Mist separating and filtering equipment for cutting fluid for photovoltaic silicon wafer production

Abstract

The invention relates to the technical field of cutting fluid separation and filtration, and discloses mist separation and filtration equipment for cutting fluid for photovoltaic silicon wafer production, which comprises a rack, a centrifugal tank body, a feeding shaft, a servo motor and a filter cartridge, a locking sleeve is installed on the feeding shaft, a plurality of fixed sleeves are fixedly installed on the locking sleeve, a sliding shaft body in sliding connection with the inner wall of each fixed sleeve is installed in the corresponding fixed sleeve, an annular disc frame is fixedly installed on each sliding shaft body, and a plurality of intercepting components are arranged between the annular disc frames and the fixed sleeves; according to the mist separating and filtering equipment for the cutting fluid for photovoltaic silicon wafer production, flow field parameters can be effectively changed by dynamically adjusting the radius of the intercepting part, optimization treatment on oil mist with different concentrations is achieved, the particle residence time can be prolonged through the intercepting part, and therefore collision polymerization between superfine particles and large particles is facilitated; therefore, the large particles can carry the superfine particles to be in contact with the filter cartridge, and are separated and filtered under the action of the filter cartridge.

Description

Technical Field

[0001] The invention relates to the technical field of cutting fluid separation and filtration, in particular to a cutting fluid mist separation and filtration device used in photovoltaic silicon wafer production. Background Art

[0002] During the photovoltaic silicon wafer cutting process, the diamond wire rubs against the silicon ingot at high speed (typically ≥15m / s), requiring continuous spraying of polyethylene glycol (PEG)-based cutting fluid for cooling and lubrication. This process generates a large amount of submicron oil mist. Its core characteristics include ultrafine particles, with more than 80% of the oil mist particles having a size of less than 5µm, of which approximately 30% are ultrafine particles less than 1µm (containing silicon carbide abrasive, silicon powder, and PEG droplets); high-temperature diffusivity, with local temperatures at the cutting point reaching over 80°C, exacerbating the evaporation and diffusion of the oil mist. Based on the separation principle and structural design, existing separation and filtration technologies are mainly divided into mechanical filtration, electrostatic adsorption, and centrifugal separation. Mechanical filtration directly intercepts oil mist particles through multi-layer filters (such as wire mesh and non-woven fabric); electrostatic adsorption uses a high-voltage electric field to charge the oil mist particles, causing them to be adsorbed to the dust collecting plate; and centrifugal separation allows the oil mist to enter a high-speed rotating device, where the particles are impacted by centrifugal force and then aggregate and settle. Centrifugal separation filtration equipment can effectively capture particles of 1µm-10µm and is particularly suitable for silicon carbide abrasives and silicon powder in PEG-based cutting fluids. The speed can be adjusted (2000-8000rpm) to adapt to different working conditions. Increasing the speed at high concentrations can prevent clogging. However, in the photovoltaic silicon wafer cutting process, polyethylene glycol (PEG)-based cutting fluid produces a large amount of oil mist containing submicron particles (<1µm) under the action of a high-speed wire saw. The ultrafine particles are then affected by random Brownian motion in the centrifugal field, and the centrifugal force cannot effectively drive them to impact the filter wall, making it impossible for the ultrafine particles to be effectively separated and filtered, affecting the treatment effect. To this end, we propose a mist separation and filtration equipment for cutting fluids used in photovoltaic silicon wafer production. Summary of the Invention

