Evaporation boat, preparation method therefor, and use thereof

Abstract

The present application relates to an evaporation boat, a preparation method therefor, and a use thereof. The evaporation boat comprises an evaporation boat matrix and a single coating covering the surface of the evaporation boat matrix; the single coating comprises a first material and a second material; the first material includes MoB / CoCr cermet; the second material includes a tungsten-boron binary compound; and the tungsten-boron binary compound comprises one or two of WB and W2B5.

Description

Evaporation boat and preparation method and application thereof

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to Chinese Patent Application No. 202410657764.1, filed May 24, 2024, entitled “Evaporation boat and preparation method and application thereof,” which is incorporated by reference in its entirety. TECHNICAL FIELD

[0003] The present application relates to the technical field of evaporation vessels, in particular to an evaporation boat and a preparation method and application thereof. BACKGROUND

[0004] The statements herein are provided only to complement the application and do not necessarily constitute prior art.

[0005] Currently, when metal evaporation (such as aluminum evaporation) is performed using a vacuum metal coating process, an evaporation boat is usually used as a melter for molten metal liquid. During the evaporation process, due to repeated temperature rising and falling and the erosion of the molten metal liquid to the boat body, the evaporation boat becomes a key consumable part in the evaporation process, and the performance and service life of the evaporation boat determine the quality and cost of the product. In the traditional evaporation process, there is often a problem of corrosion of the evaporation boat by the molten metal liquid (such as aluminum liquid), which shortens the service life of the evaporation boat.

[0006] SUMMARY

[0007] The present application provides an evaporation boat and a preparation method and application thereof, which can balance the corrosion resistance and wettability of the molten metal liquid in the evaporation process.

[0008] To achieve the above-mentioned purpose, the first aspect of the present application provides an evaporation boat, comprising:

[0009] an evaporation boat base; and

[0010] a single coating layer covering the surface of the evaporation boat base, the single coating layer comprising a first material and a second material, the first material comprising MoB / CoCr cermet, and the second material comprising a tungsten-boron binary compound, the tungsten-boron binary compound comprising one or both of WB and W2B5.

[0011] In some embodiments of the present application, in the single coating layer, the mass percentage content of the tungsten-boron binary compound is ω, and 0 < ω ≤ 6%.

[0012] In some embodiments of the present application, in the single coating layer, the mass percentage content of the tungsten-boron binary compound is ω, and 2% ≤ ω ≤ 6%.

[0013] In some embodiments of the present application, the single coating layer contains Co in a mass percentage of 21% to 27%, Cr in a mass percentage of 18% to 25%, B in a mass percentage of 8% to 15%, and the rest is Mo.

[0014] In some embodiments of the present application, the single coating layer has a thickness of 150 micrometers (μm) to 200 μm.

[0015] In some embodiments of the present application, the evaporation boat base contains BN and TiB2, and optionally AlN.

[0016] In some embodiments of the present application, in the evaporation boat base, the mass percentage of BN is 35% to 40%, the mass percentage of TiB2 is 40% to 65%, and the mass percentage of AlN is 0 to 20%.

[0017] The second aspect of the present application also provides a method for preparing an evaporation boat, comprising:

[0018] forming a single coating layer containing a first material and a second material on the surface of the evaporation boat base to prepare the evaporation boat, wherein the first material comprises MoB / CoCr cermet, and the second material comprises a tungsten-boron binary compound, and the tungsten-boron binary compound comprises one or both of WB and W2B5.

[0019] In some embodiments of the present application, the raw materials for forming the single coating layer containing the first material and the second material comprise MoB / CoCr powder and W-containing elemental powder.

[0020] In some embodiments of the present application, one or more of the following conditions is met:

[0021] (1) the mass percentage of the W-containing elemental powder in the raw materials is σ, and 0 < σ ≤ 6%;

[0022] (2) the W-containing elemental powder contains B element, and the mass ratio of B element to W element is ≤ 1:6.

[0023] In some embodiments of the present application, one or more of the following conditions is met:

[0024] (1) the average particle size of the MoB / CoCr powder is 20 μm to 35 μm;

[0025] (2) the average particle size of the W-containing elemental powder is 20 μm to 35 μm.

[0026] The second aspect of the present application also provides an application of the evaporation boat as described in the first aspect of the present application or the evaporation boat prepared by the method as described in the second aspect of the present application in evaporating metal.

[0027] In some embodiments of the present application, the evaporated metal comprises aluminum.

