Magnetorheological polishing equipment and method based on machine vision adjustment

Abstract

The present invention relates to the field of optical processing technology, and in particular to a magnetorheological polishing device and method based on machine vision adjustment. The device includes a robot, a control unit, an actuator group, a magnetorheological processing module, and a machine vision device. The magnetorheological processing module is arranged at the free end of the robot through the actuator group. The robot drives a polishing wheel in the magnetorheological processing module to process an optical element using magnetorheological fluid as a medium, and the machine vision device measures the ribbon thickness of the magnetorheological fluid during the processing. In the method, the real-time change of the ribbon thickness of the magnetorheological fluid during the processing is measured by the machine vision device, and the supply system, nozzle, and actuator group are then adjusted in real time to achieve real-time constant control of the removal function.

Description

Technical Field

[0001] The present invention belongs to the field of optical processing technology, and in particular relates to a magnetorheological polishing device and method based on machine vision adjustment. Background Art

[0002] Magnetorheological finishing (MRF) is an advanced optical manufacturing technology that has been developed in recent years. It offers numerous advantages, including stable removal performance, controllable edge effects, minimal subsurface damage, no photocopying, strong shape-modifying capabilities, and high machining accuracy. Consequently, MRF has garnered widespread attention in high-precision optical processing. The hardware of existing magnetorheological polishing equipment mainly includes three parts: motion actuator, circulation system and polishing wheel module. The motion actuator is usually a CNC machine tool, but CNC machine tools have some shortcomings (such as low degree of freedom, large footprint, high cost, etc.), which limit the deviation of aspheric surfaces and make it difficult to perform precise posture control along the surface normal. The most important component in the circulation system is the supply source. Peristaltic pumps and centrifugal pumps are currently the main types of magnetorheological fluid supply sources. Peristaltic pumps will produce a pulse effect when working, which in turn affects the stability of the magnetorheological fluid in pipeline transportation, and ultimately affects the stability of the removal function. The centrifugal pump has a small pulse effect when working, and the magnetorheological fluid is more stable when transported in the pipeline, and has less impact on the change of the removal function. Therefore, it is more suitable for magnetorheological supply systems. However, there is still a major problem with using a centrifugal pump as the supply source for the magnetorheological fluid supply system: when the water outlet (nozzle) of the supply system is processed along the curved surface of the optical component, the nozzle will move up and down within the working area. When the position of the centrifugal pump is constant, the pressure between the centrifugal pump and the nozzle will change, and the originally stable magnetorheological fluid will also change. The thickness and width of the ribbon formed by the magnetorheological fluid after passing through the polishing gap will also change accordingly, resulting in a change in the removal function and affecting the final processing accuracy.

[0003] In response to these shortcomings of CNC machine tools, researchers have introduced six-degree-of-freedom industrial robots into the field of optical processing in recent years. Six-degree-of-freedom industrial robots have the advantages of high degrees of freedom, small footprint, large processing range, and low cost, which make up for the shortcomings of CNC machine tools. Therefore, when the magnetorheological polishing module is integrated into the industrial robot, it is theoretically possible to achieve high-precision processing of large-aperture complex curved optical components.

[0004] However, due to the influence of factors such as processing, assembly, load, trajectory planning and reduction ratio, the execution accuracy of the robot's free end is low, and the polishing gap changes greatly during the processing. At the same time, magnetorheological polishing technology is an optical processing technology with high certainty of the removal function. The requirements for the change of the polishing gap during the polishing process are high. Generally, the polishing gap of the magnetorheological CNC machining center changes in tens of microns (PV<0.1mm), while the trajectory accuracy of common commercial robots is generally in the sub-millimeter to millimeter range. This leads to large changes in the polishing gap during the processing. The thickness of the ribbon will change after the magnetorheological fluid passes through the polishing gap, and the certainty of the removal function is reduced, affecting the final processing accuracy. Therefore, the motion accuracy of the current commercial large-scale six-degree-of-freedom industrial robots often cannot meet the requirements of magnetorheological polishing technology for the change of the removal function during high-precision polishing.

[0005] For the flow rate change problem in the centrifugal pump supply system, the commonly used method is to add a follower device to keep the vertical distance between the centrifugal pump and the nozzle outlet unchanged. However, these methods require the additional follower device to have high motion performance to keep the vertical distance from the nozzle unchanged at all times. Some solutions even place the follower device on the Z-axis of the CNC machine tool, which undoubtedly increases the motion load and equipment cost of the motion mechanism and reduces the motion performance of the equipment. In addition, the follower device cannot strictly guarantee the constant vertical distance between the centrifugal pump and the nozzle, resulting in changes in the removal function and affecting the final processing accuracy. Summary of the Invention

[0006] In view of this, the present invention aims to provide a magnetorheological polishing device and method based on machine vision adjustment, which measures the real-time change of the thickness of the magnetorheological fluid ribbon during the magnetorheological processing by machine vision equipment, and adjusts the supply system, nozzle and actuator in the magnetorheological processing module in real time, thereby achieving real-time constant control of the removal function.

[0007] To achieve the above object, the technical solution created by the present invention is implemented as follows:

[0008] A magnetorheological polishing device based on machine vision adjustment includes a robot, a control unit, an actuator group, a magnetorheological processing module, and a machine vision device. The actuator group is arranged at the free end of the robot, and the magnetorheological processing module is arranged at the output end of the actuator group. The robot drives the polishing wheel in the magnetorheological processing module to process optical components using magnetorheological fluid as a medium. During the processing, the machine vision device measures the thickness of the magnetorheological fluid ribbon.

[0009] The interior of the control unit includes:

[0010] a time calculation module for calculating the measurement time of the machine vision device and the adjustment time of the magnetorheological processing module, and adjusting the machine vision device and the magnetorheological processing module according to the measurement time and the adjustment time;

[0011] a conversion relationship module, fitting the ribbon thickness with a first position of a supply system in the magnetorheological processing module to obtain a first conversion relationship, fitting the ribbon thickness with a second position of a nozzle in the magnetorheological processing module to obtain a second conversion relationship, and fitting the ribbon thickness with an actuator group output of the actuator group to obtain a third conversion relationship;

[0012] a processing program module, which obtains a processing program according to a removal function generated when the magnetorheological processing module processes the optical element, and imports the processing program into the magnetorheological processing module;

[0013] The real-time control module adjusts the first position according to the first conversion relationship, or adjusts the second position according to the second conversion relationship, or adjusts the output of the actuator group to maintain the stability of the removal function when processing the optical element.

[0014] Furthermore, the magnetorheological processing module also includes a transmission belt, a polishing motor, a magnet and a magnetorheological mounting frame; wherein,

[0015] The magnetorheological mounting frame is arranged on the output end of the actuator group, and the polishing wheel is arranged on the magnetorheological mounting frame;

[0016] The polishing motor is arranged on a magnetorheological mounting frame and is connected to the polishing wheel through a transmission belt, so that the polishing motor controls the polishing wheel to rotate;

[0017] The nozzle is mounted on the magnetorheological mounting bracket along the rotation direction of the polishing wheel through the nozzle mounting bracket, and the nozzle mounting bracket adjusts the mounting angle of the nozzle to change the second position; the supply system delivers magnetorheological fluid to the nozzle;

[0018] The magnet is arranged on the magnetorheological mounting frame and close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnet and the rigidity of the magnetorheological fluid is changed, thereby processing the optical element.

[0019] Furthermore, the supply system includes a liquid pump, a supply mounting bracket, a supply motor and a screw; wherein, the supply motor and the screw are arranged on the supply mounting bracket, so that the supply motor drives the screw to rotate; the liquid pump is arranged on the nut of the screw, so that the screw drives the liquid pump to move, thereby changing the first position; the liquid pump transports magnetorheological fluid to the nozzle through a pipeline.

