Evaporation device for capacitor metallized film processing

Abstract

The invention discloses an evaporation device for capacitor metallized film processing, relates to the field of plating process equipment, and solves the problems that when an existing evaporation device for capacitor metallized film processing is used, a cooling area cannot be flexibly adjusted according to needs, so that part of cooling energy is wasted, and the coating efficiency is affected. Comprising a machine body, a cooling mechanism, a conveying mechanism and an evaporation mechanism, the cooling mechanism comprises a cooling roller and a cooling pipe, and the evaporation mechanism comprises an evaporation boat. And the situation that external gas enters the machine body along with the film is reduced, aluminum steam is generated through an evaporation boat on the evaporation mechanism, the bottom of the film is coated, meanwhile, the steam is prevented from reaching the upper side area of the film, and the coating efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of coating process equipment technology, specifically to a vapor deposition apparatus for processing metallized thin films for capacitors. Background Technology

[0002] Currently, the industry commonly uses vacuum evaporation to deposit aluminum on thin films. Aluminum has the advantages of good conductivity, low cost, and easy evaporation into films, making it the most commonly used evaporation material for metallized thin films. Metallized film capacitors typically employ a single-sided coating structure to ensure that the film has electrode properties of insulation on one side and conductivity on the other, meeting the capacitor's dielectric and energy storage requirements. Coating is not allowed on the top side of the film. If aluminum vapor adheres to the non-working surface of the film, it will cause defects such as short circuits and poor interlayer conductivity, affecting the yield of finished capacitors.

[0003] In traditional vapor deposition equipment, the evaporation source is mostly arranged laterally, making it difficult to achieve a uniformly matched deposition distance with the convex cooling roller, which easily leads to uneven film thickness in the film width direction. The cooling roller has a large overall volume, and the internal coolant has a low cooling utilization rate during circulation. The cooling area of ​​the internal coolant cannot be flexibly adjusted as needed, resulting in a waste of some cooling energy. Existing equipment lacks an effective protective structure for the cooling roller, and aluminum vapor easily adheres to the non-working surface of the cooling roller, forming aluminum deposits that can easily damage the upper surface of the film as the roller rotates. Summary of the Invention

[0004] The purpose of this invention is to provide a vapor deposition apparatus for processing capacitor metallized thin films that facilitates improved coating efficiency and allows for flexible control of cooling orientation to enhance cooling efficiency, thereby solving the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a vapor deposition apparatus for processing metallized thin films for capacitors, comprising a body, a cooling mechanism, a conveying mechanism, and a vapor deposition mechanism. An installation plate is fixedly connected inside the body. The cooling mechanism includes a cooling roller installed inside the body, with multiple sets of cooling pipes evenly arranged inside the cooling roller. The cooling mechanism can cool the cooling roller through the cooling pipes and flexibly control the required cooling direction. The conveying mechanism is installed inside the body for conveying and guiding the film, and reducing the entry of external gas into the body along with the film. The vapor deposition mechanism includes multiple evaporation boats fixedly installed on the installation plate. The vapor deposition mechanism generates aluminum vapor through the evaporation boats and deposits it on the bottom of the film, while preventing vapor from reaching the upper area of ​​the film, thus improving deposition efficiency and flexibly controlling the cooling direction to enhance cooling efficiency.

[0006] Preferably, the cooling mechanism further includes a fixed cylinder fixedly installed inside the machine body. The bottom of the fixed cylinder is open. The cooling roller is a cylindrical structure with a central drum and tapered ends. The outer wall of the cooling roller is in contact with and rotates against the inner wall of the fixed cylinder. A fixed column and a fixed disk are fixedly connected inside the machine body. The fixed column passes through one end of the cooling roller and is rotatably connected to the inner wall of the cooling roller. The fixed disk is fixedly installed at one end of the fixed cylinder. The cooling roller is equipped with a control component for controlling the operating state of the cooling pipe, which facilitates cooling the cooling roller through the cooling pipe and flexibly controls the required cooling direction.

