Draft tube installation structure and silicon oxide production equipment

By designing leveling components and guide surface structures in silicon oxide production equipment, the problem of lax sealing between the crucible and the flow guide tube is solved, achieving more efficient sealing effect and equipment safety.

CN118670132BActive Publication Date: 2025-03-21HANGZHOU JIAYUE INTELLIGENT EQUIP CO LTD
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
CN202411115564.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-08-14
Publication Date
2025-03-21
Estimated Expiration
2044-08-14

AI Technical Summary

Technical Problem

In existing silicon oxide production equipment, the sealing method between the crucible and the flow guide cannot meet the sealing needs in high temperature and corrosive environments, resulting in serious reaction leakage, affecting the safety and efficiency of the equipment.

Method used

A flow tube installation structure is designed, including a leveling assembly and a flow tube. The leveling assembly realizes leveling of the crucible by adjusting the height of the leveling column, and ensures coaxial installation of the flow tube and the flow tube and the flow hole through the design of the guide surface, thereby improving the sealing effect.

Benefits of technology

This design improves the installation accuracy and sealing effect of the flow guide tube, reduces the risk of leakage during heating, and improves the safety and efficiency of silicon oxide production equipment.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN118670132B_ABST
    Figure CN118670132B_ABST
Patent Text Reader

Abstract

The present invention relates to a guide tube installation structure and silicon dioxide production equipment. The guide tube installation structure includes a furnace body, a leveling component, a crucible and a guide tube, the leveling component includes a crucible tray and a plurality of leveling columns, the bottom end of each leveling column is threadedly connected to the furnace body, the top end supports the crucible tray, and the crucible is arranged on the crucible tray; a guide hole is provided through the side of the crucible in the horizontal direction, the guide tube is inserted into the crucible through the guide hole, and the outer peripheral surface of the guide tube is transitionally matched with the inner wall of the guide hole, and the end of the guide tube inserted into the crucible has an annular guide surface, and the diameter of the guide surface gradually increases in the direction away from the crucible to be equal to the diameter of the outer peripheral surface of the guide tube; the synergistic effect of the above two structures can ensure that the outer peripheral surface of the guide tube and the inner wall of the guide hole are tightly fitted after installation, thereby reducing the difficulty of installing the guide tube while improving the sealing effect after installation, effectively avoiding the problem of experimental failure due to leakage during the heating process.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to the technical field related to silicon oxide production equipment, and in particular to a guide tube installation structure and silicon oxide production equipment. Background Art

[0002] The mainstream method for producing silicon iodine in China is vapor deposition, in which elemental silicon and silicon dioxide are mixed in nearly the same molar ratio and ground into micron-sized powder. The powder is then heated to a temperature above 1000°C in a vacuum environment for a disproportionation reaction, and silicon iodine overflows in the form of vapor. Under the action of pressure diffusion, it is carried to a place with a lower temperature and condensed into solid silicon iodine. In a high-temperature furnace body above 1000°C, the sealing between the crucible and the guide tube is crucial to the safety of the furnace body and the efficiency of the material reaction.

[0003] At present, the traditional sealing method between the crucible and the guide tube usually uses a mechanical compression sealing structure or a filling sealing structure. The above two sealing structures have problems such as poor sealing and complicated operation. They cannot meet the sealing requirements under high temperature and corrosive environments. The reaction leakage is relatively serious, resulting in relatively poor safety and efficiency of the equipment. Summary of the invention

[0004] Based on this, it is necessary to provide a guide tube installation structure and silicon dioxide production equipment with good sealing performance and convenient installation, in order to address the problem that the current sealing method between the crucible and the guide tube cannot meet the sealing requirements in high temperature and corrosive environments, resulting in serious leakage of equipment reactions.

[0005] The present application first provides a guide tube installation structure, including a furnace body, a leveling assembly, a crucible and a guide tube, wherein the leveling assembly includes a crucible tray and a plurality of leveling columns, wherein the bottom end of each leveling column is threadedly connected to the furnace body, and the top end supports the crucible tray, and the crucible is arranged on the crucible tray;

[0006] A guide hole is provided through the side of the crucible in a horizontal direction, the guide tube is inserted into the crucible through the guide hole, and the outer peripheral surface of the guide tube is transitionally matched with the inner wall of the guide hole. The end of the guide tube inserted into the crucible has an annular guide surface, and the diameter of the guide surface gradually increases in the direction away from the crucible until it is equal to the diameter of the outer peripheral surface of the guide tube.