[0003] The object of the present invention is to provide a mist separation and filtration device for cutting fluid used in photovoltaic silicon wafer production to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned object, the present invention provides the following technical solution: a mist separation and filtration device for cutting fluid used in photovoltaic silicon wafer production, comprising a frame, a centrifugal tank fixedly mounted on the frame, a feed shaft with a through hole installed inside the centrifugal tank, a servo motor with an output end connected to the end of the feed shaft fixedly mounted on the top of the centrifugal tank, and a filter cartridge installed inside the centrifugal tank; A locking sleeve is fixedly mounted on the feed shaft, and the locking sleeve is threadedly connected to the surface of the feed shaft. A plurality of fixed sleeves are fixedly mounted on the locking sleeve, and a sliding shaft body is installed inside each of the fixed sleeves and is slidably connected to its inner wall. An annular disc rack is fixedly mounted on the sliding shaft body, and a plurality of intercepting components are provided between the annular disc rack and the fixed sleeve. Each of the intercepting components includes an arc-shaped metal rod frame 1 arranged on the annular disc frame and an arc-shaped metal rod frame 2 arranged on the surface of the fixed sleeve, one end of the arc-shaped metal rod frame is fixedly installed with a connecting sleeve, and the connecting sleeve is rotatably connected to one end of the arc-shaped metal rod frame 2; a plurality of guide grooves are provided on the surfaces of the arc-shaped metal rod frame 1 and the arc-shaped metal rod frame 2, and the groove depth in the middle area of ​​the guide groove is smaller than the groove depth at both ends; a plurality of electromagnetic components corresponding to the fixed sleeves are installed inside the locking sleeve, and an annular iron sheet is fixedly installed at one end of the sliding shaft located inside the fixed sleeve, the annular iron sheet is located on one side of the electromagnetic component, and the electromagnetic component is energized to generate an attractive force on the annular iron sheet, wherein a plastic spring is connected between the annular iron sheet and the inner wall of the fixed sleeve.

[0005] Preferably, a telescopic shaft is movably mounted on the first and second arc-shaped metal rod frames, and a supporting shaft rotatably connected thereto is mounted on the end of the telescopic shaft, and a spoiler sleeve rotatably connected thereto is mounted on the supporting shaft.

[0006] Preferably, the spoiler sleeve is fixedly provided with a variable pitch spiral blade, which is used to induce turbulent diffusion and collision of particles.

[0007] Preferably, a plurality of spoiler frames are further provided on the fixed sleeve, and both ends of each spoiler frame are further provided with connecting shafts threadedly connected to the fixed sleeve, and the spoiler frames are rotatably connected to the connecting shafts.

[0008] Preferably, a plurality of detachable sleeves are fixedly mounted on the spoiler frame, a spherical connecting rod frame movably connected to the detachable sleeve is mounted on the detachable sleeve, a conical spoiler block is fixedly mounted on the spherical connecting rod frame, and spiral spoiler blades are fixedly mounted on the surface of the conical spoiler block.

[0009] Preferably, the spoiler frame is designed in a wave-like manner.

[0010] Preferably, the ends of the arc-shaped metal rod frame 1 and the arc-shaped metal rod frame 2 are both spherical, the arc-shaped metal rod frame 1 is movably connected to the annular disc frame, and the arc-shaped metal rod frame 2 is movably connected to the surface of the fixed sleeve.

[0011] Preferably, there are length differences between the plurality of fixed sleeves.

[0012] Preferably, a plurality of retractable balls are mounted on the surface of the sliding shaft, and a groove is provided inside the fixed sleeve, and the balls slide in a limited manner in the groove.

[0013] Compared with the prior art, the present invention has the following beneficial effects: The present invention can effectively change the flow field parameters and optimize the treatment of oil mist of different concentrations by dynamically adjusting the radius of the intercepting component. The intercepting component can increase the particle retention time to facilitate the collision and aggregation between ultrafine particles and large particles, so that the large particles can carry the ultrafine particles to contact the filter cartridge and be separated and filtered under the action of the filter cartridge.

[0014] The present invention utilizes the rotation of variable-pitch spiral blades to form a non-uniform shear field on the supporting shaft, inducing turbulent diffusion and collision of ultrafine particles. The variable-pitch spiral blades rotate to generate eddy currents, forcing the ultrafine particles to deviate from their original motion trajectories so as to collide and aggregate with the large particles on the arc-shaped metal rod frame one and the arc-shaped metal rod frame two. The random diffusion of ultrafine particles caused by Brownian motion is effectively restrained, thereby increasing the probability of collision between ultrafine particles and large particles.

