A corona-based streamer discharge intense pre-ionization pulsed gas laser

Abstract

This application relates to the field of laser technology and discloses a corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser, including a main frame chamber. A pre-ionization device is fixedly installed on the top of the main frame chamber, and a cathode electrode is provided on the top of the main frame chamber. A connecting copper plate is fixedly installed on the upper side of the inner wall of the main frame chamber, and a guide plate is fixedly installed on the connecting copper plate. An anode electrode is fixedly installed on the top of the guide plate. In this corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser, the pre-ionization device and its structure can form a pre-ionization region on the pre-ionization device. Under the action of an electric field, electrons in the pre-ionization region accelerate. During this motion, electrons collide with other gas particles inelastically and undergo ionization or excitation, thereby generating a high-concentration and uniform initial electron and forming a micro-discharge channel, providing a continuous supply of seed electrons to its core discharge region.

Description

Technical Field

[0001] This application relates to the field of laser technology, and more particularly to a corona-based surface spark discharge strong pre-ionization pulsed gas laser. Background Technology

[0002] An excimer laser is a high-power pulsed laser that uses a mixture of inert and halogen gases as its working medium. Due to its short wavelength, low thermal damage, and high processing resolution, it is widely used in semiconductor lithography, medical surgery, and materials processing.

[0003] Among them, the laser pulse output energy of the excimer laser depends on the degree of pre-ionization of the gas medium, that is, on the electron concentration and distribution state at the beginning of the discharge. Corona pre-ionization is one of the mainstream technologies. The basic principle is to set an auxiliary pre-ionization electrode on the side or below the main discharge electrode and apply a high voltage pulse to form a strong electric field at the tip or edge of the electrode, thereby causing local corona discharge to generate ultraviolet radiation.

[0004] However, traditional corona pre-ionization devices treat the pre-ionization process as a single, instantaneous event. Consequently, during long-pulse discharge, the seed electrons generated by the initial pre-ionization rapidly decay due to attachment, recombination, and diffusion effects. This results in insufficient pre-ionization in the latter half of the discharge and triggers arc discharge, making the discharge unstable or even terminated. This severely limits the effective extraction of laser energy. Furthermore, due to structural defects in traditional corona pre-ionization devices, the pre-ionization intensity and initial electron concentration are low, making it difficult to generate uniform glow discharge. This, in turn, seriously affects the laser gain and output stability of the excimer laser.

[0005] Therefore, there is an urgent need for a pre-ionization device for excimer lasers to solve the defects of the existing corona pre-ionization devices in practical use. Summary of the Invention

[0006] This application proposes a corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser, which has the advantage of generating a high concentration of pre-ionized electrons and forming a uniformly distributed initial electron cloud to provide a continuous supply of seed electrons for its core discharge region, ensuring the stability of long-pulse glow discharge. This addresses the problem that traditional corona pre-ionization devices treat the pre-ionization process as a momentary, single event, which leads to the rapid decay of seed electrons generated during the initial pre-ionization in the long-pulse discharge process due to adhesion, recombination, and diffusion effects. This results in insufficient pre-ionization in the second half of the discharge and triggers arc discharge, making the discharge unstable or even terminated, severely limiting the effective extraction of laser energy. Furthermore, the generated pre-ionization intensity is low and the initial electron concentration is low, making it difficult to generate uniform glow discharge.

