Laser measurement integrated device and laser measurement data processing method

Abstract

The present invention provides an integrated laser measurement device and a laser measurement data processing method, the device includes a semi-enclosed housing, a laser measurement component, a compensation value acquisition component and a correction processing component; the semi-enclosed housing is a box structure with an opening at the bottom, the compensation value acquisition component obtains a roughness compensation value and a displacement compensation value by measuring the surface roughness of the object and the influence of light on the displacement of the object, the laser measurement component measures the roughness and displacement degree of the surface of the object caused by water mist of different sizes and the roughness and displacement degree of the surface of the object caused by dust of different sizes, and obtains the measurement value to be corrected, and finally the correction processing component corrects the measurement value to be corrected by the roughness compensation value and the displacement compensation value. The present invention improves the correctness of the laser result from the two aspects of appearance design and result algorithm correction, and can better weaken or eliminate the influence of water mist and dust on the result.

Description

Technical Field

[0001] The present invention mainly relates to the technical field of laser data correction, and in particular to a laser measurement integrated device and a laser measurement data processing method. Background Art

[0002] With the development of science and technology, the requirements for measuring instruments in the field of measurement technology are getting higher and higher. Instruments for measuring displacement, such as laser measuring devices, shoot visible red lasers through lenses to the surface of the object being measured. The laser reflected by the object passes through the receiver lens and is received by the internal CCD linear camera. Depending on the distance, the CCD linear camera can "see" this light spot at different angles. Based on this angle and the known distance between the laser and the camera, the digital signal processor can calculate the distance between the sensor and the object being measured. The light source line width and pulse width of the laser measuring device affect its measurement accuracy. There are also some external factors, such as water mist and dust, which can also have an impact. However, existing laser measuring devices do not take these external factors into account, resulting in inaccurate measurement values. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a laser measurement integrated device and a laser measurement data processing method in view of the deficiencies in the prior art.

[0004] The technical solution of the present invention to solve the above technical problems is as follows: a laser measurement integrated device, comprising a semi-enclosed shell, a laser measurement component, a compensation value acquisition component and a correction processing component; the semi-enclosed shell is a box structure with an opening at the bottom, and the laser measurement component, the compensation value acquisition component and the correction processing component are installed inside the semi-enclosed shell;

[0005] The compensation value acquisition component is used to obtain a roughness compensation value by measuring the surface roughness of the object, and to obtain a displacement compensation value by measuring the error of the influence of light on the displacement of the object;

[0006] The laser measurement component is used to measure the roughness and displacement of the surface of the object according to a preset water mist size to obtain a first set of measurement values ​​to be corrected, and to measure the roughness and displacement of the surface of the object according to a preset dust level to obtain a second set of measurement values ​​to be corrected;

[0007] The correction processing component is used to correct the first set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value, and to correct the second set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value to obtain corrected measurement values.

[0008] Another technical solution of the present invention to solve the above technical problem is as follows: a laser measurement data processing method is applied to the laser measurement integrated device, the laser measurement integrated device comprises a semi-enclosed shell, a laser measurement component, a compensation value acquisition component and a correction processing component; the semi-enclosed shell is a box structure with an opening at the bottom, and the laser measurement component, the compensation value acquisition component and the correction processing component are installed inside the semi-enclosed shell;

[0009] The compensation value acquisition component obtains a roughness compensation value by measuring the surface roughness of the object, and obtains a displacement compensation value by measuring the error of the influence of light on the displacement of the object;

[0010] The laser measuring component measures the roughness and displacement of the surface of the object according to a preset water mist size to obtain a first set of measurement values ​​to be corrected, and measures the roughness and displacement of the surface of the object according to a preset dust level to obtain a second set of measurement values ​​to be corrected;

[0011] The correction processing component corrects the first set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value, and corrects the second set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value to obtain corrected measurement values.

[0012] The beneficial effects of the present invention are as follows: the compensation value acquisition component obtains the roughness compensation value and the displacement compensation value respectively by measuring the surface roughness of the object and the influence of light on the displacement of the object; the laser measurement component measures the roughness and displacement degree of the object surface caused by water mist of different sizes and measures the roughness and displacement degree of the object surface caused by dust of different sizes to obtain the measurement value to be corrected; finally, the correction processing component corrects the measurement value to be corrected by the roughness compensation value and the displacement compensation value, thereby weakening the influence of water mist and dust on the result. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 A module block diagram of a laser measurement integrated device provided by an embodiment of the present invention;

[0014] Figure 2 A schematic diagram of a process flow of a laser measurement data processing method provided by an embodiment of the present invention;

[0015] Figure 3 A schematic diagram of the structure of a laser measurement integrated device provided in an embodiment of the present invention;

[0016] Figure 4 A top view of a semi-enclosed housing provided in an embodiment of the present invention.