[0015] The spoiler frame in the present invention rotates under the action of the cutting fluid, and forms a periodic undulating flow channel in the rotating state, forcing the fluid to generate a longitudinal vortex, which on the one hand changes the motion trajectory of the ultrafine particles and makes them move toward the arc-shaped metal rod frame 1 and the arc-shaped metal rod frame 2, and on the other hand can effectively extend the migration path of the oil mist particles, increase the collision probability of the ultrafine particles and the large particles, and enhance the interference to the ultrafine particles under the action of the spiral spoiler blades, reconstruct the migration path of the ultrafine particles within the range, and make the arc-shaped metal rod frame 1 and the arc-shaped metal rod frame 2 become efficient targeted capture areas, so as to facilitate the ultrafine particles on the conical spoiler block and the spiral spoiler blades to move toward the arc-shaped metal rod frame 1 and the arc-shaped metal rod frame 2, so as to increase the collision probability of the ultrafine particles and the large particles, so that the large particles can carry the ultrafine particles to contact the filter cartridge and be separated and filtered under the action of the filter cartridge. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the centrifugal tank structure of the present invention; Figure 3 This is a schematic diagram of the centrifugal tank structure separation of the present invention; Figure 4 This is a schematic diagram of the feed shaft structure of the present invention; Figure 5 It is a schematic top view of the local internal structure of the centrifugal tank of the present invention; Figure 6This is a schematic diagram of the internal structure of the fixed sleeve of the present invention; Figure 7 Schematic diagram of the structure of the arc-shaped metal rod frame 1 and the arc-shaped metal rod frame 2 of the present invention; Figure 8 This is a schematic diagram of the guide trough structure of the present invention; Figure 9 This is a schematic diagram of the telescopic shaft and the supporting shaft structure of the present invention; Figure 10 This is a schematic diagram of the separation of the supporting shaft and the variable pitch helical blade structure of the present invention; Figure 11 Schematic diagram of the spoiler frame structure of the present invention; Figure 12 Schematic diagram of the structure of the conical spoiler of the present invention; Figure 13 It is a structural schematic diagram of the intercepting component of the present invention.

[0017] Figure: 1, frame; 2, centrifugal tank; 21, discharge sleeve; 22, scraper disc frame; 23, belt drive mechanism; 24, conveying pipe; 3, feed shaft; 31, locking sleeve; 32, fixed sleeve; 321, slot; 33, sliding shaft; 331, ball bearing; 34, annular disc frame; 35, electromagnetic assembly; 36, annular iron sheet; 37, plastic spring; 4, servo motor; 5, filter Cylinder; 6. Intercepting component; 61. Arc-shaped metal rod frame 1; 62. Arc-shaped metal rod frame 2; 63. Connecting sleeve; 64. Guide groove; 7. Telescopic shaft; 71. Support shaft; 72. Spoiler sleeve; 73. Variable pitch spiral blade; 8. Spoiler frame; 81. Connecting shaft; 82. Removable sleeve; 83. Spherical connecting rod frame; 84. Conical spoiler block; 85. Spiral spoiler blade. DETAILED DESCRIPTION

[0018] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0019] See also Figures 1-13 The present invention provides a technical solution: a mist separation and filtration device for cutting fluid used in photovoltaic silicon wafer production. The present invention makes corresponding improvements to the technical problems in the background technology, induces ultrafine particles to collide and aggregate with large particles, and overcomes the problem of ultrafine particles escaping in the centrifugal field; based on this, the present invention makes the following designs: combined with the attached Figure 1 , Attachment Figure 2 and attached Figure 3As shown, it includes a frame 1, a centrifugal tank body 2 fixedly mounted on the frame 1, a detachable discharge sleeve 21 is installed at the bottom of the centrifugal tank body 2, and a telescopic scraper disc frame 22 is installed inside the discharge sleeve 21, a feed shaft 3 with a through hole is installed inside the centrifugal tank body 2, and a servo motor 4 with an output end connected to the end of the feed shaft 3 is fixedly installed on the top of the centrifugal tank body 2, and a filter cartridge 5 is installed inside the centrifugal tank body 2, and the filter cartridge 5 is rotated by a belt drive mechanism 23, wherein a feed pipe 24 for conveying coolant is installed in the frame 1, and the feed shaft 3 is connected to the feed pipe 24. The above design principle The principles are all prior art, and the present invention will briefly describe this: in the specific working process, the feeding pipe 24 feeds the cutting fluid into the feed shaft 3. During this process, the scraper disc frame 22 seals the bottom of the centrifugal tank 2, and the output end of the servo motor 4 controls the feed shaft 3 to rotate. The coolant in the feeding pipe 24 enters the feed shaft 3 and flows out along the through hole on the feed shaft 3, so that the coolant is thrown to the inner wall of the filter cartridge 5. During this process, the filter cartridge 5 rotates under the action of the belt transmission mechanism 23; since the above components and centrifugal separation filtration are prior art components, the present invention will not describe them in detail; combined with the attached Figure 4 , Attachment Figure 5 , Attachment Figure 6 And attached Figure 7 As shown, a locking sleeve 31 is fixedly installed on the feed shaft 3, and the locking sleeve 31 is threadedly connected to the surface of the feed shaft 3. A plurality of fixed sleeves 32 are fixedly installed on the locking sleeve 31. Figure 5 As shown, there are length differences between the multiple fixed sleeves 32. Each fixed sleeve 32 is equipped with a sliding shaft 33 that is slidably connected to its inner wall. An annular disc frame 34 is fixedly installed on the sliding shaft 33, and multiple intercepting components 6 are arranged between the annular disc frame 34 and the fixed sleeve 32. The multiple intercepting components 6 form a dynamically adjustable double-cone flow channel. Under low concentration conditions, the sliding shaft 33 retracts, so that the flow channel cross-sectional area of ​​the intercepting component 6 of the double-cone flow channel structure is increased, so as to increase the residence time of the oil droplet particles and provide more Brownian diffusion collision opportunities for ultrafine particles.

