Temperature control device

Abstract

This temperature control device is provided with: a circulation flow path through which a fluid flows; a plurality of heating and cooling units that are arranged in series in the circulation flow path and that heat or cool the fluid flowing through the circulation flow path; and a controller that controls the heating and cooling units. The controller, after the start of operation and until the outlet temperature of the fluid reaches a target temperature, performs feedforward control and feedback control of the heating and cooling units, thereby controlling the temperature of the fluid. After the outlet temperature of the fluid has reached the target temperature, the controller, according to the magnitude of a disturbance, stops the output of one or more of the heating and cooling units or sets the output to a fixed value.

Description

Temperature Control Device

[0001] The present invention relates to a temperature control device.

[0002] Patent Document 1 discloses a temperature control device having a plurality of fluid reservoirs equipped with heating and cooling units arranged in series, parallel, or a combination thereof along a fluid flow path.

[0003] Patent Documents 2 and 3 disclose techniques for maintaining a fluid flowing through a circulation flow path including a heating device at an appropriate temperature.

[0004] JP 2008-077165 A JP 2018-119756 A JP 2019-153617 A

[0005] In the technology described in Patent Document 1, even when the temperature difference to be adjusted is small and temperature adjustment is possible with one heating / cooling unit, all heating / cooling units are used to control the temperature. This results in redundant heating / cooling units, and depending on the temperature difference to be adjusted and the resolution of the heating / cooling units, it can become difficult to adjust the temperature with high precision in proportion to the number of heating / cooling units.

[0006] In a heating device for circulating fluids, when a room-temperature fluid is supplied to the tank while an external process device is operating, the temperature of the fluid in the tank drops, which can cause large fluctuations in the inlet temperature to the heating device.If the response of the heating unit is slow, it may be difficult to fully compensate for fluctuations in the inlet temperature using feedforward control that uses the inlet temperature of each heating unit as an input, and this will appear as fluctuations in the outlet temperature.

[0007] An aspect of the present invention aims to make it possible to adjust the temperature of a fluid with high precision.

[0008] According to one aspect of the present invention, there is provided a temperature control device comprising: a circulation flow path through which a fluid flows; a plurality of heating and cooling units arranged in series in the circulation flow path for heating or cooling the fluid flowing through the circulation flow path; and a controller for controlling the heating and cooling units, wherein the controller regulates the temperature of the fluid by feedforward control and feedback control of the heating and cooling units after operation starts until the outlet temperature of the fluid reaches a target temperature, and after the outlet temperature of the fluid reaches the target temperature, stops the output of one or more of the heating and cooling units or sets it to a fixed value depending on the magnitude of the disturbance.

[0009] According to one aspect of the present invention, there is provided a temperature control device comprising: a circulation flow path through which a fluid flows; a plurality of heating and cooling units arranged in series in the circulation flow path for heating or cooling the fluid flowing through the circulation flow path; a tank for storing the fluid to be supplied to an external process; a tank supply port for adding fluid to the tank from outside the circulation flow path; and a controller for controlling the heating and cooling unit, wherein the controller causes the heating and cooling unit to start external disturbance compensation when it detects a trigger signal that triggers adding fluid to the tank from outside the circulation flow path after operation has started.

[0010] According to one aspect of the present invention, there is provided a temperature control device comprising: a circulation flow path through which a liquid flows; a new liquid supply flow path that adds new liquid to the circulation flow path from outside the circulation flow path; a plurality of heating and cooling units arranged in the circulation flow path and that heat or cool the liquid flowing through the circulation flow path; a tank that stores the liquid to be supplied to an external process; a tank supply port that adds new liquid to the tank from outside the circulation flow path; a switching valve that can switch the connection between the new liquid supply flow path and the heating and cooling unit; and a controller that controls the heating and cooling unit, wherein the controller controls the switching valve to connect the new liquid supply flow path to the heating and cooling unit when new liquid is added to the tank from the tank supply port after operation has started.

[0011] According to the aspects of the present invention, the temperature of the fluid can be adjusted with high precision.

[0012] FIG. 1 is a schematic diagram showing an example of a temperature control device according to a first embodiment. FIG. 2 is a schematic diagram showing an example of a controller according to the first embodiment. FIG. 3 is a diagram showing an example of operation of the temperature control device. FIG. 4 is a schematic diagram showing another example of a controller according to the first embodiment. FIG. 5 is a schematic diagram showing another example of a controller according to the first embodiment. FIG. 6 is a flowchart showing a temperature control method of the temperature control device according to the first embodiment. FIG. 7 is a diagram showing the controllability of the outlet temperature with respect to fluctuations in the inlet temperature of the fluid. FIG. 8 is a diagram showing the behavior of the manipulated variable. FIG. 9 is a schematic diagram showing an example of a temperature control device according to a second embodiment. FIG. 10 is a schematic diagram showing an example of a controller according to the second embodiment. FIG. 11 is a diagram showing an example of operation of the temperature control device. FIG. 12 is a diagram showing the behavior of a trigger signal and the inlet temperature. FIG. 13 is a diagram comparing the actual inlet temperature with the fluctuation pattern of the inlet temperature (inlet temperature pattern) with respect to the trigger signal. FIG. 14 is a diagram showing the comparison result of the outlet temperature fluctuation. FIG. 15 is a flowchart showing a temperature control method of the temperature control device according to the second embodiment. FIG. 16 is a schematic diagram showing another example of a temperature control device according to the second embodiment. FIG. 17 is a schematic diagram showing an example of a temperature control device according to the third embodiment, showing state A. FIG. 18 is a schematic diagram showing the temperature control device shown in FIG. 17 in state A. FIG. 19 is a schematic diagram showing an example of a temperature control device according to the third embodiment, showing state B. FIG. 20 is a schematic diagram showing the temperature control device shown in FIG. 19 in state B. FIG. 21 is a diagram showing fluctuations in outlet temperature. FIG. 22 is a flowchart showing an example of a temperature control method using the temperature control device according to the third embodiment. FIG. 23 is a schematic diagram showing an example of a temperature control device according to a fourth embodiment, showing state A. FIG. 24 is a schematic diagram showing the temperature control device shown in FIG. 23 in state A. FIG. 25 is a schematic diagram showing an example of a temperature control device according to the fourth embodiment, showing state B. FIG. 26 is a schematic diagram showing the temperature control device shown in FIG. 25 in state B. FIG. 27 is a block diagram showing a computer system according to the second embodiment.

[0013] Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of the embodiments described below can be combined as appropriate. In addition, some components may not be used.

[0014] [First embodiment] <Temperature control device> An embodiment will be described. Fig. 1 is a schematic diagram showing an example of a temperature control device according to the first embodiment. The temperature control device 1 includes a tank 2, a pump 3, a heating / cooling unit 4, a circulation flow path 10, a flow rate sensor 11, an inlet temperature sensor 12, an outlet temperature sensor 13, a supply port 17, a return port 18, a fluid addition port 19, and a controller 20.

[0015] Tank 2 stores a fluid (liquid) to be supplied to external process apparatus 100. Pump 3 is connected downstream of tank 2. Pump 3 is connected upstream of heating and cooling unit 4. The fluid stored in tank 2 is pumped by pump 3 and passes through heating and cooling unit 4. The supply amount of fluid supplied from tank 2 to heating and cooling unit 4 via pump 3 is denoted as Q.

[0016] The fluid supplied to the external process device 100 that is not used and is discharged is recovered in the tank 2 via the return port 18. The flow rate of the fluid used in the process 101 of the external process device 100 is designated as Qp. The flow rate of the fluid recovered to the tank 2 via the return port 18 is designated as Qr.

[0017] When the fluid in the tank 2 falls below a predetermined threshold, a necessary amount of new fluid is supplied from the fluid addition port 19. The flow rate of the fluid added to the tank 2 from outside the temperature control device 1 via the fluid addition port 19 is represented by Qs.

[0018] The heating and cooling unit 4 is capable of at least one of heating and cooling the fluid supplied to the external process apparatus 100. The heating and cooling unit 4 is a container having a certain volume and equipped with an inlet and an outlet for the fluid. For example, when the external process apparatus 100 is a pure water heating apparatus, the heating and cooling unit 4 is equipped with a halogen lamp heater in a quartz bottle in which the inlet and outlet are arranged, and heats the pure water by radiant heat.

[0019] The heating and cooling unit 4 is configured with two or more heating and cooling units 4 connected in series or in parallel, or a combination thereof. The heating and cooling units 4 are controlled by the controller 20 so that the outlet temperature PV3 of the fluid passing therethrough becomes the target temperature SV. In this embodiment, the heating and cooling units 4 are configured with three heating and cooling units 4a, 4b, and 4c connected in series. When there is no particular need to distinguish between the heating and cooling units 4a, 4b, and 4c, they will be simply referred to as the heating and cooling units 4.

[0020] The circulation flow path 10 is a flow path through which a fluid supplied to the external process device 100 circulates. The circulation flow path 10 is provided with a tank 2, a pump 3, a heating / cooling unit 4, a flow rate sensor 11, an inlet temperature sensor 12, an outlet temperature sensor 13, a supply port 17, a return port 18, and a process 101 of the external process device 100 via a valve 102.

[0021] The flow rate sensor 11 is disposed between the tank 2 and the heating and cooling unit 4. The flow rate sensor 11 is disposed between the pump 3 and the heating and cooling unit 4a, which is the most upstream of the heating and cooling units 4. The flow rate sensor 11 measures the amount Q of fluid supplied to the heating and cooling unit 4.

[0022] The inlet temperature sensor 12 is disposed between the tank 2 and the inlet of the heating and cooling unit 4. The inlet temperature sensor 12 is disposed between the pump 3 and the most upstream heating and cooling unit 4a of the heating and cooling units 4. The inlet temperature sensor 12 measures the inlet temperature Tin of the fluid, which is the temperature of the fluid flowing into the most upstream heating and cooling unit 4.

[0023] The outlet temperature sensor 13 is disposed between the outlet of the heating and cooling unit 4 and the supply port 17 to the external process device 100. The outlet temperature sensor 13 is disposed between the outlet of the heating and cooling unit 4c, which is the most downstream of the heating and cooling units 4, and the supply port 17 to the external process device 100. The outlet temperature sensor 13 measures the outlet temperature PV3 of the fluid.

[0024] The supply port 17 is a port that supplies a fluid to an external process device 100 that is provided downstream of the heating and cooling unit 4. The supply port 17 supplies the fluid whose temperature has been adjusted by the heating and cooling unit 4 to the external process device 100.

