Process monitoring system and method using automated system and wireless charging

Abstract

Disclosed are a process monitoring system and method using an automation system and wireless charging. A relay module used in the process monitoring system comprises: a body; a wireless charging reception unit formed on one side surface of the body; and a wireless charging transmission unit formed on the other side surface of the body. Here, the relay module receives power from an apparatus outside an FOUP via the wireless charging reception unit, and transmits power to another apparatus in the FOUP via the wireless charging transmission unit in a situation in which the relay module is located together with the other apparatus in the FOUP.

Description

Process monitoring system and method using automated systems and wireless charging

[0001] The present invention relates to a process monitoring system and method using an automated system and wireless charging.

[0002] Conventional FOUPs, in which monitoring devices are arranged, are susceptible to contamination due to the high possibility of particles and other contaminants present.

[0003] The present invention provides a process monitoring system and method using an automated system and wireless charging.

[0004] In order to achieve the above-described object, a relay module according to one embodiment of the present invention includes: a body; a wireless charging receiver formed on one side of the body; and a wireless charging transmitter formed on the other side of the body. Here, the relay module receives power from a device outside a FOUP through the wireless charging receiver, and transmits power to another device within the FOUP through the wireless charging transmitter when the relay module is located together with another device within the FOUP.

[0005] A process monitoring system according to one embodiment of the present invention includes a relay module; and a monitoring device. Here, the relay module and the monitoring device are moved to a location where a target tool is located while being contained in a FOUP, the monitoring device moves into the target tool, measures process parameters of a subject body in the target tool, generates measurement data, and then transmits the generated measurement data to the relay module, and the monitoring device is wirelessly charged by power transmitted from the relay module within the FOUP.

[0006] A process monitoring system according to another embodiment of the present invention includes a relay module; a first monitoring device; and a second monitoring device. Here, the relay module and the first monitoring device are included in a FOUP and move to a location where a target tool is located, the first monitoring device moves into the target tool and measures a process parameter of a driven body in the target tool to generate first measurement data, the second monitoring device is located in the target tool and measures its own process parameter or a process parameter of an edge ring to generate second measurement data, the driven body is not the edge ring, the second monitoring device transmits the generated second measurement data to the first monitoring device, and the first monitoring device transmits the generated first measurement data and the transmitted second measurement data to the relay module.

[0007] A process monitoring method according to one embodiment of the present invention comprises the steps of: transmitting power to a monitoring device while a relay module is positioned within a FOUP to charge the monitoring device; transmitting a data measurement command from the relay module to the monitoring device; measuring a process parameter of a subject according to the transmitted data measurement command by the monitoring device to generate measurement data; and transmitting the generated measurement data to the relay module by the monitoring device. Here, the relay module stores the transmitted measurement data within the FOUP.

[0008]

[0009] The process monitoring system and method according to the present invention wirelessly charges a monitoring device using a relay module within a FOUP, and the monitoring device wirelessly transmits measurement data to the relay module. Consequently, since only a wireless method is used, no processing is required for electrical connection between the module within the FOUP and the outside world, thereby reducing the possibility of particles being present within the FOUP.

[0010] In addition, when multiple monitoring devices exist within a FOUP, the monitoring devices are wirelessly charged using a relay module and a wireless charging device electrically connected thereto, so charging of the monitoring devices is efficient.

[0011] In addition, since one relay module within the FOUP can control multiple monitoring devices, the weight constraints required when moving the FOUP using OHT can be sufficiently satisfied.

[0012] FIG. 1 is a diagram illustrating a process monitoring system according to one embodiment of the present invention.

[0013] FIG. 2 is a drawing illustrating a mounting structure of a station and a FOUP according to one embodiment of the present invention.

[0014] FIG. 3 is a diagram illustrating the configuration of a station, a relay module, and a monitoring device according to one embodiment of the present invention.

[0015] FIG. 4 is a flowchart illustrating a process parameter measurement process in a process monitoring system according to one embodiment of the present invention.

[0016] FIG. 5 is a schematic diagram illustrating an automation system according to one embodiment of the present invention.

[0017] Figure 6 is a flowchart illustrating a process parameter measurement process in a monitoring system according to another embodiment of the present invention.

