Power element module

Abstract

Disclosed is a power element module provided with a substrate, a metal housing, and a plurality of power elements that are attached to the metal housing. The surfaces of the metal housing include a first surface which faces the substrate side, a second surface which faces a direction different from the first surface, and a third surface which faces a direction opposite to the direction in which the second surface faces. Each of the power elements includes a package that is attached to the second surface side or the third surface side of the metal housing, and a plurality of leads that extend from the package. Each of the plurality of leads extends along a straight line from the package to a space that is on the opposite side of the package with respect to the substrate. The power element module additionally comprises an insulating member that is provided between the substrate and the first surface of the metal housing.

Description

Power Element Module

[0001] The present disclosure relates to a power device module.

[0002] Patent Document 1 discloses an electronic device equipped with multiple power elements, in which the leads of each power element are bent 90 degrees and the tip side of the lead is inserted into a hole in the substrate, and an insulating cap is provided to cover the power elements to ensure an insulating distance between adjacent power elements.

[0003] In recent years, there has been a demand for smaller, more powerful, and higher voltage electric products. Among these, power devices require cooling, so they are attached to metal casings via insulating sheets. However, because a high potential difference occurs between the metal casing and the leads of the power elements, a certain amount of clearance must be maintained.

[0004] Japanese Patent Application Laid-Open No. 2022-010604

[0005] The insulating cap described in Patent Document 1 is configured to cover each power element individually. Therefore, when multiple power elements are attached to a metal housing, it is necessary to provide the same number of insulating caps as the power elements, which results in an increase in the number of parts.

[0006] In view of the above circumstances, at least one embodiment of the present disclosure aims to provide a power element module that can appropriately ensure the spatial distance between the leads of a power element attached to a metal casing and the metal casing with a small number of components.

[0007] In order to achieve the above object, a power element module according to at least one embodiment of the present disclosure is a power element module comprising: a substrate; a metal housing; and a plurality of power elements attached to the metal housing, wherein a surface of the metal housing includes a first surface facing a first direction, a second surface connected to the first surface and facing a direction different from the first direction, and a third surface connected to the first surface and facing the opposite side to the second surface, each of the power elements includes a package attached to the second surface side or the third surface side of the metal housing, and a plurality of leads extending from the package, each of the plurality of leads extending from the surface of the package facing the first direction side to a space on the opposite side of the package with respect to the substrate, and the power element module further comprises an insulating member provided on the first surface side of the metal housing.

[0008] According to at least one embodiment of the present disclosure, a power element module is provided that can appropriately ensure the spatial distance between the leads of a power element attached to a metal housing and the surface of the metal housing facing a first direction with a small number of components.

[0009] 1. A schematic perspective view of a power element module 2 according to one embodiment. A schematic perspective view showing a state in which a substrate 4 and some power elements 8, etc. have been removed from the power element module 2 shown in FIG. 1. A schematic perspective view of an insulating member 10 of the power element module 2 shown in FIG. 1. A schematic front view of the power element module 2 shown in FIG. 1. A cross-sectional view along A-A of the power element module 2 shown in FIG. 4. A cross-sectional view showing a modified example of the power element module 2 shown in FIG. 5. A schematic front view of a power element module 2 according to another embodiment. A schematic perspective view of the insulating member 10 shown in FIG. 7. A schematic view showing an example of the arrangement of the third-surface-side insulating portion 23 and the second-surface-side insulating portion 22 arranged vertically when the insulating member 10 shown in FIG. 3, etc. is viewed from the second-surface-side insulating portion 22 side along a direction perpendicular to the second surface 62 of the metal casing 6. A schematic view for explaining the thickness of the second protrusion 32 and the fourth protrusion 36 in the example of the arrangement of the second-surface-side insulating portion 22 and the third-surface-side insulating portion 23 shown in FIG. 9. A cross-sectional view showing another modified example of the power element module 2 shown in FIG. 5. FIG. 6 is a schematic cross-sectional view showing yet another modified example of the power element module 2 shown in FIG. 5 .

[0010] Several embodiments of the present disclosure will be described below with reference to the accompanying drawings. However, the dimensions, materials, shapes, relative arrangements, etc. of components described as embodiments or shown in the drawings are merely illustrative examples and are not intended to limit the scope of the invention. For example, expressions expressing relative or absolute arrangements, such as "in a certain direction," "along a certain direction," "parallel," "orthogonal," "center," "concentric," or "coaxial," not only strictly express such arrangements, but also express relative displacements with a tolerance or angle or distance to the extent that the same function is achieved. For example, expressions expressing the equality of things, such as "same," "equal," and "homogeneous," not only express strict equality, but also express tolerance or differences to the extent that the same function is achieved. For example, expressions expressing shapes such as a square or cylindrical shape not only express shapes such as a square or cylindrical shape in the strict geometric sense, but also express shapes including concave and convex portions, chamfered portions, etc., to the extent that the same effect is achieved. On the other hand, the expressions "comprise," "include," "have," "includes," or "have" of one element are not exclusive expressions that exclude the presence of other elements.

[0011] Fig. 1 is a schematic perspective view of a power element module 2 according to one embodiment. Fig. 2 is a schematic perspective view showing the power element module 2 shown in Fig. 1 with a substrate 4 and some power elements 8 and the like removed. Fig. 3 is a schematic perspective view of an insulating member 10 of the power element module 2 shown in Fig. 1. Fig. 4 is a schematic front view of the power element module 2 shown in Fig. 1. Fig. 5 is a cross-sectional view taken along line A-A of the power element module 2 shown in Fig. 4.

[0012] 1, a power element module 2 includes a substrate 4, a metal housing 6, a plurality of power elements 8, and an insulating member 10. The insulating member 10 functions as a power element mounting aid for mounting the plurality of power elements 8 to the metal housing.

[0013] The substrate 4 is a flat electronic circuit board. The metal housing 6 is made of a highly thermally conductive metal such as aluminum or copper. In the illustrated example, the metal housing 6 has a substantially rectangular parallelepiped shape, and as shown in Figures 1, 4, and 5, a surface 6s of the metal housing 6 includes a first surface 61, a second surface 62, a third surface 63, a fourth surface 64, a fifth surface 65, and a sixth surface 66.

