Static simulation method, system and computer device for semiconductor process cycle

Abstract

The present disclosure relates to a semiconductor process cycle static simulation method, system, computer device and computer readable storage medium. The semiconductor process cycle static simulation method comprises: obtaining a standard cycle time of a target process step; obtaining a historical cycle time of the target process step; and obtaining an estimated cycle time of the target process step within a first preset time according to the historical cycle time, the standard cycle time and a time variable, wherein the value of the estimated cycle time is the same as the historical cycle time at the beginning time of the first preset time, and the value of the estimated cycle time is the same as the standard cycle time at the end time of the first preset time. The embodiment of the present disclosure can effectively improve the simulation accuracy.

Claims

1. A method of static simulation of a semiconductor process cycle, characterized in that, include: Obtain the standard cycle time for the target process step; Obtain the historical cycle time of the target process step; Based on the historical cycle time, the standard cycle time, and the time variable, the estimated cycle time of the target process step is obtained within a first preset time. The value of the estimated cycle time is the same as the historical cycle time at the beginning of the first preset time, and the value of the estimated cycle time is the same as the standard cycle time at the end of the first preset time. The step of obtaining the estimated cycle time of the target process step within a first preset time period based on the historical cycle time, the standard cycle time, and the time variable includes: Obtain a gradient function for a time variable. When the time variable takes values ​​sequentially within the first preset time period, the value of the gradient function gradually changes from 1 to 0 or from 0 to 1. Based on the historical cycle time, the standard cycle time, and the gradient function, the estimated cycle time of the target process step within a first preset time period is obtained.

2. The static simulation method of claim 1, wherein, After obtaining the estimated cycle time of the target process step within a first preset time period, the method further includes: Refresh the historical cycle time; The estimated period time is updated based on the refreshed historical period time.

3. The static simulation method according to claim 2, characterized in that, The historical cycle time is refreshed according to a preset frequency.

4. The static simulation method according to claim 3, characterized in that, The preset frequency is refreshed once per hour.

5. The static simulation method according to claim 4, characterized in that, The refresh of the historical period time includes: Obtain the running time of each batch that has undergone the target process step within a second preset time before the refresh time; The historical cycle time is refreshed based on the running time of each batch that has undergone the target process step within a second preset time period before the refresh time.

6. The static simulation method according to claim 1 or 5, characterized in that, The acquisition of the historical cycle time of the target process step includes: The running time of each batch that has undergone the target process step within a second preset time before the simulation time is obtained; The historical cycle time is obtained based on the running time of each batch that has undergone the target process step within a second preset time before the simulation time.

7. The static simulation method according to claim 1, characterized in that, When the time variable takes values ​​sequentially within the first preset time period, the value of the gradient function smoothly transitions between 0 and 1.

8. The static simulation method according to claim 1, characterized in that, The calculation expression for obtaining the estimated cycle time of the target process step within a first preset time period based on the historical cycle time, the standard cycle time, and the gradient function is as follows: CT1 = L * y1(x) + S * (1 - y1(x)), Wherein, CT1 is the estimated cycle time, L is the historical cycle time, S is the standard cycle time, y1 is the gradual function, and x is the time variable. When x takes values ​​sequentially within the first preset time, the value of y1 gradually changes from 1 to 0.

9. The static simulation method according to claim 8, characterized in that, The first preset time is 24 hours.

10. The static simulation method according to claim 9, characterized in that, The operational expression for the gradient function is: y1(x)=(cos((3.14159265 / 24)*x)+1) / 2.

11. The static simulation method according to claim 1, characterized in that, The calculation expression for obtaining the estimated cycle time of the target process step within a first preset time period based on the historical cycle time, the standard cycle time, and the gradient function is as follows: CT1 = L * (1 - y2(x)) + S * y2(x), Wherein, CT1 is the estimated cycle time, L is the historical cycle time, S is the standard cycle time, y2 is the gradual function, and x is the time variable. When x takes values ​​sequentially within the first preset time, the value of y2 gradually changes from 0 to 1.

12. A static simulation system for semiconductor process cycles, characterized in that, include: The first acquisition module is used to establish the standard cycle time for the target process step; The second acquisition module is used to acquire the historical cycle time of the target process step; The estimation module is used to obtain the estimated cycle time of the target process step within a first preset time period based on the historical cycle time, the standard cycle time, and a time variable. The estimated cycle time is the same as the historical cycle time at the beginning of the first preset time period and the estimated cycle time is the same as the standard cycle time at the end of the first preset time period. The step of obtaining the estimated cycle time of the target process step within the first preset time period based on the historical cycle time, the standard cycle time, and the time variable includes: Obtain a gradient function for a time variable. When the time variable takes values ​​sequentially within the first preset time period, the value of the gradient function gradually changes from 1 to 0 or from 0 to 1. Based on the historical cycle time, the standard cycle time, and the gradient function, the estimated cycle time of the target process step within a first preset time period is obtained.

13. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it implements the steps of the method according to any one of claims 1 to 11.

14. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the steps of the method according to any one of claims 1 to 11.

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