[0007] Preferably, the control component includes an input pipe fixedly installed on the fixed disk, the input pipe passing through the fixed disk, a positioning disk fixedly connected to one end of the fixed column, the side of the positioning disk slidingly fitting against the inner wall of the cooling roller, one end of the input pipe fixedly connected to the positioning disk, multiple sets of guide grooves respectively opened on the fixed disk and the positioning disk, and bent pipes rotatably connected to both ends of the cooling pipe, the bent pipes slidingly connected to the inner wall of the guide grooves, and a connector for rolling connection with the inner wall of the cooling roller on the cooling pipe, which facilitates control of the operating state of the cooling pipe.

[0008] Preferably, the connector includes multiple sets of elastic elements fixedly installed on the outer wall of the cooling pipe. A heat-conducting sheet is fixedly connected to the elastic element. The heat-conducting sheet has an arc-shaped cross-section. A heat-conducting plate is fixedly connected to the heat-conducting sheet. The heat-conducting plate penetrates the side wall of the cooling pipe and is slidably connected to the cooling pipe. A sealing element for improving the sliding sealing effect is provided between the heat-conducting plate and the cooling pipe to facilitate rolling connection with the inner wall of the cooling roller.

[0009] Preferably, the control component further includes an electric telescopic rod fixedly installed in the guide groove, the telescopic end of the electric telescopic rod being fixedly connected to the bend pipe, a sealing plug being fixedly connected to the bend pipe, a first pipe for connecting the input pipe and the guide groove being provided on the positioning plate, the sealing plug being able to be inserted into and sealed with the inner wall of the first pipe, an annular groove being provided on the fixing plate, a second pipe for connecting the guide groove and the annular groove being provided on the fixing plate, the sealing plug being able to be inserted into and sealed with the inner wall of the second pipe, a refrigeration unit being fixedly connected inside the machine body, the output end of the refrigeration unit being connected to the input pipe, and the input end of the refrigeration unit being connected to the annular groove, facilitating the circulation and transportation of coolant.

[0010] Preferably, the conveying mechanism includes two sets of rollers mounted on both sides of the machine body. Each set of rollers has two drive rollers. The outer wall of each drive roller is covered with elastic rubber. A first gear is fixedly connected to one end of each drive roller. The first gears on two adjacent drive rollers mesh with each other. A gear ring is fixedly connected to the end of the cooling roller away from the fixed disk. The inner wall of the gear ring is rotatably connected to the outer wall of the fixed column. The gear ring passes through the fixed cylinder and is rotatably connected to the inner wall of the fixed cylinder. Two sets of second gears that mesh with the gear ring are rotatably connected inside the machine body. The second gears mesh with a set of first gears located on the upper side, which facilitates the conveying and guiding of the film and reduces the possibility of external gas entering the machine body along with the film.

[0011] Preferably, the vapor deposition mechanism further includes two adjusting plates installed inside the machine body. The two adjusting plates are respectively located at both ends of the fixed cylinder. A sealing gasket that slides and fits against the outer wall of the fixed cylinder is fixedly connected to the adjusting plate. A conveying groove is opened inside the adjusting plate. A cooling plate is fixedly connected inside the conveying groove. The upper opening of the conveying groove is located at the edge of the film. The machine body is provided with an adjusting component for adjusting the spacing between the adjusting plates. The machine body is also provided with a suction component for gas extraction, which facilitates the generation of aluminum vapor through the evaporation boat and the deposition of the bottom of the film, while preventing the vapor from reaching the upper area of ​​the film.

[0012] Preferably, the suction component includes a sleeve fixedly installed on one side of the adjustment plate, and a sliding tube fixedly connected to the other side of the adjustment plate. The outer wall of the sliding tube is slidably sleeved with the inner wall of the sleeve. Both the sleeve and the sliding tube have opening grooves facing the drive roller on their sides. Both the sleeve and the sliding tube are connected to the conveying groove. A vacuum pump is fixedly connected inside the machine body. The input end of the vacuum pump is connected to a connecting pipe that communicates with the conveying groove. The connecting pipe is made of metal corrugated pipe to facilitate gas suction.

