 x10 y16 0.0000000000e+00 -3.5421389158e-55 4.6476784898e-68C369 x8 y18 0.0000000000e+00 -1.5937927413e-54 3.1691530815e-68C371 x6 y20 0.0000000000e+00 -6.5169750682e-54 1.5258024866e-68C373 x4 y22 0.0000000000e+00 -1.7894083127e-53 4.3274392418e-69C375 x2 y24 0.0000000000e+00 -2.3547754790e-53 4.4810565451e-70C377 y26 0.0000000000e+00 -4.8469128972e-54 5.7721674164e-72C379 x26 y 0.0000000000e+00 -3.3660240732e-67 -6.9693615802e-75C381 x24 y3 0.0000000000e+00 -2.1173725539e-65 -1.7002605259e-73C383 x22 y5 0.0000000000e+00 -1.5422601348e-63 -1.8444197149e-72C385 x20 y7 0.0000000000e+00 -2.8035606524e-62 -9.6970884169e-72C387 x18 y9 0.0000000000e+00 -1.0166432275e-61 -3.1353626964e-71C389 x16 y11 0.0000000000e+00 4.4116325012e-60 -6.9332061757e-71C391 x14 y13 0.0000000000e+00 1.0344155177e-58 -1.1176850995e-70C393 x12 y15 0.0000000000e+00 1.1982477051e-57 -1.3774450258e-70C395 x10 y17 0.0000000000e+00 8.7119308828e-57 -1.3137727902e-70C397 x8 y19 0.0000000000e+00 4.0732016559e-56 -9.3041784845e-71C399 x6 y21 0.0000000000e+00 1.1901199444e-55 -4.5189104016e-71C401 x4 y23 0.0000000000e+00 2.0251767079e-55 -1.3631452928e-71C403 x2 y25 0.0000000000e+00 1.8311253746e-55 -2.1679637442e-72C405 y27 0.0000000000e+00 6.4026067877e-56 -1.1440083092e-73C406 x28 0.0000000000e+00 -2.8867373419e-71 -1.0480198317e-79C408 x26 y2 0.0000000000e+00 -2.7574464563e-69 -1.2430890881e-77C410 x24 y4 0.0000000000e+00 -1.6780642306e-67 1.6725893243e-77C412 x22 y6 0.0000000000e+00 2.6906955586e-66 -9.7575159233e-77C414 x20 y8 0.0000000000e+00 6.7968653368e-65 -1.1813570410e-75C416 x18 y10 0.0000000000e+00 8.7348614760e-64 -4.6394440536e-75C418 x16 y12 0.0000000000e+00 3.4168889413e-63 -1.3343139684e-74C420 x14 y14 0.0000000000e+00 -6.9782646266e-62 -2.5907506294e-74C422 x12 y16 0.0000000000e+00 -1.3632968050e-60 -3.0473330439e-74C424 x10 y18 0.0000000000e+00 -1.0843139151e-59 -2.0991876290e-74C426 x8 y20 0.0000000000e+00 -4.4010444984e-59 -8.8312846705e-75C428 x6 y22 0.0000000000e+00 -8.7983962155e-59 -2.4974127143e-75C430 x4 y24 0.0000000000e+00 -5.9542638016e-59 -3.2270861214e-76C432 x2 y26 0.0000000000e+00 6.6022683850e-59 4.5946885753e-77C434 y28 0.0000000000e+00 3.3561515889e-59 -4.3040404087e-79Table 3c for Fig. 8Coordinates of the stop edgexi [mm] yi [mm] xi+N / 2 [mm] yi+N / 2 [mm]-348.092800 -50.506223 347.744258 -62.466929-347.920747 -44.546252 347.225231 -68.457362-347.517159 -38.606641 346.477788 -74.447586-346.881848 -32.692370 345.503261 -80.432392-346.014877 -26.808322 344.303183 -86.406589-344.916554 -20.959268 342.879281 -92.365024-343.587437 -15.149859 341.233467 -98.302608-342.028329 -9.384613 339.367836 -104.214339-340.240273 -3.667911 337.284654 -110.095322-338.224547 1.996012 334.986365 -115.940794-335.982664 7.603070 332.475583 -121.746134-333.516364 13.149330 329.755096 -127.506883-330.827614 18.631012 326.827862 -133.218749-327.918610 24.044494 323.697008 -138.877620-324.791774 29.386311 320.365829 -144.479562-321.449760 34.653152 316.837785 -150.020821-317.895458 39.841864 313.116492 -155.497817-314.131998 44.949446 309.205717 -160.907144-310.162748 49.973051 305.109370 -166.245555-305.991327 54.909984 300.831488 -171.509958-301.621595 59.757696 296.376232 -176.697404-297.057659 64.513788 291.747867 -181.805076-292.303866 69.176003 286.950752 -186.830278-287.364799 73.742230 281.989329 -191.770427-282.245264 78.210492 276.868109 -196.623037-276.950283 82.578949 271.591660 -201.385716-271.485074 86.845890 266.164596 -206.056153-265.855038 91.009727 260.591566 -210.632111-260.065732 95.068995 254.877246 -215.111419-254.122857 99.022341 249.026324 -219.491965-248.032223102.868526 243.043497 -223.771690-241.799737106.606419 236.933458 -227.948583-235.431370110.234992 230.700886 -232.020677-228.933137113.753315 224.350442 -235.986042-222.311075117.160555 217.886755 -239.842786-215.571214120.455964 211.314419 -243.589048-208.719562123.638875 204.637985 -247.223001-201.762074126.708695 197.861953 -250.742847-194.704633129.664899 190.990767 -254.146819-187.553032132.507020 184.028814 -257.433184-180.312952135.234653 176.980415 -260.600238-172.989945137.847443 169.849828 -263.646314-165.589419140.345084 162.641242 -266.569781-158.116629142.727319 155.358781 -269.369048-150.576662144.993933 148.006501 -272.042568-142.974431147.144751 140.588391 -274.588839-135.314669149.179635 133.108376 -277.006407-127.601920151.098478 125.570315 -279.293875-119.840537152.901200 117.978008 -281.449898-112.034679154.587744 110.335192 -283.473195-104.188315156.158068 102.645547 -285.362546-96.305224157.612146 94.912695 -287.116799-88.389000158.949958 87.140204 -288.734870-80.443063160.171492 79.331589 -290.215749-72.470665161.276737 71.490314 -291.558502-64.474907162.265684 63.619797 -292.762273-56.458745163.138323 55.723410 -293.826288-48.425012163.894643 47.804483 -294.749857-40.376425164.534633 39.866311 -295.532375-32.315607165.058282 31.912153 -296.173328-24.245100165.465577 23.945243 -296.672291-16.167382165.756510 15.968788 -297.028931-8.084882165.931073 7.985981 -297.2430110.000000165.989262 0.000000 -297.3143878.084882165.931073 -7.985981 -297.24301116.167382165.756510 -15.968788 -297.02893124.245100165.465577 -23.945243 -296.67229132.315607165.058282 -31.912153 -296.17332840.376425164.534633 -39.866311 -295.53237548.425012163.894643 -47.804483 -294.74985756.458745163.138323 -55.723410 -293.82628864.474907162.265684 -63.619797 -292.76227372.470665161.276737 -71.490314 -291.55850280.443063160.171492 -79.331589 -290.21574988.389000158.949958 -87.140204 -288.73487096.305224157.612146 -94.912695 -287.116799104.188315156.158068 -102.645547 -285.362546112.034679154.587744 -110.335192 -283.473195119.840537152.901200 -117.978008 -281.449898127.601920151.098478 -125.570315 -279.293875135.314669149.179635 -133.108376 -277.006407142.974431147.144751 -140.588391 -274.588839150.576662144.993933 -148.006501 -272.042568814849718627305913677864854712093442984926347.920747 -44.546252 -347.225231 -68.457362348.092800 -50.506223 -347.744258 -62.466929348.033747 -56.481491 -348.033747 -56.481491Table 4 for Fig. 8Numerical aperture = 0.80 1 / βx = -4.20 1 / βy = -8.00Track length = 2300 mmObject-image shift = 3601 mmWidth of the installation space = 4211 mmOptically used overall mirror area = 2.77 m²Linear pupil obscuration = 25.2% Minimum angle on grazing incident mirror = 70.1°Scan slot length on the wafer = 0.9 mmScan-integrated wavefront RMS = 9.87 mλTransmission = 6.41%Étendue = 47.0 mm²Mirror with maximum diameter = M9Maximum optical mirror diameter = 1147 mmMirror with maximum area = M9 Table 5 for Fig. 8Fig.9 shows a further embodiment of a projection optical unit or imaging optical unit 30, which can be used in the projection exposure apparatus 1 instead of the projection optical unit 10. Com- ponents and functions corresponding to those which have already been explained above with ref-erence to Figures 1 to 8 bear the same reference signs and will not be discussed in detail again.The projection optical unit 30 has a total of ten mirrors M1 to M10 in the imaging beam path be- tween the object field 5 and the image field 11. Mirrors M1, M9 and M10 are embodied as NI mirrors and the mirrors M2 to M8 are embodied as GI mirrors. The projection optical unit 30 has seven GI mirrors. The GI mirrors M2 to M8 add in terms of their deflective effect. The mirror M10 situated last in the imaging beam path of the projection optical unit 30 and determining the image-side numerical aperture is in turn obscured and has a passage opening 23. In terms of its basic structure, the imaging optical unit 30 corresponds to the imaging optical unit 24 according to Fig.3, for example, with an additional GI mirror M8. In an alternative, the basic structure of the projection optical unit 30 may also be understood as that of the projection optical unit 27 according to Fig.6 without the GI counter mirror M9. In the projection optical unit 30, a first intermediate image plane is located in the region of thereflection off the mirror M4. In the projection optical unit 30, a second intermediate image planeis located in the region of the reflection off the mirror M8. All GI mirrors M2 to M8 of projection