[0014] In the illustrated example, the first surface 61 is a surface facing the substrate 4. In this specification, the direction in which the first surface 61 faces (a direction perpendicular to the first surface 61) is defined as a first direction H1. The second surface 62 is connected to each of the first surface 61, the fourth surface 64, the fifth surface 65, and the sixth surface 66, and faces in a direction different from each of the first surface 61, the fourth surface 64, the fifth surface 65, and the sixth surface 66. In the illustrated example, the second surface 62 is a plane perpendicular to each of the first surface 61, the fourth surface 64, the fifth surface 65, and the sixth surface 66. The third surface 63 is a surface facing the opposite side to the second surface 62, and is connected to each of the first surface 61, the fourth surface 64, the fifth surface 65, and the sixth surface 66. In the illustrated example, the third surface 63 is a plane that is parallel to the second surface 62 and perpendicular to each of the first surface 61 , the fourth surface 64 , the fifth surface 65 and the sixth surface 66 .

[0015] In the illustrated example, the fourth surface 64 is a surface facing away from the substrate 4 and is connected to each of the second surface 62, the third surface 63, the fifth surface 65, and the sixth surface 66. In the illustrated example, the fourth surface 64 is a plane that is parallel to the first surface 61 and perpendicular to each of the second surface 62, the third surface 63, the fifth surface 65, and the sixth surface 66. The fifth surface 65 is a surface that faces one side in the longitudinal direction of the metal casing 6 and is connected to each of the first surface 61, the second surface 62, the third surface 63, and the fourth surface 64. In the illustrated example, the fifth surface 65 is a plane that is parallel to the sixth surface 66 and perpendicular to each of the first surface 61, the second surface 62, the third surface 63, and the fourth surface 64. The sixth surface 66 is a surface facing the other side in the longitudinal direction of the metal housing 6, and is connected to each of the first surface 61, the second surface 62, the third surface 63, and the fourth surface 64. In the example shown in the figure, the sixth surface 66 is a plane that is parallel to the fifth surface 65 and perpendicular to each of the first surface 61, the second surface 62, the third surface 63, and the fourth surface 64.

[0016] 1 and 5 , the multiple power elements 8 include multiple power elements 8a attached to the second surface 62 side of the metal housing 6 and multiple power elements 8b attached to the third surface 63 side of the metal housing 6. The power elements 8a and 8b have the same structure, and each of the multiple power elements 8 (each of the multiple power elements 8a and each of the multiple power elements 8b) includes a substantially rectangular parallelepiped package 12 that houses a semiconductor element (not shown) and multiple leads 14 (four leads 14 in the illustrated example) extending from the package 12. Each of the multiple leads 14 of each power element 8 extends along a straight line from a surface 41 of the package 12 facing the first direction H1 to a space 15 on the opposite side of the package 12 with respect to the substrate 4. That is, each of the multiple leads 14 of each power element 8 extends in a straight line from the package 12, passes through a hole 16 (see FIG. 5 ) in the substrate 4, and extends along a straight line from the package 12 to a space 15 on the opposite side of the substrate 4 from the package 12 without bending. Each of the multiple leads 14 of each power element 8 is soldered to a corresponding hole 16 in the substrate 4.

[0017] 4 , the power elements 8a are arranged in a row along the second surface 62 of the metal casing 6. In the illustrated example, the power elements 8a are arranged in a row along the longitudinal direction of the metal casing 6 (a direction perpendicular to each of the fifth surface 65 and the sixth surface 66). Hereinafter, the direction in which the power elements 8a are arranged is defined as the "row direction." The package 12 of each of the power elements 8a is attached to the second surface 62 side of the metal casing 6. In the illustrated example, an insulating sheet 9a is interposed between each power element 8a and the second surface 62 of the metal casing 6.

[0018] 1 , for example, the multiple power elements 8b are arranged in a row along the third surface 63 of the metal casing 6. In the illustrated example, the multiple power elements 8b are arranged in a row along the longitudinal direction of the metal casing 6, and the direction in which the multiple power elements 8a are arranged coincides with the direction in which the multiple power elements 8b are arranged. That is, the multiple power elements 8b are arranged in a row, similar to the multiple power elements 8a. The packages 12 of each of the multiple power elements 8b are attached to the third surface 63 side of the metal casing 6. In the illustrated example, an insulating sheet 9b is interposed between each power element 8a and the second surface 62 of the metal casing 6.

[0019] 1 and 5 , the insulating member 10 is provided on the first surface 61 side of the metal housing 6 (between the substrate 4 and the first surface 61 of the metal housing 6 in the illustrated example). The insulating member 10 is made of, for example, a resin material. In the illustrated example, the cross-sectional shape of the insulating member 10 (more specifically, the cross-sectional shape perpendicular to the longitudinal direction of the insulating member 10) is U-shaped, and the insulating member 10 includes a first-surface-side insulating portion 21 provided along the first surface 61 of the metal housing 6, a second-surface-side insulating portion 22 provided along the second surface 62 of the metal housing 6, and a third-surface-side insulating portion 23 provided along the third surface 63 of the metal housing 6.

[0020] The first-surface-side insulating portion 21 is formed in a flat plate shape so as to cover the entire first surface 61 of the metal casing 6. For example, as shown in FIGS. 2 and 3 , the second-surface-side insulating portion 22 includes a plurality of first protrusions 31 and a plurality of second protrusions 32. The plurality of first protrusions 31 are spaced apart in the column direction and protrude from the first-surface-side insulating portion 21 in a second direction H2 (the opposite side of the substrate 4 in the illustrated example), which is the direction opposite to the first direction H1. The plurality of second protrusions 32 are spaced apart in the column direction and protrude from the first-surface-side insulating portion 21 in the second direction H2 (the opposite side of the substrate 4 in the illustrated example). In the illustrated example, each of the first protrusions 31 has a rectangular parallelepiped shape (flat plate shape) with the column direction as its longitudinal direction. For example, as shown in FIG. 2 , the dimension w1 of the first protrusion 31 in the column direction is equal to or greater than the dimension wp of the power element 8 in the column direction.