[0007] To achieve the above objectives, this application adopts the following technical solution: a corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser, comprising a main frame chamber. The interior of the main frame chamber is designed as a hollow structure extending from left to right for installing various electrical components. A high-voltage pulse excitation source is fixedly installed at the top of the main frame chamber, and a set of outer end caps for sealing the inner cavity are fixedly installed at the left and right ends of the main frame chamber. A set of elongated cylindrical pre-ionization devices are fixedly installed on the left and right sides of the top of the inner cavity of the main frame chamber, forming a pre-ionization region between the two sets of pre-ionization devices. Under the action of the electric field, electrons in the pre-ionization region accelerate. During the motion, electrons collide with other gas particles inelastically and undergo ionization or excitation, thereby generating a high-concentration and uniform initial electron and forming a micro-discharge channel. The top of the inner cavity of the main frame chamber... A cathode electrode electrically connected to a high-voltage pulse excitation source is located above the vertical line of the two sets of pre-ionization devices. High-voltage pulse energy can then be provided to the cathode electrode through the high-voltage pulse excitation source. A connecting copper plate is fixedly installed on the upper side of the inner wall of the main frame, and a guide plate is fixedly installed on the connecting copper plate. Under the action of the connecting copper plate and the guide plate, the renewal and heat dissipation of the gas working medium between the two sets of pre-ionization devices are accelerated, and the generated waste gas enters the circulation more quickly, thus maintaining stable energy. A grounded anode electrode is fixedly installed at the top of the guide plate, below the vertical line of the two sets of pre-ionization devices. A potential difference can be generated between the two sets of pre-ionization devices through the cathode and anode electrodes, resulting in a discharge phenomenon. Combined with the high concentration of seed electrons between the two sets of pre-ionization devices, a stable glow discharge phenomenon is generated, thereby exciting the laser.

[0008] Furthermore, the pre-ionization device includes a grounding metal rod fixedly mounted at both ends on two sets of outer end caps, with both sides of the grounding metal rod grounded. A grounding copper ring is fitted onto the middle of the outer surface of the grounding metal rod, and the grounding copper ring has a threaded hole inside and is fixedly connected to the grounding metal rod through a set screw, so that it can be grounded together with the grounding metal rod. A set of alumina ceramic tubes with a wall thickness of 1-3mm is fitted onto the outer surface of the grounding metal rod and on both sides of the grounding copper ring. Several sets of pre-ionization units arranged in a linear array are fitted onto the outer surface of the alumina ceramic tubes, and the pre-ionization units on the two sets of alumina ceramic tubes are symmetrically arranged. Each pre-ionization unit consists of a ceramic positioning ring and a discharge copper ring, and the ceramic positioning ring serves as a... The insulating medium of the front and rear discharge copper rings is such that one end face of each discharge copper ring sequentially contacts and forms a conductive connection with a high-voltage connector sleeved on one side of the outer surface of the alumina ceramic tube. The high-voltage connector is connected to an external high-voltage line. During the connection process, the gas working medium around the cathode electrode is ionized and a uniformly distributed high concentration of initial electrons is formed. The other end face of each discharge copper ring sequentially contacts and connects to the grounding copper ring. The ceramic positioning ring not only separates the front and rear discharge copper rings from each other, but also adjusts the spacing between each discharge copper ring to achieve the optimal spark discharge state. At the same time, it ensures that a large current discharge and arc cannot be formed between the grounding metal rod and the discharge copper rings, or between the front and rear discharge copper rings.

[0009] Furthermore, the outer surface of the discharge copper ring, facing the cathode electrode, is provided with a rectangular tip. When the grounding copper ring is connected to high voltage, the alumina ceramic tube acts as the insulating medium between the grounding metal rod and the discharge copper ring, while the ceramic positioning ring acts as the insulating medium between the front and rear discharge copper rings. A strong electric field is generated between the discharge copper ring and the grounding metal rod. Then, the rectangular tip of the rear discharge copper ring and the end face of the front discharge copper ring will produce a surface spark discharge phenomenon, which is transmitted level by level, further ensuring that it can generate a uniformly distributed high concentration of initial electrons. At the same time, it ensures that the grounding metal rod and the discharge copper ring will not be broken down and connected.

[0010] Furthermore, a connector sleeve is fitted on the outer surface of the high-voltage connector and fixedly installed inside the outer end cover. The high-voltage connector has a threaded hole and is fixed to the alumina ceramic tube by a set screw. This ensures that the discharge copper ring and the high-voltage connector are electrically connected, while preventing leakage or short circuit.

[0011] Furthermore, a ceramic fixing plate is provided between the connection end face between the main frame chamber and the high-voltage pulse excitation source, and multiple sealing ring grooves are opened on the ceramic fixing plate to assemble the sealing rings. This can effectively prevent the leakage of the gas working medium in the main frame chamber when the laser is working. The ceramic fixing plate also serves as an insulation to prevent discharge or surface creep of the alumina ceramic tube.

