Movement system, movement control method, measurement system, and measurement method

Abstract

This movement system comprises a movement device disposed at a position fixed to a movable portion of a manipulator, the movement device being capable of moving each of first and second objects that perform processing on the target object with respect to the manipulator. In at least part of a period in which the first object is being moved in a first movement direction, the movement device moves the second object in a second movement direction including a direction component that is opposite from the first movement direction.

Description

Mobile system, mobile control method, measurement system and measurement method

[0001] The present invention relates to the technical fields of a movement system, a movement control method, a measurement system, and a measurement method that can be applied to, for example, a robot or the like.

[0002] Patent Document 1 describes a movement system (e.g., a robot system) that can perform a predetermined operation using an object (e.g., an end effector) placed on a manipulator (e.g., a robot arm). In such a movement system, a technical challenge is to reduce unintended vibration and / or unintended positional deviation of the manipulator.

[0003] US Patent Application Publication No. 2015 / 0134099

[0004] According to a first aspect, there is provided a movement system comprising a first object, a second object, and a movement device arranged at a fixed position relative to a movable part of a manipulator and capable of moving each of the first object and the second object relative to the manipulator, wherein at least one of the first object and the second object performs processing on a target object, and the movement device moves the second object in a second movement direction including a directional component opposite to the first movement direction during at least a portion of a period during which the first object is moved in a first movement direction.

[0005] According to a second aspect, there is provided a movement control method for controlling a movement system including a manipulator having a first object and a second object attached to a movable part, wherein at least one of the first object and the second object performs processing on a target object, and the movement control method includes causing the manipulator to move the first object in a first movement direction, and causing the manipulator to move the second object in a second movement direction that includes a directional component opposite to the first movement direction during at least a portion of a period during which the first object is being moved in the first movement direction.

[0006] According to a third aspect, there is provided a measurement system comprising a first measurement device that measures a target object, a second measurement device that measures the target object, and a movement device that is arranged in a fixed position relative to a movable part of a manipulator and is capable of moving each of the first and second measurement devices relative to the manipulator, wherein at least one of the first and second measurement devices measures the target object during at least a portion of the period during which it is moved by the movement device.

[0007] According to a fourth aspect, there is provided a measurement method for measuring a target object, the method including: measuring the target object with a first measuring device while moving the first measuring device relative to the target object; and measuring the target object with a second measuring device different from the first measuring device while moving the second measuring device relative to the target object; measuring with the first measuring device includes moving the first measuring device relative to a movable part of a manipulator; and measuring with the second measuring device includes moving the second measuring device relative to the movable part of a manipulator.

[0008] FIG. 1 is a system configuration diagram showing an example of the system configuration of a robot system in this embodiment. FIG. 2 is a perspective view schematically showing an example of the arrangement of the robot system. FIG. 3 is a side view showing the configuration of the robot. FIG. 4 is a perspective view showing the configuration of a moving device. FIG. 5 is a front view showing the appearance of the measurement device. FIG. 6 is a sectional view showing the configuration of a measurement optical system provided in the measurement device. FIG. 7 is a block diagram showing the configuration of a control device. FIG. 8 is a flowchart showing the flow of measurement operations for measuring the position of a workpiece using a measurement head. FIG. 9(a) is a sectional view showing a workpiece W irradiated with measurement light, FIG. 9(b) is a plan view showing a workpiece W irradiated with measurement light, FIG. 9(c) is a sectional view showing a workpiece W irradiated with measurement light, and FIG. 9(d) is a plan view showing a workpiece W irradiated with measurement light. FIGS. 10(a) and 10(b) are each a perspective view showing the measurement axis of the measurement head. FIG. 11(a) is a plan view showing a measurement head moving along a guide member, and FIG. 11(b) is a graph showing the movement speed of the measurement head, the acceleration of the measurement head, and the reaction force caused by the movement of the measurement head when the measurement head moves as shown in FIG. 11(a). FIG. 12(a) is a plan view showing a measurement head moving along a guide member, and FIG. 12(b) is a graph showing the movement speed of the measurement head, the acceleration of the measurement head, and the reaction force caused by the movement of the measurement head when the measurement head moves as shown in FIG. 12(a). FIG. 13 is a plan view showing a measurement head moving along a guide member. FIG. 14(a) is a plan view showing a measurement head moving along a guide member, and FIG. 14(b) is a graph showing the movement speed of the measurement head, the acceleration of the measurement head, and the reaction force caused by the movement of the measurement head when the measurement head moves as shown in FIG. 14(a). FIG. 15 is a plan view showing an example of the arrangement of guide members in a second modified example. Fig. 16 is a plan view showing an example of the arrangement of guide members in a third modified example. Fig. 17 is a cross-sectional view showing a measurement head in a fourth modified example. Figs. 18(a) and 18(b) are cross-sectional views showing a method for adjusting the tilt of the measurement axis of the measurement head.19(a) and 19(b) are cross-sectional views showing a measurement head in a fourth modified example, FIG. 19(c) is a plan view showing a workpiece irradiated with measurement light from the measurement head shown in FIG. 19(a), and FIG. 19(d) is a plan view showing a workpiece irradiated with measurement light from the measurement head shown in FIG. 19(b). 20(a) and 20(c) are cross-sectional views showing a measurement head in a fourth modified example, FIG. 20(b) is a plan view showing a workpiece irradiated with measurement light from the measurement head shown in FIG. 20(a), and FIG. 20(d) is a plan view showing a workpiece irradiated with measurement light from the measurement head shown in FIG. 20(c). 21(a) and 21(b) are cross-sectional views showing measurement axes adjusted based on the shape of the workpiece surface. 22 is a cross-sectional view showing measurement axes adjusted based on the shape of the workpiece surface. 23 conceptually illustrates a rotational moment generated due to movement of the measurement head. Fig. 24 is a plan view showing the configuration of a first specific example of a moving device in the fifth modified example. Fig. 25 is a perspective view showing the configuration of a second specific example of a moving device in the fifth modified example. Fig. 26 is a perspective view showing the configuration of a third specific example of a moving device in the fifth modified example. Fig. 27 is a perspective view showing the configuration of a fourth specific example of a moving device in the fifth modified example. Fig. 28 is a perspective view schematically showing an example of the arrangement of a robot system in the modified example.

[0009] Hereinafter, embodiments of a movement system, a movement control method, a measurement system, and a measurement method will be described with reference to the drawings. Hereinafter, embodiments of a movement system, a movement control method, a measurement system, and a measurement method will be described using a robot system SYS.

[0010] (1) Configuration of Robot System SYS First, the configuration of the robot system SYS in this embodiment will be described.

[0011] (1-1) Overall Configuration of Robot System SYS First, the overall configuration of the robot system SYS in this embodiment will be described with reference to Figures 1 and 2. Figure 1 is a system configuration diagram showing an example of the system configuration of the robot system SYS in this embodiment. Figure 2 is a perspective view schematically showing an example of the layout of the robot system SYS.

[0012] 1 and 2, the robot system SYS includes a robot 1, a measuring device 2, and a control device 3. For convenience of explanation, the control device 3 is not shown in FIG. 2. This is because the control device 3 may be placed in a space different from the space in which the robot 1 and the measuring device 2 are placed. Of course, the control device 3 may also be placed in the space in which the robot 1 and the measuring device 2 are placed. The configurations and operations of the robot 1, the measuring device 2, and the control device 3 will be described in detail later, so a detailed description thereof will be omitted here, but a brief overview will be provided below.

[0013] The robot 1 performs a predetermined process on the workpiece W. The workpiece W is a target object that is the subject of the predetermined process performed by the robot 1. In particular, the robot 1 performs the predetermined process on the workpiece W using an end effector 15 (see FIG. 3 ) that is provided on the robot 1 and will be described later. In this case, the robot 1 may perform a process on the workpiece W that corresponds to the type of end effector 15 that the robot 1 is provided with.

[0014] As a first example, the robot 1 may use the end effector 15 to perform a processing process to machine the workpiece W as an example of a predetermined process. In this case, the workpiece W may be referred to as a processing target object. For example, the robot 1 may use the end effector 15 to perform a processing process (additive processing) on ​​the workpiece W to add a shaped object to the workpiece W. One example of the additive processing is an additive processing process in which a shaped object is added to the workpiece W by melting a shaping material supplied to the workpiece W with an energy beam. For example, the robot 1 may use the end effector 15 to perform a processing process (removal processing) on ​​the workpiece W to remove a portion of the workpiece W. One example of the removal processing is a removal processing process in which a portion of the workpiece W is removed by irradiating the workpiece W with an energy beam (e.g., light). Another example of the removal processing is a processing process (machining processing) in which the workpiece W is machined using a tool. When the robot 1 performs a processing process, the end effector 15 may include a processing head capable of processing the workpiece W. In other words, a processing head capable of processing the workpiece W may be used as the end effector 15. The processing head may also be referred to as a processing device.

[0015] As a second example, the robot 1 may use the end effector 15 to perform a measurement process that measures the workpiece W as an example of the predetermined process. In this case, the workpiece W may be referred to as a measurement target object. The robot 1 may use the end effector 15 to perform a measurement process that measures the characteristics of the workpiece W. Examples of the characteristics of the workpiece W include at least one of the position of at least a portion of the workpiece W, the shape of at least a portion of the workpiece W, and the size of at least a portion of the workpiece W. When the robot 1 performs the measurement process, the end effector 15 may include a measurement head that can measure the workpiece W. In other words, a measurement head that can measure the workpiece W may be used as the end effector 15. The measurement head may be referred to as a measurement device.

[0016] The measuring device 2 is capable of measuring the position of at least a portion of the robot 1. In this embodiment, an example will be described in which the measuring device 2 measures the position of a robot arm 12 (see FIG. 3 ) provided on the robot 1 as an example of the position of at least a portion of the robot 1. In particular, in this embodiment, an example will be described in which the measuring device 2 measures the position of a distal arm member 123 (see FIG. 3 ) at the tip of the robot arm 12 provided on the robot 1 as an example of the position of at least a portion of the robot 1. However, the measuring device 2 may also measure the position of a part of the robot 1 other than the robot arm 12 (distal arm member 123) as an example of the position of at least a portion of the robot 1. For example, the measuring device 2 may measure the position of a link 121 (see FIG. 3 ) provided on the robot arm 12 (described later) as an example of the position of at least a portion of the robot 1. For example, the measuring device 2 may measure the position of a joint 122 provided on the robot arm 12 (described later) as an example of the position of at least a portion of the robot 1. The measurement results by the measuring device 2 are output from the measuring device 2 to the control device 3.

[0017] The link 121, the joint 122, and the distal arm member 123 are each arm members of the robot arm 12 that can move in conjunction with the movement of the robot arm 12. For this reason, the link 121, the joint 122, and the distal arm member 123 may each be referred to as a movable part (movable arm member).

[0018] The measurement device 2 may be of any type as long as it is capable of measuring the position of the distal arm member 123 (i.e., the position of at least a part of the robot 1; the same applies hereinafter). In this embodiment, an example will be described in which the measurement device 2 optically measures the position of the distal arm member 123. In this case, the measurement device 2 is capable of irradiating the distal arm member 123 with measurement light ML2. The measurement light ML2 is typically laser light, but the measurement light ML2 may be light other than laser light. Furthermore, the measurement device 2 is capable of receiving return light RL2 from the distal arm member 123 irradiated with the measurement light ML2. In other words, the measurement device 2 is capable of receiving return light RL2 of the measurement light ML2. The return light RL2 may include at least one of reflected light which is the measurement light ML2 reflected by the distal arm member 123, scattered light which is the measurement light ML2 scattered by the distal arm member 123, diffracted light which is the measurement light ML2 diffracted by the distal arm member 123, and transmitted light which is the measurement light ML2 transmitted through the distal arm member 123. The reception result of the return light RL2 by the measurement device 2 is output from the measurement device 2 to the control device 3 as the measurement result by the measurement device 2.

[0019] The control device 3 is capable of controlling the robot 1. The control device 3 may also be referred to as a robot control device 3. For example, the control device 3 may generate a robot control signal for controlling the robot 1 and output the generated robot control signal to the robot 1, thereby controlling the robot 1. As an example, the control device 3 may generate a robot control signal for controlling the robot 1 to perform a predetermined process on the workpiece W.

[0020] Particularly in this embodiment, the control device 3 may control the robot 1 based on the measurement results from the measuring device 2. That is, the control device 3 may generate a robot control signal based on the measurement results from the measuring device 2. Specifically, as described above, the measurement results from the measuring device 2 include the measurement results of the position of the distal arm member 123 (that is, information relating to the position of the distal arm member 123). In this case, the control device 3 may calculate the position of the distal arm member 123 based on the measurement results from the measuring device 2, and generate a robot control signal based on the calculation results of the position of the distal arm member 123.

[0021] (1-2) Configuration of Robot 1 Next, the configuration of the robot 1 will be described with reference to Fig. 3. Fig. 3 is a side view showing the configuration of the robot 1.

[0022] As shown in Fig. 3, the robot 1 includes a base 11, a robot arm 12, a moving device 14, and an end effector 15. For convenience of explanation, the following description will be given of an example in which the robot 1 includes a measuring head 15M capable of measuring a workpiece W as an example of the end effector 15, as shown in Fig. 3. In this way, when the robot 1 includes the measuring head 15M (that is, when the robot 1 is capable of measuring a workpiece W), each of the robot system SYS and the robot 1 may be referred to as a measurement system.

[0023] The base 11 is a component that forms the base of the robot 1. The base 11 is placed on a support surface SS, such as a floor surface. The base 11 may be fixed to the support surface SS. Alternatively, the base 11 may be movable relative to the support surface SS. As an example, the base 11 may be self-propelled on the support surface SS. In this case, the base 11 may be installed on an automated guided vehicle. Alternatively, the automated guided vehicle may be used as the base 11. An example of an automated guided vehicle is at least one of an AGV (Automatic Guided Vehicle) and an AMR (Autonomous Mobile Robot). As another example, the base 11 may be capable of flying on the support surface SS. In this case, the base 11 may be installed on an aircraft. An example of an aircraft is an unmanned aerial vehicle such as a drone. Alternatively, the aircraft may be used as the base 11. FIG. 3 shows an example in which the base 11 is fixed to the support surface SS.

[0024] The robot arm 12 is attached to the base 11. In this embodiment, an example will be described in which a robot arm having a vertical multi-joint structure is used as the robot arm 12. In this case, the robot arm 12 may be a device in which a plurality of links 121 are connected via joints 122. An actuator is built into the joint 122. The link 121 may be rotatable around an axis defined by the joint 122 by the actuator built into the joint 122. At least one link 121 may be extendable and contractible along the direction in which the link 121 extends. A device including the device in which a plurality of links 121 are connected via joints 122 and the base 11 may be referred to as the robot arm 12.

[0025] However, a robot arm other than a robot arm having a vertical multi-joint structure may be used as the robot arm 12. For example, a polar coordinate robot having a horizontal multi-joint structure may be used as the robot arm 12. A cylindrical coordinate robot may be used as the robot arm 12. The robot arm 12 may function as a Cartesian coordinate robot. A parallel link robot may be used as the robot arm 12.

[0026] A measurement head 15M (i.e., end effector 15, the same applies hereinafter) is attached to the robot arm 12. In this embodiment, the measurement head 15M is attached to the robot arm 12 via a moving device 14. Here, with reference to FIG. 4 in addition to FIG. 3, the measurement head 15M attached to the robot arm 12 via the moving device 14 will be described together with the configuration of the moving device 14. FIG. 4 is a perspective view showing the configuration of the moving device 14. Note that, in order to emphasize ease of viewing the drawing, FIG. 4 shows the configuration of the moving device 14 in a state where the robot arm 12 and the moving device 14 are separated from each other.

[0027] As shown in FIGS. 3 and 4 , the moving device 14 is attached to the robot arm 12. That is, the moving device 14 can be attached to the robot arm 12. When the moving device 14 is attached to the robot arm 12, the positional relationship between the moving device 14 and the robot arm 12 is fixed. Therefore, the moving device 14 is disposed at a fixed position relative to the robot arm 12. The moving device 14 attached to the robot arm 12 may be detached from the robot arm 12. That is, the moving device 14 attached to the robot arm 12 may be detachable from the robot arm 12. That is, the moving device 14 may be attachable to the robot arm 12 and detachable from the robot arm 12. That is, the moving device 14 may be detachably attached to the robot arm 12. The moving device 14 may be attached to the robot arm 12 so that it can be detached from the robot arm 12. However, the moving device 14 does not have to be detachable from the robot arm 12. That is, the moving device 14 may be fixedly attached to the robot arm 12. The movement device 14 may be attached to the robot arm 12 such that the movement device 14 cannot be removed from the robot arm 12 .

[0028] 3 and 4 show an example in which the moving device 14 is attached to the distal arm member 123 at the distal end of the robot arm 12. However, the moving device 14 may be attached to a part of the robot arm 12 other than the distal arm member 123. As an example, the moving device 14 may be attached to any part of the robot arm 12 that moves as the robot arm 12 moves (for example, the above-mentioned movable part (movable arm member)). In either case, the moving device 14 may be attached to a part of the robot arm 12 that satisfies the condition that the positional relationship between the moving device 14 and the robot arm 12 is fixed. The moving device 14 may be attached to a part of the robot arm 12 that satisfies the condition that the moving device 14 is disposed at a fixed position relative to the robot arm 12.

[0029] 3 and 4 show an example in which the movement device 14 is directly attached to the robot arm 12. However, the movement device 14 may also be indirectly attached to the robot arm 12. For example, the movement device 14 may be attached to the robot arm 12 via a support member capable of supporting the movement device 14. In other words, a support member capable of supporting the movement device 14 may be attached to the robot arm 12, and the movement device 14 may be attached to the support member. In either case, the movement device 14 may be directly or indirectly attached to the robot arm 12 so long as the positional relationship between the movement device 14 and the robot arm 12 is fixed. The movement device 14 may be directly or indirectly attached to the robot arm 12 so long as the positional relationship between the movement device 14 and the robot arm 12 is fixed.

[0030] A measurement head 15M (i.e., an end effector 15, the same applies hereinafter) is attached to the moving device 14. In this embodiment, a plurality of measurement heads 15M (i.e., a plurality of end effectors 15, the same applies hereinafter) are attached to the moving device 14. For convenience of explanation, the following description will be given of an example in which two measurement heads 15M (specifically, measurement head 15M#1 and measurement head 15M#2 as shown in FIG. 4) are attached to the moving device 14. However, a single measurement head 15M (i.e., a single end effector 15) may also be attached to the moving device 14.

[0031] The measurement head 15M is a measurement device capable of measuring the characteristics of the workpiece W, which is the measurement object. The measurement head 15M may be any type of measurement device as long as the measurement head 15M is capable of measuring the characteristics of the workpiece W. In this embodiment, an example will be described in which the measurement head 15M optically measures the position of each part of the workpiece W, which is an example of the characteristics of the workpiece W. Here, the position of each part of the workpiece W may be coordinates in a measurement coordinate system for each part of the workpiece W. In this case, the measurement head 15M may be equipped with an irradiation optical system 151M capable of irradiating the workpiece W with measurement light ML1. Furthermore, the measurement device 2 may be equipped with a light-receiving optical system 152M onto which return light RL1 from the workpiece W irradiated with the measurement light ML1 is incident, and a light-receiving element 153M (however, not shown in FIG. 4; see FIG. 10(a) and the like) that receives the return light RL1 via the light-receiving optical system 152M. The return light RL1 may include at least one of reflected light which is the measurement light ML1 reflected by the workpiece W, scattered light which is the measurement light ML1 scattered by the workpiece W, diffracted light which is the measurement light ML1 diffracted by the workpiece W, and transmitted light which is the measurement light ML1 transmitted through the workpiece W. The reception result of the return light RL1 by the measurement head 15M may be output from the measurement head 15M to the control device 3 as the measurement result by the measurement head 15M.

[0032] A first example of a measurement head 15M (measurement device) capable of optically measuring the position of each portion of the workpiece W is a line scanner. A line scanner is a measurement device capable of measuring the position of an object (e.g., workpiece W) using a light-sectioning method. In this case, the measurement head 15M may include, as the irradiation optical system 151M, an irradiation optical system 151M capable of irradiating the surface of the workpiece W with measurement light ML1 (e.g., sheet light) capable of forming a linear irradiation area (i.e., an area irradiated with measurement light ML1) on the surface of the workpiece W. Furthermore, the measurement head 15M may include, as the light receiving element 153M, a light receiving element in which multiple image sensors (e.g., multiple CCD (Charged Coupled Device) sensors or multiple CMOS (Complementary Metal Oxide Semiconductor) sensors) are arranged in a line so as to receive linear return light RL1 from the linear irradiation area.

[0033] In the following description, an example will be described in which the measurement head 15M is a line scanner. However, a measurement device other than a line scanner may be used as the measurement head 15M. For example, a stereo camera may be used as the measurement head 15M. For example, the measurement devices (localizers or laser trackers) described in U.S. Patent Nos. 8,687,173 and 7,139,446 may be used as the measurement head 15M. For example, a measurement device (localizer or laser tracker) similar to the measurement device 2 may be used as the measurement head 15M.

[0034] The moving device 14 is capable of moving the measuring head 15M attached to the moving device 14. As described above, since a plurality of measuring heads 15M (specifically, measuring head 15M#1 and measuring head 15M#2) are attached to the moving device 14, the moving device 14 is capable of moving each of the plurality of measuring heads 15M (specifically, measuring head 15M#1 and measuring head 15M#2). Note that when the robot 1 is equipped with a moving device 14 capable of moving the measuring head 15M in this way, the robot system SYS and the robot 1 may each be referred to as a moving system.

[0035] The moving device 14 may be capable of moving the measuring head 15M relative to the robot arm 12 to which the moving device 14 is attached. In other words, the moving device 14 may be capable of moving the measuring head 15M so as to change the positional relationship between the robot arm 12 and the measuring head 15M. The moving device 14 may be capable of moving the measuring head 15M relative to the workpiece W on which the robot 1 performs a predetermined process. In other words, the moving device 14 may be capable of moving the measuring head 15M so as to change the positional relationship between the workpiece W and the measuring head 15M.

