Apparatus and method for automatic panel centering

Abstract

A right quadrilateral panel automatic centering system for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus is provided and includes: a panel transport apparatus having an end effector with a holding station having a predetermined center, the end effector being configured to hold the right quadrilateral panel at the holding station; a sensor being configured to effect, substantially coincident, with the panel transport apparatus in motion, sensing of an edge of the right quadrilateral panel held on the end effector; and a controller that moves, with the panel transport apparatus, the right quadrilateral panel so the sensor senses the edge. The controller, from sensor data, characterizes respective lines of each of the intersecting edges so as to resolve an eccentricity of the right quadrilateral panel with the predetermined center and a rotation angle of the right quadrilateral panel relative to the predetermined reference frame.

Description

Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295APPARATUS AND METHOD FOR AUTOMATIC PANEL CENTERINGCROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application is a non-provisional of and claims the benefit of United States provisional patent application number 63 / 768,581 filed on March 7, 2025, United States provisional patent application number 63 / 765,140 filed on February 28, 2025, and United States provisional patent application number 63 / 717,671 filed on November 7, 2024, the disclosure of which are incorporated herein by reference in their entireties.BACKGROUND1 . Field

[0002] The present disclosure generally relates to substrate processing, and more particularly, to centering of substrates for processing.2. Brief Description of Related Developments

[0003] Substrate centering is an exceptionally important procedure that is used to help in locating the center of the substrate prior to placing it in the subsequent process module. There are several types of center-finding systems adopted currently in, for example, semiconductor manufacturing applications. Those that determine the location of the substrate center while the substrate is moving are called automatic wafer centering (AWC) systems. They typically consist of sets of through-beam or reflective sensors, arranged on the transport chamber through which substrates pass. The information on the substrate’s location is obtained by recording encoder position every time a sensor triggers (blocked or unblocked) and,Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 depending on the configuration used, the shift of the substrate is calculated based on the data from one or more sensors. To center a circular substrate (such as the wafer illustrated in Fig. 1), AWC needs to calculate three coordinates: Wafer Center X position (WCx), Wafer Center Y position (WCy) and Wafer Diameter (Wd). In some cases, wafer diameter assumed to be known, and system calculates only X, Y position (eccentricity) of the wafer.

[0004] In the last few years, in addition to circular substrates, industry started to use rectangular and square panels and reticles. To center and align a rectangular panel (such as illustrated in Fig. 2) we need to calculate not three, but five variables: panel center position x (PCx), panel center position y (PCy), panel rotation angle T (PRT), panel size x (PSx), and panel size y (PSy). Due to the five variables current AWC hardware configuration and algorithms can not be used. As a result, new automatic panel centering (APC) system needs to be designed and developed. This system will need to measure at least the five different panel parameters to calculate the five parameters. In addition, robot, delivering the panel to the process module, needs to have wrist rotation capability or panel rotational station located nearby to be able to correct panel rotational position before placing it in the process module.

[0005] Accordingly, the present disclosure addresses a number of those issues.BRIEF DESCRIPTION OF THE DRAWINGS

[0006] The foregoing aspects and other features of the present disclosure are explained in the following description, taken in connection with the accompanying drawings, wherein:

[0007] Fig. 1 is an exemplary schematic illustration of a circular substrate in accordance with the present disclosure;

[0008] Fig. 2 is an exemplary schematic illustration of a rectangular substrate in accordance with the present disclosure;Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0009] Fig. 3 is aa schematic illustration of a portion of a substrate processing system in accordance with the present disclosure;

[0010] Fig 4A is a schematic illustration of a portion of an automatic panel centering system in accordance with the present disclosure;

[0011] Fig. 4B is a schematic illustration of automatic panel centering system calibration in accordance with the present disclosure;

[0012] Fig. 4C is a schematic illustration of automatic panel centering system measurement in accordance with the present disclosure;

[0013] Fig 5 A is a schematic illustration of a portion of an automatic panel centering system in accordance with the present disclosure;

[0014] Fig. 5B is a schematic illustration of automatic panel centering system calibration in accordance with the present disclosure;

[0015] Fig. 5C is a schematic illustration of automatic panel centering system measurement in accordance with the present disclosure;

[0016] Figs. 6A, 6B, and 6C are exemplary schematic illustrations of portions of an automatic panel centering system in accordance with the present disclosure;

[0017] Figs. 7 A and 7B are schematic illustrations of automatic panel centering system measurement in accordance with the present disclosure;

[0018] Figs. 7C and 7D are schematic illustrations of automatic panel centering system measurement in accordance with the present disclosure;

[0019] Figs. 8A and 8B are schematic illustrations of automatic panel centering system measurement in accordance with the present disclosure;Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0020] Figs. 8C and 8D are schematic illustrations of automatic panel centering system measurement in accordance with the present disclosure;

[0021] Fig 9 A is a schematic illustration of a portion of an automatic panel centering system in accordance with the present disclosure;

[0022] Figs. 9B, 9C, and 9D are schematic illustrations of automatic panel centering system measurement in accordance with the present disclosure;

[0023] Figs. 10A and 10B are respectively schematic side and perspective view illustrations of a transport robot in accordance with the present disclosure;

[0024] Fig. 10C is a schematic top view illustration of the transport robot of Figs. 10A and 10B at least partially located within a chamber in accordance with the present disclosure;

[0025] Figs. 11A and 11B are respectively schematic side and perspective view illustrations of a transport robot in accordance with the present disclosure;

[0026] Fig. 11C is a schematic top view illustration of the transport robot of Figs. 11 A and 1 IB at least partially located within a chamber in accordance with the present disclosure;

[0027] Figs. 12A and 12B are respectively schematic side and perspective view illustrations of a transport robot in accordance with the present disclosure;

[0028] Fig. 12C is a schematic top view illustration of the transport robot of Figs. 12A and 12B at least partially located within a chamber in accordance with the present disclosure;

[0029] Figs. 13A and 13B are respectively schematic side and perspective view illustrations of a transport robot in accordance with the present disclosure;

[0030] Fig. 13C is a schematic top view illustration of the transport robot of Figs. 13A and 13B at least partially located within a chamber in accordance with the present disclosure;Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0031] Figs. 14A and 14B are respectively schematic side and perspective view illustrations of a transport robot in accordance with the present disclosure;

[0032] Fig. 14C is a schematic top view illustration of the transport robot of Figs. 14A and 14B at least partially located within a chamber in accordance with the present disclosure;

[0033] Figs. 15A and 15B are respectively schematic side and perspective view illustrations of a transport robot in accordance with the present disclosure;

[0034] Fig. 15C is a schematic top view illustration of the transport robot of Figs. 15A and 15B at least partially located within a chamber in accordance with the present disclosure;

[0035] Figs. 16A and 16B are respectively schematic side and perspective view illustrations of a transport robot in accordance with the present disclosure;

[0036] Fig. 16C is a schematic top view illustration of the transport robot of Figs. 16A and 16B at least partially located within a chamber in accordance with the present disclosure;

[0037] Figs. 17A and 17B are respectively schematic side and perspective view illustrations of a transport robot in accordance with the present disclosure;

[0038] Fig. 17C is a schematic top view illustration of the transport robot of Figs. 17A and 17B at least partially located within a chamber in accordance with the present disclosure

[0039] Figs. 18A and 18B are respectively schematic side and perspective view illustrations of a transport robot in accordance with the present disclosure;

[0040] Fig. 18C is a schematic top view illustration of the transport robot of Figs. 18A and 18B at least partially located within a chamber in accordance with the present disclosure;

[0041] Fig. 19 is an exemplary flow diagram of a method in accordance with the present disclosure;Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0042] Fig. 20 is a schematic top view illustration of a transport robot in a retracted configuration in accordance with the present disclosure;

[0043] Fig. 21 s a schematic perspective view illustration of the transport robot of Fig. 20 in accordance with the present disclosure;

[0044] Fig. 22 is a schematic partial cross-sectional side view of the transport robot of Fig. 20 in accordance with the present disclosure;

[0045] Fig. 23 is a schematic top view illustration of the transport robot of Fig. 20 in an extended configuration;

[0046] Fig. 24 is a schematic top view illustration of the transport robot of Fig. 20 in an extended configuration; and

[0047] Figs. 25-27 are exemplary method flow diagrams in accordance with the present disclosure.DETAILED DESCRIPTION

[0048] The following detailed description is meant to assist the understanding of one skilled in the art, and is not intended in any way to unduly limit claims connected or related to the present disclosure.

[0049] The following detailed description references various figures, where like reference numbers refer to like components and features across various figures, whether specific figures are referenced, or not.

[0050] The word “each” as used herein refers to a single object (i.e.. the object) in the case of a single object or each object in the case of multiple objects. The words “a,” “an,” and “the” as usedAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 herein are inclusive of “at least one” and “one or more” so as not to limit the object being referred to as being in its “singular” form.

[0051] Spatial terms such as “left,” “right,” “top,” “bottom,” “upper,” “lower,” “front,” “back,” “vertical,” and “horizontal” as may be used herein are by way of example and illustration only are not meant to limit the description and may be exchanged in position and orientation.

[0052] The terms “substantially” and “about” as may be used herein refer to a feature that may be varied within an acceptable manufacturing tolerance for a given application.

[0053] The terms “may,” “can,” and “configured to” (and similar terms) used in the context of controls, controllers, computer components, and / or programming thereof (e.g., including large language models, neural networks, and other forms of machine learning), such as, for example, in the expression a “controller may ...” or a “controller is configured to” indicates that such controllers, computer components, and / or programming thereof includes suitable non-transitory programming and / or hardware to perform or otherwise execute the functionality associated therewith.

[0054] Figs. 2 and 3 illustrate an exemplary substrate (or panel) 200 and a portion of a substrate processing system 333 (also referred to as a semiconductor processing apparatus, although any suitable substrates may be processed) in accordance with the present disclosure. Although the present disclosure will be described with reference to the drawings, it should be understood that the present disclosure can be embodied in many forms. In addition, any suitable size, shape or type of elements or materials could be used.

[0055] As described herein, the present disclosure may provide for automatic panel centering for effecting processing of the panels 200 in any suitable vacuum or atmospheric environment of the substrate processing system or semiconductor processing apparatus 333. The panel 200 may be a right quadrilateral panel (generally referred to as a panel) 200. For example, a right quadrilateral panel automatic centering system 371 for automatic centering of the right quadrilateral panel 200Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 for a semiconductor processing apparatus 333 is provided. The right quadrilateral panel automatic centering system 371 may include a frame 333F with a predetermined reference frame REF. A panel transport apparatus or transport robot 300 (illustrated as having a radius or SCARA configuration for exemplary purposes only) is provided and is connected to the frame 333F. The transport robot 300 has an end effector 310E with a right quadrilateral panel holding station SHS (also referred as a substrate holding station or holding station) having a predetermined center 310EC. The end effector 310E is configured to hold the right quadrilateral panel 200 at the panel holding station SHS and transport the panel 200 within the semiconductor processing apparatus 333. A sensor 400, 600 having at least one of a linear image array sensor (e.g., sensor 400) and a through beam sensor (e.g., sensor 600) is provided and is connected to the frame 333F, although the sensor(s) 400, 600 may be any suitable type of sensor including, but not limited to. cameras, through-beam sensors, retro-reflective sensors, light curtains ultrasonic sensors, and photoelectric edge sensors. The sensor 400, 600 is configured to effect, substantially coincident, with the panel transport apparatus 300 in motion, sensing of an edge 200E of the right quadrilateral panel 200 held on the end effector 310E. A controller 399 is communicably connected to the sensor 400, 600 to register (e.g., store in a memory of or accessible by the controller 399) sensor data, and is operably connected to the panel transport apparatus 300 so as to move, with the panel transport apparatus 300, the right quadrilateral panel 200 at the panel holding station SHS so the sensor 400, 600 senses the edge 200E. The controller 399 is configured to move the right quadrilateral panel 200 and the sensor 400, 600 is disposed so that at least one of the at least one of the linear image array sensor 400 senses part of the panel, and the through beam sensor 600 sense edge points, that describe more than one intersecting edges 200E of the right quadrilateral panel 200. The controller 399 is configured so that, from the registered sensor data, the controller 399 characterizes respective lines of each of the intersecting edges 200E so as to resolve an eccentricity EC of the right quadrilateral panel 200 with the predetermined center 310EC and a rotation angle or angular position deviation DRA (see, e.g., Fig. 10C as well as Figs. 4A-9D) of the panel 200 relative to the predetermined reference frame REF.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0056] The substrate processing system 333 may include the transport robot 300, a terminal holding station or terminal holding station or location 342 (such as of a process module, substrate cassette, load lock, etc.), and an automatic panel centering sensor system 370. The transport robot 300 may be connected to any suitable frame 333F (only a portion of which is illustrated in Fig. 3 for clarity) of the substrate processing system 333. The frame 333F may form a part of a panel transport chamber 1000 (see Figs. 10C, 11C, 12C, 13C, 14C, 15C, 16C, and 17C) in which at least a portion of the transport robot 300 is disposed and operates, where the panel transport chamber 1000 is configured to hold the vacuum or atmospheric environment of the substrate processing system 333. The transportrobot 300 may be any suitable robot having a (e.g., at least one) transport or robot arm 310 (also referred to as a panel transport robot arm or arm). The (or each of the at least one) transport arm 310 may be any suitable articulated transport arm (such as those described herein) having, for example, at least two-degree of freedom movement, for transporting the panel 200. The (or each of the at least one) arm 310 includes an (e.g., at least one) end effector 310E having a (e.g., at least one) panel holding station SHS, SHS1 SHS2 (see also Figs. 10A-18C) thereon, and at which a panel 200 is seated and held on the end effector 310E for transport by the arm 310. The arm 310 is connected to any suitable controller 399 that commands movement of the arm 310 for picking and placing the panel 200 to and from the terminal holding station 342. The terminal holding station 342 may be any suitable substrate holding station including, but not limited to, substrate cassettes, load locks, process modules, buffers, etc.

