Signal transmission system for rotatable magnetron magnet

Abstract

Signal transmission system (1) for providing communicative coupling with a rotatable magnetic system (2), if present, of a magnetron structure for supporting a cylindrically shaped target tube (5), separate from a power transmission system for providing power to the cylindrically shaped target tube (5), where the signal transmission system (1) comprises a first interface (10) arranged for interaction with a rotatable second interface (3), if present, of the magnetron structure for transmitting system signals between the first (10) and second interface (3), configured to maintain said interaction when the second interface (3) rotates around a rotation axis of the rotatable magnetic system (2). magnetic system (2).

Description

2 a signal connector for coupling with a second part of the signal connector to the magnet bar fitting. Specifically, the first and second part are designed to fit when the holder picks up the magnet bar fitting, which, via the signal connector, enables transmission of signals between the end blocks and the magnet bar. This configuration can provide robust and reliable communication between a magnetic system and a controller, which can leave room for proper control of the magnetic system. However, there is a need in the field for further improvement of the control of the magnetic system to achieve better control of the sputtering process. Specifically, there is a need for advancements that increase the flexibility and reliability of controlling magnetic systems in magnetron sputtering equipment. Summary of the invention It is an objective of the implementation forms of the present invention to provide improved control of a magnetic system of a magnetron structure.The above objective is achieved by a signal transmission system, a magnetron structure and an assembly according to the present invention. It is an advantage of the implementation forms of the present invention that a signal transmission system is provided for communicating with a rotating magnetic system, which can leave room for improved flexibility in the control of the sputtering process. BE2024 / 5843 3 It is an advantage of the implementation forms of the present invention that rough communication can be provided between a controller and the rotating magnetic system, even when the magnetic system is rotating around its axis of rotation. It is therefore an advantage of implementation forms of the present invention that improved freedom of movement of the magnetic system can be provided, while at the same time good communication with the magnetic system is provided.Moreover, an advantage of embodiments of the present invention is that the configuration of the rotating magnetic system can be adjusted depending on the angle of rotation. Such a configuration can enable the generation of a sputtering material flux that is variable along the circumference of a cylindrical target tube. As such, the sputtering and resulting deposition process can depend on, or change for, any angle around the cylindrical target axis. This allows layers with variable properties to be deposited along the direction of rotation. This can have practical advantages for coating non-planar substrates, e.g. in a process-integrated coater. In a first aspect, the present invention relates to a signal transmission system for providing communicative coupling with a rotatable magnetic system, if present, of a microwave structure for supporting a cylindrically shaped target tube.The BE2024 / 5843 4 signal transmission system comprises a first interface configured for interaction with a rotatable second interface, if present, of the magnetron structure for transmitting system signals between the first and second interfaces. The signal transmission system is configured to maintain said interaction when the second interface rotates around a rotation axis of the rotatable magnetic system. In implementation forms, the signal can be an electrical signal. Electrical signals are typically simple to transmit and process. In implementation forms, the signal is an electrical signal. In implementation forms, the first interface and the second interface can remain optically coupled to each other while the second interface is rotating. In implementation forms comprising the first interface and the second interface, any waveguide that can remain optically coupled to each other while the second interface is rotating.In implementation forms, the signal transmission system can be a contact system, where the interaction between the first interface and the second interface involves the first interface making electrical contact with the second interface. This configuration allows for reliable signal transmission for monitoring and controlling the magnetic system. Furthermore, the contact system can facilitate the transmission of power for powering electronics and motors or motion systems of the magnetic system. BE2024 / 5843 5 In implementation forms, the signal transmission system is a non-contact system. In implementation forms, the first interface and the second interface are configured for transmitting the system signals via electromagnetic induction. In implementation forms, the first interface and the second interface are configured for transmitting the system signals via capacitive coupling.It is an advantage of these configurations that both data transmission and power transmission can be provided between the first and second interfaces even when no direct contact is provided between the first and second interfaces. This can prevent wear of the interfaces. In configurations, the signal transmission system can be arranged to maintain said interaction during a rotation of the second interface by an angle, e.g. an angle of at least 1º, or at least 10º, or at least 90º, or at least 180º, around the rotation axis