Detection device and defect detection apparatus

Abstract

A detection device (1) and a defect detection apparatus (1). The detection device (10) comprises a support (100), light source assemblies (200), and capture modules (300), wherein the light source assemblies (200) each comprise a first light source (210) and a second light source (220), the first light source (210) and the second light source (220) being arranged on the support (100) in a staggered manner; and the capture modules (300) are movably disposed on the support (100) so as to move to positions aligned with the first light sources (210) and positions aligned with the second light sources (220).

Description

Detection devices and defect detection equipment

[0001] Related applications

[0002] This application claims priority to Chinese Patent Application No. 2024115993383, filed November 11, 2024, entitled "Detection Apparatus and Defect Detection Equipment". This application also claims priority to Chinese Patent Application No. 2024227372774, filed November 11, 2024, entitled "Detection Apparatus and Defect Detection Equipment". Both applications are incorporated herein by reference in their entirety. Technical Field

[0003] This application relates to the field of defect detection technology, and in particular to a detection device and defect detection equipment. Background Technology

[0004] In the processing and production process, before semi-finished products are assembled or before finished products leave the factory, defect detection is usually performed on semi-finished and finished workpieces to screen out defective products. Currently, visual inspection is mainly carried out by using visual detectors such as cameras in conjunction with light sources. However, for visual inspection, different types of light sources have different lighting effects, and a single light source is difficult to meet the inspection requirements, which urgently needs to be improved. Summary of the Invention

[0005] According to various embodiments of this application, a detection device is provided, the detection device including a bracket, a light source assembly and an imaging module, the light source assembly including a first light source and a second light source, the first light source and the second light source being staggered on the bracket; the imaging module is movably disposed on the bracket to move to a position aligned with the first light source and a position aligned with the second light source.

[0006] In one embodiment, the first light source and the second light source are arranged sequentially in a first direction, and the shooting module is movably mounted on the bracket along the first direction; the light source assembly further includes a third light source, the first light source has a hollow light-transmitting area, and the third light source is movably mounted on the bracket along the first direction to move to a position aligned with or offset from the hollow light-transmitting area.

[0007] In one embodiment, the first light source includes a plurality of illumination components, which are evenly spaced in a circumferential direction around a reference axis and together form the hollow light-transmitting area; when the imaging module is aligned with the first light source, the optical axis of the imaging module coincides with the reference axis.

[0008] In one embodiment, the lighting component is rotatably mounted on the bracket to adjust the light emission angle.

[0009] In one embodiment, the optical axis of the imaging module extends along a second direction, which intersects with the first direction, and the first light source, the second light source, and the third light source are located at different positions along the second direction.

[0010] In one embodiment, the first direction is perpendicular to the second direction.

[0011] In one embodiment, the bracket includes a connecting plate and supporting members, a plurality of supporting members are spaced apart on the connecting plate along the second direction, and each supporting member extends along the first direction; the shooting module, the first light source and the third light source are respectively disposed on different supporting members, and the second light source is disposed on the connecting plate.

[0012] In one embodiment, the first light source is configured as a combined bar light source.

[0013] In one embodiment, the second light source is configured as a coaxial light source.

[0014] In one embodiment, the third light source is configured as a striped light source.

[0015] In one embodiment, the first light source, the second light source, and the third light source are configured as light sources of different types.

[0016] In one embodiment, the shooting module and the light source component that provides illumination for the shooting module are referred to as shooting modules, and a plurality of shooting modules are spaced apart on the bracket.

[0017] In one embodiment, the support includes a support plate and a gantry frame. The light source assembly and the imaging module are both disposed on the support plate. The gantry frame has a receiving groove and a first slide rail. The number of first slide rails is at least two and they are respectively disposed on both sides of the receiving groove. The support plate slides in cooperation with the first slide rails. The detection device also includes a first driving unit. The first driving unit is at least partially disposed in the receiving groove and connected to the support plate to drive the support plate to slide.

[0018] In one embodiment, the shooting module and the light source component that provides illumination for the shooting module are referred to as shooting modules, and multiple shooting modules are provided on both opposite sides of the gantry.

[0019] According to various embodiments of this application, a defect detection device is also provided, the defect detection device including a transfer device and a detection device as described above, the transfer device being used to carry a workpiece and transport the workpiece to the detection range of the detection device.