[0036] The moving device 14 may move the measuring head 15M, which is a line scanner, so that the linear irradiation area formed on the surface of the workpiece W by the measuring head 15M moves on the surface of the workpiece W. In particular, the moving device 14 may move the measuring head 15M so that the linear irradiation area formed on the surface of the workpiece W by the measuring head 15M, which is a line scanner, moves on the surface of the workpiece W along a direction intersecting the direction in which the linear irradiation area extends. As a result, the measuring head 15M, which is a line scanner, can appropriately measure the position of each part of the workpiece W.

[0037] In this embodiment, an example will be described in which the moving device 14 is capable of moving the measurement head 15M along a predetermined translational axis. The translational axis may be referred to as a linear axis because it is an axis that extends in a linear direction. For example, the moving device 14 may be capable of moving the measurement head 15M along a first translational axis. For example, in addition to or instead of moving the measurement head 15M along the first translational axis, the moving device 14 may be capable of moving the measurement head 15M along a second translational axis that intersects (typically, is perpendicular to) the first translational axis and is different from the first translational axis. For example, in addition to or instead of moving the measurement head 15M along at least one of the first and second translational axes, the moving device 14 may be capable of moving the measurement head 15M along a third translational axis that intersects (typically, is perpendicular to) the first and second translational axes and is different from the first and second translational axes. Furthermore, the translation axis may also be referred to as the movement axis, since it is an axis along the direction in which the measurement head 15M moves.

[0038] The translational axis may be an axis determined with reference to the robot arm 12 (e.g., the distal arm member 123) to which the movement device 14 is attached. In other words, the translational axis may be an axis fixed with respect to the robot arm 12 (e.g., the distal arm member 123) to which the movement device 14 is attached. For example, the movement device 14 may be capable of moving the measurement head 15M along a first translational axis which is the X-axis (see FIGS. 3 and 4 ) of a hand coordinate system, which is a three-dimensional coordinate system determined with reference to the robot arm 12 (e.g., the distal arm member 123). For example, in addition to or instead of moving the measurement head 15M along the first translational axis, the movement device 14 may be capable of moving the measurement head 15M along a second translational axis which is the Y-axis of the hand coordinate system (i.e., the Y-axis orthogonal to the X-axis in the hand coordinate system). For example, in addition to or instead of moving the measurement head 15M along at least one of the first and second translational axes, the movement device 14 may be capable of moving the measurement head 15M along a third translational axis, which is the Z axis of the hand coordinate system (i.e., the Z axis perpendicular to the X axis and Y axis in the hand coordinate system).

[0039] In the following explanation, for convenience of explanation, an example will be described in which the moving device 14 is capable of moving the measurement head 15M along the Y axis of the hand coordinate system. In the following explanation, the X axis, Y axis, and Z axis of the hand coordinate system will be referred to as the X axis (R), Y axis (R), and Z axis (R), respectively.

[0040] 3 and 4, the hand coordinate system may be defined such that the Z-axis (R) is an axis along the extension direction of the link 121 of the robot arm 12 (particularly, the link 121 connected to the distal arm member 123 or closest to the distal arm member 123). In this case, the hand coordinate system may be defined such that the X-axis (R) and the Y-axis (R) are each an axis along a direction intersecting the extension direction of the link 121 of the robot arm 12 (particularly, the link 121 connected to the distal arm member 123 or closest to the distal arm member 123).

[0041] As the hand coordinate system, instead of a coordinate system determined based on the robot arm 12 itself, a coordinate system determined based on the moving device 14 attached to the robot arm 12 may be used. As the hand coordinate system, instead of a coordinate system determined based on the robot arm 12 itself, a coordinate system determined based on the measuring head 15M (i.e., the end effector 15) attached to the robot arm 12 via the moving device 14 may be used. As the hand coordinate system, a reflector coordinate system determined based on the reflecting member 16 (described below) attached to the robot arm 12 may be used. The reflector coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, X-axis, Y-axis, and Z-axis) passing through an origin fixed to the reflecting member 16.

[0042] The hand coordinate system may be a coordinate system (local coordinate system) defined within a reference coordinate system (global coordinate system) used as the reference of the robot system SYS. For example, the hand coordinate system may be a coordinate system (local coordinate system) defined around the robot arm 12 (particularly the distal arm member 123) located within the reference coordinate system. For example, the hand coordinate system may be a coordinate system (local coordinate system) defined around at least one of the moving device 14 and the measuring head 15M located within the reference coordinate system.

[0043] A global coordinate system defined with reference to the robot system SYS may be used as the reference coordinate system. The global coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X-axis, Y-axis, and Z-axis) that pass through an origin defined with reference to the robot system SYS. A robot coordinate system defined with reference to the robot 1 (e.g., the base 11) may be used as the reference coordinate system. The robot coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, the X-axis, Y-axis, and Z-axis) that pass through an origin fixed to the robot 1 (e.g., the base 11). A measurement coordinate system defined with reference to the measuring device 2 may be used as the reference coordinate system. The reference coordinate system may be defined by a reference reflecting member different from the reflecting member 16. The reference reflecting member may be provided on the workpiece W, the robot, the AGV, the floor, etc. The measurement coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, X-axis, Y-axis, and Z-axis) that pass through an origin fixed to the measurement device 2. A reflector coordinate system defined based on the reflecting member 16 (described below) that is measured by the measurement device 2 may be used as the reference coordinate system. The reflector coordinate system may be a coordinate system defined by three mutually orthogonal axes (specifically, X-axis, Y-axis, and Z-axis) that pass through an origin fixed to the reflecting member 16. In the following description, the X-axis, Y-axis, and Z-axis of the reference coordinate system are referred to as the X-axis (G), Y-axis (G), and Z-axis (G), respectively. In the example shown in FIG. 3 , the X-axis (G), Y-axis (G), and Z-axis (G) are different from the X-axis (R), Y-axis (R), and Z-axis (R), respectively. However, at least one of the X axis (G), Y axis (G), and Z axis (G) may be the same as at least one of the X axis (R), Y axis (R), and Z axis (R).

[0044] The moving device 14 may include a guide member 141, a slider member 142, and an actuator (in other words, a motor) 143. The guide member 141 may be referred to as a guide rail or a moving axis (in other words, a moving shaft). The slider member 142 may be referred to as a slider. The guide member 141 is attached to the robot arm 12. The guide member 141 is a member extending along the Y-axis (R). The slider member 142 is a member that can move along the guide member 141 using the power of the actuator 143. A measuring head 15M is attached to the slider member 142. In this case, when the slider member 142 moves along the guide member 141, the measuring head 15M attached to the slider member 142 moves along the guide member 141. In other words, the measuring head 15M moves along the Y-axis (R). In this case, the measuring head 15M may be considered to be attached to the guide member 141 via a slider member 142 so as to be movable along the guide member 141.

[0045] Note that an apparatus including the guide member 141, the slider member 142, and the actuator 143 may be considered to function as a drive system for moving the measuring head 15M. That is, the moving device 14 may include a drive system including the guide member 141, the slider member 142, and the actuator 143 as a drive system for moving the measuring head 15M. A first example of a drive system including the guide member 141, the slider member 142, and the actuator 143 is a ball screw including a screw shaft which is an example of the guide member 141, a nut which is an example of the slider member 142 and is attached to the screw shaft so as to be rotatable about the screw shaft, and an actuator 143 which can rotate the screw shaft. A second example of a drive system including the guide member 141, the slider member 142, and the actuator 143 is a linear servo guide (linear servo motor) which includes a moving shaft which is an example of the guide member 141 and is a stator including a magnet, and a mover which is an example of the slider member 142 and is an actuator 143 and includes a coil.

[0046] In this embodiment, as described above, multiple measurement heads 15M (specifically, measurement head 15M#1 and measurement head 15M#2) are attached to the movement device 14, and therefore the movement device 14 may separately include a guide member 141, a slider member 142, and an actuator 143 used to move measurement head 15M#1, and a guide member 141, a slider member 142, and an actuator 143 used to move measurement head 15M#2. In the following description, the guide member 141, the slider member 142, and the actuator 143 used to move measurement head 15M#1 will be referred to as guide member 141#1, slider member 142#1, and actuator 143#1, respectively, and the guide member 141, the slider member 142, and the actuator 143 used to move measurement head 15M#2 will be referred to as guide member 141#2, slider member 142#2, and actuator 143#2, respectively. In this case, the measurement head 15M#1 is attached to the guide member 141#1 via a slider member 142#1 so as to be movable along the guide member 141#1 using the power of the actuator 143#1. The translational axis along which the measurement head 15M#1 moves is an axis along the guide member 141#1 (i.e., an axis along the extension direction of the guide member 141#1). The measurement head 15M#2 is attached to the guide member 141#2 via a slider member 142#2 so as to be movable along the guide member 141#2 using the power of the actuator 143#2. The translational axis along which the measurement head 15M#2 moves is an axis along the guide member 141#2 (i.e., an axis along the extension direction of the guide member 141#2).

[0047] The measurement head 15M#1 and the measurement head 15M#2 may be attached to the guide member 141#1 and the guide member 141#2, respectively, in the same orientation. Specifically, the measurement head 15M#1 and the measurement head 15M#2 may be attached to the guide member 141#1 and the guide member 141#2, respectively, so that the orientation of the measurement head 15M#1 attached to the guide member 141#1 and the orientation of the measurement head 15M#2 attached to the guide member 141#2 are the same. As an example, as shown in FIG. 4, measurement head 15M#1 and measurement head 15M#2 may be attached to guide member 141#1 and guide member 141#2, respectively, so that the orientation (in other words, the order) of the irradiation optical system 151M and the light receiving optical system 152 of measurement head 15M#1 attached to guide member 141#1 is the same as the orientation (in other words, the order) of the irradiation optical system 151M and the light receiving optical system 152 of measurement head 15M#2 attached to guide member 141#2. In this case, the measurement range of measurement head 15M#1 when measurement head 15M#1 moves by the maximum stroke along guide member 141#1 (measurement range MR#1, which will be described later with reference to FIG. 9(b) and the like) and the measurement range of measurement head 15M#2 when measurement head 15M#2 moves by the maximum stroke along guide member 141#2 (measurement range MR#2, which will be described later with reference to FIG. 9(b) and the like) coincide in a direction intersecting the translation axis (for example, a direction along the X(R) axis in FIG. 9(b) that will be described later). However, measurement head 15M#1 and measurement head 15M#2 do not have to be attached to guide member 141#1 and guide member 141#2 in the same orientation. Measurement head 15M#1 and measurement head 15M#2 may be attached to guide member 141#1 and guide member 141#2 in different orientations.

[0048] The extension direction of guide member 141#2 may be a direction including a directional component along the extension direction of guide member 141#1. In this embodiment, an example will be described in which the extension direction of guide member 141#2 is a direction along the extension direction of guide member 141#1. That is, an example will be described in which the extension direction of guide member 141#2 is parallel to the extension direction of guide member 141#1. In other words, an example will be described in which guide member 141#2 is parallel to guide member 141#1. In the example shown in FIG. 4 , the extension direction of guide member 141#1 and the extension direction of guide member 141#2 are both parallel to the Y-axis (R).

[0049] Furthermore, the state in which "the extension direction of guide member 141#1 and the extension direction of guide member 141#2 are parallel" may also include the state in which "the extension direction of guide member 141#1 and the extension direction of guide member 141#2 are literally completely parallel." The state in which "the extension direction of guide member 141#1 and the extension direction of guide member 141#2 are parallel" may also include a state in which "the extension direction of guide member 141#1 and the extension direction of guide member 141#2 are not completely parallel, but the angle between the extension direction of guide member 141#1 and the extension direction of guide member 141#2 (specifically, the smaller of the two angles) is sufficiently small so that the extension direction of guide member 141#1 and the extension direction of guide member 141#2 can be considered to be parallel."

[0050] Similarly, the state in which "guide member 141#1 and guide member 141#2 are parallel" may include a state in which "guide member 141#1 and guide member 141#2 are literally completely parallel." The state in which "guide member 141#1 and guide member 141#2 are parallel" may include a state in which "guide member 141#1 and guide member 141#2 are not completely parallel, but the angle between guide member 141#1 and guide member 141#2 (specifically, the smaller of the two angles) is small enough that guide member 141#1 and guide member 141#2 can be considered parallel."

[0051] As described above, measurement head 15M#1 and measurement head 15M#2 move along guide member 141#1 and guide member 141#2, respectively. Therefore, when the extension direction of guide member 141#2 is parallel to the extension direction of guide member 141#1, the translational axis along which measurement head 15M#1 moves and the translational axis along which measurement head 15M#2 moves may be parallel. In the example shown in FIG. 4 , the translational axis along which measurement head 15M#1 moves and the translational axis along which measurement head 15M#2 moves are both parallel to the Y-axis (R).

[0052] The guide members 141#1 and 141#2 may be separated from each other along a direction intersecting at least one of the extension direction of the guide member 141#1 and the extension direction of the guide member 141#2. That is, the guide members 141#1 and 141#2 may be separated from each other along a direction intersecting at least one of the translational axes along which the measuring head 15M#1 moves and the translational axes along which the measuring head 15M#2 moves. In other words, the translational axes along which the measuring head 15M#1 moves and the translational axes along which the measuring head 15M#2 moves may be separated from each other along a direction intersecting at least one of the extension direction of the guide member 141#1 and the extension direction of the guide member 141#2. In other words, the translational axis along which measurement head 15M#1 moves and the translational axis along which measurement head 15M#2 moves may be separated from each other along a direction intersecting at least one of the translational axis along which measurement head 15M#1 moves and the translational axis along which measurement head 15M#2 moves. In the example shown in Fig. 4, guide member 141#1 and guide member 141#2 are separated from each other along the X-axis (R).

[0053] The distance between the guide members 141#1 and 141#2 (the distance along the X-axis (R) in the example shown in FIG. 4 ) may be set to a predetermined distance determined based on at least one of the movement stroke of the measurement head 15M#1 along the guide member 141#1 and the movement stroke of the measurement head 15M#2 along the guide member 141#2. As an example, the predetermined distance may be set to 30% or less of at least one of the movement stroke of the measurement head 15M#1 along the guide member 141#1 and the movement stroke of the measurement head 15M#2 along the guide member 141#2. In other words, the distance between the guide members 141#1 and 141#2 (the distance along the X-axis (R) in the example shown in FIG. 4 ) may be set to 30% or less of the movement stroke of the measurement head 15M#1 along the guide member 141#1 and the movement stroke of the measurement head 15M#2 along the guide member 141#2.

[0054] The movement stroke of the measurement head 15M#1 may mean the maximum stroke by which the measurement head 15M#1 can move along the guide member 141#1. Alternatively, the movement stroke of the measurement head 15M#1 may mean the actual stroke by which the measurement head 15M#1 actually moves along the guide member 141#1 when the measurement head 15M#1 measures the workpiece W. Similarly, the movement stroke of the measurement head 15M#2 may mean the maximum stroke by which the measurement head 15M#2 can move along the guide member 141#2. Alternatively, the movement stroke of the measurement head 15M#2 may mean the actual stroke by which the measurement head 15M#2 actually moves along the guide member 141#2 when the measurement head 15M#2 measures the workpiece W.

[0055] The actual stroke may be the same as the maximum stroke. Alternatively, the actual stroke may be shorter than the maximum stroke. In other words, each of the measurement heads 15M#1 and 15M#2 may measure the workpiece W while moving a distance shorter than the maximum stroke. In other words, a portion of the maximum stroke (for example, a portion of both ends) may be used as a movement margin within which each of the measurement heads 15M#1 and 15M#2 does not actually move.

[0056] The movement stroke of the measuring head 15M#2 is the same as the movement stroke of the measuring head 15M#1, but may be different from the movement stroke of the measuring head 15M#1.

[0057] Here, by setting the distance between guide member 141#1 and guide member 141#2 to a predetermined distance determined according to at least one of the movement stroke of measurement head 15M#1 along guide member 141#1 and the movement stroke of measurement head 15M#2 along guide member 141#2, it is possible to suppress the generation of rotational moment around an axis that intersects the plane on which measurement heads 15M#1 and 15M#2 move (in the example shown in Figure 4, the X(R)Y(R) plane).

[0058] In the above description, the predetermined distance may be 30% or less of at least one of the movement stroke of measurement head 15M#1 along guide member 141#1 and the movement stroke of measurement head 15M#2 along guide member 141#2, or 30% or less of the movement stroke of measurement head 15M#1 along guide member 141#1 and the movement stroke of measurement head 15M#2 along guide member 141#2. However, the predetermined distance may be 20% or less of at least one of the movement stroke of measurement head 15M#1 along guide member 141#1 and the movement stroke of measurement head 15M#2 along guide member 141#2, or 20% or less of the movement stroke of measurement head 15M#1 along guide member 141#1 and the movement stroke of measurement head 15M#2 along guide member 141#2.

[0059] The moving device 14 may further include a measuring device 144 capable of acquiring information related to the position of the measuring head 15M moved by the moving device 14. As described above, in this embodiment, the moving device 14 is capable of moving the measuring head 15M along the Y axis (R), and therefore the measuring device 144 may be capable of acquiring information related to the position of the measuring head 15M along the Y axis (R) as information related to the position of the measuring head 15M.

[0060] In this embodiment, as described above, multiple measurement heads 15M (specifically, measurement head 15M#1 and measurement head 15M#2) are attached to the moving device 14, and therefore the moving device 14 may be provided with a measuring device 144 capable of acquiring information about the position of measurement head 15M#1 and a measuring device 144 capable of acquiring information about the position of measurement head 15M#2 separately. In the following description, the measuring device 144 capable of acquiring information about the position of measurement head 15M#1 will be referred to as measuring device 144#1, and the measuring device 144 capable of acquiring information about the position of measurement head 15M#2 will be referred to as measuring device 144#2.

[0061] The measuring device 144 may be capable of acquiring information relating to the position of the measuring head 15M moved by the moving device 14 relative to the robot arm 12 (e.g., the distal arm member 123). For example, the measuring device 144 may be capable of acquiring information relating to the position of the measuring head 15M relative to the moving device 14 in the direction along the Y-axis (R). Alternatively, the measuring device 144 may be capable of acquiring information relating to the amount of movement of the measuring head 15M moved by the moving device 14 as information relating to the position of the measuring head 15M.

[0062] As a first example of the measurement device 144, the measurement device 144 may be capable of acquiring, as information regarding the movement amount of the measurement head 15M, information regarding the position of the measurement head 15M before the movement device 14 moves the measurement head 15M and information regarding the position of the measurement head 15M after the movement device 14 moves the measurement head 15M. In this case, the difference between the position of the measurement head 15M before the movement device 14 moves the measurement head 15M and the position of the measurement head 15M after the movement device 14 moves the measurement head 15M corresponds to the movement amount of the measurement head 15M. In this case, the measurement device 144 may be considered to be a measurement device that can indirectly acquire information regarding the movement amount of the measurement head 15M. At least one of a TOF sensor and an interferometer can be given as an example of a measurement device that can indirectly acquire information regarding the movement amount of the measurement head 15M.

[0063] As a second example of the measurement device 144, the measurement device 144 may be capable of directly acquiring information regarding the movement amount of the measurement head 15M. An example of a measurement device capable of directly acquiring information regarding the movement amount of the measurement head 15M is an encoder capable of detecting the movement amount of the measurement head 15M along the translation axis. For example, the movement device 14 may be equipped with an encoder capable of detecting the movement amount of the measurement head 15M along the Y-axis (R) as the measurement device 144. The encoder capable of detecting the movement amount of the measurement head 15M may be a linear encoder provided on the guide member 141 and / or the slider member 142 of the movement device 14, or may be a rotary encoder that measures the drive amount of the actuator 143 (the rotation amount if the actuator 143 is a rotary motor). Instead of or in addition to directly acquiring information regarding the movement amount of the measurement head 15M, information regarding the movement amount of the measurement head 15M may be obtained from a drive command value sent to the actuator 143.

[0064] The measurement results by the measuring device 144 are output from the measuring device 144 to the control device 3. The measurement results by the measuring device 144 include the measurement results of the position of the measuring head 15M. In other words, the measurement results by the measuring device 144 include information related to the position of the measuring head 15M. The control device 3 may calculate the position of the measuring head 15M based on the measurement results by the measuring device 144. Furthermore, the control device 3 may control the robot 1 based on the calculation results of the position of the measuring head 15M. In other words, the control device 3 may generate a robot control signal based on the calculation results of the position of the measuring head 15M.

[0065] In addition to the moving device 14, a reflective member 16 is attached to the robot arm 12. That is, the reflective member 16 is disposed on the robot arm 12. In other words, the robot arm 12 is equipped with the reflective member 16. The reflective member 16 is a reflective member that reflects light incident on the reflective member 16. In particular, the reflective member 16 is a retroreflective member that retroreflects light incident on the reflective member 16. The reflective member 16 may also be referred to as a reflector. Retroreflection may mean that reflection in a direction opposite to the traveling direction of incident light is achieved over a wide angle of incidence.

[0066] The reflecting member 16 is used by the measuring device 2 described above to measure the position of the robot arm 12 (i.e., the position of the robot 1). Specifically, the measuring device 2 measures the position of the distal arm member 123 of the robot arm 12, as described above. In this case, as shown in FIGS. 3 and 4 , the reflecting member 16 may be attached to the distal arm member 123. That is, the reflecting member 16 may be disposed on the distal arm member 123. In other words, the distal arm member 123 may include the reflecting member 16. However, the reflecting member 16 may be attached to any part (e.g., a movable part) of the robot arm 12 other than the distal arm member 123. The measuring device 2 measures the position of the reflecting member 16 included in the distal arm member 123. To measure the position of the reflecting member 16, the measuring device 2 irradiates the reflecting member 16 with measurement light ML2. The reflecting member 16 reflects the measurement light ML2 incident on the reflecting member 16. The measurement device 2 receives the return light RL2, which is the measurement light ML2 reflected by the reflecting member 16.