[0028] The evaporation boat provided by the present application can isolate the evaporation boat substrate from direct contact with the molten metal liquid by arranging a single coating layer on the surface of the evaporation boat substrate. The MoB / CoCr cermet contained in the single coating layer has good corrosion resistance to the molten metal liquid, especially the aluminum liquid, and has good toughness and hardness itself. In this way, the corrosion of the molten metal liquid, especially the aluminum liquid, to the surface of the evaporation boat during the evaporation process can be effectively reduced, and the service life of the evaporation boat can be prolonged. At the same time, the single coating layer also contains tungsten-boron binary compounds, which can effectively improve the wettability of the single coating layer to the molten metal liquid, especially the aluminum liquid. In this way, the splashing of the molten metal liquid during the evaporation process can be reduced, and the stability of the prepared product can be improved.

[0029] The details of one or more embodiments of the present application are presented in the following drawings and description. Other features, objects, and advantages of the present application will become apparent from the description, drawings, and claims. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments of the present application will be briefly introduced as follows. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can also be obtained according to the drawings without creative labor for those skilled in the art. In the drawings:

[0031] FIG. 1 is a schematic diagram of the cross-sectional structure of the evaporation boat according to an embodiment of the present application.

[0032] FIG. 2 is a surface morphology diagram of the evaporation boat of Example 1 (FIG. (a)) and Comparative Example 1 (FIG. (b)) after 20 hours of use.

[0033] Reference signs: 11, evaporation boat substrate; 12, single coating layer. DETAILED DESCRIPTION

[0034] Hereinafter, some embodiments of the evaporation boat of the present application, the method for producing the same, and the use thereof will be described in detail with appropriate reference to the accompanying drawings. However, there will be cases where unnecessary detailed description is omitted. For example, there will be cases of omitting detailed description of matters known to those skilled in the art, and repeated description of substantially identical configurations. This is to avoid the following description from becoming unnecessarily lengthy and to facilitate understanding by those skilled in the art. Furthermore, the accompanying drawings and the following description are provided to enable those skilled in the art to fully understand the present application, and are not intended to limit the subject matter recited in the claims.

[0035] "Ranges" disclosed herein can be defined, with respect to a minimum and maximum, by selecting a minimum and a maximum, the selected minimum and maximum defining the boundaries of a particular range. Ranges defined in this way can be inclusive or exclusive of the endpoints, either endpoint can be included or excluded independently, and can be combined in any manner, i.e., any minimum can be combined with any maximum to form a range. For example, if ranges of 60-120 and 80-110 are listed for a particular parameter, it is understood that ranges of 60-110 and 80-120 are also contemplated. Furthermore, if a minimum range value of 1 and 2 are listed, and if a maximum range value of 3, 4, and 5 is also listed, then the following ranges are all contemplated: 1-3, 1-4, 1-5, 2-3, 2-4, and 2-5. In the present application, unless otherwise stated, a numerical range "a-b" indicates a shorthand way of describing each and every intervening real number, a and b being real numbers. For example, the numerical range "0-5" indicates that all real numbers between "0-5" have been listed herein, "0-5" being a shorthand way of describing these numerical combinations. Also, when it is stated that a parameter is an integer ≥ 2, it is equivalent to listing the parameter as, for example, integer 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, etc. For example, when it is stated that a parameter is an integer selected from "2-10", it is equivalent to listing the integers 2, 3, 4, 5, 6, 7, 8, 9, and 10.

[0036] In the present application, "a plurality of", "a plurality of kinds", and the like, unless otherwise specified, mean greater than or equal to 2 in number. For example, "one or more" means one or more than or equal to two.

[0037] All embodiments of the present application and optional embodiments can be combined with each other to form new technical solutions, if not otherwise specified.

[0038] Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment or implementation of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are they necessarily mutually exclusive of one another. As those skilled in the art will appreciate, embodiments described herein can be combined with one another, unless specifically noted otherwise. Reference herein to "an implementation" is to be understood similarly.

[0039] Those skilled in the art will understand that, in the methods of the various implementations or embodiments, the sequence of writing the steps does not mean a strict execution sequence and does not constitute any limitation on the implementation process, and the detailed execution sequence of the steps should be determined according to their functions and possible internal logic. If not specifically stated, all steps of the application can be performed sequentially or randomly, and preferably sequentially. For example, the method includes steps (a) and (b), which means that the method can include steps (a) and (b) performed sequentially, or steps (b) and (a) performed sequentially. For example, the method also includes step (c), which means that step (c) can be added to the method in any order, for example, the method can include steps (a), (b) and (c), or steps (a), (c) and (b), or steps (c), (a) and (b), etc.

