Force analysis system and method for probe

Abstract

A force analysis system and method for a probe. The system comprises a force measurement component (1) configured to simultaneously perform force testing on a probe tip and a probe tail of a probe assembly (6); a clamping component (2), which is configured to position, clamp and fix the probe assembly (6); an observation component (3), which is configured to realize alignment observation on a probe tip side and a probe tail side of the probe assembly (6); and a control module (5), which is configured to control, by means of inputting a control instruction, the movement of the force measurement component (1) relative to the probe assembly (6), and realize the force testing and analysis on the probe tip and the probe tail, wherein the force measurement component (1) comprises at least two force measurement mechanisms symmetrically arranged on the probe tip side and the probe tail side, and is configured to simultaneously realize the force testing on the probe tip side or the probe tail side of the probe assembly (6). The system can simultaneously perform force measurement on the probe tip and the probe tail, so as to comprehensively analyze the force transmission performance of the probe under actual operating conditions.

Description

A force analysis system and method for probes Technical Field

[0001] This invention relates to the field of semiconductor testing technology, and more specifically, to a force analysis system and method for probes. Background Technology

[0002] In the semiconductor wafer testing phase, performance testing of unpackaged chips on the wafer is required. Probe cards are used during testing, with probes, the core of the card, distributed in ceramic vias. During wafer testing, the probe tips directly contact the pads or bumps on the wafer, while the probe tails contact the MLO / MLC (mold loop / mold loop) end, thus establishing an electrical connection between the wafer and the testing machine. The testing machine then measures the performance of the wafer chips and sorts and classifies the wafers, discarding chips that do not meet design requirements.

[0003] To ensure yield and reliability in wafer testing, sufficient and effective contact between the probe tip and tail is crucial. Current probe force measurement technologies in semiconductor wafer testing have limitations; they can only measure force at one end of the probe tip, not simultaneously at both the tip and tail. This limitation makes it difficult to comprehensively analyze the force transmission performance of the probe under actual operating conditions, thus hindering accurate assessment of the contact effect between the probe tip and tail and the overall rationality of the probe design. Furthermore, the lack of comprehensive analysis of the frictional forces experienced by the probe within ceramic vias also limits the accurate determination of contact performance and force transmission effectiveness.

[0004] Furthermore, existing testing equipment is expensive, resulting in high testing costs, which further increases economic pressure in large-scale production. The inadequacy of equipment functionality and high cost make it difficult to meet the demands for high-precision mechanical analysis and reliable testing, thus impacting semiconductor testing yield and overall economic efficiency. Summary of the Invention

[0005] The purpose of this invention is to provide a force analysis system and method for probes, which solves the problem that existing probe cards can only perform single-end force testing.

[0006] To achieve the above objectives, the present invention provides a force analysis system for a probe, comprising a force measuring component, a clamping component, an observation component, a control module, and a base plate:

[0007] The force measuring component is mounted on the base plate and performs force testing on the probe tip and tail of the probe assembly simultaneously.

[0008] The clamping component is disposed on the base plate and is used to position, clamp and fix the probe assembly;

[0009] The observation component is mounted on the base plate to enable alignment observation of the probe tip side and the probe tail side of the probe assembly.

[0010] The control module is mounted on the base plate. By inputting control commands, it controls the movement of the force measuring component relative to the probe assembly and realizes the force testing and analysis of the probe tip and tail.

[0011] The force measuring component includes at least two force measuring mechanisms, symmetrically arranged on the tip side and the tail side of the probe, for simultaneously measuring the force on the tip side or the tail side of the probe assembly.

[0012] In some embodiments, the force measuring mechanism includes a test probe motion module, a three-axis force sensor element, a test probe clamp, a test probe, and a displacement sensor element.

[0013] The test probe motion module is located on the tip or tail side of the probe and is mounted on the base plate to enable multi-directional position adjustment of the test probe.

[0014] The three-axis force sensor element is installed on the test needle motion module to measure the force on the tip or tail of the probe.

[0015] The test needle clamp is mounted on the three-axis force sensor element and is used to hold the test needle so that the test needle can achieve stable contact with the probe tip or tail.

[0016] The test needle is mounted on a test needle holder to achieve direct contact with the tip or tail of the probe.

[0017] The displacement sensor element is mounted on the test needle motion module and is used to measure minute displacement changes of the probe tip or tail.

