Light guide microwave device, packaging structure and system for space energy transfer

Abstract

The invention discloses a light guide microwave device for space energy transfer and a packaging structure of the light guide microwave device, and provides a new scheme for a microwave generation unit and an energy transmission path in a full-link space energy transfer system by fusing laser and microwave for networking. The device comprises a semi-insulating substrate (1), a buffer layer (2), an active layer (3) and a metal electrode (4), a micro-channel structure is etched on the semi-insulating substrate to form a snakelike cooling loop, and fluorinated liquid is introduced as a coolant to keep good fluidity in a microgravity environment to take away heat of the device. The device is sealed in a cuboid cavity composed of an upper ceramic PCB, a lower ceramic PCB and an aluminum alloy shell, the upper ceramic PCB and the lower ceramic PCB are tightly attached to each other, a hole with the aperture equal to the diameter of a laser spot is formed in the shell over the device, and a sapphire window piece and a multi-layer dielectric film are embedded in the hole to serve as an optical window for receiving laser. The device can prevent laser from damaging an aircraft and satellite equipment on a transmission path from the space to the land, improves the transmission efficiency and safety, and can be used for a space solar power station.

Description

Technical Field

[0001] The present invention belongs to the field of space energy transmission technology, and in particular to a light-conducting microwave device, a packaging structure and a system, which can be used in space solar power stations. Background Art

[0002] Traditional energy sources, primarily coal, oil, and natural gas, will become incapable of supporting global development within the next few decades to a century, and will also negatively impact global climate change. Solar energy is a renewable energy source with significant advantages, such as cleanliness and abundance. Space solar power stations, because sunlight is not attenuated by the atmosphere and is unaffected by weather, seasons, or diurnal variations, can receive high-intensity sunlight, reaching five times the solar radiation received on Earth. Using space solar power stations to transmit electricity to Earth through unlimited power transmission, replacing current power generation and wired transmission methods based on oil, coal, and gas, can address energy crises and global warming. Therefore, the construction of space solar power stations is of great significance to future energy supply. A space solar power station (SSPS) is a large-scale energy transmission system that collects solar energy in space and then transmits it to the ground or other spacecraft using microwaves or lasers.

[0003] Since Glaser first proposed the SSPS concept in 1968, several representative proposals have emerged, including the NASA / DOE baseline model, solar towers, solar sails, and symmetrical concentrators. In recent years, emerging concepts include distributed tethered SSPSs, alpha SSPSs, and omega SSPSs.

[0004] SSPS is divided into laser wireless energy transmission and microwave wireless energy transmission according to the wireless energy transmission method. Microwave generation units currently mostly use solid-state power amplifiers or electric vacuum devices such as traveling wave tubes and magnetrons; laser generation units use solar energy directly as the pump source, and lasers have great application prospects in space energy transmission.

[0005] Patent document CN201310505227.7 discloses a laser generation and emission device for wireless energy transmission in a space solar power station. The device consists of a power supply module, a master oscillator module, a beam splitting module, a phase control module, a beam isolation module, a fiber laser gain module, a semiconductor pump module, a phase detection and control circuit module, a collimator array module, a beam sampling module, and a beam detection module. The device uses electrical energy from the space solar power station to pump a semiconductor laser, which in turn pumps a fiber laser, converting solar energy into laser energy for wireless energy transmission in the space solar power station. While the laser in this device offers high flexibility, a narrow beam, and a compact transceiver system, it is susceptible to weather influences and has poor cloud penetration, posing a potential threat to aircraft, satellites, and other equipment, posing a significant safety hazard. Summary of the Invention

[0006] The purpose of the present invention is to address the shortcomings of the above-mentioned technologies and propose a light-conducting microwave device and system for space energy transmission to avoid damage to aircraft and satellite equipment caused by lasers on the transmission path from space to land, improve transmission efficiency and safety, and provide a new solution for microwave generation units and energy transmission paths in full-link space energy transmission systems.

[0007] The technical idea for achieving the purpose of the present invention is: to use an optical microwave device array triggered by a sunlight pump laser as the microwave generating unit of the solar space station, and to generate a large number of carriers in the body by using a high-energy modulated pulse laser of a certain wavelength. Under the joint action of a DC voltage, a high-power high-frequency electrical signal is generated, and the laser and microwave are integrated into a network to form complementary advantages. On the basis of the existing technical solutions, the optical microwave is optimized in the entire link of space energy transmission, providing an effective solution for building a solar space transmission station.

