Energy-saving fine control method and device for central air conditioner of ten-stage purification workshop

Abstract

The invention provides an energy-saving fine control method and device for a central air conditioner of a ten-stage purification workshop. A control system controls all systems to start and operate, and cold air passes through a fan filtering unit and a raised floor to achieve indoor purification circulation; the cold and heat source system carries out cooling treatment, and the cold water outlet temperature is 5 + / -0.5 DEG C; the temperature and humidity control fluctuation range of the first temperature and humidity sensor and the second temperature and humidity sensor is + / -0.3 DEG C / + / -0.8% RH; the control system automatically regulates and controls the air conditioner air cabinet and the cold and heat source system and comprises the steps that measured data of the indoor temperature, the indoor humidity, the air supply temperature, the air supply humidity and the fresh air dew point temperature are input into a pre-constructed temperature and humidity coupling model, and temperature and humidity regulation information is formed through calculation; the control system conducts refrigeration, heating and air volume regulation and control on the air conditioner air cabinet according to the information and conducts valve opening regulation and control on the cold and heat source system and the humidification pipe. According to the invention, the requirement of keeping stable high-precision temperature and humidity under the working condition of ten-grade cleanliness indoors can be met.

Description

Technical Field

[0001] The present application belongs to the technical field of energy-saving and environmental protection equipment, and more specifically, relates to a method and device for energy-saving and refined control of central air conditioning in a ten-stage purification workshop. Background Art

[0002] Currently, in certain industries, product production requires the use of high-precision production equipment in a Class 10 cleanroom, which has very strict environmental requirements. These Class 10 cleanrooms not only require a Class 10 cleanroom environment, but also require controlled indoor temperature fluctuations of 22±1°C and relative humidity fluctuations of 43±3%. However, in existing central air conditioning systems used in cleanrooms, the normal cold water supply temperature is 7°C or above, which cannot reach the dew point temperature corresponding to the indoor temperature and humidity. As a result, the temperature and humidity fluctuations in Class 10 cleanrooms fail to meet the established requirements. This is particularly true during periods of high relative humidity, such as rainy and transitional seasons, when indoor temperature and humidity fluctuate significantly, leading to increased scrap rates for high-precision production equipment and higher test failure rates. Therefore, how to precisely control the temperature and humidity fluctuations in Class 10 cleanrooms while ensuring Class 10 cleanroom cleanliness and meet these requirements has become an urgent challenge for the industry. Summary of the Invention

[0003] The purpose of the embodiments of the present application is to provide a method for energy-saving and refined control of central air conditioning in a ten-stage cleanroom to solve the above-mentioned technical problems existing in the prior art.

[0004] To achieve the above-mentioned purpose, the technical solution adopted in this application is: to provide a method for energy-saving and refined control of central air conditioning in a ten-stage cleanroom, the method for energy-saving and refined control of central air conditioning in a ten-stage cleanroom is implemented based on a ten-stage cleanroom central air conditioning energy-saving and refined control device and is used in the ten-stage cleanroom, the ten-stage cleanroom central air conditioning energy-saving and refined control device comprising a suspended ceiling and floor structure, an air conditioning cabinet, a cold and heat source system, a humidification pipe, multiple fan filter units, a monitoring system and a control system; the suspended ceiling and floor structure comprises a double-layer suspended ceiling and an elevated floor provided in the ten-stage cleanroom, the cold and heat source system comprises a cold water supply pipe, the air conditioning cabinet comprises an air conditioning air supply pipe extending into the ten-stage cleanroom, and the monitoring system comprises a first temperature and humidity sensor, a second temperature and humidity sensor and a dew point temperature sensor; the method for energy-saving and refined control of central air conditioning in the ten-stage cleanroom comprises:

[0005] The control system controls the air conditioning cabinet, cold and heat source system, fan filter unit and monitoring system to start and operate. The cold air sent into the ten-level clean room by the air conditioning supply duct passes through the fan filter unit and the raised floor in turn to realize the indoor purification cycle;

[0006] The cold and heat source systems are cooled to ensure that the outlet temperature of the cold water supply pipe is 5°C ± 0.5°C.

[0007] The first temperature and humidity sensor obtains the indoor temperature and humidity of the ten-level cleanroom, the second temperature and humidity sensor obtains the supply air temperature and humidity in the air conditioning supply duct, and the dew point temperature sensor obtains the fresh air dew point temperature entering the air conditioning cabinet; the temperature control fluctuation range of the first temperature and humidity sensor and the second temperature and humidity sensor is ±0.3°C, and the humidity control fluctuation range is ±0.8%RH;

[0008] The control system automatically regulates the air conditioning cabinet and the cold and heat source system. The automatic regulation includes inputting the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity and fresh air dew point temperature data into a pre-built temperature and humidity coupling model to calculate temperature regulation information and humidity regulation information. The control system regulates the cooling and heating and air volume of the air conditioning cabinet according to the temperature regulation information and humidity regulation information, and regulates the valve opening of the cold and heat source system and the humidification pipe.

[0009] Optionally, the temperature and humidity coupling model includes a transfer function matrix, and the control system automatically regulates the air conditioning cabinet and the cold and heat source system. The automatic regulation includes inputting the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity, and fresh air dew point temperature data into a pre-constructed temperature and humidity coupling model to calculate temperature adjustment information and humidity adjustment information. The control system regulates the cooling and heating and air volume of the air conditioning cabinet according to the temperature adjustment information and the humidity adjustment information. The step of regulating the valve opening of the cold and heat source system and the humidification pipe includes the following sub-steps:

[0010] Input the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity and fresh air dew point temperature into the transfer function matrix;

[0011] Feedforward compensation is used in the transfer function matrix to eliminate the mutual interference between humidification and cooling;

[0012] Implement statistical process control on the data in the input transfer function matrix and use an integrated LSTM controller to predict load changes over the next 30 minutes to dynamically adjust PID parameters.

[0013] The control system forms temperature adjustment information and humidity adjustment information according to the result of the operation of the transfer function matrix;

[0014] The control system regulates the cooling and heating of the air conditioning cabinet and the air volume according to the temperature adjustment information and the humidity adjustment information, and regulates the valve opening of the cold and heat source system and the humidification pipe.

[0015] Optionally, the feedforward compensation process includes the following steps:

[0016] Establish a feedforward compensation model in the control system;

[0017] Obtaining a refrigeration valve opening signal of the air conditioning cabinet and a second electric valve opening signal on the humidification pipe, and inputting the refrigeration valve opening signal and the second electric valve opening signal into a feedforward compensation model to calculate and form a feedforward compensation signal;

[0018] The control system regulates the opening of the second electric valve on the humidification pipe according to the feedforward compensation signal;

[0019] The cold water supply pipe is connected to the cold coil pipe of the air conditioner cabinet. A cold water supply electric valve is provided on the cold water supply pipe. After the feedforward compensation process, the following steps are also included:

[0020] After the second electric valve of the humidification pipe is opened, the control system calculates the influence of latent heat on the temperature in advance, and then pre-regulates the amount of cold water by regulating the opening of the cold water supply electric valve.

[0021] Optionally, the energy-saving fine control device for the central air-conditioning in the ten-level cleanroom further includes an outdoor temperature and humidity sensor, which is used to monitor and obtain the outdoor temperature and outdoor humidity. The air-conditioning cabinet sends an air-conditioning start signal and an air-conditioning stop signal to the control system when it is started and stopped. The automatic control further includes the following steps:

[0022] Establish historical data training models in control systems;

[0023] The measured indoor temperature, indoor humidity, supply air temperature, supply air humidity, and fresh air dew point temperature are input into the historical data training model. The outdoor temperature, outdoor humidity data, air conditioner start signal, and air conditioner stop signal are also input into the historical data training model as disturbance variables after they are generated. The historical data training model calculates improved temperature adjustment information and humidity adjustment information based on the input data.