[0067] The reception result of the return light RL2 by the measurement device 2 is output from the measurement device 2 to the control device 3 as the measurement result of the measurement device 2. The reception result of the return light RL2 by the measurement device 2 includes the measurement result of the position of the reflecting member 16 in the measurement coordinate system. In other words, the reception result of the return light RL2 by the measurement device 2 includes information about the position of the reflecting member 16 in the measurement coordinate system. Here, because the distal arm member 123 is equipped with the reflecting member 16, the measurement result of the position of the reflecting member 16 essentially includes the measurement result of the position of the distal arm member 123 that includes the reflecting member 16. For this reason, the control device 3 may calculate the position of the reflecting member 16 included in the distal arm member 123 based on the reception result of the return light RL2 from the reflecting member 16, and may calculate the position of the distal arm member 123 that includes the reflecting member 16 based on the calculation result of the position of the reflecting member 16 included in the distal arm member 123. In other words, the control device 3 may acquire the result of receiving the return light RL2 from the reflecting member 16 as information relating to the position of the reflecting member 16 provided on the distal arm member 123, and based on the acquired information, acquire information relating to the position of the distal arm member 123 that includes the reflecting member 16. Therefore, measuring the position of the reflecting member 16 provided on the distal arm member 123 is essentially equivalent to measuring the position of the distal arm member 123 that includes the reflecting member 16.

[0068] The control device 3 may calculate the position of the reflecting member 16 in the above-mentioned reference coordinate system based on the result of receiving the return light RL2 from the reflecting member 16. Thereafter, the control device 3 may calculate the position of the distal arm member 123 in the above-mentioned reference coordinate system based on the calculation result of the position of the reflecting member 16 in the reference coordinate system.

[0069] In this embodiment, the distal arm member 123 includes a plurality of reflecting members 16. In particular, the distal arm member 123 includes at least three reflecting members 16. In this case, information regarding the relative positions of the plurality of reflecting members 16 may be known to the control device 3. In this case, the control device 3 may calculate the positions of the at least three reflecting members 16 based on the results of receiving the return light RL2 from each of the at least three reflecting members 16. Thereafter, the control device 3 may calculate the position of the distal arm member 123 based on the calculation results of the positions of the at least three reflecting members 16. In particular, the control device 3 may calculate, based on the calculation results of the positions of at least three reflecting members 16, the following positions of the distal arm member 123: the position of the distal arm member 123 in a linear direction along the X-axis (G), the position of the distal arm member 123 in a linear direction along the Y-axis (G), the position of the distal arm member 123 in a linear direction along the Z-axis (G), the position of the distal arm member 123 in a rotational direction about the X-axis (G), the position of the distal arm member 123 in a rotational direction about the Y-axis (G), and the position of the distal arm member 123 in a rotational direction about the Z-axis (G). In this case, the measuring device 2 that measures the position of the distal arm member 123 may be considered to be a measuring device that can substantially measure the position of the distal arm member 123 in a linear direction along the X-axis (G), the position of the distal arm member 123 in a linear direction along the Y-axis (G), the position of the distal arm member 123 in a linear direction along the Z-axis (G), the position of the distal arm member 123 in a rotational direction about the X-axis (G), the position of the distal arm member 123 in a rotational direction about the Y-axis (G), and the position of the distal arm member 123 in a rotational direction about the Z-axis (G).

[0070] However, the distal arm member 123 may be equipped with two or less reflecting members 16. Even in this case, the control device 3 may calculate at least one of the position of the distal arm member 123 in a linear direction along the X axis (G), the position of the distal arm member 123 in a linear direction along the Y axis (G), the position of the distal arm member 123 in a linear direction along the Z axis (G), the position of the distal arm member 123 in a rotational direction about the X axis (G), the position of the distal arm member 123 in a rotational direction about the Y axis (G), and the position of the distal arm member 123 in a rotational direction about the Z axis (G), based on the results of receiving the return light RL2 from each of the two or less reflecting members 16. In this case, the measuring device 2 that measures the position of the distal arm member 123 may be considered to be a measuring device that can substantially measure at least one of the position of the distal arm member 123 in a linear direction along the X axis (G), the position of the distal arm member 123 in a linear direction along the Y axis (G), the position of the distal arm member 123 in a linear direction along the Z axis (G), the position of the distal arm member 123 in a rotational direction about the X axis (G), the position of the distal arm member 123 in a rotational direction about the Y axis (G), and the position of the distal arm member 123 in a rotational direction about the Z axis (G).

[0071] The position of the distal arm member 123 in the rotation direction about the X-axis (G) may mean the orientation of the distal arm member 123 about the X-axis (G) (in other words, the amount of rotation or tilt). The position of the distal arm member 123 in the rotation direction about the Y-axis (G) may mean the orientation of the distal arm member 123 about the Y-axis (G) (in other words, the amount of rotation or tilt). The position of the distal arm member 123 in the rotation direction about the Z-axis (G) may mean the orientation of the distal arm member 123 about the Z-axis (G) (in other words, the amount of rotation or tilt).

[0072] The plurality of reflecting members 16 may be arranged in a plane along the extension direction of the guide member 141 provided in the moving device 14. In other words, the plurality of reflecting members 16 may be arranged in a plane along the translation axis along which the measuring head 15M is moved by the moving device 14, or in a plane parallel to the translation axis. In the example shown in FIG. 4 , the extension direction of the guide member 141 is a direction along the Y axis (R) (i.e., the translation axis along which the measuring head 15M moves is an axis along the Y axis (R)), and therefore the plurality of reflecting members 16 may be arranged in a plane along the Y axis (R). As an example, the plurality of reflecting members 16 may be arranged in at least one of the X(R)Y(R) plane and the Y(R)Z(R) plane of the hand coordinate system.

[0073] The plurality of reflecting members 16 may be arranged in a plane intersecting the extension direction of the guide member 141 provided in the moving device 14. In other words, the plurality of reflecting members 16 may be arranged in a plane intersecting the translation axis along which the measuring head 15M is moved by the moving device 14. In the example shown in FIG. 4 , the extension direction of the guide member 141 is along the Y axis (R) (i.e., the translation axis along which the measuring head 15M moves is an axis along the Y axis (R)), and therefore the plurality of reflecting members 16 may be arranged in a plane intersecting the Y axis (R). As an example, the plurality of reflecting members 16 may be arranged in the X(R)Z(R) plane of the hand coordinate system.

[0074] The plurality of reflecting members 16 may include at least two first reflecting members 16 arranged in a plane along the extension direction of the guide member 141 provided in the moving device 14. In other words, the plurality of reflecting members 16 may include at least two first reflecting members 16 arranged in a plane along the translation axis along which the measurement head 15M is moved by the moving device 14, or in a plane parallel to the translation axis. In the example shown in FIG. 4 , the extension direction of the guide member 141 is a direction along the Y axis (R) (i.e., the translation axis along which the measurement head 15M moves is an axis along the Y axis (R)), and therefore the plurality of reflecting members 16 may include at least two first reflecting members 16 arranged in a plane along the Y axis (R). As an example, the plurality of reflecting members 16 may include at least two first reflecting members 16 arranged in at least one of the X(R)Y(R) plane and the Y(R)Z(R) plane of the hand coordinate system.

[0075] In addition to or instead of at least two first reflecting members 16 arranged in a plane along the extension direction of the guide member 141 included in the moving device 14, the multiple reflecting members 16 may include at least two second reflecting members 16 arranged in a plane intersecting the extension direction of the guide member 141 included in the moving device 14. In other words, the multiple reflecting members 16 may include at least two second reflecting members 16 arranged in a plane intersecting the translational axis along which the measurement head 15M is moved by the moving device 14. In the example shown in FIG. 4 , since the extension direction of the guide member 141 is along the Y axis (R) (i.e., the translational axis along which the measurement head 15M moves is an axis along the Y axis (R)), the multiple reflecting members 16 may include at least two second reflecting members 16 arranged in a plane intersecting the Y axis (R). As an example, the multiple reflecting members 16 may include at least two second reflecting members 16 arranged in the X(R)Z(R) plane of the hand coordinate system.

[0076] (1-3) Configuration of the Measuring Device 2 Next, the configuration of the measuring device 2 will be described with reference to Fig. 5. Fig. 5 is a front view showing the appearance of the measuring device 2.

[0077] As shown in FIG. 5 , the measurement device 2 includes a base 21 and a housing 22 .

[0078] The base 21 is a component that forms the foundation of the measurement device 2. The base 21 is placed on a support surface SS, such as a floor surface. The base 21 may be fixed to the support surface SS. Alternatively, the base 21 may be movable relative to the support surface SS. As an example, the base 21 may be self-propelled on the support surface SS. In this case, the base 21 may be installed on an automated guided vehicle. Alternatively, an automated guided vehicle may be used as the base 21. An example of an automated guided vehicle is at least one of an AGV (Automatic Guided Vehicle) and an AMR (Autonomous Mobile Robot). Note that FIG. 5 shows an example in which the base 21 is fixed to the support surface SS.

[0079] The housing 22 is attached to the base 21. The housing 22 is a component that houses the measurement optical system 23. The housing 22 may be rotatable around a predetermined rotation axis. In the example shown in FIG. 5 , the housing 22 is rotatable around a rotation axis along the Y axis (e.g., an axis extending horizontally) in a measurement coordinate system defined based on the measurement device 2 and a rotation axis along the Z axis (e.g., an axis extending vertically or in the direction of gravity) in the measurement coordinate system. In other words, the housing 22 is rotatable along a pan direction (longitude direction), which is a rotation direction around a rotation axis along the vertical direction or the direction of gravity, and a tilt direction (latitude direction), which is a rotation direction around a rotation axis along the horizontal direction.

[0080] The configuration of the measurement optical system 23 is shown in Fig. 6. Note that Fig. 6 merely shows one example of the configuration of the measurement optical system 23, and the configuration of the measurement optical system 23 is not limited to the configuration shown in Fig. 6. The measurement optical system 23 may have any configuration that can irradiate the above-mentioned reflecting member 16 with measurement light ML2 and receive the return light RL2 from the above-mentioned reflecting member 16.

[0081] As shown in FIG. 6, the measurement optical system 23 includes an interferometer 231 , a beam steering mirror 232 , a camera 233 , and a half mirror 234 .

[0082] The interferometer 231 emits measurement light ML2. The measurement light ML2 emitted by the interferometer 231 passes through the half mirror 234, is reflected by the beam steering mirror 232, and is emitted toward the outside of the housing 22 through the opening 221 formed in the housing 22. As a result, the measurement light ML2 is irradiated onto the reflecting member 16.

[0083] The housing 22 rotates along at least one of the pan direction and the tilt direction so that the measurement light ML2 is irradiated onto the reflecting member 16. Specifically, when the housing 22 rotates along at least one of the pan direction and the tilt direction, the direction in which the measurement light ML2 is emitted from the housing 22 is changed. Therefore, the housing 22 rotates along at least one of the pan direction and the tilt direction so that the measurement light ML2 is emitted from the housing 22 toward the reflecting member 16.

[0084] The return light RL2 from the reflecting member 16 enters the interior of the housing 22 through an opening 221 formed in the housing 22, is reflected by a beam steering mirror 232, passes through a half mirror 234, and enters an interferometer 231. The reference light, which is part of the measurement light ML2, also enters the interferometer 231. As a result, the interferometer 231 receives (in other words, detects) the return light RL2 and the reference light. In particular, the interferometer 231 receives (in other words, detects) interference light generated by interference between the return light RL2 and the reference light. The reception result of the return light RL2 (i.e., the reception result of the interference light) is output to the control device 3 as the measurement result of the measurement device 2.

[0085] The control device 3 may calculate the position of the reflecting member 16 based on the reception result of the return light RL2 (i.e., the reception result of the interference light). In this embodiment, the control device 3 may calculate the distance between the measurement device 2 and the reflecting member 16 as an example of the position of the reflecting member 16 based on the reception result of the return light RL2 (i.e., the reception result of the interference light). Note that, as a method for calculating the distance to the reflecting member 16 based on the reception result of the interference light, the control device 3 may employ an existing method using an interferometer as a rangefinder, such as the methods disclosed in U.S. Patent Publication No. 2024 / 0085759, European Patent Publication No. 4332667, European Patent Publication No. 4318107, and European Patent Publication No. 4296763. For this reason, a description of the method for calculating the distance to the reflecting member 16 based on the reception result of the interference light will be omitted. Furthermore, a time-of-flight (TOF) rangefinder may be used as the rangefinder of the measurement device 2. The TOF method may use intensity modulation or wavelength modulation, and may use the range finders described in, for example, U.S. Patent Nos. 8,687,173 and 7,139,446.

[0086] Furthermore, return light NL of ambient light (or illumination light) from the reflecting member 16 may enter the inside of the housing 22 through an opening 221 formed in the housing 22. In this case, the return light NL may be reflected by the beam steering mirror 232, reflected by the half mirror 234, and then incident on the camera 233. The camera 233 may capture an image of the reflecting member 16 by receiving the return light NL using an imaging element. The image of the reflecting member 16 captured by the camera 233 may be output to the control device 3. The control device 3 may track the reflecting member 16 based on the image of the reflecting member 16. Furthermore, the control device 3 may control the rotational movement of the housing 22 based on the image of the reflecting member 16 so that the measurement light ML2 is irradiated onto the reflecting member 16.

[0087] Such a measurement device 2 may be referred to as a localizer or a laser tracker. The configuration of the measurement device 2 described above is merely an example, and the configuration of the measurement device 2 is not limited to the configurations shown in Figures 5 and 6. For example, the measurement devices (localizers or laser trackers) described in International Patent Publication Nos. 2020 / 72484 and 2020 / 198253, U.S. Patent Nos. 9,989,350 and 9,945,938 may be used as the measurement device 2.

[0088] (1-4) Configuration of the Control Device 3 Next, the configuration of the control device 3 will be described with reference to Fig. 7. Fig. 7 is a block diagram showing the configuration of the control device 3.

[0089] 7 , the control device 3 includes a calculation device 31, a storage device 32, and a communication device 33. The control device 3 may further include an input device 34 and an output device 35. However, the control device 3 does not necessarily have to include at least one of the input device 34 and the output device 35. The calculation device 31, the storage device 32, the communication device 33, the input device 34, and the output device 35 may be connected via a data bus 36.

[0090] The arithmetic device 31 is hardware that includes at least a circuit (for example, at least one of an electronic circuit and an electric circuit). For this reason, the arithmetic device 31 may be referred to as a group of circuits.

[0091] The arithmetic device 31 includes at least one processor (i.e., one processor or multiple processors) as hardware. The processor may include, for example, a processor conforming to a von Neumann computer architecture. The processor conforming to the von Neumann computer architecture may include at least one of a CPU (Central Processing Unit) and a GPU (Graphics Processing Unit). The processor may include, for example, a processor conforming to a non-von Neumann computer architecture. The processor conforming to the non-von Neumann computer architecture may include at least one of an FPGA (Field Programmable Gate Array) and an ASIC (Application Specific Circuit). The processor may be realized by a group of circuits (e.g., at least one of an electronic circuit and an electric circuit).

[0092] The arithmetic device 31 reads a computer program 321 including at least one of computer program code and computer program instructions. For example, the arithmetic device 31 may read the computer program 321 stored in the storage device 32. For example, the arithmetic device 31 may read the computer program 321 stored in a computer-readable, non-transitory storage medium using a storage medium reading device (not shown) included in the control device 3. The computer program 321 read from the storage medium may be stored in the storage device 32. The arithmetic device 31 may acquire (i.e., download or read) the computer program 321 from a device (not shown) located outside the control device 3 via the communication device 33 (or another communication device). The downloaded computer program 321 may be stored in the storage device 32.

[0093] The arithmetic device 31 executes the loaded computer program 321. As a result, logical functional blocks for executing the processing to be performed by the control device 3 (e.g., the processing for controlling the robot 1 described above) are realized within the arithmetic device 31. In other words, the arithmetic device 31, together with the storage device 32 or the like in which the computer program 321 is recorded (in other words, together with the storage device 32 and the computer program 321 recorded in the storage device 32 or the like), can function as a controller or computer for realizing the logical functional blocks for executing the processing to be performed by the control device 3. In other words, the at least one processor included in the arithmetic device 31, the memory (recording medium) included in the storage device 32 or the like, and the computer program 321 are configured so that the control device 3 performs the processing to be performed by the control device 3 (e.g., the processing for controlling the robot 1 described above).

[0094] The arithmetic device 31 may include a single processor. In this case, the arithmetic device 31 may use the single processor to perform the processing to be performed by the control device 3 (e.g., the processing for controlling the robot 1 described above). For example, if the arithmetic device 31 performs a first operation (e.g., a first processing that is part of the processing for controlling the robot 1) and a second operation (e.g., a second processing that is another part of the processing for controlling the robot 1), the arithmetic device 31 may use a single processor to perform both the first and second operations. Alternatively, the arithmetic device 31 may include multiple processors. In this case, the arithmetic device 31 may use any one of the multiple processors to perform the processing to be performed by the control device 3 (e.g., the processing for controlling the robot 1 described above). For example, if the arithmetic device 31 includes first and second processors and performs the first and second operations, the arithmetic device 31 may use any one of the first and second processors to perform each of the first and second operations. For example, the computing device 31 may perform a first operation using a first processor, may perform a second operation using the first processor, may perform the first operation using a second processor, or may perform the second operation using the second processor.

[0095] A computational model that can be constructed by machine learning may be implemented in the computational device 31 by the computational device 31 executing the computer program 321. An example of a computational model that can be constructed by machine learning is a computational model including a neural network (so-called artificial intelligence (AI)). In this case, learning of the computational model may include learning of parameters of the neural network (e.g., at least one of a weight and a bias). The computational device 31 may control the robot 1 using the computational model. In other words, the operation of controlling the robot 1 may include the operation of controlling the robot 1 using the computational model. Note that a computational model that has been constructed by offline machine learning using training data may be implemented in the computational device 31. Furthermore, the computational model implemented in the computational device 31 may be updated by online machine learning on the computational device 31. Alternatively, the calculation device 31 may control the robot 1 using a calculation model implemented in a device external to the calculation device 31 (i.e., a device provided outside the control device 3) in addition to or instead of the calculation model implemented in the calculation device 31.

[0096] The recording medium for recording the computer program 321 executed by the arithmetic device 31 may be at least one of the following: a CD-ROM, CD-R, CD-RW, a flexible disk, an MO, a DVD-ROM, a DVD-RAM, a DVD-R, a DVD+R, a DVD-RW, a DVD+RW, or an optical disk such as Blu-ray (registered trademark), a magnetic medium such as a magnetic tape, a magneto-optical disk, a semiconductor memory such as a USB memory, or any other medium capable of storing a program. The recording medium may include a device capable of recording the computer program 321 (for example, a general-purpose device or a dedicated device in which the computer program 321 is implemented in a state in which it can be executed in at least one of the forms of software and firmware). Furthermore, each process or function included in the computer program 321 may be realized by a logical processing block realized within the arithmetic device 31 (i.e., processor) when the arithmetic device 31 executes the computer program 321, or may be realized by hardware such as a predetermined gate array (FPGA (Field Programmable Gate Array), ASIC (Application Specific Integrated Circuit)) provided in the arithmetic device 31, or may be realized in a form that mixes logical processing blocks and partial hardware modules that realize some elements of the hardware.

[0097] The storage device 32 includes at least one memory capable of storing desired data. In other words, the storage device 32 includes at least one memory containing desired data. The memory may be realized by a group of circuits (e.g., at least one of electronic circuits and electric circuits). For example, the storage device 32 may store a computer program 321 executed by the arithmetic device 31. In this case, the storage device 32 (memory) may be used as the above-mentioned recording medium for recording the computer program 321 executed by the arithmetic device 31. The storage device 32 may temporarily store data used by the arithmetic device 31 when the arithmetic device 31 is executing the computer program 321. The storage device 32 may also store data to be stored long-term by the control device 3. The storage device 32 may include at least one of a RAM (Random Access Memory), a ROM (Read Only Memory), a hard disk device, a magneto-optical disk device, an SSD (Solid State Drive), and a disk array device. That is, the storage device 32 may include a non-transitory recording medium.

[0098] The communication device 33 is capable of communicating with both the robot 1 and the measuring device 2 via a communication network (not shown). Alternatively, the communication device 33 may be capable of communicating with devices other than the robot 1 and the measuring device 2, in addition to or instead of at least one of the robot 1 and the measuring device 2, via a communication network (not shown). In this embodiment, the communication device 33 may receive (i.e., acquire) the measurement results of the measuring device 2 (i.e., information about the position of the distal arm member 123 and information about the reception result of the return light RL2 from the reflecting member 16) from the measuring device 2. Furthermore, the communication device 33 may receive (i.e., acquire) the measurement results of the measuring device 144 (i.e., information about the position of the end effector 15) from the measuring device 144 of the robot 1. Furthermore, the communication device 33 may transmit (i.e., output) a robot control signal to the robot 1.

[0099] The input device 34 is a device capable of accepting information input to the control device 3 from outside the control device 3. For example, the input device 34 may include an operation device (for example, at least one of a keyboard, a mouse, and a touch panel) that can be operated by a user of the control device 3. For example, the input device 34 may include a recording medium reading device that can read information recorded as data on a recording medium that can be externally attached to the control device 3.

[0100] It should be noted that information can be input as data to the control device 3 from a device external to the control device 3 via the communication device 33. In this case, the communication device 33 may function as an input device capable of accepting information input to the control device 3 from outside the control device 3.

[0101] The output device 35 is a device capable of outputting information to the outside of the control device 3. For example, the output device 35 may output information as an image. That is, the output device 35 may include a display device (a so-called display) capable of displaying an image. For example, the output device 35 may output information as sound. That is, the output device 35 may include an audio device (a so-called speaker) capable of outputting sound. For example, the output device 35 may output information on paper. That is, the output device 35 may include a printing device (a so-called printer) capable of printing desired information on paper. For example, the output device 35 may output information as data to a recording medium that can be externally attached to the control device 3.

[0102] The control device 3 can output information as data to a device external to the control device 3 via the communication device 33. In this case, the communication device 33 may function as an output device that can output information to a device external to the control device 3.

[0103] (2) Operation of Robot System SYS Next, the operation of the robot system SYS in this embodiment will be described.

[0104] (2-1) Measurement Operation of Workpiece W As described above, the robot 1 measures the position of each part of the workpiece W using at least one of the measurement heads 15M#1 and 15M#2 attached to the robot arm 12. Therefore, hereinafter, the measurement operation for measuring the position of each part of the workpiece W using at least one of the measurement heads 15M#1 and 15M#2 will be described with reference to Fig. 8. Fig. 8 is a flowchart showing the flow of the measurement operation for measuring the position of each part of the workpiece W using at least one of the measurement heads 15M#1 and 15M#2.

