Semiconductor quartz boat heating work vehicle

Abstract

The invention discloses a semiconductor quartz boat heating work vehicle which comprises a vehicle frame with a low gravity center. The adjustable hydrogen flame blast burner unit is arranged in the frame, and the hydrogen flame of the adjustable hydrogen flame blast burner unit faces the direction of a product to be heated; the graphite plate is horizontally laid above the frame, the product to be heated is located above the graphite plate, and the graphite plate is used for converting a point heat source of the adjustable hydrogen flame blast burner unit into a surface heat field so as to heat the product to be heated. Local high temperature of the blowtorch is actively adsorbed through the graphite plate and radiated to the whole area of the product, a discrete heat source is upgraded into a surface area soaking system, and the randomness of manual heating is eliminated. Meanwhile, the layout of the blowtorch can be dynamically adjusted according to the size of a product, so that the hydrogen flame of the blowtorch can be dynamically configured in position and angle according to the heating requirements of different areas of the product, and the self-adaptive temperature control of the quartz boat with a certain area is realized.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor fire processing technology, specifically relating to a semiconductor quartz boat heating work vehicle. Background Technology

[0002] Semiconductor quartz boats are key high-purity quartz glass products used in semiconductor chip manufacturing to hold, transport, and process silicon wafers. They have many precise slots to hold multiple silicon wafers upright with uniform spacing, and can carry dozens to hundreds of wafers at a time for batch processing.

[0003] In the heat treatment process of quartz boats, thermal stress control is crucial. For semiconductor quartz boats, not only are the requirements for thermal stress control high, but also for dimensional and positional tolerances such as parallelism and perpendicularity. Currently, heating semiconductor quartz boats mostly relies on handheld spray guns. However, using handheld spray guns leads to uneven thermal field uniformity, resulting in a higher breakage rate. Furthermore, the oxyhydrogen flame of the spray gun generates water vapor during heat treatment. After heating, as the product cools, the generated water vapor combines with impurities and condenses on the surface of the quartz boat. This water vapor easily causes pitting and crystallization after annealing in the annealing workshop. Importantly, handheld spray gun heating requires multiple people to hold the gun, which undoubtedly increases the risk of burns. Therefore, it is necessary to develop effective solutions to address the related problems of heating semiconductor quartz boats. Summary of the Invention

[0004] The purpose of this invention is to provide a semiconductor quartz boat heating vehicle to solve the problems in the prior art.

[0005] Therefore, the present invention provides a semiconductor quartz boat heating work vehicle, comprising:

[0006] The vehicle frame has a low center of gravity;

[0007] An adjustable hydrogen flame torch unit is provided inside the vehicle frame, with its hydrogen flame directed toward the product to be heated.

[0008] A graphite plate is horizontally laid above the vehicle frame, and the product to be heated is located above the graphite plate. The graphite plate is used to convert the point heat source of the adjustable hydrogen flame torch unit into a surface heat field to heat the product to be heated.

[0009] In the above technical solution, the bottom of the frame is provided with a wheel system, which includes directional wheels and omnidirectional wheels, and at least the omnidirectional wheels have a brake pedal.

[0010] In the above technical solution, the frame further includes an outer frame, an upper frame, and a lower frame, wherein a detachable base plate is provided above the lower frame and inside the outer frame.

[0011] In the above technical solution, the frame is further described as a stainless steel frame, and the outer frame, upper frame and lower frame of the stainless steel frame include multiple thick steel frames.

[0012] In the above technical solution, the adjustable hydrogen flame torch unit further includes a torch tube, which is connected to the vehicle frame via a bracket. One end of the torch tube is provided with a feeding connector, and the torch tube is provided with multiple high-pressure nozzles for spraying hydrogen flame.

[0013] In the above technical solution, the adjustable hydrogen flame torch unit further includes multiple independent torch tubes, and each torch tube is provided with a high-pressure nozzle, and adjacent torch tubes are connected by a flexible hose.

[0014] In the above technical solution, the bracket is further defined as a height-adjustable bracket, which includes a nut fixed to the vehicle frame and a screw threadedly engaged with the nut.

[0015] In the above technical solution, the bottom of the bracket is provided with a clamp, which is connected to the torch tube.

