Polarization sensor temperature drift calibration and real-time compensation method based on semiconductor film

Abstract

The invention provides a polarization sensor temperature drift calibration and real-time compensation method based on a semiconductor film, and belongs to the field of bionic polarization navigation. The method comprises the following steps: firstly, establishing a mapping relation between voltage response of each channel of a sensor and temperature variation, a temperature compensation coefficient, and parameters such as polarization degree, polarization angle and light intensity of incident light to obtain an actual output equation of the sensor; then, temperature compensation coefficients of all channels of the sensor are obtained through data fitting; secondly, selecting a reference temperature, obtaining sensor output under an indoor standard light source, performing normalization processing, and performing calibration to obtain three parameters including a proportionality coefficient, a polarization degree coefficient and a polarizer polarization analysis angle of each channel; and finally, solving an actual output equation of the sensor to realize temperature drift real-time compensation. The sensor output model is further improved based on the temperature characteristic of the semiconductor film material, the angle measurement error of the polarization sensor made of a semiconductor is effectively reduced, and the navigation accuracy is improved.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of bionic polarization navigation, and particularly relates to a polarization sensor temperature drift calibration and real-time compensation method based on a semiconductor thin film. BACKGROUND

[0002] Navigation has become an indispensable part of life, economy and military activities. At present, various types of navigation have their own defects, such as Global Navigation Satellite System (GNSS) being susceptible to electromagnetic interference, and inertial navigation having error accumulation. Therefore, in order to achieve long-time navigation in an interference rejection environment, a new navigation mode with strong stability, high accuracy, not susceptible to electromagnetic interference and no error accumulation needs to be found.

[0003] As a new type of autonomous navigation method based on natural characteristics, bionic polarization light navigation is an effective navigation auxiliary means, and has the advantages of strong stability, no error accumulation and being passive. However, the polarization sensor, which is the core device of the polarization navigation, has the problem of insufficient integration. In view of this problem, the semiconductor thin film material is integrated with the traditional bionic polarization sensor, so that the size of the sensor is further reduced.

[0004] Due to the material characteristics of temperature-sensitive semiconductors, the sensor polarization angle calculation during the experiment will be affected by the change of the ambient temperature, in order to improve the navigation accuracy, the temperature drift needs to be compensated. However, the compensation of temperature drift error has not been considered in the existing patents related to polarization navigation, and the temperature drift compensation technology in other fields is not suitable for polarization sensors. The paper "Design of Temperature Compensation Circuit Based on Constant Current Source" (North University of Electronic Test Technology National Key Laboratory, 2024, Yang Jingling, Jiao Xinquan, Li Hujing, etc.) designs a circuit for temperature compensation of sensor sensitivity under the condition of constant current source as excitation, through the compensation of the Wheatstone bridge by series-parallel resistance method, but this method increases the volume and cost of the sensor and the complexity of the circuit, which is contrary to the demand of improving the integration of the sensor. Although the Chinese patent application CN118243143A (Biomimetic Polarization Light Navigation Sensor Non-uniform Error Calibration Method, Device and Equipment) does not use hardware compensation method, it only reduces the error through algorithm, but it only involves the non-uniformity of the polarization sensor photosensitive coefficient and the error of the polarization plate coupling inconsistency, which is difficult to realize temperature drift compensation. Chinese patent CN110046368B (A Biomimetic Polarization Sensor Multi-source Error Calibration Method Based on Adaptive UKF) realizes the calibration of polarization sensor under the condition of considering multi-source error based on UKF. This method can compensate for a certain degree of multiple errors and has a certain universality. However, its disadvantage is that due to the relatively broad compensation mechanism, the compensation effect is not good for a specific type of error, and it is difficult to achieve the ideal precise compensation level. For semiconductor thin film-based polarization sensors with strong temperature drift and temperature-sensitive output, the pertinence is relatively weak and not suitable for such sensors.

