A bulkhead thermally coupled distillation process and equipment for polysilicon production
By introducing a temperature control system into the partition thermally coupled distillation equipment produced by polycrystalline silicon, the energy consumption control problem caused by heating instability is solved, and the stability of the heating process and the effective management of energy consumption is achieved.
Patent Information
- Application Number
- CN202410880337.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-02
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2044-07-02
AI Technical Summary
In the existing polysilicon production, the partition wall thermal coupling distillation process has heating instability during the heating process, resulting in energy consumption being unable to be effectively controlled.
A thermally coupled distillation equipment in the partition wall including a temperature control system was designed. By setting a temperature control device in the reboiler, the heating temperature is detected in real time, and the heating temperature is automatically controlled through the heating pipe and the heater to ensure the stability of the heating process. .
By automatically detecting and controlling the heating temperature, effective management of energy consumption is achieved, the stability of the heating process is improved, and the energy consumption of polysilicon production is reduced.
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Figure CN118807238B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of polysilicon production, and in particular to a bulkhead thermally coupled distillation process and equipment for polysilicon production. Background Art
[0002] Polysilicon materials are the most important basic materials for the electronic information industry and the solar photovoltaic power generation industry. Solar-grade polysilicon can be used for solar photovoltaic power generation. It is an efficient, environmentally friendly and clean future technology that can replace the existing power generation model. Electronic-grade polysilicon can be used to manufacture semiconductor materials and integrated circuit substrates. It is widely used in aerospace, artificial intelligence, automatic control, computer chips and other fields. Therefore, polysilicon materials are of strategic significance to the development of national new energy and high-tech.
[0003] CN 101538045A proposes a trichlorosilane differential pressure coupling distillation technology, which can significantly reduce production costs and energy consumption, and distillation can save about 40% of energy. CN 101538044B proposes a trichlorosilane separation and purification process. Crude trichlorosilane contains light components of chlorosilane and B and P impurities, and it is necessary to remove low-boiling and high-boiling substances multiple times to obtain high-purity trichlorosilane. Although the differential pressure coupling technology is used to reduce production energy consumption, the multi-tower continuous distillation has low purification efficiency and large equipment investment;
[0004] CN201210435219.5, a method and equipment for heat-coupled distillation for polysilicon production, includes a low-pressure distillation tower, a medium-pressure distillation tower, a high-pressure distillation tower, a top condenser and a bottom reboiler. A condenser-reboiler is arranged between the two distillation towers. The gaseous material at the top of the rear tower releases heat in the condenser-reboiler, condenses into a supercooled liquid and returns to the rear tower. The bottom material of the front tower absorbs heat in the condenser-reboiler and turns into reboiled steam and returns to the front tower. The crude trichlorosilane raw material is separated by three distillation towers, and low-boiling materials are removed at the top of the tower and high-boiling materials are removed at the bottom of the tower. Finally, a high-purity trichlorosilane product is extracted from the side line of the high-pressure tower.
[0005] The above structure releases heat to the condenser-reboiler through the gas phase material at the top of the tower, and reduces energy consumption by recovering heat energy; however, in the actual production process, the heat recovery method will lead to unstable heating; therefore, it is necessary to design a wall-mounted thermally coupled distillation equipment for polysilicon production that can control energy consumption by automatically detecting the temperature and controlling the heating temperature. Summary of the invention
[0006] The content of this application is used to introduce concepts in a brief form, which will be described in detail in the detailed implementation section below. The content of this application is not intended to identify the key features or essential features of the technical solution claimed for protection, nor is it intended to limit the scope of the technical solution claimed for protection.
