A cleaning device for silicon carbide deposition byproducts

Abstract

This application discloses a device for cleaning silicon carbide deposition byproducts. The device includes a housing, a cone, an igniter, an air inlet pipe, and a filter assembly. The housing has a top and a bottom opposite each other in a first direction. The bottom of the housing has a through hole, and the top has an air outlet. The cone passes through the through hole, with its outer periphery fixed to the edge of the through hole. One end of the cone inside the housing is a closed end, and the other end outside the housing is an open end. The diameter of the closed end is smaller than the diameter of the open end. The igniter is fixed at the closed end and located inside the cone. The air inlet pipe passes through the cone to connect its inner periphery with the interior of the housing. The filter assembly is located inside the housing. The silicon carbide deposition byproduct cleaning device proposed in this application has low manual intervention in the cleaning process, and the subsequent exhaust gas is treated before discharge, making the cleaning safer, more efficient, and more environmentally friendly.

Description

Technical Field

[0001] This application relates to the field of silicon carbide by-product cleaning technology, and in particular to a cleaning device for silicon carbide deposition by-products. Background Technology

[0002] Silicon carbide fiber-reinforced ceramic matrix composites are the preferred material for manufacturing hot-end components of aerospace equipment due to their superior performance. The matrix is ​​primarily prepared using methods such as chemical vapor infiltration. During the preparation process, the raw materials undergo complex chemical reactions under high temperature and vacuum conditions, producing deposition byproducts. As the temperature decreases, these byproducts adhere to and accumulate inside the condenser tubes of the deposition furnace. The main component of these byproducts is silicide, which is highly flammable. Therefore, after each deposition cycle, the byproducts within the equipment must be cleaned.

[0003] Currently, the cleaning of by-products is mostly done manually. One method is to use tools to rub or touch the by-products to ignite them, which then burn and are emitted as gases. Another method is to use solvents to wipe and dissolve the by-products, thus diluting and stabilizing them.

[0004] However, regardless of the cleaning method, it requires a high degree of human intervention and poses significant safety risks. Summary of the Invention

[0005] The main objective of this application is to provide a device for cleaning silicon carbide deposition byproducts, which aims to solve the safety hazards of current methods for cleaning silicon carbide byproducts.

[0006] To achieve the above objectives, this application provides a cleaning device for silicon carbide deposition byproducts. The cleaning device includes: a housing, a cone, an igniter, an air inlet pipe, and a filter assembly. The housing has a top and a bottom arranged opposite each other in a first direction. The bottom of the housing has a through hole, and the top of the housing has an air outlet. The cone passes through the through hole and its outer periphery is fixedly fitted to the edge of the through hole. One end of the cone inside the housing is a closed end, and the other end outside the housing is an open end. The diameter of the closed end is smaller than the diameter of the open end. The igniter is fixed at the closed end and located inside the cone. The air inlet pipe passes through the cone to connect the inner periphery of the cone with the interior of the housing. The filter assembly is disposed inside the housing.

[0007] Optionally, the cleaning device further includes: multiple telescopic components and rollers, wherein the multiple telescopic components are arranged around the outer periphery of the box and each has the freedom to extend and retract along the first direction; the rollers are fixed to the ends of the telescopic components away from the top of the box.

[0008] Optionally, the cleaning device further includes: an aluminum silicate needled blanket, which is fixed to the inner circumference of the cone; wherein, in the first direction, the aluminum silicate needled blanket covers the area between the air inlet pipe and the open end.

[0009] Optionally, the filter assembly includes: a centrifugal fan, which is fixed to the outside of the housing and communicates with the air outlet; along the path from the air inlet pipe to the air outlet, the filter assembly further includes a demisting layer, a filter layer and an adsorption layer stacked in sequence.

[0010] Optionally, a drain outlet is provided on the outer periphery of the housing, the drain outlet being attached to the bottom of the housing. The filter assembly further includes a spray section for circulating spray solution. The spray section includes a spray pipe, a spray head, and a spray pump. The spray pipe is located inside the housing, with one end extending to the side of the demisting layer facing the cone and the other end extending to the inner bottom of the housing. The spray head is fixed to the end of the spray pipe away from the bottom of the housing. The spray pump is fixed to the other end of the spray pipe.

[0011] Optionally, the cleaning device further includes a first pH sensor, which is disposed inside the housing to detect the spray solution.

