High viscosity liquid circulating supply apparatus

Abstract

The present application relates to the technical field of chemical distribution module, and particularly relates to a high-viscosity liquid circulating supply device, which comprises a cabinet body, an external liquid supply pipe is arranged outside the cabinet body; an external liquid storage unit is connected with a raw material barrel outside the cabinet body through the liquid supply pipe; and a three-in-one function module is vertically integrated in the cabinet body, which comprises a multi-stage filtering system, a pneumatic diaphragm pump group and a nitrogen covering pressure control unit. The three-in-one module of filtering, pump group and nitrogen control is vertically integrated in the cabinet body by adopting the external liquid storage unit connected with the standard raw material barrel, so that the problem of large area occupied by the traditional internal storage tank device in the clean room is solved, the space occupation is reduced, the liquid multi-parameters are monitored in real time through a five-dimensional sensing system, the pump frequency / pressure / valve sequence is dynamically adjusted by a PLC, the whole module data is integrated through a unified communication protocol, the flow fluctuation is realized by closed-loop control, the nitrogen pressure is stable, the data integration efficiency is improved, and the risk of manual operation failure is eliminated.

Description

Technical Field

[0001] This invention relates to the field of chemical distribution module technology, and more particularly to a high-viscosity liquid circulation supply device. Background Technology

[0002] High-viscosity liquid circulation supply equipment is a highly integrated Chemical Dispensing Module (CDM) used to precisely supply liquids (such as photoresist and CMP polishing slurry) to process equipment such as lithography machines and etching machines. In 12-inch wafer manufacturing processes, the precise supply of high-viscosity chemicals such as photoresist and CMP slurry directly affects yield. These liquids need to meet ultra-high purity, constant pressure and constant flow delivery, and zero risk of contamination exposure. Traditional decentralized supply systems, due to their separate layout of multiple devices, are difficult to meet the stringent requirements of advanced processes and have the following drawbacks:

[0003] 1. Conflict between space compression requirements and functional integrity: Raw material tanks, filters, and pump sets are installed independently. Traditional equipment is forced to sacrifice the number of filtration stages or pump power due to built-in storage tanks (occupying more than 60% of the volume), occupying 15-20㎡ / set of cleanroom area, and the cleanroom space cost is as high as $150,000 / ㎡·year.

[0004] 2. Lack of control precision and monitoring dimensions: Advanced processes require flow fluctuations of ≤±0.5%, but existing systems are only equipped with 1-2 types of sensors (such as pressure + flow), which cannot detect pressure distortion caused by viscosity changes;

[0005] 3. System compatibility defects: Fragmented protocols of multiple vendor equipment (such as mixed Modbus / Profibus), data integration requires additional converters, manual entry of chemical parameters has an error rate of >0.5%, and process formula changes require recalibration, which takes ≥30 minutes. Summary of the Invention

[0006] In view of this, the purpose of the present invention is to provide a high-viscosity liquid circulation supply device to solve the above-mentioned technical problems.

[0007] To achieve the above objectives, the present invention provides a high-viscosity liquid circulation supply device, comprising:

[0008] The cabinet has an external liquid supply pipe;

[0009] An external liquid storage unit is connected to a raw material tank located outside the cabinet via the liquid supply pipe;

[0010] The three-in-one functional module is vertically integrated into the cabinet, including a multi-stage filtration system, a pneumatic diaphragm pump set, and a nitrogen coverage pressure control unit.

[0011] The five-dimensional sensing system is used to monitor the pressure, flow rate, weight, purity, and temperature parameters of the target liquid in real time.

[0012] The PLC controller is used to dynamically adjust the frequency of the pneumatic diaphragm pump, the nitrogen covering pressure, and the valve action sequence.

[0013] A unified communication protocol interface is used to integrate data from various modules within the device.

[0014] As a preferred embodiment of the present invention, the filtration system includes a filter, the filter comprising:

[0015] The shell is hollow inside to form a closed filter chamber;

[0016] At least one filter element is disposed in the filter chamber. The housing is provided with a filter channel and a backwash channel communicating with the internal filter chamber on the outside. The filter channel is used to guide the target liquid to pass through the filter element in a forward direction along a first path to filter particulate impurities in the target liquid. The backwash channel is used to guide backwash water to pass through the filter element in a reverse direction along a second path to clear the filter pores of the filter element covered by a dirt layer formed by particulate impurities.

[0017] A cleaning assembly includes a cleaning element that maintains contact with the surface of the filter element, and a drive structure for driving the cleaning element to move along the surface of the filter element to peel off a layer of dirt.

[0018] A shaking structure is used to intermittently drive the cleaning component to vibrate, in order to help break up the dirt layer and shake off the dirt adhering to the surface of the cleaning component.

[0019] As a preferred embodiment of the present invention, the filter further includes:

[0020] A support plate is fixedly disposed on the inner side wall of the housing. There are two support plates, which are respectively disposed at the top and bottom of the housing.