[0020] Details of one or more embodiments of this application are set forth in the following drawings and description. Other features, objects, and advantages of this application will become apparent from the specification, drawings, and claims. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the disclosed drawings without creative effort.

[0022] Figure 1 is an isometric schematic diagram of the detection device provided in some embodiments of this application.

[0023] Figure 2 is an isometric view of the bracket, light source assembly and imaging module in some embodiments of the detection device shown in Figure 1.

[0024] Figure 3 is a side view of the detection device shown in Figure 2 when the imaging module is aligned with the first light source in some embodiments.

[0025] Figure 4 is a side view of the detection device shown in Figure 2 when the imaging module is aligned with the second light source in some embodiments.

[0026] Figure 5 is an isometric schematic diagram of the first light source in the detection device shown in Figure 2 in some embodiments.

[0027] Figure 6 is a side view of some embodiments of the detection device shown in Figure 2, where the imaging module is aligned with the first light source and the third light source is aligned with the hollow light-transmitting area.

[0028] Figure 7 is a side view of the lighting component of the first light source shown in Figure 5 after adjusting the lighting angle in some embodiments.

[0029] Figure 8 is an isometric view of the support in the detection device shown in Figure 2 in some embodiments.

[0030] Figure 9 is a side view of the bracket shown in Figure 8 in some embodiments.

[0031] Figure 10 is a side view of the detection device shown in Figure 1 in some embodiments.

[0032] Figure 11 is a front view of the bracket and the first drive unit in some embodiments of the detection device shown in Figure 1.

[0033] Figure 12 is a front view of the bracket, first drive unit and second drive unit in some embodiments of the detection device shown in Figure 1.

[0034] Figure 13 is an isometric view of the support and drive units in the detection device shown in Figure 2 in some embodiments.

[0035] Figure 14 is an isometric view of the connecting plate and the purging component in some embodiments of the detection device shown in Figure 2.

[0036] Figure 15 is an isometric schematic diagram of a defect detection device provided in some other embodiments of this application.

[0037] Figure 16 is an isometric schematic diagram of the transfer device in the defect detection equipment shown in Figure 15 in some embodiments.

[0038] Figure 17 is an isometric view of the transfer component in the transfer device shown in Figure 16 in some embodiments.

[0039] Reference numerals: 1. Defect detection equipment; 10. Detection device; 11. Imaging module; 100. Bracket; 110. Connecting plate; 120. Support component; 121. First support component; 121a. Second slide rail; 122. Second support component; 123. Third support component; 123a. Third slide rail; 124. Fourth support component; 124a. Vertical plate; 125. Fifth support component; 130. Bearing plate; 140. Gantry frame; 141. First slide rail; 142. Receiving slot; 150. First pallet; 160. Second pallet; 170. Mounting bracket; 200. Light source assembly; 210. First light source; 211. Hollow light-transmitting area; 212. Illumination component; 220. Second light source; 230. Third light source; 300. Imaging module; 410. First drive unit 411, First driver; 412, First lead screw; 413, First connecting seat; 420, Second drive unit; 421, Second driver; 422, Second lead screw; 423, Second connecting seat; 430, Third drive unit; 431, Third driver; 432, Third lead screw; 433, Third connecting seat; 434, Transmission belt; 440, Fourth drive unit; 441, Cylinder; 442, Slider; 500, Purge component; 510, Purge hole; 20, Transfer device; 21, Drive platform; 22, Transfer component; 22a, Frame; 22b, Connecting beam; 22c, Fixture; 30, Base; O, Reference axis; O1, First axis; O2, Second axis; L1, Optical axis; S1, First direction; S2, Second direction; S3, Third direction. Detailed Implementation

[0040] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0041] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0042] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0043] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0044] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0045] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0046] Please refer to Figures 1 to 4. An embodiment of this application provides a detection device 10 for detecting defects in a workpiece. These defects may include, but are not limited to, scratches, missing grooves, uneven surfaces, or dirt. The detection device 10 includes a support 100, a light source assembly 200, and an imaging module 300. The imaging module 300 is used to capture images of the workpiece. The light source assembly 200 provides illumination to the imaging module 300 to improve the accuracy of the acquired images. The light source assembly 200 includes a first light source 210 and a second light source 220, which are staggered and arranged on the support 100. The imaging module 300 is movably mounted on the support 100 to move to a position aligned with the first light source 210 and to a position aligned with the second light source 220. It is understood that, as shown in Figure 3, when the imaging module 300 is aligned with the first light source 210, the first light source 210 provides illumination for the imaging module 300 to capture images. As shown in Figure 4, when the shooting module 300 is aligned with the second light source 220, the second light source 220 is used to provide illumination for the shooting module 300 to take pictures.

