Fluorine-containing high-corrosion-resistance composite material and application thereof in wafer clamping device

Abstract

The invention provides a fluorine-containing high-corrosion-resistance composite material and application thereof in a wafer clamping device, and relates to the technical field of semiconductors and corrosion-resistant materials. The composite material comprises fluororesin, fluorocarbon modified organic silicon resin and fluorinated carbon fibers, wherein the fluorocarbon modified organic silicon resin is prepared by the following steps: hydrolyzing and neutralizing a siloxane monomer, and then carrying out polymerization reaction on the hydrolyzed and neutralized siloxane monomer, perfluorovinyl ether and 2-methoxy-4-vinylphenol to obtain the fluorocarbon modified organic silicon resin. The composite material has the characteristics of high strength and excellent corrosion resistance, the overall thermal expansion coefficient of the material is reduced, the defect that the size of PTFE is unstable when the temperature change is large is overcome, and the composite material is more suitable for a wafer clamping device, especially a clamping piece.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor and corrosion-resistant materials, and particularly relates to a fluorine-containing high-corrosion-resistant composite material and application thereof in wafer clamping devices. BACKGROUND

[0002] The wet process of a wafer is an important process affecting product yield. Single-wafer wet processes are used more and more widely due to their good uniformity, repeatability and stability.

[0003] At present, in the single-wafer wet process, a wafer subjected to wet etching or cleaning is fixed on a wafer chuck, and the wafer is rotated under the drive of the wafer chuck, and the wafer surface is subjected to process treatment by spraying wet chemicals. In the above process, a clamping device is generally used to ensure that the wafer is stably fixed on the wafer chuck, so as to avoid the wafer from loosening during high-speed rotation, which causes friction between the wafer and the part fixing the wafer, and causes scratches on the wafer. During the wet etching or cleaning process, corrosive chemicals are used according to process requirements. These chemicals will splash at a certain angle due to the centrifugal force, and will inevitably splash on the clamping device. Therefore, in order to ensure the normal progress of the wet etching or cleaning process, the clamping device needs to have good corrosion resistance.

[0004] PTFE, known as the "plastic king", is widely used in the semiconductor field due to its excellent resistance to almost all chemicals and solvents, and excellent high-temperature resistance and other properties. Although PTFE has excellent comprehensive properties, it has high melt viscosity, is relatively difficult to process and mold, and still has the defect of low mechanical strength. One of the methods to solve the problem of low mechanical strength of PTFE is to use carbon fibers, glass fibers, graphene and the like for reinforcement, but there are still many defects, such as the addition of carbon fibers to PTFE easily leading to a decrease in chemical stability and corrosion resistance. In addition, after the wafer is subjected to a high-temperature process, it is generally cooled rapidly by a cooling device, and the expansion coefficient of pure PTFE is large, so the size changes significantly in an environment with large temperature changes, which affects the clamping and fixing of the wafer and causes large wear. SUMMARY

[0005] In view of the deficiencies of the prior art, the present application provides a fluorine-containing high-corrosion-resistant composite material and application thereof in wafer clamping devices, which at least solves some of the problems existing in the prior art.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present application is as follows:

[0007] On the one hand, a fluorine-containing high-corrosion-resistant composite material is provided, which comprises fluororesin, fluorocarbon-modified organosilicon resin and fluorinated carbon fiber; wherein,

[0008] The fluorocarbon-modified silicone resin is prepared by polymerization of siloxane monomer after hydrolysis and neutralization with perfluorovinyl ether and 2-methoxy-4-vinylphenol.

[0009] Further, the fluorine-containing high corrosion-resistant composite material comprises the following raw materials in percentage by mass: fluorocarbon-modified silicone resin 5-8%, fluorinated carbon fiber 10-15%, and the balance of fluororesin.

[0010] Further, the fluororesin is selected from any one or combination of PTFE, PFA, and PCTFE.