[0021] The mounting plate is located at the upper end of the filter element, and bolt holes are provided at corresponding positions on both the mounting plate and the support plate.

[0022] Connecting bolts are used to connect and fix the mounting plate and the support plate by fitting them into the bolt holes.

[0023] As a preferred embodiment of the present invention, the housing has a first liquid inlet at its upper end and a first liquid outlet at its bottom. The target liquid enters the filter chamber through the first liquid inlet and penetrates the filter holes on the side wall of the filter element in the forward direction, and then leaves the housing through the first liquid outlet to filter the target liquid.

[0024] As a preferred embodiment of the present invention, the housing has a second liquid inlet at its top and a second liquid outlet on its side. The backwash water enters the filter chamber through the second liquid inlet and then penetrates the filter holes on the side wall of the filter element in the reverse direction. It then leaves the housing through the second liquid outlet to backwash the filter element.

[0025] As a preferred embodiment of the present invention, the filter element has multiple filter holes with the pore size decreasing sequentially from the outside to the inside to form a multi-stage filtration structure. The multiple filter elements are nested together and their centerlines coincide. A cavity for accommodating cleaning components and particulate impurities is formed between the sidewalls of adjacent filter elements.

[0026] As a preferred embodiment of the present invention, the driving structure includes:

[0027] A connecting rod, one end of which passes through a movable groove formed on the surface of the mounting plate and extends thereto; the connecting rod is connected to the cleaning component.

[0028] A top plate, which is located at the upper end of the mounting plate and connected to the extension end of the connecting rod;

[0029] The main shaft has one end fixedly connected to the top plate, and the other end penetrates the housing and extends outward;

[0030] A servo motor, the output shaft of which is fixedly connected to the extension end of the main shaft.

[0031] As a preferred embodiment of the present invention, the filter further includes:

[0032] A bracket is fixedly mounted on the surface of the connecting rod, and a pin is fixedly mounted on the inner side of the bracket. One end of the bracket is bent to form a connecting plate.

[0033] A fixing sleeve, one end of which is fitted onto the surface of the pin, and the other end of which is fixedly connected to the cleaning component;

[0034] The first spring has one end fixedly connected to the connecting plate and the other end fixedly connected to the cleaning component. The elastic force of the first spring pushes the cleaning component to fit against the side wall of the filter element.

[0035] As a preferred embodiment of the present invention, the jitter structure includes:

[0036] The fixing strip has multiple grooves inside;

[0037] Multiple sliders are slidably disposed in the groove, and each slider has a first inclined surface and a second inclined surface formed on its surface. The sliders are located on the moving trajectory of the cleaning component.

[0038] The second spring, located in the groove, is used to push the slider out of the groove and contact one end of the cleaning component. When the cleaning component moves in the first direction to clean the filter element, one end of the cleaning component tilts and abuts against the first inclined surface, causing the slider to retract into the groove. When the cleaning component moves in the second direction, one end of it strikes the second inclined surface vertically, forcing the cleaning component to rotate around the pin.

[0039] As a preferred embodiment of the present invention, the filter further includes:

[0040] An outer tube is threadedly connected to the second liquid outlet, and the surface of the outer tube is provided with a first liquid outlet that connects to each cavity;

[0041] An inner sleeve is rotatably disposed within the outer sleeve. A second liquid outlet corresponding to the first liquid outlet is opened on the surface of the inner sleeve. By rotating the inner sleeve, the first liquid outlet and the second liquid outlet can be aligned or offset, thereby opening or closing the second liquid outlet.

[0042] The beneficial effects of this invention are as follows: This invention uses an external liquid storage unit connected to a standard raw material tank, and vertically integrates a three-in-one module of filtration, pump set and nitrogen control in the cabinet, which solves the problem of excessive space occupation of traditional built-in storage tank equipment in cleanrooms, thus reducing space occupation. Through a five-dimensional sensing system, multiple parameters of the liquid are monitored in real time, and the pump frequency / pressure / valve sequence is dynamically adjusted by PLC. The data of the whole module is integrated through a unified communication protocol, and closed-loop control realizes flow fluctuation and nitrogen pressure stability, improves data integration efficiency and eliminates the risk of human operation error. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0044] Figure 1 This is a schematic diagram of the overall external three-dimensional structure of the present invention;

[0045] Figure 2 This is a schematic diagram of the overall external side view structure of the present invention;

[0046] Figure 3 This is a schematic diagram of the overall external front view structure of the present invention;

[0047] Figure 4 This is a three-dimensional structural diagram of the upper part of the filter of the present invention;

[0048] Figure 5 This is a three-dimensional structural diagram of the lower end of the filter of the present invention;

[0049] Figure 6 This is a partial cross-sectional three-dimensional structural diagram of the shell of the present invention;

[0050] Figure 7 This is a partial cross-sectional three-dimensional structural diagram of the housing and filter element of the present invention;

[0051] Figure 8 This is a partial cross-sectional three-dimensional structural diagram of the housing, filter element, main shaft, and rotating shell of the present invention.