[0016] In the above technical solution, the feeding connector further includes a pagoda connector and a core-filling connector, and after the pagoda connector and the core-filling connector are assembled, they are installed to the air inlet of the torch tube.

[0017] In the above technical solution, the graphite plate is further described as a high-purity graphite plate.

[0018] Beneficial effects:

[0019] 1. This invention utilizes a graphite plate to actively absorb the localized high temperatures of the blowtorch and radiate them across the entire product, upgrading the heat dissipation source from an isolated heat source to a surface-area uniform heating system, eliminating the randomness of manual heating. Simultaneously, the blowtorch layout can be dynamically adjusted according to the product size, allowing the position and angle of the blowtorch's hydrogen flame to be dynamically configured based on the heating needs of different areas of the product, achieving adaptive temperature control for a given area of ​​quartz boat.

[0020] 2. This invention improves the surface quality of the quartz boat and reduces the probability of contamination by continuously heating and maintaining the temperature with a high-purity graphite plate and a hydrogen flame.

[0021] 3. The quartz boat of this invention can be directly transported after processing, improving transport efficiency, while avoiding direct contact with the human body, thus enhancing safety. The multi-layered frame of the work cart enables batch transport, and auxiliary supports or extension plates can be added via bolt connections to transport large-sized products.

[0022] 4. This invention eliminates the need for manual heating, enabling single-person operation of the entire process, reducing labor costs and workplace injury risks, and shortening the processing cycle. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the semiconductor quartz boat heating vehicle provided by the present invention.

[0025] Figure 2 An exploded view of the semiconductor quartz boat heating vehicle provided for this invention.

[0026] Figure 3 An exploded view of the adjustable hydrogen flame torch unit of the semiconductor quartz boat heating vehicle provided by the present invention.

[0027] In the diagram: 100, frame; 110, outer frame; 120, upper frame; 130, lower frame; 140, floor plate; 200, adjustable hydrogen flame torch unit; 210, torch tube; 220, bracket; 230, high-pressure nozzle; 240, pagoda connector; 250, filler connector; 260, air inlet; 300, graphite plate; 400, wheel system; 410, directional wheel; 420, swivel wheel; 430, brake pedal. Detailed Implementation

[0028] The invention will be more readily understood by referring to the following detailed description of preferred embodiments and included examples. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. In case of conflict, the definitions in this specification shall prevail.

[0029] This invention provides a semiconductor quartz boat heating trolley, solving the problems of uneven heating leading to quartz boat breakage when manually spraying the boat with a handheld spray gun, and the formation of crystallization and pitting during annealing after heating with a handheld spray gun. More importantly, it addresses the need for immediate annealing after heating; this invention allows for direct transfer to the annealing workshop via the trolley after heating, eliminating the need for manual handling, thus improving both efficiency and safety.

[0030] The technical concept of this invention lies in creating a uniform thermal field by combining an adjustable hydrogen flame torch unit with a high-purity graphite plate, thereby solving the problems of uneven thermal stress, high contamination rate, and dangerous manual operation in semiconductor quartz boat fire processing. At the same time, the low center of gravity vehicle structure prevents the work vehicle from tipping over, thus achieving safe and efficient integrated processing and transportation.

[0031] like Figure 1-3 As shown, a semiconductor quartz boat heating work vehicle includes:

[0032] The frame 100 has a low center of gravity, which can effectively prevent tipping over;

[0033] An adjustable hydrogen flame torch unit 200 is installed inside the frame 100. Its hydrogen flame is directed towards the product to be heated. The graphite plate 300 is heated by the adjustable hydrogen flame torch unit 200, eliminating the need for manual hand-held flame heating, which can effectively improve safety. At the same time, the adjustable hydrogen flame torch unit 200 can adjust the distance from the graphite plate 300 and the air intake, thereby dynamically adjusting the size and distribution of the hydrogen flame to ensure uniform heating of the product to be heated.

[0034] A graphite plate 300 is horizontally laid above the frame 100, and the product to be heated is located above the graphite plate 300. The graphite plate 300 is used to convert the point heat source of the adjustable hydrogen flame torch unit 200 into a surface heat field to heat the product. The graphite plate 300 serves two purposes: firstly, it supports the quartz boat; secondly, it converts the point heat source of the torch unit into a uniform surface heat source, ensuring that the quartz boat placed on it is heated evenly. This eliminates the problems of localized overheating and large temperature gradients in different areas of the quartz boat, effectively reducing the risk of the quartz boat breaking due to thermal stress.