[0024] The control system regulates the cooling and heating of the air conditioning cabinet and the air volume according to the temperature adjustment information and the humidity adjustment information, and regulates the valve opening of the cold and heat source system and the humidification pipe.

[0025] Optionally, the automatic control further includes the following steps:

[0026] Establish AI learning algorithm models in control systems;

[0027] Input the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity, and fresh air dew point temperature into the AI ​​learning algorithm model;

[0028] The AI ​​learning algorithm model calculates the stable control point with the lowest energy consumption;

[0029] The control system forms improved temperature adjustment information and humidity adjustment information according to the temperature parameter and humidity parameter of the stable control point;

[0030] The control system regulates the cooling and heating of the air conditioning cabinet and the air volume according to the temperature adjustment information and the humidity adjustment information, and regulates the valve opening of the cold and heat source system and the humidification pipe.

[0031] Optionally, the cold and heat source system further includes a cold water return pipe, a hot water supply pipe, and a hot water return pipe, the hot water supply pipe branches into a first hot water supply branch pipe and a second hot water supply branch pipe, the hot water return pipe branches into a first hot water return branch pipe and a second hot water return branch pipe, the cold water supply pipe branches into a first cold water supply branch pipe and a second cold water supply branch pipe, and the cold water return pipe branches into a first cold water return branch pipe and a second cold water return branch pipe; the air conditioning cabinet is double-layered;

[0032] The first hot water supply branch pipe and the first hot water return branch pipe are both connected to the heat coil at the bottom of the air conditioning cabinet to achieve the first heating of the air;

[0033] The second hot water supply branch pipe and the second hot water return branch pipe are both connected to the heat coil on the upper layer of the air conditioning cabinet; if the measured outdoor temperature is lower than the preset value, the second hot water supply branch pipe and the second hot water return branch pipe are both opened to achieve a second heating of the air; if the measured outdoor temperature is greater than or equal to the preset value, the second hot water supply branch pipe and the second hot water return branch pipe are both closed;

[0034] The first cold water supply branch pipe and the first cold water return branch pipe are both connected to the cold coil pipe at the bottom of the air conditioning cabinet to achieve the first surface cooling and dehumidification of the air;

[0035] The second cold water supply branch pipe and the second cold water return branch pipe are both connected to the cold coil pipe on the upper layer of the air conditioning cabinet to achieve secondary surface cooling and dehumidification of the air;

[0036] The dew point temperature sensor is arranged adjacent to the connection between the first cold water supply branch pipe and the first cold water return branch pipe and the air conditioning cabinet;

[0037] The air conditioning cabinet also includes a fresh air fan, which is arranged in front of the air inlet direction of the heat coil at the bottom of the air conditioning cabinet. A fourth electric valve electrically connected to the control system is provided at the air inlet of the fresh air fan.

[0038] Optionally, a ten-level cleanroom includes a floor, a top wall, a peripheral wall, and a return air column wall, with a return air duct formed between the return air column wall and the peripheral wall; a double-layer ceiling includes a keel ceiling and a secondary ceiling located above the keel ceiling; an elevated floor is spaced above the floor, an upper ceiling space is formed between the keel ceiling and the secondary ceiling, a purified production space is formed between the elevated floor and the keel ceiling, and an underfloor space is formed between the elevated floor and the floor; multiple fan filter units are fully installed on the keel ceiling; the upper end of the return air duct is connected to the upper ceiling space, and the lower end of the return air duct is connected to the underfloor space; the air supply duct of the air conditioner extends into the return air duct;

[0039] After the control system controls the air conditioning cabinet, the cold and heat source system, the fan filter unit and the monitoring system to start and operate, the control system also includes the following steps:

[0040] The cold air enters the purified production space after being filtered by the fan filter unit from the space above the ceiling;

[0041] Cool air flows from the clean production space into the subfloor space through holes in the raised floor. The perforation ratio of the raised floor must be sufficient to control the average air velocity within the clean production space to 0.2 to 0.45 m / s, while also ensuring unidirectional airflow and overall return air volume.

[0042] The cold air enters the return air duct from the space under the floor. The cold air entering the return air duct mixes with the cold air blown out of the air supply duct of the air conditioner and then enters the space above the ceiling again.

[0043] Optionally, the energy-saving fine control device for the central air-conditioning in the ten-stage cleanroom also includes a dry coil, which is arranged on the return air column wall in the space above the ceiling and is connected to the return air duct.

[0044] The steps of mixing the cold air entering the return air duct with the cold air blown out of the air supply duct of the air conditioner and then entering the space above the ceiling again also include the following steps:

[0045] The cold air entering the return air duct mixes with the cold air blown out of the air conditioning supply duct and then enters the dry coil;

[0046] The cold air after being cooled by the dry coil surface enters the space above the ceiling.

[0047] Optionally, the cold and heat source system further includes a cold water return pipe, a low-temperature cold water main unit, a chilled water pump, a constant-pressure water supply device, and an antifreeze liquid configuration cylinder; the water outlet of the low-temperature cold water main unit is connected to the cold water supply pipe, and the return port of the low-temperature cold water main unit is connected to the cold water return pipe; the chilled water pump is provided on the cold water return pipe and is located between the low-temperature cold water main unit and the air cabinet of the air conditioner; the constant-pressure water supply device is connected to the cold water return pipe, is located between the low-temperature cold water main unit and the air cabinet of the air conditioner, and is arranged adjacent to the chilled water pump; the antifreeze liquid configuration cylinder containing antifreeze is connected to the constant-pressure water supply device;

[0048] The steps of cooling the cold and heat source systems so that the outlet temperature of the cold water from the cold water supply pipe is 5°C ± 0.5°C include:

[0049] The cold water at 5℃±0.5℃ is generated by compression refrigeration cycle in the low-temperature chiller and then input into the cold water supply pipe. Then, it enters the cold coil of the air conditioner cabinet through the cold water supply pipe to realize surface cooling.

[0050] The cold water after surface cooling flows back from the cold coil into the cold water return pipe;

[0051] Antifreeze is added from the antifreeze preparation cylinder to the constant pressure water supply device;

[0052] The cold water in the cold water return pipe is mixed with the make-up water containing antifreeze added by the constant pressure make-up water device, and then flows back to the low-temperature chiller through the chilled water pump.

[0053] The present application also proposes a ten-stage cleanroom central air-conditioning energy-saving and refined control device, which is applied to the ten-stage cleanroom central air-conditioning energy-saving and refined control method as described above. The ten-stage cleanroom includes a floor, a top wall, and surrounding walls. The ten-stage cleanroom central air-conditioning energy-saving and refined control device includes:

[0054] The ceiling and floor structure includes a double-layer ceiling and a raised floor. The double-layer ceiling consists of a keel ceiling and a secondary ceiling located above the keel ceiling. The raised floor is spaced above the ground, forming a clean production space for production equipment between the raised floor and the keel ceiling, and an upper ceiling space between the keel ceiling and the secondary ceiling. The perforation rate of the raised floor can control the average air velocity in the clean production space to 0.2 to 0.45 m / s, and meet the requirements of unidirectional airflow organization and overall return air volume.

[0055] Air conditioning cabinet, located in the air conditioning room outside the ten-level cleanroom, including the air conditioning air supply duct connected to the ten-level cleanroom;

[0056] The cold and heat source system includes a low-temperature chiller located outdoors, a cold water supply pipe, and a cold water return pipe; one end of the cold water supply pipe is connected to the low-temperature chiller, and the other end is connected to the cold water inlet of the air conditioning cabinet. The cold water outlet temperature of the cold water supply pipe is 5°C ± 0.5°C; one end of the cold water return pipe is connected to the cold water return inlet of the air conditioning cabinet, and the other end is connected to the low-temperature chiller;

[0057] Multiple fan filter units are installed in full-coverage style on the keel ceiling;

[0058] The monitoring system includes a first temperature and humidity sensor, a second temperature and humidity sensor, and a dew point temperature sensor; the first temperature and humidity sensor is located in the clean production space; the second temperature and humidity sensor is located on the air supply duct of the air conditioner; the dew point temperature signal sensor is located in the air conditioner cabinet and is located next to the cold water inlet of the air conditioner cabinet; the temperature control fluctuation range of the first temperature and humidity sensor and the second temperature and humidity sensor is ±0.3°C, and the humidity control fluctuation range is ±0.8%RH;

[0059] The control system is respectively connected with the air conditioning cabinet, the cold and heat source system, the fan filter unit and the monitoring system information.