[0011] Further, the siloxane monomer is selected from any one or combination of dimethyldimethoxysilane, dimethyldiethoxysilane, diethyldimethoxysilane, diethyldiethoxysilane, octamethylcyclotetrasiloxane, tetramethylcyclotetrasiloxane, tetramethyltetraethenylcyclotetrasiloxane, and hexamethyldisiloxane. Preferably, the siloxane monomer is selected from a combination of octamethylcyclotetrasiloxane and tetramethyltetraethenylcyclotetrasiloxane, and the molar ratio of octamethylcyclotetrasiloxane to tetramethyltetraethenylcyclotetrasiloxane is 1:(0.5-0.8).

[0012] Further, the hydrolysis step comprises dissolving the siloxane monomer in a solvent, adding catalyst I, and performing the hydrolysis reaction at 20-40°C.

[0013] Optionally, in the hydrolysis process, the solvent is toluene or xylene; the catalyst I is selected from concentrated sulfuric acid or chloroplatinic acid, and the catalyst is added in an amount of 0.05-0.5% of the weight of the siloxane monomer; and the reaction time is at least 6h.

[0014] Further, the neutralization process refers to adding an alkaline substance to the reaction system to neutral or weakly alkaline, and the alkaline substance is selected from any one of sodium hydroxide, sodium carbonate, and sodium bicarbonate.

[0015] Further, the perfluorovinyl ether is selected from any one of perfluoromethyl vinyl ether, perfluoroethyl vinyl ether, and perfluoro-n-propyl vinyl ether.

[0016] Further, in the polymerization reaction process, the reaction temperature is 70-80°C, and catalyst II is added during the reaction, and the catalyst II is chloroplatinic acid or other catalysts known to those skilled in the art.

[0017] Specifically, the fluorocarbon-modified silicone resin is prepared by the following method:

[0018] (1) the siloxane monomer is dissolved in a solvent, a catalyst I is added, a hydrolysis reaction is carried out at 20-40 DEG C for at least 6 h, a hydrolysis product is obtained, a basic substance is added to adjust to neutral or weak alkaline, solid is removed by filtration, the solvent is removed by distillation, and an intermediate I is obtained;

[0019] (2) the intermediate I is added with perfluoro vinyl ether and 2-methoxy-4-vinyl phenol, a catalyst II is added, a reaction is carried out at 70-80 DEG C until the infrared absorption peak of Si-H bond disappears, the catalyst is removed after the reaction is completed, and the product is a fluorocarbon modified silicone resin.

[0020] It is found through experiments that adding a certain amount of silicone resin in the PTFE resin can reduce the viscosity of the blending system to a certain extent, improve the flowability, improve the processing performance of the PTFE resin, and improve the strength of the material. However, the heat resistance range of the silicone resin and the PTFE resin is different, which leads to uneven size change of the material when the temperature changes. In addition, the conventional silicone resin has poor corrosion resistance to strong oxidizing agents, which leads to the decline of the overall corrosion resistance.

[0021] The silicone resin is modified by using perfluoro vinyl ether and 2-methoxy-4-vinyl phenol as the modifier. On the one hand, the fluorocarbon chain segment is introduced into the modified silicone resin, and the proportion of the fluorocarbon chain segment is controlled, which helps to improve the bonding force with the PTFE, thereby improving the strength of the composite material. On the other hand, the introduced fluorocarbon bond has extremely high bond energy and strong stability, which can compensate for the defect of poor corrosion resistance to strong oxidizing agents to a certain extent. However, the thermal expansion coefficient is still high. Therefore, a certain amount of 2-methoxy-4-vinyl phenol is introduced into the silicone resin, which plays a certain protective role on the silicone segment, further improves the stability in strong oxidizing agents, and also reduces the overall thermal expansion coefficient of the material to a certain extent, thereby improving the dimensional stability of the material.

[0022] Further, the molar ratio of the siloxane monomer, perfluoro vinyl ether and 2-methoxy-4-vinyl phenol is (65-75):(22-30):(3-5). It is found through verification that by controlling the molar ratio of the siloxane monomer, perfluoro vinyl ether and 2-methoxy-4-vinyl phenol, the proportion of the fluorocarbon chain segment in the fluorocarbon modified silicone resin is controlled, the strength, corrosion resistance and thermal expansion coefficient of the fluorocarbon modified silicone resin are improved, and the composite material has better performance.