[0020] Furthermore, the nozzle mounting bracket includes a fixing bracket, a nozzle adjustment motor, a push rod, and a nozzle support bracket; wherein, the fixing bracket is arranged on the magnetorheological mounting bracket, and an arc slide rail is arranged on the inner side wall of the fixing bracket; the nozzle adjustment motor is arranged on the magnetorheological mounting bracket, and one end of the push rod passes through the fixing bracket and is connected to the nozzle adjustment motor, so that the nozzle adjustment motor pushes the slider on the arc slide rail to move through the push rod; one end of the nozzle support bracket is arranged on the slider, and the nozzle is connected to the other end of the nozzle support bracket, so that the nozzle adjustment motor pushes the slider through the push rod, and then the nozzle support bracket drives the nozzle to move, thereby completing the adjustment of the second position.

[0021] Furthermore, the machine vision device, the robot, the actuator group, the nozzle adjustment motor and the supply motor are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.

[0022] A magnetorheological polishing method for adjusting the position of a supply system, according to a magnetorheological polishing device based on machine vision adjustment provided by the present invention, comprises the following steps:

[0023] A1: Controlling the magnetorheological processing module to process the test optical element, and obtaining a first conversion relationship through the conversion relationship module during the processing;

[0024] A2: Setting a first variable range of the first position and obtaining a second variable range corresponding to the ribbon thickness according to the first conversion relationship; setting a maximum first position and obtaining a corresponding maximum ribbon thickness according to the first conversion relationship;

[0025] A3: The control time calculation module combines the maximum first position to adjust the machine vision equipment and magnetorheological processing module;

[0026] A4: The optical element to be processed is processed in combination with the second variable range, the maximum first position and the maximum ribbon thickness. During the processing, the real-time control module adjusts the first position in real time.

[0027] Furthermore, step A1 includes the following steps:

[0028] A11: Control the polishing wheel to process the test optical element at different polishing gaps, calculate the volume removal rate of the removal function at each processing position, and use machine vision equipment to measure the ribbon thickness at each processing position in real time. In the conversion relationship module, fit the fourth conversion relationship between the ribbon thickness and the volume removal rate of the removal function;

[0029] A12: Changing the first position alone, controlling the polishing wheel to process the test optical element at different polishing gaps, obtaining the removal function volume removal rate at each processing position, and fitting a fifth conversion relationship between the removal function volume removal rate and the first position in the conversion relationship module;

[0030] A13: Obtain the first conversion relationship according to the fourth conversion relationship and the fifth conversion relationship.

[0031] Furthermore, in step A4, when the polishing wheel is controlled to move to the current processing position, the current ribbon degree measured by the machine vision device is Compared with the second variable range:

[0032] If the current ribbon thickness is within the second variable range, there is no need to adjust the current first position;

[0033] If the current ribbon thickness is not within the second variable range, the current first position needs to be adjusted:

[0034] If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the current first position to the maximum first position;

[0035] If the current ribbon thickness is less than the maximum ribbon thickness, adjust the current first position according to the following formula:

[0036] ;

[0037] in, Represents the first conversion relationship, Indicates the current ribbon thickness, Indicates the current first position.

[0038] A nozzle-adjustable magnetorheological polishing method, according to a magnetorheological polishing device based on machine vision adjustment provided by the present invention, comprises the following steps:

[0039] B1: Controlling the magnetorheological processing module to process the test optical element, and obtaining the second conversion relationship through the conversion relationship module during the processing;

[0040] B2: Setting the third variable range of the second position and obtaining the fourth variable range corresponding to the ribbon thickness according to the second conversion relationship; setting the maximum second position and obtaining the corresponding maximum ribbon thickness according to the second conversion relationship;

[0041] B3: Control the time calculation module in combination with the maximum second position to adjust the machine vision equipment and magnetorheological processing module;

[0042] B4: The optical element to be processed is processed in combination with the fourth variable range, the maximum second position and the maximum ribbon thickness. During the processing, the real-time control module adjusts the second position in real time.

[0043] Furthermore, step B1 includes the following steps:

[0044] B11: Control the polishing wheel to process the test optical element at different polishing gaps, calculate the volume removal rate of the removal function at each processing position, and use machine vision equipment to measure the ribbon thickness at each processing position in real time. In the conversion relationship module, fit the sixth conversion relationship between the ribbon thickness and the volume removal rate of the removal function;

[0045] B12: Changing the second position alone, controlling the polishing wheel to process the test optical element with different polishing gaps, obtaining the removal function volume removal rate at each processing position, and fitting the seventh conversion relationship between the removal function volume removal rate and the second position in the conversion relationship module;

[0046] B13: Obtain a second conversion relationship according to the sixth conversion relationship and the seventh conversion relationship.

[0047] Furthermore, in step B4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the machine vision device is compared with the fourth variable range:

[0048] If the current ribbon thickness is within the fourth variable range, there is no need to adjust the current second position;

[0049] If the current ribbon thickness is not within the fourth variable range, the current second position needs to be adjusted:

[0050] If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjust the current second position to the maximum second position;

[0051] If the current ribbon thickness is less than the maximum ribbon thickness, the current second position is adjusted according to the following formula:

[0052]

[0053] in, Represents the second conversion relationship, Indicates the current ribbon thickness, Indicates the current second position.

[0054] A magnetorheological polishing method with a variable removal function, according to a magnetorheological polishing device based on machine vision adjustment provided by the present invention, comprises the following steps:

[0055] C1: Control the polishing wheel to process the test optical element at different polishing intervals to obtain the removal function. Simultaneously, the change in ribbon thickness at each processing point is recorded using machine vision equipment during the processing. The eighth conversion relationship between the volume removal rate of the removal function and the ribbon thickness at each processing point is obtained in the conversion relationship module.

[0056] C2: Using the machining program module to obtain the machining program according to the removal function, and importing the machining program into the magnetorheological machining module;

[0057] C3: Setting the fifth variable range of the volume removal rate of the removal function, and obtaining the sixth variable range corresponding to the ribbon thickness according to the eighth conversion relationship; setting the maximum volume removal rate of the removal function, and obtaining the corresponding maximum ribbon thickness according to the eighth conversion relationship;

[0058] C4: Control the time calculation module and adjust the machine vision equipment and magnetorheological processing module in combination with the maximum removal function volume removal rate;

[0059] C5: controlling the magnetorheological processing module to process the optical element to be processed according to the sixth variable range, and calculating the removal function of each processing point during the processing to obtain a variable removal function set, thereby generating a new processing program;

[0060] C6: Import the new processing program into the magnetorheological processing module, and then perform secondary processing on the optical component to be processed.

[0061] Furthermore, in step C5, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the machine vision device is compared with the sixth variable range:

[0062] If the current ribbon thickness is within the sixth variable range, there is no need to calculate the current removal function;

[0063] If the current ribbon thickness is not within the sixth variable range, the current removal function needs to be calculated as follows:

[0064] If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, the removal function of the current processing point is calculated by the following formula: , and then get the set of variable removal functions :

[0065] ;

[0066] in, Indicates the current ribbon thickness, Indicates the maximum ribbon thickness The corresponding maximum removal function volume removal rate, Indicates the eighth conversion relationship;

[0067] If the current ribbon thickness is less than the maximum ribbon thickness, the removal function of the current processing point is calculated by the following formula: , and then get the set of variable removal functions :

[0068] ;

[0069] in, Indicates the volume removal rate of the removal function corresponding to the current processing point;

[0070] Remove the function set The next time the processing parameters are input, a new processing control program is generated.

[0071] An actuator-adjusted magnetorheological polishing method, according to a magnetorheological polishing device based on machine vision adjustment provided by the present invention, comprises the following steps:

[0072] D1: Control the polishing wheel to process the test optical element with different polishing gaps, and obtain the third conversion relationship in the conversion relationship module;

[0073] D2: Set the seventh variable range of the actuator group output and obtain the eighth variable range corresponding to the ribbon thickness according to the third conversion relationship; set the maximum actuator group output and obtain the corresponding maximum ribbon thickness according to the third conversion relationship;

[0074] D3: The control time calculation module adjusts the machine vision equipment and magnetorheological processing module in combination with the maximum actuator group output;

[0075] D4: The optical element to be processed is processed based on the eighth variable range, the maximum output of the actuator group, and the maximum ribbon thickness. During the processing, the real-time control module adjusts the output of the actuator group in real time until the magnetorheological processing module is controlled to traverse all processing points on the optical element to be processed.