[0040] In the present application, the open technical features or technical solutions described by the words "containing", "including", "comprising" and the like, if not otherwise specified, do not exclude additional members from the listed members, which can be regarded as providing both a closed feature or solution composed of the listed members, and an open feature or solution including additional members in addition to the listed members. For example, A includes a1, a2 and a3, if not otherwise specified, it can also include other members, or it can not include additional members, which can be regarded as providing both the feature or solution that "A is composed of a1, a2 and a3", and the feature or solution that "A includes a1, a2 and a3, and also includes other members". In the present application, if not otherwise specified, A (such as B) means that B is a non-limiting example of A, and it can be understood that A is not limited to B.

[0041] In the present application, "optionally", "optional" and "optional" mean that it can or can not be present, i.e. it means to choose from either of the two parallel solutions "have" or "have not". If there are multiple "optional" in a technical solution, if not otherwise specified, and there is no contradictory relationship or mutual restriction, each "optional" is independent of each other.

[0042] At present, in the process of metal evaporation (such as aluminum evaporation) by vacuum coating metal, the evaporation boat is usually used as a melter for molten metal liquid. During the evaporation process, due to repeated heating and cooling and the erosion of molten metal liquid to the boat body, the evaporation boat becomes a key consumable part in the evaporation process. The performance and service life of the evaporation boat determine the quality and cost of the product. At present, the commercially available evaporation boat is usually a composite ceramic evaporation boat sintered by two components BN and TiB2 or three components BN, TiB2 and AlN. That is, after the raw materials are prepared and purified, they are mixed uniformly, cold-pressed into a shape, hot-pressed and sintered to form a ceramic blank, and finally machined into a specific shape of evaporation boat by milling and other machining methods.

[0043] However, in the current composite ceramic evaporation boat, the components of the evaporation boat substrate (such as BN) often react with the molten metal liquid (such as aluminum liquid) during the evaporation process, so the surface of the evaporation boat is corroded by the molten metal liquid. Moreover, the non-uniformity of surface corrosion easily leads to the non-uniformity of the temperature field, which further aggravates the corrosion reaction, so that the surface quality of the evaporation boat is poor in the later stage of use, and the service life of the evaporation boat is shortened.

[0044] To solve the above technical problems, the present application provides an evaporation boat, which comprises an evaporation boat substrate and a single coating layer covering the surface of the evaporation boat substrate. By setting a single coating layer containing a first material and a second material on the surface of the evaporation boat substrate, the corrosion of the molten metal liquid to the surface of the evaporation boat during the evaporation process can be effectively reduced, and the service life of the evaporation boat can be prolonged. In the following, the evaporation boat will be described in detail.

[0045] In a first aspect, the present application provides an evaporation boat, referring to FIG. 1, which comprises an evaporation boat substrate 11 and a single coating layer 12 covering the surface of the evaporation boat substrate 11. The single coating layer 12 contains a first material and a second material. The first material comprises MoB / CoCr cermet, and the second material comprises a tungsten-boron binary compound, which comprises one or both of WB and W2B5.

[0046] The evaporation boat provided by the present application can isolate the evaporation boat substrate from direct contact with the molten metal liquid by setting a single coating layer on the surface of the evaporation boat substrate. At the same time, the MoB / CoCr cermet contained in the single coating layer has good corrosion resistance to the molten metal liquid, especially aluminum liquid, and has good toughness and hardness itself. Therefore, the corrosion of the molten metal liquid, especially aluminum liquid, to the surface of the evaporation boat during the evaporation process can be effectively reduced, the evaporation boat can always maintain a relatively uniform temperature field during the evaporation process, the corrosion aggravation phenomenon caused by the non-uniformity of the temperature field can be reduced, and the service life of the evaporation boat can be prolonged.

[0047] In addition, it is found in the research process that, although the single coating containing MoB / CoCr cermet can effectively reduce the corrosion of molten metal liquid (such as aluminum liquid) to the evaporation boat substrate, the single coating has poor wettability to the molten metal liquid. In the evaporation process, the poor wettability problem will easily lead to splashing of the molten metal liquid, affecting the stability of the prepared product.

