Electrochemical auxiliary grinding and polishing machining equipment and method for annular element

Abstract

The invention discloses electrochemical auxiliary grinding and polishing machining equipment and method for an annular element, and belongs to the technical field of ultra-precision grinding and polishing machining of the annular element. The electrochemical auxiliary grinding and polishing machining method for the annular element comprises the steps that the annular element to be machined is fixed to a rotary table; controlling the grinding wheel and the turntable to rotate; after the electrochemical generation device is started, the annular element serving as an anode, the grinding wheel metal base serving as a cathode and electrolyte form a closed circuit, and the surface of the element is subjected to anodic oxidation reaction rapidly; and the grinding wheel rotates to remove workpiece surface oxides. Grinding and polishing integrated machining of the end face, the inner cylindrical face, the outer cylindrical face and the step face of the annular element is completed by controlling the contact condition of the grinding wheel and the annular element and replacing the type of the grinding wheel. Through the synergistic effect of an electrochemical auxiliary technology and mechanical precision removal, conversion of multiple procedures is avoided, efficient and damage-free polishing of the surface of the annular element is achieved, the nanoscale smooth surface is achieved, and the ultra-precision machining requirement of a complex annular structural part is met.

Description

Technical Field

[0001] The invention belongs to the technical field of ultra-precision grinding and polishing processing of annular elements, and particularly relates to an electrochemically assisted grinding and polishing processing device and method for annular elements. Background Art

[0002] In cutting-edge fields such as semiconductor manufacturing, aerospace, and high-end energy equipment, high-performance precision annular components are essential components for ensuring the performance of core equipment. For example, annular components such as focusing rings in semiconductor plasma etching equipment, edge rings in rapid thermal processing equipment, and sealing rings in nuclear devices require excellent properties such as high hardness, high chemical stability, and good thermal conductivity, playing a key role in semiconductor manufacturing and other industrial fields. However, achieving these excellent performance goals requires efficient and low-damage processing of these annular components.

[0003] To meet these requirements, annular components in these areas are typically made from materials such as reaction-bonded silicon carbide (RB-SiC) and chemical vapor deposited silicon carbide (CVD-SiC). These components typically exhibit high hardness, high brittleness, and polycrystalline properties. These components face challenges during processing, including low efficiency, susceptibility to damage, and poor surface quality. Furthermore, the cutting process significantly impacts the surface quality of annular components. Cutting can easily damage the component surface and the edges of the cut, resulting in deviations in dimensional and shape accuracy, rendering the annular components unable to meet subsequent precision machining requirements. Therefore, they require precision machining methods such as high-precision grinding and polishing to achieve high machining quality and production efficiency.

[0004] Existing machining technologies for difficult-to-machine annular components face numerous limitations. Traditional machining methods are limited by the single function of the equipment, requiring components to be processed through multiple machines. Repeated clamping leads to accumulated machining errors and low efficiency. Chemical mechanical polishing (CMP) reduces surface stress through chemical reactions, achieving nanometer-scale surface roughness. However, this method suffers from low material removal rates, high surface damage, and poor uniformity. Summary of the Invention

[0005] The present invention provides an electrochemically assisted grinding and polishing device and method for annular components to solve at least one of the problems mentioned in the background technology.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions: In a first aspect, the present invention provides an electrochemically assisted grinding and polishing apparatus for annular components, comprising a body and an electrochemical system, wherein a turntable and a column are mounted on the body, and an X-axis linear guide is mounted on the column; The turntable is used to drive the annular element to be processed to rotate, and the turntable is driven to rotate by a turntable motor; A Z-axis linear guide is slidably mounted on the X-axis linear guide, a tool shaft is slidably mounted on the Z-axis linear guide, a processing tool is fixed to the lower end of the tool shaft; the tool shaft is driven to rotate by a tool shaft motor; The electrochemical system includes a power supply and an electrolyte nozzle. The positive electrode of the power supply is connected to the annular element to be processed via a second conductive slip ring, and the negative electrode is connected to the processing tool via a first conductive slip ring. The electrolyte nozzle is used to supply electrolyte to the contact area between the processing tool and the annular element to be processed.

