Sample measurement device and sample measurement method

Abstract

The purpose of the present invention is to provide a sample measurement device and a sample measurement method capable of reliably ensuring the alignment accuracy of a sample. A sample measurement device is provided with: a measurement instrument for measuring a sample; a transport device that transports a sample along a transport path to the measuring unit of the measuring instrument; and a position assurance unit for fitting the position assurance sample held by the transport device by driving the transport device.

Description

Technical Field

[0001] The present invention relates to a sample measuring device and a sample measuring method. Background Art

[0002] As a technology related to alignment during transportation using a conveying device, there is a technology described in the following patent document 1. This technology controls the impedance of an object held by an end effector of a robot in a first direction and moves the object in a second direction different from the first direction. At this time, this technology detects whether the mark of the object collides with the recognition part of the inspection gauge, and guides the mark of the object to the recognition part of the inspection gauge to align the object.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2019-115949

[0004] The technology described in Patent Document 1 is a technology applied to determine the quality of a processed part in an object. The positioning accuracy of the object is guaranteed only by the repetitive accuracy of the robot. However, the repetitive accuracy of the robot may deteriorate over time. Therefore, the guarantee of positioning accuracy is not reliable.

[0005] Here, in a sample measuring device that measures a sample by a measuring device, the sample held by a conveying device must be accurately positioned relative to the measuring portion of the measuring device. In such a sample measuring device, the positioning accuracy of the sample is conventionally guaranteed only by the repeatability accuracy of the conveying device. Therefore, when an error occurs in the inspection result, it is impossible to distinguish whether the error is caused by the sample or by the deterioration of the repeatability accuracy of the conveying device. Summary of the invention

[0006] Therefore, an object of the present invention is to provide a sample measurement device and a sample measurement method that can reliably ensure the positioning accuracy of a sample.

[0007] The present invention for achieving the above-mentioned object is a sample measuring device comprising: a measuring device for measuring a sample; a transport device for transporting the sample to a measuring portion of the measuring device along a transport path; and a position ensuring portion for engaging a position ensuring sample held by the transport device through driving of the transport device.

[0008] According to the present invention, it is possible to provide a sample measurement device and a sample measurement method that can reliably ensure the positioning accuracy of a sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a schematic perspective view showing the structure of the sample measurement device according to the first embodiment.

[0010] Figure 2It is a schematic plan view showing the structure of the sample measurement device according to the first embodiment.

[0011] Figure 3 It is a schematic perspective view showing the structure of the box.

[0012] Figure 4 It is a schematic side view showing the structure of the hand of the conveying device.

[0013] Figure 5 It is a top view showing the structure of the positioning portion.

[0014] Figure 6 It is a top view showing the structure of the position ensuring unit.

[0015] Figure 7 It is a side view showing the structure of the position ensuring unit.

[0016] Figure 8 It is a top view showing another example 1 of the position assurance sample.

[0017] Fig. 9 It is a top view showing another example 2 of the position assurance sample.

[0018] Fig.10 This is a flowchart showing the sample measurement method according to the first embodiment of the present invention.

[0019] Fig.11 This is a side view of the main parts showing the structure of the sample measurement device according to the second embodiment (Part 1).

[0020] Fig.12 This is a plan view of the main parts showing the structure of the sample measurement device according to the second embodiment (Part 1).

[0021] Fig.13 This is a side view of the main parts showing the structure of the sample measurement device according to the second embodiment (part 2).

[0022] Fig.14 This is a plan view of the main parts showing the structure of the sample measurement device according to the second embodiment (Part 2).

[0023] Fig.15 This is a perspective view of the main parts showing the structure of the sample measurement device according to the third embodiment (Part 1).

[0024] Fig.16 This is a perspective view of the main parts showing the structure of the sample measurement device according to the third embodiment (part 2).

[0025] Explanation of reference numerals: 1…sample measuring device, 2…sample, 11, 11a…measuring device, 14, 14'…conveying device, 14a, 14a'…hand, 16, 16'…position ensuring portion, 15…positioning portion, 16a…door opening, 17…control portion, 18…operating portion, 31, 31a~31d…sample for position ensuring, 110…measuring portion, 161, 162…first door component, 161a, 162a…X-direction vertical wall, 163, 164…second door component, 163a, 164a…Y-direction vertical wall. DETAILED DESCRIPTION

[0026] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In each embodiment, elements having substantially the same function or structure are denoted by the same reference numerals, and repeated descriptions are omitted.