[0008] According to the above ideas, the technical solutions of the present invention include the following:

[0009] 1. A photoconductive microwave device for use in a space energy transfer system, comprising a semi-insulating substrate 1, a buffer layer 2, an active layer 3, and metal electrodes 4. The device is characterized in that a microfluidic structure is etched into the semi-insulating substrate to form a serpentine cooling loop. A fluorinated liquid is introduced as a coolant to maintain good fluidity in a microgravity environment, dissipating heat from the device and improving its heat dissipation capacity and reliability.

[0010] Preferably, the semi-insulating substrate 1 is made of aluminum nitride, diamond or silicon carbide with high thermal conductivity, with a thickness of 0.5-2 mm, and the microchannels etched thereon have a width of 50-300 μm and a depth of 100-1000 μm.

[0011] Preferably, the buffer layer 2 is made of aluminum nitride material with a thickness of 200-500 nm, which is used to reduce lattice mismatch and thermal stress, lower defect density, and improve device reliability.

[0012] Preferably, the active layer 3 is made of gallium nitride, silicon carbide or gallium oxide material with a thickness of 2-5 μm. The active layer is prepared by molecular beam epitaxy (MBE) technology, and the doping concentration is optimized to obtain the best photoelectric conversion characteristics.

[0013] Preferably, the metal electrodes 4 are located on both sides of the upper surface of the active layer and are in the shape of a cuboid. They are manufactured by photolithography, metal evaporation, and magnetron sputtering to form a good ohmic contact. The material is a Ti / Al / Ni / Au, Ni / Ti / Pt / Au, or Ni / WTi / Au composite metal layer with a thickness of 2 to 3 μm.

[0014] 2. A light-conducting microwave device package for a space energy transmission system, characterized by a sealed rectangular parallelepiped structure formed by tightly fitting upper and lower ceramic PCBs 6 and 7 and an aluminum alloy housing 8, which is filled with dry nitrogen. The bottom ceramic plate 6 has a built-in coolant delivery channel, while the top ceramic plate 7 has a microwave circuit 12 printed on its upper surface and is secured with a coplanar waveguide 9, a ceramic capacitor 10, and an electronically controlled coolant flow valve 11.

[0015] The encapsulated optical microwave device 5 is welded to the surface of the upper ceramic plate 7 and is connected to the microwave circuit, coplanar waveguide 9, and ceramic capacitor 10. A hole with an aperture equivalent to the diameter of the laser spot is opened on the housing directly above the optical microwave device 5. A sapphire window and a multi-layer dielectric film are embedded in the hole as an optical window for receiving the laser.

[0016] Preferably, the optical microwave device 5 connects the metal electrodes on both sides of the device to two external electrodes by AuSn eutectic welding, and connects the external electrodes to the microwave circuit and coplanar waveguide on the surface of the upper ceramic plate.

[0017] Preferably, the coplanar waveguide adopts a coplanar waveguide CPW structure, with a center conductor width of 100-200 μm, a gap width of 60-120 μm, and a characteristic impedance designed to be 50Ω to match the subsequent radio frequency circuit;

[0018] Preferably, the ceramic capacitor has a capacitance of 4-10 nF, uses nickel or silver palladium as electrodes, and has an ESL of less than 0.1 nH. Four ceramic capacitors are symmetrically connected in parallel and fixed on the top ceramic circuit board to provide a DC bias for the optical microwave device unit.

[0019] Preferably, the coolant circulation electric control valves are provided in two, one on the left and one on the right, embedded in the top ceramic plate, respectively controlling the input and output of the coolant, which are connected to the bottom coolant channel.

[0020] 3. A spatial energy transfer system based on optical microwave devices, comprising a focusing system, photovoltaic cells, a solar pump laser, a beam splitting and laser modulation system, an N×M optical microwave device array, a microwave power combining network, a waveguide, and an antenna array, characterized by:

[0021] The concentrating system uses a light splitting device that separates the concentrated sunlight into two beams of light with different wavelengths through a dichroic mirror. One beam is directed to a sunlight pump laser for generating laser light, and the other beam is directed to a photovoltaic cell for powering the system.