optical unit 30 have angles of incidence of the individual rays of the imaging light 16 which are greater than 74°. The image-side numerical aperture-de-termining mirror M10 has a diameter of 1140 mm. Only one of the other mirrors M1 to M9 has adiameter that is greater than 1000 mm, specifically the mirror M5.The projection optical unit 30 has a linear pupil obscuration of 17.6%. The optical design data for the projection optical unit 30 emerge from following Tables 1 to 5, which, in turn, correspond in terms of the basic structure to Tables 1 to 5 relating to the embodi- ment according to Figure 8. Radii of the surfaces Radiusx [mm] Powerx [1 / mm] Radiusy [mm] Powery [1 / mm]M01 -4128.00043378 0.00047856 -1430.41208215 0.00138107M02 4870.36553160 -0.00041065 1570.12512495 -0.00127378M03 -19350.06101606 0.00010334 -6827.38069520 0.00029289M04 -9133.18665788 0.00021898 55613.11848911 -0.00003596M05 -37081.54795601 0.00001117 -12458.22071530 0.00003324M06 -1305.03043668 0.00025477 8498.42430366 -0.00003912M07 -856.68402426 0.00053586 -4595.74156095 0.00009989M08 -1615.83991210 0.00016713 -7056.60902977 0.00003827M09 2127.97842219 -0.00016337 244.82764343 -0.00141999M10 -772.52811548 0.00258890 -688.18430336 0.00290620Table 1 for Fig. 9Decentring (location, angle) the surfaces Dx [mm] Dy [mm] Dz [mm]Reticle 0.000000000 0.000000000 0.000000000M01 0.000000000 235.9334639552048.385920908M02 0.000000000 555.0784454881191.791956464M03 0.000000000 843.061150952 854.518975549M04 -0.0000000001531.705828915 507.112058641M05 -0.0000000002578.389868879 303.306116689M06 -0.0000000003602.862100394 384.000869108M07 -0.0000000004006.640064207 626.992699930M08 -0.0000000004431.8852307991136.767589099M09 -0.0000000004732.1721760532190.394344356Stop -0.0000000004713.7791072142133.472933930M10 -0.0000000004552.8084573211635.313735526Wafer -0.0000000004552.8084567102299.515494691 Reticle 0.000000000 0.000000000 0.000000000M01 6.931860222 0.000000000180.000000000M02 -59.536662247180.000000000 -0.000000000M03 -38.138712316180.000000000 -0.000000000M04 -18.894258454180.000000000 -0.000000000M05 -3.257398070180.000000000 -0.000000000M06 17.771536552180.000000000 -0.000000000M07 40.602541214180.000000000 -0.000000000M08 62.129008313180.000000000 -0.000000000M09 -16.907484391 -0.000000000180.000000000Stop 2.105106672180.000000000 -0.000000000M10 -8.953624910180.000000000 0.000000000Wafer 0.000000053 -0.000000000 -0.000000000Table 2 for Fig. 9Free-form coefficients of the surfacesCoefficient Formula M01 M02 M03C2 y 1.8659955328e-05 1.0931948721e-04 -3.9001515336e-06C7 x2 y 4.5698074343e-08 1.0158237393e-07 -1.0760411701e-07C9 y3 -2.5507607775e-08 5.6839409540e-07 9.4376835726e-08C10 x4 2.4855361743e-11 -1.1717809890e-10 -1.5659172616e-10C12 x2 y2 -1.8908375044e-11 5.5234464363e-10 -6.3568003908e-12C14 y4 -1.6048693018e-11 8.4140287940e-10 -1.4344369928e-10C16 x4 y -2.9810045612e-14 -2.4593489169e-13 -6.3030673101e-14C18 x2 y3 -7.2256050835e-14 3.4737017174e-13 -2.7898624009e-13C20 y5 -1.4424402302e-13 4.4111447127e-13 2.9237590231e-13C21 x6 1.4935066860e-17 -9.6954586414e-17 5.7110533258e-17C23 x4 y2 5.0344790729e-17 -4.5642104673e-16 -1.0760167034e-16C25 x2 y4 -2.1513399831e-16 -4.3511001526e-15 5.1508705377e-16C27 y6 -2.0388878914e-16 -5.7053664359e-15 -5.4711501837e-16C29 x6 y 6.1536238459e-20 -1.4477061098e-18 6.6446509727e-20C31 x4 y3 1.8703352337e-19 -3.4799586872e-18 1.0343003898e-18C33 x2 y5 5.8650875591e-19 -3.1487122886e-17 -1.6115593593e-18C35 y7 -1.9746544000e-18 -5.2241931601e-17 3.2494801850e-19C36 x8 -6.2219052323e-25 3.0058056269e-21 9.4767928315e-23C38 x6 y2 3.9597924857e-22 -6.9647146372e-21 1.6464480518e-21C40 x4 y4 6.0708909087e-21 -1.5109539728e-20 -2.1327032376e-21C42 x2 y6 2.2254274218e-20 -1.2941274121e-19 9.2736123837e-22C44 y8 -4.8886036660e-20 -2.2191631223e-19 -8.6356927239e-22C46 x8 y -6.0670756289e-25 2.3469044917e-23 -2.2291504370e-24C48 x6 y3 -1.9410009031e-25 -1.6890723645e-23 -3.6837670688e-24C50 x4 y5 1.4456210227e-23 2.0894729052e-23 1.3763023000e-23C52 x2 y7 3.6482860067e-23 -2.2067987234e-23 4.5688751216e-23C54 y9 -9.9003671369e-23 1.0425144050e-21 1.6102494442e-22C55 x10 -4.9081464216e-28 -1.8689225102e-26 -1.3087861199e-27C57 x8 y2 -1.3655996519e-26 8.6505443344e-26 -1.1847024255e-26C59 x6 y4 -2.3278042498e-25 4.8168691979e-26 1.1353530794e-26C61 x4 y6 -1.5994138051e-24 6.8330802152e-25 5.2292325347e-26C63 x2 y8 -2.1767531184e-24 3.4045382139e-24 2.9956284917e-25C65 y10 6.2021804858e-24 1.5564654004e-23 -2.8271886444e-25C67 x10 y -2.4029815266e-33 -1.5632219276e-28 2.6487455073e-29C69 x8 y3 -1.5953411353e-28 2.2464664033e-28 8.8131237159e-30C71 x6 y5 -2.0738532476e-27 7.1189515645e-28 -8.8443361010e-29C73 x4 y7 -6.5014168418e-27 2.8859729470e-27 -8.3251237210e-28C75 x2 y9 -6.1443728628e-27 6.9276135532e-27 -4.6535183531e-27C77 y11 1.2708331223e-26 2.0422548944e-26 -1.2053738148e-26C78 x12 8.0042100993e-33 5.7113724163e-32 1.4567503511e-32C80 x10 y2 3.0063986522e-31 -4.7502967538e-31 6.7423453191e-32C82 x8 y4 5.5446247769e-30 7.6512288290e-31 -5.9567896797e-32C84 x6 y6 5.8861967502e-29 3.0747252232e-30 -8.8498499785e-31C86 x4 y8 2.2619145026e-28 8.8111336973e-30 -8.6306294561e-30C88 x2 y10 1.7020929189e-28 -1.5059227108e-28 -2.2384987811e-29C90 y12 -5.0758227480e-28 -5.2116242794e-28 1.0833577852e-30C92 x12 y 1.3329287364e-34 6.2118152625e-34 -1.5477373449e-34C94 x10 y3 5.1138748144e-33 -8.6008880082e-34 -1.1691737424e-35C96 x8 y5 7.5503309342e-32 1.1136969093e-33 2.0307417859e-34C98 x6 y7 3.8738481985e-31 3.5291892784e-32 3.2740672383e-33C100 x4 y9 7.2564789045e-31 1.7913649179e-31 5.0467250406e-32C102 x2 y11 4.9921444056e-31 -9.4031131110e-31 1.8378932226e-31C104 y13 -1.0527274346e-30 -3.0098290702e-30 5.8848865321e-31C105 x14 -9.1586171009e-38 -5.8147717244e-38 -7.5289137978e-38C107 x12 y2 -4.3983571088e-36 1.2882176637e-36 -2.5826269591e-37C109 x10 y4 -7.9463092826e-35 -4.8622767997e-36 2.2555580381e-37C111 x8 y6 -1.1425219589e-33 1.1726892428e-35 5.3109849442e-36C113 x6 y8 -7.3099692754e-33 1.3933402767e-34 8.7656083760e-35C115 x4 y10 -1.8183957832e-32 1.4676892847e-33 4.6364020237e-34C117 x2 y12 -6.5124434609e-33 1.1806887511e-33 1.1001898869e-33C119 y14 2.9417983822e-32 -3.2286654437e-34 1.0308607206e-33C121 x14 y -2.3173614813e-39 -1.5483841996e-39 5.4896718242e-40C123 x12 y3 -8.3995604079e-38 -1.7115166435e-40 -1.6461602420e-41C125 x10 y5 -1.4698631269e-36 -1.3861031967e-38 3.1197453551e-40C127 x8 y7 -1.0741096766e-35 -2.7234732182e-37 1.1907459595e-38C129 x6 y9 -3.4881869146e-35 -1.6111095827e-36 -7.6909747703e-38C131 x4 y11 -4.6579515137e-35 3.0062690603e-36 -1.0500385119e-36C133 x2 y13 -2.7959504346e-35 3.3512046445e-35 -3.0087915395e-36C135 y15 5.0741194188e-35 5.8522573638e-35 -1.5004282866e-35C136 x16 8.2231247221e-43 -1.3031557265e-43 2.0678349121e-43C138 x14 y2 4.3644167113e-41 -9.4917297674e-43 5.4825443089e-43C140 x12 y4 6.9341995275e-40 1.4143852579e-41 -6.2248324347e-43C142 x10 y6 1.2447159908e-38 -3.1516597563e-40 -1.2637599203e-41C144 x8 y8 1.1938267817e-37 -2.6938619304e-39 -3.5162291549e-40C146 x6 y10 5.0389899132e-37 -1.2348628160e-38 -2.8594799588e-39C148 x4 y12 8.5722605298e-37 -1.6506753172e-38 -1.3366453813e-38C150 x2 y14 -2.1764213299e-38 1.5388375342e-37 -2.6158782269e-38C152 y16 -1.1861445398e-36 2.7124592372e-37 -5.4167226097e-38C154 x16 y 2.1401430896e-44 2.2551197511e-45 -1.1167440415e-45C156 x14 y3 8.5661559521e-43 1.2424418790e-44 6.5565940370e-47C158 x12 y5 1.7470705561e-41 -8.8202757213e-45 -1.6747344082e-45C160 x10 y7 1.6829052863e-40 -2.9356290844e-43 -9.7713128044e-44C162 x8 y9 8.0276044203e-40 8.5640765203e-43 -6.8785197838e-43C164 x6 y11 1.9303883729e-39 -1.6923790448e-41 -2.6883896232e-42C166 x4 y13 1.9845463507e-39 -1.0897907215e-40 -2.7467763869e-42C168 x2 y15 1.3002679608e-39 3.3448562910e-40 -5.5259951358e-42C170 y17 -1.3133190204e-39 5.9156433057e-40 1.2416883631e-40C171 x18 -5.7070717472e-48 2.9771457529e-49 -2.3794152163e-49C173 x16 y2 -2.9532422600e-46 -1.4840236457e-48 -4.3923613147e-49C175 x14 y4 -3.3418511542e-45 -1.1468856613e-47 9.7974161663e-49C177 x12 y6 -7.1129852612e-44 1.0696059408e-45 1.0192034277e-47C179 x10 y8 -1.0565993919e-42 1.1672778229e-44 