[0021] 3 , the first protrusions 31 and the second protrusions 32 are arranged alternately in the column direction, and the dimension h2 of the second protrusions 32 in the second direction H2 (direction perpendicular to the first surface 61) is greater than the dimension h1 of the first protrusions 31 in the second direction H2 (direction perpendicular to the first surface 61). Here, the dimension h1 of the first protrusions 31 in the second direction H2 is the length by which the first protrusions 31 protrude from the first-surface-side insulating portion 21 in the second direction H2, and the dimension h2 of the second protrusions 32 in the second direction H2 is the length by which the second protrusions 32 protrude from the first-surface-side insulating portion 21 in the second direction H2. In the illustrated example, each of the second protrusions 32 has a rectangular parallelepiped shape (flat plate shape), and as shown in FIG. 2, the column-direction dimension w2 of the second protrusion 32 located between two adjacent power elements 8a is smaller than the column-direction dimension w1 (see FIG. 2) of the first protrusion 31. The package 12 of each power element 8a is disposed between two adjacent second protrusions 32, and the two adjacent second protrusions 32 and the first protrusion 31 connecting the two second protrusions 32 form a slot 20a for positioning the package 12 of the power element 8a.

[0022] 4 and 5 , in each of the plurality of power elements 8a, the surface 41 facing the first direction H1 side of the package 12 (toward the substrate 4 in the illustrated example) is in contact with the first protrusion 31 opposite the surface 41, and the surface 42 facing one side in the column direction of the package 12 (the sixth surface 66 side) is in contact with the second protrusion 32 opposite the surface 42. In the illustrated example, in each of the plurality of power elements 8a, the surface 43 facing the other side in the column direction of the package 12 (the fifth surface 65 side) is in contact with the second protrusion 32 opposite the surface 43, but the surface 43 does not have to be in contact with the second protrusion 32 opposite the surface 43.

[0023] For example, as shown in Figure 3, each of the multiple second protrusions 32 located at both ends in the column direction has a through hole 33 formed in it, and two bolts 34 (see Figures 1 and 2) pass through the corresponding through holes 33 and screw into bolt holes (not shown) formed in the second surface 62 of the metal housing 6, thereby fixing the insulating member 10 to the metal housing 6.

[0024] 1 and 4 , the power element module 2 includes a plurality of fasteners 40 for fastening the plurality of power elements 8 a arranged along the second surface 62 of the metal casing 6 to the second surface 62, respectively. In the example shown, the plurality of fasteners 40 include a plurality of leaf springs 51 that urge the plurality of power elements 8 a against the second surface 62 of the metal casing 6, respectively, and a plurality of bolts 52 (screw members) that fasten the plurality of leaf springs 51 to the second surface 62 of the metal casing 6. A fastener 40 is provided for each power element 8 a, and each fastener 40 is composed of a leaf spring 51 and a bolt 52.

[0025] For example, as shown in FIG. 5 , in each of the plurality of leaf springs 51, the base end 53 of the leaf spring 51 is fixed to the second surface 62 of the metal housing 6 by a bolt 52, the tip end 54 of the leaf spring 51 urges the power element 8 a toward the second surface 62 of the metal housing 6, and a bent portion 55 is formed between the base end 53 and the tip end 54 of the leaf spring 51.

[0026] 3 , the third-surface-side insulating portion 23 includes a plurality of third protrusions 35 and a plurality of fourth protrusions 36. The third protrusions 35 are spaced apart in the column direction and protrude from the first-surface-side insulating portion 21 in the second direction H2 (the side opposite the substrate 4 in the illustrated example). The fourth protrusions 36 are spaced apart in the column direction and protrude from the first-surface-side insulating portion 21 in the second direction H2 (the side opposite the substrate 4 in the illustrated example). In the illustrated example, each of the third protrusions 35 has a rectangular parallelepiped shape (flat plate shape) with the column direction as its longitudinal direction, and the dimension of the third protrusion in the column direction is equal to or greater than the dimension of the power element 8 in the column direction.

[0027] 3 , the first protrusions 31 and the second protrusions 32 are alternately arranged in the column direction, and the dimension h4 of the fourth protrusions 36 in the second direction H2 (the direction perpendicular to the first surface 61) is greater than the dimension h3 of the third protrusions 35 in the second direction H2 (the direction perpendicular to the first surface 61). Here, the dimension h3 of the third protrusions 35 in the second direction H2 is the length by which the third protrusions 35 protrude from the first-surface-side insulating portion 21 in the second direction H2, and the dimension h4 of the fourth protrusions 36 in the second direction is the length by which the fourth protrusions 36 protrude from the first-surface-side insulating portion 21 in the second direction H2. In the illustrated example, each of the fourth protrusions 36 has a rectangular parallelepiped shape (flat plate shape), and the dimension w4 in the column direction of the fourth protrusion 36 located between two adjacent power elements 8 b is smaller than the dimension w3 of the third protrusions 35 in the column direction. The package 12 of each power element 8b is positioned between two adjacent fourth protrusions 36, and the two adjacent fourth protrusions 36 and the third protrusion 35 connecting the two fourth protrusions 36 form a slot 20b for positioning the package 12 of the power element 8b.

[0028] 5 , in each of the plurality of power elements 8 b, the surface 41 of the package 12 facing the first direction H1 (toward the substrate 4 in the illustrated example) is in contact with the third protrusion 35 opposing the surface 41, and the surface (not shown) of the package 12 facing one side in the column direction (the sixth surface 66 side) is in contact with the fourth protrusion 36 opposing the surface 41. In each of the plurality of power elements 8 b, the surface (not shown) facing the other side in the column direction (the fifth surface 65 side) of the package 12 may or may not be in contact with the fourth protrusion 36 opposing the surface.

[0029] 5 , the power element module 2 includes a plurality of fasteners 42 for fastening the plurality of power elements 8b arranged along the third surface 63 of the metal casing 6 to the third surface 63. In the example shown, the plurality of fasteners 42 include a plurality of leaf springs 56 that respectively bias the plurality of power elements 8b toward the third surface 63 of the metal casing 6, and a plurality of bolts 57 (screw members) that respectively fasten the plurality of leaf springs 56 to the third surface 63 of the metal casing 6. A fastener 42 is provided for each power element 8b, and each fastener 42 is composed of a leaf spring 56 and a bolt 57.

[0030] For example, as shown in FIG. 5 , in each of the plurality of leaf springs 56, a base end 58 of the leaf spring 56 is fixed to the third surface 63 of the metal housing 6 by a bolt 57, a tip end 59 of the leaf spring 56 urges the power element 8 b toward the third surface 63 of the metal housing 6, and a bent portion 60 is formed between the base end 58 and the tip end 59 of the leaf spring 56.