[0025] The return port 18 is a port that receives return fluid from the external process device 100 into the tank 2. The return port 18 returns the liquid from the circulation flow path 10 to the tank 2. The return port 18 recovers excess fluid in the external process device 100 into the tank 2. The flow rate of the fluid recovered into the tank 2 via the return port 18 is Qr.

[0026] The fluid addition port 19 is a port for adding new fluid to the tank 2 from outside the temperature control device 1. The flow rate of the new fluid added to the tank 2 via the fluid addition port 19 is Qs. The fluid addition port 19 is opened when the fluid in the tank 2 falls below a predetermined threshold.

[0027] <Controller> The controller 20 calculates the manipulated variable MV of each heating and cooling unit 4 relative to the target temperature SV of the fluid based on the measurement results of the flow rate sensor 11, the inlet temperature sensor 12, and the outlet temperature sensor 13. The controller 20 calculates the manipulated variable MV1 of the heating and cooling unit 4a, the manipulated variable MV2 of the heating and cooling unit 4b, and the manipulated variable MV3 of the heating and cooling unit 4c relative to the target temperature SV of the fluid based on the supply rate Q measured by the flow rate sensor 11, the inlet temperature Tin measured by the inlet temperature sensor 12, and the outlet temperature PV3 measured by the outlet temperature sensor 13. The controller 20 operates each heating and cooling unit 4 in accordance with the calculated manipulated variable to control the outlet temperature PV2 to a desired temperature.

[0028] After the temperature control device 1 starts operating, when the outlet temperature PV3 reaches the target temperature SV, the controller 20 stops or sets to a fixed value the output of one or more heating and cooling units 4 in accordance with the power required for heating in the heating and cooling units 4. In the embodiment, after the temperature control device 1 starts operating, when the outlet temperature PV3 reaches the target temperature SV, the controller 20 stops or sets to a fixed value the output of one or more heating and cooling units 4 from upstream of the heating and cooling unit 4 in accordance with the required power.

[0029] The required power is calculated based on the inlet temperature Tin of the fluid and the flow rate Qs of the new fluid added from outside. The required power corresponding to the fluctuation of the inlet temperature Tin of the fluid and the flow rate Qs of the new fluid added from outside is assumed to be calculated in advance.

[0030] The basic configuration of the feedback control section 22 and the feedforward control section 23 in the controller 20 will be described using Fig. 2. Fig. 2 is a diagram schematically showing an example of a controller according to the first embodiment. The controller 20 includes an SV distributor 21, a first feedback control section 22a, a second feedback control section 22b, a third feedback control section 22c, a first feedforward control section 23a, a second feedforward control section 23b, and a third feedforward control section 23c.

[0031] The first feedback control unit 22a, the second feedback control unit 22b, and the third feedback control unit 22c use, for example, a PID (Proportional Integral Differential) controller. The first feedback control unit 22a calculates a feedback amount FB1 for the heating and cooling unit 4a by using a deviation e1 between a target temperature SV1 distributed to the heating and cooling unit 4a by an SV distributor 21 that receives the target temperature SV and the inlet temperature Tin as inputs and the outlet temperature PV1 of the heating and cooling unit 4a. The second feedback control unit 22b calculates a feedback amount FB2 for the heating and cooling unit 4b by using a deviation e2 between a target temperature SV2 distributed to the heating and cooling unit 4b by the SV distributor 21 that receives the target temperature SV and the inlet temperature Tin as inputs and the outlet temperature PV2 of the heating and cooling unit 4b. The third feedback control unit 22c calculates a feedback amount FB3 for the heating and cooling unit 4c by taking the deviation e3 between the target temperature SV3 distributed to the heating and cooling unit 4c by the SV distributor 21, which receives the target temperature SV and the inlet temperature Tin as input, and the outlet temperature PV3 of the heating and cooling unit 4c. Here, the outlet temperature PV1 of the heating and cooling unit 4a and the outlet temperature PV2 of the heating and cooling unit 4b are estimated as estimated temperatures PV1h and PV2h by an estimator. A commonly known calculation method such as an observer is used as the estimator.

[0032] The first feedforward control unit 23a receives as input the target temperature SV1 distributed to the heating and cooling unit 4a by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature Tin, the inlet temperature Tin, and the supply rate Q, and calculates a feedforward amount FF1 for the heating and cooling unit 4a. The second feedforward control unit 23b receives as input the target temperature SV2 distributed to the heating and cooling unit 4b by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature Tin, the outlet temperature PV1 of the heating and cooling unit 4a, and the supply rate Q, and calculates a feedforward amount FF2 for the heating and cooling unit 4b. The third feedforward control unit 23c receives as input the target temperature SV3 distributed to the heating and cooling unit 4c by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature Tin, the outlet temperature PV2 of the heating and cooling unit 4b, and the supply rate Q, and calculates a feedforward amount FF3.

[0033] The feedforward control unit 23 can more effectively suppress fluctuations in the inlet temperature and flow rate of each heating / cooling unit 4 .

[0034] The calculated feedforward amount is added to each feedback amount to obtain the final manipulated variable MV of each heating / cooling unit 4. The feedforward amount FF1 is added to the feedback amount FB1 to obtain the final manipulated variable MV1 of heating / cooling unit 4a. The feedforward amount FF2 is added to the feedback amount FB2 to obtain the final manipulated variable MV2 of heating / cooling unit 4b. The feedforward amount FF3 is added to the feedback amount FB3 to obtain the final manipulated variable MV3 of heating / cooling unit 4c.

[0035] The feedforward amount FFi is calculated, for example, by the following formula: ＦＦｉ (S) indicates the dynamic characteristic part, and K indicates a coefficient.

[0036]

[0037] An example of operation of the temperature control device 1 will be described with reference to Figure 3. Figure 3 is a diagram showing an example of operation of the temperature control device. In this example, the target temperature SV of the fluid supplied to the external process device 100 is 70°C. After the temperature control device 1 starts operating, the fluid is heated by the heating / cooling unit 4, and the outlet temperature PV3 of the fluid reaches the target temperature SV of 70°C.

[0038] Before the process of external process device 100 starts, the fluid supplied to external process device 100 is not used and is returned to tank 2 via return port 18. Therefore, the temperature of the fluid in tank 2 gradually increases, and the fluid inlet temperature Tin, which is the temperature of the fluid supplied to heating and cooling unit 4, also gradually increases. As the fluid inlet temperature Tin increases, the power required for heating in heating and cooling unit 4 decreases, and the manipulated variable MV of heating and cooling unit 4 decreases.

[0039] After the fluid outlet temperature PV3 reaches the target temperature SV, the process of the external process device 100 begins. During the process of the external process device 100, a certain amount of fluid is used within the external process device 100. Because some of the fluid supplied to the external process device 100 is not recovered, the amount of fluid in the tank 2 decreases. When the fluid in the tank 2 falls below a predetermined threshold, room-temperature fluid is supplied from the fluid addition port 19. This reduces the temperature of the fluid in the tank 2, and the fluid inlet temperature Tin, which is the temperature of the fluid supplied to the heating / cooling unit 4, also decreases. Fluctuations in the fluid inlet temperature Tin lead to fluctuations in the outlet temperature PV3. Therefore, the feedback control unit 22 and the feedforward control unit 23 calculate manipulated variables to suppress fluctuations in the outlet temperature PV3.

[0040] During a process in the external process equipment 100, the sum of the manipulated variables MV of the heating and cooling units 4 is smaller than the manipulated variable corresponding to the maximum output of one heating and cooling unit 4. In a situation where one heating and cooling unit 4 is sufficient for temperature control, using three heating and cooling units 4 is redundant and reduces the resolution of the heating and cooling units 4 as a whole. Therefore, after the fluid outlet temperature PV3 reaches the target temperature SV, the output of some of the heating and cooling units 4 is stopped or set to a fixed value depending on the power required for heating in the heating and cooling units 4. For example, in the case of FIG. 3 , the output of the upstream heating and cooling units 4a and 4b is stopped or set to a fixed value around 700 seconds. This allows the temperature to be controlled according to the resolution of the heating and cooling unit 4c.

[0041] 4 shows an example of the configuration of feedforward control and feedback control in the controller 20 when the outputs of the heating and cooling units 4a and 4b are set to fixed values ​​MV1 and MV2. FIG. 4 is a diagram schematically showing another example of the controller according to the first embodiment. The third feedback control unit 22c is similar to that shown in FIG. 2. The third feedforward control unit 23c receives as input the target temperature SV3 distributed to the heating and cooling unit 4c from the SV distributor 21, which receives as input the target temperature SV and the inlet temperature Tin, the inlet temperature Tin of the fluid, and the supply amount Q, and calculates a feedforward amount FF3b for the heating and cooling unit 4c.

[0042] In Figure 4, the outputs of heating and cooling units 4a and 4b are set to fixed values ​​MV1 and MV2. A transmission delay occurs as the signals pass through heating and cooling units 4a and 4b upstream of heating and cooling unit 4c. A compensation time leeway occurs in third feedforward control unit 23c. The feedforward amount FF3b of heating and cooling unit 4c is calculated using the following equation, similar to equation (1).

[0043]

[0044] FIG. 5 shows an example of the configuration of feedforward control and feedback control in the controller 20 when the output of the heating and cooling unit 4a is set to a fixed value MV1. FIG. 5 is a diagram schematically showing another example of the controller according to the first embodiment. The second feedback control unit 22b, the third feedback control unit 22c, and the third feedforward control unit 23c are the same as those in FIG. 2. The second feedforward control unit 23b receives as input the target temperature SV2 distributed to the heating and cooling unit 4b from the SV distributor 21, the inlet temperature Tin of the fluid, and the supply amount Q, and calculates a feedforward amount FF2b for the heating and cooling unit 4b. The feedforward amount FF2b for the heating and cooling unit 4b is calculated using the following equation:

[0045]

[0046] <Temperature Control Method> An example of a temperature control method of the temperature control device will be described with reference to Fig. 6. Fig. 6 is a flowchart showing the temperature control method of the temperature control device according to the first embodiment. When the temperature control device 1 is started up, the process of the flowchart shown in Fig. 6 is executed at predetermined time intervals.