[0012] Optionally, the cleaning device further includes: a second pH sensor and a particulate matter laser detection device. The second pH sensor is disposed at the outlet of the centrifugal fan; the particulate matter laser detection device is disposed at the outlet of the centrifugal fan.

[0013] Optionally, the igniter is a laser igniter, and the angle between the axial direction of the igniter and the first direction is α, where 10°≤α≤40°.

[0014] Optionally, the end of the air intake pipe connected to the cone is the first end, and the end of the air intake pipe away from the cone is the second end; wherein, in the first direction, the distance between the center point of the first end and the inner side of the bottom is b, the distance between the center point of the second end and the inner side of the bottom is c, and b > c.

[0015] Optionally, the demisting layer is filled with stainless steel wire mesh and swirl plates, the filter layer is filled with filter cotton, and the adsorption layer is filled with honeycomb activated carbon.

[0016] The present application provides a device for cleaning silicon carbide deposition byproducts. In use, the device is first moved above the condenser pipe, and the upper and lower pipe covers of the condenser pipe are removed. By changing the height of the device, the flared end of the cone is brought into contact with the condenser pipe opening. Then, the igniter is activated, causing the byproducts to burn and generate exhaust gas. The exhaust gas enters the housing through the inlet pipe, is filtered by the filter assembly, and is discharged from the outlet. This method effectively completes the byproduct treatment with minimal manual intervention. The subsequent exhaust gas is also treated before being discharged, making the cleaning process safer, more efficient, and more environmentally friendly. Attached Figure Description

[0017] To more clearly illustrate the prior art and the present invention, the accompanying drawings used in the description of the prior art and the embodiments of the present invention will be briefly introduced below. Obviously, the drawings described below are merely exemplary, and those skilled in the art can derive other drawings from the provided drawings without any creative effort.

[0018] The structures, proportions, sizes, etc. illustrated in this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed herein, and are not intended to limit the conditions under which the present invention can be implemented. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed herein.

[0019] Figure 1 A schematic diagram of the overall structure of a cleaning device for silicon carbide deposition byproducts provided in an embodiment of this application; Figure 2 for Figure 1 A schematic diagram illustrating the usage status of the embodiment; Figure 3 The diagram shows a schematic of a traditional deposition furnace structure; In the diagram: 1. Box body; 11. Drain outlet; 2. Conical barrel; 21. Aluminum silicate needled blanket; 3. Igniter; 4. Air inlet pipe; 51. Centrifugal fan; 52. Demisting layer; 53. Filter layer; 54. Adsorption layer; 55. Spray pipe; 56. Spray head; 57. Spray pump; 61. Telescopic component; 62. Roller; 7. First pH sensor.

[0020] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0022] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0023] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0024] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0025] The present application will now be described in detail with reference to the accompanying drawings and embodiments.

[0026] Figure 1 A schematic diagram of the overall structure of a cleaning device for silicon carbide deposition byproducts provided in an embodiment of this application; Figure 2 for Figure 1 A schematic diagram illustrating the usage status of the embodiment; Figure 3 The diagram shows a schematic of a traditional deposition furnace.

[0027] Specifically, such as Figure 1As shown, the first direction is the X direction. In this application, the first direction can be the direction of gravity. Figure 2 The black arrows indicate the direction of gas movement, and the dashed lines indicate the direction of laser irradiation from the laser igniter.

[0028] refer to Figure 1 and Figure 2 This application provides a cleaning device for silicon carbide deposition byproducts. The cleaning device may include: a housing 1, a cone 2, an igniter 3, an air inlet pipe 4, and a filter assembly. The housing 1 has a top and a bottom that are arranged opposite each other in a first direction. The bottom of the housing 1 has a through hole, and the top of the housing 1 has an air outlet. The cone 2 passes through the through hole and its outer periphery is fitted and fixed to the edge of the through hole. One end of the cone 2 inside the housing 1 is a closed end, and the other end of the cone 2 outside the housing 1 is an open end. The diameter of the closed end is smaller than the diameter of the open end. The igniter 3 is fixed at the closed end and located inside the cone 2. The air inlet pipe 4 passes through the cone 2 to connect the inner periphery of the cone 2 with the interior of the housing 1. The filter assembly is disposed inside the housing 1.

