Template form-based machine program file automatic generation method

Abstract

A kind of template form-based machine program file automatic generation method, the template form-based machine program file automatic generation method includes: making template form format, the template form has reference menu field and copy menu field, to indicate whether copy and reference other existing program for parameter;Import template form, and check whether the working condition of parameter in template form meets the operation rule, prompt the content that does not meet the operation rule;According to the selection of engineer, use copy mode or generation mode option;After the template form-based machine program file automatic generation, secondary check whether there is missing parameter.The template form-based machine program file automatic generation method of the application can automatically check template form content, and automatically generate machine operation program file according to the demand of engineer, to reduce the probability of test condition error, improve the work efficiency of engineer, worthy of industry use.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a method for automatically generating machine program files based on template forms. Background Technology

[0002] As is well known, machine operation in a fab requires a given operating recipe. When there are new products, experiments, or unexpected events, the machine operating recipe needs to be modified extensively to meet the actual needs.

[0003] However, changing work conditions requires engineers to submit forms, manually check the form content, run macro code to generate parts of the content, manually find relevant program files, and perform copy and paste operations to create the final required file. Clearly, engineers checking forms is not only time-consuming but also prone to errors. Furthermore, macro code runs slowly, is difficult to maintain and manage, and has limited ability to handle complex content.

[0004] The search for a method that can automatically check the content of template forms and automatically generate machine operation program files according to the needs of engineers, so as to reduce the probability of test condition errors and improve the work efficiency of engineers, has become one of the technical problems that urgently need to be solved by those skilled in the art.

[0005] Therefore, in view of the problems existing in the prior art, the designer of this case, based on years of experience in this industry, actively researched and improved the technology, and thus came up with the present invention, a method for automatically generating machine program files based on template forms. Summary of the Invention

[0006] This invention addresses the shortcomings of existing technologies, such as the time-consuming and error-prone nature of traditional methods for changing machine operating conditions, the slow execution speed of macro code, the difficulty in maintenance and management, and the limited ability to handle complex content. It provides a method for automatically generating machine program files based on template forms.

[0007] To achieve the objective of this invention, this invention provides a method for automatically generating machine program files based on template forms. The method includes:

[0008] Step S1: Define the template form format. The template form has a Reference Recipe field and a Copy Recipe field. The Reference Recipe and Copy Recipe fields are used as parameters to indicate whether to copy and reference other existing programs.

[0009] Step S2: Import the template form into the program and check whether the job conditions of the parameters in the template form meet the job rules. Prompt for any content that does not meet the job rules.

[0010] Execution step S3: Depending on the engineer's selection, use either copy mode or generate mode. When generating mode is selected, the program parses the job conditions in the template form and converts them into a standard output format. When copy mode is selected, the program automatically copies the corresponding test conditions from the associated program based on the conditions in the copy menu bar of the parameters in the template form.

[0011] Step S4: After the machine program file based on the template form is automatically generated, a second check is performed to see if any parameters are missing.

[0012] Optionally, prompts for content that does not comply with the work rules can be made by using a pop-up window to inform of the error type and by marking the location of the non-compliant item in the form.

[0013] Optionally, the automatic generation method for machine program files based on template forms outputs file types including Limit standard format files, Test standard format files, Wafer standard format files, and Die standard format files.

[0014] Optionally, for the Limit file category, there are fixed format requirements. Define the correspondence between parameter Id and parameter name, KeyFlag and parameter Spec related information. The program reads the content of the template form, checks the rationality of the Spec, marks problematic Specs, and performs standardized format adjustments and outputs those without problems.

[0015] Optionally, for the Test file category, there are fixed format requirements, defining the TestKey, test conditions, and test parameters. The program checks whether the test conditions and parameters are reasonable and marks unreasonable parameters. Depending on user needs, two methods are provided: parsing the test conditions to generate a standard file and copying the contents of the associated standard file to generate a standard file.

[0016] Optionally, for Wafer file types, there are fixed format requirements, defining the die size, test position and order. The program will call the die file, obtain the test unit size and the position of the test unit (die) by reading the template form file, and output it in a standard format.

[0017] Optionally, for the Die file category, there are fixed format requirements. It is generated by running macros, defining the TestKey coordinates. The program reads the test point names and their positions contained in each test unit from the template form, checks whether the TestKey in the test point contains the TestKey where all the required test parameters are located, and outputs a standard format file.

[0018] Optionally, the Limit standard format file, Test standard format file, Wafer standard format file, and Die standard format file can be selectively output.

