Efficient ozone generation system based on pulse modulation surface dielectric barrier discharge
By using pulse-modulated surface dielectric barrier discharge technology, combined with real-time monitoring and automatic adjustment of temperature and humidity sensors, the energy distribution of the ozone generation system was optimized, solving the problems of high energy consumption and poor stability in traditional methods, and achieving efficient and stable ozone generation.
Patent Information
- Application Number
- CN202511854262.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-10
- Publication Date
- 2026-03-20
AI Technical Summary
Existing ozone generation methods have shortcomings in terms of energy efficiency, stability, and ozone concentration. Traditional dielectric barrier discharge devices have continuous and uncontrollable energy input, which leads to increased gas temperature, an imbalance between ozone generation and decomposition processes, and low energy utilization.
A high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge is adopted. Through a dual-layer modulation structure of pulse modulation module and power supply module, the electronic energy enhancement and heat input are decoupled. Combined with temperature and humidity sensors for real-time monitoring and automatic adjustment, the discharge energy distribution and gas flow control are optimized to achieve efficient and stable ozone generation.
It significantly increased ozone concentration, improved ozone generation efficiency, and reduced substrate temperature, achieving a dynamic balance between stability and energy efficiency in the ozone generation process. The ozone concentration was increased by approximately 24%, and the temperature was reduced by 6-7°C.
Smart Images
Figure CN121698307A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of ozone preparation technology, specifically to a high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge. Background Technology
[0002] Currently, ozone preparation technologies mainly include electrochemical methods, ultraviolet irradiation methods, and dielectric barrier discharge (DBD) methods, which are widely used in air purification, water treatment, and food preservation. Among these, the electrochemical method generates ozone gas by applying a high potential to the anode to achieve the oxidation reaction of oxygen ions. This method has a relatively simple equipment structure and is easy to operate, but it is more suitable for liquid environments. The ultraviolet irradiation method uses ultraviolet light of a specific wavelength to irradiate air or oxygen, causing oxygen molecules to absorb light energy and decompose into oxygen atoms, which further form ozone. It has the advantages of clean process and no need for electrode material support, and is often used in indoor air purification and medical sterilization. The dielectric barrier discharge method adds a dielectric layer between electrodes, allowing the gas to form a non-equilibrium plasma in a high-voltage electric field, thereby efficiently generating ozone at room temperature and pressure. Compared with the first two methods, dielectric barrier discharge technology has advantages such as high energy conversion efficiency, fast reaction speed, high ozone concentration, and continuous operation, making it one of the most promising ozone preparation methods in current research and industrial applications. In recent years, with the deepening of plasma research, surface dielectric barrier discharge (SDBD) has been increasingly used in air purification, gas treatment and ozone generation due to its characteristics such as uniform discharge, large reaction area and easy expansion.