[0060] The beneficial effect of the energy-saving and refined control method for central air-conditioning in a class 10 cleanroom provided by the present application is that it can comprehensively realize the meeting of stable high-precision temperature and humidity requirements under the cleanliness conditions through the following aspects: First, through the structural design of the elevated floor with a punching rate of 50%, the secondary ceiling and multiple fan filter units, and the cold air sent into the class 10 cleanroom by the air-conditioning supply duct passes through the fan filter unit and the elevated floor in turn and returns to the space above the ceiling to realize continuous indoor purification cycle, thereby ensuring the indoor class 10 cleanliness environment; second, by reducing the cold water outlet temperature of the cold water supply pipe to about 5°C, it can be ensured that the corresponding dew point temperature is qualified under the relative indoor required temperature and humidity; third, by using the first temperature and humidity monitor in the purification production space and the second temperature and humidity monitor provided on the air-conditioning supply duct The temperature and humidity monitors' control temperature fluctuation ranges are narrowed to ±0.3°C and ±0.8%RH, respectively. This means that the use of higher-precision temperature and humidity sensors facilitates high-precision temperature and humidity monitoring. Furthermore, because the control system is individually connected to the air conditioning cabinet, heat and cooling system, fan filter unit, humidification pipe, and monitoring system, it can automatically control the corresponding systems or components based on the acquired test data through precise calculations within a pre-built temperature and humidity coupling model. For example, the control system uses the temperature and humidity control information derived from the temperature and humidity coupling model to control the cooling, heating, and air volume of the air conditioning cabinet, and to control the valve opening of the heat and cooling system and humidification pipe. This refined automatic control logic also facilitates high-precision stabilization of indoor temperature and humidity fluctuations. Through the combined efforts of these factors, the temperature and humidity within a Class 10 cleanroom can be kept stable within the required fluctuation ranges of 22±1°C and 43±3% relative humidity, while meeting Class 10 cleanroom cleanliness standards. BRIEF DESCRIPTION OF THE DRAWINGS

[0061] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0062] Figure 1 Flowchart of the energy-saving and refined control method for central air conditioning in a ten-stage cleanroom provided in an embodiment of the present application;

[0063] Figure 2 A schematic diagram of a portion of the structure of the energy-saving and refined control device for central air conditioning in a ten-stage cleanroom provided in an embodiment of the present application;

[0064] Figure 3 for Figure 2A magnified schematic diagram of point A in the middle;

[0065] Figure 4 for Figure 2 A magnified schematic diagram of point B in the middle;

[0066] Figure 5 for Figure 2 Enlarged schematic diagram of point C in the middle;

[0067] Figure 6 for Figure 2 The enlarged schematic diagram of point D in the middle;

[0068] Figure 7 for Figure 2 The enlarged schematic diagram of point E in the middle;

[0069] Figure 8 for Figure 2 The enlarged schematic diagram of point F in the middle;

[0070] Figure 9 A schematic diagram of the structure of a portion of the cold and heat source system of the energy-saving and refined control device for central air conditioning in a ten-stage cleanroom provided in an embodiment of the present application;

[0071] Figure 10 for Figure 9 Enlarged schematic diagram of point G in the middle;

[0072] Figure 11 for Figure 9 Enlarged schematic diagram of point H in the middle.

[0073] Description of Figure Numbers:

[0074]

[0075]

[0076] DETAILED DESCRIPTION

[0077] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application more clearly understood, this application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0078] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0079] It should also be noted that the directional terms such as left, right, up and down in the embodiments of the present application are merely relative concepts or are based on the normal use status of the product, and should not be considered as restrictive.

[0080] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0081] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0082] In this application, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components or interactions between two components. Those skilled in the art will understand the specific meanings of these terms in this application based on specific circumstances.

[0083] The following describes in detail embodiments of the present application, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limiting the present application.

[0084] The embodiment of the present application provides a method and device for energy-saving and refined control of central air conditioning in a ten-stage cleanroom.

[0085] See also Figures 1 to 11In one embodiment, the method for fine-grained energy-saving control of central air conditioning in a ten-stage cleanroom is implemented based on a fine-grained energy-saving control device for central air conditioning in a ten-stage cleanroom and is used in a ten-stage cleanroom 100. Specifically, the ten-stage cleanroom 100 includes a floor 110, a top wall 120, and peripheral walls 130. The fine-grained energy-saving control device for central air conditioning in a ten-stage cleanroom includes a suspended ceiling and floor structure, an air conditioning cabinet 200, a cold and heat source system, a humidification tube 900, multiple fan filter units 400, a monitoring system, and a control system 500. The suspended ceiling and floor structure includes a double-layer suspended ceiling and an elevated floor 330 provided in a ten-level cleanroom 100. The double-layer suspended ceiling includes a keel ceiling 310 and a secondary suspended ceiling 320 located above the keel ceiling 310. The elevated floor 330 is spaced above the ground 110. A purified production space 140 for placing production equipment is formed between the elevated floor 330 and the keel ceiling 310. An upper ceiling space 150 is formed between the keel ceiling 310 and the secondary suspended ceiling 320. The punching rate of the elevated floor 330 can control the average wind speed in the purified production space 140 to be between 0.2 and 0.45 m / s, and meet the requirements of unidirectional airflow organization and overall return air volume. The cold and heat source system includes a cold water supply pipe 620, an outdoor low-temperature chiller 610, a cold water supply pipe 620, and a cold water return pipe 630. One end of the cold water supply pipe 620 is connected to the low-temperature chiller 610 and the other end is connected to the cold water inlet of the air conditioning cabinet 200. The cold water outlet temperature of the cold water supply pipe 620 is 5°C ± 0.5°C. One end of the cold water return pipe 630 is connected to the cold water return inlet of the air conditioning cabinet 200 and the other end is connected to the low-temperature chiller 610. Multiple fan filter units 400 are installed in a full-coverage configuration on the keel ceiling 310. The air conditioning cabinet 200 includes an air supply duct 210 extending into the ten-stage cleanroom 100. The monitoring system includes a first temperature and humidity sensor 710, a second temperature and humidity sensor 720, and a dew point temperature sensor 730. The first temperature and humidity sensor 710 is located within the clean production space 140; the second temperature and humidity sensor 720 is located on the air supply duct 210; and a dew point temperature signal sensor is located within the air conditioning cabinet 200, next to the cold water inlet of the air conditioning cabinet 200. The first temperature and humidity sensor 710 and the second temperature and humidity sensor 720 have a temperature control fluctuation range of ±0.3°C and a humidity control fluctuation range of ±0.8%RH. The control system 500 is connected to the air conditioning cabinet 200, the cold and heat source system, the fan filter unit 400, and the monitoring system.

[0086] Accordingly, the energy-saving fine control method for the central air-conditioning in a ten-stage cleanroom corresponding to the energy-saving fine control device for the central air-conditioning in a ten-stage cleanroom includes:

[0087] S1. The control system 500 controls the air conditioning cabinet 200, the cold and heat source system, the fan filter unit 400, and the monitoring system to start and operate. The cold air sent into the ten-level cleanroom 100 by the air conditioning supply duct 210 passes through the fan filter unit 400 and the raised floor 330 in turn to realize the indoor purification cycle;

[0088] S2. The cold and hot source systems perform cooling treatment to reduce the outlet temperature of the cold water from the cold water supply pipe 620 to 5°C ± 0.5°C.