[0007] In order to solve the technical problems mentioned in the above background technology section, some embodiments of the present application provide a ZLMC, including the following steps:
[0008] Step 1: Pour the raw materials into the first distillation tower. After separation in the first distillation tower, the gas phase material at the top of the tower passes through a condenser and is divided into liquid phase reflux material and tower top produced material;
[0009] Step 2: The bottom liquid phase material obtained in step 1 is divided into two parts, one part is heated in the first reboiler to form back-tower steam and returns to the first distillation tower, and the other part is used as the bottom produced material, trichlorosilane is produced from the side line in the middle of the first distillation tower, and then transported to the second distillation tower;
[0010] Step 3: The gaseous material at the top of the second distillation tower enters the first reboiler, provides heat for the first reboiler, and controls the heating temperature through the temperature control device arranged in the first reboiler; condenses into a supercooled liquid through the first reboiler, and is divided into a liquid reflux material and a tower top produced material;
[0011] Step 4: The bottom liquid phase material obtained in step 3 is divided into two parts, one part is heated in the second reboiler to form back-tower steam and returns to the second distillation tower, and the other part is used as the bottom produced material, and trichlorosilane is produced from the side line in the middle of the second distillation tower, and then transported to the third distillation tower;
[0012] Step 5: The gaseous material at the top of the third distillation tower enters the second reboiler, provides heat for the second reboiler, and controls the heating temperature through a temperature control device disposed in the second reboiler; condenses into a supercooled liquid through the second reboiler, and is divided into a liquid reflux material and a tower top produced material;
[0013] Step 6: The liquid phase material at the bottom of the tower obtained in step 5 is divided into two parts, one part is heated after passing through the third reboiler to form tower return steam and returns to the third distillation tower, and the other part is used as the bottom produced material, and the trichlorosilane product is produced in the middle of the third distillation tower;
[0014] In some embodiments, the top pressure of the first distillation tower is 410 kPa, the top temperature is 55°C, and the reflux rate / feed rate (L / F)=19; the top pressure of the second distillation tower is 510 kPa, the top temperature is 100°C, and the reflux rate / feed rate (L / F)=210; the top pressure of the third distillation tower is 910 kPa, the top temperature is 120°C, and the reflux rate / feed rate (L / F)=30.
[0015] Through the setting of the above process, the load of the top condensation of the second distillation tower 2 can match the load of the bottom reboiler of the first distillation tower 1, and the load of the top condensation of the third distillation tower 3 can match the load of the bottom reboiler of the second distillation tower 2, thereby realizing thermally coupled distillation, matching heat exchange, and reducing energy consumption; thereby obtaining high-purity polysilicon products.
[0016] In some embodiments, a first distillation column, a second distillation column, a third distillation column, a condenser, a first reboiler, a second reboiler, a third reboiler;
[0017] The first distillation tower, the second distillation tower and the third distillation tower are all supported by a support frame and placed vertically on the ground; the end close to the ground is defined as the tower bottom, and the end far from the ground is defined as the tower top; the condenser is connected to the first distillation tower, and the connection point is located at the tower top of the first distillation tower;
[0018] The first reboiler is disposed between the first distillation tower and the second distillation tower; the first reboiler is connected to the bottom of the first distillation tower;
[0019] The second reboiler is arranged between the second distillation tower and the third distillation tower, and the second reboiler is communicated with the bottom of the second distillation tower.
[0020] Through the design of the above scheme, the first reboiler and the second reboiler can be heated by heat recovery, which effectively reduces energy consumption;
[0021] In some embodiments, the first reboiler and the second reboiler each include: a tank, a heating tube, and a temperature control system;
[0022] The tank body forms a cavity for containing the liquid phase material at the bottom of the tower; a heating pipe for heating the liquid phase material at the bottom of the tower in the cavity is arranged on the side wall of the tank body;
[0023] Among them, the tank bodies are all provided with connecting pipes for the circulation of gas phase materials at the top of the tower; the connecting pipe located on the first reboiler is connected to the top of the second distillation tower; the connecting pipe located on the second reboiler is connected to the top of the third distillation tower.
[0024] Through the design of the above scheme, it is possible to heat the tank body by assisting the gas phase at the top of the tower through the heating pipe, and automatically control the internal temperature through the temperature control system to stabilize the heating temperature.
[0025] In some embodiments, the temperature control system includes:
[0026] A thermometer is disposed in the cavity and is used to detect the temperature inside the cavity;
[0027] The heater is arranged outside the tank and connected to the heating pipe;
[0028] An information processing module is arranged on the tank body and is electrically connected to the thermometer to receive a temperature signal from the thermometer;
[0029] A controller is disposed on the tank body and electrically connected to the heater, and is used to receive the signal sent by the information processing module and control the increase and decrease of the heater power;
[0030] A cleaning module is connected to the controller to clean impurities on the inner wall of the cavity;
[0031] The cleaning module includes a scraper movably arranged on the inner wall of the cavity and a driving device electrically connected to the controller for driving the scraper to realize the wall scraping function.