[0007] Furthermore, the processing tool is a grinding wheel or a polishing tool.

[0008] Furthermore, the processing tool is fixed to the lower end of the tool shaft in a detachable manner.

[0009] Furthermore, the turntable is installed in the polishing chamber, and a through hole is opened at the bottom of the polishing chamber. The through hole is connected to the inlet of the filter through the electrolyte tube, the outlet of the filter and the inlet of the booster pump are connected by a pipe, and the outlet of the booster pump is connected to the electrolyte nozzle through a pipe.

[0010] Furthermore, a turntable main shaft is fixed to the lower end of the turntable, and the turntable main shaft is connected to the power output shaft of the turntable motor through a synchronous belt transmission device.

[0011] Furthermore, the upper end of the first conductive slip ring is fixedly connected to the coupling, and the lower end is coaxially positioned and connected to the tool shaft; the second conductive slip ring is sleeved on the turntable main shaft in a shaft-hole matching manner.

[0012] In a second aspect, the present invention provides an electrochemically assisted grinding and polishing method for an annular component. Based on the above-mentioned electrochemically assisted grinding and polishing apparatus for an annular component, the grinding and polishing method comprises the following steps: S1. Fix the annular component to be processed on the turntable by vacuum adsorption, and install the processing tool on the lower end of the tool shaft; S2. Start the electrochemical system: spray electrolyte into the processing area and apply current to form an oxide layer on the surface of the annular component to be processed; S3. Adjust the position of the processing tool through the X-axis linear guide and the Z-axis linear guide so that the processing tool sequentially processes the end face, inner cylindrical surface, outer cylindrical surface and step surface of the annular element to be processed; drive the processing tool and the annular element to rotate synchronously; and synchronously remove the oxide layer through the mechanical action of the processing tool.

[0013] Furthermore, in step S3, when processing the end face of the annular element, the position of the second slider on the Z-axis linear guide is adjusted by driving the Z-axis motor to drive the tool axis and the processing tool to move in the vertical direction, so that the end face processing surface of the processing tool contacts the end face to be processed of the annular element; the processing tool and the annular element maintain synchronous rotation; under the continuous spraying of electrolyte, the oxide layer of the end face to be processed of the annular element is removed by the mechanical action of the processing tool to complete the end face processing.

[0014] Furthermore, in step S3, when processing the inner cylindrical surface and the outer cylindrical surface of the annular element, the X-axis motor and the Z-axis motor are driven to adjust the positions of the first slider on the X-axis linear guide and the second slider on the Z-axis linear guide respectively, so as to drive the tool shaft and the processing tool to move, so that the side processing surface of the processing tool contacts the inner cylindrical surface or the outer cylindrical surface of the annular element; the processing tool and the annular element maintain synchronous rotation; under the condition of continuous spraying of electrolyte, the processing tool removes the oxide layer on the inner cylindrical surface or the outer cylindrical surface of the annular element through mechanical action to complete the processing of the inner and outer cylindrical surfaces.

[0015] Furthermore, in step S3, when processing the step surface of the annular element, the positions of the first slider on the X-axis linear guide and the second slider on the Z-axis linear guide are adjusted respectively by driving the X-axis motor and the Z-axis motor, so as to drive the tool axis and the processing tool to move, so that the side processing surface of the processing tool contacts the inner circle contour of the step surface to be processed of the annular element, and the lower end face of the processing tool contacts the horizontal part of the inner circle of the step surface to be processed of the annular element; the processing tool and the annular element maintain synchronous rotation; under the condition of continuous electrolyte spraying, the processing tool is controlled by coordinating the driving of the X-axis motor and the Z-axis motor to perform axial linear feed and rotational motion, and the processing tool gradually removes the oxide layer of the step surface to complete the step surface processing.