[0007] In one embodiment, the guide surface is a conical surface.

[0008] In one embodiment, the length of the guide surface along the length direction of the guide tube ranges from 5 cm to 10 cm.

[0009] In one embodiment, the angle between the guide surface and the length direction of the guide tube is 5°~15°.

[0010] In one embodiment, the leveling columns are evenly distributed along the circumferential direction with the central axis of the crucible as the center.

[0011] In one embodiment, the leveling assembly includes five leveling columns.

[0012] In one embodiment, each of the leveling columns includes an upper support sleeve, a support column and a lower support sleeve, the lower support sleeve is threadedly connected to the furnace body, the upper and lower ends of the support column are respectively inserted into the upper support sleeve and the lower support sleeve, and the upper support sleeve supports the crucible tray.

[0013] In one of the embodiments, the leveling column further includes a nut, the nut is threadedly connected to the lower support sleeve, and the nut is located between the lower support sleeve and the furnace body.

[0014] In one of the embodiments, a heat-insulating layer wrapping the crucible is disposed in the furnace body, the support column passes through the heat-insulating layer, and the crucible tray, the upper support sleeve and the support column are all made of graphite.

[0015] A second aspect of the present application provides a silicon oxide production device, comprising the above-mentioned guide tube installation structure.

[0016] The above-mentioned guide tube installation structure can firstly realize the leveling of the crucible more conveniently by adjusting the height of each leveling column, thereby ensuring that the guide hole and the guide tube are on the same horizontal plane when the guide tube is installed; secondly, the guide surface design of the guide tube can play a guiding role during the insertion process, so as to ensure the coaxiality of the guide tube and the guide hole during the insertion process; the synergistic effect of the above-mentioned two structures can ensure that the outer peripheral surface of the guide tube and the inner wall of the guide hole are tightly fitted after the installation is completed, thereby reducing the difficulty of installing the guide tube while improving the sealing effect after the installation is completed, and effectively avoiding the problem of experimental failure due to leakage during the heating process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a cross-sectional view of the guide pipe installation structure of the present application along the front view direction;

[0018] Figure 2 for Figure 1 The enlarged view of point A in the middle;

[0019] Figure 3 for Figure 1 Enlarged view of point B in the middle.

[0020] Figure numerals: 10, furnace body; 20, leveling assembly; 21, crucible tray; 22, leveling column; 221, upper support sleeve; 222, support column; 223, lower support sleeve; 224, nut; 30, crucible; 31, guide hole; 40, guide tube; 41, guide surface. DETAILED DESCRIPTION

[0021] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0022] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0023] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0024] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0026] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0027] In a high-temperature furnace above 1000°C, the sealing between the crucible and the draft tube is crucial to the safety of the furnace and the efficiency of the material reaction. Currently, the traditional sealing method between the crucible and the draft tube usually uses a mechanical compression sealing structure or a filling sealing structure.

[0028] Among them, the mechanical compression sealing structure uses a mechanical device to press the crucible and the guide tube tightly together to form a seal. This sealing method has the following defects:

[0029] 1. Complex mechanical devices: It is usually necessary to design complex mechanical devices to ensure the tight fit between the crucible and the guide tube, which not only increases the manufacturing cost, but also complicates the installation and maintenance process;

[0030] 2. High processing precision requirements: Since the mechanical compression sealing structure has high processing precision requirements for the crucible and the guide tube, any slight processing error may cause the seal to fail. This increases the manufacturing difficulty and cost;

[0031] 3. Sealing effect is affected by temperature: In a high temperature environment, the mechanical clamping device may lose its original sealing effect due to the difference in thermal expansion coefficient of the material, resulting in leakage.

[0032] The filling sealing structure uses high temperature resistant materials to fill the outer wall of the tube, and then inserts it into the guide port of the crucible, and forms a seal by the filling cooperation between the high temperature resistant material and the crucible. This sealing structure has the following defects:

[0033] 1. Poor sealing: The filling sealing structure mainly relies on the cooperation between the filling material, the crucible and the guide tube to form a seal. This sealing method itself has poor sealing. In high temperature, high pressure or corrosive environment, the filling material may fail and cause leakage;

[0034] 2. Filling material falls off: If the filling material does not fit well with the crucible and the flow guide tube, the filling material may fall off during the experiment, resulting in experimental failure; in addition, the falling of the filling material may also contaminate the material and affect the product quality;

[0035] 3. Difficulty in material selection: The filling material needs to have properties such as high temperature resistance and corrosion resistance, and must be compatible with the materials of the crucible and the guide tube;

[0036] 4. Difficult to reuse: Once the filled sealing structure is used, the filling material may be damaged or contaminated, making it difficult to reuse, which increases the experimental cost and time cost.