[0027] <<First Implementation Method>>

[0028] Figure 1 It is a schematic perspective view showing the structure of a sample measurement device according to an embodiment of the present invention. Figure 2 It is a schematic plan view showing the structure of a sample measurement device according to an embodiment of the present invention.

[0029] like Figure 1 as well as Figure 2 As shown, the sample measuring device 1 includes a measuring device 11 for measuring a sample (not shown). The measuring device 11 is provided on a base 10. A box 12, a positioning unit 15, a guaranteed sample storage unit 13, a position guarantee unit 16, and a transport device 14 are arranged on the base 10. In addition, the sample measuring device 1 includes a control unit 17 and an operation unit 18. These units are described below.

[0030] <Measurement device 11>

[0031] The measuring device 11 measures the state of the sample. At least one measuring device 11 is arranged on the base 10, and a structure in which two measuring devices 11 are provided is shown in the example shown in the figure. These measuring devices 11 each have a measuring unit 110. The measuring unit 110 is a part that measures (measures) the sample with respect to a predetermined measurement item. For example, if the measuring device 11 is a device that measures the surface state of the sample, the measuring unit 110 becomes the part that measures the surface state of the sample. The surface state of the sample is the color, surface properties, temperature, and glossiness of the sample. The surface property of the sample is typically the surface roughness of the sample.

[0032] In addition, at least one measuring device 11a among these measuring devices 11 is used to measure an extremely narrow measurement area set in a sample. Such a measuring device 11a requires accurate positioning of the sample to be measured. In the present embodiment, such a measuring device 11a is a device for measuring the color of the sample, that is, a colorimeter. The sample to be measured is arranged so that the non-measurement area set on the measured surface of the sample is close to the measuring part 110 of the measuring device 11a and is opposite to it.

[0033] <Box 12>

[0034] Figure 3 1 is a schematic three-dimensional diagram showing the structure of the box 12. The box 12 is used to store a plurality of samples 2. In addition, the sample 2 is typically a plate-shaped sample, more typically a flat plate-shaped sample. Such a plurality of samples 2 may also have different shapes (i.e., the shape of the measured surface) and sizes when viewed from above.

[0035] The box 12 for storing such a sample 2 has a box-shaped shell 12a and a support portion 12b that supports the sample 2 in the shell 12a. The shell 12a has an open top surface so as not to interfere with (contact) the hand 14a of the conveying device 14 described below. In addition, the shell 12a has an open front surface in order to take and place the sample 2 in a horizontal direction. The support portion 12b is provided in a state protruding from the side circumference of the shell 12a toward the center side, and supports the sample 2 in a horizontal posture. In addition, the support portion 12b is arranged in multiple layers at predetermined intervals in the height direction of the shell 12a. In addition, the support portion 12b of each layer of the box 12 stores the sample 2 in a state where the measured surface faces downward.

[0036] <Guarantee sample storage department 13>

[0037] Back to Figure 1 as well as Figure 2 The guarantee sample storage unit 13 is a portion for storing the plate-shaped guarantee sample 3. The guarantee sample 3 (only Figure 2 ) are a position assurance sample 31 and a color assurance sample 32. These assurance samples 3 are preferably of the same shape as the sample 2, and are flat plate-like samples.

[0038] Among them, the position guarantee sample 31 is used to guarantee the alignment accuracy of the sample by the conveying device 14. In addition, when the measuring device 11a is a colorimeter, the color guarantee sample 32 is used to ensure that the color detection by the colorimeter is accurately performed. It is preferred that these guarantee samples 3 have a plane shape that can be accurately positioned in the positioning part 15 described below.

[0039] The guarantee sample storage section 13 has a portion for independently placing the position guarantee sample 31 and the color guarantee sample 32 in a predetermined state. The guarantee sample storage section 13 stores the guarantee sample 3 with the surface to be measured facing downward.