[0031] 1 to 5 , the effects of the power element module 2 will be described. According to the power element module 2, the insulating member 10 is provided on the first surface 61 side of the metal casing 6 facing the first direction H1. This makes it possible to appropriately ensure a spatial distance between the leads 14 extending from the surface 61 of the package 12 facing the first direction H1 and the first surface 61 of the metal casing 6 facing the first direction H1, thereby reducing the risk of a short circuit between the first surface 61 of the metal casing 6 and the leads 14. Furthermore, compared to the configuration described in Patent Document 1 (a configuration in which an insulating cap is provided to cover each power element), the spatial distance between the leads 14 of the power elements 8 attached to the metal casing 6 and the metal casing 6 can be appropriately ensured with a smaller number of components.

[0032] Furthermore, in each of the multiple power elements 8 a lined up along the second surface 62, the surface 41 of the package 12 facing the first direction H1 (toward the substrate 4 in the illustrated example) is brought into contact with the surface 38 (top surface of the first protrusion 31) of the first protrusion 31 facing the second direction H2 (away from the substrate 4 in the illustrated example), and the surface 42 of the package 12 facing one side in the column direction (the sixth surface 66 side) is brought into contact with the surface 39 of the second protrusion 32 facing the other side in the column direction (the fifth surface 65 side). This allows the power elements 8 a to be positioned relative to the metal casing 6 and the insulating member 10 in the first direction H1 (the direction perpendicular to the first surface 61) and the column direction. Furthermore, by biasing the power elements 8 a toward the second surface 62 by the leaf springs 51, the power elements 8 a can be positioned relative to the metal casing 6 and the insulating member 10 in the direction perpendicular to the second surface 62. Therefore, it becomes easy to pass the multiple leads 14 provided on each of the multiple power elements 8a arranged along the second surface 62 through the corresponding holes 16 in the substrate 4. For this reason, even if the power elements 8a are, for example, SiC-MOSFETs (when the number of leads 14 per power element 8a is four), it becomes easy to pass the multiple leads 14 provided on each of the multiple power elements 8a through the corresponding holes 16 in the substrate 4.

[0033] Furthermore, in each of the multiple power elements 8 b arranged along the third surface 63, the surface 41 of the package 12 facing the first direction H1 (toward the substrate 4 in the illustrated example) is brought into contact with the surface 70 (top surface of the third protrusion 35) of the third protrusion 35 facing the second direction H2 (away from the substrate 4 in the illustrated example), and the surface 42 of the package 12 facing one side in the column direction is brought into contact with the surface 39 of the fourth protrusion 36 facing the other side in the column direction. This allows the power elements 8 b to be positioned relative to the insulating member 10 in the first direction H1 (the direction perpendicular to the first surface 61) and the column direction. Furthermore, by biasing the power elements 8 b toward the third surface 63 with the leaf springs 56, the power elements 8 b can be positioned relative to the metal casing 6 and the insulating member 10 in the direction perpendicular to the third surface 63. This makes it easy to pass the multiple leads 14 of each of the multiple power elements 8 b arranged along the third surface 63 through the corresponding holes 16 in the substrate 4. Therefore, even if the power element 8b is, for example, a SiC-MOSFET (when the number of leads 14 per power element 8b is four), it is easy to pass the multiple leads 14 provided on each of the multiple power elements 8b through the corresponding holes 16 in the substrate 4.

[0034] Furthermore, by making the insulating member 10 out of a resin material, the insulating member 10 made of a resin material expands as the temperature of the power element 8 rises, thereby strengthening the adhesion between the power element 8 and the insulating member 10 and improving vibration resistance.

[0035] 6 , the power element module 2 further includes an electronic component 18 provided on the surface 5 of the substrate 4 facing the metal housing 6. In the example shown in FIG. 6 , the insulating member 10 is located between the electronic component 18 and the metal housing 6.

[0036] With this configuration, even if the distance between the substrate 4 and the package 12 of the power element 8 is reduced to reduce the parasitic inductance of the circuit wiring, an appropriate spatial distance can be maintained between the metal casing 6 and the electronic component 18 provided on the surface 5 of the substrate 4 facing the metal casing 6, so that the electronic component 18 can be mounted on the surface of the substrate 4 facing the metal casing 6 while reducing the risk of a short circuit between the electronic component 18 and the metal casing 6.

[0037] Fig. 7 is a schematic front view of a power element module 2 according to another embodiment. Fig. 8 is a schematic perspective view of the insulating member 10 shown in Fig. 7. Figs. 7 and 8 show modified examples of the insulating member 10.

[0038] 7 and 8 , the insulating member 10 may include a plurality of protrusions 19 (a plurality of bosses) that protrude toward the substrate 4. The plurality of protrusions 19 are spaced apart in the column direction and protrude from a substrate side surface 11 of the insulating member 10 that faces the substrate toward the substrate 4, thereby contacting the substrate 4. For example, as shown in FIG. 7 , the position of the protrusion 19 in the column direction may overlap with the position of any of the plurality of second protrusions 32 in the column direction. That is, each of the ranges s1 in the column direction in which the protrusions 19 are formed may overlap with at least a portion of the ranges s2 in the column direction in which the second protrusions 32 are formed.

[0039] 7 and 8 , by bringing the plurality of protrusions 19 of the insulating member 10 into contact with the surface 5 of the substrate 4 facing the metal casing 6, the metal casing 6 to which the plurality of power elements 8 are fixed can be positioned in the height direction (direction perpendicular to the surface 5 of the substrate 4) relative to the substrate 4. This allows the plurality of power elements 8 attached to the metal casing 6 to be arranged above the substrate 4, and the leads 14 of each of the plurality of power elements 8 to be soldered to the corresponding holes 16 of the substrate 4 by a flow soldering method (flow mounting), or the power elements 8 to be mounted by robot soldering or the like with the substrate 4 arranged above the metal casing 6. Furthermore, by providing the protrusions 19 at positions on the insulating member 10 relatively far from the power elements 8, thermal deformation of the protrusions 19 due to heat transfer from the power elements 8 to the protrusions 19 can be suppressed, and misalignment of the power elements 8 relative to the substrate 4 can be suppressed.

[0040] 9 is a schematic diagram showing an example of the arrangement of the third surface side insulating portion 23 and the second surface side insulating portion 22 arranged vertically when the insulating member 10 is viewed from the second surface side insulating portion 22 side in a direction perpendicular to the second surface 62 of the metal housing 6. Note that when the insulating member 10 is viewed from the second surface side insulating portion 22 side in a direction perpendicular to the second surface 62 of the metal housing 6, the third surface side insulating portion 23 is not actually visible, but for convenience of illustration, their arrangement is shown arranged vertically in FIG.