[0047] In the aforementioned detection device 10, the first light source 210 and the second light source 220 respectively provide illumination to the imaging module 300, enabling the imaging module 300 to obtain different imaging effects, thereby facilitating the thorough detection of potential defects in the workpiece. Furthermore, the imaging module 300 can move to a position aligned with the first light source 210 and to a position aligned with the second light source 220, eliminating the need for two separate imaging modules 300 corresponding to different light sources, simplifying the structure of the detection device 10 and reducing its cost. It should be understood that the first light source 210 and the second light source 220 can be configured as different types of light sources. It should be noted that the type of light source can be distinguished based on the imaging effect obtained by the imaging module 300 when the light source provides illumination. In short, different types of light sources will result in different imaging effects for the imaging module 300 when used to provide illumination.

[0048] Furthermore, the first light source 210 and the second light source 220 can be one of the following light sources: coaxial light source, bar light source, stripe light source, dome light source, backlight light source, point light source, low-angle light source, area light source, line scan light source, structured light source, and AOI special light source. For example, the first light source 210 can be configured as a combined bar light source, which facilitates the display of localized minor defects in the workpiece (such as scratches and dents). The second light source 220 can be configured as a coaxial light source, which features uniform illumination and high contrast, making it easy to clearly display dirt, damage, bubbles, and product outlines on the workpiece surface. Of course, the first light source 210 and the second light source 220 can also be configured as other different types of light sources as needed.

[0049] The light source assembly 200 is not limited to only two light sources. For example, referring to Figures 3 and 4, in one embodiment, the light source assembly 200 also includes a third light source 230. The first light source 210, the second light source 220, and the third light source 230 provide illumination to the imaging module 300, enriching the imaging effect of the imaging module 300 and facilitating the full detection of potential defects in the workpiece. Furthermore, the third light source 230 can be one of the following: coaxial light source, stripe light source, fringe light source, dome light source, backlight light source, point light source, low-angle light source, surface light source, line scan light source, structured light source, and AOI special light source. For example, the third light source 230 can be configured as a stripe light source. Stripe light sources can provide high-contrast stripe patterns, making small details on the workpiece surface clearly visible, which helps in measuring and identifying surface defects or shape changes. Stripe light sources can be used for structured light illumination, which can project specific stripe patterns. By analyzing the deformation or offset of the stripes on the workpiece surface, the three-dimensional shape and contour information of the object can be obtained, facilitating 3D measurement and inspection. In one embodiment, the first light source 210, the second light source 220, and the third light source 230 can be configured as light sources of different types.

[0050] The first light source 210 and the second light source 220 are arranged sequentially along the first direction S1. The shooting module 300 is movably mounted on the bracket 100 along the first direction S1, so that the shooting module 300 can move to a position aligned with the first light source 210 and to a position aligned with the second light source 220, respectively. The first light source 210 has a hollow light-transmitting area 211. The third light source 230 is movably mounted on the bracket 100 along the first direction S1, so that it can move to a position aligned with the hollow light-transmitting area 211 and to a position offset from it. In this embodiment, the third light source 230 and the shooting module 300 can have a generally parallel movement trajectory, so that the third light source 230 can move to a position aligned with the shooting module 300. Furthermore, the first light source 210 has a hollow light-transmitting area 211. Since the hollow light-transmitting area 211 is essentially hollow, when the first light source 210 is turned off, the first light source 210 does not affect the shooting of the shooting module 300. This allows the third light source 230 to provide illumination at a position aligned with the first light source 210, thereby reducing the size of the detection device 10.