[0017] In the accompanying drawings, the names of the components represented by the various marks are as follows:

[0018] 1. Semi-enclosed shell, 2. Laser measurement component, 3. Compensation value acquisition component, 4. Correction processing component, 101. Panel, 102. Ventilation hole, 103. Support foot, 104. Display screen. DETAILED DESCRIPTION

[0019] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0020] Embodiment 1:

[0021] like Figure 1 , Figure 3 , Figure 4 As shown, a laser measurement integrated device comprises a semi-enclosed housing 1, a laser measurement component 2, a compensation value acquisition component 3 and a correction processing component 4; the semi-enclosed housing 1 is a box structure with an opening at the bottom, and the laser measurement component 2, the compensation value acquisition component 3 and the correction processing component 4 are installed inside the semi-enclosed housing;

[0022] The compensation value acquisition component 3 is used to obtain a roughness compensation value by measuring the surface roughness of the object, and to obtain a displacement compensation value by measuring the error of the influence of light on the displacement of the object;

[0023] The laser measuring component 2 is used to measure the roughness and displacement of the surface of the object according to a preset water mist size to obtain a set of first measurement values ​​to be corrected, and to measure the roughness and displacement of the surface of the object according to a preset dust level to obtain a set of second measurement values ​​to be corrected;

[0024] The correction processing component 4 is used to correct the first set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value, and to correct the second set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value to obtain corrected measurement values.

[0025] Preferably, the device further comprises a display screen 104, and the display screen 104 is used to display the corrected measured value. The display screen 104 can be a touch-type LED display screen, which can intuitively display the results and facilitate technicians to obtain the measured values.

[0026] The laser measuring component 2, the compensation value acquiring component 3 and the correction processing component 4 can be integrated on a circuit board and can be electrically connected in a wired or wireless manner.

[0027] In the above embodiment, the integrated device that is not completely enclosed and needs to dissipate heat must consider the design of waterproof and dustproof, so at least one side can be ventilated and dissipate heat. This embodiment uses rainwater as the main target of waterproof fog. Rainwater flows from top to bottom, not from bottom to top, so the bottom of the integrated device does not need to be waterproof. Therefore, except for the bottom of the laser measuring device, the other side shells of this integrated device are closed.

[0028] In the above embodiment, the compensation value acquisition component 3 obtains the roughness compensation value and the displacement compensation value by measuring the surface roughness of the object and the influence of light on the displacement of the object. The laser measurement component measures the roughness and displacement degree of the surface of the object caused by water mist of different sizes and the roughness and displacement degree of the surface of the object caused by dust of different sizes to obtain the measurement value to be corrected. Finally, the correction processing component corrects the measurement value to be corrected by the roughness compensation value and the displacement compensation value. The present invention improves the accuracy of the laser result from the two aspects of appearance design and result algorithm correction. The application is not limited to the switch state recognition based on the laser measurement scene, and can better weaken or eliminate the influence of water mist and dust on the result.

[0029] Specifically, the laser measuring component 2 includes a laser interferometer and a laser displacement sensor.

[0030] Specifically, in the compensation value acquisition component 3, the displacement compensation value is obtained by the error of the light affecting the displacement of the target object, which specifically includes:

[0031] The displacement compensation values ​​of the laser interferometer and laser displacement sensor are obtained by measuring the error of the displacement of the target object by light.

[0032] In the above embodiment, the influence of surface roughness and measurement distance on the accuracy of the displacement sensor is first calculated, the surface roughness of the target object is measured, the displacement influence error caused by light is measured, the displacement data of the laser interferometer and the laser displacement sensor are obtained, and the value to be compensated is obtained. The displacement compensation value of the laser measurement component can be objectively obtained through the measurement experiment.

[0033] like Figure 4 As shown, preferably, it further comprises a panel 101, wherein the panel 101 is detachably mounted at the opening of the semi-enclosed shell, and a vent hole 102 is provided on the panel.

[0034] Specifically, the air holes 102 in this embodiment can be configured as annular holes, or as circular or square holes as required.

[0035] Specifically, a filter screen is also included, and the filter screen is laid at the air vent 102 .

[0036] In the above embodiment, a fine filter screen is added at the bottom to prevent dust.

