MEMS-type probe card having upper and lower stoppers
The MEMS-type probe card with upper and lower stoppers addresses probe detachment and shaking issues, ensuring stable electrical signal transmission and reducing labor costs by preventing probe separation and shaking.
WO2026141805A1PCT designated stage Publication Date: 2026-07-02SDA CO LTD
Patent Information
- Authority / Receiving Office
- WO · WO
- Patent Type
- Applications
- Current Assignee / Owner
- SDA CO LTD
- Filing Date
- 2025-06-20
- Publication Date
- 2026-07-02
AI Technical Summary
Technical Problem
Conventional MEMS-type probe cards face issues with probe detachment and shaking due to gravity, leading to re-insertion needs and degraded signal transmission, especially with smaller connection terminals and narrower pitch spacing in semiconductor devices.
Method used
A MEMS-type probe card equipped with upper and lower stoppers that prevent probe separation and shaking by using protruding stoppers on the probe's outer surface, ensuring stable coupling and reducing re-insertion requirements.
Benefits of technology
The design enhances probe stability, preventing detachment and shaking, thereby maintaining accurate electrical signal transmission and reducing labor costs associated with frequent replacements.
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Smart Images
Figure KR2025008616_02072026_PF_FP_ABST
Abstract
The disclosure relates to a MEMS-type probe card having upper and lower stoppers. An embodiment of the present invention provides a MEMS-type probe card having upper and lower stoppers, the MEMS-type probe card having upper and lower stoppers comprising: an upper guide plate having an upper microhole formed therein; a lower guide plate having a lower microhole formed therein; a probe, the upper and lower portions of which are accommodated in the upper microhole and the lower microhole, respectively; an upper stopper configured such that, when the probe is coupled to the upper guide plate and the lower guide plate, same is prevented from being separated in the vertical direction; and a lower stopper configured such that, when the probe coupled to the upper guide plate and the lower guide plate is pulled in the direction opposite to the coupling direction, the probe is prevented from being separated.
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