[0040] <Conveying device 14>

[0041] The conveying device 14 holds the sample 2 stored in the box 12 and the guarantee sample 3 stored in the guarantee sample storage unit 13, and conveys the held sample 2 and the guarantee sample 3 along a predetermined route. Such a conveying device 14 is composed of a multi-axis robot. In this embodiment, as an example, the conveying device 14 is composed of a six-axis robot. The six-axis robot as the conveying device 14 is equipped with a force sensor (six-axis force sensor) not shown. In addition, the conveying device 14 is equipped with a hand 14a for holding the sample. The hand 14a is arranged at the front end of the six-axis robot constituting the conveying device 14.

[0042] Figure 4 FIG. 1 is a schematic side view showing the structure of the hand 14a of the conveying device 14. Figure 4 As shown, the hand 14a of the conveying device 14 holds the sample 2 and the guarantee sample 3 by vacuum adsorption, for example. Such a hand 14a has a hand frame 141 extending from the front end of the six-axis robot. A suction pad 143 is arranged at the front end of the hand frame 141 via a vacuum generator 142. The suction pad 143 is a rubber cylindrical member, and adsorbs one main surface of the sample 2 or the guarantee sample 3 by driving the vacuum generator 142 and holds these samples. The suction pad 143 adsorbs the back side of the sample 2 and the guarantee sample 3 relative to the measured surface [S].

[0043] The transport device 14 including the hand 14 a as described above holds the sample 2 and the guarantee sample 3 and transports them along a predetermined route under the control of the control unit 17 described below.

[0044] <Positioning section 15>

[0045] Figure 5 It is a plan view showing the structure of the positioning portion 15 . Figure 5 The positioning unit 15 shown is a part that performs positioning of the sample 2 and the guarantee sample 3. The positioning mentioned here refers to the determination of the posture and position of the sample 2 and the guarantee sample 3. The posture is the X, Y, and Z directions given to the sample 2 and the guarantee sample 3. In addition, the position is the coordinate position in the coordinate system of the sample measurement device 1. This positioning is performed in order to hold the sample 2 and the guarantee sample 3 in a predetermined state by the conveying device 14.

[0046] The positioning part 15 has a first positioning part 151 and a second positioning part 152. The first positioning part 151 and the second positioning part 152 are planar L-shaped members erected on the base 10. The second positioning part 152 is arranged 90 degrees rotated with respect to the first positioning part 151 on the XY plane of the base 10.

[0047] The first positioning portion 151 and the second positioning portion 152 include an X-end wall 15x and a Y-end wall 15y. The X-end wall 15x and the Y-end wall 15y are vertical walls and form an angle of 90 degrees with each other.

[0048] The positioning using the positioning portion 15 uses either the first positioning portion 151 or the second positioning portion 152 according to the shapes of the sample 2 and the guarantee sample 3. In this case, the edge of the sample 2 or the guarantee sample 3 abuts against the X end wall 15x and the Y end wall 15y. Thus, the posture and position of the flat sample 2 and the guarantee sample 3 are determined.

[0049] Here, the planar shapes of the sample 2 and the guarantee sample 3 are square or rectangular as shown in the figure, but the planar shapes of the sample 2 and the guarantee sample 3 are not limited thereto. The planar shape of the sample 2 may be a triangle or other polygon, or a circle.

[0050] <Position securing unit 16>

[0051] Figure 6 1 is a top view showing the structure of the position ensuring unit 16. Figure 7 It is a side view showing the structure of the position ensuring unit 16 . Figure 6 as well as Figure 7 The position assurance unit 16 shown is a part for performing position assurance using the position assurance sample 31. This position assurance is the assurance of the positioning accuracy of the sample. This position assurance includes the assurance of the holding position of the sample 2 and the assurance sample 3 by the conveying device 14 and the assurance of the conveying path. Such a position assurance unit 16 is engaged with the position assurance sample 31 held by the conveying device 14. The position assurance unit 16 engages with the position assurance sample 31 in a non-contact manner and allows it to pass.

[0052] The position securing part 16 has first door members 161, 162 and second door members 163, 164 which are erected on the upper part of the base 10. In addition, the X, Y, and Z directions of the position securing part 16 described below are the same as those of the positioning part 15 (refer to Figure 5 ) is the same direction as the X, Y, and Z directions given to the position securing sample 31. In order to maintain a predetermined distance from the floor of the position securing unit 16, the Z direction is given in consideration of the thickness of the position securing sample 31.