[0022] The beam splitting and laser modulation system includes a beam splitter array, a laser modulator array, and an optical fiber transmission network. The beam splitter array is used to split the laser into N×M paths. The optical modulator array uses the acousto-optic effect to generate a diffraction grating to independently adjust the pulse energy phase of each laser path, and regulates the light intensity pulse phase by changing the phase of the RF drive signal to control the microwave phase output by each unit, thereby achieving flexible beam forming and pointing. The optical fiber transmission network is used to guide each laser path to each unit of the optical microwave device array in a one-to-one correspondence.

[0023] Compared with the prior art, the present invention has the following advantages:

[0024] Firstly, the present invention etches a microchannel structure on a semi-insulating substrate and introduces a fluorinated liquid as a coolant to form a serpentine cooling loop, thereby improving the heat dissipation capacity and reliability of the device.

[0025] Secondly, the present invention uses a very promising solar-pumped laser as a laser generation unit, directly converting solar energy into laser and then into microwaves, reducing energy conversion links and improving reliability and energy conversion efficiency.

[0026] Third, the present invention uses two layers of ceramic PCB boards in the packaging structure to separate the circuit and the coolant path, and uses an aluminum alloy shell to completely enclose the packaging, thereby improving the heat dissipation capacity, service life, reliability and radiation resistance of the device.

[0027] Fourthly, the present invention controls the microwave phase by modulating the laser intensity phase to avoid a complex electronic phase shift network, which can reduce system mass, lower transmission costs, and improve phase control accuracy and response speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A structural diagram of a light-conducting microwave device unit according to the present invention;

[0029] Figure 2 A top view of the optical microwave device unit of the present invention;

[0030] Figure 3 A diagram of the packaging structure of the optical microwave device of the present invention;

[0031] Figure 4 An exploded view of the light-conducting microwave device packaging structure of the present invention;

[0032] Figure 5 Schematic diagram of the space energy transfer system architecture and its interaction relationship of the present invention. DETAILED DESCRIPTION

[0033] The specific examples of the present invention are described in detail below with reference to the accompanying drawings.

[0034] Example 1: Optical microwave devices for space energy transmission systems

[0035] Reference Figure 1 and Figure 2 , this example includes a semi-insulating substrate 1, a buffer layer 2, an active layer 3, and a metal electrode 4, wherein:

[0036] The semi-insulating substrate 1 is made of silicon carbide material with high thermal conductivity, and the substrate size is 10mm×10mm×1mm, and the resistivity is greater than 10 6 Ω·cm. A microchannel structure is etched into the substrate surface, with a channel width of 50-300μm and a depth of 100-1000μm, forming a serpentine cooling loop with a total length of 300-500mm. This microchannel is filled with a fluorinated liquid as a coolant, ensuring good fluidity in microgravity and ensuring effective heat dissipation of the device.

[0037] The buffer layer 2 is grown on the semi-insulating substrate 1 by MOCVD method, has a thickness of 200-500nm, and is made of aluminum nitride to reduce the lattice mismatch between the silicon carbide substrate and the gallium nitride active layer and reduce the defect density.

[0038] The active layer 3 is located on the buffer layer 2 and is made of gallium nitride material with a thickness of 2-5 μm and a carrier concentration of 1×10 15 cm -3 -1×10 16 cm -3 , prepared by molecular beam epitaxy (MBE) technology.

[0039] The metal electrodes 4 are located on both sides of the upper surface of the active layer 3 and are in the shape of a cuboid. They are made of Ti / Al / Ni / Au composite metal layer by photolithography, metal evaporation and magnetron sputtering. The thickness is 2 to 3 μm and the contact resistance is less than 10 6Ω·cm2, forming a good ohmic contact.

[0040] In this example, it is assumed but not limited to that the microchannel width on the surface of the substrate 1 is 200μm and the depth is 500μm, forming a serpentine cooling loop with a total length of 500mm, the buffer layer 2 is 300nm thick, the active layer 3 is 5μm thick, and the metal electrode 4 is 300nm / 200nm / 200nm / 2000nm thick.

[0041] Example 2: Optical microwave device packaging structure for space energy transmission system

[0042] Reference Figure 3 and Figure 4 In this embodiment, a closed rectangular parallelepiped is formed by tightly fitting two layers of ceramic PCB boards 6 and 7 and an aluminum alloy shell 8, which is filled with dry nitrogen. A coolant delivery channel is built into the bottom ceramic board 6. The top ceramic board 7 has a microwave circuit 12 printed on its upper surface and is fixed with an optical microwave device 5, a coplanar waveguide 9, multiple ceramic capacitors 10, and an electronically controlled valve 11 for coolant circulation.