[0051] It should be noted that most commonly used lighting sources (such as the aforementioned coaxial light, combined strip light source, and striped light source) allow the shooting light from the imaging module 300 to pass through for shooting. However, if the shooting light from the imaging module 300 passes through two of the aforementioned light sources simultaneously, the shooting effect is limited. Therefore, in order to reduce the occurrence of longitudinal overlap between two light sources, the design usually sets each light source to be staggered from each other, resulting in a large structural volume of the detection device 10. In this application, since the third light source 230 can move along the first direction S1, the third light source 230 can avoid the hollow light-transmitting area 211, that is, avoid the first light source 210 that is providing illumination, reducing the negative effect of the third light source 230 blocking the first light source 210's illumination. Furthermore, some light sources (such as the first light source 210) allow the shooting light from the imaging module 300 to pass through unobstructed (i.e., they have the aforementioned hollow light-transmitting area 211), so this type of light source can be placed on the side relatively close to the imaging module 300. In this case, this type of light source will not have a negative impact on the other light source that overlaps with it. In other words, when the third light source 230 is aligned with the hollow light-transmitting area 211 and the first light source 210 is turned off, the first light source 210 has virtually no impact on the illumination of the third light source 230. When the first light source 210 provides illumination, the third light source 230 can be moved away to reduce its impact on the illumination of the first light source 210. This arrangement allows the longitudinally arranged first light source 210 and third light source 230 to provide illumination independently without affecting each other. It should be further noted that the light sources that allow unobstructed passage of the shooting light from the imaging module 300 typically have similar illumination effects. Therefore, the third light source 230 usually does not use this type of light source. Thus, if the third light source 230 is fixed below the first light source 210 in the reference direction, the third light source 230 will affect the illumination effect of the first light source 210. Of course, this embodiment does not strictly limit the third light source 230 to not having a hollow light-transmitting area; it can be adjusted according to actual needs.

[0052] For example, referring to Figures 5 and 6, in one embodiment, the first light source 210 includes a plurality of illumination components 212, which are evenly spaced in a circumferential direction around the reference axis O and enclose the hollow light-transmitting region 211 as described above. When the imaging module 300 is aligned with the first light source 210, the optical axis L1 of the imaging module 300 coincides with the reference axis O. The alignment of the third light source 230 with the first light source 210 means that the projection of the third light source 230 along the reference axis O at least partially overlaps with the hollow light-transmitting region 211.

[0053] To facilitate understanding of the illumination provided by the light source assembly 200, the following descriptions will explain the usage of each light source included in the light source assembly 200 when providing illumination:

[0054] Referring to Figure 3, when the first light source 210 is used to provide illumination, the imaging module 300 can be moved to a position aligned with the first light source 210. At this time, the third light source 230 can be moved to a position aligned with the second light source 220 to offset it from the first light source 210, thereby reducing the reflection and refraction of illumination and imaging light by the third light source 230, which would affect the detection.

[0055] Referring to Figure 4, when the second light source 220 is used to provide illumination, the imaging module 300 can be moved to a position aligned with the second light source 220. Similarly, the third light source 230 can be moved to a position aligned with the first light source 210 to offset it from the second light source 220, thereby reducing the impact of the third light source 230 on detection by reflecting and refracting illumination and imaging light.

[0056] Referring to Figure 6, when the third light source 230 is used to provide illumination, the imaging module 300 can be moved to a position aligned with the first light source 210. At this time, the projection of the third light source 230 along the reference axis O at least partially overlaps with the hollow light-transmitting area 211, the first light source 210 is in the off state, and the hollow light-transmitting area 211 allows the imaging light to pass through without obstruction. Therefore, the third light source 230 can provide sufficient and effective illumination.

[0057] It should be noted that the above description of the positions of each component when the first light source 210, the second light source 220 and the third light source 230 provide illumination is a simple explanation. However, the embodiments of this application do not limit the timing of each light source providing illumination, and can be flexibly set according to actual needs.

[0058] In one embodiment, the lighting component 212 can be a strip light source, that is, the first light source 210 is a combined strip light source as described above, and multiple strip light sources are combined for illumination. Referring to Figure 7, the lighting component 212 is rotatably mounted on the bracket 100 to adjust the light emission angle. For example, the lighting rays provided by each lighting component 212 can be adjusted to intersect at the same position on the reference axis O to form a bright area and improve the lighting effect. The lighting direction of the lighting component 212 is shown as L2 in Figure 7. Of course, each lighting component 212 can also be adjusted to have different light emission angles as needed, which is not limited here. It should be understood that the number of lighting components 212 shown in the various figures of the specification is 4, but the number of lighting components 212 is not limited to this. The number of lighting components 212 can be set to 2, 3, 4, 5, 6, 7, 8, 10, and 12, etc., as needed.