[0023] Further, the length of the fluorinated carbon fiber is 100-800 μm, and the fluorine content is 50-58%.

[0024] The addition of fluorocarbon modified resin can reduce the overall thermal expansion coefficient of the material to a certain extent, but the effect is limited and still cannot well act on the wafer holding device. Adding carbon fiber to PTFE resin is a common method to reduce the thermal expansion coefficient of the material, but the conventional carbon fiber added to PTFE resin has poor interfacial bonding with PTFE, which becomes a penetration channel for corrosion medium, thereby reducing the corrosion resistance of the material.

[0025] The present application selects fluorinated carbon fiber to blend and modify PTFE. Compared with carbon fiber, the addition of fluorinated carbon fiber further reduces the overall thermal expansion coefficient of the material and improves the dimensional stability. Moreover, due to the introduction of fluorine, the surface energy is reduced, the compatibility of fluorinated carbon fiber with PTFE resin is improved, the defects caused by poor compatibility of carbon fiber with PTFE are avoided, and the acid and alkali corrosion resistance is improved. However, it is found that the fluorine content of fluorinated carbon fiber has a greater impact on the composite material. If the fluorine content of fluorinated carbon fiber is too high, although the corrosion resistance may be improved, the structure of carbon fiber is damaged, the internal defects are increased, and the strength is decreased. Therefore, the present application selects fluorinated carbon fiber with a fluorine content of 50-58%, so that the obtained composite material has better strength and corrosion resistance.

[0026] In a further aspect, the fluorinated carbon fiber is a combination of two lengths, the length of fluorinated carbon fiber I is 200 μm, and the length of fluorinated carbon fiber II is 650 μm; the weight ratio of fluorinated carbon fiber I to fluorinated carbon fiber II is 1:(0.3-0.5).

[0027] Compared with selecting a single size of fluorinated carbon fiber, selecting two sizes of fluorinated carbon fiber distributed in the PTFE resin matrix helps to form a more dense structure, thereby further improving the strength and corrosion resistance of the composite material. However, it is necessary to reasonably control the selection and ratio of the two sizes of fluorinated carbon fiber. If the two sizes are too long or too short, or the long size of fluorinated carbon fiber is too much or too little, it will affect the staggered arrangement of fluorinated carbon fiber in the PTFE resin, easily leading to stress concentration, thereby reducing the strength and corrosion resistance of the composite material.

[0028] On the other hand, a preparation method of a fluorine-containing high corrosion-resistant composite material is provided, comprising the following steps:

[0029] After the fluororesin, fluorinated carbon fiber, and fluorocarbon modified silicone resin are uniformly mixed, they are placed in a mold for compression molding, then high-temperature sintering is performed at 340-350°C for 5-6h, and after sintering is completed, the temperature is reduced to 25°C at a rate of 8-15°C / h.

[0030] Preferably, the pressure in the compression molding process is 25-60 MPa, and the time is 5-40 min.

[0031] Preferably, the cooling to room temperature is divided into two stages, the first stage: cooling to 300±10℃ at a rate of 9.5℃ / h, and holding for 1h; the second stage: cooling to 25℃ at a rate of 14℃ / h. The applicant found that when the fluorine-containing high corrosion-resistant composite material provided in the present application is used to prepare a wafer clamping piece, two-stage cooling after high-temperature sintering and 1h of holding treatment after the first-stage cooling help the components in the fluorine-containing high corrosion-resistant composite material to form a more uniform and dense structure, reduce the generation of defects, so as to obtain a wafer clamping piece with more excellent strength and corrosion resistance, thereby prolonging the service life thereof.

[0032] In still another aspect, an application of the fluorine-containing high corrosion-resistant composite material in a wafer clamping device is provided, and the application comprises using the fluorine-containing high corrosion-resistant composite material to prepare a wafer clamping piece.