[0043] The photoconductive microwave device 5 is fixed between the microwave circuit 12 and the coplanar waveguide 9. Its metal electrodes are connected to the microwave circuit 12 and the coplanar waveguide 9 on the top surface of the top ceramic plate 7 via two external electrodes using AuSn eutectic welding. One end of each external electrode connects to the metal electrodes on the photoconductive microwave device 5, while the other end connects to the microwave circuit 12 and the coplanar waveguide 9. Directly above the photoconductive microwave device 5, the aluminum alloy housing 8 includes a hole with an aperture comparable to the laser spot diameter. A sapphire window and a multilayer dielectric film are embedded in the hole, serving as an optical window for receiving the laser light.

[0044] The coplanar waveguide 9 utilizes a typical CPW structure, consisting of a central signal conductor located on the top ceramic substrate 7 and symmetrically spaced ground conductor planes on either side. The width of the central signal conductor is designed to be between 100 μm and 200 μm, and the gaps between the central conductor and the ground planes are designed to be between 60 μm and 120 μm. By precisely designing the central conductor width, gap width, and the dielectric constant of the ceramic substrate, the characteristic impedance of the coplanar waveguide is set to 50 Ω.

[0045] The ceramic capacitor 10 has a capacitance value of 4-10nF and uses nickel or silver palladium as electrodes. Its equivalent series inductance ESL is less than 0.1nH, which can significantly reduce the impedance of the capacitor at high frequencies and effectively avoid the decrease in self-resonant frequency caused by parasitic inductance, thereby ensuring that the capacitor can still effectively play its role in the microwave frequency band.

[0046] This example uses four ceramic capacitors of the same specifications, surface-mounted or soldered in a symmetrical parallel arrangement at specific locations on the top ceramic circuit board. This symmetrical parallel arrangement provides a stable, low-noise DC bias voltage for the optical microwave device unit. This not only increases the total bypass capacitance and reduces the equivalent series resistance (ESR), but also optimizes the high-frequency current distribution path. The combined effect of these four ceramic capacitors minimizes high-frequency noise and ripple on the power line, ensuring the purity of the DC bias.

[0047] The coolant circulation electric control valve 11 is provided with two, which are respectively embedded and installed in the specific reserved holes of the top ceramic plate 7, and their positions are arranged on the left and the right to form a symmetrical layout; one valve is specifically used to control the inflow of coolant, and the other valve is specifically used to control the outflow of coolant, and they together constitute the active control node of the coolant circulation path; the lower end of each valve is precisely connected to the coolant microchannel etched on the bottom ceramic plate 6 to form a sealed connection. This embedded design ensures the fluid sealing and structural compactness between the valve and the cooling channel; the opening or switch state of the two valves is scheduled by the electric control signal, and the flow rate and flow of the coolant flowing through the bottom coolant channel are precisely controlled, thereby dynamically adjusting the cooling and heat dissipation efficiency to ensure the long-term reliability and performance stability of the device.

[0048] In this example, it is assumed but not limited to that the width of the central conductor of the coplanar waveguide 9 is 100 μm, the gap width is 60 μm, and the capacitance value of the ceramic capacitor 10 is 4 nF.

[0049] Example 3: Architecture and Interaction of Space Energy Transmission Systems Based on Optical Microwave Devices

[0050] Reference Figure 5 This example includes a concentrating system 13, a photovoltaic cell 14, a solar pump laser 15, a primary beam splitter 16, a secondary beam splitter group 17, a phase modulation array 18, an N×M optical microwave device array 19, a microwave power combining network 20, a waveguide 21, and an antenna array 22, wherein:

[0051] The focusing system 13 is provided with a light splitting device, which separates the concentrated sunlight into two beams of light with different wavelengths through a dichroic mirror. One beam is directed to the sunlight pump laser for emitting laser light, and the other beam is directed to the photovoltaic cell for powering the system.

[0052] The photovoltaic cell 14 supplies power to the laser electro-optical modulation array and provides a DC bias voltage to the photoconductive microwave device.

