EBL collaborative manipulator

Abstract

An EBL (electron beam lithography) collaborative manipulator, comprising a plurality of manipulator grippers (200), at least two multi-axis robotic arms (100), a flower-basket transfer manipulator (700) and a work platform (800), wherein the flower-basket transfer manipulator (700) is configured to carry flower baskets; and the plurality of manipulator grippers (200) comprise a positioning gripper (210), a fastening gripper (220), a pulling gripper (230), a suction gripper (240) and a tray gripper (280). After the two multi-axis robotic arms (100) are respectively connected to different manipulator grippers (200), a first collaborative operation and a second collaborative operation can be performed, so as to fix a wafer and a silicon wafer. The EBL collaborative manipulator can switch between different manipulator grippers according to different operation requirements, perform fine operations such as substrate placement and position adjustment, and perform heavy physical labor operations such as flower basket transfer, which can reduce the operation intensity of workers.

Description

An EBL collaborative robot Technical Field

[0001] This application relates to the field of automation equipment technology, and in particular to an EBL collaborative robot. Background Technology

[0002] Electron beam lithography (EBL) is a technique that uses an electron beam to directly draw or project patterns onto a wafer coated with electron resist. EBL equipment exposes specific materials by focusing an electron beam, which is generated by an electron gun and focused by an electromagnetic lens to irradiate the sample surface with extremely high precision and resolution. When the electron beam interacts with the resist, the resist undergoes chemical or physical changes, thereby forming a specific pattern during the subsequent development process.

[0003] Because electron beam lithography equipment is a high-precision, large-scale instrument used in micro- and nano-fabrication, research institutions or production units that possess this equipment typically train specialized personnel to use it. During use, researchers need to adjust the position of the substrate (such as silicon wafers and silicon wafers) sample stage, install and fix the substrate (such as silicon wafers and silicon wafers), move and place the tray (used to hold the substrate), and adjust the position of the optical microscope, among other things.

[0004] The adjustment of the substrate sample stage and the optical microscope requires fine-tuning of the joysticks, knobs, and other structures on the equipment, demanding significant effort from researchers. Installing and securing the substrate involves using tweezers and other tools to hold the substrate, placing it on the sample stage, and then repeatedly fine-tuning its position. Finally, the substrate is secured using tweezers, screws, and other tools, requiring meticulous attention and patience from the operators, and is also very time-consuming. Handling and placing trays is another challenge. Trays are typically stacked in multiple units within tray supports, making the supports quite heavy. Researchers must first carefully lift the tray supports from the equipment and then gently place them on the platform, avoiding damage to the tray supports, the trays themselves, and the substrates within them – a physically demanding and time-consuming process.

[0005] In addition to the physical and mental strain mentioned above, researchers also have to constantly worry about damaging the equipment or substrate during the operation of the project, which places a heavy psychological burden on them. Summary of the Invention

[0006] In view of this, the purpose of this application is to provide an EBL collaborative robot to solve some or all of the above-mentioned problems.

[0007] To achieve the above technical objectives, this application provides an EBL collaborative robot, comprising: multiple robotic grippers, at least two multi-axis robotic arms, a flower basket transfer robot, and a worktable;

[0008] The multi-axis robotic arm is mounted on the worktable, and a force sensor and a switching end mount are mounted on the first end of the multi-axis robotic arm.

[0009] The switching end cap is used for detachably connecting either of the robotic grippers;

[0010] The multi-axis robotic arm is used to drive the robotic gripper to move along multiple axes;

[0011] The workbench is equipped with fixed workstations and flower basket workstations;

[0012] The flower basket transfer robot is used to move the flower baskets from the storage area to the flower basket workstation;

[0013] The plurality of said robotic grippers include: a positioning gripper, a clamping gripper, a pulling gripper, a suction gripper, and a pallet gripper;

[0014] The pallet gripper is used to transfer the first or second pallet on the flower basket to the fixed workstation;

[0015] The positioning gripper is provided with a pressing component, and the bottom of the pressing component is provided with multiple elastic pressure rods;

[0016] The fastening gripper is equipped with an electric operating component;

[0017] The pulling gripper is equipped with a pulling element;

[0018] The suction gripper is used to pick up the wafer;

[0019] The EBL collaborative robot is used to perform a first collaborative operation and a second collaborative operation at the fixed workstation.

[0020] In the first collaborative operation, one of the multi-axis robotic arms is connected to the positioning gripper and moves the positioning gripper to multiple elastic pressure rods to press and fix the pressure plate onto the first tray. Another multi-axis robotic arm is connected to the fastening gripper and moves the fastening gripper to the electric operating component abutting against the fastening screw on the pressure plate, so that the electric operating component can drive the fastening screw to rotate and adjust the tightness of the connection between the pressure plate and the first tray.

[0021] In the second collaborative operation, one of the multi-axis robotic arms is connected to the suction gripper and moves the suction gripper to pick up the wafer onto the second tray, while the other multi-axis robotic arm is connected to the pull gripper and moves the pull gripper to move the pressure plate on the second tray to press it onto the wafer.

[0022] Furthermore, the pressing member is provided with a clearance opening that extends vertically through it;

[0023] The clearance opening is for the electric operating component to pass through;

[0024] Multiple elastic pressure bars are disposed on both sides of the clearance opening.

[0025] Furthermore, protective plates are provided on both sides of the pressing member;

[0026] The two guard plates are used to abut against both sides of the pressure plate;

[0027] When the two guard plates abut against the two sides of the pressure plate, the positioning gripper moves, causing the pressure plate to move synchronously.

[0028] Multiple elastic pressure bars are disposed between the two guard plates.

[0029] Furthermore, the plurality of said robotic grippers also include: a pressing gripper;

[0030] The pressing gripper is equipped with a pressing block;

[0031] The pressing gripper is used, after being connected to the multi-axis robotic arm, to be driven by the multi-axis robotic arm to press down on the first or second tray via the pressing block, so as to cause the first or second tray to sink.

[0032] Furthermore, the plurality of said robotic grippers also include: a clamping gripper;

[0033] The gripper includes two openable gripping plates;

[0034] The gripper is used to grip silicon wafers via two gripping plates after being connected to the multi-axis robotic arm.

[0035] Furthermore, the plurality of said robotic grippers also include: a rotary gripper;

[0036] The rotary gripper is equipped with a sleeve;

[0037] The rotary gripper is used to engage with the locking rod of the first or second tray after being connected to the multi-axis robotic arm, and to rotate the locking rod to lock or unlock the position of the first or second tray.

[0038] Furthermore, it also includes: the tray gripper includes two openable grippers;

[0039] The gripper is a J-shaped gripper;

[0040] The pallet gripper uses two jaws to grasp the first pallet or the second pallet.

[0041] Furthermore, the flower basket is provided with multiple storage cavities;

[0042] The plurality of the storage cavities are arranged sequentially along the vertical direction;

[0043] The side of the flower basket is provided with an opening that connects to multiple storage cavities;

[0044] The first tray or the second tray is placed inside the storage cavity.

[0045] Furthermore, the plurality of said robotic grippers also include: push-pull grippers;

[0046] The push-pull gripper is used to hook the first or second tray located in the storage cavity after being connected to the multi-axis robotic arm, and then to slide the first or second tray out of the opening so that the tray gripper can grasp the first or second tray.

[0047] Furthermore, it also includes: a lifting platform;

[0048] The lifting platform includes: a lifting cylinder and a carrier;

[0049] The carrier can be raised and lowered on the workbench and is located next to the flower basket workstation;

[0050] The opening of the flower basket located at the flower basket workstation faces the vehicle;

[0051] The output end of the lifting cylinder is connected to the carrier and is used to drive the carrier to lift and lower so that the carrier is flush with the storage cavity.

[0052] The push-pull gripper is used, after being connected to the multi-axis robotic arm, to pull the first or second tray in the storage cavity onto the carrier, or to push the first or second tray on the carrier into the storage cavity.

[0053] Furthermore, the flower basket transfer robot is connected to a flower basket lifting gripper;

[0054] The flower basket extraction gripper includes two openable and closable locking plates;

[0055] The top of the flower basket is equipped with a carrying handle;

[0056] The basket extraction gripper is used to clamp the lifting rod through the two clamping plates.

[0057] Furthermore, it also includes: a flower basket storage table;

[0058] The interior of the flower basket storage platform is provided with a flower basket storage cavity, which serves as the flower basket storage area.

[0059] The flower basket storage platform is equipped with an openable cover;

[0060] The cover is used to control the opening and closing of the flower basket storage cavity.

[0061] Furthermore, the card slot plate is provided with a first notch and a second notch;

[0062] The depth of the first notch is greater than the depth of the second notch;

[0063] A connecting rod is provided on the cover;

[0064] The first notch is used for the connecting rod to be inserted;

[0065] The second notch is used for the lifting rod to be engaged.

[0066] Furthermore, a flower basket support is provided on the workbench;

[0067] The flower basket support is provided with an upward-facing groove.

[0068] The flower basket is provided with a positioning block on its side;

[0069] The flower basket holder is used to place the flower basket inside;

[0070] The groove is used for the positioning block to engage, thereby restricting the flower basket from moving horizontally.

[0071] Furthermore, it also includes: a height positioning component;

[0072] The height positioning component is disposed on the worktable;

[0073] The height positioning component includes: a positioning platform, a sliding fixture, and a height positioning sensor;

[0074] The sliding fixture is disposed on the positioning platform and can slide between the positioning station and the placement station on the positioning platform;

[0075] The height positioning sensor is mounted on the positioning platform and located above the positioning station;

[0076] The pallet gripper is also used to transfer the first pallet or the second pallet from the fixed workstation to the sliding fixture on the placement workstation after being connected to the multi-axis robotic arm.

[0077] The sliding fixture is used to move the first tray or the second tray from the placement station to the positioning station;

[0078] The height positioning sensor is used to position the silicon wafer on the first tray or the wafer on the second tray to determine whether the height of the silicon wafer or the wafer meets the preset height requirements.

[0079] Furthermore, the plurality of said robotic grippers also include: a height-adjusting gripper;

[0080] The height adjustment gripper is equipped with a second electric operating component;

[0081] Each of the first or second trays is equipped with several sample stages;

[0082] The sample stage is surrounded by several height adjustment knobs for adjusting the height of the sample stage.

