Multi-nozzle cooperative plasma processing equipment for self-adaptive processing of curved surface

Abstract

The invention discloses multi-nozzle cooperative plasma processing equipment for curved surface self-adaptive processing. The multi-nozzle cooperative plasma processing equipment comprises a box body, and a jet flow spray gun module, a camera shooting light source and a microscope camera which are mounted in the box body. An electric push rod is installed on the upper portion of a sleeve of the jet spray gun and connected with a variable-rigidity spherical motor, and the motor is hollow and used for containing pipelines needed by work of the spray gun, such as an insulating high-voltage cable, a gas circuit pipeline and a miniature brushless hollow motor cable. A spherical motor rotor flange is connected with a jet spray gun shell, a brushless hollow motor is embedded in the shell, and the brushless hollow motor is connected with a variable cross-section top cover in a variable cross-section channel and drives the variable cross-section top cover to rotate; rotating shafts are arranged above and below the blades in the variable-section channel, blade rotating shaft sliding groove holes are formed in the variable-section top cover, rotating shaft fixing holes are formed in the base, and the rotating angle is controlled through the brushless hollow motor to open and close the blades to control the size of the section of the airflow channel; the lower part of the base is provided with a hollow stud and connected with a small insulating ceramic; the upper part of the insulating ceramic is provided with threads; the upper part of the insulating ceramic is connected with the base; the lower part of the insulating ceramic is provided with a jet excitation electrode; rotary nozzles are mounted at the lower end of the shell; the jet spray gun body is wrapped by a compressible protective sleeve. When the plasma jet spray gun rotates, the deflection angle of + / -30 degrees can be adjusted, a larger-area and complex curved surface can be treated, the variable-section channel adjusts the airflow intensity of different nozzles, different required treatment effects in different areas are achieved, microscopic camera shooting is integrated, and the treatment result feedback closed-loop function is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma processing, and in particular to a multi-nozzle cooperative plasma processing device for adaptively processing curved surfaces. Background Art

[0002] In the field of material surface modification, the importance of atmospheric plasma equipment is increasing day by day. This equipment is able to generate plasma in a normal pressure atmospheric environment, and with the help of the high activity of plasma, it can perform operations such as purification, activation, and coating on the surface of materials. Through these treatments, the surface energy of the material can be improved, making its combination with subsequently added coatings, adhesives and other substances stronger. In the electronics manufacturing industry, atmospheric plasma equipment can optimize the welding performance of electronic components; in the automotive industry, it helps to improve the adhesion of the surface coating of automotive parts; in the textile industry, it can improve the hydrophilicity and dyeing properties of fabrics. Because of this, plasma equipment is gradually emerging in multiple industries by virtue of its own advantages, becoming the core technical force to promote product quality upgrades, and has extremely considerable room for development. Currently:

[0003] 1. The multi-nozzle system on the market adopts a fixed spacing and rigid structure, which cannot adapt to the morphological changes of large curvature surfaces (such as fan blades), resulting in uneven jet coverage.

[0004] 2. Traditional air flow ducts adopt a rigid constant cross-section design, and the gas flow rate decreases significantly as the duct extends.

[0005] 3. Traditional processes operate according to preset parameters and are unable to cope with fluctuations in the initial surface condition of the workpiece (such as uneven oxide layer thickness and differences in oil residue) and parameter drift caused by equipment aging. This can easily lead to "over-processing" or "under-processing." Problems are only detected after they occur, affecting product safety and production efficiency. Summary of the Invention

[0006] (1) Technical problems solved

[0007] In view of the deficiencies of the prior art, the present invention provides a multi-nozzle collaborative plasma processing device for surface adaptive processing.

[0008] Technical Solution

[0009] To achieve the above objectives, the present invention provides the following technical solution: a multi-nozzle collaborative plasma processing device for surface adaptive processing, comprising:

[0010] The box body has a high-voltage line interface and an air inlet on the front, and a cooling fan and a fixed mounting block installed on the top of the box body;

[0011] The box is equipped with a jet spray gun module, a camera light source, and a microscope camera;

[0012] As a preferred solution of the present invention: the jet spray gun module is located inside the box, and there are seven jet spray gun modules. One jet spray gun module is installed in the center of the box, and the remaining six jet spray gun modules are arranged in a ring array.