4.6567594678e-46C181 x8 y10 -6.7751710624e-42 5.0642903726e-44 5.6512286747e-45C183 x6 y12 -2.0212324631e-41 4.9360542716e-44 3.4960004478e-44C185 x4 y14 -2.2519056473e-41 -2.4506102726e-43 1.5962119808e-43C187 x2 y16 1.3855925221e-41 3.4755883613e-43 2.0877554910e-43C189 y18 3.2172051897e-41 6.5719438255e-43 8.9004235013e-43C191 x18 y -1.2239198467e-49 -1.5265261761e-51 1.0189592936e-51C193 x16 y3 -5.7352219938e-48 -2.6895879846e-50 -2.6727713046e-53C195 x14 y5 -1.3298881071e-46 1.6924676857e-49 1.3109136940e-51C197 x12 y7 -1.6084086982e-45 5.0285638078e-48 1.5342678414e-49C199 x10 y9 -1.0284649046e-44 3.1859231677e-47 1.9127600932e-48C201 x8 y11 -3.6780434982e-44 9.8774609324e-47 1.6051537956e-47C203 x6 y13 -7.0856968596e-44 1.0947818465e-46 7.5765740102e-47C205 x4 y15 -5.9451531662e-44 -2.0701018806e-46 3.0685532204e-46C207 x2 y17 -4.9260111842e-44 1.2649131424e-46 3.2042386522e-46C209 y19 1.1279377420e-44 2.9830532092e-46 1.2179193061e-45C210 x20 2.9820301078e-53 0.0000000000e+00 0.0000000000e+00C212 x18 y2 1.3525668121e-51 0.0000000000e+00 0.0000000000e+00C214 x16 y4 3.8760061847e-51 0.0000000000e+00 0.0000000000e+00C216 x14 y6 9.6404831616e-50 0.0000000000e+00 0.0000000000e+00C218 x12 y8 4.5278476455e-48 0.0000000000e+00 0.0000000000e+00C220 x10 y10 4.7283501107e-47 0.0000000000e+00 0.0000000000e+00C222 x8 y12 2.1389836909e-46 0.0000000000e+00 0.0000000000e+00C224 x6 y14 4.5797064212e-46 0.0000000000e+00 0.0000000000e+00C226 x4 y16 2.1705055744e-46 0.0000000000e+00 0.0000000000e+00C228 x2 y18 -6.6015977113e-46 0.0000000000e+00 0.0000000000e+00C230 y20 -5.5137200207e-46 0.0000000000e+00 0.0000000000e+00C232 x20 y 4.3770770176e-55 0.0000000000e+00 0.0000000000e+00C234 x18 y3 2.5361291606e-53 0.0000000000e+00 0.0000000000e+00C236 x16 y5 6.5216328062e-52 0.0000000000e+00 0.0000000000e+00C238 x14 y7 9.5793812181e-51 0.0000000000e+00 0.0000000000e+00C240 x12 y9 7.7689167317e-50 0.0000000000e+00 0.0000000000e+00C242 x10 y11 3.7300911007e-49 0.0000000000e+00 0.0000000000e+00C244 x8 y13 1.0815623832e-48 0.0000000000e+00 0.0000000000e+00C246 x6 y15 1.7412263377e-48 0.0000000000e+00 0.0000000000e+00C248 x4 y17 1.2649341080e-48 0.0000000000e+00 0.0000000000e+00C250 x2 y19 1.3285440607e-48 0.0000000000e+00 0.0000000000e+00C252 y21 2.9578233223e-49 0.0000000000e+00 0.0000000000e+00C253 x22 -1.1341356791e-58 0.0000000000e+00 0.0000000000e+00C255 x20 y2 -4.0929190034e-57 0.0000000000e+00 0.0000000000e+00C257 x18 y4 5.1219857001e-56 0.0000000000e+00 0.0000000000e+00C259 x16 y6 1.3480848320e-54 0.0000000000e+00 0.0000000000e+00C261 x14 y8 -9.1794891737e-55 0.0000000000e+00 0.0000000000e+00C263 x12 y10 -1.4418372441e-52 0.0000000000e+00 0.0000000000e+00C265 x10 y12 -1.0652000112e-51 0.0000000000e+00 0.0000000000e+00C267 x8 y14 -3.5007504470e-51 0.0000000000e+00 0.0000000000e+00C269 x6 y16 -4.6269500116e-51 0.0000000000e+00 0.0000000000e+00C271 x4 y18 4.7121988936e-51 0.0000000000e+00 0.0000000000e+00C273 x2 y20 1.6241972028e-50 0.0000000000e+00 0.0000000000e+00C275 y22 5.1233331975e-51 0.0000000000e+00 0.0000000000e+00C277 x22 y -9.1803615676e-61 0.0000000000e+00 0.0000000000e+00C279 x20 y3 -7.1583937735e-59 0.0000000000e+00 0.0000000000e+00C281 x18 y5 -1.9949869147e-57 0.0000000000e+00 0.0000000000e+00C283 x16 y7 -3.4695814130e-56 0.0000000000e+00 0.0000000000e+00C285 x14 y9 -3.4490791031e-55 0.0000000000e+00 0.0000000000e+00C287 x12 y11 -2.0896809387e-54 0.0000000000e+00 0.0000000000e+00C289 x10 y13 -8.1453944987e-54 0.0000000000e+00 0.0000000000e+00C291 x8 y15 -1.9967025913e-53 0.0000000000e+00 0.0000000000e+00C293 x6 y17 -2.7561214960e-53 0.0000000000e+00 0.0000000000e+00C295 x4 y19 -1.8368865409e-53 0.0000000000e+00 0.0000000000e+00C297 x2 y21 -2.2747144648e-53 0.0000000000e+00 0.0000000000e+00C299 y23 -9.6929602108e-54 0.0000000000e+00 0.0000000000e+00C300 x24 2.9601065731e-64 0.0000000000e+00 0.0000000000e+00C302 x22 y2 7.7997415649e-63 0.0000000000e+00 0.0000000000e+00C304 x20 y4 -3.1827174445e-61 0.0000000000e+00 0.0000000000e+00C306 x18 y6 -9.0791914103e-60 0.0000000000e+00 0.0000000000e+00C308 x16 y8 -7.5775942071e-59 0.0000000000e+00 0.0000000000e+00C310 x14 y10 -9.2282004054e-59 0.0000000000e+00 0.0000000000e+00C312 x12 y12 1.6286317720e-57 0.0000000000e+00 0.0000000000e+00C314 x10 y14 9.1792231167e-57 0.0000000000e+00 0.0000000000e+00C316 x8 y16 1.8681462887e-56 0.0000000000e+00 0.0000000000e+00C318 x6 y18 -1.8928329146e-56 0.0000000000e+00 0.0000000000e+00C320 x4 y20 -1.7622443664e-55 0.0000000000e+00 0.0000000000e+00C322 x2 y22 -2.3114570276e-55 0.0000000000e+00 0.0000000000e+00C324 y24 -1.0207465876e-56 0.0000000000e+00 0.0000000000e+00C326 x24 y 9.3828717882e-67 0.0000000000e+00 0.0000000000e+00C328 x22 y3 1.1708584951e-64 0.0000000000e+00 0.0000000000e+00C330 x20 y5 3.4664369531e-63 0.0000000000e+00 0.0000000000e+00C332 x18 y7 6.9845954433e-62 0.0000000000e+00 0.0000000000e+00C334 x16 y9 8.3220583276e-61 0.0000000000e+00 0.0000000000e+00C336 x14 y11 6.1311242644e-60 0.0000000000e+00 0.0000000000e+00C338 x12 y13 2.9980256867e-59 0.0000000000e+00 0.0000000000e+00C340 x10 y15 9.9254514997e-59 0.0000000000e+00 0.0000000000e+00C342 x8 y17 2.1003604032e-58 0.0000000000e+00 0.0000000000e+00C344 x6 y19 2.5377036925e-58 0.0000000000e+00 0.0000000000e+00C346 x4 y21 1.6277520120e-58 0.0000000000e+00 0.0000000000e+00C348 x2 y23 2.1857021116e-58 0.0000000000e+00 0.0000000000e+00C350 y25 1.0923541539e-58 0.0000000000e+00 0.0000000000e+00C351 x26 -4.7180872576e-70 0.0000000000e+00 0.0000000000e+00C353 x24 y2 -8.5602214207e-69 0.0000000000e+00 0.0000000000e+00C355 x22 y4 7.8943450824e-67 0.0000000000e+00 0.0000000000e+00C357 x20 y6 2.3812412774e-65 0.0000000000e+00 0.0000000000e+00C359 x18 y8 2.9268965745e-64 0.0000000000e+00 0.0000000000e+00C361 x16 y10 1.6784540257e-63 0.0000000000e+00 0.0000000000e+00C363 x14 y12 4.8538453838e-63 0.0000000000e+00 0.0000000000e+00C365 x12 y14 1.0823636035e-62 0.0000000000e+00 0.0000000000e+00C367 x10 y16 3.9332108854e-62 0.0000000000e+00 0.0000000000e+00C369 x8 y18 1.9877621116e-61 0.0000000000e+00 0.0000000000e+00C371 x6 y20 8.7740086801e-61 0.0000000000e+00 0.0000000000e+00C373 x4 y22 2.1772112153e-60 0.0000000000e+00 0.0000000000e+00C375 x2 y24 1.8114070321e-60 0.0000000000e+00 0.0000000000e+00C377 y26 -2.2401859276e-61 0.0000000000e+00 0.0000000000e+00C379 x26 y -2.3479545172e-73 0.0000000000e+00 0.0000000000e+00C381 x24 y3 -8.4498574916e-71 0.0000000000e+00 0.0000000000e+00C383 x22 y5 -2.6151328949e-69 0.0000000000e+00 0.0000000000e+00C385 x20 y7 -5.9815670396e-68 0.0000000000e+00 0.0000000000e+00C387 x18 y9 -8.4095228426e-67 0.0000000000e+00 0.0000000000e+00C389 x16 y11 -7.3608547531e-66 0.0000000000e+00 0.0000000000e+00C391 x14 y13 -4.3356073646e-65 0.0000000000e+00 0.0000000000e+00C393 x12 y15 -1.7964985809e-64 0.0000000000e+00 0.0000000000e+00C395 x10 y17 -5.1714785607e-64 0.0000000000e+00 0.0000000000e+00C397 x8 y19 -9.5598629521e-64 0.0000000000e+00 0.0000000000e+00C399 x6 y21 -1.0323023264e-63 0.0000000000e+00 0.0000000000e+00C401 x4 y23 -6.5799689862e-64 0.0000000000e+00 0.0000000000e+00C403 x2 y25 -8.9455542453e-64 0.0000000000e+00 0.0000000000e+00C405 y27 -4.5761361858e-64 0.0000000000e+00 0.0000000000e+00C406 x28 3.4387811745e-76 0.0000000000e+00 0.0000000000e+00C408 x26 y2 4.3499774294e-75 0.0000000000e+00 0.0000000000e+00C410 x24 y4 -7.6006209746e-73 0.0000000000e+00 0.0000000000e+00C412 x22 y6 -2.3846334107e-71 0.0000000000e+00 0.0000000000e+00C414 x20 y8 -3.6034461576e-70 0.0000000000e+00 0.0000000000e+00C416 x18 y10 -2.9642563509e-69 0.0000000000e+00 0.0000000000e+00C418 x16 y12 -1.5143932715e-68 0.0000000000e+00 0.0000000000e+00C420 x14 y14 -6.3519878015e-68 0.0000000000e+00 0.0000000000e+00C422 x12 y16 -2.5320202602e-67 0.0000000000e+00 0.0000000000e+00C424 x10 y18 -8.2696177149e-67 0.0000000000e+00 0.0000000000e+00C426 x8 y20 -2.3051022211e-66 0.0000000000e+00 0.0000000000e+00C428 x6 y22 -5.8437727422e-66 0.0000000000e+00 0.0000000000e+00C430 x4 y24 -1.0031325862e-65 0.0000000000e+00 0.0000000000e+00C432 x2 y26 -6.0881930479e-66 0.0000000000e+00 0.0000000000e+00C434 y28 1.4260871048e-66 0.0000000000e+00 0.0000000000e+00Table 3a for Fig. 9Coefficient Formula M04 M05 M06C2 y -4.1271016279e-05 