[0018] In some embodiments, the test probe motion module includes a Y motion module and an XYZ precision slide:

[0019] The Y-motion module is mounted on the base plate and located on the tip or tail side of the probe, and is used to coarsely adjust the Y-direction position of the test probe.

[0020] The XYZ precision slide, mounted on the Y motion module, provides mounting positions for the three motion axis force sensor elements and displacement sensor elements, and is used to fine-tune the position of the test probe in the X, Y, and Z directions.

[0021] In some embodiments, the clamping component includes a reference frame, a movable plate, and a knob:

[0022] The reference frame, mounted on the base plate, is used to position the probe assembly;

[0023] The movable plate is mounted on the reference frame via a knob to clamp and fix the probe assembly.

[0024] The knob, mounted on the reference frame, is used to drive the clamping or loosening of the movable plate.

[0025] In some embodiments, the observation component includes at least two observation mechanisms mounted on a base plate and symmetrically arranged on the tip and tail sides of the probe assembly for alignment observation of the probe tip or tail side of the probe assembly.

[0026] In some embodiments, the observation mechanism includes at least a gimbal and a microscope:

[0027] The universal support is located on the tip or tail side of the probe and is mounted on the base plate to enable multi-directional adjustment of the microscope.

[0028] The microscope is mounted on a universal support and is used to observe the position of the probe tip side or the probe tail side on the probe assembly.

[0029] In some embodiments, the universal bracket includes a fixed shaft, a first rotating shaft, a second rotating shaft, a bushing, and a rotating shaft base.

[0030] The fixed shaft is fixed to the base plate as an integral support shaft;

[0031] The bushing is connected to the fixed shaft and is used for rotational and translational adjustment around the fixed shaft;

[0032] The first rotating shaft is installed inside the bushing and is used for rotational and translational adjustment around the bushing;

[0033] The second rotating shaft is connected to the first rotating shaft via a rotating shaft base and is used for rotation and translation adjustment around the first rotating shaft.

[0034] In some embodiments, the force analysis system for the probe further includes an illumination component:

[0035] The lighting component is mounted on the base plate and provides illumination to the probe tip and tail sides of the probe assembly.

[0036] To achieve the above objectives, the present invention provides a force analysis method for a probe, implemented using the force analysis system for a probe as described above. The force measuring mechanism of the force analysis system includes at least a test probe. The force analysis method for a probe includes the following steps:

[0037] Place the probe assembly on the clamping component for positioning, clamping, and fixation;

[0038] The control module controls the force measuring mechanisms on both sides, so that the test probes on both sides approach the probe tip or the probe tail in the probe assembly, respectively.

[0039] By observing the position of the needle tip and needle tail in real time through the observation component, the control module adjusts the X and Z direction motion axes of the force measuring mechanism so that the test needles on both sides are on the same motion axis as the probe needle tip and needle tail respectively.

[0040] By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the Y-axis of the force measuring mechanism to make full contact between the test needle and the probe needle tail.

[0041] By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the Y-axis of the force measuring mechanism so that the test needle is fully compressed to the specified range after making full contact with the probe tip.

[0042] Measure and record the force signals fed back from the probe tip and tail sides to complete the analysis of the force situation of the probe.

[0043] In some embodiments, the force analysis system for the probe further includes an illumination component, and the force analysis method further includes the following steps:

[0044] Turn on the light source in the lighting component to facilitate positional observation in conjunction with the observation component.

[0045] The present invention provides a force analysis system and method for probes, which can simultaneously measure the force at the probe tip and tail to comprehensively analyze the force transmission performance of the probe under actual working conditions, quickly complete the performance evaluation of the probe assembly, and effectively ensure sufficient contact between the probe and the test point, thereby improving the reliability and efficiency of the probe card testing process. Attached Figure Description

[0046] The above and other features, properties and advantages of the present invention will become more apparent from the following description taken in conjunction with the accompanying drawings and embodiments, in which the same reference numerals always denote the same features, wherein:

[0047] Figure 1 shows a motion axis view of a force analysis system for a probe according to an embodiment of the present invention;

[0048] Figure 2 shows a front view of a force analysis system for a probe according to an embodiment of the present invention;

[0049] Figure 3 shows a top view of a force analysis system for a probe according to an embodiment of the present invention;

[0050] Figure 4 shows a schematic diagram of the force measuring mechanism according to an embodiment of the present invention;

[0051] Figure 5 shows a partial force measurement magnification of a force analysis system for a probe according to an embodiment of the present invention;

[0052] Figure 6 illustrates a structural schematic diagram of a clamping component according to an embodiment of the present invention;

[0053] Figure 7 shows a schematic diagram of the structure of an observation mechanism according to an embodiment of the present invention;

[0054] Figure 8 illustrates the steps of a force analysis method for a probe according to an embodiment of the present invention.