[0047] The controller 20 receives the target temperature SV, inlet temperature Tin, outlet temperature PV3, supply volume Q, manipulated variable MV1, manipulated variable MV2, and manipulated variable MV3 (step ST11). The target temperature SV is stored, for example, in a memory unit (not shown) of the temperature control device 1. The inlet temperature Tin is obtained from the inlet temperature sensor 12. The outlet temperature PV3 is obtained from the outlet temperature sensor 13. The supply volume Q is obtained from the flow rate sensor 11. The manipulated variables MV1, MV2, and MV3 are obtained as current manipulated variables from the heating and cooling units 4a, 4b, and 4c.

[0048] The controller 20 calculates the estimated temperatures PV1h and PV2h from the various values ​​acquired in step ST11 using the estimator (step ST12).

[0049] The controller 20 calculates the target temperature SV1 of the heating and cooling unit 4a, the target temperature SV2 of the heating and cooling unit 4b, and the target temperature SV3 of the heating and cooling unit 4c using the SV distributor 21. The controller 20 distributes the target temperature SV of the heating and cooling unit 4 as the target temperature SV1 of the heating and cooling unit 4a, the target temperature SV2 of the heating and cooling unit 4b, and the target temperature SV3 of the heating and cooling unit 4c using the SV distributor 21.

[0050] The controller 20 calculates the feedback amount FB1, the feedback amount FB2, and the feedback amount FB3 (step ST14). The controller 20 determines deviations from the target temperature SV1, the target temperature SV2, the target temperature SV3, the outlet temperature PV3, the estimated temperature PV1h, and the estimated temperature PV2h, and calculates the feedback amount FB1, the feedback amount FB2, and the feedback amount FB3 using the first feedback control unit 22a, the second feedback control unit 22b, and the third feedback control unit 22c. The algorithm for calculating the feedback amount FB1, the feedback amount FB2, and the feedback amount FB3 is as described above.

[0051] The controller 20 calculates the feedforward amounts FF1, FF2, FF3, FF2b, and FF3b (step ST15). The controller 20 calculates the feedforward amounts FF1, FF2, FF3, FF2b, and FF3b using the inlet temperature Tin, the estimated temperature PV1h, the estimated temperature PV2h, the target temperature SV1, the target temperature SV2, and the target temperature SV3 using the first feedforward control unit 23a, the second feedforward control unit 23b, and the third feedforward control unit 23c. The algorithm for calculating the feedforward amounts FF1, FF2, FF3, FF2b, and FF3b is as described above.

[0052] The controller 20 determines whether the absolute value of the difference between the target temperature SV and the fluid outlet temperature PV3 is smaller than a temperature threshold value δ (step ST16). The temperature threshold value is the target temperature SV. If |SV-PV3|<δ is true (Yes in step ST16), the controller 20 proceeds to step ST17. If |SV-PV3|<δ is not true (No in step ST16), the controller 20 proceeds to step ST20.

[0053] If |SV-PV3|<δ is true (Yes in step ST16), the controller 20 determines whether the required power P is compared with a first threshold value α and a second threshold value β (α<β). If 0≦P≦α is true, the controller 20 proceeds to step ST18. If α<P≦β is true, the controller 20 proceeds to step ST19. If β<P is true, the controller 20 proceeds to step ST20.

[0054] The first threshold value α is the power required to enable temperature control using one heating / cooling unit 4. The second threshold value β is the power required to enable temperature control using two heating / cooling units 4, when temperature control using one heating / cooling unit 4 is insufficient.

[0055] If 0≦P≦α is established, the controller 20 sets the manipulated variable MV1 and the manipulated variable MV2 to fixed values, and calculates the manipulated variable MV3 by adding the feedback variable FB3 and the feedforward variable FF3b (step ST18).

[0056] If α<P≦β holds, the controller 20 sets the operating volume MV1 to a fixed value, calculates the operating volume MV2 by adding the feedback volume FB2 and the feedforward volume FF2b, and calculates the operating volume MV3 by adding the feedback volume FB3 and the feedforward volume FF3 (step ST19).

[0057] If |SV-PV3|<δ is not satisfied, or if β<P is satisfied, the controller 20 calculates the operating volume MV1 by adding the feedback volume FB1 and the feedforward volume FF1, calculates the operating volume MV2 by adding the feedback volume FB2 and the feedforward volume FF2, and calculates the operating volume MV3 by adding the feedback volume FB3 and the feedforward volume FF3 (step ST20).

[0058] Fig. 7 is a diagram showing the controllability of the outlet temperature relative to fluctuations in the inlet temperature of the fluid. Fig. 8 is a diagram showing the behavior of the manipulated variable. Fig. 7 shows the results of a simulation comparing the amount of fluctuation in the outlet temperature PV3 relative to fluctuations in the inlet temperature Tin when the outputs of the two heating and cooling units are fixed as shown in Fig. 5 and when the outputs of the three heating and cooling units are not fixed as shown in Fig. 2. As shown in Fig. 7, when the outputs of the two heating and cooling units are fixed, the amount of fluctuation in the outlet temperature PV3 relative to fluctuations in the inlet temperature Tin is approximately one-third of that when the outputs of the three heating and cooling units are not fixed.

[0059] For reference, FIG. 8 shows the results of a simulation comparing the manipulated variables when the outputs of the two heating and cooling units are fixed as shown in FIG. 5 and when the outputs of the three heating and cooling units are not fixed as shown in FIG. 2.

[0060] <Effects> As described above, in the embodiment, after operation starts, the temperature of the fluid is regulated by feedforward control and feedback control of the heating and cooling units 4 until the outlet temperature of the fluid reaches the target temperature, and after the outlet temperature of the fluid reaches the target temperature, the output of one or more of the heating and cooling units is stopped or set to a fixed value depending on the magnitude of the disturbance. According to the embodiment, depending on the magnitude of the disturbance, it is possible to prevent multiple heating and cooling units 4 from becoming redundant and to prevent a decrease in the resolution of the heating and cooling units 4 as a whole.

[0061] In the embodiment, the output of one or more heating and cooling units 4 can be stopped or set to a fixed value depending on the inlet temperature Tin of the fluid and the flow rate Qs of the fluid added from the outside.

[0062] In an embodiment, the output of one or more heating and cooling units 4 can be stopped or set to a fixed value depending on the required power calculated based on the inlet temperature Tin of the fluid and the flow rate Qs of the fluid added from the outside.

[0063] Specifically, for example, if the resolution of each heating / cooling unit 4 is 1°C, the resolution of the entire heating / cooling unit 4 may be 3°C depending on the conditions. If the temperature difference adjusted by the heating / cooling units 4 is 1°C, three heating / cooling units 4 may not be able to properly control the temperature. According to the embodiment, in such a case, the output of two heating / cooling units 4 can be stopped or set to a fixed value, and the temperature can be properly controlled using one heating / cooling unit 4.

[0064] In the embodiment, when the output of one or more heating and cooling units 4 is stopped or set to a fixed value, the output of the heating and cooling units 4 can be stopped or set to a fixed value in order from the most upstream unit.

[0065] In the embodiment, when the required power P is equal to or less than the first threshold value α, the operation amounts of the two heating and cooling units 4a and 4b are set to fixed values, and the operation amount of the one heating and cooling unit 4c can be calculated by the third feedforward control unit 23c.

[0066] In the embodiment, when the required power P is greater than the first threshold value α and less than the second threshold value β, the operation amount of one heating / cooling unit 4a is set to a fixed value, and the operation amounts of the two heating / cooling units 4b and 4c can be calculated by the second feedforward control unit 23b and the third feedforward control unit 23c.

[0067] In this embodiment, when the required power P is greater than the second threshold value β, the operation amounts of the three heating and cooling units 4a, 4b, and 4c can be calculated by feedback control.

[0068] Specifically, by setting the outputs of the two upstream heating and cooling units 4a and 4b to fixed values ​​MV1 and MV2, a transmission delay occurs due to the passage through the two upstream units. According to this embodiment, the third feedforward control unit 23c can generate a margin of compensation time. According to this embodiment, fluctuations in the fluid inlet temperature Tin can be compensated for regardless of the responsiveness of the heating and cooling units 4.

[0069] <Modification of the first embodiment> In the above, the temperature sensors have been described as including the inlet temperature sensor 12 and the outlet temperature sensor 13, but a temperature sensor or temperature estimation means for measuring the outlet temperature PV3 of each heating and cooling unit 4 may also be provided.

[0070] Although the above description has been made on the case where the heating / cooling unit 4 heats a fluid, the present invention is also applicable to the case where the heating / cooling unit 4 cools a fluid.

[0071] Although an example of three heating and cooling units has been shown above, four or more heating and cooling units may be provided.

[0072] Second Embodiment <Temperature Control Device> An embodiment will be described. Fig. 9 is a schematic diagram showing an example of a temperature control device according to a second embodiment. The temperature control device 1 controls the temperature of a fluid supplied to an external process device 100. In the second embodiment, components similar to those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0073] The temperature control device 1 includes a tank 2, a pump 3, a heating and cooling unit 4, a circulation flow path 10, a flow rate sensor 11, an inlet temperature sensor 12, an outlet temperature sensor 13, a supply port 17, a return port 18, a tank supply port 19, a controller 20, and a liquid level controller 30.

[0074] A liquid level sensor 2s is disposed in the tank 2 to detect the amount of fluid in the tank 2. The liquid level sensor 2s detects the liquid level of the fluid in the tank 2. The liquid level sensor 2s outputs the detection result to the controller 20.

[0075] When the fluid in the tank 2 falls below the lower limit threshold (liquid volume threshold) L2, the required amount of new fluid is supplied from the tank supply port 19. The flow rate of fluid added to the tank 2 from outside the temperature control device 1 via the tank supply port 19 and the supply valve 19v is defined as Qs.

[0076] The heating and cooling units 4 are equipped with at least an inlet temperature sensor 12 before the inlet of the most upstream heating and cooling unit 4, an outlet temperature sensor 13 after the outlet of the most downstream heating and cooling unit 4, and a flow meter. The heating and cooling units 4 may also be equipped with a temperature sensor or temperature estimation means that measures the outlet temperature of each heating and cooling unit 4.

[0077] The tank supply port 19 is a port for adding new fluid to the tank 2 from outside the temperature control device 1. The flow rate of the new fluid added to the tank 2 via the tank supply port 19 and the supply valve 19v is Qs. The supply valve 19v arranged in the tank supply port 19 is opened when the fluid in the tank 2 falls below a lower limit threshold L2.

[0078] The supply valve 19v is controlled to open and close by a control signal from a liquid level controller 30, which will be described later.