of the rotatable magnetic system. The signal transmission system can preferably be arranged to maintain said interaction during a rotation of the second interface by an angle of at least 360º. It is an advantage of these configurations that a full rotation of the second interface around the rotation axis of the rotatable magnetic system is permitted, while said interaction is maintained.The second interface can preferably rotate freely, or can be freely rotatable, while said interaction is maintained. In implementation forms, maintaining said interaction may entail that BE2024 / 5843 6 communicative interaction, or said transmission of system signals, remains possible or continues to be provided. In implementation forms where the signal transmission system is a contact-making system, maintaining said interaction may entail that said contact between the first and second interface is maintained or continuously provided. In implementation forms, the first and second interfaces form a radial contact, whereby the first interface is in radial interaction with respect to the rotation axis of the second interface, or makes contact with the second interface. In implementation forms, the first and second interfaces can interact via a sliding contact. It is an advantage of this implementation form that sliding contacts offer a simple means for maintaining interaction between a stationary interface, e.g.the first interface, and a rotating interface, e.g. the second interface, which allow full rotation compared to wired electrical contacts which may only allow limited rotation. It is an advantage of these designs that the sliding contact can provide an additional communication route alongside each contact that supplies power to the target, which is usually also provided by another sliding contact. In designs, the first interface may comprise an electrically conductive brush. Carbon or metal brushes can provide good sliding contact, whereby good conductivity can be combined with limited friction and wear. BE2024 / 5843 7 In designs, the rotatable magnetic system may be attached or fixed to a rotatable rod for rotating the magnetic system, whereby the rotatable second interface is coupled to said rotatable rod. In designs, the second interface is fixed to said rotatable rod.This can ensure a robust but flexible device for providing free movement of the magnetic system while maintaining the said good interaction that enables communication with the magnetic system. The second interface can therefore rotate together with the rotatable magnetic system. In design forms, the cylindrically shaped target tube can be any type of target tube that is cylindrically shaped. In design forms, the cylindrically shaped target tube is suitable for use with a sputter deposition technique. In design forms, the cylindrically shaped target tube comprises a target material for sputtering. In design forms, the rotation axis of the rotatable magnetic system can run essentially parallel to an axis of the cylindrically shaped target tube. The aforementioned axis can be the cylindrical axis or, if the target is rotatable, the axis of rotation, which typically coincides with the cylindrical axis. In some designs, the axis of rotation of the rotatable magnetic system can essentially coincide with an axis of the cylindrically shaped target tube.However, this is not a requirement; instead, the rotation axis of the rotatable magnetic system may be shifted with respect to an axis of the cylindrically shaped target tube. On the other hand, BE2024 / 5843 8 the cylindrically shaped target tube may be a static tube. Each feature of each design of the first aspect may be independent, as described accordingly for each design5, of each of the other aspects of the present invention. In a second aspect, the present invention relates to a magnetron structure for a cylindrically shaped target tube. The magnetron structure10 comprises a rotatable magnetic system and a second interface, rotatable around a rotation axis of the magnetic system, connected to the magnetic system.The second interface is configured for interaction with a first interface of a signal transmission system of arbitrary embodiments of the first aspect, if present, for transmitting system signals between the first and second interface, configured to maintain said interaction when the second interface rotates around said axis of rotation. In embodiments, the signal transmission system of arbitrary embodiments of the first aspect and the first interface of the signal transmission system may be present. In these embodiments, the first interface and the second interface may be configured for interaction with each other, and for the aforementioned transmission of system signals between the first and second interface. The magnetron structure is a structure for a magnetron. In embodiments, the magnetron structure can be a magnetron. Magnetrons are BE2024 / 5843 9 systems that can enable the sputtering of targets. In embodiments, the magnetic system comprises one or more magnets for generating a magnetic field.The magnetic system may comprise a mounting assembly on which the magnets can be fixed. The mounting assembly may include actuators for moving the magnets with respect to the rotation axis of the magnetic system. In some designs, the second interface may be rotatable at least 360º around said rotation axis. In some designs, the second interface may comprise an electrically conductive cylindrical surface. In some designs, a longitudinal axis of the cylindrical surface of the second interface coincides with the rotation axis of the rotatable magnetic system. This provides a large contact area for reliable signal transmission. In some designs, the second interface, e.g., the electrically conductive cylindrical surface, may be formed of a metal, such as copper or a copper alloy, silver or a silver alloy, gold