[0032] Through the design of the above scheme, the heating temperature is detected in real time by a thermometer, and the temperature stability is determined by the information processing module; then the heater is controlled to be turned on and off by the controller to assist in the heating of the heating tube; after working for a long time, the information processing module finds that the heating speed is reduced, and then it is cleaned through the cleaning module, thereby improving the effect of heat conduction.
[0033] In some embodiments, a guide rod for guiding the scraper to move along the axial direction of the tank body is fixedly arranged at the center of the tank body;
[0034] A filter plate for loading a scraper is movably arranged on the guide rod;
[0035] The guide rod is hollow, and a wire rod is rotatably arranged inside the guide rod;
[0036] The surface portion of the guide rod penetrates into the interior of the guide rod to form a limiting portion;
[0037] The filter plate part passes through the limiting part and engages with the screw rod;
[0038] The limiting portion extends along the axial direction of the guide rod, and the extension track is spiral on the side wall of the guide rod.
[0039] Through the arrangement of the above-mentioned solution, when cleaning, the filter plate can drive the impurities to gather; the scraper can clean the impurities on the inner wall of the cavity.
[0040] In some embodiments, a scraper is disposed on the side wall of the filter plate for movement;
[0041] The scraper is connected to the filter plate through an elastic member, and the elastic member always gives the scraper an elastic force away from the central axis in the radial direction of the filter plate;
[0042] The surface of the scraper that contacts the inner wall of the cavity forms a scraper strip;
[0043] The extension direction of the scraper strip is consistent with the extension track of the limiting portion.
[0044] Through the design of the above solution, the elastic member can make the scraper contact the inner wall of the cavity, thereby improving the cleaning effect.
[0045] In some embodiments, a partition is provided on a side wall located in the cavity at one end away from the filter plate;
[0046] A plurality of diversion holes are arranged on the surface of the partition;
[0047] The side of the cavity located away from the filter plate is defined as the sewage discharge area.
[0048] Through the design of the above scheme, the impurities gathered on the filter plate can enter the sewage discharge area through the guide holes, thereby performing the sewage discharge process.
[0049] In some embodiments, a surface portion of the guide rod located in the sewage discharge area is radially penetrated to form a sewage inlet for impurities to enter the interior of the guide rod;
[0050] A turbine is rotatably arranged in the sewage inlet;
[0051] Wherein, a spiral blade is arranged in the guide rod at one side of the turbine.
[0052] In some embodiments, the end portion of the guide rod protrudes from one end of the tank body to form a sewage outlet;
[0053] The spiral blade is located at the sewage outlet.
[0054] Through the arrangement of the above scheme, sewage treatment can be carried out through the spiral blades.
[0055] The beneficial effect of the present application is that it provides a bulkhead heat-coupled distillation device for polysilicon production, which can automatically detect the temperature inside the tank and control the heating temperature through a temperature control system, thereby controlling energy consumption. BRIEF DESCRIPTION OF THE DRAWINGS
[0056] The drawings constituting a part of this application are used to provide a further understanding of this application, so that other features, purposes and advantages of this application become more obvious. The illustrative embodiment drawings and their descriptions of this application are used to explain this application and do not constitute an improper limitation on this application.
[0057] In addition, throughout the drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and that the components and elements are not necessarily drawn to scale.
[0058] In the attached picture:
[0059] Figure 1 is a process flow chart according to Example 1 of the present application;
[0060] Figure 2 It is a schematic diagram of the structure of part of the second embodiment, mainly showing the structure of the tank body;
[0061] Figure 3 It is a schematic diagram of the structure of part of the second embodiment, mainly showing the half-section structure of the tank body;
[0062] Figure 4 It is a schematic diagram of the structure of part of the second embodiment, mainly showing the structure of the heating tube;
[0063] Figure 5 It is a schematic diagram of the structure of part of the second embodiment, mainly showing the structure of the guide rod and the limiting part;
[0064] Figure 6 It is a structural schematic diagram of part of the second embodiment, mainly showing the explosion structure of the filter plate and the scraper;
[0065] Figure 7 It is a schematic diagram of the structure of part of the second embodiment, mainly showing the structure of the turbine and the spiral blades;
[0066] Figure 8 It is a schematic diagram of the temperature control system in the second embodiment.