[0037] Specifically, in the correction processing component, the first measurement value to be corrected is corrected based on the roughness compensation value and the displacement compensation value to obtain a corrected measurement value, specifically:

[0038] The set of the first measurement values ​​to be corrected includes a plurality of first measurement values ​​to be corrected corresponding to the preset water mist size, each of the first measurement values ​​to be corrected includes a first roughness and a first displacement; all the first roughnesses are corrected by a first correction formula and the roughness compensation value to obtain a corrected first roughness, and the first correction formula is:

[0039] D c =d c +λ c ×S,

[0040] Among them, D c is the first roughness after correction, d c is the average value of all first roughnesses, λ c is the roughness compensation value, S is the standard deviation coefficient;

[0041] All first displacements are corrected by using a second correction formula and the displacement compensation value to obtain a corrected first displacement, wherein the second correction formula is:

[0042] D w =d w +λ w ×S,

[0043] Among them, D w is the first displacement after correction, d w is the average value of all first displacements, λ w is the displacement compensation value, and S is the standard deviation coefficient.

[0044] Specifically, in the correction processing component, the set of the second measurement values ​​to be corrected is corrected based on the roughness compensation value and the displacement compensation value to obtain the corrected measurement values, specifically:

[0045] The set of the second measurement values ​​to be corrected includes a plurality of second measurement values ​​to be corrected corresponding to the preset dust level, each of the second measurement values ​​to be corrected includes a second roughness and a second displacement; all the second roughnesses are corrected by a third correction formula and the roughness compensation value to obtain a corrected second roughness, and the third correction formula is:

[0046] D k =d k +λ c×S,

[0047] Among them, D k is the second roughness after correction, d k is the average value of all second roughness, λ c is the roughness compensation value, S is the standard deviation coefficient;

[0048] All the second displacements are corrected by using the fourth correction formula and the displacement compensation value to obtain the corrected second displacements. The fourth correction formula is:

[0049] D t =d t +λ w ×S,

[0050] Among them, D k is the second displacement after correction, d k is the average value of all second displacements, λ w is the displacement compensation value, and S is the standard deviation coefficient.

[0051] In the above embodiment, the mean value method can be used to calculate the mean of the corrected first roughness and first displacement and the second roughness and second displacement, and the final measurement value can weaken the influence of water mist and dust on the result.

[0052] Embodiment 2:

[0053] like Figure 2 As shown, a laser measurement data processing method is applied to the laser measurement integrated device, the laser measurement integrated device comprises a semi-enclosed shell, a laser measurement component, a compensation value acquisition component and a correction processing component; the semi-enclosed shell is a box structure with an opening at the bottom, and the laser measurement component, the compensation value acquisition component and the correction processing component are installed inside the semi-enclosed shell;

[0054] The compensation value acquisition component obtains a roughness compensation value by measuring the surface roughness of the object, and obtains a displacement compensation value by measuring the error of the effect of light on the displacement of the object;

[0055] The laser measuring component measures the roughness and displacement of the surface of the object according to a preset water mist size to obtain a first set of measurement values ​​to be corrected, and measures the roughness and displacement of the surface of the object according to a preset dust level to obtain a second set of measurement values ​​to be corrected;

[0056] The correction processing component corrects the first set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value, and corrects the second set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value to obtain corrected measurement values.

[0057] In the above embodiment, the compensation value acquisition component obtains the roughness compensation value and the displacement compensation value by measuring the surface roughness of the object and the influence of light on the displacement of the object. The laser measurement component measures the roughness and displacement degree of the surface of the object caused by water mist of different sizes and the roughness and displacement degree of the surface of the object caused by dust of different sizes to obtain the measurement value to be corrected. Finally, the correction processing component corrects the measurement value to be corrected by the roughness compensation value and the displacement compensation value. The present invention improves the accuracy of the laser result from the two aspects of appearance design and result algorithm correction. The application is not limited to the switch state recognition based on the laser measurement scene, and can better weaken or eliminate the influence of water mist and dust on the result.

[0058] Specifically, the first to-be-corrected measurement value is corrected based on the roughness compensation value and the displacement compensation value to obtain the corrected measurement value, specifically:

[0059] The set of the first measurement values ​​to be corrected includes a plurality of first measurement values ​​to be corrected corresponding to the preset water mist size, each of the first measurement values ​​to be corrected includes a first roughness and a first displacement; all the first roughnesses are corrected by a first correction formula and the roughness compensation value to obtain a corrected first roughness, and the first correction formula is:

[0060] D c =d c +λ c ×S,

[0061] Among them, D c is the first roughness after correction, d c is the average value of all first roughnesses, λ c is the roughness compensation value, S is the standard deviation coefficient;

[0062] All first displacements are corrected by using a second correction formula and the displacement compensation value to obtain a corrected first displacement, wherein the second correction formula is:

[0063] D w =d w +λ w ×S,

[0064] Among them, D w is the first displacement after correction, d w is the average value of all first displacements, λ w is the displacement compensation value, and S is the standard deviation coefficient.