[0018] FIG. 7 is a diagram illustrating the overall charging process of a process monitoring system according to one embodiment of the present invention.

[0019] FIG. 8 is a drawing illustrating a charging structure of a relay module according to one embodiment of the present invention.

[0020] FIG. 9 is a diagram illustrating a charging process of a plurality of monitoring devices according to one embodiment of the present invention.

[0021] As used herein, singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as "consist of" or "include" should not be construed to necessarily include all components or steps described in the specification, and should be construed to mean that some of the components or steps may not be included, or that additional components or steps may be included. In addition, terms such as "part" and "module" described in the specification mean a unit that processes at least one function or operation, which may be implemented by hardware or software, or by a combination of hardware and software.

[0022]

[0023] The present invention relates to a process monitoring system and method using an automated system and wireless charging, wherein at least one monitoring device can be efficiently charged using a wireless charging method and measurement results of a monitoring device can be conveniently obtained using a wireless communication method.

[0024]

[0025] Hereinafter, various embodiments of the present invention will be described in detail with reference to the attached drawings.

[0026] FIG. 1 is a diagram illustrating a process monitoring system according to one embodiment of the present invention.

[0027] Referring to FIG. 1, a target tool (100), for example, a chuck, for example, an electrostatic chuck (102), may be positioned at the lower side of the internal space of the chamber, and a shower head may be positioned at the upper side.

[0028] In one embodiment, a monitoring device (104) may be arranged on the electrostatic chuck (102). This monitoring device (104) may measure process parameters of the electrostatic chuck (102), particularly temperature distribution.

[0029] According to another embodiment, a first monitoring device (104) may be arranged on an electrostatic chuck (102), and a second monitoring device (edge ​​ring, 106), for example, having a circular shape, may be arranged on the outside of the electrostatic chuck (102) and a heater may be arranged under the second monitoring device (106). Of course, a temperature control device for heating or cooling the wafer may also be arranged inside the electrostatic chuck (102).

[0030] The second monitoring device (106) can measure its own process parameters, particularly temperature distribution.

[0031] According to one embodiment, the first monitoring device (104) is moved while being mounted on the FOUP as described below, but the second monitoring device (106) may be fixedly installed inside the chamber (100) because it must perform the function of an edge ring. Meanwhile, the second monitoring device (106) may exist separately from the edge ring and may also measure the temperature distribution of the edge ring, etc.

[0032] The first monitoring device (104) may include a microprocessor, a wireless communication unit, a data storage unit, a wireless charging unit, and at least one sensor.

[0033] The above microprocessor controls the operation of the components of the first monitoring device (104).

[0034] The wireless communication unit can receive user command information (data measurement command) from the relay module and transmit data measured by the sensor to the relay module under the control of the microprocessor.

[0035] The above data storage unit can store data measured by the sensor.

[0036] The above wireless charging unit can wirelessly receive power from the relay module and charge, and for this purpose, may include a wireless charging receiving unit.

[0037] One of the above sensors can measure process parameters such as temperature distribution of the electrostatic chuck (102).

[0038] In one embodiment, the sensor may be arranged in an area corresponding to an extreme edge. Here, the extreme edge may be an area from 1.5 mm to 3 mm from the edge of the wafer, and of course, this length may vary depending on the size of the wafer. That is, the first monitoring device (104) may measure the characteristics of the edge area of ​​the electrostatic chuck (102), which corresponds to the extreme edge area of ​​the wafer to be used in a subsequent process.

[0039] Of course, another of the above sensors can measure the characteristics of the center of the electrostatic chuck (102) corresponding to the center of the wafer. That is, at least one sensor can measure process parameters such as the temperature distribution of the vibration body corresponding to the edge region from the center of the wafer.

[0040] A second monitoring device (106) may be positioned outside of the first monitoring device (104). This second monitoring device (106) may function as an edge ring. For convenience of explanation, it will be referred to as an edge ring hereinafter.

[0041] The above edge ring may have an annular shape and may include a microprocessor, a wireless communication unit, a wireless charging unit, a battery in a semi-solid or all-solid form, at least one sensor, and a data storage unit.

