Measuring assembly and laser machining device
The measuring arrangement addresses beam clipping issues by positioning the scan plane after the aperture of the deflection unit, ensuring a wide OCT scan field for accurate pre-process and post-process control in laser processing systems.
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- TRUMPF LASER SE
- Filing Date
- 2025-11-14
- Publication Date
- 2026-06-04
AI Technical Summary
Existing laser processing systems face limitations in achieving a wide OCT scan field due to beam clipping at the apertures of processing optics, particularly with small apertures, restricting effective pre-process and post-process control.
A measuring arrangement with a deflection unit and measuring optics is designed to couple a measuring beam into the processing optics, utilizing a lens group to position the scan plane at or after the aperture of the deflection unit, minimizing beam clipping and maximizing the scan field.
Enables a wide scan field for OCT measurements, allowing for comprehensive pre-process and post-process control without interference from optical apertures, enhancing measurement accuracy and flexibility.
Smart Images
Figure EP2025082998_04062026_PF_FP_ABST
Abstract
Description
[0001] TRUMPF Laser SE 11.11.2025
[0002] 2024P00160WO - 1 -
[0003] Measuring setup and laser processing device
[0004] The invention relates to a measuring arrangement with a deflection unit for aligning a processing beam onto a surface to be processed, and to a measuring optic positioned upstream of the deflection unit in a beam propagation direction for coupling a measuring beam into the deflection unit. The invention also relates to a laser processing device.
[0005] Such measuring setups are used particularly in laser processing. Optical coherence tomography (OCT) scanners are becoming increasingly important in this context, as they enable highly accurate measurement of the working area of a processing laser during laser processing. For this purpose, an OCT measuring beam is generated and directed onto the working area.
[0006] For cost-effective monitoring of the processing area, it has proven effective to couple the measuring beam into the processing optics of the processing laser beam. This allows the existing optics to be used. The measuring beam can then be directed coaxially to the processing laser beam onto the working plane, thus minimizing measurement inaccuracies.
[0007] Furthermore, the combined use of the processing optics by the measuring beam and the processing laser beam makes it easy to position the measuring point above the processing focus of the processing laser beam, allowing the measurement to be carried out directly at the processing location of the processing laser beam.
[0008] To expand the measurement possibilities offered by the measuring beam, a scanner is often used, enabling the positioning of the measuring point relative to the laser focus. This allows for measurement not only at the processing location but also upstream of the processing location, adjacent to the processing location. TRUMPF Laser SE 11.11.2025
[0009] 2024P00160WO - 2 - and / or downstream measurement can be performed. This allows for pre-process control and / or post-process control during processing.
[0010] To enable the widest possible measurement range around the processing point of the laser beam, the scan field must be as extensive as possible. Due to the design-related path length of the measuring beam between the OCT scanner and the lens of the processing optics, excessive scanner deflections cause the beam to be cut off at the apertures of the processing optics, thus limiting the possible scan field. Particularly with processing optics that have small apertures, only small scan fields are possible, which prevents effective pre-process and / or post-process control.
[0011] From DE 10 2015 012 565 B3 an OCT measuring system with an OCT measuring scanner is known, wherein an OCT measuring beam is used to measure the environment of the processing location formed by a processing laser beam.
[0012] Object of the invention
[0013] The invention is based on the objective of creating the most extensive possible OCT scan field in conjunction with an existing processing optic.
[0014] Description of the invention
[0015] This problem is solved according to the invention by a measuring arrangement with the features of claim 1. Furthermore, the problem is solved by a laser processing device with the features of claim 10. The dependent claims relate to preferred embodiments of the invention.
[0016] According to the invention, a measuring arrangement is provided.
[0017] The measuring arrangement includes a deflection unit for aligning a processing beam onto a surface to be processed. In other words, the measuring arrangement includes a TRUMPF Laser SE 11.11.2025 provided by a processing device.