[0003] Although existing ozone generation methods can be applied in various scenarios, they still have significant shortcomings in terms of energy efficiency, stability, and ozone concentration. Electrochemical methods are highly efficient in liquid-phase systems, but in gas-phase environments, electrolysis efficiency is low, energy consumption is high, and electrodes are prone to aging and corrosion, making long-term stable operation difficult. Ultraviolet irradiation methods rely on photon energy for ozone generation, resulting in typically low ozone concentrations, rapid light source decay, and low energy utilization, making it difficult to meet the demands for high-concentration and high-flow-rate ozone generation. While traditional volumetric barrier discharge (SDBD) can rapidly generate ozone at room temperature and pressure, the uneven distribution of the discharge area and the tendency for local gas overheating increase the ozone thermal decomposition rate, thus reducing the overall system efficiency. Surface dielectric barrier discharge (SDBD) has significant advantages in improving discharge uniformity, but it generally uses continuous AC power, resulting in continuous and uncontrollable energy input. This causes the gas temperature to rise continuously during the discharge process, leading to an imbalance between ozone generation and decomposition, making it difficult to achieve efficient steady-state output. Furthermore, existing technologies lack a precise matching mechanism between energy deposition and gas temperature rise, limiting ozone generation efficiency and resulting in low energy utilization. Overall, current ozone generation devices generally suffer from problems such as high energy consumption, poor ozone stability, severe heat accumulation during discharge, and uneven energy distribution. Summary of the Invention
[0004] To address the aforementioned problems, this invention proposes a highly efficient ozone generation system based on pulse-modulated surface dielectric barrier discharge. This system dynamically adjusts energy input, optimizes discharge energy distribution, effectively suppresses gas overheating, and significantly improves ozone generation efficiency during the discharge process, thereby achieving a highly efficient, stable, and controllable ozone preparation process and solving the problems mentioned in the background section. The technical solution provided by this invention is as follows:
[0005] A high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge includes a circuit connection structure, a gas path connection structure, an optical detection structure, and a control structure, wherein:
[0006] Circuit connection structure: The output terminal of the pulse modulation module (2) is connected to the modulation input terminal of the power supply module (1); the high voltage output terminal of the power supply module (1) is connected to the high voltage electrode of the dielectric plate in the discharge chamber (3) through the high voltage wire, and the grounding electrode of the dielectric plate in the discharge chamber (3) is grounded; the high voltage terminal of the voltage probe (7) is connected to the high voltage output of the power supply module (1), and the low voltage terminal is connected to the oscilloscope (6).
[0007] Gas connection structure: The outlet of the air source (8) passes through the gas flow control module (9), and the outlet of the gas flow control module (9) is connected to the gas inlet of the discharge chamber (3), so that the air enters the discharge channel at a set flow rate and generates ozone after surface discharge; the top of the discharge chamber (3) is provided with a gas outlet for discharging the tail gas after ozone generation.
[0008] Optical detection structure: The mercury lamp (10) serves as the light source, and the output beam passes through the gas channel of the discharge chamber (3). The beam enters the optical fiber through the optical window on the side wall of the discharge chamber (3) and is then transmitted to the spectrometer (4) by the optical fiber. The spectrometer (4) collects the spectral data of the transmitted light and transmits the spectral data to the computer (5) through the communication interface.
[0009] Control structure: The computer (5) communicates with the lower control module through the host computer software and automatically adjusts the duty cycle, pulse frequency and flow rate of the pulse modulation module (2) and the gas flow control module (9) according to the measurement results and preset strategies.
[0010] Preferably, the oscilloscope (6) is also connected to the current output of the power supply module (1) and the output of the pulse modulation module (2) respectively, in order to monitor the current signal and the modulation signal.
[0011] Preferably, the power supply module (1) is used to provide the high-voltage excitation signal required for surface dielectric barrier discharge; the pulse modulation module (2) uses a digital delay generator DG645 to apply a low-frequency pulse envelope to the high-frequency output of the power supply module (1).
[0012] Preferably, a temperature sensor is arranged inside the dielectric plate of the discharge chamber (3) to monitor the temperature of the dielectric plate in real time.
[0013] Preferably, a humidity sensor, a drying component, and a float flow meter are added inside the gas flow control module (9). The humidity sensor and the drying component are used to adjust the humidity before entering the discharge area. The gas with qualified humidity is precisely adjusted by the float flow meter to regulate the air flow rate entering the discharge chamber (3).
[0014] Preferably, the humidity sensor uses an SHT35 digital sensor and is placed in the middle of the intake pipe, and the drying component adopts a combination structure of molecular sieve cylinder and electromagnetic bypass valve.
[0015] Preferably, the computer (5) executes a built-in concentration inversion algorithm to calculate the ozone concentration according to the Beer-Lambert law.
[0016] Preferably, the switching between high concentration or high energy efficiency modes is achieved by coupling gas flow rate, duty cycle, and frequency.