[0055] The meanings of the labels in the figures are as follows: 1. Force measuring component; 11. Tip-side force measuring mechanism; 12. Tail-side force measuring mechanism; 111. Y-motion module; 112. XYZ precision slide; 113. Three-axis force sensor element; 114. Test needle clamp; 115. Test needle; 116. Displacement sensor element; 2. Clamping component; 21. Reference frame; 22. Movable plate; 23. Knob; 3. Observation component; 31. Tip-side observation mechanism; 32. Tail-side observation mechanism; 311. Universal bracket; 3111. Fixed shaft; 3112. First rotating shaft; 3113. Second rotating shaft; 3114. Bushing; 3115. Rotating shaft base; 312. Microscope; 4. Illumination component; 5. Control module; 6. Probe assembly; 61. Probe; 7. Base plate. Detailed Implementation

[0056] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the invention.

[0057] To ensure sufficient and effective contact between the probe tip and the probe tail, a certain pressure (i.e., needle pressure) needs to be applied to the probe after it is implanted into the ceramic hole (probe assembly). The needle pressure usually needs to reach the probe's elastic force of about 5g, and the compression amount is generally less than or equal to 50μm.

[0058] The present invention proposes a force analysis system for probes, which can simultaneously apply force to and measure the probe tip and tail. By analyzing the force on the probe tip and tail, the system can analyze the magnitude of the frictional force on the probe in the central ceramic hole, which helps to evaluate the force transmission effect and indirectly determine the rationality of the probe and the design and contact performance of the probe tip and tail.

[0059] Figures 1 to 3 illustrate the motion axis view, front view, and top view of a force analysis system for a probe according to an embodiment of the present invention. As shown in Figures 1 to 3, the force analysis system for a probe proposed in this invention includes at least a force measuring component 1, a clamping component 2, an observation component 3, a control module 5, and a base plate 7.

[0060] The force measuring component 1 is mounted on the base plate 7 and performs force testing on the probe tip and tail of the probe assembly 6 simultaneously.

[0061] The clamping component 2 is disposed on the base plate 7 and is used to position, clamp and fix the probe assembly 6;

[0062] The observation component 3 is mounted on the base plate 7 to enable alignment observation of the probe tip side and the probe tail side of the probe assembly 6.

[0063] The control module 5 is mounted on the base plate 7. By inputting control commands, it controls the movement of the force measuring component 1 relative to the probe assembly 6, and realizes the force testing and analysis of the probe tip and tail.

[0064] The base plate 7 serves as an installation platform for the aforementioned components, providing overall structural support and ensuring the stable operation of each component.

[0065] The force measuring component 1 includes at least two force measuring mechanisms, symmetrically arranged on the tip side and the tail side of the probe, to simultaneously test the force on the tip side or the tail side of the probe assembly 6, ensuring test accuracy.

[0066] Furthermore, the force analysis system for the probe also includes an illumination component 4:

[0067] The lighting component 4 is disposed on the base plate 7 and provides illumination to the probe tip side and the probe tail side of the probe assembly 6.

[0068] The force analysis system for probes proposed in this invention, through the synergistic effect of the above-mentioned components, can simultaneously perform accurate force testing and analysis on the probe tip and tail of the probe assembly, providing comprehensive technical support for the performance evaluation of the probe.

[0069] As shown in Figure 1, the force measuring component 1 includes a needle tip side force measuring mechanism 11 and a needle tail side force measuring mechanism 12, which are arranged in a mirror-symmetrical relationship on the needle tip side and the needle tail side.

[0070] The force measuring mechanism 11 on the tip side is used to test the force on the tip side of the probe assembly 6.

[0071] The force measuring mechanism 12 on the tail side of the probe is used to test the force on the tail side of the probe on the probe assembly 6.

[0072] The force analysis system for probes proposed in this invention can simultaneously test the force at both ends of the probe through force measuring mechanisms on the tip and tail sides, ensuring the comprehensiveness and accuracy of force transmission.

[0073] Figure 4 shows a schematic diagram of a force measuring mechanism according to an embodiment of the present invention. As shown in Figure 4, the force measuring mechanism includes a test needle motion module, a three-axis force sensor element 113, a test needle clamp 114, a test needle 115, and a displacement sensor element 116.