[0029] The present application provides a device for cleaning silicon carbide deposition byproducts. In use, the device is first moved above the condenser tube, and the upper and lower caps of the condenser tube are removed. By changing the height of the device, the flared end of the cone 2 contacts the opening of the condenser tube. Then, the igniter 3 is activated, causing the byproducts to burn and generate exhaust gas. The exhaust gas enters the housing 1 through the inlet pipe 4, is filtered by the filter assembly, and is discharged from the outlet. In this way, the byproducts can be treated with minimal human intervention. The subsequent exhaust gas is also treated before being discharged, making the cleaning process safer, more efficient, and more environmentally friendly.

[0030] Specifically, such as Figure 2 As shown, the open end of the cone 2 is funnel-shaped, which can be used to fit condenser tubes of different diameters, making it more convenient to use; The height of the cleaning device can be adjusted by raising it, thereby adjusting the height of the cone 2 so that the cone 2 fits against the upper end of the condenser tube.

[0031] In addition, the igniter 3 can be a laser igniter, which makes long-distance ignition more convenient. The laser igniter can be powered by a battery, which can be fixed to the outside of the housing 1. Alternatively, the laser igniter can be powered by connecting a power cord to an external power socket.

[0032] refer to Figure 2 In an exemplary embodiment, the cleaning device may further include: a plurality of telescopic members 61 and rollers 62, wherein the plurality of telescopic members 61 are arranged around the outer periphery of the housing 1 and each has a degree of freedom to extend and retract in a first direction; and the rollers 62 are fixed one-to-one with the ends of the telescopic members 61 away from the top of the housing 1.

[0033] Specifically, the telescopic component 61 can be a cylinder. The cylinder body is fixed to the housing 1, and the telescopic rod is downward with a roller 62 fixed at one end outside the cylinder body. In this way, the cleaning device can be moved by the roller 62, and the housing 1 can be raised and lowered by the extension and retraction of the cylinder, that is, the cone 2 can be raised and lowered. When the cylinder extends, the cone 2 rises, and when the cylinder retracts, the cone 2 falls.

[0034] Furthermore, the roller 62 can be a universal wheel, making it easier to move the cleaning device. The cleaning device can be moved to the side of the condenser pipe first, then the cylinder extends, driving the cone 2 to rise. The cleaning device is moved again so that the cone 2 is directly above the condenser pipe. At this time, the cylinder shortens, driving the cone 2 to fall. After the flared end of the cone 2 contacts and is fixed to the condenser pipe, the axis of the cone 2 coincides with the axis of the condenser pipe. The exhaust gas generated by the combustion of by-products at the condenser pipe can rise to the cone 2 and enter the interior of the housing 1 through the air inlet pipe 4.

[0035] It should be understood that after the cone 2 is fixed in contact with the condenser pipe, the movement freedom of the box 1 is locked by the casters, which limits the cleaning device and greatly improves the stability of the cleaning device during the cleaning process.

[0036] It should be understood that after cleaning is completed, the cylinder extends, causing the cone 2 to separate from the condenser tube. Then, the cleaning device can be removed and the upper and lower end caps of the condenser tube can be replaced.

[0037] refer to Figure 2 In an exemplary embodiment, the cleaning device may further include: an aluminum silicate needled blanket 21, which is fixed to the inner circumference of the cone 2; wherein, in the first direction, the aluminum silicate needled blanket 21 covers the area between the air inlet pipe 4 and the open end.

[0038] Specifically, the aluminum silicate needled blanket 21 covers the area between the intake pipe 4 and the open end. In this way, the aluminum silicate needled blanket 21 replaces the cone 2 in contact with the condenser pipe, greatly improving the sealing between the cone 2 and the condenser pipe and preventing combustion exhaust gas leakage. At the same time, the aluminum silicate needled blanket 21 has a good heat insulation effect, effectively preventing the high temperature generated during the combustion of by-products from damaging the cone 2, thus improving safety.

[0039] refer to Figure 2 In an exemplary embodiment, the filter assembly may include a centrifugal fan 51, which is fixed to the outside of the housing 1 and communicates with the air outlet; along the path from the air inlet pipe 4 to the air outlet, the filter assembly may also include a demisting layer 52, a filter layer 53 and an adsorption layer 54 stacked in sequence.

[0040] Specifically, the waste gas produced after the combustion of by-products mainly consists of three components: hydrogen chloride, particulate matter, and volatile organic compounds.

[0041] The demisting layer 52 is filled with stainless steel wire mesh and cyclone plates, the filter layer 53 is filled with filter cotton, and the adsorption layer 54 is filled with honeycomb activated carbon with an iodine value ≥650 to ensure adsorption effect.

[0042] It should be understood that the filter cotton and activated carbon need to be replaced after cleaning.