[0048] Based on the above problems, the single coating of the evaporation boat provided by the present application contains not only MoB / CoCr cermet but also tungsten-boron binary compound. The tungsten-boron binary compound can effectively improve the wettability of the single coating to the molten metal liquid, especially aluminum liquid, so as to solve the problem of poor wettability of MoB / CoCr cermet to the molten metal liquid, reduce the splashing of the molten metal liquid in the evaporation process, and improve the stability of the prepared product.

[0049] In this way, by arranging the single coating on the surface of the evaporation boat substrate, the evaporation boat provided by the present application not only has improved corrosion resistance to the molten metal liquid and prolonged service life, but also has good wettability to the molten metal liquid (such as aluminum liquid) in the evaporation process. That is, the evaporation boat provided by the present application can have both corrosion resistance and wettability to the molten metal liquid in the evaporation process.

[0050] It should be noted that the "MoB / CoCr cermet" described in the present application represents a kind of cermet material containing Mo, B, Co and Cr elements. The phase composition of the cermet material is not MoB and CoCr with a molar ratio of 1:1 as indicated by the literal meaning of the molecular formula, but the phase composition includes the main phase ternary boride CoMo2B2, CoMoB, and a small amount of the secondary phase binary boride MoB and CrB.

[0051] In some embodiments, the volume fraction of the main phase in the cermet material is ≥60%, and the volume fraction of the secondary phase therein is ≤40%.

[0052] It can be understood that the "single coating" described in the present application refers to a single layer coating in physical dimension, which is different from a composite coating (i.e. a multi-layer coating) in physical dimension. The difference between the single coating and the composite coating is that all components, i.e. the first material and the second material, in the single coating are formed by one-time preparation.

[0053] In some embodiments, the mass percentage content of the tungsten-boron binary compound in the single coating layer is ω, and 0 < ω ≤ 6%. For example, the mass percentage content can be 0.1%, 0.5%, 0.8%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, or within a range defined by any of the above values. In this way, while the evaporation boat is provided with good corrosion resistance to molten metal liquid and service life, the wettability of the evaporation boat to the molten metal liquid is also improved.

[0054] In some embodiments, the mass percentage content of the tungsten-boron binary compound in the single coating layer is ω, and 2% ≤ ω ≤ 6%. In this way, while the evaporation boat is provided with good corrosion resistance to molten metal liquid and service life, the wettability of the evaporation boat to the molten metal liquid is further improved.

[0055] In some embodiments, the mass percentage content of Co in the single coating layer is 21% to 27%, the mass percentage content of Cr is 18% to 25%, the mass percentage content of B is 8% to 15%, and the rest is Mo. In this way, the corrosion resistance, toughness, and hardness of the single coating layer are further improved, and the service life of the evaporation boat is further improved.

[0056] For example, the mass percentage content of each component in the single coating layer can be measured by the following method: scraping the powder of the single coating layer on the surface of the evaporation boat, and performing XRD (X-ray diffraction) testing on the powder. The phase composition and percentage content of each phase in the single coating layer can be measured by the diffraction peaks and peak intensity ratio of the XRD (the testing angle is 25° to 80°, and the scanning rate is 10° / min).

[0057] In some embodiments, the thickness of the single coating layer is 150 μm to 200 μm. For example, the thickness can be 150 μm, 160 μm, 170 μm, 180 μm, 190 μm, 200 μm, or within a range defined by any of the above values.

[0058] In some embodiments, the evaporation boat base body comprises BN and TiB2, and optionally AlN.

[0059] It can be understood that the evaporation boat base body of the present application can only comprise two components of BN and TiB2, or can comprise three components of BN, TiB2, and AlN.

[0060] In some embodiments, the mass percentage content of the BN in the evaporation boat base body is 35% to 40%. For example, the mass percentage content of the BN can be 35%, 36%, 37%, 38%, 39%, 40%, or within a range defined by any of the above values.

[0061] In some embodiments, the mass percentage of TiB2 in the evaporation boat base body is 40% to 65%. For example, the mass percentage of TiB2 can be 40%, 45%, 50%, 55%, 60%, 65%, or within a range defined by any of the above values.

[0062] In some embodiments, the mass percentage of AlN in the evaporation boat base body is 0 to 20%. For example, the mass percentage of AlN can be 0%, 5%, 10%, 15%, 20%, or within a range defined by any of the above values. Alternatively, the mass percentage of AlN in the evaporation boat base body is greater than 0 and not more than 20%.

