Flip-chip diode structure and manufacturing method

By forming arc-shaped grooves on both sides of the substrate and covering them with a dielectric layer, the problem of solder overflow and short circuit during the die bonding process of flip-chip Zener diodes is solved, thereby improving the yield of the packaging process and the reliability of the components.

CN122094119APending Publication Date: 2026-05-26TAIWAN ASIA SEMICONDUCTOR CORPORATION
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
TAIWAN ASIA SEMICONDUCTOR CORPORATION
Filing Date
2025-02-07
Publication Date
2026-05-26

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Abstract

This invention provides a flip-chip diode structure and its manufacturing method. The flip-chip diode structure includes a substrate, two junction regions, two metal electrodes, and a dielectric layer. The substrate has two arc-shaped grooves, respectively disposed on its two side edges. The two junction regions are disposed within the substrate. The two metal electrodes are respectively disposed on the same side of the substrate and electrically connected to one of the two junction regions. The dielectric layer covers the upper surface of the substrate between the two arc-shaped grooves and the two metal electrodes. Each of the two arc-shaped grooves is adjacent to the outer side of one of the two metal electrodes, and the maximum depth of the two junction regions within the substrate is less than the depth of the two arc-shaped grooves.
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