[0059] Referring again to Figure 2, in one embodiment, the optical axis L1 of the imaging module 300 extends along the second direction S2, which intersects with the first direction S1. The first light source 210, the second light source 220, and the third light source 230 are located at different positions on the second direction S2 to make full use of space and make the structure of the detection device 10 more compact.

[0060] Furthermore, the first direction S1 and the second direction S2 are perpendicular to each other.

[0061] Referring to Figures 2, 8, and 9, in one embodiment, the bracket 100 includes a connecting plate 110 and support members 120. Multiple support members 120 are spaced apart on the connecting plate 110 along a second direction S2, and each support member 120 extends along a first direction S1. The shooting module 300, the first light source 210, and the third light source 230 are respectively disposed on different support members 120, and the second light source 220 is disposed on the connecting plate 110. The multiple support members 120 are disposed on the connecting plate 110 along the second direction S2, allowing the shooting module 300, the first light source 210, the second light source 220, and the third light source 230 to be spaced apart along the second direction S2, thus fully utilizing the installation space on the connecting plate 110. Each support member 120 extends along the first direction S1, which facilitates the movement of the shooting module 300 and the third light source 230 along the first direction S1, and also facilitates the staggered arrangement of the first light source 210 and the second light source 220 along the first direction S1.

[0062] Please refer to Figures 8 and 9. The multiple support members 120 can be divided into a first support member 121, a second support member 122, and a third support member 123, which are arranged sequentially along the second direction S2. The shooting module 300 is movably mounted on the first support member 121, the first light source 210 is mounted on the second support member 122, and the third light source 230 is movably mounted on the third support member 123.

[0063] Further, as shown in Figure 9, one end of the first support member 121 is connected to the connecting plate 110, and the other end extends away from the connecting plate 110 in a direction perpendicular to the connecting plate 110 (i.e., the S1 direction). A second slide rail 121a is provided on the first support member 121, extending along the first direction S1 and located on the top surface of the first support member 121. The shooting module 300 slides in cooperation with the second slide rail 121a. One end of the third support member 123 is connected to the connecting plate 110, and the other end extends away from the connecting plate 110 in a direction perpendicular to the connecting plate 110 (i.e., the S1 direction). A third slide rail 123a is provided on the third support member 123, located along the first direction S1 and located on the bottom surface of the third support member 123.

[0064] Referring to Figures 8 and 10, in one embodiment, the imaging module 300 and the corresponding light source assembly 200 providing illumination for the imaging module 300 are referred to as imaging modules 11, and multiple imaging modules 11 are spaced apart on the bracket 100. That is, the bracket 100 is provided with multiple imaging modules 300 and multiple light source assemblies 200, with each light source assembly 200 providing illumination for a corresponding imaging module 300. Further, the bracket 100 also includes a first support plate 150 and a second support plate 160, with multiple imaging modules 300 disposed on the first support plate 150. Multiple first support members 121 are present, and the first support plate 150 slides in cooperation with the multiple first support members 121. When the first support plate 150 slides relative to the first support members 121, it can drive multiple imaging modules 300 to move synchronously to different workstations and simultaneously perform imaging and inspection on multiple workpieces, resulting in high inspection efficiency. Similarly, multiple second support members 122 and third support members 123 can also be present to improve the stability of the support. Multiple third light sources 230 are disposed on the second support plate 160, and the second support plate 160 is slidably engaged with multiple third support members 123.

[0065] Please refer to Figure 8. In one embodiment, the bracket 100 further includes a mounting frame 170, which is disposed on the first support plate 150. The imaging module 300 is disposed on the mounting frame 170, which supports the imaging module 300 so that the imaging module 300 is placed in a preset posture, facilitating imaging and inspection of the workpiece.