or a gold alloy, or metal-graphite composites. In some designs, the second interface may contain an electrically conductive surface that forms a segment of a cylinder.In these design forms, a cross-section of the surface of the second interface, perpendicular to the rotation axis of the rotatable magnetic system, can form a segment of a circle. These design forms are advantageous when sliding contacts are used. In design forms, the magnetron structure includes means for carrying or supporting the cylindrically shaped target tube. In design forms, the magnetron structure includes an end block. The end block can include means for carrying or supporting the cylindrically shaped target tube. The magnetron structure, e.g. the end block, can be designed for rotatably carrying the cylindrically shaped target tube. In design forms, the magnetron structure includes the cylindrically shaped target tube. In design forms, the magnetron structure includes means for carrying or supporting the magnetic system. In design forms, the end block includes means for e.g. rotatably carrying or supporting the magnetic system.In implementation forms where both the magnetron structure and the target can be rotatable, the magnetron structures and the target are preferably rotatable independently of each other. In a sputtering method, the magnetron structure and the cylindrically shaped target tube can be positioned in a sputtering reaction chamber. The magnetron structure can include an anode, and the cylindrically shaped target tube can function as a cathode. A sputter gas, such as argon gas, can be present in the reaction chamber. The magnetron structure can include a power supply to provide power for ionizing the gas by creating ions of the sputter gas (e.g. Ar+) in a plasma-containing environment. The cylindrically shaped target tube can be negatively charged and bombarded by said ions to release sputter material from the cylindrically shaped target tube. The released sputter material can be deposited on a substrate in the reaction chamber on BE2024 / 5843 11. A cooling system can be provided for cooling the cylindrically shaped target tube.To enable rotation of the magnetic system and / or the cylindrically shaped target tube, driving means may be provided. The magnetron structure may include an anode. The magnetic system may be located inside the cylindrically shaped target tube to create a magnetic field that captures electrons close to the target surface, thereby increasing ionization efficiencies and sputtering speed. Each feature of each design of the second aspect may be independent as described accordingly for each design of each of the other aspects of the present invention. In one aspect, the present invention relates to an assembly comprising the signal transmission system of arbitrary embodiments of the first aspect.20 In embodiments, the assembly may further comprise the magnetron structure of arbitrary embodiments of the second aspect. In embodiments, the first interface of the signal transmission system may couple with the second interface of the magnetron structure.In implementation forms, the assembly or the end block may include an additional signal transmission system for supplying power to the cylindrically shaped target tube, if present, of the 30 magnetron structure. In these implementation forms, simultaneous power supply to the target control of the BE2024 / 5843 12 magnetic system may be provided. It is an advantage of using separate channels for communicating with the magnetic system and for supplying power to the target that robust communication, without risk of interference,5 can be provided. In designs where the cylindrically shaped target tube is rotatable, the supplementary signal transmission system for supplying power to the cylindrically shaped target tube may be designed to provide a sliding contact with the target tube. In designs, the supplementary signal transmission system may comprise a carbon or metal brush sliding contact with the target tube, or a rotatable contact that is electrically connected to the target tube.In implementation forms, the assembly may further comprise a controller, communicatively coupled with the first interface. In implementation forms, the controller is configured to communicate system signals with the magnetic system, if present. In implementation forms, the controller may be configured to communicate system signals to the magnetic system, such as information for controlling the magnetic system or power for powering the magnetic system. Communicating system signals from the controller to the magnetic system typically involves transferring system signals from the first interface to the second interface. In implementation forms, the controller may be configured to receive system signals communicated from the magnetic system to the controller, such as data from sensors of the magnetic system or feedback data from actuators.The communication of the system signals from the magnetic system to the controller typically involves the transmission of the system signals from the second interface to the first interface. In implementation forms, the system signals may be magnetic system signals that may contain information to monitor or control the magnetic system. In implementation forms, the magnetic system may contain information for controlling a movement of the magnetic system, e.g. for controlling actuators to move the magnets of the magnetic system. In implementation forms, the magnetic system signals contain power for powering the magnetic system. In implementation forms, magnetic system signals contain power for powering the magnets or for powering actuators. The signal transmission system of the present invention can provide robust signal transmission to the magnetic system. The system signals may be for communicating with a sensor of the magnetic system.In implementation