RGA ion deflection structure

By optimizing the ion path and voltage control of the RGA equipment, the problems of ion beam purity and noise in existing equipment have been solved, and high signal-to-noise ratio ion detection has been achieved.

CN224288246UActive Publication Date: 2026-05-26SUZHOU ANYIPU PRECISION INSTR CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SUZHOU ANYIPU PRECISION INSTR CO LTD
Filing Date
2025-05-16
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

The signal-to-noise ratio of existing RGA equipment is limited by ion diffusion, electromagnetic interference and detector noise. Neutral ion collision detectors lead to reduced ion beam purity and increased noise.

Method used

The ion path is optimized by using a quadrupole analyzer, deflection system, exit lens, and shaping lens. Different voltages are applied to the quadrupole electrode assembly to deflect the ion beam in the central turning region. Combined with real-time monitoring of the ion beam intensity and position using a Faraday cup, the electrode voltage is dynamically adjusted to optimize the ion path.

Benefits of technology

It improves the purity of the ion beam, reduces detector noise, minimizes the loss of effective ions during transmission, and enhances signal quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention provides an RGA ion deflection structure that optimizes the ion path, reduces collisions with neutral particles on the detector, improves ion beam purity, reduces noise, and focuses the ion beam, reducing the loss of effective ions along the limited path, thereby enhancing the effective signal. It includes: a quadrupole analyzer, with ions traveling along the central channel of the quadrupole analyzer; a deflection system including a grounded housing and a quadrupole electrode assembly, the grounded housing including an incident plate and an exit plate, the exit plate being arranged perpendicular to the incident plate, the quadrupole electrode assembly arranged within the inner cavity of the grounded housing, the quadrupole electrode assembly consisting of four poles, each pole being connected to an independent voltage via a connecting wire, the combined area of ​​the quadrupole electrode assembly forming an incident area, a central deflection area, and an exit area; an exit lens; and a shaping lens.
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