CMP (Chemical Mechanical Polishing) polishing machine for surface mirror finishing of aviation high-end seat

Abstract

The invention discloses a CMP (Chemical Mechanical Polishing) polishing machine for mirror finishing of the surface of an aviation high-end seat, and relates to the technical field of polishing machines. Through cooperation of the polishing assembly and the correction assembly, it is conveniently ensured that the polishing pad is in a horizontal state all the time, and then through cooperation of the detection assembly and the correction assembly, the correction base can conveniently flatten the polishing pad according to real-time data; an analysis module is used for judging according to accurate data, only a real uneven area is corrected, the situation that a relatively flat part is removed due to overall leveling of existing equipment is avoided, the service life of a polishing pad is prolonged, the replacement frequency is reduced, and therefore the production cost is greatly reduced; real-time monitoring and accurate correction ensure that the polishing pad is in a good working state all the time, and it is ensured that the surface of the aviation high-end seat can obtain the consistent and high-quality mirror surface effect during polishing every time.

Description

Technical Field

[0001] The invention relates to the technical field of polishing machines, in particular to a CMP polishing machine used for mirror finishing of the surfaces of high-end aviation seats. Background Art

[0002] CMP technology is a surface planarization technique that seamlessly combines chemical etching and mechanical polishing. Its core principle lies in the synergistic effect of chemical and mechanical action, like a carefully choreographed duet, where both are mutually complementary and indispensable. The mechanical polishing process directly ensures the flatness and levelness of the polished surface. However, polishing pad wear inevitably leads to a decrease in polishing levelness, and all existing equipment typically includes a polishing pad leveling mechanism.

[0003] The existing leveling structure only acts on the overall leveling and ignores the actual surface condition of the polishing pad, which results in the removal of some relatively flat parts along with the lowest point of the plane, greatly increasing the consumption of the polishing pad and directly increasing production costs;

[0004] Therefore, the present invention improves the existing equipment in view of the above problems. Summary of the Invention

[0005] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a CMP polishing machine for mirror finishing of the surface of high-end aviation seats.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical solution: a CMP polishing machine for mirror finishing of the surface of high-end aviation seats, comprising a workbench, wherein the workbench is placed on a horizontal table through feet around the bottom surface, a controller is installed and connected to the rear of the top surface of the workbench, the controller is provided with a display screen and an indicator light, a polishing pool is fixedly installed in front of the controller on the top surface of the workbench, a rotating seat is provided inside the polishing pool, a polishing pad is installed on the top surface of the rotating seat, and a polishing assembly, a correction assembly and a detection assembly are provided on the top surface of the workbench around the polishing pool;

[0007] The controller is also equipped with an intelligent control component, which includes an acquisition module, an analysis module and an alarm module;

[0008] an acquisition module for detecting the distance data between the detection head and the polishing pad, and transmitting the detected distance data to the analysis module;

[0009] an analysis module, which analyzes the detection spacing data and determines the accuracy of the detection spacing data. After determining that the detection spacing data is accurate, it analyzes the flatness of the polishing pad surface based on the detection spacing data, generates a correction signal and a replacement signal based on the flatness of the polishing pad surface, and transmits the correction signal and the replacement signal to the warning module;

[0010] The warning module receives the signal transmitted by the analysis module and performs corresponding operations.

[0011] Preferably, the polishing assembly includes a polishing head, the rear end of the bottom surface of the polishing head is rotatably connected to the workbench through a rotating shaft, and a connecting rod is provided at the front end of the bottom surface of the polishing head. The connecting rod is rotated and lifted by a transmission device in the polishing head, and the bottom end of the connecting rod is installed and connected to a workpiece disk.

[0012] Preferably, a liquid outlet is provided on the other symmetrical side of the polishing head, and the liquid outlet is connected to the liquid storage tank and the pump inside the workbench. The top of the liquid outlet is connected to a liquid adding tube, and one end of the liquid adding tube is connected to the liquid outlet through the rotation of the turntable, and the other end of the liquid adding tube opens to the polishing pad through an elbow.