[0057] The automatic panel centering sensor system 370 includes one or more substrate or panel detection sensor 400, 600. The one or more substrate detection sensor 400, 600 may be a single line (or strip) sensor 400 and / or a beam (or laser) sensor 600. The one or more substrate detection sensor 400. 600 is connected to the frame 333F and positioned relative to the arm 310 so that a path of travel of the panel 200 passes through (e.g., such as to block or reflect radiation emitted from the one or more sensor 400, 600, where the blockage or reflection of the radiation effects detection of the panel 200) the one or more sensor 400. 600.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0058] The controller 399 is connected to the one or more sensor 400, 600 of the automatic panel centering sensor system 370 (and forms a part of the right quadrilateral panel automatic centering system 371) for at least receiving data (embodying detection of the panel 200 by the automatic panel centering sensor system 370) from the one or more sensor 400, 600. The controller 399 is configured to determine a pose of the panel 200 from the data and determine a corrective motion of the arm 310 for reorienting the panel in proper alignment (e.g., along the X and Y directions and in rotation T within the X-Y plane), so as to correct any angular bias / error or angular deviation DRA (the terms angular bias / error and angular deviation may be used interchangeably) of the panel 200 and / or so as to correct any eccentricity EC error, for placement of the panel 200 at the terminal holding station 342.

[0059] In accordance with the present disclosure, the panel 200 is a rectangular panel (referred to herein as panel 200). The panel 200 may have equal length sides (i.e., a square panel).

[0060] Referring to Fig. 4A, in accordance with the present disclosure, where dimensions PSx, PSy of the rectangular panel 200 are known, a single line (or strip) sensor 400 may be employed to measure panel eccentricity EC error and angular position (or rotation T - e.g., angular bias / error or angular deviation DRA error) of the panel 200. The panel eccentricity EC error is a distance (e.g., in the X and / or Y directions) that a center 200C of the panel 200 is offset from a center 310EC of the end effector 310E panel holding station SHS, SHS1, SHS2. The line sensor 400 may be positioned so that during one or more of rotation and extension (or retraction) of the transport robot 300 arm 310 (with the panel 200 held at a panel holding station SHS. SHS1, SHS2 of an end effector 310E), the panel 200 partially blocks the sensor 400. During calibration of the automatic panel centering sensor system 370, an operator may place a panel 200 in a desired position (e.g., with substantially zero eccentricity EC and substantially zero rotation T (e.g., substantially zero angular bias / error or angular deviation DRA)) on the end effector 310E and move the robot 300 arm 310 through the sensor 400 to obtain (in the controller 399) calibration data x’, y’ and slope (or rotation T) of the panel 200 (see Fig. 4B). During the normal operation of the automatic panel centering sensor system 370, the automatic panel centering sensor systemAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295370 collects data (embodying panel rotation T and eccentricity measurements) from the sensor 400 during panel 200 motion (e.g., such motion being effected by arm 310 movement). For example, the controller 399 receives the panel measurement data from the sensor 400. The controller 399 is configured (with any suitable non-transitory computer program code) to compare the collected measurement data to the calibration data (e.g., x’, y’, and slope data) and calculate values for the panel center in the X direction PCx, the panel center in the y direction PCy, and panel rotation PRT (see Figs. 2 and 4C). With reference to Fig. 4B the calculation of PCx, PCy, and PRT results in a discrete solution (three unknowns are solved with three equations) where PC(x,y)=PS(x,y) / 2, PRT=steady dx / dy, and x,y=f(PRT). Prior to panel 200 placement at the terminal holding location 342 (see Fig. 3) by the robot 300, the controller 399 (or any other suitable controller) commands movement of the robot 300, based on the calculated values for the panel center in the X direction PCx, the panel center in the y direction PCy, and panel rotation PRT, to correct a placement position of the panel 200 (e.g., such placement position may be referred to as station coordinates) so that the panel 200 is properly positioned and placed at a terminal holding station 342 with substantially zero eccentricity EC error and substantially zero angular bias / error or angular deviation DRA. hr the case of a square substrate or panel, a single sensor 400 may be employed to measure substrate or panel size.

[0061] In accordance with the present disclosure, where the dimensions PSx, PSy of the panel 200 are unknown, two or more (e.g., at least two) line or strip sensors 400A, 400B (see Fig. 5A) may be employed to measure the panel 200 dimensions, PSx, PSy, eccentricity EC, and angular position (or rotation T). The two or more sensors 400A, 400B may be positioned so that during one or more of rotation and extension (or retraction) of the arm 310, the panel 200 partially blocks both sensors 400A, 400B. During calibration of the automatic panel centering sensor system 370, an operator places a panel 200 in a desired position on the end effector 310E (e.g., with substantially zero eccentricity EC and substantially zero rotation T) and moves the transport robot 300 arm 310 through the sensors 400 A, 400B to obtain (in the controller 399) the calibration data x’, y’ and slope (or rotation T) of the panel 200 from the two or more sensors 400 A,Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295400B (see Fig. 5B). During the normal operation of the automatic panel centering sensor system 370, the automatic panel centering sensor system 370 collects data (embodying panel rotation T, eccentricity measurements, and panel size measurements) from the two or more sensors 400A, 400B during panel 200 motion (e.g., such motion being effected by arm 310 movement). For example, the controller 399 receives the panel measurement data from the sensors 400A, 400B. The controller 399 is configured (with any suitable non-transitory computer program code) to compare the collected data to the calibration data (e.g., x’, y’, and slope data) and calculate the panel center in the x direction PCx, the panel center in they direction PCy, the panel rotation PRT, the panel size indie x direction PSx, and the panel size in the ydirectionPSy (see Figs. 2 and 5C). With reference to Fig.5C,the calculation of PCx, PCy, PRT, PSx, PSy results in a discrete solution (five unknowns are solved with five equations) . Here, the values are PCx, PCy, PRT are determined (as noted above) for each sensor 400A, 400B and the values for PSx, PSy are determined from PCX, PCy, PRT knowing the distance between the sensors 00A, 400B. Prior to panel 200placement ataterminal holding station 342 (see Fig.3) by the transport robot 300, the controller 399 (or any suitable controller) commands movement of thetransportrobot 300, based on the calculated data for the panel center in the x direction PCx, the panel center in the y direction PCy, the panel rotation PRT, the panel size in the x direction PSx, and the panel size in the y direction PSy, to correct a placement position of the panel 200 so that the panel 200 is properly positioned and placed at a terminal holding station 342 with substantially zero eccentricity EC error and substantially zero angular bias / error or angular deviation DRA.

[0062] In accordance with the present disclosure, where the dimensions PSx, PSy of the panel 200 are known, one or more beam sensors (or lasers) 600A-600C (see Figs. 6A-6C) may be employed to measure the eccentricity EC and angular position (or rotation T) of the panel 200. As described herein, the one or more beam sensors 600A-600C may be positioned so that during one or more of rotation and extension (or retraction) of the arm 310, the panel 200 blocks the one or more sensors 600A-600C. While two sensors are illustrated in Figs. 6A and 6B, it is noted where a single sensor 600A-600C is employed, the transportrobot 300 arm 310 may perform more than one motion (e.g., linear and / or arcuate - where a resultant path of each of the two motions are angledAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 relative to each other by a non-zero angle) so that the automatic panel centering system obtains panel 200 information with respect to both rotation and extension (or retraction) of the arm 310, although two linear motions of the panel 200 through the sensor may be employed where the two linear motions are along paths that are angled relative to each other by a non-zero angle). During calibration of the automatic panel centering sensor system 370, an operator places a panel 200 in a desired position on the end effector 310E (e.g., with substantially zero eccentricity EC and substantially zero rotation T) and moves the robot 300 arm 310 through the sensors 600A-600C to obtain (in the controller 399) the calibration data xl, x2, yl, y2 of the panel 200 from the one or more sensors 600A-600C (see Figs. 7A and 7B). During the normal operation of the automatic panel centering system, the automatic panel centering sensor system 370 collects data (embodying panel rotation T and eccentricity measurements) from the one or more sensors 600A-600C during panel 200 motion (e.g., such motion being effected by arm 310 movement). For example, the controller 399 receives the panel measurement data from the sensor 400. The controller 399 is configured (with any suitable non-transitory computer program code) to compare the collected data to the calibration data (e.g., xl, x2, yl, y2) and calculate the panel center in the x direction PCx, the panel center in they direction PCy, and the panel rotation PRT (see Figs. 2, 7A, and 7B). With reference to Figs. 7A, and 7B the calculation of PCx, PCy, and PRT results in a discrete solution (three unknowns are solved with three equations) similar to that noted above, where PRT is resolved by a change in profile (values) between the data obtained from the two sensors (or the single sensor with the panel 200 moving along the two, separate and distinct, angled paths / motions) . Prior to panel 200 placement at a terminal holding location 342 by the robot 300, the controller 399 (or any other suitable controller) commands movement of the transport robot 300, based on the calculated data for the panel center in the x direction PCx, the panel center in they direction PCy, and the panel rotation PRT, to correct a placement position of the panel 200 so that the panel 200 is properly positioned and placed at a terminal holding station 342 with substantially zero eccentricity EC error and substantially zero angular bias / error or angular deviation DRA. It is noted that Figs. 7A and 7B illustrate sensing of an opaque (i.e., non-transparent) panel 200;Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 although, the present disclosure may be applied to transparent panels where Figs. 7C and 7D illustrate sensing of a transparent panel 200TP (and sensors signals obtained by the sensors).