[0033] Compared with the prior art, the present application has the following beneficial effects:

[0034] 1. The fluorine-containing high corrosion-resistant composite material provided in the present application has the characteristics of high strength and excellent corrosion resistance by adding fluorocarbon modified silicone resin and carbon fiber in the PTFE resin matrix, and the overall thermal expansion coefficient of the material is reduced, which makes up for the defect of size instability of PTFE when the temperature changes greatly, so that it is more suitable for wafer clamping devices, especially clamping pieces.

[0035] 2. The fluorine-containing high corrosion-resistant composite material of the present application adds fluorocarbon modified silicone resin, which improves the strength and corrosion resistance of the composite material compared with silicone resin, and to some extent, reduces the overall thermal expansion coefficient of the material, and improves the dimensional stability of the material when the temperature changes greatly.

[0036] 3. The fluorine-containing high corrosion-resistant composite material of the present application adds carbon fiber, which improves the strength of the material while controlling the fluorine content, not only further reduces the overall thermal expansion coefficient of the material and improves the dimensional stability, but also avoids the defects caused by the poor compatibility of carbon fiber and PTFE, and improves the acid and alkali corrosion resistance at high temperature. The use of two sizes of carbon fiber helps to form a more dense structure, thereby further improving the strength and corrosion resistance of the composite material. DETAILED DESCRIPTION

[0037] The following non-limiting examples can make those skilled in the art more fully understand the present application, but do not limit the present application in any way. The following content is only an exemplary description of the scope of the present application, and those skilled in the art can make various changes and modifications to the application disclosed herein, which should also belong to the scope of the present application.

[0038] The various chemical reagents used in the present application are obtained through conventional commercial channels unless otherwise specified. In the following detailed description, the siloxane monomers are octamethylcyclotetrasiloxane (CAS No. 556-67-2) and tetramethyltetravinylcyclotetrasiloxane (CAS No. 2554-06-5), and allyl glycidyl ether (CAS No. 106-92-3), all purchased from Shandong Yuanjin New Material Co., Ltd.; the perfluoro vinyl ether is perfluoroethyl vinyl ether (CAS No. 10493-43-3), purchased from Hubei Biao Yue Biological Technology Development Co., Ltd.; 2-methoxy-4-vinyl phenol (CAS No. 7786-61-0) is purchased from Hubei Shengneng Chemical Technology Co., Ltd.; PTFE resin (CAS No.: 9002-84-0) is purchased from Shanghai Jinjinle Industry Co., Ltd. The commercially available silicone resin is SILRES MPF52SY409 MK silicone resin purchased from Nanjing Qinhai Commerce and Trade Co., Ltd. The above-mentioned materials do not constitute a limitation on the present application, and it can be understood that other materials that replace the materials limited by the present application can also achieve the effects of the present application.

[0039] The present application is further described below in the manner of specific examples.

[0040] Example 1

[0041] A fluorine-containing high corrosion-resistant composite material, by mass percentage, comprises: fluorocarbon modified silicone resin 8%, fluorinated carbon fiber 10%, PTFE resin 82%; wherein

[0042] The fluorocarbon modified silicone resin is prepared by the following method:

[0043] Dissolve the siloxane monomers (octamethylcyclotetrasiloxane and tetramethyltetravinylcyclotetrasiloxane in a molar ratio of 1:0.5) in a sufficient amount of solvent toluene, add 0.1% of chloroplatinic acid by weight of the siloxane monomers, and carry out hydrolysis reaction at 20°C for at least 12h to obtain a hydrolysis product, adjust to neutral with sodium hydroxide, filter to remove solids, and distill off the solvent to obtain intermediate I; add perfluoro vinyl ether and 2-methoxy-4-vinyl phenol to intermediate I, add catalyst II chloroplatinic acid, and react at 70°C until the infrared absorption peak of Si-H bond disappears completely, then remove the catalyst after the reaction is completed, and the product is the fluorocarbon modified silicone resin; the molar ratio of siloxane monomers, perfluoro vinyl ether and 2-methoxy-4-vinyl phenol is 65:30:5;

[0044] The fluorinated carbon fiber has a length of 100μm and a fluorine content of 50%.