[0067] Reference numerals:
[0068] 1. The first distillation tower; 2. The second distillation tower; 3. The third distillation tower; 4. The condenser; 5. The first reboiler; 6. The second reboiler; 7. The third reboiler; 8. The tank; 9. The heating tube; 12. The cleaning module; 13. The scraper; 14. The driving device; 15. The guide rod; 16. The screw rod; 17. The filter plate; 18. The limiter; 19. The elastic member; 20. The scraper; 21. The partition; 22. The guide hole; 23. The sewage discharge area; 24. The sewage discharge channel; 25. The sewage inlet; 26. The turbine; 27. The spiral blade; 28. The motor; 29. The interlocking groove; 30. The connecting pipe. DETAILED DESCRIPTION
[0069] Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not intended to limit the scope of protection of the present disclosure.
[0070] It should also be noted that, for ease of description, only the parts related to the invention are shown in the drawings. In the absence of conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.
[0071] It should be noted that the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.
[0072] It should be noted that the modifications of "one" and "plurality" mentioned in the present disclosure are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".
[0073] The present disclosure will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.
[0074] Embodiment 1
[0075] Reference Figure 1 , a bulkhead heat-coupled distillation process for polysilicon production, comprising the following steps:
[0076] Step 1: Pour the raw material 100 (in this embodiment, crude trichlorosilane raw material) into the first distillation tower 1. After separation in the first distillation tower 1, the gas phase material 101 at the top of the tower passes through the condenser 4 and is divided into liquid phase reflux material 102 and tower top produced material 103 according to the mass reflux ratio 1000;
[0077] Step 2: The bottom liquid phase material 104 obtained in step 1 is divided into two parts, one part is heated by the first reboiler 5 to form the return steam 106 and returns to the first distillation tower 1, and the other part is used as the bottom produced material 105, and trichlorosilane is produced from the side line in the middle of the first distillation tower 1, and then transported to the second distillation tower 2;
[0078] Step 3: The gaseous material 107 at the top of the second distillation tower 2 enters the first reboiler 5, provides heat for the first reboiler 5, and controls the heating temperature through the temperature control system disposed in the first reboiler 5; condenses into a subcooled liquid through the first reboiler 5, and is divided into a liquid reflux material 108 and a tower top produced material 109 according to a mass reflux ratio of 1100;
[0079] Step 4: The bottom liquid phase material 111 obtained in step 3 is divided into two parts, one part is heated in the second reboiler 6 to form the return steam 110 and returns to the second distillation tower 2, and the other part is used as the bottom produced material 112, and trichlorosilane is produced from the side line in the middle of the second distillation tower 2, and then transported to the third distillation tower 3;
[0080] Step 5: The gaseous material 113 at the top of the third distillation tower 3 enters the second reboiler 6, provides heat for the second reboiler 6, and controls the heating temperature through the temperature control system disposed in the second reboiler 6; condenses into a subcooled liquid through the second reboiler 6, and is divided into a liquid reflux material 114 and a tower top produced material 115 according to a mass reflux ratio of 1300;
[0081] Step 6: The bottom liquid phase material 117 obtained in step 5 is divided into two parts, one part is heated after passing through the third reboiler 7 to form the return steam 116 and returns to the third distillation tower 3, and the other part is used as the bottom produced material 118, and the trichlorosilane product is produced in the middle of the third distillation tower 3;
[0082] Among them, the top pressure of the first distillation tower 1 is 410kPa, the top temperature is 55℃, and the reflux rate / feed rate (L / F)=19; the top pressure of the second distillation tower 2 is 510kPa, the top temperature is 100℃, and the reflux rate / feed rate (L / F)=210; the top pressure of the third distillation tower 3 is 910kPa, the top temperature is 120℃, and the reflux rate / feed rate (L / F)=30.
[0083] Through the setting of the above process, the load of the top condensation of the second distillation tower 2 can match the load of the bottom reboiler of the first distillation tower 1, and the load of the top condensation of the third distillation tower 3 can match the load of the bottom reboiler of the second distillation tower 2, thereby realizing thermally coupled distillation, matching heat exchange, and reducing energy consumption; thereby obtaining high-purity polysilicon products.