[0052] Figure 9 For the present invention Figure 8 Enlarged structural diagram at point A in the middle;

[0053] Figure 10 This is a schematic cross-sectional view of the housing, filter element, main shaft, and rotating shell of the present invention.

[0054] Figure 11 For the present invention Figure 10 Enlarged structural diagram at point B;

[0055] Figure 12 This is a three-dimensional structural diagram of the top plate and connecting rod of the present invention;

[0056] Figure 13 This is a three-dimensional structural diagram of the connecting rod, cleaning component, and first spring of the present invention;

[0057] Figure 14 This is a three-dimensional structural diagram of the upper end of the filter element, connecting rod, cleaning component, and reinforcing strip of the present invention.

[0058] Figure 15 This is a three-dimensional structural diagram of the cleaning component of the present invention in its first motion state;

[0059] Figure 16 This is a three-dimensional structural diagram of the second motion state of the cleaning component of the present invention.

[0060] The components in the diagram are labeled as follows: 1. Housing; 2. First liquid inlet; 3. First liquid outlet; 4. Filter element; 5. Mounting plate; 6. Support plate; 7. Connecting bolt; 8. Second liquid inlet; 9. Second liquid outlet; 10. Rotating shell; 11. First through hole; 12. Servo motor; 13. Second through hole; 14. Air inlet; 15. Main shaft; 16. Top plate; 17. Ribbed groove; 18. Connecting rod; 19. Polyhedral prism; 20. Threaded rod; 21. Fastening nut; 22. Bracket; 23. Cleaning component; 24. Fixing sleeve; 25. Connecting plate; 26. First spring; 27. Fixing strip; 28. 29. Sliding groove; 30. Sliding block; 31. Second spring; 32. First inclined plane; 33. Second inclined plane; 34. Reinforcing strip; 35. Outer sleeve; 36. First liquid outlet; 37. Inner sleeve; 38. Second liquid outlet; 39. Movable groove; 40. Recessed groove; 41. Sealing ring; 42. Filter mounting bracket; 43. Solenoid valve; 44. Cabinet; 45. First liquid supply pipe; 46. Pneumatic diaphragm pump; 47. Damper; 48. Liquid outlet pipe; 49. Liquid return pipe; 50. Air gun; 51. Drain pipe; 52. Three-color alarm light; 53. Large filter; 54. Second liquid supply pipe. Detailed Implementation

[0061] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to specific embodiments.

[0062] It should be noted that, unless otherwise defined, the technical or scientific terms used in this invention should have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0063] like Figure 1 , Figure 2 and Figure 3As shown, a high-viscosity liquid circulation supply device includes: a cabinet 43 with an external liquid supply pipe; an external liquid storage unit connected to a raw material tank located outside the cabinet 43 via the liquid supply pipe; a three-in-one functional module vertically integrated into the cabinet, including a multi-stage filtration system, a pneumatic diaphragm pump assembly, and a nitrogen coverage pressure control unit; a five-dimensional sensing system for real-time monitoring of the target liquid's pressure, flow rate, weight, purity, and temperature parameters; a PLC controller for dynamically adjusting the pneumatic diaphragm pump frequency, nitrogen coverage pressure, and valve action sequence; and a unified communication protocol interface for integrating data from various modules within the device.

[0064] The above technical solution enables this equipment to have the following three advantages:

[0065] 1. Revolutionary improvement in space utilization: Traditional wafer fabs require independently installed chemical storage, filtration and supply systems, which occupy 15-20㎡ of valuable cleanroom space. In contrast, this equipment adopts a three-in-one vertical integration architecture, which occupies only 60% of the area of ​​conventional systems, greatly reducing the cost of factory facilities. The equipment also features a groundbreaking design with an external 200L tank, which moves the liquid storage area, which occupies 60% of the volume in traditional CDM, outside the cabinet, creating conditions for optimizing the layout of key components.

[0066] 2. Full-process digital closed-loop control: The equipment integrates a five-dimensional sensing system (including a raw material tank gravity sensor, a pump outlet pressure sensor, a circulation pipeline flow meter, an online purity analyzer, and a temperature compensation probe; the data from each sensor are processed by a PLC controller to form closed-loop control logic), realizing full life-cycle monitoring from the raw material tank to the process equipment. Compared with equipment on the market that only has single-point monitoring function, this equipment dynamically adjusts the frequency of the pneumatic diaphragm pump, the nitrogen covering pressure, and the valve action sequence through the PLC to form a real-time feedback control loop;

[0067] 3. Cross-module compatibility and data integration: To address the data fragmentation issues caused by traditional multi-supplier equipment, this equipment incorporates a unified communication protocol, enabling seamless integration of data from modules such as the filtration system, circulation pump, and quality monitoring. The dual-channel input design of the barcode scanner and dial indicator supports automatic identification of chemical properties and process formulations. The PLC controller automatically matches process parameters from the chemical property database based on the input signals, eliminating human error.