[0045] The preparation method of the above-mentioned fluorine-containing high corrosion-resistant composite material is as follows:

[0046] The PTFE resin, the carbon fluoride fiber and the fluorocarbon modified silicone resin are mixed uniformly, then are put into a mold, are pressed at 25 MPa for 40 min to form, then are sintered at 340 DEG C for 6 h, and after the sintering is completed, are cooled to 25 DEG C at a cooling rate of 8 DEG C / h, to obtain the wafer clamping piece.

[0047] Example 2

[0048] A fluorine-containing high corrosion-resistant composite material comprises, by mass percentage, fluorocarbon modified silicone resin 5%, carbon fluoride fiber 15%, and PFA resin 80%.

[0049] The fluorocarbon modified silicone resin is prepared by the following method.

[0050] The siloxane monomer (octamethylcyclotetrasiloxane and tetramethyltetravinylcyclotetrasiloxane in a molar ratio of 1:0.8) is dissolved in sufficient toluene, 0.1% of chloroplatinic acid by weight of the siloxane monomer is added, and a hydrolysis reaction is carried out at 30 DEG C for at least 6 h to obtain a hydrolysis product, sodium hydroxide is added to adjust to neutral, solid is removed by filtration, and the solvent is removed by distillation to obtain intermediate I; full-fluoro vinyl ether and 2-methoxy-4-vinyl phenol are added to intermediate I, and catalyst II chloroplatinic acid is added, and a reaction is carried out at 80 DEG C until the infrared absorption peak of the Si-H bond disappears completely, the catalyst is removed after the reaction is completed, and the product is the fluorocarbon modified silicone resin; the molar ratio of the siloxane monomer, the full-fluoro vinyl ether and the 2-methoxy-4-vinyl phenol is 75:22:3.

[0051] The carbon fluoride fiber has a length of 800 μm and a fluorine content of 58%.

[0052] The preparation method of the fluorine-containing high corrosion-resistant composite material is as follows.

[0053] The PTFE resin, the carbon fluoride fiber and the fluorocarbon modified silicone resin are mixed uniformly, then are put into a mold, are pressed at 60 MPa for 5 min to form, then are sintered at 350 DEG C for 5 h, and after the sintering is completed, are cooled to 25 DEG C at a cooling rate of 15 DEG C / h, to obtain the wafer clamping piece.

[0054] Example 3

[0055] The difference from example 1 is that the fluorine-containing high corrosion-resistant composite material comprises, by mass percentage, fluorocarbon modified silicone resin 10%, carbon fluoride fiber 18%, and PTFE resin 72%.

[0056] Example 4

[0057] The difference from example 1 is that in the preparation process of the fluorocarbon modified silicone resin, the molar ratio of the siloxane monomer, the full-fluoro vinyl ether and the 2-methoxy-4-vinyl phenol is 60:33:7.

[0058] Example 5

[0059] The difference from Example 1 is that the molar ratio of siloxane monomer, perfluoro vinyl ether and 2-methoxy-4-vinyl phenol in the preparation of fluorocarbon modified silicone resin is 78:20:2.

[0060] Example 6

[0061] The difference from Example 1 is that 2-methoxy-4-vinyl phenol is not added in the preparation of fluorocarbon modified silicone resin.

[0062] Example 7

[0063] The difference from Example 1 is that 2-methoxy-4-vinyl phenol is replaced by equal molar amount of allyl glycidyl ether in the preparation of fluorocarbon modified silicone resin.

[0064] Example 8

[0065] The difference from Example 1 is that the fluorocarbon modified silicone resin is replaced by equal amount of commercially available silicone resin.

[0066] Example 9

[0067] The difference from Example 1 is that the fluorine content of fluorocarbon fiber is 46%.

[0068] Example 10

[0069] The difference from Example 1 is that the fluorine content of fluorocarbon fiber is 61%.

[0070] Example 11

[0071] The difference from Example 1 is that the fluorocarbon fiber is a combination of two length sizes, fluorocarbon fiber I length 200 μm, fluorocarbon fiber II length 650 μm, and the weight ratio of fluorocarbon fiber I to fluorocarbon fiber II is 1:0.3.