[0013] Preferably, the correction assembly includes a correction seat, the front end of the bottom of the correction seat is rotatably connected to one side of the front end of the top of the workbench, the rear end of the bottom of the correction seat is fixedly connected to the correction disk through a rotating shaft, and the correction seat realizes the rotation and lifting of the correction disk through a built-in transmission device.

[0014] Preferably, the detection assembly includes a detection seat, one end of the detection seat is rotatably connected to one side of the front end of the top surface of the workbench, and the other end of the detection seat is fixedly connected to a drive box.

[0015] Preferably, a motor is mounted and fixed on the front end face of the drive box, a threaded rod is fixedly connected to the rear end face of the motor, both ends of the threaded rod are rotatably connected in the drive box, a threaded seat is provided on the outer side face of the threaded rod, a sliding strip opening is provided on the bottom face of the drive box in cooperation with the threaded seat, and a detection head is fixedly connected to the bottom face of the threaded seat.

[0016] Preferably, the analysis module performs the following steps to determine the accuracy of the test data:

[0017] S1: average the distance data of multiple distance data detected at the same time and standard deviation Calculation of the mean value and standard deviation Set the fluctuation range of the detection interval data at the same time, and set the fluctuation range to , the detection interval data that is not within the fluctuation range in the detection interval data at the same time is determined as an abnormal value;

[0018] S2: The number of outliers Perform statistics and detect the number of spacing data at the same time Compare, if the preset comparison threshold , it is determined that the proportion of abnormal values ​​in the detection data is large, affecting the accuracy of the detection data, and the mean of the detection interval data corresponding to the time point is calculated, and the calculated mean is recorded as the inaccurate mean; otherwise, it is determined that there is no abnormality in the detection data. After removing the abnormal values, the mean of the remaining detection interval data is calculated, and the calculated mean is used as the detection interval data detected at the time point;

[0019] S3: After the detection is completed, the number of inaccurate mean values ​​in the detection distance data is counted. Perform statistics, if the preset comparison threshold , then the detection distance data is determined to be inaccurate and the detection operation is repeated. is the total number of all detection interval data within the detection time; otherwise, the detection interval data is analyzed.

[0020] Preferably, the steps of the analysis module for flatness determination are as follows:

[0021] K1: Detect the spacing data of the unworn polishing pad, and set the detected spacing data as the standard detection spacing data;

[0022] K2: Arrange the detection interval data in the order of acquisition time, and then draw the corresponding coordinate points in the coordinate system constructed by the detection interval data and acquisition time and connect them, which is recorded as the connection line , and then draw and connect the coordinate points of the standard detection interval data corresponding to the acquisition time in the coordinate system, which is recorded as the connection line ; Divide each line into Segment, set the detection point pair connection line at the evenly divided position and connections The distance data between them is detected, then the connection and connections The average distance between , is the sum of the detection distance data of n detection points;

[0023] K3: If the preset distance threshold , then the line segment corresponding to the detection spacing data is marked as a fluctuation line segment, and the fluctuation count Plus one; otherwise, the maximum value of the detection distance data of the corresponding segment detection point is obtained. If the maximum value is greater than the preset distance threshold, the segment corresponding to the detection distance data is also marked as a fluctuation segment, and the fluctuation count is plus one;

[0024] K4: If , it is determined that the surface condition of the polishing pad is abnormal, a correction signal is generated, and the correction signal is transmitted to the warning module; if , it is determined that the surface condition of the polishing pad is abnormal, a replacement signal is generated, and the replacement signal is transmitted to the warning module. and are preset proportional coefficients, and , is the number of collection time periods.

[0025] Preferably, the steps of the warning module performing the operation are as follows:

[0026] M1: After receiving the correction signal, it controls the movement of the correction seat, moves the correction disk on the correction seat to the position of the polishing pad, and performs correction operation on the polishing pad; acquires the detection spacing data at the corresponding position forward according to the last acquisition time on the coordinate system, and obtains the position to be corrected on the polishing pad;

[0027] M2: After receiving the replacement signal, the buzzer module set inside the controller will issue a buzzer warning to remind the staff to replace the polishing pad in time.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] 1. The coordination of the polishing assembly and the correction assembly ensures that the polishing pad is always level, thus ensuring the polishing quality. Furthermore, the coordination of the detection assembly and the correction assembly allows the correction seat to level the polishing pad based on real-time data, thus maximizing the utilization of the polishing pad surface and resolving the problem that existing equipment only leveled the entire pad, leaving only a portion of the flat surface unused and resulting in a short polishing pad life.

