gyroscope

Abstract

A gyroscope (101) is provided with a gyro element (100) including: a vibrator (20); primary drive wiring (PDL) corresponding to a primary drive electrode (PD); primary detection wiring (PPL) corresponding to a primary detection electrode (PPO); secondary detection wiring (SPL) corresponding to a secondary detection electrode (SPO); and secondary drive wiring (SDL) corresponding to a secondary drive electrode (SD). The pattern of the primary drive wiring and the pattern of the secondary drive wiring are formed so as to be line symmetric with respect to a first center line (C1), and the pattern of the primary detection wiring and the pattern of the secondary detection wiring are formed so as to be line symmetric with respect to the first center line or a second center line (C2).

Description

Gyroscope

[0001] This invention relates to a gyroscope having a vibration-type gyro element.

[0002] Conventionally, a gyroscope having a vibration-type gyro element is known. Such a gyroscope is disclosed, for example, in Japanese Patent Application Laid-Open No. 2009-115559.

[0003] Japanese Patent Application Laid-Open No. 2009-115559 discloses a gyroscope having a vibration-type gyro element including a vibrator and electrodes. The vibration-type gyro element includes a ring-shaped element portion (vibrator) and electrodes. A plurality of electrodes are arranged at predetermined angular intervals along a direction around the center of the element portion. The plurality of electrodes include a primary drive electrode that generates a primary vibration in the element portion, a primary detection electrode that detects the primary vibration, a secondary detection electrode that detects the secondary vibration of the element portion, and a secondary drive electrode that cancels the secondary vibration. In the gyroscope, the angular velocity is calculated based on an AC voltage applied to the secondary drive electrode to cancel the secondary vibration.

[0004] Further, in a conventional gyroscope as described in Japanese Patent Application Laid-Open No. 2009-115559, a bias component is included in the angular velocity detected by the gyroscope. The bias component, also called zero-point output or offset, is generated by various factors such as the asymmetry of the vibration-type gyro element and the characteristics of the circuit. Therefore, in the gyroscope described in Japanese Patent Application Laid-Open No. 2009-115559, the functions of the primary drive electrode and the secondary drive electrode are interchanged, and the functions of the primary detection electrode and the secondary detection electrode are interchanged, and the output signals of the gyroscope before and after the electrode interchange are differentiated to cancel the bias component.

[0005] Japanese Patent Application Laid-Open No. 2009-115559

[0006] However, in conventional gyroscopes such as those described in the above-mentioned Japanese Patent Publication No. 2009-115559, even if the output signals of the gyroscope before and after switching the functions of the electrodes (electrical reversal control) are subtracted, a bias component may remain. Specifically, in a gyroscope such as that described in the above-mentioned Japanese Patent Publication No. 2009-115559, in which the functions of the primary drive electrode and the secondary drive electrode can be swapped, and the functions of the primary detection electrode and the secondary detection electrode can be swapped, if the arrangement and shape of the wiring corresponding to each electrode differ before and after electrical reversal control, even if the electrodes have the same function before and after electrical reversal control, the bias component due to electrical crosstalk (the inflow of unwanted electrical signals due to electrical coupling) will also differ. In this case, even if the output signals before and after electrical reversal control are subtracted, the bias component due to electrical crosstalk remains because the conditions for electrical crosstalk and the effects of the generated electrical crosstalk differ before and after electrical reversal control, and the accuracy of angular velocity detection decreases. In this case, the accuracy of angular velocity detection by the gyroscope decreases. Therefore, in configurations that perform electrical reversal control, in order to suppress a decrease in the accuracy of angular velocity detection, it is desirable to sufficiently cancel out the effects of electrical crosstalk that occurs by making the conditions of electrical crosstalk before and after electrical reversal control equal.

[0007] This invention was made to solve the above-mentioned problems, and one objective of this invention is to provide a gyroscope that can sufficiently cancel out the effects of electrical crosstalk that occurs in a configuration that performs electrical reversal control, by making the conditions of electrical crosstalk before and after electrical reversal control equal, in order to suppress a decrease in the accuracy of detecting angular velocity.

[0008] To achieve the above objective, a gyroscope according to one aspect of this invention comprises a vibrating gyro element including a substrate, an oscillator, a plurality of electrodes arranged on the oscillator and used for detecting the angular velocity applied to the oscillator, a plurality of wirings arranged on the substrate and provided corresponding to the plurality of electrodes, and a control unit that performs control for detecting the angular velocity applied to the oscillator, wherein the plurality of electrodes include a primary drive electrode that excites a primary vibration in the oscillator, a primary detection electrode that detects the primary vibration, a secondary detection electrode that detects the secondary vibration of the oscillator caused by the angular velocity, and a secondary drive electrode that drives the oscillator to cancel out the secondary vibration, and the plurality of wirings include a primary drive wiring provided corresponding to the primary drive electrode, a primary detection wiring provided corresponding to the primary detection electrode, and a secondary detection wiring provided corresponding to the secondary detection electrode. The control unit includes a primary drive electrode and secondary drive wiring provided in correspondence with the secondary drive electrode, and performs electrical reversal control to swap the functions of the primary drive electrode and primary drive wiring with the functions of the secondary drive electrode and secondary drive wiring, and swap the functions of the primary detection electrode and primary detection wiring with the functions of the secondary detection electrode and secondary detection wiring, and is configured to detect angular velocity based on the difference in the output signal to the secondary drive electrode before and after the electrical reversal control, the pattern of the primary drive wiring and the pattern of the secondary drive wiring are symmetrical with respect to a predetermined first center line, and the pattern of the primary detection wiring and the pattern of the secondary detection wiring are symmetrical with respect to the first center line, or are symmetrical with respect to a second center line in which at least one of the position and direction of extension is different from the first center line. In this specification, line symmetry has a broad meaning and includes not only cases where the wiring pattern is perfectly symmetrical, but also arrangements where the wiring pattern is approximately symmetrical.

[0009] In a gyroscope according to one aspect of this invention, as described above, the pattern of primary drive wiring provided corresponding to the primary drive electrode and the pattern of secondary drive wiring provided corresponding to the secondary drive electrode are symmetrical with respect to a predetermined first center line, and the pattern of primary detection wiring provided corresponding to the primary detection electrode and the pattern of secondary detection wiring provided corresponding to the secondary detection electrode are symmetrical with respect to the first center line, or symmetrical with respect to a second center line in which at least one of the position and direction of extension is different from the first center line. This makes it possible to arrange the wiring corresponding to the primary drive electrode and the wiring corresponding to the secondary drive electrode in a symmetrical shape. Furthermore, it is possible to arrange the wiring corresponding to the primary detection electrode and the wiring corresponding to the secondary detection electrode in a symmetrical shape. Therefore, since the arrangement and shape of the wiring corresponding to electrodes with the same function, as well as the arrangement and shape of the wiring corresponding to the surrounding electrodes, are symmetrical before and after electrical reversal control, the relative relationship between the arrangement and shape of the wiring corresponding to each electrode and the arrangement and shape of the wiring corresponding to the surrounding electrodes becomes equal before and after electrical reversal control, and the bias component due to electrical crosstalk also becomes the same. As a result, in a configuration that performs electrical reversal control, the effects of the generated electrical crosstalk can be sufficiently canceled out by making the electrical crosstalk conditions equal before and after the electrical reversal control, thereby suppressing a decrease in the accuracy of angular velocity detection.

[0010] In the gyroscope according to the first aspect described above, preferably the oscillator is annular, flat, or dome-shaped, and the oscillator has a vibration mode of cosNθ (where N is a natural number of 2 or more) centered at a predetermined center point, and the first center line, the second center line, and the extension of the predetermined center point intersect at a certain point. With this configuration, in a configuration in which multiple electrodes for each function are arranged on the oscillator to excite, detect, and cancel the vibration of cosNθ, multiple wirings corresponding to the multiple electrodes for each function can be arranged around the oscillator in a space-saving manner while maintaining line symmetry between the patterns of wiring to be swapped.

[0011] In the gyroscope according to the first aspect described above, preferably, there are multiple primary drive wirings, primary detection wirings, secondary detection wirings, and secondary drive wirings, and there are multiple primary drive electrodes, primary detection electrodes, secondary detection electrodes, and secondary drive electrodes, and the multiple primary drive wirings connect multiple primary drive electrodes in series, the multiple primary detection wirings connect multiple primary detection electrodes in series, the multiple secondary detection wirings connect multiple secondary detection electrodes in series, and the multiple primary drive electrodes, multiple primary detection electrodes, multiple secondary detection electrodes, multiple secondary drive electrodes, primary drive wirings, primary detection wirings, secondary detection wirings, and secondary drive wirings each have a connection order in the circuit, and are interchangeable in electrical reversal control, and the wiring patterns that are symmetrical with respect to the first center line or the second center line have the same connection order in the circuit. With this configuration, the connection order of the wiring to be swapped and the surrounding wiring in the circuit does not change before and after electrical reversal control. Therefore, since the connection order in the circuit, which is one of the factors that affects electrical crosstalk in each wiring, does not change before and after electrical reversal control, the effects of electrical crosstalk can be more effectively canceled out.

[0012] In this case, preferably, the electrodes that are swapped in the electrical reversal control have the same connection order in the circuit. With this configuration, the connection order of the electrodes that are swapped in the circuit does not change before and after the electrical reversal control. Therefore, the connection order in the circuit, which is one of the factors that affects the electrical crosstalk that occurs in each electrode, does not change before and after the electrical reversal control, and the effects of electrical crosstalk can be more effectively canceled out.