[0013] As a preferred solution of the present invention: the jet spray gun module includes an electric push rod, a variable stiffness spherical motor, a jet spray gun body and a compressible protective sleeve. An electric push rod is provided on the upper part of the jet spray gun module, and the electric push rod is fixedly connected to the jet spray gun module sleeve by a screw. The internal thread at the lower part of the electric push rod is connected to the spherical motor bolt, a flange is provided on the upper part of the spherical motor rotor, and the jet spray gun body is flange-connected to the spherical motor rotor.

[0014] As a preferred solution of the present invention: the jet spray gun body includes a shell, an internal brushless hollow motor, a variable-section channel, a small insulating ceramic, a jet excitation electrode, a high-voltage pole, a rotating nozzle and a compressible protective sleeve. The brushless hollow motor is embedded in the jet spray gun shell, and the variable-section channel includes a variable-section top cover, blades and a base. The brushless hollow motor is connected to the variable-section top cover in the variable-section channel to drive the rotation; the blades are respectively provided with a rotating shaft at the top and bottom, the variable-section top cover is designed with a blade rotating shaft sliding slot, and the base is designed with a rotating shaft fixing hole to fix the blades, the lower part of the base is designed with a hollow stud to connect a small insulating ceramic, and the upper and lower parts of the insulating ceramic are designed with threads to connect the base and install the jet excitation electrode, and a hole is left on the upper part of the jet excitation electrode to install the high-voltage pole; the lower end of the shell is installed with a rotating nozzle, and the compressible protective sleeve is connected from the lower part of the sleeve to the upper part of the rotating nozzle.

[0015] As a preferred solution of the present invention: the camera light source is installed at the lower center of the box.

[0016] As a preferred solution of the present invention: the microscope camera is installed on the hexagonal edge of the bottom of the box.

[0017] Beneficial effects

[0018] Compared with the prior art, the present invention provides a multi-nozzle collaborative plasma processing device for surface adaptive processing, which has the following beneficial effects:

[0019] 1. By utilizing the electric push rod and variable stiffness spherical motor of the jet spray gun module, the spray gun can move freely in multiple degrees of freedom, which can be used for surface treatment of large and small curved products without dead angles. At the same time, it cooperates with the video light source and microscope camera to realize the closed loop of timely feedback on the treatment effect.

[0020] 2. By installing a brushless central control motor and variable cross-section channel inside the jet spray gun, the jet spray gun power and airflow can be adjusted to achieve different treatment effects in different areas. It can adapt to different materials (such as metals and polymers) and treatment requirements (such as etching, activation, and coating), and optimize process parameters by adjusting the cross-sectional area in real time.

[0021] 3. Through the miniaturization of insulating ceramics, the processing cost is reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic front view of a multi-nozzle collaborative plasma processing device for adaptively processing curved surfaces according to the present invention;

[0023] Figure 2 This is a schematic diagram of a front view of a box cross-sectional structure of a multi-nozzle collaborative plasma processing device for adaptively processing curved surfaces according to the present invention;

[0024] Figure 3 This is a schematic diagram of a cross-sectional structure of a multi-nozzle collaborative plasma processing device for adaptively processing curved surfaces according to the present invention;

[0025] Figure 4 A schematic diagram of a half-section structure of a jet spray gun module of a multi-nozzle collaborative plasma treatment device for surface adaptive processing according to the present invention;

[0026] Figure 5 A cross-sectional view of a jet spray gun of a multi-nozzle collaborative plasma processing device for adaptively processing curved surfaces according to the present invention;

[0027] Figure 6 This is an exploded view of the jet spray gun of a multi-nozzle collaborative plasma processing equipment for surface adaptive processing according to the present invention.

[0028] In the figure: 1. Box body; 11. High-voltage line interface; 12. Air inlet; 13. Cooling fan; 14. Mounting block; 2. Jet spray gun module; 21. Ring guide mounting member; 22. Electric push rod; 23. Spherical motor; 24. Compressible protective tube sleeve; 3. Video light source; 4. Microscope camera; 5. Jet spray gun; 51. Shell; 52. Brushless hollow motor; 53. Variable-section channel; 531. Variable-section top cover; 532. Blades; 533. Base; 54. Small insulating ceramic; 55. Jet excitation electrode; 56. High-voltage pole; 57. Rotating nozzle; 6. Gas diversion block. DETAILED DESCRIPTION

[0029] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0030] See also Figure 1-6 , a multi-nozzle collaborative plasma processing equipment for surface adaptive processing, comprising:

[0031] The box body 1 has a high-voltage line interface 11 and an air inlet 12 on the front of the box body 1, and a cooling fan 13 and a fixed mounting block 14 are installed on the top of the box body;

[0032] The box 1 is equipped with a jet spray gun module 2, a camera light source 3, and a microscope camera 4;

[0033] There are seven sets of jet spray gun modules 2. One set is bolted to the top of the box body 1 via the flange of the annular guide mounting member 21 and is located in the center. The other six sets are installed in a circular array, with a 60° interval between them, which is twice the coverage area of ​​the jet spray gun module 2. This can provide 360-degree coverage of the entire treatment area at the bottom of the box body 1 without blind spots.