[0013] Preferably, the adjusting component includes a guide frame fixedly installed inside the machine body, the adjusting plate is slidably connected to the inner wall of the guide frame in the horizontal direction, a threaded rod is rotatably connected inside the guide frame, the threaded grooves at both ends of the threaded rod have opposite thread directions, and the two ends of the threaded rod respectively pass through the adjusting plate and are threadedly connected to the adjusting plate, so as to flexibly adjust the spacing of the adjusting plate according to the film width.

[0014] Preferably, the evaporation boat has a boat-shaped structure with the tip facing the conveying direction of the thin film, electrodes at both ends, a wide middle and narrow ends, and a wide top and narrow bottom, so that the melt does not pile up or stagnate.

[0015] Compared with the prior art, the beneficial effects of the present invention are: This invention provides a vapor deposition apparatus for processing metallized thin films for capacitors, which solves the problem that existing vapor deposition apparatuses for processing metallized thin films for capacitors cannot flexibly adjust the cooling area as needed, resulting in a waste of cooling energy and affecting the deposition efficiency. The apparatus uses cooling pipes to cool the cooling rollers and flexibly control the required cooling direction. The conveying mechanism transports and guides the film, reducing the possibility of external gas entering the machine body with the film. Aluminum vapor is generated by the evaporation boat on the vapor deposition mechanism and deposits the bottom of the film, while preventing the vapor from reaching the upper area of ​​the film, thus improving the deposition efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the internal structure of the body of the present invention; Figure 3 This is a partial structural diagram of the conveying mechanism of the present invention; Figure 4 This is a partial structural cross-sectional view of the vapor deposition mechanism of the present invention; Figure 5 for Figure 4 Enlarged view of region A in the middle; Figure 6 This is a partial structural diagram of the vapor deposition mechanism of the present invention; Figure 7 This is a partial structural exploded view of the cooling mechanism of the present invention; Figure 8 This is a partial structural cross-sectional view of the cooling mechanism of the present invention; Figure 9 This is a partial structural exploded view of the control component of the present invention; Figure 10 for Figure 9 Enlarged view of region B in the middle; Figure 11 This is a partial structural cross-sectional view of the control component of the present invention; Figure 12 for Figure 11 Enlarged view of region C.