[0013] In the above-described electrical reversal control, the wiring patterns that are subject to swapping and are symmetrical with respect to the first or second centerline are configured such that the connection order in the circuit is the same for all of them. Preferably, the multiple wirings have pads provided on the substrate for connecting them with bonding wires, and the positions of the multiple pads are symmetrical with respect to the first or second centerline. With this configuration, the arrangement of the multiple bonding wires can be made symmetrical. As a result, the conditions for electrical crosstalk occurring in the bonding wires, and the effects of electrical crosstalk occurring in the bonding wires, can be made almost the same before and after the electrical reversal control. Consequently, in a configuration that performs electrical reversal control, the effects of electrical crosstalk caused by the bonding wires can be canceled out.

[0014] In the gyroscope according to the first aspect described above, preferably, a wiring connection section is provided between the gyro element and the control unit, comprising: a plurality of primary drive wiring connection sections connected to the primary drive wiring and the control unit and performing input / output to the primary drive electrode; a plurality of primary detection wiring connection sections connected to the primary detection wiring and the control unit and performing input / output to the primary detection electrode; a plurality of secondary detection wiring connection sections connected to the secondary detection wiring and the control unit and performing input / output to the secondary detection electrode; and a plurality of secondary drive wiring connection sections connected to the secondary drive wiring and the control unit and performing input / output to the secondary drive electrode, wherein the gyroscope comprises a plurality of primary drive wiring connection sections, a plurality of primary detection wiring connection sections, a plurality of secondary detection wiring connection sections, and a plurality of secondary drive Each wiring connection section has a specific connection order in the circuit. In electrical reversal control, the control unit swaps the functions of the primary drive wiring connection section and the secondary drive wiring connection section, which have the same connection order in the circuit, and swaps the functions of the primary detection wiring connection section and the secondary detection wiring connection section, which have the same connection order in the circuit. In the wiring connection section arrangement, the primary drive wiring connection section and the secondary drive wiring connection section, which have the same connection order in the circuit, are arranged symmetrically with respect to the first or second centerline, and the primary detection wiring connection section and the secondary detection wiring connection section, which have the same connection order in the circuit, are arranged symmetrically with respect to the first or second centerline.

[0015] With this configuration, the wiring connections that are swapped before and after electrical reversal control, and the surrounding wiring connections, do not change in the order of connections in the circuit. Therefore, the conditions for electrical crosstalk based on the positional relationship between the primary drive wiring connection, primary detection wiring connection, secondary detection wiring connection, and secondary drive wiring connection, as well as the effects of the resulting electrical crosstalk, can be made almost identical before and after electrical reversal control. As a result, the effects of electrical crosstalk occurring in the primary drive wiring connection, primary detection wiring connection, secondary detection wiring connection, and secondary drive wiring connection can be canceled out.

[0016] According to the present invention, in a configuration in which electrodes are replaced as described above, the effects of the generated electrical crosstalk can be sufficiently canceled out by making the conditions of electrical crosstalk before and after electrical reversal control equal, thereby suppressing a decrease in the accuracy of angular velocity detection.

[0017] This is a plan view showing the entire vibration-type gyro element according to one embodiment. This is a cross-sectional view along line II-II in Figure 1. This is a block diagram of a gyroscope according to one embodiment. This is a diagram showing the primary vibration of an oscillator according to one embodiment. This is a diagram showing the secondary vibration of an oscillator according to one embodiment. This is a plan view showing the state of a vibration-type gyro element before electrical reversal control according to one embodiment. This is a plan view showing the state of a vibration-type gyro element after electrical reversal control according to one embodiment. This is a plan view showing the wiring connection section and the arrangement of the wiring connection section according to one embodiment. This is a plan view showing the arrangement of the primary drive wiring and secondary drive wiring of a vibration-type gyro element according to one embodiment. This is a plan view showing the arrangement of the primary detection wiring and secondary detection wiring of a vibration-type gyro element according to one embodiment. This is a plan view showing the arrangement of bonding wires and pads connecting bonding wires of a gyroscope according to one embodiment. This is a plan view showing the arrangement of primary and secondary electrodes according to a modified example.

[0018] Embodiments of the present invention will be described below with reference to the drawings.

[0019] (Configuration of the vibrating gyro element) Referring to Figures 1 to 11, a vibrating gyro element 100 and a gyroscope 101 equipped with the vibrating gyro element 100 according to one embodiment will be described.

[0020] The gyroscope 101 (see Figure 3) comprises a substrate 10 and a vibration-type gyro element 100 arranged on the substrate 10.

[0021] In the following explanation, the radial direction of the transducer 20 may be referred to as the radial direction, the outer circumference direction of the transducer 20 as the circumferential direction, and the direction intersecting both the radial and circumferential directions as the axial direction. Furthermore, in the radial direction, the side closer to the center of the transducer 20 may be referred to as the inner side, and the outer circumference side as the outer side. In the axial direction, the side on which the upper yoke 61 (see Figure 2) is provided may be referred to as the upper side, and the side on which the lower yoke 63 (see Figure 2) is provided may be referred to as the lower side. Furthermore, the upper surface of each component shown below may be referred to as the front surface, and the lower surface as the back surface. Note that the extended imaginary line in the radial direction does not necessarily have to intersect with the center of the transducer 20. Also, the circumferential direction is not necessarily a curve with a constant curvature.

[0022] Furthermore, one or more primary drive electrodes are sometimes collectively referred to as primary drive electrodes PD, and one or more primary detection electrodes are sometimes collectively referred to as primary detection electrodes PPO. Also, one or more secondary drive electrodes are sometimes collectively referred to as secondary drive electrodes SD, and one or more secondary detection electrodes SPO are sometimes collectively referred to as secondary detection electrodes SPO.

[0023] As shown in Figures 1 and 2, the vibrating gyro element 100 comprises an oscillator 20, a plurality of support parts 30, a plurality of electrodes 40a to 40p used for detecting the angular velocity applied to the oscillator 20, a magnetic field application part 60, and a plurality of wirings 70. The vibrating gyro element 100 is an electromagnetically driven vibrating gyro element equipped with a magnetic field application part 60.

[0024] As shown in Figure 1, the substrate 10 has an opening 10a in the center. Inside the opening 10a, the vibrator 20, a plurality of support parts 30, a plurality of electrodes 40a to 40p, and a magnetic field application part 60 (see Figure 2) are arranged. Also, as shown in Figure 2, the substrate 10 is a laminated structure in which a first silicon layer 51, a silicon oxide layer (insulating layer) 52, and a second silicon layer 53 are stacked in this order. A silicon oxide film (insulating layer) 54 is formed on the surface of the second silicon layer 53. A plurality of wirings 70 are formed on the surface of the silicon oxide film 54. Each of the plurality of electrodes 40a to 40p is formed on the surface of the silicon oxide film 54. In the following description, when the arrangement and function of the electrodes are not particularly considered, the plurality of electrodes 40a to 40p may be collectively referred to as the plurality of electrodes 40.

[0025] The oscillator 20 is annular. In this embodiment, the oscillator 20 is a ring-shaped (annular) member obtained by processing the second silicon layer 53. The oscillator 20 also has a vibration mode of cosNθ (where N is a natural number of 2 or more) centered at a predetermined center point Cs. In the case of the oscillator 20 with N=2 shown in Figure 1, the first-order vibration of the cos2θ mode is excited.

[0026] The support portion 30 is a component obtained by processing the second silicon layer 53 and is integrally formed with the vibrator 20. The support portion 30 connects the vibrator 20 to the substrate 10 and supports the vibrator 20 in a cantilever manner. In other words, the support portion 30 supports the vibrator 20 so that it can vibrate.

[0027] Each of the multiple electrodes 40a to 40p is a conductive member formed in a loop shape on the surface of the vibrator 20. Furthermore, each of the multiple electrodes 40a to 40p is formed to extend from the vibrator 20 to the support portion 30.

[0028] Multiple electrodes 40 are arranged on the surface of the resonator 20 in rows spaced apart from each other in the circumferential direction of the resonator 20. Furthermore, the multiple electrodes 40 are arranged on the surface of the resonator 20 in multiple rows (two rows in this embodiment) spaced apart from each other in the circumferential direction of the resonator 20. The multiple electrodes 40 include a primary drive electrode PD that excites the resonator 20 with a primary vibration of the cos2θ mode, a primary detection electrode PPO that detects the primary vibration, a secondary detection electrode SPO that detects the secondary vibration of the resonator 20 caused by angular velocity, and a secondary drive electrode SD that drives the resonator 20 to cancel out the secondary vibration. Multiple primary drive electrodes PD, primary detection electrodes PPO, secondary detection electrodes SPO, and secondary drive electrodes SD exist. On the surface of the vibrator 20, at least one row (two rows in this embodiment) of electrodes 40 is formed in the circumferential direction of the vibrator 20, and each row contains one or more primary drive electrodes PD, primary detection electrodes PPO, secondary detection electrodes SPO, and secondary drive electrodes SD (four of each in this embodiment).

[0029] Furthermore, as shown in Figure 1, the electrode 40 on the support portion 30 is formed to extend continuously from the electrode 40 on the vibrator 20.

[0030] As shown in Figure 1, the primary drive electrodes PD are arranged alternately along the circumferential direction in the same row as the secondary drive electrodes SD, and the primary detection electrodes PPO are arranged alternately along the circumferential direction in the same row as the secondary detection electrodes SPO. That is, pairs of primary drive electrodes PD and primary detection electrodes PPO, and pairs of secondary drive electrodes SD and secondary detection electrodes SPO are arranged alternately along the circumferential direction. Furthermore, there are equal numbers of pairs of primary drive electrodes PD and primary detection electrodes PPO, and equal numbers of pairs of secondary drive electrodes SD and secondary detection electrodes SPO.

[0031] One set of primary drive electrode PD and primary detection electrode PPO and the closest set of primary drive electrode PD and primary detection electrode PPO are positioned 90 degrees apart from each other with respect to the center point Cs. One set of secondary drive electrode SD and secondary detection electrode SPO and the closest set of secondary drive electrode SD and secondary detection electrode SPO are positioned 90 degrees apart from each other with respect to the center point Cs. One set of primary drive electrode PD and primary detection electrode PPO and the closest set of secondary drive electrode SD and secondary detection electrode SPO are positioned 45 degrees apart from each other with respect to the center point Cs.