[0053] The first gate members 161 and 162 have X-direction vertical walls 161a and 162a extending in the X-direction. These X-direction vertical walls 161a and 162a are arranged opposite to each other to form a first gate 16y opened in the Y-direction. The X-direction vertical walls 161a and 162a are arranged at a predetermined gate interval [Wy] in the Y-direction. The gate interval [Wy] is larger than the width [ay] of the position assurance sample 31 in the Y-direction when viewed from above.

[0054] Such first door components 161 and 162 are arranged so that the position ensuring sample 31 can be fitted and passed from the X direction. In this case, the position ensuring sample 31 is in a state of being aligned with the X, Y, and Z directions of the position ensuring unit 16. In addition, the difference between the width [ay] in the Y direction of the position ensuring sample 31 and the gate interval [Wy] of the first door 16y can be a value small enough to satisfy the position accuracy required for the measurement in the measuring device 11a.

[0055] The second door components 163 and 164 have Y-direction vertical walls 163a and 164a extending in the Y direction. These Y-direction vertical walls 163a and 164a are arranged opposite to each other to form a second door 16x opened in the X direction. The Y-direction vertical walls 163a and 164a are arranged at a predetermined door interval [Wx] in the X direction. The door interval [Wx] is larger than the width [ax] of the position assurance sample 31 in the X direction when viewed from above.

[0056] Such second door components 163 and 164 are arranged so that the position assurance sample 31 can be fitted and passed from the Y direction. In this case, the position assurance sample 31 is in a state where the posture is consistent with the X, Y, and Z directions of the position assurance unit 16. In addition, the difference between the width [ax] of the position assurance sample 31 in the X direction and the gate interval [Wx] of the second door 16x can be a value small enough to satisfy the position accuracy required for the measurement in the measuring device 11a.

[0057] The position assurance sample 31 is driven by the conveying device 14 and passes through the first door 16y and the second door 16x of the position assurance unit 16. In the initial state, the conveying path of the conveying device 14 is set so that the position assurance sample 31 passes through the first door 16y and the second door 16x in a non-contact manner. At this time, the intervals [d] between the first door 16y and the second door 16x and the position assurance sample 31 are equal. Therefore, it is preferable to set the conveying path of the conveying device 14 so that the position assurance sample 31 passes through the center of the first door 16y and the second door 16x.

[0058] In the initial state, the conveying path of the conveying device 14 is set so that the interval between the base 10 as the bottom surface and the position ensuring sample 31 is maintained at a predetermined interval. The predetermined interval may be a value small enough to satisfy the position accuracy required for measurement by the measuring device 11a.

[0059] also, Figure 6 Although the position securing sample 31 is shown as having a rectangular shape, the position securing sample 31 is not limited thereto.

[0060] Figure 8 1 is a top view showing another example 1 of the position securing sample 31a. As shown in the figure, the planar shape of the position securing sample 31a may also be a triangle. The position securing sample 31a having a planar shape is, for example, placed in the above-mentioned positioning portion 15 (see Figure 5 ), the coordinate position is determined by the orientation in which one base of the triangle is parallel to the X direction. In this case, the gate interval [Wy] of the first gate 16y is larger than the distance [ay'] between the base and the vertex of the position assurance sample 31a. In addition, the gate interval [Wx] of the second gate 16x is larger than the length [ax'] of the base.

[0061] Fig. 9 2 is a top view showing another example 2 of the position guarantee sample 31b. As shown in the figure, the planar shape of the position guarantee sample 31b may also be a circle. When the circular position guarantee sample 31b is used, the gate interval [Wy] of the first gate 16y and the gate interval [Wx] of the second gate 16x are larger than the diameter [2r] of the circle.

[0062] also, Figure 2 The state where the position ensuring portion 16 is placed horizontally on the base 10 is shown. However, the installation state of the position ensuring portion 16 is not limited to this, and the position ensuring portion 16 may be installed vertically on the base 10.

[0063] <Control unit 17>

[0064] Back to Figure 1 as well as Figure 2 The control unit 17 includes, for example, a CPU (Central Processing Unit), a ROM (Read Only Memory), and a RAM (Random Access Memory) as hardware resources of a computer. The control unit 17 comprehensively controls the operation of each unit of the sample measurement device 1 by having the CPU read a predetermined program from the ROM, expand it in the RAM, and execute the expanded program.