[0076] Furthermore, step D1 includes the following steps:

[0077] D11: Control the polishing wheel to process the test optical element at different polishing gaps, and use machine vision equipment to measure the ribbon thickness at each processing position in real time. The eleventh conversion relationship between the ribbon thickness and the polishing gap is fitted in the conversion relationship module;

[0078] D12: The change in the polishing gap is the output of the actuator group. Combining the eleven conversion relationships, we can get the third conversion relationship.

[0079] Furthermore, in step D4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the machine vision device is compared with the eighth variable range:

[0080] If the current ribbon thickness is within the eighth variable range, there is no need to adjust the output of the current actuator group;

[0081] If the current ribbon thickness is not within the eighth variable range, the output of the current actuator group needs to be adjusted:

[0082] If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, the current actuator group output is adjusted to the maximum actuator group output;

[0083] If the current ribbon thickness is less than the maximum ribbon thickness, the output of the current actuator group is adjusted according to the following formula:

[0084]

[0085] in, Represents the third conversion relationship, Indicates the current ribbon thickness, Indicates the current output of the actuator group.

[0086] Compared with the prior art, the present invention can achieve the following beneficial effects:

[0087] In the magnetorheological polishing equipment and method based on machine vision adjustment created by the present invention, the thickness of the magnetorheological fluid ribbon during the six-dimensional processing of the magnetorheological processing module driven by the robot is measured in real time by machine vision equipment, thereby adjusting the supply system position, nozzle position and actuator group output in the magnetorheological processing module in real time, thereby realizing real-time constant control of the removal function change under multi-factor coupling during the processing of the optical element; at the same time, the acquisition of posture information does not need to rely on the actual processing process. The posture error information of the processing equipment can be obtained during the processing trial run (in which magnetorheological fluid is not introduced and no processing effect is produced), and there is no need to place the measuring equipment at the lowest point of the polishing wheel, which will not affect the actual processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0088] The accompanying drawings, which constitute part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention and do not constitute an undue limitation of the present invention. In the accompanying drawings:

[0089] Figure 1 A schematic structural diagram of a magnetorheological polishing device based on machine vision adjustment according to an embodiment of the present invention from one perspective;

[0090] Figure 2A schematic structural diagram of the magnetorheological polishing device based on machine vision adjustment according to an embodiment of the present invention from another perspective;

[0091] Figure 3 A schematic diagram of an actuator according to an embodiment of the present invention;

[0092] Figure 4 A schematic diagram of the structure of the supply system according to an embodiment of the present invention;

[0093] Figure 5 A schematic structural diagram of a liquid pump according to an embodiment of the present invention;

[0094] Figure 6 This is a schematic structural diagram of the nozzle mounting seat according to an embodiment of the present invention. Figure 6 (a) is a schematic diagram of the structure when the nozzle is installed on the nozzle mounting seat. Figure 6 (b) is a schematic diagram of the structure when the nozzle is not installed on the nozzle mounting seat.

[0095] Description of reference numerals:

[0096] 1. Robot; 2. Control unit; 3. Machine vision equipment; 4. High-frequency actuator; 5. Laboratory bench; 6. Optical element to be processed; 7. Optical element to be tested; 8. Supply system; 9. Nozzle; 10. Polishing wheel; 11. Drive belt; 12. Polishing motor; 13. Magnet; 14. Magnetorheological mounting bracket; 15. Nozzle mounting seat; 16. Liquid pump; 17. Supply mounting bracket; 18. Supply motor; 19. Lead screw; 20. Mounting plate; 21. Slide rail; 2 2. Liquid pump body; 23. Cooling chamber; 24. Magnetorheological fluid storage chamber; 25. Cooling water inlet; 26. Magnetorheological fluid inlet; 27. Cooling water outlet; 28. Magnetorheological fluid outlet; 29. ​​Nozzle support frame; 30. Nozzle adjustment motor; 31. Fixed frame; 32. Push rod; 33. Slider; 34. Arc slide rail; 35. Transition plate; 36. Cylinder body; 37. Cavity A; 38. Cavity B; 39. Oil scraper ring; 40. Connecting plate; 41. Moving piston. DETAILED DESCRIPTION

[0097] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention.

[0098] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0099] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, features defined as "first", "second" and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0100] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art can understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0101] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0102] like Figures 1 to 2As shown, the machine vision-based magnetorheological polishing device described in the embodiment of the present invention includes a robot 1, a control unit 2, an actuator assembly, a magnetorheological processing module, and a machine vision device 3. The actuator assembly is fixed to the free end of the robot 1, and the magnetorheological processing module is fixed to the output end of the actuator assembly. The robot 1 drives the polishing wheel 10 in the magnetorheological processing module to process the optical element 6 to be processed or the test optical element 7 placed on the experimental table 5 using magnetorheological fluid as the medium. During the processing, the ribbon thickness of the magnetorheological fluid is affected by the supply system for providing the magnetorheological fluid and the polishing gap, and the polishing gap is changed by the polishing wheel position, robot posture adjustment, etc. Therefore, it is necessary to use a machine vision device 3 mounted on one side of the experimental table 5 to measure the change in the ribbon thickness of the magnetorheological fluid in real time. In an embodiment of the present invention, the machine vision device 3 uses a binocular stereo camera of the Stereo ace model of Basler. The process of using the machine vision device 3 to measure the ribbon thickness of the magnetorheological fluid includes: the machine vision device 3 collects the ribbon contour information of the polishing wheel 10 and the magnetorheological fluid, and uses any point in the non-working area of ​​the surface of the polishing wheel 10 as a reference point. The highest point on the ribbon surface of the magnetorheological fluid is the measurement point, and the height difference between the measurement point and the reference point is the change data of the ribbon thickness.

[0103] In the embodiment of the present invention, the actuator group is composed of two cascaded high-frequency actuators 4, that is, one high-frequency actuator 4 is installed on the output end of the other high-frequency actuator 4, so that the output of the actuator group is the sum of the output displacements of the two high-frequency actuators 4. In the embodiment of the present invention, the high-frequency actuator 4 is preferably an SG model static pressure linear cylinder produced by Jilin Huakong Testing Instrument Co., Ltd. The structure of each high-frequency actuator 4 is as follows: Figure 3 As shown, it includes a transition plate 35, a cylinder body 36, a cavity A 37, a cavity B 38, an oil scraper ring 39, a connecting plate 40, and a moving piston 41. The transition plate 35 is used to connect the end flange of the robot 1 and the cylinder body 36 of the high-frequency actuator 4. The cavity A 37 and the cavity B 38 are used to control the inflow and outflow of hydraulic oil. The oil scraper ring 39 is used to prevent the hydraulic oil from flowing out of the cylinder body 36. The moving piston 41 is used to output position. The connecting plate 40 is used to connect the moving piston 41 to the magnetorheological processing module or another high-frequency actuator 4, thereby outputting displacement to the magnetorheological processing module or another high-frequency actuator 4.

[0104] The control unit 2 includes a time calculation module, a conversion relationship module, a processing program module, and a real-time control module. The time calculation module calculates the measurement time of the machine vision device 3 and the adjustment time of the magnetorheological processing module, and adjusts the machine vision device 3 and the magnetorheological processing module based on the measurement and adjustment times. The conversion relationship module fits the ribbon thickness to the first position of the supply system 8 in the magnetorheological processing module to obtain a first conversion relationship, fits the ribbon thickness to the second position of the nozzle 9 in the magnetorheological processing module to obtain a second conversion relationship, and fits the ribbon thickness to the output of the actuator group to obtain a third conversion relationship. In this embodiment of the present invention, the first position of the supply system 8 is defined as the vertical distance between the nozzle opening of the nozzle 9 and the working point of the supply system 8 (i.e., the liquid outlet of the supply system 8). A change in this vertical distance between the nozzle opening of the nozzle 9 and the working point of the supply system 8 causes a change in the flow rate, and thus a change in the removal function. The second position of the nozzle 9 is defined as the vertical distance between the nozzle opening of the nozzle 9 and the working point of the polishing wheel 10 (i.e., the point of closest approach between the polishing wheel 10 and the surface of the optical element 6 or test optical element 7 along the normal to the surface). The machining program module generates a machining program based on the removal function generated by the magnetorheological machining module when machining the optical element 6 or test optical element 7, and imports the machining program into the magnetorheological machining module. The real-time control module adjusts the first position based on the first conversion relationship, adjusts the second position based on the second conversion relationship, or adjusts the output of the actuator group to maintain a stable removal function during machining of the optical element.