[0017] Compared with existing technologies, the beneficial effects achieved by this invention are as follows: Through a dual-layer modulation structure of "high-frequency continuous discharge + low-frequency pulse envelope," electron energy enhancement and heat input decoupling are achieved, significantly improving oxygen molecule dissociation efficiency and ozone concentration. Simultaneously, the pulse rising edge enhances transient high-energy electron density, further optimizing the ozone generation rate. The ozone concentration under this technology is increased by approximately 24% compared to traditional continuous discharge conditions, while the substrate temperature decreases by 6-7°C.
[0018] This invention incorporates a temperature sensor inside the dielectric substrate and adds a humidity monitoring module at the air inlet to achieve real-time online detection of temperature and humidity. The system can automatically adjust the pulse duty cycle and low-frequency modulation parameters based on changes in temperature and humidity to suppress temperature rise and compensate for the impact of humidity on ozone formation, thereby ensuring the stability of ozone concentration under different environmental conditions.
[0019] This invention constructs a coupled control system based on key parameters such as duty cycle, pulse modulation frequency, gas flow rate, and temperature, and automatically optimizes the operating state through intelligent programming. The system can automatically adjust corresponding parameters according to different application requirements, such as high ozone concentration, high energy efficiency, or low fluctuation output, to achieve a dynamic balance between ozone generation efficiency, energy efficiency, and stability. Attached Figure Description
[0020] The accompanying drawings are provided to further illustrate the invention and form part of the specification. They are used in conjunction with embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings:
[0021] Figure 1 This is a schematic diagram of the overall structure of the ozone generation system proposed in this invention;
[0022] Figure 2 This is a comparison chart of ozone concentrations under different duty cycles;
[0023] Figure 3 This is a comparison chart of dielectric substrate temperatures under different duty cycles;
[0024] Figure 4 This is a comparison chart of ozone concentrations at different gas flow rates;
[0025] Figure 5 This is a comparison chart of the temperature of the medium plate under different gas flow rates; Detailed Implementation
[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0027] To make the above-mentioned objectives, features and effects of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0028] Example 1: A high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge, comprising a circuit connection structure, a gas path connection structure, an optical detection structure, and a control structure, such as... Figure 1 As shown.
[0029] Circuit connection structure: The output terminal of the pulse modulation module (2) is connected to the modulation input terminal of the power supply module (1); the high voltage output terminal of the power supply module (1) is connected to the high voltage electrode of the dielectric plate in the discharge chamber (3) through a high voltage wire, and the grounding electrode of the dielectric plate in the discharge chamber (3) is grounded, forming a complete discharge circuit. The high voltage terminal of the voltage probe (7) is connected to the high voltage output of the power supply module (1), and the low voltage terminal is connected to the CH1 channel of the oscilloscope (6), thereby realizing the safe acquisition of high voltage signals. The oscilloscope (6) can also be connected to the current output of the power supply module (1) and the output terminal of the pulse modulation module (2) through the CH2 and CH3 channels respectively to monitor the current signal and the modulation signal, so as to facilitate real-time observation of the discharge waveform, pulse modulation waveform and system stability.
[0030] The power module (1) is used to provide the high-voltage excitation signal required for surface dielectric barrier discharge. Its output amplitude is 10kV and frequency is 40kHz. The pulse modulation module (2) uses a digital delay generator DG645 to apply a low-frequency pulse envelope to the high-frequency output of the power module (1) to realize a dual-layer modulation structure with controllable duty cycle and pulse frequency.