[0065] The control unit 17 controls the position assurance operation using the position assurance sample 31. In addition, the control unit 17 controls the color measurement operation of the color assurance sample 32. Furthermore, the control unit 17 controls the measurement operation of the sample 2 stored in the box 12. In the following sample measurement method, such control by the control unit 17 will be described in detail.

[0066] <Operation section 18>

[0067] The operation unit 18 includes a display unit that displays various information to the user who uses the sample measurement device 1. In addition, the operation unit 18 includes an input unit that receives input of various information from the user. Such an operation unit 18 functions as a user interface.

[0068] The information input from the operation unit 18 includes information related to the sample 2 stored in the box 12, and information related to the position guarantee sample 31 and the color guarantee sample 32 stored in the guarantee sample storage unit 13. The information related to the sample 2 includes information indicating the type of the sample 2, information indicating the size (including shape) of the sample 2, and information specifying the box 12 storing the sample 2. In addition, the information related to the position guarantee sample 31 and the color guarantee sample 32 includes information indicating the size (including shape) of the position guarantee sample 31 and the color guarantee sample 32, and information related to the storage position. These information are input by the user by operating the operation unit 18 before starting the operation of the sample measurement device described later.

[0069] The information input from the operation unit 18 also includes instruction information for starting measurement and instruction information for starting a securing operation.

[0070] <Sample measurement method>

[0071] Fig.10 1 is a flow chart showing a sample measurement method according to a first embodiment of the present invention. Figure 1 The steps shown in the flowchart are implemented by using the sample measurement program held by the control unit 17 of the sample measurement device 1 shown in FIG. Fig.10 The process shown in the previous Figures 1 to 9 At the same time, the sample measurement method of the implementation mode is described.

[0072] - Step S1 -

[0073] In step S1 , the control unit 17 performs position securing processing according to the following procedures of steps S101 to S106 .

[0074] [Step S101]

[0075] In step S101, the control unit 17 controls the driving of the transport device 14 to position the position ensuring sample 31. In this case, first, the transport device 14 holds the position ensuring sample 31 stored in a predetermined state in the ensuring sample storage unit 13, and transports it to the positioning unit 15. The transport device 14 positions the position ensuring sample 31 in accordance with a predetermined process in either the first positioning unit 151 or the second positioning unit 152 that is set in advance, and determines the posture and position of the position ensuring sample 31.

[0076] [Step S102]

[0077] In step S102, the control unit 17 drives the conveying device 14 to cause the hand 14a to hold the predetermined position of the positioned position ensuring sample 31 again. At this time, the conveying device 14 moves the hand 14a to a preset coordinate position (predetermined position) based on the size information of the position ensuring sample 31, and holds the position ensuring sample 31 again. The preset coordinate position refers to the center position of the position ensuring sample 31 in the state of being positioned by the positioning unit 15.

[0078] [Step S103]

[0079] In step S103, the control unit 17 drives the conveying device 14 to make the position ensuring sample 31 perform a measurement operation. At this time, the conveying device 14 conveys the position ensuring sample 31 held by the hand 14a to the measuring device 11. The conveying device 14 arranges the measured surface of the position ensuring sample 31 to face the measuring section 110 of each measuring device 11 in sequence. The measured surface is the surface on the opposite side to the surface held by the hand 14a of the conveying device 14. In addition, in this measurement operation, only the conveying device 14 needs to carry out the conveying of the position ensuring sample 31, and the measurement of each measuring device 11 is not required.

[0080] [Step S104]

[0081] In step S104, the control unit 17 drives the conveying device 14 to make the position securing sample 31 perform the position securing operation. At this time, the conveying device 14 conveys the held position securing sample 31 to the position securing unit 16. The conveying device 14 holds the position securing sample 31 in a predetermined state. The predetermined state refers to a state in which the orientation of the position securing sample 31 in the X-Y direction is consistent with the orientation of the position securing unit 16 in the X-Y direction.

[0082] In this state, the conveying device 14 fits the position assurance sample 31 with respect to the first door 16y of the position assurance unit 16 from the X direction. Then, the conveying device 14 conveys the held position assurance sample 31 in the X direction so that it passes through the first door 16y. In addition, the conveying device 14 fits the position assurance sample 31 with respect to the second door 16x of the position assurance unit 16 from the Y direction. Then, the conveying device 14 conveys the held position assurance sample 31 in the Y direction so that it passes through the second door 16x. In addition, when passing through the first door 16y and the second door 16x, the position assurance sample 31 is kept at a predetermined interval with respect to the bottom surfaces of the first door 16y and the second door 16x.

