Anti-impact vibration temperature compensation type surface acoustic wave sensor

Abstract

The invention discloses an impact vibration resistant temperature compensation type surface acoustic wave sensor, and relates to the field of information detection, and the impact vibration resistant temperature compensation type surface acoustic wave sensor comprises a housing which is used for employing a double-layer structure, forming double protection, and effectively resisting external impact; the buffer layer is used for absorbing impact vibration and protecting the core sensing unit assembly; the core sensing unit assembly is used for generating surface acoustic waves; compared with the prior art, the dual-layer alternating complementary interdigital transducer has the beneficial effects that the dual-layer alternating complementary interdigital transducer can effectively disperse and absorb vibration energy, and the influence of impact on the interdigital transducer and the piezoelectric substrate is reduced; the temperature compensation layer is designed, so that temperature compensation is realized, and meanwhile, the temperature compensation layer can be matched with the buffer structure to jointly play a role in resisting impact vibration; due to the fact that the shells, the buffer layers, the vibration absorption layers and the like are designed, the core sensing unit can reduce interference, and the sensitivity and precision of the surface acoustic wave sensor are guaranteed.

Description

Technical Field

[0001] This invention relates to the field of information detection, specifically to a temperature-compensated surface acoustic wave sensor resistant to shock vibration. Background Technology

[0002] Surface acoustic wave (SAW) sensors are widely used in industrial, medical, and military fields due to their high sensitivity, passive operation, and miniaturization. However, the stability of SAW sensors in complex vibration environments is a significant issue. Traditional SAW sensor designs often prioritize signal transmission efficiency, neglecting resistance to vibration and shock. In vibration environments, the interdigital transducer (IDT) and piezoelectric substrate of the sensor may suffer mechanical deformation, leading to signal distortion or performance degradation. Simultaneously, severe vibration can accelerate the fatigue of sensor materials, thus shortening their lifespan. Temperature variations also significantly impact the performance of SAW sensors. The properties of piezoelectric materials change with temperature, affecting the propagation speed and frequency stability of SAW waves, consequently leading to instability in the sensor's output signal and measurement errors. In practical applications, especially in environments with large temperature fluctuations, temperature compensation becomes a crucial technology for ensuring sensor accuracy.

[0003] To address these issues, researchers have attempted to improve the vibration resistance and temperature compensation capabilities of sensors by refining their structural design and material selection. However, existing solutions often have limitations. For example, simply increasing the structural strength of the sensor may sacrifice its sensitivity, and traditional temperature compensation methods may not maintain high accuracy over a wide temperature range. There is an urgent need to find a surface acoustic wave sensor that is resistant to shock vibration and capable of temperature compensation. Summary of the Invention

[0004] The purpose of this invention is to provide a temperature-compensated surface acoustic wave sensor resistant to shock vibration, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A temperature-compensated surface acoustic wave sensor resistant to shock vibration, comprising:

[0007] The outer shell employs a double-layer structure to provide dual protection and effectively resist external impacts;

[0008] A buffer layer is used to absorb shock vibrations and protect the core sensing unit components.

[0009] The core sensing unit component is used to generate surface acoustic waves;

[0010] The vibration-absorbing layer is used to absorb and attenuate the impact vibration components from the bottom (rubber is selected to make the vibration-absorbing layer).

[0011] The adhesive layer is used to work with the base to achieve a secure fit.

[0012] The base is used to fix the device to be tested, ensuring the stability of the installation and the long-term reliability of the operation.

[0013] The inner cavity of the outer shell is provided with a buffer layer, a core sensing unit assembly, a vibration-absorbing layer, and an adhesive layer. The upper end of the buffer layer is connected to the outer shell, the lower end of the buffer layer is connected to the upper end of the core sensing unit assembly, the lower end of the core sensing unit assembly is connected to the upper end of the vibration-absorbing layer, the lower end of the vibration-absorbing layer is connected to the upper end of the adhesive layer, and the lower end of the adhesive layer is connected to the upper end of the base.

[0014] As a further embodiment of the present invention: the outer casing includes:

[0015] The outer casing (made of high-density metal material) is designed to withstand direct impact vibrations to protect the internal components (the parts between the casing and the base).

[0016] The inner outer shell (made of highly elastic material) is used to absorb the impact vibrations transmitted by the outer outer shell;

[0017] The outer shell has an inner shell inside its cavity, and the inner shell has a buffer layer, a core sensing unit assembly, a vibration-absorbing layer, and an adhesive layer inside its cavity.

[0018] As a further embodiment of the present invention: the outer shell is made of metal steel, and the inner shell is made of rubber.