[0079] In the temperature control device 1 configured as described above, the fluid stored in the tank 2 is pumped by the pump 3 and passes through the heating and cooling unit 4. The temperature of the passing fluid is controlled by a controller 20 (described later) so that the temperature PV3 observed by the outlet temperature sensor 13 becomes the target temperature SV, and the fluid is supplied to the external process device 100 through the supply port 17. After the fluid circulating through the circulation flow path 10 reaches the target temperature SV, the fluid whose temperature has been adjusted by the heating and cooling unit 4 is supplied to the external process device 100 through the supply port 17. In the external process device 100, a portion of the supplied fluid is used to perform, for example, a semiconductor wafer cleaning process. Excess fluid not used in the external process device 100 is returned to the tank 2 through the return port 18. When the level of the fluid in the tank 2 decreases due to the supply of fluid to the external process device 100, the temperature control device 1 adds new fluid at room temperature to the tank 2 through the tank supply port 19 and the supply valve 19v.

[0080] The external process equipment 100 is, for example, a semiconductor wafer cleaning equipment. The semiconductor wafer cleaning equipment cleans semiconductor wafers one by one at predetermined time intervals. The cleaning cycle and the amount of fluid (pure water) used in the semiconductor wafer cleaning equipment are patterned, and therefore the temperature fluctuations of the fluid are also patterned.

[0081] <Controller> The controller 20 calculates the manipulated variable MV of each heating and cooling unit 4 relative to the target temperature SV of the fluid based on the measurement results of the flow rate sensor 11, the inlet temperature sensor 12, and the outlet temperature sensor 13. The controller 20 calculates the manipulated variable MV1 of the heating and cooling unit 4a, the manipulated variable MV2 of the heating and cooling unit 4b, and the manipulated variable MV3 of the heating and cooling unit 4c relative to the target temperature SV of the fluid based on the supply rate Q measured by the flow rate sensor 11, the inlet temperature Tin measured by the inlet temperature sensor 12, a fluctuation pattern Tin' of the inlet temperature described below, and the outlet temperature PV3 measured by the outlet temperature sensor 13. The controller 20 operates each heating and cooling unit 4 in accordance with the calculated manipulated variable to control the outlet temperature PV3 to a desired temperature.

[0082] The control of the outlet temperature PV3 using the heating and cooling unit 4 by the controller 20 will be described. In order to compensate for the delay in the response of the heating and cooling unit 4, compensation is performed using feedforward control. If compensation using feedforward control is started after detecting a fluctuation in the inlet temperature Tin of the heating and cooling unit 4, the delay in response may not be compensated for. Therefore, in this embodiment, the controller 20 starts disturbance compensation using feedforward control at a timing earlier than the actual fluctuation in the inlet temperature Tin. In this embodiment, when the controller 20 detects that a trigger signal that triggers the addition of fluid from outside the circulation flow path 10 to the tank 2 is ON after operation has started, it causes the heating and cooling unit 4 to start disturbance compensation, which is compensation for the fluctuation in the inlet temperature Tin.

[0083] The trigger signal is, for example, a signal indicating that the liquid volume in the tank 2, in other words, the liquid level in the tank 2, is below the lower threshold L2. The trigger signal is, for example, a signal indicating that the detection result of the liquid level sensor 2s indicates that the liquid volume in the tank 2 is below the lower threshold L2. When the liquid volume in the tank 2 decreases and room temperature fluid is added to the tank 2 from outside, the inlet temperature Tin fluctuates. Therefore, by starting disturbance compensation based on the trigger signal indicating the liquid volume in the tank 2, disturbance compensation is started at an earlier timing than the actual fluctuation of the inlet temperature Tin.

[0084] The trigger signal is, for example, a signal indicating the flow rate of fluid flowing through the flow path from the tank supply port 19 to the tank 2. The trigger signal is detected when the detection result of the liquid volume sensor 19s indicates that the flow rate of new fluid supplied from the outside to the tank 2 is equal to or greater than the flow rate threshold. In this case, as shown in FIG. 16 , the liquid volume sensor 19s is disposed in the fluid flow path between the tank supply port 19 and the tank 2. FIG. 16 is a schematic diagram showing another example of a temperature control device according to the second embodiment. When fluid flows through the flow path from the tank supply port 19 to the tank 2, the inlet temperature Tin fluctuates due to the addition of room-temperature fluid from the outside to the tank 2. Therefore, by starting disturbance compensation based on the trigger signal indicating the flow rate of fluid flowing through the flow path from the tank supply port 19 to the tank 2, disturbance compensation is started earlier than the actual fluctuation of the inlet temperature Tin.

[0085] The trigger signal is, for example, an open signal to supply valve 19v of tank supply port 19. When the supply of fluid to external process device 100 starts, the amount of liquid in tank 2 subsequently decreases, and room temperature fluid is added to tank 2 from outside, causing fluctuations in inlet temperature Tin. Therefore, by starting disturbance compensation based on the trigger signal, which is an open signal to supply valve 19v, disturbance compensation is started at an earlier timing than the actual fluctuations in inlet temperature Tin.

[0086] The trigger signal may be, for example, a process start signal when a process is performed periodically in external process device 100. By starting disturbance compensation based on the trigger signal, which is a process start signal, disturbance compensation is started at an earlier timing than the fluctuation of the actual inlet temperature Tin.

[0087] By starting disturbance compensation based on the trigger signal as described above, disturbance compensation is started at a timing earlier than the fluctuation of the inlet temperature Tin, thereby compensating for the delay in the response of the heating / cooling unit 4.

[0088] The disturbance compensation is designed taking into consideration the dynamic characteristics of the tank 2 and the area from the tank 2 to the inlet temperature sensor 12 .

[0089] After the process starts, if the controller 20 detects that the trigger signal is ON, it starts disturbance compensation based on the inlet temperature fluctuation pattern Tin' stored in the pattern learning and output unit 25. In this operation mode, the controller 20 executes feedforward control based on the inlet temperature fluctuation pattern Tin' stored in the pattern learning and output unit 25 at a timing earlier than the detection of fluctuations in the actual inlet temperature Tin.

[0090] The basic configuration of the feedback control unit 22 and the feedforward control unit 23 in the controller 20 will be described using Fig. 10. Fig. 10 is a diagram schematically showing an example of a controller according to the second embodiment. The controller 20 controls the heating and cooling unit 4 to adjust the outlet temperature PV3 to a desired temperature.

[0091] The controller 20 includes an SV distributor 21, a first feedback control unit 22a, a second feedback control unit 22b, a third feedback control unit 22c, a first feedforward control unit 23a, a second feedforward control unit 23b, a third feedforward control unit 23c, and a pattern learning / output unit 25.

[0092] The first feedback control unit 22a, the second feedback control unit 22b, and the third feedback control unit 22c use, for example, a PID (Proportional Integral Differential) controller. The first feedback control unit 22a calculates a feedback amount FB1 for the heating and cooling unit 4a by taking as an error e1 the difference between the target temperature SV1 distributed to the heating and cooling unit 4a by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature fluctuation pattern Tin', and the outlet temperature PV1 of the heating and cooling unit 4a. The second feedback control unit 22b calculates a feedback amount FB2 for the heating and cooling unit 4b by taking as an error e2 the difference between the target temperature SV2 distributed to the heating and cooling unit 4b by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature fluctuation pattern Tin', and the outlet temperature PV2 of the heating and cooling unit 4b. The third feedback control unit 22c calculates the feedback amount FB3 for the heating and cooling unit 4c by taking the deviation e3 between the target temperature SV3 distributed to the heating and cooling unit 4c by the SV distributor 21, which receives the target temperature SV and the inlet temperature fluctuation pattern Tin' as input, and the outlet temperature PV3 of the heating and cooling unit 4c. Here, the outlet temperature PV1 of the heating and cooling unit 4a and the outlet temperature PV2 of the heating and cooling unit 4b are estimated as estimated temperatures PV1h and PV2h by an estimator. A commonly known calculation method such as an observer is used as the estimator.

[0093] The first feedforward control unit 23a receives as input the target temperature SV1 distributed to the heating and cooling unit 4a by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature fluctuation pattern Tin', the inlet temperature fluctuation pattern Tin', and the supply rate Q, and calculates a feedforward amount FF1 for the heating and cooling unit 4a. The second feedforward control unit 23b receives as input the target temperature SV2 distributed to the heating and cooling unit 4b by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature fluctuation pattern Tin', the outlet temperature PV1 of the heating and cooling unit 4a, and the supply rate Q, and calculates a feedforward amount FF2 for the heating and cooling unit 4b. The third feedforward control unit 23c receives as input the target temperature SV3 distributed to the heating and cooling unit 4c by the SV distributor 21, which receives as input the target temperature SV and the inlet temperature fluctuation pattern Tin', the outlet temperature PV2 of the heating and cooling unit 4b, and the supply rate Q, and calculates a feedforward amount FF3.

[0094] The feedforward control unit 23 can more effectively suppress fluctuations in the inlet temperature Tin and the flow rate of each heating / cooling unit 4 .

[0095] The calculated feedforward amount is added to each feedback amount to obtain the final manipulated variable MV of each heating / cooling unit 4. The feedforward amount FF1 is added to the feedback amount FB1 to obtain the final manipulated variable MV1 of heating / cooling unit 4a. The feedforward amount FF2 is added to the feedback amount FB2 to obtain the final manipulated variable MV2 of heating / cooling unit 4b. The feedforward amount FF3 is added to the feedback amount FB3 to obtain the final manipulated variable MV3 of heating / cooling unit 4c.

[0096] The feedforward amount FFi is calculated, for example, by the above-mentioned formula (1). ＦＦｉ (S) indicates the dynamic characteristic part, and K indicates a coefficient.

[0097] In a preliminary operation mode for pattern learning before starting actual operation, the pattern learning / output unit 25 stores the timing of the trigger signal, which is the timing at which fluid is supplied from the supply valve 19v to the tank 2, and the fluctuation pattern Tin' of the inlet temperature after the trigger signal, when the process is operated under the same operating conditions, such as the same temperature and the same supply pattern of fluid to the process, as those of the process of the external process device 100 in the actual operation mode.

[0098] The fluctuation pattern Tin' of the inlet temperature is data based on the temperature signal observed by the inlet temperature sensor 12 in the preparatory operation mode.

[0099] The fluctuation pattern Tin' of the inlet temperature may be created from operational data during the past process.