[0068] like Figure 1 , Figure 2 and Figure 3As shown, the equipment includes: a cabinet 43, with two pairs of first liquid supply pipes 44 and second liquid supply pipes 53 on the front side of the cabinet 43. The first liquid supply pipes 44 are used to connect to a 200L raw material tank. Inside the cabinet 43, there are also four pneumatic diaphragm pumps 45, dampers 46, and two sets of filters of different sizes. The pneumatic diaphragm pumps 45 are used to extract the high-viscosity target liquid from the raw material tank, and after subsequent filtration and wave elimination, it is delivered to the day tank or process equipment, such as a lithography machine or etching machine. The dampers 46 are used to eliminate the target liquid's saturation. The potential energy during pumping makes it smooth. The large filter 52 and the small filter have basically the same function and structure. They are both for filtering impurities in the target liquid to ensure that the target liquid entering the process equipment is pure. The only difference between the two is the difference in filtration effect. The upper end of the cabinet 43 is also equipped with a three-color alarm light 51 for indicating system failure. The cabinet 43 is equipped with an air gun 49 for blowing away residual cleaning water or target liquid. The bottom end of the cabinet 43 is also equipped with a drain pipe 50 for draining the target liquid remaining in the DAYTANK or pipeline.

[0069] The above technical solution enables the input of the target liquid, after eliminating fluctuations and filtering, into the process equipment. During use, the equipment starts with a dual-channel authentication process. The operator scans the information of the 200L raw material tank with a barcode scanner, sets the process parameters on the dial, and the PLC controller automatically starts the duplex system of the pneumatic diaphragm pump 45. The standby pump is on standby. The pneumatic diaphragm pump 45 draws high-viscosity liquids, such as photoresist and CMP grinding fluid, from the external 200L raw material tank and enters the primary buffer circuit. This circuit is equipped with the aforementioned damper 46 to eliminate pressure fluctuations generated by the pneumatic diaphragm pump 45. The target liquid is forced to circulate in the closed loop (>15 minutes), and the viscosity stability (±0.5℃) is maintained by the heat exchange temperature control module.

[0070] Meanwhile, the PLC controller monitors the differential pressure sensor data in real time. When the filter pressure drop reaches the threshold (usually 3-4 psi), an alarm is triggered to prompt the replacement of the filter element. In the later stage of the cycle, the three-way sampling valve automatically opens, delivering approximately 200 mL of sample to the integrated quality control analysis unit. This unit can detect particle count, metal ion content, and viscosity changes. The detection data is displayed on the operation screen in real time and uploaded to the MES system. When the analysis results meet the preset standards, the PLC controller automatically opens the pneumatic high-seal valve to deliver the qualified liquid to the Daytank; if it does not meet the standards, the reflux reprocessing program is started or an alarm prompts manual intervention.

[0071] Daytank serves as a temporary storage and secondary processing hub, employing a double-walled vacuum insulation design and equipped with a unique gas management system.

[0072] Nitrogen partial pressure control: The system maintains a slight positive pressure inside the tank through an independent dual-pipeline design (the pressurization pipeline supplies nitrogen from the nitrogen source, and the exhaust pipeline connects to the tail gas treatment). The oxygen content sensor monitors the purity in real time to prevent the high-viscosity liquid from oxidizing and deteriorating. Compared with the traditional single-path design, the partial pressure system improves the gas replacement efficiency.

[0073] Continuous Circulation Activation: After filling is completed, the pneumatic diaphragm pump 45 at the supply end is started immediately to make the liquid in the Daytank circulate at a low flow rate to avoid sedimentation and stratification of high viscosity liquid. During the circulation process, the online viscometer continuously monitors the rheological properties and the data is fed back to the temperature control module for dynamic adjustment.

[0074] Secondary quality verification: Before supplying to the process end, the system automatically performs secondary sampling and analysis. This time, the focus is on detecting the content of particles larger than 0.1μm and the moisture content to ensure that the ultra-pure standards of semiconductor processes are met. After the verification is passed, the PLC controller unlocks the start permission of the pneumatic diaphragm pump 45 at the supply end to prevent unqualified products from entering the production line.