[0072] Example 12

[0073] The difference from Example 1 is that the fluorocarbon fiber is a combination of two length sizes, fluorocarbon fiber I length 200 μm, fluorocarbon fiber II length 650 μm, and the weight ratio of fluorocarbon fiber I to fluorocarbon fiber II is 1:0.5.

[0074] Example 13

[0075] The difference from Example 11 is that the fluorocarbon fiber is a combination of two length sizes, fluorocarbon fiber I length 200 μm, fluorocarbon fiber II length 650 μm, and the weight ratio of fluorocarbon fiber I to fluorocarbon fiber II is 1:0.8.

[0076] Example 14

[0077] The difference from Example 1 is that the carbon fiber is replaced by an equal amount of fluorinated carbon fiber.

[0078] Example 15

[0079] The difference from Example 1 is that, during the preparation of the composite material, after sintering is completed, two-stage cooling is performed, one-stage cooling: cooling to 300±10℃ at a rate of 9.5℃ / h, and holding for 1h; two-stage cooling: cooling to room temperature at a rate of 14℃ / h.

[0080] Example 16

[0081] The difference from Example 15 is that, during the preparation of the composite material, after sintering is completed, two-stage cooling is performed, one-stage cooling: cooling to 300±10℃ at a rate of 9.5℃ / h; two-stage cooling: cooling to room temperature at a rate of 14℃ / h.

[0082] Example 17

[0083] The difference from Example 15 is that, during the preparation of the composite material, after sintering is completed, two-stage cooling is performed, one-stage cooling: cooling to 300±10℃ at a rate of 14℃ / h, and holding for 1h; two-stage cooling: cooling to room temperature at a rate of 14℃ / h.

[0084] Test Example

[0085] The wafer holder prepared in the above examples is processed into a test piece with a length of 10cm, a width of 5cm, and a thickness of 10mm, and tests of tensile strength, corrosion resistance, and coefficient of thermal expansion are performed. The tensile strength is tested in accordance with GB / T 1040-1992; the corrosion resistance test is performed in accordance with GB / T 11547, specifically, the tensile strength of the test piece after immersion in 98% concentrated sulfuric acid solution and 70% concentrated nitric acid solution for 10d is tested, and the tensile strength reduction rate is calculated, and the tensile strength reduction rate is used to evaluate the acid resistance, alkali resistance, and strong oxidizing agent resistance; the coefficient of thermal expansion is tested in accordance with GB / T 1036-2008.

[0086] The test results are shown in Table 1 below.

[0087] Table 1

[0088]

[0089] According to Table 1, the strength of the composite material provided by the application is above 95 MPa, the tensile strength reduction rate after immersion in 5% sulfuric acid, sodium hydroxide, nitric acid for 10 days is less than 8%, the corrosion resistance is excellent, and the thermal expansion coefficient at 20°C is less than 34 ppm / k, which is significantly lower than that of pure PTFE resin (about 65 ppm / k), which makes up for the defect of PTFE resin in size instability under large temperature changes.

[0090] According to Examples 1-8, compared with conventional silicone resin (Example 8), the strength and corrosion resistance of the composite material are improved, the thermal expansion coefficient is reduced, and the size stability is improved by adding fluorocarbon modified silicone resin in Examples 1 and 2. In Example 6, the silicone resin is only modified by perfluoro vinyl ether, and in Example 7, 2-methoxy-4-vinyl phenol is replaced by 4-vinyl phenol. Compared with Examples 1 and 2, the corrosion resistance, especially the corrosion resistance to strong oxidizing agents, and the size stability of Examples 6 and 7 are all decreased, which shows that only the silicone resin modified by perfluoro vinyl ether and 2-methoxy-4-vinyl phenol can make the composite material have excellent strength, corrosion resistance and size stability. From Examples 1-5, it can also be seen that the amount of perfluoro vinyl ether and 2-methoxy-4-vinyl phenol will affect the performance of the composite material, and the molar ratio of siloxane monomer, perfluoro vinyl ether and 2-methoxy-4-vinyl phenol is in the range of (65-75):(22-30):(3-5), the comprehensive performance of the composite material is better.