[0089] S3. The first temperature and humidity sensor 710 obtains the indoor temperature and humidity of the ten-stage cleanroom 100. The second temperature and humidity sensor 720 obtains the supply air temperature and humidity in the air-conditioning supply duct 210. The dew point temperature sensor 730 obtains the dew point temperature of the fresh air entering the air cabinet 200. The temperature control fluctuation range of the first temperature and humidity sensor 710 and the second temperature and humidity sensor 720 is ±0.3°C, and the humidity control fluctuation range is ±0.8%RH.

[0090] S4. The control system 500 automatically regulates the air conditioning cabinet 200 and the cold and heat source system. The automatic regulation includes inputting the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity and fresh air dew point temperature data into a pre-built temperature and humidity coupling model to calculate temperature adjustment information and humidity adjustment information. The control system 500 regulates the cooling and heating and air volume of the air conditioning cabinet 200 according to the temperature adjustment information and humidity adjustment information, and regulates the valve opening of the cold and heat source system and the humidification pipe 900.

[0091] Based on this design, in this embodiment, the following aspects can be used to comprehensively achieve the requirement of stable high-precision temperature and humidity while meeting the cleanliness conditions: First, through the structural design of the elevated floor 330 with a punching rate of 50%, the secondary ceiling 320 and multiple fan filter units 400, and the cold air sent into the ten-level cleanroom 100 by the air-conditioning supply duct 210 passes through the fan filter unit 400 and the elevated floor 330 in turn and returns to the upper space 150 of the ceiling to achieve a continuous indoor purification cycle, thereby ensuring the indoor ten-level cleanliness environment; second, by reducing the cold water outlet temperature of the cold water supply pipe 620 to about 5°C, it can be ensured that the corresponding dew point temperature is qualified under the relative indoor required temperature and humidity; third, by using the first temperature and humidity sensor 710 in the purification production space 140 and the second temperature and humidity sensor provided on the air-conditioning supply duct 210 The control temperature fluctuation range of the device 720 is narrowed to ±0.3℃ and ±0.8%RH, that is, the configuration of higher-precision temperature and humidity sensors is conducive to high-precision monitoring of temperature and humidity; Fourthly, since the control system 500 is respectively connected to the air conditioning cabinet 200, the cold and heat source system, the fan filter unit 400, the humidification tube 900 and the monitoring system information, the control system 500 can realize automatic regulation of the corresponding systems or components based on the acquired detection data through precise calculation of the pre-constructed temperature and humidity coupling model. For example, the control system 500 controls the cooling and heating and air volume of the air conditioning cabinet 200 according to the temperature adjustment information and humidity adjustment information calculated by the temperature and humidity coupling model, and controls the valve opening of the cold and heat source system and the humidification tube 900. This refined automatic control logic is also conducive to achieving high-precision indoor temperature and humidity fluctuation stabilization. In this way, through the combined effect of the above-mentioned aspects, it is possible to achieve the high-precision requirements of indoor temperature 22±1°C and relative humidity 43±3% while meeting the cleanliness level 10, so that the temperature and humidity in the cleanroom 100 can stably reach the required fluctuation range values.

[0092] It should be noted that in the technical solution of the present application, the control system 500 is specifically a PLC (Programmable Logic Controller) control system 500. The information connection between each functional system and the control system 500 can be wireless or wired, so that the corresponding information data of each functional system or component can be sent to the control system 500, and the control system 500 then automatically controls the corresponding functional system or component based on the monitoring data. In addition, Figure 2 and Figure 9 A complete energy-saving and refined control device for central air conditioning in a ten-stage cleanroom can be formed by correspondingly connecting the cold water supply pipe 620 and the cold water return pipe 630.

[0093] Furthermore, in this embodiment, the temperature and humidity coupling model includes a transfer function matrix. Specifically, the aforementioned control system 500 automatically controls the air conditioning cabinet 200 and the cold and heat source system. The automatic control includes inputting the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity, and fresh air dew point temperature data into a pre-constructed temperature and humidity coupling model to calculate temperature adjustment information and humidity adjustment information. The control system 500 controls the cooling and heating and air volume of the air conditioning cabinet 200 according to the temperature adjustment information and the humidity adjustment information. The step of controlling the valve opening of the cold and heat source system and the humidification pipe 900 includes the following sub-steps:

[0094] Input the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity and fresh air dew point temperature into the transfer function matrix;

[0095] Feedforward compensation is used in the transfer function matrix to eliminate the mutual interference between humidification and cooling;

[0096] Implement statistical process control on the data in the input transfer function matrix and use an integrated LSTM controller to predict load changes over the next 30 minutes to dynamically adjust PID parameters.

[0097] The control system 500 generates temperature adjustment information and humidity adjustment information according to the result of the transfer function matrix operation;

[0098] The control system 500 regulates the cooling and heating and air volume of the air conditioning cabinet 200 according to the temperature adjustment information and the humidity adjustment information, and regulates the valve opening of the cold and heat source system and the humidification pipe 900.

[0099] Here, the specific parameters and operating formulas or programs of the transfer function matrix can be set according to actual conditions and will not be described in detail here. As a common type of temperature and humidity coupling model, the key point of the transfer function matrix is ​​how temperature and humidity interact. In the actual precision automatic control process, through the operation of the transfer function matrix, feedforward compensation processing can be used to eliminate the mutual interference between humidification and cooling, thereby improving control accuracy; it can also be used through statistical process control of the data, using an integrated LSTM controller to predict the load changes over a period of time in the future, such as 30 minutes, thereby achieving dynamic adjustment of the PID parameters. That is, the control system 500 can use the model to predict the impact of control actions on future temperature and humidity, thereby calculating a control signal combination that can simultaneously meet the temperature and humidity set points and is highly energy-efficient.

[0100] Furthermore, the feedforward compensation process includes the following steps:

[0101] Establishing a feedforward compensation model in the control system 500;

[0102] Obtain the refrigeration valve opening signal of the air conditioning cabinet 200 and the opening signal of the second electric valve 910 on the humidification pipe 900, and input the refrigeration valve opening signal and the second electric valve 910 opening signal into the feedforward compensation model to calculate and form a feedforward compensation signal;

[0103] The control system 500 regulates the opening of the second electric valve 910 on the humidification tube 900 according to the feedforward compensation signal;

[0104] The cold water supply pipe 620 is connected to the cold coil pipe of the air conditioning cabinet 200. A cold water supply electric valve is provided on the cold water supply pipe 620. After the feedforward compensation process, the following steps are also included:

[0105] After the second electric valve 910 of the humidifying pipe 900 is opened, the control system 500 calculates the influence of latent heat on the temperature in advance, and then pre-regulates the amount of cold water by regulating the opening of the cold water supply electric valve.

[0106] It can be understood that through feedforward compensation processing, interference such as refrigeration can be calculated in advance before it affects humidity, and a compensation control signal can be generated to offset its adverse effects, thereby avoiding the mutual coupling of humidification and refrigeration actions on temperature and humidity control. For example, when the opening of the cold water supply electric valve used to control refrigeration is increased, the control system 500 can immediately obtain a feedforward compensation signal through feedforward compensation processing and immediately control the opening of the second electric valve 910 of the humidification tube 900 to increase according to the feedforward compensation signal. In this way, the dehumidification effect generated by refrigeration is offset to a certain extent by the additional humidification amount applied in advance. Here, the specific parameters and operating formulas or programs of the feedforward compensation model can be set according to actual conditions and are not described in detail here.

[0107] In addition, if Figures 2 to 5 As shown, in this embodiment, one end of the humidification tube 900 is connected to the RO water source, and the other end of the humidification tube 900 extends into the air conditioning cabinet 200. The humidification tube 900 is also provided with a second electric valve 910, which is informationally connected to the control system 500. It will be understood that the control system 500 can control the second electric valve 910 based on relevant data, thereby achieving flow control of the RO water in the humidification tube 900, and further achieving humidity control of the air supply airflow in the air conditioning cabinet 200.