[0030] 2. The analysis module uses accurate data to make corrections only to truly uneven areas, avoiding the overall leveling that results in the removal of relatively flat areas as in existing equipment. This extends the service life of the polishing pad, reduces the frequency of replacement, and thus significantly reduces production costs. Real-time monitoring and precise correction ensure that the polishing pad is always in good working condition, ensuring that the surface of high-end aviation seats can achieve a consistent and high-quality mirror effect every time it is polished. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0032] Figure 1 This is a three-dimensional schematic diagram of the overall appearance of the device proposed by the present invention;

[0033] Figure 2 This is a front view schematic diagram of the overall appearance of the device proposed by the present invention;

[0034] Figure 3 This is a schematic side view of the overall appearance of the device proposed in the present invention;

[0035] Figure 4 This is a schematic three-dimensional diagram of the detection component structure proposed by the present invention;

[0036] Figure 5 This is a schematic cross-sectional view of the detection assembly structure proposed by the present invention;

[0037] Figure 6 This is a flow chart of the system proposed in the present invention.

[0038] Serial numbers in the figure: 1. workbench; 2. controller; 3. polishing pool; 4. polishing pad; 5. polishing head; 6. workpiece disk; 7. correction seat; 8. correction plate; 9. liquid outlet; 10. liquid adding pipe; 11. detection seat; 12. drive box; 13. motor; 14. detection head; 15. threaded rod. DETAILED DESCRIPTION

[0039] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0040] Example: See Figure 1-6 The CMP polishing machine for mirror finishing of high-end aviation seats in the present invention comprises a workbench 1, which is placed on a horizontal tabletop through feet around the bottom surface. A controller 2 is installed and connected to the rear of the top surface of the workbench 1. The controller 2 is provided with a display screen and an indicator light. A polishing pool 3 is fixed in front of the controller 2 on the top surface of the workbench 1. A rotating seat is provided inside the polishing pool 3. A polishing pad 4 is installed on the top surface of the rotating seat. Polishing components, correction components and detection components are provided on the top surface of the workbench 1 around the polishing pool 3. The modular design facilitates maintenance and upgrading of the device. The polishing component comprises a polishing head 5. The rear end of the bottom surface of the polishing head 5 is rotatably connected to the polishing head 5 by a rotating shaft. The workbench 1 and the polishing head 5 are provided with a connecting rod at the front end of the bottom, which is rotated and lifted by the transmission device inside the polishing head 5. The bottom end of the connecting rod is installed and connected with a workpiece disk 6. The cooperation between the polishing head 5 and the workpiece disk 6 is convenient for clamping and polishing the workpiece; a liquid outlet 9 is provided on the other symmetrical side of the polishing head 5, which is connected to the liquid storage tank and the pump inside the workbench 1, and the top of the liquid outlet 9 is connected to a liquid adding pipe 10. One end of the liquid adding pipe 10 is connected to the liquid outlet 9 through the rotation of the turntable, and the other end of the liquid adding pipe 10 is opened to the polishing pad 4 through an elbow. The cooperation between the liquid adding pipe 10 and the liquid outlet 9 is convenient for controlling the flow of the polishing liquid to be maximized, thereby improving the efficiency of using the polishing liquid.