[0084] Embodiment 2
[0085] Reference Figure 2-8 , a bulkhead heat-coupled distillation device for polysilicon production, comprising: a first distillation tower 1, a second distillation tower 2, a third distillation tower 3, a condenser 4, a first reboiler 5, a second reboiler 6, and a third reboiler 7;
[0086] Specifically, the first distillation tower 1, the second distillation tower 2 and the third distillation tower 3 are all supported by a support frame and placed vertically on the ground; and the end close to the ground is defined as the bottom of the tower, and the end away from the ground is defined as the top of the tower; the condenser 4 is connected to the first distillation tower 1, and the connection point is located at the top of the first distillation tower 1; wherein, the first reboiler 5 and the second reboiler 6 have the same structure; more specifically, the first reboiler 5 is arranged between the first distillation tower 1 and the second distillation tower 2, and the first reboiler 5 is connected to the bottom of the first distillation tower 1, and is used to introduce the liquid phase at the bottom of the first distillation tower 1 into the first reboiler 5; the first reboiler 5 is connected to the tower body of the first distillation tower 1, and is used to reflux the return tower steam generated by the first reboiler 5 into the first distillation tower 1; the first reboiler 5 is also connected to the top of the second distillation tower 2, so that the gas phase at the top of the second distillation tower 2 is introduced into the first reboiler 5, and the gas phase at the top of the tower provides heat energy for the first reboiler 5;
[0087] The second reboiler 6 is arranged between the second distillation tower 2 and the third distillation tower 3. The second reboiler 6 is connected to the bottom of the second distillation tower 2, so that the liquid phase at the bottom of the second distillation tower 2 is introduced into the second reboiler 6; the second reboiler 6 is connected to the tower body of the second distillation tower 2, so that the return steam generated by the second reboiler 6 is refluxed into the second distillation tower 2; the second reboiler 6 is also connected to the top of the third distillation tower 3, so that the gas phase at the top of the third distillation tower 3 is introduced into the second reboiler 6, and the gas phase at the top provides heat energy for the first reboiler 5;
[0088] Through the above equipment design, heat energy can be recovered and utilized during the distillation process to reduce consumption.
[0089] In some embodiments, the first reboiler 5 and the second reboiler 6 both include: a tank 8, a heating tube 9 and a temperature control system;
[0090] Specifically, the tank body 8 forms a cavity 31 for accommodating the liquid phase material at the bottom of the tower, and a heating pipe 9 for heating the liquid phase material at the bottom of the tower in the cavity 31 is arranged on the side wall of the tank body 8; the tank body 8 can be heated by the arrangement of the heating pipe 9, so that the liquid phase material at the bottom of the tower is gasified; the temperature control system can control the temperature of the tank body 8, so that the heating temperature of the tank body 8 is kept constant;
[0091] More specifically, the outer wall of the tank body 8 forms an interlocking groove 29 for installing the heating tube 9; a connecting pipe 30 is arranged on the inner wall of the interlocking groove 29, wherein the connecting pipe 30 located on the first reboiler 5 is connected to the top of the second distillation tower 2; the connecting pipe located on the second reboiler 6 is connected to the top of the third distillation tower 3;
[0092] In some embodiments, the temperature control system includes: a thermometer, a heater, an information processing module, a controller, and a cleaning module 12;
[0093] Specifically, a thermometer is installed in the cavity 31, and the thermometer is an electronic thermometer for detecting the temperature inside the cavity 31; the information processing module is electrically connected to the thermometer, and the heater includes a heating wire arranged in the heating tube 9; the heater is electrically connected to the controller, and the controller is electrically connected to the information processing module;
[0094] Through the arrangement of the above structure, under normal circumstances, the tank body 8 is heated by the gas phase at the top of the tower, and the thermometer detects the temperature in the tank body 8 in real time and transmits the electrical signal to the information processing module; the information processing module determines; if the information processing module determines that the temperature of the first reboiler 5 is reduced, it will send an execution signal to the controller, and the controller drives the heater to start, so that the heating wire is heated to assist the gas phase at the top of the tower to heat the heating tube 9; when the temperature in the first reboiler 5 reaches the set temperature, the heater is stopped; the gas phase at the top of the tower is used again to heat the tank body 8, thereby saving energy consumption;
[0095] In some embodiments, a cleaning module 12 for cleaning impurities on the inner wall of the cavity 31 is also provided in the tank body 8. The cleaning module 12 can automatically clean the impurities accumulated on the inner wall of the tank body 8, thereby improving the heat transfer efficiency of the heating tube 9.