[0083] When the height positioning sensor determines that the height of the silicon wafer or the wafer does not meet the preset height requirement, the height adjustment gripper is used to abut against the height adjustment knob on the first tray after being connected to the multi-axis robotic arm, so that the second electric operating component can drive the height adjustment knob to rotate until the height of the silicon wafer or the wafer meets the preset height requirement.

[0084] Furthermore, it also includes: a light mirror operation assembly;

[0085] The optical mirror operation assembly includes: an optical mirror transport robot and an optical mirror operation robot;

[0086] The optical mirror transfer robot is used to transfer the first or second tray, which has been positioned at a certain height, to the optical mirror operating table.

[0087] The optical mirror operating table is equipped with coarse adjustment knobs and fine adjustment knobs connected to the optical mirror;

[0088] The optical mirror operating robot includes: a knob sleeve and a knob motor;

[0089] The knob sleeve is used to fit the coarse adjustment knob or the fine adjustment knob;

[0090] The knob motor is connected to the knob sleeve and is used to drive the knob sleeve to rotate.

[0091] Furthermore, the optical mirror operating robot includes two parts, which correspond to the coarse adjustment knob and the fine adjustment knob, respectively.

[0092] Furthermore, the optical mirror manipulation robot also includes: a Z-axis module, a Y-axis module, and an X-axis module;

[0093] The Z-axis module is vertically mounted on the optical mirror operating table;

[0094] The Y-axis module is movably mounted on the Z-axis module along the Z-axis direction;

[0095] The X-axis module is movably mounted on the Y-axis module along the Y-axis direction;

[0096] The knob sleeve and the knob motor are movably mounted on the X-axis module along the X-axis direction.

[0097] Furthermore, a buffer layer is provided on the inner circumference of the knob sleeve.

[0098] Furthermore, the knob sleeve is connected to the transmission wheel via a spring;

[0099] The drive wheel is connected to the rotary motor.

[0100] Furthermore, the optical mirror operation assembly also includes: an XY automatic adjustment platform;

[0101] The XY automatic adjustment platform is set on the optical mirror operating table and is used for placing the sample holder;

[0102] The XY automatic adjustment platform is movable along the horizontal X-axis and Y-axis.

[0103] Furthermore, the optical mirror operation assembly also includes: a tray docking assembly;

[0104] The pallet docking assembly includes: a docking platform support base and a docking platform;

[0105] The docking platform is movably mounted on the docking platform support base along the X-axis direction;

[0106] The docking platform support base can be raised and lowered.

[0107] The docking platform support is located at the front end of the optical mirror operating table along the X-axis, and is used to place the first or second tray transferred by the optical mirror operating robot, and then transport the first or second tray to the XY automatic adjustment platform.

[0108] Furthermore, the electric operating component is elastically connected to the fastening gripper in the vertical direction.

[0109] Furthermore, the fastening gripper is equipped with a visual recognition component;

[0110] The visual recognition component is used to identify whether a silicon wafer is placed on the first tray and whether the placement angle of the silicon wafer meets the preset angle requirements.

[0111] Furthermore, the plurality of said robotic grippers also include: an angle-adjusting gripper;

[0112] The angle adjustment gripper is equipped with an angle rotary rod;

[0113] Each of the first or second trays is equipped with several sample stages;

[0114] The side of the sample stage is provided with an angle adjustment knob for adjusting the angle of the sample stage.

[0115] The angle adjustment knob has an insertion hole on its side;

[0116] When the placement angle of the silicon wafer does not meet the preset angle requirement, the angle adjustment gripper is used to insert the angle rotary rod into the insertion hole by the multi-axis robotic arm after being connected to the multi-axis robotic arm, and drive the angle adjustment knob to rotate until the placement angle of the silicon wafer meets the preset angle requirement.

[0117] Furthermore, the visual recognition component is also used to identify the flatness angle of the fastening screw, and use the flatness angle as the initial angle. Then, it identifies whether the stationary angle of the electric operating component before operation is the initial angle. If not, the controller controls the electric operating component to rotate to the initial angle.

[0118] Furthermore, each of the aforementioned robotic grippers is connected to a quick-connect coupling;

[0119] The quick connector is used for detachable connection with the switching end cap.

[0120] Furthermore, the first tray is provided with several sample stages;

[0121] The sample stage is provided with steps;

[0122] The step is used to allow one side of the silicon wafer to abut;

[0123] The pressure plate is used to abut against the other side of the silicon wafer.

[0124] Furthermore, the side of the pressure plate facing the step is an inclined surface with the normal direction downward.

[0125] Furthermore, the pressure plate is provided with a strip-shaped hollow groove;

[0126] The sample stage is provided with multiple threaded holes;

[0127] The fastening screw passes through the strip-shaped hollowed-out groove and is threaded into the threaded hole;

[0128] With the fastening screw loosened, the pressure plate can slide relative to the fastening screw;

[0129] With the fastening screws tightened, the pressure plate is pressed and fixed on the sample stage by the fastening screws.

[0130] Furthermore, the tablet is provided with a through hole;

[0131] The end of the puller is inverted T-shaped so that the puller can pass through the through hole and engage with the pressure plate.

[0132] Furthermore, a robotic arm placement seat is provided on the workbench;

[0133] The robotic arm placement seat is used to place multiple robotic arm grippers.

[0134] Furthermore, the workbench is equipped with an XY moving platform at the fixed workstation;

[0135] The XY mobile platform is used to place either the first pallet or the second pallet.

[0136] As can be seen from the above technical solutions, this application provides an EBL collaborative robot, including at least two multi-axis robotic arms, multiple robotic grippers, a worktable, and a flower basket transfer robot; the flower basket transfer robot is used to transport flower baskets; the multiple robotic grippers include a positioning gripper for fixing the pressure plate, a fastening gripper for tightening screws, a pulling gripper for pulling the pressure plate, a picking gripper for picking up wafers, and a pallet gripper for gripping trays; after the two multi-axis robotic arms are respectively connected to different robotic grippers, a first collaborative operation for fixing silicon wafers and a second collaborative operation for fixing wafers can be performed to achieve the fixing of wafers and silicon wafers.

[0137] The EBL collaborative robot provided by this solution, through the cooperation of multiple robotic arms and various robotic grippers, can switch between different robotic grippers according to different operational needs, thereby performing delicate operations such as pallet placement, substrate placement, and substrate position adjustment, as well as heavy manual labor such as pallet transfer and basket transfer. It can effectively reduce the workload of workers, improve work efficiency, reduce the possibility of damage to precision and expensive components on the equipment, and reduce the psychological burden on researchers operating the EBL equipment. Attached Figure Description

[0138] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0139] Figure 1 is a diagram showing the connection between the multi-axis robotic arm and the robotic gripper of an EBL collaborative robot provided in an embodiment of this application.

[0140] Figure 2 is a schematic diagram of the overall structure of an EBL collaborative robot arm after it is set on a workbench according to an embodiment of this application;

[0141] Figure 3 is a schematic diagram of the positioning gripper of an EBL collaborative robot provided in an embodiment of this application pressing a silicon wafer on a first tray;

[0142] Figure 4 is a partially enlarged view of the second tray of an EBL collaborative robot provided in an embodiment of this application;

[0143] Figure 5 is a schematic diagram of a pull gripper of an EBL collaborative robot provided in an embodiment of this application;

[0144] Figure 6 is a schematic diagram of the suction gripper of an EBL collaborative robot provided in an embodiment of this application;

[0145] Figure 7 is a schematic diagram of an EBL collaborative robot performing a first collaborative operation according to an embodiment of this application;

[0146] Figure 8 is an enlarged view of the positioning gripper of an EBL collaborative robot provided in an embodiment of this application after pressing the silicon wafer on the first tray;

[0147] Figure 9 is a schematic diagram of a sample holder of an EBL collaborative robot provided in an embodiment of this application placed behind an XY moving platform;

[0148] Figure 10 is a diagram of the clamping operation of an EBL collaborative robot provided in an embodiment of this application;

[0149] Figure 11 is a schematic diagram of a wafer placement sample holder by an EBL collaborative robot according to an embodiment of this application;

[0150] Figure 12 is a positioning diagram of the mask and mask plate frame of an EBL collaborative robot provided in an embodiment of this application;

[0151] Figure 13 is a schematic diagram of a robot placement base for an EBL collaborative robot provided in an embodiment of this application;

[0152] Figure 14 is a schematic diagram of the rotary gripper of an EBL collaborative robot provided in an embodiment of this application;

[0153] Figure 15 is a partial view of the second tray of an EBL collaborative robot provided in an embodiment of this application;

[0154] Figure 16 is a perspective view of the overall layout of an EBL collaborative robot provided in an embodiment of this application;

[0155] Figure 17 is a schematic diagram of the flower basket and lifting platform of an EBL collaborative robot provided in an embodiment of this application;

[0156] Figure 18 is a schematic diagram of an EBL collaborative robot according to an embodiment of this application, in which the robot pulls a tray from a flower basket onto a lifting platform;

[0157] Figure 19 is a schematic diagram of an EBL collaborative robot arm according to an embodiment of this application, in which the robot arm picks up a tray from a lifting platform;

[0158] Figure 20 is a schematic diagram of a flower basket transfer robot and a flower basket extraction gripper provided in an embodiment of this application;

[0159] Figure 21 is a schematic diagram of the basket-removing gripper of an EBL collaborative robot provided in an embodiment of this application after it has grasped the connecting rod.