[0035] It should also be noted that, due to its enormous heat capacity, the graphite plate 300 does not experience drastic temperature fluctuations after being heated. Even with minor adjustments to the blowtorch flame or movement of the product, it can continuously and stably radiate heat to the product, maintaining the required processing temperature and thus ensuring temperature stability. Furthermore, the presence of the graphite plate 300 achieves global high temperature; when water vapor generated by the blowtorch comes into contact with the high-temperature quartz boat surface, it cannot condense into liquid water but will directly evaporate in gaseous form, effectively preventing the subsequent pitting and crystallization.

[0036] Furthermore, a wheel system 400 is provided at the bottom of the frame 100. The wheel system 400 includes directional wheels 410 and omnidirectional wheels 420, and at least the omnidirectional wheels 420 have a brake pedal 430. In one embodiment, two directional wheels 410 and two omnidirectional wheels 420 are provided, which are located at the bottom of the frame 100. By providing a brake pedal 430 on the omnidirectional wheels 420, braking can be applied during heating to prevent the platform from moving and improve safety. In addition, in this embodiment, the directional wheels 410 are used to control the speed of the vehicle, while the omnidirectional wheels 420 are used to control the direction and movement. Through the cooperation of the omnidirectional wheels 420 and the directional wheels 410, efficient subsequent transfer to the unloading workshop can be achieved without manual handling, improving efficiency and ensuring safety.

[0037] Furthermore, the frame 100 includes an outer frame 110100, an upper frame 120100, and a lower frame 130100, wherein a detachable base plate 140 is disposed above the lower frame 130100 and inside the outer frame 110100. The outer frame 110100 is used to fix the frame of the workbench, the upper frame 120100 is used to place the high-purity graphite plate 300, and the lower part of the upper frame 120100 is used to install the adjustable hydrogen flame torch unit 200. The lower frame 100 is used to place the detachable base plate 140 and to install the wheel system 400.

[0038] In this embodiment, the outer frame 100 serves as the skeleton of the entire work vehicle, welded from relatively thick stainless steel square tubing to form a robust three-dimensional frame. The upper frame 120100 is composed of four thick steel beams, ensuring a large load-bearing area and guaranteeing that the high-purity graphite plate 300 placed on it maintains extremely high flatness and levelness, which is more conducive to the uniform heating of the semiconductor quartz boat, which requires high parallelism and perpendicularity. At the same time, by placing the heavy stainless steel base plate 140 on the lower frame, the center of gravity of the entire work vehicle is effectively lowered, achieving stable turnover and preventing tipping. The lower frame is also composed of thick steel beams. Furthermore, due to the low center of gravity of the work vehicle, even without applying the brake pedal 430, the basic stability of the work vehicle under minor external forces can be guaranteed.

[0039] Furthermore, the adjustable hydrogen flame torch unit 200 includes a torch tube 210, which is connected to the frame 100 via a bracket 220. One end of the torch tube 210 is provided with a feeding connector, which includes a pagoda connector 240 and a core connector 250. After the pagoda connector 240 and the core connector 250 are assembled, they are installed at the air inlet 260 of the torch tube 210. The torch tube 210 is provided with multiple high-pressure nozzles 230, which are used to spray hydrogen flame. In one embodiment, the bracket 220 is a height-adjustable bracket, which allows adjustment of the distance between the torch unit and the bottom of the graphite plate 300, thereby adjusting the local heating temperature. Simultaneously, the adjustable bracket 220 can heat quartz boats of different heights and specifications. It is understood that when encountering taller products, simply raising the bracket 220 restores the optimal heating distance, ensuring that products of various specifications are within the optimal heating area. This allows a single work vehicle to adapt to the processing needs of various products on the production line, making it highly versatile.

[0040] In this embodiment, the bracket 220 includes a nut fixed to the frame 100 and a screw threaded to the nut. When the height needs to be adjusted, only the corresponding adjusting screw is needed.