[0105] In the embodiment of the present invention, the structure of the supply system 8 is as follows: Figure 1 、 Figure 2 and Figure 4As shown, it includes a liquid pump 16, a supply mounting bracket 17, a supply motor 18, and a screw 19. The supply motor 18 and the screw 19 are mounted on the supply mounting bracket 17, and the output end of the supply motor 18 is connected to one end of the screw 19, so that the supply motor 18 drives the screw 19 to rotate. The liquid pump 16 is mounted on the nut of the screw 19, so that the screw 19 drives the liquid pump 16 to move, thereby changing the first position. Specifically, the screw 19 is provided with a nut that is compatible with the screw 19, and the nut contains a ball. The screw 19 and the nut together form a ball screw. The liquid pump 16 is fixed to the moving block, and the moving block is fixed to the nut. At this time, when the screw 19 rotates, the cooperation between the screw 19 and the nut drives the moving block to move along the screw 19, thereby realizing that the screw 19 drives the liquid pump 16 to move. The liquid pump 16 delivers the magnetorheological fluid to the nozzle 9 through a pipeline. In an embodiment of the present invention, in order to enable the liquid pump 16 to move smoothly along the direction of the lead screw 19 without offset, a slide rail 21 parallel to the lead screw 19 is installed on both sides of the lead screw 19, and the liquid pump 16 is fixedly connected to the moving block of the lead screw 19 and the sliders on the two slide rails 21 through the mounting plate 20, so that the supply motor 18 drives the lead screw 19, and the lead screw 19 drives the mounting plate 20 and the liquid pump 16 on the mounting plate 20 to move smoothly.

[0106] The liquid pump body 22 of the liquid pump 16 in the embodiment of the present invention is a DFLD vertical multi-stage pump manufactured by Shanghai Dongfang Pump Industry Co., Ltd. The structure of the entire liquid pump 16 is as follows: Figure 5 As shown, it includes a liquid pump body 22, a cooling chamber 23, and a magnetorheological fluid storage chamber 24. The liquid pump body 22 is used to supply magnetorheological fluid; the cooling chamber 23 is mainly used to store cooling water and cool the magnetorheological fluid; the magnetorheological fluid storage chamber 24 is mainly used to store magnetorheological fluid. When the liquid pump 16 is working, cooling water enters the cooling chamber 23 from the cooling water inlet 25 to cool the magnetorheological fluid, and the magnetorheological fluid enters the liquid pump body 22 from the magnetorheological fluid inlet 26 through the magnetorheological fluid storage chamber 24; the cooling water completes cooling the magnetorheological fluid in the liquid cooling chamber 23 and is discharged from the cooling water outlet 27; the cooled magnetorheological fluid is output from the magnetorheological fluid outlet 28 and transported to the nozzle 9 through the pipeline. At this time, the outlet of the supply system 8 is the magnetorheological fluid outlet 28. Furthermore, the first position of the supply system 8 is the vertical distance between the nozzle opening of the nozzle 9 and the magnetorheological fluid outlet 28.

[0107] The magnetorheological processing module also includes a transmission belt 11, a polishing motor 12, a magnet 13 and a magnetorheological mounting frame 14. The magnetorheological mounting frame 14 is fixedly mounted on the output end of the actuator group, and the polishing wheel 10 is arranged on the magnetorheological mounting frame 14. The polishing motor 12 is mounted on the magnetorheological mounting frame 14, and the output end of the polishing motor 12 is connected to the bearing of the polishing wheel 10 through the transmission belt 11, so that the polishing motor 12 controls the polishing wheel 10 to rotate. The manner in which the polishing motor 12 drives the polishing wheel 10 to rotate in the embodiment of the present invention can refer to the invention patent application with Chinese patent publication number CN118322074A, publication date July 12, 2024, and patent name "Self-rotating Polishing Module Processing System". The nozzle 9 is mounted on the magnetorheological mounting frame 14 along the rotation direction of the polishing wheel 10 through the nozzle mounting seat 15. The nozzle mounting seat 15 adjusts the installation angle of the nozzle 9, thereby changing the second position of the nozzle mouth of the nozzle 9. Supply system 8 delivers magnetorheological fluid to nozzle 9 via a pipeline. Nozzle 9 sprays the magnetorheological fluid toward the working point of polishing wheel 10, allowing polishing wheel 10 to process the optical element 6 or test optical element 7 using the magnetorheological fluid as a medium. Magnet 13 is mounted on magnetorheological mounting frame 14 near the working point of polishing wheel 10, so that the magnetic field strength of magnet 13 affects the magnetorheological fluid, changing its stiffness.

[0108] The structure of the nozzle mounting seat 15 is as follows Figure 6 As shown. Figure 6 (a) shows a schematic structural diagram of the nozzle 9 when it is installed on the nozzle mounting seat 15. Figure 6 (b) in the figure shows a schematic diagram of the structure when the nozzle 9 is not installed on the nozzle mounting base 15. In the nozzle mounting base 15, the fixing frame 31 is an L-shaped structure fixed to the magnetorheological mounting base 14. A circular arc slide 34 is arranged on the inner side wall of the fixing frame 31. The nozzle adjustment motor 30 is mounted on the magnetorheological mounting base 14. One end of the push rod 32 passes through the bottom edge of the fixing frame 31 and is connected to the output end of the nozzle adjustment motor 30. The nozzle adjustment motor 30 pushes the push rod 32, which in turn pushes the slider 33 on the circular arc slide 34 along the circular arc slide 34. One end of the nozzle support frame 29 is fixed to the slider 33, and the nozzle 9 is mounted on the other end of the nozzle support frame 29. When controlling the nozzle mounting base 15 to adjust the position of the nozzle 9, the nozzle adjustment motor 30 outputs a displacement, causing the push rod 32 to push the slider 33, which in turn causes the nozzle support frame 29 to move the nozzle 9, thereby adjusting the nozzle 9 to the second position.

[0109] The robot 1, machine vision device 3, supply system 8, actuator assembly, and nozzle mounting bracket 15 are each connected to the control unit 2 to form their own communication circuits, enabling the control unit 2 to receive and send signals via the corresponding communication circuits. Specifically, the control unit 2 is in communication with the supply motor 18 via a circuit. During operation, the control unit 2 sends control instructions to the supply motor 18, which drives the lead screw 19 to rotate. The rotating lead screw 19 drives the mounting plate 20 up and down, thereby changing the vertical position of the liquid pump 16 and thus the first position of the supply system 8. The control unit 2 controls the hydraulic oil pressure in the high-frequency actuator 4, thereby controlling the extension and retraction of the moving piston 41, achieving position control of the magnetorheological processing module and changing the output of the actuator assembly. The control unit 2 controls the nozzle adjustment motor 30 to change the position of the nozzle support bracket 29, which moves along the arc slide 34, thereby changing the second position of the nozzle 9. Because the polishing wheel 10 generates a strong magnetic field during polishing, the communication circuit avoids this strong magnetic field.

[0110] Based on the magnetorheological polishing equipment based on machine vision adjustment described in the embodiment of the present invention, the embodiment of the present invention also provides a magnetorheological polishing method based on machine vision adjustment, which includes a magnetorheological polishing method with supply system position adjustment, a magnetorheological polishing method with nozzle adjustment, a magnetorheological polishing method with variable removal function, and a magnetorheological polishing method with actuator adjustment.