forms, the system signals can include trigger signals for triggering a sensor to perform a recording operation, typically communicated from the controller to the sensor. In implementation forms, the system signals can include sensor signals, typically communicated from the sensor of the magnetic system to the controller. In implementation forms, the sensor can be a thermometer BE2024 / 5843 14 for recording a temperature of the magnetic system. Said temperature can influence the strength of a magnetic field generated by the magnetic system. In implementation forms, the sensor can be for detecting a configuration of magnets of the magnetic system, or for detecting a position of magnets of the magnetic system. In implementation forms, the sensor can be for recording a magnetic field strength. However, the system signals are not limited to signals relating to the functioning of the magnetic system.In implementation forms, the system signals may include signals for monitoring or controlling the temperature of components of the magnetic system, for example, of a housing of the magnetic system. In implementation forms, sensors may be incorporated into the magnetic system that perform recording operations on components outside the magnetic system. In implementation forms, the system signals may include signals for monitoring or controlling the flow rate of a liquid for cooling the target. In implementation forms, a sensor of the magnetic system may be a thermometer for recording the temperature of the cylindrically shaped target tube surrounding the magnetic system. In implementation forms, a sensor of the magnetic system may be a pressure gauge for detecting the pressure of the environment of the magnetic system. This may be useful for monitoring the pressure or detecting gas leaks, for example. In implementation forms, a sensor of the magnetic system may be a humidity sensor.Even if the information detected by these sensors is not directly related to the magnetic system, but rather relates to components outside, or to an environment of, the magnetic system, embodiments of the present invention provide efficient and robust communication with these sensors provided in the magnetic system. Further sensors that may be present in the magnetic system in embodiments of the present invention are disclosed in, for example, EP3871246A1. In embodiments, the magnetic system may comprise a magnetic bar and a recording device or sensor, where the sensor is attached to the magnetic bar. The sensor may be for recording intrinsic and / or extrinsic properties of a cylindrically shaped target tube when mounted over the magnetic system.In some configurations, the sensor includes an ultrasound recording element for measuring the thickness of the target tube, typically by analyzing a delay of an ultrasound signal generated by the sensors and reflected off surfaces of the target tube. In configurations, the sensor can be adapted to register the presence of cracks and / or pores in the target tube. In configurations, the sensor can be adapted to register the uniformity of an inner and / or outer diameter of the target tubes and / or the curvature in the longitudinal direction of the target tube. In configurations, the sensor can include a load meter and / or a CCD setup. BE2024 / 5843 16 In some design forms the sensor may be adapted for recording identification information of the target tube. The target tube may contain identification information, e.g. stored in a tag and readable from said tag, which can subsequently be read by the sensor. Bidirectional signals – e.g.from the controller to the sensors of the magnetic system, and from the magnetic system to the system – can be used to supply the sensors (typically from the controller to the sensor), to request data readings from the sensors (typically from the controller to the sensor), and to read data from the sensors (typically from the sensor to the controller). Other sensors that may be present in the magnetic system in forms of the present invention are disclosed in, for example, EP3948924B1. Each mark of each form of the third aspect may be independent as described accordingly for each form of each of the other aspects of the present invention. Particular preference aspects of the invention are set out in the accompanying independent and dependent claims.Characteristics25 of the dependent claims can be combined with characteristics of the independent claims and with characteristics of other dependent claims, if appropriate and not merely as explicitly set out in the claims.30 Although there is continuous improvement, change and development of devices in this area BE2024 / 5843 17, it is assumed that the concepts at hand represent substantial new and innovative improvements, including deviations from previous practices, resulting in the provision of more efficient, stable and5 more reliable devices of this nature. The above and other characteristics, features and benefits of the present invention will be evident from the following detailed description, taken in combination with the accompanying10 drawings, which, by way of example, illustrate the principles of the invention. This description is given solely as an example, without limiting the scope of the invention.The reference figures cited below refer to the attached drawings. Brief description of the drawings: FIG. 1A is a schematic representation of an assembly conforming to the designs of the present invention. FIG. 1B is a schematic representation of a vertical cross-section of the assembly in FIG. 1A, through a signal transmission system of the assembly. FIG. 2 is a schematic representation of a cut-out view of a part of an assembly comprising the signal transmission system conforming to the designs of the present invention. FIG. 3 is a schematic representation of a cut-out view of the assembly of which a part is