[0108] Furthermore, the energy-saving fine control device for the central air-conditioning in the ten-level cleanroom also includes an outdoor temperature and humidity sensor, which is used to monitor and obtain the outdoor temperature and outdoor humidity. The air-conditioning cabinet 200 sends an air-conditioning start signal and an air-conditioning stop signal to the control system 500 when it is started and stopped. The automatic control also includes the following steps:

[0109] Establishing a historical data training model in the control system 500;

[0110] The measured indoor temperature, indoor humidity, supply air temperature, supply air humidity, and fresh air dew point temperature are input into the historical data training model. The outdoor temperature, outdoor humidity data, air conditioner start signal, and air conditioner stop signal are also input into the historical data training model as disturbance variables after they are generated. The historical data training model calculates improved temperature adjustment information and humidity adjustment information based on the input data.

[0111] The control system 500 regulates the cooling and heating and air volume of the air conditioning cabinet 200 according to the temperature adjustment information and the humidity adjustment information, and regulates the valve opening of the cold and heat source system and the humidification pipe 900.

[0112] Furthermore, the automatic control further includes the following steps:

[0113] Establishing an AI learning algorithm model in the control system 500;

[0114] Input the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity, and fresh air dew point temperature into the AI ​​learning algorithm model;

[0115] The AI ​​learning algorithm model calculates the stable control point with the lowest energy consumption;

[0116] The control system 500 generates improved temperature adjustment information and humidity adjustment information based on the temperature parameter and humidity parameter of the stable control point;

[0117] The control system 500 regulates the cooling and heating and air volume of the air conditioning cabinet 200 according to the temperature adjustment information and the humidity adjustment information, and regulates the valve opening of the cold and heat source system and the humidification pipe 900.

[0118] In other words, this automatic control process can be achieved by establishing a historical data training model and an AI learning algorithm model, incorporating signals from different conditions such as outdoor temperature and humidity and the power on and off of the air conditioner cabinet 200. The model then predicts the control conditions under different operating conditions, thereby finding the optimal set points and operating mode. The specific parameters and operating formulas or programs of the historical data training model and the AI ​​learning algorithm model can be set according to actual conditions and are not explained in detail here.

[0119] See also Figure 2 as well as Figures 6 to 8In this embodiment, the cold and heat source system further includes a cold water return pipe 630, a hot water supply pipe 650, and a hot water return pipe 660. The cold water return pipe 630 is provided with a cold water return electric valve 621, which is informationally connected to the control system 500. The hot water supply pipe 650 is connected to the hot water inlet of the air conditioning cabinet 200, and the hot water return pipe 660 is connected to the hot water return port of the air conditioning cabinet 200. The hot water return pipe 660 is provided with a third electric valve 631, which is informationally connected to the control system 500. The cold water supply pipe 620, the cold water return pipe 630, the hot water supply pipe 650, and the hot water return pipe 660 are each provided with a thermometer 770 and a pressure gauge 780, each of which is informationally connected to the control system 500. Here, the hot water supply pipe 650 and the hot water return pipe 660 provide heat sources for the air-conditioning cabinet. The temperature of the hot water in the hot water supply pipe 650 is usually 40°C, and the temperature of the hot water in the hot water return pipe 660 is usually 25°C. The thermometer 770 and pressure gauge 780 installed on the pipeline are mainly used to detect the actual temperature and water pressure of the hot water in the pipe.

[0120] Specifically, the hot water supply pipe 650 branches into a first hot water supply branch pipe 651 and a second hot water supply branch pipe 652, the hot water return pipe 660 branches into a first hot water return branch pipe 661 and a second hot water return branch pipe 662, the cold water supply pipe 620 branches into a first cold water supply branch pipe 622 and a second cold water supply branch pipe 623, and the cold water return pipe 630 branches into a first cold water return branch pipe 632 and a second cold water return branch pipe 633; ​​the air conditioning cabinet 200 is double-layered.

[0121] The first hot water supply branch pipe 651 and the first hot water return branch pipe 661 are both connected to the heat coil at the bottom layer of the air conditioning cabinet 200 to achieve the first heating of the air.

[0122] The second hot water supply branch pipe 652 and the second hot water return branch pipe 662 are both connected to the heat coil on the upper layer of the air conditioning cabinet 200; if the measured outdoor temperature is lower than the preset value, the second hot water supply branch pipe 652 and the second hot water return branch pipe 662 are both opened to achieve a second heating of the air; if the measured outdoor temperature is greater than or equal to the preset value, the second hot water supply branch pipe 652 and the second hot water return branch pipe 662 are both closed; for example, in the summer when the outdoor temperature is high, the outdoor temperature will be greater than or equal to the preset value, and the second hot water supply branch pipe 652 and the second hot water return branch pipe 662 may not be opened, that is, there is no secondary heating process.

[0123] The first cold water supply branch pipe 622 and the first cold water return branch pipe 632 are both connected to the cold coil pipe at the bottom layer of the air conditioning cabinet 200 to achieve the first surface cooling and dehumidification of the air.

[0124] The second cold water supply branch pipe 623 and the second cold water return branch pipe 633 are both connected to the cold coil pipe on the upper layer of the air conditioning cabinet 200 to achieve secondary surface cooling and dehumidification of the air; and the cooling and dehumidification of the air sent into the room is mainly achieved through the secondary surface cooling and dehumidification.

[0125] The dew point temperature sensor 730 is disposed adjacent to the connection between the first cold water supply branch pipe 622 and the first cold water return branch pipe 632 and the air conditioning cabinet 200 .

[0126] The air conditioning cabinet 200 also includes a fresh air blower 220, located in front of the air inlet of the heat coil on the bottom floor of the air conditioning cabinet 200. In certain situations, such as when temperatures are low in winter, the heat coil can also preheat the fresh air. A fourth electric valve 221, electrically connected to the control system 500, is located at the air inlet of the fresh air blower 220. By controlling the opening of the fourth electric valve 221, the fresh air volume is regulated. The connection between the first hot water supply branch pipe 651 and the first hot water return branch pipe 661 and the air conditioning cabinet 200 is located near the fresh air blower 220. The connection between the first cold water supply branch pipe 622 and the first cold water return branch pipe 632 and the air conditioning cabinet 200 is located near the first hot water supply branch pipe 651 and the first hot water return branch pipe 661. A dew point temperature sensor 730 is located near the connection between the first cold water supply branch pipe 622 and the first cold water return branch pipe 632 and the air conditioning cabinet 200. Dew point temperature sensor 730 is primarily used to detect the dew point of fresh air entering air cabinet 200, providing the necessary basis for subsequent temperature and humidity control. Furthermore, each fan in air cabinet 200 is equipped with a pressure differential monitor 790 to monitor the pressure differential within the cabinet. If the pressure differential exceeds a preset acceptable value, an alarm is triggered, indicating that the cabinet's filter is clogged, requiring prompt attention.

[0127] Further, if Figures 2 to 5As shown, the ten-stage cleanroom 100 further includes a return air column wall 160, the upper end of which is connected to the top wall 120, and the lower end of which is connected to the ground 110. Both ends of the elevated floor 330, both ends of the keel ceiling 310, and both ends of the secondary ceiling 320 are respectively connected to the return air column wall 160, and a return air duct 161 is formed between the return air column wall 160 and the surrounding walls 130. The elevated floor 330 is spaced above the ground 110, and the clean production space 140 is formed between the elevated floor 330 and the keel ceiling 310. The underfloor space 170 is formed between the elevated floor 330 and the ground 110. The upper end of the return air duct 161 is connected to the upper ceiling space 150, and the lower end of the return air duct 161 is connected to the underfloor space 170. The end of the air supply duct 210 away from the air conditioning cabinet 200 extends into the return air duct 161. Here, the secondary ceiling 320 and the return air column wall 160 are preferably constructed of color-coated steel plates. Of course, other suitable materials may also be used in other embodiments. The keel ceiling 310 forms a ceiling for the installation of multiple fan-filter units in intervals. The secondary ceiling 320 is then installed, creating a double-layered ceiling structure with the keel ceiling 310 and the secondary ceiling 320. This creates a higher cleanliness level in the interlayer between the keel ceiling 310 and the secondary ceiling 320, i.e., the upper ceiling space 150. In this embodiment, the perforation ratio of the raised floor 330 is preferably 50%.