[0016] Compared with the prior art, the present invention has at least the following beneficial technical effects: The present invention provides an electrochemically assisted grinding and polishing equipment for annular elements, which integrates the grinding and polishing of the end face, inner and outer cylindrical surfaces, and step surface of annular elements into the same processing equipment, effectively avoiding the cumbersome process of multiple process conversions of traditional equipment. Based on a one-time clamping and multi-faceted processing mode, all processes are completed continuously in a single stable process system, basically eliminating the reference transfer error, repeated positioning error, and workpiece deformation caused by multiple equipment conversions and repeated clamping in traditional sequential processing, effectively suppressing the accumulation of random errors, and ensuring high-precision geometric correlation between each processed surface under a unified reference. At the same time, the processing equipment adopts a multi-energy field collaborative ultra-precision processing technology that combines electrochemical / chemical modification and fixed abrasive mechanical polishing. Through the assistance of electrochemical / chemical fields, a soft modified layer with controllable thickness is accurately induced on the surface of the element, and the modified layer is quickly removed with the help of the mechanical action of the grinding wheel and polishing tool, forming a "surface modification-synchronous removal" collaborative mechanism, which greatly improves the material removal efficiency and fundamentally avoids the sub-surface damage of the workpiece caused by traditional mechanical processing. Based on machining results on single-crystal silicon carbide, this method, under the same machining conditions, can increase material removal rates by more than 1.6 times compared to traditional mechanical grinding, while also achieving higher surface quality and reducing surface roughness by approximately 15%. Combined with the equipment's high-precision motion control, this method ultimately achieves ultra-precision machining with nanometer-level surface roughness and submicron-level shape accuracy, enabling efficient and damage-free machining of annular components. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic structural diagram of an electrochemically assisted grinding and polishing device for an annular element according to an embodiment of the present invention; Figure 2 A schematic diagram of workpiece end surface processing according to an embodiment of the present invention; Figure 3 Schematic diagram of machining the inner cylindrical surface of a workpiece according to an embodiment of the present invention; Figure 4 This is a schematic diagram of machining the outer cylindrical surface of a workpiece according to an embodiment of the present invention; Figure 5 Schematic diagram of workpiece step surface processing according to an embodiment of the present invention.

[0018] Figure markings: 1-annular element; 2-column; 3-X-axis linear guide; 4-X-axis lead screw; 5-Z-axis linear guide; 6-first support plate; 7-Z-axis motor; 8-Z-axis lead screw; 9-tool shaft motor; 10-coupling; 11-first conductive slip ring; 12-X-axis motor; 13-second support plate; 14-base plate; 15-tool shaft housing; 16-tool shaft; 17-processing tool; 18-electrolyte nozzle; 19-wire; 20-power supply; 21-boost pump; 22-filter; 23-through hole; 24-electrolyte tube; 25-turntable spindle; 26-passive synchronous pulley; 27-second conductive slip ring; 28-synchronous belt; 29-active synchronous pulley; 30-turntable motor; 31-support; 32-body; 33-polishing cavity; 34-turntable. DETAILED DESCRIPTION

[0019] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0020] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0021] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or there may be another element centered thereon. When an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be another element centered thereon at the same time. The terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc. used herein indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0023] Reference Figure 1The method mentioned in this embodiment is an electrochemically assisted grinding and polishing device for annular components, including: a processing tool 17, an electrochemical system, a body 32, a turntable motor 30 and a support 31.

[0024] A support 31 is fixed to the lower end of the body 32, and the top plate of the body 32 is fixedly connected to the polishing chamber 33. A turntable 34 is located within the polishing chamber 33, rotatably connected to the polishing chamber 33. The lower end of the turntable 34 is fixedly connected to the turntable main shaft 25, which is keyed to the driven synchronous pulley 26. The power output shaft of the turntable motor 30 is mounted on a driving synchronous pulley 29. The synchronous belt 28 is tensioned around the driven synchronous pulley 26 and the driving synchronous pulley 29. The turntable motor 30 is mounted on a mounting base below the top plate of the body 32.