[0105] 8, the robot 1 uses the measurement head 15M#1 and the measurement head 15M#2 to measure the position of each part of the workpiece W in the hand coordinate system (step S1). That is, the robot 1 uses the measurement head 15M#1 and the measurement head 15M#2 to acquire information about the position of each part of the workpiece W in the hand coordinate system (step S1).

[0106] In order to measure the position of each portion of the workpiece W, at least one of the measurement heads 15M#1 and 15M#2 irradiates the surface of the workpiece W with measurement light ML1 so as to form a linear irradiation area (i.e., an area irradiated with measurement light ML1) on the surface of the workpiece W (step S11). Furthermore, at least one of the measurement heads 15M#1 and 15M#2 receives return light RL1, which is the measurement light ML1 reflected by the workpiece W (step S11). The reception results of the return light RL2 by the measurement heads 15M#1 and 15M#2 (e.g., the reception results of the interference light) are output from the measurement heads 15M#1 and 15M#2 to the control device 3 as measurement results by the measurement heads 15M#1 and 15M#2, respectively (i.e., information regarding the position of each portion of the workpiece W in the hand coordinate system).

[0107] Here, the information regarding the position of each part of the workpiece W in the hand coordinate system may be point cloud data, which is a set of points indicating the position of each part. This point cloud data may be a set of coordinates of multiple points constituting the part of the surface of the workpiece W that is included in the measurement range MR (MR#1, MR#2). Therefore, the point cloud data may be considered to be three-dimensional shape information of the part of the surface of the workpiece W that is included in the measurement range MR (MR#1, MR#2). The three-dimensional shape information may also be referred to as topography information. Furthermore, the measurement head 15M#1 and the measurement head 15M#2 may output a three-dimensional model constructed from the point cloud data as the measurement result.

[0108] Furthermore, during at least a portion of the period during which the measurement head 15M#1 is irradiating the surface of the workpiece W with the measurement light ML1, the movement device 14 moves the measurement head 15M#1 so that the linear irradiation area formed on the surface of the workpiece W by the measurement head 15M#1 moves on the surface of the workpiece W (step S12). In other words, the movement device 14 may move the measurement head 15M#1 so that the linear irradiation area onto which the measurement head 15M#1 irradiates the measurement light ML1 scans the surface of the workpiece W. Therefore, in this embodiment, the measurement head 15M#1 measures the position of each portion of the workpiece W during at least a portion of the period during which the movement device 14 is moving the measurement head 15M#1. The measurement head 15M#1 measures the position of each portion of the workpiece W during at least a portion of the period during which the movement device 14 is moving the measurement head 15M#1. The robot 1 moves the measuring head 15M#1 using the moving device 14, and measures the position of each part of the workpiece W using the measuring head 15M#1.

[0109] Similarly, during at least a portion of the period during which measurement head 15M#2 is irradiating the surface of the workpiece W with measurement light ML1, movement device 14 moves measurement head 15M#2 so that the linear irradiation area formed on the surface of the workpiece W by measurement head 15M#2 moves on the surface of the workpiece W (step S12). In other words, movement device 14 may move measurement head 15M#2 so that the linear irradiation area onto which measurement head 15M#2 irradiates measurement light ML1 scans the surface of the workpiece W. Therefore, in this embodiment, measurement head 15M#2 measures the position of each portion of the workpiece W during at least a portion of the period during which movement device 14 is moving measurement head 15M#2. Measurement head 15M#2 measures the position of each portion of the workpiece W during at least a portion of the period during which movement device 14 is moving measurement head 15M#2. The robot 1 moves the measuring head 15M#2 using the moving device 14, and measures the position of each part of the workpiece W using the measuring head 15M#2.

[0110] Here, measurement heads 15M#1 and 15M#2 measure the portion of the workpiece W that overlaps with the linear irradiation area, and since the linear irradiation area at a certain timing can be considered to be the measurement area, step S12 can also be considered to be a step of moving measurement heads 15M#1 and 15M#2 so that the measurement areas of measurement heads 15M#1 and 15M#2 move on the surface of the workpiece W.

[0111] 9(a) and 9(c), which are cross-sectional views showing the workpiece W irradiated with the measurement light ML1, and 9(b) and 9(d), which are plan views showing the workpiece W irradiated with the measurement light ML1, the range scanned on the surface of the workpiece W by the linear irradiation area (hereinafter referred to as irradiation area IA#1) onto which the measurement head 15M#1 irradiates the measurement light ML1 is the measurement range MR#1 of the measurement head 15M#1 (i.e., the measurement range where measurement is performed by the measurement head 15M#1). Similarly, as shown in FIGS. 9(a) to 9(d), the range scanned on the surface of the workpiece W by the linear irradiation area (hereinafter referred to as irradiation area IA#2) onto which the measurement head 15M#2 irradiates the measurement light ML1 is the measurement range MR#2 of the measurement head 15M#2 (i.e., the measurement range where measurement is performed by the measurement head 15M#2).

[0112] 9(a) and 9(b), the movement device 14 may move the measurement head 15M#1 and the measurement head 15M#2 so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 do not overlap on the surface of the workpiece W. As an example, the movement device 14 may move the measurement head 15M#1 and the measurement head 15M#2 along a direction intersecting the translational axis along which the measurement head 15M#1 and the measurement head 15M#2 move so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 do not overlap on the surface of the workpiece W. In the example shown in Figures 9(a) and 9(b), the translational axis along which measurement head 15M#1 and measurement head 15M#2 move is a translational axis along the Y-axis (R). Therefore, the moving device 14 may move measurement head 15M#1 and measurement head 15M#2 on the surface of the workpiece W along a direction intersecting the Y-axis (R) (for example, a direction along the X-axis (R)) so that the measurement range MR#1 of measurement head 15M#1 and the measurement range MR#2 of measurement head 15M#2 do not overlap.

[0113] Alternatively, the measurement heads 15M#1 and 15M#2 may be aligned so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 do not overlap on the surface of the workpiece W. As an example, the measurement heads 15M#1 and 15M#2 may be aligned so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 do not overlap on the surface of the workpiece W along a direction intersecting the translational axis along which the measurement heads 15M#1 and 15M#2 move. In the example shown in Figures 9(a) and 9(b), the translational axis along which measurement head 15M#1 and measurement head 15M#2 move is a translational axis along the Y-axis (R). Therefore, measurement head 15M#1 and measurement head 15M#2 may be aligned on the surface of workpiece W along a direction intersecting the Y-axis (R) (for example, a direction along the X-axis (R)) so that the measurement range MR#1 of measurement head 15M#1 and the measurement range MR#2 of measurement head 15M#2 do not overlap.

[0114] 9(c) and 9(d), the movement device 14 may move the measurement head 15M#1 and the measurement head 15M#2 so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 at least partially overlap on the surface of the workpiece W. As an example, the movement device 14 may move the measurement head 15M#1 and the measurement head 15M#2 along a direction intersecting the translational axis along which the measurement head 15M#1 and the measurement head 15M#2 move so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 at least partially overlap on the surface of the workpiece W. In the example shown in Figures 9(c) and 9(d), the translational axis along which measurement head 15M#1 and measurement head 15M#2 move is a translational axis along the Y-axis (R). Therefore, the moving device 14 may move measurement head 15M#1 and measurement head 15M#2 on the surface of the workpiece W along a direction intersecting the Y-axis (R) (for example, a direction along the X-axis (R)) so that the measurement range MR#1 of measurement head 15M#1 and the measurement range MR#2 of measurement head 15M#2 at least partially overlap.

[0115] Alternatively, measurement head 15M#1 and measurement head 15M#2 may be aligned such that the measurement range MR#1 of measurement head 15M#1 and the measurement range MR#2 of measurement head 15M#2 at least partially overlap on the surface of workpiece W. As an example, measurement head 15M#1 and measurement head 15M#2 may be aligned such that the measurement range MR#1 of measurement head 15M#1 and the measurement range MR#2 of measurement head 15M#2 at least partially overlap on the surface of workpiece W along a direction intersecting the translational axis along which measurement head 15M#1 and measurement head 15M#2 move. In the examples shown in Figures 9(c) and 9(d), the translational axis along which measurement head 15M#1 and measurement head 15M#2 move is a translational axis along the Y-axis (R). Therefore, measurement head 15M#1 and measurement head 15M#2 may be aligned on the surface of workpiece W in a direction intersecting the Y-axis (R) (e.g., a direction along the X-axis (R)) so that the measurement range MR#1 of measurement head 15M#1 and the measurement range MR#2 of measurement head 15M#2 at least partially overlap.

[0116] 9(a) to 9(d) show an example in which the measurement axis MX#1 of measurement head 15M#1 and the measurement axis MX#2 of measurement head 15M#2 are parallel to each other. However, as will be described later in a fourth modified example, the measurement axis MX#1 of measurement head 15M#1 and the measurement axis MX#2 of measurement head 15M#2 do not have to be parallel to each other. The measurement axis MX#1 of measurement head 15M#1 may be inclined with respect to the measurement axis MX#2 of measurement head 15M#2.

[0117] The measurement axis MX of the measurement head 15M may be an axis determined based on the measurement head 15M. Examples of the measurement axis MX of the measurement head 15M include at least one of the optical axis of the irradiation optical system 151M, an axis connecting the irradiation optical system 151M and the center of gravity (center) of an irradiation range IAR in which the measurement head 15M can irradiate the measurement light ML1 via the irradiation optical system 151M, an axis along the traveling direction (emission direction) of the measurement light ML1 from the measurement head 15M, the optical axis of the light receiving optical system 152M, an axis connecting the light receiving optical system 152M and the center of gravity (center) of a measurable range MAR in which the measurement head 15M can receive the return light RL1 via the light receiving optical system 152M, and an axis along the traveling direction (emission direction) of the return light RL1 from the workpiece W toward the measurement head 15M.

[0118] As a first example, Fig. 10(a) shows an example of the measurement axis MX when the measurement head 15M is the above-mentioned line scanner. When the measurement head 15M is the above-mentioned line scanner, as shown in Fig. 10(a), the optical axis AX of the light-receiving optical system 152M may be used as the measurement axis MX. Alternatively, as shown in Fig. 10(a), the measurement axis MX may be an axis connecting the light-receiving optical system 152M and the center of gravity (center) C of the measurable range MAR that can be measured by the measurement head 15M receiving the return light RL1 via the light-receiving optical system 152M.

[0119] As a second example, FIG. 10B shows an example of the measurement axis MX when the measurement head 15M is the above-described stereo camera. When the measurement head 15M is the above-described stereo camera, as shown in FIG. 10B, the measurement head 15M may be provided with a first camera 154M#1 (e.g., a right camera) including a first light-receiving optical system 152M#1 and a first light-receiving element 153M#1, and a second camera 154M#2 (e.g., a left camera) including a second light-receiving optical system 152M#2 and a second light-receiving element 153M#2. In this case, the measurement axis MX may be an axis connecting the center of the base line connecting the first camera 154M#1 and the second camera 154M#2 and the point where the optical axis AX#1 of the first light-receiving optical system 152M#1 and the optical axis AX#2 of the second light-receiving optical system 152M#2 intersect. Alternatively, the measurement axis MX may be an axis connecting the center of the base line connecting the first camera 154M#1 and the second camera 154M#2 and the center of gravity (center) C of the measurable range MAR that can be measured by the measurement head 15M receiving the return light RL1 via the first light receiving optical system 152M#1 and the second light receiving optical system 152M#2. The stereo camera measures the three-dimensional shape of the surface of the workpiece W within the measurable range MAR (the positions of each part of the surface) using images from the first camera 154M#1 and the second camera 154M#2.

[0120] As a third example, when the measurement head 15M is the above-mentioned localizer or laser tracker, an axis along the traveling direction (emission direction) of the measurement light ML1 from the measurement head 15M may be used as the measurement axis MX. Alternatively, an axis along the traveling direction (emission direction) of the return light RL1 from the workpiece W toward the measurement head 15M may be used as the measurement axis MX. Even in this case, the measurement head 15M measures the three-dimensional shape of the surface of the workpiece W (the position of each part of the surface).

[0121] 8 , when at least one of measurement head 15M#1 and measurement head 15M#2 moves in order to move linear irradiation areas IA#1 and IA#2 on the surface of workpiece W in step S12, a reaction force may be generated due to the movement of at least one of measurement head 15M#1 and measurement head 15M#2. As will be described in detail later, such a reaction force may lead to unintended vibration and / or unintended positional deviation of robot arm 12. As will be described in detail later, unintended vibration and / or unintended positional deviation of robot arm 12 may lead to a deterioration in the measurement accuracy of at least one of measurement head 15M#1 and measurement head 15M#2. Therefore, in this embodiment, when moving at least one of measurement head 15M#1 and measurement head 15M#2 to move linear irradiation areas IA#1 and IA#2 on the surface of workpiece W in step S12, moving device 14 may perform a reaction force reduction operation to move measurement head 15M#1 and measurement head 15M#2 so that the reaction force generated due to the movement of either measurement head 15M#1 or measurement head 15M#2 is reduced or offset by the reaction force generated due to the movement of the other of measurement head 15M#1 and measurement head 15M#2. That is, the movement of measurement heads 15M#1 and 15M#2 in step S12 may include (i) a movement for moving linear irradiation areas IA#1 and IA#2 on the surface of workpiece W in step S12, and (ii) a movement for reducing or canceling out a reaction force caused by the movement of either measurement head 15M#1 or measurement head 15M#2 with a reaction force caused by the movement of the other of measurement head 15M#1 or measurement head 15M#2. Note that the reaction force reduction operation will be described in detail later with reference to FIG. 11 etc., and therefore will not be described here.

[0122] In parallel with the operation of step S1, the measurement device 2 measures the position of the robot 1 in the reference coordinate system (in this embodiment, the position of the distal arm member 123 of the robot arm 12) (step S2). That is, the measurement device 2 acquires information about the position of the robot 1 in the reference coordinate system (in this embodiment, the position of the distal arm member 123 of the robot arm 12) (step S2). To measure the position of the distal arm member 123, the measurement device 2 irradiates the reflecting member 16 with measurement light ML2 as described above. Furthermore, the measurement device 2 receives the return light RL2, which is the measurement light ML2 reflected by the reflecting member 16. The measurement device 2's reception result of the return light RL2 (e.g., the reception result of the interference light) is output from the measurement device 2 to the control device 3 as the measurement result of the measurement device 2 (i.e., information about the position of the robot 1 in the reference coordinate system). Note that the measurement of the position of the robot 1 in the reference coordinate system by the measurement device 2 may be performed prior to step S1. Alternatively, the measurement of the position of the robot 1 in the reference coordinate system by the measurement device 2 may be performed after step S1.

[0123] Thereafter, the control device 3 determines whether or not the measurement of the workpiece W should be terminated (step S4). For example, when the measurement of the position of the measurement target portion of the workpiece W that should be measured by the measuring head 15M has been completed, the control device 3 may determine that the measurement of the workpiece W should be terminated. For example, when the measurement of the position of the measurement target portion of the workpiece W that should be measured by the measuring head 15M has not been completed, the control device 3 may determine that the measurement of the workpiece W should not be terminated.

[0124] If it is determined in step S4 that the measurement of the workpiece W should not be terminated (step S4: No), the robot system SYS performs the operations from step S1 to step S2 again. At this time, before performing the operations from step S1 to step S2 again, the robot 1 may change the positional relationship between the workpiece W and the measurement head 15M by moving the robot arm 12 under the control of the control device 3 (step S5). That is, the robot system SYS may repeat the operations from step S1 to step S2 while changing the positional relationship between the workpiece W and the measurement head 15M by moving the robot arm 12. In particular, the robot 1 may change the positional relationship between the workpiece W and the measurement head 15M by moving the robot arm 12 so that the measurement light ML1 can be irradiated onto unmeasured portions of the measurement target portion of the workpiece W that have not yet been measured by the measurement head 15M#1 and the measurement head 15M#2 (step S5). As a result, the robot 1 can use the measurement head 15M#1 and the measurement head 15M#2 to measure the position of each part of the workpiece W over a wider range. When steps S1 and S2 are performed after the movement of the robot arm 12 in step S5, steps S1 and S2 may be performed after the vibration of the robot arm 12 when the robot arm 12 transitions from a moving state to a stationary state has fallen within an allowable range. In other words, steps S1 and S2 may be performed after a settling time has been allowed after the robot arm 12 transitions from a moving state to a stationary state.

[0125] On the other hand, if it is determined in step S4 that the measurement of the workpiece W should not be terminated (step S4: No), the control device 3 calculates the position of each part of the workpiece W in the reference coordinate system based on the measurement results by at least one of the measuring heads 15M#1 and 15M#2 in step S1 and the measurement results by the measuring device 2 in step S2 (step S6). That is, the control device 3 calculates information about the position of each part of the workpiece W in the reference coordinate system based on the measurement results of the position of each part of the workpiece W by at least one of the measuring heads 15M#1 and 15M#2 in step S1 and the measurement results of the position of the distal arm member 123 by the measuring device 2 in step S2 (step S6).

[0126] In order to calculate the position of each part of the workpiece W in the reference coordinate system, the control device 3 may calculate the position of the reflecting members 16 provided on the distal arm member 123 in the reference coordinate system based on the measurement results by the measuring device 2 in step S2. In particular, when the distal arm member 123 is provided with at least three reflecting members 16 as described above, the control device 3 may calculate the positions of the at least three reflecting members 16 in the reference coordinate system based on the measurement results by the measuring device 2 in step S1.

[0127] Thereafter, the control device 3 may calculate the position of the distal arm member 123 in the reference coordinate system based on the calculation results of the position of the reflecting member 16 (for example, the calculation results of the distance between the measurement device 2 and the reflecting member 16). For example, the control device 3 may calculate at least one of the position of the distal arm member 123 in a linear direction along the X-axis (G), the position of the distal arm member 123 in a linear direction along the Y-axis (G), the position of the distal arm member 123 in a linear direction along the Z-axis (G), the position of the distal arm member 123 in a rotational direction about the X-axis (G), the position of the distal arm member 123 in a rotational direction about the Y-axis (G), and the position of the distal arm member 123 in a rotational direction about the Z-axis (G), based on the calculation results of the position of at least one reflecting member 16 (for example, the calculation results of the distance between the measurement device 2 and at least one reflecting member 16). As described above, when the distal arm member 123 is equipped with at least three reflecting members 16, the calculation results of the positions of the at least three reflecting members 16 are equivalent to the calculation results of the positions of at least three parts of the distal arm member 123 at which the at least three reflecting members 16 are located. For this reason, the control device 3 may calculate the position of the distal arm member 123 in a linear direction along the X-axis (G), the position of the distal arm member 123 in a linear direction along the Y-axis (G), the position of the distal arm member 123 in a linear direction along the Z-axis (G), the position of the distal arm member 123 in a rotational direction about the X-axis (G), the position of the distal arm member 123 in a rotational direction about the Y-axis (G), and the position of the distal arm member 123 in a rotational direction about the Z-axis (G), based on the calculation results of the positions of the at least three reflecting members 16 (that is, the calculation results of the positions of at least three parts of the distal arm member 123).

[0128] Thereafter, the control device 3 may generate a coordinate transformation matrix for transforming coordinates in either the reference coordinate system or the hand coordinate system into coordinates in the other of the reference coordinate system or the hand coordinate system, based on the position of the distal arm member 123 in the reference coordinate system. Specifically, as described above, the hand coordinate system is a three-dimensional coordinate system defined with reference to the robot arm 12. Therefore, when the position of the distal arm member 123 in the reference coordinate system (i.e., the position of the robot arm 12) is calculated, it is possible to define a hand coordinate system, which is a three-dimensional coordinate system defined with reference to the robot arm 12 (or a three-dimensional coordinate system defined with reference to the movement device 14 or the measurement head 15M attached to the robot arm 12), within the reference coordinate system. Therefore, the control device 3 can generate a coordinate transformation matrix for transforming coordinates in either the reference coordinate system or the hand coordinate system into coordinates in the other of the reference coordinate system or the hand coordinate system, based on the position of the distal arm member 123 in the reference coordinate system.

[0129] In parallel with generating the coordinate transformation matrix, the control device 3 may calculate the position of each portion of the workpiece W in the hand coordinate system based on the measurement results of at least one of the measurement heads 15M#1 and 15M#2 in step S1. Specifically, as described above, each of the measurement heads 15M#1 and 15M#2 is a measurement device capable of measuring the position of each portion of an object (e.g., the workpiece W) using a light-section method. In this case, in step S1, at least one of the measurement heads 15M#1 and 15M#2 may output multiple images acquired using the light-section method to the control device 3 as the measurement results of at least one of the measurement heads 15M#1 and 15M#2 in step S1. The control device 3 may calculate a shape profile of the surface of the workpiece W in the hand coordinate system based on the multiple images acquired from at least one of the measurement heads 15M#1 and 15M#2. Thereafter, the control device 3 may calculate the position of each portion of the workpiece W in the hand coordinate system based on the shape profile of the surface of the workpiece W in the hand coordinate system. At this time, since the moving device 14 moves at least one of the measuring heads 15M#1 and 15M#2, the control device 3 may calculate the position of each part of the workpiece W in the hand coordinate system based on multiple images acquired from at least one of the measuring heads 15M#1 and 15M#2 and the measurement results of the positions of the measuring heads 15M#1 and 15M#2 by the measuring devices 144#1 and 144#2.

[0130] Thereafter, the control device 3 may convert the position of each part of the workpiece W in the hand coordinate system to the position of each part of the workpiece W in the reference coordinate system based on the coordinate transformation matrix. That is, the control device 3 may change the position of each part of the workpiece W in the hand coordinate system to the position of each part of the workpiece W in the reference coordinate system based on the coordinate transformation matrix. As a result, the position of each part of the workpiece W in the reference coordinate system is calculated. That is, information regarding the position of each part of the workpiece W in the reference coordinate system is generated.