[0128] Accordingly, after the control system 500 controls the air conditioning cabinet 200, the cold and heat source system, the fan filter unit 400, and the monitoring system to start and operate, the control system 500 further includes the following steps:

[0129] The cold air passes through the ceiling space 150 and is filtered by the fan filter unit 400 before entering the purified production space 140;

[0130] Cool air flows from the clean production space 140 through the holes in the raised floor 330 into the underfloor space 170. The perforation ratio of the raised floor 330 must be such that the average air velocity within the clean production space 140 is controlled within a range of 0.2 to 0.45 m / s, while ensuring unidirectional airflow and overall return air volume.

[0131] The cold air enters the return air duct 161 from the underfloor space 170 , and the cold air entering the return air duct 161 mixes with the cold air blown out of the air-conditioning supply duct 210 and then enters the space above the ceiling 150 again.

[0132] Thus, during actual use of the Class 10 cleanroom 100, clean air is filtered by the fan filter unit 400 and delivered to the work area, or clean production space 140. It then passes through the 50% perforated panels of the raised floor 330 and enters the return air duct beneath the floor, or underfloor space 170. This creates a one-way airflow, effectively removing pollutants such as dust and particulates, thereby ensuring a Class 10 cleanroom environment. The air then passes through underfloor space 170 and enters the return air duct 161. After mixing with the cool air from the air supply duct 210, it enters the ceiling space 150 through the return air duct 161. Furthermore, to achieve even better air circulation and purification, return air column walls 160 are installed on both sides of the Class 10 cleanroom 100, forming return air ducts 161 on both sides. One end of the air supply duct 210 extends into the return air duct 161 near the air cabinet 200.

[0133] Further, if Figure 2 and Figure 3 As shown, the energy-saving and refined control device for central air conditioning in a ten-stage cleanroom further includes a dry coil 810 , which is arranged on the return air column wall 160 in the upper space 150 of the ceiling and is connected to the return air duct 161 .

[0134] Accordingly, the step of mixing the cold air entering the return air duct 161 with the cold air blown out of the air-conditioning supply air duct 210 and then entering the ceiling space 150 again further includes the following steps:

[0135] The cold air entering the return air duct 161 is mixed with the cold air blown out of the air conditioning supply duct 210 and then enters the dry coil 810;

[0136] The cold air after being cooled by the dry coil 810 enters the space 150 above the ceiling.

[0137] Specifically, the components associated with the dry coil 810 also include a dry coil cold water supply pipe 820 connected to the water inlet of the dry coil 810 and a dry coil cold water return pipe 830 connected to the water return of the dry coil 810. The two dry coils 810 are installed on either side of the return air column wall 160. Air in the return air duct 161 passes through the dry coils 810 and enters the ceiling space 150. Medium-temperature water flows through the dry coil cold water supply pipe 820 and the dry coil cold water return pipe 830. The dry coil cold water return pipe 830 is equipped with a first electric valve 840 that is connected to the control system 500. The air in the return air duct 161 must be further cooled by the dry coil 810 before entering the ceiling space 150. Specifically, in this embodiment, the water temperature in the dry coil cold water supply pipe 820 is 12°C, and the water temperature in the dry coil cold water return pipe 830 is 18°C. Here, using medium-temperature water for the dry coil 810 not only minimizes condensation but also offers advantages such as lower energy consumption. Accordingly, since a return air duct 161 is provided on both sides of the ten-stage cleanroom 100, two sets of dry coil 810 components are provided, one on each side.

[0138] In addition, if Figure 2 、 Figure 3 as well as Figure 5 As shown, in this embodiment, the monitoring system further includes a pressure differential sensor 740 located in the clean production space 140; the first temperature and humidity sensor 710 and the pressure differential sensor 740 are both mounted on the return air column wall 160 and located below the dry coil 810; the first temperature and humidity sensor 710 and the pressure differential sensor 740 are both respectively connected to the control system 500. The pressure differential sensor 740 mainly detects the pressure difference between the clean production space 140 and the return air duct 161 in real time through the pressure differential sensor 740, and transmits the pressure differential data to the control system 500. If the pressure differential exceeds a preset value, it will trigger an alarm or output relevant signals to control the operation of relevant systems or components, such as but not limited to adjusting the fan frequency, air valve opening, etc., to restore the pressure differential balance. Correspondingly, since a return air duct 161 is provided on opposite sides of the purified production space 140, the two first temperature and humidity sensors 710 and the two pressure difference sensors 740 are also respectively installed on the two opposite return air column walls 160. In this way, multi-point monitoring can be achieved, making the monitoring of the ambient temperature, humidity and pressure difference of the purified production space 140 more accurate, which is conducive to ensuring the stability of the indoor environment.

[0139] Further, if Figure 2 、 Figure 4 and Figure 5As shown, in this embodiment, the air supply duct 210 has an air outlet extending into the return air duct 161. An air volume electric valve 211 is installed on the air supply duct 210 adjacent to the air outlet. The monitoring system also includes a first pressure sensor 750 installed on the air supply duct 210. The second temperature and humidity sensor 720, the first pressure sensor 750, and the air volume electric valve 211 are all connected to the control system 500. When the air volume electric valve 211 is installed on the air supply duct 210 adjacent to the air outlet, it can better control the air volume output from the air supply duct 210. Of course, because pressure abnormalities may cause changes in air volume, indirectly affecting the accuracy of temperature and humidity control, the second temperature and humidity sensor 720 and the first pressure sensor 750 are often operated in conjunction in the central air conditioning system. In addition, a 70°C fire damper 212 is installed on the air supply duct 210 to prevent fire from spreading through the air conditioning system.

[0140] Further, if Figure 2 and Figures 6 to 8 、 Figure 11 As shown, in this embodiment, the cold and heat source system also includes a cold water return pipe 630, a low-temperature cold water host 610, a chilled water pump 640, a constant pressure water replenishment device 670 and an antifreeze configuration cylinder 680; the water outlet of the low-temperature cold water host 610 is connected to the cold water supply pipe 620, and the return port of the low-temperature cold water host 610 is connected to the cold water return pipe 630; the chilled water pump 640 is provided on the cold water return pipe 630 and is located between the low-temperature cold water host 610 and the air conditioning cabinet 200; the constant pressure water replenishment device 670 is connected to the cold water return pipe 630, is located between the low-temperature cold water host 610 and the air conditioning cabinet 200, and is arranged adjacent to the chilled water pump 640; the antifreeze configuration cylinder 680 containing antifreeze is connected to the constant pressure water replenishment device 670;

[0141] Accordingly, the steps of cooling the cold and heat source systems to reduce the outlet temperature of the cold water from the cold water supply pipe 620 to 5°C ± 0.5°C include:

[0142] The cold water at 5°C±0.5°C is generated by the compression refrigeration cycle in the low-temperature chiller 610 and input into the cold water supply pipe 620. The cold water then enters the cold coil of the air conditioning cabinet 200 through the cold water supply pipe 620 to achieve surface cooling.

[0143] The cold water after surface cooling flows back from the cold coil into the cold water return pipe 630;

[0144] Antifreeze is added from the antifreeze dispensing cylinder 680 to the constant pressure water supply device 670;

[0145] The cold water in the cold water return pipe 630 is mixed with the supplementary water containing antifreeze added by the constant pressure water supply device 670 , and then flows back to the low-temperature chiller 610 through the chilled water pump 640 .