[0053] The solar pump laser 15 uses Cr and Nd co-doped YAG ceramics as the laser working material, adopts a side-pumped cylindrical laser rod design, combined with a high-reflectivity cavity mirror to improve laser conversion efficiency, and integrates a nonlinear crystal at the laser output end to achieve frequency-doubled output, generating 532nm laser.

[0054] The main beam splitter 16 is a 1×8 beam splitter, which splits the laser into 8 paths. The beam splitter is a dielectric film beam splitter with a fused silica substrate, and the beam splitting uniformity is better than ±2%.

[0055] The secondary beam splitter 17 uses eight 1×8 beam splitters to further split the eight laser beams into 64 beams. The beam splitters are connected by polarization-maintaining optical fibers, and the fiber length is precisely designed based on the optical path difference to ensure that the phase reference of each laser beam is consistent.

[0056] The phase modulator array 18 uses the acousto-optic effect to generate a diffraction grating to independently adjust the pulse energy phase of each laser, and guides each laser one-to-one to each unit of the optical microwave device array through an optical fiber, controlling the microwave phase output by each device unit to achieve flexible beam forming and pointing.

[0057] The N×M optical microwave device array 19 is arranged in a rectangular array with a unit pitch of 10 mm and an array size of 64×64;

[0058] The microwave power combining network 20 comprises a multi-stage Wilkinson power divider and a waveguide converter, and is used to combine the microwave powers generated by the optical microwave device units. The network input uses a multi-stage Wilkinson power divider, with the first-stage input port connected to the output of the corresponding optical microwave device unit via a 50Ω coplanar waveguide transmission line to receive the microwave signal generated by the unit. Each stage is connected by a low-loss stripline or coplanar waveguide, all strictly designed with a 50Ω characteristic impedance and with a length controlled to be an integer multiple of λ / 4 to eliminate phase distortion and maintain signal coherence. The combined output of the final-stage Wilkinson power divider is connected to the waveguide converter, which uses a gradient impedance microstrip line-waveguide transition structure and achieves broadband impedance matching through a quarter-wavelength impedance transformation segment. The voltage standing wave ratio (VSWR) within the operating frequency band is ≤1.5, significantly reducing the combined loss (<0.5dB / stage), and achieving a power combining efficiency greater than 90%.

[0059] The waveguide 21 adopts a rectangular waveguide structure, has an operating frequency band covering 2.45 GHz and 5.8 GHz, an insertion loss of less than 0.1 dB / wavelength, and a power handling capacity greater than 1 MW.

[0060] The antenna array 22 is used to receive the total microwave signal transmitted by the waveguide 21 and transmit the microwave to the space station or land through space radiation;

[0061] The above descriptions are merely a few specific examples of the present invention and do not constitute any limitation to the present invention. It is obvious that, after understanding the content and principles of the present invention, professionals in this field may make various modifications and changes in form and details without departing from the principles and structure of the present invention. For example, the materials and dimensions of each layer of the optical microwave device; the types and dimensional parameters of the microstrip line and coplanar waveguide in the packaging structure; the shape and dimensions of the microchannel structure, etc., can also be changed in addition to the materials, dimensions, and types given in the above examples. However, these modifications and changes based on the concept of the present invention are still within the scope of protection of the claims of the present invention.

Claims

1. A photoconductive microwave device for a space energy transmission system, comprising a semi-insulating substrate (1), a buffer layer (2), an active layer (3), and a metal electrode (4), characterized in that: The semi-insulating substrate is etched with a microchannel structure to form a serpentine cooling loop, in which a fluorinated liquid is introduced as a coolant to maintain good fluidity in a microgravity environment to remove heat from the device, thereby improving the device's heat dissipation capacity and reliability.

2. The device according to claim 1, wherein: The semi-insulating substrate is made of aluminum nitride, diamond or silicon carbide with high thermal conductivity and has a thickness of 0.5-2 mm. The microchannel etched thereon has a width of 50-300 μm and a depth of 100-1000 μm. The buffer layer is made of aluminum nitride material with a thickness of 200-500 nm, and is used to reduce lattice mismatch and thermal stress, lower defect density, and improve device reliability.

3. The device according to claim 1, characterized in that The active layer is made of gallium nitride, silicon carbide or gallium oxide material with a thickness of 2-5 μm. The active layer is prepared by molecular beam epitaxy (MBE) technology, and the doping concentration is optimized to obtain the best photoelectric conversion characteristics.