[0020] Further, as a further limitation of the present invention, each intercepting component 6 includes an arc-shaped metal rod frame 1 61 provided on the annular disc frame 34 and an arc-shaped metal rod frame 2 62 provided on the surface of the fixed sleeve 32. The ends of the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62 are both spherical, and the arc-shaped metal rod frame 1 61 is movably connected to the annular disc frame 34, and the arc-shaped metal rod frame 2 62 is movably connected to the surface of the fixed sleeve 32. The end of the arc-shaped metal rod frame 1 61 is fixedly installed with a connecting sleeve 63, and the connecting sleeve 63 and the arc-shaped metal rod are connected. One end of the frame 2 62 is rotatably connected; it should be noted that the multiple arc-shaped metal rod frames 1 61 and the arc-shaped metal rod frames 2 62 in the present invention are all made of rigid materials, and multiple electromagnetic components 35 corresponding to the fixed sleeves 32 are installed inside the locking sleeve 31. An annular iron sheet 36 is fixedly installed at one end of the sliding shaft 33 located inside the fixed sleeve 32. The annular iron sheet 36 is located on one side of the electromagnetic component 35, and the electromagnetic component 35 is energized to generate an attractive force on the annular iron sheet 36, wherein a plastic spring 37 is connected between the annular iron sheet 36 and the inner wall of the fixed sleeve 32.

[0021] A plurality of retractable balls 331 are installed on the surface of the sliding shaft 33, and a groove 321 is opened inside the fixed sleeve 32, and the balls 331 slide within the groove 321 to limit the movement of the sliding shaft 33, thereby limiting the movement stroke of the sliding shaft 33, thereby avoiding the situation where the flow channel cross-sectional area of ​​the intercepting component 6 is too large or too small; further explanation: the flow channel cross-sectional area is formed between the arc-shaped metal rod frame 1 61 and the adjacent arc-shaped metal rod frame 1 61, and between the arc-shaped metal rod frame 2 62 and the adjacent arc-shaped metal rod frame 2 62. The size of the flow channel cross-sectional area directly affects the flow rate of the cutting fluid and the movement trajectory and collision probability of the particles in the flow channel; combined with the attached Figure 13 As shown, since the cross-sectional area of ​​the flow channel formed between adjacent arc-shaped metal rod frames 1 61 (or between adjacent arc-shaped metal rod frames 2 62) is triangular, based on the area formula of the triangle, it can be seen that S=1 / 2ah (a is the length of the base, h is the height, that is, a is the distance between the connecting sleeves 63, and h is the distance between the connecting sleeves 63 and the surface of the sliding shaft body 33). Figure 7 and attached Figure 13 As shown, when the sliding shaft 33 moves toward the outside of the fixed sleeve 32, since the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62 are both made of rigid materials, the distance between the arc-shaped metal rod frame 1 61, the arc-shaped metal rod frame 2 62 and the connecting sleeve 63 and the surface of the sliding shaft 33 is reduced. Figure 13As shown, as the sliding shaft 33 moves toward the outside of the fixed sleeve 32, the values ​​of a and h decrease accordingly. Correspondingly, the flow channel cross-sectional area of ​​the intercepting component 6 decreases as the sliding shaft 33 moves toward the outside of the fixed sleeve 32, and vice versa.