[0031] The dual-layer modulation structure comprises a high-frequency carrier layer and a low-frequency pulse envelope layer. The high-frequency carrier layer maintains stable surface dielectric barrier discharge, with typical parameters of a voltage amplitude of 10 kV and a frequency of 40 kHz. The high-frequency electric field ensures that electrons continuously gain kinetic energy in the discharge gap, maintaining the non-equilibrium plasma in a stable state. Under the action of the high-frequency carrier, electrons undergo multiple collisions within one carrier cycle, and their average energy can be approximated by the balance relationship between energy gain and energy loss as follows:
[0032]
[0033] in: The average electric field strength is The mean free path of electrons, The momentum transfer collision frequency, For electron mass. The formula shows that a high-frequency stable electric field allows electrons to continuously gain energy under the periodic electric field, and gradually form a stable non-equilibrium electron energy distribution function through collisions, thereby ensuring that the surface dielectric barrier discharge can be maintained in a stable and uniform mode. The low-frequency pulse envelope layer outputs a 0.01-40Hz signal through a digital delay generator, which is used to generate a high-frequency carrier. Perform duty cycle modulation, duty cycle The system determines the energy input ratio within a cycle, with the high-frequency layer maintaining discharge stability and the low-frequency layer regulating electron peak and heat input, achieving a balance between electron energy enhancement and temperature control. Through this dual-layer structure, transient electron excitation and gas cooling are separated, optimizing ozone generation efficiency.
[0034] Simultaneously, the rising edge of the pulse enhances electron excitation, exhibiting a high voltage change rate and instantaneously increasing the electric field strength. This high-field region causes a spike in the electron energy distribution function, granting electrons high kinetic energy. These high-energy electrons are primarily used in the oxygen molecule dissociation reaction, and the resulting oxygen atoms participate in the three-body reaction to form ozone. By adjusting the pulse rising edge speed, the transient high-energy electron density can be controlled, thereby increasing the O2 dissociation rate and ozone formation rate.
[0035] Gas connection structure: The air source (8) provides a stable air flow, and its outlet passes through the gas flow control module (9). The outlet of the gas flow control module (9) is directly connected to the gas inlet of the discharge chamber (3), so that the air enters the discharge channel at a set flow rate and generates ozone after surface discharge. The top of the discharge chamber (3) is provided with a gas outlet to discharge the tail gas after ozone generation, thereby maintaining the steady flow of gas in the chamber.
[0036] Ozone is very sensitive to temperature. A rise in temperature will cause the ozone concentration to drop rapidly. In order to maintain a stable ozone concentration, the present invention arranges a temperature sensor (MAX31865) inside the dielectric plate of the discharge chamber (3) to monitor the temperature of the dielectric plate in real time and achieve closed-loop control by adjusting the duty cycle.
[0037] Dielectric plate temperature The changes are affected by energy input and heat dissipation, and can be described by the energy balance equation:
[0038]
[0039] in: The heat capacity of the dielectric plate; This represents the average input power of the pulse. For heat dissipation power, The thermal conductivity / convection coefficient, For the area of the board, The ambient temperature.
[0040] By adjusting the duty cycle The temperature of the dielectric substrate can be controlled within the target range:
[0041]
[0042] in The initial duty cycle, For temperature control gain, The target dielectric substrate temperature is used. Therefore, this invention uses an automated control program to intelligently monitor the dielectric substrate temperature and automatically adjust the duty cycle. The control logic is as follows: when the dielectric substrate temperature is higher than 35°C, the duty cycle is reduced to decrease heat accumulation; when the temperature is lower than 25°C, the duty cycle is increased to increase energy input to maintain high-energy electron excitation; when the temperature is higher than 40°C, a safety mode is activated to automatically cut off the high voltage and prevent electrode burnout or dielectric aging.
[0043] Gas humidity also has a significant impact on ozone concentration because water vapor participates in side reactions, consumes active oxygen, and reduces ozone generation efficiency. Therefore, a humidity sensor, a drying component, and a float flow meter are added inside the gas flow control module (9). The humidity sensor and the drying component are used to adjust the humidity before entering the discharge area. The air flow rate of the gas with qualified humidity is precisely adjusted by the float flow meter to enter the discharge chamber (3).