[0065] Specifically, the second set of measurement values ​​to be corrected is corrected based on the roughness compensation value and the displacement compensation value to obtain the corrected measurement values, specifically:

[0066] The set of the second measurement values ​​to be corrected includes a plurality of second measurement values ​​to be corrected corresponding to the preset dust level, each of the second measurement values ​​to be corrected includes a second roughness and a second displacement; all the second roughnesses are corrected by a third correction formula and the roughness compensation value to obtain a corrected second roughness, and the third correction formula is:

[0067] D k =d k +λ c ×S,

[0068] Among them, D k is the second roughness after correction, d k is the average value of all second roughness, λ c is the roughness compensation value, S is the standard deviation coefficient;

[0069] All the second displacements are corrected by using the fourth correction formula and the displacement compensation value to obtain the corrected second displacements. The fourth correction formula is:

[0070] D t =d t +λ w ×S,

[0071] Among them, D k is the second displacement after correction, d k is the average value of all second displacements, λ w is the displacement compensation value, and S is the standard deviation coefficient.

[0072] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0073] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the above-described devices and units can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0074] In the several embodiments provided in this application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed.

[0075] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the embodiments of the present invention.

[0076] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0077] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods of each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk and other media that can store program codes.

[0078] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A laser measurement integrated device, characterized in that: It comprises a semi-enclosed shell, a laser measuring component, a compensation value obtaining component and a correction processing component; the semi-enclosed shell is a box structure with an opening at the bottom, and the laser measuring component, the compensation value obtaining component and the correction processing component are installed inside the semi-enclosed shell; The compensation value acquisition component is used to obtain a roughness compensation value by measuring the surface roughness of the object, and to obtain a displacement compensation value by measuring the error of the light affecting the displacement of the object; specifically: Calculate the influence of surface roughness and measurement distance on the accuracy of displacement sensor, measure the surface roughness of target object, conduct measurement experiment on the displacement influence error caused by light, obtain the displacement data of laser interferometer and laser displacement sensor, and obtain the value to be compensated, so as to obtain the displacement compensation value of laser measurement component; The laser measurement component includes a laser interferometer and a laser displacement sensor, which are used to measure the roughness and displacement of the surface of the object according to a preset water mist size through the laser interferometer and the laser displacement sensor to obtain a first set of measurement values ​​to be corrected, and to measure the roughness and displacement of the surface of the object according to a preset dust level through the laser interferometer and the laser displacement sensor to obtain a second set of measurement values ​​to be corrected; The correction processing component is used to correct the first set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value, and to correct the second set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value, so as to obtain corrected measurement values; In the correction processing component, the first measurement value to be corrected is corrected based on the roughness compensation value and the displacement compensation value to obtain a corrected measurement value, specifically: The set of first measurement values ​​to be corrected includes a plurality of first measurement values ​​to be corrected corresponding to the preset water mist size, and each of the first measurement values ​​to be corrected includes a first roughness and a first displacement; All first roughnesses are corrected by using a first correction formula and the roughness compensation value to obtain a corrected first roughness, wherein the first correction formula is: D c =d c +λ c ×S, Among them, D c is the first roughness after correction, d c is the average value of all first roughnesses, λ c is the roughness compensation value, S is the standard deviation coefficient; All first displacements are corrected by using a second correction formula and the displacement compensation value to obtain a corrected first displacement, wherein the second correction formula is: D w =d w +λ w ×S, Among them, D w is the first displacement after correction, d w is the average value of all first displacements, λ w is the displacement compensation value, S is the standard deviation coefficient; In the correction processing component, the second set of measurement values ​​to be corrected is corrected based on the roughness compensation value and the displacement compensation value to obtain the corrected measurement value, specifically: The set of the second measurement values ​​to be corrected includes a plurality of second measurement values ​​to be corrected corresponding to the preset dust level, each of the second measurement values ​​to be corrected includes a second roughness and a second displacement; all the second roughnesses are corrected by a third correction formula and the roughness compensation value to obtain a corrected second roughness, and the third correction formula is: D k =d k +λ c ×S, Among them, D k is the second roughness after correction, d k is the average value of all second roughness, λ c is the roughness compensation value, S is the standard deviation coefficient; All the second displacements are corrected by using the fourth correction formula and the displacement compensation value to obtain the corrected second displacements. The fourth correction formula is: D t =d t +λ w ×S, Among them, D k is the second displacement after correction, d k is the average value of all second displacements, λ w is the displacement compensation value, and S is the standard deviation coefficient.