[0025] Two columns 2 are fixed on the top plate of the fuselage 32, and the upper ends of the two columns 2 are fixedly connected to a second support plate 13. An X-axis screw mechanism is installed on the second support plate 13. The X-axis screw mechanism includes an X-axis linear guide 3, an X-axis screw 4 and an X-axis motor 12. The first nut installed on the X-axis screw 4 is fixedly connected to the first slider, and the first slider is slidably installed on the X-axis linear guide 3. The X-axis motor 12 is fixedly installed above the second support plate 13. The X-axis motor 12 drives the X-axis screw 4 to rotate, thereby driving the first slider installed on the X-axis linear guide 3 to move.

[0026] The Z-axis screw mechanism is installed on the transition connecting plate, and the transition connecting plate is fixedly connected to the first slider. The Z-axis screw mechanism includes a Z-axis linear guide 5, a Z-axis motor 7, and a Z-axis screw 8. The Z-axis linear guide 5 and the first support plate 6 are both installed on the transition connecting plate. The Z-axis motor 7 is fixedly installed on the first support plate 6. The second nut installed on the Z-axis screw 8 is fixedly connected to the second slider, and the second slider is slidably installed on the Z-axis linear guide 5.

[0027] The output end of the tool shaft motor 9 is fixedly connected to the coupling 10, and the first conductive slip ring 11 is placed between the coupling 10 and the tool shaft 16. The upper portion of the tool shaft 16 is placed in the tool shaft housing 15, which is fixedly connected to the base plate 14 via bolts. The base plate 14 is fixedly connected to the second slider via the slider mounting slot at its rear end.

[0028] A processing tool 17 is fixed to the front end of the tool shaft 16 and can be rotated by the tool shaft motor 9. The X-axis motor 12 and the Z-axis motor 7 drive the corresponding screws, respectively, to move the sliders of the X-axis linear guide 3 and the Z-axis linear guide 5, adjusting the contact position between the processing tool 17 and the annular element 1. The processing tool 17 can be a grinding wheel or polishing tool and can be replaced during the processing process. The processing tool 17 is annular in shape, with an outer diameter smaller than the inner diameter of the annular element, but larger than the width of the annular element 1, that is, the difference between the outer and inner radii of the annular element 1.

[0029] The equipment is equipped with an electrochemical system, which includes an annular element 1, a processing tool 17, a power supply 20, a wire 19, a first conductive slip ring 11, a second conductive slip ring 27, an electrolyte spray head 18, an electrolyte pipe 24, a booster pump 21, and a filter 22. The positive electrode of the power supply 20 is connected to the stator of the second conductive slip ring 27 via a wire 19. The rotor of the second conductive slip ring 27 is fixed to the end of the turntable main shaft 25 and is electrically connected to the main shaft. The turntable main shaft 25 is electrically connected to the turntable 34, which is made of metal, and thus connects the annular element 1 to the positive electrode of the power supply. The negative electrode of the power supply 20 is connected to the stator of the first conductive slip ring 11 via another wire 19. The rotor of the first conductive slip ring 11 is connected to the output shaft of the tool shaft motor 9 via a coupling 10 and maintains electrical contact with the tool shaft 16 via carbon brushes. The processing tool 17 fixed at the front end of the tool shaft 16 has a metal base, which connects the processing tool 17 to the negative electrode of the power supply. The current starts from the positive pole of the power supply 20, passes through the wire 19, the second conductive slip ring 27, the turntable spindle 25, the turntable 34 to the annular element 1, then flows to the processing tool 17 through the electrolyte, and finally returns to the negative pole of the power supply 20 through the tool shaft 16, the first conductive slip ring 11, and the wire 19, forming a closed circuit.

[0030] The upper end of the first conductive slip ring 11 is connected to the coupling 10 by bolts, and the lower end is coaxially positioned and connected to the tool shaft 16; the second conductive slip ring 27 is sleeved on the turntable main shaft 25 in a shaft-hole matching manner, and its two ends are fixed by bolts.

[0031] During machining, electrolyte is supplied to the contact area between annular element 1 and machining tool 17, forming a closed circuit and causing anodization of the surface of annular element 1. Tool spindle motor 9 drives machining tool 17 in synchronous rotation. The rotational motion of the grinding wheel / polishing tool and annular element 1 mechanically removes the oxides produced by anodization on the surface of annular element 1, completing the integrated grinding and polishing of the end face, outer cylindrical surface, inner cylindrical surface, and steps of annular element 1.