[0012] Furthermore, a constant flow fan is fixedly installed on the right side of the bottom of the main frame chamber. The constant flow fan, together with the guide plate, can effectively accelerate the flow of the working gas medium in the main frame chamber and further accelerate the renewal of the working gas medium between the two sets of pre-ionization devices. A dust removal device is fixedly installed on the left side of the bottom of the main frame chamber. The dust removal device can remove the dust and metal particles generated in the main frame chamber during laser operation, effectively reducing the damage to the laser mirror and greatly extending the working life of the laser.

[0013] Furthermore, the dust removal device is equipped with multiple electrostatic dust removal tubes inside. Each electrostatic dust removal tube includes a connecting frame, and a rotating frame is movably sleeved inside the connecting frame. An electrode sleeve with its end connected to the negative terminal of an external high-voltage line is movably sleeved inside the rotating frame. A high-voltage electrostatic field is generated inside the rotating frame through the electrode sleeve, causing the dust and metal particles entering the frame to become negatively charged and tend to the positively charged connecting frame, thereby effectively removing the dust and metal particles generated in the main frame chamber during laser operation.

[0014] Furthermore, the connecting frame includes two sets of limiting bushings, and a dust collection plate connected to the positive terminal of an external high-voltage line is fixedly installed between the two sets of limiting bushings, thereby adsorbing and accumulating negatively charged dust and metal particles on the inner wall of the positively charged dust collection plate. The outer end face of the dust collection plate is provided with a connecting plate and fixedly connected to the dust removal device. The rotating frame includes a rotating sleeve whose ends are respectively movably sleeved in the two sets of limiting bushings. One end of the rotating sleeve is provided with a linkage gear and is connected to the output shaft of the constant flow fan through a toothed belt drive. Thus, when the constant flow fan is triggered, the rotating sleeve can be driven to rotate. Several sets of partition plates arranged in a ring array are fixedly installed on the outer surface of the rotating sleeve. When the partition plates rotate, they slide and rub against the inner wall of the dust collection plate, thereby scraping off the dust and metal particles accumulated and adsorbed on the inner wall of the dust collection plate under the action of the partition plates.

[0015] Furthermore, a number of first chip removal grooves are provided on one side of the outer surface of the rotating sleeve, and the first chip removal grooves are arranged alternately between two adjacent sets of partition plates. A second chip removal groove is provided on the outer surface of the electrode sleeve facing the dust collection plate. During the rotation of the rotating sleeve, the first chip removal groove and the second chip removal groove are interconnected. At the same time, a number of through holes arranged in a ring array are provided on one side of the end of the rotating sleeve. A connecting pipe connected to the air outlet of the constant flow fan is fixedly installed on the end of the right-side limiting bushing near the dust collection plate. When the laser is in operation, air can be blown into the cavity formed by the two adjacent sets of partition plates and the dust collection plate through the connecting pipe, and the dust and metal particles scraped off by the partition plates are cleaned out through the second chip removal groove and the first chip removal groove, so that they do not accumulate inside the electrostatic dust removal tube. This can effectively maintain the dust removal effect and efficiency of the dust removal device for dust and metal particles, further reduce the damage to the laser mirror, and effectively extend the working life of the laser.

[0016] The beneficial effects of this invention are as follows:

[0017] 1. This application provides a corona-based surface spark discharge high pre-ionization pulsed gas laser. The arrangement of the pre-ionization device and its structure can form a pre-ionization region between two sets of pre-ionization devices. Under the action of the electric field, the electrons in the pre-ionization region accelerate. During the movement, the electrons collide with other gas particles inelasticly and are ionized or excited, thereby generating a high concentration and uniform initial electrons and forming a micro-discharge channel. This provides a continuous source of seed electrons for the core discharge region, thus effectively ensuring the stability of long-pulse glow discharge in the laser.