6.6228623118e-05 1.3883528068e-04C7 x2 y -4.3095960132e-09 -1.4635617534e-08 2.7221581097e-07C9 y3 5.7663589631e-08 3.0577026460e-09 -8.6520114203e-08C10 x4 -1.4756888301e-10 -9.8000376585e-11 1.5648900374e-10C12 x2 y2 4.9422672770e-12 -3.0984336561e-11 -4.3375863589e-10C14 y4 8.2788574769e-11 -1.2640022586e-11 1.0364846923e-10C16 x4 y -3.4144098742e-14 -9.5787617573e-15 -6.3765595524e-13C18 x2 y3 -1.1388039281e-13 -2.1543638952e-14 4.7833942517e-13C20 y5 1.7206732511e-13 3.1706738099e-15 -4.5463586742e-13C21 x6 -1.5696809972e-16 -2.0174274645e-17 -2.4259686007e-16C23 x4 y2 4.8185242740e-17 -6.6895344754e-17 8.5862263266e-16C25 x2 y4 -2.5685523993e-16 -2.7939768850e-17 -2.9019645479e-15C27 y6 3.9761867261e-17 -1.0112967277e-17 4.2881111158e-16C29 x6 y 1.4789774174e-20 -1.6603607965e-20 7.9995221195e-19C31 x4 y3 2.8111183433e-19 -2.7152841085e-20 -7.4358097716e-18C33 x2 y5 -1.8148509471e-18 -1.9445670974e-20 3.0181482594e-18C35 y7 -4.8513830167e-18 3.7599389409e-21 -2.6452995098e-18C36 x8 2.7467791082e-21 -1.7437718235e-22 2.6638213111e-22C38 x6 y2 -5.5566309910e-22 -3.7416846732e-23 -9.3355441595e-21C40 x4 y4 3.1045385667e-21 -9.7082951965e-23 8.5997698492e-21C42 x2 y6 1.9012367051e-20 -3.8859069003e-23 -1.9579065084e-20C44 y8 7.8402759675e-20 -1.0441663560e-23 -1.1303105490e-21C46 x8 y -6.0026583179e-25 2.2296359028e-25 -7.1692603752e-24C48 x6 y3 -3.1584407272e-24 -2.5374105781e-25 1.2236307593e-23C50 x4 y5 2.5551321253e-24 -1.2343318652e-25 -4.5721957792e-23C52 x2 y7 8.2452274416e-23 -4.5048707194e-26 -1.0572287648e-23C54 y9 1.9769608543e-22 3.3385495429e-27 -8.3346355398e-23C55 x10 -2.5469234652e-26 1.5071098262e-27 -2.2126351797e-27C57 x8 y2 8.5460193561e-27 -3.7362816256e-28 -2.8313922016e-28C59 x6 y4 -2.9231386280e-26 -3.6371841564e-28 -2.3462226523e-26C61 x4 y6 -4.6279800660e-25 -3.3942800821e-28 -1.0324171224e-25C63 x2 y8 -3.0076621311e-24 -1.0819161456e-28 -7.8285662374e-25C65 y10 -9.7929862987e-24 -2.5444668942e-29 -3.3273826094e-25C67 x10 y 9.7761426381e-31 -4.6024028730e-30 3.3503871105e-30C69 x8 y3 4.6701911734e-29 5.8572706006e-31 7.6041096481e-29C71 x6 y5 3.3259099194e-28 -7.6466288325e-31 -8.0406130261e-28C73 x4 y7 2.6594897691e-27 -7.2543438083e-32 -4.2747719512e-27C75 x2 y9 1.3704812011e-26 1.3016314436e-31 -3.2291016793e-27C77 y11 4.6885554122e-26 7.1059613502e-33 -7.0870432303e-28C78 x12 1.3417315161e-31 -7.5340628446e-33 -2.3787386720e-33C80 x10 y2 -7.6046553991e-32 -1.9995207731e-34 3.3029405385e-31C82 x8 y4 -2.4997980321e-33 -1.7193093911e-33 -2.8285794471e-30C84 x6 y6 2.3562061854e-30 1.5667448094e-33 -1.4762980315e-29C86 x4 y8 2.1231631697e-29 2.0592496240e-33 -1.4926322717e-29C88 x2 y10 1.0917898820e-28 4.4964389038e-34 -1.5630960170e-29C90 y12 2.8461803870e-28 1.4732048005e-34 1.1370118114e-30C92 x12 y 2.0459897340e-35 3.0456226521e-35 1.8698544178e-34C94 x10 y3 -3.3551568124e-34 -9.9141739046e-36 -5.3202191356e-33C96 x8 y5 -3.2124538141e-33 1.0606369753e-36 -3.0462701827e-32C98 x6 y7 -3.9392381269e-32 4.7488554271e-36 -3.8029897788e-32C100 x4 y9 -3.2406206565e-31 5.5033669790e-38 -7.8836878777e-32C102 x2 y11 -1.3274227992e-30 -4.0696932159e-37 -1.2440941591e-32C104 y13 -3.4973570044e-30 -1.7636573584e-38 -2.1272785750e-32C105 x14 -4.3934034611e-37 2.4418304511e-38 1.1510117789e-37C107 x12 y2 3.8248745534e-37 2.2038141832e-39 -8.4769184402e-36C109 x10 y4 1.6411813288e-36 1.6675079812e-38 -3.9271236682e-35C111 x8 y6 6.1684440087e-36 1.9122176261e-39 -4.5322590781e-35C113 x6 y8 1.2758640231e-34 -2.4466470272e-38 -2.2258758389e-34C115 x4 y10 1.1981794196e-33 -1.1020581634e-38 1.2323130611e-35C117 x2 y12 4.4469442654e-33 -2.8985462753e-39 -1.1534922236e-34C119 y14 9.9438065340e-33 -8.9347061469e-40 -1.4823614655e-34C121 x14 y -1.5720863830e-40 -1.1477569743e-40 -5.3968593847e-39C123 x12 y3 1.0987467985e-39 4.8825321207e-41 -3.7713161700e-38C125 x10 y5 9.2508692118e-39 3.9768174235e-41 -1.2922781890e-38C127 x8 y7 1.1146463019e-37 -3.5559507876e-41 -4.2543229597e-37C129 x6 y9 1.0770676212e-36 -2.8437578461e-41 2.5358018953e-37C131 x4 y11 1.4948036017e-36 -6.9638037949e-42 -1.6364940217e-37C133 x2 y13 -5.1471221511e-37 8.0733613194e-43 -4.1091831190e-37C135 y15 9.8241790954e-36 3.8539187711e-43 -4.5292892995e-37C136 x16 8.1671028322e-43 -4.9423609672e-44 -1.9496137937e-42C138 x14 y2 -1.0110525971e-42 -8.1560342061e-45 -6.9369535956e-43C140 x12 y4 -9.6437587554e-42 -6.7289186873e-44 2.8689783378e-41C142 x10 y6 -5.8146170691e-41 -5.7641478466e-44 -6.8456679907e-40C144 x8 y8 -9.7213402264e-40 9.1313987629e-44 7.7614322166e-40C146 x6 y10 -1.2362033046e-38 8.5311178517e-44 1.3827880127e-41C148 x4 y12 -1.7341315549e-38 2.7037103904e-44 -3.8861191796e-40C150 x2 y14 -2.0825040417e-38 7.5510924806e-45 -8.6990574762e-40C152 y16 -4.8102586361e-38 2.2259863197e-45 -7.4950839922e-40C154 x16 y 5.0766122025e-46 2.4647491285e-46 1.1363435005e-44C156 x14 y3 -1.1211045463e-45 -1.1448456061e-46 1.5883794064e-43C158 x12 y5 4.4330010313e-45 -2.6444814292e-46 -8.8342631950e-43C160 x10 y7 2.8135426294e-44 -3.3330315425e-49 8.5181226887e-43C162 x8 y9 4.3025019344e-42 1.6769318207e-46 7.5208447617e-43C164 x6 y11 5.1621128741e-41 9.5843258829e-47 -4.9207864539e-43C166 x4 y13 2.4035757649e-42 2.3209359951e-47 -4.0059187655e-43C168 x2 y15 -1.1699994525e-41 -2.6018030260e-48 -9.5264959999e-43C170 y17 -3.5068089342e-40 -1.4218021792e-48 -7.4199396522e-43C171 x18 -6.5083126458e-49 4.5262659551e-50 6.6932437387e-48C173 x16 y2 1.0682304521e-48 6.2341853168e-51 1.1413722890e-46C175 x14 y4 1.7910296221e-47 6.6399381289e-50 -3.5293474956e-46C177 x12 y6 1.0087727388e-46 2.2799842700e-50 -1.5868042414e-46C179 x10 y8 7.3077280569e-47 -2.2437557194e-49 1.4631024897e-45C181 x8 y10 -9.9419278987e-45 -2.9019347731e-49 -7.2208389166e-46C183 x6 y12 -1.0335491678e-43 -1.2586856579e-49 4.7892866997e-46C185 x4 y14 1.6673343971e-43 -3.6234448437e-50 -1.1572227841e-45C187 x2 y16 1.6436012612e-43 -8.9331321661e-51 2.7570268572e-46C189 y18 1.6949999847e-42 -2.5438527484e-51 -6.9941451725e-46C191 x18 y -6.1606217649e-52 -2.2738699905e-52 3.8215007691e-50C193 x16 y3 -9.3230632275e-52 8.3820493236e-53 -1.0938774664e-49C195 x14 y5 -4.9277651909e-50 3.5131086421e-52 1.5625050443e-49C197 x12 y7 -8.9435115412e-50 1.4729945033e-54 -5.4336274300e-49C199 x10 y9 -1.0470847126e-49 -4.5238558718e-52 1.9886797843e-48C201 x8 y11 9.4901017064e-48 -3.9381780559e-52 -3.0170951880e-48C203 x6 y13 8.2778182810e-47 -1.6971697846e-52 3.3960143407e-48C205 x4 y15 -2.9250446257e-46 -2.7586480748e-53 -3.1592766653e-48C207 x2 y17 -1.6429222158e-46 3.5149328335e-54 1.8944559907e-48C209 y19 -2.0731540240e-45 2.1322959933e-54 -7.2720088937e-49Table 3b for Fig. 9Coefficient Formula M07 M08 M09C2 y -1.1238298130e-05 1.6543311066e-04 2.5092644396e-03C7 x2 y -7.8285550908e-08 -2.5045647724e-07 -2.5954860386e-06C9 y3 -3.9779649197e-08 1.4623764585e-08 2.0818124775e-06C10 x4 4.7793698451e-11 5.5054540032e-10 1.2111558434e-09C12 x2 y2 1.2066006176e-10 -5.0593571712e-12 5.9038317379e-09C14 y4 -2.6867259534e-11 2.0154778666e-10 4.1867190148e-09C16 x4 y -2.0278959149e-13 -1.8994427744e-13 -6.1701901858e-12C18 x2 y3 1.0296801362e-13 -2.2499902544e-12 -1.2972470738e-11C20 y5 -2.0442226437e-14 -1.3811597328e-13 7.6151225317e-11C21 x6 4.2987224748e-17 1.1605565664e-15 1.8340659152e-15C23 x4 y2 -2.5033135767e-16 9.8581891000e-15 2.7656236172e-14C25 x2 y4 1.5799337686e-16 8.9687123087e-16 6.9412880461e-14C27 y6 4.4465430639e-17 1.2463589153e-15 4.0328210719e-13C29 x6 y -5.1508208723e-20 -1.7669175596e-17 -1.0975021901e-16C31 x4 y3 -1.1270494435e-19 -2.9420265657e-18 -5.1750584449e-16C33 x2 y5 7.4510042818e-22 -3.2346267251e-17 -5.1704147805e-16 C94 x10 y3 -2.7427249808e-33 3.9134574272e-29 1.0721973939e-29C96 x8 y5 -8.7252405433e-33 6.3618520695e-29 1.0455579842e-28C98 x6 y7 -1.1939930740e-32 2.6535568170e-29 1.0422995327e-27C100 x4 y9 -4.5919668337e-33 -1.4782125627e-29 -3.1368470853e-28C102 x2 y11 -1.2895713063e-33 -2.3015865394e-29 -1.8226267009e-26C104 y13 -4.2752216255e-33 -1.9131386895e-30 4.4645050838e-26C105 x14 3.2150977794e-37 6.0179429192e-34 8.4874274981e-34C107 x12 y2 1.9936848491e-36 9.1545342111e-32 -7.6280100908e-32C109 x10 y4 2.5836465136e-36 6.6868813633e-31 -1.7290758836e-30C111 x8 y6 -1.7311185986e-36 1.0038626228e-30 -1.3330379832e-29C113 x6 y8 -8.6605702901e-36 3.0955688776e-31 -4.3671630437e-29C115 x4 y10 7.0920227330e-36 8.3805707151e-32 -2.8827952274e-29C117 x2 y12 4.5363419074e-35 1.5946418701e-33 -3.9745920424e-28C119 y14 3.3115460759e-35 -3.3513367096e-32 -3.3699077929e-28C121 x14 y 2.6065084458e-39 -3.4200485941e-35 -1.0021875163e-34C123 x12 y3 2.4802203597e-38 -2.2061967917e-33 2.3629859437e-34C125 x10 y5 9.1885618997e-38 -6.1042813334e-33 7.8153775377e-33C127 x8 y7 1.9950822515e-37 -5.0029676118e-33 4.7878211651e-32C129 x6 y9 1.7112031100e-37 -1.3227744026e-33 -2.2243767740e-32C131 x4 y11 4.1920256130e-38 1.2115706060e-33 6.7930603265e-31C133 x2 y13 -8.7751135248e-39 9.9865733015e-34 2.0936206434e-30C135 y15 2.0512655230e-38 9.9480729057e-35 -6.1064451242e-30C136 x16 -1.5254941386e-42 2.6592457557e-40 -9.4067861243e-39C138 x14 y2 -1.2688352052e-41 -2.2168878228e-36 1.7476399370e-36C140 x12 y4 -2.0936549804e-41 -2.2671790721e-35 4.6306387218e-35C142 x10 y6 -1.9702722616e-41 -5.3136389798e-35 4.5795874086e-34C144 x8 y8 4.9973618935e-41 -2.9436209212e-35 2.6652983797e-33C146 x6 y10 5.6544359476e-41 -2.6650562053e-36 6.2334935376e-33C148 x4 y12 -1.5610566114e-40 -7.0615396368e-36 2.6157205285e-33C150 x2 y14 -4.7713834044e-40 -2.5971291774e-36 6.0722900061e-32C152 y16 -2.9284932059e-40 6.6039756297e-37 4.7384309095e-33C154 x16 y -1.2579223248e-44 9.1352058742e-43 1.6368643767e-39C156 x14 y3 -1.2325545424e-43 6.2594014548e-38 -1.6946670969e-38C158 x12 y5 -4.7868531159e-43 2.5777255515e-37 -4.6724021889e-37C160 x10 y7 -1.4037820105e-42 3.2954383427e-37 -4.5541420873e-36C162 x8 y9 -1.9152375931e-42 1.4909612802e-37 -1.8409018796e-35C164 x6 y11 -1.1503279622e-42 1.2957819127e-38 -1.3353587211e-35C166 x4 y13 -5.1960759978e-44 -2.3265716685e-38 -1.7079131195e-34C168 x2 y15 4.3608479288e-43 -1.5477936299e-38 -2.0856466208e-35C170 y17 1.2901535454e-43 -2.6108014751e-39 4.1429609957e-34C171 x18 2.9203296430e-48 -7.8591932088e-44 4.6930139658e-44C173 x16 y2 2.9217933121e-47 2.1628132099e-41 -2.5823339265e-41C291 x8 y15 0.0000000000e+00 0.0000000000e+00 1.3598139251e-47C293 x6 y17 0.0000000000e+00 0.0000000000e+00 3.2124413895e-47C295 x4 y19 0.0000000000e+00 0.0000000000e+00 1.6061411791e-47C297 x2 y21 0.0000000000e+00 0.0000000000e+00 8.3352651555e-50C299 y23 0.0000000000e+00 0.0000000000e+00 -1.6710208454e-47C300 x24 0.0000000000e+00 0.0000000000e+00 3.8566844508e-59C302 x22 y2 0.0000000000e+00 0.0000000000e+00 8.4888429673e-57C304 x20 y4 0.0000000000e+00 0.0000000000e+00 -2.4893325549e-55C306 x18 y6 0.0000000000e+00 0.0000000000e+00 -4.4088341547e-55C308 x16 y8 0.0000000000e+00 0.0000000000e+00 -7.1582793750e-53C310 x14 y10 0.0000000000e+00 0.0000000000e+00 -1.3547780273e-52C312 x12 y12 0.0000000000e+00 0.0000000000e+00 -3.0662751690e-51C314 x10 y14 0.0000000000e+00 0.0000000000e+00 1.0800465441e-50 Table 3c for Fig. 9Coefficient Formula M10C2 y 4.0437650548e-04C7 x2 y -1.4356277896e-08C9 y3 1.3110827176e-08C10 x4 3.0730903242e-11C12 x2 y2 -8.4741428581e-11C14 y4 -1.5091968127e-11C16 x4 y -7.4583443802e-14C18 x2 y3 -3.4057441514e-15C20 y5 2.4753004487e-14C21 x6 1.0601223781e-17C23 x4 y2 -1.4783154893e-16C25 x2 y4 -2.1912334176e-16C27 y6 -3.4684928924e-17C29 x6 y -9.9485968780e-20C31 x4 y3 -1.2215024879e-19C33 x2 y5 3.6802730304e-20C35 y7 5.6412375108e-20C36 x8 -1.5524350093e-22C38 x6 y2 -3.8294424590e-22C40 x4 y4 -8.7766910455e-22C42 x2 y6 -5.9354500972e-22C44 y8 -6.2477874021e-23C46 x8 y -9.0526961674e-26C48 x6 y3 -6.1207102239e-25C50 x4 y5 -6.3761418029e-25C52 x2 y7 -6.0597943419e-26 C61 x4 y6 1.7826334431e-27C63 x2 y8 1.0346065508e-27C375 x2 y24 5.8523922651e-72C377 y26 -3.3757772605e-72C379 x26 y -7.6725945704e-75C381 x24 y3 -1.0985475606e-73C383 x22 y5 -9.2418216350e-73C385 x20 y7 -4.1956398254e-72C387 x18 y9 -1.1715937307e-71C389 x16 y11 -2.1859722909e-71C391 x14 y13 -2.9324206016e-71C393 x12 y15 -2.9434126895e-71C395 x10 y17 -2.1131408467e-71C397 x8 y19 -9.8654148328e-72C399 x6 y21 -2.6172274304e-72C401 x4 y23 -3.0014886956e-73C403 x2 y25 4.3747106411e-74 Table 3d for Fig. 9Coordinates of the stop edge xi [mm] yi [mm] xi+N / 2 [mm] yi+N / 2 [mm]-346.911342 -49.631908 347.552169 -60.577464-346.129723 -44.116600 347.410657 -65.999642-345.042714 -38.578624 346.962308 -71.383069-343.653065 -33.022434 346.209129 -76.724278-341.964452 -27.452597 345.154031 -82.020061-339.981449 -21.873756 343.800791 -87.267477-337.709491 -16.290600 342.154006 -92.463850-335.154827 -10.707826 340.219035 -97.606769-332.324468 -5.130105 338.001939 -102.694079-329.226135 0.437950 335.509412 -107.723870-325.868192 5.991819 332.748710 -112.694456-322.259584 11.527099 329.727579 -117.604359-318.409768 17.039528 326.454173 -122.452287-314.328639 22.525009 322.936986 -127.237107-310.026463 27.979621 319.184776 -131.957822-305.513797 33.399638 315.206494 -136.613544-300.801416 38.781533 311.011220 -141.203471-295.900240 44.121990 306.608101 -145.726862-290.821263 49.417907 302.006294 -150.183016-285.575483 54.666399 297.214918 -154.571249-280.173841 59.864799 292.243011 -158.890880-274.627157 65.010651 287.099490 -163.141210-268.946076 70.101701 281.793121 -167.321515-263.141022 75.135885 276.332490 -171.431026-257.222146 80.111316 270.725985 -175.468927-251.199290 85.026261 264.981774 -179.434340-245.081947 89.879123 259.107792 -183.326323-238.879231 94.668419 253.111730 -187.143863-232.599846 99.392757 247.001028 -190.885870-226.252062104.050811 240.782869 -194.551177-219.843697108.641291 234.464170 -198.138534-213.382101113.162913 228.051587 -201.646610-206.874143117.614366 221.551508 -205.073991-200.326207121.994272 214.970054 -208.419180-193.744186126.301145 208.313080 -211.680603-187.133486130.533350 201.586177 -214.856606-180.499028134.689058 194.794673 -217.945466-173.845260138.766202 187.943635 -220.945391-167.176161142.762434 181.037871 -223.854533-160.495263146.675083 174.081938 -226.670991-153.805661150.501112 167.080141 -229.392824-147.110030154.237080 160.036541 -232.018055-140.410645157.879104 152.954955 -234.544685-133.709399161.422820 145.838968 -236.970701-127.007827164.863359 138.691931 -239.294083-120.307121168.195322 131.516973 -241.512820-113.608164171.412767 124.317001 -243.624915-106.911550174.509215 117.094707 -245.628398-100.217620177.477662 109.852578 -247.521339-93.526497180.310620 102.592899 -249.301859-86.838117183.000169 95.317760 -250.968142-80.152276185.538035 88.029070 -252.518448-73.468665187.915684 80.728560 -253.951126-66.786907190.124437 73.417798 -255.264624-60.106600192.155600 66.098200 -256.457499-53.427342194.000613 58.771042 -257.528429-46.748764195.651202 51.437476 -258.476218-40.070548197.099549 44.098539 -259.299802-33.392446198.338451 36.755176 -259.998256-26.714282199.361484 29.408246 -260.570793-20.035958200.163159 22.058543 -261.016768-13.357443200.739048 14.706805 -261.335680-6.678767201.085905 7.353733 -261.5271700.000000201.201747 0.000000 -261.5910246.678767201.085905 -7.353733 -261.52717013.357443200.739048 -14.706805 -261.33568020.035958200.163159 -22.058543 -261.01676826.714282199.361484 -29.408246 -260.57079333.392446198.338451 -36.755176 -259.99825640.070548197.099549 -44.098539 -259.29980246.748764195.651202 -51.437476 -258.47621853.427342194.000613 -58.771042 -257.52842960.106600192.155600 -66.098200 -256.45749966.786907190.124437 -73.417798 -255.26462473.468665187.915684 -80.728560 -253.95112680.152276185.538035 -88.029070 -252.51844886.838117183.000169 -95.317760 -250.96814293.526497180.310620 -102.592899 -249.30185900.217620177.477662 -109.852578 -247.52133906.911550174.509215 -117.094707 -245.62839813.608164171.412767 -124.317001 -243.62491520.307121168.195322 -131.516973 -241.51282027.007827164.863359 -138.691931 -239.29408333.709399161.422820 -145.838968 -236.97070140.410645157.879104 -152.954955 -234.54468547.110030154.237080 -160.036541 -232.01805553.805661150.501112 -167.080141 -229.39282460.495263146.675083 -174.081938 -226.67099167.176161142.762434 -181.037871 -223.85453373.845260138.766202 -187.943635 -220.94539180.499028134.689058 -194.794673 -217.94546687.133486130.533350 -201.586177 -214.85660693.744186126.301145 -208.313080 -211.68060300.326207121.994272 -214.970054 -208.41918006.874143117.614366 -221.551508 -205.07399113.382101113.162913 -228.051587 -201.64661019.843697108.641291 -234.464170 -198.13853426.252062104.050811 -240.782869 -194.55117732.599846 99.392757 -247.001028 -190.885870238.879231 94.668419 -253.111730 -187.143863245.081947 89.879123 -259.107792 -183.326323251.199290 85.026261 -264.981774 -179.434340257.222146 80.111316 -270.725985 -175.468927263.141022 75.135885 -276.332490 -171.431026268.946076 70.101701 -281.793121 -167.321515274.627157 65.010651 -287.099490 -163.141210280.173841 59.864799 -292.243011 -158.890880285.575483 54.666399 -297.214918 -154.571249290.821263 49.417907 -302.006294 -150.183016295.900240 44.121990 -306.608101 -145.726862300.801416 38.781533 -311.011220 -141.203471305.513797 33.399638 -315.206494 -136.613544310.026463 27.979621 -319.184776 -131.957822314.328639 22.525009 -322.936986 -127.237107318.409768 17.039528 -326.454173 -122.452287322.259584 11.527099 -329.727579 -117.604359325.868192 5.991819 -332.748710 -112.694456329.226135 0.437950 -335.509412 -107.723870332.324468 -5.130105 -338.001939 -102.694079335.154827 -10.707826 -340.219035 -97.606769337.709491 -16.290600 -342.154006 -92.463850339.981449 -21.873756 -343.800791 -87.267477341.964452 -27.452597 -345.154031 -82.020061343.653065 -33.022434 -346.209129 -76.724278345.042714 -38.578624 -346.962308 -71.383069346.129723 -44.116600 -347.410657 -65.999642346.911342 -49.631908 -347.552169 -60.577464347.385771 -55.120241 -347.385771 -55.120241Table 4 for Fig. 9Numerical aperture = 0.80 1 / βx= 4.00 1 / βy= -8.00Track length = 2300 mmObject-image shift = 4553 mmWidth of the installation space = 5136 mmOptically used overall mirror area = 3.83 m²Linear pupil obscuration = 17.6% Minimum angle on grazing incident mirror = 74.0°Scan slot length on the wafer = 0.9 mmScan-integrated wavefront RMS = 12.50 mλÉtendue = 47.0 mm²Mirror with maximum diameter = M5Maximum optical mirror diameter = 1259 mmMirror with maximum area = M10 Table 5 for Fig. 9Fig.10 shows a further embodiment of a projection optical unit or imaging optical unit 31, which can be used in the projection exposure apparatus 1 instead of the projection optical unit 10. Com- ponents and functions corresponding to those which have already been explained above with ref-erence to Figures 1 to 9 bear the same reference signs and will not be discussed in detail again.The basic structure of the projection optical unit 31 corresponds to that of the projection optical unit 27 according to Fig.6. On all GI mirrors M2 to M9 of the projection optical unit 31, the angles of incidence of the indi- vidual rays of the imaging light 16 are greater than 70°. The image-side numerical aperture-determining last mirror M11 in the imaging beam path of theprojection optical unit 31 has a mirror diameter that is less than 1300 mm and is 1290 mm.The optical design data for the projection optical unit 31 emerge from following Tables 1 to 5, which, in turn, correspond in terms of the basic structure to Tables 1 to 5 relating to the embodi- ment according to Figure 9. Radii of the surfaces Radiusx [mm] Powerx [1 / mm] Radiusy [mm] Powery [1 / mm]M01 -4537.57536740 0.00043313 -1751.00690852 0.00112242M02 36759.71852792 -0.00005441 2699.69737875 -0.00074082M03 -26172.92091360 0.00007641 -76534.27435256 0.00002613M04 -6655.39747384 0.00007778 -11816.10880059 0.00004381M05 -1531.55537333 0.00029943 -4990.28715426 0.00009190M06 -1014.56356286 0.00047515 -1737.56774247 0.00027744M07 -2407.51119825 0.00019971 -20975.66738755 0.00002292M08 3535.65654125 -0.00012459 -2952.49213864 0.00014919M09 -4912.52139571 0.00006940 2067.67669937 -0.00016488M10 13771.16709037 -0.00014523 370.24955627 -0.00540176M11 -960.09073510 0.00208314 -781.69767565 0.00255853Table 1 for Fig. 10Decentring (location, angle) the surfaces Dx [mm] Dy [mm] Dz [mm]Reticle 0.000000000 0.000000000 0.000000000M01 0.000000000 248.5391841242251.239766885M02 0.000000000 617.0297435921223.110315391M03 0.0000000001053.173154926 791.786384858M04 0.0000000001797.668024873 383.984305262M05 0.0000000002426.099791023 283.515721435M06 0.0000000002962.326068345 440.970453669M07 0.0000000003250.755488382 721.308702920M08 0.0000000003353.6762566021039.584098337M09 0.0000000003323.0697171141242.156407849obs11 0.0000000003478.7453661881639.226625916M10 0.0000000003716.8894741022246.642965102Stop 0.0000000003697.3895636812196.773740172M11 -0.0000000003479.3338011931639.116210866Wafer 0.0000000003479.3337970902364.636246296 Reticle 0.000000000 0.000000000 0.000000000M01 6.709061098 0.000000000 0.000000000M02 -57.481778404180.000000000 0.000000000M03 143.303149931 0.000000000 0.000000000M04 -18.897570912180.000000000 0.000000000M05 183.640478724 0.000000000 0.000000000M06 30.274527625180.000000000 0.000000000M07 238.132658590 0.000000000 0.000000000M08 85.336071702180.000000000 0.000000000M09 83.591803336 0.000000000 0.000000000obs11 -10.729927372 0.000000000180.000000000M10 -21.382367462 0.000000000180.000000000Stop 179.277766938 -0.000000000 0.000000000M11 169.321731032 -0.000000000 0.000000000Wafer 0.000000324 0.000000000180.000000000Table 2 for Fig. 10 Free-form coefficients of the surfacesCoefficient Formula M01 M02 M03C7 x2 y -6.7224030111e-09 3.0240240234e-08 2.0726722512e-09C9 y3 8.7634201005e-09 3.4917981408e-07 -2.0131669410e-08C10 x4 5.4478988425e-12 7.7424765306e-11 -2.1631522013e-11C12 x2 y2 5.0266909285e-11 -5.7160284330e-11 7.6898320533e-12C14 y4 -2.6401421548e-11 8.8167888872e-10 -2.8165664376e-11C16 x4 y -4.9121212179e-14 6.3663440428e-14 5.5588613022e-15C18 x2 y3 -5.7779635964e-14 1.5157154503e-14 2.0824017288e-15C20 y5 4.2494959849e-14 2.1009903061e-12 -3.0420923647e-14C21 x6 4.4224581985e-18 -7.3690731575e-17 -1.6528417272e-17C23 x4 y2 1.0859217907e-17 3.1649157751e-16 2.3360905457e-17C25 x2 y4 8.7542517466e-18 -1.4779412483e-16 -1.3938825132e-18C27 y6 1.6447017638e-19 5.3360625200e-15 -9.4564418843e-17C29 x6 y -7.3086284726e-21 -3.5157731750e-19 -2.3299631101e-19C31 x4 y3 4.1780962051e-20 2.9951320977e-19 6.8526860228e-20C33 x2 y5 4.1374800584e-19 -2.6805148886e-19 -1.0893728829e-19C35 y7 4.9685601363e-19 1.7075193217e-17 -4.1400355678e-21C36 x8 -1.6717399381e-23 1.2846925049e-21 -5.5276664895e-23C38 x6 y2 -2.8958195805e-22 -2.4721432713e-21 1.4291151691e-22C40 x4 y4 2.0739109479e-21 -7.0139431477e-21 5.0517532162e-23C42 x2 y6 4.2818109530e-21 1.0650722062e-21 4.3625090964e-22C44 y8 -3.2389114606e-21 3.8457516735e-20 -2.3810472505e-23C46 x8 y 5.4855680801e-25 -2.6821563304e-24 4.2092132970e-24C48 x6 y3 1.1440578377e-24 5.3553303036e-24 -6.9929372808e-25C50 x4 y5 -1.0798501113e-23 -1.7250242058e-23 1.4817174917e-24C52 x2 y7 -2.2080835261e-23 -2.0633867763e-23 4.9472579931e-25C54 y9 -1.1152920283e-23 -9.7061889403e-23 -4.7206480941e-25C55 x10 5.4018689884e-28 -1.0012105626e-26 1.5064976751e-27C57 x8 y2 1.0270246615e-26 6.3023308648e-26 -5.7530695221e-27C59 x6 y4 -5.9099576039e-26 3.3602016290e-25 -7.0304822896e-27C61 x4 y6 -4.7114139323e-25 4.0610697252e-25 3.5952739590e-28C63 x2 y8 -8.0598153071e-25 -2.3019376611e-25 1.4248479085e-27C65 y10 1.3384663105e-25 -1.1025587313e-24 5.1845585127e-28C67 x10 y -1.1088386915e-29 7.7764947948e-29 -6.4017362195e-29C69 x8 y3 -7.3494572096e-29 -1.4522416631e-28 1.5637626957e-29C71 x6 y5 2.4786999144e-28 7.4916038501e-28 -1.1301978721e-29C73 x4 y7 2.0778327099e-27 1.7375586380e-27 -2.8653518970e-29C75 x2 y9 1.8255420599e-27 -1.3849310188e-27 3.0376474255e-31C77 y11 3.7321839660e-28 -2.6827554507e-27 -3.1577997674e-30C78 x12 -1.1118983608e-32 1.0098888758e-31 -8.4150824733e-33C80 x10 y2 -2.3037726261e-31 -1.1062484638e-30 9.2844085465e-32C82 x8 y4 9.7947851779e-31 -7.7899930544e-30 1.9699116947e-31C84 x6 y6 1.5318557471e-29 -1.5490551634e-29 6.5720993436e-32C86 x4 y8 5.0659568791e-29 -1.2772681309e-29 -8.3048305439e-32C88 x2 y10 6.0579032636e-29 -4.8481894425e-30 -7.0781754016e-32C90 y12 -5.5352702321e-30 5.1700692029e-30 -3.6744184973e-32C92 x12 y 1.5650454606e-34 -7.8852024045e-34 6.2355067608e-34C94 x10 y3 1.7766471333e-33 2.2694250362e-33 -2.5120096706e-34C96 x8 y5 -1.7518032829e-33 -1.5882971156e-32 3.6049099078e-35C98 x6 y7 -7.3313631634e-32 -6.4588467118e-32 5.2486409262e-34C100 x4 