[0032] The four primary drive electrodes PD are electrically connected in series. The four primary detection electrodes PPO are also electrically connected in series. Furthermore, the four secondary detection electrodes SPO are electrically connected in series. Finally, the four secondary drive electrodes SD are electrically connected in series.

[0033] As shown in Figure 2, the magnetic field application unit 60 includes an upper yoke 61, a magnet 62, and a lower yoke 63. The upper yoke 61 and the lower yoke 63 are bottomed cylindrical members made of a magnetic material such as iron. The upper yoke 61 and the lower yoke 63 are arranged so that the cylindrical portion of the upper yoke 61 and the cylindrical portion of the lower yoke 63 face each other with an axial gap between them. A vibrator 20 is also positioned between the cylindrical portion of the upper yoke 61 and the cylindrical portion of the lower yoke 63. The vibrator 20 is positioned between the cylindrical portion of the upper yoke 61 and the cylindrical portion of the lower yoke 63, with an axial gap between them. Note that the magnetic field application unit 60 is not shown in Figure 1.

[0034] The magnet 62 has one upper and one lower section with a north pole and the other with a south pole. The magnet 62 is held by the upper yoke 61 or the lower yoke 63, or both, and is fixedly positioned radially inward of the vibrator 20.

[0035] The magnetic flux flowing from one pole of the magnet 62 passes through one of the upper yoke 61 and the lower yoke 63 and reaches the oscillator 20 and the electrodes 40a to 40p formed on its surface. Furthermore, the magnetic flux passes through the oscillator 20 and the electrodes 40a to 40p and flows into the other pole of the magnet 62 via the other of the upper yoke 61 and the lower yoke 63.

[0036] In this manner, the magnetic field application unit 60 applies a magnetic field to the multiple electrodes 40a to 40p in a direction intersecting the surface of the vibrator 20 (in this case, the axial direction). The magnetic field application unit 60 is supported by a support substrate (not shown) to maintain its radial and axial position relative to the vibrator 20.

[0037] Multiple wires 70 are provided corresponding to multiple electrodes 40. Multiple wires 70 are provided on the substrate 10. Note that the multiple wires 70 are not shown in Figure 1. Further details of the multiple wires 70 will be described later.

[0038] The vibration-type gyro element 100, excluding the magnetic field application section 60, is a MEMS (Micro Electro Mechanical System) element obtained by processing a known SOI (Silicone On Insulator) substrate using, for example, micromachining technology that applies semiconductor microfabrication technology.

[0039] This MEMS element is formed, for example, as follows: A SOI substrate having a first silicon layer 51, a silicon oxide layer 52, and a second silicon layer 53 is thermally oxidized to form a silicon oxide film 54 on the surface of the second silicon layer 53.

[0040] Next, a plurality of electrodes 40a to 40p and a plurality of wirings 70 are formed on the surface of the silicon oxide film 54 using a mask pattern (not shown). For example, a plurality of electrodes 40a to 40p and a plurality of wirings 70 are formed by depositing a film of a conductive material such as aluminum onto the surface of the silicon oxide film 54 through the mask pattern.

[0041] Using another mask pattern (not shown), the silicon oxide film 54 and the second silicon layer 53 are etched and removed until reaching the silicon oxide layer 52. Through this process, the prototypes of the support portion 30 and the oscillator 20 are formed.

[0042] Next, with the surfaces of the electrodes 40a to 40p, the support portion 30, and the oscillator 20 protected by wax or the like, using a mask pattern (not shown) corresponding to the opening 10a of the substrate 10, the first silicon layer 51 located below the support portion 30 and the oscillator 20 is etched and removed. Further, using the same mask pattern, the silicon oxide layer 52 is etched and removed to obtain the aforementioned MEMS element.

[0043] Note that the etching of the first silicon layer 51 and the silicon oxide layer 52 may be either dry etching or wet etching. However, in any case, it is preferable to use an etchant with high etching selectivity with respect to the layer serving as the base of the etching layer.

[0044] (Configuration of Gyroscope) Referring to FIG. 3, a gyroscope 101 including a vibrating gyro element 100 will be described. For the sake of convenience in explanation, in FIG. 3, among the vibrating gyro elements 100, the primary drive electrode PD, the primary detection electrode PPO, the secondary detection electrode SPO, and the secondary drive electrode SD are shown in a simplified manner.

[0045] As shown in FIG. 3, the gyroscope 101 includes a wiring connection portion 90, a vibrating gyro element 100, a primary AC power supply 110, a primary detection portion 120, a secondary AC power supply 130, a secondary detection portion 140, a control portion 150, and a plurality of switches 160.

[0046] The primary AC power supply 110 is a power supply device. The primary AC power supply 110 supplies current to the primary drive electrode PD.

[0047] The primary detection portion 120 is a signal detection portion that detects the signal generated by the primary detection electrode PPO.

[0048] The secondary AC power supply 130 is a power supply device. The secondary AC power supply 130 supplies current to the secondary drive electrode SD.

[0049] The secondary detection unit 140 is a signal detection unit that detects the signal generated by the secondary detection electrode SPO.

[0050] The control unit 150 includes a calculation unit 150a and a switching control unit 150b.

[0051] The calculation unit 150a is configured to perform control to detect the angular velocity applied to the oscillator 20.

[0052] The switching control unit 150b is configured to control multiple switches 160 when performing electrical reversal control.

[0053] Furthermore, as shown in Figure 3, the wiring connection section 90 is located between the gyro element 100 and the control unit 150. The wiring connection section 90 includes a primary drive wiring connection section PDP, a primary detection wiring connection section PPP, a secondary drive wiring connection section SDP, and a secondary detection wiring connection section SPP. The primary drive wiring connection section PDP, the primary detection wiring connection section PPP, the secondary drive wiring connection section SDP, and the secondary detection wiring connection section SPP perform input / output to the primary drive electrode PD, input / output to the primary detection electrode PPO, input / output to the secondary drive electrode SD, and input / output to the secondary detection electrode SPO, respectively.

[0054] A primary AC power supply 110 is electrically connected to four primary drive electrodes PD connected in series. A primary detection unit 120 is electrically connected to four primary detection electrodes PPO connected in series. A secondary AC power supply 130 is electrically connected to four secondary drive electrodes SD connected in series. A secondary detection unit 140 is electrically connected to four secondary detection electrodes SPO connected in series. In addition, a calculation unit 150a is electrically connected to the secondary AC power supply 130.

[0055] The operation of the gyroscope 101 will be explained below.

[0056] When an alternating current Ip is supplied from the primary AC power supply 110 to the primary drive electrode PD, a Lorentz force is applied to the primary drive electrode PD in a direction intersecting the direction of the magnetic field applied from the magnetic field application unit 60 and the direction in which the alternating current Ip flows. In other words, the Lorentz force acts in a direction parallel to the surface of the oscillator 20. The oscillator 20, to which the primary drive electrode PD is provided, deforms under the influence of this Lorentz force. Furthermore, since the direction of the Lorentz force periodically reverses depending on the frequency of the alternating current Ip, the oscillator 20 vibrates at the same frequency. In this case, the oscillator 20 vibrates in a direction parallel to its surface.

[0057] By setting the frequency of the alternating current Ip to match the resonant frequency of the oscillator 20, a first-order oscillation of the cos2θ mode is excited in the oscillator 20.

[0058] Furthermore, an alternating current Ip is passed through each of the four primary drive electrodes PD to excite the oscillator 20 into a cos2θ mode primary oscillation. Specifically, the directions in which the alternating current Ip flows between two primary drive electrodes PD located 90 degrees apart from the center point Cs are set to be opposite to each other, that is, clockwise and counterclockwise when viewed from the axial direction.

[0059] The primary detection electrode PPO detects primary vibrations and generates a voltage signal of a magnitude corresponding to their amplitude. This voltage signal is fed back to the primary detection unit 120. Based on the voltage signal generated by the primary detection electrode PPO, the primary detection unit 120 outputs an output signal to the primary AC power supply 110. Based on the output signal of the primary detection unit 120, the amplitude and frequency of the primary AC power supply 110, specifically the AC current Ip, are controlled so that the vibration frequency and amplitude of the vibrator 20 remain constant.

[0060] As shown in Figure 4, the annular oscillator 20 periodically undergoes primary oscillations, becoming an ellipse with mutually orthogonal principal axes. Meanwhile, the application of angular velocity to the oscillator 20 generates a Coriolis force, which excites a new oscillation at a 45-degree angle to the principal axes of the primary oscillation shown in Figure 4. This oscillation is called a secondary oscillation, and its oscillation state is shown in Figure 5.

[0061] A magnetic field is applied to the secondary detection electrode SPO in a direction intersecting its surface. In addition, in response to the secondary vibration of the oscillator 20, the secondary detection electrode SPO also vibrates in a direction parallel to its surface. As a result, a sinusoidal AC voltage is generated at the secondary detection electrode SPO, corresponding to the strength of the magnetic field and the velocity of movement during the secondary vibration. The voltage detected at the secondary detection electrode SPO is proportional to the magnitude of the secondary vibration excited by the Coriolis force, and therefore the generated voltage also differs depending on the magnitude of the applied angular velocity.

[0062] The secondary detection unit 140 detects the voltage generated at the secondary detection electrode SPO and outputs an output signal corresponding to the magnitude of this voltage to the secondary AC power supply 130.

[0063] The output signal from the secondary detection unit 140 is input to the secondary AC power supply 130. Based on this output signal, the secondary AC power supply 130 supplies AC current to the secondary drive electrode SD to cancel out the secondary vibrations generated in the oscillator 20, thereby suppressing the secondary vibrations. In other words, feedback control is performed so that the output of the secondary detection electrode SPO becomes zero. The secondary AC power supply 130 also inputs an output signal based on the output current to the calculation unit 150a.