[0034] The jet spray gun module 2 is composed of an annular guide mounting part 21, and an electric push rod 22 is installed in the annular guide mounting part 21. The electric push rod 22 drives the remaining components at the bottom to push the position along the axis of the annular guide mounting part 21, so as to achieve the freedom adjustment of the module in height. The spherical motor 23 is arranged under the electric push rod 22. The spherical motor 23 directly drives the rotor through the magnetic field to achieve three-degree-of-freedom movement (pitch ±30°, yaw ±45°, rotation 360°), without a mechanical transmission chain, the accuracy is improved to ±0.02°, and the delay is reduced to <10ms. The processing effect is achieved by eliminating the jet incident angle deviation in curved surface processing (traditional >15°) and improving the coating uniformity (CV value is reduced from >35% to <8%). At the same time, the use of a spherical motor 23 reduces the weight of the equipment by 68% (from 2.8kg to 0.9kg) compared to traditional motors in terms of structural quality, while reducing mechanical wear and tear, and reducing the failure rate to 1 / 5 of the traditional solution (MTBF increased from 500 hours to 3000 hours). In the future, algorithm upgrades can be combined with deep collaboration with AI algorithms, for example: integrating the plasma tearing prediction model developed by Princeton University (intervening in unstable states 300ms in advance); combining digital twin technology to preview the jet coverage effects at different angles (such as COMSOL multi-physics simulation). This realizes the "perception-decision-execution" closed loop, replacing manual experience-based parameter adjustment. The spherical motor 23 is connected to the jet spray gun 5, and a compressible protective tube sleeve 24 is connected between them to protect users from accidental burns after the jet spray gun 5 has been used for a long time and the temperature has accumulated.

[0035] The jet spray gun 5 includes a housing 51, a brushless hollow motor 52 coaxially arranged at the upper end of the housing 51, a variable cross-section channel 53 below the brushless hollow motor 52, a small insulating ceramic 54 coaxially arranged below the variable cross-section channel (53), a jet excitation electrode 55 coaxially arranged below, and a high-voltage pole 56 coaxially arranged inside the two, and a rotating nozzle 57 arranged at the lower part of the housing. The housing 51 acts as a metal ground electrode, through electromagnetic shielding, grounding protection, heat dissipation management, flow field regulation and other multi-dimensional functions, to ensure the safe operation of the equipment and optimize the plasma performance. The brushless hollow motor 52 is fixedly connected to the variable cross-section top cover 531 of the variable cross-section channel 53. The motor drives the top cover, which is inserted into the rotating shaft provided on the upper part of the blade 532 through the blade rotating shaft sliding slot provided on the variable cross-section top cover 531. The blade opening and closing angle is controlled by the rotation angle. The rotating shaft provided on the lower part of the blade 532 is inserted into the rotating shaft fixing hole designed in the base 533. The base 533 is provided with four limiting claws, which rigidly limit the housing 51 to prevent rotation, thereby controlling the change in the cross-sectional channel area of ​​the airflow entering. According to the continuity equation: when the fluid flows in the pipeline, the mass flow rate through different cross-sections per unit time is constant (A1V1=A2V2), and the cross-sectional area A is inversely proportional to the flow velocity V. Bernoulli equation: an increase in flow velocity will lead to an increase in fluid dynamic pressure and a decrease in static pressure (P+ 1 / 2ρV2 = constant), forming a pressure gradient that affects the confinement and jet morphology of the plasma. When the cross-sectional area of ​​the pipe decreases, the gas flow rate increases significantly (such as the Laval nozzle effect), while the pressure decreases. When the cross-sectional area increases, the flow rate decreases and the pressure rises. This directly affects the plasma jet velocity and energy density at the spray gun outlet. According to the law of conservation of momentum: the jet exit velocity determines its penetration depth and impact energy, and the variable cross-sectional area can adjust the divergence angle and turbulence of the jet flow. This allows a converging pipe to produce a high-speed, concentrated plasma jet, while an expanding pipe can form a wide, low-flow jet. Because different processing scenarios have different requirements for plasma parameters (such as ion energy and active particle concentration), for example, etching requires high energy density (small cross-sectional area, high flow rate), while coating deposition requires low energy and high particle concentration (large cross-sectional area, low flow rate). The variable cross-sectional area can dynamically match these requirements, allowing the spray gun to adapt to different materials (such as metals, polymers) and processing requirements (such as etching, activation, coating), and optimize process parameters by adjusting the cross-sectional area in real time.