y9 -2.0264362099e-31 -1.0014189649e-31 5.3376767319e-34C102 x2 y11 -1.1668796728e-31 -3.4991584333e-33 -2.0783823405e-34C104 y13 -2.1907269664e-32 4.2129068544e-32 1.2578078942e-34C105 x14 1.3391249210e-37 -5.4339694331e-37 -8.9189590302e-38C107 x12 y2 3.1912059681e-36 1.2688189873e-35 -8.2710021879e-37C109 x10 y4 -9.0770640121e-36 1.0285140993e-34 -2.7330255506e-36C111 x8 y6 -2.7706982881e-34 2.8258730727e-34 -2.0917278623e-36C113 x6 y8 -1.4079521058e-33 2.7530751295e-34 8.6128508286e-37C115 x4 y10 -3.0966896671e-33 -1.2533736573e-34 1.4587023063e-36C117 x2 y12 -2.8254308088e-33 -3.9873300455e-35 1.2849531003e-36C119 y14 2.1842736632e-34 1.2878955087e-35 3.3109034336e-37C121 x14 y -1.4875531789e-39 5.2742127693e-39 -3.7800071548e-39C123 x12 y3 -2.3708556458e-38 -1.9460856462e-38 2.3457775857e-39C125 x10 y5 -2.8213796516e-38 2.1415490088e-37 8.9343512065e-40C127 x8 y7 1.3034322141e-36 1.0145445869e-36 -4.5335530082e-39C129 x6 y9 6.8452659440e-36 1.6928999522e-36 -9.3924550905e-39C131 x4 y11 1.1516871054e-35 7.6756212267e-37 -4.6949780433e-39C133 x2 y13 5.5669014679e-36 -1.1222311936e-36 4.4610784970e-39C135 y15 1.3632234754e-36 -7.1499498155e-37 -2.3784347052e-39C136 x16 -1.0314840407e-42 1.3916211726e-42 1.3200870876e-42C138 x14 y2 -2.8344726294e-41 -9.1633404134e-41 4.4165287802e-42C140 x12 y4 3.9182981117e-41 -7.9084287677e-40 2.1833303552e-41C142 x10 y6 3.0374645069e-39 -2.7486603262e-39 2.5499860460e-41C144 x8 y8 2.1279259499e-38 -4.7239598443e-39 8.7328432757e-43C146 x6 y10 6.9588045141e-38 -5.6737656101e-40 -2.1577545545e-41C148 x4 y12 1.1754775725e-37 3.3163581892e-39 -9.7778949037e-42C150 x2 y14 8.5551181020e-38 -8.2056490290e-39 -1.6329757904e-41C152 y16 -7.7351167343e-39 -3.3260817576e-39 8.5242153376e-43C154 x16 y 9.4008866453e-45 -2.1710052268e-44 1.3872497216e-44C156 x14 y3 1.9136575538e-43 9.2269855060e-44 -1.2270266181e-44C158 x12 y5 7.0633862618e-43 -1.7434291241e-42 -1.0770299671e-44C160 x10 y7 -1.3209940176e-41 -1.0830661470e-41 1.7645232835e-44C162 x8 y9 -1.1030863071e-40 -2.2786610448e-41 6.3219283099e-44C164 x6 y11 -3.3139442647e-40 -1.3548737384e-41 8.8885948859e-44C166 x4 y13 -4.1257031084e-40 2.9677685873e-42 4.1286094825e-45C168 x2 y15 -1.8585041790e-40 -3.0001091370e-41 -3.1575363233e-44C170 y17 -4.9213437991e-41 -6.7222206525e-42 2.0739032924e-44C171 x18 5.1575044272e-48 6.9694208148e-49 -7.0318327537e-48C173 x16 y2 1.6183244785e-46 4.0660891204e-46 -1.3665095177e-47C175 x14 y4 3.4443083917e-47 3.4588631662e-45 -1.0055599639e-46C177 x12 y6 -2.0562574208e-44 1.2796741634e-44 -1.5909769588e-46C179 x10 y8 -1.8757229274e-43 2.9118954865e-44 -6.2060400762e-47C181 x8 y10 -8.2026738240e-43 2.6673520191e-44 1.3746921257e-46C183 x6 y12 -2.0277671318e-42 -2.4485068294e-44 1.4524717481e-46C185 x4 y14 -2.8236114333e-42 -3.6775892013e-44 5.8233427633e-47C187 x2 y16 -1.6654300696e-42 -6.5754865616e-44 1.1182717311e-46C189 y18 1.9148857040e-43 -4.1053541650e-45 -3.4826290003e-47C191 x18 y -3.8922962327e-50 5.1409052568e-50 -2.8129381269e-50C193 x16 y3 -9.4581922521e-49 -2.2848135066e-49 3.3916450313e-50C195 x14 y5 -6.4587551036e-48 7.2973198549e-48 4.4873256692e-50C197 x12 y7 7.7942056936e-47 5.9044408470e-47 -1.9729515558e-50C199 x10 y9 9.8221906463e-46 1.7604806580e-46 -1.9512624676e-49C201 x8 y11 4.3127633718e-45 1.8215103556e-46 -4.0048626395e-49C203 x6 y13 9.3320117685e-45 -1.3977285056e-46 -3.8365933242e-49C205 x4 y15 9.5170273911e-45 -2.3744985696e-46 1.2651595537e-49C207 x2 y17 4.0821154109e-45 -1.0319092013e-46 7.0394779304e-50C209 y19 1.0318103278e-45 7.5102766197e-48 -8.4252974432e-50C210 x20 -1.6280298184e-53 -1.0632005037e-53 1.7970895236e-53C212 x18 y2 -5.7533503131e-52 -1.0129806439e-51 2.2017987428e-53C214 x16 y4 -1.1321216169e-51 -7.9248822943e-51 2.4846490926e-52C216 x14 y6 8.3447784889e-50 -2.3181353276e-50 5.0266604235e-52C218 x12 y8 9.6635100557e-49 -3.4743312323e-50 3.5089146710e-52C220 x10 y10 5.2925613102e-48 -4.7264163148e-50 -3.1067669441e-52C222 x8 y12 1.7385655963e-47 -1.6873314323e-49 -9.1304016044e-52C224 x6 y14 3.4887491784e-47 -7.1047724913e-49 -4.2384967128e-52C226 x4 y16 4.1795651049e-47 -6.5960835150e-49 -3.4382706573e-52C228 x2 y18 1.9982136897e-47 -1.4482382441e-49 -3.2445850523e-52C230 y20 -2.8954913431e-48 1.2565720981e-50 2.0631079975e-52C232 x20 y 1.0106668674e-55 -5.3617014318e-56 2.4079356070e-56C234 x18 y3 2.7500615839e-54 2.0255975162e-55 -3.8895158544e-56C236 x16 y5 3.0406052121e-53 -1.2588540991e-53 -6.5707942515e-56C238 x14 y7 -2.5841671072e-52 -1.2843333411e-52 -2.3015241121e-56C240 x12 y9 -4.9260249194e-51 -5.4628048230e-52 2.3426222776e-55C242 x10 y11 -2.9072069568e-50 -1.1648235141e-51 5.6398644416e-55C244 x8 y13 -9.0041850924e-50 -1.3007120953e-51 1.0323847038e-54C246 x6 y15 -1.5479067829e-49 -1.3910041465e-51 4.9554535831e-55C248 x4 y17 -1.3774202093e-49 -8.8109655654e-52 -3.8085652974e-55C250 x2 y19 -5.5412689404e-50 -1.6564852477e-52 3.1864784841e-56C252 y21 -1.2653612417e-50 8.3624555730e-55 1.2128307755e-55C253 x22 2.9558967549e-59 1.4503714383e-59 -1.8436275827e-59C255 x20 y2 1.1601928534e-57 1.0808646768e-57 -1.3333666915e-59C257 x18 y4 4.4944089690e-57 7.0216457814e-57 -2.5490304971e-58C259 x16 y6 -1.8484350813e-55 -2.4284355207e-57 -6.3617569683e-58C261 x14 y8 -2.6876055373e-54 -1.7445223039e-55 -6.1465345215e-58C263 x12 y10 -1.7826277594e-53 -7.4034250334e-55 1.0502818976e-58C265 x10 y12 -7.2618498350e-53 -1.3949973377e-54 1.6094372656e-57C267 x8 y14 -1.9333990678e-52 -1.2689061311e-54 1.6758617214e-57C269 x6 y16 -3.2822463769e-52 -9.3488040601e-55 7.3303740932e-58C271 x4 y18 -3.4806883295e-52 -4.5660253096e-55 7.7678051031e-58C273 x2 y20 -1.3343241915e-52 -9.2940153967e-56 2.3624419847e-58C275 y22 2.3816630728e-53 -5.6549078041e-57 -3.8938081544e-58C277 x22 y -1.4870046797e-61 0.0000000000e+00 0.0000000000e+00C279 x20 y3 -4.1781091582e-60 0.0000000000e+00 0.0000000000e+00C281 x18 y5 -7.2889995200e-59 0.0000000000e+00 0.0000000000e+00C283 x16 y7 4.3017101139e-58 0.0000000000e+00 0.0000000000e+00C285 x14 y9 1.2977972632e-56 0.0000000000e+00 0.0000000000e+00C287 x12 y11 9.8889405417e-56 0.0000000000e+00 0.0000000000e+00C289 x10 y13 4.0014958776e-55 0.0000000000e+00 0.0000000000e+00C291 x8 y15 9.7588269140e-55 0.0000000000e+00 0.0000000000e+00C293 x6 y17 1.4079780339e-54 0.0000000000e+00 0.0000000000e+00C295 x4 y19 1.1396882572e-54 0.0000000000e+00 0.0000000000e+00C297 x2 y21 4.1780989431e-55 0.0000000000e+00 0.0000000000e+00C299 y23 8.5172513017e-56 0.0000000000e+00 0.0000000000e+00C300 x24 -2.3550630616e-65 0.0000000000e+00 0.0000000000e+00C302 x22 y2 -1.0145220176e-63 0.0000000000e+00 0.0000000000e+00C304 x20 y4 -6.0033156588e-63 0.0000000000e+00 0.0000000000e+00C306 x18 y6 1.7079399690e-61 0.0000000000e+00 0.0000000000e+00C308 x16 y8 3.1021586738e-60 0.0000000000e+00 0.0000000000e+00C310 x14 y10 2.4508809017e-59 0.0000000000e+00 0.0000000000e+00C312 x12 y12 1.1892937802e-58 0.0000000000e+00 0.0000000000e+00C314 x10 y14 3.9264497034e-58 0.0000000000e+00 0.0000000000e+00C316 x8 y16 8.8204044444e-58 0.0000000000e+00 0.0000000000e+00C318 x6 y18 1.3035259589e-57 0.0000000000e+00 0.0000000000e+00C320 x4 y20 1.2478020825e-57 0.0000000000e+00 0.0000000000e+00C322 x2 y22 3.7567865109e-58 0.0000000000e+00 0.0000000000e+00C324 y24 -8.1790862379e-59 0.0000000000e+00 0.0000000000e+00C326 x24 y 9.4322998384e-68 0.0000000000e+00 0.0000000000e+00C328 x22 y3 2.3754051290e-66 0.0000000000e+00 0.0000000000e+00C330 x20 y5 7.0183392811e-65 0.0000000000e+00 0.0000000000e+00C332 x18 y7 -2.5979513589e-64 0.0000000000e+00 0.0000000000e+00C334 x16 y9 -1.3941591714e-62 0.0000000000e+00 0.0000000000e+00C336 x14 y11 -1.3382389344e-61 0.0000000000e+00 0.0000000000e+00C338 x12 y13 -6.7619264326e-61 0.0000000000e+00 0.0000000000e+00C340 x10 y15 -2.1293687273e-60 0.0000000000e+00 0.0000000000e+00C342 x8 y17 -4.3290325427e-60 0.0000000000e+00 0.0000000000e+00C344 x6 y19 -5.4324879961e-60 0.0000000000e+00 0.0000000000e+00C346 x4 y21 -4.1105433469e-60 0.0000000000e+00 0.0000000000e+00C348 x2 y23 -1.3291409737e-60 0.0000000000e+00 0.0000000000e+00C350 y25 -2.4465803389e-61 0.0000000000e+00 0.0000000000e+00Table 3a for Fig. 10Coefficient Formula M04 M05 M06C7 x2 y -5.3753724641e-08 1.15687...