[0018] 2024P00160WO - 3 - or an existing deflection unit. This allows a measuring optic to be attached to an existing processing device particularly easily. In particular, the deflection unit is a processing optic of a laser processing device. The measuring arrangement described above and below has proven particularly advantageous in conjunction with laser processing devices.
[0019] The measuring arrangement also includes measuring optics. The measuring optics are positioned upstream of the deflection unit in the direction of propagation of a measuring beam formed by the measuring optics. In other words, the measuring beam, in its propagation direction, first passes through the measuring optics and then through the deflection unit.
[0020] The measuring optics are designed to couple the measuring beam into the deflection unit. In other words, the measuring optics are designed to ensure the coupling of the measuring beam into the deflection unit, and in particular, to ensure its complete coupling.
[0021] The measuring optics also include a measuring scanner. The measuring scanner is configured to deflect the measuring beam, particularly in two dimensions. In other words, the measuring scanner is configured to form a scan line, especially a scan field. The measuring scanner has at least one scan plane. This at least one scan plane is configured to deflect the measuring beam in at least one scan direction transverse to the beam propagation direction of the measuring beam. Preferably, the measuring scanner comprises two scan planes configured to deflect the measuring beam in different scan directions transverse to the beam propagation direction. Particularly preferably, the two scan directions are configured perpendicular to each other.
[0022] According to the invention, the measuring optics comprise a lens group. The lens group is arranged downstream of the scanner in the direction of beam propagation. In other words, the lens group is designed to manipulate the measuring beam deflected by the measuring scanner. TRUMPF Laser SE 11.11.2025
[0023] 2024P00160WQ - 4 -
[0024] The lens group can include an entrance lens with positive refractive power for refracting the measuring beam entering the lens group. The lens group can include an exit lens with positive refractive power for refracting the measuring beam exiting the lens group. Alternatively or additionally, the lens group can include an entrance lens subgroup with positive refractive power. Alternatively or additionally, the lens group can include an exit lens subgroup with positive refractive power. A lens subgroup can be understood as a functional lens assembly, typically an achromat or doublet.
[0025] In other words, the lens group has at least two converging lenses.
[0026] The lens group of the measuring optics is designed to define an imaging position of the scan plane in the beam propagation direction at or after an input aperture of the deflection unit. In other words, the optical properties of the lens group are adapted to a bridging distance between the scan plane and at least the input aperture. Preferably, the optical properties of the lens group, in particular the lens spacing between the input lens or input lens subgroup and the output lens or output lens subgroup, and the focal lengths of the input lens or input lens subgroup and / or the output lens or output lens subgroup, are adjustable. This allows the measuring arrangement to be positioned particularly easily and quickly on a large number of deflection units.
[0027] In summary, the invention proposes a measuring arrangement in which the measuring optics are matched to the deflection device. This matching is achieved via the lens group, which is positioned downstream of the measuring scanner and selectively positions the image of the scan plane at or behind an optical constriction of the deflection device. This minimizes the clipping of the measuring beam by the apertures at large scan angles and maximizes the scan field. TRUMPF Laser SE 11.11.2025
[0028] 2024P00160WO - 5 -
[0029] In a preferred embodiment of the measuring arrangement, the lens group includes an intermediate lens with negative refractive power. Alternatively, the measuring arrangement can include an intermediate lens subgroup with negative refractive power. The intermediate lens, or intermediate lens subgroup, is arranged in the beam propagation direction between the entrance lens, or entrance lens subgroup, and the exit lens, or exit lens subgroup. By arranging a diverging lens between the converging lenses of the lens group, the deflection of the measuring beam by the measuring scanner can be amplified. This allows the imaging position to be set at a particularly large distance from the scan plane and enables even more flexible adaptation to the deflection unit.