[0100] An example of operation of the temperature control device 1 will be described using FIG. 11 . FIG. 11 is a diagram showing an example of operation of the temperature control device. FIG. 11 shows temperatures in a typical operation example from the start of operation to the process, cycles during the process, and a supply trigger signal for adding a fluid, which is an example of a fluid. In this example, a process is performed at predetermined time intervals in the external process device 100. In this example, the target temperature SV of the fluid supplied to the external process device 100 is 60°C. After the temperature control device 1 starts operation, the fluid is heated by the heating / cooling unit 4, and the outlet temperature PV3 of the fluid reaches the target temperature SV of 60°C.

[0101] Before the process of the external process device 100 starts, the fluid supplied to the external process device 100 is not used and is returned to the tank 2 via the return port 18. Therefore, the temperature of the fluid in the tank 2 gradually increases, and the inlet temperature Tin of the fluid, which is the temperature of the fluid supplied to the heating and cooling unit 4, also gradually increases.

[0102] After the fluid outlet temperature PV3 reaches the target temperature SV, a process start signal is output in the external process device 100, and the process begins. During the process in the external process device 100, a certain amount of fluid is periodically used within the external process device 100. Because some of the fluid supplied to the external process device 100 is not recovered, the fluid in the tank 2 decreases. When the fluid in the tank 2 falls below the lower threshold L2, room temperature fluid is supplied to the tank 2 from the tank supply port 19 and supply valve 19v based on the supply trigger signal. This reduces the temperature of the fluid in the tank 2, and also reduces the fluid inlet temperature Tin, which is the temperature of the fluid supplied to the heating and cooling unit 4. This inlet temperature fluctuation pattern Tin' is repeated until the process is stopped.

[0103] When the fluid at room temperature is supplied to the tank 2 and the fluid in the tank 2 reaches or exceeds the upper limit threshold L1, a close signal is output to the supply valve 19v, and the supply of the fluid at room temperature is stopped.

[0104] Fluctuations in the inlet temperature Tin of the fluid lead to fluctuations in the outlet temperature PV3. Therefore, the feedback control unit 22 and the feedforward control unit 23 calculate the operation amount of each heating / cooling unit 4 so as to suppress fluctuations in the outlet temperature PV3. Furthermore, as described above, in order to compensate for the delay in the response of the heating / cooling unit 4, disturbance compensation is started based on the trigger signal at a timing earlier than the fluctuations in the inlet temperature Tin.

[0105] Figure 12 is a diagram showing the behavior of the trigger signal and the inlet temperature. In Figure 12, the trigger signal is turned ON and fluid is supplied to the tank 2 for approximately 27 seconds. The inlet temperature Tin begins to drop 6 seconds after the trigger signal is turned ON. In other words, the trigger signal can be detected 6 seconds earlier than the start of fluctuations in the inlet temperature Tin.

[0106] 13 is a diagram comparing the actual inlet temperature with the inlet temperature fluctuation pattern (inlet temperature pattern) in response to the trigger signal. In this operation mode, when the trigger signal turns ON, the inlet temperature fluctuation pattern Tin' stored in the pattern learning / output device 25 is input to the feedforward controller up to 6 seconds earlier than the temperature fluctuation of the actual inlet temperature Tin. This allows disturbance compensation for fluctuations in the inlet temperature Tin to be performed more quickly.

[0107] <Liquid Level Controller> The liquid level controller 30 monitors and controls the liquid level in the tank 2. The liquid level controller 30 outputs an open / close signal to the supply valve 19v based on the detection result of the liquid level sensor 2s.

[0108] When the fluid in the tank 2 decreases to a certain amount and the liquid level sensor 2s detects that the amount is below a predetermined lower threshold L2 of the tank level, the liquid level controller 30 outputs a valve open command to the supply valve 19v. As a result, room temperature fluid is supplied from the tank supply port 19. When the liquid level sensor 2s detects that the room temperature fluid is equal to or above a predetermined upper threshold L1 of the tank level as a result of the supply of room temperature fluid to the tank 2, the liquid level controller 30 outputs a valve close command to the supply valve 19v.

[0109] <Computer System> Figure 27 is a block diagram showing a computer system 1000 according to the second embodiment. The controller 20 and the liquid level controller 30 described above are included in the computer system 1000. The computer system 1000 includes a processor 1001 such as a CPU (Central Processing Unit), a main memory 1002 including a nonvolatile memory such as a ROM (Read Only Memory) and a volatile memory such as a RAM (Random Access Memory), a storage 1003, and an interface 1004 including an input / output circuit. The functions of the controller 20 and the liquid level controller 30 described above are stored as a program in the storage 1003. The processor 1001 reads the program from the storage 1003, loads it into the main memory 1002, and executes the above-described processing according to the program. The program may be distributed to the computer system 1000 via a network.

[0110] <Temperature Control Method> An example of a temperature control method of the temperature control device will be described using Fig. 15. Fig. 15 is a flowchart showing a temperature control method of the temperature control device according to the second embodiment. When the temperature control device 1 is started up, the processing of the flowchart shown in Fig. 15 is executed at predetermined time intervals.

[0111] The controller 20 acquires the target temperature SV, the inlet temperature fluctuation pattern Tin', the outlet temperature PV3, the supply amount Q, the manipulated variable MV1, the manipulated variable MV2, and the manipulated variable MV3 (step SS11). The target temperature SV is stored, for example, in a memory unit (not shown) of the temperature control device 1. The inlet temperature fluctuation pattern Tin' is acquired from the pattern learning / output device 25. The outlet temperature PV3 is acquired from the outlet temperature sensor 13. The supply amount Q is acquired from the flow rate sensor 11. The manipulated variables MV1, MV2, and MV3 are acquired as current manipulated variables from the heating / cooling units 4a, 4b, and 4c.

[0112] The controller 20 uses the estimator to calculate the estimated temperatures PV1h and PV2h from the various values ​​acquired in step SS11 (step SS12).

[0113] The controller 20 calculates a target temperature SV1 for the heating and cooling unit 4a, a target temperature SV2 for the heating and cooling unit 4b, and a target temperature SV3 for the heating and cooling unit 4c using the SV distributor 21. The controller 20 distributes the target temperature SV for the heating and cooling unit 4 as the target temperature SV1 for the heating and cooling unit 4a, the target temperature SV2 for the heating and cooling unit 4b, and the target temperature SV3 for the heating and cooling unit 4c using the SV distributor 21.

[0114] The controller 20 calculates the feedback amount FB1, the feedback amount FB2, and the feedback amount FB3 (step SS14). The controller 20 determines deviations from the target temperature SV1, the target temperature SV2, the target temperature SV3, the outlet temperature PV3, the estimated temperature PV1h, and the estimated temperature PV2h, and calculates the feedback amount FB1, the feedback amount FB2, and the feedback amount FB3 using the first feedback control unit 22a, the second feedback control unit 22b, and the third feedback control unit 22c. The algorithm for calculating the feedback amount FB1, the feedback amount FB2, and the feedback amount FB3 is as described above.

[0115] The controller 20 calculates the feedforward amounts FF1, FF2, and FF3 (step SS15). The controller 20 calculates the feedforward amounts FF1, FF2, and FF3 using the first feedforward control unit 23a, the second feedforward control unit 23b, and the third feedforward control unit 23c from the inlet temperature fluctuation pattern Tin', the estimated temperature PV1h, the estimated temperature PV2h, the target temperature SV1, the target temperature SV2, and the target temperature SV3. The algorithm for calculating the feedforward amounts FF1, FF2, and FF3 is as described above.

[0116] The controller 20 calculates the operating volume MV1 by adding the feedback volume FB1 and the feedforward volume FF1, calculates the operating volume MV2 by adding the feedback volume FB2 and the feedforward volume FF2, and calculates the operating volume MV3 by adding the feedback volume FB3 and the feedforward volume FF3 (step SS16).

[0117] <Effects> As described above, in the embodiment, after operation has started, if it is detected that the trigger signal that triggers the addition of fluid from outside the circulation flow path 10 to the tank 2 is ON, the heating and cooling unit 4 is caused to start disturbance compensation. The embodiment can cause the heating and cooling unit 4 to start disturbance compensation before the actual inlet temperature Tin fluctuates. The embodiment can compensate for delays in the responsiveness of the heating and cooling unit 4. In this way, the embodiment can make it possible to effectively adjust the temperature of the fluid.

[0118] In this embodiment, a signal indicating that the liquid volume in the tank 2 is less than the lower threshold L2 can be used as a trigger signal to start disturbance compensation. This embodiment can cause the heating and cooling unit 4 to start disturbance compensation before the actual inlet temperature Tin fluctuates.

[0119] In this embodiment, disturbance compensation can be started using as a trigger signal an open signal to the supply valve 19v of the tank supply port 19. In this embodiment, the heating and cooling unit 4 can start disturbance compensation before the actual inlet temperature Tin fluctuates.

[0120] In the embodiment, the disturbance compensation can be started using a process start signal in the external process device 100 as a trigger signal. In the embodiment, the heating and cooling unit 4 can start the disturbance compensation before the actual inlet temperature Tin fluctuates.

[0121] In an embodiment, the disturbance compensation can be set based on the dynamic characteristics of the tank 2 and from the tank 2 to the inlet temperature sensor 12 .

[0122] In this embodiment, the timing at which an open signal is sent to supply valve 19v of tank supply port 19 when fluid is supplied to external process device 100 and the inlet temperature fluctuation pattern Tin' are stored before the process starts, and when a trigger signal is detected after the process starts, disturbance compensation can be started based on the stored inlet temperature fluctuation pattern Tin'. According to this embodiment, the temperature of the fluid can be effectively adjusted.

[0123] In this embodiment, a signal indicating that the detection result of the liquid volume sensor 19s indicates that the liquid volume in the tank 2 is less than the lower threshold L2 can be used as a trigger signal to start disturbance compensation. In this embodiment, the heating and cooling unit 4 can be made to start disturbance compensation before the actual inlet temperature Tin fluctuates.

[0124] In this embodiment, a signal indicating that the detection result of the liquid level sensor 2s indicates that the liquid amount in the tank 2 is less than the lower threshold L2 can be used as a trigger signal to start disturbance compensation. This embodiment can cause the heating and cooling unit 4 to start disturbance compensation before the actual inlet temperature Tin fluctuates.

[0125] 14 is a diagram showing the comparison results of outlet temperature fluctuations. FIG. 14 shows the comparison results of outlet temperature fluctuations between a conventional method and the embodiment by simulation. The conventional method is a method in which feedforward control is started after detecting fluctuations in the actual inlet temperature Tin. The embodiment has an improved fluctuation range of the outlet temperature PV3 compared to the conventional method.