Claims

Claims1. Imaging optical unit (10; 24; 25; 26; 27; 28; 29; 30; 31; 32; 33; 34; 35; 36; 37) for projectionlithography, for imaging an object field (5), in which a reticle (7) to be imaged is arrangea- ble, into an image field (11), in which a substrate (13) to be exposed is arrangeable, -having a plurality of mirrors (M1 to M8; M1 to M9; M1 to M10; M1 to M11) for guidingimaging light (16) along an imaging beam path from the object field (5) to the image field (11), -having an image-side numerical aperture greater than 0.75,- having an étendue greater than 45 mm².

2. Imaging optical unit according to Claim 1, characterized by a distance of less than2500 mm between an object plane (6), in which the object field (5) is arranged, and an im-age plane (12), in which the image field (11) is arranged.

3. Imaging optical unit according to Claim 1 or 2, characterized by a last mirror (M9; M10;M11) in the imaging beam path upstream of the image field (11), the diameter of which is less than 1300 mm.

4. Imaging optical unit according to any of Claims 1 to 3, characterized by an overall mirrorarea of less than 3.5 m2 for the used reflection surfaces of all mirrors.

5. Imaging optical unit according to any of Claims 1 to 4, characterized in that all mirrors inthe imaging beam path upstream of the last mirror have an extent of less than 1000 mmalong a maximum installation space dimension (y) of the imaging optical unit.

6. Imaging optical unit according to any of Claims 1 to 5, characterized in that all mirrorshave an extent of less than 1000 mm perpendicular to a meridional plane (yz) of the imagingoptical unit.

7. Imaging optical unit according to any of Claims 1 to 6, characterized by a working distanceof greater than 75 mm between a reflection surface of a penultimate mirror (M8; M9; M10)in the imaging beam path and the image field (11).

8. Imaging optical unit according to any of Claims 1 to 7, characterized by a linear pupil ob-scuration of less than 25%.

9. Imaging optical unit according to any of Claims 1 to 8, characterized by at least one GImirror (M2, M3, M5, M6; M2 to M7; M2 to M9; M2 to M8).

10. Imaging optical unit according to Claim 9, characterized by at least two GI mirrors.

11. Imaging optical unit according to any of Claims 1 to 10, characterized by an overall trans-mission of greater than 4.8%.

12. Imaging optical unit according to any of Claims 1 to 11, characterized by an object-imageshift (dOIS) of less than 4000 mm.

13. Imaging optical unit according to any of Claims 1 to 12, characterized by a distance ofgreater than 500 mm between a reflection surface of the first mirror (M1) in the imagingbeam path and the image plane (12).

14. Optical system- having an illumination optical unit (4) for illuminating the object field (5) with the imaginglight (16),- having an imaging optical unit (10; 24; 25; 26; 27; 28; 29; 30; 31; 32; 33; 34; 35; 36; 37) ac-cording to any of Claims 1 to 13.

15. Projection exposure apparatus having an optical system according to Claim 14 and havingan EUV light source (3).

16. Method for producing a structured component, including the following method steps:- providing a reticle (7) and a wafer (13),- projecting a structure on the reticle (7) onto a light-sensitive layer of the wafer (13) using theprojection exposure apparatus according to Claim 15,- creating a microstructure or nanostructure on the wafer (13).

17. Structured component, produced by a method according to Claim 16.

Images