[0066] Referring to Figure 12, in one embodiment, the support 100 further includes a support plate 130 and a gantry 140, with the light source assembly 200 and the imaging module 300 both disposed on the support plate 130. The gantry 140 has a receiving groove 142 and a first slide rail 141. There are at least two first slide rails 141, each located on one side of the receiving groove 142, and the support plate 130 slides in conjunction with the first slide rails 141. The detection device 10 also includes a first drive unit 410, which is at least partially disposed within the receiving groove 142 and connected to the support plate 130 to drive the support plate 130 to slide. By providing first slide rails 141 on both sides of the receiving groove 142, the stability of the movement of the support plate 130 can be improved. It is understood that since multiple imaging modules 11 are disposed on the support plate 130, the support plate 130 has a high load, thus improving the stability of its movement. Furthermore, by placing the first drive unit 410 in the receiving slot 142, the structural size of the detection device 10 can be reduced.

[0067] The first slide rail 141 can extend along a third direction S3, that is, the first drive unit 410 drives the carrier plate 130 and the shooting module 300 and the light source assembly 200 disposed on the carrier plate 130 to move along the third direction S3. The third direction S3 intersects with both the first direction S1 and the second direction S2. Furthermore, the first direction S1, the second direction S2 and the third direction S3 are arranged perpendicularly to each other.

[0068] As shown in Figure 10, multiple shooting modules 11 are provided on both opposite sides of the gantry 140. Further, the detection device 10 may include two support plates 130 and two first drive units 410. The two support plates 130 are respectively located on opposite sides of the gantry 140, and the two first drive units 410 may be located in the receiving groove 142, and respectively drive the two support plates 130 to move along the third direction S3.

[0069] Referring to Figures 2 and 12, in one embodiment, the connecting plate 110 is movably disposed on the support plate 130 along the second direction S2. Further, the detection device 10 also includes a second driving unit 420, which is disposed on the support plate 130 and connected to the connecting plate 110 to drive the connecting plate 110 and the imaging module 300 and light source assembly 200 disposed on the connecting plate 110 to move along the second direction S2.

[0070] Referring to Figure 2, in one embodiment, the detection device 10 further includes a third driving unit 430 and a fourth driving unit 440. The bracket 100 further includes a fourth support member 124 and a fifth support member 125. The third driving unit 430 is disposed on the fourth support member 124, and the fourth driving unit 440 is disposed on the fifth support member 125. The third driving unit 430 is connected to the first tray 150 to drive the first tray 150 and a plurality of imaging modules 300 disposed on the first tray 150 to move along the first direction S1. The fourth driving unit 440 is connected to the second tray 160 to drive the second tray 160 and a plurality of third light sources 230 disposed on the second tray 160 to move along the first direction S1.

[0071] Referring to Figure 11, in one embodiment, the first drive unit 410 can drive the support plate 130 to move using a lead screw and nut. Further, the first drive unit 410 includes a first driver 411, a first lead screw 412, and a first connecting seat 413. Both the first driver 411 and the first lead screw 412 are disposed within a receiving groove 142. A portion of the structure of the first connecting seat 413 extends out of the receiving groove 142 and connects to the support plate 130. The first driver 411 is connected to the end of the first lead screw 412 to drive the first lead screw 412 to rotate around its own axis. The first lead screw 412 passes through and engages with the first connecting seat 413, which is connected to the support plate 130. Thus, when the first lead screw 412 rotates, it can drive the first connecting seat 413 to move axially. The first lead screw 412 can extend along a third direction S3, and the first lead screw 412 is used to drive the first connecting seat 413 to move along the third direction S3.

[0072] Referring to Figure 12, similar to the first drive unit 410, the second drive unit 420 includes a second driver 421, a second lead screw 422, and a second connecting seat 423. The second driver 421 and the second lead screw 422 are disposed on the support plate 130, and the second connecting seat 423 is connected to the connecting plate 110. The second driver 421 is connected to the end of the second lead screw 422 to drive the second lead screw 422 to rotate around its own axis. Furthermore, the second lead screw 422 passes through the second connecting seat 423 and engages with it. Therefore, when the second lead screw 422 rotates, it can drive the second connecting seat 423 to move axially. The second lead screw 422 can extend along a second direction S2, and the second lead screw 422 is used to drive the second connecting seat 423 to move along a third direction.