[0126] <Modification of the second embodiment> In the above, the temperature sensors have been described as including the inlet temperature sensor 12 and the outlet temperature sensor 13, but a temperature sensor or temperature estimation means for measuring the outlet temperature PV of each heating and cooling unit 4 may also be provided.

[0127] Although the above description has been made on the case where the heating / cooling unit 4 heats a fluid, the present invention is also applicable to the case where the heating / cooling unit 4 cools a fluid.

[0128] Although an example of three heating and cooling units has been shown above, four or more heating and cooling units may be provided.

[0129] In the above description, the pump 3 is arranged upstream of the heating / cooling unit 4 , but it may also be arranged downstream of the heating / cooling unit 4 .

[0130] In the above, when it is determined that the difference between the inlet temperature fluctuation pattern Tin' and the actual inlet temperature Tin is equal to or greater than the difference threshold, the controller 20 may correct the inlet temperature fluctuation pattern Tin'.

[0131] [Third Embodiment] <Temperature Control Device> A third embodiment will be described. FIG. 17 is a schematic diagram showing an example of a temperature control device according to the third embodiment, showing state A. FIG. 18 is a schematic diagram showing the temperature control device shown in FIG. 17 in state A. FIG. 19 is a schematic diagram showing an example of a temperature control device according to the third embodiment, showing state B. FIG. 20 is a schematic diagram showing the temperature control device shown in FIG. 19 in state B. In FIGS. 18 and 20, some components are omitted to simplify the description of the liquid flow. The temperature control device 1 controls the temperature of a liquid supplied to an external process device 100. In the third embodiment, components similar to those in the first and second embodiments are denoted by the same reference numerals, and description thereof will be omitted.

[0132] The temperature control device 1 includes a tank 2, a pump 3, a first heating / cooling unit 4U1, a second heating / cooling unit 4U2, a first switching valve 41, a second switching valve 42, a circulation flow path 10, a flow rate sensor 11, an inlet temperature sensor 12, an outlet temperature sensor 13, a supply port 17, a return port 18, a tank supply port 19, a controller 20, and a liquid level controller 30.

[0133] The tank 2 stores the liquid to be supplied to the external process apparatus 100. A pump 3 is connected downstream of the tank 2. The pump 3 is connected upstream of the first heating and cooling unit 4U1 and the second heating and cooling unit 4U2. The liquid stored in the tank 2 is pumped by the pump 3 and passes through the first heating and cooling unit 4U1 and the second heating and cooling unit 4U2. The amount of liquid supplied from the tank 2 to the first heating and cooling unit 4U1 and the second heating and cooling unit 4U2 via the pump 3 is denoted by Q.

[0134] When the liquid in the tank 2 falls below a lower threshold (liquid volume threshold) L2, a required amount of new fluid (hereinafter referred to as "new liquid") is supplied from the tank supply port 19.

[0135] The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are capable of at least one of heating and cooling the liquid supplied to the external process equipment 100. The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are containers having a certain volume and equipped with inlet and outlet ports for the liquid. For example, when the external process equipment 100 is a pure water heating device, the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are equipped with a halogen lamp heater in a quartz bottle having an inlet and an outlet, and heat the pure water with radiant heat.

[0136] The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 each include one or more heating / cooling units. When multiple heating / cooling units are included, the units are arranged in series, in parallel, or in a combination thereof. For example, in FIG. 17, the first heating / cooling unit 4U1 includes two heating / cooling units, and the second heating / cooling unit 4U2 includes one heating / cooling unit.

[0137] The first heating / cooling unit 4U1 is disposed upstream of the second heating / cooling unit U2. The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are controlled by the controller 20 so that the outlet temperature PV of the liquid passing therethrough becomes the target temperature SV.

[0138] An inlet temperature sensor 12 is provided before the inlet of the first heating / cooling unit 4U1, and an outlet temperature sensor 13 and a flow meter are provided after the outlet of the second heating / cooling unit 4U2. The first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 may each be provided with a temperature sensor or temperature estimation means for measuring the outlet temperature.

[0139] The first heating / cooling unit 4U1 is connected to the circulation flow path 10 and the new liquid supply flow path 19f via a switching valve so as to be switchable between them. The first heating / cooling unit 4U1 is disposed downstream of the tank 2 and upstream of the supply port 17.

[0140] The second heating / cooling unit U2 is connected to the circulation flow path 10. The second heating / cooling unit U2 is disposed downstream of the first heating / cooling unit 4U1 and upstream of the supply port 17.

[0141] The circulation flow path 10 is a flow path through which the liquid supplied to the external process device 100 circulates. The circulation flow path 10 includes a tank 2, a pump 3, a first heating / cooling unit 4U1, a second heating / cooling unit 4U2, a flow rate sensor 11, an inlet temperature sensor 12, an outlet temperature sensor 13, a supply port 17, a return port 18, and a valve 102.

[0142] The flow rate sensor 11 is disposed between the tank 2 and the first heating / cooling unit 4U1. The flow rate sensor 11 is disposed between the pump 3 and the first heating / cooling unit 4U1. The flow rate sensor 11 measures the amount Q of liquid supplied to the first heating / cooling unit 4U1.

[0143] The inlet temperature sensor 12 is disposed between the tank 2 and the inlet of the first heating and cooling unit 4U1. The inlet temperature sensor 12 is disposed between the pump 3 and the first heating and cooling unit 4U1. The inlet temperature sensor 12 measures the liquid inlet temperature Tin, which is the temperature of the liquid flowing into the first heating and cooling unit 4U1.

[0144] The outlet temperature sensor 13 is disposed between the outlet of the second heating and cooling unit 4U2 and the supply port 17 to the external process device 100. The outlet temperature sensor 13 is disposed between the outlet of the second heating and cooling unit 4U2 and the supply port 17 to the external process device 100. The outlet temperature sensor 13 measures the outlet temperature PV of the liquid.

[0145] The supply port 17 supplies liquid to the external process apparatus 100. The supply port 17 is a port provided downstream of the second heating and cooling unit 4U2 and supplies liquid to the external process apparatus 100. The supply port 17 supplies the liquid whose temperature has been adjusted by the first heating and cooling unit 4U1 and the second heating and cooling unit 4U2 to the external process apparatus 100.

[0146] The flow path that supplies heated pure water to the process is called a circulation flow path 10. The flow path that supplies new liquid to the tank 2 from outside the circulation flow path 10 is called a new liquid supply flow path 19f.

[0147] The first switching valve 41 and the second switching valve 42 are capable of switching the connection between the new liquid supply passage 19f and a part of the heating and cooling unit.

[0148] The first switching valve 41 is a valve that switches the new liquid supply flow path 19f. The first switching valve 41 is connected so as to be switchable between the circulation flow path 10 between the downstream side of the tank 2 and the first heating / cooling unit 4U1 and the new liquid supply flow path 19f. The first switching valve 41 is arranged so as to be switchable between the new liquid supply flow path 19f1 downstream of the supply valve 19v and the flow path between the pump 3 and the first heating / cooling unit 4U1. The switching of the first switching valve 41 to the new liquid supply flow path 19f is controlled by the controller 20, which will be described later.

[0149] The second switching valve 42 is a valve that switches the new liquid supply flow path 19f. The second switching valve 42 is switchably connected between the circulation flow path 10 between the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 and the new liquid supply flow path 19f. The second switching valve 42 is arranged to be switchable between the new liquid supply flow path 19f2 that connects the downstream side of the first switching valve 41 with the tank 2 and the flow path between the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. The switching of the second switching valve 42 to the new liquid supply flow path 19f is controlled by the controller 20, which will be described later.

[0150] The new liquid supply flow path 19f includes a new liquid supply flow path 19f1 and a new liquid supply flow path 19f2. The new liquid supply flow path 19f1 is a flow path that supplies new liquid to the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. The new liquid supply flow path 19f1 is arranged between the tank supply port 19 and the supply valve 19v and the first switching valve 41. The new liquid supply flow path 19f2 is a flow path that supplies temperature-controlled new liquid to the tank 2. The new liquid supply flow path 19f2 is arranged between the second switching valve 42 and the tank 2.

[0151] The new liquid inlet temperature sensor 45 measures the temperature Tin2 of the new liquid. The new liquid inlet temperature sensor 45 is disposed downstream of the supply valve 19v and upstream of the first heating / cooling unit 4U1.

[0152] The new liquid flow meter 46 measures the supply flow rate Qs of the new liquid. The new liquid flow meter 46 is disposed downstream of the supply valve 19v and upstream of the first heating / cooling unit 4U1.

[0153] The new liquid outlet temperature sensor 47 measures the temperature PVs of the temperature-controlled new liquid immediately before it is supplied to the tank 2. The new liquid outlet temperature sensor 47 is disposed immediately before the tank 2 on the new liquid supply flow path 19f2.

[0154] 21 is a diagram showing fluctuations in the outlet temperature. State A (first state) is a state in which the outlet temperature of the liquid, temperature-controlled by temperature control device 1, reaches the target temperature SV. State B (second state) is a state in which the outlet temperature of the liquid reaches the target temperature SV and the temperature-controlled liquid is supplied to external process device 100.

[0155] State A will be described using Figures 17 and 18. In the temperature control device 1, liquid stored in the tank 2 is pressure-fed by the pump 3 and passes through the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. The temperature of the passing liquid is controlled by the controller 20, which will be described later, so that the temperature PV observed by the outlet temperature sensor 13 becomes the target temperature SV. When the temperature PV reaches the target temperature SV, the system switches to state B. In state A, the circulation flow path 10, which is the normal heating flow path, is independent of the new liquid supply flow path 19f. State A is a state in which the new liquid supply flow path 19f is not connected to the first heating / cooling unit 4U1.

[0156] In state A, the flow path is switched by the first switching valve 41 and the second switching valve 42 so that the liquid stored in the tank 2 passes through the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2. In the example shown in Figures 17 and 18, the temperature of the liquid discharged from the tank 2 by the pump 3 is regulated by two units of the first heating / cooling unit 4U1 and one unit of the second heating / cooling unit 4U2. In state A, new liquid is not supplied.