[0111] Specific embodiment 1: The magnetorheological polishing method for adjusting the position of the supply system provided in this specific embodiment, according to the magnetorheological polishing device based on machine vision adjustment described in the embodiment of the invention, combined with Figure 1 、 Figure 2 and Figure 4 , including the following steps:

[0112] A1: Control the magnetorheological processing module to process the test optical element 7, and obtain a first conversion relationship through the conversion relationship module during the processing. Step A1 includes the following steps:

[0113] A11: Control the polishing wheel 10 to process the test optical element 7 with different polishing gaps, calculate the removal function volume removal rate at each processing position, and use the machine vision device 3 to measure the ribbon thickness at each processing position in real time. Fit the result in the conversion relationship module:

[0114]

[0115] in, Represents the ribbon thickness T and the removal function volume removal rate In this specific embodiment, the polishing wheel 10 is controlled to perform fixed-point processing on the test optical element 7 for a period of time with different polishing gaps.

[0116] A12: Changing the first position alone, controlling the polishing wheel 10 to process the test optical element 7 at different polishing gaps, obtaining the removal function volume removal rate at each processing position, and fitting it in the conversion relationship module to obtain:

[0117]

[0118] in, Represents the removal function volume removal rate With the first position In this embodiment, specifically, the first position is changed alone, and the polishing wheel 10 is controlled to perform fixed-point processing on the test optical element 7 for a period of time at different polishing gaps.

[0119] A13: The first conversion relationship is obtained based on the fourth conversion relationship and the fifth conversion relationship, namely:

[0120] ;

[0121] in, Indicates the first conversion relationship.

[0122] A2: Set the first variable range of the first position , and according to the first conversion relationship Get the second variable range corresponding to the ribbon thickness ,Right now:

[0123] ;

[0124] ;

[0125] Set the maximum first position , and according to the first conversion relationship Get the corresponding maximum ribbon thickness ,Right now:

[0126] .

[0127] The first variable range and the maximum first position The configuration is adaptive according to the actual situation and is not limited in this embodiment.

[0128] A3: The control time calculation module adjusts the machine vision device 3 and the magnetorheological processing module in combination with the maximum first position. Step B3 includes the following steps:

[0129] A31. Count b data points measured by the machine vision device 3 within a second and obtain the time it takes for the machine vision device 3 to measure a point. ;

[0130] ;

[0131] A32. Calculate the maximum first position adjustment The time required to control the magnetorheological processing module :

[0132] ;

[0133] ;

[0134] in, represents the change control rate of the first position, Indicates the initial first position;

[0135] A33, measuring the vertical distance between the measuring position of the machine vision device 3 and the working point of the polishing wheel 10 , according to the vertical distance and the set polishing wheel speed Calculate the time required for the polishing wheel 10 to reach the working point :

[0136] ;

[0137] in, Indicates the radius of the polishing wheel 10; polishing wheel speed The configuration is adaptive according to the actual situation, and this embodiment does not limit this.

[0138] A34, calculate the maximum speed of the magnetorheological processing module Minimum moving time between two adjacent processing positions :

[0139] ;

[0140] in, Indicates the distance between two adjacent processing positions;

[0141] A35. Calculation conditions Is it true: If the condition is true, then there is no need to adjust the machine vision device 3 and the polishing wheel 10; if the condition is not true, then the data sampling frequency of the machine vision device 3 and the polishing wheel speed need to be adjusted. Make adjustments to make the conditions true;

[0142] A36, the measurement data between each two adjacent processing positions are processed by mean filtering and then output, and the number of mean filtered data is Needs to be satisfied .

[0143] Since the magnetorheological fluid ejected from the supply system needs to be transported through the pipeline and driven by the polishing wheel 10 to reach the working area, in order to ensure that the adjustment of the removal function change is achieved at the target trajectory point, it is necessary to set the residence time of the processing point. The specific setting method is as follows:

[0144] The Z-axis coordinate of the nozzle opening position of the nozzle 9 is measured by the machine vision device 3 The Z-axis coordinate of the lowest point of the polishing wheel 10 , then the vertical distance between the nozzle 9 and the lowest point of the polishing wheel 10 is |Z4-Z5|, then the time required for the magnetorheological fluid sprayed from the nozzle 9 to reach the lowest point of the polishing wheel 10 is for:

[0145] ;

[0146] Where n represents the number of revolutions per second of the polishing wheel 10, L represents the length of the pipeline, and V represents the flow rate of the magnetorheological fluid. When generating the processing control program, if the dwell time of each point is If the dwell time of some processing points exists, the generated processing control program is appropriate. , it is necessary to increase the material removal thickness, extend the processing time, and regenerate the processing control program so that the processing residence time of each point is .

[0147] A4: Combined with the second variable range , the largest first position and maximum ribbon thickness , the optical element 6 to be processed is processed, and during the processing, the real-time control module adjusts the first position SP in real time. In step A4, when the polishing wheel 10 is controlled to move to the current processing position i, the current ribbon thickness measured by the machine vision device 3 is With the second variable range Compare:

[0148] If the current ribbon thickness In the second variable range Within, that is , then there is no need to Make adjustments;

[0149] If the current ribbon thickness Not in the second variable range Within, that is , then you need to Make adjustments:

[0150] If the current ribbon thickness Greater than or equal to the maximum ribbon thickness ,Right now , the current first position Adjust to the maximum first position ;

[0151] If the current ribbon thickness Less than the maximum ribbon thickness ,Right now , according to the following formula, the current first position Make adjustments:

[0152] .

[0153] Specific embodiment 2: The nozzle adjustment magnetorheological polishing method provided in this specific embodiment is based on the magnetorheological polishing device based on machine vision adjustment described in the embodiment of the invention, combined with Figure 1 、 Figure 2 and Figure 6 , including the following steps:

[0154] B1: Control the magnetorheological processing module to process the test optical element 7, and obtain the second conversion relationship through the conversion relationship module during the processing. Step B1 includes the following steps:

[0155] B11: Control the polishing wheel 10 to process the test optical element 7 with different polishing gaps, calculate the removal function volume removal rate at each processing position, and measure the ribbon thickness at each processing position in real time through the machine vision device 3. Fit the result in the conversion relationship module:

[0156]

[0157] in, Represents the ribbon thickness T and the removal function volume removal rate In this specific embodiment, specifically controlling the polishing wheel 10 to perform fixed-point processing on the test optical element 7 for a period of time with different polishing gaps;

[0158] B12: Changing the second position alone, controlling the polishing wheel 10 to process different positions of the test optical element 7 with different polishing gaps, obtaining the removal function volume removal rate at each processing position, and fitting it in the conversion relationship module to obtain:

[0159]

[0160] in, Represents the removal function volume removal rate With the second position In this specific embodiment, specifically, the second position is changed separately, and the polishing wheel 10 is controlled to perform fixed-point processing on different positions of the test optical element 7 with different polishing gaps for a period of time;

[0161] B13: Obtain the second conversion relationship based on the sixth conversion relationship and the seventh conversion relationship, namely:

[0162]

[0163] in, Indicates the second conversion relationship.

[0164] B2: Set the third variable range of the second position , and according to the second conversion relationship Get the fourth variable range corresponding to the ribbon thickness ,Right now:

[0165] ;

[0166] ;

[0167] Set the maximum second position , and according to the second conversion relationship Get the corresponding maximum ribbon thickness ,Right now:

[0168] .

[0169] Maximum second position and the third variable range The configuration is adaptive according to the actual situation and is not limited in this embodiment.

[0170] B3: The control time calculation module adjusts the machine vision device and the magnetorheological processing module in combination with the maximum second position. Step B3 includes the following steps:

[0171] B31. Count b data points measured by machine vision device 3 within a second and obtain the time it takes for machine vision device 3 to measure a point. ;

[0172] ;

[0173] B32. Calculate the maximum nozzle position adjustment The time required to control the magnetorheological processing module :

[0174] ;

[0175] ;

[0176] in, Indicates the change control rate of the second position, Indicates the initial second position;

[0177] in, Indicates the maximum speed of nozzle position control;

[0178] B33, measure the vertical distance between the measuring position of the machine vision device 3 and the working point of the polishing wheel 10 , according to the vertical distance and the set polishing wheel speed Calculate the time required for the polishing wheel 10 to reach the working point :

[0179] ;

[0180] in, Indicates the radius of the polishing wheel 10; polishing wheel speed The configuration is adaptive according to the actual situation, and this embodiment does not limit this.