[0005] In summary, there is currently no temperature drift calibration and real-time compensation method suitable for semiconductor thin film-based polarization sensors, which needs further research and solution. SUMMARY

[0006] To solve the above technical problems, the present application proposes a polarization sensor temperature drift calibration and real-time compensation method based on semiconductor thin film. This method establishes the relationship between the voltage response of each channel of the sensor and the temperature change , temperature compensation coefficient , polarization degree , polarization angle and light intensity The mapping relationship of the parameters obtains a sensor actual output equation, and then data fitting is used to obtain sensor channel temperature compensation coefficients.

[0007] To achieve the above object, the technical scheme adopted by the present application is:

[0008] The semiconductor thin film-based polarization sensor temperature drift calibration and real-time compensation method comprises the following steps:

[0009] Step 1: According to Malus law and semiconductor thin film photoelectric response characteristics, the mapping relationship between the temperature change , temperature compensation coefficient , and the polarization degree , polarization angle and light intensity of incident light and the voltage response of the semiconductor thin film in the sensor channel is established to obtain a sensor actual output equation .

[0010] Step 2: Based on the linear relationship between the sensor output response characteristics and temperature, the voltage response of each channel of the sensor at different temperatures is measured by changing the environmental temperature , and data fitting is used to perform one-dimensional linear regression estimation to obtain the regression coefficient, that is, the temperature compensation coefficient of each channel of the sensor , wherein , , indicates the channel number of the sensor optical path;

[0011] Step 3: The sensor is placed in a reference temperature environment, first, the reference temperature error of each channel is obtained in the absence of light , then the calibration experiment is carried out under the indoor standard light source, the voltage response data of each channel is obtained by rotating the turntable for one revolution, the data is normalized, the proportion coefficient , polarization degree coefficient , and polarization plate detection angle of each channel are calibrated, and the calibration of the three unknown parameters of the sensor is completed;

[0012] Step 4: According to the sensor actual output equation, the temperature and polarization angle are solved to realize real-time compensation of temperature drift.

[0013] Compared with the prior art, the present application has the following beneficial effects:

[0014] In view of the material characteristics of the semiconductor thin film that is sensitive to temperature, which causes a large error in the calculation of the polarization angle of the sensor during the experiment, the application considers the error caused by the temperature by establishing a mapping relationship between the voltage response of each channel of the sensor, the temperature variation, the temperature compensation coefficient, and the polarization degree, the polarization angle and the light intensity of the incident light and other parameters to obtain the actual output equation of the sensor, so that the temperature drift of the sensor can be compensated in real time by directly solving the output equation, which has the advantages of small calculation amount and strong pertinence, and the application does not require other hardware, and effectively improves the navigation accuracy of the polarization sensor without increasing the complexity of the sensor hardware. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 The flowchart of the temperature drift calibration and real-time compensation method for the semiconductor thin film-based polarization sensor of the application.

[0016] Figure 2 The polarization angle calculation error diagram of the polarization sensor without temperature drift compensation.

[0017] Figure 3 The temperature real-time estimation diagram.

[0018] Figure 4 The polarization angle calculation error diagram of the polarization sensor after temperature drift compensation. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical scheme and advantages of the application clearer and more understandable, the application will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the application and do not limit the application. In addition, the technical features involved in each embodiment of the application described below can be combined with each other as long as they do not conflict with each other.

[0020] Because the semiconductor thin film material has the material characteristics of being sensitive to temperature, which causes a large error in the calculation of the polarization angle of the sensor during the experiment, therefore, as shown in Figure 1 , the application provides a temperature drift calibration and real-time compensation method for a semiconductor thin film-based polarization sensor, which includes the following steps:

[0021] Step 1: According to Malus' law and the photoelectric response characteristics of the semiconductor thin film, a mapping relationship between the temperature variation , the temperature compensation coefficient , and the polarization degree , the polarization angle and the light intensity of the incident light and the voltage response of the semiconductor thin film in the sensor channel is established to obtain the actual output equation of the sensor ;