[0019] As a further embodiment of the present invention: the buffer layer includes:

[0020] Elastic components are used to further absorb impact vibrations on top of the housing;

[0021] A protective film is used to prevent the elastic component from directly contacting the core sensing unit component (specifically the upper interdigital transducer), which could lead to electrode wear and performance degradation.

[0022] The upper end of the elastic component is connected to the outer shell, the lower end of the elastic component is connected to the upper end of the protective film, and the lower end of the protective film is connected to the upper end of the core sensing unit.

[0023] As a further aspect of the present invention: the core sensing unit includes:

[0024] The upper interdigital transducer is used to achieve vibration reduction protection;

[0025] The temperature compensation layer is used to achieve temperature compensation by complementing the temperature characteristics of the piezoelectric substrate and balancing the stress when the temperature changes.

[0026] The lower interdigital transducer is used to drive the piezoelectric substrate to generate surface acoustic waves under the excitation of the input electrical signal;

[0027] Piezoelectric substrates are used to generate surface acoustic waves and serve as a propagation medium.

[0028] The upper surface of the upper interdigital transducer is in contact with the protective film, and the lower surface of the upper interdigital transducer is in contact with the upper surface of the temperature compensation layer (the combination with the temperature compensation layer reduces deformation and plays a joint role in vibration reduction). The lower surface of the temperature compensation layer is in contact with the upper surface of the lower interdigital transducer. The lower interdigital transducer is embedded in the piezoelectric substrate, so that the lower surface and sides of the lower interdigital transducer are in contact with the piezoelectric substrate.

[0029] As a further aspect of the present invention: the upper interdigital transducer and the lower interdigital transducer adopt a multi-layer interdigital structure and staggered arrangement design, and are arranged on the temperature compensation layer and the piezoelectric substrate in an alternating and complementary manner.

[0030] As a further aspect of the present invention, the temperature-compensated surface acoustic wave sensor resistant to shock vibration also includes a reflective grating for enhancing surface acoustic waves through multiple superimposed reflections.

[0031] Compared with the prior art, the beneficial effects of the present invention are as follows: the double-layer alternating complementary interdigital transducer in the present invention can effectively disperse and absorb vibration energy, reducing the impact of shock on the interdigital transducer and piezoelectric substrate; the temperature compensation layer is designed to achieve temperature compensation while also working with the buffer structure to resist shock vibration; due to the design of multiple shells, buffer layers, vibration absorption layers, etc., and the core sensing unit itself can also reduce interference, the sensitivity and accuracy of the surface acoustic wave sensor of the present invention are guaranteed. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of a temperature-compensated surface acoustic wave sensor resistant to shock vibration.

[0033] Figure 2 This is a schematic diagram of the core sensing unit.

[0034] Figure 3 This is a schematic diagram of a micro-aperture array reflective grating.

[0035] In the figure: 1-outer shell, 2-inner shell, 3-elastic component, 4-protective film, 5-upper interdigital transducer, 6-temperature compensation layer, 7-lower interdigital transducer, 8-piezoelectric substrate, 9-vibration absorption layer, 10-adhesive layer, 11-base. Detailed Implementation

[0036] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0037] Please see Figure 1 A temperature-compensated surface acoustic wave (SAW) sensor resistant to shock vibration (the physical quantities detected by the SAW sensor include, but are not limited to, pressure, gas, humidity, etc.), comprising:

[0038] The outer shell employs a double-layer structure to provide dual protection and effectively resist external impacts;

[0039] A buffer layer is used to absorb shock vibrations and protect the core sensing unit components.

[0040] The core sensing unit component is used to generate surface acoustic waves;

[0041] The vibration-absorbing layer 9 is used to absorb and attenuate the impact vibration component from the bottom (the vibration-absorbing layer 9 is made of rubber, and the longitudinal vibration component generated by the piezoelectric substrate. These vibrations are transmitted to the bottom of the sensor through the substrate, forming mechanical wave reflections, hence the design of the vibration-absorbing layer 9).

[0042] The adhesive layer 10 is used to cooperate with the base 11 to complete the fixation;

[0043] The base 11 is used to fix the part to be tested, ensuring the stability of the installation and the long-term reliability of the operation;

[0044] The inner cavity of the outer shell is provided with a buffer layer, a core sensing unit assembly, a vibration-absorbing layer 9, and an adhesive layer 10. The upper end of the buffer layer is connected to the outer shell, the lower end of the buffer layer is connected to the upper end of the core sensing unit assembly, the lower end of the core sensing unit assembly is connected to the upper end of the vibration-absorbing layer 9, the lower end of the vibration-absorbing layer 9 is connected to the upper end of the adhesive layer 10, and the lower end of the adhesive layer 10 is connected to the upper end of the base 11.