[0131] The control device 3 may output the generated coordinate transformation matrix to at least one of the measurement heads 15M#1 and 15M#2. At least one of the measurement heads 15M#1 and 15M#2 may generate information regarding the position of each portion of the workpiece W in the reference coordinate system based on the coordinate transformation matrix generated by the control device 3 and the measurement results by at least one of the measurement heads 15M#1 and 15M#2. Thereafter, at least one of the measurement heads 15M#1 and 15M#2 may output information regarding the position of each portion of the workpiece W in the reference coordinate system to the control device 3 as the measurement results by at least one of the measurement heads 15M#1 and 15M#2 in step S1. In this case, the control device 3 may use the information regarding the position of each portion of the workpiece W in the reference coordinate system generated by at least one of the measurement heads 15M#1 and 15M#2 as information regarding the position of each portion of the workpiece W in the reference coordinate system.

[0132] Based on the calculation results of the positions of each part of the workpiece W in the reference coordinate system, the control device 3 may generate a robot control signal for controlling another robot 1 that performs a predetermined process on the workpiece W. For example, based on the calculation results of the positions of each part of the workpiece W in the reference coordinate system, the control device 3 may generate a robot control signal for controlling another robot 1 that performs a processing process to process a desired part of the workpiece W, the position of which in the reference coordinate system is known (for example, another robot 1 that has the above-mentioned processing head as an end effector 15).

[0133] (2-2) Reaction Force Reduction Operation Next, the reaction force reduction operation performed in step S12 of FIG. 8 will be described.

[0134] (2-2-1) Technical Issues to be Solved by Reaction Force Reduction Operation First, the technical issues to be solved by the reaction force reduction operation will be described with reference to Figures 11(a) and 11(b). Figure 11(a) is a plan view showing the measurement head 15M#1 moving along the guide member 141#1, and Figure 11(b) is a graph showing the movement speed of the measurement head 15M#1, the acceleration of the measurement head 15M#1, and the reaction force generated due to the movement of the measurement head 15M#1 when the measurement head 15M#1 moves as shown in Figure 11(a).

[0135] Note that Figure 11(b) shows the movement speed, acceleration, and reaction force in the direction along the Y-axis (R). In particular, Figure 11(b) shows the movement speed of movement in the positive direction of the Y-axis (R), the acceleration accelerating in the positive direction of the Y-axis (R), and the reaction force acting in the positive direction of the Y-axis (R) as positive movement speed, positive acceleration, and positive reaction force, respectively. On the other hand, Figure 11(b) shows the movement speed of movement in the negative direction of the Y-axis (R), the acceleration accelerating in the negative direction of the Y-axis (R), and the reaction force acting in the negative direction of the Y-axis (R) as negative movement speed, negative acceleration, and negative reaction force, respectively. The same applies to the movement speed, acceleration, and reaction force used in the following description.

[0136] 11(a) and 11(b), when the measurement head 15M#1 moves in step S12 of FIG. 8 described above, a reaction force may be generated due to the movement of the measurement head 15M#1. Specifically, after the measurement head 15M#1 starts moving, the measurement head 15M#1 accelerates until its movement speed reaches a constant movement speed, then moves at a constant speed, and then decelerates to stop. In this case, as shown in FIG. 11(b), a reaction force may be generated due to the movement (particularly the acceleration) of the measurement head 15M#1 during at least a part of the acceleration period during which the measurement head 15M#1 is accelerating. 11B, during at least a part of the acceleration period, a reaction force acting in a direction opposite to the movement direction of the measurement head 15M#1 (in this case, a reaction force acting in a direction opposite to the acceleration direction of the measurement head 15M#1) may be generated. Furthermore, as shown in FIG. 11B, during at least a part of the deceleration period in which the measurement head 15M#1 is decelerating, a reaction force due to the movement (particularly, deceleration) of the measurement head 15M#1 may be generated. For example, as shown in FIG. 11B, during at least a part of the deceleration period, a reaction force acting in the movement direction of the measurement head 15M#1 (in this case, a reaction force acting in a direction opposite to the deceleration direction of the measurement head 15M#1) may be generated.

[0137] Such a reaction force may cause unintended vibration and / or unintended positional deviation of the robot arm 12 to which the measurement head 15M#1 is attached. Furthermore, the unintended vibration and / or unintended positional deviation of the robot arm 12 may lead to a deterioration in the measurement accuracy of at least one of the measurement heads 15M#1 and 15M#2 attached to the robot arm 12. This is because the unintended vibration and / or unintended positional deviation of the robot arm 12 may cause unintended movement of each of the measurement heads 15M#1 and 15M#2 attached to the robot arm 12 (that is, the positions of the measurement heads 15M#1 and 15M#2 attached to the robot arm 12 may change unintendedly).

[0138] Here, the reaction force caused by the movement of the measurement head 15M#1 decreases as the movement speed (maximum speed in FIG. 11B) of the measurement head 15M#1 during measurement decreases. This is because the slower the movement speed of the measurement head 15M#1 during measurement, the smaller the acceleration and deceleration required to achieve the movement speed of the measurement head 15M#1 during measurement, and as a result, the reaction force caused by the acceleration and deceleration decreases. Therefore, by slowing down the movement speed of the measurement head 15M#1 during measurement, the possibility of the above-mentioned measurement accuracy deteriorating can be reduced. However, the slower the movement speed of the measurement head 15M#1 during measurement, the worse the throughput of the measurement process using the measurement head 15M#1. This is because the slower the movement speed of the measurement head 15M#1 during measurement, the longer the time required for the linear irradiation area IA#1 onto which the measurement head 15M#1 irradiates the measurement light ML1, to scan the measurement range MR#1 of the measurement head 15M#1. For this reason, simply slowing down the movement speed of the measurement head 15M#1 during measurement makes it difficult to reduce the possibility of a deterioration in measurement accuracy without unnecessarily deteriorating the throughput of the measurement process.

[0139] 8, the reaction force generated by the movement of the measuring head 15M#2 may cause unintended vibration and / or unintended positional deviation of the robot arm 12 to which the measuring head 15M#2 is attached. As a result, the reaction force generated by the movement of the measuring head 15M#2 may lead to a deterioration in the measurement accuracy of at least one of the measuring heads 15M#1 and 15M#2.

[0140] As described above, in this embodiment, there is a possibility that the reaction force generated due to the movement of at least one of the measurement heads 15M#1 and 15M#2 may lead to a technical problem in that the reaction force generated due to the movement of at least one of the measurement heads 15M#1 and 15M#2 may cause unintended vibration and / or positional deviation of the robot arm 12. This technical problem may lead to a further technical problem in that the reaction force generated due to the movement of at least one of the measurement heads 15M#1 and 15M#2 may deteriorate the measurement accuracy of at least one of the measurement heads 15M#1 and 15M#2.

[0141] Therefore, in this embodiment, in order to solve such technical problems, the moving device 14 may perform a reaction force reduction operation under the control of the control device 3. In other words, the control device 3 may control the moving device 14 to perform a reaction force reduction operation.

[0142] (2-2-2) Details of Reaction Force Reduction Operation As described above, when the measurement head 15M#1 moves, a reaction force may be generated due to the movement of the measurement head 15M#1. Similarly, when the measurement head 15M#2 moves, a reaction force may be generated due to the movement of the measurement head 15M#2. In this embodiment, by utilizing the fact that the two measurement heads 15M#1 and 15M#2 are attached to the movement device 14, the movement device 14 may perform a reaction force reduction operation to move the measurement heads 15M#1 and 15M#2 so that the reaction force generated due to the movement of either the measurement head 15M#1 or the measurement head 15M#2 is reduced or canceled out by the reaction force generated due to the movement of the other of the measurement heads 15M#1 and 15M#2.

[0143] 12(a) and 12(b), a reaction force reduction operation for moving the measurement heads 15M#1 and 15M#2 so that a reaction force caused by the movement of one of the measurement heads 15M#1 and 15M#2 is reduced or canceled out by a reaction force caused by the movement of the other of the measurement heads 15M#1 and 15M#2 will be described. Fig. 12(a) is a plan view showing the measurement heads 15M#1 and 15M#2 moving along the guide members 141#1 and 141#2, respectively, by the reaction force reduction operation, and Fig. 12(b) is a graph showing the movement speeds of the measurement heads 15M#1 and 15M#2, the accelerations of the measurement heads 15M#1 and 15M#2, and the reaction forces caused by the movement of the measurement heads 15M#1 and 15M#2 when the measurement heads 15M#1 and 15M#2 move as shown in Fig. 12(a).

[0144] 12B, the movement speed of measurement head 15M#1, the acceleration of measurement head 15M#1, and the reaction force caused by the movement of measurement head 15M#1 are indicated by thick solid lines, and the movement speed of measurement head 15M#2, the acceleration of measurement head 15M#2, and the reaction force caused by the movement of measurement head 15M#2 are indicated by thick dotted lines. The same applies to the following explanation.

[0145] 12(a) and 12(b), the moving device 14 may move the measuring head 15M#2 during at least a portion of the period in which the measuring head 15M#1 is moved. That is, the moving device 14 may move the measuring head 15M#2 in synchronization with the movement of the measuring head 15M#1. In other words, the moving device 14 may move the measuring head 15M#1 during at least a portion of the period in which the measuring head 15M#2 is moved. That is, the moving device 14 may move the measuring head 15M#1 in synchronization with the movement of the measuring head 15M#2.

[0146] When the measurement head 15M#1 moves in synchronization with the movement of the measurement head 15M#2 in this way, a reaction force caused by the movement of the measurement head 15M#1 and a reaction force caused by the movement of the measurement head 15M#2 occur during the same period. Therefore, the movement device 14 can reduce or cancel out a first reaction force caused by the movement of one of the measurement heads 15M#1 and 15M#2 with a second reaction force caused by the movement of the other of the measurement heads 15M#1 and 15M#2 during at least a part of the period in which the first reaction force is generated. Therefore, the reaction force actually generated on the robot 1 due to the movement of at least one of the measurement heads 15M#1 and 15M#2 when the reaction force reduction operation is being performed is smaller than the reaction force actually generated on the robot 1 due to the movement of at least one of the measurement heads 15M#1 and 15M#2 when the reaction force reduction operation is not being performed. As a result, when the reaction force reduction operation is being performed, unintended vibrations and / or unintended positional deviations occurring in the robot 1 due to the movement of at least one of the measuring heads 15M#1 and 15M#2 (specifically, due to the reaction force caused by the movement of at least one of the measuring heads 15M#1 and 15M#2; the same applies below) are reduced compared to when the reaction force reduction operation is not being performed. In some cases, as shown in the graph at the bottom of FIG. 12( b ), which shows the reaction force actually occurring in the robot 1, when the reaction force reduction operation is being performed, the reaction force occurring in the robot 1 due to the movement of at least one of the measuring heads 15M#1 and 15M#2 becomes zero. As a result, when the reaction force reduction operation is being performed, unintended vibrations and / or unintended positional deviations occurring in the robot 1 due to the movement of at least one of the measuring heads 15M#1 and 15M#2 are no longer occurring in the robot 1. Therefore, the robot 1 can solve the above-mentioned technical problem. Specifically, the robot 1 can reduce or eliminate unintentional vibrations and / or unintentional positional deviations that occur in the robot 1 due to the movement of at least one of the measurement heads 15M#1 and 15M#2.As a result, the robot 1 can reduce the possibility that the measurement accuracy of at least one of the measurement heads 15M#1 and 15M#2 will be deteriorated due to a reaction force caused by the movement of at least one of the measurement heads 15M#1 and 15M#2. In particular, since there is no need to slow down the movement speed of at least one of the measurement heads 15M#1 and 15M#2 (specifically, the maximum movement speed of at least one of the measurement heads 15M#1 and 15M#2) more than necessary, the robot 1 can reduce the possibility that the measurement accuracy of at least one of the measurement heads 15M#1 and 15M#2 will be deteriorated, while also reducing the possibility that the throughput of the measurement process will be deteriorated.

[0147] 12(a) and 12(b), in order to efficiently reduce or cancel out the reaction force caused by the movement of one of the measurement heads 15M#1 and 15M#2 with the reaction force caused by the movement of the other of the measurement heads 15M#1 and 15M#2, the movement device 14 may move the measurement head 15M#1 in a first movement direction D#1 and may also move the measurement head 15M#2 in a second movement direction D#2 that includes a directional component opposite to the first movement direction D#1 during at least a part of the period in which the measurement head 15M#1 is moving in the first movement direction D#1. In other words, the movement device 14 may move the measurement head 15M#1 in the first movement direction D#1 and may also move the measurement head 15M#2 in the second movement direction D#2 that includes a directional component opposite to the first movement direction D#1 in synchronization with the movement of the measurement head 15M#1 in the first movement direction D#1.

[0148] In this way, when the movement direction of one of the measurement heads 15M#1 and 15M#2 includes a directional component opposite to the movement direction of the other of the measurement heads 15M#1 and 15M#2, the reaction force caused by the movement of one of the measurement heads 15M#1 and 15M#2 acts in a direction including a directional component opposite to the direction in which the reaction force caused by the movement of the other of the measurement heads 15M#1 and 15M#2 acts. Therefore, the reaction force caused by the movement of one of the measurement heads 15M#1 and 15M#2 is efficiently reduced or canceled out by the reaction force caused by the movement of the other of the measurement heads 15M#1 and 15M#2. Therefore, the robot 1 can efficiently solve the above-mentioned technical problem.

[0149] When the movement direction of one of the measurement heads 15M#1 and 15M#2 includes a directional component opposite to the movement direction of the other of the measurement heads 15M#1 and 15M#2, as shown in FIG. 12B, the measurement heads 15M#1 and 15M#2 may move toward each other. In this case, the first movement direction D#1 of the measurement head 15M#1 may be a movement direction that moves the measurement head 15M#1 toward the measurement head 15M#2, and the second movement direction D#2 of the measurement head 15M#2 may be a movement direction that moves the measurement head 15M#2 toward the measurement head 15M#1. Furthermore, as shown in FIG. 13, the measurement heads 15M#1 and 15M#2 may move away from each other. In this case, the first movement direction D#1 of measurement head 15M#1 may be a movement direction that moves measurement head 15M#1 away from measurement head 15M#2, and the second movement direction D#2 of measurement head 15M#2 may be a movement direction that moves measurement head 15M#2 away from measurement head 15M#1.

[0150] In this embodiment, an example will be described in which the movement device 14 moves the measurement head 15M#1 in a first movement direction D#1 and performs a reaction force reduction operation including a second control operation of moving the measurement head 15M#2 in a second movement direction D#2 that is the movement direction opposite to the first movement direction D#1 during at least a part of the period in which the measurement head 15M#1 is moved in the first movement direction D#1. That is, in this embodiment, an example will be described in which the first movement direction #1 and the second movement direction D#2 are opposite to each other. 12A, the movement device 14 may move the measurement head 15M#1 along the Y-axis (R) in a first movement direction D#1 that is the positive direction of the Y-axis (R), and may move the measurement head 15M#2 along the Y-axis (R) in a second movement direction D#2 that is the negative direction of the Y-axis (R) during at least a portion of the period in which the measurement head 15M#1 is moved in the first movement direction D#1. Furthermore, the movement device 14 may move the measurement head 15M#1 along the Y-axis (R) in the first movement direction D#1 that is the negative direction of the Y-axis (R), and may move the measurement head 15M#2 along the Y-axis (R) in a second movement direction D#2 that is the positive direction of the Y-axis (R) during at least a portion of the period in which the measurement head 15M#1 is moved in the first movement direction D#1.

[0151] In this way, when the movement direction of one of the measurement heads 15M#1 and 15M#2 is opposite to the movement direction of the other of the measurement heads 15M#1 and 15M#2, the reaction force caused by the movement of one of the measurement heads 15M#1 and 15M#2 acts in the direction opposite to the direction in which the reaction force caused by the movement of the other of the measurement heads 15M#1 and 15M#2 acts. Therefore, the reaction force caused by the movement of one of the measurement heads 15M#1 and 15M#2 is more efficiently reduced or canceled out by the reaction force caused by the movement of the other of the measurement heads 15M#1 and 15M#2. Therefore, the robot 1 can more efficiently solve the above-mentioned technical problems.

[0152] As described above, the reaction force caused by the movement of the measurement head 15M#1 may occur during the first acceleration period (see FIG. 12B) when the measurement head 15M#1 is accelerating, and the reaction force caused by the movement of the measurement head 15M#2 may occur during the second acceleration period (see FIG. 12B) when the measurement head 15M#2 is accelerating. In this case, the movement device 14 may accelerate the measurement head 15M#1 moving toward the first movement direction D#1, and may also accelerate the measurement head 15M#2 moving toward the second movement direction D#2. More specifically, the movement device 14 may accelerate the measurement head 15M#1 moving toward the first movement direction D#1, and may also accelerate the measurement head 15M#2 moving toward the second movement direction D#2 during at least a part of the first acceleration period when the measurement head 15M#1 moving toward the first movement direction D#1 is being accelerated. In other words, the movement device 14 may accelerate the measurement head 15M#1 moving in the first movement direction D#1, and may accelerate the measurement head 15M#2 moving in the second movement direction D#2 in synchronization with the acceleration of the measurement head 15M#1 moving in the first movement direction D#1. In this case, the reaction force caused by the movement (particularly, acceleration / deceleration) of one of the measurement heads 15M#1 and 15M#2 acts in a direction including a directional component opposite to the direction in which the reaction force caused by the movement (particularly, acceleration / deceleration) of the other of the measurement heads 15M#1 and 15M#2 acts. Therefore, the reaction force caused by the movement (particularly, acceleration / deceleration) of one of the measurement heads 15M#1 and 15M#2 is efficiently reduced or canceled out by the reaction force caused by the movement (particularly, acceleration / deceleration) of the other of the measurement heads 15M#1 and 15M#2. Therefore, the robot 1 can efficiently solve the above-mentioned technical problem.

[0153] In other words, in order to efficiently reduce or cancel out the reaction force caused by the acceleration or deceleration of one of the measurement heads 15M#1 and 15M#2 with the reaction force caused by the acceleration or deceleration of the other of the measurement heads 15M#1 and 15M#2, as shown in Figure 12 (b), the moving device 14 may overlap at least a portion of the first acceleration period of the measurement head 15M#1 with at least a portion of the second acceleration period of the measurement head 15M#2, or may overlap at least a portion of the first deceleration period of the measurement head 15M#1 with at least a portion of the second deceleration period of the measurement head 15M#2.

[0154] 12(b), the moving device 14 may move the measuring heads 15M#1 and 15M#2 so that the measuring heads 15M#1 and 15M#2 start accelerating at the same time and finish accelerating at the same time. In other words, the moving device 14 may move the measuring heads 15M#1 and 15M#2 so that the first acceleration period during which the measuring head 15M#1 accelerates is the same as the second acceleration period during which the measuring head 15M#2 accelerates. In this case, the reaction force caused by the movement (particularly, acceleration / deceleration) of one of the measuring heads 15M#1 and 15M#2 is efficiently reduced or canceled out by the reaction force caused by the movement (particularly, acceleration / deceleration) of the other of the measuring heads 15M#1 and 15M#2. Therefore, the robot 1 can efficiently solve the above-described technical problem.

[0155] However, the moving device 14 may move the measurement heads 15M#1 and 15M#2 so that the measurement heads 15M#1 and 15M#2 start accelerating at different times. The moving device 14 may move the measurement heads 15M#1 and 15M#2 so that the measurement heads 15M#1 and 15M#2 finish accelerating at different times. Even in this case, as long as the other of the measurement heads 15M#1 and 15M#2 is accelerating during part of the period in which one of the measurement heads 15M#1 and 15M#2 is accelerating, the reaction force generated due to the movement (particularly, acceleration / deceleration) of one of the measurement heads 15M#1 and 15M#2 is reduced by the reaction force generated due to the movement (particularly, acceleration / deceleration) of the other of the measurement heads 15M#1 and 15M#2, compared to when the reaction force reduction operation is not performed. In other words, as long as the other of measurement heads 15M#1 and 15M#2 is accelerating during part of the period when one of measurement heads 15M#1 and 15M#2 is accelerating, the reaction force caused by the movement (particularly, acceleration) of one of measurement heads 15M#1 and 15M#2 is reduced by the reaction force caused by the movement (particularly, acceleration) of the other of measurement heads 15M#1 and 15M#2, compared to when the other of measurement heads 15M#1 and 15M#2 is not accelerating throughout the entire period when one of measurement heads 15M#1 and 15M#2 is accelerating. Furthermore, as long as the other of the measurement heads 15M#1 and 15M#2 is decelerating during part of the period in which one of the measurement heads 15M#1 and 15M#2 is decelerating, the reaction force caused by the movement (particularly deceleration) of one of the measurement heads 15M#1 and 15M#2 is reduced by the reaction force caused by the movement (particularly deceleration) of the other of the measurement heads 15M#1 and 15M#2, compared to a case in which the other of the measurement heads 15M#1 and 15M#2 is not decelerating throughout the entire period in which one of the measurement heads 15M#1 and 15M#2 is decelerating. Therefore, the robot 1 can solve the above-mentioned technical problem.In this case, during at least another part of the period when one of measurement heads 15M#1 and 15M#2 is accelerating or decelerating, the other of measurement heads 15M#1 and 15M#2 may be stopped, may be moving at a constant speed, or may be decelerating.

[0156] The reaction force caused by the movement (particularly, acceleration / deceleration) of the measuring head 15M#1 can be calculated by the equation of motion, "reaction force = mass of the measuring head 15M#1 (or total mass of the measuring head 15M#1 and the slider member 142#1 to which the measuring head 15M#1 is attached) × acceleration of the measuring head 15M#1." Similarly, the reaction force caused by the movement (particularly, acceleration / deceleration) of the measuring head 15M#2 can be calculated by the equation of motion, "reaction force = mass of the measuring head 15M#2 (or total mass of the measuring head 15M#2 and the slider member 142#2 to which the measuring head 15M#2 is attached) × acceleration of the measuring head 15M#2." Therefore, under the control of the control device 3, the moving device 14 may control the acceleration of at least one of the measuring heads 15M#1 and 15M#2, and / or the mass of at least one of the measuring heads 15M#1 and 15M#2 may be set so that the reaction force caused by the movement (particularly, acceleration / deceleration) of one of the measuring heads 15M#1 and 15M#2 is efficiently reduced or offset by the reaction force caused by the movement (particularly, acceleration / deceleration) of the other of the measuring heads 15M#1 and 15M#2.