[0030] In an alternative preferred embodiment of the measuring arrangement, the lens group includes an intermediate lens with positive refractive power. Alternatively, the measuring arrangement can include an intermediate lens subgroup with positive refractive power. The intermediate lens, or intermediate lens subgroup, is arranged in the beam propagation direction between the entrance lens, or entrance lens subgroup, and the exit lens, or exit lens subgroup. By arranging a converging lens between the converging lenses of the lens group, the deflection of the measuring beam by the measuring scanner can be reduced. This allows the imaging position to be determined at a particularly small distance from the scan plane.
[0031] Preferably, the lens group comprises exclusively an entrance lens or an entrance lens group, an exit lens or an exit lens group, and an intermediate lens or intermediate lens group. This allows the flexibility of the measuring arrangement to be maintained while maintaining compact dimensions.
[0032] A further preferred embodiment of the measuring arrangement is one in which the deflection unit includes a processing scanner for deflecting the processing beam. A processing scanner serves to deflect the TRUMPF Laser SE 11.11.2025
[0033] 2024P00160WO - 6 -
[0034] The processing laser beam is focused by means of one or more mirrors in a first and / or second deflection plane. By adjusting the mirrors, the aperture effect of the mirror is altered, thereby cutting off the path of the measuring beam. The lens group can thus be configured to define the imaging position at or in the direction of beam propagation after a first deflection plane of the processing scanner. This allows the scan field to be formed unaffected by any potential aperture effect of the first deflection plane.
[0035] A preferred embodiment of the measuring arrangement is one in which the lens group for defining the imaging position is configured on or in the beam propagation direction after a second deflection plane of the processing scanner. Typically, the second deflection plane is arranged in the beam propagation direction after the first deflection plane. Defining the imaging position thus enables the scanning field to be formed without interference from any potential aperture effect of the second deflection plane.
[0036] A preferred embodiment includes a measuring beam source in the measuring arrangement. The measuring beam source is typically arranged upstream of the measuring arrangement in the direction of beam propagation.
[0037] A particularly preferred embodiment of the measuring arrangement is one in which the measuring beam source is designed as an optical coherence tomograph. The inventors recognized that an optical coherence tomograph, in conjunction with the formation of a scan field by coupling the measuring beam into a deflection unit, is especially suitable.
[0038] A further preferred embodiment of the measuring arrangement comprises an entrance lens subgroup, an exit lens subgroup, and / or an intermediate lens subgroup. TRUMPF Laser SE 11.11.2025
[0039] 2024P00160WO - 7 -
[0040] A preferred further development of the measuring setup provides that at least one lens subgroup is designed as an achromat. In other words, at least the entrance lens subgroup, the exit lens subgroup, or the intermediate lens subgroup is designed as an achromat. This makes the measuring setup particularly suitable for a broad spectrum or multiple wavelengths.
[0041] The underlying problem is further solved by a laser processing device.
[0042] The laser processing device typically includes a processing head for aligning a processing laser beam onto a working plane.
[0043] The laser processing device also includes a measuring arrangement described above and below. The measuring arrangement is positioned on the laser processing device for coupling the measuring beam into the processing head.
[0044] Further features and advantages of the invention will become apparent from the description, the claims, and the drawings. According to the invention, the features mentioned above and those further elaborated can each be used individually or in any suitable combination. The embodiments shown and described are not to be understood as an exhaustive list, but rather serve as examples for illustrating the invention.
[0045] Detailed description of the invention and drawing
[0046] Fig. 1 schematically shows a laser processing device with a deflection unit designed as a processing head and a measuring optic in a measuring arrangement; TRUMPF Laser SE 11.11.2025
[0047] 2024P00160WQ - 8 -
[0048] Fig. 2 schematically shows an exemplary measuring arrangement with an imaging position of a scan plane in front of the deflection unit, determined by a lens group of the measuring optics;
[0049] Fig. 3 schematically shows a first embodiment of a measuring arrangement according to the invention with an imaging position of a scan plane determined by the lens group after an input aperture of the deflection unit;
[0050] Fig. 4 schematically shows a second embodiment of a measuring arrangement according to the invention with the imaging position of the scan plane determined by the lens group after a first deflection plane of a processing scanner of the deflection unit; and
[0051] Fig. 5 schematically shows a third embodiment of a measuring arrangement according to the invention with an imaging position of the scan plane determined by the lens group after a second deflection plane of the processing scanner.