[0083] [Step S105]

[0084] In step S105, the control unit 17 determines whether the position assurance based on the position assurance sample 31 is completed. The control unit 17 performs this judgment based on the signal from the force sensor of the conveying device 14. During the position assurance action of step S104, if the control unit 17 does not detect a signal that the position assurance sample 31 is in contact with the first door 16y, the second door 16x and other structures, the control unit 17 determines that the position assurance is completed (yes). In this case, the process proceeds to step S106. On the other hand, during the position assurance action of step S104, if the control unit 17 detects a signal that the position assurance sample 31 is in contact with a structure, the control unit 17 determines that the position assurance is not completed (no). In this case, the process proceeds to step S2.

[0085] - Step S2 -

[0086] In step S2, the control unit 17 stops the specimen inspection apparatus. In this case, the control unit 17 sends the determination result of step S105 to the operation unit 18. The operation unit 18 notifies that the position assurance is not completed by display or sound.

[0087] [Step S106]

[0088] Meanwhile, in step S106, the control unit 17 stores the position securing sample 31 in the securing sample storage unit 13 by driving the transport device 14. At this time, the transport device 14 places the position securing sample 31 in the securing sample storage unit 13 in a predetermined state.

[0089] -Step S3-

[0090] In step S3, the control unit 17 performs color assurance processing. At this time, the control unit 17 positions the color assurance sample 32 by driving the conveying device 14. This positioning action is the same as the action described in step S101. Next, the control unit 17 drives the conveying device 14 to keep the hand 14a at the center position of the positioned color assurance sample 32. This action is the same as the action described in step S102. Thereafter, the control unit 17 measures the color assurance sample 32 by driving the conveying device 14. This measuring action is the same as the action described in step S103. However, in this measuring action, the conveying device 14 conveys the color assurance sample 32 and each measuring device 11 measures the color assurance sample 32. In addition, the control unit 17 sends the measurement result to the operation unit 18.

[0091] - Step S4 -

[0092] In step S4, the control unit 17 performs measurement processing on the sample. At this time, the control unit 17 takes out the sample 2 from the box 12 by driving the conveying device 14, and positions the taken out sample 2. This positioning action is the same action as the action described in step S101. Next, the control unit 17 drives the conveying device 14 to make the hand 14a maintain the center position of the positioned sample 2. This action is the same action as the action described in step S102. Thereafter, the control unit 17 measures the sample 2 by driving the conveying device 14. This measurement action is the same action as the action described in step S103. However, in this measurement action, the conveying device 14 transports the sample 2 and each measuring device 11 measures the sample 2. Thereafter, the control unit 17 stores the sample 2 in another box 12 by driving the conveying device 14. The other box 12 refers to a box 12 different from the box 12 from which the sample 2 to be measured is taken out.

[0093] This step S4 is repeated in a preset order for a plurality of samples 2. When the measurement process for the set plurality of samples 2 is completed, the sample measurement flow ends.

[0094] Furthermore, the sample measurement method of the present invention is not limited to Fig.10 For example, the process of steps S1 to S4 may be repeated each time the measurement process of the preset number of samples 2 is completed in step S4. In addition, after the measurement process of the samples is performed, the position guarantee process (step S1) and the color guarantee process (step S3) may be performed.

[0095] <Effects of the First Embodiment>

[0096] In the first embodiment described above, the position securing sample 31 is fitted with the position securing unit 16 by the conveyance of the conveyance device 14, thereby securing the holding position and the moving path of the position securing unit 16 by the conveyance device 14 with high accuracy. Therefore, the positioning accuracy of the sample conveyed to the measuring device 11 by the conveyance device 14 can be secured.

[0097] Thus, for example, the sample 2 can be measured while its predetermined position reliably corresponds to the measuring unit 110 of the measuring device 11a. Therefore, it is possible to perform a highly accurate measurement. Furthermore, when an error occurs in the measurement result, it can be determined that the cause of the error is not the deterioration of the conveying device 14 or the positioning unit 15 over time, and the cause of the error can be distinguished.