[0063] For example, the mass percentage of each component in the evaporation boat base body can be measured by the following method: scraping (grinding) off the coating on the surface of the evaporation boat, and using a scanning electron microscope (SEM) equipped with an energy dispersive spectrometer (EDS) to characterize the surface and cross-sectional microstructure and element content of the base body with the coating scraped off.

[0064] In a second aspect, the present application provides a method for preparing an evaporation boat, which can be used to prepare the evaporation boat of the first aspect of the present application, and can include the following steps:

[0065] S1, forming a single coating layer containing a first material and a second material on the surface of the evaporation boat base body to prepare the evaporation boat, the first material comprising MoB / CoCr cermet, and the second material comprising a tungsten-boron binary compound, the tungsten-boron binary compound comprising one or both of WB and W2B5.

[0066] By forming a single coating layer containing a first material and a second material on the surface of the evaporation boat base body, not only can the corrosion resistance of the evaporation boat to molten metal liquid and the service life of the evaporation boat be improved, but also the evaporation boat can have good wettability to the evaporated molten metal liquid (such as aluminum liquid). That is, by preparing a single coating layer containing a first material and a second material, the corrosion resistance and wettability of the evaporation boat to molten metal liquid can be achieved.

[0067] It should be noted that the "one step formation" described in the present application means that the first material and the second material contained in the single coating layer are formed by using a certain preparation method of the coating layer once.

[0068] In some embodiments, the manner of forming the single coating layer on the surface of the evaporation boat substrate is not limited and can be selected according to actual needs. For example, the single coating layer can be formed by thermal spraying, such as High Velocity Oxygen Fuel Spray (HVOF), plasma arc plating, laser spray melting, etc.

[0069] In some embodiments, the raw material for preparing the single coating layer containing the first material and the second material includes MoB / CoCr powder and W-containing elemental powder. Thus, during the formation of the single coating layer, the W in the raw material can react with the MoB contained in the MoB / CoCr powder to generate a tungsten-boron binary compound, which not only promotes the improvement of the density of the single coating layer, thereby further improving the corrosion resistance of the single coating layer to the molten metal and the service life of the evaporation boat on the basis of the single coating layer containing MoB / CoCr cermet, but also improves the wettability of the MoB / CoCr cermet in the single coating layer to the molten metal.

[0070] It can be understood that the tungsten-boron binary compound generated by the reaction in the present application can contain both WB and W2B5, and WB and W2B5 can exist in any mass ratio in the tungsten-boron binary compound.

[0071] Compared with the raw material for preparing the single coating layer only including MoB / CoCr powder, and then forming a MoB / CoCr cermet single coating layer on the surface of the evaporation boat substrate, the raw material further including W-containing elemental powder can generate a tungsten-boron binary compound in the single coating layer on the basis of the MoB / CoCr cermet in the single coating layer by the reaction of W with MoB contained in the MoB / CoCr powder, so as to improve the wettability of the MoB / CoCr cermet in the single coating layer to the molten metal.

[0072] In addition, compared with forming the MoB / CoCr cermet single coating and the tungsten-boron binary compound single coating respectively on the surface of the evaporation boat substrate (for example, first forming the MoB / CoCr cermet single coating on the surface of the evaporation boat substrate, and then forming the tungsten-boron binary compound single coating on the surface of the MoB / CoCr cermet single coating), the preparation of the MoB / CoCr powder and the W-containing single powder in the preparation raw material can generate the tungsten-boron binary compound in the single coating by the reaction of W and MoB on the basis of the MoB / CoCr cermet in the single coating. Compared with the direct preparation of the tungsten-boron binary compound single coating by using B powder and W powder, not only can the generated tungsten-boron binary compound play a role in improving the wettability of the single coating, but also can realize the effect of improving the density of the single coating by the reaction of W and MoB, which is not possessed by the direct preparation of the tungsten-boron binary compound single coating by using B powder and W powder.

[0073] In some embodiments, the W-containing single powder contains B single substance. In this way, the reaction of W and B to generate the tungsten-boron binary compound is carried out synchronously while the reaction of W and MoB contained in the MoB / CoCr powder to generate the tungsten-boron binary compound, which is beneficial to generate more W2B5 in the single coating, so as to further improve the wettability of the single coating to the molten metal liquid.