shown in FIG. 2, comprising an end block BE2024 / 5843 18 comprising the signal transmission system conforming to the designs of the present invention. In the various figures, the same reference signs refer to the same or analogous elements.Description of illustrative embodiments The present invention will be described with respect to specific embodiments and with reference to certain drawings, but the invention is not limited thereto, but only by the claims. The drawings described are merely schematic and are not restrictive. In the drawings, for illustrative purposes, the dimensions of some of the elements may be exaggerated and not drawn to scale. The dimensions and relative dimensions do not correspond to actual practical implementations of the invention. Furthermore, the terms first, second, third and similar descriptives in the claims are used to distinguish between comparable elements and not necessarily to describe a series, whether in time, space, arrangement or any other manner.It must be clear that the terms thus used are interchangeable under suitable circumstances and that the forms of execution of the invention described herein may operate in orders other than those described or illustrated herein. Moreover, the terms top, bottom, top, bottom and similar end descriptions and the claims are used for descriptive purposes and not necessarily for describing relative positions. It must be clear that the terms thus used are interchangeable under suitable circumstances and that the forms of execution of the invention described herein may operate in orientations other than those described or illustrated herein. It should be noted that the term 'comprehensive', used in the claims, should not be interpreted as being limited to the means listed below; it does not exclude other elements or steps.It must therefore be interpreted as specifying the presence of the mentioned characteristics, whole numbers, steps or components referred to, but does not exclude the presence or addition of one or more other characteristics, whole numbers, steps or components, or groups thereof. The concept of 'comprehensive' is therefore understood to mean both the situation in which only the mentioned characteristics are present, and the situation in which these characteristics and one or more other characteristics are present. The word 'comprehensive' according to the invention therefore also includes, as a form of execution, that no further components are present. The scope of the expression 'a device comprising device A and B' must therefore not be interpreted as being limited to devices consisting only of components A and B. It means that, with respect to the present invention, the only relevant components of the device are A and B.Similarly, it should be noted that the term 'coupled', also used in the conclusions, should not be interpreted as being limited to exclusively direct connections. The terms 'coupled' and 'connected' can be used together with their derivatives. It should be clear that these terms are not intended as synonyms for each other. The scope of the expression 'a device A5 coupled to a device B' should therefore not be limited to devices or systems where an output of device A is directly connected to an input of device B. It means that a path exists between an output of A and an input of B, which can be a path including other devices or means. 'Coupled' can mean that two or more elements are in indirect physical or electrical contact, or that two or more elements are not in stand in direct contact with each other, but still cooperate or exchange.Reference in this description to 'one embodiment' or 'one embodiment' means that a specific mark, structure or characteristic, described in connection with the embodiment, is included in at least one embodiment of the present invention. Mentions of the expressions 'in one embodiment' or 'in one embodiment' at different places in this description therefore do not necessarily all refer to the same embodiment, but they may well be so. Moreover, the specific features, structures or characteristics may be combined in any suitable manner, as will be clear from this disclosure in one or more embodiments to the average skilled person.BE2024 / 5843 21 In a similar manner, it should be understood that in the description of sample forms of execution of the invention, various features of the invention are sometimes grouped together in a single form of execution, figure 5 or description thereof, with the aim of streamlining disclosure and assisting in understanding one or more of the various aspects of the invention. However, this method of disclosure should not be interpreted as reflecting the intention that the invention for which protection is sought requires more features than are expressly stated in each claim. On the contrary, as the following claims reflect, aspects of the invention lie in fewer than all features of a single previously disclosed form of execution. The claims following the detailed description are hereby expressly included in this detailed description, whereby each claim zichstaatalseenafscheidenelijkeuitvoeringvormvan20 dezeuitvinding.Moreover, although some of the embodiments described herein include some but not others features included in other embodiments, the intention is that combinations of features of different embodiments fall within the scope of the invention and constitute different embodiments, as understood by the skilled person. For example, in the following claims, all embodiments for which protection is sought may be used in any combination. BE2024 / 5843 22 Moreover, some of the embodiments described herein are a method or combination of elements of a method that can be implemented by a processor of a computer system or by other means for performing the function. A processor with the necessary instructions for performing such a method or element