[0032] The polishing chamber 33 has a through-hole 23 at its bottom, which connects to the inlet of a filter 22 via an electrolyte pipe 24 for electrolyte recovery and filtration. The filter 22 also functions to separate impurities and regulate electrolyte composition to maintain stable electrolyte performance. The purified electrolyte is then transported from the output of the filter 22 through the electrolyte pipe 24 to the input of the booster pump 21. The booster pump 21 pressurizes the electrolyte and connects it via the output piping to the electrolyte spray head 18, which precisely sprays the electrolyte into the processing area, forming a closed-loop "recovery-filtration-boosting-spraying" system.

[0033] In the electrochemical system, annular element 1 is connected to the positive terminal of power source 20, and the base of processing tool 17 is connected to the negative terminal of power source 20, forming a closed circuit. During operation, the electrochemical system supplies electrolyte to the contact area between annular element 1 (acting as the anode) and processing tool 17 (acting as the cathode), forming a closed loop and causing anodic oxidation on the surface of annular element 1.

[0034] The electrochemical system can control the electric field strength and current density to adjust the anodic oxidation reaction rate on the component surface.

[0035] The motors drive the tool shaft 16 and the turntable spindle 25 to rotate respectively, realizing the rotation of the processing tool 17 and the annular element 1; the X-axis and Z-axis motors respectively drive the slider on the linear guide to move, realizing the linear feed of the processing tool 17 in the horizontal (X) and vertical (Z) directions, and accurately adjusting the processing position.

[0036] The processing tool 17 mechanically removes the oxides generated on the surface of the annular element 1 through the coordinated action of linear feed and rotational motion, and completes the integrated grinding and polishing processing of the end face, inner and outer cylindrical surfaces and step surface of the annular element 1.

[0037] Reference Figures 2 to 5 The ring-shaped element grinding and polishing method mentioned in this embodiment is a multi-energy field synergistic ultra-precision machining technology that combines electrochemical modification and mechanical grinding and polishing of fixed abrasive particles. The grinding and polishing method includes the following steps: S101. Secure the annular component 1 to be polished above the turntable 34 using vacuum suction. Connect the through hole 23 at the bottom of the polishing chamber 33 to the inlet of the filter 22 via the electrolyte pipe 24. Connect the outlet of the filter 22 to the inlet of the booster pump 21 via a pipe. Connect the outlet of the booster pump 21 to the electrolyte nozzle 18 via a pipe, thus forming a complete electrolyte circulation channel.

[0038] S102. Start the electrochemical system. Used electrolyte waste flows through the through-hole 23 at the bottom of the polishing chamber 33 into the electrolyte pipe 24, then into the filter 22 for impurity separation and electrolyte composition adjustment. After multi-stage filtration, the electrolyte is evenly sprayed into the processing area by the booster pump 21 through the electrolyte nozzle 18, ensuring continuous and stable processing. The electrolyte nozzle 18 supplies the required electrolyte to the contact area between the annular element 1 and the processing tool 17. Under the action of the electric field, the annular element 1 undergoes an anodic oxidation reaction, forming an anodic oxide.

[0039] In the polishing chamber 33, the electrolyte is delivered to the electrolyte pipe 24 at a set pressure and flow rate by the booster pump 21. The electrolyte nozzle 18 evenly sprays the electrolyte to the contact area between the annular element 1 and the processing tool 17. The annular element 1 (as the anode), the electrolyte and the processing tool 17 (as the cathode) form a closed loop. An anodic oxidation reaction occurs on the surface of the annular element 1, generating a SiO2 soft oxide layer with uniform thickness.

[0040] At the same time, the electric field strength and current density of the electrochemical system are controllable, which can adjust the anodic oxidation reaction rate on the component surface and improve processing efficiency and surface quality.