[0160] Figure 22 is a schematic diagram of a height positioning component of an EBL collaborative robot provided in an embodiment of this application;

[0161] Figure 23 is a schematic diagram of the height adjustment gripper of an EBL collaborative robot provided in an embodiment of this application;

[0162] Figure 24 is a schematic diagram of a sample stage on the first tray of an EBL collaborative robot provided in an embodiment of this application;

[0163] Figure 25 is a schematic diagram of the optical mirror operation component area of ​​an EBL collaborative robot provided in an embodiment of this application;

[0164] Figure 26 is a schematic diagram of the components on the optical mirror operating stage in an optical mirror operating assembly of an EBL collaborative robot provided in an embodiment of this application;

[0165] Figure 27 is a partially enlarged view of the optical mirror manipulation assembly of an EBL collaborative robot provided in an embodiment of this application;

[0166] Figure 28 is a schematic diagram of the X-axis adjustment assembly of an EBL collaborative robot provided in an embodiment of this application;

[0167] Figure 29 is a schematic diagram of the Y-axis adjustment component of an EBL collaborative robot provided in an embodiment of this application;

[0168] Figure 30 is a schematic diagram of some components of an EBL collaborative robot manipulator provided in an embodiment of this application;

[0169] Figure 31 is a schematic diagram of a chip placement fixture for an EBL collaborative robot provided in an embodiment of this application;

[0170] In the diagram: 100, multi-axis robotic arm; 110, force sensor; 120, switching end cap; 200, robotic gripper; 201, quick connector; 210, positioning gripper; 211, pressing component; 212, elastic pressure bar; 213, guard plate; 214. Clearance opening; 220. Fastening gripper; 221. Electric operating component; 222. Vision recognition component; 223. Light source; 230. Pulling gripper; 231. Pulling component; 240. Suction gripper; 250. Pressing gripper; 251. Pressing block; 260. Clamping gripper; 261. Clamping plate; 270. Rotating gripper; 271. Sleeve; 280. Pallet gripper; 281. Gripper; 290. Height adjustment gripper; 291. Second electric operating component; 2100. Angle adjustment gripper; 2101. Angle rotary rod; 2110. Push-pull gripper; 2120. Pushing gripper; 310. Pressure plate; 311. Strip-shaped hollow groove; 320. First pallet; 330. Fastening screw; 340. Second pallet; 341. T 342. Type-fitting block; 350. Insertion slot; 351. Pressing plate; 360. Through hole; 370. Locking rod; 371. Sample stage; 372. Step; 373. Threaded hole; 374. Rack; 380. Height adjustment knob; 381. Height adjustment platform; 390. Angle adjustment knob; 391. Insertion hole; 410. Wafer; 420. Silicon wafer; 500. Storage and retrieval assembly; 510. Flower basket; 511. Storage cavity; 512. Opening; 513. Lifting rod; 514. Positioning block; 520. Lifting platform; 521. Lifting cylinder; 522. Carrier; 530. Flower basket storage platform; 531. Flower basket storage cavity; 532. Cover; 533. Connecting rod; 600. Height positioning assembly; 610. Positioning platform; 620. Sliding fixture; 630. Height positioning sensor; 700. Flower basket transport robot; 710. Flower basket extraction gripper; 711. Positioning plate; 712. First notch; 713. Second notch; 800. Worktable; 810. Fixed station; 820. Flower basket station; 830. Robot placement base; 840. XY moving platform; 850. Wafer placement fixture; 851. Wafer placement stage; 852. Silicon wafer placement stage; 860. Overall vision assembly; 870. Flower basket support; 871. Groove; 880. Sample rack; 881. Transparent support; 882. Mask; 883. J-shaped buckle; 884. Mask plate holder; 900. Optical mirror operation assembly; 910. Optical mirror transport robot; 920. Optical mirror operation robot; 921. Knob sleeve; 922. Knob motor; 923, Z-axis module; 924, Y-axis module; 925, X-axis module; 926, buffer layer; 927, spring; 928, drive wheel; 930, optical mirror operating table; 940, optical mirror; 941, coarse adjustment knob; 942, fine adjustment knob; 950, XY automatic adjustment platform; 951, X-axis adjustment assembly; 952, Y-axis adjustment assembly; 953, piezoelectric preload actuator;960. Pallet docking assembly; 961. Docking platform support; 962. Docking platform. Detailed Implementation

[0171] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments in this application specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection claimed in this application.

[0172] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0173] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0174] Please refer to Figures 1 and 2. In this embodiment, the first aspect provides an EBL collaborative robot, including: multiple robotic grippers 200, at least two multi-axis robotic arms 100, and a worktable 800. The worktable 800 is provided with a fixed station 810 and a flower basket station 820; the flower basket station 820 is used to place flower baskets 510; the flower baskets 510 are used to place a first tray 320 or a second tray 340.

[0175] The EBL collaborative robot can be mounted on a worktable 800 and perform operations on the wafer 410 and silicon wafer 420 on the worktable 800. The wafer 410 and silicon wafer 420 are shown in Figures 3 and 4. In applications, the number of multi-axis robotic arms 100 can be greater than two; in the embodiment shown in this application, two multi-axis robotic arms 100 are described.

[0176] A force sensor 110 and a switching endplate 120 are provided at the first end of the multi-axis robotic arm 100; the switching endplate 120 is used to detachably connect to the robotic gripper 200. During operation, the reaction force on the robotic gripper 200 acts on the force sensor 110. The multi-axis robotic arm 100, the force sensor 110, and the robotic gripper 200 are all electrically connected to a controller, which controls the movement of the multi-axis robotic arm 100 and the actions of the robotic gripper 200. Through the force sensor 110, the controller can accurately control the magnitude of the force applied by the robotic gripper 200 when working on the wafer 410 and silicon wafer 420, avoiding damage to the wafer 410 and silicon wafer 420 and improving the accuracy of the operation.

[0177] In this embodiment, the multi-axis robotic arm 100 is used to drive the robotic gripper 200 to move along multiple axes. The multi-axis robotic arm 100 consists of multiple joints and links, and the method by which it drives the robotic gripper 200 to move along multiple axes is existing technology and will not be described in detail in this solution. It should be noted that multi-axis movement means that the robotic gripper 200 connected to the multi-axis robotic arm 100 can move in at least two directions; in this embodiment, the robotic gripper 200 connected to the multi-axis robotic arm 100 can move along the X-axis, Y-axis, and Z-axis, so that the robotic gripper 200 can move to any position within a certain space.

[0178] Please refer to Figures 3 to 8. The multiple robotic grippers 200 include: a positioning gripper 210, a clamping gripper 220, a pulling gripper 230, and a suction gripper 240. The positioning gripper 210 is provided with a pressing element 211, and the bottom of the pressing element 211 is provided with multiple elastic pressure rods 212; the clamping gripper 220 is provided with an electric operating element 221; the pulling gripper 230 is provided with a pulling element 231; and the suction gripper 240 is used to pick up the wafer 410. Among them, the suction gripper 240 may be provided with a flexible suction element, which can pick up the wafer 410 without damaging the wafer 410.

[0179] The EBL collaborative robot is used to perform the first and second collaborative operations at the fixed workstation 810.

[0180] The first collaborative operation is shown in Figures 7 and 8. A multi-axis robotic arm 100 is connected to a positioning gripper 210 and moves the positioning gripper 210 to multiple elastic pressure rods 212 to press and fix the pressure plate 310 onto the first tray 320. Another multi-axis robotic arm 100 is connected to a fastening gripper 220 and moves the fastening gripper 220 to an electric operating component 221 that abuts against the fastening screw 330 on the pressure plate 310, so that the electric operating component 221 can drive the fastening screw 330 to rotate and adjust the tightness of the connection between the pressure plate 310 and the first tray 320.

[0181] The electric operating component 221 can be an electric screwdriver head, driven and controlled by a servo motor on the fastening gripper 220. The servo motor can control the rotation stroke of the electric operating component 221 to prevent the fastening screw 330 from being over-tightened and damaging the pressure plate 310. The servo motor can be equipped with torque upper and lower limits and a screw height detector; the screw height detector can be used to determine whether the screw is tightened properly and whether the torque meets the requirements. Furthermore, the pressure plate 310 and the fastening screw 330 can be pre-set on the first tray 320, or they can be placed by the robot arm after the first tray 320 is placed at the fixed station 810.

[0182] As one implementation, the electric operating component 221 is elastically connected to the fastening gripper 220 in the vertical direction, so that the electric operating component 221 can float in the vertical direction. While ensuring that the electric operating component 221 can tighten the fastening screw 330, it avoids the electric operating component 221 from damaging the pressure plate 310 due to excessive pressure from the fastening screw 330.

[0183] In this embodiment, the top end of the elastic pressure rod 212 can be connected to the pressing member 211 through an elastic buffer, so that the elastic pressure rod 212 has an elastic buffering effect. In conjunction with the force sensor 110, it can achieve precise force control and avoid damage to the pressure plate 310. Furthermore, the bottom end of the elastic pressure rod 212 can be made of a soft material such as silicone to further protect the pressure plate 310 and increase the friction between the elastic pressure rod 212 and the pressure plate 310 when the elastic pressure rod 212 presses against the pressure plate 310, thus preventing the pressure plate 310 from twisting.

[0184] As shown in Figure 8, in this embodiment, the pressure plate 310 is a plate used to abut against the side of the silicon wafer 420, so as to fix the silicon wafer 420 in conjunction with the step 371.

[0185] After the positioning gripper 210 is removed, the pressure plate 310 will loosen; therefore, in this embodiment, the pressure plate 310 is provided with a fastening screw 330; when the fastening screw 330 is loosened, the pressure plate 310 can slide relative to the fastening screw 330 to adjust the position of the pressure plate 310 relative to the silicon wafer 420; after the pressure plate 310 abuts against the silicon wafer 420, tightening the fastening screw 330 will make the pressure plate 310 press and fix it on the sample stage 370.

[0186] The improved EBL collaborative robot in this embodiment can achieve automated collaborative operation of fixing silicon wafer 420 on the first tray 320. During the process of fixing silicon wafer 420, the controller will sense the pressure of elastic pressure rod 212 on pressure plate 310 in real time through force sensor 110. With the elastic buffer at the top of elastic pressure rod 212 and the silicone at the bottom, damage to pressure plate 310 can be avoided, achieving precise and damage-free automated collaborative operation.

[0187] The second collaborative operation is shown in Figure 4. A multi-axis robotic arm 100 is connected to a suction gripper 240 and moves the suction gripper 240 to pick up the wafer 410 onto the second tray 340. Another multi-axis robotic arm 100 is connected to a pulling gripper 230 and moves the pulling gripper 230 to move the pressure plate 350 on the second tray 340 to press it onto the wafer 410.