[0146] Here, the chilled water pump 640 primarily transports chilled water from the chilled water return pipe 630 to the low-temperature chiller 610. A constant-pressure water replenishment device 670 replenishes the chilled water return pipe 630. Antifreeze stored in the antifreeze dispensing cylinder 680 can flow through a pipe into the constant-pressure water replenishment device 670 and then be added to the chilled water return pipe 630. It will be appreciated that to protect the system's internal piping from freezing and maintain a long-term outlet water temperature of approximately 5°C for the low-temperature chillers, the system can automatically add antifreeze. The antifreeze can be, but is not limited to, an ethylene glycol aqueous solution with a 32% to 38% ethylene glycol concentration.

[0147] In addition, if Figure 9 and Figure 10 As shown, the low-temperature chiller 610 is also connected to a water tower 690, and a cooling water pump 693 for delivering cooling water is provided between the water tower 690 and the low-temperature chiller 610, thereby realizing the cooling water circulation of the low-temperature chiller 610; an automatic dosing device 692 is also connected to the pipeline between the cooling water pump 693 and the water tower 690 to avoid the risk of scale blocking the pipeline or equipment. In this embodiment, Figures 9 to 11 As shown, in addition to the water tower 690, cooling water pump 693, low-temperature chilled water main unit 610, and refrigerated water pump 640 that are normally used, there are also spare water tower 691, spare cooling water pump 694, spare low-temperature chilled water main unit 611, and spare refrigerated water pump 641. These spare equipment are all connected by relevant pipelines to prepare for emergencies and ensure the normal operation of the entire central air-conditioning system.

[0148] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A method for energy-saving and refined control of central air conditioning in a ten-stage cleanroom, characterized in that: The energy-saving fine control method for central air conditioning in a ten-stage cleanroom is implemented based on a energy-saving fine control device for central air conditioning in a ten-stage cleanroom and is used in the ten-stage cleanroom. The energy-saving fine control device for central air conditioning in a ten-stage cleanroom includes a ceiling and floor structure, an air conditioning cabinet, a cold and heat source system, a humidification pipe, multiple fan filter units, a monitoring system, and a control system. The ceiling and floor structure includes a double-layer ceiling and a raised floor provided in the ten-stage cleanroom, the cold and heat source system includes a cold water supply pipe, the air conditioning cabinet includes an air conditioning air supply pipe extending into the ten-stage cleanroom, and the monitoring system includes a first temperature and humidity sensor, a second temperature and humidity sensor, and a dew point temperature sensor. The energy-saving fine control method for central air conditioning in a ten-stage cleanroom includes: The control system controls the air conditioning cabinet, the cold and heat source system, the fan filter unit and the monitoring system to start and operate, and the cold air sent into the ten-stage clean room by the air conditioning supply pipe passes through the fan filter unit and the raised floor in turn to realize indoor purification circulation; The cold and heat source system performs a cooling process so that the cold water outlet temperature of the cold water supply pipe is 5°C ± 0.5°C; The first temperature and humidity sensor obtains the indoor temperature and humidity of the ten-level cleanroom, the second temperature and humidity sensor obtains the supply air temperature and humidity in the air-conditioning supply duct, and the dew point temperature sensor obtains the fresh air dew point temperature of the fresh air entering the air cabinet; the temperature control fluctuation range of the first temperature and humidity sensor and the second temperature and humidity sensor is ±0.3°C, and the humidity control fluctuation range is ±0.8%RH; The control system automatically regulates the air conditioning cabinet and the cold and heat source system. The automatic regulation includes inputting the measured data of the indoor temperature, the indoor humidity, the supply air temperature, the supply air humidity and the fresh air dew point temperature into a pre-constructed temperature and humidity coupling model to calculate temperature regulation information and humidity regulation information. The control system regulates the cooling and heating and air volume of the air conditioning cabinet according to the temperature regulation information and the humidity regulation information, and regulates the valve opening of the cold and heat source system and the humidification pipe.

2. The energy-saving and refined control method for central air conditioning in a ten-stage cleanroom according to claim 1 is characterized in that: The temperature and humidity coupling model includes a transfer function matrix. The control system automatically regulates the air conditioning cabinet and the cold and heat source system. The automatic regulation includes inputting the measured data of the indoor temperature, the indoor humidity, the supply air temperature, the supply air humidity, and the fresh air dew point temperature into a pre-constructed temperature and humidity coupling model to calculate temperature regulation information and humidity regulation information. The control system regulates the cooling and heating and air volume of the air conditioning cabinet according to the temperature regulation information and the humidity regulation information. The step of regulating the valve opening of the cold and heat source system and the humidification pipe includes the following sub-steps: Inputting the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity and fresh air dew point temperature into the transfer function matrix; A feedforward compensation process is used in the transfer function matrix to eliminate mutual interference between humidification and cooling; Implementing statistical process control on the data input into the transfer function matrix and predicting the load change in the next 30 minutes through an integrated LSTM controller to achieve dynamic adjustment of PID parameters; The control system generates the temperature adjustment information and the humidity adjustment information according to the result of the operation of the transfer function matrix; The control system regulates cooling, heating and air volume of the air conditioning cabinet according to the temperature regulation information and the humidity regulation information, and regulates valve opening of the cold and heat source system and the humidification pipe.

3. The energy-saving and refined control method for central air conditioning in a ten-stage cleanroom as claimed in claim 2 is characterized in that: The feedforward compensation process comprises the following steps: establishing a feedforward compensation model in the control system; Obtaining a refrigeration valve opening signal of the air conditioning cabinet and a second electric valve opening signal on the humidification pipe, and inputting the refrigeration valve opening signal and the second electric valve opening signal into the feedforward compensation model to calculate and form a feedforward compensation signal; The control system regulates the opening of the second electric valve on the humidification pipe according to the feedforward compensation signal; The cold water supply pipe is connected to the cold coil pipe of the air conditioner cabinet, and a cold water supply electric valve is provided on the cold water supply pipe. After the feedforward compensation process, the following steps are also included: After the second electric valve of the humidifying pipe is opened, the control system calculates the influence of latent heat on temperature in advance, and then pre-regulates the amount of cold water by regulating the opening of the cold water supply electric valve.

4. The energy-saving and refined control method for central air conditioning in a ten-stage cleanroom as claimed in claim 2 is characterized in that: The energy-saving fine control device for central air conditioning in the ten-stage cleanroom further includes an outdoor temperature and humidity sensor, which is used to monitor and obtain outdoor temperature and outdoor humidity. The air conditioning cabinet sends an air conditioning start signal and an air conditioning stop signal to the control system when it is started and stopped. The automatic control further includes the following steps: Establishing a historical data training model in the control system; The measured indoor temperature, indoor humidity, supply air temperature, supply air humidity, and fresh air dew point temperature are input into the historical data training model. The outdoor temperature, outdoor humidity data, air conditioner start signal, and air conditioner stop signal are also input into the historical data training model as disturbance variables after being generated. The historical data training model calculates the improved temperature adjustment information and humidity adjustment information based on the input data. The control system regulates cooling, heating and air volume of the air conditioning cabinet according to the temperature regulation information and the humidity regulation information, and regulates valve opening of the cold and heat source system and the humidification pipe.

5. The energy-saving and refined control method for central air conditioning in a ten-stage cleanroom according to claim 1 is characterized in that: The automatic control further comprises the following steps: Establishing an AI learning algorithm model in the control system; Inputting the measured indoor temperature, indoor humidity, supply air temperature, supply air humidity, and fresh air dew point temperature into the AI ​​learning algorithm model; The AI ​​learning algorithm model calculates a stable control point with the lowest energy consumption; The control system forms improved temperature adjustment information and humidity adjustment information according to the temperature parameter and humidity parameter of the stable control point; The control system regulates cooling, heating and air volume of the air conditioning cabinet according to the temperature regulation information and the humidity regulation information, and regulates valve opening of the cold and heat source system and the humidification pipe.