of a method thus constitutes a means for performing the method or the element of a method.Moreover, an element of a device described herein10 is an example of a means of performing the function performed by the element for the purpose of performing the invention. In the description provided herein, numerous specific details are set out. However, it will be clear that forms of implementation of the invention can be put into practice without these specific details. In other cases, well-known methods, structures and techniques are not shown in detail20 so as not to obscure the understanding of this description. The invention will now be described by a detailed description of various forms of implementation of the invention. It is clear25 that other forms of implementation of the invention can be configured according to the knowledge of the skilled person without deviating from the technical theory of the invention, whereby the invention is limited only by the terms of the pending claims.30 In a first aspect, the present invention relates to a signal transmission system BE2024 / 5843 23 for providing communicative coupling with a rotatable magnetic system, if present, of a magnetron structure for supporting a cylindrically shaped target tube. The signal transmission system comprises a first interface5 configured for interaction with a rotatable second interface, if present, of the magnetron structure for transmitting system signals between the first and second interfaces. The signal transmission system is configured to maintain said10 interaction when the second interface rotates around a rotation axis of the rotatable magnetic system. In a second aspect, the present invention relates to a magnetron structure for a15 cylindrically shaped target tube. The magnetron structure comprises a rotatable magnetic system and a second interface, rotatable around a rotation axis of the magnetic system, communicative coupling with the magnetic system.The second interface is configured for interaction with a first interface of a signal transmission system of any embodiment of the first aspect, if any, for transmitting system signals between the first and second interface, configured for maintaining said interaction when the second interface rotates around said axis of rotation. In one third aspect, the present invention relates to an assembly comprising the signal transmission system of any embodiment of the first aspect. BE2024 / 5843 24 Reference is made to FIG.1A, which is a schematic representation of an assembly conforming to the embodiments of the present invention. The assembly comprises a signal transmission system(1) that provides communication coupling with a rotatable magnetic system(2). Reference is also made to FIG.1B, which is a vertical cross-section of the assembly in FIG.1A, through the signal transmission system(1).The signal transmission system(1) comprises a first interface(10) configured for interaction with a rotatable second interface(3) for transmitting system signals between the first(10) and second(3) interfaces. The signal transmission system(1) is configured to maintain the interaction when the second interface(3) rotates around a rotation axis (dash line20) of the rotatable magnetic system(2). The first interface(10) makes contact with the second interface(3) to transmit signals between them while rotation of the second interface(3). In the present example, the signal transmission system(1) is thus a contacting system, where the interaction between the first interface(10) and the second interface(3) comprises the first interface(10) that makes contact with the second interface(3). In the present example, the first interface(10) and the second interface(3) can interact via a sliding contact.This allows 360º30 rotation of the second contact(3) around the rotation axis(20) of the rotatable magnetic system(2) BE2024 / 5843 25 while contact is maintained. The first interface(10) can include an electrically conductive brush(10), such as a carbon or metal brush. These brushes provide good conductivity with limited friction and wear.5 The rotatable magnetic system(2) is immovably attached to a rotatable rod(4) for rotating the magnetic system(2) around its rotation axis(20). The rotatable second interface(3) is also immovably attached to the rotatable rod(4).10 As such, the rotatable magnetic system(2) and the second interface(3) increase when rotating together with the rotatable rod(4). The rotatable second interface(3) includes a conductive cylinder, of which a cylindrical shaft or rotation axis15 coincides with the rotation axis(20) of the magnetic system.This configuration allows the magnetic system(2) to rotate smoothly around the axis of rotation(20) while maintaining good communication coupling with the signal transmission system(1). In this example, the rotatable second interface(3) is connected to the magnetic system(2) via a conductive line or cable(23). Alternatively, the rod(4) on which the magnetic system(2) and the second interface(3) are mounted can be electrically conductive and provide the said communication coupling; that is to say, signals can be transmitted from the second interface(3) via the electrically conductive rod(4) to the magnetic system(2). However, the invention is not limited to these examples. BE2024 / 5843 26 In the present example, the assembly further comprises a cylindrically shaped target tube(5). The rotatable magnetic system(2) is located inside the cylindrically shaped target tube(5). In other words: the cylindrically shaped target tube(5)5 defines a cavity in which the rotatable magnetic system(2) is located.The cylindrically shaped target tube(5) is shown here in a quasi-transparent manner (indicated by the dashed line) to allow viewing of the rotatable magnetic system(2).10 In the present example, the rotation axis(20) of the rotatable magnetic system(2) runs