[0091] According to Examples 1 and 9-14, the fluorine content in the fluorinated carbon fiber has a great influence on its performance. When the fluorine content is too low, the corrosion resistance of the composite material cannot be well enhanced, and when the fluorine content is too high, the strength of the composite material decreases. It can also be seen that the use of two specific sizes of fluorinated carbon fibers in a certain proportion in Examples 11-13 helps to further improve the strength, corrosion resistance and size stability of the composite material.

[0092] According to Examples 1 and 15-17, during the preparation of the wafer clamping piece using the composite material of the application, two-stage cooling is performed after sintering, and heat preservation treatment is performed after the two-stage cooling, which helps to form a more uniform and dense structure, thereby improving the strength and acid corrosion resistance of the material to some extent.

[0093] The foregoing description of the embodiments has been presented for the purpose of illustration and description. It is not intended to be exhaustive or to limit the application to the precise form disclosed. Modifications and variations are possible in light of the above teachings or can be acquired from practice of the application. The application is defined by the claims and their equivalents.

Claims

1. A fluorine-containing high corrosion-resistant composite material, characterized in that, Including fluoropolymers, fluorocarbon-modified silicone resins, and fluorinated carbon fibers; among which, The fluorocarbon modified organosilicon resin is obtained by hydrolyzing and neutralizing siloxane monomers, followed by polymerization with perfluorovinyl ether and 2-methoxy-4-vinylphenol.

2. The fluorine-containing high corrosion-resistant composite material according to claim 1, characterized in that, The perfluorovinyl ether is selected from any one of perfluoromethyl vinyl ether, perfluoroethyl vinyl ether, and perfluoron-propyl vinyl ether.

3. The fluorine-containing high corrosion-resistant composite material according to claim 1, characterized in that, The molar ratio of the siloxane monomer, perfluorovinyl ether, and 2-methoxy-4-vinylphenol is (65-75):(22-30):(3-5).

4. The fluorine-containing high corrosion-resistant composite material according to claim 1, characterized in that, The siloxane monomer is selected from any one or a combination of several of dimethyldimethoxysilane, dimethyldiethoxysilane, diethyldimethoxysilane, diethyldiethoxysilane, octamethylcyclotetrasiloxane, tetramethylcyclotetrasiloxane, tetramethyltetravinylcyclotetrasiloxane, and hexamethyldisiloxane.

5. The fluorine-containing high corrosion-resistant composite material according to claim 1, characterized in that, The fluorinated carbon fiber has a length of 100–800 μm and a fluorine content of 50–58%.

6. The fluorine-containing high corrosion-resistant composite material according to claim 4, characterized in that, Fluorinated carbon fiber is a combination of two lengths: fluorinated carbon fiber I has a length of 200 μm and fluorinated carbon fiber II has a length of 650 μm; the weight ratio of fluorinated carbon fiber I to fluorinated carbon fiber II is 1:(0.3 to 0.5).

7. A method for preparing the fluorine-containing high corrosion-resistant composite material according to any one of claims 1-6, comprising the following steps: Fluoropolymer, fluorinated carbon fiber, and fluorocarbon modified silicone resin are mixed evenly, placed in a mold and pressed into shape, and then sintered at a high temperature of 340-350℃ for 5-6 hours. After sintering, the temperature is reduced to 25℃ at a cooling rate of 8-15℃ / h to obtain the final product.

8. The preparation method according to claim 7, characterized in that, The wafer clamping component is prepared by the following method: the pressure during the pressing process is 25-60 MPa and the time is 5-40 min.

9. The preparation method according to claim 7, characterized in that, The cooling process to 25°C is divided into two stages: the first stage involves cooling to 300±10°C at a rate of 9.5°C / h and holding at that temperature for 1 hour; the second stage involves cooling to 25°C at a rate of 14°C / h.

10. The application of the fluorine-containing high corrosion-resistant composite material according to any one of claims 1-6 in a wafer clamping device, characterized in that, The applications include using fluorine-containing, highly corrosion-resistant composite materials to prepare wafer clamping components.

Images