[0017] In the diagram: 1. Body; 2. Mounting plate; 3. Cooling roller; 4. Cooling pipe; 5. Evaporation boat; 6. Fixed cylinder; 7. Fixed column; 8. Fixed plate; 9. Input pipe; 10. Positioning plate; 11. Guide groove; 12. Bend; 13. Elastic element; 14. Heat-conducting sheet; 15. Heat-conducting plate; 16. Electric telescopic rod; 17. Sealing plug; 18. First pipe; 19. Annular groove; 20. Second pipe; 21. Refrigeration unit; 22. Drive roller; 23. Elastic rubber; 24. First gear; 25. Gear ring; 26. Second gear; 27. Adjusting plate; 28. Sealing gasket; 29. ​​Conveying groove; 30. Cooling plate; 31. Sleeve; 32. Sliding pipe; 33. Vacuum pump; 34. Connecting pipe; 35. Guide frame; 36. Threaded rod; 37. Membrane. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Example 1: Please refer to Figures 1-8The diagram shows a vapor deposition apparatus for processing metallized thin films for capacitors, comprising a body 1, a cooling mechanism, a conveying mechanism, and a vapor deposition mechanism. A mounting plate 2 is fixedly connected inside the body 1. The cooling mechanism includes cooling rollers 3 installed inside the body 1, with multiple sets of cooling pipes 4 evenly arranged inside the cooling rollers 3. The cooling mechanism can cool the cooling rollers 3 through the cooling pipes 4 and flexibly control the required cooling direction. The conveying mechanism is installed inside the body 1 for conveying and guiding the thin film 37 and reducing the entry of external gases into the body 1 along with the thin film 37. The vapor deposition mechanism includes multiple sets of vapor deposition mechanisms fixedly mounted on the mounting plate 2. The boat 5, a vapor deposition mechanism, is used to generate aluminum vapor through the evaporation boat 5 and deposit a film on the bottom of the film 37, while preventing the vapor from reaching the upper area of ​​the film 37. The cooling mechanism also includes a fixed cylinder 6 fixedly installed inside the machine body 1. The bottom of the fixed cylinder 6 is designed to be open. The cooling roller 3 is a cylindrical structure with a drum in the middle and tapering at both ends. The outer wall of the cooling roller 3 is in contact with and rotates against the inner wall of the fixed cylinder 6. A fixed column 7 and a fixed disk 8 are fixedly connected inside the machine body 1. The fixed column 7 passes through one end of the cooling roller 3 and is rotatably connected to the inner wall of the cooling roller 3. The fixed disk 8 is fixedly installed at one end of the fixed cylinder 6. The cooling roller 3 is equipped with a cooling control mechanism. The control components for the operation of pipe 4 include a conveying mechanism comprising two sets of rollers mounted on both sides of the machine body 1. Each set of rollers has two drive rollers 22, the outer wall of which is covered with elastic rubber 23. One end of each drive roller 22 is fixedly connected to a first gear 24, and the first gears 24 on adjacent drive rollers 22 mesh with each other. The end of the cooling roller 3 away from the fixed plate 8 is fixedly connected to a gear ring 25, the inner wall of which is rotatably connected to the outer wall of the fixed column 7. The gear ring 25 passes through the fixed cylinder 6 and is rotatably connected to the inner wall of the fixed cylinder 6. Two sets of second gears that mesh with the gear ring 25 are rotatably connected inside the machine body 1. Wheel 26, the second gear 26 meshes with a set of first gears 24 located on the upper side, and a set of motors drives one set of drive rollers 22 to rotate, so that multiple sets of drive rollers 22 and the cooling roller 3 in the middle can rotate and run, realizing the conveying of film 37. The elastic rubber 23 layer on the outer wall of the drive roller 22 is relatively thick, which can fit and slide with the machine body 1 to prevent gas from entering the machine body 1. At the same time, it can increase the friction of conveying during the conveying of film 37, improve the stability of conveying, and also prevent gas from entering the machine body 1 from around film 37, affecting the relatively vacuum environment inside the machine body 1.

[0020] Example 2: Please refer to Figures 2-12This embodiment further illustrates Embodiment 1. The control components shown in the figure include an input pipe 9 fixedly mounted on a fixed disk 8, the input pipe 9 penetrating the fixed disk 8. One end of a fixed column 7 is fixedly connected to a positioning disk 10, the side of the positioning disk 10 slidingly conforming to the inner wall of the cooling roller 3. One end of the input pipe 9 is fixedly connected to the positioning disk 10. Multiple sets of guide grooves 11 are respectively provided on both the fixed disk 8 and the positioning disk 10. Both ends of the cooling pipe 4 are rotatably connected to bent pipes 12, which slidely connect to the inner wall of the guide grooves 11. The cooling pipe 4 is provided with connecting components for rolling connection with the inner wall of the cooling roller 3. The connecting components include multiple sets of fixedly mounted on the cooling roller 3. The elastic element 13 on the outer wall of the cooling pipe 4 can be replaced by an existing structure such as a spring. A heat-conducting plate 14 is fixedly connected to the elastic element 13. The heat-conducting plate 14 has an arc-shaped cross-section. A heat-conducting plate 15 is fixedly connected to the heat-conducting plate 14. The heat-conducting plate 15 penetrates the side wall of the cooling pipe 4 and is slidably connected to the cooling pipe 4. A sealing element is provided between the heat-conducting plate 15 and the cooling pipe 4 to improve the sliding sealing effect. The control component also includes an electric telescopic rod 16 fixedly installed in the guide groove 11. The telescopic end of the electric telescopic rod 16 is fixedly connected to the bend 12. A sealing plug 17 is fixedly connected to the bend 12. A positioning plate 10 is provided for connecting The first pipe 18, which connects the input pipe 9 and the guide groove 11, has a sealing plug 17 that can be inserted into and sealed to the inner wall of the first pipe 18. An annular groove 19 is provided on the fixed plate 8, and a second pipe 20, which connects the guide groove 11 and the annular groove 19, is also provided on the fixed plate 8. The sealing plug 17 can be inserted into and sealed to the inner wall of the second pipe 20. A refrigeration unit 21 is fixedly connected inside the machine body 1. The output end of the refrigeration unit 21 is connected to the input pipe 9, and the input end of the refrigeration unit 21 is connected to the annular groove 19. The required cooling position can be flexibly adjusted as needed. For example, when the cooling roller 3 rotates at a higher speed, a higher cooling efficiency is required, and all electric extension and retraction can be controlled. With all rods 16 extended, the coolant inside the cooling pipes 4 is in a flowing state. Heat is conducted through the contact between the heat-conducting plates 14 and the inner wall of the cooling roller 3, achieving efficient cooling. When the rotational speed of the cooling roller 3 is low or the cooling efficiency requirement is low, the number of cooling pipes 4 can be reduced, with only a few working locally, such as cooling only the section about to rotate to the bottom. This improves cooling efficiency and energy utilization. A zoned, controllable cooling method is adopted, precisely and intensely cooling only the section corresponding to the coating area on the surface of the cooling roller 3. Non-coating areas rely on the roller's own heat capacity for temperature buffering, preventing rapid overheating. Compared to traditional all-around continuous cooling, this invention avoids energy waste, uneven film temperature, and excessive internal stress caused by excessive cooling in non-coating areas. Simultaneously, the cooling power is concentrated on the effective heat exchange area, resulting in higher cooling efficiency, faster temperature response, smaller roller surface temperature fluctuations, and lower thermal shock. This ensures timely cooling and stable temperature control while reducing overall system energy consumption, significantly improving coating uniformity and film forming quality.

