A method for forming lithium sputtering targets

Abstract

This invention discloses a lithium target forming method, relating to the field of sputtering coating, aiming to provide a lithium target forming method. The key technical points are: S1, pre-treating both ends of an SST stainless steel tube, and assembling a stamping die and the stainless steel tube; S2, placing a lithium ingot in a crucible and heating it to melt it into liquid lithium; S3, placing the stainless steel tube in a vacuum glove box, and using an ultrasonic device to apply the liquid lithium to the outer surface of the stainless steel tube with a brush; S4, assembling the product obtained in S3 onto the upper plate of a four-column press, and threading it onto the press head of the four-column press; S5, heating the lithium rod and placing it on the platform of the four-column press, with a stainless steel sheet underneath the lithium rod; S6, pressing the lithium rod in S5 to form a lithium blank target; S7, machining the lithium blank target to obtain the lithium target. This lithium target forming method of the present invention is simple, involves one-step forming, and has high safety.

Description

Technical Field

[0001] This invention relates to the field of sputtering coating, and more specifically, to a method for forming lithium sputtering targets. Background Technology

[0002] Lithium sputtering targets can be used in the field of electrochromic technology, with products applied in smart glasses, such as Samsung AR glasses and Xiaomi AR glasses, enabling clear AR imaging; they can also be used in the automotive field, such as panoramic sunroofs, for heat insulation and color changing.

[0003] Currently, there are some production methods for lithium sputtering targets in China. This invention provides a new method for forming lithium sputtering targets. Summary of the Invention

[0004] In view of the shortcomings of the existing technology, the purpose of this invention is to provide a lithium target molding method, which is simple, can be mass-produced, and has a high target bonding rate and high relative density.

[0005] The above-mentioned technical objective of the present invention is achieved through the following technical solution: a lithium target forming method, comprising the following steps,

[0006] S1. Pre-treat both ends of the SST stainless steel pipe, and assemble the stamping die and the stainless steel pipe.

[0007] S2. Place the lithium ingot in a crucible and heat it to melt it into liquid lithium.

[0008] S3. Place the assembled stainless steel tube from S1 into a vacuum glove box and use an ultrasonic device to apply lithium liquid to the outer surface of the stainless steel tube with a brush.

[0009] S4. Assemble the product obtained in S3 onto the upper plate of the four-column press and attach it to the press head of the four-column press by thread.

[0010] S5. After heating the lithium rod, place it on the four-column press platform with a stainless steel sheet underneath.

[0011] S6. Press the lithium rod in S5 into shape to obtain a lithium blank target material.

[0012] S7. Machining the lithium blank target material to obtain the lithium target material.

[0013] The present invention is further configured such that, in step S1, the stamping die and the stainless steel tube are assembled by welding.

[0014] The present invention is further configured such that, in step S2, the heating temperature is 190-250°C.

[0015] The present invention is further configured such that the purity of the lithium ingot in step S2 is consistent with the material of the target.

[0016] The present invention is further configured such that, in step S3, the coating thickness of the lithium liquid is 0.01-0.3 mm.

[0017] The present invention is further configured such that, in step S5, the heating temperature of the lithium rod is 100-150°C.

[0018] The present invention is further configured such that, in step S5, the lithium rod is a target material.

[0019] The present invention is further configured such that, in step S6, the pressing and forming equipment is a four-column hydraulic press with a pressure of 1000T and a forward speed of 0.01m / min-1m / min.

[0020] The present invention is further configured such that the welding includes TIG welding, MIG welding or manual welding.

[0021] In summary, the present invention has the following beneficial effects: the lithium target preparation method of the present invention is simple and convenient to prepare lithium target material, can be formed in one step, has high safety, can be mass-produced, has a short production cycle, and the target material has a bonding rate of >98% and a relative density of >98%. Detailed Implementation

[0022] The present invention will now be described in detail with reference to the embodiments.

[0023] This invention provides a method for forming lithium sputtering targets, comprising the following steps:

[0024] S1: Pre-treat both ends of the SST stainless steel pipe, assemble the stamping die with the stainless steel pipe, and the assembly method is welding.

[0025] S2: Place the lower lithium ingot in a crucible and heat it to 190-250℃ to melt it into liquid lithium. The purity of the lithium ingot is consistent with that of the target material.

[0026] S3: Place the assembled S1 stainless steel tube in a vacuum glove box, and use an ultrasonic device to apply lithium liquid to the outer surface of the stainless steel tube with a brush head. The thickness of the lithium liquid coating is 0.01-0.3mm.

[0027] S4: The S3 product is assembled on the upper plate of the four-column press and is threaded onto the press head of the four-column press;

[0028] S5: Heat the lithium rod to 100-150℃ and place it on the four-column press platform. Place a stainless steel sheet under the lithium rod. The lithium rod is the target material.

[0029] S6: The lithium rod from step S5 is pressed into shape using a four-column hydraulic press with a pressure of 1000T and a forward speed of 0.01m / min-1m / min to obtain a lithium blank target.

[0030] S7: Process the lithium blank target material to obtain a lithium target material.

[0031] Specific implementation examples:

[0032] Example 1:

[0033] S1: Pre-treat both ends of the SST stainless steel pipe, assemble the stamping die with the stainless steel pipe, and assemble by TIG welding.

[0034] S2: Place the lower lithium ingot in a crucible and heat it to 190°C to melt it into liquid lithium. The purity of the lithium ingot is consistent with that of the target material.