[0098] In addition, the position assurance operation is configured to be performed after the measurement operation using the position assurance sample 31. Thus, for example, when a malfunction occurs in the conveying device 14 during the measurement operation, the occurrence of the malfunction can be checked during the position assurance operation. Therefore, the sample alignment accuracy can be ensured through all operations from alignment in the alignment unit 15 to measurement in the measuring device 11a.

[0099] Second Implementation Method

[0100] Fig.11 1 is a side view of the main parts showing the structure of the sample measuring device of the second embodiment. Fig.12 1 is a top view of the main parts of the structure of the sample measuring device of the second embodiment. As shown in these figures, the hand 14a' of the conveying device 14' possessed by the sample measuring device can also be configured to hold the sample or the guarantee sample by gripping. Such a hand 14a' has a gripping claw 147 at the front end of the hand frame 141 extending from the front end of the six-axis robot. The gripping claw 147 can be two claws or can be configured to have three claws or more claws. In addition, a gripping claw 147 with two claws is shown in the accompanying drawings. These gripping claws 147 grip the sample or the guarantee sample between the plurality of gripping claws 147 by bringing the front end sides close to each other.

[0101] In this case, Fig.11 as well as Fig.12The position securing sample 31c shown is configured so that the gripping claw 147 gripping the position securing sample 31c does not protrude from the outer periphery of the position securing sample 31c. As an example, the position securing sample 31c is configured to have a plurality of recesses 301 on the outer periphery. The recesses 301 are arranged corresponding to the gripping claws 147 of the hand 14a'. The conveying device 14' grips the position securing sample 31c by bringing the front ends of the gripping claws 147 inserted into the recesses 301 of the position securing sample 31c closer to each other.

[0102] Fig.13 This is a side view of the main parts showing the structure of the sample measuring device of the second embodiment (part 2). Fig.14 1 is a top view of the main part of the structure of the sample measuring device of the second embodiment (part 2). As shown in these figures, the position ensuring sample 31d can also be configured to have a gripped portion 302 installed on the back side of the measured surface [S]. The gripped portion 302 has a shape that can be gripped by the gripping claw 147 of the hand 14a'. The conveying device 14' holds the position ensuring sample 31d by gripping the gripped portion 302 of the position ensuring sample 31d. The gripped portion 302 is attached to the position ensuring sample 31d so that the gripping claw 147 gripping the position ensuring sample 31d does not protrude from the outer periphery of the position ensuring sample 31d.

[0103] <Effects of the Second Embodiment>

[0104] As described above, even if the hand 14a' of the transport device 14' is formed by the gripping claw 147, the recess 301 (see FIG. 1 ) can be provided for the sample 31 in the position securing manner. Fig.12 ) or the gripped portion 302 (see Fig.13 ), to perform the position guarantee action described in the first embodiment. The position guarantee action refers to Fig.10 Therefore, the same effect as that of the first embodiment can be obtained.

[0105] 《Third Implementation Mode》

[0106] Fig.15 It is a perspective view of the main parts (part 1) showing the structure of the sample measurement device according to the third embodiment, and is a plan view showing another example of the position ensuring section described in the first embodiment. Fig.15The position assurance portion 16' shown has a gate opening 16a. When the position assurance sample 31 is moved in one direction, the gate opening 16a fits the position assurance sample 31 in two directions perpendicular to the moving direction. Such a gate opening 16a has, for example, a shape similar to the planar shape of the plate-shaped position assurance sample 31. The gate opening 16a is an opening that allows the position assurance sample 31 that moves in one direction to pass through.

[0107] Fig.16 2 is a perspective view of the main parts showing the structure of the sample measuring device according to the third embodiment (part 2). Fig.16 As shown, the position securing portion 16' may be arranged so that the door opening 16a faces the measuring portion 110 of the measuring device 11a. The measuring device 11a is a structure that requires the positioning accuracy of the sample relative to the measuring portion 110. In this case, the planar shape of the position securing sample 31 and the door opening 16a is sufficiently larger than the planar shape of the measuring sample whose illustration is omitted here.