[0021] Example 3: Please refer to Figures 1-6This embodiment further illustrates Embodiment 1. The vapor deposition mechanism shown in the figure also includes two adjusting plates 27 installed inside the machine body 1. The two adjusting plates 27 are located at both ends of the fixed cylinder 6. A sealing gasket 28 is fixedly connected to the adjusting plate 27 and slides against the outer wall of the fixed cylinder 6 to facilitate sealing the gap between the adjusting plate 27 and the outer wall of the fixed cylinder 6, preventing steam from escaping from this area. A conveying groove 29 is provided inside the adjusting plate 27, and a cooling plate 30 is fixedly connected inside the conveying groove 29. The cooling plate 30 can be made of two sets of plates spliced ​​together, with a continuously bent cooling groove in the middle for lifting. The cooling efficiency is improved, and the side plates can be disassembled for easy cleaning of accumulated substances inside the central cooling tank. The upper opening of the conveying trough 29 is located at the edge of the film 37. The machine body 1 is equipped with an adjusting component for adjusting the spacing of the adjusting plates 27. The machine body 1 is also equipped with a suction component for gas extraction. The suction component includes a sleeve 31 fixedly installed on one side adjusting plate 27, and a sliding tube 32 fixedly connected to the other side adjusting plate 27. The outer wall of the sliding tube 32 is slidably sleeved with the inner wall of the sleeve 31. Both the sleeve 31 and the sliding tube 32 have openings on their sides facing the drive roller 22. Both the sleeve 31 and the sliding tube 32 are connected to the conveying trough 29. A vacuum pump 33 is fixedly connected inside the machine body 1. The input end of the vacuum pump 33 is connected to a connecting pipe 34 that is connected to the conveying trough 29. The connecting pipe 34 is made of metal corrugated pipe. The adjusting component includes a guide frame 35 fixedly installed inside the machine body 1. The adjusting plate 27 is slidably connected to the inner wall of the guide frame 35 in the horizontal direction. A threaded rod 36 is rotatably connected inside the guide frame 35. The threaded grooves at both ends of the threaded rod 36 have opposite thread directions. The two ends of the threaded rod 36 pass through the adjusting plate 27 and are threadedly connected to the adjusting plate 27. A single motor drives the threaded rod 36 to rotate, adjusting the distance between the two adjusting plates 27. The evaporation boat 5 has a boat-shaped structure, with the pointed end facing the conveying direction of the thin film 37. The two ends are electrodes, wider in the middle and narrower at both ends, wider at the top and narrower at the bottom. The height of the evaporation boat 5 is lowest in the middle, gradually increasing towards both ends to adapt to the external curvature of the cooling roller 3, making the distance between the metal vapor and the bottom surface of the thin film 37 relatively uniform. The melt in the boat-shaped evaporation boat 5 does not accumulate at corners or stagnate. The four corners of the traditional square boat are dead corners. Once the material melts, it is easy for material to accumulate, carbonize, and slag at the corners, causing splashing and contamination of the coating during the next evaporation. The pointed-bottom boat shape: pointed at both ends → no right-angle dead corners, the molten material will naturally flow to the middle, and will not get stuck or age in the corners. The heating is more uniform and the temperature field is more stable. The pointed structure allows the current, magnetic field, and heat flow to follow the length of the boat. The wide middle section is the main evaporation zone, where the temperature is most stable and concentrated, the evaporation area is larger, and the steam dispersion is gentler. The wide top opening equals a large evaporation opening, resulting in more stable steam exit without splashing and a more uniform film layer. The boat has a longer lifespan. The pointed bottom concentrates the current at the bottom, resulting in high thermal efficiency. The wide top opening keeps the sidewall temperature low, making the sidewalls less susceptible to corrosion and erosion by the melt, significantly improving material utilization and boat lifespan.