[0063] In accordance with the present disclosure, where the dimensions PSx, PSy of the panel 200 are unknown, two or more beam sensors (or lasers) 600A-600C (see Figs. 6A-6C) may be employed to measure one or more of the panel 200 dimensions PSx, PSY, eccentricity, and angular position. As described herein, the two or more beam sensors 600A-600C may be positioned so that during one or more of rotation and extension (or retraction) of the aim 310, the panel 200 would block the three or more sensors 600A-600C. While Figs. 8A and 8B) illustrated three sensors 600A-600C, it is noted where two sensor 600A-600C are employed, the transpcrtrobot 300 arm 310 may perform more than one motion (e.g., linear and / or arcuate) so that the automatic panel centering system obtains panel 200 information with respect to both rotation and extension (or retraction) of the arm 310, although two linear motions of the panel 200 through the sensor may be employed where the two linear motions are along paths that are angled relative to each other by a non-zero angle). During calibration of the automatic panel centering system, an operator places a panel 200 in a desired position on the end effector 310E (e.g., with substantially zero eccentricity EC and substantially zero rotation T) and moves the robot 300 arm 310 through the sensors 600A-600C to obtain (with the controller 399) the calibration data XI, X2, Yl, Y2, Y3, Y4 from the two or more sensors 600A-600C (see Figs. 8A-8B). During the normal operation of the automatic panel centering sensor system 370, the automatic panel centering sensor system 370 collects data (embodying panel rotation T, eccentricity measurements, and panel size measurements) from the two or more sensors 600A-600C during panel 200 motion (e.g., such motion being effected by arm 310 movement). For example, the controller 399 receives the panel measurement data from the sensors 600A-600C. The controller 399 is configured (with any suitable non-transitory computer program code) to compare the collected data to the calibration data (e.g., XI, X2, Yl, Y2, Y3, Y4) and calculate the panel center in the x direction PCx, the panel center in the y direction PCy , the panel rotation PRT, the panel size in the x direction PSx, and the panel size in the y direction PSy (see Figs. 2, 8A, and 8B). WithAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 reference to Figs. 8A, and 8B the calculation of PCx, PCy, PRT, PSx, PSy results in a discrete solution (five unknowns are solved with five equations) similar to that noted above with respect to Figs. 7A and 7B with the addition of another sensor as in Fig. 5C, where PRT is resolved by a change in profile (values) between the data obtained from the two sensors 600 A, 600B. Prior to panel 200 placement at a terminal holding location 342, the controller 399 (or any suitable controller) commands movement ofthe robot 300, based on the calculated data for the panel center in the x direction PCx, die panel center in the y direction PCy, the panel rotation PRT, the panel size in the x direction PSx, and the panel size in the y direction PSy, to correct aplacementposition of the panel 200 so that the panel 200 is properly positioned and placed at a terminal holding station 342 with substantially zero eccentricity EC error and substantially zero angular bias / error or angular deviation DRA. It is noted that Figs. 8A and 8B illustrate sensing of an opaque (i.e., non-transparent) panel 200; although, the present disclosure may be applied to transparent panels where Figs. 8C and 8D illustrate sensing of a transparent panel 200TP (and sensors signals obtained by the sensors).

[0064] In accordance with the present disclosure, the automatic panel centering system may employ one or more line or strip sensors 400 in combination with one or more beam sensors (or lasers) 600 (see Fig. 9A with respect to sensing of the opaque / non-transparent panel 200 and Fig. 9D with respect to the sensing of the transparent panel 200TP). As an example, the one or more beam sensor 600 may be employed for calculating values for the panel center in the X direction PCx (see Fig. 9B) with motion of the panel 200 during an arm 310 rotation, and the one or more line sensors 400 may be employed for calculating values for the panel center in the X direction PCx, the panel center in the y direction PCy, and panel rotation PRT (see Fig. 9C) with motion of the panel 200 during an arm 310 extension (or retraction). As described above, whether the dimensions PSx, PSy of the panel 200 are known, the discrete solution for PCx, PCy, PRT or the discrete solution for PCx, PCy, PRT, PSx, PSy are determined in manners similar to those described above (where data embodying detection of the panel 200 by the respective strip sensor is analyzed as noted above for the strip sensors and the data for the beam sensor is analyzed as noted above with respect to the beam sensors).Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0065] As described herein, the right quadrilateral panel automatic centering system 371 includes a transport robot 300 that may have any suitable configuration, such as, for non-limiting explanatory purposes only, the exemplary configurations illustrated in Figs. 10A-24.

[0066] Generally, with reference to Figs. 3 and 10A-24, the right quadrilateral panel automatic centering system 371 includes the panel transport chamber 1000, a panel transport robot arm (generally referred to as a transport arm or robot arm) 310, a drive section 1030, and the controller 399. The panel transport chamber 1000 has at least one substrate transport opening 1099 disposed to connect the panel transport chamber 1000 and a process module PM via a pass-through slot valve SV (see, e.g., Figs. 10C, 11C, 12C, 13C, 14C, 15C, 16C, 17C, and 18C). The transport arm 310 is connected to the panel transport chamber 1000. The transport arm 310 has at least one upper arm or upper arm link 1001, 1001 A, 100 IB, pivotally mounted to the panel transport chamber 1000 at a shoulder joint SXJ, at least one forearm or forearm link 1002, 1002A, 1002B, 1002C, 1002D pivotally mounted at an elbow joint EXJ, EXJA, EXJB, EXJC, EXJD to each of the at least one upper arm 1001, 1001A, 1001B, and an end effector 310EA, 310EB, 310ED, 310EA1, 310EA2, 310EB1, 310EB2 with a right quadrilateral panel holding station SHS, SHS1, SHS2 having a predetermined center 310EC. The end effector 310EA, 310EB, 310ED, 310EA1, 310EA2, 310EB1, 310EB2 being pivotally mounted to the at least one forearm 1002, 1002A, 1002B, 1002C, 1002C at a corresponding wrist joint WXJ, WXJA, WXJB, that defines a wrist joint pivot axis WX, WXA, WXB. The end effector 310EA, 310EB, 310ED, 310EA1, 310EA2, 310EB1, 310EB2 is configured to hold the panel 200 at the terminal holding station 342 and transport the panel 200 through the pass-through slot valve SV to and from the process module PM. A drive section 1030, 1030D is connected to the transport arm 310 and has at least one motor T1-T7, Z with a shaft D operably coupled to the end effector 310EA, 310EB, 310ED, 310EA1, 310EA2, 310EB1, 310EB2 (see Figs. 10A-18C), or the at least one forearm 1002A, 1002B, 1002C, 1002D (see Figs. 20-24), so as to independently rotate the end effector 310EA, 310EB, 310ED, 310EA1, 310EA2. 310EB1, 310EB2 about the wrist joint pivot axis WX, WXA, WXB at the corresponding wrist joint WXJ, WXJA, WXJB relative to each oftheforearm 1002, 1002A, 1002BAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 and the at least one upper arm 1001. The controller 399 is communicably connected to the at least one motor T1-T7, Z and configured so as to effect automatic angular position correction (e.g., correcting angular bias / error or angular deviation DRA for placement) of the panel 200 held by the end effector 310EA, 310EB, 310ED, 310EA1, 310EA2, 310EB1, 310EB2, via at least independent rotation of the end effector 310EA, 310EB, 310ED, 310EA1, 310EA2, 310EB1, 310EB2 about the wrist joint pivot axis WX, WXA, WXB, which correction positions the panel 200 within tolerance (e.g., of about 25 nm or less) at least for passage through the pass-through slot valve SV and aligned placement (e.g., with substantially zero eccentricity EC error and substantially zero angular bias / error or angular deviation DRA at a terminal station (e.g., the terminal holding station 342) of the process module PM (or other suitable holding station).

[0067] Generally, with continued reference to Figs. 3 and 10A-24, the shaft D of the at least one motor T1-T7, Z has a drive axis corresponding thereto that describes a degree of freedom of the transport arm 310, and the controller 399 is configured to automatically effect angular position correction (e.g., align the panel 200 in the T, PRT direction so as to correct for any angular bias / eiTor or angular deviation DRA - see Figs. 2 and 10C) and centering correction (e.g., align the center 200C of the panel 200 in the X, PCX and / or Y, PCY directions to correct for any eccentricity EC error so that the panel center 200C is substantially coincident with a center 342C of the terminal holding station 342 of the process module or other holding station) at least in part with the degree of freedom that is common to both angular position correction and centering correction (see. e.g., at least Fig. 10C). The angular position correction, corrects angular bias / error or angular position deviation DRA and positions the panel 200 substantially true (e.g., with substantially no angular T, PRT deviation DRA and / or X-Y positional / eccentricity X, PCX, Y, PCY deviation relative to a predetermined pose PP of the panel 200 at the terminal holding station 342), within tolerance (e.g., 25 nm or less in rotation alignment and 25 nm or less in X-Y positional / eccentricity alignment; or 25 nm or less for combined rotational and X-Y positional / eccentricity alignment) of aligned placement at the terminal holding station 342, andAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 centering correction corrects eccentricity EC, within the tolerance (e.g., noted above), between a center 200C of the panel 200 and a placement center 342C of aligned placement.

[0068] In Figs. 10A-10C, the transport robot 300 is configured as transport robot 300A where the transport arm 310 has radius or SC ARA arm configuration with coupled end effectors 310A, 310B. The arm 310 of the transport robot 300 A includes an upper arm link 1001 rotatably coupled to a drive section 1030 about a shoulder axis SX of rotation. The drive section 1030 has rotational drive motors T1-T4. A linear or Z-axis drive motor Z may be provided to raise and lower the arm 310. A first forearm link 1002A is rotatably coupled to one end of the upper arm 1001 about a first elbow axis EXA of rotation. A first end effector 310EA is rotatably coupled to the first forearm link 1002A about a first wrist axis WXA of rotation. A second forearm link 1002B is rotatably coupled to another end of the upper arm link 1001 about a second elbow axis EXB of rotation. A second end effector 310EB is rotatably coupled to the second forearm link 1002B about a second wrist axis WXB of rotation. The upper arm link 1001 is coupled to and driven in rotation about the shoulder axis SX by drive motor Tl. The first forearm link 1002 A is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the first elbow axis EXA by drive motor T2. The second forearm link 1002B is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the second elbow axis EXB by drive motor T4. The end effectors 310EA, 310EB are both coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the respective wrist axis WXA, WXB by drive motor T3. Driving the end effectors 310EA, 310EB with the drive motor T3 provides for substantially simultaneous rotation of the end effectors 310EA, 310EB independently from rotation of the upper arm 1001 and forearms 1002A, 10022 for effecting panel 200 centering (eccentricity EC) and angular (angular bias / error or angular deviation DRA) position correction with picking and placing motions (e.g., to pick and place the panel 200) of the arm 310, in accordance with the panel 200 centering and angular position correction described herein.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0069] In Figs. 11A-11C, the transport robot 300 is configured as transport robot 300B where the transport arm 310 has radius or SC ARA arm configuration with independent end effectors 310A, 310B. The arm 310 of the transport robot 300B includes an upper arm link 1001 rotatably coupled to a drive section 1030 about a shoulder axis SX of rotation. The drive section 1030 has rotational drive motors T1-T5. A linear or Z-axis drive motor Z may be provided to raise and lower the arm 310. A first forearm link 1002A is rotatably coupled to one end of the upper arm 1001 about a first elbow axis EXA of rotation. A first end effector 310EA is rotatably coupled to the first forearm link 1002 A about a first wrist axis WXA of rotation. A second forearm link 1002B is rotatably coupled to another end of the upper arm link 1001 about a second elbow axis EXB of rotation. A second end effector 310EB is rotatably coupled to the second forearm link 1002B about a second wrist axis WXB of rotation. The upper arm link 1001 is coupled to and driven in rotation about the shoulder axis SX by drive motor Tl. The first forearm link 1002 A is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the first elbow axis EXA by drive motor T2. The second forearm link 1002B is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the second elbow axis EXB by drive motor T5. The end effector 310EA is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the respective wrist axis WXA by drive motor T3. The end effector 310EB is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the respective wrist axis WXB by drive motor T4. Driving the end effectors 310EA. 310EB with the respective drive motors T3, T4 provides for rotation of the end effectors 310EA, 310EB independently of each other and independently from rotation of the upper arm 1001 and forearms 1002A, 10022 for effecting panel 200 centering (eccentricity EC) and angular (angular bias / error or angular deviation DRA) position correction with picking and placing motions (e.g., to pick and place the panel 200) of the arm 310, in accordance with the panel 200 centering and angular position correction described herein.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0070] In Figs. 12A-12C, the transport robot 300 is configured as transport robot 300C where the transport arm 310 has radius or SCARA arm configuration with a dual blade end effector 310ED. The ami 310 of the transport robot 300C includes an upper arm link 1001 rotatably coupled to a drive section 1030 about a shoulder axis SX of rotation. The drive section 1030 has rotational drive motors T1-T3. A linear or Z-axis drive motor Z may be provided to raise and lower the arm 310. A forearm link 1002 is rotatably coupled to the upper arm 1001 about elbow axis EX of rotation. The end effector 310ED is rotatably coupled to the forearm link 1002 about wrist axis WX of rotation. The end effector 310ED, being a dual blade end effector has a panel holding station SHS1, SHS2 on each end of the end effector 310ED on opposite sides of the wrist axis WX although, more than one juxtaposed (side-by-side) panel holding station may be provided on the same side of the wrist axis WX. The upper arm link 1001 is coupled to and driven in rotation about the shoulder axis SX by drive motor Tl. The forearm link 1002 is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the elbow axis EX by drive motor T2. The end effector 310ED is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the wrist axis WX by drive motor T3. Driving the end effector 310ED with the drive motor T3 provides for rotation of the end effector 310ED independently from rotation of the upper arm 1001 and forearms 1002A, 10022 for effecting panel 200 centering (eccentricity EC) and angular (angular bias / error or angular deviation DRA) position correction with picking and placing motions (e.g., to pick and place the panel 200) of the arm 310, in accordance with the panel 200 centering and angular position correction described herein.