[0157] State B will be described using FIGS. 19 and 20 . After the liquid circulating through the circulation flow path 10 reaches the target temperature SV, the liquid temperature-adjusted by the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 is supplied to the external process equipment 100 through the supply port 17. The external process equipment 100 uses a portion of the supplied liquid to perform, for example, a semiconductor wafer cleaning process. Any excess liquid not used in the external process equipment 100 is returned to the tank 2 through the return port 18. When the liquid level in the tank 2 drops below the lower threshold L2 due to the supply of liquid to the external process equipment 100, the controller 20 adds new liquid, after adjusting its temperature, to the tank 2 via the tank supply port 19 and the supply valve 19v. In State B, as the process progresses, new liquid corresponding to the liquid shortage in the tank 2 is repeatedly supplied through the tank supply port 19 and the supply valve 19v. When the liquid level in the tank 2 exceeds the upper threshold L1 due to the addition of new liquid, the supply of new liquid is stopped.

[0158] In state B, part of the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 is used to adjust the temperature of the new liquid, and the rest is used to adjust the outlet temperature PV of the pure water supplied to the process of the circulation flow path 10. State B is a state in which the new liquid supply flow path 19f and the first heating / cooling unit 4U1 are connected.

[0159] In state B, the flow path is switched so that two units of the first heating and cooling unit 4U1 are connected to the new liquid supply flow path 19f by the first switching valve 41 and the second switching valve 42. The controller 20 measures the temperature Tin2 of the new liquid with the new liquid inlet temperature sensor 45, measures the supply flow rate Qs of the new liquid with the new liquid flow meter 46, and controls the temperature-regulated new liquid temperature PVs with the new liquid outlet temperature sensor 47 to become the target temperature SVs (SVs<SV).

[0160] In state B, the first switching valve 41 and the second switching valve 42 switch the flow path to connect one unit, the second heating / cooling unit 4U2, to the circulation flow path 10. In state B, the inlet temperature Tin has risen to close to the target temperature SV, so the power required for heating is small, and one unit is sufficient. The temperature PVs of the new liquid supplied to the tank 2 is also higher than room temperature, so the temperature drop within the tank 2 is reduced, and fluctuations in the inlet temperature Tin are smaller than in the prior art. As a result, the power required to suppress temperature fluctuations is also small, and one unit is sufficient.

[0161] <Controller> The controller 20 calculates the manipulated variables MV of each heating and cooling unit 4 relative to the target temperature SV of the liquid based on the measurement results of the flow rate sensor 11, the inlet temperature sensor 12, and the outlet temperature sensor 13. The controller 20 calculates the manipulated variables MV of the first heating and cooling unit 4U1 and the second heating and cooling unit 4U2 relative to the target temperature SV of the liquid based on the supply rate Q measured by the flow rate sensor 11, the inlet temperature Tin measured by the inlet temperature sensor 12, and the outlet temperature PV measured by the outlet temperature sensor 13. The controller 20 operates the first heating and cooling unit 4U1 and the second heating and cooling unit 4U2 in accordance with the calculated manipulated variables to control the outlet temperature PV to a desired temperature.

[0162] After operation has started and new liquid is added to the tank 2 from the tank supply port 19, the controller 20 controls the first switching valve 41 and the second switching valve 42 to connect the new liquid supply flow path 19f to the first heating and cooling unit 4U1 as part of the heating and cooling unit.

[0163] In state A, the controller 20 controls the first switching valve 41 and the second switching valve 42 so that the first heating / cooling unit 4U1 and the second heating / cooling unit 4U2 are connected to the circulation flow path 10.

[0164] In state B, the controller 20 controls the first switching valve 41 and the second switching valve 42 so that the first heating / cooling unit 4U1 is connected to the new liquid supply flow path 19f and the second heating / cooling unit 4U2 is connected to the circulation flow path 10.

[0165] <Computer System> The above-described controller 20 and liquid level controller 30 include a computer system 1000 shown in FIG.

[0166] <Temperature Control Method> Fig. 22 is a flowchart showing an example of a temperature control method by the temperature control device according to embodiment 3. When the temperature control device 1 is started up, the process of the flowchart shown in Fig. 22 is executed.

[0167] The controller 20 executes control in state A (step SU11). The controller 20 controls the heating / cooling unit 4 by feedback control or the like so that the outlet temperature PV detected by the outlet temperature sensor 13 of the liquid passing through the circulation flow path 10 reaches the target temperature SV. The controller 20 does not perform any control on the new liquid supply flow path 19f.

[0168] The controller 20 determines whether or not it is possible to transition to state B (step SU12). The controller 20 determines that it is possible to transition to state B when both of the following two conditions are met. α is a predetermined threshold. Condition 1 is a condition for determining whether or not the liquid circulating through the circulation flow path 10 has reached the target temperature SV. When the controller 20 determines that it is possible to transition to state B (step SU12; Yes), it proceeds to step SU13. When the controller 20 does not determine that it is possible to transition to state B (step SU12; No), it executes the process of step SU12 again. (Condition 1) SV-1 [°C]≦PV≦SV+1 [°C] (Condition 2) SV-Tin<α

[0169] If it is determined that transition to State B is possible (Step SU12; Yes), the controller 20 executes control in State B (Step SU13). The controller 20 continues to control the liquid passing through the circulation flow path 10 in the same manner as in State A. For the liquid passing through the new liquid supply flow path 19f, the controller 20 acquires the new liquid temperature Tin2 detected by the new liquid inlet temperature sensor 45 and the new liquid supply flow rate Qs detected by the new liquid flow meter 46. The controller 20 performs feedback control or the like so that the temperature PVs of the temperature-controlled new liquid immediately before it is supplied to the tank 2, detected by the new liquid outlet temperature sensor 47, becomes the target temperature SV.

[0170] In step SU13, the liquid level controller 30 controls the supply of new liquid to the tank 2. More specifically, when the liquid level in the tank 2 falls below a lower threshold L2 based on the detection result of the liquid level sensor 2s, the liquid level controller 30 outputs an open signal to the supply valve 19v. When the liquid level in the tank 2 exceeds an upper threshold L1 based on the detection result of the liquid level sensor 2s, the liquid level controller 30 outputs a close signal to the supply valve 19v.

[0171] The controller 20 determines whether or not to change the target temperature SV (step SU14). If the controller 20 determines that the target temperature SV should be changed (step SU14; No), the controller 20 proceeds to step SU15. If the controller 20 does not determine that the target temperature SV should be changed (step SU14; Yes), the controller 20 executes the process of step SU11 again.

[0172] The controller 20 determines whether or not to stop operation (step SU15). If the controller 20 determines to stop operation (step SU15; Yes), it ends the processing of this flowchart. If the controller 20 does not determine to stop operation (step SU15; No), it executes the processing of step SU14 again.

[0173] <Effects> As described above, in the embodiment, when new liquid is added to the tank 2 from the tank supply port 19 after operation has started, the new liquid supply flow path 19f is connected to the first heating and cooling unit 4U1. According to the embodiment, the temperature of the new liquid can be adjusted without adding a dedicated heating and cooling unit to the new liquid supply flow path 19f. In this way, the embodiment makes it possible to effectively adjust the temperature of the liquid.

[0174] In this embodiment, the first heating and cooling unit 4U1 heats the new liquid to the target temperature SVs before supplying it, thereby suppressing a temperature drop in the tank 2. As a result, in this embodiment, it is possible to suppress fluctuations in the inlet temperature Tin and the outlet temperature PV.

[0175] In the embodiment, in state A, the first heating and cooling unit 4U1 and the second heating and cooling unit 4U2 are connected to the circulation flow path 10. In the embodiment, in state B, the first heating and cooling unit 4U1 is connected to the new liquid supply flow path 19f, and the second heating and cooling unit 4U2 is connected to the circulation flow path 10. According to the embodiment, in state A and state B, the temperature of the liquid can be effectively adjusted.

[0176] In the embodiment, the first heating and cooling unit 4U1 is connected so as to be switchable between the circulation flow path 10 and the new liquid supply flow path 19f via the first switching valve 41 and the second switching valve 42. In the embodiment, the second heating and cooling unit 4U2 is connected to the circulation flow path 10. According to the embodiment, the temperature of the new liquid can be adjusted without adding a dedicated heating and cooling unit to the new liquid supply flow path 19f.

[0177] [Fourth Embodiment] A fourth embodiment will now be described. FIG. 23 is a schematic diagram showing an example of a temperature control device according to the fourth embodiment, showing state A. FIG. 24 is a schematic diagram showing the temperature control device shown in FIG. 23 in state A. FIG. 25 is a schematic diagram showing an example of a temperature control device according to the fourth embodiment, showing state B. FIG. 26 is a schematic diagram showing the temperature control device shown in FIG. 25 in state B. In FIGS. 24 and 26, some components are omitted to simplify the description of the liquid flow. The fourth embodiment differs from the third embodiment in the arrangement of the first heating / cooling unit 4U1 and the first switching valve 41. In the following description, components similar to those in the third embodiment are denoted by the same reference numerals, and description thereof will be omitted.

[0178] The first heating / cooling unit 4U1 is disposed in the flow path between the return port 18 and the tank 2 or in the new liquid supply flow path 19f. The first heating / cooling unit 4U1 is disposed upstream of the tank 2 and downstream of the return port 18.

[0179] The second heating / cooling unit 4U2 is disposed downstream of the pump 3 and upstream of the supply port 17. The second heating / cooling unit 4U2 is disposed downstream of the tank 2 and upstream of the supply port 17.

[0180] For example, in FIG. 23, the first heating / cooling unit 4U1 is made up of two heating / cooling units, and the second heating / cooling unit 4U2 is made up of one heating / cooling unit.

[0181] The first switching valve 41 is a valve that switches the flow path connected to the first heating / cooling unit 4U1. The first switching valve 41 is switchably connected between the circulation flow path 10 between the tank supply port 19 and the first heating / cooling unit 4U1 and the new liquid supply flow path 19f. The first switching valve 41 is controlled to switch the new liquid supply flow path 19f by the controller 20, which will be described later.

[0182] The new liquid supply flow path 19f is a flow path that supplies new liquid to the tank 2 via the first heating / cooling unit 4U1. The new liquid supply flow path 19f1 is arranged between the tank 2 and the tank supply port 19 and supply valve 19v.

[0183] The new liquid inlet temperature sensor 45 measures the temperature Tin2 of the new liquid. The new liquid inlet temperature sensor 45 is disposed downstream of the supply valve 19v and upstream of the first switching valve 41.

[0184] The new liquid flow meter 46 measures the supply flow rate Qs of the new liquid. The new liquid flow meter 46 is disposed downstream of the supply valve 19v and upstream of the first switching valve 41.

[0185] The new liquid outlet temperature sensor 47 measures the temperature PVs of the temperature-controlled new liquid immediately before it is supplied to the tank 2. The new liquid outlet temperature sensor 47 is disposed between the first heating / cooling unit 4U1 and the tank 2, immediately before the tank 2.