[0042] The above sensor can measure the temperature distribution of the edge ring, etc.

[0043] FIG. 2 is a drawing showing the mounting structure of a station and a FOUP according to one embodiment of the present invention, and FIG. 3 is a drawing showing the configuration of a station, a relay module, and a monitoring device according to one embodiment of the present invention.

[0044] Referring to FIG. 2, a monitoring device (104) and a relay module (204) are mounted within a FOUP (cassette, 200), and the FOUP (200) is coupled to a station (202). At this time, the FOUP (200) is detachable from the station (202).

[0045] According to one embodiment, slits (210) are formed vertically inside the FOUP (200), a relay module (204) is arranged on the lower side of the FOUP (200) through the slits (210), and a monitoring device (104) can be arranged on top of the relay module (204). Of course, the relay module (204) can also be arranged on top of the monitoring device (104), but since the relay module (204) is continuously arranged inside the FOUP (200) and the monitoring device (104) is taken out from the FOUP (200), it is efficient to position the monitoring device (104) on top of the relay module (204). In addition, as described below, it is preferable to position the monitoring device (104) on top of the relay module (204) for wireless charging of the monitoring device (104) through the relay module (204).

[0046] Referring to FIG. 3, the station (202) includes a first microprocessor, a first wireless communication unit, a first data storage unit, a first wireless charging unit, and a first sensor, the relay module (204) includes a second microprocessor, a second wireless communication unit, a second data storage unit, a second wireless charging unit, and a second sensor, and the monitoring device (104) may include a third microprocessor, a third wireless communication unit, a third data storage unit, a third wireless charging unit, and a third sensor. Since the operation of the components of the monitoring device (104) has been described above, a description thereof will be omitted below.

[0047] The above first microprocessor controls the operation of the components of the station (202).

[0048] The above first wireless communication unit can communicate with the relay module (204), transmit user command information to the relay module (204), and receive measurement data of the monitoring device (104) from the relay module (204).

[0049] The above first data storage unit can store the received measurement data.

[0050] The above first wireless charging unit may include a first wireless charging transmitter for wirelessly charging the relay module (204).

[0051] The first sensor can detect whether the FOUP (200) is seated on the station (202). For example, the first sensor can be a load sensor or a touch sensor.

[0052] The second microprocessor controls the operation of the components of the relay module (204).

[0053] The second wireless communication unit communicates with the station (202) and the monitoring device (104). Specifically, the second wireless communication unit receives user command information from the station (202) and transmits it to the monitoring device (104), and can receive measurement data from the monitoring device (104) and transmit it to the station (202).

[0054] The above second data storage unit can store the received measurement data.

[0055] The second wireless charging unit may include a second wireless charging receiver for receiving power from the station (202) and a second wireless charging transmitter for transmitting power to the monitoring device (104).

[0056] The second sensor can detect vibrations occurring when the FOUP (200) moves or particles inside the FOUP (200). There may be a plurality of second sensors inside the relay module (204). For example, the 2-1 sensor can detect vibrations occurring when the FOUP (200) moves, and the 2-2 sensor can detect the number of particles inside the FOUP (200). If particles exist inside the FOUP (200), the particles can act as a source of contamination for the monitoring device (104), so it is important to detect such particles.

[0057] Meanwhile, the relay module (204) includes a body, and the second microprocessor, the second wireless communication unit, the second data storage unit, and the second sensor are located inside the body, the second wireless charging receiving unit is formed on the lower surface of the body, and the second wireless charging transmitting unit can be formed on the upper surface of the body.

[0058]

[0059] Below, we will examine the specific operation of the process monitoring system of the present invention.

[0060] FIG. 4 is a flowchart illustrating a process parameter measurement process in a process monitoring system according to one embodiment of the present invention, and FIG. 5 is a schematic diagram illustrating an automation system according to one embodiment of the present invention.