[0018] 2. The corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser provided in this application, with its dust removal device and electrostatic dust removal tube, can remove dust and metal particles generated by the laser during operation by using electrostatic dust removal. Air can be blown into the chamber formed by two adjacent sets of partition plates and dust collection plates through connecting pipes, and the dust and metal particles scraped off by the partition plates are cleaned out through the second and first chip removal grooves, preventing them from accumulating inside the electrostatic dust removal tube. This effectively maintains the dust removal device's cleaning effect and efficiency for dust and metal particles, reduces damage to the laser mirror surface, and effectively extends the laser's working life. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort:

[0020] Figure 1 This is a schematic diagram of the excimer laser of the present invention;

[0021] Figure 2 This is a front view of the excimer laser of the present invention;

[0022] Figure 3 For the present invention Figure 2 Sectional view at point AA;

[0023] Figure 4 This is a schematic diagram of the pre-ionization device of the present invention;

[0024] Figure 5 For the present invention Figure 4 Left side view;

[0025] Figure 6 For the present invention Figure 4 Sectional view at point BB;

[0026] Figure 7 This is a schematic diagram of the dust removal device of the present invention;

[0027] Figure 8 This is a schematic diagram of the connecting frame of the present invention;

[0028] Figure 9 This is a schematic diagram of the rotating frame of the present invention;

[0029] Figure 10 This invention is a schematic diagram of the structure of an electrode sleeve.

[0030] In the diagram: 1-Main frame chamber, 2-High voltage pulse excitation source, 3-Outer end cover, 4-Pre-ionization device, 5-Cathode electrode, 6-Anode electrode, 7-Connecting copper sheet, 8-Guide plate, 9-Constant flow fan, 10-Dust removal device, 11-Grounding metal rod, 12-Alumina ceramic tube, 13-Joint sleeve, 14-Ceramic positioning ring, 15-Discharge copper ring, 16-Grounding copper ring, 17-High voltage connector, 18-Connecting frame, 19-Rotating frame, 20-Electrode sleeve, 21-Limiting bushing, 22-Dust collection plate, 23-Connecting plate, 24-Connecting pipeline, 25-Linkage gear, 26-Rotating sleeve, 27-Separator plate, 28-Through hole, 29-First chip removal groove, 30-Second chip removal groove. Detailed Implementation

[0031] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] like Figure 1 As shown, a corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser includes a main frame chamber 1. The interior of the main frame chamber 1 is a hollow structure extending from left to right for mounting various electrical components. A high-voltage pulse excitation source 2 is fixedly installed at the top of the main frame chamber 1, and a set of outer end caps 3 for sealing the internal cavity are fixedly installed at both ends of the main frame chamber 1. Figure 2 , Figure 3 As shown, a set of elongated cylindrical pre-ionization devices 4 are fixedly installed on the left and right sides of the top of the main frame chamber 1, forming a pre-ionization region between the two sets of pre-ionization devices 4. Under the action of the electric field, electrons in the pre-ionization region accelerate. During the movement, electrons collide with other gas particles inelasticly and undergo ionization or excitation, thereby generating a high concentration and uniform initial electrons and forming a micro-discharge channel. A cathode electrode 5 electrically connected to the high-voltage pulse excitation source 2 is provided at the top of the main frame chamber 1 and above the vertical line between the two sets of pre-ionization devices 4. High-voltage pulse energy can then be provided to the cathode electrode 5 through the high-voltage pulse excitation source 2. The side of the inner wall of the main frame chamber 1 A connecting copper plate 7 is fixedly installed above, and a guide plate 8 is fixedly installed on the connecting copper plate 7. Under the action of the connecting copper plate 7 and the guide plate 8, the gas working medium between the two sets of pre-ionization devices 4 is updated and cooled, and the waste gas generated therein enters the circulation faster, thereby keeping the energy stable. A grounded anode electrode 6 is fixedly installed at the top of the guide plate 8 and below the vertical line between the two sets of pre-ionization devices 4. Through the cathode electrode 5 and the anode electrode 6, a potential difference can be generated between the two sets of pre-ionization devices 4 and a discharge phenomenon can occur. With the high concentration of seed electrons between the two sets of pre-ionization devices 4, a stable glow discharge phenomenon is generated, thereby exciting the laser.