6. The energy-saving and refined control method for central air conditioning in a ten-stage cleanroom according to claim 1 is characterized in that: The cold and heat source system also includes a cold water return pipe, a hot water supply pipe, and a hot water return pipe. The hot water supply pipe branches into a first hot water supply branch pipe and a second hot water supply branch pipe, the hot water return pipe branches into a first hot water return branch pipe and a second hot water return branch pipe, the cold water supply pipe branches into a first cold water supply branch pipe and a second cold water supply branch pipe, and the cold water return pipe branches into a first cold water return branch pipe and a second cold water return branch pipe; the air conditioning cabinet is double-layered; The first hot water supply branch pipe and the first hot water return branch pipe are both connected to the heat coil at the bottom of the air conditioning cabinet to achieve the first heating of the air; The second hot water supply branch pipe and the second hot water return branch pipe are both connected to the heat coil on the upper layer of the air conditioning cabinet; if the measured outdoor temperature is lower than a preset value, the second hot water supply branch pipe and the second hot water return branch pipe are both opened to achieve a second heating of the air; if the measured outdoor temperature is greater than or equal to the preset value, the second hot water supply branch pipe and the second hot water return branch pipe are both closed; The first cold water supply branch pipe and the first cold water return branch pipe are both connected to the cold coil pipe at the bottom layer of the air conditioning cabinet to achieve the first surface cooling and dehumidification of the air; The second cold water supply branch pipe and the second cold water return branch pipe are both connected to the cold coil pipe on the upper layer of the air conditioning cabinet to achieve secondary surface cooling and dehumidification of the air; The dew point temperature sensor is arranged adjacent to the connection between the first cold water supply branch pipe and the first cold water return branch pipe and the air conditioning cabinet; The air conditioning cabinet also includes a fresh air fan, which is arranged in front of the air inlet direction of the heat coil at the bottom of the air conditioning cabinet. A fourth electric valve electrically connected to the control system is provided at the air inlet of the fresh air fan.

7. The energy-saving and refined control method for central air conditioning in a ten-stage cleanroom according to claim 1 is characterized in that: The ten-level cleanroom includes a floor, a top wall, a peripheral wall, and a return air column wall, a return air duct is formed between the return air column wall and the peripheral wall; the double-layer ceiling includes a keel ceiling and a secondary ceiling located above the keel ceiling, the elevated floor is spaced above the floor, an upper ceiling space is formed between the keel ceiling and the secondary ceiling, a purified production space is formed between the elevated floor and the keel ceiling, and an underfloor space is formed between the elevated floor and the floor; a plurality of fan filter units are fully installed on the keel ceiling; the upper end of the return air duct is communicated with the upper ceiling space, and the lower end of the return air duct is communicated with the underfloor space; the air-conditioning supply duct extends into the return air duct; After the step of the control system controlling the air conditioning cabinet, the cold and heat source system, the fan filter unit and the monitoring system to start and operate, the control system further includes the following steps: The cold air enters the purified production space after being filtered by the fan filter unit from the space above the ceiling; The cold air enters the underfloor space from the clean production space through the holes in the raised floor; wherein the perforation ratio of the raised floor must be such that the average wind speed in the clean production space is controlled within a range of 0.2 to 0.45 m / s, and the unidirectional airflow organization and overall return air volume are met; The cold air enters the return air duct from the space under the floor, and the cold air entering the return air duct is mixed with the cold air blown out of the air-conditioning supply pipe and then enters the space above the ceiling again.

8. The energy-saving and refined control method for central air conditioning in a ten-stage cleanroom according to claim 7, characterized in that: The energy-saving fine control device for central air conditioning in the ten-stage cleanroom further includes a dry coil, which is arranged on the return air column wall in the space above the ceiling and is connected to the return air duct; The step of mixing the cold air entering the return air duct with the cold air blown out of the air-conditioning supply duct and then entering the space above the ceiling again further includes the following steps: The cold air entering the return air duct is mixed with the cold air blown out of the air supply pipe of the air conditioner and then enters the dry coil; The cold air cooled by the dry coil surface enters the space above the ceiling.

9. The energy-saving and refined control method for central air conditioning in a ten-stage cleanroom according to claim 1, characterized in that: The cold and heat source system also includes a cold water return pipe, a low-temperature cold water main unit, a chilled water pump, a constant pressure water replenishment device and an antifreeze liquid configuration cylinder; the water outlet of the low-temperature cold water main unit is connected to the cold water supply pipe, and the return port of the low-temperature cold water main unit is connected to the cold water return pipe; the chilled water pump is provided on the cold water return pipe and is located between the low-temperature cold water main unit and the air conditioning cabinet; the constant pressure water replenishment device is connected to the cold water return pipe, is located between the low-temperature cold water main unit and the air conditioning cabinet, and is arranged adjacent to the chilled water pump; the antifreeze liquid configuration cylinder containing antifreeze is connected to the constant pressure water replenishment device; The step of cooling the cold and heat source system so that the outlet temperature of the cold water of the cold water supply pipe is 5°C ± 0.5°C includes: The cold water at 5°C±0.5°C is generated by the compression refrigeration cycle in the low-temperature cold water host and input into the cold water supply pipe, and then enters the cold coil of the air conditioner through the cold water supply pipe to realize surface cooling; The cold water after surface cooling flows back from the cold coil into the cold water return pipe; Antifreeze liquid is added from the antifreeze liquid configuration cylinder to the constant pressure water supply device; The cold water in the cold water return pipe is mixed with the supplementary water containing antifreeze supplemented by the constant pressure water supplement device, and together flows back to the low-temperature cold water host through the chilled water pump.

10. A ten-stage cleanroom central air-conditioning energy-saving and refined control device, characterized in that: The method for energy-saving and refined control of central air conditioning in a ten-stage cleanroom according to any one of claims 1 to 9 is applied, wherein the ten-stage cleanroom comprises a floor, a top wall, and surrounding walls, and the energy-saving and refined control device for central air conditioning in the ten-stage cleanroom comprises: The ceiling floor structure includes a double-layer ceiling and an elevated floor. The double-layer ceiling includes a keel ceiling and a secondary ceiling located above the keel ceiling. The elevated floor is spaced above the ground. A clean production space for accommodating production equipment is formed between the elevated floor and the keel ceiling. An upper ceiling space is formed between the keel ceiling and the secondary ceiling. The punching rate of the elevated floor can control the average wind speed in the clean production space to 0.2 to 0.45 m / s, and meet the requirements of unidirectional airflow organization and overall return air volume. An air conditioning cabinet is provided in an air conditioning room outside the ten-stage cleanroom, and includes an air conditioning air supply duct connected to the ten-stage cleanroom; The cold and heat source system includes a low-temperature chiller located outdoors, a cold water supply pipe, and a cold water return pipe; one end of the cold water supply pipe is connected to the low-temperature chiller, and the other end is connected to the cold water inlet of the air conditioning cabinet, and the cold water outlet temperature of the cold water supply pipe is 5°C ± 0.5°C; one end of the cold water return pipe is connected to the cold water return inlet of the air conditioning cabinet, and the other end is connected to the low-temperature chiller; A plurality of fan filter units are installed in a full-coverage manner on the keel ceiling; The monitoring system includes a first temperature and humidity sensor, a second temperature and humidity sensor, and a dew point temperature sensor; the first temperature and humidity sensor is located in the clean production space; the second temperature and humidity sensor is located on the air supply duct of the air conditioner; the dew point temperature signal sensor is located in the air conditioner cabinet and is located next to the cold water inlet of the air conditioner cabinet; the temperature control fluctuation range of the first temperature and humidity sensor and the second temperature and humidity sensor is ±0.3°C, and the humidity control fluctuation range is ±0.8%RH; The control system is respectively connected to the air conditioning cabinet, the cold and heat source system, the fan filter unit and the monitoring system information.

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