[0064] Since the force due to the output of the secondary AC power supply 130 is equal to the Coriolis force generated by the angular velocity, the calculation unit 150a can calculate the angular velocity based on the output signal of the secondary AC power supply 130.

[0065] Furthermore, the vibration-type gyro element 100 is configured to allow the functions of the primary drive electrode PD and primary drive wiring PDL (see Figure 9) to be swapped with those of the secondary drive electrode SD and secondary drive wiring SDL (see Figure 9), and to allow the functions of the primary detection electrode PPO and primary detection wiring PPL (see Figure 10) to be swapped with those of the secondary detection electrode SPO and secondary detection wiring SPL (see Figure 10).

[0066] In this embodiment, the switching control unit 150b is configured to perform electrical reversal control by swapping the functions of the primary drive electrode PD and primary drive wiring PDL with the functions of the secondary drive electrode SD and secondary drive wiring SDL, and swapping the functions of the primary detection electrode PPO and primary detection wiring PPL with the functions of the secondary detection electrode SPO and secondary detection wiring SPL. The calculation unit 150a is configured to detect the angular velocity based on the difference in the output signal to the secondary drive electrode SD before and after the electrical reversal control. This swapping is performed by switching the internal wiring using the switch 160 and the switching control unit 150b shown in Figure 3. One switch 160 is provided for each of the primary drive electrode PD, primary detection electrode PPO, secondary detection electrode SPO, and secondary drive electrode SD. The "predetermined timing" is selected when the vibration-type gyro element 100 is stationary or in constant velocity motion, or when there is another gyro that can measure and compensate for the motion during switching.

[0067] The electrode arrangement shown in Figure 6 is the electrode arrangement before replacement and is the same as that shown in Figure 1. Specifically, electrodes 40b, 40d, 40f, and 40h are electrically connected to the primary AC power supply 110 and function as primary drive electrodes PD. Electrodes 40j, 40l, 40n, and 40p are electrically connected to the primary detection unit 120 and function as primary detection electrodes PPO. Electrodes 40a, 40c, 40e, and 40g are electrically connected to the secondary AC power supply 130 and function as secondary drive electrodes SD. Electrodes 40i, 40k, 40m, and 40o are electrically connected to the secondary detection unit 140 and function as secondary detection electrodes SPO. At this time, wiring 70a (see Figure 9), which will be described later, is electrically connected to the primary AC power supply 110. Also, wiring 70c (see Figure 10), which will be described later, is electrically connected to the primary detection unit 120. Furthermore, the wiring 70b (see Figure 9), described later, is electrically connected to the secondary AC power supply 130. Also, the wiring 70d (see Figure 10), described later, is electrically connected to the secondary detection unit 140.

[0068] At a predetermined timing, the switching control unit 150b sends control signals to the four switches 160, thereby switching the internal wiring of the gyroscope 101. As a result, the electrode arrangement switches to the rearranged electrode arrangement shown in Figure 7. Specifically, electrodes 40b, 40d, 40f, and 40h are electrically connected to the secondary AC power supply 130 and function as secondary drive electrodes SD. Also, electrodes 40j, 40l, 40n, and 40p are electrically connected to the secondary detection unit 140 and function as secondary detection electrodes SPO. Also, electrodes 40a, 40c, 40e, and 40g are connected to the primary AC power supply 110 and function as primary drive electrodes PD. Also, electrodes 40i, 40k, 40m, and 40o are connected to the primary detection unit 120 and function as primary detection electrodes PPO. At this time, wiring 70a, which will be described later, is electrically connected to the secondary AC power supply 130. Also, wiring 70c, which will be described later, is electrically connected to the secondary detection unit 140. Furthermore, the wiring 70b, described later, is electrically connected to the primary AC power supply 110. Also, the wiring 70d, described later, is electrically connected to the primary detection unit 120.

[0069] (Wiring Connection Arrangement Section and Wiring Connection Sections) Next, with reference to Figure 8, the wiring connection arrangement section 11 and the wiring connection sections 90 will be described. As shown in Figure 8, the gyroscope 101 includes a wiring connection arrangement section 11. The wiring connection arrangement section 11 is provided between the gyro element 100 and the control unit 150. Multiple wiring connection sections 90 are arranged in the wiring connection arrangement section 11. In the example shown in Figure 8, wiring connection sections 90a to 90p are arranged in the wiring connection arrangement section 11. Of the wiring connection sections 90, the wiring connection section connected to the primary AC power supply 110 functions as a primary drive wiring connection section PDP. Also, of the wiring connection sections 90, the wiring connection section connected to the primary detection unit 120 functions as a primary detection wiring connection section PPP. Also, of the wiring connection sections 90, the wiring connection section connected to the secondary detection unit 140 functions as a secondary detection wiring connection section SPP. Furthermore, among the wiring connection sections 90, the wiring connection section connected to the secondary AC power supply 130 functions as a secondary drive wiring connection section SDP. In other words, the wiring connection section arrangement section 11 is arranged with a plurality of primary drive wiring connection sections PDP, a plurality of primary detection wiring connection sections PPP, a plurality of secondary drive wiring connection sections SDP, and a plurality of secondary detection wiring connection sections SPP.

[0070] Multiple primary drive wiring connection units PDP are connected to the primary drive wiring PDL and the control unit 150, and also perform input and output to the primary drive electrode PD.

[0071] Multiple primary detection wiring connection units PPP are connected to the primary detection wiring PPL and the control unit 150, and also perform input and output to the primary detection electrode PPO.

[0072] Multiple secondary detection wiring connection units SPP are connected to the secondary detection wiring SPL and the control unit 150, and also perform input and output to the secondary detection electrode SPO.

[0073] Multiple secondary drive wiring connection units SDP are connected to the secondary drive wiring SDL and the control unit 150, and also perform input and output to the secondary drive electrode SD.

[0074] Furthermore, each of the multiple primary drive wiring connection units (PDP), multiple primary detection wiring connection units (PPP), multiple secondary detection wiring connection units (SPP), and multiple secondary drive wiring connection units (SDP) has a specific connection order within the circuit.

[0075] In electrical reversal control, the control unit 150 swaps the functions of the primary drive wiring connection unit PDP and the secondary drive wiring connection unit SDP, which have the same connection order in the circuit. The control unit 150 also swaps the functions of the primary detection wiring connection unit PPP and the secondary detection wiring connection unit SPP, which have the same connection order in the circuit.

[0076] As shown in Figure 8, in the wiring connection section 11, the primary drive wiring connection section PDP and the secondary drive wiring connection section SDP, which have the same connection order in the circuit, are arranged symmetrically with respect to the first center line C1. When the vibration mode of the vibrator 20 is cosNθ, there are 2N virtual lines that can be center lines. The angle between each virtual line that can be a center line is 90 / N (deg). In this embodiment, since the vibration mode of the vibrator 20 is cos2θ, there are four virtual lines that can be center lines: the first center line C1, the second center line C2, the third center line C3, and the fourth center line C4. The angle between the first center line C1 and the second center line C2 is 45 degrees. In this embodiment, the first center line C1 is used as the center line.

[0077] In the example shown in Figure 8, the primary drive wiring connection PDP1 and secondary drive wiring connection SDP3, the primary drive wiring connection PDP2 and secondary drive wiring connection SDP2, the primary drive wiring connection PDP3 and secondary drive wiring connection SDP1, and the primary drive wiring connection PDP4 and secondary drive wiring connection SDP4 are arranged symmetrically with respect to the first center line C1.

[0078] Furthermore, the primary detection wiring connection section PPP and the secondary detection wiring connection section SPP, which have the same connection order in the circuit, are arranged symmetrically with respect to the first center line C1. In the example shown in Figure 8, the primary detection wiring connection section PPP1 and the secondary detection wiring connection section SPP3, the primary detection wiring connection section PPP2 and the secondary detection wiring connection section SPP2, the primary detection wiring connection section PPP3 and the secondary detection wiring connection section SPP1, and the primary detection wiring connection section PPP4 and the secondary detection wiring connection section SPP4 are arranged symmetrically with respect to the first center line C1.

[0079] Furthermore, the first center line C1 and the extension of a predetermined center point Cs intersect at a certain point. In the example shown in Figure 8, the gyroscope 101 is shown as viewed from the axial direction, so the first center line C1 is shown intersecting at the center point Cs.

[0080] (Arrangement of drive electrodes and drive wiring) As shown in Figure 9, the multiple wirings 70 include wiring 70a and wiring 70b. Bonding wires 71 are provided for each of the wirings 70a and 70b. Wirings 70a and 70b are interchangeable wirings. For convenience, in Figure 9, the positions of the primary drive wiring connection part PDP and the secondary drive wiring connection part SDP are shown in different positions than in Figure 8.

[0081] The wiring 70a is provided corresponding to electrodes 40b, 40d, 40f, and 40h. The wiring 70a has a portion that connects electrode 40b to the circuit (control unit 150) on which the vibration-type gyro element 100 is mounted via the primary drive wiring connection part PDP3, a portion that connects electrode 40b and electrode 40d, a portion that connects electrode 40d and electrode 40f via the primary drive wiring connection part PDP2, the control unit 150, and the primary drive wiring connection part PDP1, a portion that connects electrode 40f and electrode 40h, and a portion that connects electrode 40h and the control unit 150 via the primary drive wiring connection part PDP4. In addition, the wiring 70a is provided with two bonding wires 71a and 71l. Specifically, the bonding wire 71a is provided in the portion of the wiring 70a between electrodes 40b and 40d. Furthermore, the bonding wire 71l is provided in the portion of the wiring 70a between electrodes 40f and 40h.