[0037] It is not difficult to see that the current sealing method between the crucible and the guide tube has problems such as poor sealing and complicated operation. It cannot meet the sealing requirements under high temperature and corrosive environments, and the reaction leakage is serious, resulting in relatively poor safety and efficiency of the equipment.

[0038] In this regard, please combine Figure 1 as well as Figure 2 As shown, the present application first provides a guide tube installation structure, including a furnace body 10, a leveling assembly 20, a crucible 30 and a guide tube 40, the leveling assembly 20 includes a crucible tray 21 and a plurality of leveling columns 22, the bottom end of each leveling column 22 is threadedly connected to the furnace body 10, and the top end supports the crucible tray 21, and the crucible 30 is arranged on the crucible tray 21; a guide hole 31 is opened through the side of the crucible 30 in the horizontal direction, the guide tube 40 is inserted into the crucible 30 through the guide hole 31, and the outer peripheral surface of the guide tube 40 is transitionally matched with the inner wall of the guide hole 31, and the end of the guide tube 40 inserted into the crucible 30 has an annular guide surface 41, and the diameter of the guide surface 41 gradually increases in the direction away from the crucible 30 to be equal to the diameter of the outer peripheral surface of the guide tube 40.

[0039] Specifically, before installing the crucible 30 , the crucible tray 21 is first leveled by adjusting the leveling columns 22 , and after the crucible 30 is placed on the crucible tray 21 , leveling is performed again to ensure accurate leveling.

[0040] It is worth mentioning that the guide tube installation structure of the present application is suitable for large-sized (the raw material loading amount of the crucible 30 is greater than 500 kg) silicon oxide production equipment. Therefore, after the crucible 30 is installed inside the furnace body 10, there is a sufficient gap between the crucible 30 and the inner wall of the furnace body 10, and the operator can enter the gap and operate the leveling assembly 20 located at the bottom of the crucible 30 for leveling.

[0041] In the present application, firstly, by adjusting the height of each leveling column 22, the crucible 30 can be leveled more conveniently, thereby ensuring that the guide hole 31 and the guide tube 40 are on the same horizontal plane when the guide tube 40 is installed. Secondly, the guide surface 41 of the guide tube 40 is designed to play a guiding role during the insertion process to ensure the coaxiality of the guide tube 40 and the guide hole 31 during the insertion process. The synergistic effect of the above two structures can ensure that the outer peripheral surface of the guide tube 40 and the inner wall of the guide hole 31 are tightly fitted after the installation is completed, thereby reducing the difficulty of installing the guide tube 40 while improving the sealing effect after the installation is completed, effectively avoiding the problem of experimental failure due to leakage during the heating process.

[0042] The optimization of the sealing structure can reduce the energy loss and material waste during the sintering process, and improve the sintering efficiency and output of the equipment. According to actual experimental verification, the crucible 30 with a raw material loading of 500 kg has a material reaction efficiency of 60% using a filling type sealing structure, while the use of the guide tube installation mechanism of the present application can greatly improve the material reaction efficiency to more than 90%;

[0043] In addition, the efficient and reliable sealing structure can also reduce equipment failures and downtime, and improve the overall operating efficiency of the equipment; the modular design and detachable structure between the leveling assembly 20, crucible 30 and guide tube 40 of the present application also make the installation and disassembly of the crucible 30 and the guide tube 40 simpler and faster, reducing the workload and time loss during the installation and disassembly of the equipment.

[0044] Please combine Figure 1 as well as Figure 2 As shown, in some embodiments, the guide surface 41 is a conical surface with a fixed slope, and the coaxial guidance of the guide tube 40 and the guide hole 31 is relatively smooth during the process of inserting the guide tube 40 into the guide hole 31 .

[0045] Of course, in some other embodiments, the guide surface 41 may also be a curved surface or other shapes, as long as its diameter gradually increases in the direction away from the crucible 30 , and the present application does not make any further limitation here.