[0074] The test probe motion module is located on the tip or tail side of the probe and is mounted on the base plate to enable multi-directional position adjustment of the test probe.

[0075] The three-axis force sensor element 113 is set on the test needle motion module and is used to measure the force on the tip or tail of the probe.

[0076] The test needle clamp 114 is disposed on the three-axis force sensor element 113 and is used to clamp the test needle 115 so that the test needle 115 can achieve stable contact with the probe tip or tail.

[0077] The test needle 115 is disposed on the test needle holder 114, and is used to achieve direct contact with the tip or tail of the probe and to further compress the probe.

[0078] The displacement sensor element 116 is mounted on the test needle motion module and is used to measure minute displacement changes of the probe tip or tail.

[0079] The test probe motion module primarily functions to achieve multi-directional position adjustment of the test probe. Equipped with a motion axis, it enables precise positioning and dynamic adjustment in the X, Y, and Z directions, ensuring that the test probe 115 is accurately aligned with the tip or tail of the probe.

[0080] More specifically, in this embodiment, the test probe motion module includes a Y motion module 111 and an XYZ precision slide 112:

[0081] The Y-motion module 111 is mounted on the base plate 7 and located on the tip or tail side of the probe, and is used to coarsely adjust the Y-direction position of the test needle 115 on the tip or tail side of the probe.

[0082] The XYZ precision slide 112 is mounted on the Y motion module 111 and provides mounting positions for the three-axis force sensor element 113 and displacement sensor element 116, which are used to fine-tune the X, Y and Z positions of the test probe 115.

[0083] Among them, the Y-motion module 111 provides a large displacement range, ensuring that the test probe can be roughly aligned with the tip or tail area of ​​the probe, laying the foundation for subsequent fine adjustment.

[0084] The Y-motion module 111 has an adjustment range of 100mm, which can provide a large range of coarse adjustment displacement to adapt to the layout requirements of different probe components.

[0085] The XYZ precision slide 112 enables fine adjustment of the test probe in the X, Y, and Z directions based on coarse adjustment, ensuring that the test probe can be accurately aligned with the force point of the probe tip or tail at the same time.

[0086] The XYZ precision slide 112 can be adjusted in three directions by the control module 5 through input commands or manual rotation of the micro-side head knob, which can precisely control the contact state between the test stylus and the probe.

[0087] The XYZ adjustment range is ±12.5mm. Through microscopic observation, precise adjustment in three directions can be achieved to ensure ideal alignment of the test needle and probe and the effect of force transmission.

[0088] Through its modular design, the test probe motion module offers excellent flexibility and adaptability, making it suitable for force analysis scenarios involving different types of probe components.

[0089] In this embodiment, the three-axis force sensor element 113, as the core force testing component, can measure the magnitude and direction of the force on the probe in the X, Y, and Z directions, thereby performing high-precision analysis of the force on the probe tip and tail.

[0090] The three-axis force sensor element 113 can use a standard force measuring element to realize force measurement in three axial directions. Its model can be K3D40, and the maximum measurement load can reach 30g.

[0091] In this embodiment, the test needle clamp 114 can stably hold the test needle 115, ensuring that the test needle 115 can make precise contact with the probe tip or tail and remain stable.

[0092] Figure 5 shows a partial force measurement magnification of a force analysis system for a probe according to an embodiment of the present invention. As shown in Figures 4 and 5, the test needle 115 transmits force information by contacting or compressing the tip or tail of the probe 61, thereby realizing force analysis of the probe assembly 6.

[0093] In this embodiment, the displacement sensor element 116 is a high-precision non-contact displacement sensor element:

[0094] For the tip side, the displacement sensor element 116 monitors the amount of probe compression to ensure that the compression of the probe tip is within the design range (e.g., ≤50μm).

[0095] For the probe tail side, the displacement sensor element 116 monitors the minute displacement behavior of the probe to ensure the positional accuracy and force stability of the probe tail during the test.

[0096] The high-precision non-contact displacement sensor element adopts the Keyence standard precision displacement sensor, which is mainly used to measure the compressive displacement of the probe. Its stroke range is 1 mm and its accuracy is 0.1 micrometer. The sensor maintains a non-contact state with the probe assembly 6 during the measurement process, ensuring that the force measuring component 1 is not affected by external interference during the force measurement process, thereby achieving more accurate and stable test results.