[0071] In Figs. 13A-13C, the transport robot 300 is configured as transport robot 300D where the transport arm 310 has radius or SCARA arm configuration with quad-end effectors facing the same direction. The arm 310 of the transport robot 300D includes an upper arm link 1001 rotatably coupled to a drive section 1030 about a shoulder axis SX of rotation. The drive section 1030 has rotational drive motors T1-T4. A linear or Z-axis drive motor Z may be provided to raise and lower the arm 310. A first forearm link 1002A is rotatably coupled to one end of the upper armAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br32951001 about a first elbow axis EXA of rotation. A first and second end effectors 310EA1, 310EA2 are rotatably coupled to the first forearm link 1002A about a first wrist axis WXA of rotation. A second forearm link 1002B is rotatably coupled to another end of the upper aim link 1001 about a second elbow axis EXB of rotation. A third and fourth end effectors 310EB1, 310EB2 are rotatably coupled to the second forearm link 1002B about a second wrist axis WXB of rotation. The upper arm link 1001 is coupled to and driven in rotation about the shoulder axis SX by drive motor Tl. The first forearm link 1002A is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the first elbow axis EXA by drive motor T2. The second forearm link 1002B is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the second elbow axis EXB by drive motor T4. The end effectors 310EA1, 310EA2, 310EB1, 310EB2 are commonly coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the respective wrist axis WXA, WXB by drive motor T3. Driving the end effectors 310EA1, 310EA2, 310EB1, 310EB2 with the drive motor T3 provides for substantially simultaneous rotation of the end effectors 310EA1, 310EA2, 310EB1, 310EB2 independently from rotation of the upper ami 1001 and forearms 1002 A, 10022 for effecting panel 200 centering (eccentricity EC) and angular (angular bias / error or angular deviation DRA) position correction with picking and placing motions (e.g., to pick and place the panel 200) of the arm 310, in accordance with the panel 200 centering and angular position correction described herein.

[0072] In Figs. 14A-14C, the transport robot 300 is configured as transport robot 300E where the transport arm 310 has radius or SC ARA arm configuration with quad-end effectors facing the same direction. The arm 310 of the transport robot 300E includes an upper arm link 1001 rotatably coupled to a drive section 1030 about a shoulder axis SX of rotation. The drive section 1030 has rotational drive motors T1-T5. A linear or Z-axis drive motor Z may be provided to raise and lower the arm 310. A first forearm link 1002A is rotatably coupled to one end of the upper arm 1001 about a first elbow axis EXA of rotation. A first and second end effectors 310EA1, 310EA2 are rotatably coupled to the first forearm link 1002A about a first wrist axis WXA of rotation. AAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 second forearm link 1002B is rotatably coupled to another end of the upper arm link 1001 about a second elbow axis EXB of rotation. A third and fourth end effectors 310EB1, 310EB2 are rotatably coupled to the second forearm link 1002B about a second wrist axis WXB of rotation. The upper arm link 1001 is coupled to and driven in rotation about the shoulder axis SX by drive motor Tl. The first forearm link 1002A is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the first elbow axis EXA by drive motor T2. The second forearm link 1002B is coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the second elbow axis EXB by drive motor T5. The first and second end effectors 310EA1, 310EA2 are coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the respective wrist axis WXA by drive motor T3. The third and fourth end effectors 310EB1, 310EB2 are coupled to (via any suitable transmission such as a belt / pulley or band / pulley transmission) and driven in rotation about the respective wrist axis WXB by drive motor T4. Driving the first and second end effectors 310EA1, 310EA2 and the third and fourth end effectors 310EB1, 310EB2 with the respective drive motors T3, T4 provides for rotation of end effector pairs (one pair being the first and second end effectors 310EA1, 310EA2 and the second pair being the third and fourth end effectors 310EB1, 310EB2) independently of each other and independently from rotation of the upper arm 1001 and forearms 1002 A, 10022 for effecting panel 200 centering (eccentricity EC) and angular (angular bias / error or angular deviation DRA) position correction with picking and placing motions (e.g., to pick and place the panel 200) of the arm 310, in accordance with the panel 200 centering and angular position correction described herein.

[0073] It is noted that while the drive motors T1-T4 or T1-T5 are illustrated as being coaxial in Figs. 10A-14C, two or more of the drive motors T1-T4 or two or more of the drive motors T1-T5 may be arranged side by side or in any other suitable spatial arrangement.

[0074] Referring to Figs. 15A-18C, transport robots 300 are illustrated s having a distributed drive section 1030D where the drive motors are disposed at the joint which they rotationally drive so as to directly drive rotation of a respective arm link without an intervening transmission.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0075] In Figs. 15A-15C, the transport robot 300 is configured as transport robot 300F where the transport arm 310 has radius or SC ARA arm configuration with quad-end effectors facing the same direction. The arm 310 of the transport robot 300F includes an upper arm link 1001 rotatably coupled to a distributed drive section 1030D about a shoulder axis SX of rotation. The distributed drive section 1030D has rotational drive motors T1-T7 disposed distributed throughout the transport arm 310. A linear or Z-axis drive motor Z may be provided to raise and lower the arm 310. A first forearm link 1002A is rotatably coupled to one end of the upper arm 1001 about a first elbow axis EXA of rotation. A first and second end effectors 310EA1, 310EA2 are independently rotatably coupled to the first forearm link 1002 A about a first wrist axis WXA of rotation. A second forearm link 1002B is rotatably coupled to another end of the upper arm link 1001 about a second elbow axis EXB of rotation. A third and fourth end effectors 310EB1, 310EB2 are independently rotatably coupled to the second forearm link 1002B about a second wrist axis WXB of rotation. The upper arm link 1001 is coupled to and directly driven in rotation about the shoulder axis SX by drive motor T1. The first forearm link 1002 A is coupled and directly driven in rotation about the first elbow axis EXA by drive motor T2. The second forearm link 1002B is coupled to and directly driven in rotation about the second elbow axis EXB by drive motor T3. The first and second end effectors 310EA1, 310EA2 are coupled to and directly driven in rotation, independently from each other and each other arm link, about the respective wrist axis WXA by a respective drive motor T4, T5. The third and fourth end effectors 310EB1, 310EB2 are coupled to and directly driven in rotation, independently from each other and each other arm link, about the respective wrist axis WXB by a respective drive motor T6, T7. Independently driving the first and second end effectors 310EA1, 310EA2 and independently driving the third and fourth end effectors 310EB1, 310EB2 with the respective drive motors T4-T6 provides for rotation of each effector independently of each other end effector and independently from rotation of the upper arm 1001 and forearms 1002 A, 10022 for effecting panel 200 centering (eccentricity EC) and angular (angular bias / error or angular deviation DRA) position correction with picking and placing motions (e.g., to pick and place the panel 200) of the arm 310, in accordance with the panel 200 centering and angular position correction described herein.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0076] In Figs. 16A-16C, the transport robot 300 is configured as transport robot 300G where the transport arm 310 has radius or SC ARA arm configuration with quad-end effectors facing the same direction. The arm 310 of the transport robot 300G includes an upper arm link 1001 rotatably coupled to a distributed drive section 1030D about a shoulder axis SX of rotation. The distributed drive section 1030D has rotational drive motors T1-T5 disposed distributed throughout the transport arm 310. A linear or Z-axis drive motor Z may be provided to raise and lower the arm 310. A first forearm link 1002A is rotatably coupled to one end of the upper arm 1001 about a first elbow axis EXA of rotation. A first and second end effectors 310EA1, 310EA2 are rotatably coupled to the first forearm link 1002A about a first wrist axis WXA of rotation. A second forearm link 1002B is rotatably coupled to another end of the upper arm link 1001 about a second elbow axis EXB of rotation. A third and fourth end effectors 310EB1, 310EB2 are rotatably coupled to the second forearm link 1002B about a second wrist axis WXB of rotation. The upper arm link 1001 is coupled to and directly driven in rotation about the shoulder axis SX by drive motor Tl. The first forearm link 1002 A is coupled and directly driven in rotation about the first elbow axis EXA by drive motor T2. The second forearm link 1002B is coupled to and directly driven in rotation about the second elbow axis EXB by drive motor T3. The first and second end effectors 310EA1, 310EA2 are commonly coupled to and directly driven in simultaneous rotation about the respective wrist axis WXA by drive motor T4. The third and fourth end effectors 310EB 1 , 310EB2 are commonly coupled to and directly driven in simultaneously rotation about the respective wrist axis WXB by drive motor T5. Driving the first and second end effectors 310EA1, 310EA2 in rotation, independent from rotation of the third and fourth end effectors 310EB1, 310EB2, with the respective drive motor T4 (and driving the third and fourth end effectors 310EB1, 310EB2 in rotation, independent from rotation of the first and second end effectors 310EA1, 310EA2, with the drive motor T5) provides for rotation of each end effector pair (one pair being the first and second end effectors 310EA1, 310EA2 and the second pair being the third and fourth end effectors 310EB1, 310EB2) independently of each other and independently from rotation of the upper arm 1001 and forearms 1002 A, 10022 for effecting panel 200 centering (eccentricity EC) and angular (angular bias / error or angular deviation DRA) position correction with picking and placingAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 motions (e.g., to pick and place the panel 200) of the arm 310, in accordance with the panel 200 centering and angular position correction described herein.

[0077] In Figs. 17A-17C, the transport robot 300 is configured as transport robot 300H where the transport arm 310 has radius or SCARA arm configuration with a dual blade end effector 310ED. The arm 310 of the transport robot 300H includes an upper arm link 1001 rotatably coupled to a distributed drive section 1030D about a shoulder axis SX of rotation. The distributed drive section 1030D has rotational drive motors T1-T3 disposed distributed throughout the arm 310. A linear or Z-axis drive motor Z may be provided to raise and lower the arm 310. A forearm link 1002 is rotatably coupled to the upper arm 1001 about elbow axis EX of rotation. The end effector 310ED is rotatably coupled to the forearm link 1002 about wrist axis WX of rotation. The end effector 310ED, being a dual blade end effector has a panel holding station SHS1, SHS2 on each end of the end effector 310ED on opposite sides of the wrist axis WX although, more than one juxtaposed (side-by-side) panel holding station may be provided on the same side of the wrist axis WX. The upper arm link 1001 is coupled to and directly driven in rotation about the shoulder axis SX by drive motor Tl. The forearm link 1002 is coupled to and directly driven in rotation about the elbow axis EX by drive motor T2. The end effector 310ED is coupled to and directly driven in rotation about the wrist axis WX by drive motor T3. Driving the end effector 310ED with the drive motor T3 provides for rotation of the end effectors 310ED independently from rotation of the upper arm 1001 and forearms 1002A, 10022 for effecting panel 200 centering (eccentricity EC) and angular (angular bias / error or angular deviation DRA) position correction with picking and placing motions (e.g.. to pick and place the panel 200) of the arm 310, in accordance with the panel 200 centering and angular position correction described herein.

