Micromechanical component for a capacitive sensor and / or actuator device

The micromechanical component with comb structure electrodes addresses sensitivity and accuracy issues in capacitive sensors and actuators, enabling reliable detection and actuation of non-rotational movements with high precision in noisy conditions.

WO2026114595A1PCT designated stage Publication Date: 2026-06-04ROBERT BOSCH GMBH
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Patent Information

Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
ROBERT BOSCH GMBH
Filing Date
2025-10-29
Publication Date
2026-06-04

AI Technical Summary

Technical Problem

Conventional micromechanical components for capacitive sensors and actuators face limitations in sensitivity, measurement accuracy, and applicability to non-rotational movements, particularly in environments with significant external stress and noise.

Method used

A micromechanical component design featuring first and second electrodes with comb structures that allow for differential signal measurements and actuation, providing high sensitivity, reliability, and linearity, while enabling perpendicular adjustment and deformation movements without snap-in effects.

Benefits of technology

The design achieves high sensitivity and accuracy in detecting and inducing adjustment and deformation movements, even in noisy environments, and expands applicability to non-rotational movements, offering improved measurement precision and reduced error frequency.

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    Figure EP2025081309_04062026_PF_FP_ABST
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Abstract

The invention relates to a micromechanical component for a capacitive sensor and / or actuator device having at least two first electrodes (10), wherein each of the first electrodes (10) comprises at least one electrically conductive first electrode region (10a), and at least two second electrodes (12), wherein each of the second electrodes (12) comprises at least one electrically conductive second electrode region (12b), and wherein each of the second electrodes (12) comprises, in addition to its electrically conductive second electrode region (12a), in each case at least one electrically conductive third electrode region (12b) and in each case an insulation region (12c) lying between its second electrode region (12a) and its third electrode region (12b), and the first electrode regions (10a), the second electrode regions (12a) and the third electrode regions (12b) can be electrically contacted via an electrical contacting device in such a way that a first differential voltage signal of a first voltage signal present between the first electrode regions (10a) and the second electrode regions (12a), and a second voltage signal present between the first electrode regions (10a) and the third electrode regions (12b) can be tapped or applied.
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