[0075] like Figure 4 , Figure 5 and Figure 6 As shown, in this embodiment, the filtration system includes a filter, which includes: a housing 1, which is hollow inside to form a closed filtration chamber; at least one filter element 4 disposed in the filtration chamber; the housing 1 is provided with a filtration channel and a backwash channel on the outside that communicate with the internal filtration chamber; the filtration channel is used to guide the target liquid to pass through the filter element 4 in a forward direction along a first path to filter particulate impurities in the target liquid; the backwash channel is used to guide backwash water to pass through the filter element 4 in a reverse direction along a second path to unblock the filter holes of the filter element 4 covered by a dirt layer formed by particulate impurities; a cleaning component, which includes a cleaning element 23 that keeps in contact with the surface of the filter element 4, and a drive structure for driving the cleaning element 23 to move along the surface of the filter element 4 to peel off the dirt layer; and a shaking structure for intermittently driving the cleaning element 23 to vibrate to assist in breaking the dirt layer and shaking off the dirt attached to the surface of the cleaning element 23.

[0076] The above technical solution can effectively clean and unclog the filter element 4 without frequently disassembling the housing 1 to replace the filter element 4. During normal use, the target liquid enters the filter chamber through the filter channel and penetrates the filter element 4 along the preset first path to filter particulate impurities in the target liquid. Because the particulate impurities are larger than the pore size of the filter element 4, they cannot freely pass through the filter element 4 and are left on the surface of the filter element 4. The filtered target liquid flows out of the housing 1. As the usage time increases, the pores of the filter element 4 are gradually occupied by particulate impurities, which reduces the permeability of the filter element 4, obstructs the flow of the target liquid, and increases the internal pressure of the housing 1. At this time, the filter channel is temporarily closed and the backwashing channel is opened. The backwash water enters the filter chamber through the filter channel and penetrates the filter element 4 in the reverse direction along the preset second path, thereby flushing out the particulate impurities that are clogging the filter holes of the filter element 4. The dirt layer attached to the surface of the filter element 4 needs to be removed by activating the drive structure, which drives the cleaning element 23 to move along the surface of the filter element 4 to peel off the dirt layer. During this process, the shaking structure intermittently drives the cleaning element 23 to vibrate, shaking off the dirt attached to the surface of the cleaning element 23 and preventing the cleaning element 23 from losing its sharpness. At the same time, after the vibrating cleaning element 23 returns to its original position, it can impact the dirt layer and cause cracks on its surface. The dirt layer is peeled off layer by layer from the surface of the filter element 4 by the auxiliary cleaning element 23, restoring the flowability of the filter element 4.

[0077] like Figure 8 , Figure 10 and Figure 11 As shown, in this embodiment, the filter further includes: a support plate 6, which is fixedly disposed on the inner side wall of the housing 1, and there are two support plates 6, which are respectively disposed at the upper and lower parts inside the housing 1; a mounting plate 5, which is disposed at the upper end of the filter element 4, and the mounting plate 5 and the upper support plate 6 are provided with bolt holes at corresponding positions; and connecting bolts 7, which are used to connect and fix the mounting plate 5 and the support plate 6 in conjunction with the bolt holes, and the lower support plate 6 is provided with a groove that matches the bottom end of the filter element 4, and a sealing ring is provided inside the groove;

[0078] The above technical solution can fix the filter element 4 inside the housing 1 by bolt connection. The connection between the mounting plate 5 and the support plate 6 is sealed with a sealing ring. When the lower end of the support plate 6 is embedded in the groove of the lower support plate 6, the sealing ring is deformed by pressure and seals the connection between the support plate 6 and the filter element 4, preventing the target liquid from bypassing the filter element 4 from the gap.

[0079] like Figure 7 and Figure 10 As shown, in this embodiment, the housing 1 has a first liquid inlet 2 at its upper end and a first liquid outlet 3 at its bottom.

[0080] The above technical solution can filter the target liquid. When in use, the target liquid enters the filter chamber through the first inlet 2 and passes through the filter holes on the side wall of the filter element 4 in the forward direction, and then leaves the housing 1 through the first outlet 3, thus completing the filtration.

[0081] like Figure 7 and Figure 10 As shown, in this embodiment, the housing 1 has a second liquid inlet 8 at its top and a second liquid outlet 9 on its side;

[0082] The above technical solution can backwash the filter element 4. When in use, the backwash water enters the filter chamber through the second inlet 8 and then penetrates the filter holes on the side wall of the filter element 4 in the reverse direction. It then leaves the housing 1 through the second outlet 9, thus completing the backwashing.

[0083] like Figure 7 , Figure 8 and Figure 10 As shown, in this embodiment, the filter element 4 has multiple filter holes with the pore size decreasing sequentially from the outside to the inside to form a multi-stage filtration structure. The multiple filter elements 4 are nested together and their centerlines coincide. A cavity for accommodating the cleaning element 23 and particulate impurities is formed between the side walls of adjacent filter elements 4.

[0084] The above technical solution can form a multi-stage filtration structure by setting filter elements 4 in stages, thereby improving the filtration effect on particulate impurities.