[0157] As an example, the mass of the measurement head 15M#1 may be equal to the mass of the measurement head 15M#2, and the acceleration of the measurement head 15M#1 may be equal to the acceleration of the measurement head 15M#2. In this case, the magnitude of the reaction force caused by the movement (particularly, acceleration / deceleration) of the measurement head 15M#1 is the same as the magnitude of the reaction force caused by the movement (particularly, acceleration / deceleration) of the measurement head 15M#2, and the direction in which the reaction force caused by the movement (particularly, acceleration / deceleration) of the measurement head 15M#1 acts is opposite to the direction in which the reaction force caused by the movement (particularly, acceleration / deceleration) of the measurement head 15M#2 acts. Therefore, the reaction force caused by the movement (particularly, acceleration / deceleration) of either the measurement head 15M#1 or 15M#2 is appropriately canceled out by the reaction force caused by the movement (particularly, acceleration / deceleration) of the other of the measurement heads 15M#1 or 15M#2.

[0158] Alternatively, the masses of the measuring heads 15M#1 and 15M#2 may be different, and the accelerations of the measuring heads 15M#1 and 15M#2 may be different, as long as the magnitude of the reaction force caused by the movement (particularly, acceleration / deceleration) of the measuring head 15M#1 is the same as the magnitude of the reaction force caused by the movement (particularly, acceleration / deceleration) of the measuring head 15M#2 and the direction in which the reaction force caused by the movement (particularly, acceleration / deceleration) of the measuring head 15M#1 acts is opposite to the direction in which the reaction force caused by the movement (particularly, acceleration / deceleration) of the measuring head 15M#2 acts. Even in this case, the reaction force caused by the movement (particularly, acceleration / deceleration) of either the measuring head 15M#1 or 15M#2 is appropriately canceled out by the reaction force caused by the movement (particularly, acceleration / deceleration) of the other of the measuring heads 15M#1 or 15M#2.

[0159] However, when the acceleration of measurement head 15M#1 and the acceleration of measurement head 15M#2 are different, the movement device 14 may adjust the movement stroke of at least one of measurement heads 15M#1 and 15M#2 so that the first acceleration period in which measurement head 15M#1 accelerates is the same as the second acceleration period in which measurement head 15M#2 accelerates. For example, when the acceleration of measurement head 15M#1 is greater than the acceleration of measurement head 15M#2 (as a result, the movement speed of measurement head 15M#1, which moves at a constant speed after acceleration (specifically, the movement speed and maximum speed of measurement head 15M#1), is greater than the movement speed of measurement head 15M#2, which moves at a constant speed after acceleration (specifically, the movement speed and maximum speed of measurement head 15M#2)), measurement heads 15M#1 and 15M#2 may be moved so that the movement stroke of measurement head 15M#1 is longer than the movement stroke of measurement head 15M#2. As a result, even if the acceleration of measurement head 15M#1 and the acceleration of measurement head 15M#2 are different, the first acceleration period during which measurement head 15M#1 accelerates can be made the same as the second acceleration period during which measurement head 15M#2 accelerates.

[0160] As described above, the reaction force caused by the movement of the measurement head 15M#1 may occur during the first deceleration period (see FIG. 12B) when the measurement head 15M#1 is decelerating, and the reaction force caused by the movement of the measurement head 15M#2 may occur during the second deceleration period (see FIG. 12B) when the measurement head 15M#2 is decelerating. In this case, the movement device 14 may decelerate the measurement head 15M#1 moving toward the first movement direction D#1, and may also decelerate the measurement head 15M#2 moving toward the second movement direction D#2. More specifically, the movement device 14 may decelerate the measurement head 15M#1 moving toward the first movement direction D#1, and may also decelerate the measurement head 15M#2 moving toward the second movement direction D#2 during at least a part of the first deceleration period when the measurement head 15M#1 moving toward the first movement direction D#1 is being decelerated. In other words, the movement device 14 may decelerate the measurement head 15M#1 moving in the first movement direction D#1, and may decelerate the measurement head 15M#2 moving in the second movement direction D#2 in synchronization with the deceleration of the measurement head 15M#1 moving in the first movement direction D#1. In this case, the reaction force caused by the movement (particularly, deceleration) of one of the measurement heads 15M#1 and 15M#2 acts in a direction including a directional component opposite to the direction in which the reaction force caused by the movement (particularly, deceleration) of the other of the measurement heads 15M#1 and 15M#2 acts. Therefore, the reaction force caused by the movement (particularly, deceleration) of one of the measurement heads 15M#1 and 15M#2 is efficiently reduced or canceled out by the reaction force caused by the movement (particularly, deceleration) of the other of the measurement heads 15M#1 and 15M#2. Therefore, the robot 1 can efficiently solve the above-mentioned technical problem.

[0161] 12B, the moving device 14 may move the measuring heads 15M#1 and 15M#2 so that the measuring heads 15M#1 and 15M#2 start and finish decelerating at the same time. In other words, the moving device 14 may move the measuring heads 15M#1 and 15M#2 so that the first deceleration period during which the measuring head 15M#1 decelerates is the same as the second deceleration period during which the measuring head 15M#2 decelerates. In this case, the reaction force caused by the movement (particularly, deceleration) of one of the measuring heads 15M#1 and 15M#2 is efficiently reduced or canceled out by the reaction force caused by the movement (particularly, deceleration) of the other of the measuring heads 15M#1 and 15M#2. This allows the robot 1 to efficiently solve the above-described technical problem.

[0162] However, the moving device 14 may move the measurement heads 15M#1 and 15M#2 so that the measurement heads 15M#1 and 15M#2 start to decelerate at different times. The moving device 14 may move the measurement heads 15M#1 and 15M#2 so that the measurement heads 15M#1 and 15M#2 finish decelerating at different times. Even in this case, as long as the other of the measurement heads 15M#1 and 15M#2 is decelerating during at least a part of the period when one of the measurement heads 15M#1 and 15M#2 is decelerating, the reaction force caused by the movement (particularly, deceleration) of one of the measurement heads 15M#1 and 15M#2 is reduced by the reaction force caused by the movement (particularly, deceleration) of the other of the measurement heads 15M#1 and 15M#2, compared to when the reaction force reduction operation is not performed. In other words, as long as the other of the measurement heads 15M#1 and 15M#2 is decelerating during part of the period in which one of the measurement heads 15M#1 and 15M#2 is decelerating, the reaction force caused by the movement (particularly deceleration) of one of the measurement heads 15M#1 and 15M#2 is reduced by the reaction force caused by the movement (particularly deceleration) of the other of the measurement heads 15M#1 and 15M#2, compared to a case in which the other of the measurement heads 15M#1 and 15M#2 is not decelerating throughout the entire period in which one of the measurement heads 15M#1 and 15M#2 is decelerating. Therefore, the robot 1 can solve the above-mentioned technical problem. In this case, during at least another part of the period in which one of the measurement heads 15M#1 and 15M#2 is decelerating, the other of the measurement heads 15M#1 and 15M#2 may be stopped, moving at a constant speed, or accelerating.

[0163] The reaction force caused by the movement (particularly, deceleration) of the measuring head 15M#1 can be calculated by the equation of motion, "reaction force = mass of the measuring head 15M#1 (or total mass of the measuring head 15M#1 and the slider member 142#1 to which the measuring head 15M#1 is attached) × deceleration of the measuring head 15M#1." Similarly, the reaction force caused by the movement (particularly, deceleration) of the measuring head 15M#2 can be calculated by the equation of motion, "reaction force = mass of the measuring head 15M#2 (or total mass of the measuring head 15M#2 and the slider member 142#2 to which the measuring head 15M#2 is attached) × deceleration of the measuring head 15M#2." Therefore, under the control of the control device 3, the moving device 14 may control the deceleration of at least one of the measuring heads 15M#1 and 15M#2, and / or the mass of at least one of the measuring heads 15M#1 and 15M#2 may be set so that the reaction force caused by the movement (particularly, deceleration) of one of the measuring heads 15M#1 and 15M#2 is efficiently reduced or offset by the reaction force caused by the movement (particularly, deceleration) of the other of the measuring heads 15M#1 and 15M#2.

[0164] As an example, the mass of the measurement head 15M#1 may be equal to the mass of the measurement head 15M#2, and the deceleration of the measurement head 15M#1 may be equal to the deceleration of the measurement head 15M#2. In this case, the magnitude of the reaction force caused by the movement (particularly, deceleration) of the measurement head 15M#1 is the same as the magnitude of the reaction force caused by the movement (particularly, deceleration) of the measurement head 15M#2, and the direction in which the reaction force caused by the movement (particularly, deceleration) of the measurement head 15M#1 acts is opposite to the direction in which the reaction force caused by the movement (particularly, deceleration) of the measurement head 15M#2 acts. Therefore, the reaction force caused by the movement (particularly, deceleration) of one of the measurement heads 15M#1 and 15M#2 is appropriately canceled out by the reaction force caused by the movement (particularly, deceleration) of the other of the measurement heads 15M#1 and 15M#2.

[0165] Alternatively, the masses of the measuring heads 15M#1 and 15M#2 may be different, and the decelerations of the measuring heads 15M#1 and 15M#2 may be different, as long as the magnitude of the reaction force caused by the movement (particularly deceleration) of the measuring head 15M#1 is the same as the magnitude of the reaction force caused by the movement (particularly deceleration) of the measuring head 15M#2 and the direction in which the reaction force caused by the movement (particularly deceleration) of the measuring head 15M#1 acts is opposite to the direction in which the reaction force caused by the movement (particularly deceleration) of the measuring head 15M#2 acts. Even in this case, the reaction force caused by the movement (particularly deceleration) of one of the measuring heads 15M#1 and 15M#2 is appropriately canceled out by the reaction force caused by the movement (particularly deceleration) of the other of the measuring heads 15M#1 and 15M#2.

[0166] However, when the deceleration of measurement head 15M#1 and the deceleration of measurement head 15M#2 are different, the movement device 14 may adjust the movement stroke of at least one of measurement heads 15M#1 and 15M#2 so that the first deceleration period in which measurement head 15M#1 decelerates is the same as the second deceleration period in which measurement head 15M#2 decelerates. For example, when the deceleration of measurement head 15M#1 is greater than the deceleration of measurement head 15M#2 (as a result, the movement speed of measurement head 15M#1 moving at a constant speed before deceleration (specifically, the movement speed of measurement head 15M#1, the maximum speed)) is greater than the movement speed of measurement head 15M#2 moving at a constant speed before deceleration (specifically, the movement speed of measurement head 15M#2, the maximum speed)), measurement heads 15M#1 and 15M#2 may be moved so that the movement stroke of measurement head 15M#1 actually moves is longer than the movement stroke of measurement head 15M#2 actually moves. As a result, even if the deceleration rate of measurement head 15M#1 and the deceleration rate of measurement head 15M#2 are different, the first deceleration period during which measurement head 15M#1 decelerates can be made the same as the second deceleration period during which measurement head 15M#2 decelerates.

[0167] (3) Modifications Next, modifications of the robot system SYS will be described.

[0168] (3-1) First Modification In the above description, as shown in Figures 4 and 12(a), the extension direction of guide member 141#2 is parallel to the extension direction of guide member 141#1. In other words, guide member 141#2 is parallel to guide member 141#1. In other words, the translational axis along which measurement head 15M#1 moves and the translational axis along which measurement head 15M#2 moves are parallel.

[0169] On the other hand, in the first modified example, as shown in Figure 14(a), which is a plan view showing measurement heads 15M#1 and 15M#2 moving along guide members 141#1 and 141#2, respectively, due to the reaction force reduction operation, the extension direction of guide member 141#1 does not have to be parallel to the extension direction of guide member 141#2. In other words, guide member 141#2 does not have to be parallel to guide member 141#1. In other words, the translational axis along which measurement head 15M#1 moves and the translational axis along which measurement head 15M#2 moves do not have to be parallel.

[0170] 14A, the extension direction of guide member 141#1 may also be a direction that includes a directional component along the extension direction of guide member 141#2. In other words, the translational axis along which measurement head 15M#1 moves may also be an axis that extends in a direction that includes a directional component along the translational axis along which measurement head 15M#2 moves. As a result, also in the first modified example, as shown in Figure 14(b), which is a graph showing the movement speed of the measurement heads 15M#1 and 15M#2, the acceleration of the measurement heads 15M#1 and 15M#2, and the reaction force caused by the movement of the measurement heads 15M#1 and 15M#2 when the measurement heads 15M#1 and 15M#2 move as shown in Figure 14(a), the reaction force caused by the movement of either one of the measurement heads 15M#1 and 15M#2 is reduced or canceled out by the reaction force caused by the movement of the other of the measurement heads 15M#1 and 15M#2, compared to when the reaction force reduction operation is not performed. Therefore, the robot 1 can solve the above-mentioned technical problem.

[0171] (3-2) Second Modification In the above description, as shown in Figures 4 and 12(a), guide member 141#1 and guide member 141#2 are spaced apart from each other along a direction intersecting at least one of the extension direction of guide member 141#1 and the extension direction of guide member 141#2. On the other hand, in the second modification, as shown in Figure 15, which is a plan view showing an example of the arrangement of guide members 141#1 and 141#2 in the second modification, guide member 141#1 and guide member 141#2 may be aligned along at least one of the extension direction of guide member 141#1 and the extension direction of guide member 141#2. In particular, guide member 141#1 and guide member 141#2 may be arranged such that an axis extending along guide member 141#1 and an axis extending along guide member 141#2 are coaxial. The guide members 141#1 and 141#2 may be arranged coaxially. The guide members 141#1 and 141#2 may be arranged so that the translational axis along which the measurement head 15M#1 moves and the translational axis along which the measurement head 15M#2 moves are coaxial.

[0172] In the second modified example, the robot 1 can also solve the technical problems described above. In addition, in the second modified example, the rotational moment described later in the fifth modified example is less likely to occur. Therefore, in the second modified example, the moving device 14 does not need to have a configuration for reducing or canceling the rotational moment described later in the fifth modified example.

[0173] (3-3) Third Modification In the above description, as shown in FIGS. 4 and 12(a), the moving device 14 includes two guide members 141#1 and 142#2 to which two measurement heads 15M#1 and 15M#2 are respectively attached. On the other hand, in a third modification, as shown in FIG. 16, which is a plan view showing the moving device 14 in the third modification (hereinafter, the moving device 14 in the third modification will be referred to as moving device 14c), the moving device 14c may include a single guide member 141 to which two measurement heads 15M#1 and 15M#2 are attached, instead of the two guide members 141#1 and 141#2. In this case, the measuring head 15M#1 may be attached to the guide member 141 via a slider member 142#1 so as to be movable along the guide member 141. Furthermore, the measuring head 15M#2 may be attached to the guide member 141 via a slider member 142#2 so as to be movable along the guide member 141.

[0174] An example of such a moving device 14c is a linear servo guide (linear servo motor) including a moving shaft which is an example of a guide member 141 and is a stator including a magnet, a first moving element which is an example of a slider member 142#1 and an actuator 143#1 and is including a first coil, and a second moving element which is an example of a slider member 142#2 and an actuator 143#2 and is including a second coil. In this case, a measuring head 15M#1 may be attached to the first moving element, and a measuring head 15M#2 may be attached to the second moving element.

[0175] In the third modified example, the robot 1 can also solve the technical problems described above. In addition, in the third modified example, the rotational moment described later in the fifth modified example is less likely to occur. Therefore, in the third modified example, the moving device 14 does not need to have a configuration for reducing or canceling the rotational moment described later in the fifth modified example.

[0176] (3-4) Fourth Modification (3-4-1) Adjustment of the Tilt of the Measurement Axis MX of the Measurement Head 15M In the above description, the measurement axis MX#1 of the measurement head 15M#1 and the measurement axis MX#2 of the measurement head 15M#2 are parallel to each other. On the other hand, in the fourth modification, as shown in FIG. 17 , which is a cross-sectional view showing the measurement heads 15M#1 and 15M#2 in the fourth modification, the measurement axis MX#1 of the measurement head 15M#1 and the measurement axis MX#2 of the measurement head 15M#2 do not have to be parallel to each other. In other words, in the fourth modification, the measurement axis MX#1 of the measurement head 15M#1 may be tilted with respect to the measurement axis MX#2 of the measurement head 15M#2. In other words, in the fourth modification, the tilt of at least one of the measurement axis MX#1 of the measurement head 15M#1 and the measurement axis MX#2 of the measurement head 15M#2 may be adjusted. Furthermore, the state in which the measurement axis MX#1 of measurement head 15M#1 is inclined with respect to the measurement axis MX#2 of measurement head 15M#2 may be considered equivalent to the state in which measurement head 15M#1 is inclined with respect to measurement head 15M#2.

[0177] (3-4-2) Method for Adjusting the Tilt of the Measurement Axis MX As shown in FIG. 18( a), which is a cross-sectional view showing a first example of a method for adjusting the tilt of the measurement axis MX of the measurement head 15M, the tilt of the measurement axis MX of the measurement head 15M may be adjusted by adjusting the tilt of at least one of the irradiation optical system 151M and the light receiving optical system 152M within the measurement head 15M. Specifically, the tilt of the measurement axis MX of the measurement head 15M may be adjusted by adjusting the tilt of at least one of the irradiation optical system 151M and the light receiving optical system 152M with respect to a housing 155M that houses at least one of the irradiation optical system 151M and the light receiving optical system 152M. The tilt of the measurement axis MX of the measurement head 15M may be adjusted by rotating at least one of the irradiation optical system 151M and the light receiving optical system 152M around a predetermined rotation axis.

[0178] The tilt of the measurement axis MX of the measurement head 15M may be adjusted by adjusting the tilt of the measurement head 15M itself, as shown in Figure 18(b), which is a cross-sectional view showing a second example of a method for adjusting the tilt of the measurement axis MX of the measurement head 15M. Specifically, the tilt of the measurement axis MX of the measurement head 15M may be adjusted by adjusting the tilt of a housing 155M that houses at least one of the irradiation optical system 151M and the light-receiving optical system 152M. The tilt of the measurement axis MX of the measurement head 15M may be adjusted by rotating the housing 155M together with at least one of the irradiation optical system 151M and the light-receiving optical system 152M around a predetermined rotation axis.

[0179] For the sake of convenience, the following description will be given assuming that the tilt of the measurement axis MX of the measurement head 15M is adjusted by adjusting the tilt of the measurement head 15M itself. However, the following description can also be applied to the case where the tilt of the measurement axis MX of the measurement head 15M is adjusted by adjusting the tilt of at least one of the irradiation optical system 151M and the light-receiving optical system 152M.

[0180] (3-4-3) Timing of Adjustment of Tilt of Measurement Axis MX The tilt of at least one of the measurement axes MX#1 and MX#2 may be adjusted when the measurement heads 15M#1 and 15M#2 are attached to the moving device 14. For example, the tilt of at least one of the measurement axes MX#1 and MX#2 may be manually adjusted by an operator who attaches the measurement heads 15M#1 and 15M#2 to the moving device 14 when the measurement heads 15M#1 and 15M#2 are attached to the moving device 14. For example, the tilt of at least one of the measurement axes MX#1 and MX#2 may be automatically adjusted by an attachment device that attaches the measurement heads 15M#1 and 15M#2 to the moving device 14 when the measurement heads 15M#1 and 15M#2 are attached to the moving device 14.

[0181] The tilt of at least one of the measurement axes MX#1 and MX#2 may be automatically adjusted by the moving device 14 after the measurement heads 15M#1 and 15M#2 are attached to the moving device 14. For example, the moving device 14 may adjust the tilt of at least one of the measurement axes MX#1 and MX#2 by moving at least one of the measurement heads 15M#1 and 15M#2. More specifically, the moving device 14 may adjust the tilt of at least one of the measurement axes MX#1 and MX#2 by rotating at least one of the measurement heads 15M#1 and 15M#2 around a predetermined rotation axis. Alternatively, for example, the tilt of at least one of the measurement axes MX#1 and MX#2 may be manually adjusted by a user after the measurement heads 15M#1 and 15M#2 are attached to the moving device 14.

[0182] (3-4-4) First Specific Example of Adjustment of Tilt of Measurement Axis MX As shown in Figures 19(a) and 19(b), which are cross-sectional views showing measurement heads 15M#1 and 15M#2 in the fourth modified example, the tilt of the measurement axis MX may be adjusted by rotating the measurement head 15M around a rotation axis that is aligned with the translation axis along which the measurement head 15M moves. In the above description, the translation axis along which the measurement head 15M moves is parallel to the Y axis (R). Therefore, as shown in Figures 19(a) and 19(b), the tilt of the measurement axis MX may be adjusted by rotating the measurement head 15M around a rotation axis that is aligned with the Y axis (R).

[0183] When the inclination of the measurement axis MX is adjusted by rotating the measurement head 15M around a rotation axis along the translational axis along which the measurement head 15M moves, as shown in Figure 19(a) and Figure 19(c), which is a plan view showing the workpiece W onto which the measurement light ML1 from the measurement heads 15M#1 and 15M#2 shown in Figure 19(a) is irradiated, the inclination of at least one of the measurement axes MX#1 and MX#2 may be adjusted along a direction intersecting the translational axis along which the measurement heads 15M#1 and 15M#2 move so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 do not overlap on the surface of the workpiece W. In the above description, since the translation axis along which the measurement head 15M moves is parallel to the Y-axis (R), the inclination of at least one of the measurement axes MX#1 and MX#2 may be adjusted so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 do not overlap along a direction intersecting the Y-axis (R) (for example, along the X-axis (R)), as shown in Figures 19(a) and 19(c).

[0184] Alternatively, when the inclination of the measurement axis MX is adjusted by rotating the measurement head 15M around a rotation axis along the translational axis along which the measurement head 15M moves, the inclination of at least one of the measurement axes MX#1 and MX#2 may be adjusted so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 at least partially overlap on the surface of the workpiece W along a direction intersecting the translational axis along which the measurement head 15M#1 and the measurement head 15M#2 move, as shown in FIG. 19(b) and FIG. 19(d), which is a plan view showing the workpiece W onto which the measurement light ML1 from the measurement heads 15M#1 and 15M#2 shown in FIG. 19(b) is irradiated. In the above description, because the translational axis along which the measurement head 15M moves is parallel to the Y-axis (R), the tilt of at least one of the measurement axes MX#1 and MX#2 may be adjusted so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 at least partially overlap along a direction intersecting the Y-axis (R) (for example, along the X-axis (R)), as shown in Figures 19(b) and 19(d). In this case, no blind spot that cannot be measured is created between the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 along the direction intersecting the translational axis along which the measurement heads 15M#1 and 15M#2 move. Therefore, in the examples shown in Figures 19(b) and 19(d), it can be considered that the inclination of at least one of the measurement axes MX#1 and MX#2 is adjusted along a direction intersecting the translational axis along which the measurement heads 15M#1 and 15M#2 move, so as to eliminate (or reduce) the blind spot between the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2.