[0082] When connected to the primary AC power supply 110, the wiring 70a functions as a primary drive wiring PDL provided in correspondence with the primary drive electrode PD. As shown in Figure 9, there are multiple primary drive wiring PDLs, separated by electrodes 40b, 40d, 40f, 40h, and primary drive wiring connection parts PDP3, PDP2, PDP1, PDP4. Multiple primary drive wiring PDLs connect multiple primary drive electrodes PD in series. Specifically, multiple primary drive wiring PDLs connect electrodes 40b, 40d, 40f, and 40h in series with respect to each other in this order. Therefore, each of the multiple primary drive electrode PDs and the multiple primary drive wiring PDLs has a specific connection order in the circuit.

[0083] In other words, the control unit 150 and the vibration-type gyro element 100 are connected in the following order: primary drive wiring connection part PDP3, region Rpd1 of the wiring 70a (primary drive wiring PDL1), bonding wire 71a, region Rpd2 of the wiring 70a (primary drive wiring PDL2), primary drive wiring connection part PDP2, primary drive wiring connection part PDP1, region Rpd3 of the wiring 70a (primary drive wiring PDL3), bonding wire 71l, region Rpd4 of the wiring 70a (primary drive wiring PDL4), and then connected to the control unit 150 via primary drive wiring connection part PDP4. That is, the multiple primary drive electrodes PD are connected in the following order: electrode 40b, electrode 40d, electrode 40f, electrode 40h.

[0084] Furthermore, the wiring 70b is provided corresponding to electrodes 40a, 40c, 40e, and 40g. The wiring 70b has a portion connecting the control unit 150 and electrode 40e via the secondary drive wiring connection part SDP1, a portion connecting electrode 40e and electrode 40c, a portion connecting electrode 40c and electrode 40a via the secondary drive wiring connection part SDP2, the control unit 150, and the secondary drive wiring connection part SDP3, a portion connecting electrode 40a and electrode 40g, and a portion connecting electrode 40g and the control unit 150 via the secondary drive wiring connection part SDP4. In addition, the wiring 70b is provided with two bonding wires 71c and 71d. Specifically, the bonding wire 71c is provided in the portion of the wiring 70b between electrodes 40a and 40g. The bonding wire 71d is provided in the portion of the wiring 70b between electrodes 40e and 40c.

[0085] When connected to the secondary AC power supply 130, the wiring 70b functions as a secondary drive wiring SDL provided in correspondence with the secondary drive electrode SD. As shown in Figure 9, there are multiple secondary drive wiring SDLs, separated by electrodes 40a, 40c, 40e, 40g, and secondary drive wiring connection parts SDP3, SDP2, SDP1, SDP4. Multiple secondary drive wiring SDLs connect multiple secondary drive electrodes SD in series. Specifically, multiple secondary drive wiring SDLs connect electrodes 40e, 40c, 40a, and 40g in series with respect to each other in this order. Therefore, there is a specific connection order in the circuit for each of the multiple secondary drive electrodes SD and the multiple secondary drive wiring SDLs.

[0086] In other words, the current flowing from the control unit 150 to the vibration-type gyro element 100 is connected in the following order: secondary drive wiring connection part SDP1, region Rsd3 of the wiring 70b (secondary drive wiring SDL3), bonding wire 71d, region Rsd4 of the wiring 70b (secondary drive wiring SDL4), secondary drive wiring connection part SDP2, secondary drive wiring connection part SDP3, region Rsd1 of the wiring 70b (secondary drive wiring SDL1), bonding wire 71c, region Rsd2 of the wiring 70b (secondary drive wiring SDL2), and then connected to the control unit 150 via secondary drive wiring connection part SDP4. Therefore, the multiple secondary drive electrodes SD are connected in the following order: electrode 40e, electrode 40c, electrode 40a, and electrode 40g.

[0087] When the switch 160 is switched, and the wiring 70a is connected to the secondary AC power supply 130, the wiring 70a functions as a secondary drive wiring SDL provided in correspondence with the secondary drive electrode SD. Also, the functions of the primary drive electrode PD and the primary drive wiring connection part PDP are replaced by the functions of the secondary drive electrode SD and the secondary drive wiring connection part SDP. Furthermore, when the switch 160 is switched, and the wiring 70b is connected to the primary AC power supply 110, the wiring 70b functions as a primary drive wiring PDL provided in correspondence with the primary drive electrode PD. Also, the functions of the secondary drive electrode SD and the secondary drive wiring connection part SDP are replaced by the functions of the primary drive electrode PD and the primary drive wiring connection part PDP.

[0088] As shown in Figure 9, the pattern of the primary drive wiring PDL and the pattern of the secondary drive wiring SDL are symmetrical with respect to a predetermined first center line C1. In the example shown in Figure 9, in order to avoid the primary drive wiring PDL and the secondary drive wiring SDL intersecting, there are parts where region Rsd4 is positioned outside region Rpd2, and parts where region Rpd4 is positioned outside region Rsd2. However, regions Rsd2 and Rpd2 are symmetrical with respect to the third center line C3, and regions Rsd4 and Rpd4 are symmetrical with respect to the third center line C3. Furthermore, because there are parts where region Rpd2 is positioned inside, parts where region Rpd4 is positioned outside, parts where region Rsd4 is positioned outside, and parts where region Rsd2 is positioned inside, the arrangement of the primary drive wiring PDL and secondary drive wiring SDL in the four regions is symmetrical as a whole. In this embodiment, the concept that the pattern of the primary drive wiring PDL and the pattern of the secondary drive wiring SDL are symmetrical includes the concept that they are symmetrical across multiple regions.

[0089] Furthermore, the total area of ​​regions Rpd1 to Rpd4 within wiring 70a is equal to the total area of ​​regions Rsd1 to Rsd4 within wiring 70b. Note that the area of ​​wiring is calculated by multiplying the width of the wiring by the length of the wiring (the wiring path length).

[0090] Furthermore, as shown in Figure 9, electrodes 40b and 40e are arranged symmetrically with respect to the first center line C1. Also, electrodes 40d and 40c are arranged symmetrically with respect to the first center line C1. Also, electrodes 40f and 40a are arranged symmetrically with respect to the first center line C1. Also, electrodes 40h and 40g are arranged symmetrically with respect to the first center line C1.

[0091] Furthermore, as shown in Figure 9, bonding wires 71a and 71d are arranged symmetrically with respect to the first center line C1. Also, bonding wires 71l and 71c are arranged symmetrically with respect to the first center line C1.

[0092] Furthermore, in the example shown in Figure 9, the primary drive wiring PDL and the secondary drive wiring SDL are wirings 70 that are swapped when performing electrical reversal control. As shown in Figure 9, the wiring patterns 70 that are swapped in electrical reversal control and have a symmetrical configuration with respect to the first center line C1 have the same connection order in the circuit. Specifically, the order in which regions Rpd1 to Rpd4 of wiring 70a are connected is the same as the order in which regions Rsd3, Rsd4, Rsd1, and Rsd2 of wiring 70b, which are located in positions symmetrical with respect to a predetermined first center line C1, are connected.

[0093] Furthermore, in electrical reversal control, the electrodes 40 that are to be swapped are connected in the same order in the circuit. Specifically, the order in which electrodes 40b, 40d, 40f, and 40h are connected is the same as the order in which electrodes 40e, 40c, 40a, and 40g, which are located in positions symmetrical with respect to a predetermined first center line C1, are connected.

[0094] Therefore, when electrical reversal control is performed, the primary drive electrode PD and primary drive wiring PDL and the secondary drive electrode SD and secondary drive wiring SDL are swapped with respect to the first center line C1.

[0095] Furthermore, the functions of bonding wire 71a and bonding wire 71d are swapped with respect to the first centerline C1. Also, the functions of bonding wire 71l and bonding wire 71c are swapped with respect to the first centerline C1.

[0096] (Arrangement of detection electrodes and detection wiring) As shown in Figure 10, the multiple wirings 70 include wiring 70c and wiring 70d. Bonding wires 71 are provided on each of the wirings 70c and 70d. Wirings 70c and 70d are the wirings that are to be swapped. For convenience, in Figure 10, the positions of the primary detection wiring connection part PPP and the secondary detection wiring connection part SPP are shown in different positions than in Figure 8.

[0097] The wiring 70c is provided corresponding to electrodes 40j, 40l, 40n, and 40p. The wiring 70c has a portion that connects the control unit 150 and electrode 40j via the primary detection wiring connection part PPP3, a portion that connects electrode 40j and electrode 40p, a portion that connects electrode 40p and electrode 40n via the primary detection wiring connection part PPP4, the control unit 150, and the primary detection wiring connection part PPP1, a portion that connects electrode 40n and electrode 40l, and a portion that connects electrode 40l and the control unit 150 via the primary detection wiring connection part PPP2. In addition, the wiring 70c is provided with four bonding wires 71e, 71f, 71g, and 71h. Specifically, the bonding wire 71e is provided in the portion between the wiring 70c connected to the primary detection wiring connection part PPP3 and electrode 40j of the wiring 70c. Furthermore, the bonding wire 71f is provided in the portion between electrode 40j and electrode 40p of the wiring 70c. Furthermore, the bonding wire 71g is provided in the portion between the wiring 70c connected to the primary detection wiring connection part PPP1 and electrode 40n of the wiring 70c. Furthermore, the bonding wire 71h is provided in the portion between electrode 40n of the wiring 70c and the wiring 70c connected to electrode 40l.

[0098] When connected to the primary detection unit 120, the wiring 70c functions as a primary detection wiring PPL provided in correspondence with the primary detection electrode PPO. As shown in Figure 10, there are multiple primary detection wiring PPLs, separated by electrodes 40j, 40l, 40n, 40p, and primary detection wiring connection parts PPP3, PPP2, PPP1, PPP4. Multiple primary detection wiring PPLs connect multiple primary detection electrodes PPO in series. Specifically, multiple primary detection wiring PPLs connect electrodes 40j, 40p, 40n, and 40l to each other in series in this order.