[0085] like Figure 7 , Figure 10 , Figure 11 and Figure 14 As shown, in this embodiment, the drive structure includes: a connecting rod 18, one end of which passes through the movable groove 38 opened on the surface of the mounting plate 5 and extends outward, and the connecting rod 18 is connected to the cleaning component 23; a top plate 16, which is disposed at the upper end of the mounting plate 5 and connected to the extended end of the connecting rod 18; a main shaft 15, one end of which is fixedly connected to the top plate 16, and the other end of which passes through the housing 1 and extends outward; and a servo motor 12, the output shaft of which is fixedly connected to the extended end of the main shaft 15.

[0086] The above technical solution can drive the cleaning component 23 to move along the surface of the filter element 4 to clean the filter element 4. When in use, the servo motor 12 is started so that its output shaft drives the main shaft 15 to rotate. The main shaft 15 drives the top plate 16 connected to it to rotate. The top plate 16 drives the connecting rod 18 to rotate forward and backward along the movable groove 38, thereby driving the cleaning component 23 to reciprocate along the surface of the filter element 4.

[0087] like Figure 13As shown, in this embodiment, the filter further includes: a bracket 22, which is fixedly disposed on the surface of the connecting rod 18, a pin is fixedly disposed on the inner side of the bracket 22, and one end of the bracket 22 is bent to form a connecting plate 25; a fixing sleeve 24, one end of which is sleeved on the surface of the pin, and the other end is fixedly connected to the cleaning component 23; and a first spring 26, one end of which is fixedly connected to the connecting plate 25, and the other end of which is fixedly connected to the cleaning component 23.

[0088] The above technical solution can push the cleaning component 23 to fit against the side wall of the filter element 4 through the elastic force of the first spring 26, thereby improving the cleaning effect.

[0089] like Figure 7 , Figure 15 and Figure 16 As shown, in this embodiment, the shaking structure includes: a fixed strip 27, which has multiple grooves 28 inside; multiple sliders 29, which are slidably disposed in the grooves 28, and the sliders 29 have a first inclined surface 31 and a second inclined surface 32 formed on their surface, and the sliders 29 are located on the movement trajectory of the cleaning component 23; a second spring 30, which is disposed in the grooves 28 for pushing the sliders 29 out of the grooves 28 to contact one end of the cleaning component 23; and adjacent connecting rods 18 are connected and fixed by reinforcing strips 33 to improve the deformation resistance of the connecting rods 18.

[0090] The above technical solution ensures that the cleaning element 23 experiences minimal resistance when cleaning the filter element 4. However, when the cleaning element 23 returns, it will deflect due to resistance, causing vibration. Specifically, see attached... Figure 12 As shown, when the cleaning component 23 moves along the first direction to clean the filter element 4, one end of the cleaning component 23 tilts and abuts against the first inclined surface 31, causing the slider 29 to retract into the groove 28. The cleaning component 23 moves almost unimpeded, as shown in the attached diagram. Figure 16 As shown, when the cleaning component 23 moves along the second direction, one end of it strikes the second inclined surface 32 vertically, forcing the cleaning component 23 to rotate around the pin. When the cleaning component 23 completely disengages from the second inclined surface 32, the first spring 26 drives the cleaning component 23 to rotate and reset, causing the cleaning component 23 to strike the dirt layer on the surface of the filter element 4, causing the dirt layer to break and shaking off the dirt attached to the surface of the cleaning component 23.

[0091] like Figure 8 and Figure 9 As shown, in this embodiment, the filter further includes: an outer sleeve 34, which is threadedly connected to the second liquid outlet 9, and the surface of the outer sleeve 34 is provided with a first liquid outlet 35 communicating with each cavity; and an inner sleeve 36, which is rotatably disposed in the outer sleeve 34, and the surface of the inner sleeve 36 is provided with a second liquid outlet 37 corresponding to the first liquid outlet 35.

[0092] The above technical solution can open or close the second liquid outlet 9. By rotating the inner sleeve 36, the first liquid outlet 35 and the second liquid outlet 37 can be aligned or staggered to control the opening and closing of the second liquid outlet 9.

[0093] like Figure 10 As shown, in this embodiment, the surface of the top plate 16 is provided with a through groove 17, the top end of the connecting rod 18 is provided with a polygonal prism 19 that matches the groove 17, the top end of the polygonal prism 19 is also provided with a threaded rod 20, and the threaded rod 20 is connected to a fastening nut 21 that is compatible with it.

[0094] The above technical solution can fix the connecting rod 18 to the bottom of the top plate 16. During installation, the polygonal prism 19 can be inserted into the prism groove 17, and the threaded rod 20 can be protruded from the surface of the top plate 16. The installation can be completed by tightening the threaded rod 20 with the fastening nut 21.

[0095] like Figure 12 As shown, in this embodiment, a recessed groove 39 is provided at the bottom of the top plate 16, and the recessed groove 39 is used to install and fix the sealing ring 40.

[0096] The above technical solution can prevent the target liquid from leaking from the connection between the top plate 16 and the mounting plate 5.

