X-ray fluorescence spectrometer

WO2026048704A8 Publication Date: 2026-06-18RIGAKU CORP
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
RIGAKU CORP
Filing Date
2025-08-22
Publication Date
2026-06-18

AI Technical Summary

⚠Technical Problem

Conventional X-ray fluorescence analyzers using nitrogen as an inert gas suffer from reduced analysis accuracy and instability due to nitrogen's lower thermal conductivity, leading to density fluctuations during sample analysis, particularly for light elements with low fluorescent X-ray energy.

⚗Method used

The analyzer includes a control system that stabilizes the nitrogen atmosphere by purging the sample and irradiation chambers with nitrogen and allowing a standby mode for light elements, ensuring density stability before measurement, and a non-standby mode for heavy elements to maximize sample throughput.

🎯Benefits of technology

This approach achieves accurate analysis of light elements by stabilizing nitrogen density and allows high sample throughput for heavy elements, enhancing overall analysis efficiency and accuracy in nitrogen atmospheres.

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Abstract

Provided is an x-ray fluorescence spectrometer. When a partition wall (10) has been closed, a sample chamber (1) and an irradiation chamber (2) are substituted with nitrogen, and a spectral chamber (3) is evacuated. A sample (4) is placed in the sample chamber (1) after the substitution is complete, and in response to an instruction from an operator, measurement is performed in a wait mode in which the sample (4) is irradiated with primary x-rays (6) and measurement begins after a prescribed amount of time has passed or a non-wait mode in which the sample (4) is irradiated with the primary x-rays (6) and measurement begins immediately. The prescribed amount of time of the wait mode is the amount of time, found in advance, until the ratio of the measurement intensity to a final arrival measurement intensity for x-ray fluorescence (8) of a prescribed wavelength becomes equal to or greater than a prescribed numerical value or is the amount of time until the ratio of the change in a preliminary measurement intensity to the preliminary measurement intensity for x-ray fluorescence (8) of a prescribed wavelength during preliminary measurement immediately after the sample (4) is irradiated with the primary x-rays (6) becomes equal to or less than a prescribed numerical value.
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