[0041] Furthermore, the adjustable hydrogen flame torch unit 200 includes multiple independent torch tubes 210, and each torch tube 210 is equipped with a high-pressure nozzle 230. Adjacent torch tubes 210 are connected by flexible hoses. Meanwhile, the bottom of the bracket 220 is equipped with a clamp connected to the torch tube 210. By adjusting the position of the torch tube 210 within the clamp, the nozzle angle can be adjusted. Combined with the height-adjustable bracket 220, multiple torch tubes 210 can be independently adjusted to meet different usage requirements. For example, in one embodiment, during the heating process, the edges of the work vehicle or the ends of the quartz boat dissipate heat faster, easily forming cold zones. By increasing the air intake of the torches corresponding to these areas to enhance the flame or by moving the corresponding torch unit closer to the graphite plate 300 at the corresponding position, heat compensation can be achieved, ensuring uniform overall temperature.

[0042] Furthermore, the graphite plate 300 is a high-purity graphite plate 300. In one embodiment, the purity of the graphite plate 300 is greater than 99.999%, which is 5N purity. This effectively reduces the volatilization and deposition of impurities in the graphite onto the surface of the quartz boat being processed at high temperatures, thus preventing contamination of the quartz boat surface.

[0043] Working Principle: At the workstation in the processing workshop, step on the bottom caster pedals to prevent movement. Fix the stainless steel torch to the four stainless steel supports 220 of the upper frame 120100 using brackets 220. Ensure that the high-pressure nozzle 230 is parallel to the high-purity graphite plate 300 placed on the top frame, with an adjustable distance. Select a high-purity graphite plate 300 with good flatness and place it on the top frame. Place the quartz boat to be processed and the graphite jig for auxiliary processing on the high-purity graphite plate 300. When starting to weld parts and perform overall flame polishing, open the high-pressure nozzle 230 to inject flame. The air intake of each high-pressure nozzle 230 can be adjusted independently or in groups, thereby dynamically adjusting the size and distribution of the hydrogen flame in real time according to the specific heat requirements of the processing stage and different product specifications, ensuring uniform heating of the product.

[0044] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A semiconductor quartz boat heating work vehicle, characterized in that, include: The vehicle frame has a low center of gravity; An adjustable hydrogen flame torch unit is provided inside the vehicle frame, with its hydrogen flame directed toward the product to be heated. A graphite plate is horizontally laid above the vehicle frame, and the product to be heated is located above the graphite plate. The graphite plate is used to convert the point heat source of the adjustable hydrogen flame torch unit into a surface heat field to heat the product to be heated.

2. The work vehicle according to claim 1, characterized in that, The bottom of the frame is provided with a wheel system, which includes fixed wheels and swivel wheels, and at least the swivel wheels have brake pedals.

3. The work vehicle according to claim 1, characterized in that, The vehicle frame includes an outer frame, an upper frame, and a lower frame, wherein a removable base plate is provided above the lower frame and inside the outer frame.

4. The work vehicle according to claim 3, characterized in that, The frame is a stainless steel frame, and the outer frame, upper frame and lower frame of the stainless steel frame include multiple thick steel frames.

5. The work vehicle according to claim 1, characterized in that, The adjustable hydrogen flame torch unit includes a torch tube, which is connected to the vehicle frame via a bracket. One end of the torch tube is provided with a feeding connector, and the torch tube is provided with multiple high-pressure nozzles for spraying hydrogen flame.

6. The work vehicle according to claim 5, characterized in that, The adjustable hydrogen flame torch unit includes multiple independent torch tubes, and each torch tube is equipped with a high-pressure nozzle. Adjacent torch tubes are connected by flexible hoses.

7. The work vehicle according to claim 5, characterized in that, The bracket is a height-adjustable bracket, which includes a nut fixed to the vehicle frame and a screw threadedly engaged with the nut.

8. The work vehicle according to claim 5, characterized in that, The bottom of the bracket is provided with a clamp, which is connected to the torch tube.

9. The work vehicle according to claim 5, characterized in that, The feeding connector includes a pagoda connector and a core-filling connector, and after the pagoda connector and the core-filling connector are assembled, they are installed into the air inlet of the torch tube.

10. The work vehicle according to claim 1, characterized in that, The graphite plate is a high-purity graphite plate.

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