[0073] Referring to Figure 13, in one embodiment, the third drive unit 430 can also be driven by a lead screw and nut. That is, the third drive unit 430 includes a third driver 431, a third lead screw 432, and a third connecting seat 433. The third connecting seat 433 is connected to the first support plate 150, and the third lead screw 432 passes through and engages with the third connecting seat 433. The third driver 431 is connected to the end of the third lead screw 432 to drive the third lead screw 432 to rotate around its own axis. Thus, when the third lead screw 432 rotates, it can drive the third connecting seat 433 to move axially. The third lead screw 432 can extend along the first direction S1, and the third lead screw 432 is used to drive the third connecting seat 433 to move along the first direction S1.

[0074] Referring to Figure 9, further, to simplify the dimensions of the detection device 10 in the first direction S1, the third driver 431 and the third lead screw 432 can be connected by a transmission belt 434. This arrangement allows the third driver 431 and the third lead screw 432 to be arranged side-by-side, rather than coaxially. Furthermore, the fourth support member 124 is provided with a vertical plate 124a, which extends along the second direction S2 to support the third driver 431.

[0075] Please continue referring to Figure 13. In one embodiment, the fourth drive unit 440 can be directly driven by a linear actuator, such as a cylinder or an electric actuator. Further, the fourth drive unit 440 includes a cylinder 441 and a slider 442. The cylinder 441 extends along the first direction S1 and can drive the slider 442 to slide along the first direction S1. The slider 442 is connected to the second support plate 160 to drive the second support plate 160 to move along the first direction S1.

[0076] Referring to Figure 14, in one embodiment, the detection device 10 further includes a blowing element 500, which is disposed on the connecting plate 110. The blowing element 500 has a blowing hole 510 facing the workpiece to be inspected. The blowing element 500 is also used to connect to a positive pressure generator (not shown in the figure, the same below), which inputs positive pressure blowing air into the blowing element 500. The blowing hole 510 guides the blowing air towards the workpiece to be inspected, thereby removing dust and other impurities from the surface of the workpiece and improving the accuracy of the imaging detection.

[0077] Referring to Figure 15, one embodiment of this application also provides a defect detection device, which includes a transfer device 20 and a detection device 10. The transfer device 20 is used to carry the workpiece and move it to the detection range of the detection device 10. Furthermore, the transfer device 20 can also adjust its position according to the movement of the imaging module 300. For example, when the imaging module 300 moves to a position aligned with the first light source 210, the transfer device 20 can move the workpiece to the position aligned with the first light source 210. When the imaging module 300 moves to a position aligned with the second light source 220, the transfer device 20 can move the workpiece to the position aligned with the second light source 220.

[0078] Furthermore, the defect detection equipment 1 also includes a base 30, and the detection device 10 and the transfer device 20 are both located on the base 30. The detection device 10 can be mounted on the transfer device 20 to facilitate the detection of the workpiece carried by the transfer device 20.

[0079] Referring to Figures 16 and 17, in one embodiment, the transfer device 20 includes a drive platform 21 and a transfer member 22. The transfer member 22 is used to carry the workpiece. The drive platform 21 is connected to the transfer member 22, and the drive platform 21 can drive the transfer member 22 to move along the first direction S1. That is, the drive platform 21 can transport the workpiece along the first direction S1 by driving the transfer member 22 to move along the first direction S1. With this configuration, when the shooting module 300 moves along the first direction S1 to switch the light source, the transfer device 20 can drive the workpiece to move accordingly according to the movement of the shooting module 300, so that the workpiece can always be within the field of view of the shooting module 300.

[0080] Referring to Figure 17, the transfer unit 22 further includes a frame 22a, a connecting beam 22b, and multiple fixtures 22c. The frame 22a is connected to the drive platform 21, which drives the transfer unit 22 to move along the first direction S1 by moving the frame 22a. The connecting beam 22b is rotatably connected to the frame 22a around the first axis O1, and each fixture 22c is rotatably connected to the connecting beam 22b around the second axis O2, with the first axis O1 and the second axis O2 intersecting. With this configuration, multiple workpieces fixed by the fixtures 22c can rotate synchronously around the first axis O1, enriching the angular position of the workpieces within the field of view of the imaging module 300 and improving the detection effect. Furthermore, each fixture 22c rotates around the second axis O2 and the connecting beam 22b, meaning that each fixture 22c can also rotate around the second axis O2, further enriching the posture of the workpieces within the field of view of the imaging module 300 and improving the detection effect.