[0097] like Figure 4 , Figure 5 and Figure 2 As shown, in this embodiment, the small filter and the large filter 52 are both set in pairs, and the small filter and the large filter 52 can be fixed in the cabinet 43 by the filter mounting bracket 41;

[0098] The above technical solution facilitates quick filter replacement, with one filter in use and the other in standby mode. When disassembly and maintenance are required, the filter can be switched to the standby filter via solenoid valve 42.

[0099] like Figure 8 As shown, in this embodiment, an air inlet 14 is also provided at the bottom of the housing 1, and a rotating housing 10 is connected to the main shaft 15. A first through hole 11 and a second through hole 13 are provided on the surface of the rotating housing 10.

[0100] The above technical solution facilitates the control of the opening and closing of the first liquid outlet 3. When the first through hole 11 is misaligned with the first liquid outlet 3, the target liquid can be prevented from being discharged from the first liquid outlet 3. When the second through hole 13 is aligned with the air inlet 14, the air pump can fill the housing 1 with compressed gas to provide pressure for the backwash water and assist in backwashing.

[0101] How the filter works:

[0102] During normal use, the target liquid enters the filter chamber through the first inlet 2 and passes through the filter holes on the side wall of the filter element 4 in the forward direction. Then it leaves the housing 1 through the first outlet 3. Since the particle impurities are larger than the filter hole diameter of the filter element 4, they cannot pass through the filter element 4 freely and are left on the surface of the filter element 4. The filtered target liquid flows out of the housing 1.

[0103] As the usage time increases, the filter pores of filter element 4 are gradually occupied by particulate impurities, which reduces the permeability of filter element 4, obstructs the flow of target liquid, and increases the internal pressure of housing 1. At this time, the filter channel is temporarily closed and the backwash channel is opened. The backwash water enters the filter chamber through the second inlet 8 and then penetrates the filter pores on the side wall of filter element 4 in the reverse direction. It then leaves housing 1 through the second outlet 9, thereby flushing out the particulate impurities that are blocked in the filter pores of filter element 4.

[0104] The dirt layer attached to the surface of the filter element 4 needs to be activated by starting the servo motor 12 so that its output shaft drives the main shaft 15 to rotate. The main shaft 15 drives the top plate 16 connected to it to rotate. The top plate 16 drives the connecting rod 18 to rotate forward and backward along the movable groove 38, thereby driving the cleaning component 23 to reciprocate along the surface of the filter element 4, so that the cleaning component 23 moves along the surface of the filter element 4 to peel off the dirt layer.

[0105] During this process, when the cleaning component 23 moves in the first direction to clean the filter element 4, one end of the cleaning component 23 tilts and abuts against the first inclined surface 31, causing the slider 29 to retract into the groove 28, and the cleaning component 23 moves almost unimpeded. When the cleaning component 23 moves in the second direction, one end of it strikes the second inclined surface 32 vertically, forcing the cleaning component 23 to rotate around the pin. When the cleaning component 23 is completely separated from the second inclined surface 32, the first spring 26 drives the cleaning component 23 to rotate and reset, and causes the cleaning component 23 to strike the dirt layer on the surface of the filter element 4, causing the dirt layer to break. The auxiliary cleaning component 23 peels the dirt layer off the surface of the filter element 4 layer by layer, while shaking off the dirt attached to the surface of the cleaning component 23 to prevent the sharpness of the cleaning component 23 from decreasing, until the flowability of the filter element 4 is restored.

[0106] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the invention (including the claims) is limited to these examples; within the framework of the invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the invention as described above, which are not provided in the details for the sake of brevity.

[0107] This invention is intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A high-viscosity liquid circulation supply device, characterized in that, include: The cabinet (43) has a liquid supply pipe installed on the outside; An external liquid storage unit is connected to a raw material tank located outside the cabinet (43) via the liquid supply pipe; The three-in-one functional module is vertically integrated into the cabinet, including a multi-stage filtration system, a pneumatic diaphragm pump set, and a nitrogen coverage pressure control unit. The five-dimensional sensing system is used to monitor the pressure, flow rate, weight, purity, and temperature parameters of the target liquid in real time. The PLC controller is used to dynamically adjust the frequency of the pneumatic diaphragm pump, the nitrogen covering pressure, and the valve action sequence. A unified communication protocol interface is used to integrate data from various modules within the device.