[0061] Referring to FIGS. 4 and 5, the station (202) transmits the user's command information (data measurement information) to the relay module (204) inside the FOUP (200) according to the user's data measurement command, and the relay module (204) transmits the transmitted command information to the monitoring device (104) (S400). At this time, the automation system separates the FOUP (200) including the relay module (204) and the monitoring device (104) from the station (202), and then, as shown in FIG. 5, uses a moving means (Overhead Hoist Transfer, OHT, 500) to transport the FOUP (200) to the location where the target tool (100) is located. The transport may be started when the relay module (204) transmits the command information to the monitoring device (104), but the start time of the transport is not particularly limited.

[0062] Next, the monitoring device (104) within the FOUP (200) is introduced into the chamber (100), which is the target tool, by a robot or the like (S402). For example, the monitoring device (104) is placed on an electrostatic chuck (102) within the chamber (100).

[0063] Continuing, the monitoring device (104) generates measurement data by measuring process parameters, such as temperature distribution and inclination, of the electrostatic chuck (102) (S404). Here, the temperature distribution may include not only the temperature of the image but also sub-zero temperatures. At this time, a temperature control device for heating / cooling the wafer may be arranged inside the electrostatic chuck (102). The monitoring device (104) may measure a temperature of, for example, -70°C.

[0064] To this end, a heat shielding layer may be formed under an electronic component (e.g., a microprocessor) that is vulnerable to low temperatures among the monitoring device (104). Consequently, the heat transmitted from the electrostatic chuck (102) to the electronic component is blocked by the heat shielding layer, allowing the electronic component to operate normally even at sub-zero temperatures (low temperatures). However, the heat shielding layer may not be present under an electronic component that is not vulnerable to low temperatures.

[0065] Next, when the process parameter measurement operation is completed, the monitoring device (104) is transferred from the chamber (100) to the inside of the FOUP (200) by a robot or the like, and then the automation system can use the OHT (500) to move the FOUP (200) to its original location and mount it on the station (202) (S406).

[0066] According to one embodiment, the monitoring device (104) may transmit the measurement data to the relay module (204) within the chamber (100), and may transmit the measurement data to the relay module (204) after it has been transported inside the FOUP (200). At this time, the relay module (204) stores the transmitted measurement data.

[0067] Continuing, when the FOUP (200) is mounted on the station (202), the first sensor determines whether the FOUP (200) is seated on the station (202), and if it is determined that the FOUP (200) is seated on the station (202), the relay module (204) can transmit the stored measurement data to the station (202). Of course, the time at which the relay module (204) transmits the measurement data to the station (202) is not limited to after the FOUP (200) is seated on the station (202), and the relay module (204) can also transmit the measurement data to the station (202) when the FOUP (200) reaches near the station (202).

[0068] Figure 6 is a flowchart illustrating a process parameter measurement process in a monitoring system according to another embodiment of the present invention.

[0069] Typically, during semiconductor manufacturing, wafers are repeatedly transferred into and out of the chamber (100) for each process, while the edge ring (second monitoring device, 106) is replaced only when a problem occurs in the chamber (100) or when a part is replaced. To suit this situation, the first monitoring device (104) arranged on the electrostatic chuck (102) is transferred into and out of the chamber (100) for each process and returned to the FOUP (200), while the second monitoring device (106) can remain in use for several processes. Fig. 6 shows a process parameter measurement process in this environment.

[0070] When a user inputs a data measurement command to the station (202) (S600), the station (202) transmits the data measurement command to the first monitoring device (104), and the automation system uses the OHT (500) to move the FOUP (200) including the first monitoring device (104) to the location where the chamber (100), which is the target tool, is located, and then inserts the first monitoring device (104) into the chamber (100) (S602). For example, the monitoring device (104) is arranged on the electrostatic chuck (102) on which the wafer is to be placed.

[0071] In one embodiment, the first monitoring device (104) may include measurement recipe information for the second monitoring device (106). In this case, the measurement recipe information may be included in the data measurement command, or may be stored by the first monitoring device (104) itself.

[0072] Next, it is determined whether the first monitoring device (104) is performing independent measurement (S604). Of course, whether or not independent measurement is performed may be included in the data measurement command.

[0073] In the case of a single measurement by the first monitoring device (104), the first monitoring device (104) can generate measurement data by measuring process parameters of the electrostatic chuck (102), for example, temperature distribution (S606).