[0096] Specifically, the cleaning module 12 includes a scraper 13 movably disposed on the inner wall of the cavity 31 and a driving device 14 electrically connected to the controller for driving the scraper 13 to achieve a wall scraping function; the driving device 14 is electrically connected to the controller for controlling the driving of the scraper 13;
[0097] Specifically, a guide rod 15 for guiding the scraper 13 to move along the axial direction of the tank body 8 is fixedly arranged at the center position of the cavity 31, and one end of the guide rod 15 protrudes from the end portion of the tank body 8; the guide rod 15 is in a hollow state, and a screw rod 16 is rotatably arranged in the wall inside the guide rod 15; the screw rod 16 is coaxially arranged with the guide rod 15; specifically, the screw rod 16 is connected to a motor 28 arranged on the outer wall of the tank body 8; the motor 28 is electrically connected to the controller; by controlling the opening and closing of the motor 28; preferably, when the thermometer detects that the heating time is slow during the heating process, the information processing module determines that the heat conduction of the inner wall of the cavity 31 is reduced due to excessive attachment of impurities; therefore, the start signal of the transmission motor is sent to the controller, so that the controller starts the motor;
[0098] A filter plate 17 for loading the scraper 13 is provided on the guide rod 15; specifically, a surface portion of the guide rod 15 penetrates into the interior of the guide rod 15 to form a stopper 18, and a portion of the filter plate 17 passes through the stopper 18 and engages with the screw rod 16; wherein the stopper 18 extends along the axial direction of the guide rod 15, and the extension track is spiral on the side wall of the guide rod 15;
[0099] Specifically, the scraper 13 is movably arranged on the side wall of the filter plate 17; the scraper 13 is connected to the filter plate 17 by an elastic member 19, and the elastic member 19 always gives the scraper 13 an elastic force away from the central axis in the radial direction of the filter plate 17; the elastic member 19 can apply an extrusion force to the scraper 13 on the inner wall of the cavity 31 to improve the scraping effect; the scraper 13 forms a scraping strip 20 on the surface of the scraper 13 that contacts the inner wall of the cavity 31, and the extension direction of the scraper strip 20 is consistent with the extension trajectory of the limiter 18; when scraping impurities on the inner wall of the cavity 31, the scraper strip 20 can have a higher scraping ability, thereby improving the scraping effect;
[0100] By setting the above structure, when the screw rod 16 rotates, it can drive the filter plate 17 to move along the axial direction of the cavity 31. When moving, the filter plate 17 starts to rotate due to the action of the limiter 18, so that the scraper 13 can scrape off the impurities attached to the inner wall of the cavity; the impurities scraped off can be moved along with the movement of the filter plate 17, so that the function of collecting impurities can be achieved;
[0101] In some embodiments, a partition 21 is provided on the side wall of the cavity away from the filter plate 17, and a plurality of guide holes 22 are provided on the surface of the partition 21, wherein the side of the cavity away from the filter plate 17 on the partition 21 is defined as a sewage discharge area 23; as the filter plate 17 moves, the impurities can be driven to move toward the sewage discharge area 23; thereby, the impurities are allowed to enter the sewage discharge area 23 through the guide holes 22, thereby achieving a collection effect;
[0102] Specifically, the guide rod 15 axially penetrates the sewage discharge area 23, and the guide rod 15 located in the sewage discharge area 23 forms a sewage discharge channel 24; the surface portion of the guide rod 15 penetrates into the sewage discharge channel 24 to form a sewage inlet 25; a turbine 26 is rotatably arranged on the inner wall of the sewage discharge channel 24, and the turbine 26 is connected to the screw rod 16; when the screw rod 16 rotates, it can drive the turbine 26 to rotate, thereby guiding the liquid in the sewage discharge area 23, so that impurities enter the sewage discharge channel 24 from the sewage discharge port;
[0103] Specifically, a spiral blade 27 is provided on one side of the turbine 26 in the sewage channel 24, and a plurality of water-permeable holes are opened on the spiral blade 27; when impurities are sucked into the sewage channel 24 by the turbine 26, the spiral blade 27 transports them so that the impurities gather at the bottom of the sewage pipe; and then they are discharged through the sewage outlet provided at the end of the guide rod 15.