[0033] like Figure 1 , Figure 3 as well as Figures 4-6As shown, in this technical solution, the pre-ionization device 4 includes a grounding metal rod 11 with both ends fixedly mounted on two sets of outer end caps 3, and the grounding metal rod 11 is grounded on both sides. A grounding copper ring 16 is sleeved on the middle of the outer surface of the grounding metal rod 11, and the grounding copper ring 16 has a threaded hole inside and is fixedly connected to the grounding metal rod 11 through a set screw, so that it can be grounded together with the grounding metal rod 11. A set of alumina ceramic tubes 12 with a wall thickness of 1-3mm are sleeved on the outer surface of the grounding metal rod 11 and on both sides of the grounding copper ring 16. Several sets of pre-ionization units arranged in a linear array are sleeved on the outer surface of the alumina ceramic tubes 12, and the pre-ionization units on the two sets of alumina ceramic tubes 12 are symmetrically arranged. The pre-ionization unit is composed of a ceramic positioning ring 14 and a discharge copper ring 15, and the ceramic positioning ring 14 serves as a... The insulating medium of the front and rear discharge copper rings 15, and one side end face of each discharge copper ring 15 sequentially contacts and forms a conductive connection with the high voltage connector 17 sleeved on one side of the outer surface of the alumina ceramic tube 12. The high voltage connector 17 is connected to the external high voltage line. Thus, during the connection process, the gas working medium around the cathode electrode 5 can be ionized by the discharge copper rings 15 and a uniformly distributed high concentration of initial electrons can be formed. The other side end face of each discharge copper ring 15 sequentially contacts and connects with the grounding copper ring 16. The ceramic positioning ring 14 not only separates the front and rear discharge copper rings 15 from each other, but also adjusts the spacing between each discharge copper ring 15 to achieve the best spark discharge state. At the same time, it ensures that a large current discharge and arcing cannot be formed between the grounding metal rod 11 and the discharge copper rings 15, or between the front and rear discharge copper rings 15.

[0034] like Figures 3-5 As shown, in this technical solution, the outer surface of the discharge copper ring 15 and the side facing the cathode electrode 5 are provided with a rectangular tip. When the grounding copper ring 16 is connected to high voltage, the alumina ceramic tube 12 serves as the insulating medium between the grounding metal rod 11 and the discharge copper ring 15, while the ceramic positioning ring 14 serves as the insulating medium between the front and rear discharge copper rings 15. A strong electric field is generated between the discharge copper ring 15 and the grounding metal rod 11. Then, the rectangular tip of the rear discharge copper ring 15 and the end face of the front discharge copper ring 15 will produce a surface spark discharge phenomenon, which is transmitted level by level, further ensuring that it can generate a uniformly distributed high concentration of initial electrons. At the same time, it ensures that the grounding metal rod 11 and the discharge copper ring 15 will not be broken down and connected.

[0035] like Figure 1 , Figure 4 as well as Figure 5As shown, in this technical solution, a connector sleeve 13 is fitted on the outer surface of the high-voltage connector 17 and fixedly installed inside the outer end cover 3. The high-voltage connector 17 has a threaded hole and is fixed to the alumina ceramic tube 12 by a set screw. This ensures that the discharge copper ring 15 and the high-voltage connector 17 are electrically connected, while preventing leakage or short circuit.

[0036] In this technical solution, a ceramic fixing plate is provided between the connection end face between the main frame chamber 1 and the high-voltage pulse excitation source 2, and multiple sealing ring grooves are opened on the ceramic fixing plate to assemble the sealing rings. This can effectively prevent the leakage of the gas working medium in the cavity of the main frame chamber 1 when the laser is working. The ceramic fixing plate can also serve as an insulation to prevent discharge or surface creep in the cavity of the alumina ceramic tube 12.

[0037] like Figure 3 As shown, in this technical solution, a constant flow fan 9 is fixedly installed on the right side of the bottom of the main frame chamber 1. The constant flow fan 9, together with the guide plate 8, can effectively accelerate the flow of the working gas medium in the main frame chamber 1 and further accelerate the renewal of the working gas medium between the two sets of pre-ionization devices 4. A dust removal device 10 is fixedly installed on the left side of the bottom of the main frame chamber 1. The dust removal device 10 can remove the dust and metal particles generated in the main frame chamber 1 during laser operation, effectively reducing the damage to the laser mirror and greatly extending the working life of the laser.