[0108] <Effects of the Third Embodiment>

[0109] Even the structure of the third embodiment can obtain the same effect as the first embodiment. In addition, when the position guarantee unit 16' of the third embodiment is arranged opposite to the measuring unit 110 of the measuring device 11a, the measurement operation using the position guarantee sample 31 and the position guarantee operation can be performed simultaneously. The measurement operation is Fig.10 The position guarantee action is the measurement action of step S103. Fig.10 The position assurance action of step S104 is performed.

[0110] In order to explain the present invention in an easy-to-understand manner, the above-mentioned embodiment has been described in detail, but the present invention is not limited to the above-mentioned embodiment and modified examples. For example, the sample 2 may be positioned in the box 12. In this case, the sample storage unit 13 for guaranteeing has a positioning function, and there is no need to provide the positioning unit 15.

Claims

1. A sample measuring device, wherein: have: A measuring device for measuring a sample; a transport device that transports the sample to the measuring portion of the measuring device along a transport path; and The position ensuring unit engages the position ensuring sample held by the transport device by driving the transport device.

2. The sample measurement device according to claim 1, wherein: A positioning unit is provided for positioning the position and posture of the position assurance sample to a predetermined state. The transport device fits the position ensuring sample positioned in the positioning portion into the position ensuring portion.

3. The sample measurement device according to claim 1, wherein: The position securing section fits the position securing sample in two perpendicular directions set for the position securing sample.

4. The sample measurement device according to claim 3, wherein: The position ensuring part has a plurality of door components vertically arranged on the bottom surface. The plurality of door components include vertical walls arranged opposite to each other. The transport device fits the position assurance sample between the vertical walls of the gate member and allows the position assurance sample to pass therethrough.

5. The sample measurement device according to claim 4, wherein: The transport device maintains a predetermined distance between the position assurance sample and the bottom surface between the vertical walls of the gate member.

6. The sample measurement device according to claim 3, wherein: The position securing portion has a door opening into which the position securing sample is fitted. The transport device transports the position ensuring sample in one direction perpendicular to the two directions, thereby fitting the position ensuring sample into the door opening of the position ensuring portion.

7. The sample measurement device according to claim 6, wherein: The door opening of the position ensuring portion is arranged to face the measuring portion of the measuring device.

8. The sample measurement device according to claim 1, wherein: The position securing portion is fitted to the position securing sample in a non-contact manner.

9. The sample measurement device according to claim 1, wherein: A control unit for controlling the conveying device is provided, The conveying device has a force sensor. The control unit stops driving the conveying device when determining based on the signal from the force sensor that the position securing sample is not engaged with the position securing unit.

10. The sample measurement device according to claim 9, wherein: The control unit fits the position securing sample into the position securing unit after the position securing sample is transported to the measuring device.

11. The sample measurement device according to claim 10, wherein: The control unit controls the transport device so that the position securing sample is transported to the measuring device and a predetermined position of the position securing sample is matched with a measurement position of the measuring device.

12. The sample measurement device according to claim 11, wherein: The transport device holds a predetermined position of the position securing sample based on the size information of the position securing sample.

13. The sample measurement device according to claim 1, wherein: A control unit for controlling the conveying device is provided, The control unit engages the position securing sample with the position securing unit before or after starting a task of the measurement device to measure the sample or every time a predetermined number of samples are measured.

14. The sample measurement device according to claim 1, wherein: The transport device includes a hand that holds the sample and the position securing sample by suction.

15. The sample measurement device according to claim 1, wherein: The measuring device measures the surface condition of the sample.

16. The sample measurement device according to claim 15, wherein: The surface state of the sample is at least one of the color, surface quality, and glossiness of the sample.

17. A sample measurement method, which is a sample measurement method performed by a sample measurement device, the sample measurement device comprising a measurement device for measuring a sample, and a conveying device for conveying the sample to a measurement portion of the measurement device along a conveying path, wherein: The control unit ensures the position accuracy of the transport by the transport device by driving the transport device so that the position ensuring sample held by the transport device is engaged with the position ensuring unit.

18. The sample measurement method according to claim 17, wherein: After the position and posture of the position securing sample are positioned in a predetermined state in the positioning unit, the control unit fits the position securing sample into the position securing unit.

19. The sample measurement method according to claim 18, wherein: After the positioned position ensuring sample is transported to the measuring device, the control unit causes the position ensuring sample to fit into the position ensuring unit.

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