[0019] Optionally, the program includes error markers for each file format in the template form, error content detection markers, and standard format output functions.

[0020] In summary, the machine tool program file automatic generation method based on template forms of the present invention can automatically check the content of template forms and automatically generate machine tool operation program files according to the needs of engineers, thereby reducing the probability of test condition errors and improving the work efficiency of engineers. It is worthy of promotion and use in the industry. Attached Figure Description

[0021] Figure 1 The diagram shown is a flowchart of the automatic generation method for machine program files based on template forms according to the present invention.

[0022] Figure 2 The diagram shows the execution of the automatic generation method for machine program files based on template forms according to the present invention.

[0023] Figure 3 The image shows a diagram illustrating the template form inspection and prompt functions;

[0024] Figure 4 The diagram shown is a flowchart of the machine program file types and processing methods;

[0025] Figure 5 The image shows the file generation mode selection interface;

[0026] Figure 6 The generated Test standard file format is shown below;

[0027] Figure 7 The generated Die standard file format is shown below;

[0028] Figure 8 The generated Limit standard file format is shown below;

[0029] Figure 9 The image shows the generated Wafer standard file format. Detailed Implementation

[0030] To explain in detail the technical content, structural features, objectives, and effects of this invention, the following will provide a detailed description in conjunction with embodiments and accompanying drawings.

[0031] Please see Figure 1 , Figure 1 The diagram shows a flowchart of the automatic generation method for machine program files based on template forms according to the present invention. The automatic generation method for machine program files based on template forms includes:

[0032] Step S1: Define the template form format. The template form has a Reference Recipe field and a Copy Recipe field. The Reference Recipe and Copy Recipe fields are used as parameters to indicate whether to copy and reference other existing programs.

[0033] Step S2: Import the template form into the program and check whether the job conditions of the parameters in the template form meet the job rules. Prompt for any content that does not meet the job rules.

[0034] Execution step S3: Depending on the engineer's selection, use either copy mode or generate mode. When generating mode is selected, the program parses the job conditions in the template form and converts them into a standard output format. When copy mode is selected, the program automatically copies the corresponding test conditions from the associated program based on the conditions in the copy menu bar of the parameters in the template form.

[0035] Step S4: After the machine program file based on the template form is automatically generated, a second check is performed to see if any parameters are missing.

[0036] Please see Figure 2 , Figure 3 , Figure 2 The diagram shows the execution of the automatic generation method for machine program files based on template forms according to the present invention. Figure 3 The diagram illustrates the template form checking and prompting function. After importing the form file, the program begins checking whether the operation conditions of the parameters in the template form conform to the operation rules, and prompts for any content that does not conform to the operation rules. Preferably, as a specific implementation, prompting for content that does not conform to the operation rules is done through a pop-up window indicating the error type and marking the location of the non-conforming item in the form.

[0037] Please see Figure 4 , Figure 4 The diagram shows the machine program file types and processing methods. After verifying that the operating conditions of the parameters in the template form meet the operating rules, the desired file type can be selected, and a name can be entered. The automatic generation method of machine program files based on the template form outputs file types including Limit standard format files, Test standard format files, Wafer standard format files, and Die standard format files. Any of the Limit, Test, Wafer, and Die standard format files can be selectively output. Clearly, the program includes error marking, error content detection marking, and standard format output functions for each file format in the template form.

[0038] Please see Figure 5 , Figure 5The image shows the file generation mode selection interface. The file generation mode can be set to either copy mode or generate mode. When generating mode is selected, the program parses the job conditions in the template form and converts them into a standard output format. When copy mode is selected, the program automatically copies the corresponding test conditions from the associated program based on the conditions in the copy menu bar of the template form.

[0039] Please see Figures 6-9 and in conjunction with reference Figure 4 , Figure 6 The generated Test standard file format is shown. Figure 7 The image shows the generated Die standard file format. Figure 8 The generated Limit standard file format is shown. Figure 9 The image shows the generated Wafer standard file format. More specifically, for the Limit file category, there are fixed format requirements, defining the correspondence between parameter Id and parameter name, KeyFlag and parameter Spec related information. The program reads the content of the template form, checks the rationality of the Spec, marks problematic Specs, and performs standardized format adjustments and outputs those without problems.

[0040] For the Test file category, there are fixed format requirements. The test key, test conditions, and test parameters are defined. The program checks whether the test conditions and parameters are reasonable and marks unreasonable parameters. According to user needs, two methods are provided: parsing the test conditions to generate a standard file and copying the contents of the associated standard file to generate a standard file.