essentially parallel to an axis(51) of the cylindrically shaped target tube(5). In certain configurations, the rotation axis(20) of the 15 rotatable magnetic system(2) can essentially coincide with the said axis(51) of the cylindrically shaped target tube(5), which can simplify the mechanical design of the assembly and increase symmetry.20 In the present example, the assembly further comprises a controller(6), connected via a signal line or cable(60), although any means of communicative connection could be used, to the first interface(10) of the 25 signal transmission system(1), for communicating system signals with the magnetic system(2).This communication, combined with the rotatability of the magnetic system(2), can provide improved control of the magnetic system. System signals30 that can be transmitted from the controller(6) to the magnetic system(2) can contain information BE2024 / 5843 27 about adjusting or tuning the magnetic system(2). System signals that can be transmitted from the magnetic system(2) to the controller(6) can contain information about parameters of the magnetic system(2). In 5 embodiments of the present invention, communication between the controller(6) and the magnetic system(2) can take place seamlessly via the signal transmission system(1). The signals supplied by the controller(6) to the magnetic system(2) can contain power. The signal transmission system(1) can guarantee continuous power supply despite the rotation of the magnetic system(2). The magnetic system(2) can be coupled via the 15 rod(4) to a first rotating actuator(40) to rotate the magnetic system(2).In turn, the cylindrically shaped target tube(5) can be coupled to a second rotating actuator(50) to rotate the cylindrically shaped target tube(5). By using different rotating actuators(40,50) for the magnetic system(2) and for the cylindrically shaped target tube(5), independent rotation of the magnetic system(2) and of the cylindrically shaped target tube(5) can be provided. FIG. 2 is a schematic representation of a cut-out view of a part of an assembly comprising the signal transmission system(1) in accordance with the embodiments of the present invention.30 Reference is made to FIG. 3, which shows a cut-out view of the assembly comprising BE2024 / 5843 28 an end block comprising the signal transmission system(1) in accordance with the embodiments of the present invention. Also shown is the signal line or cable(60) for providing communicative coupling of the signal transmission system(1) with a controller(not shown).In the present example, the signal transmission system(1) comprises a first interface(10) comprising a static part of a sliding contact. Specifically, the first interface(10) comprises carbon or metal brushes for making contact with a second interface(3), which in this example means a cylindrical conductor attached to a shaft(4). The shaft(4) may be connected to the magnetic system(not shown). Specifically, the shaft(4) comprises a holder(41) for receiving the magnetic system. In the present example, the holder(41) leaves space for static reception of the magnetic system, such that the shaft(4) and the magnetic system, when the holder(41) receives the magnetic system, are not rotatable relative to each other. The said shaft(4) is connected to a first gear(81) which can be connected to a second gear(82) connected to an actuator shaft(83), supported by two ball bearings. The actuator shaft(83) is in turn connected to a rotating actuator(not shown).The rotary actuator provides rotational movement to the shaft (4) via the actuator shaft (83) and the gears (81,82), and consequently, when the magnetic system is BE2024 / 5843 29 connected to the shaft (4), to the magnetic system. In the present example, a chamfer (42) on the shaft (4) made simple guidance of the magnetic system possible, to facilitate the insertion of the magnetic system into the holder (41). The magnetic system can then be secured in the holder (41) with a key lock system for absolute angular positioning of the magnetic system relative to the holder (41). The purpose of the key lock system is to prevent relative movement or rotation between the shaft (4) and the magnetic system, while enabling the transmission of torsional or rotational movement from the shaft (4) to the magnetic system.In the present example, the shaft(4) comprises a first part of a signal connector(231), for coupling with a second part of the signal connector (not shown), present20 in the magnetic system. The first part of a signal connector(231) is, for example, connected to the second interface(3) via a conductor such as a cable. The assembly is arranged in such a way that, when the second part of the shaft25 is taken up by the holder(41) of the shaft(4), the first part of the signal connector(231) makes contact with the second part of the signal connector, which enables electrical transmission of signals between the first part of the signal connector(231) and the second part30 of the signal connector. The connection between the first part of the signal connector(231) and BE2024 / 5843 30 the second part of the signal connector is, in the present example, a static connection, which possible since, in the present example, the shaft(4) and the magnetic system are static with respect to each other, e.g. do not rotate.In this way, data can be communicated to the magnetic system via the first part of the signal connector(231). Preferably, there is no substantial rotational movement at this interface between the first part of the signal connector(231) of the end block and the magnetic system (when mounted). As such, the magnetic system can be connected to the first interface(10) via the second and first(231) parts of the signal connector, and via the second interface(3). The assembly further comprises a flange(52) to which a cylindrical target tube(not shown) can be attached, that is