[0185] (3-4-5) Second Specific Example of Adjustment of Tilt of Measurement Axis MX As shown in Figures 20(a) and 20(c), which are cross-sectional views showing measurement heads 15M#1 and 15M#2 in the fourth modified example, the tilt of the measurement axis MX may be adjusted by rotating the measurement head 15M around a rotation axis that intersects the translation axis along which the measurement head 15M moves. In the above description, the translation axis along which the measurement head 15M moves is parallel to the Y axis (R). Therefore, as shown in Figures 20(a) and 20(c), the tilt of the measurement axis MX may be adjusted by rotating the measurement head 15M around a rotation axis that intersects the Y axis (R) (for example, a rotation axis along the X axis (R)).

[0186] 20(a) and 20(b), when the tilt of the measurement axis MX is adjusted by rotating the measurement head 15M around a rotation axis that intersects with the translation axis along which the measurement head 15M moves, the tilt of at least one of the measurement axes MX#1 and MX#2 may be adjusted so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 do not overlap along the translation axis along which the measurement heads 15M#1 and 15M#2 move on the surface of the workpiece W. For convenience of illustration in the drawings, FIG. 20(a) shows a state in which the measurement heads 15M#1 and 15M#2 are closest to each other in the direction of the translation axis, and FIG. 20(b) shows a state in which the measurement heads 15M#1 and 15M#2 are farthest apart in the direction of the translation axis. In the above description, since the translational axis along which measurement head 15M moves is parallel to the Y axis (R), the inclination of at least one of measurement axes MX#1 and MX#2 may be adjusted so that the measurement range MR#1 of measurement head 15M#1 and the measurement range MR#2 of measurement head 15M#2 do not overlap along the Y axis (R), as shown in Figures 20(a) and 20(c).

[0187] Alternatively, when the tilt of the measurement axis MX is adjusted by rotating the measurement head 15M around a rotation axis that intersects with the translation axis along which the measurement head 15M moves, as shown in Figures 20(c) and 20(d), the tilt of at least one of the measurement axes MX#1 and MX#2 may be adjusted so that the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 at least partially overlap along the translation axis along which the measurement heads 15M#1 and 15M#2 move on the surface of the workpiece W. For convenience of illustration in the drawings, Figure 20(c) shows the state in which the measurement heads 15M#1 and 15M#2 are closest to each other in the direction of the translation axis, and Figure 20(d) shows the state in which the measurement heads 15M#1 and 15M#2 are farthest apart in the direction of the translation axis. In the above description, because the translational axis along which measurement head 15M moves is parallel to the Y-axis (R), the tilt of at least one of measurement axes MX#1 and MX#2 may be adjusted so that the measurement range MR#1 of measurement head 15M#1 and the measurement range MR#2 of measurement head 15M#2 at least partially overlap along the Y-axis (R), as shown in Figures 20(c) and 20(d). In this case, no blind spot that cannot be measured is generated between the measurement range MR#1 of measurement head 15M#1 and the measurement range MR#2 of measurement head 15M#2 along the translational axis along which measurement head 15M#1 and measurement head 15M#2 move. Therefore, in the examples shown in Figures 20(c) and 20(d), it can be considered that the inclination of at least one of the measurement axes MX#1 and MX#2 is adjusted along the translation axis along which the measurement heads 15M#1 and 15M#2 move so as to eliminate (or reduce) the blind spot between the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2.

[0188] In this case, particularly in the second or third modified example described above in which the translational axis along which the measurement head 15M#1 moves and the translational axis along which the measurement head 15M#2 moves are coaxial, the tilt of the measurement axis MX may be adjusted as shown in Fig. 20(c) and Fig. 20(d). As a result, it is possible to eliminate (or reduce) a blind spot between the measurement range MR#1 of the measurement head 15M#1 and the measurement range MR#2 of the measurement head 15M#2 along the translational axis along which the measurement head 15M#1 and the measurement head 15M#2 move.

[0189] (3-4-6) Adjusting the Tilt of the Measurement Axis MX Based on the Shape of the Surface of the Workpiece W The tilt of the measurement axis MX#1 may be adjusted based on the shape of the surface of the workpiece W measured by the measurement head 15M#1. For example, as shown in FIGS. 21(a) and 21(b), which are cross-sectional views showing the measurement axis MX#1 adjusted based on the shape of the surface of the workpiece W, the tilt of the measurement axis MX#1 may be adjusted so that the measurement head 15M#1 faces the workpiece W directly. For example, the tilt of the measurement axis MX#1 may be adjusted so that the orientation of the measurement head 15M#1 faces the workpiece W directly. Note that when the tilt of the measurement axis MX#1 changes, the orientation of the measurement head 15M#1 also changes. For this reason, adjusting the tilt of the measurement axis MX#1 may be considered equivalent to adjusting the orientation of the measurement head 15M#1.

[0190] Similarly, the inclination of the measurement axis MX#2 may be adjusted based on the shape of the surface of the workpiece W measured by the measurement head 15M#2. For example, as shown in FIGS. 21( a) and 21(b), which are cross-sectional views showing the measurement axis MX#2 adjusted based on the shape of the surface of the workpiece W, the inclination of the measurement axis MX#2 may be adjusted so that the measurement head 15M#2 faces the workpiece W directly. For example, the inclination of the measurement axis MX#2 may be adjusted so that the orientation of the measurement head 15M#2 faces the workpiece W directly. Note that when the inclination of the measurement axis MX#2 changes, the orientation of the measurement head 15M#2 also changes. For this reason, adjusting the inclination of the measurement axis MX#2 may be considered equivalent to adjusting the orientation of the measurement head 15M#2.

[0191] The orientation of the measurement head 15M may refer to the orientation of the measurement axis MX extending from the measurement head 15M. The orientation of the measurement head 15M may refer to the orientation of a normal to the mounting surface to which the measurement head 15M is attached. For example, as described above, in the case where the measurement head 15M is attached to the slider member 142, the orientation of the measurement head 15M may refer to the orientation of a normal to the mounting surface of the slider member 142 to which the measurement head 15M is attached.

[0192] Furthermore, the state in which the measurement head 15M faces the workpiece W may include a state in which the measurement axis MX of the measurement head 15M is perpendicular to the surface of the workpiece W. In other words, the state in which the measurement head 15M faces the workpiece W may include a state in which the normal to the surface of the workpiece W at the point where the measurement axis MX of the measurement head 15M and the surface of the workpiece W intersect is coincident with the measurement axis MX of the measurement head 15M. The state in which the measurement head 15M faces the workpiece W may include a state in which the angle formed between the measurement axis MX of the measurement head 15M and the surface of the workpiece W is a predetermined angle or more (for example, 70 degrees or more, 75 degrees or more, 80 degrees or more, 85 degrees or more). The state in which the measurement head 15M faces the workpiece W may include a state in which the normal to the mounting surface to which the measurement head 15M is attached is perpendicular to the surface of the workpiece W. In other words, the state in which the measurement head 15M faces the workpiece W may include a state in which the angle between the normal to the mounting surface on which the measurement head 15M is attached and the surface of the workpiece W is a predetermined angle or more (for example, 70 degrees or more, 75 degrees or more, 80 degrees or more, 85 degrees or more).

[0193] When the tilt of the measurement axis MX is adjusted based on the shape of the surface of the workpiece W in this way, the proportion of the return light RL1 that returns to the measurement head 15M to the light (for example, the above-mentioned reflected light, scattered light, diffracted light, and transmitted light) generated by irradiating the workpiece W with the measurement light ML1 is increased compared to when the tilt of the measurement axis MX is not adjusted based on the shape of the surface of the workpiece W. As a result, noise contained in the light reception result of the light receiving element 153M is reduced. This improves the measurement accuracy of the measurement head 15M.

[0194] 21(a) and 21(b) show an example in which the shape of the surface of the workpiece W includes a curved shape. On the other hand, FIG. 22 shows an example in which the shape of the surface of the workpiece W includes a shape corresponding to one vertex of a polyhedron. In this case, as shown in FIG. 22, at least one of the measurement axes MX#1 and MX#2 may be adjusted so that the measurement head 15M#1 faces a first surface SS1 of the polyhedron including the one vertex, and the measurement head 15M#1 faces a second surface SS2 of the polyhedron including the one vertex (e.g., a second surface SS2 different from the first surface SS1). In this case, the measurement heads 15M#1 and 15M#2 can appropriately measure the portion including the vertex of the polyhedron in a single measurement.

[0195] When the tilt of the measurement axis MX is adjusted based on the shape of the surface of the workpiece W, the robot system SYS may be equipped with a shape measurement device capable of measuring the shape of the workpiece W. Examples of the shape measurement device include at least one of a TOF (Time Of Flight) sensor, a laser radar, a Lidar (Light Detection And Range), a stereo camera, a line scanner, and a three-dimensional scanner. In this case, the tilt of the measurement axis MX may be adjusted based on the measurement results of the shape measurement device. Alternatively, when information regarding the shape of the surface of the workpiece W is known information, the tilt of the measurement axis MX may be adjusted based on the known information regarding the shape of the surface of the workpiece W.

[0196] 4 and 12(a) described above, when two guide members 141 are aligned along a direction intersecting the extension direction of the two guide members 141, a rotational moment may be generated by moving the measurement heads 15M#1 and 15M#2 by the reaction force reduction operation described above. For example, FIG. 23 shows an example in which the measurement head 15M#1 moves along the Y axis (R) toward the positive direction of the Y axis (R), and the measurement head 15M#2 moves along the Y axis (R) toward the negative direction of the Y axis (R). In this case, the center of gravity of the measurement head 15M#1, which is an object moving in the positive direction of the Y axis (R), and the center of gravity of the measurement head 15M#2, which is an object moving in the negative direction of the Y axis (R), are separated along the X axis (R), which is a direction intersecting the Y axis (R). In other words, the center of gravity of the measurement head 15M#1 and the center of gravity of the measurement head 15M#2 do not coincide in a plane intersecting the Y-axis (R) (for example, the X(R)Z(R) plane). In this case, because the centers of gravity of the measurement head 15M#1 and the measurement head 15M#2 are separated along the X-axis (R), which is a direction intersecting the Y-axis (R), a rotational moment may occur around an axis intersecting the plane on which the measurement heads 15M#1 and 15M#2 move (the X(R)Y(R) plane in the example shown in FIG. 23). If this rotational moment is transmitted to the robot arm 12, the robot arm 12 may rotate unintentionally. As a result, the measurement accuracy of the measurement head 15M may deteriorate, similar to when the robot arm 12 unintentionally vibrates and / or is unintentionally displaced due to a reaction force.

[0197] Therefore, in the fifth modified example, the configuration of the moving device 14 may be changed so as to reduce such a rotational moment or to prevent such a rotational moment from being generated.

[0198] A specific example of the moving device 14 of the fifth modified example for reducing the rotational moment or preventing the generation of the rotational moment will be described below.

[0199] (3-5-1) First Specific Example of Movement Device 14 in Fifth Modification First, a first specific example of the movement device 14 in the fifth modification will be described with reference to Fig. 24. Fig. 24 is a plan view showing the configuration of the first specific example of the movement device 14 in the fifth modification. In the following description, the first specific example of the movement device 14 in the fifth modification will be referred to as movement device 14e1.

[0200] 24, moving device 14e1 differs from moving device 14 described above in that moving device 14e1 further includes guide member 141#3, slider member 142#3, actuator 143#3, and measuring device 144#3. The other configuration of moving device 14e1 may be the same as the other configuration of moving device 14.

[0201] Guide member 141#3, slider member 142#3, actuator 143#3, and measuring device 144#3 respectively correspond to guide member 141, slider member 142, actuator 143, and measuring device 144. Therefore, detailed description of guide member 141#3, slider member 142#3, actuator 143#3, and measuring device 144#3 will be omitted.

[0202] A measuring head 15M#3, which is the measuring head 15M, is attached to the slider member 142#3. The measuring head 15M#3 is attached to the guide member 141#3 via the slider member 142#3 so as to be movable along the guide member 141#3.

[0203] The extension direction of the guide member 141#3 may be a direction including a directional component along the extension direction of at least one of the guide members 141#1 and #2. In the following description, an example will be described in which the extension direction of the guide member 141#3 is a direction along the extension direction of the guide members 141#1 and 141#2. That is, an example will be described in which the extension direction of the guide member 141#3 is parallel to the extension direction of the guide members 141#1 and 141#2. In other words, an example will be described in which the guide member 141#3 is parallel to the guide members 141#1 and 141#2. In the example shown in FIG. 24 , the extension directions of the guide members 141#1 to 141#3 are parallel to the Y-axis (R).

[0204] The guide members 141#1 to 141#3 may be spaced apart from one another along the extension direction of at least one of the guide members 141#1 to 141#3 (e.g., along the X-axis (R)). Furthermore, the guide members 141#1 to 141#3 may be arranged such that the guide member 141#2 is located between the guide member 141#1 and the guide member 141#3 along the extension direction of at least one of the guide members 141#1 to 141#3 (e.g., along the X-axis (R)). In this case, the relationship between the guide member 141#3 and the guide member 141#2 may be the same as the relationship between the guide member 141#1 and the guide member 141#2 described above. In this case, the explanation regarding the relationship between the above-mentioned guide member 141#1 and guide member 141#2 can be reused as an explanation regarding the relationship between guide member 141#3 and guide member 141#2 by replacing the term "measurement head 15M#1" with the term "measurement head 15M#3."

[0205] The moving device 14e1 may perform a reaction force reduction operation of moving the measuring heads 15M#1 to 15M#3 so that the reaction force caused by the movement of the measuring heads 15M#1 and 15M#3 is reduced or canceled out by the reaction force caused by the movement of the measuring head 15M#2. Specifically, the moving device 14 may move the measuring heads 15M#1 and 15#3 toward the first movement direction D#1, and may also move the measuring head 15M#2 toward the second movement direction D#2 that includes a directional component opposite to the first movement direction D#1 during at least a portion of the period during which the measuring heads 15M#1 and 15#3 are moved toward the first movement direction D#1. As a result, even when the moving device 14e1 includes three guide members 141 and the robot 1 includes three measuring heads 15M, the same effects as those described above can be achieved.

[0206] Furthermore, the above-mentioned explanation regarding "a reaction force reduction operation of moving measurement heads 15M#1 to 15M#2 so that the reaction force generated due to the movement of measurement head 15M#1 is reduced or offset by the reaction force generated due to the movement of measurement head 15M#2" can be reused as an explanation of "a reaction force reduction operation of moving measurement heads 15M#1 to 15M#3 so that the reaction force generated due to the movement of measurement heads 15M#1 and 15#3 is reduced or offset by the reaction force generated due to the movement of measurement head 15M#2" by replacing the wording "measurement head 15M#1" with the wording "measurement heads 15M#1 and 15#3." Therefore, a detailed explanation of the reaction force reduction operation of moving measurement heads 15M#1 to 15M#3 so that the reaction force generated due to the movement of measurement heads 15M#1 and 15#3 is reduced or offset by the reaction force generated due to the movement of measurement head 15M#2 will be omitted.

[0207] Furthermore, while the measurement heads 15M#1 and 15M#3 move in the first movement direction D#1, the measurement head 15M#2 moves in the second movement direction D#2 between the movement paths of the measurement heads 15M#1 and 15M#3, so the rotational moment is reduced or no rotational moment is generated. As a result, it is possible to reduce the possibility that the measurement accuracy of the measurement head 15M will deteriorate due to the rotational moment.

[0208] In particular, the centers of gravity of the measurement heads 15M#1 and 15M#3 and the measurement head 15M#2 may coincide within a plane intersecting the Y-axis (R) (e.g., the X(R)Z(R) plane). That is, the guide members 141#1 to 141#3, the slider members 142#1 to 142#3, and the measurement heads 15M#1 to 15M#3 may be aligned, and / or the moving device 14e1 may move the measurement heads 15M#1 to 15M#3, so that the centers of gravity of the measurement heads 15M#1 and 15M#3 and the measurement head 15M#2 coincide within a plane intersecting the Y-axis (R) (e.g., the X(R)Z(R) plane). In this case, the rotational moment is more efficiently reduced or no rotational moment is generated. As a result, the possibility of a deterioration in the measurement accuracy of the measurement head 15M due to the rotational moment can be efficiently reduced.

[0209] The extension directions of guide members 141#1 to 141#3 do not have to be parallel to each other. For example, the extension direction of guide member 141#1 may be inclined by a predetermined angle around the Z(R) axis with respect to the extension direction of guide member 142#2, and the extension direction of guide member 141#3 may be inclined by the same rotation angle around the Z(R) axis with respect to the extension direction of guide member 142#2, but in the opposite rotational direction to the predetermined angle.

[0210] (3-5-2) Second Specific Example of Movement Device 14 in Fifth Modification Next, a second specific example of the movement device 14 in the fifth modification will be described with reference to Fig. 25. Fig. 25 is a plan view showing the configuration of the second specific example of the movement device 14 in the fifth modification. In the following description, the second specific example of the movement device 14 in the fifth modification will be referred to as movement device 14e2.

[0211] 25, the moving device 14e2 differs from the above-described moving device 14 in that a measuring head 15M#3 is attached to the slider member 142#1 in addition to the measuring head 15M#1. The other configurations of the moving device 14e2 may be the same as the other configurations of the moving device 14.

[0212] The moving device 14e2 may perform a reaction force reduction operation of moving the measurement heads 15M#1 to 15M#3 so that the reaction force caused by the movement of the measurement heads 15M#1 and 15M#3 is reduced or canceled out by the reaction force caused by the movement of the measurement head 15M#2. Specifically, the moving device 14 may move the measurement heads 15M#1 and 15#3 toward the first movement direction D#1, and may also move the measurement head 15M#2 toward the second movement direction D#2 that includes a directional component opposite to the first movement direction D#1 during at least a portion of the period during which the measurement heads 15M#1 and 15#3 are moved toward the first movement direction D#1. As a result, it is possible to obtain the same effects as those described above.

[0213] Furthermore, while the measurement heads 15M#1 and 15M#3 move in the first movement direction D#1, the measurement head 15M#2 may move in the second movement direction D#2 between the movement paths of the measurement heads 15M#1 and 15M#3. As a result, the rotational moment is reduced or no rotational moment is generated. As a result, it is possible to reduce the possibility that the measurement accuracy of the measurement head 15M will deteriorate due to the rotational moment.

[0214] In particular, the centers of gravity of the measurement heads 15M#1 and 15M#3 and the measurement head 15M#2 may coincide within a plane intersecting the Y-axis (R) (e.g., the X(R)Z(R) plane). That is, the guide members 141#1 to 141#2, the slider members 142#1 to 142#2, and the measurement heads 15M#1 to 15M#3 may be aligned, and / or the moving device 14e2 may move the measurement heads 15M#1 to 15M#3, so that the centers of gravity of the measurement heads 15M#1 and 15M#3 and the measurement head 15M#2 coincide within a plane intersecting the Y-axis (R) (e.g., the X(R)Z(R) plane). In this case, the rotational moment is more efficiently reduced or no rotational moment is generated. As a result, the possibility of a deterioration in the measurement accuracy of the measurement head 15M due to the rotational moment can be efficiently reduced.

[0215] (3-5-3) Third Specific Example of Movement Device 14 in Fifth Modification Next, a third specific example of the movement device 14 in the fifth modification will be described with reference to Fig. 26. Fig. 26 is a plan view showing the configuration of the third specific example of the movement device 14 in the fifth modification. In the following description, the third specific example of the movement device 14 in the fifth modification will be referred to as movement device 14e3.

[0216] 26 , the moving device 14e3 differs from the above-described moving device 14 in that (i) it includes a single guide member 141 instead of two guide members 141#1 and 141#2, (ii) it includes a single actuator 143 (not shown in FIG. 26 ) instead of two actuators 143#1 and 143#2, (iii) measuring head 15M#3 is attached to slider member 142#1 in addition to measuring head 15M#1, and (ib) slider member 142#1 and slider member 142#2 are connected via a steel belt 145. The other configurations of the moving device 14e3 may be the same as those of the moving device 14.

[0217] The moving device 14e3 may perform a reaction force reduction operation of moving the measurement heads 15M#1 to 15M#3 so that the reaction force caused by the movement of the measurement heads 15M#1 and 15M#3 is reduced or canceled out by the reaction force caused by the movement of the measurement head 15M#2. Specifically, the moving device 14 may move the measurement heads 15M#1 and 15#3 toward the first movement direction D#1, and may also move the measurement head 15M#2 toward the second movement direction D#2 that includes a directional component opposite to the first movement direction D#1 during at least a portion of the period during which the measurement heads 15M#1 and 15#3 are moved toward the first movement direction D#1. As a result, it is possible to obtain the same effects as those described above.

[0218] Here, the moving device 14e3 may move the measuring head 15M#2 in the second movement direction D#2 using the actuator 143 included in the moving device 14e3. Furthermore, the force with which the measuring head 15M#2 moves in the second movement direction D#2 (i.e., the force with which the slider member 142#2 moves in the second movement direction D#2) may be transmitted to the slider member 142#1 via the steel belt 145 as a force that moves the measuring heads 15M#1 and 15M#3 in the first movement direction D#1 (i.e., the force that moves the slider member 142#1 in the first movement direction D#1). That is, the slider member 142#1 and the slider member 142#2 may be connected via the steel belt 145 so that the force that moves the measurement head 15M#2 in the second movement direction D#2 (i.e., the force that moves the slider member 142#2 in the second movement direction D#2) is transmitted to the slider member 142#1 as a force that moves the measurement heads 15M#1 and 15M#3 in the first movement direction D#1 (i.e., the force that moves the slider member 142#1 in the first movement direction D#1) via the steel belt 145. As a result, even when the moving device 14e3 is equipped with a single actuator 143, the moving device 14e3 can move the measuring heads 15M#1 and 15M#3 and the measuring head 15M#2 in different movement directions. Therefore, even if the moving device 14e3 includes a ball screw equipped with a screw shaft which is an example of a guide member 141, a first nut which is an example of a slider member 142#1 and is attached to the screw shaft so as to be rotatable around the screw shaft, a second nut which is an example of a slider member 142#2 and is attached to the screw shaft so as to be rotatable around the screw shaft, and an actuator 143 which can rotate the screw shaft, the moving device 14e3 can use the ball screw to move the measuring heads 15M#1 and 15M#3 and the measuring head 15M#2 in different moving directions.