[0036] The imaging light source 3 is mounted in the lower center of the housing 1, with the jet spray gun module 2 passing through the hollow center to provide the required brightness for the microscope camera 4. The microscope camera 4 is mounted at the hexagonal corner of the lower layer of the housing 1, fully covering the surface being processed. Through a closed-loop logic: surface state acquisition → feature extraction and deviation calculation → control parameter correction → execution parameter adjustment → new state acquisition, this solves the problem that the traditional process, which operates according to preset parameters, cannot cope with fluctuations in the initial state of the workpiece surface (such as uneven oxide layer thickness and differences in oil residue) and parameter drift caused by equipment aging, which can easily lead to "over-processing" or "under-processing".

[0037] The gas diverter block 6 is installed on the upper part of the box body 1, parallel to the right side of the box body 1 at an angle of 120 degrees to the front side, thereby reducing the length of the connection with the air inlet pipe, saving space and reducing the difficulty of pipe connection.

[0038] The above are only specific embodiments of the present invention, but the technical features of the present invention are not limited thereto. Any simple changes, equivalent substitutions, or modifications based on the present invention to solve substantially the same technical problems and achieve substantially the same technical effects are all included in the scope of protection of the present invention.

Claims

1. A multi-nozzle collaborative plasma processing device for surface adaptive processing, comprising: A box body (1), wherein a high-voltage line interface (11) and an air inlet (12) are provided on the front of the box body (1), and a cooling fan (13) and a mounting block (14) are installed on the top of the box body (1); The invention is characterized in that: a jet spray gun module (2), a camera light source (3), a microscope camera (4) and a gas diversion block (6) are installed inside the box (1); The device also includes a control terminal for executing plasma treatment process control, wherein the plasma treatment process includes: collecting a workpiece surface state image through a microscope camera (4), calculating a treatment deviation parameter based on image feature extraction, generating a real-time control instruction of the jet spray gun module (2) according to the deviation parameter, and executing closed-loop adjustment.

2. The multi-nozzle coordinated plasma processing equipment for surface adaptive processing according to claim 1, characterized in that: The number of the jet spray gun modules (2) is seven, one of which is located at the center of the box (1), and the remaining six jet spray gun modules (2) are distributed in a ring array around the central jet spray gun module (2). The distribution angle between adjacent jet spray gun modules (2) is 60°, and the installation spacing (D) of adjacent jet spray gun modules (2) is calculated and determined based on the coverage radius (R) of a single set of jet spray gun modules (2), satisfying the relationship: D=2R, so as to achieve no-dead-angle coverage of the bottom processing area of ​​the box (1).

3. The multi-nozzle coordinated plasma processing equipment for surface adaptive processing according to claim 2, characterized in that: The jet spray gun module (2) comprises: an annular guide mounting member (21) fixedly mounted on the box body (1); an electric push rod (22) arranged in the annular guide mounting member (21) and used for adjusting the height along the axis of the annular guide mounting member (21); a spherical motor (23) arranged below the telescopic rod of the electric push rod (22), the spherical motor (23) being configured to provide three-degree-of-freedom motion of a pitch angle of ±30°, a yaw angle of ±45°, and a rotation of 360°, with a motion accuracy better than ±0.02° and a response delay less than 10ms, and being used for eliminating the jet incident angle deviation in curved surface processing and improving the coating uniformity; a jet spray gun (5) arranged below the spherical motor (23); and a compressible protective sleeve (24) sleeved on the outside of the jet spray gun (5).

4. The multi-nozzle coordinated plasma processing equipment for surface adaptive processing according to claim 3, characterized in that: The jet spray gun (5) comprises: a shell (51); a brushless hollow motor (52) coaxially arranged at the upper end of the shell (51); a variable cross-section channel (53) coaxially arranged below the brushless hollow motor (52); a small insulating ceramic (54) coaxially arranged below the variable cross-section channel (53); a jet excitation electrode (55) coaxially installed below the small insulating ceramic (54); a high-voltage pole (56) coaxially passed through the inside of the brushless hollow motor (52), the variable cross-section channel (53), the small insulating ceramic (54) and the jet excitation electrode (55); and a rotating nozzle (57) arranged at the lower part of the shell (51).