[0078] In Figs. 18A-18C, the transport robot 300 is configured as transport robot 3001 where the transport arm 310 has radius or SCARA arm configuration with independently rotated end effectors 310A, 310B. The aim 310 of the transport robot 3001 includes an upper arm link 1001 rotatably coupled to a distributed drive section 1030D about a shoulder axis SX of rotation. The distributed drive section 1030D has rotational drive motors T1-T5 disposed distributed throughoutAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 the transport arm 310. A linear or Z-axis drive motor Z may be provided to raise and lower the arm 310. A first forearm link 1002A is rotatably coupled to one end of the upper arm 1001 about a first elbow axis EXA of rotation. A first end effector 310EA is rotatably coupled to the first forearm link 1002A about a first wrist axis WXA of rotation. A second forearm link 1002B is rotatably coupled to another end of the upper arm link 1001 about a second elbow axis EXB of rotation. A second end effector 310EB is rotatably coupled to the second forearm link 1002B about a second wrist axis WXB of rotation. The upper arm link 1001 is coupled to and directly driven in rotation about the shoulder axis SX by drive motor Tl. The first forearm link 1002 A is coupled to and directly driven in rotation about the first elbow axis EXA by drive motor T3. The second forearm link 1002B is coupled to and directly driven in rotation about the second elbow axis EXB by drive motor T2. The end effector 310EA is coupled to and directly driven in rotation about the respective wrist axis WXA by drive motor T5. The end effector 310EB is coupled to and directly driven in rotation about the respective wrist axis WXB by drive motor T4. Independently driving the end effectors 310EA, 310EB with the respective drive motors T4, T5 provides for rotation of the end effectors 310EA, 310EB independent from each other and independently from rotation of the upper arm 1001 and forearms 1002 A, 10022 for effecting panel 200 centering (eccentricity EC) and angular (angular bias / error or angular deviation DRA) position correction with picking and placing motions (e.g., to pick and place the panel 200) of the arm 310, in accordance with the panel 200 centering and angular position correction described herein.

[0079] In Figs. 20-24, the transport robot 300 is configured as transport robot 300J where the transport aim 310 has a bi-symmetric arm configuration although, the arm may be have a symmetric arm or frog-leg arm configuration (e.g., similar to that illustrated but with one end effector extending only to one side), a leap-frog arm configuration (e.g., similar to that illustrated but with both end effectors disposed one above the other, facing the same direction, and extending to the same side), dual independent frog-leg arm configuration, or any similar design. The arm 310 of the transport robot 300J includes at least one upper ami link 1001A, 1001B rotatably coupled to the drive section 1030, 1030D at a shoulder joint SXJ for rotation about a shoulder axisAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295SX of rotation. A first forearm link 1002A is rotatably coupled, at one end, to upper arm link 1001A at elbow joint EXJA for rotation about an elbow axis EXA of rotation. A second forearm link 1002B is rotatably coupled, at one end, to the upper arm link 1001B at elbow joint EXJB for rotation about an elbow axis EXB of rotation. The other ends of the first and second forearm links 1002 A, 1002B are rotatably coupled to the end effector 310EA about respective axes WXA1, WXA2 of rotation at a wrist joint WXJA for pivoting the end effector 310EA about a wrist axis WXA of rotation. The respective axes WXA1, WXA2 of rotation at the wrist joint WXJA are disposed side by side. The wrist axis WXA of rotation is defined by and between the respective axes WXA1, WXA2 of rotation.

[0080] A third forearm link 1002C is rotatably coupled, at one end, to upper arm link 1001B at elbow joint EXJC for rotation about an elbow axis EXC of rotation. A fourth forearm link 1002D is rotatably coupled, at one end, to the upper arm link 1001 A at elbow joint EXJD for rotation about an elbow axis EXD of rotation. The other ends of the third and fourth forearm links 1002C, 1002C are rotatably coupled to the end effector 310EB about respective axes WXB1, WXB2 of rotation at a wrist joint WXJB for pivoting the end effector 310EB about a wrist axis WXB of rotation. The respective axes WXB 1 , WXB2 of rotation at the wrist joint WXJB are disposed side by side. The wrist axis WXB of rotation is defined by and between the respective axes WXB1, WXB 2 of rotation.

[0081] As illustrated in Figs. 20-24, the end effectors 310EA, 310EB face in opposite directions so that when the arm 310 is articulated to extend end effector 310EA in a first direction, the other end effector 310EB remains retracted, and when the arm 310 is articulated to extend end effector 310EB in a second direction, the other end effector 310EA remains retracted.

[0082] Here, upper arms 1001A, 1001B are each coupled to the drive section 1030, 1030D at the shoulder joint SXJ. The upper aim 1001A, 100B extend to opposing sides of the shoulder joint SXJ. The drive section 1030, 1030D has motors Tl, T2, each coupled to a respective upper armAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 link 1001 A, 1001B by a respective shaft D for rotating a respective upper arm link 1001 A, 1001B about the shoulder joint SXJ.

[0083] The drive section 1030D may be a distributed drive section that includes elbow drive motors T3, T4 disposed, where the drive motor T4 is disposed at one of elbow joints EXJA, EXJB (illustrated at elbow joint EXJB for exemplary purposes only) for driving rotation of one of the forearms 1002 A, 1002B about a respective elbow joint EXJA, EXJB, and the drive motor T3 is disposed at one of elbow joints EXJC. EXJD (illustrated at elbow joint EXJD for exemplary purposes only) for driving rotation of one of the forearms 1002C, 1002D about a respective elbow joint EXJC, EXJD.

[0084] The drive section 1030 may be a coaxial drive section that includes elbow drive motors T3, T4 disposed in column (i.e., coaxial) with drive motors Tl, T2, where each drive motor T3, T4 includes a respective shaft D that is part of a coaxial drive shaft arrangement with the shafts D of motors Tl, T2. The drive motor T3 may be connected / coupled with one of the forearms 1002C, 1002D by any suitable transmission TX (such as a belt / pulley transmission, band / pulley transmission, gear transmission, etc.) for driving rotation of one of the forearms 1002C, 1002D about a respective elbow joint EXJC, EXJD. The drive motor T4 may be connected / coupled with one of the forearms 1002A, 1002B by any suitable transmission TX (such as a belt / pulley transmission, band / pulley transmission, gear transmission, etc.) for driving rotation of one of the forearms 1002A, 1002B about a respective elbow joint EXJA, EXJB.

[0085] To extend and retract one of the end effectors 310EA, 310EB the upper arms 1001A, 1001B are rotated in opposite directions at the same speed towards and away from each other. The angle of the end effector 310E A, 310EB being extended (or remaining retracted) is constrained to follow a radial path of extension or pivot during extension about the respective wrist axis WXA, WXB. For example, referring to Figs. 23 and 24, to extend end effector 310EA the upper arms are rotated in respective directions Rl, R2 by respective motor Tl, T2, under control of controller 399. The motor T4 is rotated in concert (e.g., at a predetermined speed and in a predetermined direction)Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 with the motors Tl, T2, under control of the controller 399, so as to constrain the end effector 310EA so that a longitudinal axis of the end effector is maintained along a radial path of extension RE. The motor T4 may rotate independent of the motors Tl, T2 (or with the motors Tl, T2 at a speed other than the predetermined speed), under control of the controller 399, to pivot the end effector 3 IDEA about the wrist axis WXA for passage of the panel 200 through a substrate transport opening 1099 and / or for automatic panel centering for effecting processing of a panel 200. As illustrated in Fig. 23, actuation of the motor T4 (at a speed other than the predetermined speed or with the motors Tl, T2 stopped) to effect a rotation of the forearm 1002B in direction R3 causes rotation of the end effector 310EA about the wrist axis WXA in an opposite direction R4. Likewise, as illustrated in Fig. 24, actuation of the motor T4 (at a speed other than the predetermined speed or with the motors Tl, T2 stopped) to effect a rotation of the forearm 1002B in direction R5 causes rotation of the end effector 310EA about the wrist axis WXA in an opposite direction R6. Retraction of the end effector 310EA may occur in a substantially opposite manner. Extension and retraction of the end effector 310EB may occur in a manner similar to that described with respect to end effector 310EA. The end effector 310EA, 310EB, not being extended, may remain aligned with the radial path of extension RE with rotation of the respective motor T3, T4 in concert with the motors Tl, T2. To rotate the arm 310 as a unit about the shoulder axis SX the upper arms 1001 A, 100 IB are rotated in the same direction at the same speed and the motors T3, T4 are rotated in concert with the motors Tl, T2.

[0086] Referring to Figs. 2-18C, 20-24, and 19, an exemplary method for transferring a panel 200 will be described. The transport robot 300 is commanded (such as by controller 399) to pick a panel 200 (Fig. 19, Block 1900) from any suitable terminal holding station 342 (e.g., such as a transport container, a load lock, a process module, or any other suitable holding location). The panel 200 is transported, by the transport robot 300, so as to pass by sensor(s) 400 as described and illustrated with respect to Figs. 3-9D where the controller 399 determines the pose of the panel / substrate 200 in the manner described above (Fig. 19, Block 1910). With the pose of the panel 200 (e.g., held on the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1,Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295310EB2) known, the transport robot 300 articulates the arm 310 so that the panel 200 passes through a substrate transport opening 1099 of the panel transport chamber 1000 (see Figs. 10C, 11C, 12C, 13C, 14C, 15C, 16C, 17C, and 18C) to a predetermined terminal holding station 342 (such as of a process chamber, load lock, etc.). The controller 399 may command rotation of the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 about the respective wrist axis WX, WXA, WXB so as to transport the panel 200 through the substrate transport opening 1099 based on a detected rotation angle or angular position deviation DRA of the panel (see Fig. 10C, as described above).

[0087] With the panel 200 through the substrate transport opening 1099, the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 is rotated (e.g., under control of controller 399), by the respective drive motor about the respective wrist axis WX, WXA, WXB based on an amount of the detected rotation angle (i.e., angular bias / error or angular deviation DRA) of the panel 200 relative to the reference frame REF so as rotationally align the panel 200 held on the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 with a predetermined pose PP (having a predetermined rotational angle) of the panel held at the terminal holding station 342 (Fig. 19, Block 1920). The controller 399 may effect movement of the arm 310 (e.g., in the X and Y directions for correction of eccentricity EC error) so as to align the center 200C of the panel 200 with the center of the terminal holding station 342 (Fig. 19, Block 1930). With the panel center 200C aligned with the center of the terminal holding station 342 and with the panel 200 rotationally aligned with terminal holding station 342, the controller 399 effects movement of the arm 310 to place the panel 200 at the terminal holding station 342 (Fig. 19, Block 1940). The panel 200 may be placed at the terminal holding station 342 with a placement precision of about 25 nm or less.

[0088] Referring to Figs. 1-25, an exemplary method for automatic centering of a right quadrilateral panel 200 for a semiconductor processing apparatus 333 will be described.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0089] The method includes providing a right quadrilateral panel automatic centering system 371 (Fig. 25, Block 2500).

[0090] The right quadrilateral panel automatic centering system 371 may include one or more of:

[0091] a frame 333F with a predetermined reference frame REF;

[0092] a panel transport apparatus 300 connected to the frame 333F and having an end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB 1, 310EB2, 310ED with a right quadrilateral panel holding station SHS having a predetermined center 310EC, the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, 310ED being configured to hold the right quadrilateral panel 200 at the right quadrilateral panel holding station SHS and transport the right quadrilateral panel 200 within the panel transport apparatus 300;

[0093] a sensor 400, 600 connected to the frame 333F and being configured to effect, substantially coincident, with the panel transport apparatus 300 in motion, sensing of an edge 200E of the right quadrilateral panel 200 held on the end effector 310E, 310EA, 310EB, 310EA1 , 310EA2, 310EB1 , 310EB2, 310ED; and

[0094] a controller 399 communicably connected to the sensor 400, 600 to register sensor data, and operably connected to the panel transport apparatus 300.

[0095] The method may include moving, with the panel transport apparatus 300 under control of the controller 399, the right quadrilateral panel 200 at the right quadrilateral holding station SHS (Fig. 25, Block 2510) so the sensor 400, 600 senses the edge 200E, where the controller 399 is configured to move the right quadrilateral panel 200 and the sensor 400, 600 is disposed so that the sensor 400. 600 senses edge points, that describe more than one intersecting edges 200E of the right quadrilateral panel 200.

