Gas quality maintenance in a laser discharge chamber
By employing performance scans to optimize gas injection parameters in DUV laser discharge chambers, the method addresses the inefficiencies of conventional gas replenishment, achieving reduced gas and power consumption while maintaining chamber performance.
WO2026139750A1PCT designated stage Publication Date: 2026-07-02CYMER INC
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- CYMER INC
- Filing Date
- 2025-11-21
- Publication Date
- 2026-07-02
AI Technical Summary
Technical Problem
Conventional gas replenishment processes in DUV laser discharge chambers are costly due to excessive gas consumption and power usage, particularly when the laser radiation source is idle for extended periods.
Method used
Implement a method that includes performance scans before and after refill operations to determine optimal gas injection parameters, adjusting the frequency and amount of gas injection based on chamber health and efficiency changes, thereby optimizing gas usage and reducing unnecessary refills.
Benefits of technology
This approach reduces gas consumption and power usage by dynamically adjusting gas injection periodicity and size, minimizing unnecessary operations and extending the time between refills while maintaining chamber performance.
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Smart Images
Figure IB2025061962_02072026_PF_FP_ABST
Abstract
A method of maintaining the quality of the gas in a discharge chamber for use in a deep ultraviolet radiation source. In operations in which injections of fresh gas are added intermittently, a first performance evaluation is carried out after a gas refill and then another performance evaluation is carried out after an expected gas lifetime to determine one or both of a periodicity and size of a next fresh gas injection. In operations in which gas is intermittently refreshed while the deep ultraviolet radiation source is idle, evaluations are carried out after a refill to determine one or more of a need for a refill, a size of the refill, and the periodicity of the refill.
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