[0074] In some embodiments, in the W-containing single powder, the mass ratio of the B single substance to the W single substance is ≤1:6. For example, the mass ratio can be 1:6, 1:7, 1:8, 1:9, 1:10, etc. Alternatively, the mass ratio of the B single substance to the W single substance is greater than 0 and not more than 1:6.

[0075] In some embodiments, before the preparation of the single coating, the surface of the evaporation boat substrate can be subjected to roughening treatment to enhance the bonding force between the single coating and the evaporation boat substrate. For example, the surface of the evaporation boat substrate can be polished with coarse sandpaper.

[0076] In some embodiments, in the preparation raw material, the mass percentage content of the W-containing single powder is σ, and 0<σ≤6%. For example, σ can be 0.1%, 0.5%, 0.8%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6% or within a range consisting of any of the above values.

[0077] In some embodiments, the average particle size of the MoB / CoCr powder is 20 μm to 35 μm. For example, the average particle size can be 20 μm, 25 μm, 30 μm, 35 μm or within a range consisting of any of the above values.

[0078] In some embodiments, the average particle size of the W-containing elemental powder is 20-35 pm. For example, the average particle size can be 20 pm, 25 pm, 30 pm, 35 pm, or within a range defined by any of the above values.

[0079] The average particle sizes of the MoB / CoCr powder and the W-containing elemental powder are within the above respective ranges, which is conducive to improving the uniformity of the single coating and further improving the molten metal corrosion resistance of the single coating.

[0080] For example, the average particle sizes of the MoB / CoCr powder and the W-containing elemental powder can be measured by referring to GB / T 19077-2016 Particle Size Distribution Laser Diffraction Method, using a laser particle size analyzer (such as a Mastersizer 2000E laser particle size analyzer from Malvern Instruments Ltd., UK).

[0081] As a specific example, the evaporation boat described in the present application can be prepared by the following steps:

[0082] S10, surface roughening: polishing the surface of the evaporation boat base using coarse sandpaper;

[0083] S20, batching and ball milling: mixing the MoB / CoCr powder with a particle size of 25-35 pm and the W-containing elemental powder with a particle size of 20-35 pm to prepare a mixed powder; adding alcohol accounting for 10-30% of the mass ratio of the mixed powder, and loading into a ball mill for ball milling at a speed of 200-400 revolutions per minute (rpm) for 6-8 hours (h);

[0084] S30, powder drying: after ball milling, the uniformly mixed suspension is dried at 100-150 degrees Celsius (℃) for 1-2 h;

[0085] S40, hot spraying single coating: using HVOF technology to spray a single coating on the surface of the evaporation boat base to prepare an evaporation boat.

[0086] It should be noted that the shape of the "evaporation boat base" described in the present application is not limited, and any shape can be selected according to actual needs.

[0087] In a third aspect, the present application provides the use of the evaporation boat described in the first aspect of the present application or prepared by the method described in the second aspect of the present application in evaporation of metal.

[0088] In some embodiments, the evaporation of metal includes evaporation of aluminum.

[0089] It can be understood that the application scenarios of the evaporation boat provided in the first aspect of the present application or the evaporation boat prepared according to the method of the second aspect of the present application are not limited, and the evaporation boat can be used not only in the evaporation of aluminum but also in the evaporation or preparation of other metals.

[0090] Embodiment

[0091] Hereinafter, the embodiments of the present application will be described. The embodiments described below are exemplary and are only used to explain the present application and cannot be understood as a limitation of the present application. If the technology or conditions are not specified in the embodiments, the technology or conditions are performed according to the technology or conditions described in the literature in the art or according to the product instruction. If the reagents or instruments are not specified by the manufacturer, they are all conventional products that can be obtained by purchase.

[0092] Embodiment 1

[0093] S10, surface roughening: the surface of the evaporation boat substrate is polished by using coarse sandpaper, and the mass percentage of each component in the evaporation boat substrate is: BN (40%), TiB2 (40%), and AlN (20%).

[0094] S20, batching and ball milling: MoB / CoCr powder with a particle size of 30 μm (the mass percentage of each element is: B: 10.0%, Co: 22.5%, Cr: 19.4%, and the balance is Mo) and W element-containing powder with a particle size of 35 μm (the powder contains a small amount of B element, and the mass ratio of B element to W element is 1:6) are mixed in a mass ratio of 100:5 to prepare a mixed powder; 30% of alcohol based on the mass of the mixed powder is added, and the ball mill is loaded for ball milling, the ball milling speed is 300 rpm, and the ball milling time is 7 h.