[0188] Specifically, in this embodiment, the first tray 320 is used to place and fix the silicon wafer 420; the second tray 340 is used to place and fix the wafer 410. The first tray 320 is provided with multiple rotatable pressure plates 350; the pressure plates 350 can be thin metal sheets that can elastically deform in the vertical direction while rotating; thus, after the wafer 410 is placed on the first tray 320, the pressure plates 350 can be first lifted and rotated above the wafer 410, and then the pressure plates 350 can be released so that they elastically press down to press the wafer 410 firmly onto the first tray 320.

[0189] In one embodiment, the pressure plate 350 is provided with a through hole 351; the end of the puller 231 is inverted T-shaped so that the puller 231 can pass through the through hole 351 and engage with the pressure plate 350.

[0190] Specifically, when the puller 231 is aligned with the center of the through hole 351, the puller 231 can pass through the through hole 351. Then, the puller 231 moves horizontally and its inverted T-shaped end can be engaged with the pressure plate 350. Then, when the puller 231 rises and moves horizontally, it can drive the pressure plate 350 to rise and move horizontally. Similarly, when it is necessary to leave the pressure plate 350, the puller 231 is moved down and then horizontally moved until the puller 231 is aligned with the center of the through hole 351. Then, the puller 231 is moved up again.

[0191] The first and second collaborative operations described above enable automated placement and fixation of wafer 410 and silicon wafer 420, reducing the technical requirements on workers and lowering their workload.

[0192] The process of fixing the wafer 410 or the silicon wafer 420 can be carried out on the fixed station 810 on the worktable 800. The fixed station 810 is equipped with a sample rack 880 for placing the first tray 320 and the second tray 340.

[0193] In one implementation, the sample holder 880 can be fixed. Accordingly, during the fixing operation, the first tray 320 and the second tray 340 are located in fixed positions. Therefore, each time the silicon wafer 420 and the wafer 410 are moved for placement, it is only necessary to place the silicon wafer 420 and the wafer 410 in the fixed positions.

[0194] In another embodiment, please refer to Figure 9, the sample holder 880 is disposed on the XY moving platform 840; the XY moving platform 840 can drive the sample holder 880 to move along the horizontal X-axis and Y-axis directions to adjust the position of the first tray 320 or the second tray 340.

[0195] Based on the above embodiments, a visual recognition component 222 is provided on the fastening gripper 220; the visual recognition component 222 is used to identify whether a silicon wafer 420 is placed on the first tray 320 and whether the placement angle of the silicon wafer 420 meets the preset angle requirements.

[0196] Correspondingly, a visual recognition component 222 can also be set on the pull gripper 230.

[0197] The visual recognition component 222 can be a camera, and the visual recognition component 222 can be connected to a light source 223. The visual recognition component 222 can automatically identify whether there is a silicon wafer 420 and a wafer 410, identify the position of the silicon wafer 420 and a wafer 410, and identify the placement angle of the silicon wafer 420 and a wafer 410, etc., as pre-fixing information. Furthermore, the visual recognition component 222 is electrically connected to the controller mentioned above, so that the controller can control the multi-axis robotic arm 100 and the robotic gripper 200 through the aforementioned pre-fixing information, so as to accurately fix the silicon wafer 420 and the wafer 410.

[0198] Corresponding to the electric operating component 221 being a screwdriver tip, the visual recognition component 222 is also used to identify whether the stationary angle of the electric operating component 221 is the initial angle. If not, the controller controls the servo motor to rotate so that the electric operating component 221 rotates to the initial angle, ensuring that the angle of the screwdriver tip of the electric operating component 221 is consistent with the angle of the fastening screw 330 before each fixing operation. The initial angle is the flatness angle of the fastening screw 330 after the pressure plate 310 is pressed and fixed by the pressing component 211; the flatness of the fastening screw 330 refers to the recessed area on the fastening screw 330 used to mate with the screwdriver tip. To facilitate recognition by the visual recognition component 222, in this embodiment, the fastening screw 330 can be a flathead screw; correspondingly, the electric operating component 221 is a flathead screwdriver.

[0199] As a further improvement, a total vision assembly 860 can be installed on the workbench 800; the total vision assembly 860 is electrically connected to the controller and is used to perform visual monitoring of the entire workbench 800, thereby further improving the accuracy of the operation.

[0200] In one embodiment, referring to Figure 11, when the second tray 340 is placed on the sample holder 880, a transparent bracket 881 may be provided on the sample holder 880, and the transparent bracket 881 may be made of glass.

[0201] In the embodiment with a transparent support 881, the wafer 410 can be picked up by the suction gripper 240 and then pushed into the interlayer between the transparent support 881 and the sample holder 880 by the push gripper 2120. The end of the push gripper 2120 used to push the wafer 410 can be an arc shape adapted to the wafer 410, and a flexible layer is provided on the end face to avoid damaging the wafer.

[0202] In application, the process of wafer mounting by the push gripper 2120 and the suction gripper 240 can be as follows: a multi-axis robotic arm 100 drives the suction gripper 240 to pick up the wafer 410 and move the wafer 410 to the side above the sample holder 880. Then, the suction gripper 240 is lowered, and one side of the wafer 410 is placed on the sample holder 880. Then, another multi-axis robotic arm 100 moves the push gripper 2120 so that the flexible layer of the push gripper 2120 abuts against the other side of the wafer 410. After the suction gripper 240 releases its adsorption on the wafer 410, the push gripper 2120 is moved to push the wafer 410 under the transparent support 881.

[0203] The transparent support 881 is a detachable structure; after the transparent support 881 is removed, the pick-up gripper 240 can directly pick up the wafer 410 and place it on the sample holder 880.

[0204] In another embodiment, referring to Figure 12, this solution also includes a mask holder 884; the mask 882 can be snapped onto the mask holder 884 by a J-shaped snap fastener 883; correspondingly, the plurality of robotic grippers 200 may also include tweezer grippers (not shown in the figure); when the multi-axis robotic arm 100 is connected to the tweezer grippers, the tweezer grippers can grasp the J-shaped snap fastener 883 to clamp the mask 882 onto the mask holder 884.

[0205] Specifically, when fabricating a structure composed of multiple complex patterns, the mask 882 can decompose these complex patterns into different layers, which are then exposed separately. By using multiple masks 882 to sequentially expose the wafer 410 or silicon wafer 420, complex patterned structures can be gradually constructed. During the exposure process, the mask 882 can be positioned between the electron beam source and the wafer 410 or silicon wafer 420 via a mask holder 884.

[0206] As described above, during the operation, in addition to the first and second collaborative operations, the multi-axis robotic arm 100 needs to change its robotic grippers 200 to perform different operations such as gripping silicon wafers 420, picking up wafers 410, clamping pressure plates 310, tightening screws, and pushing wafers 410. Therefore, in one embodiment, referring to Figures 1 and 13, a robotic arm placement seat 830 can be provided on the worktable 800; the robotic arm placement seat 830 is used to place multiple robotic grippers 200. The multi-axis robotic arm 100 is positioned beside the robotic arm placement seat 830 to facilitate the replacement of different robotic grippers 200 by the multi-axis robotic arm 100.

[0207] In one embodiment, referring to Figure 15, the sample stage 370 on the second tray 340 may be provided with a slot 342 on its side; a movable T-shaped locking block 341 is provided on the slot 342; the T-shaped locking block 341 can be pulled and pushed by tweezers to make the T-shaped locking block 341 leave the slot 342 or enter the slot 342; after the T-shaped locking block 341 enters the slot 342, the T-shaped locking block 341 engages with the slot 342 to fix the edge of the wafer 410, and works with the pressing plate 350 to better fix the wafer 410.

[0208] As a further improvement, as shown in Figure 3, each robotic gripper 200 is connected to a quick connector 201; the quick connector 201 is used for detachable connection with the switching end seat 120. The quick connector 201 can be an existing quick-connect structure, therefore its specific structure is not shown in this application. In practical applications, existing quick connectors can be used as a reference without affecting the implementation of the solution.

[0209] The quick-connector 201 enables rapid connection and disconnection with the switching end cap 120. The rapid connection and disconnection method between the quick-connector 201 and the switching end cap 120 can be, for example, bayonet-type, electromagnetic, or pneumatic. After the robotic gripper 200 is connected to the multi-axis robotic arm 100, the robotic gripper 200 is energized, allowing the controller to control it. The rapid connection and disconnection between the robotic gripper 200 and the multi-axis robotic arm 100, and the subsequent energization method, are existing technologies and will not be elaborated upon in this solution.

[0210] In a more specific embodiment, please refer to Figures 3 and 8. The pressing member 211 is provided with a clearance opening 214 extending vertically through it; the clearance opening 214 is used for the electric operating member 221 to pass through; a plurality of elastic pressure rods 212 are provided on both sides of the clearance opening 214.

[0211] Specifically, please refer to Figure 8. The pressure plate 310 is provided with a strip-shaped hollow groove 311; the sample stage 370 is provided with multiple threaded holes 372; the fastening screw 330 passes through the strip-shaped hollow groove 311 and is threadedly connected to the threaded holes 372. When the pressing member 211 presses the pressure plate 310, the position of the clearance opening 214 corresponds to the position of the strip-shaped hollow groove 311 on the pressure plate 310, so that the multiple elastic pressing rods 212 can at least press the two sides of the strip-shaped hollow groove 311 on the pressure plate 310, ensuring that the pressure plate 310 is fixed.

[0212] In other words, in this solution, an avoidance opening 214 is provided on the pressing member 211, so that, in addition to the strip-shaped hollow groove 311, elastic pressure rods 212 can be provided at each position on the pressing member 211 corresponding to the pressure plate 310, thereby ensuring the pressing effect of the pressure plate 310.

[0213] In one embodiment, the pressing member 211 is provided with guard plates 213 on both sides; the two guard plates 213 are used to abut against the two sides of the pressing plate 310; a plurality of elastic pressing rods 212 are provided between the two guard plates 213.

[0214] When the two guard plates 213 abut against the two sides of the pressure plate 310, the pressing member 211 moves and drives the pressure plate 310 to move synchronously, so that the positioning gripper 210 can drive the pressure plate 310 to move and adjust the pressure plate 310 to abut against the silicon wafer 420.