[0097] Furthermore, the high-precision non-contact displacement sensor element itself has electromagnetic interference resistance, ensuring that it can maintain accurate measurement performance even in various complex electromagnetic environments.

[0098] Figure 6 shows a schematic diagram of the structure of a clamping component according to an embodiment of the present invention. As shown in Figure 6, the clamping component 2 includes a reference frame 21, a movable plate 22, and a knob 23.

[0099] The reference frame 21 is mounted on the base plate and is used to position the probe assembly 6.

[0100] The movable plate 22 is mounted on the reference frame 21 via the knob 23, and is used to clamp and fix the probe assembly 6.

[0101] The knob 23 is mounted on the reference frame 21 and is used to drive the clamping or loosening of the movable plate 22.

[0102] More specifically, in this embodiment, the reference frame 21 is the fixed base of the clamping component 2, providing stable support for the probe assembly 6.

[0103] The movable plate 22 is a key component in the clamping component 2 used for direct contact and fixation of the probe assembly 6, and can be freely adjusted between clamping and loosening with the operation of the knob 23.

[0104] The knobs 23, numbering three, are connected to the movable plate 22 via threads or other adjustable connections to drive the clamping action of the movable plate 22.

[0105] The knob 23 provides an adjustable clamping force range to accommodate probe assemblies 6 of different sizes and shapes. The structure of the movable plate 22 protects the probe assembly 6 from damage when clamping force is applied, while maintaining uniform force distribution. This modular design gives the clamping component 2 good versatility and reliability, enabling it to adapt to various probe assemblies 6 and providing a stable operating platform for subsequent force analysis.

[0106] The observation component includes at least two observation mechanisms mounted on the base plate and symmetrically arranged on the tip and tail sides of the probe, for alignment observation of the probe tip or tail side on the probe assembly.

[0107] As shown in Figure 2, the observation component 3 consists of a needle tip side observation mechanism 31 and a needle tail side observation mechanism 32. The two mechanisms have the same components, namely a universal bracket 311 and a microscope 312.

[0108] The tip-side observation mechanism 31 is used to realize the alignment observation of the probe tip side on the probe assembly 6, and the tail-side observation mechanism 32 is used to realize the alignment observation of the probe tail side on the probe assembly 6.

[0109] Figure 7 shows a schematic diagram of the structure of an observation mechanism according to an embodiment of the present invention. As shown in Figure 7, the observation mechanism includes at least a universal support 311 and a microscope 312.

[0110] The universal support 311 is located on the tip or tail side of the probe and is mounted on the base plate 7 to enable multi-directional adjustment of the microscope 312.

[0111] The microscope 312 is mounted on the universal bracket 311 and is used to observe the position of the probe tip side or the probe tail side on the probe assembly 6.

[0112] More specifically, the universal support 311 allows the microscope 312 to rotate and translate 360°, achieving six degrees of freedom of adjustment to obtain the optimal observation angle.

[0113] As shown in Figure 7, the universal bracket 311 includes a fixed shaft 3111, a first rotating shaft 3112, a second rotating shaft 3113, a bushing 3114, and a rotating shaft base 3115.

[0114] The fixed shaft 3111 is fixed on the base plate 7 as an integral support shaft;

[0115] The bushing 3114 is connected to the fixed shaft 3111 and is used for rotational and translational adjustment around the fixed shaft 3111.

[0116] The first rotating shaft 3112 is installed inside the bushing 3114 and is used for rotational and translational adjustment around the bushing 3114;

[0117] The second rotating shaft 3113 is connected to the first rotating shaft 3112 via the rotating shaft base 3115, and is used for rotation and translation adjustment around the first rotating shaft 3112.

[0118] More specifically, the fixed shaft 3111 serves as the core support shaft of the bracket, providing the basic stability of the entire bracket.

[0119] The bushing 3114 rotates freely around the fixed shaft 3111, allowing the entire bracket to rotate 360° around the fixed shaft, and it can also be translated. The inner diameter of the bushing 3114 matches the outer diameter of the fixed shaft 3111 to ensure smooth rotation.

[0120] The first rotating shaft 3112 is installed in the bushing 3114 and can be rotated and translated 360° around the bushing, providing further freedom of rotation and position adjustment.

[0121] The second rotating shaft 3113 rotates around the first rotating shaft 3112, further providing 360° rotation and translation adjustment functions, thereby allowing for more complex movements and providing more flexible adjustments.