2. The integrated laser measurement device according to claim 1, characterized in that: It also includes a panel, which is detachably installed at the opening of the semi-enclosed shell and has ventilation holes.

3. The integrated laser measurement device according to claim 2, characterized in that: It also includes a filter screen, which is laid at the air vent.

4. A laser measurement data processing method, applied to the laser measurement integrated device according to any one of 1 to 3, the laser measurement integrated device comprising a semi-enclosed housing, a laser measurement component, a compensation value acquisition component and a correction processing component; the semi-enclosed housing is a box structure with an opening at the bottom, and the laser measurement component, the compensation value acquisition component and the correction processing component are installed inside the semi-enclosed housing; characterized in that: The compensation value acquisition component obtains the roughness compensation value by measuring the surface roughness of the object, and obtains the displacement compensation value by the error of the light affecting the displacement of the object; specifically: Calculate the influence of surface roughness and measurement distance on the accuracy of displacement sensor, measure the surface roughness of target object, conduct measurement experiment on the displacement influence error caused by light, obtain the displacement data of laser interferometer and laser displacement sensor, and obtain the value to be compensated, so as to obtain the displacement compensation value of laser measurement component; The laser measurement component includes a laser interferometer and a laser displacement sensor, and the roughness and displacement of the surface of the object are measured by the laser interferometer and the laser displacement sensor according to a preset water mist size to obtain a first set of measurement values ​​to be corrected, and the roughness and displacement of the surface of the object are measured by the laser interferometer and the laser displacement sensor according to a preset dust level to obtain a second set of measurement values ​​to be corrected; The correction processing component corrects the first set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value, and corrects the second set of measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value to obtain corrected measurement values; the first measurement values ​​to be corrected based on the roughness compensation value and the displacement compensation value to obtain corrected measurement values, specifically: The set of first measurement values ​​to be corrected includes a plurality of first measurement values ​​to be corrected corresponding to the preset water mist size, and each of the first measurement values ​​to be corrected includes a first roughness and a first displacement; All first roughnesses are corrected by using a first correction formula and the roughness compensation value to obtain a corrected first roughness, wherein the first correction formula is: D c =d c +λ c ×S, Among them, D c is the first roughness after correction, d c is the average value of all first roughnesses, λ c is the roughness compensation value, S is the standard deviation coefficient; All first displacements are corrected by using a second correction formula and the displacement compensation value to obtain a corrected first displacement, wherein the second correction formula is: D w =d w +λ w ×S, Among them, D w is the first displacement after correction, d w is the average value of all first displacements, λ w is the displacement compensation value, S is the standard deviation coefficient; In the correction processing component, the second set of measurement values ​​to be corrected is corrected based on the roughness compensation value and the displacement compensation value to obtain the corrected measurement value, specifically: The set of the second measurement values ​​to be corrected includes a plurality of second measurement values ​​to be corrected corresponding to the preset dust level, each of the second measurement values ​​to be corrected includes a second roughness and a second displacement; all the second roughnesses are corrected by a third correction formula and the roughness compensation value to obtain a corrected second roughness, and the third correction formula is: D k =d k +λ c ×S, Among them, D k is the second roughness after correction, d k is the average value of all second roughness, λ c is the roughness compensation value, S is the standard deviation coefficient; All the second displacements are corrected by using the fourth correction formula and the displacement compensation value to obtain the corrected second displacements. The fourth correction formula is: D t =d t +λ w ×S, Among them, D k is the second displacement after correction, d k is the average value of all second displacements, λ w is the displacement compensation value, S is the standard deviation coefficient; The second set of measurement values ​​to be corrected is corrected based on the roughness compensation value and the displacement compensation value to obtain the corrected measurement values, specifically: The set of the second measurement values ​​to be corrected includes a plurality of second measurement values ​​to be corrected corresponding to the preset dust level, each of the second measurement values ​​to be corrected includes a second roughness and a second displacement; all the second roughnesses are corrected by a third correction formula and the roughness compensation value to obtain a corrected second roughness, and the third correction formula is: D k =d k +λ c ×S, Among them, D k is the second roughness after correction, d k is the average value of all second roughness, λ c is the roughness compensation value, S is the standard deviation coefficient; All the second displacements are corrected by using the fourth correction formula and the displacement compensation value to obtain the corrected second displacements. The fourth correction formula is: D t =d t +λ w ×S, Among them, D k is the second displacement after correction, d k is the average value of all second displacements, λ w is the displacement compensation value, and S is the standard deviation coefficient.

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