[0215] It should be noted that both the first tray 320 and the second tray 340 are provided with a plurality of sample stages 370. In this embodiment, the first tray 320 is provided with four sample stages 370; the second tray 340 is provided with one sample stage 370. The sample stages 370 on the first tray 320 may have different structures from those on the second tray 340.

[0216] On the first tray 320, the sample stage 370 is provided with a step 371 and multiple threaded holes 372; the step 371 is used to abut one side of the silicon wafer 420; the pressure plate 310 is used to abut the other side of the silicon wafer 420 to fix the silicon wafer 420. Since the step 371 is elongated, the silicon wafer 420 can abut different positions on the step 371; correspondingly, the positioning gripper 210 can drive the pressure plate 310 to move to different positions to correspond to the position of the silicon wafer 420. Among them, when the fastening screw 330 is completely loosened, the positioning gripper 210 can drive the pressure plate 310 and the fastening screw 330 to move synchronously.

[0217] The bottom of the sample stage 370 is provided with an elastic support; when it is necessary to place the silicon wafer 420 and the wafer 410, the sample stage 370 can be pressed down first to facilitate the placement of the silicon wafer 420 and the wafer 410, and then the sample stage 370 is gradually reset by the elastic force of the elastic support.

[0218] Correspondingly, in one embodiment, the plurality of robotic grippers 200 further includes: a pressing gripper 250; the pressing gripper 250 is provided with a pressing block 251; the pressing gripper 250 is used to press down on the first tray 320 or the second tray 340 by the multi-axis robotic arm 100 after being connected to the multi-axis robotic arm 100, so as to cause the first tray 320 or the second tray 340 to sink.

[0219] In this embodiment, the multi-axis robotic arm 100, in conjunction with the pressing gripper 250, can press down the sample stage 370 to achieve the pressing action.

[0220] In one embodiment, the action of gripping the silicon wafer 420 described above can be performed by a gripper 260. Specifically, the gripper 260 includes two openable gripping plates 261; the gripper 260 is used to grip the silicon wafer 420 by being driven by the multi-axis robotic arm 100 through the two gripping plates 261 after being connected to the multi-axis robotic arm 100.

[0221] The inner side of the clamping plate 261 may be provided with a flexible pad made of silicone or other materials to avoid damaging the silicon wafer 420.

[0222] In one embodiment, referring to Figures 2, 14, and 27, the plurality of robotic grippers 200 further include: a rotary gripper 270; the rotary gripper 270 is provided with a sleeve rod 271; the rotary gripper 270 is used to be driven by the multi-axis robotic arm 100 to be sleeved on the locking rod 360 of the first tray 320 or the second tray 340 after being connected to the multi-axis robotic arm 100, and to drive the locking rod 360 to rotate to lock or unlock the position of the first tray 320 or the second tray 340.

[0223] The locking rod 360 can be set on the sample holder 880; the sample holder 880 is provided with a clamping cavity for placing the first tray 320 or the second tray 340; after rotating the locking rod 360, the space of the clamping cavity is reduced, thereby clamping the first tray 320 or the second tray 340.

[0224] It should be noted that the technique of adjusting the size of the clamping cavity by rotating the locking rod 360 is existing technology and will not be elaborated in this solution. The main purpose of this solution is to integrate the operation method of rotating the locking rod 360 into the rotary gripper 270, so that after the rotary gripper 270 is connected to the multi-axis robotic arm 100, it can be controlled by the multi-axis robotic arm 100 to fit the sleeve 271 onto the locking rod 360, so as to realize the mechanized automatic control of the locking rod 360.

[0225] In application, the locking lever 360 can be adapted so that after locking, the XY moving platform 840 is also in a locked state and cannot move the sample holder 880. This can be achieved, for example, by setting an inductive switch at the end of the locking stroke of the locking lever 360 to control the start and stop of the XY moving platform 840; or by setting a physical switch at the end of the locking stroke of the locking lever 360, and de-energizing the XY moving platform 840 when the locking lever 360 abuts against the physical switch.

[0226] In other embodiments, please refer to Figures 2, 16 to 19. The EBL collaborative robot provided in this embodiment also includes a storage component 500. The storage component 500 includes the aforementioned flower basket 510; the flower basket 510 is used to store the first tray 320 and / or the second tray 340.

[0227] As shown in Figure 13, in this embodiment, the multiple robotic grippers 200 also include a tray gripper 280; the tray gripper 280 includes two openable and closable claws 281. The claws 281 can be J-shaped and are capable of gripping and hooking the tray.

[0228] The pallet gripper 280 is used to remove the first pallet 320 or the second pallet 340 from the basket 510 and transfer it to the fixed station 810 after being connected to the multi-axis robotic arm 100.

[0229] In this embodiment, before positioning, the pallet gripper 280 can remove the pallet from the basket 510, and after positioning the wafer 410 or silicon wafer 420, it can clamp the pallet and put it back into the basket 510, thereby realizing the automated operation of pallet picking and placing, and further reducing the workload of researchers.

[0230] In a more specific embodiment, in order to ensure that the trays in the flower basket 510 are placed in a regular manner, a plurality of storage cavities 511 are provided in the flower basket 510; the plurality of storage cavities 511 are arranged sequentially in the vertical direction; the side of the flower basket 510 is provided with an opening 512 connecting the plurality of storage cavities 511; the first tray 320 or the second tray 340 is placed in the storage cavity 511.

[0231] Therefore, the multiple trays placed in the flower basket 510 are evenly spaced along the vertical direction. In this case, to facilitate the handling of the trays in the flower basket 510, please refer to Figures 13 and 18. The multiple robotic grippers 200 also include: push-pull grippers 2110; the push-pull grippers 2110 are connected to push-pull rods and are capable of pushing or pulling the trays.

[0232] The push-pull gripper 2110 is used to hook the first tray 320 or the second tray 340 located in the storage cavity 511 after being connected to the multi-axis robotic arm 100, and then drive the first tray 320 or the second tray 340 to slide out from the opening 512 so that the tray gripper 280 can grasp the first tray 320 or the second tray 340.

[0233] In this embodiment, the push-pull gripper 2110 can drive the tray in the storage cavity 511 to slide, so as to push the tray into the storage cavity 511 or take it out of the storage cavity 511; after the push-pull gripper 2110 pulls the tray out of the storage cavity 511, the tray gripper 280 can clamp the tray.

[0234] To improve stability during pallet handling, in one embodiment, the access component 500 further includes a lifting platform 520.

[0235] The lifting platform 520 includes a lifting cylinder 521 and a carrier 522; the carrier 522 is liftably mounted on the worktable 800; the worktable 800 is provided with a flower basket station 820 for placing flower baskets 510; the opening 512 of the flower basket 510 located on the flower basket station 820 faces the carrier 522; the output end of the lifting cylinder 521 is connected to the carrier 522 and is used to drive the carrier 522 to rise and fall so that the carrier 522 is flush with the storage cavity 511; the push-pull gripper 2110 is used, after being connected to the multi-axis robotic arm 100, to pull the first tray 320 or the second tray 340 in the storage cavity 511 onto the carrier 522, or to push the first tray 320 or the second tray 340 on the carrier 522 into the storage cavity 511.

[0236] In this embodiment, the lifting cylinder 521 can drive the carrier 522 to be level with the storage cavity 511 at any height, so as to achieve stable pallet loading and unloading.

[0237] Taking the removal of the tray from the second-layer storage cavity 511 as an example, the specific removal and placement process can be as follows: the lifting cylinder 521 drives the carrier 522 to rise to be level with the second-layer storage cavity 511, and then the push-pull gripper 2110 pulls the tray from the second-layer storage cavity 511 onto the carrier 522. After the tray is completely separated from the flower basket 510, the tray gripper 280 clamps the tray, completing the separation of the tray from the carrier 522.

[0238] As can be seen from Figure 2, in the application, a flower basket support 870 can be set on the workbench 800; the lifting platform 520 can be set in front of the flower basket support 870, and after the flower basket 510 is placed on the flower basket support 870, the opening 512 of the flower basket 510 faces the lifting platform 520.

[0239] As one embodiment, please refer to Figure 17. The flower basket support 870 is provided with a groove 871; the side of the flower basket 510 is provided with a plurality of positioning blocks 514; the groove 871 opens upward. When the flower basket 510 is placed, the positioning blocks 514 are engaged in the groove 871, so that the flower basket 510 is fixed and limited in the horizontal direction after placement.

[0240] In existing EBL equipment, the pallet handling is generally done manually by staff. That is, staff need to manually remove the pallet rack from the main unit. The removal process requires staff to keep the pallet level and place it gently, which is physically demanding and carries a high risk of damaging the pallet.

[0241] Therefore, in one embodiment, referring to Figure 16, the EBL collaborative robot also includes: a flower basket transfer robot 700; the storage and retrieval component 500 also includes: a flower basket storage platform 530; the flower basket transfer robot 700 is used to transfer the flower basket 510 in the flower basket storage platform 530 to the flower basket workstation 820.

[0242] The flower basket workstation 820 is set on the workbench 800; in the embodiment described above where a flower basket support 870 is provided, the flower basket support 870 is set on the flower basket workstation 820. The flower basket transfer robot 700 can reduce the physical exertion of researchers and reduce damage to the flower basket 510 and the tray inside the flower basket 510.

[0243] In one embodiment, as shown in Figures 16, 20 and 21, the flower basket transfer robot 700 uses the flower basket extraction gripper 710 to pick up and place the flower basket 510.

[0244] The flower basket lifting gripper 710 includes two openable and closable locking plates 711; a lifting rod 513 is provided at the top of the flower basket 510; the flower basket lifting gripper 710 is used to clamp the lifting rod 513 through the two locking plates 711. The locking plates 711 may be provided with a second notch 713; the two second notches 713 of the two locking plates 711 can cooperate to clamp the lifting rod 513.

[0245] In one embodiment, the flower basket storage platform 530 has a flower basket storage cavity 531 inside; the flower basket storage platform 530 is provided with an openable cover 532; the cover 532 is used to control the opening and closing of the flower basket storage cavity 531. The cover 532 can also protect the flower basket 510 inside the flower basket storage cavity 531.