[0041] S103. During the operation of the processing equipment, the X-axis motor 12 and the Z-axis motor 7 respectively drive the X-axis screw 4 and the Z-axis screw 8 to rotate and drive the slider to move to realize the linear feed of the processing tool in the horizontal (X) and vertical (Z) directions, and adjust the processing position; the tool axis motor 9 drives the processing tool 17 to rotate, and the turntable motor 30 drives the turntable spindle 25 to drive the turntable 34 to rotate, thereby rotating the annular element 1, and the anodic oxide generated on the surface of the element is removed by mechanical action at the contact point between the processing tool 17 and the annular element 1, completing the integrated processing of the end face, outer cylindrical surface, inner cylindrical surface and step grinding and polishing of the annular element.

[0042] Specifically, processing tool 17 is fixed to the front end of tool shaft 16. Tool shaft motor 9 drives tool shaft 16 to rotate, achieving axial rotation of processing tool 17. Turntable motor 30, via synchronous belt 28, drives turntable spindle 25, which in turn drives annular element 1. The rotational movement of processing tool 17 and annular element 1 ensures uniform surface contact, preventing localized over-polishing. X-axis motor 12 drives the slider on X-axis linear guide 3 to move linearly, achieving horizontal (X) feed of processing tool 17. Z-axis motor 7 drives the slider on Z-axis linear guide 5 to move vertical (Z) feed of processing tool 17, precisely adjusting the processing position. During movement, the linear guide provides precise guidance, ensuring smooth feeding and accurate positioning of the processing tool.

[0043] At the same time, the processing tools can be grinding wheels and polishing tools with metal bases, which can be replaced during the processing process.

[0044] During machining, the guide rails are controlled to linearly advance in the horizontal (X) and vertical (Z) directions according to machining requirements to adjust the contact position between machining tool 17 and annular element 1. Because an electrochemical process has formed a relatively low-hardness oxide layer on the surface of annular element 1, machining tool 17 can efficiently remove this oxide layer through mechanical cutting and scraping, thereby grinding and polishing the end face, inner and outer cylindrical surfaces, and stepped surfaces of annular element 1.

[0045] While the processing tool 17 and the annular element 1 are rotating, the X-axis motor 12 and the Z-axis motor 7 respectively drive the processing tool 17 to move linearly, so that the processing tool 17 starts from the end face of the annular element 1 and completes the processing of the inner cylindrical surface, the outer cylindrical surface and the step surface in sequence. According to the processing accuracy requirements, the processing tool 17 selects a grinding wheel or a polishing tool. During processing, the slider is driven by the X-axis motor 12 and the Z-axis motor 7 respectively to adjust the position of the processing tool 17 so that the end face of the processing tool 17 contacts the upper surface of the annular element 1. The Z-axis feed rate is adjusted by the Z-axis motor 7 to control the processing depth. According to the processing requirements, the processing is continued for a certain time to complete the end face processing of the annular element 1. Then, the processing tool 17 is raised along the positive direction of the Z axis to separate from the end face of the annular element 1. The processing tool 17 is driven to move along the positive direction of the X axis by the X-axis motor 12 so that the side processing surface of the processing tool 17 contacts the outer cylindrical surface of the annular element 1 to perform outer cylindrical surface processing. After the outer cylindrical surface is completed, the processing tool 17 is raised in the positive direction of the Z axis until it is separated from the end face of the annular element 1. The X-axis motor 12 drives the processing tool 17 to move in the negative direction of the X axis, so that the side processing surface of the processing tool 17 contacts the inner cylindrical surface of the annular element 1 to perform inner cylindrical surface processing. If step surface processing is required, the position of the sliders on the X-axis linear guide 3 and the Z-axis linear guide 5 are adjusted according to the height difference and position of the step surface, so that the side processing surface of the processing tool 17 contacts the inner circular contour of the step surface to be processed of the annular element 1, and the lower end face of the processing tool 17 contacts the horizontal part of the inner circle of the step surface to be processed of the annular element 1 to perform step surface processing. Through the synergistic effect of electrochemical assistance and mechanical grinding, the integrated grinding and polishing processing is finally achieved to obtain a processing surface that meets the precision requirements.