[0181] B34. Calculate the maximum speed of the magnetorheological machining module Minimum moving time between two adjacent processing positions :

[0182] ;

[0183] in, Indicates the distance between two adjacent processing positions;

[0184] B35. Calculation conditions Is it true: If the condition is true, then there is no need to adjust the machine vision device 3 and the polishing wheel 10; if the condition is not true, then the data sampling frequency of the machine vision device 3 and the polishing wheel speed need to be adjusted. Make adjustments to make the conditions true;

[0185] B36, perform mean filtering on the measurement data between each two adjacent processing positions before outputting them, and the number of mean filtered data Needs to be satisfied .

[0186] Since the magnetorheological fluid ejected from the nozzle 9 needs to be driven by the polishing wheel 10 to reach the working area, in order to ensure that the adjustment of the removal function change is achieved at the target trajectory point, it is necessary to set the dwell time of the processing point. The specific setting method is as follows:

[0187] The Z-axis coordinate of the nozzle opening position of the nozzle 9 is measured by the machine vision device 3 The Z-axis coordinate of the lowest point of the polishing wheel 10 , then the vertical distance between the nozzle 9 and the lowest point of the polishing wheel 10 is |Z4-Z5|, then the time required for the magnetorheological fluid sprayed from the nozzle 9 to reach the lowest point of the polishing wheel 10 is for:

[0188] ;

[0189] Where n represents the number of revolutions per second of the polishing wheel 10. When generating the machining control program, if the dwell time of each point is If the dwell time of some processing points exists, the generated processing control program is appropriate. , it is necessary to increase the material removal thickness, extend the processing time, and regenerate the processing control program so that the processing residence time of each point is .

[0190] B4: Combined with the fourth variable range , Maximum second position and maximum ribbon thickness , the optical element 6 to be processed is processed, and during the processing, the real-time control module adjusts the second position NL in real time. In step B4, when the polishing wheel 10 is controlled to move to the current processing position i, the current ribbon thickness measured by the machine vision device 3 is With the fourth variable range Compare:

[0191] If the current ribbon thickness In the fourth variable range Within, that is , then there is no need to Make adjustments;

[0192] If the current ribbon thickness Not in the fourth variable range Within, that is , you need to change the current second position Make adjustments:

[0193] If the current ribbon thickness Greater than or equal to the maximum ribbon thickness ,Right now , change the current second position Adjust to the second maximum position ;

[0194] If the current ribbon thickness Less than the maximum ribbon thickness ,Right now , according to the following formula, the current second position Make adjustments:

[0195] .

[0196] Specific embodiment 3: The magnetorheological polishing method with variable removal function provided in this specific embodiment is based on the magnetorheological polishing device based on machine vision adjustment described in the embodiment of the invention, combined with Figure 1 and Figure 2 , including the following steps:

[0197] C1: Control the polishing wheel 10 to process the test optical element 7 with different polishing gaps, and calculate the removal function volume removal rate of each processing point. Use the machine vision device 3 to record the change in ribbon thickness at each processing point, and fit it in the conversion relationship module to obtain:

[0198]

[0199] in, Indicates ribbon thickness The eighth conversion relationship between the removal function volume removal rate MRR and the removal function volume removal rate MRR is as follows: In this specific embodiment, the polishing wheel 10 is controlled to perform fixed-point processing on the test optical element 7 for a period of time with different polishing gaps.

[0200] C2: Use the machining program module to obtain the machining program according to the removal function, and import the machining program into the magnetorheological machining module.

[0201] C3: Set the fifth variable range of the removal function volume removal rate , and according to the eighth conversion relationship Get the sixth variable range corresponding to the ribbon thickness ,Right now:

[0202] ;

[0203] ;

[0204] Set the maximum removal function volume removal rate , and according to the eighth conversion relationship Get the corresponding maximum ribbon thickness ,Right now:

[0205] .

[0206] Maximum removal function volume removal rate and the fifth variable range The configuration is adaptive according to the actual situation and is not limited in this embodiment.

[0207] C4: Control the time calculation module and adjust the machine vision equipment and magnetorheological processing module in combination with the maximum removal function volume removal rate. The specific steps include:

[0208] C41. Count b data points measured by machine vision device 3 within a second and obtain the time it takes for machine vision device 3 to measure one point. ;

[0209] ;

[0210] C42, measure the vertical distance between the measuring position of the machine vision device 3 and the working point of the polishing wheel 10 , according to the vertical distance and the set polishing wheel speed Calculate the time required for the polishing wheel 10 to reach the working point :

[0211] ;

[0212] in, Indicates the radius of the polishing wheel 10; polishing wheel speed The configuration is adaptive according to the actual situation, and this embodiment does not limit this.

[0213] C43, calculate the maximum speed of the magnetorheological processing module Minimum moving time between two adjacent processing positions :

[0214] ;

[0215] in, Indicates the distance between two adjacent processing positions;

[0216] C44. Calculation conditions Is it true: If the condition is true, then there is no need to adjust the machine vision device 3 and the polishing wheel 10; if the condition is not true, then the data sampling frequency of the machine vision device 3 and the polishing wheel speed need to be adjusted. Make adjustments to make the conditions true;

[0217] C45, perform mean filtering on the measurement data between each two adjacent processing positions before outputting it, and the number of mean filtered data Needs to be satisfied .

[0218] C5: According to the sixth variable range , control the magnetorheological processing module to process the optical element 6 to be processed, and during the processing, calculate the removal function of each processing point, obtain the variable removal function set, and then generate a new processing program. In step C5, when the polishing wheel 10 is controlled to move to the current processing position i, the current ribbon thickness measured by the machine vision device 3 is With the sixth variable range Compare:

[0219] If the current ribbon thickness In the sixth variable range Within, that is , then there is no need to remove the current function Perform calculations;

[0220] If the current ribbon thickness Not in the sixth variable range Within, that is , you need to remove the current function Perform the following calculations:

[0221] If the current ribbon thickness Less than the maximum ribbon thickness ,Right now , then the removal function of the current processing point is calculated by the following formula , and then get the set of variable removal functions :

[0222] ;

[0223] in, Indicates the volume removal rate of the removal function corresponding to the current processing point;

[0224] Remove the function set The next processing parameter input generates a new processing control program;

[0225] If the current ribbon thickness Greater than or equal to the maximum ribbon thickness ,Right now , then the removal function of the current processing point is calculated by the following formula , and then get the set of variable removal functions :

[0226] ;

[0227] in, Indicates the maximum ribbon thickness The corresponding maximum removal function volume removal rate;

[0228] Remove the function set The next time the processing parameters are input, a new processing control program is generated.

[0229] C6: Import the new processing program into the magnetorheological processing module, and then perform secondary processing on the optical component to be processed.

[0230] Specific embodiment 4: The magnetorheological polishing method for adjusting the actuator provided in this specific embodiment is based on the magnetorheological polishing device based on machine vision adjustment described in the embodiment of the invention, combined with Figures 1 to 3 , including the following steps:

[0231] D1: Control the polishing wheel 10 to process the test optical element 7 with different polishing gaps, and obtain a third conversion relationship in the conversion relationship module. Step D1 includes the following steps:

[0232] D11: Control the polishing wheel 10 to process the test optical element 7 with different polishing gaps, and use the machine vision device 3 to measure the ribbon thickness at each processing position in real time, and fit it in the conversion relationship module to obtain:

[0233] ;

[0234] in, Indicates ribbon thickness Between polishing gap In this specific embodiment, specifically for controlling the polishing wheel 10 to perform fixed-point processing on the test optical element 7 for a period of time with different polishing gaps;

[0235] D12: Change in polishing gap The output of the actuator group , combined with the eleven conversion relationships, we get the third conversion relationship, namely:

[0236] ;

[0237] in, Indicates the third conversion relationship.

