Backside illumination sensor and method of manufacturing the same
CN122095764APending Publication Date: 2026-05-26KLA CORP
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Patent Information
- Application Number
- CN202480059309.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2024-10-28
- Filing Date
- 2024-10-29
- Publication Date
- 2026-05-26
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Figure CN122095764A_ABST
Abstract
An image sensor includes a p-type silicon layer, a silicon layer disposed on the p-type silicon layer, a p-type SiGe layer disposed on the p-type silicon layer, a boron layer disposed on the p-type SiGe layer, and an anti-reflective coating disposed on the boron layer. Trenches can be formed in the image sensor such that the boron layer is disposed in the trenches.
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