[0052] Figure 1 shows a laser processing device 10 in a schematic representation.
[0053] The laser processing device 10 is typically designed for processing a workpiece (not shown) on a working plane 12. For this purpose, a processing laser beam 14 is directed onto the working plane 12 via a deflection unit 16. The deflection unit 16 is, as shown, formed in a processing head 18 of the laser processing device 10.
[0054] The deflection unit 16 has deflection means for aligning the processing laser beam 14, which are determined by the design of the laser beam device 10 or the processing head 18 and / or by the processing method of the workpiece to be processed. For example, the deflection unit 16 can have a TRUMPF Laser SE 11.11.2025
[0055] 2024P00160WG - 9 - have several deflecting mirrors 20 for deflecting the processing laser beam 14. Furthermore, for example, the deflection unit 16 can have a processing scanner 22 (see Figures 2 to 5) which enables the processing laser beam 14 to be deflected, in particular oscillatingly, around a central position of the processing laser beam 14.
[0056] The processing head 18 of the laser processing device 10 typically includes, as shown, a lens 24 for focusing the processing laser beam 14 onto the working plane 12.
[0057] The processing laser beam 14 can be coupled into a collimation unit 28 via an optical fiber 26 and subsequently into the deflection unit 16 via a beam splitter 30. The beam splitter 30 is preferably configured for wavelength-dependent deflection or transmission of radiation. According to the illustrated embodiment, the beam splitter 30 is configured for deflecting the processing laser beam 14. The optical fiber 26 is typically connected to a laser beam source 31.
[0058] The laser processing device 10 comprises, as shown, a measuring beam source 32 and a measuring optic 34. Preferably, the measuring beam source 32 is an optical coherence tomograph. The measuring beam source 32 is configured to generate a measuring beam 36, preferably an OCT measuring beam.
[0059] As shown, the measuring beam 36 is coupled into the deflection unit 16 via the measuring optics 34. According to the illustrated embodiment, the measuring beam 36 exiting the measuring optics 34 is coupled into the deflection unit 16 via a beam deflector 38 and the beam splitter 30. The beam splitter 30 is designed to transmit the measuring beam 36.
[0060] The deflection unit 16 typically has an inlet aperture 40. The inlet aperture 40 limits the beam path 42 into the deflection unit 16, thereby cutting off stray light (not shown) and sharply defining a processing focus. TRUMPF Laser SE 11.11.2025
[0061] 2024P00160WG - 10 - can be. Typically, the inlet aperture 40 is matched to a processing purpose of the laser processing device 10, the processing laser beam 14, and the optical components following the inlet aperture 40.
[0062] Accordingly, the inlet aperture 40 can only be changed with significant effects on the other components of the laser processing device 10. For example, increasing the inlet aperture 40 requires adjusting the downstream optical components, in particular a focusing lens 44, the deflecting mirror 20, and the processing scanner 22.
[0063] The measuring beam source 32 and the measuring optics 34 preferably form a single unit for easy installation on the laser processing device 10, comprising the processing head 18, the collimation unit 28, and the laser beam source 31. Depending on the design, the laser processing device 10 can, as shown, include the optical fiber 26 and the beam splitter 30. Depending on the design, the measuring beam source 32 and the measuring optics 34 can be connected to the deflection unit 16 via further components, in this case the beam deflector 38.
[0064] The measuring optics 34 and the deflection unit 16 form a measuring arrangement 46. The measuring arrangement 46 can include the measuring beam source 32 and / or the beam deflector 38. According to the invention, the measuring arrangement 46 is matched to the deflection unit 16.
[0065] Figure 2 shows a conventional arrangement 48 with a deflection unit 16 and a measuring scanner 50 for better explanation of known devices.