[0122] The 311 universal bracket's structural design enables flexible adjustment in multiple directions, including rotation and translation. By rationally connecting and coordinating the various components, it forms an efficient and stable support system that can adapt to the adjustment needs of various equipment or workpieces.

[0123] Based on the aforementioned force analysis system for probes, this invention proposes a force analysis method for probes. The force analysis method proposed in this invention, based on the aforementioned force analysis system, includes a force measuring component, a clamping component, an observation component, a control module, and a base plate. Combined with hardware such as a precision slide, force sensor, and displacement sensor, it enables precise force measurement and analysis of the probe tip and tail in the probe assembly.

[0124] Figure 8 illustrates the steps of a force analysis method for a probe according to an embodiment of the present invention. As shown in Figure 8, the force analysis method for a probe proposed in this invention includes:

[0125] Step S1: Place the probe assembly on the clamping component and position and clamp it in place.

[0126] Step S2: The control module controls the force measuring mechanisms on both sides, so that the test needles on both sides approach the probe tip or the probe tail in the probe assembly respectively.

[0127] Step S3: By observing the position of the needle tip and needle tail in real time through the observation component, the control module adjusts the X and Z direction motion axes of the force measuring mechanism so that the test needles on both sides are on the same motion axis as the probe needle tip and needle tail respectively.

[0128] Step S4: By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the Y-axis of the force measuring mechanism to make full contact between the test needle and the probe needle tail.

[0129] Step S5: The position of the needle tip and the needle tail is observed in real time by the observation component. The control module adjusts the Y-axis of the force measuring mechanism so that the test needle is fully in contact with the probe tip and compressed to the specified range.

[0130] Step S6: Measure and record the force signals fed back from the probe tip side and the probe tail side to complete the analysis of the force situation of the probe.

[0131] Furthermore, step S2 also includes: turning on the light source in the lighting component to cooperate with the observation component for positional observation.

[0132] The specific steps of the force analysis method for probes proposed in this invention will be further explained below with reference to the force analysis system for probes shown in Figures 1 to 7. It should be understood that, within the scope of this invention, the above-mentioned technical features of this invention and the technical features specifically described below (such as in the embodiments) can be combined and correlated with each other to constitute preferred technical solutions.

[0133] Step S1: Place the probe assembly on the clamping component and position and clamp it in place.

[0134] The probe assembly 6 is placed on the reference frame 21 in the clamping component 2. Tightening the knob 23 drives the movable plate 22, which presses the probe assembly 6 to clamp and fix it, ensuring that the probe assembly 6 is accurately positioned and remains stable during the test.

[0135] The clamping component 2 is compatible with the positioning, clamping and fixing of probe assemblies 6 of various specifications, and supports the tip and tail force testing of various probes.

[0136] Step S2: The control module controls the force measuring mechanisms on both sides so that the test needles on both sides approach the probe tip or tail in the probe assembly, thereby achieving the initial alignment of the test needles with the probe assembly.

[0137] Turn on the light source in the illumination component 4 to observe the position of the probe tip and tail;

[0138] The control module 5 controls the Y-motion module in the force measuring mechanism on both sides of the probe assembly 6, so that the test needles on both sides approach the tip and tail of the probe 61 in the probe assembly 6 respectively, so as to achieve the initial alignment of the test needle and the probe assembly, and obtain the position information of the tip and tail of the needle with the observation component.

[0139] Step S3: By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the X and Z direction motion axes of the force measuring mechanism so that the test needles on both sides are on the same motion axis as the probe needle tip and the needle tail, respectively, to achieve precise alignment of the test needle and the probe assembly.

[0140] The positions of the tip and tail of the probe 61 were observed in real time using microscopes 312 on both sides.

[0141] The control module 5 controls the X-axis and Z-axis of the XYZ precision slides 112 on both sides respectively, so that the test needles 115 on both sides are on the same axis of motion as the tip and tail of the probe 61, ensuring that the test needles and the probes of the probe assembly are precisely aligned in the X and Z directions, thus ensuring the accuracy of subsequent force testing.

[0142] Step S4: The position of the needle tail is observed in real time by the observation component, and the control module adjusts the Y-axis of the force measuring mechanism to make full contact between the test needle and the probe needle tail.

[0143] The position of the needle tail is observed through microscope 312. The control module 5 controls the Y-axis movement of the XYZ precision slide 112 on the needle tail side of probe 61 until the test needle 115 on the needle tail side of probe 61 fully contacts the needle tail of probe 61. At this time, the force measuring mechanism can provide real-time feedback on the magnitude of the force on the needle tail of probe 61.