[0043] An alkaline solution (i.e., a spray solution) can be placed inside the chamber 1 to neutralize hydrogen chloride. After that, the gas passes through the demisting layer 52 for dewatering and demisting treatment. Then, the gas enters the filter layer 53, where particulate matter is filtered through filter cotton. Finally, the gas passes through the adsorption layer 54, where volatile organic compounds are adsorbed by activated carbon to complete the filtration.

[0044] It should be understood that when the centrifugal fan 51 is working, it draws the exhaust gas through the demister layer 52, the filter layer 53 and the adsorption layer 54, and finally discharges it from the outlet of the centrifugal fan.

[0045] refer to Figure 2 In an exemplary embodiment, a drain port 11 is provided on the outer periphery of the housing 1, and the drain port 11 is attached to the bottom of the housing 1. The filter assembly may also include a spray section to circulate the spray solution. The spray section may include a spray pipe 55, a spray head 56 and a spray pump 57. The spray pipe 55 is located inside the housing 1, with one end of the spray pipe 55 extending to the side of the demisting layer 52 facing the cone 2 and the other end extending to the inner side of the bottom of the housing 1. The spray head 56 is fixed to the end of the spray pipe 55 away from the bottom of the housing 1. The spray pump 57 is fixed to the other end of the spray pipe 55.

[0046] Specifically, the spray pump 57 absorbs the alkaline solution and delivers it to the spray head 56 through the spray pipe 55 for spraying. The sprayed alkaline solution falls back to the bottom of the tank 1 and is absorbed again by the spray pump 57, thus forming a circulating spraying process, which has a better effect on neutralizing hydrogen chloride.

[0047] At the same time, the sprayed alkaline solution falls and the exhaust gas rises, allowing the exhaust gas to come into more complete contact with the alkaline solution, thereby neutralizing the hydrogen chloride.

[0048] The drain port 11 is used to replace the alkaline solution.

[0049] In an exemplary embodiment, the cleaning device may further include a first pH sensor 7, which is disposed inside the housing 1 to detect the spray solution.

[0050] Specifically, the alkaline solution is detected by the first pH sensor 7. If the alkaline solution is weakly alkaline, it can continue to be used. If the alkaline solution is not weakly alkaline, it means that the alkaline solution needs to be replaced.

[0051] In an exemplary embodiment, the cleaning device may further include: a second pH sensor and a particulate matter laser detection device. The second pH sensor is disposed at the outlet of the centrifugal fan 51; the particulate matter laser detection device is disposed at the outlet of the centrifugal fan 51.

[0052] Specifically, a second pH sensor and a particulate matter laser detection device are installed at the outlet of the centrifugal fan 51 to detect whether the gas discharged from the centrifugal fan 51 is properly treated; the particulate matter laser detection device here can be a common gas particulate matter laser detection device.

[0053] refer to Figure 2 and Figure 3 In an exemplary embodiment, the igniter 3 is a laser igniter, and the angle between the axis of the igniter 3 and the first direction is α, and 10°≤α≤40°.

[0054] Specifically, such as Figure 2 As shown, Figure 2 The dashed line represents the laser irradiation path of igniter 3, that is, the axis of igniter 3. When 'a' is between 10° and 40°, it is convenient to irradiate the inner wall of the condenser tube, thereby igniting the by-products. 'a' can be 10°, 20°, 30°, 40°, etc., and can be set according to the actual situation. For example, if the inner diameter of the condenser tube is small, 'a' should be smaller to ensure that the laser can irradiate the inner wall of the condenser tube. If the inner diameter of the condenser tube is large, 'a' should be larger to ensure that the laser can irradiate the upper area of ​​the condenser tube, that is, the area where more by-products are deposited.

[0055] refer to Figure 2 In an exemplary embodiment, the end of the intake pipe 4 connected to the cone 2 is the first end, and the end of the intake pipe 4 away from the cone 2 is the second end; wherein, in the first direction, the distance between the center point of the first end and the inner side of the bottom is b, the distance between the center point of the second end and the inner side of the bottom is c, and b > c.

[0056] like Figure 2 As shown, when b > c, the end of the air inlet pipe 4 away from the cone 2 is tilted downwards, so that the sprayed solution will not fall into the air inlet pipe 4. Even if some solution splashes into the air inlet pipe 4, it will flow back to the box along the air inlet pipe 4 and will not enter the condenser pipe.