[0066] The measuring scanner 50 is designed to align the measuring beam 36 along a beam propagation direction 52 onto the working plane 12. Starting from the measuring scanner 50, the measuring beam 36 passes through a telescope 54 in the conventional arrangement. This telescope is configured as a so-called Galilean telescope with a diverging lens 56 followed by a converging lens 58. TRUMPF Laser SE 11.11.2025
[0067] 2024P00160WQ - 11 -
[0068] As shown, an undeflected measuring beam 36a, or a measuring beam 36 in a state undeflected by the measuring scanner 50, parallel or coaxial to the steel propagation direction 52, is fully coupled into the deflection device 16 via the input aperture 40 of the deflection device 16. Measuring beams 36 coupled in this way are not clipped in their beam path 60 and enable high-quality measurement of the working plane 12.
[0069] As shown, a deflected measuring beam 36b can be generated using the measuring scanner 50. The deflected measuring beam 36b has a measuring beam path 62 formed by the diverging lens 56 and the converging lens 58, which is oblique to the path of the undeflected measuring beam 36a. For this purpose, the measuring beam 36 can be deflected by a scan angle 68 relative to the undeflected measuring beam 36a via a first scan plane 64 and / or via a second scan plane 66 of the measuring scanner 50.
[0070] The depicted deflection of the measuring beam 36b defines an imaging position 70 of the first scan plane 64. The imaging position 70 of the first scan plane 64 can be understood as the intersection point between the undeflected measuring beam 36a and the deflected measuring beam 36b. Thus, the imaging position 70 is the region along the beam propagation direction 52 in which the deflected measuring beam 36b is superimposed on the undeflected measuring beam 36a. The imaging position 70 has a bridging distance 72 to the first scan plane 64. The bridging distance 72 is less than the distance between the scan planes 64, 66 and the input aperture 40. In other words, the imaging position 70 is defined in front of the input aperture 40 of the deflection device 16.
[0071] As shown, the beam path 62 of the deflected measuring beam 36b is cut off by the input aperture 40, and only a reduced beam path 74 of the deflected measuring beam 36b is coupled into the deflection unit 16. Due to the reduced beam path 74, acquisition of the working plane 12 is only possible to a limited extent or not at all. If the measuring beam 36b is further... TRUMPF Laser SE 11.11.2025
[0072] 2024P00160WQ - 12 - deflected results in a complete cut-off of the beam path 62 and a measurement cannot be performed.
[0073] In practice, therefore, the deflection of the measuring beam 36 is only carried out until it reaches the aperture edge 76 of the entrance aperture 40. This limits the scan field (not shown) that can be formed by the measuring scanner 50 on the working plane 12. Furthermore, the scan field must be generated by smaller scan angles 68, which increases the measurement inaccuracies.
[0074] The aforementioned disadvantages are exacerbated if the deflection device includes a processing scanner 22. The processing scanner 22 typically comprises at least a first deflection plane 78 and a second deflection plane 80 for deflecting the processing laser beam 14 (see Figure 1). The deflection planes 78 and 80 typically form an aperture edge 82, which can also cause the beam path 62, or the reduced beam path 74, to be cut off.
[0075] The statements made regarding the deflection of the measuring beam 36 in the first scan plane 64 can be applied analogously to a deflection of the measuring beam 36 in the second scan plane 66.
[0076] Figure 3 schematically shows a first embodiment of the measuring arrangement 46.
[0077] The measuring arrangement includes the deflection unit 16 for aligning the processing beam 14 (see Figure 1) onto a working plane 12 (see Figure 1). The deflection unit 16 is preferably part of a processing head 18 of the laser processing device 10 (see Figure 1). In other words, the deflection unit 16 can be arranged on the processing head 18 or formed within the processing head 18. TRUMPF Laser SE 11.11.2025
[0078] 2024P00160WQ - 13 -
[0079] The measuring arrangement 46 also includes the measuring optics 34. The measuring optics 34 is arranged upstream of the deflection unit 16 in the beam propagation direction 52 and is designed to couple the measuring beam 36, 36a, 36b into the deflection unit 16.