[0144] Step S5: The position of the needle tip is observed in real time by the observation component, and the control module adjusts the Y-axis of the force measuring mechanism so that the test needle is fully in contact with the probe tip and compressed to the specified range.

[0145] The position of the needle tip is observed through microscope 312. The control module 5 adjusts the Y-axis of the XYZ precision slide 112 on the side of the probe tip so that the test needle on the side of the probe tip 61 is in full contact with the probe tip and then the probe is further compressed to its specified range (≤50μm).

[0146] The high-precision non-contact displacement sensor elements 116 on both sides respectively report the compression displacement on the needle tip side and the micro-motion on the needle tail side, providing multi-dimensional data support for force analysis.

[0147] Step S6: Measure and record the force signals fed back from the probe tip side and the probe tail side to complete the analysis of the force situation of the probe.

[0148] The magnitude of the force on the tip and tail sides of the probe 61 is fed back by the three-axis force sensor element 113 on the tip and tail sides of the probe 61.

[0149] The force measuring mechanisms on the probe tip and tail sides respectively provide feedback on the magnitude of the force on the probe tip and tail, enabling force analysis.

[0150] By comparing the force on the tip and tail sides of probe 61, it can be determined whether probe 61 is stuck in the ceramic hole of probe assembly 6, thereby analyzing whether the contact performance of the probe is good.

[0151] The jamming phenomenon refers to the situation where the probe gets stuck in the ceramic hole. The force measured by the tip and tail of the probe is used to determine whether the probe is stuck in the ceramic hole. If the force measured by the tip is much greater than the force measured by the tail, it means that the probe is stuck in the ceramic hole.

[0152] The force analysis method for probes proposed in this invention achieves force analysis of the probe tip and tail by precisely controlling the synergistic effect of the force measuring component and the observation component. This allows for rapid determination of the probe's mechanical properties and the rationality of its assembly, improving detection efficiency and reliability. Consequently, it provides reliable data support for probe performance evaluation and effectively enhances the reliability and efficiency of the probe card testing process.

[0153] This invention provides a force analysis system and method for probes, enabling simultaneous force measurement and analysis of force transmission at the probe tip and tail on a probe card, and specifically offering the following advantages:

[0154] 1) It realizes the double-end force test of the probe tip and tail, analyzes the force transmission, and makes up for the shortcomings of the existing technology that can only test one end.

[0155] 2) The universal design of the clamping components is compatible with various probe assemblies and can meet the positioning, clamping and fixing requirements of various probes, increasing the flexibility and adaptability of the system.

[0156] 3) The XYZ precision slide and high-precision displacement sensor enable precise alignment and adjustment of the test probe, resulting in high testing accuracy;

[0157] 4) Through feedback from high-precision displacement and force sensors, it is possible to detect whether the probe is stuck and to promptly determine whether the probe may cause poor contact during the test.

[0158] 5) By using the observation and lighting components together, it is possible to ensure that the contact state between the probe and the test needle can be clearly observed at both ends of the probe, thereby providing support for accurate force testing;

[0159] 6) Through the automatic adjustment of the control module, the testing process is made more convenient and efficient, the testing speed is improved and the testing error is reduced.

[0160] Although the methods described above are illustrated and depicted as a series of actions for the sake of simplicity, it should be understood and appreciated that these methods are not limited by the order of the actions, as some actions may occur in a different order and / or concurrently with other actions from the illustrations and descriptions herein or not illustrated and described herein but which may be understood by those skilled in the art, according to one or more embodiments.

[0161] As indicated in this application and claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" are not specifically singular and may include plural forms. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0162] In the description of this invention, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0163] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0164] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0165] The above embodiments are provided for those skilled in the art to implement or use the present invention. Those skilled in the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope that conforms to the innovative features mentioned in the claims.

Claims

1. A force analysis system for a probe, characterized in that, Includes force measuring components, clamping components, observation components, control module, and base plate: The force measuring component is mounted on the base plate and performs force testing on the probe tip and tail of the probe assembly simultaneously. The clamping component is disposed on the base plate and is used to position, clamp and fix the probe assembly; The observation component is mounted on the base plate to enable alignment observation of the probe tip side and the probe tail side of the probe assembly. The control module is mounted on the base plate. By inputting control commands, it controls the movement of the force measuring component relative to the probe assembly and realizes the force testing and analysis of the probe tip side and the probe tail side. The force measuring component includes at least two force measuring mechanisms, symmetrically arranged on the tip side and the tail side of the probe, for simultaneously measuring the force on the tip side or the tail side of the probe assembly.