[0022] Specifically, under high concentration conditions, the electromagnetic assembly 35 is in a power-off state, and when the feed shaft 3 rotates, the multiple fixed sleeves 32 on the surface locking sleeve 31 thereof perform a circular motion therewith, and the sliding shaft 33 in the fixed sleeve 32 moves outward under the action of centrifugal force, and the annular disc frame 34 causes one end of the arc-shaped metal rod frame 1 61 to move synchronously with it. In this process, the connecting sleeve 63 is used to drive the arc-shaped metal rod frame 2 62 to perform synchronous motion, so that the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62 constitute The intercepting component 6 has a reduced radius, that is, the radius of the double-conical structure composed of multiple intercepting components 6 is reduced. By dynamically adjusting the radius of the intercepting component 6 with a double-conical structure, the flow field parameters can be effectively changed, and the optimized treatment of oil mist of different concentrations can be achieved. When the radius of the intercepting component 6 is reduced, the cross-sectional area of ​​the flow channel of the intercepting component 6 is reduced, and the originally dispersed oil mist is forced to be compressed into a smaller flow cross-section. When the oil mist particles pass through the narrow area, a high-speed shear flow is formed. The high-speed shear flow will affect the flow trajectory of ultrafine particles and can effectively guide them to collide and aggregate with large particles. Under low concentration conditions, when the electromagnetic component 35 is energized, an attractive force is generated on the annular iron sheet 36, causing the annular iron sheet 36 to pull the plastic spring 37. During this process, the sliding shaft 33 contracts toward the inside of the fixed sleeve 32. At this time, the annular disc frame 34 causes one end of the arc-shaped metal rod frame 1 61 to move synchronously with it. During this process, the connecting sleeve 63 is used to drive the arc-shaped metal rod frame 2 62 to move synchronously, so that the intercepting component 6 composed of the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62 has an expanded radius, and then the radius of the double-conical structure composed of multiple intercepting components 6 is expanded, so that the flow channel cross-sectional area of ​​the intercepting component 6 of the double-conical flow channel structure is increased, so as to increase the residence time of the oil droplet particles and provide more Brownian diffusion collision opportunities for ultrafine particles. Under low concentration conditions, more collision targets can be provided, making it easier for ultrafine particles to collide and aggregate with large particles, thereby facilitating their separation and filtration by the filter cartridge 5.

[0023] The interception component 6 designed in the present invention can increase the particle retention time to facilitate collision and aggregation between ultrafine particles and large particles, so that large particles can carry ultrafine particles to contact the filter cartridge 5 and be separated and filtered under the action of the filter cartridge 5.

[0024] Furthermore, in order to effectively increase the retention time of particles in the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62, the present invention provides a plurality of guide grooves 64 on the surface of the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62, and the groove depth in the middle area of ​​the guide groove 64 is smaller than the groove depth at both ends. The guide groove 64 is used to increase the retention time of large particles, which is convenient for ultrafine particles to collide with the guide grooves. Figure 7 and attached Figure 8 As shown, when the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62 perform a circular motion with the feed shaft 3, the particles will enter through the two ends of the guide groove 64. Since the groove depth at the two ends of the guide groove 64 is greater than the groove depth in the middle area, the particles will flow to the middle area under the action of the guide groove 64 and finally flow out from the middle area. Figure 5 As shown, since the fixed sleeves 32 in the present invention have different lengths, the intercepting components 6 corresponding to the multiple fixed sleeves 32 can process the coolant in various areas of the centrifugal tank 2 to increase the processing range and improve the filtering effect.

[0025] Since the ultrafine particles are affected by random Brownian motion in the centrifugal field, the centrifugal force cannot effectively drive them to collide with the inner wall of the filter cartridge 5. In order to guide the ultrafine particles and make them collide with the surfaces of the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62, that is, the ultrafine particles collide with the surfaces of the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62, so that the ultrafine particles can collide with the large particles retained on the surfaces of the two, thereby achieving a polymerization effect; furthermore, the present invention carries out the following design: a telescopic shaft 7 is movably mounted on the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62, and a supporting shaft 71 rotatably connected thereto is mounted at the end of the telescopic shaft 7, and a spoiler sleeve 72 rotatably connected thereto is mounted on the supporting shaft 71, wherein a variable pitch spiral blade 73 is fixedly mounted on the spoiler sleeve 72, and the variable pitch spiral blade 73 is used to induce turbulent diffusion collision of the particles.