[0074] Continuing, when the first monitoring device (104) acquires measurement data, the monitoring device (104) is transferred to the FOUP (200) and transmits the measurement data to the relay module (204), and the FOUP (200) moves to the original position via the OHT (500), and the relay module (204) can transmit the measurement data to the station (202) (S610).

[0075] If the measurement is not performed solely by the first monitoring device (104), that is, if the measurement of the second monitoring device (106) is required, the first monitoring device (104) can transmit the measurement recipe command included in the measurement recipe information to the second monitoring device (106) (S614). At this time, the first monitoring device (104) can transmit the measurement recipe command to the second monitoring device (106) after being placed on the electrostatic chuck (102), but the transmission time is not limited to a specific time.

[0076] Next, the second monitoring device (106) switches from a standby state to a measurement mode according to the transmitted measurement recipe command and then measures its own process parameters, such as temperature distribution, etc. (S616).

[0077] Continuing, the second monitoring device (106) transmits second measurement data for the measured process parameter to the first monitoring device (104) (S618). Consequently, the first monitoring device (104) may include its own first measurement data and the second measurement data of the second monitoring device (106).

[0078] Next, the first monitoring device (104) is transferred to the FOUP (200) and transmits the measurement data to the relay module (204), and the FOUP (200) moves to the original position through the OHT (500), and the relay module (204) can transmit the measurement data to the station (202) (S610).

[0079] In summary, the process monitoring system of the present embodiment includes measurement recipe information for the first monitoring device (104) to control the second monitoring device (106), the second monitoring device (106) transmits second measurement data to the first monitoring device (104), and the first monitoring device (104) can transmit the measurement data to the station (202) through the relay module (204).

[0080] Above, the second monitoring device (106) is used as an edge ring, but the edge ring may exist separately and the second monitoring device (106) may be placed on the edge ring to measure the process parameters of the edge ring.

[0081]

[0082] Below, we will examine the wireless charging structure and process of the monitoring device (104).

[0083] FIG. 7 is a diagram illustrating the overall charging process of a process monitoring system according to one embodiment of the present invention, FIG. 8 is a diagram illustrating the charging structure of a relay module according to one embodiment of the present invention, and FIG. 9 is a diagram illustrating the charging process of a plurality of monitoring devices according to one embodiment of the present invention.

[0084] Referring to FIG. 7, the station (202) may include a first wireless charging transmitter for transmitting power, a second wireless charging receiver may be formed on the lower surface of the relay module (204), and a second wireless charging transmitter may be formed on the upper surface, and the monitoring device (104) may include a third wireless charging receiver.

[0085] In a state where the station (202), the relay module (204), and the monitoring device (104) are sequentially positioned, the first wireless charging transmitter of the station (202) transmits power to the second wireless charging receiver of the relay module (204), and the relay module (204) stores the transmitted power in its wireless power device, and the second wireless charging transmitter of the relay module (204) transmits power to the third wireless charging receiver of the monitoring device (104) in a state where the monitoring device (104) is mounted on the FOUP (200), and the monitoring device (104) can store the transmitted power in its wireless power device. As a result, the monitoring device (104) can wirelessly receive power from the station (202) through the relay module (204) and be charged.

[0086] Of course, if the relay module (204) has sufficient power, it can also transmit power to the monitoring device (104) without receiving power from the station (202).

[0087] Referring to FIG. 8, the wireless charging structure of the relay module (204) can be arranged in the central portion of the lower surface of the relay module (204) as a second wireless charging receiver (Type 1). At this time, the RF charging coil of the first wireless charging transmitter of the station (202) will be formed at a position facing the second wireless charging receiver. Of course, the RF charging coil is formed as the second wireless charging transmitter on the upper surface of the relay module (204), but is not limited to the central portion.

[0088] In another embodiment, a plurality of RFID coils may be formed in the station (202), and a plurality of RFID coils may be formed on the sides of the lower surface of the relay module (204) (Type 2). In this case, the station (202) outputs an RF signal of a specific frequency, and the relay module (204) may receive the RF signal and perform charging. In this case, since a plurality of RFID coils are formed on the sides of the lower surface of the relay module (204), wireless charging can be performed properly even if the alignment of the relay module (204) and the station (202) is slightly misaligned.