[0099] In other words, the control unit 150 and the vibration-type gyro element 100 are connected in the following order: primary detection wiring connection part PPP3, region Rpo1 of the wiring 70c (primary detection wiring PPL1), bonding wire 71e, region Rpo2 of the wiring 70c (primary detection wiring PPL2), bonding wire 71f, region Rpo3 of the wiring 70c (primary detection wiring PPL3), primary detection wiring connection part PPP4, primary detection wiring connection part PPP1, region Rpo4 of the wiring 70c (primary detection wiring PPL4), bonding wire 71g, region Rpo5 of the wiring 70c (primary detection wiring PPL5), bonding wire 71h, region Rpo6 of the wiring 70c (primary detection wiring PPL6), and then connected to the control unit 150 via primary detection wiring connection part PPP2. In other words, the multiple primary detection electrodes PPO are connected in the order of electrode 40j, electrode 40p, electrode 40n, and electrode 40l.

[0100] The wiring 70d is provided corresponding to electrodes 40i, 40k, 40m, and 40o. The wiring 70d has a portion connecting the control unit 150 and electrode 40m via the secondary detection wiring connection part SPP1, a portion connecting electrode 40m and electrode 40o, a portion connecting electrode 40o and electrode 40i via the secondary detection wiring connection part SPP4, the control unit 150, and the secondary detection wiring connection part SPP3, a portion connecting electrode 40i and electrode 40k, and a portion connecting electrode 40k and the control unit 150 via the secondary detection wiring connection part SPP2. In addition, the wiring 70d is provided with four bonding wires 71b, 71i, 71j, and 71k. Specifically, the bonding wire 71i is provided in the portion between the wiring 70d connected to the secondary detection wiring connection part SPP3 and electrode 40i of the wiring 70d. Furthermore, the bonding wire 71j is provided in the portion between electrode 40i and electrode 40k of the wiring 70d. Also, the bonding wire 71k is provided in the portion between the wiring 70d connected to the secondary detection wiring connection part SPP1 and electrode 40m of the wiring 70d. Furthermore, the bonding wire 71b is provided in the portion between electrode 40m and electrode 40o of the wiring 70d.

[0101] When connected to the secondary detection unit 140, the wiring 70d functions as a secondary detection wiring SPL provided in correspondence with the secondary detection electrode SPO. As shown in Figure 10, there are multiple secondary detection wiring SPLs, separated by electrodes 40k, 40m, 40o, 40i, and secondary detection wiring connection parts SPP2, SPP1, SPP4, SPP3. Multiple secondary detection wiring SPLs connect multiple secondary detection electrodes SPO in series. Specifically, multiple secondary detection wiring SPLs connect electrodes 40m, 40o, 40i, and 40k in series with each other.

[0102] In other words, the control unit 150 and the vibration-type gyro element 100 are connected in the following order: secondary detection wiring connection part SPP1, region Rso4 of the wiring 70d (secondary detection wiring SPL4), bonding wire 71k, region Rso5 of the wiring 70d (secondary detection wiring SPL5), bonding wire 71b, region Rso6 of the wiring 70d (secondary detection wiring SPL6), secondary detection wiring connection part SPP4, secondary detection wiring connection part SPP3, region Rso1 of the wiring 70d (secondary detection wiring SPL1), bonding wire 71i, region Rso2 of the wiring 70d (secondary detection wiring SPL2), bonding wire 71j, region Rso3 of the wiring 70d (secondary detection wiring SPL3), and then connected to the control unit 150 via secondary detection wiring connection part SPP2. In other words, the multiple secondary detection electrodes SPO are connected in the order of electrode 40m, electrode 40o, electrode 40i, and electrode 40k.

[0103] When the switch 160 is switched, the wiring 70c is connected to the secondary detection unit 140, and the wiring 70c functions as a secondary detection wiring SPL provided in correspondence with the secondary detection electrode SPO. Also, the functions of the primary detection electrode PPO and the primary detection wiring connection part PPP are replaced by the functions of the secondary detection electrode SPO and the secondary detection wiring connection part SPP. Furthermore, when the switch 160 is switched, the wiring 70d is connected to the primary detection unit 120, and the wiring 70d functions as a primary detection wiring PPL provided in correspondence with the primary detection electrode PPO. Also, the functions of the secondary detection electrode SPO and the secondary detection wiring connection part SPP are replaced by the functions of the primary detection electrode PPO and the primary detection wiring connection part PPP.

[0104] As shown in Figure 10, the pattern of the primary detection wiring PPL and the pattern of the secondary detection wiring SPL are symmetrical with respect to the first center line C1.

[0105] Furthermore, the total area of ​​regions Rpo1 to Rpo6 within wiring 70c and the total area of ​​regions Rso1 to Rso6 within wiring 70d are equal to each other.

[0106] Furthermore, as shown in Figure 10, electrodes 40j and 40m are arranged symmetrically with respect to the first center line C1. Also, electrodes 40l and 40k are arranged symmetrically with respect to the first center line C1. Also, electrodes 40n and 40i are arranged symmetrically with respect to the first center line C1. Also, electrodes 40p and 40o are arranged symmetrically with respect to the first center line C1.

[0107] Furthermore, as shown in Figure 10, bonding wires 71e and 71k are arranged symmetrically with respect to the first center line C1. Bonding wires 71h and 71j are also arranged symmetrically with respect to the first center line C1. Bonding wires 71g and 71i are also arranged symmetrically with respect to the first center line C1. Bonding wires 71f and 71b are also arranged symmetrically with respect to the first center line C1.

[0108] Furthermore, in the example shown in Figure 10, the primary detection wiring PPL and the secondary detection wiring SPL are wiring sections 70 that are swapped when performing electrical reversal control. Also, as shown in Figure 10, wiring patterns that are swapped in electrical reversal control and have a symmetrical configuration with respect to the first center line C1 have the same connection order in the circuit. Specifically, the connection order in the circuit of regions Rpo1 to Rpo6 of wiring 70c is the same as the connection order in the circuit of regions Rso4, Rso5, Rso6, Rso1, Rso2, and Rso3 of wiring 70d.

[0109] Furthermore, as shown in Figure 10, the electrodes 40 that are to be swapped in the electrical reversal control have the same connection order in the circuit. Specifically, the connection order of electrodes 40j, 40p, 40n, and 40l in the circuit is the same as the connection order of electrodes 40m, 40o, 40i, and 40k in the circuit, which are located symmetrically with respect to a predetermined first center line C1.

[0110] Therefore, when electrical reversal control is performed, the primary detection electrode PPO and primary detection wiring PPL and the secondary detection electrode SPO and secondary detection wiring SPL are swapped with respect to the first center line C1.

[0111] Furthermore, the functions of bonding wire 71e and bonding wire 71k are swapped with respect to the first centerline C1. Also, the functions of bonding wire 71h and bonding wire 71j are swapped with respect to the first centerline C1. Furthermore, the functions of bonding wire 71g and bonding wire 71i are swapped with respect to the first centerline C1. Furthermore, the functions of bonding wire 71f and bonding wire 71b are swapped with respect to the first centerline C1.

[0112] (Arrangement of bonding wires and pads) As shown in Figure 11, there are pads 80 provided on the substrate 10 for connecting each other with bonding wires 71 to the plurality of wirings 70. Specifically, the plurality of pads 80 include pads 80a to 80l. Pad 80a is a pad for connecting bonding wire 71a. Pad 80b is a pad for connecting bonding wire 71b. Pad 80c is a pad for connecting bonding wire 71c. Pad 80d is a pad for connecting bonding wire 71d. Pad 80e is a pad for connecting bonding wire 71e. Pad 80f is a pad for connecting bonding wire 71f. Pad 80g is a pad for connecting bonding wire 71g. Pad 80h is a pad for connecting bonding wire 71h. Pad 80i is a pad for connecting bonding wire 71i. Furthermore, pad 80j is a pad for connecting bonding wire 71j. Pad 80k is a pad for connecting bonding wire 71k. Pad 80l is a pad for connecting bonding wire 71l.

[0113] Furthermore, as shown in Figure 11, the positions of the multiple pads 80 are symmetrical with respect to the first center line C1. Specifically, pads 80a and 80d are symmetrical with respect to the first center line C1. Pads 80b and 80f are symmetrical with respect to the first center line C1. Pads 80c and 80l are symmetrical with respect to the first center line C1. Pads 80e and 80k are symmetrical with respect to the first center line C1. Pads 80h and 80j are symmetrical with respect to the first center line C1. Pads 80i and 80g are symmetrical with respect to the first center line C1.

[0114] Furthermore, the bonding wire 71 connects the pads 80 in an arch shape (circular arc shape). It is preferable that the bonding wires 71 placed at positions symmetrical to each other are connected in an equal arch shape. In addition, in order to make the arch shape of the bonding wire 71 symmetrical, it is preferable that the bonding wires to be replaced be aligned so that the starting point and ending point of the bonding wire 71 are symmetrical with respect to the first center line C1.

[0115] (Effects of this embodiment) In this embodiment, the following effects can be obtained.