[0057] It should be noted that after using the cleaning device in this application and fixing the position of the cleaning device, the ignition can be remotely controlled, and components such as the centrifugal fan 51 and the spray pump 57 can be switched on and off. This avoids the safety risks of byproducts from manual close-range ignition, and at the same time avoids the corrosion of the surrounding environment and equipment by the exhaust gas and particulate matter generated by combustion, thus ensuring the health of the operators.

[0058] In addition, the cleaning time has been reduced from more than one hour for manual operation (including the wearing of protective equipment, preparation of safety facilities, and ventilation of smoke) to 20 minutes, greatly improving efficiency.

[0059] The above are merely preferred embodiments of this application and do not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A device for cleaning silicon carbide deposition byproducts, characterized in that, include: The box (1) has a top and a bottom that are arranged opposite to each other in a first direction. The bottom of the box (1) has a through hole and the top of the box (1) has an air outlet. A cone barrel (2) is inserted through the through hole and its outer periphery is fitted and fixed to the edge of the through hole. The end of the cone barrel (2) inside the box (1) is a closed end, and the end of the cone barrel (2) outside the box (1) is an open end. The diameter of the closed end is smaller than the diameter of the open end. Igniter (3) is fixed at the closed end and located inside the cone (2); An air intake pipe (4) is installed through the cone (2) to connect the inner circumference of the cone (2) with the interior of the box (1); The filter assembly is disposed inside the housing (1).

2. The cleaning apparatus for silicon carbide deposition byproducts as described in claim 1, characterized in that, The cleaning device also includes: Multiple telescopic components (61) are arranged around the outer periphery of the box (1) and each has the freedom to extend and retract along the first direction; Rollers (62) are fixed one-to-one with the telescopic component (61) at the end away from the top of the box (1).

3. The cleaning apparatus for silicon carbide deposition byproducts as described in claim 1, characterized in that, The cleaning device also includes: Aluminum silicate needled blanket (21) is fixed to the inner circumference of the cone (2); In the first direction, the aluminum silicate needled blanket (21) covers the area between the air inlet pipe (4) and the open end.

4. The cleaning apparatus for silicon carbide deposition byproducts as described in claim 1, characterized in that, The filtering component includes: Centrifugal fan (51) is fixed to the outside of the housing (1) and connected to the air outlet; Along the path from the air inlet pipe (4) to the air outlet, the filter assembly further includes a demisting layer (52), a filter layer (53), and an adsorption layer (54) stacked in sequence.

5. The cleaning apparatus for silicon carbide deposition byproducts as described in claim 4, characterized in that, The outer periphery of the box (1) is provided with a drain port (11), the drain port (11) is attached to the bottom of the box (1), and the filter assembly also includes a spray section to circulate the spray solution. The spray unit includes: The spray pipe (55) is located inside the box (1). One end of the spray pipe (55) extends to the side of the demisting layer (52) facing the cone (2), and the other end extends to the bottom inner side of the box (1). The spray head (56) is fixed to one end of the spray pipe (55) away from the bottom of the box (1); The spray pump (57) is fixed to the other end of the spray pipe (55).

6. The cleaning apparatus for silicon carbide deposition byproducts as described in claim 5, characterized in that, The cleaning device also includes: A first pH sensor (7) is installed inside the housing (1) to detect the spray solution.

7. The cleaning apparatus for silicon carbide deposition byproducts as described in claim 5, characterized in that, The cleaning device also includes: The second pH sensor is located at the outlet of the centrifugal fan (51); A particulate matter laser detection device is installed at the outlet of the centrifugal fan (51).

8. The cleaning apparatus for silicon carbide deposition byproducts as described in claim 1, characterized in that, The igniter (3) is a laser igniter, and the angle between the axial direction of the igniter (3) and the first direction is a, and 10°≤a≤40°.

9. The cleaning apparatus for silicon carbide deposition byproducts as described in claim 1, characterized in that, The end of the air intake pipe (4) connected to the cone (2) is the first end, and the end of the air intake pipe (4) away from the cone (2) is the second end; Wherein, in the first direction, the distance between the center point of the first end and the inner side of the bottom is b, the distance between the center point of the second end and the inner side of the bottom is c, and b > c.

10. The cleaning apparatus for silicon carbide deposition byproducts as described in claim 4, characterized in that, The demisting layer (52) is filled with stainless steel wire mesh and swirl plate, the filter layer (53) is filled with filter cotton, and the adsorption layer (54) is filled with honeycomb activated carbon.

Images