[0046] In some embodiments, the length of the guide surface 41 along the length direction of the guide tube 40 ranges from 5 cm to 10 cm.

[0047] Preferably, the length of the guide surface 41 along the length direction of the guide tube 40 is 7 cm.

[0048] Of course, the length of the guide surface 41 along the length direction of the guide tube 40 needs to be determined comprehensively based on factors such as the diameter, wall thickness, and material strength of the guide tube 40, and can also be appropriately adjusted according to actual needs. This application does not make further limitations here.

[0049] In some embodiments, the angle between the guide surface 41 and the length direction of the guide tube 40 is 5° to 15°.

[0050] It is not difficult to understand that, under the premise of ensuring that the length of the guide surface 41 along the length direction of the guide tube 40 is certain, if the angle between the guide surface 41 and the length direction of the guide tube 40 is too large, the thickness of the end of the guide tube 40 may be too thin and the strength may be low. During the process of inserting the guide tube 40 into the guide hole 31, the end of the guide tube 40 may be deformed due to collision. On the contrary, if the angle between the guide surface 41 and the length direction of the guide tube 40 is too small, the difference between the diameter of the end of the guide tube 40 and the diameter of the guide hole 31 is small. When inserting the guide tube 40, it needs to be more accurately aligned with the guide hole 31, which is not conducive to the insertion of the guide tube 40 and the installation difficulty is relatively high.

[0051] Preferably, the angle between the guide surface 41 and the length direction of the flow guide tube 40 is 8°.

[0052] Please refer to Figure 1 As shown, in some embodiments, the leveling columns 22 are evenly distributed along the circumferential direction with the central axis of the crucible 30 as the center; such an arrangement facilitates leveling of the crucible tray 21 .

[0053] Please refer to Figure 1 As shown, in some embodiments, the leveling assembly 20 includes at least four leveling columns 22 to meet the minimum requirement of leveling the crucible tray 21 in the horizontal direction.

[0054] Preferably, the leveling assembly 20 includes 4 to 8 leveling columns 22 .

[0055] More preferably, the leveling assembly 20 includes five leveling columns 22 .

[0056] Of course, the leveling assembly 20 may also include other numbers of leveling columns 22 , as long as the leveling columns 22 can level the crucible tray 21 in the horizontal direction, and the present application does not make any further limitations here.

[0057] Please combine Figure 1 as well as Figure 3 As shown, in some embodiments, each leveling column 22 includes an upper support sleeve 221, a support column 222 and a lower support sleeve 223. The lower support sleeve 223 is threadedly connected to the furnace body 10. The upper and lower ends of the support column 222 are respectively inserted into the upper support sleeve 221 and the lower support sleeve 223. The upper support sleeve 221 supports the crucible tray 21.

[0058] It should be noted that the guide tube installation structure of the present application is suitable for large-scale silicon dioxide production equipment. The raw material loading capacity of the crucible 30 is greater than 500 kg. Therefore, the leveling component 20 bears a large weight in the vertical direction. The stress point of ordinary threaded connection is completely located on the thread surface. The thread surface may be deformed and damaged due to pressure, resulting in the leveling column 22 being unable to be screwed in or out normally, affecting the normal use of the leveling component 20.

[0059] In this regard, please combine Figure 1 as well as Figure 3 As shown, in some embodiments, the leveling column 22 further includes a nut 224 , the nut 224 is threadedly connected to the lower support sleeve 223 , and the nut 224 is located between the lower support sleeve 223 and the furnace body 10 .

[0060] In actual use, the nut 224 is first threadedly connected to the lower support sleeve 223, and a small gap is left between the top surface of the nut 224 and the stepped surface of the lower support sleeve 223 for subsequent adjustment, and then the lower support sleeve 223 is threadedly connected to the furnace body 10 until the bottom surface of the nut 224 abuts against the furnace body 10.

[0061] With such arrangement, the lower support sleeve 223 is relatively fixed to the nut 224, and part of the vertical pressure of the crucible 30 on the leveling column 22 is borne by the nut 224, thereby reducing the vertical load-bearing of the threaded surface, reducing the possibility of compression deformation of the threaded surface, and improving the service life of the guide tube installation structure of the present application.