[0116] The gyroscope 101 has a symmetrical shape with respect to a predetermined first center line C1 between the pattern of the primary drive wiring PDL, which corresponds to the primary drive electrode PD, and the pattern of the secondary drive wiring SDL, which corresponds to the secondary drive electrode SD. The pattern of the primary detection wiring PPL, which corresponds to the primary detection electrode PPO, and the pattern of the secondary detection wiring SPL, which corresponds to the secondary detection electrode SPO, are also symmetrical with respect to the first center line C1. This allows the wiring 70 corresponding to the primary drive electrode PD and the wiring 70 corresponding to the secondary drive electrode SD to be arranged in a symmetrical shape. Furthermore, the wiring 70 corresponding to the primary detection electrode PPO and the wiring 70 corresponding to the secondary detection electrode SPO can also be arranged in a symmetrical shape. Therefore, the arrangement and shape of the wiring 70 corresponding to electrodes 40 with the same function, as well as the arrangement and shape of the wiring 70 corresponding to the surrounding electrodes 40, are symmetrical before and after electrical reversal control. As a result, the relative distance relationship between the arrangement and shape of the wiring 70 corresponding to each electrode 40, as well as the arrangement and shape of the wiring 70 corresponding to the surrounding electrodes 40, becomes the same before and after electrical reversal control, and the bias component due to electrical crosstalk also becomes the same. Therefore, in a configuration that performs electrical reversal control, it is possible to suppress the persistence of bias components due to electrical crosstalk. Consequently, in a configuration that performs electrical reversal control, in order to suppress a decrease in the accuracy of angular velocity detection, the effects of the generated electrical crosstalk can be sufficiently canceled out by making the conditions of electrical crosstalk the same before and after electrical reversal control.

[0117] Furthermore, in this embodiment, as described above, the extension of the first center line C1 and the predetermined center point Cs intersect at a certain point. This allows multiple electrodes 40 for each function to be arranged on the oscillator to excite, detect, and cancel out vibrations of cosNθ, while arranging multiple wirings 70 corresponding to the multiple electrodes 40 for each function in a space-saving manner around the oscillator 20, with the patterns of the wirings 70 to be replaced being symmetrical.

[0118] Furthermore, in this embodiment, as described above, the multiple primary drive electrodes PD, multiple primary detection electrodes PPO, multiple secondary detection electrodes SPO, multiple secondary drive electrodes SD, primary drive wiring PDL, primary detection wiring PPL, secondary detection wiring SPL, and secondary drive wiring SDL each have a connection order in the circuit, and the wiring patterns 70 that are subject to swapping in electrical reversal control and are symmetrical with respect to the first center line C1 have the same connection order in the circuit. As a result, the connection order in the circuit of the wiring 70 that is subject to swapping and the surrounding wiring 70 does not change before and after electrical reversal control, so the connection order in the circuit, which is one of the factors that affects the electrical crosstalk occurring in each wiring 70, does not change before and after electrical reversal control, and the effects of electrical crosstalk can be more effectively canceled out.

[0119] Furthermore, in this embodiment, as described above, the electrodes 40 that are to be swapped in the electrical reversal control are connected in the same order in the circuit. As a result, the electrodes 40 that are to be swapped do not change in the connection order in the circuit before and after the electrical reversal control. Therefore, the connection order in the circuit, which is one of the factors that affects the electrical crosstalk that occurs in each electrode 40, does not change before and after the electrical reversal control, and thus the effects of electrical crosstalk can be more effectively canceled out.

[0120] Furthermore, in this embodiment, as described above, the positions of the multiple pads 80 for connecting each other with bonding wires 71 are symmetrical with respect to the first center line C1. This makes it possible to arrange the multiple bonding wires 71 symmetrically. As a result, the conditions for electrical crosstalk occurring in the bonding wires 71, and the effects of electrical crosstalk occurring in the bonding wires 71, can be made substantially the same before and after electrical reversal control. Consequently, in a configuration that performs electrical reversal control, the effects of electrical crosstalk caused by the bonding wires 71 can be canceled out.

[0121] Furthermore, in this embodiment, as described above, in the wiring connection section 11, the primary drive wiring connection section PDP and the secondary drive wiring connection section SDP, which have the same connection order in the circuit, are arranged symmetrically with respect to the first center line C1, and the primary detection wiring connection section PPP and the secondary detection wiring connection section SPP, which have the same connection order in the circuit, are arranged symmetrically with respect to the first center line C1. As a result, the wiring connection section 90 that is subject to swapping before and after electrical reversal control and the surrounding wiring connection sections 90 do not change their connection order in the circuit, so the conditions for electrical crosstalk based on the positional relationship of the primary drive wiring connection section PDP, the primary detection wiring connection section PPP, the secondary detection wiring connection section SPP, and the secondary drive wiring connection section SDP, and the effects of the generated electrical crosstalk can be made substantially the same before and after electrical reversal control. As a result, the effects of electrical crosstalk occurring in the primary drive wiring connection PDP, primary detection wiring connection PPP, secondary detection wiring connection SPP, and secondary drive wiring connection SDP can be canceled out.

[0122] (Modifications) It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims rather than the description of the embodiments above, and further includes all modifications (modifications) within the meaning and scope equivalent to the claims.

[0123] For example, the above embodiment shows an example in which a primary oscillation of the cos2θ mode is excited in the oscillator 20, but the present invention is not limited to this. For example, a primary oscillation of the cosNθ mode (where N is a natural number of 2 or more) may be excited in the oscillator. In this case, the support portion and electrodes are provided in 4N directions arranged at equal angular intervals in the circumferential direction of the oscillator.

[0124] For example, as in the oscillator 200 of the gyroscope 201 shown in Figure 12, when a primary oscillation of the cos3θ mode is excited in the oscillator 200, multiple electrodes 240 (electrodes 240a to 240l) are provided at 12 equally spaced directions in the circumferential direction of the oscillator 200. In this case, electrodes 240a, 240c, 240e, 240g, 240i, and 240k become secondary drive electrodes SD. Also, electrodes 240b, 240d, 240f, 240h, 240j, and 240l become primary drive electrodes PD.

[0125] Furthermore, multiple electrodes 240m to 240x are provided at 12 equally spaced directions around the oscillator 200. Electrodes 240m, 240o, 240q, 240s, 240u, and 240w form the secondary detection electrode SPO. Electrodes 240n, 240p, 240r, 240t, 240v, and 240x form the primary detection electrode PPO.

[0126] Furthermore, when a first-order vibration of the cos3θ mode is excited in the oscillator 200, there are six possible imaginary lines that can serve as centerlines: the first centerline C1, the second centerline C2, the third centerline C3, the fourth centerline C4, the fifth centerline C5, and the sixth centerline C6. The angles formed by the first centerline C1, the second centerline C2, the third centerline C3, the fourth centerline C4, the fifth centerline C5, and the sixth centerline C6 are each 30 degrees.

[0127] When the first center line C1 is used as the center line, the primary drive electrode PD and the secondary drive electrode SD are symmetrical with respect to the first center line C1, as shown in Figure 12. When the second center line C2 is used as the center line, the primary drive electrode PD and the secondary drive electrode SD are symmetrical with respect to the second center line C2. When the third center line C3 is used as the center line, the primary drive electrode PD and the secondary drive electrode SD are symmetrical with respect to the third center line C3. When the fourth center line C4 is used as the center line, the primary drive electrode PD and the secondary drive electrode SD are symmetrical with respect to the fourth center line C4. When the fifth center line C5 is used as the center line, the primary drive electrode PD and the secondary drive electrode SD are symmetrical with respect to the fifth center line C5. When the sixth center line C6 is used as the center line, the primary drive electrode PD and the secondary drive electrode SD are symmetrical with respect to the sixth center line C6.

[0128] Furthermore, when the first center line C1 is used as the center line, the primary detection electrode PPO and the secondary detection electrode SPO are symmetrical with respect to the first center line C1, as shown in Figure 12. Similarly, when the second center line C2 is used as the center line, the primary detection electrode PPO and the secondary detection electrode SPO are symmetrical with respect to the second center line C2. Similarly, when the third center line C3 is used as the center line, the primary detection electrode PPO and the secondary detection electrode SPO are symmetrical with respect to the third center line C3. Similarly, when the fourth center line C4 is used as the center line, the primary detection electrode PPO and the secondary detection electrode SPO are symmetrical with respect to the fourth center line C4. Similarly, when the fifth center line C5 is used as the center line, the primary detection electrode PPO and the secondary detection electrode SPO are symmetrical with respect to the fifth center line C5. Similarly, when the sixth center line C6 is used as the center line, the primary detection electrode PPO and the secondary detection electrode SPO are symmetrical with respect to the sixth center line C6.

[0129] In a gyroscope 201 equipped with an oscillator 200 as shown in Figure 12, the primary drive wiring PDL and secondary drive wiring SDL may be arranged symmetrically with respect to the first center line C1, second center line C2, third center line C3, fourth center line C4, fifth center line C5, or sixth center line C6. Similarly, the primary detection wiring PPL and secondary detection wiring SPL may be arranged symmetrically with respect to the first center line C1, second center line C2, third center line C3, fourth center line C4, fifth center line C5, or sixth center line C6.

[0130] Furthermore, although the above embodiment shows an example in which the oscillator 20 is annular, the present invention is not limited thereto. For example, the oscillator may be flat or dome-shaped (hemispherical). As long as the oscillator electrodes and wiring are swapped, there are no limitations on the shape of the oscillator. In the case of a dome-shaped (hemispherical) oscillator, the electrodes on the oscillator are arranged on the curved surface of the hemisphere or on the flat surface of the bottom.

[0131] Furthermore, although the above embodiment shows an example in which the primary drive electrode PD, primary detection electrode PPO, secondary detection electrode SPO, and secondary drive electrode SD are each arranged in four directions, the present invention is not limited thereto. For example, the primary drive electrode, primary detection electrode, secondary detection electrode, and secondary drive electrode may each be arranged in two directions.

[0132] Furthermore, in the above embodiment, an example was shown in which the wirings 70, electrodes 40, and wiring connections to be swapped in the electrical reversal control are connected in the same order in the circuit, but the present invention is not limited to this. If the effects of electrical crosstalk can be sufficiently canceled out by subtracting the output signals to the secondary drive electrodes before and after the electrical reversal control, the wirings, electrodes, and wiring connections to be swapped may be connected in different orders in the circuit.