[0089] In another embodiment, a light source (LED, laser, etc.) may be formed at the station (202), and a solar panel may be formed at the center of the lower surface of the relay module (204) (Type 3). Consequently, the relay module (204) may be charged by light emitted from the light source. At this time, the lower surface of the FOUP (200) may be formed of a transparent material to allow the light to pass through.

[0090] Meanwhile, the arrangement positions of the RF charging coil, RFID coil, light source, and solar panel are not limited to the positions in Fig. 8 and can be varied in various ways.

[0091] Referring to FIG. 9, the charging structure when multiple monitoring devices are installed in the FOUP (200) can be examined. Multiple monitoring devices can be sequentially arranged on the relay module (204) within the FOUP (200).

[0092] According to one embodiment, monitoring devices and wireless charging devices may be arranged alternately on top of the relay module (204). At this time, a second wireless charging receiving unit may be formed on the bottom of the relay module (204), a second wireless charging transmitting unit may be formed on the top, a wireless charging transmitting unit may be formed on the top of each wireless charging device, and a wireless charging receiving unit may be formed inside each monitoring device.

[0093] In this case, the relay module (204) is charged by power transmitted from the station (202), and each monitoring device can be charged by power transmitted from the wireless charging device below. At this time, the wireless charging devices can be electrically connected to the relay module (204) and charged.

[0094] This method allows for seamless charging of multiple monitoring devices. Furthermore, each monitoring device transmits measurement data to a relay module (204), which can then transmit the transmitted measurement data to the station (202). Furthermore, the relay module (204) can transmit the user's data measurement commands to each monitoring device.

[0095] That is, multiple monitoring devices can be controlled with one relay module (204).

[0096]

[0097] Meanwhile, the components of the aforementioned embodiments can be easily understood from a process perspective. That is, each component can be understood as a separate process. Furthermore, the processes of the aforementioned embodiments can be easily understood from the perspective of the device components.

[0098] In addition, the technical contents described above may be implemented in the form of program commands that can be executed through various computer means and recorded on a computer-readable medium. The computer-readable medium may include program commands, data files, data structures, etc., alone or in combination. The program commands recorded on the medium may be those specially designed and configured for the embodiments or may be known and available to those skilled in the art of computer software. Examples of computer-readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tapes, optical media such as CD-ROMs and DVDs, magneto-optical media such as floptical disks, and hardware devices specially configured to store and execute program commands, such as ROMs, RAMs, and flash memories. Examples of program commands include not only machine language codes generated by a compiler, but also high-level language codes that can be executed by a computer using an interpreter, etc. The hardware devices may be configured to operate as one or more software modules to perform the operations of the embodiments, and vice versa.

[0099] The above-described embodiments of the present invention are disclosed for the purpose of illustration, and those skilled in the art with common knowledge of the present invention will be able to make various modifications, changes, and additions within the spirit and scope of the present invention, and such modifications, changes, and additions should be considered to fall within the scope of the following patent claims.

Claims

1. In the relay module, body; A wireless charging receiver formed on one side of the body; and Including a wireless charging transmitter formed on the other side of the above body, A relay module characterized in that the above relay module receives power from a device outside the FOUP through the wireless charging receiver, and transmits power to another device within the FOUP through the wireless charging transmitter when the relay module is located together with another device within the FOUP.

2. In paragraph 1, As the other device, it communicates with the station as a monitoring device and a device outside the FOUP, and includes a wireless communication unit located inside the body. A relay module characterized in that the FOUP can be coupled and separated from the station, the wireless communication unit receives measurement data from the first monitoring device and transmits it to the station, and the measurement data is data generated by the monitoring device measuring the process parameters of the target body within the target tool.

3. In paragraph 1, A relay module characterized in that it further includes a sensor located inside the body, which detects vibrations occurring when the FOUP moves or particles inside the FOUP.

4. A relay module according to claim 1, characterized in that an RF coil, an RFID coil, or a solar panel as the wireless charging receiver is formed on the lower surface of the body.