[0096] The method may include characterizing, with the controller 399, from the registered sensor data, respective lines of each of the intersecting edges 200E (Fig. 25, Block 2520) so as to resolveAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 an eccentricity EC of the right quadrilateral panel 200 with the predetermined center 31 OEC and a rotation angle DRA of the right quadrilateral panel 200 relative to the predetermined reference frame REF.

[0097] The method, for automatic centering of the right quadrilateral panel for the semiconductor processing apparatus, may include one or more of, employed individually, in any combination with each other, and / or in any combination with the features described above:

[0098] the panel transport apparatus 300 comprises at least one robot arm 310 having at least two- degree of freedom movement, where the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, 310ED is rotatably coupled to the at least one robot arm 310;

[0099] the controller 399, from the registered data, determines a pose of the right quadrilateral panel 200 relative to the predetermined reference frame REF and determines a corrective motion of the panel transport apparatus 300 to correct an angular bias / error or angular deviation DRA of the right quadrilateral panel 200 for placement of the panel 200 at a terminal holding station 342;

[0100] the corrective motion of the panel transport apparatus 300 includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel 200;

[0101] the controller 399, based on the resolved eccentricity EC, determines a corrective motion of the panel transport apparatus 300 to correct the resolved eccentricity EC for placement of the panel 200 at a terminal holding station 342;

[0102] the corrective motion of the panel transport apparatus 300 includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel 200;

[0103] the controller 399 moves the right quadrilateral panel 200, for sensing with the sensor 400, 600, by effecting one or more of a rotation movement, extension movement, and a retraction movement of the panel transport apparatus 300;Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0104] the sensor 400, 600 comprises two or more through beam sensors disposed relative to the frame 333F for measuring one or more of: dimensions of the right quadrilateral panel 200, the eccentricity EC, and the rotation angle DRA;

[0105] the sensor 400, 600 has both the linear image array sensor and the through beam sensor that are employed in combination to sense the edge points;

[0106] the sensor 400, 600 is or has at least one of a camera, linear image array sensors, and a through beam sensor; and / or

[0107] the sensor 400. 600 is disposed so that the at least one of the camera, the linear image array, and the through beam sensor senses the edge points that describe the more than one intersecting edges 200E of the right quadrilateral panel 200.

[0108] Referring to Figs. 1-24 and 26, an exemplary method for automatic centering of a right quadrilateral panel 200 for a semiconductor processing apparatus 333 will be described.

[0109] The method includes providing a right quadrilateral panel automatic centering system 371 (Fig. 26, Block 2600).

[0110] The right quadrilateral panel automatic centering system may include one or more of:

[0111] a panel transport chamber 1000 with at least one substrate transport opening 1099 disposed to connect the panel transport chamber 1000 and a process module PM via a pass-through slot valve SV ;

[0112] a panel transport robot arm connected to the panel transport chamber, the panel transport robot arm 310 having at least one upper arm (as described herein), pivotally mounted to the panel transport chamber 1000 at a shoulder joint SXJ, a forearm (as described herein) pivotally mounted at an elbow joint EXJ, EXJA, EXJB to each of the at least one upper arm, and an end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB 1, 310EB2, 310ED with a right quadrilateralAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 panel holding station SHS having a predetermined center 310EC, the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, 310ED being pivotally mounted to the forearm at a corresponding wrist joint WXJ, WXJA, WXJB, that defines a wrist joint pivot axis WX, WXA, WXB, and configured to hold the right quadrilateral panel 200 at the right quadrilateral panel holding station SHS and transport the right quadrilateral panel 200 through the pass-through slot valve SV to and from the process module PM; and

[0113] a drive section 1030, 1030D connected to the panel transport robot arm (as described herein) and having at least one motor with a shaft operably coupled to the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, 310ED.

[0114] The method may include independently rotating the end effector 310E (Fig. 26, Block 2610) about the wrist joint pivot axis WX, WXA, WXB at the corresponding wrist joint WXJ, WXJA, WXJB relative to each of the forearm (as described herein) and the at least one upper arm (as described herein).

[0115] The method may include effecting, with the controller 399, automatic angular position correction of the right quadrilateral panel 200 (Fig. 26, Block 2620) held by the end effector 310E, via at least independent rotation of the end effector 310E about the wrist joint pivot axis WX, WXA, EXB, which correction positions the right quadrilateral panel 200 within tolerance at least for passage through the pass-through slot valve SV and aligned placement at a terminal holding station 342 of the process module PM.

[0116] The method, for automatic centering of the right quadrilateral panel 200 for the semiconductor processing apparatus 333, may include one or more of, employed individually, in any combination with each other, and / or in any combination with the features described above:

[0117] the shaft of the at least one motor has a drive axis corresponding thereto that describes a degree of freedom of the panel transport robot arm, and the controller 399 is configured toAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 automatically effect angular position correction and centering correction at least in part with the degree of freedom that is common to both angular position correction and centering correction;

[0118] the angular position correction, corrects angular position deviation and positions the right quadrilateral panel 200 substantially true, within tolerance of aligned placement at the terminal holding station 342, and centering correction corrects eccentricity EC, within tolerance, between a center 200C of the right quadrilateral panel 200 and a placement center 342C of aligned placement;

[0119] the drive section 1030 is a distributed drive section 1030D and the at least one motor is disposed within the forearm;

[0120] the drive section 1030 is a coaxial drive section;

[0121] the end effector 310ED comprises two substrate holding stations disposed on opposite sides of the wrist joint pivot axis WX;

[0122] the panel transport robot arm includes: another forearm pivotally mounted at another elbow joint EJXA, EJXB to each of the at least one upper arm, and another end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, with another right quadrilateral panel holding station SHS, the other end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 being pivotally mounted to the other forearm at a corresponding wrist joint WXJA, WXJB, that defines a another wrist joint pivot axis WXA, WXB, the drive section 1030, 1030D has at least another motor with another shaft operably coupled to the other end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 so as to independently rotate the other end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 about the other wrist joint pivot axis WXA, WXB at the corresponding wrist joint WXJA, WXJB relative to each of the other forearm and the at least one upper arm, and the controller 399 is communicably connected to the at least another motor and configured so as to effect automatic angular position correction of another right quadrilateral panel 200 held by the other end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, via at least independentAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 rotation of the other end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 about the other wrist joint pivot axis WXA, WXB, which correction positions the other right quadrilateral panel 200 within tolerance at least for passage through the pass-through slot valve SV and aligned placement at the terminal holding station 342 of the process module PM;

[0123] the end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 and the other end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 are disposed in a stack, one over the other; and / or

[0124] the end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 and the other end effector 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2 are disposed side by side.

[0125] Referring to Figs. 1-24 and 27, an exemplary method for automatic centering of a right quadrilateral panel 200 for a semiconductor processing apparatus 333 will be described.

[0126] The method includes providing a right quadrilateral panel automatic centering system 371 (Fig. 27, Block 2700).

[0127] The right quadrilateral panel automatic centering system 371 may include one or more of:

[0128] a panel transport chamber 1000 with at least one substrate transport opening 1099 disposed to connect the panel transport chamber 1000 and a process module PM via a pass-through slot valve SV;

[0129] a panel transport robot arm (as described herein) connected to the panel transport chamber 1000, the panel transport robot arm having at least one upper arm, pivotally mounted to the panel transport chamber at a shoulder joint SXJ, at least one forearm pivotally mounted at an elbow joint EXJ, EXJA, EXJB to each of the at least one upper arm, and an end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, 310ED with a right quadrilateral panel holding station SHS having a predetermined center 310EC. the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, 310ED being pivotally mounted to the at least one forearm at a correspondingAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 wrist joint WXJ, WXJA, WXJB, that defines a wrist joint pivot axis WX, WXA, WXB, and configured to hold the right quadrilateral panel 200 at the right quadrilateral panel holding station SHS and transport the right quadrilateral panel 200 through the pass-through slot valve SV to and from the process module PM;

[0130] a drive section 1030, 1030D connected to the panel transport robot arm and having at least one motor with a shaft operably coupled to the at least one forearm; and

[0131] a controller 399 communicably connected to the at least one motor.

[0132] The method may include independently rotating the at least one forearm (Fig. 27, Block 2710), and via independent rotation of the at least one forearm effecting rotation of the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, 310ED about the wrist joint pivot axis WX, WXA, WXB at the corresponding wrist joint WXJ, WXJA, WXJB relative to each of the forearm and the at least one upper arm.

[0133] The method may include effecting, with the controller 399, automatic angular position correction (Fig. 27, Block 2720) of the right quadrilateral panel 200 held by the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, 310ED, via at least independent rotation of the end effector 310E, 310EA, 310EB, 310EA1, 310EA2, 310EB1, 310EB2, 310ED about the wrist joint pivot axis WXJ, WXJA, WXJB, which correction positions the right quadrilateral panel 200 within tolerance at least for passage through the pass-through slot valve SV and aligned placement at a terminal holding station 342 of the process module PM.

[0134] The method, for automatic centering of the right quadrilateral panel for the semiconductor processing apparatus, may include one or more of, employed individually, in any combination with each other, and / or in any combination with the features described above:

[0135] the shaft of the at least one motor has a drive axis corresponding thereto that describes a degree of freedom of the panel transport robot arm, and the controller 399 is configured toAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 automatically effect angular position correction and centering correction at least in part with the degree of freedom that is common to both angular position correction and centering correction;

[0136] the angular position correction, corrects angular position deviation and positions the right quadrilateral panel 200 substantially true, within tolerance of aligned placement at the terminal holding station 342, and centering correction corrects eccentricity EC, within tolerance, between a center 200C of the right quadrilateral panel 200 and a placement center 242C of aligned placement;

[0137] the at least one upper arm comprises two upper arm links extending to opposing sides of the shoulder joint SXJ; the at least one forearm comprises two forearm links, one of the forearm links being rotatably coupled to one of the upper arm links at the elbow joint EXJA, EXJB, and another of the two forearm links being coupled to the other of the upper arm links at another elbow joint EXJA, EXJB, the two forearm links being coupled to end effector 310EA, 310EB at a respective corresponding wrist joint WXA1, WXA2, WXB1, WXB2;

[0138] the respective wrist joint WXA1 , WXA2, WXB1 , WXB2 of the two forearm links are located side by side;

[0139] the wrist joint pivot axis WXA, WXB is defined by and between the respective wrist joint WXA1, WXA2, WXB 1, WXB2 of the two forearm links are located side by side;

[0140] the panel transport robot arm includes two end effectors 310EA, 310EB facing substantially opposite directions relative to the shoulder joint SXJ, one end effector 310EA, 310EB of the two end effectors 310EA, 310EB is connected to the two upper arm links 1001A, 1001B by a pair of forearm links 1002A, 1002B, 1002C, 1002D and another end effector 310EA, 310EB of the two end effectors 310EA, 310EB is connected to the two upper arm links 1001 A, 100 IB by another pair of forearm links 1002A, 1002B, 1002C, 1002D;Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0141] the at least one motor of the drive section 1030, 1030D includes a first motor with a first shaft operably coupled to one forearm link 1002 A, 1002B, 1002C, 1002D of the pair of forearm links 1002A, 1002B, 1002C, 1002D for effecting rotation of the one end effector 310EA, 310EB of the two end effectors 310EA, 310EB about a wrist joint pivot axis WXA, WXB of the one end effector 310EA, 310EB of the two end effectors 310EA, 310EB, and a second motor with a second shaft operably coupled to one forearm link 1002 A, 1002B, 1002C, 1002D of the other pair of forearm links 1002 A, 1002B, 1002C, 1002D for effecting rotation of the other end effector 310E A, 310EB of the two end effectors 310EA, 310EB about a wrist joint pivot axis WXA, WXB of the other end effector 310EA, 310EB of the two end effectors 310EA, 310EB; and / or

[0142] the one end effector 310EA, 310EB of the two end effectors 310EA, 310EB remains in a retracted configuration with extension of the other end effector 310EA, 310EB of the two end effectors 310EA, 310EB.