[0038] like Figure 3 , Figure 7 As shown, in this technical solution, the dust removal device 10 is equipped with multiple electrostatic dust removal tubes. Each electrostatic dust removal tube includes a connecting frame 18, and a rotating frame 19 is movably connected inside the connecting frame 18. An electrode sleeve 20, the end of which is connected to the negative terminal of an external high-voltage line, is movably connected inside the rotating frame 19. A high-voltage electrostatic field is generated on the rotating frame 19 through the electrode sleeve 20, causing the dust and metal particles entering the rotating frame 19 to become negatively charged and tend to the positively charged connecting frame 18, thereby effectively removing the dust and metal particles generated in the main frame chamber 1 during laser operation.

[0039] like Figures 7-9As shown, in this technical solution, the connecting frame 18 includes two sets of limiting bushings 21, and a dust collection plate 22 connected to the positive terminal of an external high-voltage line is fixedly installed between the two sets of limiting bushings 21, thereby adsorbing and accumulating negatively charged dust and metal particles on the inner wall of the positively charged dust collection plate 22. The outer end face of the dust collection plate 22 is provided with a connecting plate 23, which is fixedly connected to the dust removal device 10. The rotating frame 19 includes a rotating sleeve 26 whose ends are respectively movably sleeved in the two sets of limiting bushings 21. One end of the rotating sleeve 26 is provided with a linkage gear 25 and is connected to the output shaft of the constant flow fan 9 through a toothed belt drive. Thus, when the constant flow fan 9 is triggered, the rotating sleeve 26 can be driven to rotate. Several sets of partition plates 27 arranged in a ring array are fixedly installed on the outer surface of the rotating sleeve 26. When the partition plates 27 rotate, they slide and rub against the inner wall of the dust collection plate 22, thereby scraping off the dust and metal particles accumulated and adsorbed on the inner wall of the dust collection plate 22 under the action of the partition plates 27.

[0040] like Figure 3 , Figures 7-10 As shown, in this technical solution, a plurality of first chip removal grooves 29 are provided on one side of the outer surface of the rotating sleeve 26, and the first chip removal grooves 29 are arranged alternately between two adjacent sets of partition plates 27. A second chip removal groove 30 is provided on the outer surface of the electrode sleeve 20 facing the dust collection plate 22. During the rotation of the rotating sleeve 26, the first chip removal grooves 29 and the second chip removal grooves 30 are interconnected and alternately connected. Simultaneously, a plurality of through holes 28 arranged in a ring array are provided on one side of the end of the rotating sleeve 26. The end of the right-side limiting bushing 21, near the dust collection plate 22, is fixed... A connecting pipe 24 is fixedly installed, with one end connected to the air outlet of the constant flow fan 9. When the laser is in operation, air can be blown into the chamber formed by the two adjacent sets of partition plates 27 and dust collection plates 22 through the connecting pipe 24. The dust and metal particles scraped off by the partition plates 27 are cleaned out through the second chip removal groove 30 and the first chip removal groove 29, so that they do not accumulate inside the electrostatic dust removal tube. This can effectively maintain the dust removal effect and efficiency of the dust removal device 10 in removing dust and metal particles, further reduce the damage to the laser mirror, and effectively extend the working life of the laser.

[0041] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser, comprising a main frame chamber (1), wherein a high-voltage pulse excitation source (2) is fixedly installed at the top of the main frame chamber (1), and a set of outer end caps (3) are fixedly installed at the left and right ends of the main frame chamber (1), characterized in that: A set of pre-ionization devices (4) are fixedly installed on the left and right sides of the top of the main frame chamber (1), and a pre-ionization area is formed between the two sets of pre-ionization devices (4). A cathode electrode (5) electrically connected to the high-voltage pulse excitation source (2) is provided at the top of the main frame chamber (1) and above the vertical line of the two sets of pre-ionization devices (4). A connecting copper sheet (7) is fixedly installed on the upper side of the inner wall of the main frame chamber (1), and a guide plate (8) is fixedly installed on the connecting copper sheet (7). A grounded anode electrode (6) is fixedly installed at the top of the guide plate (8) and below the vertical line of the two sets of pre-ionization devices (4).