[0062] In addition, when it is necessary to adjust the height of the leveling column 22, first rotate the nut 224 to adjust the position of the nut 224 relative to the lower support sleeve 223. Since the nut 224 has no load, the adjustment is relatively easy and can be completed accurately. After the adjustment, the nut 224 can also be used for positioning. It only needs to rotate the lower support sleeve 223 until the nut 224 is against the furnace body 10 to complete the adjustment, which effectively improves the leveling accuracy and efficiency.

[0063] Please combine Figure 1 as well as Figure 3 As shown, in some embodiments, a heat preservation layer (not shown) wrapping the crucible 30 is provided in the furnace body 10, and the support column 222 passes through the heat preservation layer. The crucible tray 21, the upper support sleeve 221 and the support column 222 are all made of graphite.

[0064] Graphite has the characteristics of high melting point, good thermal conductivity and stable properties. In the present application, the crucible tray 21, the upper support sleeve 221 and the support column 222 made of graphite have the following advantages:

[0065] First, since the temperature inside the insulation layer during the production of silicon oxide is as high as 1000°C or more, the graphite material can prevent the parts inside the insulation layer from being deformed by heat, which causes the crucible 30 to tilt.

[0066] Secondly, the high thermal conductivity of graphite material enables the crucible tray 21 to more efficiently exchange heat with the crucible 30, thereby improving the heating efficiency of the crucible 30;

[0067] Finally, since a vacuum environment must be maintained during the heating process of silicon oxide powder, other unstable materials may volatilize impurity gases and destroy the vacuum environment during the heating process, while graphite is stable and can effectively avoid the above situation.

[0068] A second aspect of the present application provides a silicon oxide production device, comprising the above-mentioned guide tube installation structure.

[0069] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0070] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A guide pipe installation structure, characterized in that: The furnace body (10) comprises a leveling assembly (20), a crucible (30) and a flow guide tube (40); the leveling assembly (20) comprises a crucible tray (21) and a plurality of leveling columns (22); the bottom end of each leveling column (22) is threadedly connected to the furnace body (10), and the top end supports the crucible tray (21); the crucible (30) is arranged on the crucible tray (21); A flow guide hole (31) is formed through the side of the crucible (30) in a horizontal direction, the flow guide tube (40) is inserted into the crucible (30) through the flow guide hole (31), and the outer peripheral surface of the flow guide tube (40) is transitionally matched with the inner wall of the flow guide hole (31), and one end of the flow guide tube (40) inserted into the crucible (30) has an annular guide surface (41), and the diameter of the guide surface (41) gradually increases in a direction away from the crucible (30) to be equal to the diameter of the outer peripheral surface of the flow guide tube (40); Each of the leveling columns (22) comprises an upper support sleeve (221), a support column (222) and a lower support sleeve (223); the lower support sleeve (223) is threadedly connected to the furnace body (10); upper and lower ends of the support column (222) are respectively inserted into the upper support sleeve (221) and the lower support sleeve (223); and the upper support sleeve (221) supports the crucible tray (21); The leveling column (22) further comprises a nut (224), wherein the nut (224) is threadedly connected to the lower support sleeve (223), and the nut (224) is located between the lower support sleeve (223) and the furnace body (10).

2. The guide pipe installation structure according to claim 1, characterized in that: The guide surface (41) is a conical surface.

3. The guide tube installation structure according to claim 2, characterized in that: The length of the guide surface (41) along the length direction of the flow guide tube (40) ranges from 5 cm to 10 cm.

4. The guide tube installation structure according to claim 3, characterized in that: The included angle between the guide surface (41) and the length direction of the flow guide tube (40) is 5° to 15°.

5. The guide tube installation structure according to claim 1, characterized in that: The leveling columns (22) are evenly distributed along the circumferential direction with the central axis of the crucible (30) as the center.

6. The guide tube installation structure according to claim 2, characterized in that: The leveling assembly (20) comprises five leveling columns (22).

7. The guide tube installation structure according to claim 1, characterized in that: A heat-insulating layer wrapping the crucible (30) is provided in the furnace body (10), the support column (222) passes through the heat-insulating layer, and the crucible tray (21), the upper support sleeve (221) and the support column (222) are all made of graphite.

8. A silicon oxide production device, characterized in that: It comprises the guide tube installation structure as described in any one of claims 1 to 7.

Citation Information

Patent Citations

  • U-shaped furnace distillation state passage connection mode

    CN114963766A

  • Silicon monoxide production equipment

    CN117466304A

  • Adjustable leveling supporting structure for high-temperature vacuum furnace crucible

    CN210980784U