2. The force analysis system for a probe according to claim 1, characterized in that, The force measuring mechanism includes a test needle motion module, a three-axis force sensor element, a test needle clamp, a test needle, and a displacement sensor element. The test probe motion module is located on the tip or tail side of the probe and is mounted on the base plate to enable multi-directional position adjustment of the test probe. The three-axis force sensor element is installed on the test needle motion module to measure the force on the tip or tail of the probe. The test needle clamp is mounted on the three-axis force sensor element and is used to hold the test needle so that the test needle can achieve stable contact with the probe tip or tail. The test needle is mounted on a test needle holder to achieve direct contact with the tip or tail of the probe. The displacement sensor element is mounted on the test needle motion module and is used to measure minute displacement changes of the probe tip or tail.

3. The force analysis system for a probe according to claim 2, characterized in that, The test probe motion module includes a Y motion module and an XYZ precision slide: The Y-motion module is mounted on the base plate and located on the tip or tail side of the probe, and is used to coarsely adjust the Y-direction position of the test probe. The XYZ precision slide, mounted on the Y motion module, provides mounting positions for the three motion axis force sensor elements and displacement sensor elements, and is used to fine-tune the position of the test probe in the X, Y, and Z directions.

4. The force analysis system for a probe according to claim 1, characterized in that, The clamping component includes a reference frame, a movable plate, and a knob: The reference frame, mounted on the base plate, is used to position the probe assembly; The movable plate is mounted on the reference frame via a knob to clamp and fix the probe assembly. The knob, mounted on the reference frame, is used to drive the clamping or loosening of the movable plate.

5. The force analysis system for a probe according to claim 1, characterized in that, The observation component includes at least two observation mechanisms, which are mounted on the base plate and symmetrically arranged on the tip and tail sides of the probe, for realizing the alignment observation of the probe tip or tail side on the probe assembly.

6. The force analysis system for a probe according to claim 5, characterized in that, The observation mechanism includes at least a universal support and a microscope: The universal support is located on the tip or tail side of the probe and is mounted on the base plate to enable multi-directional adjustment of the microscope. The microscope is mounted on a universal support and is used to observe the position of the probe tip side or the probe tail side on the probe assembly.

7. The force analysis system for a probe according to claim 6, characterized in that, The universal bracket includes a fixed shaft, a first rotating shaft, a second rotating shaft, a bushing, and a rotating shaft base. The fixed shaft is fixed to the base plate as an integral support shaft; The bushing is connected to the fixed shaft and is used for rotational and translational adjustment around the fixed shaft; The first rotating shaft is installed inside the bushing and is used for rotational and translational adjustment around the bushing; The second rotating shaft is connected to the first rotating shaft via a rotating shaft base and is used for rotation and translation adjustment around the first rotating shaft.

8. The force analysis system for a probe according to claim 1, characterized in that, It also includes lighting components: The lighting component is mounted on the base plate and provides illumination to the probe tip and tail sides of the probe assembly.

9. A force analysis method for a probe, implemented using a force analysis system for a probe as described in any one of claims 1 to 8, wherein the force measuring mechanism of the force analysis system includes at least a test probe, characterized in that, Includes the following steps: Place the probe assembly on the clamping component for positioning, clamping, and fixation; The control module controls the force measuring mechanisms on both sides, so that the test probes on both sides approach the probe tip or the probe tail in the probe assembly, respectively. By observing the position of the needle tip and needle tail in real time through the observation component, the control module adjusts the X and Z direction motion axes of the force measuring mechanism so that the test needles on both sides are on the same motion axis as the probe needle tip and needle tail respectively. By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the Y-axis of the force measuring mechanism to make full contact between the test needle and the probe needle tail. By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the Y-axis of the force measuring mechanism so that the test needle is fully compressed to the specified range after making full contact with the probe tip. Measure and record the force signals fed back from the probe tip and tail sides to complete the analysis of the force situation of the probe.

10. The force analysis method for a probe according to claim 9, characterized in that, The force analysis system for the probe further includes an illumination component, and the force analysis method further includes the following steps: Turn on the light source in the lighting component to facilitate positional observation in conjunction with the observation component.

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