[0041] In the example shown in Figure 9, each of the multiple second protrusions 32 and each of the multiple fourth protrusions 36 are arranged so that they face each other in a one-to-one relationship, and when the insulating member 10 is viewed from the second surface side insulating portion 22 side along a direction perpendicular to the second surface 62 of the metal casing 6, the position of the second protrusion 32 located between two adjacent packages 12 in the column direction is offset to the left in the column direction (towards the fifth surface 65) with respect to the fourth protrusion 36 facing the second protrusion 32.

[0042] Here, we will explain the technical significance of shifting the position of the second protrusion 32 to the left in the column direction relative to the fourth protrusion 36 opposite the second protrusion 32 when viewing the insulating member 10 from the second surface side insulating portion 22 side along a direction perpendicular to the second surface 62 of the metal housing 6.

[0043] When positioning the power element 8a using the bolt 52 as described above, the bolt 52 is fastened to the metal casing 6 by rotating the bolt 52 rightward (clockwise). Therefore, when fastening the bolt 52 to the metal casing 6, a frictional force caused by the torque applied to the bolt 52 acts on the leaf spring 51 and the power element 8a. Therefore, when the insulating member 10 is viewed from the second-surface-side insulating portion 22 side along a direction perpendicular to the second surface 62 of the metal casing 6, the package 12 of the power element 8a is influenced by the torque applied to the bolt 52 located below the power element 8a and is pressed against the second protrusion 32 located to the right of the package 12 (on the side of the sixth surface 66).

[0044] On the other hand, when positioning the power element 8b using the bolt 57, the bolt 57 is fastened to the metal casing 6 by rotating the bolt 57 clockwise. Therefore, when fastening the bolt 57 to the metal casing 6, a frictional force caused by the torque applied to the bolt 57 acts on the leaf spring 56 and the power element 8b. Therefore, when the insulating member 10 is viewed from the second-surface-side insulating portion 22 side along a direction perpendicular to the second surface 62 of the metal casing 6, the package 12 of the power element 8b is influenced by the torque applied to the bolt 57 located below the power element 8b and is pressed against the fourth protrusion 36 to the left of the package 12 (on the fifth surface 65 side).

[0045] Therefore, due to the influence of the fastening torque of bolt 52 and the influence of the fastening torque of bolt 57, the package 12 of the power element 8a and the package 12 of the power element 8b are pressed in opposite directions in the longitudinal direction of the metal casing 6, and are positioned accordingly. However, when the insulating member 10 is viewed from the second surface side insulating portion 22 side along a direction perpendicular to the second surface 62 of the metal casing 6, the position of the second protrusion 32 is offset to the left in the column direction relative to the fourth protrusion 36 opposite the second protrusion 32, so that the column position of the package 12 of the power element 8a and the column position of the package 12 of the power element 8b opposite the package 12 can be aligned.

[0046] Fig. 10 is a schematic diagram for explaining the thickness of the second protrusion 32 and the thickness of the fourth protrusion 36 in an example of the arrangement of the second-surface-side insulating portion 22 and the third-surface-side insulating portion 23 shown in Fig. 9. Note that when the insulating member 10 is viewed from the second-surface-side insulating portion 22 side in a direction perpendicular to the second surface 62 of the metal casing 6, the third-surface-side insulating portion 23 is not actually visible, but for convenience, their arrangement is shown lined up one above the other in Fig. 10.

[0047] 10 , the thickness of an end 81 of the second protrusion 32 on the fifth surface 65 side in the column direction (the hatched portion of the second protrusion 32) may be greater than the thickness of an end 82 of the second protrusion 32 on the sixth surface 66 side in the column direction. In this case, the leaf spring 51 may be configured to come into contact with the end 81 of the second protrusion 32 on the fifth surface 65 side when the bolt 52 rotates. As a result, even if the leaf spring 51 rotates due to frictional force caused by the torque of the bolt 52, the leaf spring 51 can be brought into contact with the end 81 of the second protrusion 32, thereby stopping the rotation of the leaf spring 51.

[0048] Furthermore, the thickness of an end 83 of the fourth protrusion 36 on the sixth surface 66 side in the column direction (the hatched portion of the fourth protrusion 36) may be greater than the thickness of an end 84 of the fourth protrusion 36 on the fifth surface 65 side in the column direction. In this case, the leaf spring 56 may be configured to come into contact with the end 83 of the fourth protrusion 36 on the sixth surface 66 side when the bolt 57 rotates. As a result, even if the leaf spring 56 rotates due to frictional force caused by the torque of the bolt 57, the leaf spring 56 can be brought into contact with the end 83 of the fourth protrusion 36, thereby stopping the rotation of the leaf spring 56.

[0049] The present disclosure is not limited to the above-described embodiments, but also includes modifications to the above-described embodiments and appropriate combinations of these modifications.

[0050] For example, in the above-described embodiment, the power element 8 is attached to the metal housing 6 using the leaf springs 51, 56, but the means for attaching the power element 8 to the metal housing 6 is not limited to the leaf springs 51, 56. For example, the package may be fixed to the metal housing 6 by inserting a screw into a hole provided in the package. That is, the fastener for fixing the power element 8a to the second surface 62 of the metal housing 6 may be composed only of a screw, and the fastener for fixing the power element 8b to the third surface 63 of the metal housing 6 may be composed only of a screw.

[0051] Furthermore, although the protrusion 19 shown in FIG. 8 has a circular cross section, the cross section of the protrusion 19 is not limited to a circular shape, and may be any other shape, such as a square.

[0052] Furthermore, in the above-described embodiment, an example was given of an insulating member 10 in which the first surface side insulating portion 21, the second surface side insulating portion 22, and the third surface side insulating portion 23 are integrally molded, but the insulating member 10 may also be composed of multiple separable parts, and for example, a part including the second surface side insulating portion 22 and a part including the third surface side insulating portion 23 may be composed as separate parts.

[0053] In the above-described embodiment, the multiple power elements 8 a provided on the second surface 62 side are arranged in a row along the longitudinal direction of the metal casing 6, but the positions of the multiple power elements 8 a in the first direction H1 do not need to be strictly aligned, and the positions of the multiple power elements 8 b in the first direction H1 do not need to be strictly aligned. Furthermore, the dimension w2 of each of the multiple second protrusions 32 in the column direction does not need to be the same, and may be different for each second protrusion 32. Furthermore, the dimension w4 of each of the multiple fourth protrusions 36 in the column direction does not need to be the same, and may be different for each fourth protrusion 36.