[0143] The following are provided in accordance with the present disclosure and may be employed individually, in any combination with each other, and / or in any combination with the features described above:

[0144] In accordance with the present disclosure, a right quadrilateral panel automatic centering system for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus is provided. The system includes: a frame with a predetermined reference frame; a panel transport apparatus connected to the frame and having an end effector with a right quadrilateral panel holding station having a predetermined center, the end effector being configured to hold the right quadrilateral panel at the right quadrilateral panel holding station and transport the right quadrilateral panel within the panel transport apparatus; a sensor connected to the frame and being configured to effect, substantially coincident, with the panel transport apparatus in motion, sensing of an edge of the right quadrilateral panel held on the end effector; and a controller communicably connected to the sensor to register sensor data, and operably connected to the transport apparatus so as to move, with the transport apparatus, the right quadrilateral panel at the right quadrilateralAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 holding station so the sensor senses the edge; wherein the controller is configured to move the right quadrilateral panel and the sensor is disposed so that the sensor senses edge points, that describe more than one intersecting edges of the right quadrilateral panel; and the controller is configured so that, from the registered sensor data, the controller characterizes respective lines of each of the intersecting edges so as to resolve an eccentricity of the right quadrilateral panel with the predetermined center and a rotation angle of the panel relative to the predetermined reference frame.

[0145] The right quadrilateral panel automatic centering system may include one or more of, employed individually, in any combination with each other, and / or in any combination with the features described above: the panel transport apparatus comprises at least one robot arm having at least two-degree of freedom movement, where the end effector is rotatably coupled to the at least one robot arm; the controller is configured to, from the registered data, determine a pose of the right quadrilateral panel relative to the predetermined reference frame and determine a corrective motion of the panel transport apparatus to correct an angular bias / error or angular deviation of the right quadrilateral panel for placement of the panel at a terminal holding station; the corrective motion of the panel transport apparatus includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel; the controller is configured to, based on the resolved eccentricity, determine a corrective motion of the panel transport apparatus to correct the resolved eccentricity for placement of the panel at a terminal holding station; the corrective motion of the panel transport apparatus includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel; the controller is configured to move the right quadrilateral panel, for sensing with the sensor, by effecting one or more of a rotation movement, extension movement, and a retraction movement of the panel transport apparatus; the sensor comprises two or more through beam sensors disposed relative to the frame for measuring one or more of: dimensions of the right quadrilateral panel, the eccentricity, and the rotation angle; the sensor has both the linear image array sensor and the through beam sensor that are employed in combination to sense the edge points; the sensor is or has at least one of a camera,Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 linear image array sensors, and a through beam sensor; and / or the sensor is disposed so that the at least one of the camera, the linear image array, and the through beam sensor senses the edge points that describe the more than one intersecting edges of the right quadrilateral panel.

[0146] In accordance with the present disclosure, a method for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus is provided. The method comprises: providing a right quadrilateral panel automatic centering system that includes: a frame with a predetermined reference frame; a panel transport apparatus connected to the frame and having an end effector with a right quadrilateral panel holding station having a predetermined center, the end effector being configured to hold the right quadrilateral panel at the right quadrilateral panel holding station and transport the right quadrilateral panel within the panel transport apparatus; a sensor connected to the frame and being configured to effect, substantially coincident, with the panel transport apparatus in motion, sensing of an edge of the right quadrilateral panel held on the end effector; and a controller communicably connected to the sensor to register sensor data, and operably connected to the panel transport apparatus. The method comprises: moving, with the panel transport apparatus under control of the controller, the right quadrilateral panel at the right quadrilateral holding station so the sensor senses the edge, where the controller is configured to move the right quadrilateral panel and the sensor is disposed so that the sensor senses edge points, that describe more than one intersecting edges of the right quadrilateral panel; and characterizing, with the controller, from the registered sensor data, respective lines of each of the intersecting edges so as to resolve an eccentricity of the right quadrilateral panel with the predetermined center and a rotation angle of the right quadrilateral panel relative to the predetermined reference frame.

[0147] The method, for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus, may include one or more of, employed individually, in any combination with each other, and / or in any combination with the features described above: the panel transport apparatus comprises at least one robot arm having at least two-degree of freedom movement, where the end effector is rotatably coupled to the at least one robot arm; the controller, from the registered data, determines a pose of the right quadrilateral panel relative to the predeterminedAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 reference frame and determines a corrective motion of the panel transport apparatus to correct an angular bias / error or angular deviation of the right quadrilateral panel for placement of the panel at a terminal holding station; the corrective motion of the panel transport apparatus includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel; the controller, based on the resolved eccentricity, determines a corrective motion of the panel transport apparatus to correct the resolved eccentricity for placement of the panel at a terminal holding station; the corrective motion of the panel transport apparatus includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel; the controller moves the right quadrilateral panel, for sensing with the sensor, by effecting one or more of a rotation movement, extension movement, and a retraction movement of the panel transport apparatus; the sensor comprises two or more through beam sensors disposed relative to the frame for measuring one or more of: dimensions of the right quadrilateral panel, the eccentricity, and the rotation angle; the sensor has both the linear image array sensor and the through beam sensor that are employed in combination to sense the edge points; the sensor is or has at least one of a camera, linear image array sensors, and a through beam sensor; and / or the sensor is disposed so that the at least one of the camera, the linear image array, and the through beam sensor senses the edge points that describe the more than one intersecting edges of the right quadrilateral panel.

[0148] In accordance with the present disclosure, a right quadrilateral panel automatic centering system is provided for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus. The system includes: a panel transport chamber with at least one substrate transport opening disposed to connect the panel transport chamber and a process module via a pass-through slot valve; a panel transport robot arm connected to the transport chamber, the panel transport robot arm having at least one upper arm, pivotally mounted to the panel transport chamber at a shoulder joint, a forearm pivotally mounted at an elbow joint to each of the at least one upper arm, and an end effector with a right quadrilateral panel holding station having a predetermined center, the end effector being pivotally mounted to the forearm at a correspondingAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 wrist joint, that defines a wrist joint pivot axis, and configured to hold the right quadrilateral panel at the right quadrilateral panel holding station and transport the right quadrilateral panel through the pass-through slot valve to and from the process module; a drive section connected to the panel transport robot arm and having at least one motor with a shaft operably coupled to the end effector so as to independently rotate the end effector about the wrist joint pivot axis at the corresponding wrist joint relative to each of the forearm and the at least one upper arm; and a controller communicably connected to the at least one motor and configured so as to effect automatic angular position correction of the right quadrilateral panel held by the end effector, via at least independent rotation of the end effector about the wrist joint pivot axis, which correction positions the right quadrilateral panel within tolerance at least for passage through the pass-through slot valve and aligned placement at a terminal station of the process module.

[0149] The right quadrilateral panel automatic centering system may include one or more of, employed individually, in any combination with each other, and / or in any combination with the features described above: the shaft of the at least one motor has a drive axis corresponding thereto that describes a degree of freedom of the panel transport robot arm, and the controller is configured to automatically effect angular position correction and centering correction at least in part with the degree of freedom that is common to both angular position correction and centering correction; the angular position correction, corrects angular position deviation and positions the right quadrilateral panel substantially true, within tolerance of aligned placement at the terminal station, and centering correction corrects eccentricity, within tolerance, between a center of the right quadrilateral panel and a placement center of aligned placement; the drive section is a distributed drive section and the at least one motor is disposed within the forearm; the drive section is a coaxial drive section; the end effector comprises two substrate holding stations disposed on opposite sides of the wrist joint pivot axis; the panel transport robot arm includes: another forearm pivotally mounted at another elbow joint to each of the at least one upper arm, and another end effector with another right quadrilateral panel holding station, the other end effector being pivotally mounted to the other forearm at a corresponding wrist joint, that defines a another wrist joint pivot axis, theAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 drive section has at least another motor with another shaft operably coupled to the other end effector so as to independently rotate the other end effector about the other wrist joint pivot axis at the corresponding wrist joint relative to each of the other forearm and the at least one upper arm, and the controller is communicably connected to the at least another motor and configured so as to effect automatic angular position correction of another right quadrilateral panel held by the other end effector, via at least independent rotation of the other end effector about the other wrist joint pivot axis, which correction positions the other right quadrilateral panel within tolerance at least for passage through the pass-through slot valve and aligned placement at the terminal station of the process module; the end effector and the other end effector are disposed in a stack, one over the other; and the end effector and the other end effector are disposed side by side.

[0150] In accordance with the present disclosure, a method for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus is provided. The method comprises: providing a right quadrilateral panel automatic centering system; independently rotating the end effector about the wrist joint pivot axis at the corresponding wrist joint relative to each of the forearm and the at least one upper arm; and effecting, with the controller, automatic angular position correction of the right quadrilateral panel held by the end effector, via at least independent rotation of the end effector about the wrist joint pivot axis, which correction positions the right quadrilateral panel within tolerance at least for passage through the pass-through slot valve and aligned placement at a terminal station of the process module; where the right quadrilateral panel automatic centering system comprises: a panel transport chamber with at least one substrate transport opening disposed to connect the panel transport chamber and a process module via a pass-through slot valve; a panel transport robot arm connected to the panel transport chamber, the panel transport robot arm having at least one upper arm, pivotally mounted to the panel transport chamber at a shoulder joint, a forearm pivotally mounted at an elbow joint to each of the at least one upper arm, and an end effector with a right quadrilateral panel holding station having a predetermined center, the end effector being pivotally mounted to the forearm at a corresponding wrist joint, that defines a wrist joint pivot axis, and configured to hold the right quadrilateral panelAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 at the right quadrilateral panel holding station and transport the right quadrilateral panel through the pass-through slot valve to and from the process module; and a drive section connected to the panel transport robot arm and having at least one motor with a shaft operably coupled to the end effector.

[0151] The method, for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus, may include one or more of, employed individually, in any combination with each other, and / or in any combination with the features described above: the shaft of the at least one motor has a drive axis corresponding thereto that describes a degree of freedom of the panel transport robot arm, and the controller is configured to automatically effect angular position correction and centering correction at least in part with the degree of freedom that is common to both angular position correction and centering correction; the angular position correction, corrects angular position deviation and positions the right quadrilateral panel substantially true, within tolerance of aligned placement at the terminal station, and centering correction corrects eccentricity, within tolerance, between a center of the right quadrilateral panel and a placement center of aligned placement; the drive section is a distributed drive section and the at least one motor is disposed within the forearm; the drive section is a coaxial drive section; the end effector comprises two substrate holding stations disposed on opposite sides of the wrist joint pivot axis; the panel transport robot arm includes: another forearm pivotally mounted at another elbow joint to each of the at least one upper arm, and another end effector with another right quadrilateral panel holding station, the other end effector being pivotally mounted to the other forearm at a corresponding wrist joint, that defines a another wrist joint pivot axis, the drive section has at least another motor with another shaft operably coupled to the other end effector so as to independently rotate the other end effector about the other wrist joint pivot axis at the corresponding wrist joint relative to each of the other forearm and the at least one upper arm, and the controller is communicably connected to the at least another motor and configured so as to effect automatic angular position correction of another right quadrilateral panel held by the other end effector, via at least independent rotation of the other end effector about the other wrist joint pivot axis, whichAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 correction positions the other right quadrilateral panel within tolerance at least for passage through the pass-through slot valve and aligned placement at the terminal station of the process module; the end effector and the other end effector are disposed in a stack, one over the other; and the end effector and the other end effector are disposed side by side.