5. Relay module; and Including monitoring devices, A process monitoring system characterized in that the relay module and the monitoring device are moved to a location where a target tool is located while being contained within a FOUP, the monitoring device moves into the target tool and measures process parameters of a process body within the target tool to generate measurement data, and then transmits the generated measurement data to the relay module, and the monitoring device is wirelessly charged by power transmitted from the relay module within the FOUP.

6. In the fifth paragraph, a wireless charging receiving unit is formed on the lower surface of the relay module, a wireless charging transmitting unit is formed on the upper surface, and another wireless charging receiving unit is formed inside the monitoring device. A process monitoring system characterized in that power is transmitted from a station coupled with the FOUP to the wireless charging receiver to charge the relay module, and power from the relay module is transmitted to the other wireless charging receiver through the wireless charging transmitter to charge the monitoring device.

7. A process monitoring system characterized in that, in paragraph 5, the relay module stores measurement data transmitted from the monitoring device while positioned within the FOUP, and transmits the stored measurement data to the station while the FOUP is coupled to the station.

8. A process monitoring system according to claim 7, wherein the station further comprises a sensor for detecting a connection between the FOUP and the station.

9. In paragraph 5, other monitoring devices; and Including a wireless charging device, A process monitoring system, characterized in that the relay module, the monitoring device, the wireless charging device, and the other monitoring device are sequentially positioned within the FOUP, the wireless charging device is electrically connected to the relay module, and the other monitoring device is wirelessly charged by power transmitted from the wireless charging device.

10. A process monitoring system characterized in that in paragraph 5, the relay module transmits a user's data measurement command transmitted from the station to the monitoring device, and the monitoring device measures the process parameters of the subject group according to the transmitted data measurement command.

11. Relay module; First monitoring device; and Including a second monitoring device, The relay module and the first monitoring device are moved to a location where a target tool is located while being included in a FOUP, and the first monitoring device moves into the target tool and measures a process parameter of a driven body within the target tool to generate first measurement data, and the second monitoring device is located within the target tool and measures its own process parameter or a process parameter of an edge ring to generate second measurement data, and the driven body is not the edge ring. A process monitoring system, characterized in that the second monitoring device transmits the generated second measurement data to the first monitoring device, and the first monitoring device transmits the generated first measurement data and the transmitted second measurement data to the relay module.

12. A process monitoring system, characterized in that in paragraph 11, the first monitoring device moves into the FOUP after measuring the process parameters of the feedback device, but the second monitoring device remains positioned within the target tool even after generating the second measurement data.

13. In the 11th paragraph, the relay module receives a user's data measurement command from the station and transmits it to the first monitoring device, and the first monitoring device transmits a measurement recipe command included in the data measurement command to the second monitoring device. The first monitoring device measures the process parameters of the feedback device according to the data measurement command, and the second monitoring device measures its own process parameters or the process parameters of the edge ring according to the measurement recipe command. A process monitoring system, characterized in that the first monitoring device is positioned within the FOUP and transmits the first measurement data and the second measurement data to the station.

14. In the 11th paragraph, the FOUP moves toward the target tool through the OHT according to the user's data measurement command transmitted from the station, re-mounts the first monitoring device that measures the process parameters of the feedback device, moves toward the station through the OHT, and then connects with the station. A process monitoring system, characterized in that the relay module stores the first measurement data and the second measurement data while moving toward the station.

15. In the 11th paragraph, a wireless charging receiving unit is formed on the lower surface of the relay module, a wireless charging transmitting unit is formed on the upper surface, and another wireless charging receiving unit is formed inside the first monitoring device. A process monitoring system characterized in that power is transmitted from the station to the wireless charging receiver to charge the relay module, and power is transmitted from the wireless charging transmitter to the other wireless charging receiver to charge the first monitoring device.

16. A step of transmitting power to a monitoring device while the relay module is positioned within the FOUP to charge the monitoring device; A step in which the above relay module transmits a data measurement command to the monitoring device; A step in which the monitoring device measures the process parameters of the subject body according to the transmitted data measurement command to generate measurement data; and The above monitoring device comprises a step of transmitting the generated measurement data to the relay module, A process monitoring method, characterized in that the relay module stores the transmitted measurement data within the FOUP.

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