[0080] According to the invention, the measuring optics 34 comprises the measuring scanner 50 for deflecting the measuring beam 36 in at least one of the scan planes 64, 66. Preferably, the measuring scanner 50 is configured to deflect the measuring beam 36 in two scan planes 64, 66. The deflection in the scan planes 64, 66 typically occurs in different scan directions transverse to the beam propagation direction 52. For example, a first scan direction can be in the image plane, and a further scan direction can be directed perpendicular to the first scan direction into the image plane.
[0081] As shown, the measuring optics 34 has a lens group 86 located downstream of the measuring scanner 50 in the beam propagation direction 52. The lens group 86 comprises an entrance lens 88 with positive refractive power for refracting the measuring beam 36, 36a, 36b entering the lens group 86 and an exit lens 90 with positive refractive power for refracting the measuring beam 36, 36a, 36b exiting the lens group 86.
[0082] Alternatively, the measuring optics 34 may include an entrance lens group (not shown) and / or an exit lens group (not shown).
[0083] According to the invention, the lens group 86 is located at or after an input aperture 40 of the deflection unit 16 for determining the imaging position 70 of the first scan plane 64 in the beam propagation direction 52. In other words, a bridging distance 72 is set by the lens group 86, which is equal to or greater than a distance between the first scan plane 64 and the input aperture 40 of the deflection device 16.
[0084] As shown, a beam path 62 of the deflected measuring beam 36b can be completely coupled into the input aperture 40. [A clipping of the TRUMPF Laser SE 11.11.2025]
[0085] 2024P00160WQ - 14 -
[0086] The beam path 62 can be effectively prevented. The measuring optics 34 can use the scan angle 68 adjustable by the measuring scanner 50 to form the largest possible scan field (not shown) on the working plane 12. By using large scan angles 68, the measuring field, or the scan field of the measuring scanner 50, can be enlarged.
[0087] As shown, the deflection device 16 has a processing scanner 22 with a first deflection plane 78 and a second deflection plane 80. As shown, setting the imaging position 70 is sufficient to prevent the deflected measuring beam 36b from being cut off from the measuring beam path 62 by the apertures 82 of the deflection planes 78, 80. This can occur, in particular, if the processing scanner 22, or the first and / or the second deflection plane 78, 80, remains in a neutral state for processing. In this case, a fixed position of the apertures 82 can be assumed.
[0088] The statements made regarding the deflection of the measuring beam 36 in the first scan plane 64 can be applied analogously to a deflection of the measuring beam 36 in the second scan plane 66.
[0089] Figure 4 schematically shows a second embodiment of the measuring arrangement 46.
[0090] The illustrated measuring arrangement 46 includes a processing scanner 22 in which, as indicated by the deflection direction 92, the processing laser beam 14 and the measuring beam 36 are deflected. If the deflection plane 78 is generated by a mirror, the angle of incidence of the processing laser beam 14 and the measuring beam 36 changes, and consequently, the area through which the processing laser beam 14 and the measuring beam 36 pass at the aperture 82 also changes. This changes the effective aperture acting on the measuring beam 36 depending on the angle of incidence. At larger angles of incidence, this typically leads to a clipping of the measuring beam 36. TRUMPF Laser SE 11.11.2025
[0091] 2024P00160WG - 15 -
[0092] For the sake of simplicity, the deflection of the measuring beam 36 in the beam path of Fig. 4 is represented by a lateral offset of the deflection plane 78.