[0152] In accordance with the present disclosure, a right quadrilateral panel automatic centering system is provided for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus. The system includes: a panel transport chamber with at least one substrate transport opening disposed to connect the panel transport chamber and a process module via a pass-through slot valve; a panel transport robot arm connected to the panel transport chamber, the panel transport robot arm having at least one upper ami, pivotally mounted to the panel transport chamber at a shoulder joint, at least one forearm pivotally mounted at an elbow joint to each of the at least one upper arm, and an end effector with a right quadrilateral panel holding station having a predetermined center, the end effector being pivotally mounted to the at least one forearm at a corresponding wrist joint, that defines a wrist joint pivot axis, and configured to hold the right quadrilateral panel at the right quadrilateral panel holding station and transport the right quadrilateral panel through the pas-through slot valve to and from the process module; a drive section connected to the panel transport robot arm and having at least one motor with a shaft operably coupled to the at least one forearm so as to independently rotate the at least one forearm, and via independent rotation of the at least one forearm effect rotation of the end effector about the wrist joint pivot axis at the corresponding wrist joint relative to each of the forearm and the at least one upper arm; and a controller communicably connected to the at least one motor and configured so as to effect automatic angular position correction of the right quadrilateral panel held by the end effector, via at least independent rotation of the end effector about the wrist joint pivot axis, which correction positions the right quadrilateral panel within tolerance at least for passage through the pass-through slot valve and aligned placement at a terminal station of the process module.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0153] The right quadrilateral panel automatic centering system may include one or more of, employed individually, in any combination with each other, and / or in any combination with the features described above: the shaft of the at least one motor has a drive axis corresponding thereto that describes a degree of freedom of the panel transport robot arm, and the controller is configured to automatically effect angular position correction and centering correction at least in part with the degree of freedom that is common to both angular position correction and centering correction; the angular position correction, corrects angular position deviation and positions the right quadrilateral panel substantially true, within tolerance of aligned placement at the terminal station, and centering correction corrects eccentricity, within tolerance, between a center of the right quadrilateral panel and a placement center of aligned placement; the at least one upper arm comprises two upper arm links extending to opposing sides of the shoulder joint; the at least one forearm comprises two forearm links, one of the forearm links being rotatably coupled to one of the upper arm links at the elbow joint, and another of the two forearm links being coupled to the other of the upper aim links at another elbow joint, the two forearm links being coupled to end effector at a respective corresponding wrist joint; the respective wrist joint of the two forearm links are located side by side; the wrist joint pivot axis is defined by and between the respective wrist joint of the two forearm links are located side by side; the panel transport robot arm includes two end effectors facing substantially opposite directions relative to the shoulder joint, one end effector of the two end effectors is connected to the two upper arm links by a pair of forearm links and another end effector of the two end effectors is connected to the two upper arm links by another pair of forearm links; the at least one motor of the drive section includes a first motor with a first shaft operably coupled to one forearm link of the pair of forearm links for effecting rotation of the one end effector of the two end effectors about a wrist joint pivot axis of the one end effector of the two end effectors, and a second motor with a second shaft operably coupled to one forearm link of the other pair of forearm links for effecting rotation of the other end effector of the two end effectors about a wrist joint pivot axis of the other end effector of the two end effectors; and / or the one end effector of the two end effectors remains in a retracted configuration with extension of the other end effector of the two end effectors.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295

[0154] In accordance with the present disclosure, a method for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus is provided. The method comprises: providing a right quadrilateral panel automatic centering system; independently rotating the at least one forearm, and via independent rotation of the at least one forearm effecting rotation of the end effector about the wrist joint pivot axis at the corresponding wrist joint relative to each of the forearm and the at least one upper arm; and effecting, with the controller, automatic angular position correction of the right quadrilateral panel held by the end effector, via at least independent rotation of the end effector about the wrist joint pivot axis, which correction positions the right quadrilateral panel within tolerance at least for passage through the pass-through slot valve and aligned placement at a terminal station of the process module; where the right quadrilateral panel automatic centering system comprises: a panel transport chamber with at least one substrate transport opening disposed to connect the panel transport chamber and a process module via a pass-through slot valve; a panel transport robot arm connected to the panel transport chamber, the panel transport robot arm having at least one upper arm, pivotally mounted to the panel transport chamber at a shoulder joint, at least one forearm pivotally mounted at an elbow joint to each of the at least one upper arm, and an end effector with a right quadrilateral panel holding station having a predetermined center, the end effector being pivotally mounted to the at least one forearm at a corresponding wrist joint, that defines a wrist joint pivot axis, and configured to hold the right quadrilateral panel at the right quadrilateral panel holding station and transport the right quadrilateral panel through the pass-through slot valve to and from the process module; a drive section connected to the panel transport robot arm and having at least one motor with a shaft operably coupled to the at least one forearm; and a controller communicably connected to the at least one motor.

[0155] The method, for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus, may include one or more of, employed individually, in any combination with each other, and / or in any combination with the features described above: the shaft of the at least one motor has a drive axis corresponding thereto that describes a degree of freedom of theAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 panel transport robot arm, and the controller is configured to automatically effect angular position correction and centering correction at least in part with the degree of freedom that is common to both angular position correction and centering correction; the angular position correction, corrects angular position deviation and positions the right quadrilateral panel substantially true, within tolerance of aligned placement at the terminal station, and centering correction corrects eccentricity, within tolerance, between a center of the right quadrilateral panel and a placement center of aligned placement; the at least one upper arm comprises two upper arm links extending to opposing sides of the shoulder joint; the at least one forearm comprises two forearm links, one of the forearm links being rotatably coupled to one of the upper arm links at the elbow joint, and another of the two forearm links being coupled to the other of the upper arm links at another elbow joint, the two forearm links being coupled to end effector at a respective corresponding wrist joint; the respective wrist joint of the two forearm links are located side by side; the wrist joint pivot axis is defined by and between the respective wrist joint of the two forearm links are located side by side; the panel transport robot arm includes two end effectors facing substantially opposite directions relative to the shoulder joint, one end effector of the two end effectors is connected to the two upper arm links by a pair of forearm links and another end effector of the two end effectors is connected to the two upper arm links by another pair of forearm links; the at least one motor of the drive section includes a first motor with a first shaft operably coupled to one forearm link of the pair of forearm links for effecting rotation of the one end effector of the two end effectors about a wrist joint pivot axis of the one end effector of the two end effectors, and a second motor with a second shaft operably coupled to one forearm link of the other pair of forearm links for effecting rotation of the other end effector of the two end effectors about a wrist joint pivot axis of the other end effector of the two end effectors; and / or the one end effector of the two end effectors remains in a retracted configuration with extension of the other end effector of the two end effectors.

[0156] It should be understood that the foregoing description is only illustrative of the present disclosure. Various alternatives and modifications can be devised by those skilled in the art without departing from the present disclosure. Accordingly, the present disclosure is intended toAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 embrace all such alternatives, modifications and variances that fall within the scope of any claims appended hereto. Further, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that a combination of these features cannot be advantageously used, such a combination remaining within the scope of the present disclosure.

[0157] What is claimed is:

Claims

Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295CLAIMS1. A right quadrilateral panel automatic centering system for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus, the system comprising: a frame with a predetermined reference frame; a panel transport apparatus connected to the frame and having an end effector with a right quadrilateral panel holding station having a predetermined center, the end effector being configured to hold the right quadrilateral panel at the right quadrilateral panel holding station and transport the right quadrilateral panel within the panel transport apparatus; a sensor connected to the frame and being configured to effect, substantially coincident, with the panel transport apparatus in motion, sensing of an edge of the right quadrilateral panel held on the end effector; and a controller communicably connected to the sensor to register sensor data, and operably connected to the panel transport apparatus so as to move, with the panel transport apparatus, the right quadrilateral panel at the right quadrilateral panel holding station so the sensor senses the edge; wherein the controller is configured to move the right quadrilateral panel and the sensor is disposed so that the sensor senses edge points, that describe more than one intersecting edges of the right quadrilateral panel; and the controller is configured so that, from the registered sensor data, the controller characterizes respective lines of each of the intersecting edges so as to resolve an eccentricity of the right quadrilateral panel with the predetermined center and a rotation angle of the right quadrilateral panel relative to the predetermined reference frame.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br32952. The system of claim 1, wherein the panel transport apparatus comprises at least one robot arm having at least two-degree of freedom movement, where the end effector is rotatably coupled to the at least one robot arm.

3. The system of claim 1, wherein the controller is configured to, from the registered sensor data, determine a pose of the right quadrilateral panel relative to the predetermined reference frame and determine a corrective motion of the panel transport apparatus to correct an angular bias / error or angular deviation of the right quadrilateral panel for placement of the right quadrilateral panel at a terminal holding station.

4. The system of claim 3, wherein the corrective motion of the panel transport apparatus includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel.

5. The system of claim 1, wherein the controller is configured to, based on the resolved eccentricity, determine a corrective motion of the panel transport apparatus to correct the resolved eccentricity for placement of the right quadrilateral panel at a terminal holding station.

6. The system of claim 5, wherein the corrective motion of the panel transport apparatus includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel.

7. The system of claim 1, wherein the controller is configured to move the right quadrilateral panel, for sensing with the sensor, by effecting one or more of a rotation movement, extension movement, and a retraction movement of the panel transport apparatus.

8. The system of claim 1, wherein the sensor comprises two or more through beam sensors disposed relative to the frame for measuring one or more of: dimensions of the right quadrilateral panel, the eccentricity, and the rotation angle.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br32959. The system of claim 1, wherein the sensor is or has at least one of a camera, linear image array sensors, and a through beam sensor.

10. The system of claim 9, wherein the sensor is disposed so that the at least one of the camera, the linear image array, and the through beam sensor senses the edge points that describe the more than one intersecting edges of the right quadrilateral panel.

11. A method for automatic centering of a right quadrilateral panel for a semiconductor processing apparatus, the method comprising: providing a right quadrilateral panel automatic centering system comprising: a frame with a predetermined reference frame; a panel transport apparatus connected to the frame and having an end effector with a right quadrilateral panel holding station having a predetermined center, the end effector being configured to hold the right quadrilateral panel at the right quadrilateral panel holding station and transport the right quadrilateral panel within the panel transport apparatus; a sensor connected to the frame and being configured to effect, substantially coincident, with the panel transport apparatus in motion, sensing of an edge of the right quadrilateral panel held on the end effector; and a controller communicably connected to the sensor to register sensor data, and operably connected to the panel transport apparatus moving, with the panel transport apparatus under control of the controller, the right quadrilateral panel at the right quadrilateral panel holding station so the sensor senses the edge, where the controller is configured to move the right quadrilateral panel and the sensor is disposed so that theAtty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br3295 sensor senses edge points, that describe more than one intersecting edges of the right quadrilateral panel; and characterizing, with the controller, from the registered sensor data, respective lines of each of the intersecting edges so as to resolve an eccentricity of the right quadrilateral panel with the predetermined center and a rotation angle of the right quadrilateral panel relative to the predetermined reference frame.

12. The method of claim 11, wherein the panel transport apparatus comprises at least one robot arm having at least two-degree of freedom movement, where the end effector is rotatably coupled to the at least one robot arm.

13. The method of claim 11, wherein the controller, from the registered sensor data, determines a pose of the right quadrilateral panel relative to the predetermined reference frame and determines a corrective motion of the panel transport apparatus to correct an angular bias / error or angular deviation of the right quadrilateral panel for placement of the right quadrilateral panel at a terminal holding station.

14. The method of claim 13, wherein the corrective motion of the panel transport apparatus includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel.

15. The method of claim 11, wherein the controller, based on the resolved eccentricity, determines a corrective motion of the panel transport apparatus to correct the resolved eccentricity for placement of the right quadrilateral panel at a terminal holding station.

16. The method of claim 15, wherein the corrective motion of the panel transport apparatus includes one or more motions that effect one or more of a rotation or linear translation of the right quadrilateral panel.Atty. Docket No. 390P017292-WO (PCT) / Br3259_Br3292_Br3293_Br329517. The method of claim 11, wherein the controller moves the right quadrilateral panel, for sensing with the sensor, by effecting one or more of a rotation movement, extension movement, and a retraction movement of the panel transport apparatus.

18. The method of claim 11, wherein the sensor comprises two or more through beam sensors disposed relative to the frame for measuring one or more of: dimensions of the right quadrilateral panel, the eccentricity, and the rotation angle.

19. The system of claim 11, wherein the sensor is or has at least one of a camera, linear image array sensors, and a through beam sensor.

20. The system of claim 19, wherein the sensor is disposed so that the at least one of the camera, the linear image array, and the through beam sensor senses the edge points that describe the more than one intersecting edges of the right quadrilateral panel.

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