[0054] Furthermore, in the above-described embodiment, each of the multiple leads 14 extends along a single straight line from the surface 41 of the package 12 facing the first direction H1 to the space 15 on the opposite side of the package 12 relative to the substrate 4, but in some embodiments, one or more of the multiple leads 14 may be curved, for example, as shown in Figures 11 and 12.

[0055] In the exemplary embodiment shown in FIG. 11, one or more of the leads 14 are bent at two locations to form a crank shape.

[0056] In the exemplary embodiment shown in FIG. 12 , one or more of the leads 14 are bent 90 degrees at one location. In some embodiments, as shown in FIG. 12 , the substrate 4 may be disposed so as to face the second surface 62 or the third surface 63 (the second surface 62 in the example shown in FIG. 12 ) of the metal casing 6. Even in this case, the insulating member 10 can appropriately ensure the spatial distance between the leads 14 extending from the surface 41 of the package 12 facing the first direction H1 and the first surface 61 of the metal casing 6 facing the first direction H1, thereby reducing the risk of a short circuit between the first surface 61 of the metal casing 6 and the leads 14. Furthermore, compared to the configuration described in Patent Document 1 (a configuration in which an insulating cap is provided to cover each power element), the spatial distance between the leads 14 of the power elements 8 attached to the metal casing 6 and the metal casing 6 can be appropriately ensured with a smaller number of components.

[0057] The contents described in each of the above embodiments can be understood, for example, as follows.

[0058] [1] A power element module (e.g., the above-described power element module 2) according to at least one embodiment of the present disclosure is a power element module including: a substrate (e.g., the above-described substrate 4); a metal housing (e.g., the above-described metal housing 6); and a plurality of power elements (e.g., the above-described plurality of power elements 8) attached to the metal housing; wherein a surface of the metal housing includes a first surface (e.g., the above-described first surface 61) facing a first direction, a second surface (e.g., the above-described second surface 62) connected to the first surface and facing a direction different from the first direction, and a third surface (e.g., the above-described third surface 63) connected to the first surface and facing an opposite side to the second surface; each of the power elements includes a package (e.g., the above-described package 12) attached to the second surface or the third surface of the metal housing and a plurality of leads (e.g., the above-described plurality of leads 14) extending from the package; and each of the plurality of leads extends from a surface of the package facing the first direction to a space (e.g., the above-described space 15) on the opposite side of the package with respect to the substrate; The power element module further includes an insulating member (for example, the insulating member 10 described above) provided on the first surface side of the metal housing.

[0059] According to the power element module described in [1] above, since an insulating member is provided on the first surface side of the metal casing facing the first direction, it is possible to appropriately ensure a spatial distance between the leads extending from the surface of the package facing the first direction and the first surface of the metal casing facing the first direction, thereby reducing the risk of a short circuit between the first surface of the metal casing and the leads. Furthermore, compared to the configuration described in Patent Document 1 (a configuration in which an insulating cap is provided to cover each power element), it is possible to appropriately ensure a spatial distance between the metal casing and the leads of the power elements attached to the metal casing with a smaller number of parts.

[0060] [2] In some embodiments, in the power element module described in [1] above, the plurality of power elements includes a plurality of the power elements (e.g., the plurality of power elements 8a described above) arranged along the second surface, the insulating member includes a first surface side insulating portion (e.g., the first surface side insulating portion 21 described above) arranged along the first surface and a second surface side insulating portion (e.g., the second surface side insulating portion 22 described above) arranged along the second surface, and the package of each of the plurality of the power elements arranged along the second surface is in contact with the second surface side insulating portion.

[0061] According to the power element module described in [2] above, the packages of the multiple power elements lined up along the second surface can be positioned relative to the second surface side insulating portion of the insulating member, making it possible to easily pass the multiple leads provided on each of the multiple power elements through corresponding holes in the substrate.

[0062] [3] In some embodiments, in the power element module described in [2] above, the plurality of power elements includes a plurality of the power elements (e.g., the plurality of power elements 8b described above) arranged along the third surface, the insulating member includes a third surface side insulating portion (e.g., the third surface side insulating portion 23 described above) provided along the third surface, and the package of each of the power elements arranged along the third surface is in contact with the third surface side insulating portion.

[0063] According to the power element module described in [3] above, the packages of the power elements arranged along the third surface can be positioned relative to the third surface-side insulating portion of the insulating member, which makes it possible to easily pass the leads of all the power elements provided on the second surface side and the third surface side through the corresponding holes in the substrate.

[0064] [4] In some embodiments, in the power element module described in [2] or [3] above, when the direction in which the power elements are lined up along the second surface is defined as a column direction, the second surface side insulating portion includes: a plurality of first protrusions (e.g., the above-mentioned plurality of first protrusions 31) that are spaced apart in the column direction and protrude from the first surface side insulating portion in a second direction opposite to the first direction; and a plurality of second protrusions (e.g., the above-mentioned second protrusions 32) that are spaced apart in the column direction and protrude from the first surface side insulating portion in the second direction, wherein the dimension of the second protrusions in the second direction (e.g., the above-mentioned dimension h2) is greater than the dimension of the first protrusions in the second direction (e.g., the above-mentioned dimension h1), and the first protrusions and the second protrusions are arranged alternately in the column direction.

[0065] According to the power element module described in [4] above, for each of the plurality of power elements arranged along the second surface, the package can be abutted against the first protrusion and the second protrusion, respectively, thereby positioning the power element relative to the insulating member in at least two directions, which makes it possible to easily pass the leads of each of the plurality of power elements arranged along the second surface through the corresponding holes in the substrate.

[0066] [5] In some embodiments, in the power element module described in [4] above, in each of the plurality of power elements arranged along the second surface, the surface of the package facing the first direction (e.g., the above-mentioned surface 41) contacts the first protrusion, and the surface of the package facing one side in the column direction (e.g., the above-mentioned surface 42) contacts the second protrusion.

[0067] According to the power element module described in [5] above, in each of the plurality of power elements arranged along the second surface, the surface of the package facing the first direction is brought into contact with the surface of the first protrusion facing away from the substrate (the top surface of the first protrusion), and the surface of the package facing one side in the row direction is brought into contact with the surface of the second protrusion facing the other side in the row direction, thereby making it possible to position the power element with respect to the insulating member in at least two directions. This makes it possible to easily pass the plurality of leads provided on each of the plurality of power elements arranged along the second surface through the corresponding holes in the substrate.