[0045] In this embodiment: Please refer to Figure 1 The casing includes:

[0046] Outer shell 1, made of high-density metal material, is designed to withstand direct impact vibration to protect the internal components (parts between the shell and the base).

[0047] The inner outer shell 2 (made of a highly elastic material) is used to absorb the impact vibration transmitted by the outer outer shell 1;

[0048] The outer shell 1 has an inner shell 2 inside its cavity. The inner shell 2 has a buffer layer, a core sensing unit assembly, a vibration-absorbing layer 9, and an adhesive layer 10 inside its cavity.

[0049] In this embodiment: Please refer to Figure 1 The outer shell 1 is made of metal steel, and the inner shell 2 is made of rubber.

[0050] The outer metal steel layer (outer shell 1) directly resists impact, while the inner rubber layer (inner shell 2) absorbs the transmitted vibration, forming a dual protection mechanism that effectively resists external impact.

[0051] In this embodiment: Please refer to Figure 1 The buffer layer includes:

[0052] Elastic component 3 is used to further absorb impact vibrations on top of the outer shell;

[0053] The protective film 4 is used to prevent the elastic component 3 from directly contacting the core sensing unit component (specifically the upper interdigital transducer 5), which would cause electrode wear and lead to a decrease in device performance.

[0054] The upper end of the elastic component 3 is connected to the outer shell, the lower end of the elastic component 3 is connected to the upper end of the protective film 4, and the lower end of the protective film 4 is connected to the upper end of the core sensing unit.

[0055] The elastic component 3 absorbs the impact, and the protective film 4 prevents electrode wear, together protecting the core sensing unit.

[0056] In this embodiment: Please refer to Figure 1 and Figure 2 The core sensing unit includes:

[0057] The upper interdigital transducer 5 is used to achieve vibration reduction protection;

[0058] Temperature compensation layer 6 is used to achieve temperature compensation by complementing the piezoelectric substrate 8 based on temperature characteristics and balancing stress when the temperature changes.

[0059] The lower interdigital transducer 7 is used to drive the piezoelectric substrate 8 to generate surface acoustic waves under the excitation of the input electrical signal;

[0060] The piezoelectric substrate 8 is used to form surface acoustic waves and serve as a propagation medium;

[0061] The upper surface of the upper interdigital transducer 5 is in contact with the protective film 4, and the lower surface of the upper interdigital transducer 5 is in contact with the upper surface of the temperature compensation layer 6 (the combination with the temperature compensation layer 6 reduces the deformation and plays a joint role in vibration reduction). The lower surface of the temperature compensation layer 6 is in contact with the upper surface of the lower interdigital transducer 7. The lower interdigital transducer 7 is embedded in the piezoelectric substrate 8, so that the lower surface and side of the lower interdigital transducer 7 are in contact with the piezoelectric substrate 8.

[0062] The upper interdigital transducer 5 is not used to excite surface acoustic waves, but plays a further role in vibration reduction and protection. Its upper surface is in contact with the protective film 4, and its lower surface is in contact with the temperature compensation layer 6. It can combine with the temperature compensation layer 6 to reduce deformation and jointly play a role in vibration reduction.

[0063] The lower interdigital transducer 7 is embedded in the piezoelectric substrate 8. By increasing the contact area between the electrode and the piezoelectric material, the electrical signal excitation can more efficiently drive the piezoelectric substrate 8 to generate surface acoustic waves, thereby improving the energy conversion efficiency.

[0064] The piezoelectric substrate 8 is made of high-performance piezoelectric ceramic, which enhances structural strength while maintaining piezoelectric properties. Compared with commonly used piezoelectric materials, high-performance piezoelectric ceramics have higher strength and stability, and can better withstand impacts from the bottom.

[0065] In this embodiment: Please refer to Figure 1 and Figure 2 The upper interdigital transducer 5 and the lower interdigital transducer 7 adopt a multi-layer interdigital structure and staggered arrangement design, and are arranged on the temperature compensation layer 6 and the piezoelectric substrate 8 in an alternating and complementary manner.

[0066] The multi-layer staggered design improves the efficiency of sound wave generation and reduces vibration interference through alternating arrangement.

[0067] In this embodiment: Please refer to Figure 3 The shock-vibration-resistant temperature-compensated surface acoustic wave sensor also includes a reflective grating for enhancing surface acoustic waves through multiple superimposed reflections.

[0068] The intensity of surface acoustic wave signals is enhanced by multiple reflections, thereby improving the sensitivity of the sensor.

[0069] There are no restrictions or special requirements on the materials used for the upper interdigital transducer 5, the lower interdigital transducer 7, and the reflective grating. Materials include, but are not limited to, pure metal materials such as aluminum, copper, platinum, silver, and gold, as well as alloy materials such as platinum-rhodium alloys and novel composite electrode materials.