5. The multi-nozzle coordinated plasma processing equipment for surface adaptive processing according to claim 4, characterized in that: The variable cross-section channel (53) comprises: a variable cross-section top cover (531) fixedly connected to the output shaft of the brushless hollow motor (52); a plurality of blades (532), each blade (532) having a rotating shaft provided on its upper portion; and a base (533) having a plurality of rotating shaft fixing holes and a limiting claw provided thereon, wherein the limiting claw is rigidly matched with the housing (51) to prevent rotation. The variable-section top cover (531) is provided with blade shaft sliding slots corresponding to the number of the blades (532), the upper shafts of the blades (532) are inserted into the corresponding blade shaft sliding slots, and the lower shafts of the blades (532) are inserted into the corresponding shaft fixing holes of the base (533); the variable-section top cover (531) is driven to rotate by the brushless hollow motor (52), thereby driving the blades (532) to rotate to change their opening and closing angles, thereby adjusting the cross-sectional area (A) of the gas channel; The cross-sectional area (A) of the channel is adjusted according to the principles of fluid mechanics: the gas flow rate (V) is controlled according to the continuity equation (A1V1=A2V2), the gas static pressure (P) is regulated in combination with the Bernoulli equation (P+1 / 2ρV2=constant), and the penetration depth, impact energy, divergence angle and turbulence degree of the plasma jet are optimized based on the principle of conservation of momentum to meet the requirements of different treatment processes; The control terminal is configured to dynamically adjust the channel cross-sectional area (A) according to the target processing type instruction: a small cross-sectional area mode is used during etching processing to increase plasma energy density, and a large cross-sectional area mode is used during coating deposition processing to increase active particle concentration and reduce energy.

6. The multi-nozzle coordinated plasma processing equipment for surface adaptive processing according to claim 1, characterized in that: The imaging light source (3) is installed in the lower center portion of the box (1), with a hollow channel provided in the middle thereof, and the jet spray gun module (2) located in the center passes through the hollow channel.

7. The multi-nozzle coordinated plasma processing equipment for surface adaptive processing according to claim 1 or 6, characterized in that: The number of the microscope cameras (4) is six, and they are respectively installed at six hexagonal angle positions on the lower inner wall of the box (1); The microscope camera (4) is used to execute a closed-loop control process: collecting a workpiece surface state image → extracting surface feature parameters → calculating the deviation between the current state and the target state → generating adjustment parameters of the jet spray gun module (2) → driving the jet spray gun module (2) to perform adjustment → re-collecting the surface state for verification.

8. The multi-nozzle coordinated plasma processing equipment for surface adaptive processing according to claim 1, characterized in that: The gas diversion block (6) is installed in the upper part of the box (1), and its installation surface forms an angle of 120 degrees with the front of the box (1) and is parallel to the right side of the box (1), so as to shorten the connection distance with the air inlet (12).

9. The multi-nozzle coordinated plasma processing equipment for surface adaptive processing according to claim 3 or 5, characterized in that: The control terminal is integrated with a plasma behavior prediction model and a digital twin simulation module; The plasma behavior prediction model is used to predict the jet state based on real-time sensor data and generate intervention instructions ≥300ms in advance when an unstable trend is detected; the digital twin simulation module is used to build a multi-physics field model of the equipment, preview the jet coverage effect and plasma characteristics under different control parameter combinations, and optimize the control instructions before sending them to the jet gun module (2) for execution.

10. A surface adaptive plasma processing method based on the device according to any one of claims 1 to 9, characterized in that: Including steps: S1. Acquire an initial image of the workpiece surface through a microscope camera (4) to extract surface contamination or topographic features; S2. Calculate the plasma treatment intensity parameters required for each target sub-region and generate initial control instructions; S3. The electric push rod (22) of the jet spray gun module (2) adjusts the height, the spherical motor (23) adjusts the jet incident angle, and the brushless hollow motor (52) adjusts the cross-sectional area of ​​the variable cross-section channel (53); S4. Start the plasma jet for surface treatment; S5. Within a preset time interval, the surface image is collected by the microscope camera (4) to compare the treatment effect; S6. Compare the processed effect image with the preset effect and dynamically adjust the jet parameters and spray gun posture; S7. Repeat S5-S6 until the treatment effects of all areas meet the requirements.

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