4. The device according to claim 1, wherein The metal electrodes are located on both sides of the upper surface of the active layer and are in the shape of a cuboid. They are manufactured through photolithography, metal evaporation, and magnetron sputtering processes to form a good ohmic contact. The material is a Ti / Al / Ni / Au, Ni / Ti / Pt / Au, or Ni / WTi / Au composite metal layer with a thickness of 2 to 3 μm.

5. A light-conducting microwave device packaging structure for a space energy transmission system, characterized in that: A closed rectangular parallelepiped is formed by tightly fitting upper and lower ceramic PCB boards (6) and (7) and an aluminum alloy shell (8), which is filled with dry nitrogen; a coolant delivery channel is built into the bottom ceramic board (6), and a microwave circuit is printed on the upper surface of the top ceramic board (7) and fixed with a coplanar waveguide (9), a ceramic capacitor (10) and a coolant circulation electric control valve (11). The packaged optical microwave device (5) is welded on the surface of the upper ceramic plate (7) and is connected to the microwave circuit, the coplanar waveguide (9) and the ceramic capacitor (10). A hole with an aperture equivalent to the diameter of the laser spot is opened on the housing directly above the optical microwave device (5). A sapphire window and a multi-layer dielectric film are embedded in the hole as an optical window for receiving the laser.

6. The structure according to claim 5, characterized in that The optical microwave device (5) connects the metal electrodes on both sides of the device with two external electrodes by AuSn eutectic welding, and connects the external electrodes with the microwave circuit and the coplanar waveguide on the surface of the upper ceramic plate.

7. The structure according to claim 5, characterized in that The coplanar waveguide adopts a coplanar waveguide CPW structure, with a center conductor width of 100-200 μm, a gap width of 60-120 μm, and a characteristic impedance designed to be 50Ω to match the subsequent radio frequency circuit; The ceramic capacitor has a capacitance of 4-10nF, uses nickel or silver palladium as electrodes, and has an ESL of less than 0.1nH. Four ceramic capacitors are symmetrically connected in parallel and fixed on a ceramic circuit board to provide a DC bias for the optical microwave device unit. The coolant circulation electronically controlled valves are provided with two, one on the left and one on the right, embedded in the top ceramic plate, respectively controlling the input and output of the coolant, which are connected to the bottom coolant channel.

8. A spatial energy transfer system based on optical microwave devices, comprising a focusing system, photovoltaic cells, a solar pump laser, a beam splitting and laser modulation system, an N×M optical microwave device array, a microwave power combining network, a waveguide, and an antenna array, characterized in that: The concentrating system uses a light splitting device that separates the concentrated sunlight into two beams of light with different wavelengths through a dichroic mirror. One beam is directed to a sunlight pump laser for generating laser light, and the other beam is directed to a photovoltaic cell for powering the system. The beam splitting and laser modulation system includes a beam splitter array, a laser modulator array, and an optical fiber transmission network. The beam splitter array is used to split the laser into N×M paths. The optical modulator array uses the acousto-optic effect to generate a diffraction grating to independently adjust the pulse energy phase of each laser path, thereby controlling the microwave phase output by each unit and achieving flexible beam forming and pointing. The optical fiber transmission network is used to guide each laser path to each unit of the optical microwave device array in a one-to-one correspondence.

9. The system according to claim 8, characterized in that: The solar-pumped laser uses Cr and Nd co-doped YAG ceramics as the laser working material, adopts a side-pumped cylindrical laser rod design, and combines it with a high-reflectivity cavity mirror to improve laser conversion efficiency. A nonlinear crystal is integrated at the laser output end to achieve frequency-doubled output, generating a 532nm laser. The N×M optical microwave device array is arranged in a rectangular array with a unit spacing of 10-50 mm. The array size can be expanded from 4×4 to 64×64.

10. The system according to claim 8, characterized in that: The microwave power synthesis network uses a waveguide power synthesizer array, including a multi-stage Wilkinson power divider and a waveguide converter, with a power synthesis efficiency greater than 90%, capable of achieving coherent power synthesis; The waveguide adopts a rectangular waveguide structure, its operating frequency band covers 2.45GHz and 5.8GHz, the insertion loss is less than 0.1dB / wavelength, and the power handling capacity is greater than 100kW; The transmitting antenna array is connected to the rectangular waveguide and is used to realize spatial radiation of microwave power.

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