[0041] In the present invention, the correction component includes a correction seat 7, the front end of the bottom of the correction seat 7 is rotatably connected to one side of the front end of the top of the workbench 1, and the rear end of the bottom of the correction seat 7 is fixedly connected to a correction disk 8 through a rotating shaft. The correction seat 7 realizes the rotation and lifting of the correction disk 8 through a built-in transmission device. Through the cooperation of the correction seat 7 and the correction disk 8, it is convenient to automatically control the correction disk 8 to grind and flatten the polishing pad 4; the detection component includes a detection seat 11, one end of the detection seat 11 is rotatably connected to one side of the front end of the top of the workbench 1, and the other end of the detection seat 11 is fixedly connected to a drive box 12. Through the cooperation of the detection seat 11 and the drive box 12, it is convenient to rotate the drive box 12 to disassemble and assemble the protection device; the front end face of the drive box 12 is fixedly installed with a motor 13, and the rear end face of the motor 13 is fixedly connected to a threaded rod 15. Both ends of the threaded rod 15 are rotatably connected to the drive box 12, and the outer side surface of the threaded rod 15 is cooperated with a threaded seat, and the bottom surface of the drive box 12 is cooperated with the threaded seat to provide a sliding strip opening, and the bottom surface of the threaded seat is fixedly connected to the detection head 14. Through the cooperation of the motor 13 and the detection head 14, it is convenient to drive the detection head 14 back and forth to detect the horizontality of the polishing pad 4.

[0042] The controller 2 is also provided with an intelligent control component, which includes an acquisition module, an analysis module and an alarm module;

[0043] During the movement of the detection head 14 on the threaded rod 15, the distance data between the detection head 14 and the polishing pad 4 is detected, and the average value of the distance data detected at the same time is calculated. and standard deviation Calculation of the mean value and standard deviation Set the fluctuation range of the detection interval data at the same time, and set the fluctuation range to , the detection interval data that is not within the fluctuation range in the detection interval data at the same time is judged as an abnormal value; the number of abnormal values Perform statistics and detect the number of spacing data at the same time Compare, if the preset comparison threshold , it is determined that the proportion of abnormal values ​​in the detection data is large, affecting the accuracy of the detection data, and the mean of the detection interval data corresponding to the time point is calculated, and the calculated mean is recorded as the inaccurate mean; otherwise, it is determined that there is no abnormality in the detection data. After removing the abnormal values, the mean of the remaining detection interval data is calculated, and the calculated mean is used as the detection interval data detected at the time point;

[0044] After the test is completed, the number of inaccurate mean values ​​in the test interval data is counted. Perform statistics, if the preset comparison threshold , then the detection distance data is determined to be inaccurate and the detection operation is repeated. is the total number of all detection interval data within the detection time; otherwise, the detection interval data is analyzed;

[0045] The spacing data of the unworn polishing pad 4 is detected, and the detected spacing data is set as the standard detection spacing data; the detection spacing data is arranged in the order of acquisition time, and then the corresponding coordinate points are drawn and connected in the coordinate system constructed by the detection spacing data and acquisition time, which is recorded as the connection line , and then draw and connect the coordinate points of the standard detection interval data corresponding to the acquisition time in the coordinate system, which is recorded as the connection line ; Divide each line into Segment, set the detection point pair connection line at the evenly divided position and connections The distance data between them is detected, then the connection and connections The average distance between , is the sum of the detection distance data of n detection points; if the preset distance threshold , then the line segment corresponding to the detection spacing data is marked as a fluctuation line segment, and the fluctuation count Plus one; otherwise, the maximum value of the detection distance data of the corresponding segment detection point is obtained. If the maximum value is greater than the preset distance threshold, the segment corresponding to the detection distance data is also marked as a fluctuation segment, and the fluctuation count is plus one;

[0046] like , it is determined that the surface condition of the polishing pad 4 is abnormal, a correction signal is generated, and the correction signal is transmitted to the warning module; if , it is determined that the surface condition of the polishing pad 4 is abnormal, a replacement signal is generated, and the replacement signal is transmitted to the warning module, and are preset proportional coefficients, and , is the number of collection time periods.