2. The high-viscosity liquid circulation supply equipment according to claim 1, characterized in that, The filtration system includes a filter, the filter comprising: The shell (1) is hollow inside to form a closed filter chamber; At least one filter element (4) is disposed in the filter chamber. The housing (1) is provided with a filter channel and a backwash channel communicating with the internal filter chamber on the outside. The filter channel is used to guide the target liquid to pass through the filter element (4) in the forward direction along a first path to filter particulate impurities in the target liquid. The backwash channel is used to guide backwash water to pass through the filter element (4) in the reverse direction along a second path to clear the filter holes of the filter element (4) covered by the dirt layer formed by particulate impurities. The cleaning assembly includes a cleaning element (23) that maintains contact with the surface of the filter element (4), and a drive structure for driving the cleaning element (23) to move along the surface of the filter element (4) to peel off the dirt layer; A shaking structure is used to intermittently drive the cleaning element (23) to vibrate in order to help break up the dirt layer and shake off the dirt attached to the surface of the cleaning element (23).

3. The high-viscosity liquid circulation supply equipment according to claim 2, characterized in that, The filter also includes: Support plate (6) is fixedly disposed on the inner side wall of the housing (1). There are two support plates (6) and they are respectively disposed on the upper and lower sides of the housing (1). Mounting plate (5) is located at the upper end of the filter element (4), and bolt holes are provided at corresponding positions on the mounting plate (5) and the support plate (6); Connecting bolts (7) are used to connect and fix the mounting plate (5) and the support plate (6) by fitting the bolt holes.

4. The high-viscosity liquid circulation supply equipment according to claim 3, characterized in that, The housing (1) has a first liquid inlet (2) at its upper end and a first liquid outlet (3) at its bottom. The target liquid enters the filter chamber through the first liquid inlet (2) and passes through the filter hole on the side wall of the filter element (4) in the forward direction, and then leaves the housing (1) through the first liquid outlet (3) to filter the target liquid.

5. The high-viscosity liquid circulation supply equipment according to claim 4, characterized in that, The housing (1) has a second liquid inlet (8) at its top and a second liquid outlet (9) on its side. The backwash water enters the filter chamber through the second liquid inlet (8) and then penetrates the filter hole on the side wall of the filter element (4) in the reverse direction. It then leaves the housing (1) through the second liquid outlet (9) to backwash the filter element (4).

6. The high-viscosity liquid circulation supply equipment according to claim 5, characterized in that, The filter element (4) has multiple filter holes with the pore size decreasing from the outside to the inside to form a multi-stage filtration structure. The multiple filter elements (4) are nested together and their centerlines coincide. A cavity is formed between the sidewalls of adjacent filter elements (4) to accommodate the cleaning component (23) and particulate impurities.

7. The high-viscosity liquid circulation supply equipment according to claim 6, characterized in that, The driving structure includes: A connecting rod (18) has one end extending through a movable groove (38) on the surface of the mounting plate (5) and is connected to a cleaning component (23). Top plate (16), which is located at the upper end of the mounting plate (5) and connected to the extension end of the connecting rod (18); The main shaft (15) is fixedly connected at one end to the top plate (16) and at the other end extends outward through the housing (1); The output shaft of the servo motor (12) is fixedly connected to the extension end of the main shaft (15).

8. The high-viscosity liquid circulation supply device according to claim 7, characterized in that, The filter also includes: A bracket (22) is fixedly mounted on the surface of the connecting rod (18). A pin is fixedly mounted on the inner side of the bracket (22). One end of the bracket (22) is bent to form a connecting plate (25). A fixing sleeve (24) is fitted at one end onto the surface of the pin shaft, and at the other end is fixedly connected to the cleaning component (23); The first spring (26) has one end fixedly connected to the connecting plate (25) and the other end fixedly connected to the cleaning component (23). The elastic force of the first spring (26) pushes the cleaning component (23) to adhere to the side wall of the filter element (4).

9. The high-viscosity liquid circulation supply equipment according to claim 8, characterized in that, The jitter structure includes: The fixing strip (27) has multiple grooves (28) inside it; Multiple sliders (29) are slidably disposed in the groove (28). The sliders (29) have a first inclined surface (31) and a second inclined surface (32) formed on their surfaces. The sliders (29) are located on the movement trajectory of the cleaning component (23). The second spring (30) is provided in the groove (28) to push the slider (29) out of the groove (28) and contact one end of the cleaning component (23). When the cleaning component (23) moves in the first direction to clean the filter element (4), one end of the cleaning component (23) tilts and abuts against the first inclined surface (31) to make the slider (29) retract into the groove (28). When the cleaning component (23) moves in the second direction, one end of it hits the second inclined surface (32) vertically to force the cleaning component (23) to rotate around the pin.

10. The high-viscosity liquid circulation supply device according to claim 9, characterized in that, The filter also includes: The outer tube (34) is threadedly connected to the second liquid outlet (9), and the surface of the outer tube (34) is provided with a first liquid outlet (35) that connects each cavity. The inner sleeve (36) is rotatably disposed in the outer sleeve (34). The surface of the inner sleeve (36) is provided with a second liquid outlet (37) corresponding to the first liquid outlet (35). By rotating the inner sleeve (36), the first liquid outlet (35) and the second liquid outlet (37) can be aligned or staggered, thereby opening or closing the second liquid outlet (9).

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