[0026] Specifically, when the sliding shaft 33 is adjusted in position, the telescopic shaft 7 movably connected to the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62 will make corresponding angle and position adjustments, and then under the action of the supporting shaft 71, the spoiler sleeve 72 and the variable pitch spiral blade 73 thereon will make corresponding position and angle adjustments, and the variable pitch spiral blade 73 will perform circular motion during the rotation of the feed shaft 3. Under the action of the cutting fluid in the centrifugal tank 2, the variable pitch spiral blade 73 rotates on the supporting shaft 71. The rotation of the variable pitch spiral blade 73 forms a non-uniform shear field on the supporting shaft 71, inducing turbulent diffusion and collision of ultrafine particles. The variable pitch spiral blade 73 rotates to generate vortex, forcing the ultrafine particles to deviate from their original motion trajectory, so as to collide and aggregate with the large particles on the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62. The random diffusion of ultrafine particles caused by Brownian motion is effectively restrained, so as to increase the probability of collision between ultrafine particles and large particles.

[0027] When the variable pitch spiral blade 73 is in a rotating state, the change in its axial pitch can induce the fluid to generate a radial velocity component, and the pressure gradient on the blade surface forces the fluid to move along a spiral trajectory, forming a three-dimensional vortex structure rather than a unidirectional flow. This design reduces the local shear force, increases the residence time of particles in the vortex core area, and promotes the collision and aggregation of ultrafine particles and large particles. It should be noted that when processing special materials that are easy to deagglomerate (such as PEG-silicon powder), the rotation speed of the feed shaft can be appropriately reduced, and the flow rate can be reduced accordingly through the above-mentioned components to avoid the deagglomeration of agglomerates. For special materials that are easy to deagglomerate, the existing electrostatic adsorption method can be used for processing. The electrostatic adsorption method uses a high-voltage electric field to charge the oil mist particles, thereby adsorbing them to the dust collecting plate (the existing technology processing component).

[0028] Furthermore, in actual application, the ultrafine particles are affected by random Brownian motion in the centrifugal field and are usually located in the area near the feed shaft 3. In order to enable the ultrafine particles to effectively move to the area where the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62 are located, the present invention further provides a plurality of spoiler frames 8 on the fixed sleeve 32, wherein the spoiler frames 8 are of a wavy design, and both ends of each spoiler frame 8 are further provided with a connecting shaft 81 threadedly connected to the fixed sleeve 32, the spoiler frames 8 are rotatably connected to the connecting shaft 81, a plurality of detachable sleeves 82 are fixedly mounted on the spoiler frame 8, and a spherical connecting rod frame 83 movably connected thereto is installed on the detachable sleeve 82, and a conical spoiler block 84 is fixedly mounted on the spherical connecting rod frame 83, and a spiral spoiler blade 85 is fixedly mounted on the surface of the conical spoiler block 84. It should be noted that the above-mentioned related components of the movably connected are all provided with sealing gaskets. Since the sealing function of the sealing gasket is a common component in the prior art, the present invention does not describe it in detail. Specifically, when the spoiler frame 8 with a wave-like design performs a circular motion with the axis of the feed shaft 3 as the center line, it will be rotated by the action of the cutting fluid, and a periodic undulating flow channel will be formed in the rotating state, forcing the fluid to generate a longitudinal vortex, which, on the one hand, changes the motion trajectory of the ultrafine particles and makes them move toward the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62. On the other hand, it can effectively extend the migration path of the oil mist particles and increase the collision probability of ultrafine particles and large particles. At the same time, the conical spoiler block 84 on the spoiler frame 8 and the spiral spoiler blade 85 thereon will rotate under the action of the cutting fluid when moving with the spoiler frame 8. Since the spherical connecting rod frame 83 is movably connected to the detachable sleeve 82, The conical spoiler block 84 can swing and sway under the action of the cutting fluid. The conical spoiler block 84 has a streamlined structure with conical ends and a bulge in the middle, which forms a three-stage centrifugal force gradient of "strong-weak-strong" when rotating at high speed. At the same time, under the action of the spiral spoiler blades 85, the interference with ultrafine particles is enhanced, and the migration path of ultrafine particles within the range is reconstructed, so that the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62 become efficient targeted capture areas, which facilitates the ultrafine particles on the conical spoiler block 84 and the spiral spoiler blades 85 to move toward the arc-shaped metal rod frame 1 61 and the arc-shaped metal rod frame 2 62, so as to increase the probability of collision between ultrafine particles and large particles, so that large particles can carry ultrafine particles to contact the filter cartridge 5 and be separated and filtered under the action of the filter cartridge 5.