[0047] Working principle: When the present invention is used, first power on all electrical equipment, then install the polishing pad 4 on the rotating seat, then install the workpiece on the workpiece disk 6, then rotate the polishing head 5 so that the workpiece on it is suspended above the polishing pad 4, then rotate the liquid adding pipe 10 so that the opening of the liquid adding pipe 10 is located near the polishing position, then rotate the detection seat 11 so that the drive box 12 is located above the polishing pad 4, then start the motor 13, rotate the threaded rod 15 to drive the threaded seat to move back and forth in the drive box 12, thereby moving the detection head 14 back and forth, and at the same time drive the rotating seat to rotate through the workbench 1, thereby driving the polishing pad 4 rotates to realize the ability to detect the surface condition of the polishing pad 4. If the surface of the polishing pad 4 meets the standard, no correction is required. If it does not meet the standard, it is necessary to rotate the correction seat 7 so that the correction disk 8 is suspended above the polishing pad 4, and then the rotating seat is driven to rotate by the workbench 1. At the same time, the correction disk 8 is lowered by the correction seat 7 and driven to rotate. The polishing pad 4 is leveled according to the detection data to avoid excessive consumption of the polishing pad 4 as much as possible, so as to realize the ability to extend the service life of the polishing pad 4. After the correction is completed, the workpiece is lowered and rotated by the polishing head 5, and the polishing work is completed in coordination with the rotation of the polishing pad 4 and the polishing liquid transported by the liquid feeding pipe 10.

[0048] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A CMP polishing machine for mirror finishing of high-end aviation seats, comprising a workbench (1), characterized in that: The workbench (1) is placed on a horizontal tabletop via legs around the bottom surface; a controller (2) is mounted and connected to the rear portion of the top surface of the workbench (1); a display screen and an indicator light are provided on the controller (2); a polishing pool (3) is fixedly mounted in front of the controller (2) on the top surface of the workbench (1); a rotating seat is provided inside the polishing pool (3); a polishing pad (4) is installed on the top surface of the rotating seat; a polishing assembly, a correction assembly and a detection assembly are provided on the top surface of the workbench (1) around the polishing pool (3); The controller (2) is also provided with an intelligent control component, which includes an acquisition module, an analysis module and an alarm module; an acquisition module for detecting the distance data between the detection head (14) and the polishing pad (4), and transmitting the detected distance data to the analysis module; an analysis module for analyzing the detection spacing data and determining the accuracy of the detection spacing data; after determining that the detection spacing data is accurate, analyzing the flatness of the surface of the polishing pad (4) through the detection spacing data; and generating a correction signal and a replacement signal according to the flatness of the surface of the polishing pad (4), and transmitting the correction signal and the replacement signal to the warning module; The warning module receives the signal transmitted by the analysis module and performs corresponding operations.

2. The CMP polishing machine for mirror finishing of high-end aviation seats according to claim 1, characterized in that: The polishing assembly comprises a polishing head (5), the rear end of the bottom surface of the polishing head (5) is rotatably connected to the workbench (1) via a rotating shaft, a connecting rod is provided at the front end of the bottom surface of the polishing head (5), the connecting rod is rotated and lifted by a transmission device in the polishing head (5), and the bottom end of the connecting rod is connected to a workpiece disk (6).

3. The CMP polishing machine for mirror finishing of high-end aviation seats according to claim 2, characterized in that: A liquid outlet (9) is provided on the other symmetrical side of the polishing head (5), and the liquid outlet (9) is connected to the liquid storage tank and the pump inside the workbench (1). The top of the liquid outlet (9) is connected to a liquid adding pipe (10), and one end of the liquid adding pipe (10) is connected to the liquid outlet (9) by rotating the turntable, and the other end of the liquid adding pipe (10) is opened toward the polishing pad (4) through an elbow.

4. The CMP polishing machine for mirror finishing of high-end aviation seats according to claim 1, characterized in that: The correction assembly comprises a correction seat (7), the front end of the bottom surface of the correction seat (7) is rotatably connected to one side of the front end of the top surface of the workbench (1), the rear end of the bottom surface of the correction seat (7) is fixedly connected to a correction disk (8) via a rotating shaft, and the correction seat (7) realizes the rotation and lifting of the correction disk (8) through a built-in transmission device.

5. The CMP polishing machine for mirror finishing of high-end aviation seats according to claim 1, characterized in that: The detection assembly comprises a detection seat (11), one end of the detection seat (11) is rotatably connected to one side of the front end of the top surface of the workbench (1), and the other end of the detection seat (11) is fixedly connected to a drive box (12).