[0046] In summary, the present invention provides an electrochemical assisted grinding and polishing device for annular elements, which can Figure 2 )、Inner cylindrical surface (attached Figure 3 ), outer cylindrical surface (attached Figure 4 ) and step surface (attached Figure 5 ) are integrated into the same processing equipment, effectively avoiding the cumbersome process of multiple process changes required by traditional equipment, significantly improving processing efficiency and precision, and enabling efficient mass production of annular components. Simultaneously, an electrochemical system creates an electric field on the surface of the annular component, causing an anodic oxidation reaction to form a soft modified layer. This modified layer is then removed simultaneously through the mechanical action of the grinding wheel and polishing tool, overcoming the low efficiency and poor surface quality of existing processing technologies and achieving efficient and damage-free surface processing of annular components.

[0047] The term "consisting of" when describing a combination should include the identified elements, ingredients, components, or steps as well as other elements, ingredients, components, or steps that do not materially affect the basic novel characteristic of the combination. The use of the terms "comprising" or "including" to describe a combination of elements, ingredients, components, or steps herein also contemplates embodiments consisting essentially of these elements, ingredients, components, or steps. The use of the term "may" herein is intended to indicate that any of the attributes described as "may" be optional.

[0048] Multiple elements, ingredients, parts or steps can be provided by a single integrated element, ingredient, part or step. Alternatively, a single integrated element, ingredient, part or step can be divided into separate multiple elements, ingredients, parts or steps. The disclosure of "a" or "an" to describe an element, ingredient, part or step is not intended to exclude other elements, ingredients, parts or steps.

[0049] It should be understood that the above description is for illustrative purposes only and is not intended to be limiting. Many embodiments and many applications beyond the examples provided will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of the present teachings should not be determined with reference to the above description, but rather with reference to the preceding claims and the full scope of equivalents to which such claims are entitled. For the purpose of completeness, all articles and references, including disclosures of patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein from the preceding claims is not a disclaimer of such subject matter, nor should it be considered that the applicants did not consider such subject matter to be part of the disclosed inventive subject matter.

Claims

1. An electrochemically assisted grinding and polishing device for annular components, characterized in that: It comprises a body (32) and an electrochemical system, wherein a turntable (34) and a column (2) are mounted on the body (32), and an X-axis linear guide rail (3) is mounted on the column (2); The turntable (34) is used to drive the annular element (1) to be processed to rotate, and the turntable (34) is driven to rotate by a turntable motor (30); A Z-axis linear guide rail (5) is slidably mounted on the X-axis linear guide rail (3), a tool shaft (16) is slidably mounted on the Z-axis linear guide rail (5), and a processing tool (17) is fixed to the lower end of the tool shaft (16); the tool shaft (16) is driven to rotate by a tool shaft motor (9); The electrochemical system comprises a power supply (20) and an electrolyte spray head (18), wherein the positive electrode of the power supply (20) is connected to the annular element (1) to be processed via a second conductive slip ring (27), and the negative electrode is connected to the processing tool (17) via a first conductive slip ring (11); the electrolyte spray head (18) is used to supply electrolyte to the contact area between the processing tool (17) and the annular element (1) to be processed.

2. The electrochemically assisted grinding and polishing equipment for annular components according to claim 1, characterized in that: The processing tool (17) is a grinding wheel or a polishing tool.

3. The electrochemically assisted grinding and polishing equipment for annular components according to claim 1 or 2, characterized in that: The processing tool (17) is fixed to the lower end of the tool shaft (16) in a detachable manner.

4. The electrochemically assisted grinding and polishing equipment for annular components according to claim 1, characterized in that: The turntable (34) is installed in the polishing chamber (33). A through hole (23) is opened at the bottom of the polishing chamber (33). The through hole (23) is connected to the inlet of the filter (22) through the electrolyte pipe (24). The outlet of the filter (22) and the inlet of the booster pump (21) are connected through a pipeline. The outlet of the booster pump (21) is connected to the electrolyte nozzle (18) through a pipeline.