[0029] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0030] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A mist separation and filtration device for cutting fluid used in photovoltaic silicon wafer production, characterized in that: The invention comprises a frame (1), a centrifugal tank body (2) fixedly mounted on the frame (1), a feed shaft (3) with a through hole being mounted inside the centrifugal tank body (2), a servo motor (4) whose output end is connected to the end of the feed shaft (3) being fixedly mounted on the top of the centrifugal tank body (2), and a filter cartridge (5) being mounted inside the centrifugal tank body (2); A locking sleeve (31) is fixedly mounted on the feed shaft (3), and the locking sleeve (31) is threadedly connected to the surface of the feed shaft (3); a plurality of fixed sleeves (32) are fixedly mounted on the locking sleeve (31); a sliding shaft (33) is mounted inside each of the fixed sleeves (32) and is slidably connected to the inner wall thereof; an annular disc rack (34) is fixedly mounted on the sliding shaft (33), and a plurality of intercepting components (6) are provided between the annular disc rack (34) and the fixed sleeve (32); Each of the intercepting components (6) comprises an arc-shaped metal rod frame 1 (61) arranged on the annular disc frame (34) and an arc-shaped metal rod frame 2 (62) arranged on the surface of the fixed sleeve (32), wherein a connecting sleeve (63) is fixedly installed at the end of the arc-shaped metal rod frame 1 (61), and the connecting sleeve (63) is rotatably connected to one end of the arc-shaped metal rod frame 2 (62); a plurality of guide grooves (64) are provided on the surfaces of the arc-shaped metal rod frame 1 (61) and the arc-shaped metal rod frame 2 (62), and the middle area of ​​the guide grooves (64) is The groove depth is smaller than the groove depth at both ends; a plurality of electromagnetic components (35) corresponding to the fixed sleeve (32) are installed inside the locking sleeve (31); an annular iron sheet (36) is fixedly installed at one end of the sliding shaft (33) located inside the fixed sleeve (32); the annular iron sheet (36) is located on one side of the electromagnetic component (35), and the electromagnetic component (35) is energized to generate an attractive force on the annular iron sheet (36), wherein a plastic spring (37) is connected between the annular iron sheet (36) and the inner wall of the fixed sleeve (32).

2. The mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production according to claim 1, characterized in that: The arc-shaped metal rod frame 1 (61) and the arc-shaped metal rod frame 2 (62) are both movably mounted with a telescopic shaft (7), and the end of the telescopic shaft (7) is mounted with a supporting shaft (71) rotatably connected thereto, and the supporting shaft (71) is mounted with a spoiler sleeve (72) rotatably connected thereto.

3. The mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production according to claim 2, characterized in that: A variable pitch spiral blade (73) is fixedly mounted on the flow-turbulating sleeve (72), and the variable pitch spiral blade (73) is used to induce turbulent diffusion and collision of particles.

4. The mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production according to any one of claims 1 to 3, characterized in that: A plurality of spoiler frames (8) are further provided on the fixed sleeve (32), and a connecting shaft (81) threadedly connected to the fixed sleeve (32) is further provided at both ends of each spoiler frame (8), and the spoiler frame (8) is rotatably connected to the connecting shaft (81).

5. The mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production according to claim 4, characterized in that: A plurality of detachable sleeves (82) are fixedly mounted on the spoiler frame (8), and a spherical connecting rod frame (83) movably connected thereto is mounted on the detachable sleeves (82), and a conical spoiler block (84) is fixedly mounted on the spherical connecting rod frame (83), and spiral spoiler blades (85) are fixedly mounted on the surface of the conical spoiler block (84).

6. The mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production according to claim 4, characterized in that: The spoiler frame (8) is designed in a wave-like manner.

7. The mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production according to claim 1, characterized in that: The ends of the arc-shaped metal rod frame 1 (61) and the arc-shaped metal rod frame 2 (62) are both spherical, the arc-shaped metal rod frame 1 (61) is movably connected to the annular disc frame (34), and the arc-shaped metal rod frame 2 (62) is movably connected to the surface of the fixed sleeve (32).

8. The mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production according to claim 1, characterized in that: There are length differences between the plurality of fixed sleeves (32).

9. The mist separation and filtration equipment for cutting fluid used in photovoltaic silicon wafer production according to claim 1, characterized in that: A plurality of retractable balls (331) are mounted on the surface of the sliding shaft (33), and a slot (321) is provided inside the fixed sleeve (32), and the balls (331) slide in a limited manner in the slot (321).

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