2. The corona-based surface spark discharge high-intensity pre-ionization pulsed gas laser according to claim 1, characterized in that, The pre-ionization device (4) includes a grounding metal rod (11) with both ends fixedly mounted on two sets of outer end caps (3), and both sides of the grounding metal rod (11) are grounded. A grounding copper ring (16) is sleeved in the middle of the outer surface of the grounding metal rod (11). A set of alumina ceramic tubes (12) are sleeved on the outer surface of the grounding metal rod (11) and on both sides of the grounding copper ring (16). Several sets of pre-ionization units are sleeved on the outer surface of the alumina ceramic tubes (12), and the two sets of alumina ceramic tubes (12) are... The pre-ionization units on the ceramic tube (12) are arranged symmetrically. The pre-ionization unit consists of a ceramic positioning ring (14) and a discharge copper ring (15). The ceramic positioning ring (14) serves as the insulating medium for the front and rear discharge copper rings (15). One side of each discharge copper ring (15) contacts and forms a conductive connection with the high-voltage connector (17) sleeved on one side of the outer surface of the alumina ceramic tube (12). The other side of each discharge copper ring (15) contacts and connects to the grounding copper ring (16).

3. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 2, characterized in that, The outer surface of the discharge copper ring (15) and the side facing the cathode electrode (5) are provided with a rectangular tip.

4. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 3, characterized in that, The high-pressure connector (17) is fitted with a connector sleeve (13) that is fixedly installed inside the outer end cover (3) on its outer surface. The high-pressure connector (17) has a threaded hole and is fixed to the alumina ceramic tube (12) by a set screw.

5. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 4, characterized in that, A ceramic fixing plate is provided between the connection end face of the main frame chamber (1) and the high voltage pulse excitation source (2), and multiple sealing ring grooves are opened on the ceramic fixing plate to assemble the sealing rings.

6. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 1, characterized in that, A constant flow fan (9) is fixedly installed on the right side of the bottom of the main frame chamber (1), and a dust removal device (10) is fixedly installed on the left side of the bottom of the main frame chamber (1).

7. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 6, characterized in that, The dust removal device (10) is equipped with an electrostatic dust removal tube inside. The electrostatic dust removal tube includes a connecting frame (18), and a rotating frame (19) is movably sleeved inside the connecting frame (18). An electrode sleeve (20) is movably sleeved inside the rotating frame (19).

8. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 7, characterized in that, The connecting frame (18) includes two sets of limiting bushings (21), and a dust collection plate (22) is fixedly installed between the two sets of limiting bushings (21). The outer end face of the dust collection plate (22) is provided with a connecting plate (23) and is fixedly connected to the dust removal device (10). The rotating frame (19) includes a rotating sleeve (26) whose ends are respectively movably sleeved in the two sets of limiting bushings (21). One end of the rotating sleeve (26) is provided with a linkage gear (25) and is connected to the output shaft of the constant flow fan (9) through a toothed belt drive. Several sets of partition plates (27) are fixedly installed on the outer surface of the rotating sleeve (26) and slide and rub against the inner wall of the dust collection plate (22) when the partition plate (27) rotates.

9. The corona-based surface spark discharge strong pre-ionization pulsed gas laser according to claim 8, characterized in that, A number of first chip removal grooves (29) are provided on one side of the outer surface of the rotating sleeve (26), and the first chip removal grooves (29) are arranged alternately between two adjacent sets of partition plates (27). On the outer surface of the electrode sleeve (20) and on the side facing the dust collection plate (22), a second chip removal groove (30) is provided. During the rotation of the rotating sleeve (26), the first chip removal groove (29) and the second chip removal groove (30) are interconnected. At the same time, a number of through holes (28) are provided on one side of the end of the rotating sleeve (26). A connecting pipe (24) with one end connected to the air outlet of the constant flow fan (9) is fixedly installed on the end of the right limit bushing (21) and the side close to the dust collection plate (22).

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