[0104] The above descriptions are only some preferred embodiments of the present disclosure and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the embodiments of the present disclosure is not limited to the technical solutions formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the above inventive concept. For example, the above features are replaced with (but not limited to) technical features with similar functions disclosed in the embodiments of the present disclosure.
Claims
1. A bulkhead thermally coupled distillation device for polysilicon production, characterized in that: include: A first distillation tower, a second distillation tower, a third distillation tower, a condenser, a first reboiler, a second reboiler, and a third reboiler; The first reboiler and the second reboiler both include: a tank, a heating tube and a temperature control system; the temperature control system includes: a cleaning module, wherein the cleaning module includes a scraper movably arranged on the inner wall of the cavity and a driving device electrically connected to the controller for driving the scraper to achieve a wall scraping function; The first distillation tower, the second distillation tower and the third distillation tower are all supported by a support frame and placed vertically on the ground; the end close to the ground is defined as the tower bottom, and the end away from the ground is defined as the tower top; the condenser is connected to the first distillation tower, and the connection point is located at the tower top of the first distillation tower; The first reboiler is disposed between the first distillation tower and the second distillation tower; the first reboiler is connected to the bottom of the first distillation tower; The second reboiler is disposed between the second distillation tower and the third distillation tower, and the second reboiler is communicated with the bottom of the second distillation tower; A guide rod is fixedly disposed at the center of the tank body and is used to guide the scraper to move along the axial direction of the tank body; A filter plate for loading the scraper is movably arranged on the guide rod; The guide rod is hollow, and a wire rod is rotatably arranged inside the guide rod; The surface portion of the guide rod penetrates into the interior of the guide rod to form a limiting portion; The filter plate partially passes through the limiting portion and engages with the screw rod; Wherein, the limiting portion extends along the axial direction of the guide rod, and the extension track is spiral on the side wall of the guide rod; The scraper is movably arranged on the side wall of the filter plate; The scraper is connected to the filter plate via an elastic member, and the elastic member always applies an elastic force to the scraper in the radial direction of the filter plate away from the central axis; The surface of the scraper that contacts the inner wall of the cavity forms a scraper strip; The extension direction of the scraper strip is consistent with the extension track of the limiting portion; A partition is provided on a side wall located in the cavity away from one end of the filter plate; A plurality of guide holes are arranged on the surface of the partition; The side of the chamber located away from the filter plate is defined as the sewage discharge area; The surface portion of the guide rod located in the sewage discharge area is radially penetrated to form a sewage inlet for impurities to enter the interior of the guide rod; A turbine is rotatably arranged in the sewage inlet; Wherein, a spiral blade is arranged in the guide rod on one side of the turbine; The end portion of the guide rod protrudes from one end of the tank body to form a sewage outlet; The spiral blade is located at the sewage outlet.
2. The bulkhead thermally coupled distillation equipment for polysilicon production according to claim 1, characterized in that: The tank body forms a cavity for containing the liquid phase material at the bottom of the tower; a heating pipe for heating the liquid phase material at the bottom of the tower in the cavity is arranged on the side wall of the tank body; Among them, the tank bodies are all provided with connecting pipes for the circulation of gas-phase materials at the top of the tower; the connecting pipe located on the first reboiler is connected to the top of the second distillation tower; the connecting pipe located on the second reboiler is connected to the top of the third distillation tower.
3. The bulkhead thermally coupled distillation equipment for polysilicon production according to claim 2, characterized in that: The temperature control system comprises: A thermometer is disposed in the cavity and is used to detect the temperature inside the cavity; A heater, arranged outside the tank and connected to the heating pipe; An information processing module is disposed on the tank body and is electrically connected to the thermometer to receive a temperature signal from the thermometer; A controller, disposed on the tank body and electrically connected to the heater, for receiving a signal sent by the information processing module and controlling the increase and decrease of the power of the heater; The cleaning module is connected to the controller to clean impurities on the inner wall of the cavity.
Citation Information
Patent Citations
System for separating and purifying trichlorosilane in production process of polysilicon and operation method thereof
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Trichlorosilane differential pressure coupling rectification system and operation method thereof
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