[0219] The moving device 14e3 may use the actuator 143 included in the moving device 14e3 to move the measuring heads 15M#1 and #3 in the first movement direction D#1. In this case, the force with which the measuring heads 15M#1 and #3 move in the first movement direction D#1 (i.e., the force with which the slider member 142#1 moves in the first movement direction D#1) may be transmitted to the slider member 142#2 via the steel belt 145 as a force that moves the measuring head 15M#2 in the second movement direction D#2 (i.e., the force that moves the slider member 142#2 in the first movement direction D#2). In this way, the steel belt 145 transmits the movement of one measuring head 15M among the multiple measuring heads 15M#1 to 15M#3 to the other measuring heads 15M, and therefore may be referred to as a transmission member. A link mechanism may also be used as the transmission member.

[0220] Furthermore, while the measurement heads 15M#1 and 15M#3 move in the first movement direction D#1, the measurement head 15M#2 may move in the second movement direction D#2 between the movement paths of the measurement heads 15M#1 and 15M#3. As a result, the rotational moment is reduced or no rotational moment is generated. As a result, it is possible to reduce the possibility that the measurement accuracy of the measurement head 15M will deteriorate due to the rotational moment.

[0221] In particular, the centers of gravity of the measurement heads 15M#1 and 15M#3 and the center of gravity of the measurement head 15M#2 may coincide within a plane intersecting the Y-axis (R) (e.g., the X(R)Z(R) plane). That is, the guide member 141, the slider members 142#1 to 142#2, and the measurement heads 15M#1 to 15M#3 may be aligned, and / or the moving device 14e3 may move the measurement heads 15M#1 to 15M#3, so that the centers of gravity of the measurement heads 15M#1 and 15M#3 and the measurement head 15M#2 coincide within a plane intersecting the Y-axis (R) (e.g., the X(R)Z(R) plane). In this case, the rotational moment is more efficiently reduced or no rotational moment is generated. As a result, the possibility of a deterioration in the measurement accuracy of the measurement head 15M due to the rotational moment can be efficiently reduced.

[0222] (3-5-4) Fourth Specific Example of Movement Device 14 in Fifth Modification Next, a fourth specific example of the movement device 14 in the fifth modification will be described with reference to Fig. 27. Fig. 27 is a plan view showing the configuration of the fourth specific example of the movement device 14 in the fifth modification. In the following description, the fourth specific example of the movement device 14 in the fifth modification will be referred to as movement device 14e4.

[0223] As shown in FIG. 27, the moving device 14e4 includes a support member 146#1, a support member 146#2, a motor 147#1, and a motor 147#2.

[0224] The support member 146#1 is a member that extends linearly. A rotation shaft of a motor 147#1 is connected to the center C#1 of the support member 146#1 in the extension direction of the support member 146#1. The motor 147#1 may be arranged so that the rotation shaft is aligned with the Z-axis (R). A measurement head 15M#1 is attached to one end of the support member 146#1. A measurement head 15M#2 is attached to the other end of the support member 146#1.

[0225] The support member 146#2 is a member that extends linearly. A rotation shaft of a motor 147#2 is connected to the center C#2 of the support member 146#2 in the extension direction of the support member 146#2. The motor 147#2 may be arranged so that its rotation shaft is aligned with the Z-axis (R). A measurement head 15M#3 is attached to one end of the support member 146#2. A measurement head 15M#4 is attached to the other end of the support member 146#2.

[0226] The motor 147#1 may rotate the support member 146#1 in a first rotation direction. In this case, the movement direction of the measurement head 15M#1 attached to one end of the support member 146#1 is opposite to the movement direction of the measurement head 15M#2 attached to the other end of the support member 146#1. As a result, the reaction force caused by the movement of the measurement head 15M#1 is appropriately reduced or canceled out by the reaction force caused by the movement of the measurement head 15M#2.

[0227] Similarly, motor 147#2 may rotate support member 146#2 in a second rotation direction. In this case, the movement direction of measurement head 15M#3 attached to one end of support member 146#2 is opposite to the movement direction of measurement head 15M#4 attached to the other end of support member 146#2. As a result, the reaction force caused by the movement of measurement head 15M#3 is appropriately reduced or canceled out by the reaction force caused by the movement of measurement head 15M#4.

[0228] Therefore, even when the moving device 14e4 moves the four measurement heads 15M#1 to 15M#4, it is possible to appropriately obtain the same effects as those described above.

[0229] Furthermore, the second rotation direction in which motor 147#2 rotates support member 146#2 may be opposite to the first rotation direction in which motor 147#1 rotates support member 146#1. Furthermore, the rotation axis of motor 147#2 (i.e., the rotation axis of support member 146#2) and the rotation axis of motor 147#1 (i.e., the rotation axis of support member 146#1) may be coaxial. In this case, the rotation moment caused by the rotation of support member 146#1 (i.e., the rotation moment caused by the rotation of measurement heads 15M#1 to 15M#2) is reduced or offset by the rotation moment caused by the rotation of support member 146#2 (i.e., the rotation moment caused by the rotation of measurement heads 15M#3 to 15M#4). As a result, the possibility of a deterioration in the measurement accuracy of measurement head 15M due to the rotation moment can be efficiently reduced.

[0230] (3-6) Other Modifications In the above description, a plurality of measurement heads 15M are attached to the moving device 14. In other words, a plurality of devices (a plurality of objects) capable of functioning as a plurality of measurement heads 15M are attached to the moving device 14. However, a weight may be attached to the moving device 14 in place of at least one of the plurality of measurement heads 15M. As an example, in an example in which two measurement heads 15M#1 and 15M#2 are attached to the moving device 14 as shown in FIG. 4, one of the measurement heads 15M#1 and 15M#2 may be attached to the moving device 14, and a weight may be attached to the moving device 14 in place of the other of the measurement heads 15M#1 and 15M#2. As another example, in an example in which three measurement heads 15M#1 to 15M#3 are attached to the moving device 14 as shown in FIGS. 24 to 27 , any one of the measurement heads 15M#1 to 15M#3 may be attached to the moving device 14, and a weight may be attached to the moving device 14 instead of any other one of the measurement heads 15M#1 to 15M#3. In an example in which four measurement heads 15M#1 to 15M#4 are attached to the moving device 14 as shown in FIG. 27 , any one of the measurement heads 15M#1 to 15M#4 may be attached to the moving device 14, and a weight may be attached to the moving device 14 instead of any other one of the measurement heads 15M#1 to 15M#4. Even in this case, the moving device 14 may perform a reaction force reduction operation to move the measuring head 15M and the weight so that the reaction force caused by the movement of the measuring head 15M is reduced or canceled out by the reaction force caused by the movement of the weight. As a result, the robot 1 can solve the above-mentioned technical problem.

[0231] However, when the measurement head 15M rather than a weight is attached to the moving device 14, there is an advantage that the measurement range of the robot 1 equipped with the measurement head 15M is wider by the amount of the increase in the number of measurement heads 15M provided to the robot 1, compared to when weights are attached to the moving device 14 instead of the measurement head 15M. The wider the measurement range of the robot 1, the more improved the throughput of measurement using the measurement head 15M. Therefore, when the measurement head 15M rather than a weight is attached to the moving device 14, there is an advantage that the throughput of measurement using the measurement head 15M is improved, compared to when weights are attached to the moving device 14 instead of the measurement head 15M.

[0232] Alternatively, when multiple measurement heads 15M are attached to the moving device 14, at least one measurement head 15M may measure the workpiece W while moving, while at least another measurement head 15M may move without measuring the workpiece W. In other words, the moving device 14 may perform a reaction force reduction operation that moves the multiple measurement heads 15M so that the reaction force caused by the movement of the measurement head 15M that measures the workpiece W is reduced or canceled out by the reaction force caused by the movement of the measurement head 15M that does not measure the workpiece W. In other words, the measurement head 15M that does not measure the workpiece W may essentially be used as the above-mentioned weight. As a result, the robot 1 can solve the above-mentioned technical problems.

[0233] In the above description, each of the multiple measurement heads 15M is attached to the moving device 14 as the measurement head 15M. However, in addition to or instead of at least one of the multiple measurement heads 15M, any end effector 15 different from the measurement head 15M may be attached to the moving device 14. Even in this case, by having the multiple end effectors 15 attached to the moving device 14 move in the same way as the multiple measurement heads 15M described above, the robot 1 can enjoy the same effect as the effect of reducing or canceling out the reaction force generated by moving the measurement head 15M described above (that is, the effect of reducing or canceling out the reaction force generated by moving the end effector 15).

[0234] In the above description, one end effector 15 is attached to one slider member 142 included in the movement device 14. However, multiple end effectors 15 may be disposed on one slider member 142. Even in this case, the movement device 14 may perform a reaction force reduction operation to move the multiple end effectors 15 so that a reaction force caused by the movement of the multiple end effectors 15 attached to one slider member 142 is reduced or canceled by a reaction force caused by the movement of at least one end effector 15 attached to another slider member 142. Alternatively, the mass of at least one end effector 15 attached to each slider member 142 may be adjusted so that a reaction force caused by the movement of the multiple end effectors 15 attached to one slider member 142 is reduced or canceled by a reaction force caused by the movement of at least one end effector 15 attached to another slider member 142. As a result, even when multiple end effectors 15 are arranged on one slider member 142, the robot 1 can solve the above-mentioned technical problems.

[0235] In the above description, the measurement head 15M (or any end effector 15) is attached to the robot arm 12 via the moving device 14. Here, the robot arm 12 is an example of a manipulator that can be driven using a desired power (in other words, is movable). In this case, the measurement head 15M (or any end effector 15) may be attached to any manipulator other than the robot arm 12 via the moving device 14. As an example of the manipulator other than the robot arm 12, the measurement head 15M may be attached to a gantry 17 shown in FIG. 28. As shown in FIG. 28, the gantry 17 may include a pair of support frames 171. Each of the pair of support frames 171 may be a member extending along the Z-axis (G). The pair of support frames 171 are disposed at positions spaced apart along the Y-axis (G) on the support surface SS. Furthermore, the gantry 17 may include a pair of slider members 172 and an actuator 173. The pair of slider members 172 are attached to the pair of support frames 171 so as to be movable along the pair of support frames 171 using the power of the actuators 173. The moving device 14 is attached to the pair of slider members 172. In the example shown in FIG. 28 , the pair of slider members 172 are attached to guide members 141 (specifically, guide members 141#1 and 141#2) provided on the moving device 14. In this case, the moving device 14 is movable along the pair of support frames 171 (i.e., along the Z-axis (G)) in accordance with the movement of the slider members 172. Here, a reflecting member 16 may be attached to the support frame 171 and measured by the measuring device 2. In this case, the reflecting member 16 may be attached to both of the pair of support frames 171.Even when the measurement head 15M (or any end effector 15) is attached to any manipulator in this way, the multiple end effectors 15 attached to the moving device 14 move in the same manner as the multiple measurement heads 15M described above, so that the robot 1 can enjoy the same effect as the effect of reducing or canceling out the reaction force generated by moving the measurement head 15M described above (that is, the effect of reducing or canceling out the reaction force generated by moving the end effector 15). Note that when the measurement head 15M (or any end effector 15) is attached to any manipulator, the robot 1 and the robot system SYS may each be referred to as a measurement system or a moving system.

[0236] In the above explanation, the line scanner forms one linear irradiation area on the surface of the workpiece W, but the line scanner may also project multiple linear irradiation areas within the measurable range MAR.

[0237] Furthermore, in the above description, a plurality of measurement heads 15M are provided on the moving device 14, but the measurement heads 15M and an end effector that performs additional processing and / or an end effector that performs removal processing may be provided on the moving device 14. In this case, the measurement processing using the measurement head 15M may be performed in a period different from the period in which the additional processing and / or removal processing is performed, and the reaction force accompanying the movement of the measurement head 15M may be canceled by the movement of the end effector that performs additional processing and / or the end effector that performs removal processing.

[0238] (4) Supplements The following supplementary notes are further disclosed regarding the embodiments described above. [Supplementary Note 1] [Supplementary Note A1] A robot comprising: a robot arm; and a movement device disposed at a fixed position relative to the robot arm and capable of moving each of a first object and a second object relative to the robot arm, wherein the movement device moves the first object in a first movement direction and moves the second object in a second movement direction including a directional component opposite to the first movement direction. [Supplementary Note B1] A movement system comprising: a movement device disposed at a fixed position relative to a movable part of a manipulator and capable of moving each of a first object and a second object relative to the manipulator, wherein at least one of the first object and the second object performs processing on a target object, and the movement device moves the second object in a second movement direction including a directional component opposite to the first movement direction during at least a portion of a period during which the first object is moved in the first movement direction. [Supplementary Note C1] A robot comprising: a robot arm; and a movement device disposed at a fixed position relative to the robot arm and capable of moving each of a first object and a second object relative to the robot arm, wherein the movement device moves the second object during at least a portion of a period during which the first object is being moved. [Supplementary Note C2] The robot described in Supplementary Note C1, wherein the movement device moves the second object in synchronization with movement of the first object. [Supplementary Note C3] A robot control method for controlling a robot comprising a robot arm to which a first object and a second object are attached, the method comprising: moving the first object relative to the robot arm; and moving the second object relative to the robot arm during at least a portion of a period during which the first object is being moved.

[0239] At least some of the constituent elements of each of the above-described embodiments can be appropriately combined with at least some of the other constituent elements of each of the above-described embodiments. Some of the constituent elements of each of the above-described embodiments may not be used. Furthermore, to the extent permitted by law, the disclosures of all publications and U.S. patents cited in each of the above-described embodiments are incorporated herein by reference.

[0240] The present invention is not limited to the above-described embodiments, but can be modified as appropriate within the scope of the claims and the gist or concept of the invention as can be read from the entire specification, and the movement system, movement control method, measurement system, and measurement method that involve such modifications are also included in the technical scope of the present invention.

[0241] SYS Robot system 1 Robot 12 Robot arm 14 Moving device 15 End effector 15M Measuring head 16 Reflecting member 2 Measuring device 3 Control device 31 Arithmetic device 32 Storage device

Claims

1. A movement system comprising: a first object; a second object; and a movement device arranged in a fixed position relative to a movable part of a manipulator and capable of moving each of the first object and the second object relative to the manipulator, wherein at least one of the first object and the second object performs processing on a target object, and the movement device moves the second object in a second movement direction including a directional component opposite to the first movement direction during at least a portion of a period during which the first object is moved in a first movement direction.

2. The mobile system according to claim 1, wherein the first object includes a first device that performs a first process on the target object, and the second object includes a second device that performs a second process on the target object.

3. The moving system according to claim 1 or 2, wherein the moving device moves the second object in the second moving direction in synchronization with the movement of the first object in the first moving direction.

4. A mobile system according to any one of claims 1 to 3, wherein the first object includes a first measuring device that measures a target object, and the second object includes a second measuring device that measures the target object.

5. The mobile system according to claim 4, wherein at least one of the first and second measuring devices measures the target object during at least a portion of the time period during which at least one of the first and second measuring devices is being moved by the mobile device.

6. A mobile system according to claim 4 or 5, wherein information relating to the position of the target object is calculated based on at least one of the measurement results of the target object by the first measurement device and the measurement results of the target object by the second measurement device.

7. A movement system according to any one of claims 4 to 6, further comprising a third measurement device capable of measuring the position of the manipulator, and at least one of the first measurement device and the second measurement device acquires information relating to the position of the target object based on the measurement results of the third measurement device.

8. A movement system according to any one of claims 4 to 7, further comprising a third measuring device capable of measuring the position of the manipulator, and information relating to the position of the object obtained by at least one of the first measuring device and the second measuring device is changed based on the measurement results of the third measuring device.

9. A movement system according to any one of claims 4 to 8, wherein the first measurement device is inclined relative to the second measurement device.

10. A movement system according to any one of claims 4 to 9, wherein the measurement axis of the first measurement device is inclined with respect to the measurement axis of the second measurement device.

11. A mobile system according to any one of claims 4 to 10, wherein the orientation of at least one of the first and second measuring devices is adjusted based on the shape of the surface of the target object.

12. A movement system according to any one of claims 4 to 11, wherein the tilt of at least one of the measurement axes of the first measurement device and the second measurement device is adjusted based on the shape of the surface of the target object.

13. A mobile system according to any one of claims 4 to 12, wherein the measurement range of the first measurement device at least partially overlaps with the measurement range of the second measurement device.

14. A movement system according to any one of claims 1 to 13, wherein the second movement direction is a movement direction opposite to the first movement direction.

15. A movement system according to any one of claims 1 to 14, wherein the first movement direction is a movement direction that moves the first object closer to the second object, and the second movement direction is a movement direction that moves the second object closer to the first object.

16. A movement system according to any one of claims 1 to 15, wherein the first movement direction is a movement direction that moves the first object away from the second object, and the second movement direction is a movement direction that moves the second object away from the first object.

17. A movement system according to any one of claims 1 to 16, wherein the movement device comprises a first movement axis and a second movement axis, the first object is attached to the first movement axis so as to be movable along the first movement axis, the second object is attached to the second movement axis so as to be movable along the second movement axis, and the second movement axis extends along a second extension direction which includes a directional component along a first extension direction in which the first movement axis extends.

18. The movement system according to claim 17, wherein the second extension direction is a direction along the first extension direction.

19. A movement system according to claim 17 or 18, wherein the second movement axis is spaced from the first movement axis along a transverse direction that intersects at least one of the first and second extension directions.

20. A movement system as described in claim 19, wherein the distance between the first and second movement axes in the intersecting direction is set to a predetermined distance determined based on at least one of the movement stroke of the first object along the first movement axis and the movement stroke of the second object along the second movement axis.

21. A movement system according to claim 19 or 20, wherein the distance between the first and second movement axes in the cross direction is 30% or less of at least one of the movement stroke of the first object along the first movement axis and the movement stroke of the second object along the second movement axis.

22. A movement system according to any one of claims 17 to 21, wherein the second movement axis is parallel to the first movement axis.

23. A movement system according to claim 17 or 18, wherein the second movement axis is coaxial with the first movement axis.

24. A movement system according to any one of claims 1 to 16, wherein the movement device comprises a movement axis, the first object is attached to the movement axis such that the first object is movable along the movement axis, and the second object is attached to the movement axis such that the second object is movable along the movement axis.

25. A movement system according to any one of claims 1 to 24, wherein the stroke of movement of the first object is the same as the stroke of movement of the second object.

26. A movement system according to any one of claims 1 to 25, wherein the manipulator comprises a robot arm, the movable part includes an arm member provided on the robot arm, and the movement device is capable of moving each of the first object and the second object along a direction intersecting the direction in which the arm member extends.

27. A movement system according to any one of claims 1 to 26, wherein the movement device accelerates the first object moving in the first movement direction and accelerates the second object moving in the second movement direction.

28. The transportation system of claim 27, wherein the transportation device accelerates the second object during at least a portion of the time period during which the transportation device accelerates the first object.

29. A movement system according to claim 27 or 28, wherein the movement device accelerates the second object, which is moving along the second movement direction, in synchronization with the acceleration of the first object, which is moving in the first movement direction.

30. A movement system according to any one of claims 1 to 29, wherein the movement device decelerates the first object moving in the first movement direction and decelerates the second object moving in the second movement direction.

31. The mobile system of claim 30, wherein the mobile device decelerates the second object during at least a portion of the time period during which the mobile device decelerates the first object.

32. A movement system according to claim 30 or 31, wherein the movement device decelerates the second object, which is moving along the second movement direction, in synchronization with deceleration of the first object, which is moving in the first movement direction.

33. A movement system described in any one of claims 1 to 32, wherein the movement device moves the first object in the first movement direction and moves the second object in the second movement direction so that a first reaction force generated by moving the first object in the first movement direction is reduced by a second reaction force generated by moving the second object in the second movement direction.

34. A movement system described in any one of claims 1 to 33, wherein the movement device moves the first object in the first movement direction and moves the second object in the second movement direction so that the first reaction force generated by moving the first object in the first movement direction is offset by the second reaction force generated by moving the second object in the second movement direction.

35. A movement system according to any one of claims 1 to 34, wherein the movement device moves a third object in addition to the first object in the first movement direction, and moves the second object in the second movement direction.

36. A movement system according to claim 35, wherein the centers of gravity of the first and third objects coincide with the center of gravity of the second object in a plane intersecting at least one of the first and second movement directions.

37. A movement control method for controlling a movement system including a manipulator having a first object and a second object attached to a movable part, wherein at least one of the first object and the second object performs processing on a target object, the movement control method comprising: moving the first object in a first movement direction relative to the manipulator; and moving the second object in a second movement direction including a directional component opposite to the first movement direction relative to the manipulator during at least a portion of a period during which the first object is being moved in the first movement direction.

38. A measurement system comprising: a first measurement device that measures a target object; a second measurement device that measures the target object; and a movement device that is arranged in a fixed position relative to a movable part of a manipulator and that can move each of the first and second measurement devices relative to the manipulator, wherein at least one of the first and second measurement devices measures the target object during at least a portion of the period during which it is moved by the movement device.

39. The metrology system of claim 38, wherein the measurement range of the first metrology device at least partially overlaps with the measurement range of the second metrology device.

40. The measurement system described in claim 38 or 39, wherein the movement device moves the second measurement device in a second movement direction that includes a directional component opposite to the first movement direction during at least a portion of a period in which the movement device moves the first measurement device in a first movement direction.

41. A measurement method for measuring a target object, comprising: measuring the target object with a first measurement device while moving the first measurement device relative to the target object; measuring the target object with a second measurement device different from the first measurement device while moving the second measurement device relative to the target object; measuring with the first measurement device includes moving the first measurement device relative to a movable part of a manipulator; and measuring with the second measurement device includes moving the second measurement device relative to the movable part of a manipulator.

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