[0186] 23 and 24 , in state A, the flow path is switched by the switching valve 41 so that the liquid stored in the tank 2 is pumped by the pump 3, passes through the second heating and cooling unit 4U2, and then passes through the first heating and cooling unit 4U1 from the return port 18. No new liquid is supplied in state A. In the example shown in FIGS. 23 and 24 , in state A, the liquid discharged from the tank 2 by the pump 3 has its temperature regulated by one unit of the second heating and cooling unit 4U2, and the liquid returning to the tank 2 from the return port 18 has its temperature regulated by two units of the first heating and cooling unit 4U1.

[0187] In state A, the temperature of the temperature control device 1 is controlled by the controller 20 so that the temperature PV observed by the outlet temperature sensor 13 becomes the target temperature SV. The temperature control device 1 measures the temperature Tin2 of the new liquid with the new liquid inlet temperature sensor 45, measures the supply flow rate Qs of the new liquid with the new liquid flow meter 46, and controls the temperature by the controller 20 so that the temperature PVs of the new liquid, which is temperature-regulated by the new liquid outlet temperature sensor 47, becomes the target temperature SVs.

[0188] 25 and 26, in state B, the flow path is switched so that two units of the first heating and cooling unit 4U1 are connected to the new liquid supply flow path 19f by the first switching valve 41. The temperature control device 1 measures the temperature Tin2 of the new liquid with the new liquid inlet temperature sensor 45, measures the supply flow rate Qs of the new liquid with the new liquid flow meter 46, and controls the temperature PVs of the new liquid adjusted by the new liquid outlet temperature sensor 47 to become the target temperature SVs.

[0189] In the state B, similarly to the state A, one unit, the second heating / cooling unit 4U2, is connected to the circulation flow path 10.

[0190] As described above, in the embodiment, the temperature of the new liquid can be adjusted without adding a dedicated heating / cooling unit to the new liquid supply passage 19 f. In this way, the embodiment makes it possible to effectively adjust the temperature of the liquid.

[0191] <Variations of the third and fourth embodiments> In the above, the temperature sensors have been described as including the inlet temperature sensor 12 and the outlet temperature sensor 13, but it is also possible to further include temperature sensors or temperature estimation means that measure the outlet temperatures PV of the heating and cooling unit 4U1 and the second heating and cooling unit 4U2, respectively.

[0192] Although the above description has been given of the case where the heating / cooling unit 4U1 and the second heating / cooling unit 4U2 heat a liquid, the present invention is also applicable to the case where a liquid is cooled.

[0193] In the above description, the pump 3 is arranged upstream of the heating / cooling unit 4U1 and the second heating / cooling unit 4U2, but it may also be arranged downstream of the heating / cooling unit 4U1 and the second heating / cooling unit 4U2.

[0194] 1...Temperature control device, 2...Tank, 3...Pump, 4...Heating / cooling unit, 4a...Heating / cooling unit, 4b...Heating / cooling unit, 4c...Heating / cooling unit, 10...Circulation flow path, 11...Flow rate sensor, 12...Inlet temperature sensor, 13...Outlet temperature sensor, 17...Supply port, 18...Return port, 19...Fluid addition port, 20...Controller, 21...SV distributor, 22a...First feedback control section, 22b...Second feedback control section, 22c...Third feedback control section, 23a...First feedforward control section, 23b...Second feedforward control section, 23c...Third feedforward control section, 100...External process Process device, 101...process, 102...valve, FB1...feedback amount, FB2...feedback amount, FB3...feedback amount, FF1...feedforward amount, FF2...feedforward amount, FF3...feedforward amount, MV1...operated amount, MV2...operated amount, MV3...operated amount, P...required power, PV1...outlet temperature, PV2...outlet temperature, PV3...outlet temperature, PV1h...estimated temperature, PV2h...estimated temperature, Q...supply amount, Qp...flow rate, Qr...flow rate, Qs...flow rate, SV...target temperature, SV1...target temperature, SV2...target temperature, SV3...target temperature, Tin...inlet temperature, α...first threshold, β...second threshold, δ...temperature threshold.

Claims

1. A temperature control device comprising: a circulation flow path through which a fluid flows; a plurality of heating and cooling units arranged in series in the circulation flow path for heating or cooling the fluid flowing through the circulation flow path; and a controller for controlling the heating and cooling units, wherein after operation starts, the controller regulates the temperature of the fluid by feedforward control and feedback control of the heating and cooling units until the outlet temperature of the fluid reaches a target temperature, and after the outlet temperature of the fluid reaches the target temperature, the controller stops the output of one or more of the heating and cooling units or sets it to a fixed value depending on the magnitude of the disturbance.

2. The temperature control device according to claim 1, wherein the disturbance is an inlet temperature, which is the temperature of the fluid flowing into the most upstream heating / cooling unit, and a flow rate of the fluid added from outside.

3. The temperature control device according to claim 2, wherein the disturbance is calculated as required power based on the inlet temperature of the fluid and the flow rate of the fluid added from outside.

4. The temperature control device according to claim 1, wherein when the controller stops or sets the output of one or more of the heating / cooling units to a fixed value, the controller stops or sets the output of the heating / cooling units to a fixed value in order from the most upstream unit.

5. The temperature control device according to claim 3, wherein three of the heating and cooling units are connected in series, and when the required power is equal to or less than a first threshold, the controller sets the operation amounts of two of the heating and cooling units to fixed values ​​and calculates the operation amount of one of the heating and cooling units by feedback control and feedforward control.

6. The temperature control device according to claim 3, wherein three of the heating and cooling units are connected in series, and when the required power is greater than a first threshold value and equal to or less than a second threshold value, the controller sets the operation amount of one of the heating and cooling units to a fixed value and calculates the operation amounts of two of the heating and cooling units by feedback control and feedforward control.

7. The temperature control device according to claim 3, wherein three of the heating and cooling units are connected in series, and when the required power is greater than a second threshold, the controller calculates the operation amounts of the three heating and cooling units by feedback control and feedforward control.

8. A temperature control device comprising: a circulation flow path through which a fluid flows; a plurality of heating and cooling units arranged in series in the circulation flow path for heating or cooling the fluid flowing through the circulation flow path; a tank for storing the fluid to be supplied to an external process; a tank supply port for adding fluid to the tank from outside the circulation flow path; and a controller for controlling the heating and cooling unit, wherein the controller causes the heating and cooling unit to start external disturbance compensation when it detects a trigger signal that triggers adding fluid to the tank from outside the circulation flow path after operation has started.

9. The temperature control device according to claim 8, wherein the trigger signal is a signal indicating that the liquid level in the tank is less than a liquid level threshold.

10. The temperature control device of claim 8, wherein the trigger signal is an open signal to a supply valve of the tank supply port.

11. The temperature control device according to claim 8, wherein the trigger signal is a process start signal for the external process.

12. The temperature control device according to claim 8, further comprising an inlet temperature sensor that measures the inlet temperature of the heating and cooling unit, wherein the disturbance compensation is set based on the dynamic characteristics of the tank and the area from the tank to the inlet temperature sensor.

13. The temperature control device according to claim 8, wherein the controller stores the timing at which an open signal is sent to the tank supply port when the fluid is supplied to the external process and the fluctuation pattern of the inlet temperature of the heating and cooling unit before the process starts, and when the trigger signal is detected after the process starts, starts disturbance compensation based on the stored fluctuation pattern of the inlet temperature.

14. The temperature control device according to claim 9, further comprising: a liquid level sensor that detects the liquid level in the tank; and wherein the trigger signal is a signal that indicates that the detection result of the liquid level sensor indicates that the liquid level in the tank is less than a liquid level threshold value.

15. The temperature control device according to claim 8, further comprising a liquid level sensor that detects the liquid level in the tank, wherein the trigger signal is a signal that indicates that the detection result of the liquid level sensor indicates that the liquid level in the tank is less than a liquid level threshold.

16. A temperature control device comprising: a circulation flow path through which a liquid flows; a new liquid supply flow path that adds new liquid to the circulation flow path from outside the circulation flow path; a plurality of heating and cooling units arranged in the circulation flow path and that heat or cool the liquid flowing through the circulation flow path; a tank that stores the liquid to be supplied to an external process; a tank supply port that adds new liquid to the tank from outside the circulation flow path; a switching valve that can switch the connection between the new liquid supply flow path and a part of the heating and cooling unit; and a controller that controls the heating and cooling unit, wherein the controller controls the switching valve to connect the new liquid supply flow path to a part of the heating and cooling unit when new liquid is added to the tank from the tank supply port after operation has started.

17. A temperature control device as described in claim 16, wherein a state in which the new liquid supply flow path and the heating / cooling unit are not connected is defined as a first state, and a state in which the new liquid supply flow path and the heating / cooling unit are connected is defined as a second state, and the controller controls the switching valve so that in the first state, at least a portion of the heating / cooling unit is connected to the circulation flow path, and in the second state, a portion of the heating / cooling unit is connected to the new liquid supply flow path and the remainder of the heating / cooling unit is connected to the circulation flow path.

18. The temperature control device according to claim 16, wherein the heating and cooling unit comprises a first heating and cooling unit and a second heating and cooling unit, the first heating and cooling unit is connected via the switching valve so as to be switchable between the circulation flow path and the new liquid supply flow path, and the second heating and cooling unit is connected to the circulation flow path.

19. The temperature control device according to claim 18, further comprising: a supply port branching from the circulation flow path to supply liquid to the external process; the first heating and cooling unit is arranged downstream of the tank and upstream of the supply port; the second heating and cooling unit is arranged downstream of the first heating and cooling unit and upstream of the supply port; the switching valve comprises a first switching valve and a second switching valve; the first switching valve is switchably connected between the circulation flow path between the downstream side of the tank and the first heating and cooling unit and the new liquid supply flow path; and the second switching valve is switchably connected between the circulation flow path between the first heating and cooling unit and the second heating and cooling unit and the new liquid supply flow path.

20. A temperature control device as described in claim 18, comprising: a supply port branching from the circulation flow path to supply liquid to the external process; and a return port returning liquid from the circulation flow path to the tank; the first heating and cooling unit is arranged upstream of the tank and downstream of the return port; the second heating and cooling unit is arranged downstream of the tank and upstream of the supply port; and the switching valve is connected in a manner that allows switching between the circulation flow path between the tank supply port and the first heating and cooling unit and the new liquid supply flow path.

Images