[0246] To facilitate the automated extraction of the flower basket 510 by the flower basket transfer robot 700, the flower basket transfer robot 700 can be adapted to a structure that can open the cover 532, so that the flower basket transfer robot 700 can open the cover 532 and lift out the flower basket 510, realizing the full automation of the flower basket transfer process.

[0247] As an embodiment of the flower basket transfer robot 700 opening the cover 532, the locking plate 711 is also provided with a first notch 712; the cover 532 is provided with a connecting rod 533; the first notch 712 is used for the connecting rod 533 to be inserted.

[0248] Through the first notch 712 and the second notch 713, the flower basket transfer robot 700 can simultaneously control the gripping of the lifting rod 513 and the gripping of the connecting rod 533, thus combining the opening function of the cover 532 and the extraction function of the flower basket 510.

[0249] In practical applications, the depth of the first notch 712 is greater than the depth of the second notch 713.

[0250] In another embodiment provided in this application, please refer to Figures 2 and 22. This embodiment also includes: a height positioning component 600;

[0251] The height positioning component 600 includes a positioning platform 610, a sliding fixture 620, and a height positioning sensor 630. The sliding fixture 620 is disposed on the positioning platform 610 and can slide between the positioning station and the placement station on the positioning platform 610.

[0252] Specifically, the sliding fixture 620 can be a linear module arranged along the y-axis; the area near one end of the sliding fixture 620 is a placement station for placing the sample holder 880; the area near the other end of the sliding fixture 620 is a positioning platform 610 for positioning the silicon wafer 420 or wafer 410 on the sample holder 880. A carrier for placing the sample holder 880 can be provided on the sliding fixture 620.

[0253] The sliding fixture 620 is used to slide the first tray 320 or the second tray 340 from the placement station to the positioning station; the height positioning sensor 630 is set on the positioning platform 610 and located above the positioning station; the tray gripper 280 is also used to transfer the first tray 320 or the second tray 340 from the fixed station to the sliding fixture 620 on the placement station after being connected to the multi-axis robotic arm 100.

[0254] In this embodiment, the height positioning sensor 630 is used to perform height positioning on the silicon wafer 420 on the first tray 320 or the wafer 410 on the second tray 340, so as to determine whether the height of the silicon wafer 420 or the wafer 410 meets the preset height requirements.

[0255] In one implementation, the height positioning sensor 630 can be a laser displacement sensor. Taking the height positioning of the silicon wafer 420 as an example, the height positioning sensor 630 can be positioned by: moving the silicon wafer 420 below the laser sensor through the sliding fixture 620, and the laser sensor feeding back the coordinates to the controller; the controller drives the robotic gripper 200 to tighten the height adjustment fixture on the first tray 320 to adjust the height of the silicon wafer 420, so that the upper surface of the silicon wafer coincides with the Faraday cup surface.

[0256] As one way to adjust the height of the silicon wafer 420, please refer to Figures 23 and 24. The multiple robotic grippers 200 also include: a height adjustment gripper 290; the height adjustment gripper 290 is provided with a second electric actuator 291; the sample stage 370 is provided with several height adjustment knobs 380 for adjusting the height of the sample stage 370; when the height positioning sensor 630 determines that the height of the silicon wafer 420 or the wafer 410 does not meet the preset height requirement, the height adjustment gripper 290 is used to abut against the height adjustment knobs 380 on the first tray 320 after being connected to the multi-axis robotic arm 100, so that the second electric actuator 291 can drive the height adjustment knobs 380 to rotate until the height of the silicon wafer 420 or the wafer 410 meets the preset height requirement. The height adjustment knob 380 can be an existing Phillips or flathead screwdriver; correspondingly, the second electric operating component 291 can be an existing Phillips or flathead screwdriver bit. Specifically, the second electric operating component 291 can be connected to the quick connector 201 to form a height adjustment gripper 290 and drive the height adjustment knob 380 to rotate.

[0257] As one method of adjusting the height of the sample stage 370, please refer to Figure 24; the height adjustment knob 380 can be a bolt; the height adjustment knob 380 is disposed on the height adjustment platform 381; when the height adjustment knob 380 is rotated, the height of the height adjustment platform 381 can be adjusted. Since the sample stage 370 and the first tray 320 are elastically connected, the sample stage 370 can rise due to elastic force as the height adjustment platform 381 rises; correspondingly, when the height adjustment platform 381 is pressed down, the sample stage 370 is pressed down accordingly. In application, the height adjustment platform 381 can include multiple platforms evenly distributed around the sample stage 370 in a circular pattern, so that the levelness of the sample stage 370 can also be adjusted by adjusting the height adjustment knobs 380 on different height adjustment platforms 381.

[0258] In this embodiment, the height adjustment knob 380 is a cross-shaped bolt, thus differing from the rotation structure of the fastening screw 330. Therefore, the height adjustment gripper 290 and the fastening gripper 220 can be provided separately. In application, when the height adjustment knob 380 and the fastening screw 330 adopt the same structure, the height adjustment gripper 290 can be the same as the fastening gripper 220.

[0259] Referring to Figure 4, the height adjustment stage 381 can be located inside the sample stage 370. Specifically, it can be achieved by providing an opening in the sample stage 370 for the height adjustment stage 381 to pass through. In application, by providing an opening in the sample stage 370, different sizes of sample stages 370 can be accommodated on the tray, improving the overall applicability of the equipment.

[0260] In one embodiment, referring to Figures 13 and 24, the plurality of robotic grippers 200 further includes an angle adjusting gripper 2100; the angle adjusting gripper 2100 is provided with an angle rotating rod 2101. The angle rotating rod 2101 can be a straight rod.

[0261] The sample stage 370 is provided with an angle adjustment knob 390 on its side for adjusting the angle of the sample stage 370; the angle adjustment knob 390 is provided with an insertion hole 391 on its side; when the placement angle of the silicon wafer 420 does not meet the preset angle requirement, the angle adjustment gripper 2100 is used to insert the angle rotating rod 2101 into the insertion hole 391 after being connected to the multi-axis robotic arm 100, and drive the angle adjustment knob 390 to rotate until the placement angle of the silicon wafer 420 meets the preset angle requirement.

[0262] In one implementation, a rack 373 may be provided on the sample stage 370; an angle adjustment knob 390 is provided on the side of the sample stage 370 and is engaged with the rack 373; when the angle adjustment knob 390 is rotated, the sample stage 370 can be rotated through the engagement of the rack to achieve angle adjustment of the silicon wafer 420 on the sample stage 370.

[0263] In one embodiment, referring to Figures 25 to 29, the EBL collaborative robot further includes a mirror manipulation assembly 900. The mirror manipulation assembly 900 includes a mirror transfer robot 910 and a mirror manipulation robot 920. The mirror manipulation robot 920 can be mounted on a mirror manipulation table 930. A mirror 940 is mounted on the mirror manipulation table 930, and the mirror manipulation table 930 is provided with a coarse adjustment knob 941 and a fine adjustment knob 942 connected to the mirror 940.

[0264] The optical mirror transfer robot 910 is used to transfer the first tray 320 or the second tray 340, after being positioned at a certain height, to the optical mirror operating table 930. Therefore, the optical mirror transfer robot 910 can be positioned between the height positioning component 600 and the optical mirror operating table 930. The optical mirror transfer robot 910 can have the same robotic gripper structure as the tray gripper 280 for gripping the tray.

[0265] The optical mirror operating robot 920 includes: a knob sleeve 921 and a knob motor 922; the knob sleeve 921 is used to fit the coarse adjustment knob 941 or the fine adjustment knob 942; the knob motor 922 is connected to the knob sleeve 921 for driving the knob sleeve 921 to rotate.

[0266] In this solution, the knob motor 922 can drive the knob sleeve 921 to rotate, thereby enabling mechanized automatic control of the coarse adjustment knob 941 and fine adjustment knob 942 on the optical mirror 940, and improving the accuracy of the optical mirror adjustment.

[0267] In application, the optical mirror manipulator 920 may consist of only one; the optical mirror manipulator 920 is movable and can control the coarse adjustment knob 941 and the fine adjustment knob 942 respectively by moving its position.

[0268] In one embodiment, the optical mirror manipulator 920 includes two parts, corresponding to a coarse adjustment knob 941 and a fine adjustment knob 942, respectively. Furthermore, the optical mirror 940 is movable, corresponding to different positions of the silicon wafer 420 on the first tray 320. Accordingly, the optical mirror manipulator 920 is also movable.

[0269] In one embodiment, the optical mirror manipulator 920 further includes: a Z-axis module 923, a Y-axis module 924, and an X-axis module 925; the Z-axis module 923 is vertically mounted on the optical mirror operating table 930; the Y-axis module 924 is movably mounted on the Z-axis module 923 along the Z-axis direction; the X-axis module 925 is movably mounted on the Y-axis module 924 along the Y-axis direction; and the knob sleeve 921 and the knob motor 922 are movably mounted on the X-axis module 925 along the X-axis direction.

[0270] Through the cooperation of the Z-axis module 923, Y-axis module 924 and X-axis module 925, the knob sleeve 921 and knob motor 922 can move along the X-axis, Y-axis and Z-axis directions to adapt to the position of the optical mirror 940.

[0271] Optionally, a buffer layer 926 is provided on the inner circumference of the knob sleeve 921, which can improve the friction when the knob sleeve 921 is connected to the coarse adjustment knob 941 or the fine adjustment knob 942.

[0272] Optionally, the knob sleeve 921 is connected to the drive wheel 928 via a spring 927; the drive wheel 928 is connected to the knob motor 922. The output ends of the drive wheel 928 and the knob motor 922 can be connected via a conveyor belt.

[0273] By incorporating spring 927, the knob sleeve 921 gains a certain buffering capacity, preventing damage to the knob due to excessive torque. Simultaneously, during application, the knob motor 922 can monitor its torque in real time.

[0274] In practical applications, the optical microscope 940, as a precision device, is not suitable for large-scale movement. Therefore, in this solution, please refer to Figure 27. The optical microscope operation assembly 900 also includes an XY automatic adjustment platform 950. The XY automatic adjustment platform 950 is set on the optical microscope operation stage 930 for placing the sample holder 880. The XY automatic adjustment platform 950 is movable along the horizontal X-axis and Y-axis.