[0044] The humidity sensor uses an SHT35 digital sensor and is placed in the middle of the intake pipe. The drying assembly adopts a combination structure of molecular sieve cylinder and electromagnetic bypass valve, which can automatically switch channels during system operation without manual intervention. If the gas humidity is >5%, the drying module is activated until the gas humidity is <5%; after drying is completed, discharge is restored and the duty cycle is automatically adjusted. With pulse frequency This compensates for the impact of humidity on energy utilization. This allows the system to maintain stable ozone concentration and generation efficiency under high humidity conditions.
[0045] Optical detection structure: A mercury lamp (10) serves as the light source, outputting a beam of 253.7nm characteristic wavelength that passes through the gas channel of the discharge chamber (3). The beam enters the optical fiber through the optical window on the side wall of the discharge chamber (3) and is then transmitted to the spectrometer (4) via the optical fiber. The spectrometer (4) collects the spectral data of the transmitted light in real time and transmits the spectral data to the computer (5) through the communication interface. The computer (5) executes the built-in concentration inversion algorithm and calculates the ozone concentration according to the Beer-Lambert law, achieving high-precision real-time monitoring.
[0046] Control structure: The computer (5) communicates with the lower control module through the host computer software. Based on the measurement results and preset strategies, it automatically adjusts the duty cycle and pulse frequency of the pulse modulation module (2) and the flow rate of the gas flow control module (9). By adjusting the duty cycle, frequency and gas flow rate, it achieves comprehensive control of the ozone generation rate.
[0047] Specifically, the gas flow rate determines the residence time of the gas in the discharge region; when the gas flow rate decreases, the duty cycle is appropriately reduced to avoid heat accumulation; when the gas flow rate increases, the duty cycle is increased or the frequency is adjusted to maintain the electron excitation intensity; through the coupling of gas flow rate, duty cycle and frequency, the switching between high concentration or high energy efficiency modes is achieved.
[0048] When the ozone concentration reaches a preset value, the duty cycle will automatically decrease to save energy. When the concentration decreases, the duty cycle will automatically increase to ensure that the concentration remains stable. If a high ozone concentration is desired, the duty cycle will be automatically controlled between 50% and 60%, the modulation frequency will be 0.01 Hz, and the gas flow rate will be 0.5 slm. If high ozone generation efficiency and high energy efficiency are desired, the duty cycle will be automatically decreased to 30%. If a smaller fluctuation in the ozone concentration is desired, the modulation frequency will be increased accordingly.
[0049] During operation, the air source (8) provides stable air and enters the discharge chamber (3) through the flow control module (9); the pulse modulation module (2) modulates the high-frequency voltage output by the power module (1), so that the surface discharge generates high-energy electrons under double-layer excitation, thereby efficiently generating ozone; the light beam emitted by the mercury lamp (10) passes through the chamber (3), the spectrometer (4) measures the change in light intensity and the computer (5) calculates the ozone concentration; the oscilloscope (6) monitors the voltage and current waveforms in real time; finally, the entire system maximizes the ozone generation efficiency under closed-loop control.
[0050] The ozone generation system proposed in this invention was tested under five conditions: duty cycle DR = 30%, 50%, 70%, 90%, and 100%, and the ozone concentrations obtained were as follows: Figure 2 As shown, the corresponding dielectric plate temperature is as follows: Figure 3 As shown in the figure. The results show that the ozone concentration after duty cycle modulation is higher than that under continuous (100%) conditions. The ozone concentration reaches its maximum value when DR=50%; when DR<50%, the yield is low due to the limited number of high-energy electrons caused by the short Ton time; when DR>50%, the concentration decreases due to the increased temperature rise caused by the increase in average power, which enhances ozone thermal decomposition.
[0051] The fact that the ozone concentration peak occurs at approximately 50% duty cycle indicates that the pulse modulation method of this invention can effectively regulate the electron energy distribution, thereby enhancing the chemical reaction pathway O2→O→O3. However, an excessively high duty cycle leads to a rapid temperature rise, resulting in a decrease in ozone concentration. This also verifies the necessity of introducing a "temperature closed-loop control" module in this invention. Therefore, this fully demonstrates that this invention can optimize ozone production through duty cycle modulation, reflecting one of the core functions of this invention.