[0022] Working principle: The existing structural design allows for adjustable spacing between the upper and lower sets of drive rollers 22 (controlled by an electric push rod; this is not an innovation of the existing structure and is not shown). Adjusting the spacing allows the film 37 to pass between the drive rollers 22 and around the bottom of the cooling roller 3, exiting between the two sets of drive rollers 22 on the other side. Then, the spacing between the two sets of drive rollers 22 is reduced until the adjusting plate 27 is clamped. The threaded rod 36 is rotated according to the width of the adjusting plate 27. The threaded grooves with opposite thread directions at both ends synchronously drive the adjusting plates 27 on both sides to slide and open within the guide frame 35 until the inner wall of the adjusting plate 27 is close to both sides. The center of the cooling roller 3 slightly bulges, allowing the film 37 to... The drive roller 22 assists in the central conveying process, driving the film 37 to be conveyed. Simultaneously, driven by the first gear 24, the upper and lower sets of drive rollers 22 rotate in opposite directions, achieving stable conveying of the film 37. The upper first gear 24 drives the second gear 26 to rotate, thereby causing the gear ring 25 to drive the cooling roller 3 to rotate, guiding and cooling the film 37. The design of the second gear 26 ensures that the rotation direction of the upper drive roller 22 is consistent with the rotation direction of the cooling roller 3. By designing the pitch circle radius of the first gear 24 and the gear ring 25, it is ensured that the conveying speed of the drive roller 22 on the film 37 is consistent with the transmission speed of the cooling roller 3, reducing the relative friction between the cooling roller 3 and the film 37 and avoiding damage to the film 37.

[0023] Coolant is fed from input pipe 9 into first pipe 18 via refrigeration unit 21, and then transported to cooling pipe 4 through bend pipe 12. Temperature is transferred through heat-conducting plate 15 and heat-conducting fins 14, cooling the inner wall of cooling roller 3. Simultaneously, the rotation of cooling roller 3 drives the heat-conducting fins 14 and cooling pipe 4 to rotate, reducing wear and heat generation through rolling friction and sliding friction. The coolant flows back to annular groove 19 via second pipe 20, re-enters refrigeration unit 21 for further cooling, and is then output back to input pipe 9. The controllable electric telescopic rod 1... 6. Retraction causes the bent tube 12 to slide the cooling tube 4 within the guide groove 11, releasing the contact between the heat-conducting plate 14 and the inner wall of the cooling roller 3. Simultaneously, the bent tube 12 drives the sealing plug 17 to slide into the first pipe 18 and the second pipe 20, achieving the sealing of the coolant. Afterward, localized areas can be cooled more effectively as needed. The inner wall of the cooling roller 3 is a smooth cylindrical shape, facilitating the rolling of the heat-conducting plate 14. The extension and retraction of the electric telescopic rods 16 at both ends of the cooling tube 4 can be flexibly controlled to adjust the working state of the cooling tube 4.