[0275] That is, after the sample holder 880 is placed on the XY automatic adjustment platform 950, the XY automatic adjustment platform 950 can adjust the position of the sample holder 880 on the X-axis and Y-axis.

[0276] In this embodiment, the XY automatic adjustment platform 950 can be connected to an X-axis adjustment component 951 and a Y-axis adjustment component 952. The X-axis adjustment component 951 and the Y-axis adjustment component 952 are shown in Figures 28 and 29, respectively. Both the X-axis adjustment component 951 and the Y-axis adjustment component 952 are equipped with multiple sets of piezoelectric preload actuators 953, which can utilize the properties of piezoelectric materials to achieve precise displacement.

[0277] Please refer to Figures 25 and 26. In this embodiment, to avoid interference between the optical mirror manipulator 920 and the optical mirror 940 when placing the tray, the optical mirror manipulator assembly 900 may further include a tray docking assembly 960. The tray docking assembly 960 includes a docking platform support 961 and a docking platform 962. The docking platform 962 is movably disposed on the docking platform support 961 along the X-axis. The docking platform support 961 is height-adjustable. The docking platform support 961 is disposed at the front end of the optical mirror manipulator 930 along the X-axis and is used to place the first tray 320 or the second tray 340 transferred by the optical mirror manipulator 920, and then transport the first tray 320 or the second tray 340 to the XY automatic adjustment platform 950.

[0278] The EBL collaborative robot provided in the above embodiments can effectively reduce the difficulty of operating EBL equipment, lower the operating threshold, save researchers time in practicing simple repetitive actions, and save researchers physical strength in carrying items such as flower baskets 510. Moreover, researchers do not need to bear the psychological pressure of damaging the substrate or equipment during the operation of EBL equipment, thus reducing the pressure on researchers.

[0279] Based on the above embodiments, please refer to Figures 1 to 30. In an EBL collaborative robot provided in this application, the first tray 320 is used to place silicon wafers 420, and the first tray 320 is provided with a pressure plate 310 for pressing the silicon wafers 420; the second tray 340 is used to place wafers 410, and the second tray 340 is provided with a movable pressure plate 350.

[0280] Specifically, the workbench 800 can be equipped with a fixed workstation 810, a flower basket workstation 820, multiple robot arm placement seats 830, a chip placement fixture 850, and a total vision assembly 860; the fixed workstation 810 is used to place the XY moving platform 840; the flower basket workstation 820 is used to place the flower basket support 870; the robot arm placement seat 830 is used to place multiple robot grippers 200, which facilitates the rapid switching of the end effector of the multi-axis robot arm 100.

[0281] The XY moving platform 840 is used to place the first tray 320 or the second tray 340, and is capable of moving the first tray 320 or the second tray 340 along the X-axis and Y-axis directions on a horizontal plane. In this embodiment, the XY moving platform 840 can adopt an existing translation structure, which will not be described in detail in this embodiment.

[0282] Please refer to Figure 31. The wafer placement fixture 850 is equipped with a wafer placement stage 851, a silicon wafer placement stage 852, and a mask placement stage (not shown in the figure), which can be used to place various materials for material preparation.

[0283] In one embodiment, the side of the pressure plate 310 facing the step 371 is an inclined surface with the normal direction downward, so that the contact position between the pressure plate 310 and the silicon wafer 420 is the side of the top surface of the silicon wafer 420. On the one hand, this can reduce the contact area between the pressure plate 310 and the silicon wafer 420, avoiding large-area damage to the silicon wafer 420. On the other hand, it can provide a downward clamping force to the silicon wafer 420 when the pressure plate 310 presses the silicon wafer 420, ensuring the clamping effect on the silicon wafer 420.

[0284] As can be seen from the above embodiments, the EBL collaborative robot provided by this solution can integrate the multi-axis robotic arm 100, various robotic grippers 200, storage and retrieval components 500, height positioning components 600, flower basket transfer robot 700, and worktable 800. It can automate multiple delicate processes such as picking up and placing, transferring, fixing, height positioning, and angle positioning of substrates (silicon wafers 420 and wafers 410), while also enabling multiple heavy manual operations such as pallet transfer, flower basket 510 handling, and cover 532 opening. This saves researchers' energy and physical strength, reduces the risk of damage to expensive and precision components on the equipment, reduces the psychological burden on staff, and improves the accuracy of the above operations.

[0285] The above are merely preferred embodiments of this application and are not intended to limit this application. Although this application has been described in detail with reference to examples, those skilled in the art can still modify the technical solutions described in the foregoing examples or make equivalent substitutions for some of the technical features. However, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An EBL collaborative robotic arm, characterized in that, include: Multiple robotic grippers (200), at least two multi-axis robotic arms (100), a flower basket transfer robot (700), and a worktable (800); The multi-axis robotic arm (100) is disposed on the worktable (800), and a force sensor (110) and a switching end seat (120) disposed on the force sensor (110) are provided at the first end of the multi-axis robotic arm (100); The switching end cap (120) is used for detachably connecting any one of the robotic grippers (200); The multi-axis robotic arm (100) is used to drive the robotic gripper (200) to move along multiple axes; The workbench (800) is equipped with a fixed workstation (810) and a flower basket workstation (820); The flower basket transfer robot (700) is used to move the flower basket (510) so that the flower basket (510) is transferred from the storage area to the flower basket workstation (820); The plurality of said robotic grippers (200) include: a positioning gripper (210), a clamping gripper (220), a pulling gripper (230), a suction gripper (240), and a pallet gripper (280); The pallet gripper (280) is used to transfer the first pallet (320) or the second pallet (340) on the flower basket (510) to the fixed station (810); The positioning gripper (210) is provided with a pressing member (211), and the bottom of the pressing member (211) is provided with a plurality of elastic pressure rods (212); The fastening gripper (220) is equipped with an electric operating component (221); The pulling gripper (230) is provided with a pulling element (231); The gripper (240) is used to pick up the wafer (410); The EBL collaborative robot is used to perform a first collaborative operation and a second collaborative operation at the fixed workstation (810); In the first collaborative operation, one of the multi-axis robotic arms (100) is connected to the positioning gripper (210) and moves the positioning gripper (210) to multiple elastic pressure rods (212) to press and fix the pressure plate (310) onto the first tray (320). Another multi-axis robotic arm (100) is connected to the fastening gripper (220) and moves the fastening gripper (220) to the electric operating component (221) to abut against the fastening screw (330) on the pressure plate (310), so that the electric operating component (221) can drive the fastening screw (330) to rotate and adjust the tightness of the connection between the pressure plate (310) and the first tray (320). In the second collaborative operation, one of the multi-axis robotic arms (100) is connected to the suction gripper (240) and moves the suction gripper (240) to pick up the wafer (410) onto the second tray (340), while the other multi-axis robotic arm (100) is connected to the pull gripper (230) and moves the pull gripper (230) to move the pressure plate (350) on the second tray (340) to press onto the wafer (410).

2. The EBL collaborative robot according to claim 1, characterized in that, The pressing member (211) is provided with a clearance opening (214) that extends vertically through it; The clearance opening (214) is for the electric operating element (221) to pass through; Multiple elastic pressure bars (212) are disposed on both sides of the clearance opening (214).

3. The EBL collaborative robot according to claim 2, characterized in that, The pressing member (211) is provided with guard plates (213) on both sides; The two guard plates (213) are used to abut against both sides of the pressure plate (310); When the two guard plates (213) abut against the two sides of the pressure plate (310), the positioning gripper (210) moves and drives the pressure plate (310) to move synchronously. Multiple elastic pressure bars (212) are disposed between the two guard plates (213).

4. The EBL collaborative robot according to claim 1, characterized in that, The plurality of said robotic grippers (200) also include: a pressing gripper (250); The pressing gripper (250) is provided with a pressing block (251); The pressing gripper (250) is used to press down on the first tray (320) or the second tray (340) via the pressing block (251) after being connected to the multi-axis robotic arm (100), so that the first tray (320) or the second tray (340) sinks.

5. The EBL collaborative robot according to claim 1, characterized in that, The plurality of said robotic grippers (200) further include: a gripping gripper (260); The gripper (260) includes two openable gripping plates (261); The gripper (260) is used to grip the silicon wafer (420) via the two gripping plates (261) after being connected to the multi-axis robotic arm (100).

6. The EBL collaborative robot according to claim 1, characterized in that, The plurality of said robotic grippers (200) also include: a rotary gripper (270); The rotary gripper (270) is provided with a sleeve (271); The rotary gripper (270) is used to be driven by the multi-axis robotic arm (100) to be sleeved on the locking rod (360) of the first tray (320) or the second tray (340) after being connected to the multi-axis robotic arm (100), and to drive the locking rod (360) to rotate to lock or unlock the position of the first tray (320) or the second tray (340).

7. The EBL collaborative robot according to claim 1, characterized in that, Also includes: The pallet gripper (280) includes two openable grippers (281); The gripper (281) is a J-shaped gripper; The pallet gripper (280) grips the first pallet (320) or the second pallet (340) using the two grippers (281).

8. The EBL collaborative robot according to claim 7, characterized in that, The flower basket (510) is provided with multiple storage cavities (511); The plurality of storage cavities (511) are arranged sequentially in a vertical direction; The side of the flower basket (510) is provided with an opening (512) that connects to a plurality of the storage cavities (511); The first tray (320) or the second tray (340) is placed in the storage cavity (511).

9. The EBL collaborative robot according to claim 8, characterized in that, The plurality of said robotic grippers (200) also include: a push-pull gripper (2110); The push-pull gripper (2110) is used to hook the first tray (320) or the second tray (340) located in the storage cavity (511) after being connected to the multi-axis robotic arm (100), and then drive the first tray (320) or the second tray (340) to slide out from the opening (512) so that the tray gripper (280) can grasp the first tray (320) or the second tray (340).