[0068] [6] In some embodiments, in the power element module described in [5] above, the plurality of power elements include a plurality of the power elements lined up in the column direction along the third surface, the insulating member includes a third surface side insulating portion (e.g., the above-mentioned third surface side insulating portion 23) provided along the third surface, the third surface side insulating portion includes: a plurality of third protrusions (e.g., the above-mentioned third protrusions 35) provided at intervals in the column direction and protruding from the first surface side insulating portion in the second direction, and a plurality of fourth protrusions (e.g., the above-mentioned fourth protrusions 36) provided at intervals in the column direction and protruding from the first surface side insulating portion in the second direction, the dimension of the fourth protrusions in the second direction (e.g., the above-mentioned dimension h4) being larger than the dimension of the third protrusions in the second direction (e.g., the above-mentioned dimension h3), and the third protrusions and the fourth protrusions are provided alternately in the column direction.

[0069] According to the power element module described in [6] above, for each of the plurality of power elements arranged in the column direction along the third surface, the package can be abutted against the third protrusion and the fourth protrusion, respectively, thereby positioning the power element relative to the insulating member in at least two directions, which makes it possible to easily pass the leads of each of the plurality of power elements arranged along the third surface through corresponding holes in the substrate.

[0070] [7] In some embodiments, in the power element module described in any of [1] to [6] above, in each of the plurality of power elements arranged along the third surface, the surface of the package facing the first direction (e.g., the above-mentioned surface 41) contacts the third protrusion, and the surface of the package facing one side in the column direction (e.g., the above-mentioned surface 42) contacts the fourth protrusion.

[0071] According to the power element module described in [7] above, for each of the plurality of power elements arranged along the third surface, the surface of the package facing the substrate is brought into contact with the surface of the third protrusion facing away from the substrate (the top surface of the third protrusion), and the surface of the package facing one side in the row direction is brought into contact with the surface of the fourth protrusion facing the other side in the row direction, thereby making it possible to position the power element with respect to the insulating member in at least two directions. This makes it possible to easily pass the plurality of leads provided on each of the plurality of power elements arranged along the third surface through the corresponding holes in the substrate.

[0072] [8] In some embodiments, the power element module described in [7] above further includes a plurality of first fasteners (e.g., the above-mentioned plurality of leaf springs 51 and the above-mentioned plurality of bolts 52) for fixing the plurality of power elements arranged along the second surface to the second surface, respectively, and a plurality of second fasteners (e.g., the above-mentioned plurality of leaf springs 56 and the above-mentioned plurality of bolts 57) for fixing the plurality of power elements arranged along the third surface to the third surface, respectively.

[0073] According to the power element module described in [8] above, for a plurality of power elements arranged in a column direction along the second surface and a plurality of power elements arranged in a column direction along the third surface, it is possible to suppress misalignment of the power elements relative to the metal casing with a simple configuration.

[0074] [9] In some embodiments, in the power element module described in [8] above, the plurality of first fasteners include a plurality of first leaf springs (e.g., the above-mentioned plurality of leaf springs 51) that urge the plurality of power elements lined up along the second surface toward the second surface, respectively, and a plurality of first screw members (e.g., the above-mentioned plurality of bolts 52) that fasten the plurality of first leaf springs to the second surface side of the metal casing, respectively; and the plurality of second fasteners include a plurality of second leaf springs (e.g., the above-mentioned plurality of leaf springs 56) that urge the plurality of power elements lined up along the third surface toward the third surface, respectively, and a plurality of second screw members (e.g., the above-mentioned plurality of bolts 57) that fasten the plurality of second leaf springs to the third surface side of the metal casing, respectively.

[0075] According to the power element module described in [9] above, for the plurality of power elements arranged along the second surface and the plurality of power elements arranged along the third surface, it is possible to suppress misalignment of the power elements with respect to the metal casing with a simple configuration. Note that each of the first screw member and the second screw member may be a bolt or a screw other than a bolt.

[0076]

[10] In some embodiments, in the power element module described in [9] above, each of the plurality of second protrusions and each of the plurality of fourth protrusions are arranged to face each other in a one-to-one relationship, and when the insulating member is viewed from the second surface side insulating portion along a direction perpendicular to the second surface of the metal housing, the position of the second protrusion located between two adjacent packages in the column direction is offset to the left in the column direction with respect to the fourth protrusion facing the second protrusion.

[0077] According to the power element module described in

[10] above, the power element package on the second surface side and the power element package on the third surface side are pressed in opposite directions in the column direction and positioned due to the influence of the fastening torque of the first bolt and the influence of the fastening torque of the second bolt, but when the insulating member is viewed from the second surface side insulating portion along a direction perpendicular to the second surface of the metal housing, the position of the second protrusion is offset to the left in the column direction relative to the fourth protrusion opposite the second protrusion, so that the column position of the power element package on the second surface side can be aligned with the column position of the package of the power element (power element on the third surface side) opposite to that package.

[0078]

[11] In some embodiments, in the power element module according to any one of the above [1] to

[10] , the insulating member is made of a resin material.

[0079] According to the power element module described in

[11] above, the insulating member made of a resin material expands as the temperature of the power element rises, thereby strengthening the adhesion between the power element and the insulating member 10 and improving vibration resistance.

[0080]

[12] In some embodiments, the power element module according to any one of [1] to

[11] above further comprises an electronic component (e.g., the above-mentioned electronic component 18) provided on a surface of the substrate facing the metal housing, and the insulating member is located between the electronic component and the metal housing.

[0081] According to the power element module described in

[12] above, an appropriate spatial distance can be ensured between the metal casing and the electronic components provided on the surface of the substrate facing the metal casing, so that the electronic components can be mounted on the surface of the substrate facing the metal casing while reducing the risk of short-circuiting between the electronic components and the metal casing.

[0082]

[13] In some embodiments, in the power element module described in any of [1] to

[12] above, the insulating member includes a substrate side surface facing the substrate (e.g., the above-mentioned substrate side surface 11), and a protrusion portion protruding from the substrate side surface toward the substrate side and contacting the substrate (e.g., the above-mentioned protrusion portion 19).

[0083] According to the power element module described in

[13] above, the metal casing and the insulating member can be positioned relative to the substrate by the protrusions coming into contact with the substrate, which allows the power elements attached to the metal casing to be mounted on the substrate by flow mounting, or the power elements to be mounted by robot soldering or the like with the substrate placed on the metal casing.