[0093] The measuring beam 36 is deflected perpendicular to the beam propagation direction 52, which is represented by a corresponding deflection of the deflection plane 78. Such a deflection of the measuring beam 36 can occur when the processing scanner 22 is deflected to correct a processing position (not shown) of the processing laser beam 14 (see Figure 1). Furthermore, such a deflection can be provided for forming a line processing by the processing laser beam 14, with the deflection typically oscillating. In other words, in such a case, the deflection of the deflection plane 78 shown can be understood as a snapshot, whereby the deflection can lead to an arrangement between the measuring beam 36 and the aperture 82 that limits the beam path 62 of the deflected measuring beam 36b.
[0094] As shown, the lens group 86 of the measuring optics 34 can be configured to define the imaging position 70 in the beam propagation direction 52 at or shortly after the first deflection plane 78. In other words, the bridging distance 72 of the imaging position 70 is equal to or greater than the distance between the first scan plane 64 and the first deflection plane 78. This reliably prevents the deflected measuring beam 36b from being cut off from the measuring beam path 62, even when the processing scanner 22 is deflected.
[0095] The statements made regarding the deflection of the measuring beam 36 in the first scan plane 64 can be applied analogously to a deflection of the measuring beam 36 in the second scan plane 66.
[0096] Figure 5 schematically shows a third embodiment of the measuring arrangement 46. TRUMPF Laser SE 11.11.2025
[0097] 2024P00160WQ - 16 -
[0098] As shown, the measuring arrangement 46 has a measuring optic 34 with a modified lens group 86. The lens group 86 includes an intermediate lens 94 with negative refractive power, which is arranged in the beam propagation direction 52 between the entrance lens 88 and the exit lens 90. As shown, the intermediate lens 94 can increase the scan angle 68, thereby enabling the imaging position 70 to be set with a particularly large bridging distance 72.
[0099] As shown, the lens group 86 is designed to determine the imaging position 70 on or in the beam propagation direction 52 after the second deflection plane 80 of the processing scanner 22.
[0100] This ensures that the cutting off of the measuring beam path 62 of the deflected measuring beam 36b is reliably prevented even when the measuring beam 36 is deflected at the second deflection plane 80.
[0101] The statements made regarding the deflection of the measuring beam 36 in the first scan plane 64 can be applied analogously to a deflection of the measuring beam 36 in the second scan plane 66.
[0102] Preferably, the measuring optics 34 are adapted to the design of the processing scanner 22, or the aperture edges 82. The aperture edges 82 can be designed differently, which can cause the processing laser beam 14 and the measuring beam 36 to deflect at different angles in different directions. This can lead to the measuring beam 36 being cut off earlier in the first deflection plane 78 or the second deflection plane 80. The measuring optics 50 are typically adapted to the aperture edges 82. TRUMPF Laser SE 11 / 11 / 2025
[0103] 2024P00160WO - 17 -
[0104] Reference symbol
[0105] 10 Laser processing device
[0106] 12 Working level
[0107] 14 processing laser beam
[0108] 16 Deflection unit
[0109] 18 processing head
[0110] 20 deflecting mirrors
[0111] 22 processing scanners
[0112] 24 lens
[0113] 26 optical fibers
[0114] 28 collimation units
[0115] 30 beam splitters
[0116] 31 Laser beam source
[0117] 32 Measuring beam source
[0118] 34 Measuring optics
[0119] 36 Measuring beam
[0120] 36a Undeflected measuring beam
[0121] 36b deflected measuring beam
[0122] 38 beam deflectors
[0123] 40 Entrance aperture
[0124] 42 Beam path
[0125] 44 Focusing lens
[0126] 46 Measuring setup
[0127] 48 conventional arrangement
[0128] 50 measuring scanners
[0129] 52 Beam propagation direction
[0130] 54 Telescope
[0131] 56 Diffusing lens
[0132] 58 Converging lens TRUMPF Laser SE 11.11.2025
[0133] 2024P00160WQ - 18 -
[0134] 60 Beam path
[0135] 62 Measuring beam path
[0136] 64 first scan level
[0137] 66 second scan level
[0138] 68 scan angles
[0139] 70 Image position