[0022] Step 2: Based on the linear relationship between the sensor output response characteristics and temperature, the voltage response of each channel of the sensor at different temperatures is measured by changing the ambient temperature , and a linear regression estimation is performed on the data to obtain the regression coefficient, i.e. the temperature compensation coefficient of each channel of the sensor , wherein , represents the channel number of the sensor optical path, represents the number of sensor optical path channels, is used as a subscript to indicate the correlation between the parameter and temperature;

[0023] Step 3: Place the sensor in a reference temperature environment, first acquire the reference temperature error of each channel in the absence of light , then perform a calibration experiment under an indoor standard light source, obtain the voltage response data of each channel by rotating the turntable for one revolution, and perform normalization processing on the data to obtain the proportional coefficient , the polarization degree coefficient , and the polarizing plate detection angle of each channel, completing the calibration of the three unknown parameters of the sensor;

[0024] Step 4: According to the actual output equation of the sensor, simultaneously solve the temperature and polarization angle to realize real-time compensation of temperature drift.

[0025] Specifically, the step 1 comprises:

[0026] According to Malus' law and the semiconductor photoelectric response characteristics, the relationship between the actual output of each channel of the sensor and the temperature change , the temperature compensation coefficient , the polarization degree , the polarization angle , and the light intensity of the incident light can be specifically represented as:

[0027] (1)

[0028] wherein the temperature change represents the difference between the current ambient temperature of the sensor and the reference temperature , i.e. , represents the voltage response of the sensor channel in the incident light intensity environment, , , ​They represent the light intensity response proportional coefficient, polarization coefficient, and polarizer analyzer angle, respectively. Indicates the voltage response deviation of each channel at the reference temperature, that is, the reference temperature error.

[0029] Specifically, the step 2 includes:

[0030] According to the linear nature of the sensor output response characteristics and temperature, the voltage response of each channel of the sensor at different temperatures can be measured simultaneously by changing the ambient temperature. Then, the temperature compensation coefficient of the sensor channel is obtained by using the least squares method to perform linear regression fitting :

[0031] (2)

[0032] in, Indicates the The sampled temperature data, Indicates the sensor channel No. The subsampled voltage response, represents the average value of temperature data, that is , Indicates channel The average value of the voltage response data, i.e. , Indicates the number of sampling times.

[0033] Specifically, the step 3 includes:

[0034] To achieve sensor temperature drift calibration, first place the sensor at a reference temperature. In a light-free environment, the reference temperature error is calculated based on the voltage response data of each channel of the sensor. , which is calculated as follows:

[0035] (3)

[0036] Then at standard light intensity and reference temperature The sensor is placed on the turntable. Each time the turntable changes its angle, the sensor completes data acquisition and transmission. Finally, the voltage response data of each channel after the turntable rotates one circle is obtained, and the corresponding reference temperature error is subtracted from it. The data is normalized, and the sensor output equation after normalization is: , at the reference temperature Taking 0, the sensor output equation is expressed as:

[0037] (4)

[0038] Based on this, the output model 、 、 Perform calibration and expand the equation to obtain:

[0039] (5)

[0040] When the turntable rotates one circle, The subsampling result is expressed in matrix form as:

[0041] (6)

[0042] in, Represents the voltage response matrix of each channel of the sensor, Represents a known parameter matrix, which is composed of the polarization degree , polarization angle , light intensity constitute, Represents the parameter matrix to be calibrated, which is composed of the proportional coefficient , polarization coefficient , polarizer analyzer angle constitute.

[0043] (7)

[0044] in, Indicates the The standard polarization angle of the sub-sample, the calibrated polarization light source used during calibration and the turntable rotation angle can provide 、 Information can be obtained from The least squares solution of is:

[0045] (8)

[0046] Here, the superscript T represents the transpose of the matrix.