[0084]

[14] In some embodiments, in the power element module described in [4] above, the insulating member includes a substrate side surface facing the substrate (e.g., the above-mentioned substrate side surface 11), and a protrusion portion (e.g., the above-mentioned protrusion portion 19) protruding from the substrate side surface toward the substrate side and contacting the substrate, and the position of the protrusion portion in the column direction overlaps with the position of any one of the plurality of second protrusion portions in the column direction.

[0085] According to the power element module described in

[14] above, by providing the protrusions at a position on the insulating member relatively far from the power elements, it is possible to suppress thermal deformation of the protrusions due to heat transfer from the power elements to the protrusions, and to suppress misalignment of each power element relative to the substrate.

[0086] 2 Power element module 4 Substrate 5, 38, 39, 41, 42, 43, 70 Surface 6 Metal housing 6s Surface 8, 8a, 8b Power element 9a, 9b Insulating sheet 10 Insulating member 11 Substrate side surface 12 Package 14 Lead 15 Space 16 Hole 18 Electronic component 19 Protrusion 20a, 20b Slot 21 First surface side insulating portion 22 Second surface side insulating portion 23 Third surface side insulating portion 31 First protrusion 32 Second protrusion 33 Through hole 34, 52, 57 Bolt 35 Third protrusion 36 Fourth protrusion 40, 42 Fixing device 51, 56 Leaf spring 53, 58 Base end portion 54, 59 Tip portion 55, 60 Bent portion 61 First surface 62 Second surface 63 Third surface 64 Fourth surface 65 Fifth surface 66 Sixth surface 81, 82, 83, 84 End portion

Claims

1. A power element module comprising a substrate, a metal casing, and a plurality of power elements attached to the metal casing, wherein the surface of the metal casing includes a first surface facing a first direction, a second surface connected to the first surface and facing a direction different from the first direction, and a third surface connected to the first surface and facing the opposite side to the second surface, each of the power elements includes a package attached to the second surface side or the third surface side of the metal casing, and a plurality of leads extending from the package, each of the plurality of leads extending from the surface of the package facing the first direction side to a space on the opposite side of the substrate from the package, and the power element module further comprises an insulating member provided on the first surface side of the metal casing.

2. The power element module according to claim 1, wherein the plurality of power elements includes a plurality of the power elements lined up along the second surface, the insulating member includes a first surface side insulating portion provided along the first surface and a second surface side insulating portion provided along the second surface, and the package of each of the plurality of the power elements lined up along the second surface is in contact with the second surface side insulating portion.

3. The power element module according to claim 2, wherein the plurality of power elements includes a plurality of power elements aligned along the third surface, the insulating member includes a third surface side insulating portion provided along the third surface, and the package of each of the plurality of power elements aligned along the third surface is in contact with the third surface side insulating portion.

4. A power element module as described in claim 2 or 3, wherein, for the plurality of power elements lined up along the second surface, the direction in which the power elements are lined up is defined as a column direction, the second surface side insulating portion includes: a plurality of first protrusions that are spaced apart in the column direction and protrude from the first surface side insulating portion in a second direction opposite to the first direction; and a plurality of second protrusions that are spaced apart in the column direction and protrude from the first surface side insulating portion in the second direction, wherein the dimension of the second protrusions in the second direction is larger than the dimension of the first protrusions in the second direction, and the first protrusions and the second protrusions are arranged alternately in the column direction.

5. A power element module as described in claim 4, wherein, for each of the plurality of power elements arranged along the second surface, the surface of the package facing the first direction contacts the first protrusion, and the surface of the package facing one side in the column direction contacts the second protrusion.

6. A power element module according to claim 5, wherein the plurality of power elements include a plurality of the power elements lined up in the column direction along the third surface, the insulating member includes a third surface side insulating portion provided along the third surface, the third surface side insulating portion including: a plurality of third protrusions provided at intervals in the column direction and protruding from the first surface side insulating portion in the second direction; and a plurality of fourth protrusions provided at intervals in the column direction and protruding from the first surface side insulating portion in the second direction, wherein a dimension of the fourth protrusions in the second direction is larger than a dimension of the third protrusions in the second direction, and the third protrusions and the fourth protrusions are provided alternately in the column direction.

7. A power element module as described in claim 6, wherein, in each of the plurality of power elements arranged along the third surface, the surface of the package facing the first direction contacts the third protrusion, and the surface of the package facing one side in the column direction contacts the fourth protrusion.

8. The power element module according to claim 7, further comprising: a plurality of first fasteners for respectively fixing the plurality of power elements aligned along the second surface to the second surface; and a plurality of second fasteners for respectively fixing the plurality of power elements aligned along the third surface to the third surface.

9. The power element module described in claim 8, wherein the plurality of first fixing devices include a plurality of first leaf springs that urge the plurality of power elements lined up along the second surface toward the second surface, respectively, and a plurality of first screw members that fasten the plurality of first leaf springs to the second surface side of the metal casing, and the plurality of second fixing devices include a plurality of second leaf springs that urge the plurality of power elements lined up along the third surface toward the third surface, respectively, and a plurality of second screw members that fasten the plurality of second leaf springs to the third surface side of the metal casing, respectively.

10. A power element module as described in claim 9, wherein each of the plurality of second protrusions and each of the plurality of fourth protrusions are arranged to face each other in a one-to-one relationship, and when the insulating member is viewed from the second surface side insulating portion along a direction perpendicular to the second surface of the metal casing, the position of the second protrusion located between two of the packages adjacent in the column direction is offset to the left in the column direction with respect to the fourth protrusion facing the second protrusion.

11. The power element module according to claim 1, wherein the insulating member is made of a resin material.

12. The power element module according to claim 1, further comprising an electronic component provided on a surface of the substrate facing the metal case, and the insulating member is positioned between the electronic component and the metal case.

13. The power element module according to claim 1, wherein the insulating member includes: a substrate side surface facing the substrate; and a protrusion protruding from the substrate side surface toward the substrate and in contact with the substrate.

14. A power element module as described in claim 4, wherein the insulating member includes a substrate side surface facing the substrate side, and a protrusion portion that protrudes from the substrate side surface toward the substrate side and contacts the substrate, and the position of the protrusion portion in the column direction overlaps with the position of any one of the plurality of second protrusion portions in the column direction.

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