[0081] In one embodiment, the angle position of the connecting beam 22b and / or the fixture 22c can be adjusted according to different positions of the imaging module 300 to perform targeted detection of detailed areas of the workpiece.

[0082] Furthermore, the first axis O1 can be perpendicular to the second axis O2, and the first axis O1 can be parallel to the third direction S3. The second axis O2 can be parallel to the plane formed by the first direction S1 and the second direction S2.

[0083] As shown in Figure 16, in one embodiment, the transfer device 20 may include multiple transfer members 22, all of which are connected to the drive platform 21 to move in the same direction (i.e., the first direction S1) under the drive of the drive platform 21. The frame 22a of each transfer member can rotate to a face-to-face position with the fixtures 22c, at which point the two fixtures 22c face-to-face transfer workpieces to each other. For example, taking the vacuum adsorption of workpieces by the fixtures 22c as an example, when the two fixtures 22c face each other, they can adsorb the opposite sides of the workpiece respectively. At this time, one fixture 22c can release the workpiece and transfer the workpiece to the other fixture 22c.

[0084] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0085] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A detection device, characterized in that, The detection device includes: support; A light source assembly, comprising a first light source and a second light source, wherein the first light source and the second light source are staggered and arranged on the bracket; A shooting module is movably mounted on the bracket to move to a position aligned with the first light source and a position aligned with the second light source.

2. The detection device according to claim 1, characterized in that, The first light source and the second light source are arranged sequentially in a first direction, and the shooting module is movably mounted on the bracket along the first direction; The light source assembly further includes a third light source. The first light source has a hollow light-transmitting area. The third light source is movably disposed on the bracket along the first direction so as to move to a position aligned with or offset from the hollow light-transmitting area.

3. The detection device according to claim 2, characterized in that, The first light source includes multiple lighting components, which are evenly spaced in a circumferential direction around a reference axis and together form the hollow light-transmitting area; when the imaging module is aligned with the first light source, the optical axis of the imaging module coincides with the reference axis.

4. The detection device according to claim 3, characterized in that, The lighting component is rotatably mounted on the bracket to adjust the light emission angle.

5. The detection device according to claim 2, characterized in that, The optical axis of the shooting module extends along a second direction, which intersects with the first direction. The first light source, the second light source, and the third light source are located at different positions along the second direction.

6. The detection device according to claim 5, characterized in that, The first direction is perpendicular to the second direction.

7. The detection device according to claim 5, characterized in that, The bracket includes a connecting plate and supporting members. A plurality of supporting members are spaced apart on the connecting plate along the second direction, and each supporting member extends along the first direction. The shooting module, the first light source, and the third light source are respectively located on different support members, and the second light source is located on the connecting plate.

8. The detection device according to any one of claims 2 to 7, characterized in that, The first light source is configured as a combined bar light source.

9. The detection device according to any one of claims 2 to 8, characterized in that, The second light source is configured as a coaxial light source.

10. The detection device according to any one of claims 2 to 9, characterized in that, The third light source is configured as a striped light source.

11. The detection device according to any one of claims 2 to 10, characterized in that, The first light source, the second light source, and the third light source are configured as light sources of different types.

12. The detection device according to any one of claims 1 to 11, characterized in that, The shooting module and the light source component that provides illumination for the shooting module are referred to as shooting modules, and multiple shooting modules are spaced apart on the bracket.

13. The detection device according to claim 1, characterized in that, The support includes a support plate and a gantry frame. The light source assembly and the shooting module are both mounted on the support plate. The gantry frame has a receiving slot and a first slide rail. There are at least two first slide rails, which are respectively located on both sides of the receiving slot. The support plate slides in cooperation with the first slide rails. The detection device further includes a first driving unit, which is at least partially disposed within the receiving groove and connected to the support plate to drive the support plate to slide.

14. The detection device according to claim 13, characterized in that, The shooting module and the light source component that provides illumination for the shooting module are referred to as shooting modules. Multiple shooting modules are provided on both opposite sides of the gantry.

15. A defect detection device, characterized in that, The defect detection equipment includes a transfer device and a detection device as described in any one of claims 1 to 14, wherein the transfer device is used to carry the workpiece and move the workpiece to the detection range of the detection device.

Images