5. The electrochemically assisted grinding and polishing equipment for annular components according to claim 1, characterized in that: A turntable main shaft (25) is fixed to the lower end of the turntable (34), and the turntable main shaft (25) is connected to the power output shaft of the turntable motor (30) through a synchronous belt transmission device.

6. The electrochemically assisted grinding and polishing equipment for annular components according to claim 1, characterized in that: The upper end of the first conductive slip ring (11) is fixedly connected to the coupling (10), and the lower end is coaxially positioned and connected to the tool shaft (16); the second conductive slip ring (27) is sleeved on the turntable main shaft (25) in a shaft-hole matching manner.

7. A method for electrochemically assisted grinding and polishing of an annular component, based on the electrochemically assisted grinding and polishing apparatus for an annular component according to any one of claims 1 to 6, characterized in that: The grinding and polishing method comprises the following steps: S1. Fix the annular component (1) to be processed on the turntable (34) by vacuum adsorption, and install the processing tool (17) on the lower end of the tool shaft (16); S2. Starting the electrochemical system: spraying electrolyte into the processing area and applying current to form an oxide layer on the surface of the annular component (1) to be processed; S3, adjusting the position of the processing tool (17) through the X-axis linear guide (3) and the Z-axis linear guide (5), so that the processing tool (17) sequentially processes the end face, inner cylindrical surface, outer cylindrical surface and step surface of the annular element (1) to be processed; driving the processing tool (17) and the annular element (1) to rotate synchronously; and synchronously removing the oxide layer through the mechanical action of the processing tool (17).

8. The electrochemically assisted grinding and polishing method for an annular component according to claim 7, characterized in that: In the step S3, when processing the end face of the annular element (1), the position of the second slider on the Z-axis linear guide (5) is adjusted by driving the Z-axis motor (7), thereby driving the tool shaft (16) and the processing tool (17) to move in the vertical direction, so that the end face processing surface of the processing tool (17) contacts the end face to be processed of the annular element (1); the processing tool (17) and the annular element (1) rotate synchronously; and under the continuous spraying of the electrolyte, the oxide layer of the end face to be processed of the annular element (1) is removed by the mechanical action of the processing tool (17), thereby completing the end face processing.

9. The electrochemically assisted grinding and polishing method for an annular component according to claim 7, characterized in that: In the step S3, when processing the inner cylindrical surface and the outer cylindrical surface of the annular element (1), the X-axis motor (12) and the Z-axis motor (7) are driven to adjust the positions of the first slider on the X-axis linear guide (3) and the second slider on the Z-axis linear guide (5), respectively, to drive the tool shaft (16) and the processing tool (17) to move, so that the side processing surface of the processing tool (17) contacts the inner cylindrical surface or the outer cylindrical surface of the annular element (1); the processing tool (17) and the annular element (1) keep rotating synchronously; under the condition of continuous spraying of electrolyte, the processing tool (17) removes the oxide layer on the inner cylindrical surface or the outer cylindrical surface of the annular element (1) through mechanical action, thereby completing the processing of the inner and outer cylindrical surfaces.

10. The electrochemically assisted grinding and polishing method for an annular component according to claim 7, characterized in that: In the step S3, when processing the step surface of the annular element (1), the positions of the first slider on the X-axis linear guide (3) and the second slider on the Z-axis linear guide (5) are adjusted respectively according to the height difference and position of the step surface by driving the X-axis motor (12) and the Z-axis motor (7), thereby driving the tool shaft (16) and the processing tool (17) to move, so that the side processing surface of the processing tool (17) contacts the inner circle contour of the step surface to be processed of the annular element (1), and the lower end surface of the processing tool (17) contacts the horizontal part of the inner circle of the step surface to be processed of the annular element (1); the processing tool (17) and the annular element (1) rotate synchronously; under the condition of continuous electrolyte spraying, the processing tool (17) is controlled by coordinated driving of the X-axis motor (12) and the Z-axis motor (7) to perform axial linear feed and rotational motion, and the processing tool (17) gradually removes the oxide layer on the step surface to complete the step surface processing.

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