[0238] D2: Set the seventh variable range of the actuator group output , and according to the third conversion relationship Get the eighth variable range corresponding to the ribbon thickness ,Right now:

[0239] ;

[0240] ;

[0241] Set the maximum output of the actuator group , and according to the third conversion relationship Get the corresponding maximum ribbon thickness ,Right now:

[0242] .

[0243] Seventh variable range and maximum actuator group output The configuration is adaptive according to the actual situation and is not limited in this embodiment.

[0244] D3: The control time calculation module adjusts the machine vision device and magnetorheological processing module in combination with the maximum actuator group output. This includes the following steps:

[0245] D31. Count b data points measured by machine vision device 3 within a second and obtain the time it takes for machine vision device 3 to measure one point. ;

[0246] ;

[0247] D32, calculate the maximum output of the actuator group The time required to control the magnetorheological processing module :

[0248] ;

[0249] in, Indicates the output control rate of the actuator group;

[0250] D33, measure the vertical distance between the measuring position of the machine vision device 3 and the working point of the polishing wheel 10 , according to the vertical distance and the set polishing wheel speed Calculate the time required for the polishing wheel 10 to reach the working point :

[0251] ;

[0252] ;

[0253] in, represents the radius of the polishing wheel 10, is the initial actuator group output, polishing wheel speed The configuration is adaptive according to the actual situation, and this embodiment does not limit this.

[0254] D34, calculate the maximum speed of the magnetorheological processing module Minimum moving time between two adjacent processing positions :

[0255] ;

[0256] in, Indicates the distance between two adjacent processing positions;

[0257] D35. Calculation conditions Is it true: If the condition is true, then there is no need to adjust the machine vision device 3 and the polishing wheel 10; if the condition is not true, then the data sampling frequency of the machine vision device 3 and the polishing wheel speed need to be adjusted. Make adjustments to make the conditions true;

[0258] D36, perform mean filtering on the measurement data between each two adjacent processing positions before outputting it, and the number of mean filtered data Needs to be satisfied .

[0259] D4: Combined with the eighth variable range , Maximum actuator group output and maximum ribbon thickness , the optical element 6 to be processed is processed, and during the processing, the real-time control module adjusts the output L of the actuator group in real time until the magnetorheological processing module is controlled to traverse all processing points on the optical element 6 to be processed.

[0260] In step D4, when the polishing wheel 10 is controlled to move to the current processing position i, the current ribbon thickness measured by the machine vision device 3 is With the eighth variable range Compare:

[0261] If the current ribbon thickness In the eighth variable range Within, that is , then there is no need to adjust the output of the current actuator group Make adjustments;

[0262] If the current ribbon thickness Not in the eighth variable range Within, that is , then the output of the current actuator group needs to be Make adjustments:

[0263] If the current ribbon thickness Greater than or equal to the maximum ribbon thickness ,Right now , the current actuator group output Adjusted to the maximum actuator group output ;

[0264] If the current ribbon thickness Less than the maximum ribbon thickness ,Right now , according to the following formula, the output of the current actuator group is Make adjustments:

[0265] .

[0266] The fitting process in the above specific embodiment includes, but is not limited to, importing discrete data into Matlab software, performing data fitting using Matlab's polyfit fitting command, and solving the respective transformation relationships. Polyfit fitting command is a basic general command in Matlab software. This method can more intuitively see the corresponding relationship between correlations and the corresponding function curve.

[0267] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present disclosure can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solutions disclosed in the present disclosure can be achieved. This is not limited herein.

[0268] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A magnetorheological polishing device based on machine vision adjustment, characterized by: The system comprises a robot, a control unit, an actuator group, a magnetorheological processing module, and a machine vision device; wherein: the actuator group is arranged at the free end of the robot, and the magnetorheological processing module is arranged at the output end of the actuator group; the robot drives the polishing wheel in the magnetorheological processing module to process the optical element using magnetorheological fluid as the medium, and the machine vision device measures the thickness of the magnetorheological fluid ribbon during the processing; The interior of the control unit includes: a time calculation module for calculating a measurement time of the machine vision device and an adjustment time of the magnetorheological processing module, and adjusting the machine vision device and the magnetorheological processing module according to the measurement time and the adjustment time; a conversion relationship module, fitting the ribbon thickness with a first position of a supply system in the magnetorheological processing module to obtain a first conversion relationship, fitting the ribbon thickness with a second position of a nozzle in the magnetorheological processing module to obtain a second conversion relationship, and fitting the ribbon thickness with an actuator group output of the actuator group to obtain a third conversion relationship; a processing program module, which obtains a processing program according to a removal function generated when the magnetorheological processing module processes the optical element, and imports the processing program into the magnetorheological processing module; The real-time control module adjusts the first position according to the first conversion relationship, or adjusts the second position according to the second conversion relationship, or adjusts the output of the actuator group to maintain the stability of the removal function when processing the optical element.

2. The magnetorheological polishing device based on machine vision adjustment according to claim 1 is characterized in that: The magnetorheological processing module also includes a transmission belt, a polishing motor, a magnet and a magnetorheological mounting frame; wherein, The magnetorheological mounting frame is arranged on the output end of the actuator assembly, and the polishing wheel is arranged on the magnetorheological mounting frame; The polishing motor is arranged on the magnetorheological mounting frame and is connected to the polishing wheel via the transmission belt, so that the polishing motor controls the polishing wheel to rotate; The nozzle is mounted on the magnetorheological mounting bracket along the rotation direction of the polishing wheel via a nozzle mounting bracket, and the nozzle mounting bracket adjusts the mounting angle of the nozzle to thereby change the second position; the supply system delivers the magnetorheological fluid to the nozzle; The magnet is arranged on the magnetorheological mounting frame and close to the working point of the polishing wheel, so that the magnetorheological fluid is affected by the magnetic field strength of the magnet and the rigidity of the magnetorheological fluid is changed, thereby processing the optical element.

3. The magnetorheological polishing device based on machine vision adjustment according to claim 2 is characterized in that: The supply system includes a liquid pump, a supply mounting bracket, a supply motor and a screw; wherein, the supply motor and the screw are arranged on the supply mounting bracket, so that the supply motor drives the screw to rotate; the liquid pump is arranged on the nut of the screw, so that the screw drives the liquid pump to move, thereby changing the first position; the liquid pump transports magnetorheological fluid to the nozzle through a pipeline.

4. The magnetorheological polishing device based on machine vision adjustment according to claim 3 is characterized in that: The nozzle mounting seat includes a fixing frame, a nozzle adjustment motor, a pushing rod and a nozzle support frame; wherein, the fixing frame is arranged on the magnetorheological mounting frame, and an arc slide rail is arranged on the inner side wall of the fixing frame; the nozzle adjustment motor is arranged on the magnetorheological mounting frame, and one end of the pushing rod passes through the fixing frame and is connected to the nozzle adjustment motor, so that the nozzle adjustment motor pushes the slider on the arc slide rail to move through the pushing rod; one end of the nozzle support frame is arranged on the slider, and the nozzle is connected to the other end of the nozzle support frame, so that the nozzle adjustment motor pushes the slider through the pushing rod, and then the nozzle support frame drives the nozzle to move, thereby completing the adjustment of the second position.

5. The magnetorheological polishing device based on machine vision adjustment according to claim 4 is characterized in that: The machine vision device, the robot, the actuator group, the nozzle adjustment motor and the supply motor are respectively connected to the control unit to form respective communication lines, so that the control unit receives and sends signals through the corresponding communication lines.

6. A magnetorheological polishing method with supply system position adjustment, based on the magnetorheological polishing device based on machine vision adjustment according to any one of claims 1 to 5, characterized in that: The following steps are involved: A1: controlling the magnetorheological processing module to process the test optical element, and obtaining the first conversion relationship through the conversion relationship module during the processing; A2: setting a first variable range of the first position, and obtaining a second variable range corresponding to the ribbon thickness according to the first conversion relationship; setting a maximum first position, and obtaining a corresponding maximum ribbon thickness according to the first conversion relationship; A3: Controlling the time calculation module to adjust the machine vision device and the magnetorheological processing module in combination with the maximum first position; A4: The optical element to be processed is processed in combination with the second variable range, the maximum first position and the maximum ribbon thickness. During the processing, the real-time control module adjusts the first position in real time.