6. The CMP polishing machine for mirror finishing of high-end aviation seats according to claim 5, characterized in that: A motor (13) is fixedly mounted on the front end surface of the drive box (12), a threaded rod (15) is fixedly connected to the rear end surface of the motor (13), both ends of the threaded rod (15) are rotatably connected to the drive box (12), a threaded seat is provided on the outer side surface of the threaded rod (15), a sliding strip opening is provided on the bottom surface of the drive box (12) in cooperation with the threaded seat, and a detection head (14) is fixedly connected to the bottom surface of the threaded seat.

7. The CMP polishing machine for mirror finishing of high-end aviation seats according to claim 1, characterized in that: The analysis module determines the accuracy of the test data in the following steps: S1: average the distance data of multiple distance data detected at the same time and standard deviation Calculation of the mean value and standard deviation Set the fluctuation range of the detection interval data at the same time, and set the fluctuation range to , the detection interval data that is not within the fluctuation range in the detection interval data at the same time is determined as an abnormal value; S2: The number of outliers Perform statistics and detect the number of spacing data at the same time Compare, if the preset comparison threshold , it is determined that the proportion of abnormal values ​​in the detection data is large, affecting the accuracy of the detection data, and the mean of the detection interval data corresponding to the time point is calculated, and the calculated mean is recorded as the inaccurate mean; otherwise, it is determined that there is no abnormality in the detection data. After removing the abnormal values, the mean of the remaining detection interval data is calculated, and the calculated mean is used as the detection interval data detected at the time point; S3: After the detection is completed, the number of inaccurate mean values ​​in the detection distance data is counted. Perform statistics, if the preset comparison threshold , then the detection distance data is determined to be inaccurate and the detection operation is repeated. The total number of all detection interval data within the detection time; Otherwise, the detection distance data is analyzed.

8. The CMP polishing machine for mirror finishing of high-end aviation seats according to claim 7, characterized in that: The steps for the analysis module to judge the flatness are as follows: K1: detecting the spacing data of the unworn polishing pad (4), and setting the detected spacing data as standard detection spacing data; K2: Arrange the detection interval data in the order of acquisition time, and then draw the corresponding coordinate points in the coordinate system constructed by the detection interval data and acquisition time and connect them, which is recorded as the connection line , and then draw and connect the coordinate points of the standard detection interval data corresponding to the acquisition time in the coordinate system, which is recorded as the connection line ; Divide each line into Segment, set the detection point pair connection line at the evenly divided position and connections The distance data between them is detected, then the connection and connections The average distance between , is the sum of the detection distance data of n detection points; K3: If the preset distance threshold , then the line segment corresponding to the detection spacing data is marked as a fluctuation line segment, and the fluctuation count plus one; Otherwise, the maximum value of the detection distance data of the corresponding line segment detection point is obtained. If the maximum value is greater than the preset distance threshold, the line segment corresponding to the detection distance data is also marked as a fluctuating line segment, and the fluctuation count is plus one; K4: If , it is determined that the surface condition of the polishing pad (4) is abnormal, a correction signal is generated, and the correction signal is transmitted to the warning module; if , it is determined that the surface condition of the polishing pad (4) is abnormal, a replacement signal is generated, and the replacement signal is transmitted to the warning module, and are preset proportional coefficients, and , is the number of collection time periods.

9. The CMP polishing machine for mirror finishing of high-end aviation seats according to claim 8, characterized in that: The steps for the alert module to perform operations are as follows: M1: After receiving the correction signal, the correction seat (7) is controlled to move the position, and the correction disk (8) on the correction seat (7) is moved to the position of the polishing pad (4) to perform a correction operation on the polishing pad (4); the detection spacing data at the corresponding position is acquired according to the last acquisition time on the coordinate system, and the position to be corrected on the polishing pad (4) is known; M2: After receiving the replacement signal, a buzzer module provided inside the controller (2) emits a buzzer warning to remind the staff to replace the polishing pad (4) in time.

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