[0070] The working principle of this invention is as follows: Under the excitation of the input electrical signal, the lower interdigital transducer 7 drives the piezoelectric substrate 8 to generate surface acoustic waves. The temperature compensation layer 6 complements the piezoelectric substrate 8 based on its temperature characteristics, and the stress is balanced when the temperature changes, thereby achieving temperature compensation. The upper interdigital transducer 5 and the temperature compensation layer 6 combine to reduce deformation and jointly play a role in vibration reduction. The outer shell 1, inner shell 2, elastic component 3, and vibration-absorbing layer 9 play a role in absorbing impact vibration. The protective film 4 avoids the degradation of device performance caused by electrode wear. The adhesive layer 10 is used to cooperate with the base 11 to complete the fixation, ensuring the stability of the installation and the long-term reliability of the operation.

[0071] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and not restrictive.

[0072] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A temperature-compensated surface acoustic wave sensor resistant to shock vibration, characterized in that, This shock-vibration resistant, temperature-compensated surface acoustic wave sensor includes: The outer shell employs a double-layer structure to provide dual protection and effectively resist external impacts; A buffer layer is used to absorb shock vibrations and protect the core sensing unit components. The core sensing unit component is used to generate surface acoustic waves; The vibration-absorbing layer is used to absorb and attenuate the impact vibration components from the bottom. The adhesive layer is used to work with the base to achieve a secure fit. The base is used to fix the device to be tested, ensuring the stability of the installation and the long-term reliability of the operation. The inner cavity of the outer shell is provided with a buffer layer, a core sensing unit assembly, a vibration-absorbing layer, and an adhesive layer. The upper end of the buffer layer is connected to the outer shell, the lower end of the buffer layer is connected to the upper end of the core sensing unit assembly, the lower end of the core sensing unit assembly is connected to the upper end of the vibration-absorbing layer, the lower end of the vibration-absorbing layer is connected to the upper end of the adhesive layer, and the lower end of the adhesive layer is connected to the upper end of the base.

2. The shock-vibration-resistant temperature-compensated surface acoustic wave sensor according to claim 1, characterized in that the outer shell... include: The outer casing is designed to withstand direct impact vibrations to protect the internal components. The inner outer shell is used to absorb the impact vibration transmitted by the outer outer shell; The outer shell has an inner shell inside its cavity, and the inner shell has a buffer layer, a core sensing unit assembly, a vibration-absorbing layer, and an adhesive layer inside its cavity.

3. The shock-vibration-resistant temperature-compensated surface acoustic wave sensor according to claim 2, characterized in that, The outer shell is made of metal steel, and the inner shell is made of rubber.

4. The shock-vibration-resistant temperature-compensated surface acoustic wave sensor according to claim 1, characterized in that, The buffer layer includes: Elastic components are used to further absorb impact vibrations on top of the housing; A protective film is used to prevent the elastic component from directly contacting the core sensing unit component, which could lead to electrode wear and performance degradation. The upper end of the elastic component is connected to the outer shell, the lower end of the elastic component is connected to the upper end of the protective film, and the lower end of the protective film is connected to the upper end of the core sensing unit.

5. The shock-vibration-resistant temperature-compensated surface acoustic wave sensor according to claim 1, characterized in that, The core sensing unit includes: The upper interdigital transducer is used to achieve vibration reduction protection; The temperature compensation layer is used to achieve temperature compensation by complementing the temperature characteristics of the piezoelectric substrate and balancing the stress when the temperature changes. The lower interdigital transducer is used to drive the piezoelectric substrate to generate surface acoustic waves under the excitation of the input electrical signal; Piezoelectric substrates are used to generate surface acoustic waves and serve as a propagation medium. The upper surface of the upper interdigital transducer is in contact with the protective film, the lower surface of the upper interdigital transducer is in contact with the upper surface of the temperature compensation layer, the lower surface of the temperature compensation layer is in contact with the upper surface of the lower interdigital transducer, and the lower interdigital transducer is embedded in the piezoelectric substrate, so that the lower surface and side of the lower interdigital transducer are in contact with the piezoelectric substrate.

6. The shock-vibration-resistant temperature-compensated surface acoustic wave sensor according to claim 5, characterized in that, The upper interdigital transducer and the lower interdigital transducer adopt a multi-layer interdigital structure and staggered arrangement design, and are arranged on the temperature compensation layer and the piezoelectric substrate in an alternating and complementary manner.

7. The shock-vibration-resistant temperature-compensated surface acoustic wave sensor according to any one of claims 1 to 6, characterized in that, The shock-vibration-resistant temperature-compensated surface acoustic wave sensor also includes a reflective grating for enhancing surface acoustic waves through multiple superimposed reflections.

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