to say, in the present example, a rotating tube. Specifically, the flange(52) contains fasteners(53) for securing the cylindrical target tube to the flange(52). A further shaft(84)(also supported by two ball bearings) has, via gears(85), a gear connection with the cylindrical flange(52), for providing or driving rotation of the cylindrical target tube. The flange(52) and shaft(4) can thus be rotated independently of each other.This configuration, in turn, allows for separate rotation of the target tubes and the rotatable magnetic system. Power can be supplied to the target tube via a path that differs from the BE2024 / 5843 31 signal transmission system(1) in accordance with the implementation forms of the present invention. It should be clear that although preferred implementation forms, specific constructions and configurations, as well as materials, are discussed herein5 for devices in accordance with the present invention, various changes or modifications in the form of detail can be made without deviating from the scope of this invention. Steps can be added to or removed from the methods described within the scope of the present invention. BE2024 / 5843 32 CONCLUSIONS 1.-Signal transmission system(1) for providing communicative coupling with a rotatable magnetic system(2), if present, of a magnetron structure for supporting a cylindrically shaped target tube(5), where the signal transmission system(1) comprises a first interface(10) configured for interaction with a rotatable second interface(3), if present, of the magnetron structure for transmitting system signals between the first(10) and second(3) interfaces, configured to maintain said interaction when the second interface(3) rotates around a rotation axis of the rotatable magnetic system(2).15 2.-Signal transmission system(1) according to conclusion1, where the signal transmission system(1) is a contacting system, where the interaction between the first interface(10) and the second interface(3) comprises the first interface(1) making contact20 with the second interface(3). 3. Signal transmission system(1) according to conclusion2, where the first(10) and second interface(3) interact via a sliding contact.25 4.-Signal transmission system(1) according to claim3, where the first interface(10) comprises an electrically conductive system, such as a conductive brush. 5.-Signal transmission system(1) according to one of the preceding claims, where the signal is an electrical signal. BE2024 / 5843 33 6.-Signal transmission system(1) according to one of the preceding claims, where the rotatable magnetic system(2) is attached to a rotatable rod(4) for rotating the magnetic system(2), where the rotatable second interface(3)5 is coupled to the said rotatable rod(4). 7.-Signal transmission system(1) according to one of the preceding claims, where the axis of rotation of the rotatable magnetic system(20) runs essentially parallel to an axis(51) of the cylindrically shaped target tube. 8. Signal transmission system according to conclusion 7, where the rotation axis (20) of the rotatable magnetic system (2) essentially coincides with an axis of the cylindrically shaped 15 target tube (5). 9.-Magagnetron structure for a cylindrically shaped target tube(5), where the magnetron structure comprises a rotatable magnetic system(2) and a second interface(3), rotatable around a rotation axis(20)20 of the magnetic system(2), communicatively coupled with the magnetic system(2), where the second interface(3) is configured for interaction with a first interface(10) of a signal transmission system(1) according to one of the 25 preceding conclusions, if present, for transmitting system signals between the first(10) and second interface(3), configured to maintain said interaction when the second interface(3) rotates around said rotation axis(20).30 BE2024 / 5843 34 10.-Magagnetron structure according to conclusion9, where the second interface(3) is rotatable at least 360º around said rotation axis(20). 11. Magnet structure according to claim 9 or 10, where the second interface (3) encloses an electrically conductive cylindrical surface, where a longitudinal axis (20) of the cylinder coincides with the rotation axis of the rotatable magnetic system (2). 12.-Assembly comprising the signal transmission system(1) according to one of the 10 claims 1 to 8. 13.-Assembly according to claim 12, further comprising the magnetron structure according to one of the claims 9 to 11. 14.-Assembly according to claim 13, where 15 couples the first interface(10) of the signal transmission system(1) with the second interface(3) of the magnetron structure. 15.-Assembly according to claim 13 or 14, comprising an additional signal transmission system for 20 supplying power to the cylindrically shaped target tube(5), if present, of the magnetron structure. 16.-Assembly according to one of the claims 12 to 15, further comprising a 25 controller(6), communicatively coupled with the first interface(10), for communicating system signals with the magnetic system(2), if present. 17.-Composition in accordance with conclusion 16, where 30 the system signals are magnetic system signals containing information to monitor or control the magnetic system(2).BE2024 / 5843 36 EXCERPT Signal transmission system for rotatable magnetron magnet Signal transmission system(1) for providing communicative coupling with a rotatable magnetic system(2), if present, of a magnetron structure for supporting a cylindrically shaped target tube(5), where the signal transmission system(1) comprises a first interface(10) configured for interaction with a rotatable second interface(3), if present, of the magnetron structure for transmitting system signals between the first(10) and second interface(3), configured for maintaining said interaction when the second interface(3) rotates around a rotation axis of the rotatable magnetic system(2).