[0133] Furthermore, the shape of the support portion 30 shown in the above embodiment is merely an example and is not limited thereto. If the effects of electrical crosstalk can be sufficiently canceled out by differentiating the output signals to the secondary drive electrode before and after electrical reversal control, other electrical elements may be provided between the multiple switches and the vibrator for the purpose of performing functions unrelated to the present invention. In this case, different electrical elements may be provided for the electrodes to be swapped and their wiring. Also, if the effects of electrical crosstalk before and after swapping can be sufficiently canceled out by providing electrical elements with similar configurations for the electrodes to be swapped and their wiring, other electrical elements may be provided between the multiple switches and the vibrator.

[0134] Furthermore, although the above embodiment shows an example in which the positions of the multiple pads 80 are symmetrical with respect to the first center line C1, the present invention is not limited to this. For example, the positions of the multiple pads 80 only need to be symmetrical with respect to either the first center line C1 or the second center line C2.

[0135] Furthermore, in the above embodiment, an example was shown in which the primary drive electrode PD is replaced with the secondary drive electrode SD and the primary detection electrode PPO is replaced with the secondary detection electrode SPO by electrical reversal control, but the present invention is not limited thereto. For example, the primary drive electrode may be replaced with the secondary detection electrode and the primary detection electrode may be replaced with the secondary drive electrode by electrical reversal control.

[0136] Furthermore, although the above embodiment shows an example in which the support portion 30 and the vibrator 20 are provided with two electrodes 40 arranged in parallel with each other, the present invention is not limited to this. For example, the support portion and the vibrator may be provided with three or more electrodes arranged in parallel with each other. That is, there may be three or more rows of electrodes. Also, a dummy support portion without electrodes may be included. Depending on the form of the vibrator, there may be only one support portion. Also, the support portion itself may not exist. In this case as well, by adjusting the wiring pattern after the switching portion, the number of bonding wires provided in the wiring, or the installation of other electrical elements, the same effects as in the above embodiment can be obtained by matching the resistance component or capacitance to be replaced.

[0137] Furthermore, the shape of the substrate 10 shown in the above embodiment is merely an example and is not limited thereto. The shape of the substrate is not limited to a square, and the center of the substrate does not need to coincide with the center of the oscillator. Also, the angle of the support portion, the angle of the substrate, and the angle of the electrodes on the oscillator are not limited, with respect to the center of the oscillator.

[0138] Furthermore, in the above embodiment, the wiring 70 and electrodes 40 are electrically connected to each electrode 40 on the surface of the vibrator 20 by providing wiring 70 and electrodes 40 on the surface of the substrate 10 and the support portion 30. However, the electrodes on the vibrator may also be electrically connected by wiring to members other than the substrate and support portion. In this case as well, the same effect as in the above embodiment can be obtained by matching the resistance component or capacitance to be replaced by measures such as the wiring pattern between the switching portion and the vibrator, the number of bonding wires provided in the wiring, or the installation of other electrical elements.

[0139] Furthermore, in the above embodiment, an example was shown in which one switch 160 as a switching unit is provided for each of the primary drive electrode PD, secondary drive electrode SD, primary detection electrode PPO, and secondary detection electrode SPO, but the present invention is not limited to this. For example, switches as switching units for switching each electrode and its wiring may be provided on the inlet side and the outlet side.

[0140] Furthermore, although the above embodiment shows an example in which the gyro element 100, primary AC power supply 110, primary detection unit 120, secondary AC power supply 130, secondary detection unit 140, and calculation unit 150a are mounted on the same substrate, the present invention is not limited thereto. For example, the vibration-type gyro element, primary AC power supply, primary detection unit, secondary AC power supply, secondary detection unit, and calculation unit may each be mounted on separate substrates. Alternatively, the vibration-type gyro element, primary AC power supply, primary detection unit, secondary AC power supply, secondary detection unit, and calculation unit may each be housed in separate packages. Alternatively, the vibration-type gyro element and other components may be mounted on separate substrates or housed in separate packages. In that case, the primary AC power supply and secondary AC power supply may be mounted on yet another substrate or housed in yet another package.

[0141] 10 Substrate 11 Wiring connection section 20 Vibrator 30 Support section 40, 40a-40p, 240, 240a-240x Electrodes 70, 70a-70d Wiring 71, 71a-71l Bonding wire 80, 80a-80l Pad 90, 90a-90p Wiring connection section 100, 200 Vibrating gyro element 101, 201 Gyroscope 150 Control section C1 First center line C2 Second center line Cs Center point PD Primary drive electrode PDL, PDL1-PDL4 Primary drive wiring PDP, PDP1-PDP4 Primary drive wiring connection section SD Secondary drive electrode SDL, SDL1-SDL4 Secondary drive wiring SDP, SDP1-SDP4 Secondary drive wiring connection section PPO Primary detection electrodes PPL, PPL1-PPL6 Primary detection wiring PPP, PPP1-PPP4 Primary detection wiring connection SPO Secondary detection electrodes SPL, SPL1-SPL6 Secondary detection wiring SPP, SPP1-SPP4 Secondary detection wiring connection

Claims

1. A vibrating gyro element comprising: a substrate; an oscillator; a plurality of electrodes arranged on the oscillator and used for detecting the angular velocity applied to the oscillator; a plurality of wirings arranged on the substrate and provided corresponding to the plurality of electrodes; and a control unit that performs control for detecting the angular velocity, wherein the plurality of electrodes include a primary drive electrode that excites a primary vibration in the oscillator; a primary detection electrode that detects the primary vibration; a secondary detection electrode that detects a secondary vibration of the oscillator caused by the angular velocity; and a secondary drive electrode that drives the oscillator to cancel out the secondary vibration; wherein the plurality of wirings include primary drive wiring provided corresponding to the primary drive electrode; primary detection wiring provided corresponding to the primary detection electrode; secondary detection wiring provided corresponding to the secondary detection electrode; and secondary drive wiring provided corresponding to the secondary drive electrode. The control unit is configured to perform electrical reversal control, which swaps the functions of the primary drive electrode and primary drive wiring with the functions of the secondary drive electrode and secondary drive wiring, and swaps the functions of the primary detection electrode and primary detection wiring with the functions of the secondary detection electrode and secondary detection wiring, and to detect the angular velocity based on the difference in the output signal to the secondary drive electrode before and after the electrical reversal control, wherein the pattern of the primary drive wiring and the pattern of the secondary drive wiring are symmetrical with respect to a predetermined first center line, and the pattern of the primary detection wiring and the pattern of the secondary detection wiring are symmetrical with respect to the first center line, or symmetrical with respect to a second center line in which at least one of the position and direction of extension is different from the first center line, in a gyroscope.

2. The gyroscope according to claim 1, wherein the oscillator is annular, flat, or dome-shaped, and has vibration modes of cosNθ (where N is a natural number of 2 or more) centered at a predetermined center point, and the first center line, the second center line, and the extension of the predetermined center point intersect at a certain point.

3. The gyroscope according to claim 1, wherein there are multiple primary drive wirings, primary detection wirings, secondary detection wirings, and secondary drive wirings, and there are multiple primary drive electrodes, primary detection electrodes, secondary detection electrodes, and secondary drive electrodes, and the multiple primary drive wirings connect multiple primary drive electrodes in series, the multiple primary detection wirings connect multiple primary detection electrodes in series, the multiple secondary detection wirings connect multiple secondary detection electrodes in series, the multiple secondary drive wirings connect multiple secondary drive electrodes in series, and there is a connection order in the circuit for each of the multiple primary drive electrodes, the multiple primary detection electrodes, the multiple secondary detection electrodes, the multiple secondary drive electrodes, the multiple primary drive wirings, the multiple primary detection wirings, the multiple secondary detection wirings, and the multiple secondary drive wirings, and there is a connection order in the circuit for each of the multiple primary drive electrodes, the multiple primary detection electrodes, the multiple secondary detection electrodes, the multiple secondary drive electrodes, the multiple primary drive wirings, the multiple primary detection wirings, the multiple secondary detection wirings, and the multiple secondary drive wirings, and there is a connection order in the circuit for each of the wiring patterns that are subject to swapping in the electrical reversal control and are symmetrical with respect to the first center line or the second center line.

4. The gyroscope according to claim 3, wherein the electrodes to be swapped in the electrical reversal control are connected in the same order in the circuit.

5. The gyroscope according to claim 4, wherein the plurality of wirings have pads provided on the substrate for connecting them with bonding wires, and the positions of the plurality of pads are symmetrical with respect to the first center line or the second center line.

6. Between the gyro element and the control unit, there is a wiring connection section comprising: a plurality of primary drive wiring connection sections connected to the primary drive wiring and the control unit and performing input / output to the primary drive electrode; a plurality of primary detection wiring connection sections connected to the primary detection wiring and the control unit and performing input / output to the primary detection electrode; a plurality of secondary detection wiring connection sections connected to the secondary detection wiring and the control unit and performing input / output to the secondary detection electrode; and a plurality of secondary drive wiring connection sections connected to the secondary drive wiring and the control unit and performing input / output to the secondary drive electrode; wherein each of the plurality of primary drive wiring connection sections, the plurality of primary detection wiring connection sections, the plurality of secondary detection wiring connection sections, and the plurality of secondary drive wiring connection sections each have a connection order in the circuit; and the control unit, in the electrical reversal control, swaps the functions of the primary drive wiring connection sections and the secondary drive wiring connection sections whose connection order in the circuit is the same as each other, and swaps the functions of the primary detection wiring connection sections and the secondary detection wiring connection sections whose connection order in the circuit is the same as each other. The gyroscope according to claim 1, wherein in the wiring connection section, the primary drive wiring connection section and the secondary drive wiring connection section, which have the same connection order in the circuit, are arranged symmetrically with respect to the first center line or the second center line, and the primary detection wiring connection section and the secondary detection wiring connection section, which have the same connection order in the circuit, are arranged symmetrically with respect to the first center line or the second center line.

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