[0035] S3: Place the assembled S1 stainless steel tube in a vacuum glove box, and use an ultrasonic device to apply lithium liquid to the outer surface of the stainless steel tube with a brush head. The thickness of the lithium liquid coating is 0.01mm.

[0036] S4: The S3 product is assembled on the upper plate of the four-column press and is threaded onto the press head of the four-column press;

[0037] S5: Heat the lithium rod to 100°C and place it on the four-column press platform. Place a stainless steel sheet under the lithium rod. The lithium rod is the target material.

[0038] S6: The lithium rod from step S5 is pressed into shape using a four-column hydraulic press with a pressure of 1000T and a forward speed of 0.05m / min to obtain a lithium blank target.

[0039] S7: Process the lithium blank target material to obtain a lithium target material.

[0040] Example 2:

[0041] S1: Pre-treat both ends of the SST stainless steel pipe, assemble the stamping die with the stainless steel pipe, and assemble by manual welding.

[0042] S2: Place the lower lithium ingot in a crucible and heat it to 220°C to melt it into liquid lithium. The purity of the lithium ingot is consistent with that of the target material.

[0043] S3: Place the assembled S1 stainless steel tube in a vacuum glove box, and use an ultrasonic device to apply lithium liquid to the outer surface of the stainless steel tube with a brush head. The thickness of the lithium liquid coating is 0.1mm.

[0044] S4: The S3 product is assembled on the upper plate of the four-column press and is threaded onto the press head of the four-column press;

[0045] S5: Heat the lithium rod to 150°C and place it on the four-column press platform. Place a stainless steel sheet under the lithium rod. The lithium rod is the target material.

[0046] S6: The lithium rod from step S5 is pressed into shape using a four-column hydraulic press with a pressure of 1000T and a forward speed of 1m / min to obtain a lithium blank target.

[0047] S7: Process the lithium blank target material to obtain a lithium target material.

[0048] Example 3:

[0049] S1: Pre-treat both ends of the SST stainless steel pipe, assemble the stamping die with the stainless steel pipe, and the assembly method is MIG welding.

[0050] S2: Place the lower lithium ingot in a crucible and heat it to 250°C to melt it into liquid lithium. The purity of the lithium ingot is consistent with that of the target material.

[0051] S3: Place the assembled S1 stainless steel tube in a vacuum glove box, and use an ultrasonic device to apply lithium liquid to the outer surface of the stainless steel tube with a brush head. The thickness of the lithium liquid coating is 3mm.

[0052] S4: The S3 product is assembled on the upper plate of the four-column press and is threaded onto the press head of the four-column press;

[0053] S5: Heat the lithium rod to 120°C and place it on the four-column press platform. Place a stainless steel sheet under the lithium rod. The lithium rod is the target material.

[0054] S6: The lithium rod from step S5 is pressed into shape using a four-column hydraulic press with a pressure of 1000T and a forward speed of 0.01m / min to obtain a lithium blank target.

[0055] S7: Process the lithium blank target material to obtain a lithium target material.

[0056] The lithium targets obtained in Examples 1, 2, and 3 were subjected to adhesion rate and relative density tests. The test results are shown in the table below:

[0057] Case Adhesion rate relative density Example 1 98.2％ 98.2％ Example 2 98.5％ 98.2％ Example 3 99％ 98.3％

[0058] Compared with existing technologies, the lithium target material prepared by this invention has the following characteristics:

[0059] The lithium target preparation method of the present invention is simple and convenient to prepare lithium target materials, can be formed in one step, has high safety, can be mass-produced, has a short production cycle, and the target material has a bonding rate of >98% and a relative density of >98%.

[0060] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A method of forming a lithium target, the method comprising: The method comprises the following steps: ​ S1, pretreat the ends of SST stainless steel pipes, assemble the stamping die and the stainless steel pipe; S2, place lithium ingots in a crucible and heat them to melt into lithium liquid; S3, place the assembled stainless steel pipe in S1 in a vacuum glove box, and use an ultrasonic device to apply lithium liquid to the outer surface of the stainless steel pipe with a brush head; S4, assemble the product obtained in S3 to the upper piece of a four-column press, and assemble it to the pressing head of the four-column press by screwing; S5, place the lithium rod heated on the platform of the four-column press, and place a stainless steel sheet under the lithium rod; S6, press the lithium rod in S5 to obtain a lithium blank target material; S7, machine process the lithium blank target material to obtain a lithium target material.

2. A method of forming a lithium target according to claim 1, wherein: In S1, the assembly method of the stamping die and the stainless steel pipe is welding.

3. The method of claim 1, wherein: In S2, the heating temperature is 190-250℃.

4. The method of claim 1 or 3, wherein: In S2, the purity of the lithium ingot is consistent with the material quality of the target material.

5. The method of claim 1, wherein: In S3, the brushing thickness of the lithium liquid is 0.01-0.3mm.

6. The method of claim 1, wherein: In S5, the heating temperature of the lithium rod is 100-150℃.

7. The method of claim 1 or 6, wherein: In S5, the lithium rod is a target material raw material.

8. The method of claim 1, wherein: In S6, the pressing equipment is a four-column hydraulic press, the pressure is 1000T, and the forward speed is 0.01m / min-1m / min.

9. The method of claim 2, wherein: The welding includes TIG welding, MIG welding or manual welding.