10. The EBL collaborative robot according to claim 9, characterized in that, Also includes: Lifting platform (520); The lifting platform (520) includes: a lifting cylinder (521) and a carrier (522); The carrier (522) can be raised and lowered on the workbench (800) and is located next to the flower basket workstation (820); The opening (512) of the flower basket (510) located at the flower basket workstation (820) faces the carrier (522); The output end of the lifting cylinder (521) is connected to the carrier (522) and is used to drive the carrier (522) to rise and fall so that the carrier (522) is flush with the storage cavity (511); The push-pull gripper (2110) is used, after being connected to the multi-axis robotic arm (100), to pull the first tray (320) or the second tray (340) in the storage cavity (511) onto the carrier (522), or to push the first tray (320) or the second tray (340) on the carrier (522) into the storage cavity (511).

11. The EBL collaborative robot according to claim 1, characterized in that, The flower basket transfer robot (700) is connected to a flower basket extraction gripper (710); The basket extraction gripper (710) includes two openable and closable locking plates (711); The top of the flower basket (510) is provided with a lifting rod (513); The basket extraction gripper (710) is used to clamp the lifting rod (513) via the two clamping plates (711).

12. The EBL collaborative robot according to claim 11, characterized in that, Also includes: Flower basket storage table (530); The interior of the flower basket storage platform (530) is provided with a flower basket storage cavity (531) that serves as a storage area for the flower baskets (510); The flower basket storage platform (530) is equipped with an openable cover (532); The cover (532) is used to control the opening and closing of the flower basket storage cavity (531).

13. The EBL collaborative robot according to claim 12, characterized in that, The card slot plate (711) is provided with a first notch (712) and a second notch (713); The depth of the first notch (712) is greater than the depth of the second notch (713); A connecting rod (533) is provided on the cover (532); The first notch (712) is used for the connecting rod (533) to be inserted; The second notch (713) is used for the lifting rod (513) to be engaged.

14. The EBL collaborative robot according to claim 1, characterized in that, A flower basket support (870) is provided on the workbench (800); The flower basket support (870) is provided with an upward-facing groove (871); The flower basket (510) is provided with a positioning block (514) on its side; The flower basket support (870) is used to place the flower basket (510) into the basket; The groove (871) is used for the positioning block (514) to engage, thereby restricting the flower basket (510) from moving horizontally.

15. The EBL collaborative robot according to claim 1, characterized in that, Also includes: Height positioning component (600); The height positioning component (600) is disposed on the worktable (800); The height positioning component (600) includes: a positioning platform (610), a sliding fixture (620), and a height positioning sensor (630); The sliding fixture (620) is disposed on the positioning platform (610) and can slide between the positioning station and the placement station on the positioning platform (610); The height positioning sensor (630) is disposed on the positioning platform (610) and located above the positioning station; The pallet gripper (280) is also used to transfer the first pallet (320) or the second pallet (340) from the fixed station (810) to the sliding fixture (620) on the placement station after being connected to the multi-axis robotic arm (100). The sliding fixture (620) is used to drive the first tray (320) or the second tray (340) to slide from the placement station to the positioning station; The height positioning sensor (630) is used to position the silicon wafer (420) on the first tray (320) or the wafer (410) on the second tray (340) to determine whether the height of the silicon wafer (420) or the wafer (410) meets the preset height requirements.

16. The EBL collaborative robot according to claim 15, characterized in that, The plurality of said robotic grippers (200) also include: a height-adjusting gripper (290); The height adjustment gripper (290) is provided with a second electric operating component (291); Each of the first tray (320) or the second tray (340) is provided with a plurality of sample stages (370); The sample stage (370) is provided with several height adjustment knobs (380) around its periphery for adjusting the height of the sample stage (370); When the height positioning sensor (630) determines that the height of the silicon wafer (420) or the wafer (410) does not meet the preset height requirement, the height adjustment gripper (290) is used to abut against the height adjustment knob (380) on the first tray (320) after being connected to the multi-axis robotic arm (100), so that the second electric operating component (291) can drive the height adjustment knob (380) to rotate until the height of the silicon wafer (420) or the wafer (410) meets the preset height requirement.

17. The EBL collaborative robot according to claim 16, characterized in that, Also includes: Optical mirror operation assembly (900); The optical mirror operation assembly (900) includes: an optical mirror transfer robot (910) and an optical mirror operation robot (920); The optical mirror transfer robot (910) is used to transfer the first tray (320) or the second tray (340) after height positioning to the optical mirror operating table (930); The optical mirror operating table (930) is equipped with a coarse adjustment knob (941) and a fine adjustment knob (942) that are connected to the optical mirror (940); The optical mirror operating robot (920) includes: a knob sleeve (921) and a knob motor (922); The knob sleeve (921) is used to fit the coarse adjustment knob (941) or the fine adjustment knob (942); The knob motor (922) is connected to the knob sleeve (921) and is used to drive the knob sleeve (921) to rotate.

18. The EBL collaborative robot according to claim 17, characterized in that, The optical mirror operating robot (920) includes two parts, which correspond to the coarse adjustment knob (941) and the fine adjustment knob (942) respectively.

19. The EBL collaborative robot according to claim 17, characterized in that, The optical mirror manipulation robot (920) also includes: a Z-axis module (923), a Y-axis module (924), and an X-axis module (925); The Z-axis module (923) is vertically mounted on the optical mirror operating stage (930); The Y-axis module (924) is movably mounted on the Z-axis module (923) along the Z-axis direction; The X-axis module (925) is movably mounted on the Y-axis module (924) along the Y-axis direction; The knob sleeve (921) and the knob motor (922) are movably mounted on the X-axis module (925) along the X-axis direction.

20. The EBL collaborative robot according to claim 17, characterized in that, The inner circumference of the knob sleeve (921) is provided with a buffer layer (926).

21. The EBL collaborative robot according to claim 20, characterized in that, The knob sleeve (921) is connected to the transmission wheel (928) via a spring (927); The transmission wheel (928) is connected to the rotary motor (922) in a transmission connection.

22. The EBL collaborative robot according to claim 17, characterized in that, The optical mirror operation assembly (900) further includes: an XY automatic adjustment platform (950); The XY automatic adjustment platform (950) is set on the optical mirror operating stage (930) for placing the sample holder (880); The XY automatic adjustment platform (950) is movable along the horizontal X-axis and Y-axis.

23. The EBL collaborative robot according to claim 22, characterized in that, The optical mirror operation assembly (900) further includes: a tray docking assembly (960); The pallet docking assembly (960) includes: a docking platform support (961) and a docking platform (962); The docking platform (962) is movably mounted on the docking platform support (961) along the X-axis direction; The docking platform support base (961) can be raised and lowered; The docking platform support (961) is located at the front end of the optical mirror operating table (930) along the X-axis direction, and is used to place the first tray (320) or the second tray (340) transferred by the optical mirror operating robot (920), and then the first tray (320) or the second tray (340) is transported to the XY automatic adjustment platform (950).

24. The EBL collaborative robot according to claim 1, characterized in that, The electric operating component (221) is elastically connected to the fastening gripper (220) in the vertical direction.

25. The EBL collaborative robot according to claim 1, characterized in that, The fastening gripper (220) is provided with a visual recognition component (222); The visual recognition component (222) is used to identify whether a silicon wafer (420) is placed on the first tray (320) and to identify whether the placement angle of the silicon wafer (420) meets the preset angle requirements.

26. The EBL collaborative robot according to claim 25, characterized in that, The plurality of said robotic grippers (200) also include: an angle-adjusting gripper (2100); An angle adjustment gripper (2100) is provided with an angle rotary rod (2101); Each of the first tray (320) or the second tray (340) is provided with a plurality of sample stages (370); The sample stage (370) is provided with an angle adjustment knob (390) on its side for adjusting the angle of the sample stage (370); The angle adjustment knob (390) has an insertion hole (391) on its side; When the placement angle of the silicon wafer (420) does not meet the preset angle requirement, the angle adjustment gripper (2100) is used to insert the angle rotary rod (2101) into the insertion hole (391) after being connected to the multi-axis robotic arm (100), and drive the angle adjustment knob (390) to rotate until the placement angle of the silicon wafer (420) meets the preset angle requirement.

27. The EBL collaborative robot according to claim 25, characterized in that, The visual recognition component (222) is also used to identify the flatness angle of the fastening screw (330) and use the flatness angle as the initial angle. Then, it identifies whether the static angle of the electric operating component (221) before operation is the initial angle. If not, the controller controls the electric operating component (221) to rotate to the initial angle.

28. The EBL collaborative robot according to any one of claims 1 to 27, characterized in that, Each of the aforementioned robotic grippers (200) is connected to a quick connector (201); The quick connector (201) is used for detachable connection with the switching end (120).

29. The EBL collaborative robot according to claim 1, characterized in that, The first tray (320) is provided with a plurality of sample stages (370); The sample stage (370) is provided with a step (371); The step (371) is used for one side of the silicon wafer (420) to abut; The pressure plate (310) is used to abut against the other side of the silicon wafer (420).

30. The EBL collaborative robot according to claim 29, characterized in that, The side of the pressure plate (310) facing the step (371) is an inclined surface with the normal direction downward.

31. The EBL collaborative robot according to claim 29, characterized in that, The pressure plate (310) is provided with a strip-shaped hollow groove (311); The sample stage (370) is provided with multiple threaded holes (372); The fastening screw (330) passes through the strip-shaped hollow groove (311) and is threaded into the threaded hole (372); With the fastening screw (330) loosened, the pressure plate (310) can slide relative to the fastening screw (330); When the fastening screw (330) is tightened, the pressure plate (310) is pressed by the fastening screw (330) and fixed on the sample stage (370).

32. The EBL collaborative robot according to claim 29, characterized in that, The tablet (350) is provided with a through hole (351); The end of the puller (231) is inverted T-shaped so that the puller (231) can pass through the through hole (351) and engage with the pressure plate (350).

33. The EBL collaborative robot according to claim 29, characterized in that, The workbench (800) is provided with a robot arm placement seat (830); The robotic arm placement seat (830) is used to place multiple robotic grippers (200).

34. The EBL collaborative robot according to claim 29, characterized in that, The workbench (800) is equipped with an XY moving platform (840) on the fixed workstation (810); The XY moving platform (840) is used to place the first tray (320) or the second tray (340).

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