7. The magnetorheological polishing method with supply system position adjustment according to claim 6, characterized in that: Step A1 includes the following steps: A11: Controlling the polishing wheel to process the test optical element at different polishing gaps, calculating the removal function volume removal rate at each processing position, and measuring the ribbon thickness at each processing position in real time using the machine vision device, and fitting a fourth conversion relationship between the ribbon thickness and the removal function volume removal rate in the conversion relationship module; A12: changing the first position individually, controlling the polishing wheel to process the test optical element at different polishing gaps, obtaining a removal function volume removal rate at each processing position, and fitting a fifth conversion relationship between the removal function volume removal rate and the first position in the conversion relationship module; A13: Obtain the first conversion relationship according to the fourth conversion relationship and the fifth conversion relationship.

8. The magnetorheological polishing method with supply system position adjustment according to claim 7, characterized in that: In step A4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the machine vision device is compared with the second variable range: If the current ribbon thickness is within the second variable range, there is no need to adjust the current first position; If the current ribbon thickness is not within the second variable range, the current first position needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjusting the current first position to the maximum first position; If the current ribbon thickness is less than the maximum ribbon thickness, the current first position is adjusted according to the following formula: ； in, represents the first conversion relationship, Indicates the current ribbon thickness, Indicates the current first position.

9. A nozzle-adjustable magnetorheological polishing method, based on the machine vision-adjustable magnetorheological polishing device according to any one of claims 1 to 5, characterized in that: The following steps are involved: B1: controlling the magnetorheological processing module to process the test optical element, and obtaining the second conversion relationship through the conversion relationship module during the processing; B2: setting a third variable range of the second position, and obtaining a fourth variable range corresponding to the ribbon thickness according to the second conversion relationship; setting a maximum second position, and obtaining a corresponding maximum ribbon thickness according to the second conversion relationship; B3: controlling the time calculation module to adjust the machine vision device and the magnetorheological processing module in combination with the maximum second position; B4: The optical element to be processed is processed in combination with the fourth variable range, the maximum second position and the maximum ribbon thickness. During the processing, the real-time control module adjusts the second position in real time.

10. The nozzle-adjustable magnetorheological polishing method according to claim 9, characterized in that: Step B1 includes the following steps: B11: Controlling the polishing wheel to process the test optical element at different polishing gaps, calculating the removal function volume removal rate at each processing position, and measuring the ribbon thickness at each processing position in real time using the machine vision device, and fitting a sixth conversion relationship between the ribbon thickness and the removal function volume removal rate in the conversion relationship module; B12: changing the second position individually, controlling the polishing wheel to process the test optical element at different polishing gaps, obtaining a removal function volume removal rate at each processing position, and fitting a seventh conversion relationship between the removal function volume removal rate and the second position in the conversion relationship module; B13: Obtain the second conversion relationship according to the sixth conversion relationship and the seventh conversion relationship.

11. The nozzle-adjustable magnetorheological polishing method according to claim 10, characterized in that: In step B4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the machine vision device is compared with the fourth variable range: If the current ribbon thickness is within the fourth variable range, there is no need to adjust the current second position; If the current ribbon thickness is not within the fourth variable range, the current second position needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjusting the current second position to the maximum second position; If the current ribbon thickness is less than the maximum ribbon thickness, the current second position is adjusted according to the following formula: in, represents the second conversion relationship, Indicates the current ribbon thickness, Indicates the current second position.

12. A magnetorheological polishing method with a variable removal function, based on the magnetorheological polishing device based on machine vision adjustment according to any one of claims 1 to 5, characterized in that: The following steps are involved: C1: Controlling the polishing wheel to process the test optical element with different polishing gaps to obtain the removal function; simultaneously, recording the change in ribbon thickness at each processing point through the machine vision device during the processing, and obtaining an eighth conversion relationship between the volume removal rate of the removal function at each processing point and the ribbon thickness in the conversion relationship module; C2: using the processing program module to obtain the processing program according to the removal function, and importing the processing program into the magnetorheological processing module; C3: setting a fifth variable range of the volume removal rate of the removal function, and obtaining a sixth variable range corresponding to the ribbon thickness according to the eighth conversion relationship; Setting a maximum removal function volume removal rate, and obtaining a corresponding maximum ribbon thickness according to the eighth conversion relationship; C4: controlling the time calculation module to adjust the machine vision device and the magnetorheological processing module in combination with the maximum removal function volume removal rate; C5: controlling the magnetorheological processing module to process the optical element to be processed according to the sixth variable range, and calculating the removal function of each processing point during the processing to obtain a set of variable removal functions, thereby generating a new processing program; C6: Importing a new processing program into the magnetorheological processing module, and then performing secondary processing on the optical element to be processed.

13. The magnetorheological polishing method with variable removal function according to claim 12, characterized in that: In step C5, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the machine vision device is compared with the sixth variable range: If the current ribbon thickness is within the sixth variable range, there is no need to modify the current removal function. Perform calculations; If the current ribbon thickness is not within the sixth variable range, the current removal function needs to be calculated: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, the removal function of the current processing point is calculated by the following formula: , and then get the set of variable removal functions : ； in, Indicates the current ribbon thickness, Indicates the maximum ribbon thickness The corresponding maximum removal function volume removal rate, represents the eighth conversion relationship; If the current ribbon thickness is less than the maximum ribbon thickness, the removal function of the current processing point is calculated by the following formula: , and then get the set of variable removal functions : ； in, Indicates the volume removal rate of the removal function corresponding to the current processing point; Remove the function set The next time the processing parameters are input, a new processing control program is generated.

14. A magnetorheological polishing method with actuator adjustment, based on the magnetorheological polishing device with machine vision adjustment according to any one of claims 1 to 5, characterized in that: The following steps are involved: D1: controlling the polishing wheel to process the test optical element with different polishing gaps, and obtaining the third conversion relationship in the conversion relationship module; D2: Setting the seventh variable range of the actuator group output and obtaining the eighth variable range corresponding to the ribbon thickness according to the third conversion relationship; setting the maximum actuator group output and obtaining the corresponding maximum ribbon thickness according to the third conversion relationship; D3: controlling the time calculation module to adjust the machine vision device and the magnetorheological processing module in combination with the maximum actuator group output; D4: In combination with the eighth variable range, the maximum output of the actuator group and the maximum ribbon thickness, the optical element to be processed is processed. During the processing, the real-time control module adjusts the output of the actuator group in real time until the magnetorheological processing module is controlled to traverse all processing points on the optical element to be processed.

15. The magnetorheological polishing method with actuator adjustment according to claim 14, characterized in that: Step D1 includes the following steps: D11: Controlling the polishing wheel to process the test optical element at different polishing gaps, and measuring the ribbon thickness at each processing position in real time by the machine vision device, and fitting an eleventh conversion relationship between the ribbon thickness and the polishing gap in the conversion relationship module; D12: The change in the polishing gap is the output of the actuator group, and the third conversion relationship is obtained by combining the eleven conversion relationships.

16. The magnetorheological polishing method with actuator adjustment according to claim 15, characterized in that: In step D4, when the polishing wheel is controlled to move to the current processing position, the current ribbon thickness measured by the machine vision device is compared with the eighth variable range: If the current ribbon thickness is within the eighth variable range, there is no need to adjust the current output of the actuator group; If the current ribbon thickness is not within the eighth variable range, the output of the current actuator group needs to be adjusted: If the current ribbon thickness is greater than or equal to the maximum ribbon thickness, adjusting the current actuator group output to the maximum actuator group output; If the current ribbon thickness is less than the maximum ribbon thickness, the output of the current actuator group is adjusted according to the following formula: in, represents the third conversion relationship, Indicates the current ribbon thickness, Indicates the current output of the actuator group.

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