[0052] The effects of gas flow rate on ozone concentration and substrate temperature were studied under the conditions of modulation frequency 0.01 Hz and duty cycle 50%. The results are as follows: Figure 4 , Figure 5 As shown in the figure. The results show that the highest ozone concentration was measured at a low flow rate (0.5 slm); the ozone concentration was moderate at a medium flow rate (1 slm), but the substrate temperature was the lowest at this point; the ozone concentration was the lowest at a high flow rate (1.5 slm), and the temperature was also relatively high at this point. Therefore, different gas flow rates can be selected according to different needs.
[0053] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. A high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge, characterized in that, It includes circuit connection structure, air circuit connection structure, optical detection structure and control structure, among which: Circuit connection structure: The output terminal of the pulse modulation module (2) is connected to the modulation input terminal of the power supply module (1); the high voltage output terminal of the power supply module (1) is connected to the high voltage electrode of the dielectric plate in the discharge chamber (3) through the high voltage wire, and the grounding electrode of the dielectric plate in the discharge chamber (3) is grounded; the high voltage terminal of the voltage probe (7) is connected to the high voltage output of the power supply module (1), and the low voltage terminal is connected to the oscilloscope (6). Gas connection structure: The outlet of the air source (8) passes through the gas flow control module (9), and the outlet of the gas flow control module (9) is connected to the gas inlet of the discharge chamber (3), so that the air enters the discharge channel at a set flow rate and generates ozone after surface discharge; the top of the discharge chamber (3) is provided with a gas outlet for discharging the tail gas after ozone generation. Optical detection structure: The mercury lamp (10) serves as the light source, and the output beam passes through the gas channel of the discharge chamber (3). The beam enters the optical fiber through the optical window on the side wall of the discharge chamber (3) and is then transmitted to the spectrometer (4) by the optical fiber. The spectrometer (4) collects the spectral data of the transmitted light and transmits the spectral data to the computer (5) through the communication interface. Control structure: The computer (5) communicates with the lower control module through the host computer software and automatically adjusts the duty cycle, pulse frequency and flow rate of the pulse modulation module (2) and the gas flow control module (9) according to the measurement results and preset strategies.
2. The high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge according to claim 1, characterized in that, The oscilloscope (6) is also connected to the current output of the power supply module (1) and the output of the pulse modulation module (2) to monitor the current signal and the modulation signal.
3. The high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge according to claim 1, characterized in that, The power module (1) is used to provide the high-voltage excitation signal required for surface dielectric barrier discharge; the pulse modulation module (2) uses a digital delay generator DG645 to apply a low-frequency pulse envelope to the high-frequency output of the power module (1).
4. The high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge according to claim 1, characterized in that, Temperature sensors are arranged inside the dielectric plate of the discharge chamber (3) to monitor the temperature of the dielectric plate in real time.
5. The high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge according to claim 4, characterized in that, A humidity sensor, a drying component, and a float flow meter are added inside the gas flow control module (9). The humidity sensor and the drying component are used to adjust the humidity before entering the discharge area. The gas with qualified humidity is precisely adjusted by the float flow meter to regulate the air flow rate entering the discharge chamber (3).
6. The high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge according to claim 5, characterized in that, The humidity sensor uses an SHT35 digital sensor and is placed in the middle of the intake pipe. The drying component adopts a combination structure of molecular sieve cylinder and electromagnetic bypass valve.
7. The high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge according to claim 1, characterized in that, The computer (5) executes the built-in concentration inversion algorithm to calculate the ozone concentration according to the Beer-Lambert law.
8. The high-efficiency ozone generation system based on pulse-modulated surface dielectric barrier discharge according to claim 7, characterized in that, By coupling gas flow rate, duty cycle, and frequency, switching between high concentration and high energy efficiency modes can be achieved.