[0140] 72 bridging distance
[0141] 74 reduced beam path
[0142] 76 Aperture edge
[0143] 78 first level of distraction
[0144] 80 second level of distraction
[0145] 82 aperture edge
[0146] 86 lens group
[0147] 88 Entrance lens
[0148] 90 Exit lens
[0149] 92 Direction of deflection
[0150] 94 Intermediate lens
Claims
TRUMPF Laser SE 11.11.2025 2024P00160WO - 19 - Patent claims 1. Measuring arrangement (46) comprising a deflection unit (16) for aligning a processing laser beam (14) onto a surface to be processed, in particular a processing head (18) of a laser processing device (10), and a measuring optic (34) positioned upstream of the deflection unit (16) in a beam propagation direction (52) for coupling a measuring beam (36, 36a, 36b) into the deflection unit (16); wherein the measuring optic (34) has a measuring scanner (50) for deflecting the measuring beam (36, 36a, 36b) in a scan plane (64, 66) in at least one scan direction transverse to the beam propagation direction (52) of the measuring beam (36, 36a, 36b);wherein the measuring optics (34) comprises a lens group (86) downstream of the measuring scanner (50) in the beam propagation direction (52) for defining an imaging position (70) of the scan plane (64, 66) in the beam propagation direction (52) at or after an inlet aperture (40) of the deflection unit (16), wherein the lens group (86) comprises an inlet lens (88) or an inlet lens subgroup with positive refractive power for refracting the measuring beam (36) entering the lens group (86) and an outlet lens (90) or an outlet lens subgroup with positive refractive power for refracting the measuring beam (36, 36a, 36b) exiting the lens group.
2. Measuring arrangement (46) according to claim 1, wherein the lens group (86) comprises an intermediate lens (94) or an intermediate lens subgroup with negative refractive power, wherein the intermediate lens (94) or the intermediate lens subgroup is arranged in the beam propagation direction (52) between the entrance lens (88) and the exit lens (90). TRUMPF Laser SE 11.11.2025 2024P00160WO - 20 - 3. Measuring arrangement (46) according to claim 1 or 2, wherein the lens group (86) has an intermediate lens (94) or an intermediate lens subgroup with positive refractive power, wherein the intermediate lens (94) or the intermediate lens subgroup is arranged in the beam propagation direction (52) between the entrance lens (88) and the exit lens (90).
4. Measuring arrangement (46) according to one of the preceding claims, wherein the deflection unit (16) has a processing scanner (22) for deflecting the processing laser beam (14), wherein the lens group (86) is designed to determine the imaging position (70) on or in the beam propagation direction (52) according to a first deflection plane (78) of the processing scanner (22).
5. Measuring arrangement (46) according to one of the preceding claims, wherein the lens group (86) for determining the imaging position (70) on or in the beam propagation direction (52) is configured according to a second deflection plane (80) of the processing scanner (22), wherein the second deflection plane (80) is arranged in the beam propagation direction (52) according to the first deflection plane (78).
6. Measuring arrangement (46) according to one of the preceding claims, comprising a measuring beam source (32) positioned upstream of the measuring optics (34) in the direction of beam propagation (52).
7. Measuring arrangement (46) according to claim 6, wherein the measuring beam source (32) is designed as an optical coherence tomograph.
8. Measuring arrangement (46) according to one of the preceding claims, wherein the measuring optics (34) comprises an entrance lens subgroup, an exit lens subgroup and / or an intermediate lens subgroup. TRUMPF Laser SE 11.11.2025 2024P00160WO - 21 - 9. Measuring arrangement (46) according to claim 8, wherein at least one lens subgroup is designed as an achromat.
10. Laser processing device (10) with a processing head (18) for aligning a processing laser beam (14) onto a working plane (12) and a measuring arrangement (46) according to one of the preceding claims, wherein the measuring arrangement (46) for coupling the measuring beam (36, 36a, 36b) into the processing head (18) is arranged on the laser processing device (10).