[0095] S30, powder drying: after the ball milling is completed, the uniformly mixed suspension is dried at 100°C for 2 h.

[0096] S40, thermal spraying single coating: the dried powder is sprayed on the surface of the evaporation boat substrate by using HVOF technology to form a single coating with a thickness of about 200 μm, so that the single coating contains MoB / CoCr cermet and tungsten-boron binary compound, and an evaporation boat is prepared. The process parameters of HVOF are as follows: the oxygen flow is 55 cubic meters per hour (m 3 / h), the kerosene flow is 30 liters per hour (L / h), the spraying distance is 320 millimeters (mm), the gun barrel length is 150 mm, the powder feeding rate is 80 grams per minute (g / min), and the linear velocity is 800 millimeters per second (mm / s).

[0097] Embodiments 2 to 10

[0098] Similar to the preparation method of Example 1, the main difference is that in step S20, the mass percentage of each element in the MoB / CoCr powder and the mass ratio of the powder containing W element are adjusted to change the mass percentage of each component in the prepared single coating, and the results are shown in Table 1 below.

[0099] Example 11

[0100] Similar to the preparation method of Example 1, the main difference is that in step S20, the powder containing W element does not contain B element.

[0101] Comparative Example 1

[0102] Similar to the preparation method of Example 1, the main difference is that steps S10 to S40 are omitted, i.e. the surface of the evaporation boat matrix is not sprayed with a single coating.

[0103] Comparative Example 2

[0104] Similar to the preparation method of Example 1, the main difference is that in step S20, no powder containing W element is added, so that the prepared single coating contains MoB / CoCr cermet and does not contain tungsten boride binary compound.

[0105] Comparative Example 3

[0106] Similar to the preparation method of Example 1, the main difference is that in step S20, no MoB / CoCr powder is added, and the powder containing W element does not contain B element, so that the prepared single coating contains W, does not contain MoB / CoCr cermet, and does not contain tungsten boride binary compound.

[0107] Comparative Example 4

[0108] S10, surface roughening: polish the surface of the evaporation boat matrix with coarse sandpaper.

[0109] S20, batching and ball milling: take MoB / CoCr powder with a particle size of 30 μm (mass percentage of each element: B: 10.0%, Co: 22.5%, Cr: 19.4%, and the balance is Mo), and mixed powder of W powder and B powder with a particle size of 35 μm (mass ratio of 6:1), each accounting for 30% of the mass of the powder, then respectively into the ball mill, ball milling speed 300 rpm, ball milling time 7 h.

[0110] S30, powder drying: after ball milling, dry the uniformly mixed suspension A (containing MoB / CoCr powder) and suspension B (containing W powder and B powder) at 100°C for 2 h, respectively, to obtain powder A and powder B.

[0111] S40, thermal spraying single coating: using HVOF technology, the powder A is sprayed on the surface of the evaporation boat base to form a single coating with a thickness of about 150 μm, so that the single coating contains MoB / CoCr cermet and does not contain tungsten boron binary compound; then on the basis of the single coating, using HVOF technology, the powder B is sprayed on the surface of the single coating to form a single coating with a thickness of about 50 μm, so that the single coating contains tungsten boron binary compound and does not contain MoB / CoCr cermet, thereby preparing the evaporation boat.

[0112] Comparative Example 5

[0113] Similar to the preparation method of Comparative Example 4, the main difference is that in step S20, MoB / CoCr powder is not added, so that the prepared single coating contains tungsten boron binary compound and does not contain MoB / CoCr cermet.

[0114] The relevant parameters of the evaporation boats of Examples 1 to 11 and Comparative Examples 1 to 5 described above are shown in Table 1 below.

[0115] Table 1

[0116] In addition, the evaporation boats obtained in Examples 1 to 11 and Comparative Examples 1 to 5 described above are subjected to relevant performance tests, and the test results are shown in Table 2 below.

[0117] Test Part

[0118] (1) Corrosion resistance (service life) test

[0119] The evaporation boats prepared in Examples and Comparative Examples are sequentially put into a machine (CAS-PVD vacuum coating machine), 2.4 mm aluminum wire is continuously and uniformly fed to 1 / 3 of the surface of the evaporation boat, the temperature is heated to uniformly evaporate the aluminum liquid, about 10 hours of coating is used, the evaporation boat is taken out, the surface aluminum slag and corrosion product impurities are cleaned, and then the evaporation boat is put into the machine again under the same conditions, and the above process is repeated until the corrosion pit depth of the evaporation boat surface is greater than 5 mm, and the longest service life of the evaporation boat is determined.