[0041] For Wafer file types, there are fixed format requirements, defining the die size, test position and order. The program will call the die file, obtain the test unit size and the position of the test unit (die) by reading the template form file, and output it in a standard format.

[0042] For the Die file category, there are fixed format requirements. It is generated by running macros, defining the TestKey coordinates. The program reads the test point names and their positions contained in each test unit from the template form, checks whether the TestKey in the test point contains the TestKey where all the required test parameters are located, and outputs a standard format file.

[0043] The method for automatically generating machine program files based on template forms first involves the user selecting and filling out a template form file, which is then imported into the program. The form is then checked, and the user can choose to ignore some errors. After the form check is completed, the user fills in the content of the generated file and selects the generation mode. The program will perform different processing according to the user's selection to generate the final file and perform a second check.

[0044] In summary, the machine tool program file automatic generation method based on template forms of the present invention can automatically check the content of template forms and automatically generate machine tool operation program files according to the needs of engineers, thereby reducing the probability of test condition errors and improving the work efficiency of engineers. It is worthy of promotion and use in the industry.

[0045] Those skilled in the art will understand that various modifications and variations can be made to this invention without departing from its spirit or scope. Therefore, if any modification or variation falls within the scope of the appended claims and their equivalents, the invention is considered to cover such modifications and variations.

Claims

1. A method for automatically generating a machine program file based on a template form, characterized by, The template form-based machine program file automatic generation method comprises the following steps: Step S1: Formulate a template form format, which has a reference menu (Reference Recipe) field and a copy menu (Copy Recipe) field, and the reference menu and the copy menu are used to indicate whether to copy and reference other existing programs for parameters; Step S2: Import the template form into the program, and check whether the operation conditions of the parameters in the template form meet the operation rules, and prompt the contents that do not meet the operation rules; Step S3: According to the selection of the engineer, use the copy mode or the generation mode option, when the generation mode is selected, the program parses the operation conditions in the template form into a standard output format; when the copy mode is selected, the program automatically copies the test conditions of the corresponding items from the associated program according to the conditions of the copy menu field of the parameters in the template form; Step S4: After the template form-based machine program file automatic generation, perform secondary check to see whether there are missing parameters.

2. The method of claim 1, wherein the template form-based machine program file automatic generation method is characterized by, The prompt of the contents that do not meet the operation rules is to inform the error type by using a pop-up window, and to identify the location of the non-compliant item in the form.

3. The method of claim 1, wherein the template form-based machine program file automatic generation method is characterized by, The file types output by the template form-based machine program file automatic generation method include Limit standard format files, Test standard format files, Wafer standard format files, and Die standard format files.

4. The method for automatically generating machine program files based on template forms as described in claim 3, characterized in that, For the Limit file category, there are fixed format requirements, the definition of parameter Id and parameter name corresponding relationship, KeyFlag and parameter Spec related information, the program reads the content of the template form, checks the rationality of Spec, marks the problematic Spec, and adjusts the standard format and outputs the non-problematic one.

5. The method for automatically generating machine program files based on template forms as described in claim 3, characterized in that, For the Test file category, there are fixed format requirements, the definition of test TestKey, test conditions, and test parameters, the program checks whether the test condition parameters are reasonable, and marks the unreasonable parameters; according to user requirements, two ways of parsing test conditions to generate standard files and copying associated standard file contents to generate standard files are provided.

6. The method for automatically generating machine program files based on template forms as described in claim 3, characterized in that, For the Wafer file category, there are fixed format requirements, the definition of Die size, test position and sequence, and the calling of Die files, the program obtains the test cell size and the position of the test cell (Die) by reading the template form file, and outputs the standard format.

7. The method for automatically generating machine program files based on template forms as described in claim 3, characterized in that, For the Die file category, there are fixed format requirements, which are generated by running macros, the definition of test TestKey coordinates, and the program reads the test point name and its position contained in each test cell from the template form, checks whether the Testkey in the test point contains all the Testkeys of the test parameters, and outputs the standard format file.

8. The method of claim 3, wherein the template form-based machine program file automatic generation method is characterized by, The Limit standard format file, the Test standard format file, the Wafer standard format file, and the Die standard format file can be selectively output.

9. The method of claim 1, wherein the template form-based machine program file automatic generation method is characterized by, The program contains error mark, error content detection mark, and standard format output function in the template form.

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