[0024] Aluminum raw material is placed inside the evaporation boat 5 and heated to generate metal vapor. The vapor is rapidly cooled at the film 37 at the bottom of the cooling roller 3 to complete the coating. At the same time, the vacuum pump 33 is started to continuously draw in the vapor. During the adjustment process of the adjusting plate 27, the sliding tube 32 will slide inside the sleeve 31 and always ensure that the opening faces the side of the drive roller 22. The gas that seeps in from the outside will be directly drawn into the conveying trough 29. The opening of the conveying trough 29 is opened along the two sides of the film 37, so that the vapor that is about to cross the film 37 and reach the top will be quickly drawn away. After the vapor is cooled by the cooling plate 30 in the conveying trough 29, the metal vapor remains on the surface of the cooling plate 30 and can be cleaned and recycled for later use. The gas continues to flow from the bottom of the conveying trough 29 to the connecting pipe 34 and is transported to the vacuum pump 33 and discharged to the outside.

[0025] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0026] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vapor deposition apparatus for processing metallized thin films for capacitors, characterized in that, include: The body (1) has an installation plate (2) fixedly connected inside it; Also includes: The cooling mechanism includes a cooling roller (3) installed inside the body (1). Multiple sets of cooling pipes (4) are evenly arranged inside the cooling roller (3). The cooling mechanism can cool the cooling roller (3) through the cooling pipes (4) and flexibly control the required cooling direction. The conveying mechanism is installed inside the body (1) and is used to convey and guide the film, and to reduce the situation where external gas enters the body (1) along with the film. The vapor deposition mechanism includes multiple sets of evaporation boats (5) fixedly installed on the mounting plate (2). The vapor deposition mechanism is used to generate aluminum vapor through the evaporation boats (5) and deposit a film on the bottom of the film, while preventing the vapor from reaching the upper area of ​​the film.

2. The vapor deposition apparatus for processing metallized thin films for capacitors according to claim 1, characterized in that: The cooling mechanism also includes a fixed cylinder (6) fixedly installed inside the body (1). The bottom of the fixed cylinder (6) is open. The outer wall of the cooling roller (3) is in contact with the inner wall of the fixed cylinder (6) and rotates. A fixed column (7) and a fixed plate (8) are fixedly connected inside the body (1). The fixed column (7) passes through one end of the cooling roller (3) and is rotatably connected to the inner wall of the cooling roller (3). The fixed plate (8) is fixedly installed at one end of the fixed cylinder (6). The cooling roller (3) is provided with a control component for controlling the operating status of the cooling pipe (4).

3. The vapor deposition apparatus for processing metallized thin films for capacitors according to claim 2, characterized in that: The control component includes an input pipe (9) fixedly installed on the fixed disk (8), the input pipe (9) passing through the fixed disk (8), a positioning disk (10) fixedly connected to one end of the fixed column (7), the side of the positioning disk (10) slidingly fitting against the inner wall of the cooling roller (3), one end of the input pipe (9) fixedly connected to the positioning disk (10), multiple sets of guide grooves (11) respectively opened on the fixed disk (8) and the positioning disk (10), and bent pipes (12) rotatably connected to both ends of the cooling pipe (4), the bent pipes (12) slidingly connected to the inner wall of the guide grooves (11), and a connecting piece for rolling connection with the inner wall of the cooling roller (3) on the cooling pipe (4).

4. The vapor deposition apparatus for processing metallized thin films for capacitors according to claim 3, characterized in that: The connector includes multiple sets of elastic elements (13) fixedly installed on the outer wall of the cooling pipe (4). A heat-conducting sheet (14) is fixedly connected to the elastic element (13). A heat-conducting plate (15) is fixedly connected to the heat-conducting sheet (14). The heat-conducting plate (15) penetrates the side wall of the cooling pipe (4) and is slidably connected to the cooling pipe (4). A sealing element for improving the sliding sealing effect is provided between the heat-conducting plate (15) and the cooling pipe (4).