[0120] (2) Wettability test

[0121] The contact angle of the inner surface (i.e. the surface containing the single coating) of the evaporation boat is measured by a contact angle measuring instrument (model CA300) to determine the wettability.

[0122] Table 2

[0123] As can be seen from the comparison of Examples and Comparative Examples, the evaporation boat prepared in Examples has a much longer service life than that of Comparative Examples, and further, the contact angle is smaller, which indicates that the evaporation boat provided by the present application can balance corrosion resistance and wettability.

[0124] In addition, referring to FIG. 2, the surface of Example 1 is still relatively flat after 20h of use, with a corrosion depth of about 0.5mm, and can continue to be used for about 30 to 40h; while Comparative Example 1, without the coating, generates a large amount of corrosion product residue and aluminum residue on the surface after 20h of use of the evaporation boat, seriously affecting the evaporation effect, and has a corrosion depth of about 3 to 4mm, and can only continue to be used for about 10 to 20h.

[0125] The above description of the various embodiments tends to emphasize the differences between the various embodiments, and the same or similar parts can be mutually referred to, and will not be described herein for the sake of brevity.

[0126] It should be noted that the present application is not limited to the above-described embodiments. The above-described embodiments are merely examples, and embodiments having substantially the same configuration and playing the same role and effects as the technical idea within the scope of the technical solution of the present application are all included in the technical scope of the present application. Furthermore, within the scope of the gist of the present application, various modifications that can be thought of by those skilled in the art, other modes constructed by combining part of the configuration elements of the embodiments are also included in the scope of the present application.

Claims

1. An evaporation boat, comprising: an evaporation boat base; and a single coating layer formed on a surface of the evaporation boat base, the single coating layer comprising a first material and a second material, the first material comprising MoB / CoCr cermet, and the second material comprising a tungsten-boron binary compound, the tungsten-boron binary compound comprising one or both of WB and W2B5. In the single coating layer, the mass percentage content of the tungsten-boron binary compound is ω, and 0 < ω ≤ 6%.

2. The evaporation boat according to claim 1, wherein In the single coating layer, the mass percentage content of the tungsten-boron binary compound is ω, and 2% ≤ ω ≤ 6%.

3. The evaporation boat according to claim 1 or 2, wherein In the single coating layer, the mass percentage content of Co is 21% to 27%, the mass percentage content of Cr is 18% to 25%, the mass percentage content of B is 8% to 15%, and the rest is Mo.

4. The evaporation boat according to any one of claims 1 to 3, wherein The thickness of the single coating layer is 150 μm to 200 μm.

5. The vaporization boat according to any one of claims 1 to 4, wherein, The evaporation boat base comprises BN and TiB2, and optionally AlN.

6. The vaporization boat according to any one of claims 1 to 5, wherein, In the evaporation boat base, the mass percentage content of the BN is 35% to 40%, the mass percentage content of the TiB2 is 40% to 65%, and the mass percentage content of the AlN is 0 to 20%.

7. The evaporation boat according to claim 6, wherein 8. A method for preparing an evaporation boat, comprising: forming a single coating layer comprising a first material and a second material on a surface of an evaporation boat base in one step to prepare the evaporation boat, the first material comprising MoB / CoCr cermet, and the second material comprising a tungsten-boron binary compound, the tungsten-boron binary compound comprising one or both of WB and W2B5. The raw material for forming the single coating layer comprising the first material and the second material in one step comprises MoB / CoCr powder and W-containing elemental powder.

9. The method of claim 8, wherein, One or more of the following conditions are met:

10. The method of claim 9, wherein, (1) in the raw material, the mass percentage content of the W-containing elemental powder is σ, and 0 < σ ≤ 6%; (2) the W-containing elemental powder comprises B element, and the mass ratio of B element to W element is ≤ 1:

6. One or more of the following conditions are met:

11. The method of claim 9 or 10, wherein, (1) the average particle size of the MoB / CoCr powder is 20 μm to 35 μm; (2) the average particle size of the W-containing elemental powder is 20 μm to 35 μm.

12. Use of the evaporation boat according to any one of claims 1 to 7 or prepared by the method according to any one of claims 8 to 11 in evaporation of metal. The evaporated metal comprises evaporated aluminum.

13. Use according to claim 12, wherein, ​

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