[0047] From this we can get:

[0048] (9)

[0049] in, express No. Rank elements;

[0050] Specifically, step 4 includes:

[0051] In order to achieve real-time compensation of sensor temperature drift, firstly according to the The voltage response data of each channel of the sensor is compensated for reference temperature error, so that the reference temperature is taken as the zero point of temperature change, to realize real-time estimation of real temperature, and then according to the calibration in step 3 、 、 The polarization angle is calculated according to the output equation of the sensor, and the output equation is represented as:

[0052] (10)

[0053] The equation is expanded to obtain:

[0054] (11)

[0055] The matrix form is represented as:

[0056] (12)

[0057] Wherein, represents the voltage response matrix of each channel of the sensor, represents the known parameter matrix composed of the proportional coefficient , the polarization degree coefficient , the detection angle of the polarizer , and the temperature compensation coefficient , represents the to-be-solved parameter matrix composed of the polarization degree , the polarization angle , and the light intensity .

[0058] (13)

[0059] When solving , two cases are discussed:

[0060] (1) the number of sensor channels is 4 (n=4), is a well-posed equation, the solution is:

[0061] (14)

[0062] (2) the number of sensor channels is greater than 4 (n>4), is an overdetermined equation, the solution is:

[0063] (15)

[0064] Accordingly, we can obtain:

[0065] (16)​​

[0066] wherein, represents the first element of the vector.

[0067] By solving the temperature variation amount relative to the reference temperature and the polarization angle after real-time compensation of temperature drift, the sensor polarization angle calculation error is reduced.

[0068] Through the above method, real-time compensation of temperature drift can be realized according to the material characteristics of the semiconductor thin film, and the navigation accuracy is effectively improved.

[0069] Embodiment:

[0070] The method proposed in the application is simulated by computer simulation experiment based on a MoS2 thin film four-channel polarization sensor:

[0071] (1) Simulation description

[0072] First, the linear relationship data containing noise are used to simulate the voltage response of the four channels of the sensor at different temperatures, and the temperature compensation coefficients of the channels of the sensor are obtained by one-dimensional linear regression. Then, the sine curves with phases of 0°, 45°, 90° and 135°, which do not contain reference temperature error and temperature drift, are used to simulate the output of the four channels of the sensor during calibration, and the temperature error curve with measurement noise is added to simulate the output of the four channels of the sensor during actual experiment. The temperature drift calibration and real-time compensation are realized by the method proposed in the application, and the polarization angle calculation error of the sensor before and after compensation is compared. The experimental parameters are shown in Table 1.

[0073] Table 1 Experimental parameter table

[0074]

[0075] (2) Simulation results

[0076] Figure 2 , Figure 4 are respectively the polarization angle calculation error graph of the polarization sensor without temperature drift compensation and the polarization angle calculation error graph of the polarization sensor after temperature drift compensation. According to the calculation results, the polarization angle calculation error is 26.02° without compensation, and the polarization angle calculation error is 0.84° after compensation, and the accuracy is improved by 96.8%. The specific data is shown in Table 2 (polarization angle error table).

[0077] Table 2 Polarization angle error table

[0078]

[0079] Figure 3 is a temperature real-time estimation graph, and the theoretical temperature variation amount The standard deviation is 0.169 DEG C.

[0080] (3) Experimental conclusion

[0081] According to the computer simulation experiment verification, the method better realizes temperature drift compensation, and effectively reduces the polarization angle calculation error of the polarization sensor based on the MoS2 film.