5. The vapor deposition apparatus for processing metallized thin films for capacitors according to claim 4, characterized in that: The control unit also includes an electric telescopic rod (16) fixedly installed in the guide groove (11). The telescopic end of the electric telescopic rod (16) is fixedly connected to the bend (12). A sealing plug (17) is fixedly connected to the bend (12). A first pipe (18) for connecting the input pipe (9) and the guide groove (11) is provided on the positioning plate (10). The sealing plug (17) can be inserted into the inner wall of the first pipe (18) for sealing. An annular groove (19) is provided on the fixing plate (8). A second pipe (20) for connecting the guide groove (11) and the annular groove (19) is provided on the fixing plate (8). The sealing plug (17) can be inserted into the inner wall of the second pipe (20) for sealing. A refrigerator (21) is fixedly connected inside the body (1). The output end of the refrigerator (21) is connected to the input pipe (9). The input end of the refrigerator (21) is connected to the annular groove (19).

6. The vapor deposition apparatus for processing metallized thin films for capacitors according to claim 2, characterized in that: The conveying mechanism includes two sets of rollers installed on both sides of the machine body (1). Each set of rollers is provided with two drive rollers (22). The outer wall of the drive roller (22) is wrapped with elastic rubber (23). One end of the drive roller (22) is fixedly connected to a first gear (24). The first gears (24) on two adjacent drive rollers (22) mesh with each other. The end of the cooling roller (3) away from the fixed disk (8) is fixedly connected to a gear ring (25). The inner wall of the gear ring (25) is rotatably connected to the outer wall of the fixed column (7). The gear ring (25) passes through the fixed cylinder (6) and is rotatably connected to the inner wall of the fixed cylinder (6). Two sets of second gears (26) that mesh with the gear ring (25) are rotatably connected inside the machine body (1). The second gears (26) mesh with a set of first gears (24) located on the upper side.

7. The vapor deposition apparatus for processing metallized thin films for capacitors according to claim 6, characterized in that: The vapor deposition mechanism also includes two adjusting plates (27) installed inside the body (1). The two adjusting plates (27) are located at both ends of the fixed cylinder (6). A sealing gasket (28) that slides against the outer wall of the fixed cylinder (6) is fixedly connected to the adjusting plate (27). A conveying groove (29) is opened in the adjusting plate (27). A cooling plate (30) is fixedly connected in the conveying groove (29). The upper opening of the conveying groove (29) is located at the edge of the film. An adjusting component for adjusting the spacing of the adjusting plates (27) is provided in the body (1). A suction component for gas suction is provided in the body (1).

8. The vapor deposition apparatus for processing metallized thin films for capacitors according to claim 7, characterized in that: The suction component includes a sleeve (31) fixedly installed on one side of the adjustment plate (27), and a sliding tube (32) fixedly connected to the other side of the adjustment plate (27). The outer wall of the sliding tube (32) is slidably sleeved with the inner wall of the sleeve (31). The sides of both the sleeve (31) and the sliding tube (32) are provided with opening slots facing the drive roller (22). Both the sleeve (31) and the sliding tube (32) are connected to the conveying groove (29). A vacuum pump (33) is fixedly connected inside the machine body (1). The input end of the vacuum pump (33) is connected to a connecting pipe (34) that is connected to the conveying groove (29).

9. The vapor deposition apparatus for processing metallized thin films for capacitors according to claim 8, characterized in that: The adjusting component includes a guide frame (35) fixedly installed inside the body (1). The adjusting plate (27) is slidably connected to the inner wall of the guide frame (35) in the horizontal direction. A threaded rod (36) is rotatably connected inside the guide frame (35). The threaded grooves at both ends of the threaded rod (36) have opposite thread directions. Both ends of the threaded rod (36) pass through the adjusting plate (27) and are threadedly connected to the adjusting plate (27).

10. The vapor deposition apparatus for processing metallized thin films for capacitors according to claim 1, characterized in that: The evaporation boat (5) has a boat-shaped structure with its tip facing the direction of film transport.

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