[0082] The contents not described in detail in the specification of the present application belong to the prior art known to the person skilled in the art. The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film, characterized in that: The steps include: Step 1: Establish the temperature change according to Malus's law and the photoelectric response characteristics of semiconductor thin films , temperature compensation coefficient , and the polarization of the incident light , polarization angle He Guangqiang Isoparameters and the voltage response of semiconductor films in sensor channels The mapping relationship between them is used to obtain the actual output equation of the sensor ; Step 2: Based on the linear relationship between the sensor output response characteristics and temperature, the voltage response of each sensor channel at different temperatures is measured by changing the ambient temperature. , use data fitting to perform univariate linear regression estimation to obtain the regression coefficient, that is, the temperature compensation coefficient of each channel of the sensor ,in, , , represents the sensor optical path channel number; Step 3: Bring the sensor to a reference temperature In the environment, first obtain the reference temperature error of each channel under dark conditions Then, a calibration experiment was conducted under indoor standard light source. The voltage response data of each channel was obtained by rotating the turntable one circle. The data was normalized and the proportional coefficient of each channel was obtained by calibration. , polarization coefficient , polarizer analyzer angle , complete the calibration of the three unknown parameters of the sensor; Step 4: Solve the temperature and polarization angle simultaneously based on the actual output equation of the sensor to achieve real-time compensation for temperature drift.

2. The method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film according to claim 1, characterized in that: The step 1 comprises: According to Malus's law and semiconductor photoelectric response characteristics, the actual output of each channel of the sensor is related to the temperature change. , temperature compensation coefficient , and the polarization of the incident light , polarization angle He Guangqiang The relationship is expressed as: （1） Among them, the temperature change Indicates the current ambient temperature of the sensor With reference temperature The difference, that is , Indicates the sensor channel At the incident light intensity Voltage response under the environment, 、 、 They represent the light intensity response proportional coefficient, polarization coefficient and polarizer analyzer angle respectively. Indicates the voltage response deviation of each channel at the reference temperature, that is, the reference temperature error.

3. The method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film according to claim 1, characterized in that: The step 2 includes: According to the linear nature of the sensor output response characteristics and temperature, the voltage response of each channel of the sensor at different temperatures can be measured simultaneously by changing the ambient temperature. Then, the temperature compensation coefficient of the sensor channel is obtained by using the least squares method to perform linear regression fitting .

4. The method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film according to claim 3, characterized in that: Temperature compensation coefficient of the sensor channel Expressed as: （2） in, Indicates the The sampled temperature data, Indicates the sensor channel No. The subsampled voltage response, represents the average value of temperature data, that is , Indicates channel The average value of the voltage response data, i.e. , Indicates the number of sampling times.

5. The method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film according to claim 1, characterized in that: The step 3 comprises: To achieve sensor temperature drift calibration, first place the sensor at a reference temperature. In a light-free environment, the reference temperature error is calculated based on the voltage response data of each channel of the sensor. , which is calculated as follows: （3）。 6. The method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film according to claim 5, characterized in that: At standard light intensity and reference temperature The sensor is placed on the turntable. Each time the turntable changes its angle, the sensor completes data acquisition and transmission. Finally, the voltage response data of each channel after the turntable rotates one circle is obtained, and the corresponding reference temperature error is subtracted from it. The data were normalized and the Take 0.

7. The method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film according to claim 6, characterized in that: The sensor output equation is expressed as: （4） Based on this, the output model 、 、 To calibrate, rotate the turntable one circle The subsampling result is expressed in matrix form as: （5） in, (6) in, Indicates the The standard polarization angle of the sub-sample, the calibrated polarization light source used during calibration and the rotation angle of the turntable can provide 、 information.

8. The method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film according to claim 7, characterized in that: Solution get: （7）。 9. The method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film according to claim 8, characterized in that: The step 4 comprises: In order to achieve real-time compensation of sensor temperature drift, firstly according to the The reference temperature error is compensated for the voltage response data of each channel of the sensor to achieve real-time estimation of the true temperature, and then the reference temperature is calculated based on the calibration in step 3. 、 、 The polarization angle is solved for the sensor output equation, and the output equation is expressed as （8） Express it in matrix form （9） in, （10）。 10. The method for temperature drift calibration and real-time compensation of a polarization sensor based on a semiconductor thin film according to claim 9, characterized in that: By solving get: （11） in, express No. elements; By solving the problem, we can obtain the temperature change relative to the reference temperature. And the polarization angle after real-time compensation of temperature drift can reduce the error of the sensor's polarization angle solution.

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